A three-axis collimator and a measurement method for the three-axis collimator

Abstract

The invention discloses a three-axis collimator and a measuring method for the three-axis collimator. The device comprises a light source, a reflector module, a beam combining lens module, an objective lens module, a focusing lens, a beam splitter module, a first camera and at least one second camera. The objective lens module, the beam combining lens module, the focusing lens, the beam splitter module and the first camera are sequentially arranged on the same axis. The first camera is arranged on the back focal plane of the focusing lens transmitted by the beam splitter module, and the second camera is arranged on the back focal plane of the focusing lens reflected by the beam splitter module. The light incident direction of the reflector module is located in the light emitting direction of the light source, and the light emitting direction of the reflector module is located in the light incident direction of the beam combining lens module. The objective lens module is fixed on a motion module. The light beam emitted by the light source is sequentially reflected to the objective lens module via the reflector module and the beam combining lens module, a linear light beam is reflected to the beam splitter module via the objective lens module and transmitted to the first camera, and a fan-shaped light beam is reflected to the beam splitter module by the objective lens module and reflected to the second camera.

Description

Technical Field

[0001] The invention relates to the technical field of laser autocollimators, and in particular to a three-axis collimator and a measurement method of the three-axis collimator. Background Art

[0002] A collimator is an instrument that uses the principle of self-collimation of light to measure small angles. It has the advantages of simple operation, non-contact measurement, and flexible measurement distance. It is widely used in precision measurements such as angle detection of optical components, platform flatness detection, and straightness detection of precision guide rails.

[0003] When the existing collimator is used to measure the attitude of the motion module, it can effectively achieve the second-level precision measurement of the azimuth and pitch two-dimensional angles. That is, the straightness and flatness of the motion module can be measured. The straightness is the left-right difference caused by the motion module turning left or right when it moves along the motion direction; the flatness is the extreme height difference caused by the motion module on the ups and downslopes when the motion module moves along the motion direction due to the uneven surface of the motion direction. However, only measuring the straightness and flatness of the motion module cannot well determine the attitude of the motion module. For the motion module, there is also an important motion parameter, which is the rotation of the motion module along the motion direction, that is, roll, which is equivalent to the motion module swinging left and right. However, the traditional collimator can only measure the straightness and flatness, and cannot measure the roll angle of the motion module, so that the measurement accuracy of the collimator is not high, and the lack of a dimension makes the description of the state of the motion module incomplete.

[0004] In the process of implementing the present invention, the inventors found that there are at least the following problems in the prior art:

[0005] The existing collimator cannot measure the roll angle of the motion module, resulting in an incomplete description of the state of the motion module. Summary of the invention

[0006] The purpose of the present invention is to provide a three-axis collimator and a measurement method of the three-axis collimator to solve the technical problem that the existing collimator in the prior art cannot measure the roll angle of the motion module, resulting in an inability to fully describe the state of the motion module. The preferred technical solution among the many technical solutions provided by the present invention can produce many technical effects as described below.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] A three-axis collimator provided by the present invention comprises a light source, a reflector module, a beam combining lens module, an objective lens module, a focusing lens, a beam splitter module, a first camera and at least one second camera, wherein the objective lens module, the beam combining lens module, the focusing lens, the beam splitter module and the first camera are sequentially arranged on the same axis, and the first camera is arranged on the back focal plane of the focusing lens transmitted by the beam splitter module, and the second camera is arranged on the back focal plane of the focusing lens reflected by the beam splitter module; the light source and the reflector module are both arranged on the side of the axis where the focusing lens is located, and the light incident direction of the reflector module is located in the light emitting direction of the light source, and the light emitting direction of the reflector module is located in the light incident direction of the beam combining lens module; the objective lens module is fixed on a motion module, and the motion module can drive the objective lens module to perform synchronous motion;

[0009] The light beam emitted by the light source is reflected by the reflector module to the beam combining lens module, and then reflected by the beam combining lens module to the objective lens module. The objective lens module reflects a linear light beam and a fan-shaped light beam to the beam splitter module, and the linear light beam is transmitted to the first camera through the beam splitter module, and the fan-shaped light beam is reflected to the second camera through the beam splitter module.

[0010] Optionally, the objective lens module includes a cylindrical mirror, a plane beam splitter and a fixed seat, the cylindrical mirror and the plane beam splitter are both fixed on the fixed seat, fixedly connected to the motion module through the fixed seat, and the plane beam splitter is arranged between the cylindrical mirror and the beam combining mirror module; the cylindrical surface of the cylindrical mirror facing the plane beam splitter is convex or concave.

[0011] Optionally, the light source includes at least one laser, the reflector module includes at least one reflector, the beam combining mirror module includes at least one beam combining mirror, and one laser corresponds to one reflector and one beam combining mirror.

[0012] Optionally, when the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, and the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror; the first laser is arranged on a first side of the focusing mirror, the light incident direction of the first reflector is located in the light emitting direction of the first laser, and the light incident direction of the first beam combining mirror is located in the light emitting direction of the first reflector; the second laser is arranged on a second side of the focusing mirror, the light incident direction of the second reflector is located in the light emitting direction of the second laser, and the light incident direction of the second beam combining mirror is located in the light emitting direction of the second reflector.

[0013] Optionally, the first laser and the second laser can emit light beams of different colors or light beams of the same color. When the first laser and the second laser respectively emit light beams of different colors, the plane beam splitter and the beam splitter module are both dichroic mirrors; when the first laser and the second laser emit light beams of the same color, there is a time difference between the light emission time of the first laser and the light emission time of the second laser.

[0014] Optionally, when the light source includes a third laser, the reflector module includes a third reflector, and the beam combining mirror module includes a third beam combining mirror; the third laser is arranged on the first side or the second side of the focusing mirror, the light incident direction of the third reflector is located in the light emitting direction of the third laser, and the light incident direction of the third beam combining mirror is located in the light emitting direction of the third reflector; the third laser is a pulsed laser or a multi-frequency bandwidth laser, and the third laser is used to successively emit different-color light beams to the objective lens module.

[0015] A measurement method of a three-axis collimator is applied to the three-axis collimator as described above, and the method comprises:

[0016] The light source emits a light beam and is incident on the objective lens module fixed on the motion module;

[0017] The objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto the beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module.

[0018] Optionally, the light source emits a light beam and incident on an objective lens module fixed on the motion module, comprising:

[0019] When the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, and the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror, the first laser emits a first light beam to the corresponding first reflector, the second laser emits a second light beam to the corresponding second reflector, the first light beam and the second light beam are respectively reflected by the first reflector and the second reflector to the corresponding beam combining mirror module, the first light beam and the second light beam are combined by the beam combining mirror module and reflected to the objective lens module, wherein the first light beam and the second light beam are heterochromatic light beams;

[0020] Or when the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, and the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror, the first laser and the second laser respectively emit light beams of the same color to the corresponding first reflector and the corresponding second reflector through a time difference, and are reflected to the corresponding beam combining mirror module by the reflector module, and the two light beams of the same color are combined by the beam combining mirror module and reflected to the objective lens module;

[0021] Or when the light source includes a third laser, the reflector module includes a third reflector, and the beam combining mirror module includes a third beam combining mirror, the third laser successively emits different-color light beams to the corresponding third reflector, which are reflected by the third reflector to the corresponding third beam combining mirror, and the two different-color light beams are combined by the third beam combining mirror and reflected to the objective lens module.

[0022] Optionally, the objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto a beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, including:

[0023] When the first laser and the second laser of the light source emit light beams of different colors respectively, the plane beam splitter of the objective lens module reflects the first light beam emitted by the first laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the second laser to the cylindrical mirror of the objective lens module, and the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, transmits the first light beam to the first camera through the beam splitter module, and reflects the second light beam to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module;

[0024] When the first laser and the second laser of the light source respectively emit light beams of the same color through a time difference, the plane beam splitter of the objective lens module reflects the first light beam emitted by the first laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the second laser to the cylindrical mirror of the objective lens module, and the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, and the first light beam reflected by the plane beam splitter is transmitted to the first camera through the beam splitter module, and the second light beam reflected by the cylindrical mirror is reflected to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module.

[0025] Optionally, the objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto a beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, further comprising:

[0026] When the third laser of the light source successively emits light beams of different colors respectively, the plane beam splitter of the objective lens module reflects the first light beam emitted by the third laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the third laser to the cylindrical mirror of the objective lens module, the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, transmits the first light beam to the first camera through the beam splitter module, and reflects the second light beam to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module.

[0027] Implementing one of the above technical solutions of the present invention has the following advantages or beneficial effects:

[0028] The present invention reflects the first light emitted by the light source as a straight light beam to the spectroscope module through the objective lens module, and transmits it to the first camera through the spectroscope module, so that the first camera obtains the light spot information and detects the straightness and flatness of the motion module. The second light emitted by the light source is reflected as a fan-shaped light beam to the spectroscope module through the objective lens module, and reflects it to the second camera through the spectroscope module, so that the second camera obtains the light information and detects the roll angle of the motion module, thereby accurately measuring the posture of the motion module. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. It is obvious that the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0030] Figure 1 is a schematic structural diagram of Embodiment 1 of the present invention;

[0031] Figure 2 is a structural diagram of Embodiment 2 of the present invention;

[0032] Figure 3 It is a flow chart of the third embodiment of the present invention.

[0033] In the figure: 1. light source; 11. first laser; 12. second laser; 13. third laser; 2. reflector module; 21. first reflector; 22. second reflector; 23. third reflector; 3. beam combining mirror module; 31. first beam combining mirror; 32. second beam combining mirror; 33. third beam combining mirror; 4. objective lens module; 41. cylindrical mirror; 42. plane beam splitter; 43. fixing seat; 5. focusing mirror; 6. beam splitter module; 7. first camera; 8. second camera. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present invention clearer, the various exemplary embodiments to be described below will refer to the corresponding drawings, which constitute a part of the exemplary embodiments, wherein various exemplary embodiments that may be used to implement the present invention are described. Unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation methods described in the following exemplary embodiments do not represent all implementation methods consistent with the present disclosure. It should be understood that they are only examples of processes, methods, devices, etc. that are consistent with some aspects of the present disclosure as detailed in the attached claims, and other embodiments may also be used, or the embodiments listed herein may be modified in structure and function without departing from the scope and essence of the present invention.

[0035] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", etc. indicate the orientation or positional relationship based on the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the elements referred to must have a specific orientation, be constructed and operated in a specific orientation. The terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. The term "multiple" means two or more. The terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a communication connection, a direct connection, an indirect connection through an intermediate medium, and can be the internal connection of two elements or the interaction relationship between two elements. The term "and / or" includes any and all combinations of one or more related listed items. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0036] In order to illustrate the technical solution of the present invention, a specific embodiment is used below for description, and only the parts related to the embodiment of the present invention are shown.

[0037] Embodiment 1:

[0038] like Figure 1 As shown, the present invention provides a three-axis collimator, including a light source 1, a reflector module 2, a beam combiner module 3, an objective lens module 4, a focusing lens 5, a beam splitter module 6, a first camera 7 and at least one second camera 8, wherein the objective lens module 4, the beam combiner module 3, the focusing lens 5, the beam splitter module 6 and the first camera 7 are sequentially arranged on the same axis, and the first camera 7 is arranged on the back focal plane of the focusing lens 5 transmitted by the beam splitter module 6, and the second camera 8 is arranged on the back focal plane of the focusing lens 5 reflected by the beam splitter module 6. The light source 1 and the reflector module 2 are both arranged on the side of the axis where the focusing lens 5 is located, and the light incident direction of the reflector module 2 is located in the light emitting direction of the light source 1, and the light emitting direction of the reflector module 2 is located in the light incident direction of the beam combiner module 3. The objective lens module 4 is fixed on the motion module, and the motion module can drive the objective lens module 4 to move synchronously. The light beam emitted by the light source 1 is reflected by the reflector module 2 to the beam combiner module 3, and then reflected by the beam combiner module 3 to the objective lens module 4. The objective lens module 4 reflects a linear light beam and a fan-shaped light beam to the beam splitter module 6, and the linear light beam is transmitted to the first camera 7 through the beam splitter module 6, and the fan-shaped light beam is reflected to the second camera 8 through the beam splitter module 6.

[0039] Specifically, the light source 1, the reflector module 2, the beam combining lens module 3, the focusing lens 5, the beam splitter module 6, the first camera 7 and the second camera 8 are all fixed on the same platform, the objective lens module 4 is fixed on the motion module, and the objective lens module 4 is arranged corresponding to the beam combining lens module 3. The light incident direction of the reflector module 2 is located in the light emitting direction of the light source 1, and the light emitting direction of the reflector module 2 is located in the light incident direction of the beam combining lens module 3, so that the light beam emitted by the light source 1 can be incident on the reflector module 2, emitted to the beam combining lens module 3 through the reflector module 2, reflected to the objective lens module 4 through the beam combining lens module 3, and reflected to the beam splitter module 6 through the objective lens module 4. The spectroscope module 6 can transmit the rear focal plane of the focusing mirror 5 to the back of the spectroscope module 6, and reflect the rear focal plane of the focusing mirror 5 to the side of the spectroscope module 6. The first camera 7 is set on the rear focal plane of the focusing mirror 5 transmitted by the spectroscope module 6, so that the first camera 7 can obtain the light beam transmitted by the spectroscope module 6. The second camera 8 is set on the rear focal plane of the focusing mirror 5 reflected by the spectroscope module 6, so that the second camera 8 can obtain the light beam reflected by the spectroscope module 6, thereby detecting the posture of the objective lens module 4. Since the objective lens module 4 is fixed on the motion module, the motion module can lead the objective lens module 4 to move synchronously, so that the detected posture of the objective lens module 4 is the posture of the motion module, and the detected posture of the motion module includes the straightness, flatness and roll angle of the motion module.

[0040] More specifically, the number of the second cameras 8 can be selected as one or two according to actual needs. When the number of the second camera 8 is one, the second camera 8 is arranged on the rear focal plane of the focusing mirror 5 on the first side or the second side of the spectroscope module 6 reflected by the spectroscope module 6. When the number of the second cameras 8 is two, one second camera 8 is arranged on the first side of the spectroscope module 6, the other second camera 8 is arranged on the second side of the spectroscope module 6, and both second cameras 8 are arranged on the rear focal plane of the focusing mirror 5 reflected by the spectroscope module 6. The two second cameras 8 cooperate with each other so that the fan-shaped light beam reflected by the cylindrical mirror 41 reaches the spectroscope module 6, and is reflected by the spectroscope module 6 to the second cameras 8 on both sides. The light beam reflected by the spectroscope module 6 is detected on the left and right sides by the two second cameras 8, so that longer light information is obtained, and the long light information can improve the accuracy of measuring the roll angle.

[0041] The present invention reflects the first light emitted by the light source 1 as a straight light beam to the spectroscope module 6 through the objective lens module 4, and transmits it to the first camera 7 through the spectroscope module 6, so that the first camera 7 obtains the light spot information and detects the straightness and flatness of the motion module. The second light emitted by the light source 1 is reflected as a fan-shaped light beam to the spectroscope module 6 through the objective lens module 4, and is reflected to the second camera 8 through the spectroscope module 6, so that the second camera 8 obtains the light information and detects the roll angle of the motion module, thereby accurately measuring the posture of the motion module.

[0042] As an optional implementation, the objective lens module 4 includes a cylindrical mirror 41, a plane beam splitter 42 and a fixing seat 43, the cylindrical mirror 41 and the plane beam splitter 42 are both fixed on the fixing seat 43, fixedly connected to the motion module through the fixing seat 43, and the plane beam splitter 42 is arranged between the cylindrical mirror 41 and the beam combining mirror module 3. The cylindrical surface of the cylindrical mirror 41 facing the adjacent plane beam splitter 42 is a convex surface or a concave surface. Specifically, the cylindrical mirror 41 and the plane beam splitter 42 are arranged parallel to each other, the plane beam splitter 42 is arranged between the cylindrical mirror 41 and the beam combining mirror module 3, and the plane beam splitter 42 is arranged corresponding to the beam combining mirror module 3. The cylindrical mirror 41 and the plane beam splitter 42 are both fixed on the fixing seat 43, and are fixed on the motion module through the fixing seat 43, so that when the motion module moves, the cylindrical mirror 41 and the plane beam splitter 42 can be driven to move synchronously, so that the first camera 7 and the second camera 8 can measure the posture of the objective lens module 4 through the linear light beam and the fan-shaped light beam reflected by the objective lens module 4, that is, the posture of the motion module. The cylindrical surface adjacent to the plane beam splitter 42 on the cylindrical mirror 41 is a convex surface or a concave surface, and the light beam emitted by the light source 1 is reflected by the cylindrical surface, expanded in the horizontal direction in a fan shape and incident on the beam splitter module 6, so that the beam splitter module 6 is reflected to the second camera 8, so that the light information obtained by the second camera 8 is used to determine the roll angle of the motion module according to the inclination of the light information.

[0043] As an optional implementation, the light source 1 includes at least one laser, the reflector module 2 includes at least one reflector, and the beam combiner module 3 includes at least one beam combiner, and one laser corresponds to one reflector and one beam combiner. Specifically, the number of lasers, reflectors and beam combiners can be set according to actual needs. The three-axis collimator is provided with at least one laser, at least one reflector and at least one beam combiner to ensure that a light beam can be emitted and incident on the objective lens module 4, so as to realize the posture detection of the objective lens module 4 and the motion module. Each laser is provided with a corresponding reflector and beam combiner to ensure that the light beam emitted by each laser can be reflected onto the motion module.

[0044] As an optional embodiment, when the light source 1 includes the first laser 11 and the second laser 12, the reflector module 2 includes the first reflector 21 and the second reflector 22, and the beam combining mirror module 3 includes the first beam combining mirror 31 and the second beam combining mirror 32. The first laser 11 is arranged on the first side of the focusing mirror 5, the light incident direction of the first reflector 21 is located in the light emitting direction of the first laser 11, and the light incident direction of the first beam combining mirror 31 is located in the light emitting direction of the first reflector 21. The second laser 12 is arranged on the second side of the focusing mirror 5, the light incident direction of the second reflector 22 is located in the light emitting direction of the second laser 12, and the light incident direction of the second beam combining mirror 32 is located in the light emitting direction of the second reflector 22. Specifically, the light beam emitted by the first laser 11 can be incident on the first reflector 21, and reflected to the first beam combining mirror 31 by the first reflector 21. The light beam emitted by the second laser 12 can be incident on the second reflector 22, and reflected to the second beam combining mirror 32 by the second reflector 22. The first beam combining mirror 31 and the second beam combining mirror 32 cooperate with each other to combine the light beams emitted by the first laser 11 and the second laser 12 into a parallel and overlapping light beam to the objective lens module 4 .

[0045] As an optional embodiment, the first laser 11 and the second laser 12 can emit different-color beams or the same-color beams. When the first laser 11 and the second laser 12 emit different-color beams, respectively, the plane beam splitter 42 and the beam splitter module 6 are both dichroic mirrors. When the first laser 11 and the second laser 12 emit the same-color beam, there is a time difference between the light emission time of the first laser 11 and the light emission time of the second laser 12. Specifically, the first laser 11 and the second laser 12 can emit different-color beams or the same-color beams according to actual needs. The beam emitted by the first laser 11 can be selected as a green beam, and the beam emitted by the second laser 12 can be selected as a red beam. When the first laser 11 and the second laser 12 emit different-color beams, respectively, the plane beam splitter 42 and the beam splitter module 6 are set as dichroic mirrors, the plane beam splitter 42 can reflect the green beam, and transmit the red beam to the cylindrical mirror 41, and the beam splitter module 6 is opposite to the plane beam splitter 42, and can transmit the green beam to the first camera 7 and reflect the red beam to the second camera 8. When the first laser 11 and the second laser 12 emit the same color beam, the plane beam splitter 42 and the beam splitter module 6 are both ordinary beam splitters. The beams emitted by the first laser 11 and the second laser 12 have polarizations and wavelengths in different directions. The plane beam splitter 42 and the beam splitter module 6 can reflect beams of different polarization directions according to the reflective selectivity for light characteristics. For example, the first laser 11 emits a horizontally polarized beam, and the second laser 12 emits a vertically polarized beam. The plane beam splitter 42 can reflect the horizontally polarized beam and transmit the vertically polarized beam to the cylindrical mirror 41, while the beam splitter module 6 is opposite to the plane beam splitter 42 and can transmit the horizontally polarized beam to the first camera 7 and reflect the vertically polarized beam to the second camera 8. In addition, when the first laser 11 and the second laser 12 emit the same color beam, there is a time difference between the light emission time of the first laser 11 and the light emission time of the second laser 12, and the time difference can be selected to be 1ms. The principle of light emission of the light source 1 is that when the first laser 11 emits a light beam, after 1 ms, the second laser 12 emits a light beam.

[0046] When the first laser 11 and the second laser 12 emit light beams of different colors, the working principle of the three-axis collimator of this embodiment is as follows:

[0047] The first laser 11 emits a first light beam to the first reflector 21, which is reflected by the first reflector 21 to the first beam combiner 31, reflected by the first beam combiner 31 to the plane beam splitter 42, and reflected by the plane beam splitter 42 to the beam splitter module 6. The first light beam reflected to the beam splitter module 6 is transmitted by the beam splitter module 6 to the first camera 7, and is photographed by the first camera 7 to obtain light spot information. The straightness and flatness of the plane beam splitter 42 are determined by the light spot information, thereby determining the straightness and flatness of the motion module.

[0048] While the first laser 11 emits the first light beam, the second laser 12 emits the second light beam to the second reflector 22, which is reflected by the second reflector 22 to the second beam combining mirror 32, and then reflected by the second beam combining mirror 32 to the first beam combining mirror 31, and then incident on the plane beam splitter 42 through the first beam combining mirror 31. The second light beam is incident on the cylindrical mirror 41 through the plane beam splitter 42, and then reflected by the cylindrical mirror 41 to the beam splitter module 6. When the cylindrical mirror 41 reflects the second light beam, it spreads out in a fan shape along the horizontal plane, and the second light beam cannot be transmitted by the beam splitter module 6, but can only be reflected by the beam splitter module 6 to the second camera 8, and then photographed by the second camera 8. Since the fan-shaped light beam is incident on the dichroic mirror as light, the second camera 8 obtains the light information, and determines the roll angle of the cylindrical mirror 41 through the light information, thereby determining the roll angle of the motion module.

[0049] When the first laser 11 and the second laser 12 emit light beams of the same color, the working principle of the three-axis collimator of this embodiment is the same as described above, except that there is a time difference between the emission times of the first laser 11 and the second laser 12 .

[0050] Embodiment 2:

[0051] like Figure 2 As shown, the difference between the second embodiment and the first embodiment is that: when the light source 1 includes the third laser 13, the reflector module 2 includes the third reflector 23, and the beam combining mirror module 3 includes the third beam combining mirror 33. The third laser 13 is arranged on the first side or the second side of the focusing mirror 5, the light incident direction of the third reflector 23 is located in the light emitting direction of the third laser 13, and the light incident direction of the third beam combining mirror 33 is located in the light emitting direction of the third reflector 23. The third laser 13 is a pulsed laser or a multi-frequency bandwidth laser, and the third laser 13 is used to successively emit different-color light beams to the objective lens module 4. Specifically, except for the above differences, the other structures of the three-axis collimator of this embodiment are the same. When only one laser, that is, the third laser 13, is arranged on the side of the focusing mirror 5, correspondingly, only one reflector and one beam combining mirror, that is, the third reflector 23 and the third beam combining mirror 33, need to be arranged accordingly, which can reduce devices and save costs. The third laser 13 may be a pulsed laser or a multi-frequency broadband laser. The third laser 13 can emit two light beams of different colors within a preset time difference. Therefore, the plane beam splitter 42 and the beam splitter module 6 are both configured as dichroic mirrors.

[0052] More specifically, the third laser 13 first emits a first light beam to the corresponding third reflector 23, which is reflected by the third reflector 23 to the corresponding third beam combining mirror 33, and then reflected by the third beam combining mirror 33 to the plane beam splitter 42, and then reflected by the plane beam splitter 42 to the beam splitter module 6. The first light beam reflected to the beam splitter module 6 is transmitted by the beam splitter module 6 to the first camera 7, and is photographed by the first camera 7 to obtain the light spot information. The straightness and flatness of the objective lens module 4 are determined by the light spot information, thereby determining the straightness and flatness of the motion module. After the third laser 13 emits a first light beam, after a preset time difference, the third laser 13 again emits a second light beam to the corresponding third reflector 23, which is reflected by the third reflector 23 to the corresponding third beam combining mirror 33, which is reflected by the third beam combining mirror 33 to the plane beam splitter 42, which is transmitted to the cylindrical mirror 41 through the plane beam splitter 42, which is reflected by the cylindrical mirror 41 to the beam splitter module 6, which is reflected by the beam splitter module 6 to the second camera 8, which is photographed by the second camera 8, and light information is obtained. The roll angle of the cylindrical mirror 41 is determined by the light information, thereby determining the roll angle of the motion module.

[0053] The colors of the two light beams emitted by the third laser 13 can be adaptively set according to actual needs, and it is only necessary to ensure that the colors of the two light beams are different, and the dichroic mirror is adaptively set according to the color of the light beam emitted by the third laser 13. The first light beam emitted by the third laser 13 can be selected as a green light beam, and the second light beam emitted by the third laser 13 can be selected as a red light beam.

[0054] Embodiment three:

[0055] like Figure 3 As shown, a measurement method of a three-axis collimator is applied to the three-axis collimator of embodiment 1, and the method includes:

[0056] S10, the light source emits a light beam and the light beam is incident on the objective lens module fixed on the motion module;

[0057] S20, the objective lens module reflects the incident light beam into a straight light beam and a fan-shaped light beam onto the spectroscope module, transmits the straight light beam to the first camera through the spectroscope module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module. Specifically, the light source emits a light beam and is incident on the objective lens module fixed on the motion module, which is used to scan the posture of the objective lens module and the motion module. The first camera obtains the information of the straight light beam reflected by the objective lens module, and the second camera obtains the information of the fan-shaped light beam reflected by the objective lens module, thereby measuring the straightness, flatness and roll angle of the motion module, and the posture of the motion module can be accurately determined by the straightness, flatness and roll angle.

[0058] As an optional implementation, when the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror, and the light source emits a light beam and is incident on an objective lens module fixed on the motion module, including: the first laser emits a first light beam to the corresponding first reflector, the second laser emits a second light beam to the corresponding second reflector, the first light beam and the second light beam are respectively reflected by the first reflector and the second reflector to the corresponding beam combining mirror module, the first light beam and the second light beam are combined by the beam combining mirror module and reflected to the objective lens module, wherein the first light beam and the second light beam are heterochromatic light beams. Or the first laser and the second laser respectively emit the same color light beams to the corresponding first reflector and the second reflector through a time difference, the light beams are reflected by the reflector module to the corresponding beam combining mirror module, the two same color light beams are combined by the beam combining mirror module and reflected to the objective lens module. Specifically, the first laser and the second laser can emit light beams at the same time. At this time, the light beams emitted by the first laser and the second laser are heterochromatic light beams. The two heterochromatic light beams can be split by a dichroic mirror and incident on the first camera and the second camera respectively. The first laser and the first laser can also emit the same color light beam through a time difference. A time difference is set between the emission time of the first laser and the emission time of the second laser, so that the objective lens module can control the plane beam splitter or cylindrical mirror to emit, so that the light beams emitted by the two lasers can be respectively acquired by the first camera and the second camera. The light beams emitted by the first laser are emitted to the objective lens module through the first reflector and the first beam combiner in sequence, and the light beams emitted by the second laser are reflected to the objective lens module through the second reflector and the second beam combiner in sequence.

[0059] As an optional implementation, the objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto the beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, including:

[0060] When the first laser and the second laser of the light source emit light beams of different colors respectively, the plane beam splitter of the objective lens module reflects the first beam emitted by the first laser as a straight beam to the beam splitter module, and transmits the second beam emitted by the second laser to the cylindrical mirror of the objective lens module. The cylindrical mirror reflects the second beam as a fan-shaped beam to the beam splitter module, transmits the first beam to the first camera through the beam splitter module, and reflects the second beam to the second camera, so that the first camera obtains the light spot information to measure the straightness and flatness of the motion module, and the second camera obtains the light information to measure the roll angle of the motion module. When the first laser and the second laser of the light source respectively emit light beams of the same color through a time difference, the plane beam splitter of the objective lens module reflects the first light beam emitted by the first laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the second laser to the cylindrical mirror of the objective lens module. The cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module. The first light beam reflected by the plane beam splitter is transmitted to the first camera through the beam splitter module, and the second light beam reflected by the cylindrical mirror is reflected to the second camera, so that the first camera obtains the light spot information to measure the straightness and flatness of the motion module, and the second camera obtains the light information to measure the roll angle of the motion module.

[0061] Specifically, after the objective lens module receives the light beams emitted by the first laser and the second laser, the light beam emitted by the first laser is reflected by the plane beam splitter as a straight beam to the beam splitter module, and then transmitted to the first camera through the beam splitter module, so that the first camera obtains the light spot information, and the position of the light spot information on the coordinate axis on the target surface of the first camera is determined, thereby determining the straightness and flatness of the motion module. The light beam emitted by the second laser is reflected by the cylindrical mirror as a fan-shaped beam to the beam splitter module, and then reflected to the second camera through the beam splitter module, so that the second camera obtains the light information, and the angle between the light information and the X-axis of the coordinate axis on the target surface of the second camera is determined, thereby determining the roll angle of the motion module. The posture of the motion module can be accurately determined by the obtained straightness, flatness and roll angle.

[0062] Embodiment 4:

[0063] A measurement method of a three-axis collimator is applied to the three-axis collimator of the second embodiment, and the method comprises:

[0064] The light source emits a light beam and is incident on the objective lens module fixed on the motion module;

[0065] The objective lens module reflects the incident light beam into a linear beam and a fan-shaped beam onto the spectroscope module, transmits the linear beam to the first camera through the spectroscope module, and reflects the fan-shaped beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module.

[0066] As an optional implementation, when the light source includes a third laser, the reflector module includes a third reflector, and the beam combining mirror module includes a third beam combining mirror; the light source emits a light beam and is incident on an objective lens module fixed on the motion module, including:

[0067] The third laser successively emits light beams of different colors to the corresponding third reflector, which are reflected by the third reflector to the corresponding third beam combining mirror. The two light beams of different colors are combined by the third beam combining mirror and reflected to the objective lens module.

[0068] As an optional implementation, the objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto the beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, including:

[0069] When the third laser of the light source successively emits light beams of different colors, the plane beam splitter of the objective lens module reflects the first light beam emitted by the third laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the third laser to the cylindrical mirror of the objective lens module. The cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module. The first light beam is transmitted to the first camera through the beam splitter module, and the second light beam is reflected to the second camera, so that the first camera obtains the light spot information to measure the straightness and flatness of the motion module, and the second camera obtains the light information to measure the roll angle of the motion module.

[0070] The above description is only the preferred embodiment of the present invention. It is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application belong to the protection scope of the present invention.

Claims

1. A three-axis collimator, characterized in that: The invention comprises a light source (1), a reflector module (2), a beam combining lens module (3), an objective lens module (4), a focusing lens (5), a beam splitter module (6), a first camera (7) and at least one second camera (8), wherein the objective lens module (4), the beam combining lens module (3), the focusing lens (5), the beam splitter module (6) and the first camera (7) are sequentially arranged on the same axis, and the first camera (7) is arranged on the rear focal plane of the focusing lens (5) transmitted by the beam splitter module (6), and the second camera (8) is arranged The light source (1) and the reflector module (2) are both arranged on the side of the axis of the focusing mirror (5), and the light incident direction of the reflector module (2) is located in the light emitting direction of the light source (1), and the light emitting direction of the reflector module (2) is located in the light incident direction of the beam combining mirror module (3); the objective lens module (4) is fixed on the motion module, and the motion module can drive the objective lens module (4) to move synchronously; The light beam emitted by the light source (1) is reflected by the reflector module (2) to the beam combining lens module (3), and then reflected by the beam combining lens module (3) to the objective lens module (4), and then reflected by the objective lens module (4) to produce a linear light beam and a fan-shaped light beam to the beam splitter module (6), and then the linear light beam is transmitted to the first camera (7) through the beam splitter module (6), and then the fan-shaped light beam is reflected by the beam splitter module (6) to the second camera (8).

2. The three-axis collimator according to claim 1, characterized in that: The objective lens module (4) comprises a cylindrical mirror (41), a plane beam splitter (42) and a fixing seat (43); the cylindrical mirror (41) and the plane beam splitter (42) are both fixed on the fixing seat (43) and fixedly connected to the motion module via the fixing seat (43); and the plane beam splitter (42) is arranged between the cylindrical mirror (41) and the beam combining mirror module (3); and the cylindrical surface of the cylindrical mirror (41) facing the plane beam splitter (42) is a convex surface or a concave surface.

3. The three-axis collimator according to claim 2, characterized in that: The light source (1) comprises at least one laser, the reflector module (2) comprises at least one reflector, the beam combining mirror module (3) comprises at least one beam combining mirror, and one laser corresponds to one reflector and one beam combining mirror.

4. The three-axis collimator according to claim 3, characterized in that: When the light source (1) comprises a first laser (11) and a second laser (12), the reflector module (2) comprises a first reflector (21) and a second reflector (22), and the beam combining mirror module (3) comprises a first beam combining mirror (31) and a second beam combining mirror (32); the first laser (11) is arranged on a first side of the focusing mirror (5), the light incident direction of the first reflector (21) is located in a light emitting direction of the first laser (11), and the light incident direction of the first beam combining mirror (31) is located in a light emitting direction of the first reflector (21); the second laser (12) is arranged on a second side of the focusing mirror (5), the light incident direction of the second reflector (22) is located in a light emitting direction of the second laser (12), and the light incident direction of the second beam combining mirror (32) is located in a light emitting direction of the second reflector (22).

5. The three-axis collimator according to claim 4, characterized in that: The first laser (11) and the second laser (12) are capable of emitting light beams of different colors or light beams of the same color. When the first laser (11) and the second laser (12) emit light beams of different colors respectively, the plane beam splitter (42) and the beam splitter module (6) are both dichroic mirrors. When the first laser (11) and the second laser (12) emit light beams of the same color, there is a time difference between the light emission time of the first laser (11) and the light emission time of the second laser (12).

6. The three-axis collimator according to claim 3, characterized in that: When the light source (1) includes a third laser (13), the reflector module (2) includes a third reflector (23), and the beam combining mirror module (3) includes a third beam combining mirror (33); the third laser (13) is arranged on a first side or a second side of the focusing mirror (5), the light incident direction of the third reflector (23) is located in a light emitting direction of the third laser (13), and the light incident direction of the third beam combining mirror (33) is located in a light emitting direction of the third reflector (23); the third laser (13) is a pulsed laser or a multi-frequency broadband laser, and the third laser (13) is used to successively emit light beams of different colors to the objective lens module (4).

7. A measurement method of a three-axis collimator, characterized in that: Applied to the three-axis collimator according to any one of claims 1 to 6, the method comprises: The light source emits a light beam and is incident on the objective lens module fixed on the motion module; The objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto the beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module.

8. The measuring method of the three-axis collimator according to claim 7, characterized in that: The light source emits a light beam and is incident on an objective lens module fixed on the motion module, comprising: When the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, and the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror, the first laser emits a first light beam to the corresponding first reflector, the second laser emits a second light beam to the corresponding second reflector, the first light beam and the second light beam are respectively reflected by the first reflector and the second reflector to the corresponding beam combining mirror module, the first light beam and the second light beam are combined by the beam combining mirror module and reflected to the objective lens module, wherein the first light beam and the second light beam are heterochromatic light beams; Or when the light source includes a first laser and a second laser, the reflector module includes a first reflector and a second reflector, and the beam combining mirror module includes a first beam combining mirror and a second beam combining mirror, the first laser and the second laser respectively emit light beams of the same color to the corresponding first reflector and the corresponding second reflector through a time difference, and are reflected to the corresponding beam combining mirror module by the reflector module, and the two light beams of the same color are combined by the beam combining mirror module and reflected to the objective lens module; Or when the light source includes a third laser, the reflector module includes a third reflector, and the beam combining mirror module includes a third beam combining mirror, the third laser successively emits different-color light beams to the corresponding third reflector, which are reflected by the third reflector to the corresponding third beam combining mirror, and the two different-color light beams are combined by the third beam combining mirror and reflected to the objective lens module.

9. The measuring method of the three-axis collimator according to claim 8, characterized in that: The objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto a beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, including: When the first laser and the second laser of the light source emit light beams of different colors respectively, the plane beam splitter of the objective lens module reflects the first light beam emitted by the first laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the second laser to the cylindrical mirror of the objective lens module, and the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, transmits the first light beam to the first camera through the beam splitter module, and reflects the second light beam to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module; When the first laser and the second laser of the light source respectively emit light beams of the same color through a time difference, the plane beam splitter of the objective lens module reflects the first light beam emitted by the first laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the second laser to the cylindrical mirror of the objective lens module, and the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, and the first light beam reflected by the plane beam splitter is transmitted to the first camera through the beam splitter module, and the second light beam reflected by the cylindrical mirror is reflected to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module.

10. The measuring method of the three-axis collimator according to claim 8, characterized in that: The objective lens module reflects the incident light beam into a linear light beam and a fan-shaped light beam onto a beam splitter module, transmits the linear light beam to the first camera through the beam splitter module, and reflects the fan-shaped light beam to the second camera, so that the first camera measures the straightness and flatness of the motion module, and the second camera measures the roll angle of the motion module, and further includes: When the third laser of the light source successively emits light beams of different colors respectively, the plane beam splitter of the objective lens module reflects the first light beam emitted by the third laser as a straight light beam to the beam splitter module, and transmits the second light beam emitted by the third laser to the cylindrical mirror of the objective lens module, the cylindrical mirror reflects the second light beam as a fan-shaped light beam to the beam splitter module, transmits the first light beam to the first camera through the beam splitter module, and reflects the second light beam to the second camera, so that the first camera obtains light spot information to measure the straightness and flatness of the motion module, and the second camera obtains light information to measure the roll angle of the motion module.

Images