Leakage detection device of FFU device with accurately movable position

By designing a FFU device leakage device including electric telescopic rods and self -sealing and self -regulating limits, it solves the problem of accuracy and missed testing of artificial testing, and achieves comprehensive and precise testing of the FFU device.

CN119373985APending Publication Date: 2025-01-28JIANGSU CAREER ELECTROMECHANICAL ENG CO LTD
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Patent Information

Application Number
CN202411435762.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-15
Publication Date
2025-01-28

AI Technical Summary

Technical Problem

During the inspection process after installation of the existing FFU device, it is difficult for artificially moving dust particle detectors to ensure the accuracy of the detection position, resulting in partial overlap of scanning paths, resulting in missed detection problems.

Method used

Design a leakage device that includes a base, electric retaining rod and dust particles detector. It realizes high adjustment through electric telescopic rods, combined with self -sealing and self -adjustment restrictions to ensure that the dust particles detector moves along the snake -shaped path to achieve FFU Comprehensive testing of the device.

Benefits of technology

The accurate detection of the FFU device is achieved, the omissions are avoided, and the convenience and accuracy of the detection are improved.

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Abstract

The invention discloses a leak detection device of an FFU device capable of accurately moving, which comprises a base, an electric telescopic rod and a dust particle detector, and is characterized in that a bottom plate is arranged above the base, the electric telescopic rod is fixed on the upper end surface of the bottom plate, a top plate is fixed at the output end of the electric telescopic rod, and a fixed box is arranged above the top plate. According to the FFU device leak detection device with the position capable of being accurately moved, the height adjusting mechanism is adopted, the height adjusting function of the whole device can be achieved so that the detection requirements of FFU devices with different installation heights can be met, and in cooperation with the linkage self-sealing mechanism, it can be guaranteed that a dust particle detector is located in a sealed space in the detection process, and the detection efficiency is improved. Therefore, interference of external factors is avoided, accuracy of detection data is guaranteed, the dust particle detector can move in a snakelike mode in cooperation with the self-adjusting limiting mechanism, the comprehensive detection function of the FFU device is achieved, detection convenience can be improved, and the situation of missing detection can be avoided.
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Description

Technical Field

[0001] The invention relates to the technical field of leak detection devices, and in particular to a leak detection device for an FFU device whose position can be precisely moved. Background Art

[0002] FFU (high efficiency air filter) is widely used in clean room air filtration. It is mainly used to capture particulate dust and various suspended matter below 0.5um, so as to effectively ensure the cleanliness of the air. After the high efficiency air filter is installed, it is necessary to inspect the installation joints and main sections of the high efficiency filter. At present, the high efficiency filter is mainly inspected by a manual handheld dust particle detector after installation. In the actual inspection process, since the high efficiency filter is generally installed on the ceiling at a high height, workers need to cooperate with a stepladder to conduct inspection, which is more troublesome and has certain safety hazards. In addition, in the manual inspection process, it is difficult to ensure the accuracy of the detection position when manually moving the dust particle detector. When there is part of the scanning path that does not overlap, it will cause missed detection problems. To this end, in view of the above problems, a leak detection device of an FFU device with a precisely movable position is designed to better meet the actual use needs. Summary of the invention

[0003] The object of the present invention is to provide a leak detection device for an FFU device whose position can be precisely moved, so as to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a leak detection device of an FFU device with a precisely movable position, comprising a base, an electric telescopic rod and a dust particle detector, a bottom plate is arranged above the base, an electric telescopic rod is fixed to the upper end surface of the bottom plate, a top plate is fixed to the output end of the electric telescopic rod, a fixed box is arranged above the top plate, a sealing airbag with an annular structure is fixed to the upper end surface of the fixed box, a motor is fixed to the left end surface of the fixed box, a threaded rod is fixed to the output end of the motor, the threaded rod bearing is connected in the fixed box, the threaded rod is connected to the movable plate through a thread, the movable plate is arranged in the fixed box, a movable block is arranged above the movable plate, a partition is arranged between the movable block and the movable plate, the partition is fixed on the fixed box, a guide groove with a serpentine structure is opened on the partition, and the bending part of the guide groove is an inclined structure, a dust particle detector is fixed on the movable block, a sliding rod is fixed to the lower end of the dust particle detector, the sliding rod and the guide groove are slidably connected, and the width of the dust particle detector is greater than the distance between adjacent transverse grooves on the guide groove.

[0005] Preferably, the lower end surface bearing of the base is connected with a universal wheel, and four universal wheels are provided. Through the action of the universal wheels, the entire device can be easily moved, making detection more convenient.

[0006] Preferably, one end of a first spring is fixed to the lower end surface of the base plate, and the other end of the first spring is fixed to the base, a vertical rod is also fixed to the lower end surface of the base plate, and the vertical rod and the base are slidably connected, and a brake pad is fixed to the lower end of the vertical rod, and the brake pad contacts with the universal wheel to achieve a limiting effect. Through the elastic action of the first spring, a basic force can be provided for the automatic resetting of the base plate. When the base plate moves relative to the base, the sliding action between the vertical rod and the base can ensure the stability of the base plate movement. Through the contact limiting action between the brake pad and the universal wheel, the positioning of the entire device can be achieved, thereby ensuring the stability of the device during the detection process.

[0007] Preferably, the electric telescopic rod is vertically distributed with the base plate, and a touch panel is fixed on the right side of the electric telescopic rod. The electric telescopic rod can provide a basic guarantee for the height adjustment of the device, and the touch panel can be used to facilitate the control of the device.

[0008] Preferably, a limit rod is symmetrically fixed to the upper end face of the top plate, and the limit rod contacts with the fixed box to achieve a positioning effect. A cylinder is also evenly fixed to the lower end face of the top plate, and the cylinder is connected to the sealing airbag through a conduit, and a piston head is slidably connected in the cylinder, and a piston rod is fixed to the piston head. The upper end of the piston rod passes through the top plate and is fixed to the lower end face of the fixed box. One end of a second spring is also fixed to the top plate, and the other end of the second spring is fixed to the lower end face of the fixed box. When the top plate moves relative to the fixed box, the minimum distance between the top plate and the fixed box can be determined through the contact limiting effect between the limit rod and the fixed box. With the action of the piston rod and the piston head, the air extraction and degassing effect of the cylinder can be achieved, thereby providing a basic guarantee for the normal operation of the device. With the elastic action of the second spring, a basic force can be provided for the automatic reset of the fixed box.

[0009] Preferably, the fixed box is also symmetrically installed with one-way air outlet valves front and back, and an infrared transmitter is also fixed on the outside of the fixed box, and four infrared transmitters are provided. Through the action of the one-way air outlet valve, outside air can be prevented from entering the fixed box, thereby ensuring the accuracy of the detection data. In combination with the action of the infrared transmitter, the entire device and the FFU device to be detected can be conveniently positioned.

[0010] Preferably, the movable plate is slidably connected to the guide rod, and the guide rod is symmetrically distributed front and back about the center line of the movable plate, and the guide rod is fixed in a fixed box. When the movable plate is moved under force, the sliding guiding action between the movable plate and the guide rod can ensure that the movable plate performs stable linear motion.

[0011] Preferably, a slide plate is fixed on the upper end surface of the movable plate, and a partition is arranged between the slide plate and the movable plate, and the slide plate and the slide rod are slidably connected. Buffer pads are also fixed symmetrically on the movable plate, and the buffer pads contact with the fixed box to achieve a buffering effect. Through the sliding action between the slide plate and the slide rod, a guide can be provided for the forward and backward movement of the dust particle detector. During the movement of the movable plate, the buffering effect of the contact between the buffer pad and the fixed box can effectively prevent the device from being damaged by collision.

[0012] Preferably, the movable block is slidably connected to the slide plate, and the movable block is slidably connected to the slide rod. The stability of the movement of the movable block can be ensured by the sliding guide effect between the movable block and the slide plate.

[0013] Preferably, one end of a third spring is fixed on the slide bar, and the other end of the third spring is fixed on the movable block. The elastic action of the third spring can provide a basic force for the automatic reset of the slide bar and the dust particle detector.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: the leak detection device of the FFU device whose position can be precisely moved adopts a height adjustment mechanism, which can realize the height adjustment of the entire device, so as to meet the detection requirements of the FFU devices with different installation heights. With the linkage self-sealing mechanism, it can be ensured that the dust particle detector is in a sealed space during the detection process, thereby avoiding interference from external factors and ensuring the accuracy of the detection data. With the self-adjusting limit mechanism, the dust particle detector can be moved in a serpentine manner, thereby realizing the comprehensive detection function of the FFU device, which can not only improve the convenience of detection, but also avoid the occurrence of missed detection. The specific contents are as follows:

[0015] 1. The leak detection device of the FFU device, which can be precisely moved, is provided with a sealing airbag. During the use of the device, the positioning of the fixed box and the FFU device can be achieved through the infrared transmitter, and the height adjustment of the fixed box and the dust particle detector can be achieved with the electric telescopic rod. When the fixed box contacts the ceiling, the electric telescopic rod continues to extend, and with the action of the top plate, the piston head, the piston rod and the second spring, the gas in the cylinder can enter the sealing airbag. The sealing effect between the fixed box and the ceiling can be achieved through the expansion of the sealing airbag, so that the dust particle detector is in a sealed space, avoiding external factors from affecting the accuracy of the detection data;

[0016] 2. The leak detection device of the FFU device which can be precisely moved in this position is provided with a guide groove. During the detection process, when the threaded rod is driven by the motor to rotate forward, the movable plate can be moved to the right, thereby driving the dust particle detector and the slide rod to the right. When the slide rod slides to the bending part of the guide groove, the inclined surface structure at the bending part of the guide groove can make the dust particle detector move backward by one end distance. Since the distance between adjacent transverse grooves on the guide groove is smaller than the width of the dust particle detector, it can be ensured that the distance moved by the dust particle detector is smaller than the width of the dust particle detector. At this time, the threaded rod is driven by the motor to reverse, so that the dust particle detector can be moved to the left. The moving trajectory of the dust particle detector moving to the left overlaps with the moving trajectory of the dust particle detector moving to the right to a certain extent, thereby avoiding the problem of missed detection. The moving trajectory of the dust particle detector is a serpentine structure as a whole, so as to meet the comprehensive detection function of the FFU device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall isometric three-dimensional structure of the device of the present invention;

[0018] Figure 2 It is a schematic diagram of the overall three-dimensional structure of the device of the present invention;

[0019] Figure 3 This is a schematic diagram of an exploded three-dimensional structure composed of a base and a bottom plate of the present invention;

[0020] Figure 4 It is a schematic diagram of a three-dimensional structure of a partial cross-section of the top plate of the present invention when viewed from above;

[0021] Figure 5 It is a schematic diagram of the cross-sectional three-dimensional structure of the fixing box of the present invention;

[0022] Figure 6 It is a schematic diagram of the three-dimensional structure of the movable plate of the present invention;

[0023] Figure 7 It is a schematic diagram of the three-dimensional structure of the dust particle detector of the present invention.

[0024] In the figure: 1. base; 101. universal wheel; 2. bottom plate; 201. first spring; 202. vertical rod; 203. brake pad; 3. electric telescopic rod; 4. top plate; 401. limit rod; 402. cylinder; 403. piston head; 404. piston rod; 405. second spring; 5. fixed box; 501. one-way air outlet valve; 502. infrared transmitter; 503. sealing airbag; 6. motor; 7. threaded rod; 8. guide rod; 9. movable plate; 901. slide plate; 902. buffer pad; 10. movable block; 11. dust particle detector; 1101. slide rod; 1102. third spring; 12. partition; 1201. guide groove. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] See also Figure 1-Figure 7 The present invention provides a technical solution: a leak detection device for an FFU device with a precisely movable position, comprising a base 1, an electric telescopic rod 3 and a dust particle detector 11, a bottom plate 2 is arranged above the base 1, an electric telescopic rod 3 is fixed to the upper end surface of the bottom plate 2, a top plate 4 is fixed to the output end of the electric telescopic rod 3, a fixed box 5 is arranged above the top plate 4, a sealing airbag 503 of an annular structure is fixed to the upper end surface of the fixed box 5, a motor 6 is fixed to the left end surface of the fixed box 5, a threaded rod 7 is fixed to the output end of the motor 6, the threaded rod 7 bearing is connected in the fixed box 5, and the threaded rod 7 is connected to the movable plate 9 through a thread. They are interconnected, and the movable plate 9 is arranged in the fixed box 5. A movable block 10 is arranged above the movable plate 9. A partition 12 is arranged between the movable block 10 and the movable plate 9. The partition 12 is fixed on the fixed box 5. A guide groove 1201 with a serpentine structure is opened on the partition 12, and the bending part of the guide groove 1201 is an inclined structure. A dust particle detector 11 is fixed on the movable block 10, and a sliding rod 1101 is fixed at the lower end of the dust particle detector 11. The sliding rod 1101 and the guide groove 1201 are slidably connected, and the width of the dust particle detector 11 is greater than the distance between adjacent transverse grooves on the guide groove 1201.

[0027] The bearing on the lower end surface of the base 1 is connected to a universal wheel 101, and four universal wheels 101 are provided; one end of a first spring 201 is fixed to the lower end surface of the bottom plate 2, and the other end of the first spring 201 is fixed to the base 1, and a vertical rod 202 is also fixed to the lower end surface of the bottom plate 2, and the vertical rod 202 is slidably connected to the base 1, and a brake pad 203 is fixed to the lower end of the vertical rod 202, and the brake pad 203 is in contact with the universal wheel 101 to achieve a limiting effect; the electric telescopic rod 3 is vertically distributed with the bottom plate 2, and a touch panel is also fixed to the right side of the electric telescopic rod 3; the upper end surface of the top plate 4 is symmetrically fixed with a limiting rod 401, and the limiting rod 401 is fixed to the fixed box 5 contact can realize the positioning effect, the lower end surface of the top plate 4 is evenly fixed with a cylinder 402, and the cylinder 402 is connected with the sealing airbag 503 through a conduit, and the piston head 403 is slidably connected in the cylinder 402, and the piston head 403 is fixed with a piston rod 404, and the upper end of the piston rod 404 penetrates the top plate 4 and is fixed on the lower end surface of the fixed box 5, and one end of the second spring 405 is also fixed on the top plate 4, and the other end of the second spring 405 is fixed on the lower end surface of the fixed box 5; the fixed box 5 is also symmetrically installed with a single-way air outlet valve 501, and the outer side of the fixed box 5 is also fixed with an infrared transmitter 502, and four infrared transmitters 502 are provided;

[0028] When using the leak detection device of the FFU device that can be accurately moved in position, such as Figure 1-Figure 7 As shown, the universal wheel 101 can facilitate the movement of the entire device. When testing, by turning on the infrared transmitter 502, four red dots will appear on the ceiling. The universal wheel 101 can be used to move the entire device, thereby driving the four red dots to move so that the four red dots are located outside the FFU device, thereby facilitating the positioning of the device. After the positioning is completed, the top plate 4 and the fixed box 5 can be driven to move upward by controlling the extension of the electric telescopic rod 3. When the sealing airbag 503 on the fixed box 5 contacts the ceiling, the electric telescopic rod 3 continues to extend, so that the distance between the top plate 4 and the fixed box 5 is reduced, and under the action of the action force and the reaction force, the distance between the bottom plate 2 and the base 1 is simultaneously reduced. When the distance between them is reduced, the piston rod 404 drives the piston head 403 to slide downward in the cylinder 402, so that the air in the cylinder 402 enters the sealing airbag 503 through the conduit, and the sealing airbag 503 is inflated, so that the sealing airbag 503 is expanded to achieve the sealing effect between the fixed box 5 and the ceiling, until the limit rod 401 contacts the fixed box 5 to achieve the limit. When the distance between the bottom plate 2 and the base 1 is reduced, the vertical rod 202 drives the brake pad 203 to move downward, so that the brake pad 203 contacts the universal wheel 101 and generates a certain pressure, thereby achieving the locking effect of the universal wheel 101, thereby ensuring the stability of the entire device, and avoiding the device from deviating during the detection process and the normal operation of the detection;

[0029] The movable plate 9 is slidably connected to the guide rod 8, and the guide rod 8 is symmetrically distributed front and back about the center line of the movable plate 9, and the guide rod 8 is fixed in the fixed box 5; a slide plate 901 is fixed to the upper end surface of the movable plate 9, and a partition plate 12 is provided between the slide plate 901 and the movable plate 9, and the slide plate 901 and the slide rod 1101 are slidably connected, and a buffer pad 902 is also fixed to the movable plate 9 symmetrically, and the buffer pad 902 contacts the fixed box 5 to achieve a buffering effect; the movable block 10 is slidably connected to the slide plate 901, and the movable block 10 is also slidably connected to the slide rod 1101; one end of a third spring 1102 is fixed to the slide rod 1101, and the other end of the third spring 1102 is fixed to the movable block 10;

[0030] After the fixing box 5 is sealed with the ceiling, Figure 1-Figure 7 As shown, at this time, the dust particle detector 11 is in a sealed space, thereby effectively preventing external factors from affecting the accuracy of the detection data. When performing the detection, Figure 1 and Figure 5As shown, by starting the motor 6 to drive the threaded rod 7 to rotate forward, the threaded connection between the threaded rod 7 and the movable plate 9 can make the movable plate 9 move to the right, and the sliding guide effect between the movable plate 9 and the guide rod 8 can ensure the stability of the movement of the movable plate 9. When the movable plate 9 moves to the right, it also drives the movable block 10 and the dust particle detector 11 to move to the right at a uniform speed, so that the dust particle detector 11 can realize the detection function of the FFU device, and at this time, the slide bar 1101 slides in the horizontal straight groove on the guide groove 1201. When the slide bar 1101 moves to the right to the inclined surface position on the right side of the guide groove 1201, the slide bar 1101 is moved to the right to the right side of the guide groove 1201. The sliding action between the movable block 10 and the inclined surface can make the slide bar 1101 slide backward to the corresponding position of the horizontal straight groove on the next guide groove 1201, so that the dust particle detector 11 moves backward for a distance, and the sliding action between the movable block 10 and the slide plate 901 can ensure the stability of the dust particle detector 11 moving backward. At this time, the control motor 6 drives the threaded rod 7 to reverse, so that the movable plate 9 and the dust particle detector 11 can move to the left. According to the above principle, when the dust particle detector 11 moves to the left to the extreme position, the sliding action between the slide bar 1101 and the inclined surface on the left side of the guide groove 1201 can make the dust particle detector 11 move backward to the extreme position. The particle detector 11 moves backwards for a distance again. In summary, the motor 6 drives the threaded rod 7 to rotate forward and backward in an orderly manner, so that the dust particle detector 11 can move along the serpentine path, so as to realize the comprehensive detection function of the FFU device, and because the distance between the two adjacent horizontal straight grooves on the guide groove 1201 is smaller than the width of the dust particle detector 11, the leftward moving path of the dust particle detector 11 and the rightward moving path of the dust particle detector 11 overlap to a certain extent, thereby avoiding missed detection. After the detection is completed, the dust particle detector 11 is at the rear side. When the next detection is required, only The height of the device needs to be lowered. By pulling the dust particle detector 11 upwards and cooperating with the sliding action between the slide bar 1101 and the movable block 10, the slide bar 1101 can be separated from the guide groove 1201. Then, by cooperating with the sliding action between the movable block 10 and the slide plate 901, the dust particle detector 11 can be moved to the frontmost position for reset. After the reset is completed, by loosening the dust particle detector 11 and cooperating with the elastic action of the third spring 1102, the slide bar 1101 can be reset and cooperate with the guide groove 1201 for the next detection. This is the working principle of the leak detection device of the FFU device that can be precisely moved in this position.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A leak detection device for a precisely movable FFU device, comprising a base (1), an electric telescopic rod (3) and a dust particle detector (11), characterized in that: A bottom plate (2) is arranged above the base (1), an electric telescopic rod (3) is fixed to the upper end surface of the bottom plate (2), a top plate (4) is fixed to the output end of the electric telescopic rod (3), a fixed box (5) is arranged above the top plate (4), a sealing airbag (503) of an annular structure is fixed to the upper end surface of the fixed box (5), a motor (6) is fixed to the left end surface of the fixed box (5), a threaded rod (7) is fixed to the output end of the motor (6), a bearing of the threaded rod (7) is connected to the inside of the fixed box (5), the threaded rod (7) is connected to the movable plate (9) by a thread, the movable plate (9) is arranged in the fixed box (5), and the movable plate (9) is fixed to the output end of the motor (6). ) is arranged above the movable block (10), a partition (12) is arranged between the movable block (10) and the movable plate (9), the partition (12) is fixed on the fixed box (5), a guide groove (1201) with a serpentine structure is opened on the partition (12), and the bending part of the guide groove (1201) is an inclined structure, a dust particle detector (11) is fixed on the movable block (10), a sliding rod (1101) is fixed at the lower end of the dust particle detector (11), the sliding rod (1101) and the guide groove (1201) are slidably connected, and the width of the dust particle detector (11) is greater than the distance between adjacent transverse grooves on the guide groove (1201).

2. A leak detection device for a precisely movable FFU device according to claim 1, characterized in that: The lower end surface bearing of the base (1) is connected to a universal wheel (101), and four universal wheels (101) are provided.

3. The leak detection device of the FFU device with accurate position movement according to claim 2, characterized in that: One end of a first spring (201) is fixed to the lower end surface of the bottom plate (2), and the other end of the first spring (201) is fixed to the base (1). A vertical rod (202) is also fixed to the lower end surface of the bottom plate (2), and the vertical rod (202) and the base (1) are slidably connected, and a brake pad (203) is fixed to the lower end of the vertical rod (202), and the brake pad (203) is in contact with the universal wheel (101) to achieve a limiting effect.

4. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: The electric telescopic rod (3) and the bottom plate (2) are arranged vertically, and a touch panel is fixed on the right side of the electric telescopic rod (3).

5. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: A limiting rod (401) is symmetrically fixed to the upper end face of the top plate (4), and the limiting rod (401) contacts the fixed box (5) to achieve a positioning effect. A cylinder (402) is evenly fixed to the lower end face of the top plate (4), and the cylinder (402) is connected to the sealing airbag (503) through a conduit, and a piston head (403) is slidably connected inside the cylinder (402). At the same time, a piston rod (404) is fixed to the piston head (403), and the upper end of the piston rod (404) passes through the top plate (4) and is fixed to the lower end face of the fixed box (5). One end of a second spring (405) is also fixed to the top plate (4), and the other end of the second spring (405) is fixed to the lower end face of the fixed box (5).

6. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: The fixed box (5) is also provided with a single-way air outlet valve (501) symmetrically mounted front and back, and an infrared emitter (502) is also fixed on the outside of the fixed box (5), and four infrared emitters (502) are provided.

7. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: The movable plate (9) is slidably connected to the guide rod (8), and the guide rod (8) is symmetrically distributed frontward and rearward about the center line of the movable plate (9), and the guide rod (8) is fixed in the fixed box (5).

8. The leak detection device of the FFU device with accurate position movement according to claim 7, characterized in that: A slide plate (901) is fixed on the upper end surface of the movable plate (9), and a partition plate (12) is arranged between the slide plate (901) and the movable plate (9), and the slide plate (901) and the slide rod (1101) are slidably connected. Buffer pads (902) are also fixed on the movable plate (9) in a left-right symmetrical manner, and the buffer pads (902) are in contact with the fixed box (5) to achieve a buffering effect.

9. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: The movable block (10) and the slide plate (901) are slidably connected, and the movable block (10) and the slide rod (1101) are also slidably connected.

10. The leak detection device of the FFU device with accurate position movement according to claim 1, characterized in that: One end of a third spring (1102) is fixed on the sliding rod (1101), and the other end of the third spring (1102) is fixed on the movable block (10).