Ball laying device for wafer ball mounting and air knife assembly

Abstract

The invention provides a ball laying device for wafer ball mounting. The ball laying device comprises an air knife connector and an air knife assembly. The air knife assembly at least comprises an air knife body, a first blade assembly and a second blade assembly. An annular air cavity is formed in the air knife main body; a plurality of first rotational flow air cavities and a plurality of second rotational flow air cavities are annularly arrayed on the inner side of the annular air cavity; a plurality of furling air ports in an annular array are formed in the annular air cavity; a first rotational flow air opening is formed in the first rotational flow air cavity, and a second rotational flow air opening is formed in the second rotational flow air cavity. The bottom face of the air knife body comprises an annular protruding part. A first annular slope is formed on the outer side of the annular protruding part; mounting cavities are formed in the inner sides of the annular convex parts; the first blade assembly is mounted in the mounting cavity to form a first rotational flow air duct and a second rotational flow air duct; the second blade assembly is installed on the bottom face of the air knife body to form a furled air channel. According to the invention, gas blows the solder balls to lay the solder balls into the pores of the steel mesh, so that the risk that the solder balls are damaged is reduced, and the quality of wafer ball mounting is improved.

Description

Technical Field

[0001] The invention relates to the technical field of wafer ball planting, in particular to a ball laying device and an air knife component used for wafer ball planting. Background Art

[0002] Wafer ball implantation refers to implanting solder balls on the wafer surface through a steel mesh (template). For example, a steel mesh (template) is set on the wafer surface, and solder balls (such as tin balls, copper balls, etc.) are implanted into the wafer surface through the pores of the steel mesh (template).

[0003] In the prior art, the ball-laying mechanism of wafer implantation mostly uses an artificial silk brush to reciprocate and lay the solder balls (such as tin balls, copper balls, etc.) into the pores of the steel mesh (template). During the ball-laying process, the silk brush is in direct contact with the solder balls (such as tin balls, copper balls, etc.), which makes the solder balls (such as tin balls, copper balls, etc.) easily damaged, reducing the quality of wafer implantation. Moreover, the ball-laying mechanism based on the silk brush has a complex structure and needs to replace the silk brush regularly, which is complicated to operate and has high maintenance costs. Summary of the invention

[0004] The present invention proposes a ball-laying device and an air knife assembly for wafer ball planting, so as to solve the technical problem in the prior art that the silk brush of the ball-laying mechanism directly contacts the solder ball, causing the solder ball to be easily damaged and reducing the quality of wafer ball planting.

[0005] One aspect of the present invention is to provide a ball-laying device for wafer ball implantation, the ball-laying device comprising an air knife joint and an air knife assembly;

[0006] A joint solder ball channel is provided in the middle of the air knife joint, and an air knife solder ball channel is provided in the middle of the air knife assembly; the air knife joint is installed above the air knife assembly, and the joint solder ball channel is directly opposite to the air knife solder ball channel;

[0007] Wherein, the wind knife assembly at least includes a wind knife body, a first blade assembly and a second blade assembly;

[0008] Wherein, an annular wind cavity is provided in the wind knife body; inside the annular wind cavity, a plurality of first cyclone wind cavities and a plurality of second cyclone wind cavities are provided in an annular array, and the first cyclone wind cavities and the second cyclone wind cavities are arranged at intervals;

[0009] In the annular air cavity, at least a plurality of convergent air ports in an annular array are provided; in the first cyclone air cavity, a first cyclone air port is provided, and in the second cyclone air cavity, a second cyclone air port is provided;

[0010] The bottom surface of the wind knife body includes an annular protrusion; the outer side of the annular protrusion forms a first annular inclined surface extending toward the center of the wind knife body; the inner side of the annular protrusion forms a mounting cavity;

[0011] The first blade assembly includes a plurality of first swirl blades and a plurality of second swirl blades, wherein the first swirl blades and the second swirl blades are arranged at intervals and installed in the installation cavity;

[0012] Wherein, a first swirl air duct and a second swirl air duct are formed between each second swirl blade and the joint surface of two adjacent first swirl blades;

[0013] The first swirl air outlet faces the first swirl air duct, and the second swirl air outlet faces the second swirl air duct;

[0014] After the airflow is introduced into the first cyclone air chamber, it is blown toward the first cyclone air duct through the first cyclone air port, and forms an airflow swirling along a first rotation direction through the first cyclone air duct;

[0015] After the airflow is introduced into the second cyclone air chamber, it is blown toward the second cyclone air duct through the second cyclone air port, and forms an airflow swirling along a second rotation direction through the second cyclone air duct;

[0016] The second blade assembly includes at least one annular blade; the annular blade is mounted on the bottom surface of the wind knife body;

[0017] Wherein, a second annular slope extending toward the center of the wind knife body is formed on the inner side of the annular blade, a convergent air duct is formed between the first annular slope and the second annular slope, and the convergent air outlet faces the convergent air duct;

[0018] After the annular air cavity introduces airflow, it is blown toward the gathering air duct through the gathering air port, and forms an airflow that converges toward the center of the air knife body through the gathering air duct.

[0019] In a preferred embodiment, the wind knife assembly further includes a wind knife upper cover;

[0020] The wind knife upper cover is installed on the top surface of the wind knife body; the wind knife upper cover is provided with a plurality of upper cover outer air holes in an annular array, a plurality of upper cover middle air holes in an annular array, and a plurality of upper cover inner air holes in an annular array;

[0021] The air holes on the outer side of the upper cover are connected to the annular air cavity, the air holes in the middle of the upper cover are connected to the first cyclone air cavity, and the air holes on the inner side of the upper cover are connected to the second cyclone air cavity;

[0022] The air knife joint is installed on the air knife upper cover.

[0023] In a preferred embodiment, a first air induction channel, a second air induction channel and a third air induction channel are provided in the air knife joint;

[0024] The bottom of the air knife joint is provided with a first annular air channel, a second annular air channel and a third annular air channel, the first air induction channel is connected to the first annular air channel, the second air induction channel is connected to the second annular air channel, and the third air induction channel is connected to the third annular air channel;

[0025] The first annular air channel is connected to a plurality of air holes on the outer side of the upper cover, the second annular air channel is connected to a plurality of air holes in the middle of the upper cover, and the third annular air channel is connected to a plurality of air holes on the inner side of the upper cover;

[0026] After the first air induction channel introduces airflow, the airflow is introduced into the annular air cavity through the first annular air passage and the plurality of air holes on the outer side of the upper cover;

[0027] After the second air induction channel introduces the airflow, the airflow is introduced into the first cyclone air chamber through the second annular air passage and the plurality of middle air holes of the upper cover;

[0028] After the third air induction channel introduces airflow, the airflow is introduced into the second cyclone air chamber through the third annular air passage and the plurality of air holes on the inner side of the upper cover.

[0029] In a preferred embodiment, a gasket groove is provided on the bottom surface of the air knife joint, and a sealing gasket is installed in the gasket groove;

[0030] The sealing gasket is provided with a plurality of gasket outer side air holes in an annular array, a plurality of gasket middle air holes in an annular array, and a plurality of gasket inner side air holes in an annular array;

[0031] The first annular air passage is connected to a plurality of gasket outer pores, and one gasket outer pore is connected to one upper cover outer pore;

[0032] The second annular air channel is connected to a plurality of the gasket middle air holes, and one gasket middle air hole is connected to one upper cover middle air hole;

[0033] The third annular air passage is connected to a plurality of gasket inner side air holes, and one gasket inner side air hole is connected to one upper cover inner side air hole.

[0034] In a preferred embodiment, the first swirl blade includes an inclined first joint surface and a second joint surface; the second swirl blade includes an inclined third joint surface and a fourth joint surface;

[0035] The first swirl air duct is formed between the first joint surface and the third joint surface; the second swirl air duct is formed between the second joint surface and the fourth joint surface.

[0036] In a preferred embodiment, the annular air cavity is provided with a plurality of outer gathering air ports in an annular array, a plurality of middle gathering air ports in an annular array, and a plurality of inner gathering air ports in an annular array;

[0037] The second blade assembly includes a first annular blade, a second annular blade and a third annular blade; the first annular blade, the second annular blade and the third annular blade are installed on the bottom surface of the wind knife body;

[0038] A second annular slope is formed on the inner side of the first annular blade and extends toward the center of the wind knife body, and a first convergent air duct is formed between the first annular slope and the second annular slope;

[0039] A third annular slope is formed on the inner side of the second annular blade and extends toward the center of the wind knife body, and a second convergent air duct is formed between the third annular slope and the outer side of the first annular blade;

[0040] A fourth annular slope extending toward the center of the wind knife body is formed on the inner side of the third annular blade, and a third convergent air duct is formed between the fourth annular slope and the outer side surface of the second annular blade.

[0041] Another aspect of the present invention is to provide a wind knife assembly, the wind knife assembly at least comprising a wind knife body, a first blade assembly and a second blade assembly;

[0042] Wherein, an annular wind cavity is provided in the wind knife body; inside the annular wind cavity, a plurality of first cyclone wind cavities and a plurality of second cyclone wind cavities are provided in an annular array, and the first cyclone wind cavities and the second cyclone wind cavities are arranged at intervals;

[0043] In the annular air cavity, at least a plurality of convergent air ports in an annular array are provided; in the first cyclone air cavity, a first cyclone air port is provided, and in the second cyclone air cavity, a second cyclone air port is provided;

[0044] The bottom surface of the wind knife body includes an annular protrusion; the outer side of the annular protrusion forms a first annular inclined surface extending toward the center of the wind knife body; the inner side of the annular protrusion forms a mounting cavity;

[0045] The first blade assembly includes a plurality of first swirl blades and a plurality of second swirl blades, wherein the first swirl blades and the second swirl blades are arranged at intervals and installed in the installation cavity;

[0046] Wherein, a first swirl air duct and a second swirl air duct are formed between each second swirl blade and the joint surface of two adjacent first swirl blades;

[0047] The first swirl air outlet faces the first swirl air duct, and the second swirl air outlet faces the second swirl air duct;

[0048] After the airflow is introduced into the first cyclone air chamber, it is blown toward the first cyclone air duct through the first cyclone air port, and forms an airflow swirling along a first rotation direction through the first cyclone air duct;

[0049] After the airflow is introduced into the second cyclone air chamber, it is blown toward the second cyclone air duct through the second cyclone air port, and forms an airflow swirling along a second rotation direction through the second cyclone air duct;

[0050] The second blade assembly includes at least one annular blade; the annular blade is mounted on the bottom surface of the wind knife body;

[0051] Wherein, a second annular slope extending toward the center of the wind knife body is formed on the inner side of the annular blade, a convergent air duct is formed between the first annular slope and the second annular slope, and the convergent air outlet faces the convergent air duct;

[0052] After the annular air cavity introduces airflow, it is blown toward the gathering air duct through the gathering air port, and forms an airflow that converges toward the center of the air knife body through the gathering air duct.

[0053] In a preferred embodiment, the wind knife assembly further includes a wind knife upper cover;

[0054] The wind knife upper cover is installed on the top surface of the wind knife body; the wind knife upper cover is provided with a plurality of upper cover outer air holes in an annular array, a plurality of upper cover middle air holes in an annular array, and a plurality of upper cover inner air holes in an annular array;

[0055] The air holes on the outer side of the upper cover are connected to the annular air cavity, the air holes in the middle of the upper cover are connected to the first cyclone air cavity, and the air holes on the inner side of the upper cover are connected to the second cyclone air cavity.

[0056] In a preferred embodiment, the first swirl blade includes an inclined first joint surface and a second joint surface; the second swirl blade includes an inclined third joint surface and a fourth joint surface;

[0057] The first swirl air duct is formed between the first joint surface and the third joint surface; the second swirl air duct is formed between the second joint surface and the fourth joint surface.

[0058] In a preferred embodiment, the annular air cavity is provided with a plurality of outer gathering air ports in an annular array, a plurality of middle gathering air ports in an annular array, and a plurality of inner gathering air ports in an annular array;

[0059] The second blade assembly includes a first annular blade, a second annular blade and a third annular blade; the first annular blade, the second annular blade and the third annular blade are installed on the bottom surface of the wind knife body;

[0060] A second annular slope is formed on the inner side of the first annular blade and extends toward the center of the wind knife body, and a first convergent air duct is formed between the first annular slope and the second annular slope;

[0061] A third annular slope is formed on the inner side of the second annular blade and extends toward the center of the wind knife body, and a second convergent air duct is formed between the third annular slope and the outer side of the first annular blade;

[0062] A fourth annular slope extending toward the center of the wind knife body is formed on the inner side of the third annular blade, and a third convergent air duct is formed between the fourth annular slope and the outer side surface of the second annular blade.

[0063] Compared with the prior art, the present invention has the following beneficial effects:

[0064] The present invention proposes a ball-laying device and an air knife assembly for wafer ball planting, which use a pneumatic method instead of an artificial silk brush to place balls on a ball-planting steel mesh. The solder balls are blown by gas to place the solder balls into the pores of the steel mesh. During the ball-laying process, there is no direct contact with the surface of the tiny solder balls, thereby reducing the risk of damage to the solder balls and improving the quality of wafer ball planting.

[0065] The present invention proposes a ball-laying device and an air knife assembly for wafer ball planting, which use pneumatic means instead of artificial silk brushes to lay balls on a ball-planting steel net, and do not need to regularly replace the silk brushes. The maintenance cost is low, the structure is simple, and the operation is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0066] In order to more clearly illustrate the specific implementation of the present invention or the technical solution in the prior art, the following briefly introduces the drawings required for use in the specific implementation or the prior art description. Obviously, the drawings described below are some implementations of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0067] Figure 1 The present invention is a schematic diagram of the overall structure of a ball-laying device for wafer ball planting.

[0068] Figure 2 It is an exploded view of a ball-laying device for wafer ball planting according to the present invention.

[0069] Figure 3 It is a structural schematic diagram of the air knife joint of the present invention from one viewing angle.

[0070] Figure 4 It is a structural schematic diagram of the air knife joint of the present invention from another perspective.

[0071] Figure 5 It is a top view of the air knife joint of the present invention.

[0072] Figure 6 It is a bottom view of the air knife joint of the present invention.

[0073] Figure 7 yes Figure 5 Cross-sectional view along the AA direction.

[0074] Figure 8 yes Figure 5 Cross-sectional view along the BB direction.

[0075] Fig. 9 yes Figure 5 Cross-sectional view along CC direction.

[0076] Fig.10 Schematic diagram of the sealing gasket of the present invention.

[0077] Fig.11 It is a schematic diagram of the overall structure of the wind knife assembly of the present invention from one viewing angle.

[0078] Fig.12 It is a schematic diagram of the overall structure of the wind knife assembly of the present invention from another perspective.

[0079] Fig.13 It is a bottom view of the wind knife assembly of the present invention.

[0080] Fig.14 It is a schematic diagram of the wind knife upper cover of the present invention.

[0081] Fig.15 It is a structural schematic diagram of the wind knife body of the present invention from one viewing angle.

[0082] Fig.16 It is a structural schematic diagram of the wind knife body of the present invention from another viewing angle.

[0083] Fig.17 It is a top view of the air knife body of the present invention.

[0084] Fig.18 It is a bottom view of the air knife body of the present invention.

[0085] Fig.19 : is a side view of the air knife body of the present invention ( Fig.17 View from the J direction)

[0086] Fig. 20 It is a schematic diagram of the structure of the first blade assembly after splicing of the present invention.

[0087] Fig.21 yes Fig. 20 Cross-sectional view in the RR direction.

[0088] Fig. 22It is an exploded view of the second blade assembly of the present invention.

[0089] Fig.23 It is a top view of the second blade assembly of the present invention after splicing.

[0090] Fig.24 yes Fig.23 Cross-sectional view along the TT direction. DETAILED DESCRIPTION

[0091] In order to make the above and other features and advantages of the present invention more clear, the present invention is further described below in conjunction with the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0092] Combination Figures 1 to 24 According to an embodiment of the present invention, a ball planting device for wafer ball planting is provided, comprising an air knife joint 1, a sealing gasket 2 and an air knife assembly 3. The air knife joint 1 is installed above the air knife assembly 3, and the sealing gasket 2 is installed between the air knife joint 1 and the air knife assembly 3.

[0093] Combination Figures 2 to 9 A joint welding ball channel 104 is provided in the middle of the air knife joint 1. A first air induction channel 101, a second air induction channel 102 and a third air induction channel 103 are provided in the air knife joint 1. A first annular air channel 105, a second annular air channel 106 and a third annular air channel 107 are provided at the bottom of the air knife joint 1. Figure 6 shown.

[0094] like Figure 5 , Figure 6 and Figure 7 As shown, the first air induction channel 101 is connected to the first annular air channel 105 through the first air induction hole 1051. Figure 5 , Figure 6 and Figure 8 As shown, the second air induction channel 102 is connected to the second annular air channel 106 through the second air induction hole 1061. Figure 5 , Figure 6 and Fig. 9 As shown, the third air induction channel 103 is connected to the third annular air passage 107 through the third air induction hole 1071 .

[0095] After the first air inlet passage 101 introduces air flow, the air flow enters the first annular air passage 105 through the first air inlet passage 101 and the first air inlet hole 1051, and the air flow is introduced into the wind knife assembly 3 by the first annular passage 105 (the wind knife assembly 3 is described in detail below).

[0096] After the second air inlet passage 102 introduces air flow, the air flow enters the second annular air passage 106 through the second air inlet passage 102 and the second air inlet holes 1061, and the second annular passage 106 introduces the air flow into the wind knife assembly 3 (the wind knife assembly 3 is described in detail below).

[0097] After the third air inlet channel 103 introduces air flow, the air flow enters the third annular air passage 107 through the third air inlet channel 103 and the third air inlet hole 1071, and the third annular passage 107 introduces the air flow into the wind knife assembly 3 (the wind knife assembly 3 is described in detail below).

[0098] Furthermore, a gasket groove 108 is provided on the bottom surface of the air knife joint 1, and a sealing gasket 2 is installed in the gasket groove 108. The sealing gasket 2 covers the first annular air passage 105, the second annular air passage 106 and the third annular air passage 107.

[0099] like Fig.10 As shown, the sealing gasket 2 is provided with a plurality of gasket outer side air holes 201 in an annular array, a plurality of gasket middle air holes 202 in an annular array, and a plurality of gasket inner side air holes 203 in an annular array.

[0100] The sealing gasket 2 covers the first annular air channel 105 , the second annular air channel 106 and the third annular air channel 107 . The first annular air channel 105 is connected to multiple gasket outer air holes 201 , the second annular air channel 106 is connected to multiple gasket middle air holes 202 , and the third annular air channel 107 is connected to multiple gasket inner air holes 203 .

[0101] like Figures 3 to 6 As shown, a first screw hole 109 and a second screw hole 110 are provided on the air knife connector 1 for installing the air knife connector 1 above the air knife assembly 3 .

[0102] Combination Figure 2 , Figures 11 to 24 According to an embodiment of the present invention, the wind knife assembly 3 includes a wind knife body 31, a wind knife upper cover 32, a first blade assembly 33 and a second blade assembly 34.

[0103] The wind knife assembly 3 has a wind knife solder ball channel 3117 in the middle, the wind knife joint 1 is installed above the wind knife assembly 3, and the joint solder ball channel 104 is directly opposite to the wind knife solder ball channel 3117. When a solder ball (such as a tin ball) is placed in the joint solder ball channel 104, the solder ball falls onto the steel mesh (template) below the wind knife assembly 3 through the joint solder ball channel 104 and the wind knife solder ball channel 3117.

[0104] The wind knife cover 32 is installed on the top surface of the wind knife body 31. Fig.14 As shown, the wind knife upper cover 32 is provided with a plurality of upper cover outer air holes 3201 in an annular array, a plurality of upper cover middle air holes 3202 in an annular array, and a plurality of upper cover inner air holes 3203 in an annular array.

[0105] Combination Figures 15 to 19 An annular wind chamber 3101 is provided in the wind knife body 31. Inside the annular wind chamber 3101, a plurality of first cyclone wind chambers 3102 and a plurality of second cyclone wind chambers 3103 are arranged in an annular array, and the first cyclone wind chambers 3102 and the second cyclone wind chambers 3103 are arranged at intervals, such as Fig.15 and Fig.17 shown.

[0106] The present invention installs a wind knife cover 32 on the top surface of the wind knife body 31. Specifically, the wind knife cover 32 is provided with a plurality of third screw holes 3205, such as Fig.14 A plurality of fourth screw holes 3110 are provided on the wind knife body 31, as shown in FIG. Fig.17 The third screw hole 3205 and the fourth screw hole 3110 are fixed by bolts, so that the wind knife upper cover 32 is installed on the top surface of the wind knife body 31 .

[0107] The wind knife upper cover 32 is installed on the top surface of the wind knife body 31, and the wind knife upper cover 32 covers the annular wind cavity 3101, multiple first swirl wind cavities 3102 and multiple second swirl wind cavities 3103. The outer air holes 3201 of the upper cover are connected to the annular wind cavity 3101, the middle air holes 3202 of the upper cover are connected to the first swirl wind cavity 3102, and the inner air holes 3203 of the upper cover are connected to the second swirl wind cavity 3103.

[0108] The wind knife connector 1 of the present invention is installed above the wind knife assembly 3. Specifically, the wind knife connector 1 is installed on the wind knife upper cover 32.

[0109] Furthermore, a fifth screw hole 3204 is opened on the wind knife upper cover 32, and a sixth screw hole 3109 is opened on the wind knife body 31. The fifth screw hole 3204 is fixed to the first screw hole 109 of the wind knife joint 1 by bolts, and the sixth screw hole 3109 is fixed to the second screw hole 110 of the wind knife joint 1 by bolts, so that the wind knife joint 1 is installed on the wind knife upper cover 32, and then the wind knife joint 1 is installed above the wind knife assembly 3.

[0110] According to an embodiment of the present invention, a sealing gasket 2 is installed in the gasket groove 108 on the bottom surface of the air knife joint 1. The sealing gasket 2 covers the first annular air channel 105, the second annular air channel 106 and the third annular air channel 107 on the bottom surface of the air knife joint 1.

[0111] The first annular air channel 105 is connected to a plurality of gasket outer air holes 201 , and one gasket outer air hole 201 is connected to one upper cover outer air hole 3201 , so that the first annular air channel 105 is connected to a plurality of upper cover outer air holes 3201 .

[0112] The second annular air channel 106 is connected to a plurality of gasket middle air holes 202 , and one gasket middle air hole 202 is connected to one upper cover middle air hole 3202 , so that the second annular air channel 106 is connected to a plurality of upper cover middle air holes 3202 .

[0113] The third annular air channel 107 is connected to a plurality of gasket inner air holes 203 , and one gasket inner air hole 203 is connected to one upper cover inner air hole 3203 , so that the third annular air channel 107 is connected to a plurality of upper cover inner air holes 3203 .

[0114] After the first air inlet passage 101 introduces airflow, the airflow is introduced into the annular air cavity 3101 through the first annular air passage 105 and the plurality of air holes 3201 on the outer side of the upper cover.

[0115] After the airflow is introduced into the second air introduction channel 102 , the airflow is introduced into the first cyclone air chamber 3102 through the second annular air passage 106 and the plurality of middle air holes 3202 of the upper cover.

[0116] After the airflow is introduced into the third air introduction channel 103 , the airflow is introduced into the second cyclone air chamber 3103 through the third annular air passage 107 and the plurality of air holes 3023 on the inner side of the upper cover.

[0117] According to an embodiment of the present invention, at least a plurality of convergent air vents in an annular array are provided in the annular air cavity 3101. Figures 15 to 18 In this embodiment, a plurality of outer gathering air vents 3106 in an annular array, a plurality of middle gathering air vents 3107 in an annular array, and a plurality of inner gathering air vents 3108 in an annular array are provided in the annular air cavity 3101 .

[0118] A first cyclone air port 3104 is provided in the first cyclone air chamber 3102, and a second cyclone air port 3105 is provided in the second cyclone air chamber 3103. Fig.17 and Fig.18 shown.

[0119] like Fig.16 , Fig.18 and Fig.19 As shown, the bottom surface of the wind knife body 31 includes an annular protrusion 3114. The outer side of the annular protrusion 3114 forms a first annular inclined surface G1 extending toward the center of the wind knife body 31, and the inner side of the annular protrusion 3114 forms a mounting cavity 3115.

[0120] Combination Figure 2 , Fig. 20 and Fig.21 According to an embodiment of the present invention, the first blade assembly 33 includes a plurality of first swirl blades 3301 and a plurality of second swirl blades 3302 . The first swirl blades 3301 and the second swirl blades 3302 are arranged at intervals and installed in the installation cavity 3115 of the wind knife body 31 .

[0121] Specifically, the first swirl blade 3301 and the plurality of second swirl blades 3302 start with a seventh screw hole 3303, as shown in FIG. Fig. 20 The bottom surface of the wind knife body 31 is provided with an eighth screw hole 3116, as shown in FIG. Fig.18 The seventh screw hole 3303 is fixed to the eighth screw hole 3116 by bolts, so that the first swirl blade 3301 and the plurality of second swirl blades 3302 are installed in the installation cavity 3115 of the wind knife body 31, as shown in FIG. Fig.13 shown.

[0122] According to an embodiment of the present invention, the first swirl blade 3301 and the plurality of second swirl blades 3302 are installed in the installation cavity 3115 of the wind knife body 31, and the first swirl air duct S1 and the second swirl air duct S2 are formed between each second swirl blade 3302 and the joint surface of two adjacent first swirl blades 3301. The first swirl air outlet 3104 faces the first swirl air duct S1, and the second swirl air outlet 3105 faces the second swirl air duct S2.

[0123] Specifically, Fig.21 As shown, the first swirl blade 3301 includes an inclined first joint surface M1 and a second joint surface M2. The second swirl blade 3301 includes an inclined third joint surface M3 and a fourth joint surface M4.

[0124] A first cyclone air duct S1 is formed between the first joint surface M1 and the third joint surface M3. A second cyclone air duct S2 is formed between the second joint surface M2 and the fourth joint surface M4. Preferably, the gap between the first cyclone air duct S1 and the second cyclone air duct S2 is 0.02-0.05 mm.

[0125] After the airflow is introduced into the first cyclone air chamber 3102, it is blown toward the first cyclone air passage S1 through the first cyclone air port 3104, and forms an airflow along the first rotation direction (eg, Fig.13 The airflow is swirling in the direction indicated by the arrow b.

[0126] After the airflow is introduced into the second cyclone air chamber 3103, it is blown toward the second cyclone air passage S2 through the second cyclone air port 3105, and forms an airflow along the second rotation direction (eg, Fig.13 The airflow is swirling in the direction indicated by the arrow c.

[0127] Combination Figure 2 , Figure 22 to Figure 24According to an embodiment of the present invention, the second blade assembly 34 includes at least one annular blade. The annular blade is installed on the bottom surface of the wind knife body 31. A second annular slope extending toward the center of the wind knife body 31 is formed on the inner side of the annular blade, and a convergence air duct is formed between the first annular slope G1 and the second annular slope of the bottom surface of the wind knife body 31, and the convergence air outlet is directly opposite to the convergence air duct.

[0128] After the airflow is introduced into the annular air cavity 3101 , it is blown toward the gathering air duct through the gathering air port, and forms an airflow that gathers toward the center of the air knife body 31 through the gathering air duct.

[0129] Specifically, in this embodiment, a plurality of outer gathering air ports 3106 in an annular array, a plurality of middle gathering air ports 3107 in an annular array, and a plurality of inner gathering air ports 3108 in an annular array are provided in the annular air cavity 3101 .

[0130] like Figure 2 , Figure 22 to Figure 24 As shown, in this embodiment, there are three annular blades. Specifically, the second blade assembly 34 includes a first annular blade 3401, a second annular blade 3402 and a third annular blade 3403. The first annular blade 3401, the second annular blade 3402 and the third annular blade 3403 are installed on the bottom surface of the wind knife body 31.

[0131] Further, the first annular blade 3401 defines a ninth screw hole 3406, such as Fig.23 The bottom surface of the wind knife body 31 is provided with a tenth screw hole 3112, as shown in FIG. Fig.17 and Fig.18 The ninth screw hole 3406 and the tenth screw hole 3112 are fixed by bolts, so that the first annular blade 3401 is installed on the bottom surface of the wind knife body 31, as shown in FIG. Fig.13 shown.

[0132] The second annular blade 3402 defines an eleventh screw hole 3405. Fig.23 The bottom surface of the wind knife body 31 is provided with a twelfth screw hole 3111, as shown in FIG. Fig.17 and Fig.18 The eleventh screw hole 3405 is fixed to the twelfth screw hole 3111 by bolts, so that the second annular blade 3402 is installed on the bottom surface of the wind knife body 31, as shown in FIG. Fig.13 shown.

[0133] The third annular blade 3403 defines a thirteenth screw hole 3404. Fig.23 The bottom surface of the wind knife body 31 is provided with a fourteenth screw hole 3113, as shown in FIG. Fig.18 The thirteenth screw hole 3404 is fixed to the fourteenth screw hole 3113 by bolts, so that the third annular blade 3403 is installed on the bottom surface of the wind knife body 31, as shown in FIG. Fig.13 shown.

[0134] like Fig. 22 , Fig.23 and Fig.24 As shown, according to an embodiment of the present invention, a second annular slope G2 extending toward the center of the wind knife body 31 is formed inside the first annular blade 3401, and a first convergent air duct extending toward the center of the wind knife body 31 is formed between the first annular slope G1 and the second annular slope G2 on the bottom surface of the wind knife body 31. Preferably, the gap of the first convergent air duct is 0.02-0.05 mm.

[0135] The inner side of the second annular blade 3402 forms a third annular slope G3 extending toward the center of the wind knife body 31, and the third annular slope G3 and the outer side of the first annular blade 3401 form a second convergent air duct extending toward the center of the wind knife body 31. Preferably, the gap of the second convergent air duct is 0.02-0.05mm.

[0136] A fourth annular slope G4 extending toward the center of the wind knife body 31 is formed inside the third annular blade 3403, and a third convergent air duct extending toward the center of the wind knife body 31 is formed between the fourth annular slope G4 and the outer side of the second annular blade 3402. Preferably, the gap of the third convergent air duct is 0.02-0.05 mm.

[0137] After the first annular blade 3401 , the second annular blade 3402 and the third annular blade 3403 are installed on the bottom surface of the wind knife body 31 , the outer convergent air outlet 3106 of the annular air cavity 3101 faces the third convergent air duct between the fourth annular slope G4 and the outer side surface of the second annular blade 3402 .

[0138] The middle convergent air port 3107 of the annular air cavity 3101 faces the second convergent air duct between the third annular slope G3 and the outer side surface of the first annular blade 3401 .

[0139] The inner side convergent air port 3108 of the annular air cavity 3101 is directly opposite to the first convergent air channel between the first annular inclined surface G1 and the second annular inclined surface G2 on the bottom surface of the wind knife body 31 .

[0140] After the annular air cavity 3101 introduces air flow, it is blown toward the gathering air ducts (the third gathering air duct, the second gathering air duct and the first gathering air duct) through the gathering air ducts (the third gathering air duct, the second gathering air duct and the first gathering air duct) and forms an air flow that gathers toward the center of the wind knife body 31 (such as Fig.13 The airflow is in the direction indicated by arrow a).

[0141] The following is an explanation of the use of the ball-laying device for wafer ball implantation of the present invention. When using the ball-laying device for wafer ball implantation of the present invention to lay solder balls (such as tin balls), the ball-laying device for wafer ball implantation of the present invention is moved to a working position on the upper surface of the steel mesh (template).

[0142] After the first air induction channel 101 introduces airflow, the airflow passes through the first air induction channel 101 and the first air induction holes 1051 and enters the first annular air passage 105 .

[0143] After the first air induction channel 105 introduces the airflow, the airflow is introduced into the annular air cavity 3101 through the first annular air passage 105 and the plurality of air holes 3201 on the outer side of the upper cover.

[0144] When the annular air cavity 3101 introduces air flow, the air pressure in the annular air cavity 3101 is greater than the external air pressure, and the air flow passes through the convergence air ports (outer convergence air ports 3106, middle convergence air ports 3107 and inner convergence air ports 3108) and blows toward the convergence air ducts (the third convergence air duct, the second convergence air duct and the first convergence air duct), and passes through the convergence air ducts (the third convergence air duct, the second convergence air duct and the first convergence air duct) to form a convergence air port toward the center of the wind knife body 31 (such as Fig.13 The airflow is in the direction indicated by arrow a).

[0145] The solder ball (e.g., tin ball) is placed in the joint solder ball channel 104 in the middle of the air knife joint 1. The solder ball (e.g., tin ball) falls to the upper surface of the steel mesh (template) through the joint solder ball channel 104 in the middle of the air knife joint 1 and the air knife solder ball channel 3117 in the middle of the air knife assembly 3. The center of the air knife body 31 is folded (e.g., Fig.13 The airflow in the direction indicated by arrow a) blows the solder balls (eg, tin balls) so that the solder balls (eg, tin balls) are located in the area below the ball-laying device.

[0146] Afterwards, after the second air induction channel 102 introduces the airflow, the airflow passes through the second air induction channel 102 and the second air induction holes 1061 and enters the second annular air passage 106 .

[0147] After the airflow is introduced into the second air introduction channel 106 , the airflow is introduced into the first cyclone air chamber 3102 through the second annular air passage 106 and the plurality of middle air holes 3202 of the upper cover.

[0148] When the airflow is introduced into the first cyclone air chamber 3102, the air pressure in the first cyclone air chamber 3102 is greater than the external air pressure, and the airflow is blown toward the first cyclone air passage S1 through the first cyclone air port 3104, and forms a first rotation direction (such as Fig.13 The airflow is swirling in the direction indicated by the arrow b.

[0149] In the first rotation direction (such as Fig.13The swirling airflow (in the direction indicated by the arrow b) blows the solder balls to move in the area below the ball-laying device.

[0150] After the second air inlet passage 102 introduces air for a period of time, the second air inlet passage 102 stops taking in air, and the third air inlet passage 103 introduces air, and the air enters the third annular air passage 107 through the third air inlet passage 103 and the third air inlet holes 1071 .

[0151] After the airflow is introduced into the third air introduction channel 107 , the airflow is introduced into the second cyclone air chamber 3103 through the third annular air passage 107 and a plurality of air holes 3023 on the inner side of the upper cover.

[0152] When the airflow is introduced into the second cyclone air chamber 3103, the air pressure in the second cyclone air chamber 3103 is greater than the external air pressure, and the airflow is blown toward the second cyclone air passage S2 through the second cyclone air port 3105, and forms a second rotation direction (such as Fig.13 The airflow is swirling in the direction indicated by the arrow c.

[0153] In the second rotation direction (such as Fig.13 The swirling airflow (in the direction indicated by the arrow c) blows the solder balls to move in the area below the ball-laying device.

[0154] The second air induction channel 102 and the third air induction channel 103 introduce air flow alternately, and after multiple cycles, the solder balls (such as tin balls) in the area below the ball laying device roll and fall into the gaps of the steel mesh (template).

[0155] Afterwards, the ball-laying device for wafer ball planting of the present invention moves to the next working position on the upper surface of the steel mesh (template), and repeats the above process to lay balls on the entire surface of the steel mesh (template), thereby planting balls on the wafer.

[0156] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A ball planting device for wafer ball planting, characterized in that: The ball laying device comprises an air knife joint and an air knife assembly; A joint solder ball channel is provided in the middle of the air knife joint, and an air knife solder ball channel is provided in the middle of the air knife assembly; the air knife joint is installed above the air knife assembly, and the joint solder ball channel is directly opposite to the air knife solder ball channel; Wherein, the wind knife assembly at least includes a wind knife body, a first blade assembly and a second blade assembly; Wherein, an annular wind cavity is provided in the wind knife body; inside the annular wind cavity, a plurality of first cyclone wind cavities and a plurality of second cyclone wind cavities are provided in an annular array, and the first cyclone wind cavities and the second cyclone wind cavities are arranged at intervals; A plurality of convergent air ports in an annular array are provided in the annular air cavity; a first cyclone air port is provided in the first cyclone air cavity, and a second cyclone air port is provided in the second cyclone air cavity; The bottom surface of the wind knife body includes an annular protrusion; the outer side of the annular protrusion forms a first annular inclined surface extending toward the center of the wind knife body; the inner side of the annular protrusion forms a mounting cavity; The first blade assembly includes a plurality of first swirl blades and a plurality of second swirl blades, wherein the first swirl blades and the second swirl blades are arranged at intervals and installed in the installation cavity; Wherein, a first swirl air duct and a second swirl air duct are formed between each second swirl blade and the joint surface of two adjacent first swirl blades; The first swirl air outlet faces the first swirl air duct, and the second swirl air outlet faces the second swirl air duct; After the airflow is introduced into the first cyclone air chamber, it is blown toward the first cyclone air duct through the first cyclone air port, and forms an airflow swirling along a first rotation direction through the first cyclone air duct; After the airflow is introduced into the second cyclone air chamber, it is blown toward the second cyclone air duct through the second cyclone air port, and forms an airflow swirling along a second rotation direction through the second cyclone air duct; The second blade assembly includes at least one annular blade; the annular blade is mounted on the bottom surface of the wind knife body; Wherein, a second annular slope extending toward the center of the wind knife body is formed on the inner side of the annular blade, a convergent air duct is formed between the first annular slope and the second annular slope, and the convergent air outlet faces the convergent air duct; After the annular air cavity introduces airflow, it is blown toward the convergent air duct through the convergent air port, and forms an airflow that converges toward the center of the air knife body through the convergent air duct.

2. The ball laying device according to claim 1, characterized in that: The wind knife assembly also includes a wind knife upper cover; The wind knife upper cover is installed on the top surface of the wind knife body; the wind knife upper cover is provided with a plurality of upper cover outer air holes in an annular array, a plurality of upper cover middle air holes in an annular array, and a plurality of upper cover inner air holes in an annular array; The air holes on the outer side of the upper cover are connected to the annular air cavity, the air holes in the middle of the upper cover are connected to the first cyclone air cavity, and the air holes on the inner side of the upper cover are connected to the second cyclone air cavity; The air knife joint is installed on the air knife upper cover.

3. The ball laying device according to claim 2, characterized in that: The air knife joint is provided with a first air induction channel, a second air induction channel and a third air induction channel; The bottom of the air knife joint is provided with a first annular air channel, a second annular air channel and a third annular air channel, the first air induction channel is connected to the first annular air channel, the second air induction channel is connected to the second annular air channel, and the third air induction channel is connected to the third annular air channel; The first annular air channel is connected to a plurality of air holes on the outer side of the upper cover, the second annular air channel is connected to a plurality of air holes in the middle of the upper cover, and the third annular air channel is connected to a plurality of air holes on the inner side of the upper cover; After the first air induction channel introduces airflow, the airflow is introduced into the annular air cavity through the first annular air passage and the plurality of air holes on the outer side of the upper cover; After the second air induction channel introduces the airflow, the airflow is introduced into the first cyclone air chamber through the second annular air passage and the plurality of middle air holes of the upper cover; After the third air induction channel introduces airflow, the airflow is introduced into the second cyclone air chamber through the third annular air passage and the plurality of air holes on the inner side of the upper cover.

4. The ball laying device according to claim 3, characterized in that: A gasket groove is provided on the bottom surface of the air knife joint, and a sealing gasket is installed in the gasket groove; The sealing gasket is provided with a plurality of gasket outer side air holes in an annular array, a plurality of gasket middle air holes in an annular array, and a plurality of gasket inner side air holes in an annular array; The first annular air passage is connected to a plurality of gasket outer pores, and one gasket outer pore is connected to one upper cover outer pore; The second annular air channel is connected to a plurality of the gasket middle air holes, and one gasket middle air hole is connected to one upper cover middle air hole; The third annular air passage is connected to a plurality of gasket inner side air holes, and one gasket inner side air hole is connected to one upper cover inner side air hole.

5. The ball laying device according to claim 1, characterized in that: The first swirl blade comprises an inclined first joint surface and a second joint surface; the second swirl blade comprises an inclined third joint surface and a fourth joint surface; The first swirl air duct is formed between the first joint surface and the third joint surface; the second swirl air duct is formed between the second joint surface and the fourth joint surface.

6. The ball laying device according to claim 1, characterized in that: The annular air cavity is provided with a plurality of outer gathering air ports in an annular array, a plurality of middle gathering air ports in an annular array, and a plurality of inner gathering air ports in an annular array; The second blade assembly includes a first annular blade, a second annular blade and a third annular blade; The first annular blade, the second annular blade and the third annular blade are installed on the bottom surface of the wind knife body; A second annular slope is formed on the inner side of the first annular blade and extends toward the center of the wind knife body, and a first convergent air duct is formed between the first annular slope and the second annular slope; A third annular slope is formed on the inner side of the second annular blade and extends toward the center of the wind knife body, and a second convergent air duct is formed between the third annular slope and the outer side of the first annular blade; A fourth annular slope extending toward the center of the wind knife body is formed on the inner side of the third annular blade, and a third convergent air duct is formed between the fourth annular slope and the outer side surface of the second annular blade.

7. A wind knife assembly, characterized in that: The wind knife assembly at least includes a wind knife body, a first blade assembly and a second blade assembly; Wherein, an annular wind cavity is provided in the wind knife body; inside the annular wind cavity, a plurality of first cyclone wind cavities and a plurality of second cyclone wind cavities are provided in an annular array, and the first cyclone wind cavities and the second cyclone wind cavities are arranged at intervals; A plurality of convergent air ports in an annular array are provided in the annular air cavity; a first cyclone air port is provided in the first cyclone air cavity, and a second cyclone air port is provided in the second cyclone air cavity; The bottom surface of the wind knife body includes an annular protrusion; the outer side of the annular protrusion forms a first annular inclined surface extending toward the center of the wind knife body; the inner side of the annular protrusion forms a mounting cavity; The first blade assembly includes a plurality of first swirl blades and a plurality of second swirl blades, wherein the first swirl blades and the second swirl blades are arranged at intervals and installed in the installation cavity; Wherein, a first swirl air duct and a second swirl air duct are formed between each second swirl blade and the joint surface of two adjacent first swirl blades; The first swirl air outlet faces the first swirl air duct, and the second swirl air outlet faces the second swirl air duct; After the airflow is introduced into the first cyclone air chamber, it is blown toward the first cyclone air duct through the first cyclone air port, and forms an airflow swirling along a first rotation direction through the first cyclone air duct; After the airflow is introduced into the second cyclone air chamber, it is blown toward the second cyclone air duct through the second cyclone air port, and forms an airflow swirling along a second rotation direction through the second cyclone air duct; The second blade assembly includes at least one annular blade; the annular blade is mounted on the bottom surface of the wind knife body; Wherein, a second annular slope extending toward the center of the wind knife body is formed on the inner side of the annular blade, a convergent air duct is formed between the first annular slope and the second annular slope, and the convergent air outlet faces the convergent air duct; After the annular air cavity introduces airflow, it is blown toward the convergent air duct through the convergent air port, and forms an airflow that converges toward the center of the air knife body through the convergent air duct.

8. The air knife assembly according to claim 7, characterized in that: The wind knife assembly also includes a wind knife upper cover; The wind knife upper cover is installed on the top surface of the wind knife body; the wind knife upper cover is provided with a plurality of upper cover outer air holes in an annular array, a plurality of upper cover middle air holes in an annular array, and a plurality of upper cover inner air holes in an annular array; The air holes on the outer side of the upper cover are connected to the annular air cavity, the air holes in the middle of the upper cover are connected to the first cyclone air cavity, and the air holes on the inner side of the upper cover are connected to the second cyclone air cavity.

9. The air knife assembly according to claim 7, characterized in that: The first swirl blade comprises an inclined first joint surface and a second joint surface; the second swirl blade comprises an inclined third joint surface and a fourth joint surface; The first swirl air duct is formed between the first joint surface and the third joint surface; the second swirl air duct is formed between the second joint surface and the fourth joint surface.

10. The air knife assembly according to claim 7, characterized in that: The annular air cavity is provided with a plurality of outer gathering air ports in an annular array, a plurality of middle gathering air ports in an annular array, and a plurality of inner gathering air ports in an annular array; The second blade assembly includes a first annular blade, a second annular blade and a third annular blade; The first annular blade, the second annular blade and the third annular blade are installed on the bottom surface of the wind knife body; A second annular slope is formed on the inner side of the first annular blade and extends toward the center of the wind knife body, and a first convergent air duct is formed between the first annular slope and the second annular slope; A third annular slope is formed on the inner side of the second annular blade and extends toward the center of the wind knife body, and a second convergent air duct is formed between the third annular slope and the outer side of the first annular blade; A fourth annular slope extending toward the center of the wind knife body is formed on the inner side of the third annular blade, and a third convergent air duct is formed between the fourth annular slope and the outer side surface of the second annular blade.

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