Three-axis integrated MEMS gyroscope structure and manufacturing method thereof

Abstract

The present application is applicable to the field of precision sensing technology, and provides a three-axis integrated MEMS gyroscope structure and a manufacturing method thereof, the structure comprising an intermediate coupling structure, first to sixth detection structures, a first drive structure, and a second drive structure; the first to fourth detection structures are symmetrically arranged around the intermediate coupling structure, and are respectively coupled to the intermediate coupling structure; the fifth detection structure is arranged in the first detection structure, and is coupled to the first detection structure; the first drive structure is symmetrical about the first axis, and is respectively coupled to the first, second, and fourth detection structures; the sixth detection structure is arranged in the third detection structure, and is coupled to the third detection structure; the second drive structure is symmetrical about the first axis, and is respectively coupled to the third, second, and fourth detection structures; and each detection structure is used to detect the angular velocity in each axis direction. The present application can reduce the volume and cost of the gyroscope, while improving its environmental adaptability.

Description

Technical Field

[0001] The present application belongs to the field of precision sensing technology, and in particular, relates to a three-axis integrated MEMS gyroscope structure and a manufacturing method thereof. Background Art

[0002] In the field of precision sensing technology, micro-electromechanical systems (MEMS), as a type of miniaturized device that integrates multiple functions such as mechanics, electronics, and optics, have developed rapidly in recent years. Among them, silicon-based MEMS gyroscopes, as important inertial sensors, have shown great application potential in many fields due to their significant characteristics such as small size, light weight, low cost, and high reliability. Gyroscopes use micromachining technology to construct tiny mechanical structures on silicon wafers, achieving high-precision measurement of angular velocity, and have been widely used in aerospace, consumer electronics, automotive electronics and other fields.

[0003] Although silicon-based MEMS gyroscopes have been widely used, their further development still faces many challenges. For MEMS gyroscopes, size, weight, power consumption, cost and environmental adaptability are important factors that restrict their scope of use and promotion speed. Reducing size and weight helps to improve the portability and integration of equipment, while reducing power consumption can extend the battery life of the equipment, which is especially important for portable devices that rely on batteries. At the same time, cost control is a key factor in determining whether MEMS gyroscopes can be widely popularized. In addition, environmental adaptability determines whether the MEMS gyroscope can work stably under extreme conditions, such as high temperature, low temperature, high humidity, strong magnetic field and other harsh environments, which is particularly important in fields such as aerospace and automotive electronics.

[0004] Therefore, how to reduce the size and cost of the gyroscope while improving its environmental adaptability has become a core issue that needs to be urgently addressed in the current development of MEMS gyroscope technology. Summary of the invention

[0005] In order to overcome the problems existing in the related art, the embodiments of the present application provide a three-axis integrated MEMS gyroscope structure and a manufacturing method thereof, which can reduce the size and cost of the gyroscope while improving its environmental adaptability.

[0006] This application is implemented through the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a three-axis integrated MEMS gyroscope structure, including an intermediate coupling structure, a first detection structure, a second detection structure, a third detection structure, a fourth detection structure, a fifth detection structure, a sixth detection structure, a first drive structure, and a second drive structure;

[0008] The intermediate coupling structure is symmetrical about the first axis and the second axis, and the first axis and the second axis are perpendicular; the first detection structure, the second detection structure, the third detection structure, and the fourth detection structure surround the intermediate coupling structure and are respectively coupled to the intermediate coupling structure; the first detection structure is symmetrical about the first axis, and the first detection structure and the third detection structure of the same structure are symmetrical about the second axis; the second detection structure is symmetrical about the second axis, and the second detection structure and the fourth detection structure of the same structure are symmetrical about the first axis;

[0009] The fifth detection structure is arranged in the first detection structure and coupled to the first detection structure; the first driving structure is symmetrical about the first axis and is respectively coupled to the first detection structure, the second detection structure and the fourth detection structure; the sixth detection structure is arranged in the third detection structure and is coupled to the third detection structure; the second driving structure is symmetrical about the first axis and is respectively coupled to the third detection structure, the second detection structure and the fourth detection structure;

[0010] The first detection structure and the third detection structure are used to detect the angular velocity in the direction of the first axis; the second detection structure and the fourth detection structure are used to detect the angular velocity in the direction of the second axis; the fifth detection structure and the sixth detection structure are used to detect the angular velocity in the direction of the third axis; the third axis is perpendicular to the first axis and the second axis respectively.

[0011] In one embodiment, the first drive structure and the second drive structure move in the direction of the second axis;

[0012] In the driving mode, in the current half cycle, the first driving structure is used to provide a driving force for the first detection structure, the second detection structure and the fourth detection structure to move downward in the direction of the second axis, and the second driving structure is used to provide a driving force for the third detection structure, the second detection structure and the fourth detection structure to move upward in the direction of the second axis, and the first detection structure, the second detection structure, the third detection structure and the fourth detection structure rotate clockwise in the plane defined by the first axis and the second axis;

[0013] In the next half cycle, the first driving structure is used to provide a driving force for the first detection structure, the second detection structure and the fourth detection structure to move upward in the direction of the second axis, and the second driving structure is used to provide a driving force for the third detection structure, the second detection structure and the fourth detection structure to move downward in the direction of the second axis, and the first detection structure, the second detection structure, the third detection structure and the fourth detection structure rotate counterclockwise in the plane defined by the first axis and the second axis.

[0014] In one embodiment, the three-axis integrated MEMS gyroscope structure further includes a first connecting beam, a second connecting beam and a third connecting beam; the first driving structure has the same structure as the second driving structure; the first driving structure includes a driving force module and a first driving mass block;

[0015] The first driving mass block includes a main body and a protruding part; the driving force module is arranged on the main body of the first driving mass block; the main body of the first driving mass block is coupled to the first detection structure through the first connecting beam and the second connecting beam; the protruding part of the first driving mass block is coupled to the first detection structure through the third connecting beam; the protruding part of the first driving mass block is arranged in the middle of the two parts of the fifth detection structure.

[0016] In one embodiment, the three-axis integrated MEMS gyroscope structure further includes a drive coupling structure; the drive coupling structure includes a first drive coupling beam, a second drive coupling beam, a third drive coupling beam and a fourth drive coupling beam;

[0017] The first driving structure is coupled to the second detection structure through the first driving coupling beam, and the first driving structure is coupled to the fourth detection structure through the second driving coupling beam; the second driving structure is coupled to the second detection structure through the third driving coupling beam, and the second driving structure is coupled to the fourth detection structure through the fourth driving coupling beam.

[0018] In one embodiment, the three-axis integrated MEMS gyroscope structure further includes a first support beam and a second support beam;

[0019] The second detection structure is provided with a first support beam symmetrically about the second axis; the fourth detection structure is provided with a first support beam symmetrically about the second axis;

[0020] Second support beams are arranged on both sides of the first driving structure and the second driving structure.

[0021] In one embodiment, the first driving structure further includes a first driving detection module;

[0022] The first driving detection module is arranged on the main body of the first driving mass block and is arranged on both sides of the driving force module; the first driving detection module is used to monitor and feedback the motion state of the first driving structure.

[0023] In one embodiment, the stiffness of the first driving coupling beam to the first driving structure in the second axis direction is greater than the stiffness in the first axis direction; the stiffness of the first driving coupling beam to the second detection structure in the first axis direction is greater than the stiffness in the second axis direction;

[0024] The stiffness of the second driving coupling beam to the first driving structure in the second axis direction is greater than the stiffness in the first axis direction; the stiffness of the second driving coupling beam to the fourth detection structure in the first axis direction is greater than the stiffness in the second axis direction;

[0025] The stiffness of the third driving coupling beam to the second driving structure in the second axis direction is greater than that in the first axis direction; the stiffness of the third driving coupling beam to the second detection structure in the first axis direction is greater than that in the second axis direction;

[0026] The stiffness of the fourth driving coupling beam to the second driving structure in the second axis direction is greater than that in the first axis direction; the stiffness of the third driving coupling beam to the fourth detection structure in the first axis direction is greater than that in the second axis direction.

[0027] In one embodiment, the first connecting beam has a stiffness in the second axis direction for the first detection structure and the main body of the first driving mass that is greater than a stiffness in the first axis direction;

[0028] The stiffness of the second connecting beam to the main body of the first detection structure and the first driving mass block in the second axis direction is greater than the stiffness in the first axis direction;

[0029] The stiffness of the protruding portion of the third connecting beam to the first detection structure and the first driving mass in the direction of the second axis is greater than that in the direction of the first axis.

[0030] In one embodiment, the three-axis integrated MEMS gyroscope structure further includes detection electrodes; detection electrodes are disposed below the first detection structure, the second detection structure, the third detection structure, and the fourth detection structure.

[0031] In a second aspect, the present application provides a method for manufacturing a three-axis integrated MEMS gyroscope structure, and prepares the three-axis integrated MEMS gyroscope structure as in the first aspect, the method comprising:

[0032] forming an intermediate coupling structure, a first detection structure, a second detection structure, a third detection structure, a fourth detection structure, a fifth detection structure, a sixth detection structure, a first driving structure, and a second driving structure;

[0033] The intermediate coupling structure is symmetrical about the first axis and the second axis, and the first axis and the second axis are perpendicular; the first detection structure, the second detection structure, the third detection structure, and the fourth detection structure surround the intermediate coupling structure and are respectively coupled to the intermediate coupling structure; the first detection structure is symmetrical about the first axis, and the first detection structure and the third detection structure of the same structure are symmetrical about the second axis; the second detection structure is symmetrical about the second axis, and the second detection structure and the fourth detection structure of the same structure are symmetrical about the first axis;

[0034] The fifth detection structure is arranged in the first detection structure and coupled to the first detection structure; the first driving structure is symmetrical about the first axis and is respectively coupled to the first detection structure, the second detection structure and the fourth detection structure; the sixth detection structure is arranged in the third detection structure and is coupled to the third detection structure; the second driving structure is symmetrical about the first axis and is respectively coupled to the third detection structure, the second detection structure and the fourth detection structure;

[0035] The first detection structure and the third detection structure are used to detect the angular velocity in the direction of the first axis; the second detection structure and the fourth detection structure are used to detect the angular velocity in the direction of the second axis; the fifth detection structure and the sixth detection structure are used to detect the angular velocity in the direction of the third axis; the third axis is perpendicular to the first axis and the second axis respectively.

[0036] Compared with the prior art, the embodiments of the present invention have the following beneficial effects:

[0037] The embodiment of the present application realizes a high degree of integration of three-axis angular velocity detection through a carefully designed intermediate coupling structure and the layout of multiple detection and drive structures. At the same time, the symmetric design of the detection structures themselves and between each other helps to reduce external interference and errors. By integrating the fifth and sixth detection structures, the gyroscope can not only detect the angular velocity in the X-axis and Y-axis directions, but also detect the angular velocity in the Z-axis direction perpendicular thereto, thereby realizing true three-axis detection capability. In addition, the first and second drive structures are respectively arranged in parallel with the detection structure and coupled thereto along a specific axis direction, which helps to optimize the transmission path of the driving force, reduce costs, and improve driving efficiency. At the same time, due to the close cooperation between the drive structure and the detection structure, certain improvements are made in the motion mode or drive mode, which has better vibration suppression, can reduce energy consumption to a certain extent, improve its environmental adaptability, and extend the use time of the equipment.

[0038] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0040] Figure 1 This is a schematic diagram of the structure and appearance of a three-axis integrated MEMS gyroscope provided in one embodiment of the present application;

[0041] Figure 2It is a flow chart of a three-axis integrated MEMS gyroscope structure provided by an embodiment of the present application;

[0042] Figure 3 is a schematic diagram of detecting the angular velocity in the direction of the first axis S1 provided by an embodiment of the present application;

[0043] Figure 4 is a schematic diagram of detecting the angular velocity in the direction of the second axis S2 provided by an embodiment of the present application;

[0044] Figure 5 is a schematic diagram of detecting the angular velocity in the direction of the third axis provided by an embodiment of the present application;

[0045] Figure 6 is a motion schematic diagram of a three-axis integrated MEMS gyroscope in a driving mode provided by an embodiment of the present application;

[0046] Figure 7 is a structural schematic diagram of a first detection structure coupled to a second detection structure and a fourth detection structure provided in an embodiment of the present application;

[0047] Figure 8 It is a schematic diagram of the structure of the intermediate coupling beam provided in one embodiment of the present application. DETAILED DESCRIPTION

[0048] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present application. However, it should be clear to those skilled in the art that the present application may also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present application.

[0049] It should be understood that when used in the present specification and the appended claims, the term "comprising" indicates the presence of described features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or combinations thereof.

[0050] It should also be understood that the term “and / or” used in the specification and appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0051] As used in the specification and appended claims of this application, the term "if" can be interpreted as "when" or "uponce" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" can be interpreted as meaning "uponce it is determined" or "in response to determining" or "uponce [described condition or event] is detected" or "in response to detecting [described condition or event]", depending on the context.

[0052] In addition, in the description of the present application specification and the appended claims, the terms "first", "second", "third", etc. are only used to distinguish the descriptions and cannot be understood as indicating or implying relative importance.

[0053] References to "one embodiment" or "some embodiments" etc. described in the specification of this application mean that one or more embodiments of the present application include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the statements "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0054] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0055] Figure 1 is a schematic diagram of the structure of a three-axis integrated MEMS gyroscope provided in an embodiment of the present application. Figure 2 is a schematic diagram of a three-axis integrated MEMS gyroscope structure provided in an embodiment of the present application, referring to Figure 1 and Figure 2 The structure of the three-axis integrated MEMS gyroscope is described as follows:

[0056] An embodiment of the present application provides a three-axis integrated MEMS gyroscope structure, including an intermediate coupling structure 100, a first detection structure 101, a second detection structure 102, a third detection structure 103, a fourth detection structure 104, a fifth detection structure 105, a sixth detection structure 106, a first drive structure 107 and a second drive structure 108.

[0057] Exemplarily, the appearance of the three-axis integrated MEMS gyroscope structure mainly includes a driving part and a detection part. In the detection part, the first detection structure 101, the second detection structure 102, the third detection structure 103 and the fourth detection structure 104 are respectively based on the first mass block M1, the second mass block M2, the third mass block M3 and the fourth mass block M4 as the main structure.

[0058] The intermediate coupling structure 100 is symmetrical about the first axis S1 and the second axis S2, and the first axis S1 and the second axis S2 are perpendicular; the first detection structure 101, the second detection structure 102, the third detection structure 103, and the fourth detection structure 104 surround the intermediate coupling structure 100 and are respectively coupled to the intermediate coupling structure 100; the first detection structure 101 is symmetrical about the first axis S1, and the first detection structure 101 and the third detection structure 103 of the same structure are symmetrical about the second axis S2; the second detection structure 102 is symmetrical about the second axis S2, and the second detection structure 102 and the fourth detection structure 104 of the same structure are symmetrical about the first axis S1.

[0059] The fifth detection structure 105 is arranged in the first detection structure 101 and coupled to the first detection structure 101; the first driving structure 107 is symmetrical about the first axis S1, and is coupled to the first detection structure 101, the second detection structure 102 and the fourth detection structure 104 respectively; the sixth detection structure 106 is arranged in the third detection structure 103 and is coupled to the third detection structure 103; the second driving structure 108 is symmetrical about the first axis S1, and is coupled to the third detection structure 103, the second detection structure 102 and the fourth detection structure 104 respectively.

[0060] The first detection structure 101 and the third detection structure 103 are used to detect the angular velocity in the direction of the first axis S1. Figure 3 The second detection structure 102 and the fourth detection structure 104 are used to detect the angular velocity in the direction of the second axis S2, as shown in FIG. Figure 4 The fifth detection structure 105 and the sixth detection structure 106 are used to detect the angular velocity in the direction of the third axis, as shown in FIG. Figure 5 The third axis is perpendicular to the first axis S1 and the second axis S2 respectively.

[0061] The first axis S1 may be but is not limited to the X-axis, the second axis S2 may be but is not limited to the Y-axis, and the third axis may be but is not limited to the Z-axis.

[0062] Exemplarily, the three-axis integrated MEMS gyroscope structure further includes detection electrodes; detection electrodes are disposed below the first detection structure 101 , the second detection structure 102 , the third detection structure 103 , and the fourth detection structure 104 .

[0063] Among them, Figure 2 In the figure, the gray part is the detection structure, the black part is the anchor point of each structure, the detection electrodes of the first axis S1 and the second axis S2 arranged below the structure cannot be seen and are not shown in the figure. The displacement of the mass block caused by the Coriolis force is measured on the detection electrodes arranged below.

[0064] This embodiment realizes the high integration of three-axis angular velocity detection through the layout of the carefully designed intermediate coupling structure 100 and multiple detection and driving structures. At the same time, the symmetric design of the detection structure itself and between each other helps to reduce external interference and errors. By integrating the fifth and sixth detection structures 106, the gyroscope can not only detect the angular velocity in the X-axis and Y-axis directions, but also detect the angular velocity in the Z-axis direction perpendicular thereto, thereby realizing true three-axis detection capability. In addition, the first and second drive structures 108 are respectively arranged in parallel with the detection structure and coupled thereto along a specific axis direction, which helps to optimize the transmission path of the driving force, reduce costs, and improve driving efficiency. At the same time, due to the close cooperation between the drive structure and the detection structure, certain improvements are made in the motion mode or driving mode, which has better vibration suppression, can reduce energy consumption to a certain extent, improve its environmental adaptability, and extend the service life of the equipment.

[0065] In one embodiment, based on the above-mentioned MEMS gyroscope structure, the first driving structure 107 and the second driving structure 108 move in the direction of the second axis S2.

[0066] In drive mode, see Figure 6 In the current half cycle, the first driving structure 107 is used to provide a driving force for the first detection structure 101, the second detection structure 102 and the fourth detection structure 104 to move downward in the direction of the second axis S2, and the second driving structure 108 is used to provide a driving force for the third detection structure 103, the second detection structure 102 and the fourth detection structure 104 to move upward in the direction of the second axis S2. The first detection structure 101, the second detection structure 102, the third detection structure 103 and the fourth detection structure 104 rotate clockwise in the plane defined by the first axis S1 and the second axis S2.

[0067] Exemplarily, the first detection structure 101 and the third detection structure 103 move relative to each other in the direction of the second axis S2 , and the second detection structure 102 and the fourth detection structure 104 move relative to each other in the direction of the first axis S1 .

[0068] In the next half cycle, the first driving structure 107 is used to provide a driving force for the first detection structure 101, the second detection structure 102 and the fourth detection structure 104 to move upward in the direction of the second axis S2, and the second driving structure 108 is used to provide a driving force for the third detection structure 103, the second detection structure 102 and the fourth detection structure 104 to move downward in the direction of the second axis S2, and the first detection structure 101, the second detection structure 102, the third detection structure 103 and the fourth detection structure 104 rotate counterclockwise in the plane defined by the first axis S1 and the second axis S2.

[0069] This embodiment takes into account that the external environment is basically linear vibration, and the driving mode formed above is a four-mass linkage rotation structure. When the three-axis integrated MEMS gyroscope structure performs rotational motion, its internal dynamic characteristics are dynamically decoupled from the external linear vibration environment. The decoupling effect makes it difficult for the external linear vibration to directly affect the rotational motion state inside the device. This form of rotational motion can greatly reduce the response of the driving mode to linear vibration and improve the robustness of the gyroscope in a linear vibration environment.

[0070] At the same time, the three-axis integrated MEMS gyroscope structure is structurally symmetrical, which helps to reduce the impact of external linear vibration on the internal motion state of the device. In addition, the linear vibration of the external environment usually has a specific frequency range, and the rotational motion of the device also has its inherent frequency. When the two frequencies differ greatly, the interaction between them will be weakened, thereby reducing the impact of linear vibration on the rotational motion.

[0071] In one embodiment, see Figure 7 The three-axis integrated MEMS gyroscope structure also includes a first connecting beam 201, a second connecting beam 202 and a third connecting beam 203; the first driving structure 107 has the same structure as the second driving structure 108; the first driving structure 107 includes a driving force module 1071 and a first driving mass block M5.

[0072] The first driving mass block M5 includes a main body and a protruding part; the driving force module 1071 is arranged on the main body of the first driving mass block M5; the main body of the first driving mass block M5 is coupled to the first detection structure 101 through the first connecting beam 201 and the second connecting beam 202; the protruding part of the first driving mass block M5 is coupled to the first detection structure 101 through the third connecting beam 203; the protruding part of the first driving mass block M5 is arranged in the middle of the two parts of the fifth detection structure 105.

[0073] The first connecting beam 201 has a greater stiffness in the direction of the second axis S2 for the main body of the first detection structure 101 and the first drive mass block M5 than in the direction of the first axis S1. The second connecting beam 202 has a greater stiffness in the direction of the second axis S2 for the main body of the first detection structure 101 and the first drive mass block M5 than in the direction of the first axis S1. The third connecting beam 203 has a greater stiffness in the direction of the second axis S2 for the protruding portion of the third detection structure 103 and the first drive mass block M5 than in the direction of the first axis S1.

[0074] Likewise, the second driving structure 108 also includes the same driving force module and the second driving mass M6.

[0075] The second driving mass block M6 includes a main body and a protruding part; the corresponding driving force module is arranged on the main body of the second driving mass block M6; the main body of the second driving mass block M6 is coupled to the third detection structure 103 through the corresponding connecting beam; the protruding part of the second driving mass block M6 is coupled to the third detection structure 103 through the third connecting beam 203; the protruding part of the second driving mass block M6 is arranged in the middle of the two parts of the fifth detection structure 105.

[0076] In this embodiment, the connection between the first detection structure 101 and the first driving mass block M5 is realized by the first connecting beam 201, the second connecting beam 202 and the third connecting beam 203. The stiffness of these three beams in the Y direction is very large. The first detection structure 101 and the first driving mass block M5 cannot be relatively displaced in the Y direction. Therefore, the first detection structure 101 will follow the first driving mass block M5 to move downward / upward. Similarly, the third detection structure 103 will follow the second driving mass block M6 to move upward / downward.

[0077] At the same time, the fifth detection structure 105 is fixed inside the first detection structure 101 through the three beams, and the fifth detection structure 105 moves along with the first detection structure 101 .

[0078] Exemplarily, the three-axis integrated MEMS gyroscope structure further includes a drive coupling structure; the drive coupling structure includes a first drive coupling beam 301, a second drive coupling beam 302, a third drive coupling beam 303 and a fourth drive coupling beam 304, such as Figure 2 shown.

[0079] The first driving structure 107 is coupled to the second detection structure 102 through the first driving coupling beam 301. Specifically, the main body of the first driving mass block M5 of the first driving structure 107 is coupled to the second detection structure 102 through the first driving coupling beam 301, so that the driving force in the second axis direction is provided to the second detection structure 102 through the first driving coupling beam 301.

[0080] The first driving structure 107 is coupled to the fourth detection structure 104 through the second driving coupling beam 302. Specifically, the main body of the first driving mass block M5 of the first driving structure 107 is coupled to the fourth detection structure 104 through the second driving coupling beam 302, so that the driving force in the second axis direction is provided to the fourth detection structure 104 through the second driving coupling beam 302.

[0081] The second driving structure 108 is coupled to the second detection structure 102 via the third driving coupling beam 303. Specifically, the main body of the second driving mass block M6 of the second driving structure 108 is coupled to the second detection structure 102 via the third driving coupling beam 303, so that the driving force in the second axis direction is provided to the second detection structure 102 via the third driving coupling beam 303.

[0082] The second driving structure 108 is coupled to the fourth detection structure 104 through the fourth driving coupling beam 304. Specifically, the main body of the second driving mass block M6 of the second driving structure 108 is coupled to the fourth detection structure 104 through the fourth driving coupling beam 304, so that the driving force in the second axis direction is provided to the fourth detection structure 104 through the fourth driving coupling beam 304.

[0083] Exemplarily, the stiffness of the first drive coupling beam 301 to the first drive structure 107 in the direction of the second axis S2 is greater than that in the direction of the first axis S1, so that when the first drive structure 107 provides a driving force in the direction of the second axis, the first drive coupling beam 301 rotates; the stiffness of the first drive coupling beam 301 to the second detection structure 102 in the direction of the first axis S1 is greater than that in the direction of the second axis S2, so that the second detection structure 102 rotates with the first drive coupling beam 301, and the driving force is transmitted to the second detection structure 102.

[0084] The stiffness of the second driving coupling beam 302 to the first driving structure 107 in the second axis S2 direction is greater than that in the first axis S1 direction; the stiffness of the second driving coupling beam 302 to the fourth detection structure 104 in the first axis S1 direction is greater than that in the second axis S2 direction.

[0085] The stiffness of the third driving coupling beam 303 to the second driving structure 108 in the direction of the second axis S2 is greater than that in the direction of the first axis S1; the stiffness of the third driving coupling beam 303 to the second detection structure 102 in the direction of the first axis S1 is greater than that in the direction of the second axis S2;

[0086] The stiffness of the fourth driving coupling beam 304 to the second driving structure 108 in the direction of the second axis S2 is greater than that in the direction of the first axis S1; the stiffness of the third driving coupling beam 303 to the fourth detection structure 104 in the direction of the first axis S1 is greater than that in the direction of the second axis S2.

[0087] Exemplarily, the three-axis integrated MEMS gyroscope structure further includes a first support beam 401 and a second support beam 402 .

[0088] The second detection structure 102 is symmetrically provided with a first support beam 401 about the second axis S2; the fourth detection structure 104 is symmetrically provided with a first support beam 401 about the second axis S2. The first driving structure 107 and the second driving structure 108 are both provided with a second support beam 402. Figure 2 shown.

[0089] The first driving coupling beam 301, the second driving coupling beam 302, the third driving coupling beam 303 and the fourth driving coupling beam 304 drive the detection mechanism coupled thereto in the same principle. An anchor point is provided on each driving coupling beam and the supporting beam.

[0090] This embodiment realizes rotational driving motion by combining various constraint beams such as connecting beams, driving coupling beams, and supporting beams. This driving form can effectively reduce the external line vibration interference on the gyroscope and improve the anti-vibration performance of the gyroscope.

[0091] In one embodiment, the first driving structure 107 further includes a first driving detection module 1072, such as Figure 2 and Figure 7 shown.

[0092] The first driving detection module 1072 is disposed on the main body of the first driving mass block M5 and is disposed on both sides of the driving force module 1071 ; the first driving detection module 1072 is used to monitor and feedback the motion state of the first driving structure 107 .

[0093] Likewise, the second driving structure 108 further includes a second driving detection module 1082 .

[0094] The second driving detection module 1082 is disposed on the main body of the second driving mass block M6 and is disposed on both sides of the driving force module of the second driving structure 108 ; the second driving detection module 1082 is used to monitor and feedback the motion state of the second driving structure 108 .

[0095] The three-axis integrated MEMS gyroscope structure of this embodiment realizes the high integration of three-axis angular velocity detection through the carefully designed intermediate coupling structure and the layout of multiple detection and driving structures. At the same time, the symmetric design of the detection structure itself and its mutual relationship helps to reduce external interference and errors. By integrating the fifth and sixth detection structures, the gyroscope can not only detect the angular velocity in the X-axis and Y-axis directions, but also detect the angular velocity in the Z-axis direction perpendicular thereto, thereby realizing true three-axis detection capability. In addition, the first and second drive structures are respectively arranged in parallel with the detection structure and coupled with it along a specific axis direction, which helps to optimize the transmission path of the driving force, reduce costs, and improve driving efficiency. At the same time, through the close cooperation of each constraint beam combination mode and the four-mass linkage rotating structure, the rotation form driving motion is realized, and certain improvements are made in the motion mode or driving mode, which effectively reduces the external line vibration interference of the gyroscope, improves the anti-vibration performance of the gyroscope, and can reduce energy consumption to a certain extent, improve its environmental adaptability, and extend the service life of the equipment.

[0096] In one embodiment, see Figure 8 The three-axis integrated MEMS gyroscope structure also includes four intermediate coupling beams. The intermediate coupling structure is coupled to the first detection structure 101, the second detection structure 102, the third detection structure 103, and the fourth detection structure 104 through the four intermediate coupling beams.

[0097] The middle coupling structure and the middle coupling beam cooperate to connect each detection structure, which helps to achieve the mass distribution balance of the whole gyroscope structure, avoid the uneven mass distribution that may cause unnecessary vibration and deviation of the gyroscope during rotation, and help to achieve the vibration balance between each detection structure by transferring and coupling vibration energy. At the same time, the stiffness characteristics of the gyroscope can be optimized by adjusting the design parameters of the middle coupling beam.

[0098] The present application provides a method for manufacturing a three-axis integrated MEMS gyroscope structure, and the method comprises:

[0099] An intermediate coupling structure 100, a first detection structure 101, a second detection structure 102, a third detection structure 103, a fourth detection structure 104, a fifth detection structure 105, a sixth detection structure 106, a first driving structure 107 and a second driving structure 108 are formed;

[0100] The intermediate coupling structure 100 is symmetrical about the first axis S1 and the second axis S2, and the first axis S1 and the second axis S2 are perpendicular; the first detection structure 101, the second detection structure 102, the third detection structure 103, and the fourth detection structure 104 surround the intermediate coupling structure 100 and are respectively coupled to the intermediate coupling structure 100; the first detection structure 101 is symmetrical about the first axis S1, and the first detection structure 101 and the third detection structure 103 of the same structure are symmetrical about the second axis S2; the second detection structure 102 is symmetrical about the second axis S2, and the second detection structure 102 and the fourth detection structure 104 of the same structure are symmetrical about the first axis S1;

[0101] The fifth detection structure 105 is disposed in the first detection structure 101 and coupled to the first detection structure 101; the first driving structure 107 is symmetrical about the first axis S1, and is coupled to the first detection structure 101, the second detection structure 102 and the fourth detection structure 104 respectively; the sixth detection structure 106 is disposed in the third detection structure 103 and is coupled to the third detection structure 103; the second driving structure 108 is symmetrical about the first axis S1, and is coupled to the third detection structure 103, the second detection structure 102 and the fourth detection structure 104 respectively;

[0102] The first detection structure 101 and the third detection structure 103 are used to detect the angular velocity in the direction of the first axis S1; the second detection structure 102 and the fourth detection structure 104 are used to detect the angular velocity in the direction of the second axis S2; the fifth detection structure 105 and the sixth detection structure 106 are used to detect the angular velocity in the direction of the third axis; the third axis is perpendicular to the first axis S1 and the second axis S2 respectively.

[0103] Illustratively, when manufacturing the above-mentioned three-axis integrated MEMS gyroscope structure, the mechanical structure of the gyroscope, including the detection structure, driving structure, sensing electrodes and driving electrodes, etc., can be prepared on the silicon wafer through bulk silicon processing, including etching, electroplating and other process steps, and finally welding, packaging material injection, sealing and testing are performed.

[0104] For the beneficial effects of a method for preparing a three-axis integrated MEMS gyroscope structure, please refer to the beneficial effects of a three-axis integrated MEMS gyroscope structure.

[0105] It should be understood that the size of the serial numbers of the steps in the above embodiments does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0106] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A three-axis integrated MEMS gyroscope structure, characterized in that: It includes an intermediate coupling structure, a first detection structure, a second detection structure, a third detection structure, a fourth detection structure, a fifth detection structure, a sixth detection structure, a first driving structure and a second driving structure; The intermediate coupling structure is symmetrical about the first axis and the second axis, and the first axis and the second axis are perpendicular; The first detection structure, the second detection structure, the third detection structure, and the fourth detection structure surround the intermediate coupling structure and are respectively coupled to the intermediate coupling structure; the first detection structure is symmetrical about the first axis, and the first detection structure and the third detection structure of the same structure are symmetrical about the second axis; The second detection structure is symmetrical about the second axis, and the second detection structure and the fourth detection structure having the same structure are symmetrical about the first axis; The fifth detection structure is disposed in the first detection structure and coupled to the first detection structure; the first driving structure is symmetrical about the first axis and is coupled to the first detection structure, the second detection structure and the fourth detection structure respectively; The sixth detection structure is disposed in the third detection structure and coupled to the third detection structure; The second driving structure is symmetrical about the first axis, and is coupled to the third detection structure, the second detection structure, and the fourth detection structure respectively; The first detection structure and the third detection structure are used to detect the angular velocity in the direction of the first axis; The second detection structure and the fourth detection structure are used to detect the angular velocity in the direction of the second axis; The fifth detection structure and the sixth detection structure are used to detect the angular velocity in the direction of a third axis; the third axis is perpendicular to the first axis and the second axis respectively.

2. The three-axis integrated MEMS gyroscope structure as claimed in claim 1, characterized in that: The first driving structure and the second driving structure move in the direction of the second axis; In the driving mode, in the current half cycle, the first driving structure is used to provide the first detection structure, the second detection structure and the fourth detection structure with a driving force for downward movement in the direction of the second axis, and the second driving structure is used to provide the third detection structure, the second detection structure and the fourth detection structure with a driving force for upward movement in the direction of the second axis, and the first detection structure, the second detection structure, the third detection structure and the fourth detection structure rotate clockwise in the plane defined by the first axis and the second axis; In the next half cycle, the first driving structure is used to provide a driving force for the first detection structure, the second detection structure and the fourth detection structure to move upward in the direction of the second axis, and the second driving structure is used to provide a driving force for the third detection structure, the second detection structure and the fourth detection structure to move downward in the direction of the second axis, and the first detection structure, the second detection structure, the third detection structure and the fourth detection structure rotate counterclockwise in the plane defined by the first axis and the second axis.

3. The three-axis integrated MEMS gyroscope structure according to claim 1, characterized in that: It also includes a first connecting beam, a second connecting beam and a third connecting beam; the first driving structure has the same structure as the second driving structure; the first driving structure includes a driving force module and a first driving mass block; The first driving mass block comprises a main body and a protruding portion; the driving force module is arranged on the main body of the first driving mass block; The main body of the first driving mass is coupled to the first detection structure through the first connecting beam and the second connecting beam; The protruding portion of the first driving mass is coupled to the first detection structure through the third connecting beam; The protruding portion of the first driving mass is arranged in the middle of the two parts of the fifth detection structure.

4. The three-axis integrated MEMS gyroscope structure as claimed in claim 1, characterized in that: Also includes a drive coupling structure; the drive coupling structure includes a first drive coupling beam, a second drive coupling beam, a third drive coupling beam and a fourth drive coupling beam; The first driving structure is coupled to the second detection structure through the first driving coupling beam, and the first driving structure is coupled to the fourth detection structure through the second driving coupling beam; The second driving structure is coupled to the second detection structure through the third driving coupling beam, and the second driving structure is coupled to the fourth detection structure through the fourth driving coupling beam.

5. The three-axis integrated MEMS gyroscope structure as claimed in claim 1, characterized in that: Also included are a first support beam and a second support beam; The first support beam is symmetrically arranged on the second detection structure about the second axis; the first support beam is symmetrically arranged on the fourth detection structure about the second axis; The second supporting beam is disposed on both sides of the first driving structure and the second driving structure.

6. The three-axis integrated MEMS gyroscope structure as claimed in claim 3, characterized in that: The first driving structure also includes a first driving detection module; The first driving detection module is arranged on the main body of the first driving mass block and is arranged on both sides of the driving force module; the first driving detection module is used to monitor and feedback the motion state of the first driving structure.

7. The three-axis integrated MEMS gyroscope structure as claimed in claim 4, characterized in that: The stiffness of the first driving coupling beam to the first driving structure in the second axis direction is greater than that in the first axis direction; the stiffness of the first driving coupling beam to the second detection structure in the first axis direction is greater than that in the second axis direction; The stiffness of the second driving coupling beam to the first driving structure in the second axis direction is greater than the stiffness in the first axis direction; The stiffness of the second driving coupling beam to the fourth detection structure in the first axis direction is greater than the stiffness in the second axis direction; The stiffness of the third driving coupling beam to the second driving structure in the second axis direction is greater than the stiffness in the first axis direction; the stiffness of the third driving coupling beam to the second detection structure in the first axis direction is greater than the stiffness in the second axis direction; The stiffness of the fourth driving coupling beam to the second driving structure in the second axis direction is greater than that in the first axis direction; the stiffness of the third driving coupling beam to the fourth detection structure in the first axis direction is greater than that in the second axis direction.

8. The three-axis integrated MEMS gyroscope structure as claimed in claim 3, characterized in that: The first connecting beam has a stiffness in the second axis direction for the first detection structure and the main body of the first driving mass that is greater than the stiffness in the first axis direction; The stiffness of the second connecting beam to the first detection structure and the main body of the first driving mass in the second axis direction is greater than the stiffness in the first axis direction; The stiffness of the protruding portion of the third connecting beam to the first detection structure and the first driving mass in the second axis direction is greater than that in the first axis direction.

9. The three-axis integrated MEMS gyroscope structure according to any one of claims 1 to 8, characterized in that: It also includes detection electrodes; the detection electrodes are arranged below the first detection structure, the second detection structure, the third detection structure and the fourth detection structure.

10. A method for manufacturing a three-axis integrated MEMS gyroscope structure, characterized in that: include: forming an intermediate coupling structure, a first detection structure, a second detection structure, a third detection structure, a fourth detection structure, a fifth detection structure, a sixth detection structure, a first driving structure, and a second driving structure; The intermediate coupling structure is symmetrical about the first axis and the second axis, and the first axis and the second axis are perpendicular; The first detection structure, the second detection structure, the third detection structure, and the fourth detection structure surround the intermediate coupling structure and are respectively coupled to the intermediate coupling structure; the first detection structure is symmetrical about the first axis, and the first detection structure and the third detection structure of the same structure are symmetrical about the second axis; The second detection structure is symmetrical about the second axis, and the second detection structure and the fourth detection structure having the same structure are symmetrical about the first axis; The fifth detection structure is disposed in the first detection structure and coupled to the first detection structure; the first driving structure is symmetrical about the first axis and is coupled to the first detection structure, the second detection structure and the fourth detection structure respectively; The sixth detection structure is disposed in the third detection structure and coupled to the third detection structure; The second driving structure is symmetrical about the first axis, and is coupled to the third detection structure, the second detection structure, and the fourth detection structure respectively; The first detection structure and the third detection structure are used to detect the angular velocity in the direction of the first axis; The second detection structure and the fourth detection structure are used to detect the angular velocity in the direction of the second axis; The fifth detection structure and the sixth detection structure are used to detect the angular velocity in the direction of a third axis; the third axis is perpendicular to the first axis and the second axis respectively.

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