Solid fluorescent device preparation method, solid fluorescent device and fluorescent optical fiber sensor
By coating the non-output surface of the fluorescent material semi-finished product with a high-reflective film and using a high-transmission dielectric film on the output surface, the problem of low collection efficiency caused by the divergence of the fluorescent signal is solved and efficient collection and output of the signal is achieved.
Patent Information
- Application Number
- CN202411357799.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-01-24
AI Technical Summary
Fluorescent fiber sensors face randomness caused by signal divergence characteristics during fluorescent signal acquisition, and traditional methods have limited collection efficiency.
By coating the non-output surface of the fluorescent material semi-finished product, a high-reflective film layer is used to suppress the divergence of the fluorescent signal in the non-output direction, and a high-transmission dielectric film is used on the output surface to improve the signal output efficiency.
It significantly improves the collection efficiency and output intensity of fluorescence signals, ensuring that more fluorescence signals propagate in the desired output direction, meeting the needs of applications such as high-precision optical detection and imaging.
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Figure CN119354932A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of fluorescent optical fiber sensors, and in particular to a method for preparing a solid fluorescent device, a solid fluorescent device and a fluorescent optical fiber sensor. Background Art
[0002] Fluorescence fiber optic sensor is a high-precision sensor widely used in environmental monitoring, industrial process control, medical health and other fields. Its core technology is based on the collection and analysis of fluorescence signals. These sensors usually rely on the fluorescence signals generated by the sensing material under specific conditions. The accurate collection and transmission of these fluorescence signals are directly related to the reliability of the sensor measurement results.
[0003] With the development of technology, the application field of fluorescent fiber sensors continues to expand, but there are still many challenges in the process of collecting fluorescent signals. The divergent characteristics of fluorescent signals make their running direction and intensity in space random. The traditional fluorescence collection method mainly increases the collection efficiency by changing the shape of the optical fiber end face, but the collection efficiency does not achieve the expected effect. Summary of the invention
[0004] Based on this, it is necessary to provide a solid fluorescent device preparation method, a solid fluorescent device and a fluorescent optical fiber sensor that can improve the collection efficiency in order to solve the above technical problems.
[0005] In a first aspect, the present application provides a method for preparing a solid fluorescent device, the method comprising:
[0006] Provide semi-finished products of fluorescent materials;
[0007] The non-output surface of the semi-finished fluorescent material product is subjected to coating treatment to obtain a solid fluorescent device; the solid fluorescent device is used to generate fluorescent signals of multiple wavelengths, and the coating treatment is used to suppress the divergence of the fluorescent signal in the non-output direction.
[0008] In one embodiment, the non-output surface of the fluorescent material semi-finished product is subjected to a coating process to obtain a solid fluorescent device, including:
[0009] The non-output surface of the semi-finished fluorescent material product is plated with a high-reflective film layer to obtain a solid fluorescent device; the high-reflective film layer includes one of a metal film layer and a dielectric film layer.
[0010] In one embodiment, the method further includes:
[0011] The output surface of the fluorescent material semi-finished product is plated with a high-transmittance dielectric film to obtain a solid fluorescent device.
[0012] In one embodiment, the process of determining the output surface of the fluorescent material semi-finished product comprises:
[0013] Performing optical simulation calculation processing on the semi-finished fluorescent material to obtain optical simulation results; the optical simulation results include fluorescence coupling efficiencies of multiple candidate output surfaces;
[0014] The candidate output surface with the maximum fluorescence coupling efficiency is determined as the output surface of the fluorescent material semi-finished product.
[0015] In one embodiment, the high-reflection film layer comprises a silver film; and the non-output surface of the fluorescent material semi-finished product is coated with the high-reflection film layer, comprising:
[0016] placing the semi-finished fluorescent material product in a magnetron sputtering device;
[0017] According to the first coating parameters, a silver film is used to perform silver atom deposition treatment on the non-output surface of the semi-finished fluorescent material product; the first coating parameters include sputtering power, deposition time and working gas pressure.
[0018] In one embodiment, the method further includes:
[0019] A fluorescence enhancer is added into the high-transmittance dielectric film to obtain an enhanced dielectric film.
[0020] In one embodiment, the material of the high-transmittance dielectric film includes silicon dioxide; the output surface of the semi-finished fluorescent material product is plated with the high-transmittance dielectric film to obtain a solid fluorescent device, including:
[0021] Placing the semi-finished fluorescent material product in an electron beam evaporation coating device;
[0022] According to the second coating parameters, the output surface of the fluorescent material semi-finished product is treated with silicon dioxide for silicon dioxide deposition to obtain a solid fluorescent device; the second coating parameters include the power, beam current and scanning speed of the scanning gun.
[0023] In one embodiment, the process of determining the semi-finished fluorescent material includes:
[0024] The fluorescent raw material is processed into a shape to obtain a fluorescent material semi-finished product; the shape of the fluorescent material semi-finished product includes one of a cube, a cylinder and a sphere.
[0025] In one embodiment, the method further includes:
[0026] An optical microscope is used to perform appearance inspection on the solid fluorescent device to obtain appearance inspection results.
[0027] In a second aspect, the present application provides a solid fluorescent device, which includes multiple non-output surfaces and output surfaces; the non-output surfaces are coated with a high-reflection film layer; the output surface is coated with a high-transmittance dielectric film; the high-reflection film layer is used to suppress the divergence of the fluorescent signal in the non-output direction.
[0028] In a third aspect, the present application provides a fluorescent fiber optic sensor, which includes the solid-state fluorescent device as described in the second aspect above.
[0029] The above-mentioned solid fluorescent device preparation method, solid fluorescent device and fluorescent optical fiber sensor first provide a fluorescent material semi-finished product; the non-output surface of the fluorescent material semi-finished product is subjected to a coating treatment for suppressing the divergence of the fluorescent signal in the non-output direction to obtain a solid fluorescent device. The specific coating treatment of the fluorescent material semi-finished product can effectively concentrate the fluorescent signal in a specific output direction. Before the coating treatment, the fluorescent signal will diverge irregularly in all directions, resulting in a low proportion of fluorescent signals that can actually be collected and utilized. After the coating treatment, the divergence of the fluorescent signal in the non-output direction is greatly suppressed, so that more fluorescent signals propagate in the desired output direction, thereby significantly improving the collection efficiency of the fluorescent signal. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Figure 1 is a schematic diagram of a process for preparing a solid fluorescent device in one embodiment;
[0031] Figure 2 A schematic flow chart of a process for determining an output surface of a fluorescent material semi-finished product in one embodiment;
[0032] Figure 3 A schematic diagram of a process for coating a non-output surface in one embodiment;
[0033] Figure 4 A schematic diagram of a process of coating an output surface in one embodiment;
[0034] Figure 5 A schematic diagram of a solid fluorescent device in one embodiment;
[0035] Figure 6 A schematic diagram of a fluorescent optical fiber sensor without coating treatment in one embodiment;
[0036] Figure 7 Schematic diagram of a fluorescent optical fiber sensor after coating treatment in an embodiment. DETAILED DESCRIPTION
[0037] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0038] First of all, before specifically introducing the technical solution of the embodiments of the present application, the technical background based on the embodiments of the present application is introduced.
[0039] In fluorescent fiber sensors, the target quantity to be detected is the fluorescent signal generated by the sensing material. After the fluorescent signal is generated, it needs to be collected first and then transmitted to the back-end for processing. The collection quality of the fluorescent signal is crucial to ensure the accuracy of the sensor measurement results. Therefore, the fluorescent fiber sensor needs to maximize the collection efficiency of fluorescence. However, since fluorescence is spatial light that is uniformly divergent in all directions, it is difficult to efficiently collect such signals.
[0040] There are two main methods for collecting fluorescence:
[0041] Changing the end face of the collecting optical fiber: This method changes the flat end face of the optical fiber that collects the fluorescent signal into other shapes. For example, the most common method is to heat the end face of the optical fiber with a high-temperature flame to melt it and then cool it naturally to form a spherical shape. This method is equivalent to seamlessly adding a convex lens to the end face of the collecting optical fiber, thereby improving the efficiency of collecting fluorescence.
[0042] Increasing the number of collection optical fibers: This method increases the number of optical fibers collecting fluorescence, densely arranges the collection end faces of multiple optical fibers into an array, and places them as close to the fluorescence signal source as possible. This method is equivalent to increasing the cross-sectional area of the collection optical fiber and improving the fluorescence collection efficiency.
[0043] Method 1: The main problem with this technology is that the effect of improving the collection efficiency is limited (generally it can be improved by 20~30%) and the consistency of the end surface molten ball is poor, and the size and shape of the molten ball cannot be accurately controlled.
[0044] Method 2: The main problem of this technology is that it increases the complexity of the device structure and the size, weight and cost of the device, and its collection efficiency is limited (generally it can be increased by 30~40%)
[0045] Based on this, the present application provides a method for preparing a solid fluorescent device, a solid fluorescent device and a fluorescent optical fiber sensor, aiming to solve the above technical problems.
[0046] In one embodiment, Figure 1 As shown, a method for preparing a solid fluorescent device is provided, comprising the following steps:
[0047] S101, providing a semi-finished fluorescent material.
[0048] Among them, semi-finished fluorescent materials refer to the material state that has been partially processed but has not yet become a final usable fluorescent device. It usually has certain fluorescent properties, but further processing is required to meet specific application requirements.
[0049] In the embodiments of the present application, a semi-finished fluorescent material is provided. The semi-finished fluorescent material can be obtained by an existing fluorescent material preparation method, such as chemical synthesis, physical deposition, etc.
[0050] S102, coating the non-output surface of the semi-finished fluorescent material product to obtain a solid fluorescent device; the solid fluorescent device is used to generate fluorescent signals of multiple wavelengths, and the coating treatment is used to suppress the divergence of the fluorescent signal in the non-output direction.
[0051] Among them, solid fluorescent devices are devices that are prepared by specific methods and can emit fluorescent signals. They can generate fluorescent signals of multiple wavelengths under different excitation conditions, providing the required optical properties for various applications. The non-output surface refers to the surface part of the solid fluorescent device that is not used to output fluorescent signals. The coating process is to apply a special film layer on the non-output surface. The film layer has specific optical properties and can effectively suppress the divergence of fluorescent signals in the non-output direction, thereby improving the concentration and collection efficiency of fluorescent signals in the output direction.
[0052] In the embodiment of the present application, the non-output surface of the semi-finished fluorescent material is subjected to coating treatment. The coating method may adopt physical vapor deposition, chemical vapor deposition and other technologies. In the coating process, it is necessary to select appropriate film layer materials and coating parameters according to the characteristics of the fluorescent material and application requirements to ensure that the film layer can effectively suppress the divergence of the fluorescent signal.
[0053] The above-mentioned method for preparing a solid fluorescent device first provides a fluorescent material semi-finished product; a coating treatment is performed on the non-output surface of the fluorescent material semi-finished product to suppress the divergence of the fluorescent signal in the non-output direction, thereby obtaining a solid fluorescent device. The specific coating treatment of the fluorescent material semi-finished product can effectively concentrate the fluorescent signal in a specific output direction. Before the coating treatment, the fluorescent signal will diverge irregularly in all directions, resulting in a low proportion of fluorescent signals that can actually be collected and utilized. After the coating treatment, the divergence of the fluorescent signal in the non-output direction is greatly suppressed, so that more fluorescent signals propagate in the desired output direction, thereby significantly improving the collection efficiency of the fluorescent signal.
[0054] In an exemplary embodiment, based on the above embodiments, the embodiments of the present application involve a process of coating the non-output surface of a semi-finished fluorescent material product to obtain a solid fluorescent device, specifically including: coating the non-output surface of the semi-finished fluorescent material product with a high-reflective film layer; the high-reflective film layer includes one of a metal film layer and a dielectric film layer.
[0055] Among them, non-output surface: the surface part of the solid fluorescent device that is not used to output fluorescent signals.
[0056] High reflective film layer: A film layer structure that has high reflectivity for light of a specific wavelength. This high reflective film layer can effectively suppress the divergence of the fluorescent signal in the non-output direction and improve the concentration and collection efficiency of the fluorescent signal in the output direction.
[0057] Metal film layer: A film layer made of metal materials. Common metals such as aluminum and silver have high reflectivity and can be used as a choice for high reflective film layers. Metal film layers are usually prepared by methods such as physical vapor deposition.
[0058] Dielectric film layer: A film layer composed of one or more dielectric materials. By rationally designing the thickness and refractive index of the dielectric film layer, high reflection of light of a specific wavelength can be achieved. The dielectric film layer can be prepared by chemical vapor deposition, sputtering and other methods.
[0059] In the embodiment of the present application, the non-output surface of the fluorescent material semi-finished product that needs to be coated is first determined, and then the type of high-reflection film layer is selected according to actual needs, which can be a metal film layer or a dielectric film layer.
[0060] If a metal film layer is selected, the metal material can be evaporated and deposited on the non-output surface of the fluorescent material semi-finished product by physical vapor deposition. For example, metal materials such as aluminum and silver can be deposited into a uniform film layer by electron beam evaporation or thermal evaporation.
[0061] If a dielectric film layer is selected, chemical vapor deposition or sputtering can be used. According to the wavelength of the fluorescent signal to be reflected, the thickness and refractive index combination of the dielectric film layer are reasonably designed. For example, by alternately depositing dielectric materials with different refractive indices, a multilayer dielectric film structure is formed to achieve high reflectivity.
[0062] After being coated with a high-reflective film layer, the obtained solid fluorescent device can effectively suppress the divergence of fluorescent signals in non-output directions, improve the collection efficiency of fluorescent signals, and meet the needs of various optical systems and detection equipment.
[0063] In the embodiment of the present application, the non-output surface of the fluorescent material semi-finished product is coated with a high-reflective film layer, thereby significantly improving the collection efficiency of the fluorescent signal.
[0064] In an exemplary embodiment, based on the above embodiment, the method of the embodiment of the present application further includes: coating the output surface of the fluorescent material semi-finished product with a high-transmittance dielectric film to obtain a solid fluorescent device.
[0065] Among them, high-transmittance dielectric film: a film layer composed of a dielectric material with high transmittance. This film layer can allow the fluorescent signal to pass through the output surface with minimal loss, thereby improving the output efficiency and quality of the fluorescent signal. The high-transmittance dielectric film can be prepared by chemical vapor deposition, sputtering and other methods. By reasonably selecting and adjusting parameters such as the material and thickness of the film layer, high transmittance of fluorescent signals of a specific wavelength can be achieved.
[0066] In the embodiment of the present application, the output surface of the semi-finished fluorescent material is first determined. Then, a suitable high-transmittance dielectric film material and preparation method are selected. For example, a dielectric material with high transmittance can be deposited on the output surface using chemical vapor deposition technology. According to the wavelength of the fluorescent signal to be transmitted, the thickness and refractive index of the film layer are precisely controlled to ensure high transmittance.
[0067] By coating the output surface with a high-transmittance dielectric film, the solid fluorescent device obtained can significantly improve the transmission efficiency and quality of the fluorescent signal in the output direction while maintaining effective suppression of the fluorescent signal in the non-output direction. This enables the solid fluorescent device to provide a stronger and clearer fluorescent signal in practical applications, meeting the needs of various high-precision optical detection and imaging applications.
[0068] In the embodiment of the present application, the output surface of the fluorescent material semi-finished product is coated with a high-transmittance dielectric film, thereby further improving the performance of the solid fluorescent device.
[0069] In an exemplary embodiment, based on the above embodiment, see Figure 2 The process of determining the output surface of the fluorescent material semi-finished product of the embodiment of the present application further includes the following steps:
[0070] S201, performing optical simulation calculation processing on the fluorescent material semi-finished product to obtain an optical simulation result.
[0071] The optical simulation results include the fluorescence coupling efficiency of multiple candidate output surfaces. Optical simulation calculation processing: Use computer software and optical models to simulate the optical performance of fluorescent material semi-finished products under different conditions. By inputting the characteristic parameters, geometric shape and other information of the fluorescent material, the propagation and interaction of light in the material are simulated to obtain various optical performance indicators, such as fluorescence coupling efficiency.
[0072] The embodiment of the present application obtains relevant parameters of the semi-finished fluorescent material, such as the optical properties and geometric shape of the material. Then, the semi-finished fluorescent material is subjected to optical simulation calculation processing using professional optical simulation software. During the simulation process, different candidate output surfaces are considered, and the fluorescence coupling efficiency of each candidate output surface is calculated.
[0073] S202, determining the candidate output surface with the maximum fluorescence coupling efficiency as the fluorescent material semi-finished product.
[0074] In the embodiment of the present application, after the simulation of the above embodiment is completed, an optical simulation result including multiple candidate output surface fluorescence coupling efficiencies is obtained. These results are analyzed to find the candidate output surface with the maximum fluorescence coupling efficiency. Finally, the surface is determined as the output surface of the semi-finished fluorescent material, and subsequent coating treatment and other steps are performed to prepare a high-performance solid fluorescent device.
[0075] The embodiments of the present application can accurately determine the optimal output surface and improve the performance of the solid fluorescent device through optical simulation calculation processing and comparison of fluorescence coupling efficiency.
[0076] In an exemplary embodiment, based on the above embodiment, see Figure 3 The high-reflective film layer of the embodiment of the present application includes a silver film; the embodiment of the present application relates to a process of coating the non-output surface of a semi-finished fluorescent material product with a high-reflective film layer, including the following steps:
[0077] S301, placing the fluorescent material semi-finished product in a magnetron sputtering device.
[0078] Among them, magnetron sputtering equipment: a device that uses a magnetic field to control the movement of electrons, thereby achieving high-energy ions sputtering the target material and depositing the target material on the substrate. In the embodiment of the present application, it is used to deposit a silver film on the non-output surface of the semi-finished fluorescent material.
[0079] In the embodiment of the present application, the fluorescent material semi-finished product is placed on the sample stage of the magnetron sputtering equipment to ensure that its position is stable and the non-output surface faces upward.
[0080] S302, according to the first coating parameters, using a silver film to perform silver atom deposition treatment on the non-output surface of the fluorescent material semi-finished product.
[0081] The first coating parameters include sputtering power, deposition time and working gas pressure.
[0082] Sputtering power: The amount of energy used to excite target atoms and sputter them out during magnetron sputtering. Appropriate sputtering power can ensure that silver atoms are deposited on the surface of the semi-finished fluorescent material at an appropriate rate.
[0083] Deposition time: The duration of the deposition of silver atoms on the surface of the fluorescent material semi-finished product. By controlling the deposition time, the thickness of the silver film can be adjusted to achieve the best reflection effect.
[0084] Working gas pressure: The working gas pressure in the magnetron sputtering equipment. Appropriate working gas pressure can ensure the stability of the sputtering process and the quality of the silver film.
[0085] In the embodiment of the present application, the first coating parameter is set according to actual needs. For example, a suitable sputtering power is selected, which is generally between several hundred watts and several kilowatts, and the specific value is adjusted according to the equipment performance and the characteristics of the fluorescent material. The deposition time is determined, which is generally between several minutes and several tens of minutes, to obtain a silver film of the desired thickness. The working gas pressure is adjusted, which is generally between several millitorr and several tens of millitorr, to ensure the stability of the sputtering process and the quality of the silver film.
[0086] After setting the parameters, start the magnetron sputtering equipment and start the silver atom deposition process. During the sputtering process, the silver target is bombarded by high-energy ions, and silver atoms are sputtered out and deposited on the non-output surface of the semi-finished fluorescent material under the action of the magnetic field.
[0087] After a certain period of deposition, the magnetron sputtering device is turned off and the semi-finished fluorescent material coated with silver film is taken out. At this time, the non-output surface of the semi-finished fluorescent material is covered with silver film, which can effectively suppress the divergence of the fluorescent signal in the non-output direction.
[0088] The embodiment of the present application adopts a silver film as a high-reflection film layer, and uses a magnetron sputtering device and appropriate first coating parameters to coat the non-output surface of the fluorescent material semi-finished product, thereby significantly improving the performance of the solid fluorescent device.
[0089] In an exemplary embodiment, based on the above embodiment, the method of the embodiment of the present application further includes:
[0090] A fluorescence enhancer is added into the high-transmittance dielectric film to obtain an enhanced dielectric film.
[0091] Among them, fluorescence enhancer: a substance that can enhance the luminescence intensity of fluorescent materials. It can increase the intensity of fluorescent signals by absorbing excitation light of a specific wavelength and converting it into higher energy fluorescence emission. Fluorescence enhancers can be in various forms such as organic molecules and inorganic nanoparticles.
[0092] In the embodiments of the present application, a suitable fluorescence enhancer is selected. According to the characteristics of the fluorescent material and the application requirements, a fluorescence enhancer with a specific absorption and emission wavelength can be selected. For example, if the fluorescent material emits blue fluorescence, a fluorescence enhancer that can absorb blue light and emit higher energy yellow light can be selected to enhance the intensity of blue fluorescence by energy transfer.
[0093] Then, the fluorescence enhancer is added to the preparation material of the high-transmittance dielectric film. The fluorescence enhancer can be uniformly dispersed in the high-transmittance dielectric film material by physical mixing, chemical doping, etc. When preparing the enhanced dielectric film, the high-transmittance dielectric film material containing the fluorescence enhancer can be deposited on the output surface of the fluorescent material semi-finished product by chemical vapor deposition, sputtering, etc.
[0094] In the embodiment of the present application, the fluorescence enhancer is added to the high-transmittance dielectric film to obtain an enhanced dielectric film, and the enhanced dielectric film is applied to the output surface coating treatment of the fluorescent material semi-finished product, which can significantly improve the intensity and output efficiency of the fluorescent signal. At the same time, combined with the high-reflection film coating treatment on the non-output surface of the fluorescent material semi-finished product, the overall performance of the solid fluorescent device can be further improved to meet the needs of various high-precision optical detection and imaging applications.
[0095] In an exemplary embodiment, based on the above embodiment, see Figure 4 The material of the high-transmittance dielectric film of the embodiment of the present application includes silicon dioxide; the output surface of the semi-finished fluorescent material product is plated with the high-transmittance dielectric film to obtain a solid fluorescent device, including the following steps:
[0096] S401, placing the fluorescent material semi-finished product in an electron beam evaporation coating device.
[0097] Among them, electron beam evaporation coating equipment: a coating equipment that uses electron beam bombardment to evaporate raw materials, causing them to evaporate and deposit on a substrate. In this application, it is used to deposit silicon dioxide on the output surface of the fluorescent material semi-finished product.
[0098] In the embodiment of the present application, the semi-finished fluorescent material product is placed on the sample stage of the electron beam evaporation coating equipment to ensure that its position is stable and the output surface faces upward.
[0099] S402, according to the second coating parameters, using silicon dioxide to perform silicon dioxide deposition treatment on the output surface of the fluorescent material semi-finished product to obtain a solid fluorescent device.
[0100] The second coating parameters include the power, beam current and scanning speed of the scanning gun.
[0101] Scanning gun power: The power used by the scanning gun in the electron beam evaporation coating equipment. This power determines the energy of the electron beam, thus affecting the evaporation rate and deposition quality of silicon dioxide.
[0102] Beam current: The current intensity of the electron beam. Appropriate beam current can ensure stable evaporation and uniform deposition of silicon dioxide.
[0103] Scanning speed: The speed at which the electron beam scans between the evaporation source and the substrate. By adjusting the scanning speed, the deposition thickness and uniformity of silicon dioxide can be controlled.
[0104] In the embodiment of the present application, the semi-finished fluorescent material product is carefully placed on the sample stage of the electron beam evaporation coating equipment to ensure that its position is stable and the output surface faces upward.
[0105] Then, set the second coating parameters according to actual needs. Select the appropriate scanning gun power, generally between several hundred watts and several kilowatts, and the specific value is adjusted according to the equipment performance and the characteristics of the fluorescent material. Determine the beam size, usually between a few milliamperes and tens of milliamperes, to ensure the stable evaporation of silicon dioxide. Adjust the scanning speed, generally between tens of millimeters per second and hundreds of millimeters per second, to control the deposition thickness and uniformity of silicon dioxide.
[0106] After setting the parameters, start the electron beam evaporation coating equipment and start the silicon dioxide deposition process. During the process, the electron beam bombards the silicon dioxide evaporation source, causing it to evaporate and deposit on the output surface of the fluorescent material semi-finished product in a vacuum environment.
[0107] After a certain period of deposition treatment, the electron beam evaporation coating device is turned off and the semi-finished fluorescent material coated with the silicon dioxide high-transmittance dielectric film is taken out, and a solid fluorescent device is obtained. The output surface of the solid fluorescent device is covered with the silicon dioxide high-transmittance dielectric film, which can effectively improve the output efficiency and quality of the fluorescent signal.
[0108] In an exemplary embodiment, based on the above embodiment, the process of determining the fluorescent material semi-finished product of the embodiment of the present application includes: performing shape processing on the fluorescent raw material to obtain the fluorescent material semi-finished product.
[0109] The shape of the fluorescent material semi-finished product includes one of a cube, a cylinder and a sphere.
[0110] Fluorescent raw materials: Unprocessed substances with fluorescent properties, usually in powder, block or other irregular shapes.
[0111] Shape processing: The fluorescent raw materials are processed by mechanical processing, chemical etching, thermoforming and other methods to form them into a specific shape.
[0112] Cube-shaped fluorescent material semi-finished products: three-dimensional shapes with six planes, with equal or unequal sides. Semi-finished products of this shape can provide stable optical performance and easy assembly in certain applications.
[0113] Cylindrical fluorescent material semi-finished product: a three-dimensional shape with two parallel circular bottom surfaces and one side surface. The cylindrical semi-finished product can achieve a specific optical path design and focusing effect in some optical systems.
[0114] Spherical fluorescent material semi-finished product: a three-dimensional shape with a perfect sphere. The spherical semi-finished product can provide uniform fluorescent emission and minimal scattering loss in some cases.
[0115] The embodiment of the present application first selects a suitable fluorescent raw material, and selects a raw material with a specific fluorescent wavelength, intensity and stability according to the required fluorescent properties and application scenarios.
[0116] Then, the shape of the fluorescent material semi-finished product is determined according to actual needs. If high stability and regular optical performance are required, a cube shape can be selected. For applications that require specific optical path design or focusing effects, a cylindrical shape can be selected. In the case of pursuing uniform fluorescent emission and minimal scattering loss, a spherical shape can be selected.
[0117] Next, the fluorescent raw materials are processed by the corresponding shape processing methods. For example, for the cube shape, mechanical processing methods such as cutting and grinding can be used; for the cylindrical shape, it can be processed by hot forming or rotation processing; for the spherical shape, chemical etching or spherical mold forming methods can be used.
[0118] After the shape processing, the semi-finished fluorescent material with a specific shape is obtained. These semi-finished products can be further subjected to subsequent steps such as coating processing to prepare high-performance solid fluorescent devices.
[0119] The embodiments of the present application obtain fluorescent material semi-finished products with different shapes by processing the fluorescent raw materials into shapes, thereby providing more options for the design and performance optimization of solid fluorescent devices.
[0120] In an exemplary embodiment, based on the above embodiment, the method of the embodiment of the present application further includes: performing appearance inspection on the solid fluorescent device using an optical microscope to obtain an appearance inspection result.
[0121] Optical microscope: An instrument that uses optical principles to magnify and observe objects. In the embodiment of the present application, it is used to detect the appearance of solid fluorescent devices to find surface defects, irregular shapes, uneven coatings and other problems.
[0122] Appearance inspection results: The conclusion about the appearance quality of solid fluorescent devices obtained by observing them through an optical microscope. The appearance inspection results may include information such as the presence of defects, the type and location of defects, and the uniformity of the coating.
[0123] After the solid fluorescent device is prepared, it is placed on the stage of an optical microscope, and the focus, magnification and other parameters of the microscope are adjusted to clearly observe the appearance of the solid fluorescent device.
[0124] Observe the surface of the solid fluorescent device through an optical microscope to check for scratches, cracks, bubbles and other defects. At the same time, observe the uniformity of the coating to determine whether there is local thickness inconsistency or plating leakage.
[0125] For the problems found, their causes can be further analyzed, such as improper operation during the preparation process, material quality problems, etc. According to the appearance inspection results, corresponding measures can be taken to make improvements, such as re-plating, adjusting the preparation process parameters, etc.
[0126] The embodiment of the present application uses an optical microscope to perform appearance inspection on the solid fluorescent device, which can timely discover product quality problems and improve the product qualification rate. At the same time, the appearance inspection results can also provide a reference for subsequent performance testing and application, ensuring that the solid fluorescent device can meet actual needs.
[0127] In an exemplary embodiment, based on the above embodiment, the method of the embodiment of the present application further includes the following steps:
[0128] Step 1: Shape-processing the fluorescent raw material to obtain a fluorescent material semi-finished product including one of a cube, a cylinder and a sphere;
[0129] Step 2: Perform optical simulation calculation processing on the fluorescent material semi-finished product to obtain an optical simulation result; determine the candidate output surface with the maximum fluorescence coupling efficiency in the optical simulation result as the output surface of the fluorescent material semi-finished product;
[0130] Step 3: Adding a fluorescence enhancer to the high-transmittance dielectric film;
[0131] Step 4: placing the fluorescent material semi-finished product in a magnetron sputtering device; and performing silver atom deposition treatment on the non-output surface of the fluorescent material semi-finished product using the silver film in the high-reflective film layer according to the first coating parameter;
[0132] Step 5: placing the fluorescent material semi-finished product in an electron beam evaporation coating device; according to the second coating parameter, using a high-transmittance dielectric film including silicon dioxide to perform silicon dioxide deposition treatment on the output surface of the fluorescent material semi-finished product to obtain a solid fluorescent device;
[0133] Step 6: Use an optical microscope to perform appearance inspection on the solid fluorescent device to obtain appearance inspection results.
[0134] In an exemplary embodiment, based on the above embodiment, see Figure 5 The embodiment of the present application also provides a solid fluorescent device, which includes multiple non-output surfaces 01 and output surfaces 02; the non-output surface 01 is coated with a high-reflection film layer; the output surface 02 is coated with a high-transmittance dielectric film; the high-reflection film layer is used to suppress the divergence of the fluorescent signal in the non-output direction.
[0135] In the embodiment of the present application, the solid fluorescent device includes a plurality of non-output surfaces and an output surface. The non-output surface is coated with a high-reflection film layer, which can be prepared by physical vapor deposition, chemical vapor deposition, etc. The output surface is coated with a high-transmittance dielectric film, which can be prepared by chemical vapor deposition, sputtering, etc.
[0136] During the preparation process, the fluorescent material is first processed to obtain a semi-finished fluorescent material with a specific shape. Then, the non-output surface of the semi-finished fluorescent material is coated with a high-reflective film layer, and the output surface is coated with a high-transmittance dielectric film. Finally, the solid fluorescent device is inspected for appearance and performance to ensure that it meets the design requirements.
[0137] By using a high-reflection film layer and a high-transmittance dielectric film, the solid fluorescent device of the present invention can effectively suppress the divergence of the fluorescent signal in the non-output direction, and improve the collection and utilization efficiency of the fluorescent signal. At the same time, the high-transmittance dielectric film can also improve the output intensity and quality of the fluorescent signal, so that the solid fluorescent device has a wide range of application prospects in the fields of optical detection, imaging, etc.
[0138] In one embodiment, the present application also provides a fluorescent optical fiber sensor, which includes the solid-state fluorescent device as described above. Figure 6 As shown, taking a cylinder as an example, the fluorescent fiber optic sensor includes a solid-state fluorescent device in an uncoated state and a signal light collecting optical fiber 1 , and the surface of the solid-state fluorescent device includes a top surface 2 , a circumferential side surface 3 and a bottom surface 4 .
[0139] Then, if Figure 7 As shown, one of the surfaces of the fluorescent material is selected as the fluorescent output surface (the top surface 2 in this example), and the remaining surfaces except the fluorescent output surface (the circumferential side surface 3 and the bottom surface 4 in this example) are coated with a film layer with high reflectivity for fluorescent signals (it can be a metal film or a dielectric film). The fluorescent output surface can remain uncoated or be coated with a dielectric film with high transmittance for the fluorescent wavelength.
[0140] After completing the above process, the fluorescent material is surrounded by the reflective film, and the randomly evenly distributed fluorescence generated inside the fluorescent material will be reflected multiple times and finally emitted through the designated output surface. At this time, the signal collection optical fiber 1 placed near the fluorescent output surface completes the coupling collection of the fluorescence.
[0141] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.
[0142] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0143] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.
Claims
1. A method for preparing a solid fluorescent device, characterized in that: The method comprises: Provide semi-finished products of fluorescent materials; The non-output surface of the fluorescent material semi-finished product is subjected to coating treatment to obtain a solid fluorescent device; the solid fluorescent device is used to generate fluorescent signals of multiple wavelengths, and the coating treatment is used to suppress the divergence of the fluorescent signal in the non-output direction.
2. The method according to claim 1, characterized in that The method of coating the non-output surface of the fluorescent material semi-finished product to obtain a solid fluorescent device comprises: The non-output surface of the fluorescent material semi-finished product is plated with a high-reflective film layer to obtain the solid fluorescent device; the high-reflective film layer includes one of a metal film layer and a dielectric film layer.
3. The method according to claim 1, characterized in that The method further comprises: The output surface of the fluorescent material semi-finished product is plated with a high-transmittance dielectric film to obtain the solid fluorescent device.
4. The method according to claim 3, characterized in that The process of determining the output surface of the fluorescent material semi-finished product includes: Performing optical simulation calculation processing on the fluorescent material semi-finished product to obtain optical simulation results; the optical simulation results include fluorescence coupling efficiencies of multiple candidate output surfaces; The candidate output surface with the maximum fluorescence coupling efficiency is determined as the output surface of the fluorescent material semi-finished product.
5. The method according to claim 2, characterized in that: The high-reflection film layer includes a silver film; the process of coating the non-output surface of the fluorescent material semi-finished product with the high-reflection film layer includes: placing the fluorescent material semi-finished product in a magnetron sputtering device; According to the first coating parameters, a silver atom deposition process is performed on the non-output surface of the semi-finished fluorescent material product using a silver film; the first coating parameters include sputtering power, deposition time and working gas pressure.
6. The method according to claim 3, characterized in that The method further comprises: A fluorescence enhancer is added into the high-transmittance dielectric film to obtain an enhanced dielectric film.
7. The method according to claim 3, characterized in that The material of the high-transmittance dielectric film includes silicon dioxide; the output surface of the fluorescent material semi-finished product is plated with the high-transmittance dielectric film to obtain the solid fluorescent device, including: Placing the fluorescent material semi-finished product in an electron beam evaporation coating device; According to the second coating parameters, the output surface of the fluorescent material semi-finished product is subjected to silicon dioxide deposition treatment using silicon dioxide to obtain the solid fluorescent device; the second coating parameters include the power, beam current and scanning speed of the scanning gun.
8. The method according to claim 1, characterized in that The process of determining the semi-finished fluorescent material includes: The fluorescent raw material is processed into a shape to obtain the fluorescent material semi-finished product; the shape of the fluorescent material semi-finished product includes one of a cube, a cylinder and a sphere.
9. A solid fluorescent device, characterized in that: The solid fluorescent device comprises a plurality of non-output surfaces and output surfaces; the non-output surfaces are coated with a high-reflection film layer; the output surfaces are coated with a high-transmittance dielectric film; the high-reflection film layer is used to suppress the divergence of the fluorescent signal in the non-output direction.
10. A fluorescent optical fiber sensor, characterized in that: The fluorescence sensor comprises the solid-state fluorescence device as claimed in claim 9.