Integrated equipment and method for preparing ferrite-microwave dielectric ceramic composite substrate by using flash Joule thermal method

Abstract

The invention discloses integrated equipment and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule thermal method. The integrated equipment comprises a central control system, an identification camera, a path planning system, a Joule heating system, a base station, a preheating system, a reaction chamber and a conductive clamp. The central control system is mainly used for storing process parameters, receiving scanning signals and sending commands; the path planning system executes a command planning path set by the central system; the Joule heating system is used for charging and discharging a capacitor and is connected with the central control system to release electricity for positive and negative electrodes in real time; a resistance wire is wrapped outside the base to preheat the material, copper wires are arranged at the bottom of the base in a manner of penetrating through array apertures, and a copper sheet is welded at the upper part to improve the conductive area; quartz glass is arranged outside the reaction chamber, the upper cover plate and the lower cover plate can axially move to fix the reaction position, and the conductive clamp is used for non-conductive ferrite materials. According to the invention, the ferrite and the microwave dielectric ceramic can be quickly connected to prepare the composite substrate with excellent electromagnetic performance.

Description

Technical Field

[0001] The invention belongs to the field of composite material preparation, and particularly relates to an integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash evaporation Joule heat method. Background Art

[0002] In modern radar systems, microwave ferrite circulators are key magnetic devices that use ferrite gyromagnetic materials and magnetic resonance to achieve signal isolation and transmission, so as to control the signal on and off between the antenna and the transceiver branch. With the rapid development of radar technology, microwave devices and components are developing in the direction of miniaturization, integration, high power density, and broadband. However, microstrip circulator devices based on traditional single ferrite substrate design are subject to technical problems such as low dielectric constant, large magnetic loss, low thermal conductivity, and second harmonic interference of ferrite materials. The miniaturization, broadband, and high power of the device have reached their limits and cannot meet the needs of the development of high-power and ultra-wideband (S-Ku) new radars. Microwave dielectric ceramics have become the focus of research in the field of materials science today due to their excellent performance. They have the advantages of low dielectric loss, high dielectric constant, and relatively stable dielectric constant temperature coefficient. Therefore, the development of heterogeneous integrated circulators can inherit the technical characteristics of dielectric ceramics such as high dielectric constant, low loss and adjustable performance, achieve device miniaturization and ultra-wideband performance breakthroughs, and solve the problem that single ferrite devices cannot meet ultra-wideband, high power and low impedance matching. Existing heterogeneous integration processes include co-firing, glass paste brazing connection, bonding, etc. However, these connection methods have major disadvantages. For example, the co-firing process requires different materials to have similar thermal expansion coefficients, otherwise stress mismatch between materials may occur during the sintering process, thereby causing cracks or failure; and although glass paste brazing can provide better sealing performance, its mechanical strength is usually lower than that of traditional metal brazing or welding technology. Glass itself is brittle and is prone to cracking or breaking when subjected to impact, vibration or mechanical load. And the above connection methods all require a long molding time. Therefore, it is necessary to develop a new and efficient connection method to prepare high-quality ferrite composite substrates. Flash Joule heating (FJH) is a method based on capacitor discharge to generate instantaneous high temperature. Its principle is to use the Joule heat generated when current passes through the conductor to quickly heat the conductor material. Unlike traditional heating methods, FJH can reach extremely high temperatures (>2500K) instantly. The huge temperature gradient reduces the side effects of long-term high-temperature heating. It has been widely used in the efficient preparation of graphene, high-entropy alloys, electrode materials and other materials. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides an integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash Joule heating method, which can complete high-quality connection between a ferrite disc and a microwave dielectric ceramic in a very short time. The prepared composite substrate has a narrow transition zone of heterogeneous materials, which greatly avoids the deterioration of electromagnetic performance caused by irregular element distribution in the transition zone, and the present invention can control the time of power-on heating to meet the preparation requirements of different materials. It saves production time, shortens the production cycle, and improves economic benefits.

[0004] The present invention is achieved through the following technical solutions:

[0005] An integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash Joule heating method, characterized in that it includes a central control system, a recognition camera, a path planning system, a Joule heating system, a base, a preheating system, a reaction chamber, and a conductive fixture.

[0006] The central control system plays the role of command transmission and data processing in the entire integrated equipment, connecting the path planning system, recognition camera, Joule heating system, base temperature control system, and the telescopic system of the upper and lower covers of the reaction chamber.

[0007] The path planning system is connected to the visual scanning camera and integrated with the central control system. The visual scanning camera identifies the color changes of ferrite and microwave dielectric ceramics on the composite substrate and the diameter size of the materials to determine the relative positions of dissimilar materials and transmits the data to the central control system. The central control system receives the transmission signal to plan the travel route, adjusts the position of the cover telescopic rod, and transmits the plane planning path signal to the path planning system. After receiving the signal, the path planning system completes the travel instruction and transmits the completion instruction to the central control system. The central control system then transmits the release signal to the flash heating system according to the manually input parameter signal to complete the discharge.

[0008] The Joule heating system is used to store and release electric energy. It is equipped with 20 capacitors. The power supply is turned on to charge the capacitors before the experiment. After the preparation is completed, the standby signal is released. The central control system recognizes the signal and adjusts the telescopic distance of the upper and lower covers so that the upper cover electrode contacts the upper surface of the ferrite and the lower surface contacts the conductive copper sheet. During the experiment, the Joule heating equipment automatically measures the resistance value at the connection point. According to the discharge signal transmitted by the central control system, the signal parameters are analyzed to determine the required voltage value and select some capacitors to discharge the material. The resistance value, discharge time, voltage and current and other parameters are recorded and transmitted back to the central control system.

[0009] The base is connected to the lower cover plate, and the base plate is surrounded by heating resistor wires. The temperature control system is integrated with the central control system to achieve preheating of the base plate and improve the activity of the material. The array of through-apertures is arranged on the cover plate, and the arrangement is consistent with the microwave dielectric ceramic substrate. The diameter of the cover plate aperture is slightly larger than the diameter of the ferrite disc. Conductive copper wires are arranged inside the through-apertures. The copper sheet welded on the upper part of the copper wire is embedded in the cover plate at a distance of about 0.5mm from the upper surface to fix the position of the ferrite disc and make full contact with the copper sheet.

[0010] The reaction chamber consists of four parts: the vertical pole, the upper cover plate and the telescopic rod of the upper cover plate, the lower cover plate and the telescopic rod of the lower cover plate, and the outer wall of quartz glass. The upper part of the vertical pole is opened to facilitate the regular connection of all lines. The upper part of the upper cover plate is connected to the telescopic rod and the lower part is connected to the path planning system. The upper part of the lower cover plate is connected to the base, and the lower cover plate and the base plate are distributed with the same through-array apertures, which is convenient for the array copper wire to be connected. The lower part of the lower cover plate is connected to the lower telescopic rod, and acts simultaneously with the upper cover plate to realize the Z-direction movement of the composite substrate.

[0011] The recognition camera is a high-precision visual recognition camera that can scan and identify the specific location and size of materials of different colors. The visual recognition camera is connected to the central control system and can transmit the scanning signal in real time to analyze the location and size of heterogeneous materials. Based on this signal, the central control system and the path planning system are linked to complete the high-precision route. In addition, after the discharge process is completed, the diffusion trend and diffusion range of the elements can be judged according to the color change, and the experimental quality can be roughly evaluated.

[0012] The conductive fixture is designed for non-conductive ferrite materials. During the specific experiment, the composite substrate can be clamped and thermally processed through its own Joule heating effect. The aperture array on the upper surface is consistent with the aperture distribution on the ceramic substrate, and the diameter is smaller than the diameter of the ferrite disc to facilitate clamping the ferrite, while leaving enough scanning positions for the scanning recognition head and the infrared camera. There is a groove at the bottom and it bulges downward to facilitate accommodating the ferrite disc and cooperate with the groove on the substrate to ensure that the entire conductive fixture is in a path when the voltage is released.

[0013] The path planning system includes an infrared temperature recognition head, which can perform infrared scanning on the microwave dielectric ceramic substrate and ferrite disc during the preheating stage. The scanned temperature signal is transmitted to the central control system to further adjust the temperature range. The heating curve can be recorded during the Joule heating stage to screen out the most suitable process parameters. In addition, the path planning system includes a graphite electrode (here the negative electrode) on the X slider to adapt to the ultra-high temperature working environment. Among them, the graphite electrode, scanning recognition head, and infrared thermometer are distributed on the X slider at the same time.

[0014] The Joule heating system can charge 20 groups of capacitors at one time, and can be partially discharged as needed, so it can be discharged multiple times. In addition, it is equipped with real-time voltage monitoring and safety valves to ensure that the voltage that can be touched by the human body is below the safe voltage when the entire device is discharged.

[0015] A circuit box is fixed at the bottom of the base, where external copper wires are integrated and connected to the electrode (here the positive electrode) and an external Joule heating device.

[0016] The bottom of the reaction chamber and the side of the vertical pole are connected with a fixed base platform, and a circle of protrusions on the outer wall of the base platform is used to fix the quartz glass tube to prevent sliding displacement. The outer rings of the upper and lower cover plates are covered with silicone spiral pads to enhance the friction with the wall tube.

[0017] An integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method, characterized by adopting the following steps:

[0018] Step 1: Preparation before the composite substrate is prepared, mainly including the preparation of ferrite and microwave dielectric ceramic materials, processing the ferrite into small discs, processing the microwave dielectric ceramics into substrates and punching holes as required, wherein the diameters of the discs and holes are designed according to the difference in thermal expansion of dissimilar materials, so that the circular holes on the substrate are slightly larger than the discs.

[0019] Step 2: Place the microwave dielectric ceramic substrate on the base plate, and manually embed the disc into the circular hole with tweezers. When embedding, it should be noted that the ferrite disc falls into the array circular hole of the base plate and has good contact with the copper sheet on the base plate (this step is for ferrite materials with a certain conductivity. If the ferrite material is not conductive, place the dielectric ceramic base plate and the ferrite disc in a conductive fixture and fix them).

[0020] Step 3: Cover the quartz glass reaction tube, and the central control system releases a motion signal to the telescopic rods at the upper and lower covers to place the composite substrate in a suitable reaction position.

[0021] Step 4: The visual recognition camera identifies and scans. Ferrite should be a brown disc, and microwave dielectric ceramics should be a light yellow square substrate (the conductive fixture should be a dark yellow copper sheet). The scanning head moves in an empty space to identify the relative positions of all ferrite discs and microwave dielectric ceramics, and transmits this signal to the central control system.

[0022] Step 5: The central control system receives the position signal and plans the route, transmits the route to the path planning system, and starts the connection of the starting point. The central control system transmits the working signal to the temperature control system and the flash Joule device (this step is for ferrite materials with a certain conductivity. If the material is not conductive, there is no need for route planning, just keep the negative electrode close to the conductive fixture).

[0023] Step 6: The temperature control system works to reach the preheating temperature to increase the reactivity of heterogeneous materials; the flash Joule device controls the charging of the capacitor and discharges the positive and negative electrodes according to the received parameter signal. The ferrite original sheet generates heat instantly due to the flow of current, and the temperature rises. When the temperature reaches a certain level, the ferrite disc expands due to heat, and the elements in the sheet begin to diffuse to the dielectric ceramic side, while the microwave dielectric ceramic also begins to expand due to thermal radiation and expands to the ferrite side. This allows heterogeneous materials to diffuse and connect with each other. Due to the extremely fast cooling time and no insulation time, the transition zone of the joint is very narrow, thereby avoiding the local performance deterioration caused by the excessively wide transition zone and affecting the overall performance of the composite substrate (this step is for ferrite materials with a certain conductivity. If the material is not conductive, the composite substrate is connected and formed through thermal radiation of the conductive fixture).

[0024] Step 7: The temperature recognition head scans the temperature of the wafer and substrate, collects the temperature rise signal, and transmits it to the central control system. The central control system compares the temperature with the temperature at which the physical phase begins to diffuse. At the same time, the visual scanning camera transmits the scanned image to the central control system for observation. If the temperature difference is within a reasonable range, the next point is scanned and the electricity is released. (This step is for conductive ferrite materials. If the ferrite material is not conductive, there is no need for single-point scanning. Just heat the composite substrate and repeat step 6.) If it does not meet the requirements, adjust the voltage parameters and repeat step 6 if no obvious combination is observed in the scanning effect.

[0025] Step 8: Complete the discharge of all path points and evaluate the performance of the composite substrate. The present invention has at least the following advantages and effects over the prior art:

[0026] Compared with the traditional connection method, the present invention can complete high-quality connection in a very short time, solving the problem of slow heating speed and low efficiency of the traditional heating method. In addition, the present invention does not require a long heating and insulation process during the heating process, and the connection transition zone is narrow, avoiding the intermediate layer performance deterioration zone formed by excessive diffusion of elements. In addition, the whole process does not require the introduction of a third phase material, thereby ensuring the purity of the heterogeneous integrated substrate.

[0027] The present invention can release voltage as required according to different materials and different element diffusion modes to obtain different reaction transition zone ranges, has strong controllability, and can meet the connection of multiple materials. At the same time, the temperature range is wide, and a temperature environment of up to 3000K can be achieved.

[0028] The present invention occupies a small area, has a small actual reaction chamber, has a wide range of applications, can be applied to both conductive ferrites and non-conductive ferrites, is easier to place than conventional heating furnaces, has low external heat radiation and therefore has a high energy utilization rate, has a small exposure area to the human body, and is safer and more reliable.

[0029] The invention has a relatively simple structure, simple and easy technical means, and has outstanding substantial progress compared with the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of an integrated device for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash evaporation Joule heat method;

[0031] Figure 1 The numbers represent: 1-reaction chamber; 2-path planning system; 3-lower cover; 4-external power wiring integration system; 5-graphite negative electrode; 6-positive electrode wiring port; 7-visual scanning recognition head; 8-central control system; 9-joule heating system; 10-internal circuit diagram of joule heating system; 1-1-vertical pole; 1-2-quartz glass outer wall; 1-3-base; 4-1-upper cover telescopic rod wiring; 4-2-power line integration interface; 4-3 scanning recognition head and temperature sensor wiring; 4-4-lower cover telescopic rod wiring.

[0032] Figure 2 The invention discloses a process flow chart of an integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash evaporation Joule heat method.

[0033] Figure 3 This is a partial enlarged view of the reaction chamber, where ABC is a schematic diagram of the reaction chamber in different states

[0034] Figure 3 The numbers in the figure indicate: 4-external power wiring integration system; 1-1-vertical pole; 1-2-quartz glass outer wall; 1-3-base; 1-4-base wire hole; 1-5-upper telescopic rod.

[0035] Figure 4 It is a partial enlarged view of the upper cover, which includes a schematic diagram of the path planning system structure, and ABCD are enlarged views of different areas.

[0036] Figure 4 The numbers in the figure indicate: 2-1-X-axis slide rail; 2-2-Y-axis slide rail; 2-3-Y-axis slider connection port; 2-4-Y-axis slider enlarged view; 2-5-X-axis slider; 2-6-X-axis slider connection port; 2-7-infrared temperature tester; 2-8-graphite cathode welding connection port; 2-9-visual scanning recognition head.

[0037] Figure 5 This is a partial enlarged view of the lower cover, including the base and preheating system structure diagram

[0038] Figure 5The numbers in the figure indicate: 6-positive pole connection port; 3-1-microwave dielectric ceramic substrate; 3-2-top view of ferrite disc; 3-3-pre-drilled laser hole of microwave dielectric ceramic; 3-4-copper wire integrated circuit box; 3-5-substrate; 3-6-side view of ferrite disc; 3-7-copper sheet embedded in substrate; 3-8-array-arranged copper wire column; 3-9-junction box support column; 3-10-preheating resistance wire; 3-11-preheating system connection point; 3-12-resistance wire limiter; 3-13-lower cover plate silicone spiral pad; 3-14-lower cover plate telescopic rod motor.

[0039] Figure 6 is a schematic diagram of a conductive fixture. DETAILED DESCRIPTION

[0040] The technical solution of the embodiment of the present invention will be further described in detail below with reference to the accompanying drawings.

[0041] Example

[0042] like Figure 1 As shown, the present invention discloses an integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method, which is characterized by: including a central control system 8, a recognition camera 7, a path planning system 2, a Joule heating system 9, a base and preheating system 3, and a reaction chamber 1.

[0043] The central control system 8 plays the role of command transmission and data processing in the entire integrated device, connecting the path planning system 2, the recognition camera 7, the Joule heating system 9, the base temperature control system 3, and the telescopic system of the upper and lower covers of the reaction chamber 1.

[0044] The path planning system 2 is connected to the visual scanning camera 7 and integrated with the central control system 8. The visual scanning camera 7 identifies the color changes of the ferrite 3-2 and the microwave dielectric ceramic 3-1 on the composite substrate and the diameter size of the materials to determine the relative positions of the dissimilar materials, and transmits the data to the central control system 8. The central control system 8 receives the transmission signal to plan the travel route 2, adjusts the position of the cover telescopic rod, and transmits the plane planning path signal to the path planning system 2. After receiving the signal, the path planning system 2 completes the travel instruction and transmits the completion instruction to the central control system 8. The central control system 8 immediately transmits the release signal to the flash heating system 9 according to the manually input parameter signal to complete the discharge.

[0045] The Joule heating system 9 is used for storing and releasing electric energy. It is equipped with 20 capacitors. Before the experiment, the power is turned on to charge the capacitors. After the preparation is completed, the standby signal is released. The central control system 8 recognizes the signal and adjusts the telescopic distance of the upper and lower covers so that the upper cover electrode contacts the upper surface of the ferrite 3-1 and the lower surface contacts the conductive copper sheet 3-7. During the experiment, the Joule heating system 9 automatically measures the resistance value at the connection point. According to the discharge signal transmitted by the central control system 8, the signal parameters are analyzed to determine the required voltage value and select some capacitors to discharge the material, and the resistance value, discharge time, voltage and current and other parameters are recorded and transmitted back to the central control system 8.

[0046] The base is connected to the lower cover 3, and the base is surrounded by heating resistors 3-10. The temperature control system is integrated with the central control system 8, which can realize preheating of the base and improve the activity of the material. The array of through-apertures is arranged on the cover, and the arrangement is consistent with the microwave dielectric ceramic substrate 3-1. The diameter of the cover aperture is slightly larger than the diameter of the ferrite disc. Conductive copper wires 3-8 are arranged inside the through-apertures. The copper sheet 3-7 welded on the upper part of the copper wire is embedded in the cover at a distance of about 0.5mm from the upper surface to fix the position of the ferrite disc and fully contact with the copper sheet 3-7.

[0047] The reaction chamber is composed of four parts: a vertical pole 1-1, an upper cover plate and an upper cover plate telescopic rod 1-5, a lower cover plate and a lower cover plate telescopic rod 3-14, and an outer wall of a quartz glass 1-2. The upper part of the vertical pole 1-1 is opened to facilitate the regular connection of all lines 4. The upper part of the upper cover plate is connected to the telescopic rod 1-5 and the lower part is connected to the path planning system 2. The upper part of the lower cover plate is connected to the base, and the lower cover plate and the base are distributed with the same through-array aperture, which is convenient for the array copper wire 3-8 to be connected. The lower part of the lower cover plate is connected to the lower telescopic rod 3-14, and acts simultaneously with the upper cover plate to realize the Z-direction movement of the composite substrate.

[0048] The recognition camera 7 is a high-precision visual recognition camera that can scan and identify the specific location and size of materials of different colors. The visual recognition camera is connected to the central control system 8, and can transmit the scanning signal in real time to analyze the location and size of the heterogeneous materials. According to this signal, the central control system 8 is linked with the path planning system 2 to complete the high-precision route travel. In addition, after the discharge process is completed, the diffusion trend and diffusion range of the elements can be judged according to the color change, and the experimental quality can be roughly evaluated.

[0049] The path planning system 2 includes an infrared temperature recognition head 2-7, which can perform infrared scanning on the microwave dielectric ceramic substrate 3-1 and the ferrite disc 3-2 during the preheating stage. The scanned temperature signal is transmitted to the central control system 8 to further adjust the temperature range. The heating curve can be recorded during the Joule heating stage to screen out the most suitable process parameters. In addition, the X slider 2-5 in the path planning system 2 includes a graphite electrode (here the negative electrode) to adapt to the working environment under ultra-high temperature. Among them, the graphite electrode, the scanning recognition head 2-9, and the infrared thermometer 2-7 are distributed on the X slider 2-5 at the same time.

[0050] The Joule heating system 9 can charge 20 groups of capacitors at one time and can discharge partially according to the needs when in use, so that it can discharge multiple times. In addition, it is equipped with real-time voltage monitoring and safety valves to ensure that the voltage that can be touched by the human body is below the safe voltage when the entire device is discharged.

[0051] A circuit box 3-4 is fixed at the bottom of the base, and external copper wires 3-8 are integrated here and connected to the electrode (here the positive electrode) and an external Joule heating system 9.

[0052] The bottom of the reaction chamber and the side of the vertical pole are connected with a fixed base platform 1-3, and a circle of protrusions on the outer wall of the base platform is used to fix the quartz glass tube to prevent sliding displacement. The outer rings of the upper and lower cover plates are covered with silicone spiral pads 3-13 to enhance the friction with the wall tube.

[0053] An integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash Joule heating method, comprising the following steps:

[0054] Step 1: Preparation before the composite substrate is prepared, mainly including the preparation of ferrite and microwave dielectric ceramic materials (taking K15 magnesium carbonate ceramic and manganese spinel ferrite as examples (with certain conductivity)), processing the ferrite into small discs, processing the microwave dielectric ceramics into substrates (specifications are 50mm×50mm×2mm) and punching holes as required, wherein the diameters of the discs and the gaps are designed according to the difference in thermal expansion of dissimilar materials, so that the circular holes on the substrate are slightly larger than the discs (the preset aperture is 5.1mm and the disc diameter is 5mm).

[0055] Step 2: Place the microwave dielectric ceramic substrate on the base plate and manually insert the disc into the circular hole with tweezers. When inserting, it should be noted that the ferrite disc falls into the array circular hole of the base plate (the hole diameter on the base plate is 5.15mm) and has good contact with the copper sheet on the base plate.

[0056] Step 3: Cover the quartz glass reaction tube (the outer diameter of the quartz glass tube is 100 mm and the thickness is 5 mm), and the central control system releases a motion signal to the telescopic rods at the upper and lower covers to place the substrate in a suitable reaction position (generally in the middle of the quartz glass tube).

[0057] Step 4: The visual recognition camera identifies and scans. Ferrite should be a brown disc, and microwave dielectric ceramics should be a light yellow square substrate. The scanning head moves in an empty space to identify the relative positions of all ferrite discs and microwave dielectric ceramics, and transmits this signal to the central control system.

[0058] Step 5: The central control system receives the position signal and plans the route, transmits the route to the path planning system, and starts the connection of the starting point. The central control system transmits the working signal to the temperature control system and the flash joule device.

[0059] Step 6: The temperature control system works to reach the preheating temperature to increase the reactivity of heterogeneous materials; the flash Joule device controls the charging of the capacitor and discharges the positive and negative electrodes according to the received parameter signal. The ferrite original sheet generates heat instantly due to the flow of current, and the temperature rises. When the temperature reaches a certain level, the ferrite disc expands due to heat, and the elements in the sheet begin to diffuse to the dielectric ceramic side, while the microwave dielectric ceramic also begins to expand due to thermal radiation and expands to the ferrite side. This allows heterogeneous materials to diffuse and connect with each other. Due to the extremely fast cooling time and no insulation time, the joint transition zone is very narrow, thereby avoiding the local performance deterioration caused by the excessively wide transition zone and affecting the overall performance of the composite substrate.

[0060] Step 7: The temperature recognition head scans the temperature of the wafer and substrate, collects the temperature rise signal, and transmits it to the central control system. The central control system compares the temperature with the temperature at which the physical phase begins to diffuse. At the same time, the visual scanning camera transmits the scanned image to the central control system for observation. If the temperature difference is within a reasonable range, the next point is scanned and the electricity is released. If it does not meet the requirements, the voltage parameters are adjusted. If no obvious combination is observed in the scanning effect, step 6 is repeated.

[0061] Step 8: Complete the discharge of all path points and evaluate the performance of the composite substrate.

[0062] The above description is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements without departing from the principle of the present invention, and these improvements should also be regarded as within the protection scope of the present invention.

Claims

1. An integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash Joule heating method, characterized in that: It includes a central control system, a recognition camera, a path planning system, a Joule heating system, a base, a preheating system, a reaction chamber, and a conductive fixture. The central control system plays a role in command transmission and data processing in the entire integrated equipment, connecting the path planning system, recognition camera, Joule heating system, base platform temperature control system, and the telescopic system of the upper and lower covers of the reaction chamber. The path planning system is connected to a visual scanning camera and integrated with a central control system. The visual scanning camera identifies the color changes of ferrite and microwave dielectric ceramics on the composite substrate and the diameters of the materials to determine the relative positions of the heterogeneous materials, and transmits the data to the central control system. The central control system receives the transmission signal to plan the travel route, adjusts the position of the cover telescopic rod, and transmits the plane planning path signal to the path planning system. After receiving the signal, the path planning system completes the travel instruction and transmits the completion instruction to the central control system. The central control system then transmits a release signal to the flash heating system according to the manually input parameter signal to complete the discharge. The Joule heating system is used for the storage and release of electric energy. It is equipped with 20 capacitors. The power supply is turned on before the experiment to charge the capacitors. After the preparation is completed, the standby signal is released. The central control system recognizes the signal and adjusts the telescopic distance of the upper and lower covers so that the upper cover electrode contacts the upper surface of the ferrite and the lower surface contacts the conductive copper sheet. During the experiment, the Joule heating equipment automatically measures the resistance value at the connection point. According to the discharge signal transmitted by the central control system, the signal parameters are analyzed to determine the required voltage value and select some capacitors to discharge the material, and the resistance value, discharge time, voltage and current and other parameters are recorded and transmitted back to the central control system. The base is connected to the lower cover plate, and the base plate is surrounded by heating resistance wires. The temperature control system is integrated with the central control system, which can realize preheating of the base plate and improve the activity of the material. The array of through-apertures is arranged on the cover plate, and the arrangement method is consistent with the microwave dielectric ceramic substrate. The diameter of the cover plate aperture is slightly larger than the diameter of the ferrite disc. Conductive copper wires are arranged inside the through-apertures. The copper sheet welded on the upper part of the copper wire is embedded in the cover plate about 0.5mm away from the upper surface to fix the position of the ferrite disc and make full contact with the copper sheet. The reaction chamber is composed of four parts: a vertical pole, an upper cover plate and an upper cover plate telescopic rod, a lower cover plate and a lower cover plate telescopic rod, and a quartz glass outer wall. The upper part of the vertical pole is opened to facilitate the regular connection of all lines. The upper part of the upper cover plate is connected to the telescopic rod and the lower part is connected to the path planning system. The upper part of the lower cover plate is connected to the base, and the lower cover plate and the base are distributed with the same through-array apertures, which is convenient for the array copper wire to be connected. The lower part of the lower cover plate is connected to the lower telescopic rod, and acts simultaneously with the upper cover plate to realize the Z-direction movement of the composite substrate. The recognition camera is a high-precision visual recognition camera that can scan and identify the specific location and size of materials of different colors. The visual recognition camera is connected to the central control system and can transmit the scanning signal in real time to analyze the location and size of the heterogeneous materials. According to this signal, the central control system and the path planning system are linked to complete the high-precision route. In addition, after the discharge process is completed, the diffusion trend and diffusion range of the elements can be judged according to the color change, and the experimental quality can be roughly evaluated. The conductive clamp is designed for non-conductive ferrite materials. During a specific experiment, the composite substrate can be clamped and thermally processed through its own Joule heating effect. The aperture of the upper surface array is consistent with the aperture distribution on the ceramic substrate, and the diameter is smaller than the diameter of the ferrite disc to facilitate clamping the ferrite, while leaving enough scanning positions for the scanning recognition head and the infrared camera.

2. The integrated equipment and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method according to claim 1, characterized in that: The path planning system includes an infrared temperature recognition head, which can perform infrared scanning on the microwave dielectric ceramic substrate and ferrite wafer during the preheating stage. The scanned temperature signal is transmitted to the central control system to further adjust the temperature range. The heating curve can be recorded during the Joule heating stage to screen out the most suitable process parameters. In addition, the X-slider in the path planning system contains a graphite electrode (here, the negative electrode) to adapt to the working environment under ultra-high temperature. Among them, the graphite electrode, scanning recognition head, and infrared thermometer are distributed on the X-slider at the same time.

3. The integrated equipment and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method according to claim 1, characterized in that: The Joule heating system can charge 20 groups of capacitors at one time and can be partially discharged according to needs during use, so it can be discharged multiple times. In addition, it is equipped with real-time voltage monitoring and safety valves to ensure that the voltage that can be touched by the human body is below the safe voltage when the entire device is discharged.

4. The integrated equipment and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method according to claim 1, characterized in that: A circuit box is fixed at the bottom of the base, where external copper wires are integrated and connected to an electrode (here, the positive electrode) and an external Joule heating device.

5. The integrated equipment and method for preparing a ferrite-microwave dielectric ceramic composite substrate by using a flash Joule heating method according to claim 1, characterized in that: The bottom of the reaction chamber and the side of the vertical pole are connected with a fixed base platform, and a circle of protrusions on the outer wall of the base platform is used to fix the quartz glass tube to prevent sliding displacement. The outer rings of the upper and lower cover plates are covered with silicone spiral pads to enhance the friction with the wall tube.

6. An integrated device and method for preparing a ferrite-microwave dielectric ceramic composite substrate using a flash Joule heating method, characterized in that Use the following steps: Step 1: Preparation before the composite substrate is prepared, mainly including the preparation of ferrite and microwave dielectric ceramic materials, processing the ferrite into small discs, processing the microwave dielectric ceramics into substrates and punching holes as required, wherein the diameters of the discs and holes are designed according to the difference in thermal expansion of dissimilar materials, so that the circular holes on the substrate are slightly larger than the discs. Step 2: Place the microwave dielectric ceramic substrate on the base plate, and manually embed the disc into the circular hole with tweezers. When embedding, it should be noted that the ferrite disc falls into the array circular hole of the base plate and has good contact with the copper sheet on the base plate (this step is for ferrite materials with a certain conductivity. If the ferrite material is not conductive, place the dielectric ceramic base plate and the ferrite disc in a conductive fixture and fix them). Step 3: Cover the quartz glass reaction tube, and the central control system releases a motion signal to the telescopic rods at the upper and lower covers to place the composite substrate in a suitable reaction position. Step 4: The visual recognition camera identifies and scans. Ferrite should be a brown disc, and microwave dielectric ceramics should be a light yellow square substrate (the conductive fixture should be a dark yellow copper sheet). The scanning head moves in an empty space to identify the relative positions of all ferrite discs and microwave dielectric ceramics, and transmits this signal to the central control system. Step 5: The central control system receives the position signal and plans the route, transmits the route to the path planning system, and starts the connection of the starting point. The central control system transmits the working signal to the temperature control system and the flash Joule device (this step is for ferrite materials with a certain conductivity. If the material is not conductive, there is no need for route planning, just keep the negative electrode close to the conductive fixture). Step 6: The temperature control system works to reach the preheating temperature to increase the reactivity of heterogeneous materials; the flash Joule device controls the charging of the capacitor and discharges the positive and negative electrodes according to the received parameter signal. The ferrite original sheet generates heat instantly due to the flow of current, and the temperature rises. When the temperature reaches a certain level, the ferrite disc expands due to heat, and the elements in the sheet begin to diffuse to the dielectric ceramic side, while the microwave dielectric ceramic also begins to expand due to thermal radiation and expands to the ferrite side. This allows heterogeneous materials to diffuse and connect with each other. Due to the extremely fast cooling time and no insulation time, the transition zone of the joint is very narrow, thereby avoiding the local performance deterioration caused by the excessively wide transition zone and affecting the overall performance of the composite substrate (this step is for ferrite materials with a certain conductivity. If the material is not conductive, the composite substrate is connected and formed through thermal radiation of the conductive fixture). Step 7: The temperature recognition head scans the temperature of the wafer and substrate, collects the temperature rise signal, and transmits it to the central control system. The central control system compares the temperature with the temperature at which the physical phase begins to diffuse. At the same time, the visual scanning camera transmits the scanned image to the central control system for observation. If the temperature difference is within a reasonable range, the next point is scanned and the electricity is released. (This step is for conductive ferrite materials. If the ferrite material is not conductive, there is no need for single-point scanning. Just heat the composite substrate and repeat step 6.) If it does not meet the requirements, adjust the voltage parameters and repeat step 6 if no obvious combination is observed in the scanning effect. Step 8: Complete the discharge of all path points and evaluate the performance of the composite substrate.

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