Method and device for adjusting digital micromirror device of direct writing imaging type exposure equipment

Abstract

The invention discloses a method and a device for adjusting a digital micro-mirror device of direct-writing imaging type exposure equipment, and relates to the technical field of device calibration, and the method comprises the following steps: projecting a test image to a focal plane of an optical lens by using the digital micro-mirror device; generating a control instruction for indicating the camera to shoot clear images at each test point; after it is determined that the camera carries out clear image shooting based on the control instruction, the corresponding judgment distance of the optical lens at each test point is obtained; and under the condition that the judgment distance does not meet the preset parallel judgment requirement, adjusting the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement. The method and the device are used for solving the problems of long time consumption, low accuracy and poor effect of parallel judgment of the DMD and the optical lens in a multi-exposure mode in the prior art, and the parallel judgment of the DMD and the optical lens is quickly and accurately completed.

Description

Technical Field

[0001] The present application relates to the field of device calibration technology, and in particular to a method and device for adjusting a digital micromirror device of a direct-write imaging exposure device. Background Art

[0002] The Digital Micromirror Device (DMD) is installed at an angle in the exposure machine. The laser is irradiated onto the DMD after being homogenized. After being reflected by the DMD, it passes through the optical lens to expose the pattern on the substrate. When the DMD and the optical lens are installed in the exposure machine, the installed DMD and the optical lens need to be parallel to each other so that the pattern is not distorted during exposure. However, due to the manufacturing deviation of the machinery used to manufacture the DMD and the error of manual installation, the DMD and the optical lens are not necessarily parallel.

[0003] In order to solve the above problems, the prior art divides the area, exposes each area separately, and adjusts the DMD based on the exposure results, that is, the parallel determination of the DMD and the optical lens is performed by multiple exposures. However, multiple exposures correspond to multiple exposure times and detection times after exposure, which is time-consuming. In addition, multiple exposures also require multiple movements of the exposure lens, which will cause calculation deviations due to errors caused by the mechanical movement of the exposure lens, resulting in low accuracy of the final parallel determination result. Summary of the invention

[0004] In response to the above-mentioned problems and technical needs, the applicant has proposed a method and device for adjusting the digital micromirror device of a direct-write imaging exposure device, so as to solve the problems of long time consumption, low accuracy and poor effect in the prior art of performing parallel determination of DMD and optical lens through multiple exposures, and to achieve rapid and accurate completion of the parallel determination of DMD and optical lens.

[0005] The present application provides an adjustment method for a digital micromirror device of a direct-write imaging exposure device, wherein the direct-write imaging exposure device comprises: a digital micromirror device and an optical lens, wherein the digital micromirror device projects an image through the optical lens, and the method comprises:

[0006] Projecting a test image onto a focal plane of the optical lens using the digital micromirror device, wherein the test image includes at least two test points;

[0007] Generate a control instruction for instructing the camera to take clear images at each test point;

[0008] After determining that the camera captures a clear image based on the control instruction, obtaining the determination distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when capturing the image is greater than a preset clarity;

[0009] When it is determined that the determination distance does not meet the preset parallel determination requirement, the installation angle of the digital micromirror device is adjusted until the determination distance meets the parallel determination requirement, wherein the parallel determination requirement is used to determine whether the digital micromirror device is parallel to the optical lens.

[0010] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, obtaining the determination distance corresponding to each test point of the optical lens includes:

[0011] Based on each of the test points, a first distance between the camera and the optical lens is acquired, and each of the first distances is determined as the determination distance.

[0012] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, obtaining the determination distance corresponding to each test point of the optical lens includes:

[0013] Based on each of the test points, a second distance between a plane corresponding to the focal plane and a plane corresponding to the camera is acquired, and each of the second distances is determined as the determination distance.

[0014] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, a camera performs clear image capture based on the control instruction, including:

[0015] The following clarity determination process is performed for each test point:

[0016] Obtain a target pixel corresponding to the test point and pixels to be compared within a preset range adjacent to the test point; calculate the square value of the grayscale difference between the target pixel and the pixel to be compared; and when it is determined that the square values ​​of the grayscale differences corresponding to the test points have reached preset values, determine that the clarity of the image focused during shooting is greater than the preset clarity.

[0017] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, a control instruction for instructing a camera to take clear images at each test point is generated, including:

[0018] Obtaining the position of the projection test point of the digital micromirror device;

[0019] Generate a control instruction to instruct the camera to move horizontally to the position to take clear images respectively.

[0020] According to an embodiment of the present application, the method for adjusting the digital micromirror device of the direct writing imaging exposure device further includes, before generating a control instruction for instructing the camera to take clear images at each test point:

[0021] Acquire an image to be identified including all the test points, and identify the position of each test point in the image to be identified;

[0022] Generate control instructions for instructing the camera to capture clear images at each test point, including:

[0023] Generate control instructions to instruct the camera to move horizontally to the positions of the test points and take clear images respectively.

[0024] According to a method for adjusting a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, each test point is the same target pattern, and the target pattern includes a polygon.

[0025] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, a test image includes four test points, and the positions of the four test points correspond to the positions of the four corners of the working surface of the digital micromirror device respectively.

[0026] According to an adjustment method of a digital micromirror device of a direct-write imaging exposure device according to an embodiment of the present application, after determining that the digital micromirror device is parallel to the optical lens, the method further includes:

[0027] The digital micromirror device is used to project the test image onto a substrate through an optical lens, and the positions of the digital micromirror device and the optical lens on the Z axis are adjusted as a whole so that the test image is projected onto a preset projection surface.

[0028] The embodiment of the present application also provides an adjustment device for a digital micromirror device of a direct-write imaging exposure device, wherein the direct-write imaging exposure device comprises: a digital micromirror device and an optical lens, wherein the digital micromirror device projects an image through the optical lens, comprising:

[0029] A projection module, used to project a test image onto a focal plane of the optical lens using the digital micromirror device, wherein the test image includes at least two test points;

[0030] A generating module, used for generating a control instruction for instructing the camera to take clear images at each test point;

[0031] An acquisition module, configured to acquire the determination distances corresponding to the optical lens at each test point after determining that the camera performs clear image shooting based on the control instruction, wherein the image clarity focused by the camera during image shooting is greater than a preset clarity;

[0032] The adjustment module is used to adjust the installation angle of the digital micromirror device until the determination distance meets the parallel determination requirement when it is determined that the determination distance does not meet the preset parallel determination requirement, wherein the parallel determination requirement is used to determine whether the digital micromirror device is parallel to the optical lens.

[0033] An embodiment of the present application also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, the steps of the method for adjusting the digital micromirror device of the direct-write imaging exposure device as described in any one of the above items are implemented.

[0034] An embodiment of the present application also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to execute the steps of a method for adjusting a digital micromirror device of a direct-write imaging exposure device as described in any of the above items.

[0035] The adjustment method and device of the digital micromirror device of the direct writing imaging exposure equipment provided in the embodiment of the present application, by using the digital micromirror device to project the test image onto the focal plane of the optical lens; generating a control instruction for instructing the camera to respectively shoot clear images at multiple test points; after determining that the camera shoots clear images based on the control instruction, obtaining the judgment distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when shooting the image is greater than the preset clarity; when it is determined that the judgment distance does not meet the preset parallel judgment requirement, adjusting the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement, wherein the parallel judgment requirement is used to determine the digital micromirror device It can be seen that the present application only needs one projection operation to determine whether the digital micromirror device and the optical lens are balanced. Compared with the prior art which uses multiple exposures to determine whether the digital micromirror device and the optical lens are balanced, the overall adjustment time of the digital micromirror device is effectively shortened, and the efficiency of the parallel determination of the digital micromirror device and the optical lens is improved. It can quickly and accurately determine whether the digital micromirror device and the optical lens are parallel. Moreover, compared with the prior art which uses exposure lens movement to realize multiple projections to test parallelism, the present application avoids the problem of calculation deviation caused by the mechanical operation of the exposure lens, and the final parallel effect of the digital micromirror device and the optical lens is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0037] Figure 1 is a flow chart of a method for adjusting a digital micromirror device provided in an embodiment of the present application;

[0038] Figure 2 is a schematic diagram of a test image of the adjustment method of the digital micromirror device provided in an embodiment of the present application;

[0039] Figure 3 is a structural schematic diagram of an adjustment device for a digital micromirror device provided in an embodiment of the present application;

[0040] Figure 4 It is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] The embodiment of the present application provides a method for adjusting a digital micromirror device of a direct-write imaging exposure device. The direct-write imaging exposure device includes: a digital micromirror device and an optical lens, and the digital micromirror device projects an image through the optical lens. The method can be applied to smart terminals and servers. Some other descriptions in the embodiments of the present application are for illustrative purposes and are not used to limit the scope of protection of the present application, and will not be described one by one later. The specific implementation of the method is as follows Figure 1 As shown:

[0043] Step 101: Use a digital micromirror device to transmit a test image onto a focal plane of an optical lens.

[0044] The test image includes at least two test points, and each test point is distributed at a different position of the test image. In addition, the setting of the test points may comply with certain rules, such as symmetrical distribution. For example, when the test image includes 2 test points, the optimal distribution is symmetrical distribution; when the test image includes 3 test points, the optimal distribution is to distribute the three test points in three areas of the test image, respectively, and the three areas include areas obtained by evenly dividing the test image; etc.

[0045] The present application can improve the accuracy of parallel determination between a digital micromirror device and an optical lens through symmetrical distribution.

[0046] Step 102 : generating a control instruction for instructing the camera to take clear images at each test point.

[0047] Step 103, after determining that the camera captures a clear image based on the control instruction, obtain the determination distance corresponding to each test point of the optical lens.

[0048] The image clarity of the camera when capturing an image is greater than a preset clarity.

[0049] Step 104 , when it is determined that the determination distance does not meet the preset parallel determination requirement, adjusting the installation angle of the digital micromirror device until the determination distance meets the parallel determination requirement.

[0050] The parallel determination requirement is used to determine whether the digital micromirror device and the optical lens are parallel.

[0051] Specifically, if the distance is determined to meet the parallel determination requirement, it means that the digital micromirror device is parallel to the optical lens; if the distance is determined to not meet the balance determination requirement, it means that the digital micromirror device is not parallel to the optical lens, and the installation angle of the digital micromirror device needs to be adjusted.

[0052] The specific contents of the parallel determination requirements include: the determination distances are consistent, or the distance difference between any two determination distances is less than a preset limit threshold.

[0053] The adjustment method of the digital micromirror device of the direct writing imaging exposure device provided in the embodiment of the present application uses the digital micromirror device to project a test image onto the focal plane of the optical lens; generates a control instruction for instructing the camera to respectively shoot clear images at multiple test points; after determining that the camera shoots clear images based on the control instruction, obtains the judgment distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when shooting the image is greater than a preset clarity; when it is determined that the judgment distance does not meet the preset parallel judgment requirement, adjusts the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement, wherein the parallel judgment requirement is used to determine the distance between the digital micromirror device and the optical lens. It can be seen that the present application only needs one projection operation to determine whether the digital micromirror device and the optical lens are balanced. Compared with the prior art that uses multiple exposures to determine whether the digital micromirror device and the optical lens are balanced, the overall adjustment time of the digital micromirror device is effectively shortened, and the efficiency of the parallel determination of the digital micromirror device and the optical lens is improved. It can quickly and accurately determine whether the digital micromirror device and the optical lens are parallel. Moreover, compared with the prior art that uses exposure lens movement to achieve multiple projections to test parallelism, the present application avoids the problem of calculation deviation caused by the mechanical operation of the exposure lens, and the final parallel effect of the digital micromirror device and the optical lens is better.

[0054] In a specific embodiment, before the camera captures an image, it is necessary to ensure that the clarity of the image focused by the camera during the capture is up to standard, that is, the clarity of the focused image is greater than a preset clarity.

[0055] The following clarity determination process is performed for each test point:

[0056] Obtain a target pixel corresponding to a test point and pixels to be compared within a preset range adjacent to the test point; calculate the square value of the grayscale difference between the target pixel and the pixel to be compared; and when it is determined that the square values ​​of the grayscale differences corresponding to all test points reach a preset value, determine that the clarity of the image focused during shooting is greater than the preset clarity.

[0057] Specifically, the specific calculation process of calculating the square value of the grayscale difference between the target pixel and the pixel to be compared is as follows:

[0058] The target grayscale value of the target pixel and the grayscale value to be compared of the pixel to be compared are obtained; the target grayscale value and the grayscale value to be compared are input into a preset grayscale difference square calculation formula to obtain the square value of the grayscale difference between the target pixel and the pixel to be compared output by the grayscale difference square calculation formula.

[0059] The grayscale difference square calculation formula is shown in formula (1):

[0060]

[0061] Among them, f(x, y) represents the grayscale value of the target pixel, f(x+n, y+m) represents the grayscale value of the pixel to be compared within a preset range, and n and m represent the range values ​​of the preset range.

[0062] Among them, one test point corresponds to one or more target positions, which are obtained according to the shape of the target figure.

[0063] Among them, n and m can be equal. In this case, a circle is drawn with the point where the target position is located as the center and m as the radius to obtain the preset range.

[0064] The above process allows the camera to confirm the image clarity and capture the image by itself, and the camera can also send the captured image to the background, which will determine the image clarity and, if it is determined that the image clarity meets the standard, send a shooting instruction to the camera to enable the camera to capture the image.

[0065] In a specific embodiment, before generating a control instruction for instructing the camera to capture a clear image at each test point, an image to be identified including all the test points is obtained, and the position of each test point in the image to be identified is identified.

[0066] In a specific embodiment, the specific implementation of generating a control instruction for instructing a camera to capture a clear image at each test point includes:

[0067] The position of the projected test point of the digital micromirror device is obtained; and a control instruction is generated to instruct the camera to move horizontally to the position to respectively take clear images.

[0068] Among them, the present application may include a camera, which can capture clear images of multiple test points through parallel movement of the camera; the present application may also include multiple cameras, and the number of cameras is less than or equal to the number of test points. When the number of cameras is less than the number of test points, the user matches the cameras and test points according to their actual needs, so that the cameras can capture clear images of the corresponding test points. When the number of cameras is equal to the number of test points, one camera corresponds to one test point.

[0069] Among them, this situation belongs to the situation that the number of cameras is less than the number of test points. That is, when it is determined that the number of cameras is less than the number of test points, a control instruction is generated to instruct the camera to move horizontally to a position to respectively take clear images.

[0070] The user can set the camera movement rules between the test points according to their actual needs. For example, the camera can be moved in rows, columns, or proximity according to the arrangement of the test points in the clear image.

[0071] In a specific embodiment, each test point is the same target graphic, and the target graphic includes: a polygon.

[0072] Among them, multiple target graphics in the same test image are the same to facilitate the determination of clarity and parallelism.

[0073] For example, when the target position of the target figure is one, the center of the polygon or the centroid of the polygon can be used as the target position. In this case, one test point corresponds to one clear image; when the target position of the target figure is multiple, the vertices of the polygon can be used as the target position. In this case, one test point corresponds to multiple clear images.

[0074] For example, when the target graphic is a triangle, it may include 3 target positions; when the target graphic is a quadrilateral, it may include 4 target positions; and so on.

[0075] In a specific embodiment, Figure 2 As shown, the test image includes four test points, and the positions of the four test points correspond to the positions of the four corners of the working surface of the digital micromirror device, and the graphics of the test points are triangles of the same shape. That is, the working surface of the digital micromirror device projects the test image, and the test points are located at the four corners of the test image. By projecting the test points at the four corners and then measuring the parallelism, it can be determined whether the four corners of the digital micromirror device are in the same plane. If they are not in the same plane, the judgment distances of each test point are not equal. By using the four judgment distances, it can be determined where the digital micromirror device is deflected, and then the overall position of the digital micromirror device can be adjusted. Therefore, by setting four test points at the four corners of the test image, the overall position of the digital micromirror device can be determined, and it can be determined whether the digital micromirror device is parallel to the optical lens and adjusted.

[0076] In a specific embodiment, the test points of the test image are multiple and distributed in a whole column. For example, the test image is equally divided into n rows and m columns to form n×m test points. By comparing the test distances of multiple test points, an adjustment data distribution diagram is formed to adjust the tilt angle of the DMD. In this way, the tilt angle of the DMD obtained by multiple test points is more accurate, and the installation position of the DMD is adjusted more precisely.

[0077] In a specific embodiment, the specific implementation of obtaining the determination distance corresponding to each test point of the optical lens includes:

[0078] Based on each test point, a first distance between the camera and the optical lens is obtained, and each first distance is determined as a determination distance.

[0079] Specifically, when the clarity of the image corresponding to the camera focus meets the standard, the rangefinder is used to collect the first distance between the camera and the optical lens in the current situation.

[0080] In a specific embodiment, the specific implementation of obtaining the determination distance corresponding to each test point of the optical lens includes:

[0081] Based on each test point, a second distance between a plane corresponding to the focal plane and a plane corresponding to the camera is obtained, and each second distance is determined as a determination distance.

[0082] Specifically, in this process, the camera is initially in the focal position. During the parallelism test, the distance that the camera moves to obtain a clear image of the test point is the second distance. This test process does not require the use of a rangefinder. The judgment distance can be directly obtained by monitoring the camera movement distance through the host computer, which saves costs and avoids the errors caused by the rangefinder.

[0083] In addition, when it is determined that the digital micromirror device is not parallel to the optical lens, the DMD is adjusted based on the second distance. Specifically, the tilt angle of the DMD and the difference between a certain point of the DMD and the parallel plane are determined by the second distance, and the DMD is adjusted based on the determined tilt angle and the difference between the parallel plane. Compared with obtaining the first distance, in this process, there is no need to calculate the difference between a certain point of the DMD and the parallel plane through the first distance, and the step of calculating the difference is omitted, and the parallelism test and DMD adjustment time of the DMD are shorter.

[0084] In a specific embodiment, after determining that the digital micromirror device is parallel to the optical lens, the digital micromirror device is used to project a test image onto the substrate through the optical lens, and the test image is projected onto a preset projection surface by adjusting the positions of the digital micromirror device and the optical lens on the Z axis as a whole.

[0085] Specifically, in the process of DMD adjustment, the present application only needs to ensure that the camera and the optical lens are parallel, not necessarily on the preset projection surface. After determining that the DMD adjustment is completed, the positions of the DMD and the optical lens on the Z axis are adjusted as a whole so that the test image is projected on the preset projection surface.

[0086] This application only needs one projection to complete whether the DMD is installed parallel to the optical lens, which is simple and fast, and has higher detection efficiency. It also saves the time of exposure operation, saves the cost of exposure board, and improves detection efficiency. In addition, the horizontal movement of the camera makes the detection result more accurate and the effect better.

[0087] The embodiment of the present application also provides an adjustment device for a digital micromirror device of a direct writing imaging exposure device. The specific implementation of the device can refer to the description of the adjustment method of the digital micromirror device of the direct writing imaging exposure device, and the repeated parts will not be repeated. Figure 3 As shown, the device comprises:

[0088] A projection module 301 is used to project a test image onto a focal plane of an optical lens using a digital micromirror device, wherein the test image includes at least two test points;

[0089] A generating module 302 is used to generate a control instruction for instructing the camera to take clear images at each test point;

[0090] An acquisition module 303 is used to acquire the determination distances corresponding to the optical lens at each test point after determining that the camera performs clear image shooting based on the control instruction, wherein the image clarity focused by the camera during image shooting is greater than a preset clarity;

[0091] The adjustment module 304 is used to adjust the installation angle of the digital micromirror device until the determination distance meets the parallel determination requirement when it is determined that the determination distance does not meet the preset parallel determination requirement, wherein the parallel determination requirement is used to determine whether the digital micromirror device is parallel to the optical lens.

[0092] In a specific embodiment, the acquisition module 303 is used to acquire the first distance between the camera and the optical lens based on each test point, and determine each first distance as the determination distance.

[0093] In a specific embodiment, the acquisition module 303 is used to acquire, based on each test point, a second distance between a plane corresponding to the focal plane and a plane corresponding to the camera, and determine each second distance as a determination distance.

[0094] In a specific embodiment, the generating module 302 is used to perform the following clarity determination process for each test point:

[0095] Obtain a target pixel corresponding to a test point and pixels to be compared within a preset range adjacent to the test point; calculate the square value of the grayscale difference between the target pixel and the pixel to be compared; and when it is determined that the square values ​​of the grayscale differences corresponding to the test points have reached preset values, determine that the clarity of the image focused during shooting is greater than the preset clarity.

[0096] In a specific embodiment, the generating module 302 is used to obtain the position of the projected test point of the digital micromirror device; and generate a control instruction instructing the camera to move horizontally to the position to respectively take clear images.

[0097] In a specific embodiment, the device also includes a recognition module, which is used to obtain an image to be recognized including all test points and identify the position of each test point in the image to be recognized; a generation module 302 is used to generate control instructions instructing the camera to move horizontally to the position of each test point and take clear images respectively.

[0098] In a specific embodiment, each test point is the same target graphic, and the target graphic includes a polygon.

[0099] In a specific embodiment, the adjustment module 304 is further used to project the test image onto the substrate through the optical lens using the digital micromirror device, and to project the test image onto a preset projection surface by overall adjusting the positions of the digital micromirror device and the optical lens on the Z axis.

[0100] Figure 4 An example of a physical structure diagram of an electronic device is shown in FIG. Figure 4 As shown, the electronic device may include: a processor (processor) 401, a communication interface (Communications Interface) 402, a memory (memory) 403 and a communication bus 404, wherein the processor 401, the communication interface 402, and the memory 403 communicate with each other through the communication bus 404. The processor 401 can call the logic instructions in the memory 403 to execute the adjustment method of the digital micromirror device of the direct-write imaging exposure device, the direct-write imaging exposure device includes: a digital micromirror device and an optical lens, the digital micromirror device projects an image through the optical lens, the method includes: using the digital micromirror device to project a test image onto the focal plane of the optical lens, the test image includes at least two test points; generating a control instruction for instructing the camera to take a clear image at each test point; after determining that the camera takes a clear image based on the control instruction, obtaining the judgment distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when taking the image is greater than the preset clarity; when it is determined that the judgment distance does not meet the preset parallel judgment requirement, adjusting the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement, wherein the parallel judgment requirement is used to determine whether the digital micromirror device and the optical lens are parallel.

[0101] In addition, the logic instructions in the above-mentioned memory 403 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on such an understanding, the technical solution of the present invention can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0102] On the other hand, the present invention also provides a computer program product, which includes a computer program stored on a non-transitory computer-readable storage medium, and the computer program includes program instructions. When the program instructions are executed by a computer, the computer can execute the adjustment method of the digital micromirror device of the direct-write imaging exposure device provided by the above methods. The direct-write imaging exposure device includes: a digital micromirror device and an optical lens, and the digital micromirror device projects an image through the optical lens. The method includes: using the digital micromirror device to project a test image onto the focal plane of the optical lens, and the test image includes at least two test points; generating a control instruction for instructing a camera to perform clear image shooting at each test point; after determining that the camera performs clear image shooting based on the control instruction, obtaining the judgment distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when shooting the image is greater than the preset clarity; when it is determined that the judgment distance does not meet the preset parallel judgment requirement, adjusting the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement, wherein the parallel judgment requirement is used to determine whether the digital micromirror device and the optical lens are parallel.

[0103] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which is implemented when the processor executes the method for adjusting the digital micromirror device of the direct-write imaging exposure device provided in the above-mentioned embodiments, the direct-write imaging exposure device comprising: a digital micromirror device and an optical lens, the digital micromirror device projects an image through the optical lens, the method comprising: using the digital micromirror device to project a test image onto a focal plane of the optical lens, the test image comprising at least two test points; generating a control instruction for instructing a camera to take a clear image at each test point; after determining that the camera takes a clear image based on the control instruction, obtaining a judgment distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when taking the image is greater than a preset clarity; when it is determined that the judgment distance does not meet the preset parallel judgment requirement, adjusting the installation angle of the digital micromirror device until the judgment distance meets the parallel judgment requirement, wherein the parallel judgment requirement is used to determine whether the digital micromirror device and the optical lens are parallel.

[0104] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0105] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0106] Finally, it should be noted that the above is only the preferred implementation of the present application, and the present application is not limited to the above embodiments. It is understood that other improvements and changes directly derived or associated by those skilled in the art without departing from the spirit and concept of the present application should be considered to be included in the scope of protection of the present application.

Claims

1. A method for adjusting a digital micromirror device of a direct-write imaging exposure device, the direct-write imaging exposure device comprising: A digital micromirror device and an optical lens, wherein the digital micromirror device projects an image through the optical lens, wherein the method comprises: Projecting a test image onto a focal plane of the optical lens using the digital micromirror device, wherein the test image includes at least two test points; Generate a control instruction for instructing the camera to take clear images at each test point; After determining that the camera captures a clear image based on the control instruction, obtaining the determination distance corresponding to each test point of the optical lens, wherein the clarity of the image focused by the camera when capturing the image is greater than a preset clarity; When it is determined that the determination distance does not meet the preset parallel determination requirement, the installation angle of the digital micromirror device is adjusted until the determination distance meets the parallel determination requirement, wherein the parallel determination requirement is used to determine whether the digital micromirror device is parallel to the optical lens.

2. The method for adjusting the digital micromirror device of the direct writing imaging exposure device according to claim 1, characterized in that: Obtaining the determination distance corresponding to each test point of the optical lens, including: Based on each of the test points, a first distance between the camera and the optical lens is acquired, and each of the first distances is determined as the determination distance.

3. The method for adjusting the digital micromirror device of the direct writing imaging exposure device according to claim 1, characterized in that: Obtaining the determination distance corresponding to each test point of the optical lens, including: Based on each of the test points, a second distance between a plane corresponding to the focal plane and a plane corresponding to the camera is acquired, and each of the second distances is determined as the determination distance.

4. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: The camera captures a clear image based on the control instruction, including: The following clarity determination process is performed for each test point: Obtain a target pixel corresponding to the test point and pixels to be compared within a preset range adjacent to the test point; calculate the square value of the grayscale difference between the target pixel and the pixel to be compared; and when it is determined that the square values ​​of the grayscale differences corresponding to the test points have reached preset values, determine that the clarity of the image focused during shooting is greater than the preset clarity.

5. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: Generate control instructions for instructing the camera to capture clear images at each test point, including: Obtaining the position of the projection test point of the digital micromirror device; Generate a control instruction to instruct the camera to move horizontally to the position to take clear images respectively.

6. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: Before generating a control instruction for instructing the camera to take clear images at each test point, the method further includes: Acquire an image to be identified including all the test points, and identify the position of each test point in the image to be identified; Generate control instructions for instructing the camera to capture clear images at each test point, including: Generate control instructions to instruct the camera to move horizontally to the positions of the test points and take clear images respectively.

7. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: Each test point is the same target graphic, and the target graphic includes a polygon.

8. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: The test image includes four test points, and the positions of the four test points correspond to the positions of the four corners of the working surface of the digital micromirror device respectively.

9. The method for adjusting a digital micromirror device of a direct writing imaging exposure device according to any one of claims 1 to 3, characterized in that: After determining that the digital micromirror device is parallel to the optical lens, the method further includes: The test image is projected onto a substrate through an optical lens using the digital micromirror device, and the positions of the digital micromirror device and the optical lens on the Z axis are adjusted as a whole so that the test image is projected onto a preset projection surface.

10. An adjustment device for a digital micromirror device of a direct writing imaging exposure device, the direct writing imaging exposure device comprising: A digital micromirror device and an optical lens, wherein the digital micromirror device projects an image through the optical lens, wherein the device comprises: A projection module, used to project a test image onto a focal plane of the optical lens using the digital micromirror device, wherein the test image includes at least two test points; A generating module, used for generating a control instruction for instructing the camera to take clear images at each test point; An acquisition module, configured to acquire the determination distances corresponding to the optical lens at each test point after determining that the camera performs clear image shooting based on the control instruction, wherein the image clarity focused by the camera during image shooting is greater than a preset clarity; The adjustment module is used to adjust the installation angle of the digital micromirror device until the determination distance meets the parallel determination requirement when it is determined that the determination distance does not meet the preset parallel determination requirement, wherein the parallel determination requirement is used to determine whether the digital micromirror device is parallel to the optical lens.

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