Intelligent control method and system for radio frequency power supply of carbon dioxide laser

By establishing the radio frequency power database and the control index model, analyzing and evaluating the output performance of the radio frequency power supply and the concentration effect of the beam, the intelligent control of the carbon dioxide laser radio frequency power supply has solved the lack of adaptability and response speed of the traditional method, and the laser is improved. The degree of automation and the stability of the beam aggregation effect.

CN119362117AInactive Publication Date: 2025-01-24HUAIYIN TEACHERS COLLEGE
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Patent Information

Application Number
CN202411530306.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-30
Publication Date
2025-01-24
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The traditional RF power intelligent control method of carbon dioxide lasers has shortcomings in adaptability, response speed and environmental impact, and it is impossible to achieve real-time monitoring of the laser status and fault warning, affecting the stability and service life of the laser.

Method used

By establishing a RF power database of laser, analyze and evaluate the output performance of RF power supply and beam gathering effect, establish the RF power control index model, and optimize the intelligent control and beam aggregation effect of RF power supply.

Benefits of technology

The high -precision and intelligent control of the output of the radio frequency power supply of the carbon dioxide laser, which improves the degree of automation of the laser, reduces the complexity and error rate of artificial operation, and ensures the stability of the beam aggregation effect and the service life of the laser.

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Abstract

The invention relates to the technical field of radio frequency power supply intelligent control, and particularly discloses a radio frequency power supply intelligent control method and system of a carbon dioxide laser. The method comprises the following steps of S1, establishing a radio-frequency power supply database of a laser, S2, analyzing the output performance of a radio-frequency power supply, S3, evaluating the output performance of the radio-frequency power supply, S4, analyzing the light beam gathering effect of the laser, S5, evaluating the light beam gathering effect of the laser, S6, controlling the radio-frequency power supply of the laser, and S7, controlling the radio-frequency power supply of the laser. Step S8, establishing a radio frequency power supply control index model of the laser; and step S8, carrying out user interface interaction. Fine adjustment of the output performance parameters of the radio-frequency power supply and the beam gathering effect parameters of the laser is realized through an intelligent algorithm, the stability of the output performance and the beam gathering effect of the laser is remarkably improved, intelligent control of the radio-frequency power supply is realized, and the automation degree of the laser is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power intelligent control, and in particular to a radio frequency power intelligent control method and system for a carbon dioxide laser. Background Art

[0002] Carbon Dioxide Laser (CO2 Laser for short) is a gas laser that uses carbon dioxide gas as the working medium. It generates laser radiation by exciting carbon dioxide molecules, usually working in the far infrared band, with the most commonly used wavelength being 10.6 microns. Carbon dioxide lasers have high power, high efficiency and long service life, and are one of the most commonly used lasers in the fields of industry, medical treatment, scientific research, etc. Carbon dioxide lasers are widely used due to their high power, high efficiency and wide range of industrial applications. However, as one of the core components of carbon dioxide lasers, the output performance of RF power directly affects the laser beam focusing effect and stability.

[0003] The traditional intelligent control method of RF power supply for carbon dioxide lasers mainly controls the output of RF power supply by monitoring the current, voltage, temperature of the laser and receiving external signals to achieve automatic adjustment of the output parameters of RF power supply to maintain the stability of laser output power. Although these methods are simple to operate, they have obvious shortcomings in adaptability, response speed and environmental impact.

[0004] The disadvantages of the traditional intelligent control method of RF power supply for carbon dioxide lasers are: first, the fixed parameter settings cannot adapt to different working environments and load changes, and manual adjustment requires professional knowledge and is prone to errors; second, manual operation is required to adjust the output of the RF power supply, and real-time monitoring of the laser status and fault warning cannot be achieved; this not only increases the complexity of operation, but may also affect the stability and service life of the laser; in addition, the traditional method cannot analyze and evaluate the output performance of the RF power supply and intelligently control and adjust it, nor can it analyze and evaluate the focusing effect of the laser beam and intelligently control and adjust it. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the embodiments of the present invention provide a method and system for intelligently controlling a radio frequency power supply of a carbon dioxide laser to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a method for intelligently controlling a radio frequency power supply of a carbon dioxide laser, comprising the following steps: step S1: establishing a radio frequency power supply database of the laser, step S2: analyzing the output performance of the radio frequency power supply, step S3: evaluating the output performance of the radio frequency power supply, step S4: analyzing the laser beam focusing effect, step S5: evaluating the laser beam focusing effect, step S6: controlling the radio frequency power supply of the laser, step S7: establishing a radio frequency power supply control index model of the laser, and step S8: performing user interface interaction.

[0007] Step S1: Establishing a radio frequency power supply database for the laser: establishing a radio frequency power supply database for the laser by acquiring parameters of the carbon dioxide laser and radio frequency power supply, for storing and updating data; Step S2: Analyze the output performance of the RF power supply: calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, current change rate and load matching rate; Step S3: Evaluate the output performance of the RF power supply: judge the output performance of the power supply by comparing the output performance evaluation coefficient of the RF power supply with a preset threshold value. If the output performance of the power supply is normal, jump out of the step loop; if the output performance of the power supply is abnormal, jump to step S6 for intelligent control; Step S4: Analyze the laser beam focusing effect: calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter; Step S5: Evaluate the laser beam focusing effect: The laser beam focusing effect is judged by comparing the laser beam focusing effect evaluation coefficient with a preset threshold value. If the beam focusing effect is normal, the step loop is jumped out; if the beam focusing effect is abnormal, the step loop is jumped to step S6 for intelligent control; Step S6: Control the radio frequency power supply of the laser: according to the judgment results of step S3 and step S5, start the intelligent control strategy for the data with abnormal judgment results to perform intelligent control; Step S7: Establishing a RF power control index model for the laser: establishing a RF power control index model for the laser according to the intelligent control strategy and control result of step S6, and calculating the RF power control index of the laser; Step S8: Perform user interface interaction: Visually display the evaluation results and control results on the mobile device of the operation and maintenance manager, so that the operation and maintenance manager can perform real-time monitoring, decision-making and guidance.

[0008] Preferably, the carbon dioxide laser parameters include current, output impedance of the RF power supply, input impedance of the load, actual output voltage and rated voltage; the RF power supply parameters include beam divergence angle, wavelength, the total number of pixels in the beam cross section, actual intensity of the pixels, average intensity of all pixels, area of ​​the actual beam cross section, distance from the center of the beam cross section to the farthest point and beam diameter.

[0009] Preferably, the calculation steps of the RF power supply output performance evaluation coefficient are specifically as follows: Step S21: Calculate the current change rate Icr , the mathematical model is as follows: ,in, I 1 represents the initial current, I 2 means passing ti The current after time, ti Expressed as a time interval; Step S22: Calculate the load matching ratio Lmr , the mathematical model is as follows: ,in, Oi Expressed as the output impedance of the RF power supply, Ii Expressed as the input impedance of the load; Step S23: Calculate the RF power supply output performance evaluation coefficient, the mathematical model is specifically: ,in, PEC Expressed as the RF power supply output performance evaluation coefficient, Icr Expressed as the rate of change of current, Icr max Expressed as the maximum allowable value of the current change rate, Lmr Expressed as load matching ratio, Lmr max It is expressed as the maximum allowable value of the load matching ratio. e Expressed as a natural constant, U Expressed as the actual output voltage, U 额 Expressed as rated voltage, U max Expressed as the maximum allowable value of voltage deviation.

[0010] Preferably, the specific method of evaluating the output performance of the RF power supply in step S3 is: The RF power supply output performance evaluation coefficient is extracted and compared with the preset performance threshold. If the RF power supply output performance evaluation coefficient is less than or equal to the preset performance threshold, the judgment result is that the RF power supply output performance is normal. If the RF power supply output performance evaluation coefficient is greater than the preset performance threshold, the judgment result is that the RF power supply output performance is abnormal. The abnormal data is transmitted to step S6 for intelligent control, and a warning signal is issued.

[0011] Preferably, the calculation steps of the laser beam focusing effect evaluation coefficient are specifically as follows: Step S41: Calculate the beam divergence angle deviation , the mathematical model is as follows: ,in, is the actual measured beam divergence angle, It is expressed as a preset ideal beam divergence angle; Step S42: Calculate wavelength change rate , the mathematical model is as follows: ,in, Expressed as wavelength in time The amount of change in, t represents time, d represents the integral sign; Step S43: Calculate the beam roundness Br , the mathematical model is as follows: ,in, N Expressed as the total number of pixels in the beam cross section, i Represented as the number of pixels in the beam cross section, I i Expressed as i The actual intensity of the pixel, I avg Expressed as the average intensity of all pixels, I ci,i In the case of an ideal circle, i The intensity of a pixel, Ab Expressed as the area of ​​the actual beam cross section, π Expressed as pi, r ci It is expressed as the radius of the smallest circumscribed circle of the actual beam cross section, i.e. the distance from the center of the beam cross section to the farthest point; Step S44: Calculate the laser beam focusing effect evaluation coefficient, the mathematical model is specifically: ,in, AEC Expressed as the laser beam focusing effect evaluation coefficient, Expressed as the beam divergence angle deviation, It is expressed as the deviation of the preset ideal beam divergence angle. Expressed as the wavelength change rate, Expressed as the preset ideal wavelength change rate, Br Expressed as beam circularity, Br id It represents the preset ideal beam roundness, D represents the beam diameter, and D id Indicates the preset ideal beam diameter.

[0012] Preferably, the specific method of evaluating the laser beam focusing effect in step S5 is: The laser beam focusing effect evaluation coefficient is extracted and compared with the preset effect threshold value for judgment. If the laser beam focusing effect evaluation coefficient is greater than or equal to the preset effect threshold value, the judgment result is that the laser beam focusing effect is normal. If the laser beam focusing effect evaluation coefficient is less than the preset effect threshold value, the judgment result is that the laser beam focusing effect is abnormal. The abnormal data is transmitted to step S6 for intelligent control and a warning signal is issued.

[0013] Preferably, the calculation model of the RF power supply control index of the laser is specifically: ,in, ICI Expressed as the RF power control index of the laser, PEC Expressed as the RF power supply output performance evaluation coefficient, AEC It is expressed as the laser beam focusing effect evaluation coefficient, w1 and w2 represent the weights of the RF power supply output performance evaluation coefficient and the laser beam focusing effect evaluation coefficient respectively, where w1+w2=1.

[0014] Preferably, the specific content of comparing and judging the RF power supply control index of the laser with the preset control threshold in step S7 is: The RF power control index of the laser is extracted and compared with the preset control threshold. If the RF power control index of the laser is greater than or equal to the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is normal. If the RF power control index of the laser is less than the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is poor, and it is necessary to restart the intelligent control strategy in step S6, send the judgment result to the operation and maintenance management personnel, and issue a warning signal.

[0015] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a radio frequency power intelligent control system for a carbon dioxide laser, implementing the above-mentioned radio frequency power intelligent control method for a carbon dioxide laser, including: establishing a database module, a radio frequency power output performance analysis module, a radio frequency power output performance evaluation module, a laser beam focusing effect analysis module, a laser beam focusing effect evaluation module, a laser radio frequency power control module, a control index model establishment module and a user interface module.

[0016] The database establishment module establishes a radio frequency power supply database of the laser by acquiring parameters of the carbon dioxide laser and the radio frequency power supply, so as to store and update data; The RF power supply output performance analysis module is used to calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, the current change rate and the load matching rate, and transmit it to the RF power supply output performance evaluation module; The RF power supply output performance evaluation module is used to compare the RF power supply output performance evaluation coefficient calculated by the RF power supply output performance analysis module with a preset threshold value to determine the power supply output performance, and transmit power supply output performance abnormal data to the RF power supply control module of the laser; The laser beam focusing effect analysis module is used to calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter, and transmit it to the laser beam focusing effect evaluation module; The laser beam focusing effect evaluation module is used to compare the laser beam focusing effect evaluation coefficient calculated by the laser beam focusing effect analysis module with a preset threshold value to determine the beam focusing effect, and transmit data indicating abnormal beam focusing effect to the RF power supply control module of the laser; The RF power supply control module of the laser starts intelligent control strategies for data with abnormal judgment results according to the judgment results of the RF power supply output performance evaluation module and the laser beam focusing effect evaluation module to perform intelligent control; The control index model establishment module establishes the RF power control index model of the laser according to the intelligent control strategy and control result of the RF power control module of the laser, and calculates the RF power control index of the laser; The user interface module is used to visualize the evaluation results and control results on the mobile device of the operation and maintenance manager, so as to enable the operation and maintenance manager to perform real-time monitoring, decision-making and guidance.

[0017] Technical effects and advantages of the present invention: 1. The present invention establishes a radio frequency power supply database for the laser, analyzes and evaluates the output performance of the radio frequency power supply and the laser beam focusing effect, controls the radio frequency power supply of the laser according to the analysis and evaluation results, establishes a radio frequency power supply control index model for the laser, obtains the radio frequency power supply control index for the laser, and introduces advanced control algorithms and intelligent decision-making mechanisms to achieve high-precision and intelligent control of the radio frequency power supply output of the carbon dioxide laser; this not only improves the automation of the laser, but also reduces the complexity and error rate of manual operation; 2. The present invention can realize intelligent regulation of the output of the RF power supply, and automatically adjust the output power and frequency of the RF power supply according to the working state and requirements of the laser to achieve the best working effect; at the same time, it can also monitor the state parameters of the laser beam focusing effect in real time. Once abnormal data is found, an alarm is immediately triggered and protective measures are taken to avoid damage to the laser; 3. The present invention realizes fine adjustment of the RF power supply output performance parameters and the laser beam focusing effect parameters through intelligent algorithms, significantly improving the stability of the laser output performance and the beam focusing effect, realizing the automation and intelligent control of the RF power supply, reducing manual intervention, and making the operation easier for non-professionals to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described using the accompanying drawings, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention. A person skilled in the art can obtain other drawings based on the following drawings without creative work.

[0019] Figure 1 It is a schematic diagram of the method flow of the present invention.

[0020] Figure 2 It is a schematic diagram of the overall structure of the system of the present invention. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Example 1 See also Figure 1As shown, the present invention provides an intelligent control method for the radio frequency power supply of a carbon dioxide laser, comprising the following steps: step S1: establishing a radio frequency power supply database of the laser, step S2: analyzing the output performance of the radio frequency power supply, step S3: evaluating the output performance of the radio frequency power supply, step S4: analyzing the laser beam focusing effect, step S5: evaluating the laser beam focusing effect, step S6: controlling the radio frequency power supply of the laser, step S7: establishing a radio frequency power supply control index model of the laser, and step S8: performing user interface interaction.

[0023] Step S1: Establishing a radio frequency power supply database for the laser: establishing a radio frequency power supply database for the laser by acquiring parameters of the carbon dioxide laser and radio frequency power supply, for storing and updating data; In this embodiment, it should be specifically explained that the carbon dioxide laser parameters include current, output impedance of the RF power supply, input impedance of the load, actual output voltage and rated voltage; the RF power supply parameters include beam divergence angle, wavelength, the total number of pixels in the beam cross section, the actual intensity of the pixels, the average intensity of all pixels, the area of ​​the actual beam cross section, the distance from the center of the beam cross section to the farthest point and the beam diameter.

[0024] Step S2: Analyze the output performance of the RF power supply: calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, current change rate and load matching rate; In this embodiment, it should be specifically explained that the calculation steps of the RF power supply output performance evaluation coefficient are as follows: Step S21: Calculate the current change rate Icr , the mathematical model is as follows: ,in, I 1 represents the initial current, I 2 means passing ti The current after time, ti Expressed as a time interval; Step S22: Calculate the load matching ratio Lmr , the mathematical model is as follows: ,in, Oi Expressed as the output impedance of the RF power supply, Ii Expressed as the input impedance of the load; In this embodiment, it should be specifically noted that the value of the load matching rate is between 0% and 100%; the smaller the value, the better the load matching; the larger the value, the worse the load matching; Step S23: Calculate the RF power supply output performance evaluation coefficient, the mathematical model is specifically: ,in, PECExpressed as the RF power supply output performance evaluation coefficient, Icr Expressed as the rate of change of current, Icr max Expressed as the maximum allowable value of the current change rate, Lmr Expressed as load matching ratio, Lmr max It is expressed as the maximum allowable value of the load matching ratio. e Expressed as a natural constant, U Expressed as the actual output voltage, U 额 Expressed as rated voltage, U max Expressed as the maximum allowable value of voltage deviation.

[0025] In this embodiment, it should be specifically explained that the RF power supply output performance evaluation coefficient is calculated by voltage deviation, current change rate and load matching rate. The larger the voltage deviation, the worse the output stability of the RF power supply and the worse the performance; the larger the current change rate, the worse the dynamic response performance of the RF power supply and the worse the performance; the larger the load matching rate, the lower the energy transmission efficiency between the RF power supply and the load, and the worse the performance; therefore, the voltage deviation, current change rate and load matching rate have a positive influence on the RF power supply output performance evaluation coefficient. The smaller the value of the RF power supply output performance evaluation coefficient, the better the RF power supply output performance.

[0026] Step S3: Evaluate the output performance of the RF power supply: judge the output performance of the power supply by comparing the output performance evaluation coefficient of the RF power supply with a preset threshold value. If the output performance of the power supply is normal, jump out of the step loop; if the output performance of the power supply is abnormal, jump to step S6 for intelligent control; In this embodiment, it should be specifically explained that the specific method of evaluating the output performance of the RF power supply in step S3 is: The RF power supply output performance evaluation coefficient is extracted and compared with the preset performance threshold. If the RF power supply output performance evaluation coefficient is less than or equal to the preset performance threshold, the judgment result is that the RF power supply output performance is normal. If the RF power supply output performance evaluation coefficient is greater than the preset performance threshold, the judgment result is that the RF power supply output performance is abnormal. The abnormal data is transmitted to step S6 for intelligent control, and a warning signal is issued.

[0027] Step S4: Analyze the laser beam focusing effect: calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter; In this embodiment, it should be specifically explained that the calculation steps of the laser beam focusing effect evaluation coefficient are as follows: Step S41: Calculate the beam divergence angle deviation , the mathematical model is as follows: ,in, is the actual measured beam divergence angle, It is expressed as a preset ideal beam divergence angle; Step S42: Calculate wavelength change rate , the mathematical model is as follows: ,in, Expressed as wavelength in time The amount of change in, t represents time, d represents the integral sign; Step S43: Calculate the beam roundness Br , the mathematical model is as follows: ,in, N Expressed as the total number of pixels in the beam cross section, i Represented as the number of pixels in the beam cross section, I i Expressed as i The actual intensity of the pixel, I avg Expressed as the average intensity of all pixels, I ci,i In the case of an ideal circle, i The intensity of a pixel, Ab Expressed as the area of ​​the actual beam cross section, π Expressed as pi, r ci It is expressed as the radius of the smallest circumscribed circle of the actual beam cross section, i.e. the distance from the center of the beam cross section to the farthest point; Step S44: Calculate the laser beam focusing effect evaluation coefficient, the mathematical model is specifically: ,in, AEC Expressed as the laser beam focusing effect evaluation coefficient, Expressed as the beam divergence angle deviation, It is expressed as the deviation of the preset ideal beam divergence angle. Expressed as the wavelength change rate, Expressed as the preset ideal wavelength change rate, Br Expressed as beam circularity, Br id It represents the preset ideal beam roundness, D represents the beam diameter, and D id Indicates the preset ideal beam diameter.

[0028] In this embodiment, it should be specifically explained that the laser beam focusing effect evaluation coefficient is calculated based on the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter. The larger the divergence angle deviation, the faster the beam diffuses during transmission and the worse the beam focusing effect. The smaller the wavelength change rate, the more stable the output wavelength of the laser and the better the beam focusing effect. The higher the beam roundness, the closer the cross-sectional shape of the beam is to the ideal circle and the better the beam focusing effect. Therefore, the larger the value of the laser beam focusing effect evaluation coefficient, the better the laser beam focusing effect.

[0029] Step S5: Evaluate the laser beam focusing effect: The laser beam focusing effect is judged by comparing the laser beam focusing effect evaluation coefficient with a preset threshold value. If the beam focusing effect is normal, the step loop is jumped out; if the beam focusing effect is abnormal, the step loop is jumped to step S6 for intelligent control; In this embodiment, it should be specifically explained that the specific method of evaluating the laser beam focusing effect in step S5 is: The laser beam focusing effect evaluation coefficient is extracted and compared with the preset effect threshold value for judgment. If the laser beam focusing effect evaluation coefficient is greater than or equal to the preset effect threshold value, the judgment result is that the laser beam focusing effect is normal. If the laser beam focusing effect evaluation coefficient is less than the preset effect threshold value, the judgment result is that the laser beam focusing effect is abnormal. The abnormal data is transmitted to step S6 for intelligent control and a warning signal is issued.

[0030] Step S6: Control the radio frequency power supply of the laser: according to the judgment results of step S3 and step S5, start the intelligent control strategy for the data with abnormal judgment results to perform intelligent control; In this embodiment, it should be specifically explained that the intelligent control strategy is specifically: To optimize the output performance of the RF power supply, the following intelligent control strategies can be adopted: First, optimize the voltage stability, check whether the power supply voltage input is stable, and use a voltage-stabilized power supply when necessary; at the same time, optimize the voltage regulation circuit inside the RF power supply, improve the voltage stability, and regularly calibrate the output voltage of the power supply to ensure that it works stably near the set value. Secondly, reduce the current change rate, optimize the current control circuit of the RF power supply, reduce current fluctuations, use high-performance current sensors and feedback circuits, monitor and adjust the current output in real time, and add filters at the output end of the power supply to smooth the current changes. In addition, improve the load matching rate, adjust the output impedance of the RF power supply according to the load characteristics to improve the matching rate, and use impedance matching networks or adjustable impedance devices to achieve dynamic matching. In order to ensure the reliability and stability of the RF power supply, strengthen heat dissipation and protection measures to ensure that it has good heat dissipation performance, avoid overheating and performance degradation, and strengthen dust and moisture protection measures. Finally, ensure the cleanliness of the inside and outside of the power supply to avoid dust and stains affecting the performance, and regularly calibrate the various parameters of the power supply to ensure that it works in the best condition.

[0031] To optimize the laser beam focusing effect, the following intelligent control strategies can be adopted: First, reduce the divergence angle of the beam. This can be done by adjusting the parameters of the resonant cavity, including the curvature radius and position of the reflector, and optimizing the focal length and position of the lens to ensure that the divergence angle of the beam during propagation is minimized. In order to keep the temperature and humidity parameters of the laser working environment stable to reduce wavelength changes, frequency locking or wavelength locking technology can be used to ensure wavelength stability. In addition, optimize beam shaping, use a beam shaper or mode converter to convert a non-circular beam into a circular one, and adjust the laser mode to ensure that the laser works in a single-mode (TEM00) mode to improve the roundness of the beam. In order to improve the focusing ability, use a lens with a high numerical aperture (NA), optimize the focusing distance, and adjust the distance between the lens and the workpiece to ensure that the diameter of the beam at the focus is minimized.

[0032] Step S7: Establishing a RF power control index model for the laser: establishing a RF power control index model for the laser according to the intelligent control strategy and control result of step S6, and calculating the RF power control index of the laser; In this embodiment, it should be specifically explained that the calculation model of the RF power supply control index of the laser is specifically: ,in, ICI Expressed as the RF power control index of the laser, PEC Expressed as the RF power supply output performance evaluation coefficient, AEC It is expressed as the laser beam focusing effect evaluation coefficient, w1 and w2 represent the weights of the RF power supply output performance evaluation coefficient and the laser beam focusing effect evaluation coefficient respectively, where w1+w2=1.

[0033] In this embodiment, it should be specifically explained that the specific content of comparing the RF power supply control index of the laser with the preset control threshold in step S7 is: The RF power control index of the laser is extracted and compared with the preset control threshold. If the RF power control index of the laser is greater than or equal to the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is normal. If the RF power control index of the laser is less than the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is poor, and it is necessary to restart the intelligent control strategy in step S6, send the judgment result to the operation and maintenance management personnel, and issue a warning signal.

[0034] Step S8: Perform user interface interaction: Visually display the evaluation results and control results on the mobile device of the operation and maintenance manager, so that the operation and maintenance manager can perform real-time monitoring, decision-making and guidance.

[0035] Example 2 See also Figure 2 As shown, the present invention provides an intelligent control system for radio frequency power supply of carbon dioxide laser, including a database establishment module, a radio frequency power supply output performance analysis module, a radio frequency power supply output performance evaluation module, a laser beam focusing effect analysis module, a laser beam focusing effect evaluation module, a laser radio frequency power supply control module, a control index model establishment module and a user interface module.

[0036] The database establishment module establishes a radio frequency power supply database of the laser by acquiring parameters of the carbon dioxide laser and the radio frequency power supply, so as to store and update data; The RF power supply output performance analysis module is used to calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, the current change rate and the load matching rate, and transmit it to the RF power supply output performance evaluation module; The RF power supply output performance evaluation module is used to compare the RF power supply output performance evaluation coefficient calculated by the RF power supply output performance analysis module with a preset threshold value to determine the power supply output performance, and transmit power supply output performance abnormal data to the RF power supply control module of the laser; The laser beam focusing effect analysis module is used to calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter, and transmit it to the laser beam focusing effect evaluation module; The laser beam focusing effect evaluation module is used to compare the laser beam focusing effect evaluation coefficient calculated by the laser beam focusing effect analysis module with a preset threshold value to determine the beam focusing effect, and transmit data indicating abnormal beam focusing effect to the RF power supply control module of the laser; The RF power supply control module of the laser starts intelligent control strategies for data with abnormal judgment results according to the judgment results of the RF power supply output performance evaluation module and the laser beam focusing effect evaluation module to perform intelligent control; The control index model establishment module establishes the RF power control index model of the laser according to the intelligent control strategy and control result of the RF power control module of the laser, and calculates the RF power control index of the laser; The user interface module is used to visualize the evaluation results and control results on the mobile device of the operation and maintenance manager, so as to enable the operation and maintenance manager to perform real-time monitoring, decision-making and guidance.

[0037] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0038] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A method for intelligently controlling a radio frequency power supply of a carbon dioxide laser, characterized in that: The following steps are involved: Step S1: Establishing a radio frequency power supply database for the laser: establishing a radio frequency power supply database for the laser by acquiring parameters of the carbon dioxide laser and radio frequency power supply, for storing and updating data; Step S2: Analyze the output performance of the RF power supply: calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, current change rate and load matching rate; Step S3: Evaluate the output performance of the RF power supply: judge the output performance of the power supply by comparing the output performance evaluation coefficient of the RF power supply with a preset threshold value. If the output performance of the power supply is normal, jump out of the step loop; if the output performance of the power supply is abnormal, jump to step S6 for intelligent control; Step S4: Analyze the laser beam focusing effect: calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter; Step S5: Evaluate the laser beam focusing effect: The laser beam focusing effect is judged by comparing the laser beam focusing effect evaluation coefficient with a preset threshold value. If the beam focusing effect is normal, the step loop is jumped out; if the beam focusing effect is abnormal, the step loop is jumped to step S6 for intelligent control; Step S6: Control the radio frequency power supply of the laser: according to the judgment results of step S3 and step S5, start the intelligent control strategy for the data with abnormal judgment results to perform intelligent control; Step S7: Establishing a RF power control index model for the laser: establishing a RF power control index model for the laser according to the intelligent control strategy and control result of step S6, and calculating the RF power control index of the laser; Step S8: Perform user interface interaction: Visually display the evaluation results and control results on the mobile device of the operation and maintenance manager, so that the operation and maintenance manager can perform real-time monitoring, decision-making and guidance.

2. The method for intelligently controlling a radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The carbon dioxide laser parameters include current, output impedance of the RF power supply, input impedance of the load, actual output voltage and rated voltage; the RF power supply parameters include beam divergence angle, wavelength, the total number of pixels in the beam cross section, the actual intensity of the pixels, the average intensity of all pixels, the area of ​​the actual beam cross section, the distance from the center of the beam cross section to the farthest point and the beam diameter.

3. The method for intelligently controlling a radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The calculation steps of the RF power supply output performance evaluation coefficient are as follows: Step S21: Calculate the current change rate Icr , the mathematical model is as follows: ,in, I 1 represents the initial current, I 2 means passing ti The current after time, ti Expressed as a time interval; Step S22: Calculate the load matching ratio Lmr , the mathematical model is as follows: ,in, Oi Expressed as the output impedance of the RF power supply, Ii It is expressed as the input impedance of the load; Step S23: Calculate the RF power supply output performance evaluation coefficient, the mathematical model is specifically: ,in, PEC Expressed as the RF power supply output performance evaluation coefficient, Icr Expressed as the rate of change of current, Icr max Expressed as the maximum allowable value of the current change rate, Lmr Expressed as load matching ratio, Lmr max It is expressed as the maximum allowable value of the load matching ratio. e Expressed as a natural constant, U Expressed as the actual output voltage, U 额 Expressed as rated voltage, U max Expressed as the maximum allowable value of voltage deviation.

4. The method for intelligently controlling a radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The specific method of evaluating the output performance of the RF power supply in step S3 is: The RF power supply output performance evaluation coefficient is extracted and compared with the preset performance threshold for judgment. If the RF power supply output performance evaluation coefficient is less than or equal to the preset performance threshold, the judgment result is that the RF power supply output performance is normal. If the RF power supply output performance evaluation coefficient is greater than the preset performance threshold, the judgment result is that the RF power supply output performance is abnormal. The abnormal data is transmitted to step S6 for intelligent control, and a warning signal is issued.

5. The method for intelligently controlling the radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The calculation steps of the laser beam focusing effect evaluation coefficient are as follows: Step S41: Calculate the beam divergence angle deviation , the mathematical model is as follows: ,in, is the actual measured beam divergence angle, It is expressed as a preset ideal beam divergence angle; Step S42: Calculate wavelength change rate , the mathematical model is as follows: ,in, Expressed as wavelength in time The amount of change in, t represents time, d represents the integral sign; Step S43: Calculate the beam roundness Br , the mathematical model is as follows: ,in, N Expressed as the total number of pixels in the beam cross section, i Represented as the number of pixels in the beam cross section, I i Expressed as i The actual intensity of the pixel, I avg Expressed as the average intensity of all pixels, I ci,i In the case of an ideal circle, i The intensity of a pixel, Ab Expressed as the area of ​​the actual beam cross section, π Expressed as pi, r ci It is expressed as the radius of the smallest circumscribed circle of the actual beam cross section, i.e. the distance from the center of the beam cross section to the farthest point; Step S44: Calculate the laser beam focusing effect evaluation coefficient, the mathematical model is specifically: ,in, AEC Expressed as the laser beam focusing effect evaluation coefficient, Expressed as the beam divergence angle deviation, It is expressed as the deviation of the preset ideal beam divergence angle. Expressed as the wavelength change rate, Expressed as the preset ideal wavelength change rate, Br Expressed as beam circularity, Br id It represents the preset ideal beam roundness, D represents the beam diameter, and D id Indicates the preset ideal beam diameter.

6. The method for intelligently controlling a radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The specific method of evaluating the laser beam focusing effect in step S5 is: The laser beam focusing effect evaluation coefficient is extracted and compared with the preset effect threshold value for judgment. If the laser beam focusing effect evaluation coefficient is greater than or equal to the preset effect threshold value, the judgment result is that the laser beam focusing effect is normal. If the laser beam focusing effect evaluation coefficient is less than the preset effect threshold value, the judgment result is that the laser beam focusing effect is abnormal. The abnormal data is transmitted to step S6 for intelligent control and a warning signal is issued.

7. The method for intelligently controlling a radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The calculation model of the RF power control index of the laser is specifically: ,in, ICI Expressed as the RF power control index of the laser, PEC Expressed as the RF power supply output performance evaluation coefficient, AEC It is expressed as the laser beam focusing effect evaluation coefficient, w1 and w2 represent the weights of the RF power supply output performance evaluation coefficient and the laser beam focusing effect evaluation coefficient respectively, where w1+w2=1.

8. The method for intelligently controlling the radio frequency power supply of a carbon dioxide laser according to claim 1, characterized in that: The specific content of comparing and judging the RF power supply control index of the laser with the preset control threshold in step S7 is: The RF power control index of the laser is extracted and compared with the preset control threshold. If the RF power control index of the laser is greater than or equal to the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is normal. If the RF power control index of the laser is less than the preset control threshold, it is judged that the RF power control effect of the carbon dioxide laser is poor, and it is necessary to restart the intelligent control strategy in step S6, send the judgment result to the operation and maintenance management personnel, and issue a warning signal.

9. An intelligent control system for radio frequency power supply of a carbon dioxide laser, used to implement an intelligent control method for radio frequency power supply of a carbon dioxide laser as claimed in any one of claims 1 to 8, characterized in that: include: Establishing a database module, an RF power supply output performance analysis module, an RF power supply output performance evaluation module, a laser beam focusing effect analysis module, a laser beam focusing effect evaluation module, a laser RF power supply control module, establishing a control index model module and a user interface module; The database establishment module establishes a radio frequency power supply database of the laser by acquiring parameters of the carbon dioxide laser and the radio frequency power supply, so as to store and update data; The RF power supply output performance analysis module is used to calculate the RF power supply output performance evaluation coefficient according to the voltage deviation, the current change rate and the load matching rate, and transmit it to the RF power supply output performance evaluation module; The RF power supply output performance evaluation module is used to compare the RF power supply output performance evaluation coefficient calculated by the RF power supply output performance analysis module with a preset threshold value to determine the power supply output performance, and transmit power supply output performance abnormal data to the RF power supply control module of the laser; The laser beam focusing effect analysis module is used to calculate the laser beam focusing effect evaluation coefficient according to the beam divergence angle deviation, wavelength change rate, beam roundness and beam diameter, and transmit it to the laser beam focusing effect evaluation module; The laser beam focusing effect evaluation module is used to compare the laser beam focusing effect evaluation coefficient calculated by the laser beam focusing effect analysis module with a preset threshold value to determine the beam focusing effect, and transmit data indicating abnormal beam focusing effect to the RF power supply control module of the laser; The RF power supply control module of the laser starts intelligent control strategies for data with abnormal judgment results according to the judgment results of the RF power supply output performance evaluation module and the laser beam focusing effect evaluation module to perform intelligent control; The control index model establishment module establishes the RF power control index model of the laser according to the intelligent control strategy and control result of the RF power control module of the laser, and calculates the RF power control index of the laser; The user interface module is used to visualize the evaluation results and control results on the mobile device of the operation and maintenance manager, so as to enable the operation and maintenance manager to perform real-time monitoring, decision-making and guidance.

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