Calibration clamp

Abstract

The present invention discloses a calibration jig (300A) for calibrating a measurement apparatus for measuring a three-dimensional geometry of a measurement object W. The calibration jig (300A) comprises: a plurality of elements (331) to be measured; a frame portion (340) to which a plurality of elements to be measured are attached; and a mechanism part (400) for moving the frame part, in which the mechanism part (400) comprises: a rotation mechanism (405) for rotating the frame part (340) about a first axis; a first swinging mechanism (410) for swinging the frame part (340) about a second axis orthogonal to the first axis; and a second swinging mechanism (420) for swinging the frame portion (340) about a third axis orthogonal to the first axis and the second axis.

Description

Technical Field

[0001] The present disclosure relates to a calibration fixture. Background Art

[0002] There is known a measuring device that includes a plurality of imaging devices and measures the three-dimensional geometric shape of a measuring object in a non-contact manner based on results obtained by photographing the measuring object from a plurality of directions (for example, refer to Japanese Patent Application Publication No. 2019-507885).

[0003] In such a measuring device, calibration of the device is performed by photographing the same calibration jig with a plurality of imaging devices or by photographing a calibration jig having known dimensions with a plurality of imaging devices. Summary of the invention

[0004] Problem that the invention aims to solve

[0005] However, with the conventional calibration jig, there is a problem in that a plurality of elements to be measured disposed on the calibration jig cannot be oriented in various directions.

[0006] Furthermore, it is desirable that complicated operation control is not required when operating a plurality of elements to be measured.

[0007] The present disclosure focuses on these points, and its object is to provide a calibration jig which does not require complicated operation control and can orient a plurality of elements to be measured to desired directions.

[0008] Solutions for solving problems

[0009] A calibration fixture according to a first aspect of the present disclosure is used to calibrate a measuring device for measuring a three-dimensional geometric shape of a measurement object, and the calibration fixture includes: a plurality of elements to be measured; a frame portion to which the plurality of elements to be measured are attached; and a mechanism portion for moving the frame portion, wherein the mechanism portion includes: a rotating mechanism for rotating the frame portion around a first axis; a first swinging mechanism for swinging the frame portion around a second axis orthogonal to the first axis; and a second swinging mechanism for swinging the frame portion around a third axis orthogonal to the first axis and the second axis.

[0010] The mechanism portion may include a supporting member for supporting the frame portion, and the first swing mechanism may include: a first movable portion coupled to the supporting member; and a first linear actuator for moving the first movable portion, and the first swing mechanism may be configured so that the supporting member is swung around the second axis by moving the first linear actuator to move the first movable portion.

[0011] The second swing mechanism may include: a second movable part coupled to the supporting member; and a second linear actuator for moving the second movable part, wherein the second swing mechanism may be configured to swing the supporting member around the third axis by moving the second movable part by the second linear actuator.

[0012] The connection portion between the first movable portion and the supporting member and the connection portion between the second movable portion and the supporting member may be a ball joint, the center portions of a plurality of ball joints may be located in a plane orthogonal to the first axis, and the rotation center of the supporting member may be located in the plane.

[0013] The first movable part may include a first coupling arm, one end of which is provided with the ball joint, and the other end of the first coupling arm may be coupled to the first linear actuator, and the first coupling arm and the first linear actuator may be coupled by a universal joint capable of rotatably supporting the first coupling arm around an axis.

[0014] The second movable portion may include a second coupling arm, one end of which may be provided with the ball joint, and the other end of which may be coupled to the second linear actuator, and the second coupling arm and the second linear actuator may be coupled via a universal joint capable of rotatably supporting the second coupling arm around an axis.

[0015] The rotating mechanism may include a driving source that generates a driving force for rotating the frame portion, the first linear actuator and the second linear actuator may be arranged at a first position along the direction of the first axis, and the driving source of the rotating mechanism may be arranged at a second position along the direction of the first axis that is closer to the supporting member than the first position.

[0016] The frame portion may have a shape of a sphere or an ellipsoid on the surface of which the plurality of elements to be measured are arranged, and at least a portion of the mechanism portion may be arranged to be located inside the sphere or the ellipsoid of the frame portion.

[0017] The frame portion may be arranged so that the center of a sphere or an ellipsoid is located at a rotation center which is an intersection of the second axis and the third axis.

[0018] The mechanism portion may have a shape in which the entirety of the mechanism portion is located inside an outer shape of the frame portion when viewed by projecting the mechanism portion and the frame portion in the direction of the first axis.

[0019] The element to be measured may include: a body portion having a predetermined shape; and a label portion provided on the body portion or on a member attached to the body portion, wherein an identification code for identifying the element to be measured is shown in the label portion.

[0020] Effects of the Invention

[0021] According to the present disclosure, it is possible to provide a calibration jig that does not require complicated operation control and can orient a plurality of elements to be measured to desired directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A configuration example of a measurement system is shown.

[0023] Figure 2 An example in which a measuring device is mounted with a calibration fixture is shown.

[0024] Figure 3 A configuration example of a control unit is shown.

[0025] Figure 4 An example of the operation flow of the measuring device is shown.

[0026] Figure 5 A first configuration example of the calibration jig is shown.

[0027] Figure 6 (A) and (B) each show a configuration example of an element to be measured.

[0028] Figure 7 A second configuration example of the calibration jig is shown.

[0029] Figure 8 is a side view of a calibration fixture according to one aspect of the present disclosure.

[0030] Fig. 9 It is shown from Figure 8 Figure 1. A diagram of the state in which the calibration fixture removes the frame member.

[0031] Fig.10 is a perspective view of the calibration fixture with the frame members removed.

[0032] Fig.11 is a perspective view of the calibration jig in a state where the frame members are removed, viewed from other directions.

[0033] Fig.12 It is an enlarged view of the structure that supports the frame portion so that it can swing in the mechanism portion.

[0034] Fig.13 It is a diagram showing the positional relationship between the frame portion and the rotation center.

[0035] Fig.14A and Fig. 14B Each schematically shows the swinging of a supporting member and a frame portion supported by the supporting member.

[0036] [reference numerals]

[0037] 10. Measuring equipment

[0038] 30 Calibration fixture

[0039] 31 Components to be measured

[0040] More than 31 components to be measured

[0041] 32 Main body

[0042] 33 Label Department

[0043] 34 plate components

[0044] 35 identification code

[0045] 36 Identification code

[0046] 40 frame part

[0047] 41 Rod-like components

[0048] 42 Columnar components

[0049] 43 base

[0050] 110 stage

[0051] 120 Mobile Department

[0052] 130 optical units

[0053] 131 Light Source

[0054] 132 Camera Department

[0055] 133 Field of view

[0056] 210 Communications Department

[0057] 220 Storage Department

[0058] 230 Display unit

[0059] 240 Control Department

[0060] 241 signal output unit

[0061] 242 Acquisition Department

[0062] 243 Measurement Department

[0063] 244 Rotation Matrix Identification Unit

[0064] 245 Translation vector recognition unit

[0065] 300 Calibration Fixture

[0066] 300A Calibration Fixture

[0067] 331 Components to be measured

[0068] 332 Main body

[0069] 333 Label Department

[0070] 340 frame

[0071] 341 frame member

[0072] 342 Columnar Components

[0073] 343 Base

[0074] 400 Institutional Department

[0075] 401 support

[0076] 402 Central Pillar

[0077] 403 Supporting member

[0078] 405 Rotating Mechanism

[0079] 405a Rotary Motor

[0080] 410 first swing mechanism

[0081] 411 first movable part

[0082] 412 first coupling arm

[0083] 413a Ball joint

[0084] 413b Universal joint

[0085] 415 first linear actuator

[0086] 415a Linear Motor

[0087] 415b Linear Guide

[0088] 417 movable arm

[0089] 420 Second swing mechanism

[0090] 421 Second movable part

[0091] 422 second coupling arm

[0092] 423a Ball joint

[0093] 423b Ball joint

[0094] 425 Second linear actuator

[0095] 425a Linear Motor

[0096] 425b Linear Guide

[0097] 427 movable arm

[0098] 455 ball joint

[0099] 455a Rotation Center

[0100] Lx center axis

[0101] Ly central axis

[0102] Lz center axis

[0103] S measurement system

[0104] WMeasurement object DETAILED DESCRIPTION

[0105] In the following, although the present disclosure mainly relates to Figures 8 to 14A and Fig. 14B The calibration fixture is shown, but first the basic techniques related to calibration will be described.

[0106] <Configuration example of measurement system S>

[0107] Figure 1 A configuration example of a measuring system S according to the present embodiment is shown. The measuring system S includes a measuring device 10 and a calibration jig 30 .

[0108] The measuring device 10 measures the three-dimensional geometric shape of the measuring object W (hereinafter referred to as the workpiece W) arranged in a three-dimensional space by irradiating light from multiple directions to the measuring object W (hereinafter referred to as the workpiece W) and receiving reflected light. In addition, the measuring device 10 irradiates light from multiple directions to the calibration fixture 30 arranged in the three-dimensional space, and recognizes calibration parameters for calibration of the measuring device 10 itself by receiving reflected light. The measuring device 10 includes a stage 110, a moving part 120, an optical unit 130, and a control unit 140.

[0109] The stage 110 is provided with a measuring object W. When the measuring system S calibrates the measuring device 10, the stage 110 is provided with a calibration fixture 30. The stage 110 is configured to be movable in a plurality of predetermined directions. In the present embodiment, an example in which the stage 110 is configured to be movable in a first direction and in a second direction different from the first direction will be described. For example, the first direction and the second direction are orthogonal.

[0110] For example, the stage 110 has a function of an XY stage that can move in the X direction and the Y direction in the XY plane. In this case, the first direction is the X direction or the Y direction, and the second direction is the Y direction or the X direction.

[0111] The stage 110 is configured to be rotatable around an axis oriented in a plurality of predetermined directions. In the present embodiment, an example in which the stage 110 is configured to be rotatable around an axis oriented in a third direction and a fourth direction different from the third direction, respectively, will be described. For example, the third direction and the fourth direction are orthogonal. Here, the first direction and the third direction may coincide with each other, or the second direction and the fourth direction may coincide with each other.

[0112] For example, the stage 110 has the function of a rotating stage that can rotate around an axis oriented in the X direction and the function of a rotating stage that can rotate around an axis oriented in the Y direction. In this case, the third direction is the X direction or the Y direction, and the fourth direction is the Y direction or the X direction. The measuring device 10 needs to be configured so that the calibration fixture 30 can be moved, and a movable arm or the like that can be moved while fixing the calibration fixture 30 may be provided instead of the stage 110.

[0113] The moving part 120 moves the stage 110. In other words, when the measuring object W is mounted on the stage 110, the moving part 120 moves the measuring object W. When the calibration fixture 30 is mounted on the stage 110, the moving part 120 moves the calibration fixture 30. The moving part 120 includes an actuator such as a motor, etc., and moves the stage 110 in the first direction or the second direction. In addition, the moving part 120 rotates the stage 110 around an axis oriented in a third direction. Similarly, the moving part 120 rotates the stage 110 around an axis oriented in a fourth direction.

[0114] The optical unit 130 includes a light source 131 and an imaging unit 132. The light source 131 irradiates light onto the measuring object W. The light source 131 includes at least one of a halogen lamp, an LED, a laser beam, and the like. For example, the light source 131 is a projector for irradiating light of a predetermined pattern. The light emitted from the light source 131 is reflected by the measuring object W. When the reflected light from the measuring object W is incident on the imaging unit 132, the imaging unit 132 photographs the measuring object W. The imaging unit 132 includes a camera capable of photographing still images, videos, and the like. The imaging unit 132 may include a plurality of cameras.

[0115] A plurality of optical units 130 are arranged at different positions of the measuring device 10. In other words, a plurality of light sources 131 irradiate light onto different regions of the measuring object W, and a plurality of imaging units 132 respectively photograph a plurality of different regions of the measuring object W. For example, the imaging units 132 of the plurality of optical units 130 respectively photograph different parts of the measuring object W. In this case, it is desirable that the plurality of optical units 130 are arranged so that the overall configuration of the measuring object W can be grasped by synthesizing a plurality of photographing results obtained by the plurality of imaging units 132. For simplicity, an example in which two optical units 130 are arranged is described in the present embodiment, but the present disclosure is not limited thereto. Three or more optical units 130 may be arranged.

[0116] The control unit 140 controls the moving part 120 and the optical unit 130. When the measuring object W is mounted on the stage 110, the control unit 140 acquires the photographing result of the measuring object W photographed by the photographing part 132 from the optical unit 130, and measures the three-dimensional geometric shape of the measuring object W based on the acquired photographing result. When the calibration jig 30 is mounted on the stage 110, the control unit 140 acquires the photographing result of the calibration jig 30 photographed by the photographing part 132 from the optical unit 130, and identifies the calibration parameters to be used for calibration of the measuring device 10 based on the acquired photographing result. The control unit 140 will be described later.

[0117] The calibration jig 30 includes a plurality of elements to be measured 31 having a predetermined shape, and is a jig for calibrating the measuring device 10. In the present embodiment, an example is described in which the calibration jig 30 includes the elements to be measured 31 thereon. When the calibration jig 30 is mounted on the stage 110, it is desirable to arrange the plurality of elements to be measured 31 so that the plurality of elements to be measured 31 are included in the field of view of the imaging section 132 included in one optical unit 130.

[0118] Figure 2 An example is shown in which the calibration jig 30 is mounted on the measuring device 10 according to the present embodiment.

[0119] Figure 2 An example is shown in which the first element to be measured 31 a is in the field of view 133 a of the first imaging portion 132 a of the first optical unit 130 a and the second element to be measured 31 b is in the field of view 133 b of the second imaging portion 132 b of the second optical unit 130 b.

[0120] In the present embodiment, an example is shown in which different elements to be measured 31 are included in the field of view 133a of the first imaging unit 132a and the field of view 133b of the second imaging unit 132b, but the present embodiment is not limited thereto. For example, part or all of the first element to be measured 31a may be in the field of view 133a of the first imaging unit 132a, and part or all of the first element to be measured 31a may be in the field of view 133b of the second imaging unit 132b.

[0121] Each optical unit 130 can photograph the element to be measured 31 in the field of view of the optical unit 130 by irradiating light from the light source 131 onto the calibration fixture 30 and photographing the image using the camera unit 132. Then, the control unit 140 obtains the photographing result from the camera unit 132 and measures the three-dimensional geometric shape of the element to be measured 31. The element to be measured 31 has a predetermined size and a predetermined shape. The element to be measured 31 can be formed to have a predetermined size. The element to be measured 31 can have different shapes, marks, colors, etc. In the present embodiment, an example in which the element to be measured 31 is spherical and the control unit 140 measures the center position of the sphere will be described.

[0122] Here, the sizes and positional relationships of the plurality of components to be measured 31 set in the calibration fixture 30 may be known in advance. In this case, the control unit 140 may calibrate the measuring device 10 by comparing (i) the known sizes and positional relationships of the components to be measured 31 and (ii) the measurement results of the three-dimensional geometric shapes of the components to be measured 31. For example, the control unit 140 identifies a coefficient or the like to be multiplied by the measurement results of the three-dimensional geometric shapes as calibration parameters, so that the measurement results of the three-dimensional geometric shapes of the components to be measured 31 match the sizes and positional relationships of the components to be measured 31.

[0123] However, in the case of the measuring device 10 for measuring a large measuring object, the calibration fixture 30 also becomes large, and it is sometimes difficult to measure the precise size. In addition, in the case of the measuring device 10 for measuring a complex measuring object, the shape and arrangement of the calibration fixture 30 become complicated, and it is sometimes difficult to measure the precise size.

[0124] On the other hand, even if the dimensions of such a calibration jig 30 can be measured, the dimensions may vary due to environmental changes, etc., or shocks may cause dimensional deviations, etc., so it is difficult to easily calibrate the measuring device 10. Therefore, the measuring system S according to the present embodiment makes it possible to calibrate such a measuring device 10 even with a calibration jig 30 having a plurality of elements to be measured 31 whose dimensions and positional relationships are unknown. The control unit 140 of the measuring device 10 will now be described.

[0125] <Configuration Example of Control Unit 140>

[0126] Figure 3 The configuration example of the control unit 140 according to the present embodiment is shown. The control unit 140 is, for example, a computer. The control unit 140 includes a communication section 210 , a storage section 220 , a display section 230 , and a control section 240 .

[0127] The communication unit 210 communicates with the moving unit 120 and the optical unit 130. For example, the communication unit 210 sends a control signal for moving the measuring object W or the calibration jig 30 to the moving unit 120. The communication unit 210 may send a control signal for controlling the light source 131 and the imaging unit 132 to the optical unit 130. The communication unit 210 may receive the photographing result of the imaging unit 132 from the optical unit 130.

[0128] The communication section 210 performs communication via a dedicated connection line and a communication network, etc. The communication section 210 can be used as an interface for connecting to a communication network such as an Internet line, a wireless LAN, or a mobile phone network.

[0129] The storage unit 220 includes a storage medium such as a ROM (Read Only Memory) or a RAM (Random Access Memory). The storage unit 220 may include a large-capacity storage device such as a hard disk drive (HDD) and / or a solid-state drive (SSD). For example, when a computer is used as the control unit 140, the storage unit 220 may store an OS (Operating System) that enables the computer to function and information such as programs. The storage unit 220 may store various types of information including data to be referenced when executing a program.

[0130] The storage unit 220 may store intermediate data, calculation results, thresholds, reference values, parameters, etc. generated (or used) in the operation process of the control unit 140. In addition, in response to a request from each part of the control unit 140, the storage unit 220 may provide the stored data to the request source.

[0131] The display unit 230 displays information related to the measurement of the measuring device 10. The display unit 230 displays information such as measurement conditions, measurement items, and measurement results. The display unit 230 can display the communication status of the control unit 140, the execution status of the OS and the application, etc. The display unit 230 is, for example, a display such as a liquid crystal display or a monitor.

[0132] The control unit 240 controls each unit of the measuring device 10. For example, the control unit 240 sends and receives various types of information via the communication unit 210. The control unit 240 is, for example, a CPU (central processing unit). The control unit 240 controls the moving unit 120 and the imaging unit 132 to measure the three-dimensional geometric shape of the measuring object W based on the photographing results of the plurality of imaging units 132.

[0133] The control section 240 includes a signal output section 241, an acquisition section 242, a measurement section 243, a rotation matrix identification section 244, and a translation vector identification section 245. In other words, by executing the program stored in the storage section 220, the CPU functions as the control section 240 including the signal output section 241, the acquisition section 242, the measurement section 243, the rotation matrix identification section 244, and the translation vector identification section 245.

[0134] The signal output section 241 outputs a control signal for controlling each section of the measuring device 10 to the communication section 210. For example, the signal output section 241 outputs a control signal for controlling the light source 131 and the imaging section 132 of the optical unit 130. As an example, the signal output section 241 outputs a control signal for causing the light source 131 of one optical unit 130 to emit light in a predetermined pattern and a control signal for causing the imaging section 132 of one optical unit 130 to capture an image. By doing so, the communication section 210 transmits the control signal to the one optical unit 130, and the one optical unit 130 captures an image of the object (e.g., the element to be measured 31) in its field of view.

[0135] The signal output unit 241 outputs a control signal for driving the moving unit 120. The signal output unit 241 may output a control signal for causing the display unit 230 to display information, etc. The signal output unit 241 may generate a control signal corresponding to an operation purpose, or may output a control signal having a predetermined signal pattern. The signal pattern of the control signal may be stored in the storage unit 220.

[0136] The acquisition unit 242 acquires data of an image captured by the imaging unit 132 of the optical unit 130 as a capture result. The acquisition unit 242 may store the acquired capture result of the imaging unit 132 in the storage unit 220. The acquisition unit 242 may also acquire information on the current position of the stage 110.

[0137] The measuring unit 243 measures the three-dimensional geometric shape of the measuring object W or the calibration fixture 30 based on the photographing results of the imaging unit 132 acquired by the acquiring unit 242. For example, the measuring unit 243 measures the length of a predetermined portion of the measuring object W and the size of a predetermined shape. By using the photographing results of multiple imaging units 132, the measuring unit 243 can also measure the length and shape of a predetermined portion of the measuring object W that cannot be accommodated in the field of view of one imaging unit 132. Since the operation of the measuring unit 243 to measure the three-dimensional geometric shape of the measuring object W based on the photographing results of multiple imaging units 132 is well known, its detailed description is omitted here.

[0138] The rotation matrix identification section 244 identifies a rotation matrix used for calibration of the measuring device 10. The translation vector identification section 245 identifies a translation vector used for calibration of the measuring device 10. The operations of the rotation matrix identification section 244 and the translation vector identification section 245 will be described below.

[0139] <Example of Operation Flow of Measuring Device 10>

[0140] Figure 4 An example of the operation flow of the measuring device 10 according to the present embodiment is shown. The measuring device 10 performs Figure 4 The operations from S51 to S66 are shown to identify calibration parameters for calibration of the measuring device 10 itself. Although the measuring device 10 includes a plurality of optical units 130, in this operation flow, an operation example using the first optical unit 130a and the second optical unit 130b will be described in a simplified manner.

[0141] First, before calibrating the measuring device 10 using the calibration jig 30, the measuring device 10 calibrates each optical unit 130. In this case, the measuring device 10 calibrates each optical unit 130 using a reference jig smaller in size than the calibration jig 30. For example, the size of the reference jig is the size of the field of view of the imaging unit 132 included in one optical unit 130.

[0142] The reference fixture has a plurality of reference measurement elements of which at least one of size and positional relationship is known. As an example, the reference measurement element has a shape approximately the same as the element to be measured 31. Alternatively, the reference fixture may have a shape of known size. Such a small reference fixture has hardly changed over time and is a commonly used fixture that is easy to handle. Since it is well known to calibrate each optical unit 130 using such a reference fixture, the operation of calibration will be briefly described here.

[0143] First, a reference fixture is mounted on the stage 110 of the measuring device 10 (S51). A plurality of reference fixtures may be mounted on the stage 110, or alternatively, one reference fixture may be mounted on the stage 110. In the case where a plurality of reference fixtures are mounted on the stage 110, it is desirable to arrange the plurality of reference fixtures so that they are included in the respective fields of view of the optical unit 130. Then, the control unit 240 calibrates the respective optical units 130 (S52).

[0144] For example, the control unit 240 photographs the reference fixture using the first imaging unit 132a of the first optical unit 130a, and calibrates the first coordinate system for indicating the first coordinate position in the field of view 133a of the first imaging unit 132a based on the photographing result of the first imaging unit 132a. Then, the control unit 240 identifies the first coefficient to be multiplied by the measurement result of the three-dimensional geometric shape so that the measurement result of the three-dimensional geometric shape of the reference measurement element of the reference fixture matches the size and positional relationship of the known reference measurement element.

[0145] Next, the control unit 240 uses the second camera 132b of the second optical unit 130b to photograph the reference jig, and calibrates the second coordinate system for indicating the second coordinate position in the field of view 133b of the second camera 132b based on the photographing result of the second camera 132b. In the case where one reference jig is mounted on the stage 110, for example, when the calibration of the first optical unit 130a is completed, the control unit 240 moves the stage 110 so that the reference jig is included in the field of view of the second optical unit 130b to be calibrated next, and then starts the calibration of the second optical unit 130b.

[0146] In a manner similar to the calibration of the first optical unit 130a, the control unit 240 identifies a second coefficient to be multiplied by the measurement result of the three-dimensional geometric shape so that the measurement result of the three-dimensional geometric shape of the reference measurement element based on the photographing result of the second camera 132b matches the size and positional relationship of the known reference measurement element. As described above, the control unit 240 calibrates each of the plurality of optical units 130. The control unit 240 may store the identified coefficient in the storage unit 220.

[0147] Next, a calibration fixture 30 is mounted on the stage 110 of the measuring device 10 (S53). Next, the control unit 240 photographs the calibration fixture 30 arranged at the first reference position (S54). For example, the first reference position is a predetermined position such as the initial position of the stage 110. For example, when the calibration fixture 30 is arranged at the first reference position, it is desirable to predetermine the positional relationship between the calibration fixture 30, the plurality of optical units 130, and the first reference position so that the plurality of elements to be measured 31 of the calibration fixture 30 are in the field of view 133 of the plurality of imaging units 132.

[0148] For example, the control section 240 moves the stage 110 and then arranges the calibration jig 30 at the first reference position. Then, after turning on the light sources 131 of the plurality of optical units 130, the control section 240 photographs the calibration jig 30 by using the imaging section 132. By doing so, at the first reference position, the first imaging section 132a photographs the first element to be measured 31a among the plurality of elements to be measured 31 included in the calibration jig 30, and the second imaging section 132b different from the first imaging section 132a photographs the second element to be measured 31b different from the first element to be measured 31a.

[0149] Next, the control unit 240 moves the calibration fixture 30 from the first reference position in a predetermined first direction (S55). For example, the control unit 240 moves the stage 110 by a predetermined distance in the first direction. It is desirable that the control unit 240 moves the stage 110 in the first direction within a range where the plurality of elements to be measured 31 of the calibration fixture 30 are included in the field of view of the plurality of imaging units 132.

[0150] Then, the control part 240 photographs the calibration jig 30 by using the plurality of optical units 130 (S56). After turning on the light sources 131 of the plurality of optical units 130, the control part 240 photographs the calibration jig 30 by using the imaging part 132. By doing so, the first imaging part 132a photographs the first component to be measured 31a that has moved in the first direction, and the second imaging part 132b photographs the second component to be measured 31b that has moved in the first direction.

[0151] Next, the control unit 240 moves the calibration jig 30 from the first reference position in a predetermined second direction different from the first direction (S57). For example, after the stage 110 is moved back to the first reference position, the control unit 240 moves the stage 110 in the second direction by a predetermined distance. Alternatively, after moving the stage 110 in the second direction by a predetermined distance, the control unit 240 may move the stage 110 back in the direction opposite to the first direction by the distance moved in S55.

[0152] Alternatively, the control unit 240 may move the stage 110 in the second direction by a predetermined distance and subtract the distance moved in S55 from the measurement result. It is desirable that the control unit 240 moves the stage 110 in the second direction within a range where the plurality of elements to be measured 31 of the calibration jig 30 are included in the field of view of the plurality of imaging units 132.

[0153] Then, the control section 240 photographs the calibration jig 30 by using the plurality of optical units 130 (S58). The control section 240 photographs the calibration jig 30 through the same operation as in S56. By doing so, the first imaging section 132a photographs the first component to be measured 31a that has moved in the second direction, and the second imaging section 132b photographs the second component to be measured 31b that has moved in the second direction.

[0154] Next, the control unit 240 photographs the calibration fixture 30 arranged at the second reference position (S59). The second reference position is, for example, a predetermined position such as the initial position of the stage 110. Similar to the first reference position, the second reference position is a position where the plurality of elements to be measured 31 of the calibration fixture 30 are in the field of view 133 of the plurality of imaging units 132 when the calibration fixture 30 is arranged at the second reference position.

[0155] For example, after moving the stage 110 to the second reference position, the control section 240 photographs the calibration jig 30 by using the camera section 132 in the same manner as the operation in S54. The second reference position may be a position after the calibration jig 30 has been moved in the second direction. In this case, since the operation in S59 has the same result as the operation in S58, the operation in S59 may be omitted. In addition, the second reference position may be the same position as the first reference position, and in this case, since the operation in S59 has the same result as the operation in S54, the control section 240 may simply move the calibration jig 30 to the second reference position.

[0156] Next, the control unit 240 rotates the calibration jig 30 in a predetermined direction around an axis oriented in a predetermined third direction (S60). For example, the control unit 240 rotates the stage 110 by a predetermined angle θ within a range where the plurality of components to be measured 31 of the calibration jig 30 are within the field of view 133 of the plurality of imaging units 132.

[0157] Then, the control section 240 photographs the calibration jig 30 (S61) by using the plurality of optical units 130. The control section 240 photographs the calibration jig 30 by performing the same operation as in S56. As a result, the first imaging section 132a photographs the first component to be measured 31a after being rotated around the axis oriented in the third direction, and the second imaging section 132b photographs the second component to be measured 31b after being rotated around the axis oriented in the third direction.

[0158] Next, the control unit 240 rotates the calibration fixture 30 in a predetermined direction around an axis oriented in a predetermined fourth direction (S62), wherein the predetermined fourth direction is different from the third direction. For example, after rotating the stage 110 back to a predetermined angle θ around the axis oriented in the third direction, the control unit 240 rotates the stage 110 around the axis oriented in the fourth direction by a predetermined angle within a range where the plurality of components to be measured 31 of the calibration fixture 30 are within the field of view 133 of the plurality of imaging units 132.

[0159] Alternatively, after rotating the stage 110 by a predetermined angle around an axis oriented in the fourth direction Afterwards, the control section 240 may rotate the stage 110 back to the predetermined angle θ around the axis oriented in the third direction. Alternatively, the control section 240 may rotate the stage 110 around the axis oriented in the fourth direction by a predetermined angle θ. and subtracting from the measurement result the predetermined angle at which the stage 110 is rotated about an axis oriented in the fourth direction. The amount of rotation.

[0160] The control section 240 photographs the calibration jig 30 using the plurality of optical units 130 (S63). The control section 240 photographs the calibration jig 30 by the same operation as in S61. As described above, the control section 240 outputs a control signal from the signal output section 241, and while moving the calibration jig 30, photographs the component to be measured 31 with the plurality of imaging sections 132 before and after the movement of the calibration jig 30. Then, the acquisition section 242 acquires the photographing result of the imaging section 132.

[0161] exist Figure 4 , an example is described in which the control unit 240 sequentially performs the following operations: moving the calibration jig 30 in a first direction, moving the calibration jig 30 in a second direction, rotating the calibration jig 30 by an angle θ, and rotating the calibration jig 30 by an angle θ. However, the present disclosure is not limited thereto. The control unit 240 may be configured to Figure 4 The calibration fixture 30 is moved in a first direction, the calibration fixture 30 is moved in a second direction, the calibration fixture 30 is rotated by an angle θ, and the calibration fixture 30 is rotated by an angle θ.

[0162] Next, the control unit 240 identifies the coordinate position of the component to be measured 31 for each position to which the calibration jig 30 is moved based on the photographing results of the plurality of imaging units 132 (S64). For example, the measuring unit 243 identifies the first coordinate position indicating the position of the first component to be measured 31a in the first coordinate system based on the field of view of the first imaging unit 132a among the plurality of photographed images photographed by the first imaging unit 132a. In addition, the measuring unit 243 identifies the second coordinate position indicating the position of the second component to be measured 31b in the second coordinate system based on the field of view of the second imaging unit 132b among the plurality of photographed images photographed by the second imaging unit 132b.

[0163] exist Figure 4 After the operation in S64, the rotation matrix identification unit 244 of the control unit 240 identifies a rotation matrix for rotating the coordinates so that the direction in which the first coordinate position moves and the direction in which the second coordinate position moves are consistent with each other before and after the calibration jig 30 moves in the first direction and the second direction (S65). After the operation in S65, the translation vector identification unit 245 identifies a translation vector for translating the coordinates so that the distance between the first element to be measured 31a and the second element to be measured 31b is the same before and after the rotation (S66).

[0164] <First Configuration Example of the Calibration Jig 300>

[0165] Figure 5 A first configuration example of the calibration jig 300 according to the present embodiment is shown. Figure 5 In the calibration fixture 300 shown, Figure 2 The operations of the calibration jig 30 according to the present embodiment shown in FIG. 1 are approximately the same as those of the calibration jig 300 and their redundant description is omitted. Figure 2 The calibration jig 30 is shown. The calibration jig 300 may be formed as a reference jig for calibrating each optical unit 130. The calibration jig 300 includes a plurality of elements to be measured 31 and a frame portion 40.

[0166] A plurality of elements to be measured 31 are attached to the frame portion 40. Figure 5 An example in which the frame portion 40 is a plate member is shown, but it is not limited thereto. The frame portion 40 may be any member as long as it can fix the element to be measured 31, and may be a rod-shaped member or the like.

[0167] and Figure 2 similar, Figure 5 An example is shown in which the first element to be measured 31a is in the field of view 133a of the first imaging section 132a of the first optical unit 130a and the second element to be measured 31b is in the field of view 133b of the second imaging section 132b of the second optical unit 130b. Figure 5 The number of components 31 to be measured is less than Figure 2 , but more elements to be measured 31 can be attached to the frame portion 40.

[0168] <First Configuration Example of Element to be Measured 31>

[0169] Figure 6 (A) and (B) of FIG. 1 each show a first configuration example of the element to be measured 31 according to the present embodiment. Figure 6 As shown in (A), the element to be measured 31 includes a main body 32, a label part 33 and a plate member 34. The main body 32 has a predetermined shape. The shape of the main body 32 is, for example, a rotating body such as a sphere, an ellipsoid or a cylinder. Alternatively, the shape of the main body 32 may be a polyhedron.

[0170] Figure 6 (A) and (B) each show an example in which a plurality of label portions 33 are attached to a plate member 34 by a known method such as printing or pasting, and the label portions 33 are provided on the main body portion 32 via the plate member 34. It is desirable that the label portions 33 are provided on many parts of the main body portion 32. For example, the main body portion 32 has a plurality of plate members 34, and a plurality of label portions 33 are provided at a plurality of different positions on the main body portion 32, so that when the element to be measured 31 is photographed from various angles, at least one label portion 33 is included in the photographed image.

[0171] The plate member 34 is a belt-shaped member provided around the main body portion 32. A plurality of label portions 33 may be provided on the plate member 34. It is desirable that a plurality of label portions 33 are provided on both the front and back surfaces of the plate member 34. Figure 6 (A) and (B) each show an example in which four label portions 33 are provided on one side of the plate member 34. As described above, the label portion 33 may be provided on the plate member 34, or may be provided on other parts of the main body portion 32 instead of or in addition to the plate member 34.

[0172] Figure 6 (B) shows an example in which a single label portion 33 is shown as a rectangular shape, wherein the single label portion 33 is shown as Figure 6 L1 to L2 of the plate member 34 shown in (A). The label portion 33 includes, for example, an identification code 35 and an identification code 36.

[0173] The identification code 35 is a code for identifying the label portion 33, which is common to the plurality of components to be measured 31. The identification code 36 is a code for identifying the component to be measured 31. It is desirable that the identification code 35 and the identification code 36 are codes of different shapes or codes of different types. For example, the identification code 36 is composed of a combination of basic parts of a predetermined first shape, while the identification code 35 is composed of a combination of basic parts of a predetermined second shape whose size is different from the first shape.

[0174] Figure 6 (A) and (B) of FIG. 3 each show an example in which the identification code 35 and the identification code 36 are displayed as bar codes having different line widths. As an example, the minimum line width d of the identification code 35 is half the minimum line width D of the identification code 36. The identification code 35 and the identification code 36 each indicate a predetermined value. As an example, the identification code 35 indicates a predetermined 8-bit value (01010101), and the identification code 36 indicates a predetermined 8-bit value (01001010).

[0175] <Second Configuration Example of Calibration Jig 300>

[0176] Figure 7 A second configuration example of the calibration jig 300 according to the present embodiment is shown. In the calibration jig 300 of the second configuration example, the frame portion 40 has a spherical or elliptical shape. The frame portion 40 may be formed into a spherical or elliptical shape at least in part by combining a plurality of rod-shaped members, etc. In addition, the frame portion 40 may include a member having the shape of at least a portion of a sphere or an ellipsoid.

[0177] The frame portion 40 includes, for example, a plurality of rod-shaped members 41 also in an arc shape, a columnar member 42, and a base 43. The plurality of rod-shaped members 41 can be attached to the columnar member 42 so as to be rotatable around the columnar member 42 as an axis. The columnar member 42 is attached to the base 43. It is desirable that the surfaces of the plurality of rod-shaped members 41 in contact with the outside form a spherical surface or an ellipsoid.

[0178] The arc-shaped rod-shaped members 41 are each provided to be movable in the Z direction. The arc-shaped rod-shaped members 41 can each be configured to be movable in the circumferential direction of a circle described by the arc. A plurality of elements to be measured 31 are fixed to the outside of the plurality of rod-shaped members 41. In this way, the plurality of elements to be measured 31 can be configured in a spherical configuration or an elliptical configuration. Figure 7 An example of the spherical frame portion 40 in which the columnar member 42 extends in the Z direction and the plurality of rod-shaped members 41 are provided to be rotatable around the Z direction as an axis is shown.

[0179] The configuration position and / or orientation of the plurality of imaging units 132 may be changed according to the measurement object. By configuring the plurality of elements 31 to be measured in such a spherical configuration, the plurality of elements 31 to be measured may be included in each field of view of the imaging unit 132 even when the configuration position and / or orientation of the imaging unit 132 is changed. The imaging unit 132 may be arranged to surround the measurement object. In this case, the configuration position and orientation may be different for each imaging unit 132. Even in this case, by configuring the plurality of elements 31 to be measured in a spherical configuration, the plurality of elements 31 to be measured may be included in each field of view of the imaging unit 132.

[0180] The plurality of elements to be measured 31 are each disposed on a spherical or ellipsoidal surface of the frame portion 40. The plurality of elements to be measured 31 are disposed, for example, so that adjacent elements to be measured 31 are within a predetermined distance range on the spherical surface of the sphere formed by the frame portion 40. Here, for example, when the main body portion 32 of the element to be measured 31 is a sphere, the predetermined distance is approximately two to four times the diameter of the sphere. When the main body portion 32 of the element to be measured 31 is an ellipsoid, the predetermined distance may be approximately two to four times the major axis of the ellipsoid.

[0181] It is desirable that the elements to be measured 31 are arranged so that the label portion 33 is included in the field of view of more camera units 132. An example is envisioned in which the frame portion 40 is regarded as a spherical body with the Z direction as the rotation axis and has spherical coordinates similar to the spherical coordinates of a celestial body or the like. It is desirable that a plurality of elements to be measured 31 are arranged in the same latitude direction and / or the same longitude direction of such a spherical body. In addition, each of the elements to be measured 31 is arranged, for example, so that at least one label portion 33 is shown in a plane that is orthogonal to the normal direction of the spherical body and faces the outside of the frame portion 40.

[0182] For example, it is desirable to densely arrange the plurality of elements to be measured 31 on the spherical surface of the sphere so that even when the imaging unit 132 captures a portion of the calibration jig 300, the plurality of elements to be measured 31 whose label portions 33 can be read are included in the captured image. In this way, the plurality of elements to be measured 31 can be identified in the captured images of the calibration jig 300 captured by the plurality of imaging units 132 simply by mounting only one calibration jig 300 of the second configuration example on the stage 110.

[0183] Therefore, as described above, the calibration parameters to be used for calibration of the plurality of imaging units 132 themselves can be identified based on the captured images of the calibration jig 300 obtained by the plurality of imaging units 132 before and after the movement of the calibration jig 300. An example in which the calibration jig 300 is mounted on the stage 110 and moves when identifying the above-mentioned calibration parameters is described, but the present disclosure is not limited thereto. In addition to the movement of the stage 110, the calibration jig 300 may be configured so that the plurality of elements to be measured 31 can be moved while maintaining their relative positional relationship.

[0184] The calibration fixture 300, for example, also includes a frame moving portion for moving the frame portion 40 together with the plurality of elements to be measured 31. The frame moving portion includes an actuator such as a motor, etc., and moves the frame portion 40 in a plurality of predetermined directions. In addition, the frame moving portion can rotate the frame portion 40 around an axis oriented in a predetermined direction. The frame moving portion is, for example, configured so that it can move the plurality of elements to be measured 31 in the X direction, the Y direction, and the Z direction. In addition, the frame moving portion can be configured so that it can rotate the plurality of elements to be measured 31 around the X direction, the Y direction, and the Z direction as rotation axes. In this way, the measuring device 10 can identify the calibration parameters to be used for calibration by moving the frame portion 40 of the calibration fixture 300 without moving the stage 110.

[0185] For example, in Figure 4 In S54 of the illustrated operation flow, the control unit 240 photographs the calibration jig 300 arranged at the first reference position. The first imaging unit 132a photographs the calibration jig 300 so that some first elements 31a to be measured among the plurality of elements 31 to be measured disposed in the calibration jig 300 are included in the field of view of the first imaging unit 132a. The second imaging unit 132b different from the first imaging unit 132a photographs the calibration jig 300 so that some second elements 31b to be measured different from the first elements 31a to be measured photographed by the first imaging unit 132a are included in the field of view of the second imaging unit 132b.

[0186] The photographing of the calibration jig 300 in S58, S59, S61 and S63 is the same as the photographing in S54. In addition, in S55, S57, S60 and S62, the control unit 240 may move the stage 110, or alternatively, may move the calibration jig 300 by controlling the frame moving unit of the calibration jig 300.

[0187] Then, in S64, the measuring unit 243 analyzes the label portion 33 of the component to be measured 31 from the captured image captured by the first imaging unit 132a to identify the first component to be measured 31a. The measuring unit 243 identifies a first coordinate position indicating the position of the identified first component to be measured 31a in the first coordinate system based on the field of view of the first imaging unit 132a.

[0188] Similarly, the measuring unit 243 analyzes the label portion 33 of the component to be measured from the captured image captured by the second imaging unit 132b to identify the second component to be measured 31b. The measuring unit 243 identifies a second coordinate position indicating the position of the identified second component to be measured 31b in the second coordinate system based on the field of view of the second imaging unit 132b.

[0189] After S64 , as described above, calibration parameters for calibrating the first imaging unit 132 a and the second imaging unit 132 b may be identified based on the positional relationship between the identified first component to be measured 31 a and the identified second component to be measured 31 b .

[0190] In addition, Figure 4 In S51 and S52 of the illustrated operation flow, an example is described of calibrating each optical unit 130 using a reference jig smaller in size than the calibration jig 30. Here, since the calibration jig 300 of the second configuration example can be made smaller in size than the calibration jig 30, the calibration jig 300 can also be used as a reference jig.

[0191] For example, by storing in advance in the storage unit 220 or the like at least the measured dimensions and positional relationships of a subset of the plurality of elements 31 to be measured, the calibration jig 300 can be used as a reference jig. In other words, the measuring device 10 can perform the measurement using one calibration jig 300. Figure 4 The operation flow shown.

[0192] <Third Configuration Example of Calibration Jig>

[0193] It has been described above that the calibration fixture can be configured so that a plurality of elements to be measured can be moved while maintaining their relative positional relationship. Figures 8 to 14A and Fig. 14B An example of such a calibration fixture is described.

[0194] Figure 8 is a side view of a calibration fixture 300A according to one aspect of the present disclosure. Fig. 9 It is shown from Figure 8 FIG. 3 is a diagram of a state where the calibration jig 300A is removed from the frame member. Fig.10 is a perspective view of the calibration jig 300A in a state where the frame members are removed. Fig.11It is a perspective view of the calibration jig 300A in a state where the frame members are removed, viewed from another direction.

[0195] like Figure 8 As shown, the calibration jig 300A includes a plurality of elements to be measured 331, a frame portion 340, and a mechanism portion 400. Since the elements to be measured 331 and the frame portion 340 have the same configuration as the above-mentioned elements to be measured 31 and the frame portion 40, a detailed description thereof is omitted. One of the features of the calibration jig 300A is that the plurality of elements to be measured 331 and the frame portion 340 can be surrounded by the mechanism portion 400. Fig.11 The various axes of movement shown are: the central axis Lx (roll axis), the central axis Ly (pitch axis) and the central axis Lz (yaw axis).

[0196] like Figure 8 As shown in FIG. 1 , the element to be measured 331 includes a main body 332 and a label 333. For example, the main body 332 is a sphere. The label 333 is an annular plate-like member disposed on the outer circumference of the main body 332. Figure 6 The label portion is the same as that illustrated in FIG. 1 and includes a display of an identification code for identifying the component to be measured 331 .

[0197] The frame portion 340 is a member that forms the outer peripheral surface of a sphere, and a plurality of elements to be measured 331 are attached to the outer peripheral surface. Figure 8 and Fig. 9 As shown, the frame portion 340 includes a frame member 341 , a columnar member 342 , and a base 343 .

[0198] As reference Figure 7 As described above, the frame member 341 has an outer periphery formed in an arc shape. The frame member 341 is removably attached to the columnar member 342. Figure 8 In the example of FIG. 3 , a plurality of frame members 341 are arranged to extend radially around the columnar member 342. The plurality of frame members 341 arranged in this manner form a spherical outer peripheral surface to which the element to be measured 331 is attached.

[0199] For example, a plurality of frame members 341 are connected to each other as a spherical subassembly. The spherical subassembly is removably attached to the columnar member 342.

[0200] The spherical outer peripheral surface formed by the plurality of frame members 341 is not completely closed and an opening 340h ( Figure 8 As described above, since a part of the sphere is open, a part of the mechanism part 400 can be inserted into the sphere.

[0201] like Fig. 9As shown, the frame portion 340 is supported by the mechanism portion 400. Specifically, the frame portion 340 is supported by the mechanism portion 400 by attaching a base 343 on which a columnar member 342 is provided to a support member 403 (described in detail later).

[0202] (Organization Department 400)

[0203] The mechanism unit 400 is, for example, a mechanism that moves the frame unit 340 in a predetermined direction on a stage of a coordinate measuring machine.

[0204] like Fig. 9 As shown, the mechanism portion 400 includes a support body 401 , a support member 403 , a rotating mechanism 405 , a first swing mechanism 410 , and a second swing mechanism 420 .

[0205] The support body 401 extends in the Z-axis direction, and supports various components constituting the mechanism portion 400. Specifically, the support body 401 supports the first swing mechanism 410, the second swing mechanism 420, and the support member 403.

[0206] The support member 403 supports the frame portion 340 and is disposed on the upper portion of the support body 401. Fig.10 and Fig.11 As shown, as an example, the support member 403 is a plate-shaped member. For example, the outer shape of the support member 403 is a quadrilateral. Fig.11 As shown, the support member 403 is configured to be able to swing around a central axis Lx extending in the X-axis direction and a central axis Ly extending in the Y-axis direction. The structure for swingably supporting the support member 403 will be described later with reference to other drawings.

[0207] (Rotation mechanism 405)

[0208] Rotating mechanism 405( Fig. 9 ) rotates the frame portion 340 around the center axis Lz in the Z-axis direction. In this example, for example, the rotating mechanism 405 rotates the frame portion 340 360 degrees or more. The rotating mechanism 405 can rotate the frame portion 340 within an angle range less than 360 degrees.

[0209] The rotating mechanism 405 includes a rotating motor 405a as a driving source for generating a driving force for rotating the frame portion 340. As an example, the rotating motor 405a is attached to the bottom of the support member 403. By transmitting the driving force from the rotating motor 405a to the base 343 via a transmission mechanism (not shown), the frame portion 340 rotates around the central axis Lz in the Z-axis direction. It should be noted that although the frame portion 340 rotates on the support member 403, the support member 403 itself does not rotate. In this example, the rotating mechanism 405 is arranged so that it is located inside the outline of the support member 403 in a plan view.

[0210] Regarding the arrangement of the rotating mechanism 405, the first swing mechanism 410, and the second swing mechanism 420, for example, it is assumed that all of these mechanisms are centrally arranged at approximately the same position (approximately the same height) in the direction along the central axis Lz. However, in the case of such a configuration, the size (projected area) of the mechanism portion when the mechanism portion is projected in the XY plane becomes large.

[0211] This kind of mechanism section is not suitable for arranging the mechanism section so that a part of the mechanism section is accommodated inside the frame member 341 which is a sphere. Moreover, in a configuration in which this kind of mechanism section is arranged outside the sphere (for example, below the sphere), there is a large structure below the frame member 341. Therefore, it becomes difficult to photograph the element to be measured 331 from below.

[0212] Therefore, in the calibration jig 300A, the first swing mechanism 410 and the second swing mechanism 420 are arranged at a first position in the direction along the central axis Lz, and the rotation mechanism 405 is arranged at a second position closer to the support member 403 than the first position. Fig. 9 As shown, the first linear actuator 415 of the first swing mechanism 410 and the second linear actuator 425 of the second swing mechanism 420 are disposed below the rotating mechanism 405. With this configuration, the rotating mechanism 405, the first swing mechanism 410 and the second swing mechanism 420 can be arranged around the central axis Lz in a compact manner.

[0213] (First Swinging Mechanism 410)

[0214] like Fig.11 As shown, the first swing mechanism 410 swings the frame portion 340 about the central axis Ly. The first swing mechanism 410 includes a first movable portion 411 and a first linear actuator 415 .

[0215] Specifically, the first movable portion 411 includes a first coupling arm 412, a ball joint 413a, and a universal joint 413b. One end of the first movable portion 411 is coupled to the support member 403. The first movable portion 411 moves in the Z-axis direction by receiving a force from the first linear actuator 415, thereby applying a force to the support member 403 to move the support member 403.

[0216] The first linear actuator 415 includes a linear motor 415a and a linear guide 415b. For example, the linear motor 415a moves its movable arm 417 in the Z-axis direction using the driving force of a pulse motor.

[0217] The linear guide 415b is disposed so as to be located between the linear motor 415a and the first movable part 411. The linear guide 415b has a rail disposed to extend in the Z-axis direction and a moving block reciprocating along the rail. The linear guide 415b transmits force from the linear motor 415a to the first movable part 411.

[0218] The first coupling arm 412 couples the first linear actuator 415 and the support member 403. The ball joint 413a is provided at one end (upper end) of the first coupling arm 412. The first coupling arm 412 is coupled to the support member 403 via the ball joint 413a. Specifically, the upper end of the first coupling arm 412 is coupled to the support member 403 at a position close to the outer periphery of the lower side of the support member 403. In the calibration fixture 300A, the ball joint is used as a connection portion between the first movable portion 411 and the support member 403. As described below, similarly, the ball joint 423a is used as a connection portion between the second coupling arm 422 of the second swing mechanism 420 and the support member 403.

[0219] The centers of the ball joint 413a and the ball joint 423a may be located in different planes orthogonal to the Z axis, but in the calibration jig 300A, the centers of the ball joint 413a and the ball joint 423a are located in the same plane. The effect of this configuration will be described later together with the description of the rotation center of the frame portion 340.

[0220] The universal joint 413b is provided at the lower end of the first coupling arm 412. The first coupling arm 412 and the first linear actuator 415 are coupled via the universal joint 413b. The universal joint 413b is a component that allows an object to rotate around one axis. Fig.11 In the example of FIG. 4 , the first coupling arm 412 is coupled to the movable arm 417 of the first linear actuator 415 through a universal joint 413 b that rotatably supports the first coupling arm 412 about a central axis (about one axis) parallel to the direction of the central axis Ly. A ball joint may be used at this connection point, but by using a ball joint such as Fig.11 The universal joint shown improves the moving accuracy of the first coupling arm 412. As a result, the position accuracy of the support member 403 and the plurality of elements to be measured 331 that move together with the support member 403 can be improved.

[0221] (Second Swing Mechanism 420)

[0222] The second swing mechanism 420 is the same as the first swing mechanism 410 except that (i) the arrangement position of the mechanism portion 400 is different from the arrangement position of the first swing mechanism 410 and (ii) the lower end of the second coupling arm 422 is a ball joint 423b. The second swing mechanism 420 swings the frame portion 340 around the central axis Lx. Fig.11As shown, the second swing mechanism 420 is arranged at a position offset by 90 degrees in the circumferential direction of the center axis Lz with respect to the first swing mechanism 410 .

[0223] The second swing mechanism 420 includes a second movable portion 421 and a second linear actuator 425 in the same configuration as the first swing mechanism 410. The second movable portion 421 includes a second coupling arm 422, a ball joint 423a, and a ball joint 423b.

[0224] One end of the second movable portion 421 is coupled to the supporting member 403. The second movable portion 421 moves in the Z-axis direction by receiving a force from the second linear actuator 425, thereby applying a force to the supporting member 403 to move the supporting member 403.

[0225] The linear motor 425a moves its movable arm 427 in the Z-axis direction using the driving force of the pulse motor. The linear guide 425b transmits the force from the linear motor 425a to the second coupling arm 422.

[0226] The second coupling arm 422 couples the second linear actuator 425 and the support member 403. A ball joint 423a and a ball joint 423b are respectively provided at the upper end and the lower end of the second coupling arm 422. Similar to the first movable portion 411, the second coupling arm 422 is coupled to the lower surface of the support member 403 via the ball joint 423a. In this example, the distance from the center axis Lx to the ball joint 413a (the distance in the plan view) is the same as the distance from the center axis Lx to the ball joint 423a (the distance in the plan view).

[0227] A universal joint may be used to couple the second coupling arm 422 and the second linear actuator 425. In the case of a configuration in which a universal joint is used for both the first coupling arm 412 and the second coupling arm 422, it is expected that the positional accuracy of the frame portion 340 and the element to be measured 331 attached to the frame portion 340 will be improved. However, when assembling the mechanism portion 400, high dimensional accuracy will be required. Therefore, in a calibration jig of one embodiment of the present disclosure, as shown in FIG. Fig.11 As shown, a universal joint is used for the first coupling arm 412 and a ball joint is used for the second coupling arm 422. Whether to use a ball joint or a universal joint at the end of the coupling arm may be appropriately selected depending on the required accuracy of the calibration fixture and other factors.

[0228] The mechanism part 400 configured as described above is set in shape so that when the mechanism part 400 and the frame part 340 are viewed by projecting the mechanism part 400 and the frame part 340 in the Z direction, the mechanism part 400 is stored inside the circle that is the outer shape of the frame part 340. According to this configuration, the projection area of ​​the calibration jig 300A is reduced. In addition, it is easy to photograph the plurality of components to be measured 331 arranged in a spherical shape from below.

[0229] (Swing of the Support Member 403 and the Frame Part 340 Supported Thereby)

[0230] Fig.12 It is an enlarged view of the structure which supports the frame part 340 so that swingability among the mechanism parts. Fig.13 3 is a diagram showing the positional relationship between the frame portion 340 and the rotation center 455a. Fig.14A and Fig. 14B Each schematically shows the support member 403 and the swing of the frame portion 340 supported by the support member 403 .

[0231] like Fig.12 and Fig.13 As shown, the support member 403 is coupled to the central pillar 402 via a ball joint 455 provided at the upper end of the central pillar 402 of the support body 401. By doing so, the support member 403 is provided to be reorientable relative to the central pillar 402 within the range of motion of the ball joint 455. Specifically, the support member 403 is provided so that it can change its orientation around a rotation center 455a, wherein the rotation center 455a is the center of the ball of the ball joint 455.

[0232] like Fig.12 and Fig.13 As shown in FIG. 1 , the state in which the central support 402 of the mechanism portion 400 and the columnar member 342 of the frame portion 340 extend along the central axis Lz is the initial state of the calibration jig 300A. In this state, the plate-like support member 403 extends in a plane orthogonal to the central axis Lz. The central axis Lx ( Fig.11 ) and the center axis Ly pass through the rotation center 455a and are orthogonal to each other.

[0233] like Fig.13 As shown, the frame portion 340 is arranged so that the spherical center of the frame member 341 coincides with the rotation center 455a. Since the rotation center 455a and the spherical center of the frame member 341 are located at the same position as described above, when the support member 403 swings, the sphere of the frame member 341 rotates around its center as the rotation center. This configuration does not require complicated calibration calculations based on captured images of a plurality of components 31 to be measured.

[0234] (Operation of Calibration Jig 300A)

[0235] like Fig.14A As shown, for example, by operating the second linear actuator 425 of the second swing mechanism 420 , the second movable portion 421 moves from the initial state of the calibration jig 300A.

[0236] Then, if Fig. 14BAs shown, the support member 403 is pushed upward by the second movable portion 421, so that the support member 403 swings together with the frame portion 340 on the support member 403. Specifically, the frame portion 340 swings around the central axis Lx by a predetermined angle. Fig.14A In the case where the state of being retracted in the direction opposite to the advancing direction, the frame portion 340 is swung in the opposite direction compared to the above description.

[0237] Although Fig.14A and Fig. 14B Although not shown in the drawings, when the first movable portion 411 is moved by operating the first linear actuator 415 of the first swing mechanism 410, the frame portion 340 swings around the central axis Ly by a predetermined angle.

[0238] The rotating mechanism 405 can be operated in the above-described manner when the frame portion 340 rotates around the central axis Lz. The frame portion 340 can rotate in a clockwise direction or a counterclockwise direction.

[0239] As described above, in the calibration jig 300A, the frame portion 340 can be moved in a desired direction by appropriately operating each of the rotating mechanism 405 , the first swing mechanism 410 , and the second swing mechanism 420 independently.

[0240] (Effect of Calibration Fixture 300A)

[0241] According to the calibration jig 300A described above, the mechanism section 400 including the rotation mechanism 405 that rotates the frame section 340 around the central axis Lz, the first swing mechanism 410 that swings the frame section 340 around the central axis Ly, and the second swing mechanism 420 that swings the frame section 340 around the central axis Lx is provided. Therefore, by operating each mechanism, the element to be measured 331 can be moved in a desired direction.

[0242] In particular, since the operations of the rotating mechanism 405, the first swing mechanism 410 and the second swing mechanism 420 correspond to the yaw component, the pitch component and the roll component, respectively, it is easy to control these mechanisms. In order to swing the frame part 340 around the central axis Lx or the central axis Ly, for example, the following configuration can be conceived: the frame part 340 is moved around a predetermined axis by operating the first swing mechanism 410 and the second swing mechanism 420 at the same time. However, in this case, since the synchronous control of the two mechanisms is required, it becomes complicated to control them. In addition, since the trajectory along which the support member 403 moves becomes complicated, it is worried that the positioning accuracy of the multiple elements to be measured 331 may be reduced. On the contrary, in the calibration fixture 300A, the frame part 340 can be swung by the independent operation of the first swing mechanism 410 or the second swing mechanism 420. Therefore, complex control is not required, and the position accuracy of the frame part 340 can be improved.

[0243] In the calibration jig 300A, the first swing mechanism 410 and the second swing mechanism 420 each use a linear actuator to operate the moving portion. In order to make the frame portion 340 swing around the center axis Lx or the center axis Ly, for example, a configuration using a rotating mechanism such as the rotating mechanism 405 can be conceived. However, according to a configuration such as using a linear actuator in the calibration jig 300A, it is not necessary to arrange various mechanisms near the rotation center 455a compared to the rotating mechanism. Therefore, the mechanism near the rotation center 455a can be miniaturized. Fig.11 As shown, this configuration is particularly advantageous in a configuration in which a portion of the mechanism portion 400 is arranged inside the frame portion 340 .

[0244] In the calibration fixture 300A, as Fig.11 As shown, the center of the ball joint 413a and the center of the ball joint 423b are located in the same plane. In addition, the rotation center 455a is located in the plane. According to this configuration, the support member 403 and the frame portion 340 supported by the support member 403 can be properly moved around the rotation center 455a according to the operation of the first swing mechanism 410 and the second swing mechanism 420.

[0245] <Modification>

[0246] Although the specific structure of the calibration jig 300A has been described above, the calibration jig 300A is not necessarily limited to the above structure. For example, when the size of the frame portion 340 is large enough, not only a part of the mechanism portion 400 but also the entire mechanism portion 400 can be arranged inside the frame portion 340.

[0247] As described above, since the shape of the frame portion 340 is not limited to a sphere, a part or all of the mechanism portion 400 may be arranged inside the elliptical frame portion 340 , for example.

[0248] The mechanism portion 400 may further include an XY stage at a lower portion thereof, and may have a configuration in which the frame portion 340 may be moved to any position within the XY plane by operating the XY stage.

[0249] The present invention has been described based on the exemplary embodiments. The technical scope of the present invention is not limited to the scope described in the above embodiments, and various changes and modifications can be made within the scope of the present invention. For example, all or part of the device can be configured with any unit that is functionally or physically dispersed or integrated. In addition, new exemplary embodiments generated by any combination of the exemplary embodiments are included in the exemplary embodiments. In addition, the effects of the new exemplary embodiments brought about by the combination also have the effects of the original exemplary embodiments.

Claims

1. A calibration fixture for calibrating a measuring device for measuring a three-dimensional geometric shape of a measuring object, the calibration fixture comprising: Multiple components to be measured; a frame portion to which the plurality of elements to be measured are attached; as well as a mechanism portion, for moving the frame portion, The organization department includes: a rotating mechanism for rotating the frame portion around a first axis; a first swing mechanism for swinging the frame portion around a second axis orthogonal to the first axis; and The second swing mechanism is used to swing the frame portion around a third axis that is orthogonal to the first axis and the second axis.

2. The calibration fixture according to claim 1, wherein: The mechanism portion includes a support member for supporting the frame portion, The first swing mechanism comprises: a first movable portion coupled to the support member; and a first linear actuator for moving the first movable portion, and The first swing mechanism is configured such that the support member is swung about the second axis by causing the first linear actuator to move the first movable portion.

3. The calibration fixture according to claim 2, wherein: The second swing mechanism comprises: a second movable portion coupled to the support member; and a second linear actuator for moving the second movable portion, The second swing mechanism is configured such that the support member is swung about the third axis by moving the second movable portion by the second linear actuator.

4. The calibration fixture according to claim 3, wherein: The connection part between the first movable part and the supporting member and the connection part between the second movable part and the supporting member are ball joints (413a, 423a), the center parts of multiple ball joints are located in a plane orthogonal to the first axis, and the rotation center of the supporting member is located in the plane.

5. The calibration fixture according to claim 4, wherein: The first movable portion includes a first coupling arm, One end of the first coupling arm is provided with the ball joint, and the other end of the first coupling arm is coupled to the first linear actuator, and The first coupling arm and the first linear actuator are coupled via a universal joint that rotatably supports the first coupling arm about an axis.

6. The calibration fixture according to claim 5, wherein: The second movable portion includes a second coupling arm, One end of the second coupling arm is provided with the ball joint, and the other end of the second coupling arm is coupled to the second linear actuator, and The second coupling arm and the second linear actuator are coupled via a universal joint that rotatably supports the second coupling arm about an axis.

7. The calibration fixture according to claim 3, wherein: The rotating mechanism includes a driving source that generates a driving force for rotating the frame portion. The first linear actuator and the second linear actuator are arranged at a first position in a direction along the first axis, and A driving source of the rotating mechanism is arranged at a second position closer to the supporting member than the first position in the direction along the first axis.

8. The calibration fixture according to claim 1 or 2, wherein: The frame portion has a spherical or ellipsoidal shape on the surface of which the plurality of elements to be measured are arranged, and At least a portion of the mechanism portion is disposed so as to be located inside the sphere or ellipsoid of the frame portion.

9. The calibration fixture according to claim 8, wherein: The frame portion is arranged so that the center of the sphere or the ellipsoid is located at the rotation center which is the intersection of the second axis and the third axis.

10. The calibration fixture according to claim 8, wherein: The mechanism portion has a shape in which the entirety of the mechanism portion is located inside an outer shape of the frame portion when viewed by projecting the mechanism portion and the frame portion in the direction of the first axis.

11. The calibration fixture according to claim 1 or 2, wherein: The element to be measured includes: a main body portion having a predetermined shape; and A label portion is provided on the main body portion or on a member attached to the main body portion, wherein an identification code for identifying the element to be measured is shown in the label portion.

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