LC resonant intraocular pressure monitoring sensor and preparation method thereof

Abstract

The invention discloses an LC resonant intraocular pressure monitoring sensor and a preparation method thereof, and belongs to the technical field of flexible sensing. The preparation method comprises the following steps: preparing a P (VDF-TrFE) thin film with a microstructure as a dielectric layer by using a reverse molding method, then spraying MXene on the thin film by using a mask plate to prepare a patterned capacitor, preparing an inductance coil made of an aluminum foil material by using laser marking, and obtaining the MXene-based intraocular pressure sensor by using hot-pressing packaging. According to the preparation method disclosed by the invention, MXene is used as an electrode material of the sensor, and a microstructure of the dielectric layer is adopted, so that the sensor has excellent sensitivity; the preparation method is simple and has batch preparation feasibility.

Description

Technical Field

[0001] The invention relates to an LC resonance type intraocular pressure monitoring sensor and a preparation method thereof, belonging to the technical field of flexible sensing. Background Art

[0002] Glaucoma is the second leading cause of blindness in the world and the first irreversible cause of blindness in the world. According to statistics, there are approximately 76 million glaucoma patients worldwide in 2020, and the number of glaucoma patients in China is particularly prominent, about 21.8 million, of which about 5.67 million are blind. The pathogenesis of glaucoma is complex and there are many pathogenic factors. Among them, intraocular pressure is the main and the only known modifiable risk factor. Intraocular pressure refers to the pressure of the contents of the eyeball on the interaction between the inner wall of the eyeball and the contents. The normal range is 10-21mmHg, and the intraocular pressure of glaucoma patients is usually higher. For glaucoma patients with abnormal intraocular pressure, intraocular pressure monitoring in the early stage of the disease and timely medication or surgery to lower intraocular pressure can effectively slow down damage to the retinal nerves and effectively reduce the blindness rate.

[0003] At present, intraocular pressure is mainly measured clinically using tonometers. Common tonometers include depression tonometers, applanation tonometers, and non-contact tonometers, such as Goldman tonometers and Icare rebound tonometers. The above methods can only measure the instantaneous intraocular pressure value, and cannot accurately reflect the fluctuation of intraocular pressure. It is easy to miss the peak value of intraocular pressure, and the measurement needs to be performed under the guidance of a doctor, which can easily lead to misdiagnosis or missed diagnosis of glaucoma. Therefore, there is an urgent need for a method that is easy to operate, safe and comfortable and can achieve 24-hour continuous intraocular pressure monitoring.

[0004] With the development of MEMS technology and flexible electronic technology, more and more intraocular pressure sensors are widely used in 24-hour continuous intraocular pressure measurement. They are mainly divided into implantable and contact lens types. Contact lens sensors can be further divided into optical, resistive and LC (inductor-capacitor) resonant types.

[0005] However, there are some outstanding problems with existing intraocular pressure sensor technology:

[0006] 1. Implantable intraocular pressure sensors require surgical implantation, which will cause irreversible damage to the eyeball and have the risk of intraocular fluid leakage and inflammation. In addition, there is the possibility of electrical leakage, which will affect the patient's daily life and is not easily accepted by patients.

[0007] 2. Optical intraocular pressure sensors cannot monitor the intraocular pressure of patients during sleep at night, and intraocular pressure generally reaches its peak at night; resistive intraocular pressure sensors are easily affected by the external environment and it is difficult to achieve data transmission.

[0008] 3. The preparation cost of LC resonant intraocular pressure sensors is usually high, the preparation process is relatively complicated, and it is difficult to achieve mass production. Summary of the invention

[0009] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a method for preparing an LC resonant intraocular pressure monitoring sensor.

[0010] The purpose of the present invention is implemented through the following technical solutions:

[0011] An LC resonant intraocular pressure monitoring sensor, the LC resonant intraocular pressure monitoring sensor comprises a lower packaging layer 1, a capacitor lower plate 2, a dielectric layer 3, a capacitor upper plate 4, an inductor coil 5, and an upper packaging layer 6;

[0012] The capacitor lower plate 2, dielectric layer 3, capacitor upper plate 4, and inductor coil 5 are located between the lower packaging layer 1 and the upper packaging layer 6;

[0013] The capacitor upper plate 4 is a circular ring, and convex structures are evenly distributed on the outer end surface of the circular ring. The number of convex structures is 6-9, and the convex structures are semicircular, petal-shaped, triangular, or trapezoidal;

[0014] The inductor coil 5 is located in the ring of the capacitor upper plate 4 and one end of the inductor coil 5 is connected to the ring of the capacitor upper plate 4 through silver paste;

[0015] The number of turns of the inductor coil 5 is 3-4 turns, the width of each turn is 200-300 μm, and the spacing between each turn is 200-300 μm;

[0016] The capacitor lower plate 2 and the capacitor upper plate 4 have the same shape and size;

[0017] The capacitor lower plate 2 and the capacitor upper plate 4 are both made of MXene materials;

[0018] The circular ring of the capacitor lower plate 2 is connected to the other end of the inductor coil 5 through silver paste;

[0019] The dielectric layer 3 is a circular ring, and grooves are evenly distributed on the surface of the circular ring. The diameter of the grooves is 2.5-3 μm, the depth of the grooves is 1.2-1.5 μm, and the spacing between the grooves is 3-4 μm.

[0020] The material of the dielectric layer 3 is P (VDF-TrFE);

[0021] The inner diameter of the ring of the dielectric layer 3 is consistent with the inner diameter of the ring of the capacitor upper plate 4; the outer diameter of the ring of the dielectric layer 3 is d, and the distance from the top of the protruding structure on the outer end surface of the ring of the capacitor upper plate 4 to the center point of the ring of the capacitor upper plate 4 is d;

[0022] The dielectric layer 3 is located between the capacitor lower plate 2 and the capacitor upper plate 4;

[0023] The lower packaging layer 1 and the upper packaging layer 6 are both PDMS circular plates.

[0024] A method for preparing an LC resonant intraocular pressure monitoring sensor, the method comprising the steps of:

[0025] In the first step, a dielectric film is prepared using the inverted molding method, and then the dielectric film is subjected to plasma treatment to improve the hydrophilicity of its surface and make the MXene and the film more closely bonded.

[0026] In the second step, a PET mask is used to spray MXene material on one side of the dielectric film after the plasma treatment to obtain a capacitor lower electrode 2, and finally, MXene material is sprayed on the other side of the dielectric film to obtain a capacitor upper electrode 4;

[0027] The third step is to use laser marking on aluminum foil to obtain the inductor coil 5;

[0028] The fourth step is to place the inductor coil 5 obtained in the third step into the ring of the upper plate 4 of the capacitor, and connect one end of the inductor coil 5 to the ring of the upper plate 4 of the capacitor through silver paste, and then connect the other end of the inductor coil 5 to the ring of the lower plate 2 of the capacitor through silver paste to obtain an assembly;

[0029] Step 5, encapsulating the assembly obtained in step 4 through the lower encapsulation layer 1 and the upper encapsulation layer 6;

[0030] In the sixth step, the device packaged in the fifth step is subjected to hot pressing molding at a temperature of 150-160° C. for a time of 20-30 minutes to obtain an LC resonant intraocular pressure monitoring sensor.

[0031] In the first step, a DMF solution of P(VDF-TrFE) with a mass fraction of 20% is used to prepare a dielectric film. The temperature for preparing the dielectric film is 80-90° C., the heating time is 3-6 min, and the template material used in preparing the dielectric film is sapphire, and the sapphire surface has a layer of microsphere structure matching the grooves; the rotation speed when preparing the dielectric film is 1500 rpm, and the time is 20 s;

[0032] In the second step, the spraying temperature is 60-70°C and the spraying distance is 25-30cm;

[0033] In the second step, the concentration of MXene material was 2 mg / mL and the amount was 500 μL;

[0034] In the fifth step, polydimethylsiloxane (PDMS) is used for encapsulation, the mass ratio of polydimethylsiloxane (PDMS) to curing agent is 1:10, polydimethylsiloxane (PDMS) and curing agent are mixed and left to stand for 4 hours to remove bubbles, and then cured at 90-100° C. for 20-30 minutes;

[0035] In the sixth step, the packaged device is removed from the glass sheet and placed in a copper metal mold for hot pressing.

[0036] An application of an LC resonant intraocular pressure monitoring sensor, which is applied to an intelligent electric wheelchair, and the intelligent electric wheelchair is controlled by signal transmission through smart glasses;

[0037] The intelligent electric wheelchair includes a seat, wheels, a communication module, a signal processing module and a drive module;

[0038] The communication module is used to receive the signal of whether the eye blink is conscious output by the microprocessor, and output the received signal of whether the eye blink is conscious to the signal processing module;

[0039] The signal processing module is used to receive the signal of whether the eye blink is conscious output by the communication module, and convert the received signal of whether the eye blink is conscious into a driving instruction and then output it to the driving module;

[0040] The driving module is used to receive the driving instruction output by the signal processing module, and control the movement of the wheel according to the received driving instruction;

[0041] Smart glasses include frames, lenses and temples, and a reading coil is installed on the lens. The reading coil is integrated on the lens through a photolithography process. The reading coil is made of gold or copper, with an inner diameter of 8-10mm, an outer diameter of 14-16mm, and 5-7 turns, which will not affect the patient's field of vision.

[0042] A microprocessor is installed on the temple, and the microprocessor is electrically connected to the reading coil. The microprocessor is used to obtain the reflection coefficient S of the reading coil. 11 , and according to the reflection coefficient S 11 Obtain the resonant frequency of the sensor circuit, then obtain the wearer's intraocular pressure based on the resonant frequency, and finally determine whether the wearer consciously blinks based on the wearer's intraocular pressure, and output a signal indicating whether the wearer consciously blinks to the communication module;

[0043] The method of controlling the smart electric wheelchair by signal transmission through smart glasses is:

[0044] Step 1: The patient wears the LC resonant intraocular pressure sensor on the cornea and wears smart glasses to produce different conscious blinking behaviors according to the actual road conditions;

[0045] Step 2: The microprocessor obtains the reading coil reflection coefficient S 11 , and according to the reflection coefficient S 11 Obtain the resonant frequency of the sensor circuit, then obtain the wearer's intraocular pressure based on the resonant frequency, and finally determine whether the wearer consciously blinks based on the wearer's intraocular pressure, and output a signal indicating whether the wearer consciously blinks to the communication module;

[0046] Step 3, the communication module outputs the received signal of whether the blinking is conscious to the signal processing module;

[0047] Step 4, the signal processing module converts the received signal of whether the eye blinks consciously into a driving instruction and outputs it to the driving module;

[0048] Step 5: The driving module controls the movement of the wheel according to the received driving instruction.

[0049] In step 3, the basis for judging whether the wearer blinks consciously according to the wearer's intraocular pressure is:

[0050] When the intraocular pressure value is greater than or equal to 25 mmHg and the duration is higher than the threshold, it is determined that the wearer has consciously blinked or closed his eyes;

[0051] When the intraocular pressure value is greater than or equal to 25 mmHg and the duration is lower than the threshold, it is determined that the wearer has unconscious blinking behavior;

[0052] When the intraocular pressure value is less than 25 mmHg, there is no blinking behavior;

[0053] When blinking consciously, the relationship between the number of blinks and the acceleration, deceleration, left turn, right turn and stop of the wheelchair can be set.

[0054] The present invention has the following advantages:

[0055] 1. The preparation method disclosed in the present invention uses MXene as the electrode material of the sensor. Since MXene has good conductivity and mechanical properties, the sensor has an extremely wide measurement range.

[0056] 2. The preparation method disclosed in the present invention utilizes the inverted molding method to prepare a P (VDF-TrFE) dielectric film with a microstructure, thereby improving the test sensitivity of the sensor.

[0057] 3. The preparation method disclosed in the present invention adopts a reasonable structural design, and coupled with the good light transmittance of MXene, it will not block the patient's field of vision, and the packaged sensor is very thin, has good flexibility, and is comfortable to wear.

[0058] 4. The preparation method disclosed in the present invention has a simple process, low cost and short cycle.

[0059] The present invention discloses an LC (inductor-capacitor) resonant intraocular pressure monitoring sensor and a preparation method thereof, belonging to the field of flexible sensing technology. The preparation method is to use the reverse molding method to prepare a P (VDF-TrFE) film with a microstructure as a dielectric layer, then use a mask plate to spray MXene on the film to obtain a patterned capacitor, use laser marking to prepare an inductor coil made of aluminum foil, and use hot pressing packaging to obtain a MXene-based intraocular pressure sensor; the preparation method disclosed in the present invention uses MXene as the electrode material of the sensor, and adopts the microstructure of the dielectric layer, which has excellent sensitivity; the preparation method of the present invention is simple and has the feasibility of batch preparation. BRIEF DESCRIPTION OF THE DRAWINGS

[0060] Figure 1 It is a structural schematic diagram of the LC resonant intraocular pressure sensor;

[0061] Figure 2 It is a schematic diagram of the outer end face and surface;

[0062] Figure 3 This is a physical picture of the capacitor of the LC resonant intraocular pressure sensor;

[0063] Figure 4 This is a capacitance-intraocular pressure test diagram of the LC resonant intraocular pressure sensor, where the pressure increases / decreases in steps of 9 mmHg;

[0064] Figure 5 This is the frequency-intraocular pressure test diagram of the LC resonant intraocular pressure sensor, where the pressure increases in steps of 10 mmHg. DETAILED DESCRIPTION

[0065] The present invention is further described below in conjunction with the accompanying drawings and embodiments, and the protection scope of the present invention is not limited to the following:

[0066] Example 1

[0067] like Figure 1 and Figure 2 As shown, an LC resonant intraocular pressure monitoring sensor comprises a lower packaging layer 1, a capacitor lower plate 2, a dielectric layer 3, a capacitor upper plate 4, an inductor coil 5, and an upper packaging layer 6;

[0068] The capacitor lower plate 2, dielectric layer 3, capacitor upper plate 4, and inductor coil 5 are located between the lower packaging layer 1 and the upper packaging layer 6;

[0069] The capacitor upper plate 4 is a circular ring, and convex structures are evenly distributed on the outer end surface of the circular ring. The number of convex structures is 6-9, and the convex structures are semicircular, petal-shaped, triangular, or trapezoidal;

[0070] The inductor coil 5 is located in the ring of the capacitor upper plate 4 and one end of the inductor coil 5 is connected to the ring of the capacitor upper plate 4 through silver paste;

[0071] The number of turns of the inductor coil 5 is 3-4 turns, the width of each turn is 200-300 μm, and the spacing between each turn is 200-300 μm;

[0072] The capacitor lower plate 2 and the capacitor upper plate 4 have the same shape and size;

[0073] The capacitor lower plate 2 and the capacitor upper plate 4 are both made of MXene materials;

[0074] The circular ring of the capacitor lower plate 2 is connected to the other end of the inductor coil 5 through silver paste;

[0075] The dielectric layer 3 is a circular ring, and grooves are evenly distributed on the surface of the circular ring. The diameter of the grooves is 2.5-3 μm, the depth of the grooves is 1.2-1.5 μm, and the spacing between the grooves is 3-4 μm.

[0076] The material of the dielectric layer 3 is P (VDF-TrFE);

[0077] The inner diameter of the ring of the dielectric layer 3 is consistent with the inner diameter of the ring of the capacitor upper plate 4; the outer diameter of the ring of the dielectric layer 3 is d, and the distance from the top of the protruding structure on the outer end surface of the ring of the capacitor upper plate 4 to the center point of the ring of the capacitor upper plate 4 is d;

[0078] The dielectric layer 3 is located between the capacitor lower plate 2 and the capacitor upper plate 4;

[0079] The lower packaging layer 1 and the upper packaging layer 6 are both PDMS circular plates.

[0080] A method for preparing an LC resonant intraocular pressure monitoring sensor, the method comprising the steps of:

[0081] (1) Preparation of dielectric films

[0082] First, prepare a 20% mass fraction of P(VDF-TrFE) solution, and the solvent is DMF. Use a spin coater to evenly spin coat a layer of P(VDF-TrFE) solution on the surface of the template (the template material used for the mold is sapphire, and the surface has a layer of microsphere structure with a diameter of 2.7μm and a height of 1.5μm). The rotation speed and time used during coating are 1500rpm and 20s respectively, and then heated at 90℃ for 5min. Due to the hydrophobicity of P(VDF-TrFE), a P(VDF-TrFE) dielectric film with a surface microstructure is obtained after adding water and tearing it off;

[0083] (2) Preparation of LC resonant intraocular pressure sensor

[0084] Prepare 500 μL of 2 mg / mL Ti3C2T x -MXene aqueous solution was added to the spray gun, the P(VDF-TrFE) dielectric film was fixed on the mold, the PET mask was aligned with the film, and it was treated in a plasma surface treatment machine for 10 minutes to improve the hydrophilicity of the P(VDF-TrFE) dielectric film. Then Ti3C2T x -MXene materials, obtained Figure 1 Capacitor plate 2 and capacitor plate 4 in. Figure 3 The actual pictures of sensor capacitors of different shapes prepared separately are shown. Then the inductor coils are marked on the aluminum foil using laser marking technology, such as Figure 1 As shown in Figure 5. Use conductive silver paste to connect the electrode pins and the pins of the inductor coil to form a complete LC loop.

[0085] The prepared device was encapsulated with polydimethylsiloxane (PDMS) and cured at 90°C for 20 minutes. The encapsulated device was then hot-pressed using a custom metal mold and heated at 160°C for 30 minutes to obtain an LC resonant intraocular pressure sensor that can actually be worn in the eye.

[0086] Performance Test:

[0087] The formed intraocular pressure sensor is fixed on the eyeball mold, and the height of the liquid level is controlled by a stepper motor, thereby controlling the pressure value inside the mold. The capacitance is measured using an LCR tester. The tester connects the two electrodes of the capacitor and controls the pressure to increase in steps of 9 mmHg. The capacitance-intraocular pressure data is measured as follows: Figure 4 As shown, according to Figure 4 It can be seen that when the intraocular pressure changes in a step-like manner, the capacitance also changes in a step-like manner with the intraocular pressure value, indicating that the sensor's sensitive capacitance can accurately reflect the changes in intraocular pressure;

[0088] A homemade single-turn thick copper coil is used as the external reading coil, which is connected to a portable vector network analyzer. The distance between the reading coil and the sensor is within 1 cm. The resonant frequency of the sensor LC loop is read. The pressure is controlled to increase in steps of 10 mmHg. The measurement results are shown in Figure 2. Figure 5 As shown, according to Figure 5 It can be seen that within the range of 0-40 mmHg, as the intraocular pressure gradually increases, the resonant frequency of the sensor circuit gradually decreases, indicating that the resonant frequency of the sensor can accurately reflect the changes in intraocular pressure.

[0089] An application of an LC resonant intraocular pressure monitoring sensor, and setting that when blinking consciously, blinking once within 4 seconds represents turning left, blinking twice represents turning right, blinking three times represents acceleration, blinking four times represents deceleration, and eyes being closed represents system shutdown, and the duration threshold is 500ms;

[0090] The steps are:

[0091] Step 1: The patient wears the LC resonant intraocular pressure sensor on the cornea and wears smart glasses to produce different conscious blinking behaviors according to the actual road conditions;

[0092] Step 2: The microprocessor obtains the reading coil reflection coefficient S 11 , and according to the reflection coefficient S 11 Obtain the resonant frequency of the sensor circuit, and then obtain the wearer's intraocular pressure of 30 mmHg and the duration of 700 ms based on the resonant frequency, determine that the wearer consciously blinks, and there is only one conscious blink behavior within 4 seconds, and output the conscious blink signal to the communication module;

[0093] Step 3, the communication module outputs the received conscious blinking signal to the signal processing module;

[0094] Step 4, the signal processing module converts the received conscious blinking signal into a driving instruction and outputs it to the driving module;

[0095] Step 5: The driving module controls the wheel to turn left according to the received driving instruction.

[0096] Example 2

[0097] An application of an LC resonant intraocular pressure monitoring sensor, comprising the following steps:

[0098] Step 1: The patient wears the LC resonant intraocular pressure sensor on the cornea and wears smart glasses to produce different conscious blinking behaviors according to the actual road conditions;

[0099] Step 2: The microprocessor obtains the reading coil reflection coefficient S 11 , and according to the reflection coefficient S 11 Obtain the resonant frequency of the sensor circuit, and then obtain the wearer's intraocular pressure of 30 mmHg and the duration of 200 ms based on the resonant frequency, determine that the wearer blinks unconsciously, and output the unconscious blinking signal to the communication module;

[0100] Step 3, the communication module outputs the received conscious blinking signal to the signal processing module;

[0101] Step 4, the signal processing module converts the received conscious blinking signal into a driving instruction and outputs it to the driving module;

[0102] Step 5: The driving module controls the wheels to continue the previous behavior according to the received driving instructions.

[0103] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which are all covered by the protection scope of the present invention.

Claims

1. An LC resonant intraocular pressure monitoring sensor, characterized in that: The LC resonant intraocular pressure monitoring sensor comprises a lower packaging layer, a capacitor lower plate, a dielectric layer, a capacitor upper plate, an inductor coil, and an upper packaging layer; The capacitor lower plate, dielectric layer, capacitor upper plate, and inductor coil are located between the lower packaging layer and the upper packaging layer; The upper plate of the capacitor is a circular ring, and convex structures are evenly distributed on the outer end surface of the circular ring; The inductor coil is located in the circular ring of the upper plate of the capacitor and one end of the inductor coil is connected to the circular ring of the upper plate of the capacitor through silver paste; The capacitor lower plate is consistent in shape and size with the capacitor upper plate; The circular ring of the capacitor lower plate is connected to the other end of the inductor coil through silver paste; The dielectric layer is a circular ring, and grooves are evenly distributed on the surface of the circular ring; The inner diameter of the ring of the dielectric layer is consistent with the inner diameter of the ring of the upper plate of the capacitor; the outer diameter of the ring of the dielectric layer is d, and the distance from the top of the protruding structure on the outer end surface of the ring of the upper plate of the capacitor to the center point of the ring of the upper plate of the capacitor is d; The dielectric layer is located between the capacitor lower plate and the capacitor upper plate.

2. The LC resonant intraocular pressure monitoring sensor according to claim 1, characterized in that: The number of the protruding structures on the upper plate of the capacitor is 6-9, and the protruding structures are semicircular, petal-shaped, triangular or trapezoidal.

3. The LC resonant intraocular pressure monitoring sensor according to claim 1, characterized in that: The number of turns of the inductor coil is 3-4, the width of each turn is 200-300 μm, and the spacing between each turn is 200-300 μm.

4. The LC resonant intraocular pressure monitoring sensor according to claim 1, characterized in that: The capacitor lower plate and the capacitor upper plate are both made of MXene material.

5. The LC resonant intraocular pressure monitoring sensor according to claim 1, characterized in that: The diameter of the grooves of the dielectric layer is 2.5-3 μm, the depth of the grooves is 1.2-1.5 μm, and the spacing between the grooves is 3-4 μm.

6. The LC resonant intraocular pressure monitoring sensor according to claim 1, characterized in that: The material of the dielectric layer is P (VDF-TrFE); The lower packaging layer and the upper packaging layer are both PDMS circular plates.

7. A method for preparing an LC resonant intraocular pressure monitoring sensor, characterized in that The steps of the method include: In the first step, a dielectric film is prepared by using a reverse molding method, and then the dielectric film is subjected to plasma treatment; In the second step, a PET mask is used to spray MXene material on one side of the plasma-treated dielectric film to obtain the lower plate of the capacitor, and finally MXene material is sprayed on the other side of the dielectric film to obtain the upper plate of the capacitor; The third step is to use laser marking aluminum foil to obtain the inductor coil; The fourth step is to place the inductor coil obtained in the third step into the ring of the upper plate of the capacitor, and connect one end of the inductor coil to the ring of the upper plate of the capacitor through silver paste, and then connect the other end of the inductor coil to the ring of the lower plate of the capacitor through silver paste to obtain an assembly; Step 5, encapsulating the assembly obtained in step 4 through a lower encapsulation layer and an upper encapsulation layer; In the sixth step, the device packaged in the fifth step is subjected to hot pressing molding at a temperature of 150-160° C. for a time of 20-30 minutes to obtain an LC resonant intraocular pressure monitoring sensor.

8. The method for preparing an LC resonant intraocular pressure monitoring sensor according to claim 7, characterized in that: In the first step, a DMF solution of P(VDF-TrFE) with a mass fraction of 20% is used to prepare a dielectric film. The temperature for preparing the dielectric film is 80-90°C, the heating time is 3-6 minutes, and the template material used in preparing the dielectric film is sapphire. The sapphire surface has a layer of microsphere structure matching the grooves. The rotation speed for preparing the dielectric film is 1500rpm and the time is 20 seconds.

9. The method for preparing an LC resonant intraocular pressure monitoring sensor according to claim 7, characterized in that: In the second step, the spraying temperature is 60-70°C and the spraying distance is 25-30cm; In the second step, the concentration of MXene material is 2 mg / mL and the amount used is 500 μL.

10. The method for preparing an LC resonant intraocular pressure monitoring sensor according to claim 7, characterized in that: In the fifth step, polydimethylsiloxane is used for encapsulation, the mass ratio of polydimethylsiloxane to curing agent is 1:10, polydimethylsiloxane and curing agent are mixed and left to stand for 4 hours to remove bubbles, and then cured at 90-100° C. for 20-30 minutes; In the sixth step, the packaged device is removed from the glass sheet and placed in a copper metal mold for hot pressing.

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