A magnetic permeability device and method for guiding the deflection of single-quantum-state atoms.

Abstract

This invention discloses a magnetic permeation device and method for guiding the deflection of single-quantum-state atoms. The magnetic permeation device includes a vacuum chamber, a connecting frame, and several magnetic permeation components. A high-vacuum chamber is formed within the vacuum chamber. The connecting frame is mounted on the inner wall of the vacuum chamber. Several magnetic permeation components are arranged in an arc shape on the connecting frame. An atomic channel is located at the center of each magnetic permeation component. The atomic channels on the several magnetic permeation components are sequentially connected to form an arc-shaped atomic channel with a non-uniform gradient magnetic field, used to drive the atom deflection. Based on the atom Zeeman effect, this application sets up magnetic permeation components to enable controllable deflection of atoms within the arc-shaped atomic channel, achieving specific-angle deflection transmission of a neutral atom beam and achieving a velocity filtering effect for atoms.

Description

Technical Field

[0001] This invention relates to the field of cold atom manipulation technology, and in particular to a magnetic permeation device and method for guiding the deflection of single quantum state atoms. Background Technology

[0002] The interaction between atoms and molecules is widespread in nature. In particular, extremely low-temperature collisions between cold atoms and molecules are a crucial process in the evolution of the cold interstellar medium. In fundamental physics and chemistry, the study of the dynamics of extremely low-energy atomic and molecular collisions (below the K-order) is an important experimental tool for understanding quantum state selection and resonant scattering, among other quantum effects. This has led to increasing attention being paid to the manipulation of cold atoms and the preparation of atoms with specific quantum states in fields such as cold atom physics, precise atomic spectroscopy, collision reactions between neutral atoms and molecules, and semiconductor etching. Because neutral atoms are electrically neutral, traditional methods of controlling charged particle transport using electromagnetic forces are difficult to apply to the manipulation of neutral atom molecules. Currently, the interaction between lasers and atoms can achieve atomic cooling, thereby reducing the speed of atomic transport.

[0003] However, laser cooling processes require specific wavelengths of laser light for particular atomic systems, and the experiments are highly complex, especially in altering the direction of atomic propagation, resulting in high costs. In other words, current experimental capabilities for selecting atomic velocities and controlling propagation directions are limited, making it impossible to provide neutral atom beam sources that meet specific requirements in some cold atom research processes.

[0004] Therefore, existing technologies still need to be improved and developed. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide a magnetic permeation device and method for guiding the deflection of single quantum state atoms, aiming to solve the problem of controlling the transmission speed and transmission direction of the atomic beam source in existing low-temperature collision research between cold atoms and molecules.

[0006] The technical solution of the present invention is as follows:

[0007] A magnetic permeation device for guiding the deflection of single-quantum-state atoms includes a vacuum chamber, a connecting frame, and several magnetic permeation components. A high-vacuum chamber is formed inside the vacuum chamber. The connecting frame is mounted on the inner wall of the vacuum chamber. Several magnetic permeation components are arranged in an arc shape on the connecting frame. An atomic channel is provided at the center of each magnetic permeation component. The atomic channels on the several magnetic permeation components are connected sequentially to form an arc-shaped atomic channel with a non-uniform gradient magnetic field, which is used to drive the atom deflection.

[0008] The magnetic permeation device for guiding the deflection of single quantum state atoms includes a non-magnetic component and at least two permanent magnets. The non-magnetic component is connected to the connecting frame. The non-magnetic component is annular in shape, and at least two fixing parts protrude from its inner side. The at least two fixing parts are arranged symmetrically on the inner wall of the non-magnetic component. One side of each permanent magnet is connected to a fixing part, and the other side protrudes from the fixing part and extends toward the center of the non-magnetic component. An atomic passage is formed between the at least two opposing permanent magnets.

[0009] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the cross-sectional shape of the fixing part is trapezoidal, and the width of the fixing part gradually decreases along the direction toward the center of the non-magnetic kit.

[0010] The magnetic permeation device for guiding the deflection of single quantum state atoms includes a mounting groove formed on the fixing part, which opens toward the center of the non-magnetic kit; a first screw hole is provided on the side wall of the mounting groove; the permanent magnet is inserted into the mounting groove; the magnetic permeation assembly further includes a screw, which is screwed into the first screw hole and screwed in to abut against the permanent magnet.

[0011] The magnetic permeation device for guiding the deflection of single quantum state atoms, wherein the radial cross-sectional shape of the outer wall of the non-magnetic kit is a regular polygon, and at least one surface of the outer wall of the non-magnetic kit is a contact surface for fitting with the connecting frame; the connecting frame is provided with a plurality of first connecting holes arranged in an arc shape; the contact surface is provided with at least one second connecting hole aligned with the first connecting holes; the first connecting holes and the second connecting holes are used to insert connecting rods to connect the connecting frame and the non-magnetic kit.

[0012] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the surface of the permanent magnet is provided with a protective layer.

[0013] The magnetic permeation device for guiding the deflection of single quantum state atoms includes four fixing parts arranged in a cross shape on the inner wall of the non-magnetic kit; and four permanent magnets arranged in a ring shape, with an included angle of 90° between two adjacent permanent magnets.

[0014] The magnetic permeation device for guiding the deflection of single quantum state atoms includes an aperture connected to the connecting frame and disposed in the high vacuum chamber; the aperture and several magnetic permeation components are arranged sequentially along the atomic transport direction; a beam-limiting channel for collimating the atomic beam is provided on the aperture facing the entrance of the arc-shaped atomic channel, and the aperture of the beam-limiting channel is smaller than the aperture of the arc-shaped atomic channel.

[0015] The magnetic permeation device for guiding the deflection of single quantum state atoms includes a high vacuum gauge tube and a vacuum pump, both of which are connected to the vacuum chamber. The high vacuum gauge tube is inserted into the high vacuum chamber to detect the vacuum level. The vacuum pump is located at the end of the high vacuum chamber away from the magnetic permeation assembly and is used to pump air to maintain the vacuum level of the high vacuum chamber.

[0016] This application also discloses a magnetic permeability method for guiding the deflection of single-quantum-state atoms, used in any of the magnetic permeability devices described above for guiding the deflection of single-quantum-state atoms, wherein the magnetic permeability method includes:

[0017] Air is extracted from the high vacuum chamber, and the vacuum level is monitored in real time to obtain the real-time vacuum level value;

[0018] If the real-time vacuum value is less than or equal to the preset vacuum value, the atomic beam is collimated and guided to the arc-shaped atomic channel to filter out the target single quantum state atomic beam.

[0019] Compared with the prior art, the embodiments of the present invention have the following advantages:

[0020] The magnetic permeation device disclosed in this invention forms an arc-shaped atomic channel for deflecting the atomic beam by fixing several magnetic permeation components within a vacuum chamber using a connecting frame. The magnetic permeation components are arranged in an arc shape, with multiple atomic channels at the center sequentially connected. This creates a non-uniform gradient magnetic field in the radial direction of the arc-shaped atomic channel. The magnetic field strength is zero at the center, gradually increasing towards the center. This causes atoms entering the high-vacuum chamber to change their flight speed and direction under the influence of magnetic potential. Due to the limited aperture of the arc-shaped atomic channel, paramagnetic target atoms are deflected by the magnetic force and fly out along the arc-shaped atomic channel, while other atoms are blocked, achieving the effect of filtering a single quantum state atomic beam.

[0021] As can be seen, this invention achieves angular deflection transmission of neutral atomic beams by setting up several magnetic permeation components to deflect the atomic beam. The structure is simple and easy to operate; the energy consumption is low and the research cost is low; it is conducive to realizing velocity filtering and can obtain a single quantum state atomic beam source, providing a basis for carrying out cold collision experiments in the extremely low energy region, and also contributing to the development of metastable atom preparation in the field of semiconductor etching. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the magnetic permeability device for guiding the deflection of single quantum state atoms in this invention;

[0024] Figure 2 This is a cross-sectional view along the axial direction of the magnetic permeability device for guiding the deflection of single quantum state atoms in this invention;

[0025] Figure 3 This is an exploded view of a portion of the structure of the magnetic permeability device for guiding the deflection of single quantum state atoms in this invention;

[0026] Figure 4 This is a schematic diagram of the magnetic permeability component in this invention;

[0027] Figure 5 This is a flowchart of the magnetic permeability method for guiding the deflection of single quantum state atoms in this invention.

[0028] Among them, 100 is a vacuum chamber; 110 is a high vacuum chamber; 200 is a connecting frame; 210 is a first connecting hole; 300 is a magnetic permeation assembly; 310 is an atomic channel; 320 is a non-magnetic component; 321 is a contact surface; 322 is a second connecting hole; 330 is a fixing part; 331 is an assembly groove; 332 is a first screw hole; 340 is a permanent magnet; 400 is an arc-shaped atomic channel; 500 is an aperture; and 510 is a beam-limiting channel. Detailed Implementation

[0029] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] In existing technologies, applications of cold atom beam preparation based on quantum state selection, applications of atoms in semiconductor etching, and applications of atom manipulation research all require improvements in the transmission and control of atomic beams.

[0031] See Figure 1 , Figure 2 and Figure 4In one embodiment of this invention application, a magnetic permeation device for guiding the deflection of single quantum state atoms is disclosed, comprising a vacuum chamber 100, a connecting frame 200, and a plurality of magnetic permeation components 300. A high vacuum chamber 110 is formed inside the vacuum chamber 100. The connecting frame 200 is disposed on the inner wall of the vacuum chamber 100. The plurality of magnetic permeation components 300 are arranged in an arc shape on the connecting frame 200. An atomic channel 310 is provided at the center of each magnetic permeation component 300. The atomic channels 310 on the plurality of magnetic permeation components 300 are connected in sequence to form an arc-shaped atomic channel 400 with a non-uniform gradient magnetic field, which is used to drive the atom deflection.

[0032] The magnetic permeation device disclosed in this embodiment forms an arc-shaped atomic channel 400 for atomic beam deflection by fixing several magnetic permeation components 300 within a vacuum chamber 100 using a connecting frame 200. In this embodiment, the several magnetic permeation components 300 are arranged in an arc shape, with multiple atomic channels 310 at the center sequentially connected. This creates a non-uniform gradient magnetic field in the radial direction of the arc-shaped atomic channel 400. The magnetic field strength at the center is 0, gradually increasing towards the center. This causes the atoms entering the high-vacuum chamber 110 to change their translational direction and flight direction under the influence of the magnetic potential.

[0033] Because the diameter of the arc-shaped atomic channel 400 is limited, only the paramagnetic target atom is deflected by the magnetic field force and flies out along the arc-shaped atomic channel 400. Other quantum state atoms, besides the target atom, cannot fly out along the arc-shaped atomic channel 400 due to their different moving speeds and are blocked. Therefore, the effect of screening a single quantum state atomic beam is achieved.

[0034] It is evident that by setting up several magnetic permeation components to deflect the atomic beam at 300°, the angle deflection transmission of the central atomic beam is achieved. The structure is simple and easy to operate; the energy consumption is low and the research cost is low; it is conducive to realizing velocity filtering and can obtain a single quantum state atomic beam source, providing a basis for conducting cold collision experiments in the extremely low energy region, and also contributing to the development of metastable atom preparation in the field of semiconductor etching.

[0035] Specifically, in this embodiment, by extracting the gas inside the vacuum chamber 100, a high-vacuum chamber 110 with a high vacuum degree is formed, thereby reducing the influence of the background gas and avoiding collision losses between the atomic gas introduced into the high-vacuum chamber 110 and the background gas.

[0036] Specifically, in one embodiment of this invention, the vacuum chamber 100 is made of stainless steel, such as 316L stainless steel, and is formed by stamping, resulting in high structural strength, the ability to withstand high pressure, and the formation of a spatially stable high-vacuum chamber 110. The vacuum chamber 100 has multiple openings for connecting to a front-end vacuum pump, windows, and rear-end experimental equipment, etc. Standard CF knife-edge flanges are used at the connections, and sealing gaskets are installed at the flange outlets to ensure a high-vacuum, low-leakage internal environment.

[0037] Specifically, as another embodiment of this invention, the magnetic permeation device is disclosed to include a high vacuum gauge tube and a vacuum pump, both of which are connected to the vacuum chamber 100; the high vacuum gauge tube is inserted into the high vacuum chamber 110 for detecting the vacuum level; the vacuum pump is located at one end of the high vacuum chamber 110 away from the magnetic permeation component 300 for pumping air to maintain the vacuum level of the high vacuum chamber 110.

[0038] In this embodiment, a vacuum pump is used to extract the gas in the vacuum chamber 100, and a high vacuum gauge, i.e. a vacuum sensor, is used to monitor the vacuum level of the high vacuum chamber 110 in real time. After the target vacuum level condition is reached, an atomic beam is introduced to ensure that the atomic beam is transmitted to the arc-shaped atomic channel 400 during the magnetic permeation process, thereby reducing the loss during the transmission process.

[0039] Specifically, in actual operation, the vacuum level required within the high-vacuum chamber 110 is relatively high, needing to reach at least 10. -8 Therefore, vacuum pumps can be a combination of mechanical pumps and molecular pumps. First, a mechanical pump is used to initially evacuate the air, and then a molecular pump is used to further increase the vacuum level until the working requirements are met.

[0040] Specifically, the molecular pump disclosed in this embodiment is positioned away from the magnetic permeability component 300. For example, the magnetic permeability component 300 is located at the tail end of the vacuum chamber 100, and the ion pump is located at the head end of the vacuum chamber 100, thereby reducing the influence of the magnetic field and avoiding affecting the normal operation of the ion pump. Correspondingly, a pump connection port is provided on the vacuum chamber 100 away from the magnetic permeability component 300 for connecting the molecular pump.

[0041] like Figure 3 and Figure 4As shown, in one embodiment of this invention, the magnetic permeation assembly 300 includes a non-magnetic component 320 and at least two permanent magnets 340. The non-magnetic component 320 is connected to the connecting frame 200. The non-magnetic component 320 is annular in shape, and at least two fixing portions 330 are protruding from the inner side of the non-magnetic component 320. The at least two fixing portions 330 are centrally symmetrically arranged on the inner wall of the non-magnetic component 320. One side of the permanent magnet 340 is connected to the fixing portion 330, and the other side protrudes from the fixing portion 330 and extends toward the center of the non-magnetic component 320. The atomic channel 310 is formed between the at least two opposing permanent magnets 340.

[0042] In this embodiment, the permanent magnet 340 is used to provide a magnetic field, while the non-magnetic kit 320 is only used to support and fix the permanent magnet 340. In order to reduce mutual interference, the non-magnetic kit 320 can be made of non-magnetic materials, such as copper or aluminum alloy.

[0043] Specifically, the permanent magnet 340 can be a permanent magnet or a permanent magnet material sintered into a magnetic steel, such as an ultra-hard permanent magnet alloy made of neodymium iron boron material or aluminum nickel cobalt alloy material, to increase the stiffness of the permanent magnet, thereby improving its stability and service life when used in a vacuum environment.

[0044] Specifically, as another embodiment of this invention, a protective layer is provided on the surface of the permanent magnet 340. In this embodiment, the permanent magnet 340 is disposed outside the arc-shaped atomic channel 400. Target atoms can fly out through the arc-shaped atomic channel 400, while atoms at other velocities remain in the high-vacuum chamber 110, which can easily cause oxidation or corrosion to the permanent magnet 340. Therefore, providing a protective layer on the surface of the permanent magnet 340 helps to extend its service life.

[0045] Specifically, the protective layer disclosed in this embodiment is prepared using a coating process, such as using materials like nickel or copper, to form a dense protective layer that encapsulates the permanent magnet 340, thereby protecting the permanent magnet 340. Furthermore, after the protective layer is formed, the surface of the permanent magnet 340 must still be flat. In this embodiment, the surfaces of the permanent magnet 340, the non-magnetic component 320, and the connectors are all processed with high precision.

[0046] Specifically, in this embodiment, the magnetic induction component 300 is cylindrical in shape, and the non-magnetic kit 320 is annular with a smooth inner wall. Multiple fixing parts 330 are integrally formed and protruded. The fixing parts 330 extend toward the center of the non-magnetic kit 320, and the permanent magnet 340 is connected to the fixing parts 330, thereby stabilizing it on the inner side of the non-magnetic kit 320.

[0047] In this embodiment, at least two fixing parts 330 are provided, and correspondingly, the same number of permanent magnets 340 are also provided in the fixing parts 330. The arrangement of the fixing parts 330 determines that the permanent magnets 340 are arranged in pairs on the non-magnetic kit 320, symmetrically distributed on both sides of the inner wall of the non-magnetic kit 320, with gaps left between the opposing permanent magnets 340, thus forming atomic channels 310 to facilitate the transport of atoms.

[0048] like Figure 3 As shown, in another embodiment of this invention, the cross-sectional shape of the fixing part 330 is trapezoidal, and the width of the fixing part 330 gradually decreases along the direction towards the center of the non-magnetic component 320. In this embodiment, the connection stability is improved by increasing the thickness of the contact end between the fixing part 330 and the inner wall of the non-magnetic component 320. The thickness of the end of the fixing part 330 away from the inner wall of the non-magnetic component 320 is reduced because the space is small near the center of the non-magnetic component 320, and multiple fixing parts 330 are arranged around the atomic channel 310, which is prone to mutual interference. Therefore, reducing the thickness can play a role in avoiding interference, thereby independently setting multiple fixing parts 330 and multiple permanent magnets 340.

[0049] like Figure 4 As shown, in another embodiment of this invention, the fixing part 330 is provided with an assembly groove 331 that opens toward the center of the non-magnetic kit 320; the side wall of the assembly groove 331 is provided with a first screw hole 332; the permanent magnet 340 is inserted into the assembly groove 331; the magnetic guide assembly 300 also includes a screw (not shown in the figure), the screw is screwed into the first screw hole 332 and screwed in to abut against the permanent magnet 340.

[0050] In this embodiment, the stability of the permanent magnet 340 is improved by setting an assembly groove 331 to insert the permanent magnet 340. Specifically, in order to further improve the stability of the permanent magnet 340 and avoid magnetic field changes, the depth of the assembly groove 331 can be set to two-thirds to three-quarters of the width of the permanent magnet 340, so that most of the surface area of ​​the permanent magnet 340 is in contact with the side wall or bottom wall of the assembly groove 331, thereby increasing the contact area, improving friction, and thus achieving the effect of increasing stability.

[0051] Specifically, in this embodiment, a first screw hole 332 is provided, and the permanent magnet 340 is connected to the fixing part 330 by screwing with a screw. The connection direction is perpendicular to the direction in which the permanent magnet 340 is inserted into the assembly groove 331, thereby constraining the permanent magnet 340 and preventing it from slipping out of the assembly groove 331, thus improving the stability of the magnetic permeability assembly 300. More specifically, multiple first screw holes 332 can be provided. Without affecting the magnetism of the permanent magnet 340, assembling multiple screws can further increase the connection stability.

[0052] Specifically, in this embodiment, the fixing part 330 and the non-magnetic kit 320 are integrally formed. The fixing part 330, the non-magnetic kit 320, and the screw are all made of non-magnetic materials, such as copper or aluminum alloy. It should be noted that this embodiment only exemplifies some non-magnetic materials. Other non-magnetic materials that can achieve the technical effects disclosed in this application can be used as equivalent substitutions for the inventive concept and should also be within the scope of protection of this application.

[0053] It should be noted that this embodiment only illustrates the connection between the permanent magnet 340 and the fixing part 330 by drilling and assembling screws. However, the scope of protection of this embodiment is not limited to this. Other types of connection methods, such as welding, bonding, snap-fit, interference fit, etc., as long as they can achieve the technical effect disclosed in this application, can be regarded as equivalent substitutions of the inventive concept and should also be within the scope of protection of this application.

[0054] like Figure 3 and Figure 4 As shown, in another embodiment of this invention, the radial cross-sectional shape of the outer wall of the non-magnetic kit 320 is a regular polygon, and at least one surface of the outer wall of the non-magnetic kit 320 is a contact surface 321 for fitting with the connecting frame 200. By tightly fitting one surface of the outer wall of the non-magnetic kit 320 with the connecting frame 200, the contact area between the connecting frame 200 and the non-magnetic kit 320 is large, facilitating connection and maintaining stability. Furthermore, in this embodiment, multiple connecting frames 200 can be arranged radially on the inner wall of the vacuum chamber 100, corresponding to multiple surfaces of the outer wall of the non-magnetic kit 320, so that the outer wall of the non-magnetic kit 320 has two or more contact surfaces 321 to increase the contact area and allow for the installation of multiple connecting structures.

[0055] Specifically, the connecting frame 200 is provided with a plurality of first connecting holes 210 arranged in an arc shape; the contact surface 321 is provided with at least one second connecting hole 322 aligned with the first connecting holes 210; the first connecting holes 210 and the second connecting holes 322 are used to insert connecting rods to connect the connecting frame 200 and the non-magnetic kit 320.

[0056] In this embodiment, the connection between the connecting frame 200 and the non-magnetic kit 320 is achieved by setting a first connecting hole 210 and a second connecting hole 322 and inserting a connecting rod. Specifically, the connecting rod can be a screw. By passing the connecting rod through the first connecting hole 210 and the second connecting hole 322 and locking it with a nut, the non-magnetic kit 320 is fixed. By setting two, three, or more connecting rods, the number of connection points is increased, so that the non-magnetic kit 320 is fixed in space and integrated with the connecting frame 200, preventing it from shaking and ensuring stability during use.

[0057] Specifically, in this embodiment, the connecting frame 200 is provided with multiple first connecting holes 210 along an arc. Multiple magnetic permeable components 300 are assembled sequentially on the connecting frame 200 at the same interval, so that multiple atomic channels 310 can be arranged in an arc shape to form an arc-shaped atomic channel 400. That is to say, the first connecting holes 210 on the connecting frame 200 also serve to position the magnetic permeable components 300, so as to facilitate the sequential assembly of multiple magnetic permeable components 300 at the same included angle, thereby achieving accurate alignment of the multiple magnetic permeable components 300.

[0058] It should be noted that this embodiment is only an example of connecting the connecting frame 200 and the non-magnetic kit 320 by drilling and assembling connecting rods. However, the scope of protection of this embodiment is not limited to this. Other types of connection methods, such as welding, bonding, snap-fit, interference fit, etc., as long as they can achieve the technical effects disclosed in this application, can be regarded as equivalent replacements of the inventive concept and should also be within the scope of protection of this application.

[0059] like Figure 4 As shown, in another embodiment of this invention, four fixing parts 330 are provided, and the four fixing parts 330 are arranged in a cross shape on the inner wall of the non-magnetic kit 320; four permanent magnets 340 are provided, and the four permanent magnets 340 are arranged in a ring, and the included angle between two adjacent permanent magnets 340 is 90°.

[0060] In this embodiment, four permanent magnets 340 are arranged in a cross shape. This ensures that a non-uniform gradient magnetic field is formed at the center of the non-magnetic component 320, i.e., inside the atomic channel 310. The number of permanent magnets 340 used is relatively small, and the magnetic field inside the arc-shaped atomic channel 400 is relatively stable, resulting in a good deflection and guidance effect on the atomic beam.

[0061] It should be noted that this embodiment only illustrates the number of fixing parts 330 and permanent magnets 340, but the protection scope of this embodiment is not limited to this. Other arrangements, such as 6, 8 or 12 permanent magnets 340, as long as the permanent magnets 340 are spaced at a specific angle and are evenly arranged in a ring around the arc-shaped atomic channel 400, can achieve the technical effect disclosed in this application. As equivalent substitutions for the inventive concept, they should also be within the protection scope of this application.

[0062] For example Figure 2 and Figure 3As shown, in another embodiment of this invention, the magnetic permeation device includes an aperture 500, which is connected to the connecting frame 200 and disposed in the high vacuum chamber 110; and the aperture 500 and a plurality of magnetic permeation components 300 are arranged sequentially along the atomic transport direction; a beam-limiting channel 510 for collimating the atomic beam is provided on the aperture 500 opposite to the entrance of the arc-shaped atomic channel 400, and the aperture of the beam-limiting channel 510 is smaller than the aperture of the arc-shaped atomic channel 400.

[0063] Specifically, in this embodiment, the aperture 500 is located in front of the magnetic permeation component 300. After the atomic beam passes through the aperture 500, it enters the center of the magnetic permeation component 300. After the atomic beam is introduced into the high vacuum chamber 110, it is restricted by the aperture 500 to some atoms. The beam-limiting channel 510 can only allow the atomic beam moving toward the arc-shaped atomic channel 400 to pass through, blocking atoms in other directions of movement, so that the target atomic beam can smoothly enter the arc-shaped atomic channel 400.

[0064] Specifically, in this embodiment, two apertures 500 are provided, spaced apart along the direction of atomic beam movement. By using two apertures 500 one in front of the other for collimation, the target atomic beam is only directed towards the arc-shaped atomic channel 400, resulting in better collimation.

[0065] like Figure 5 As shown, as another embodiment of this application, a magnetic permeability method for guiding the deflection of a single quantum state atom is also disclosed, for use in any of the magnetic permeability devices for guiding the deflection of a single quantum state atom as described above, wherein the magnetic permeability method includes:

[0066] S100: Extract air from the high vacuum chamber 110 and monitor the vacuum level in real time to obtain the real-time vacuum level value;

[0067] S200. If the real-time vacuum value is less than or equal to the preset vacuum value, then the atomic beam is collimated and guided to the arc-shaped atomic channel 400 to filter out the atomic beams for the target single quantum state selection.

[0068] In this embodiment, a high-vacuum chamber 110 that meets the requirements is first manufactured, and then an atomic beam is introduced to reduce the influence of the background gas within the high-vacuum chamber 110, thereby enabling efficient deflection and velocity filtering of the atomic beam. Specifically, the preset vacuum level value is pre-set according to the actual magnetic permeability operation requirements, for example, 10. -8 Entrust.

[0069] It should be understood that various parts of this application can be implemented using hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented using software or firmware stored in memory and executed by a suitable instruction execution system. If implemented in hardware, as in another embodiment, it can be implemented using any one or a combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (FPGAs), field-programmable gate arrays (FPGAs), etc.

[0070] Furthermore, the functional units in the various embodiments of this application can be integrated into a processing module, or each unit can exist physically separately, or two or more units can be integrated into a module. The integrated module can be implemented in hardware or as a software functional module. If the integrated module is implemented as a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium.

[0071] In summary, this application discloses a magnetic permeation device for guiding the deflection of single-quantum-state atoms, comprising a vacuum chamber 100, a connecting frame 200, and a plurality of magnetic permeation components 300. A high-vacuum chamber 110 is formed within the vacuum chamber 100. The connecting frame 200 is disposed on the inner wall of the vacuum chamber 100. The plurality of magnetic permeation components 300 are arranged in an arc shape on the connecting frame 200. An atomic channel 310 is provided at the center of each magnetic permeation component 300. The atomic channels 310 on the plurality of magnetic permeation components 300 are connected sequentially to form an arc-shaped atomic channel 400 with a non-uniform gradient magnetic field, used to drive the atom deflection. By setting a plurality of magnetic permeation components 300 to deflect the atomic beam, angular deflection transmission of the central atomic beam is achieved, which is beneficial for velocity filtering and obtaining a single-quantum-state atomic beam source. This provides a basis for conducting cold collision experiments in the extremely low energy region and also contributes to the development of metastable atom preparation in the field of semiconductor etching.

[0072] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0073] It should be noted that this invention uses a magnetic permeation device and method for guiding the deflection of single quantum state atoms as an example to introduce the specific structure and working principle of the invention. However, the application of this invention is not limited to the magnetic permeation device and method for guiding the deflection of single quantum state atoms, and can also be applied to other similar production and use.

[0074] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

[0075] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A magnetic permeability device for guiding the deflection of single-quantum-state atoms, characterized in that, include: A vacuum chamber, wherein a high-vacuum chamber is formed inside the vacuum chamber; A connecting frame is provided on the inner wall of the vacuum chamber; Several magnetic permeability components are arranged in an arc shape on the connecting frame; an atomic channel is provided at the center of each magnetic permeability component; Among them, the atomic channels on several of the magnetic permeability components are connected in sequence to form an arc-shaped atomic channel with a non-uniform gradient magnetic field, which is used to drive the atoms to deflect. The magnetic permeability component includes: A non-magnetic kit is connected to the connecting frame; the non-magnetic kit is annular in shape, and at least two fixing parts are protruding from the inner side of the non-magnetic kit, and the at least two fixing parts are centrally symmetrically arranged on the inner wall of the non-magnetic kit; the non-magnetic kit is a copper alloy or aluminum alloy kit; At least two permanent magnets, one side of which is connected to the fixing part, and the other side protrudes from the fixing part and extends toward the center of the non-magnetic kit; the atomic channel is formed between the at least two oppositely arranged permanent magnets.

2. The magnetic permeability device for guiding the deflection of single quantum state atoms according to claim 1, characterized in that, The cross-sectional shape of the fixing part is trapezoidal, and the width of the fixing part gradually decreases along the direction toward the center of the non-magnetic kit.

3. The magnetic permeability device for guiding the deflection of single quantum state atoms according to claim 1, characterized in that, The fixing part has a mounting groove that opens toward the center of the non-magnetic kit; the side wall of the mounting groove is provided with a first screw hole; the permanent magnet is inserted into the mounting groove; The magnetic permeation assembly also includes a screw, which is screwed into the first screw hole and screwed in to abut against the permanent magnet.

4. The magnetic permeability device for guiding the deflection of a single quantum state atom according to claim 1, characterized in that, The radial cross-sectional shape of the outer wall of the non-magnetic kit is a regular polygon, and at least one surface of the outer wall of the non-magnetic kit is a contact surface for fitting with the connecting frame; The connecting frame has multiple first connecting holes arranged in an arc shape; the contact surface has at least one second connecting hole aligned with the first connecting holes; the first connecting holes and the second connecting holes are used to insert connecting rods to connect the connecting frame and the non-magnetic kit.

5. The magnetic permeability device for guiding the deflection of a single quantum state atom according to claim 1, characterized in that, The surface of the permanent magnet is provided with a protective layer.

6. The magnetic permeability device for guiding the deflection of a single quantum state atom according to any one of claims 1 to 5, characterized in that, The fixing part is provided in four parts, and the four fixing parts are arranged in a cross shape on the inner wall of the non-magnetic kit; The permanent magnet is provided in four parts, which are arranged in a ring and the included angle between two adjacent permanent magnets is 90°.

7. The magnetic permeability device for guiding the deflection of a single quantum state atom according to claim 1, characterized in that, The magnetic permeation device includes an aperture, which is connected to the connecting frame and disposed in the high vacuum chamber; and the aperture and several magnetic permeation components are arranged sequentially along the atomic transport direction. The aperture is provided with a beam-limiting channel for collimating the atomic beam, which is located on the aperture opposite the entrance of the arc-shaped atomic channel. The diameter of the beam-limiting channel is smaller than the diameter of the arc-shaped atomic channel.

8. The magnetic permeability device for guiding the deflection of a single quantum state atom according to claim 1, characterized in that, The magnetic permeation device includes a high vacuum gauge tube and a vacuum pump, both of which are connected to the vacuum chamber. The high vacuum gauge tube is inserted into the high vacuum chamber to detect the vacuum level. The vacuum pump is located at the end of the high vacuum chamber away from the magnetic permeation assembly and is used to pump air to maintain the vacuum level of the high vacuum chamber.

9. A magnetic permeability method for guiding the deflection of a single quantum state atom, used in the magnetic permeability device for guiding the deflection of a single quantum state atom as described in any one of claims 1 to 8, characterized in that, The magnetic permeability method includes: Air is extracted from the high vacuum chamber, and the vacuum level is monitored in real time to obtain the real-time vacuum level value; If the real-time vacuum value is less than or equal to the preset vacuum value, the atomic beam is collimated and guided to the arc-shaped atomic channel to filter out the target single quantum state atomic beam.

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