Magnetic coupling system for vacuum equipment

Abstract

The invention belongs to the technical field of vacuum equipment, and discloses a magnetic coupling system for vacuum equipment, and the system comprises a cylindrical isolation sealing cover with one end in sealed connection with a vacuum chamber and the other end fixedly connected with a transmission shaft of a drive motor; the driving unit magnet is arranged on the outer side of the isolation sealing cover and is fixedly connected with the driving motor body; the driven unit magnet is arranged on the inner side of the isolation sealing cover and used for moving under the driving of a magnetic field generated by the driving unit magnet when the driving unit magnet moves, and the driven unit magnet penetrates into the vacuum chamber from the isolation sealing cover and is connected with the power input end of a load mechanism. Efficient transmission of power is achieved, the transmission error of the intermediate link is reduced, and the transmission precision is high.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum equipment, and more specifically, to a magnetic coupling system for vacuum equipment. Background Art

[0002] In the manufacturing process of vacuum equipment, in order to improve production efficiency and product quality, it is necessary to accurately control the processing conditions. In particular, in operations that need to be performed in a vacuum environment, non-contact force transmission mechanisms are particularly important. As a non-contact force transmission method, the magnetic coupling system has broad application prospects in vacuum equipment.

[0003] The magnetic coupling system for vacuum equipment currently on the market mainly relies on the interaction between magnets to transmit force or signal. This system can achieve a certain force transmission, but due to the limited adjustment range of magnetic field strength, it is difficult to adapt to changing process requirements.

[0004] In addition, some systems use pulleys to connect magnets, and use an external driving mechanism to drive the pulleys to rotate, thereby driving the magnets to move, thereby achieving force transmission in the vacuum equipment.

[0005] The disadvantages of the above solutions include:

[0006] Insufficient precision: In high-precision applications, existing magnetic coupling systems may cause the internal driven mechanism to idle due to insufficient magnetic field strength.

[0007] Wear problem: The pulley belt may wear out after long-term use and needs to be checked and replaced regularly.

[0008] Large space occupation: Systems using belt drives usually require a large space to accommodate the belt and its supporting structure, which is a problem in vacuum equipment with limited space.

[0009] Therefore, there is an urgent need to study magnetic coupling systems that can transmit magnetic power reliably and efficiently and occupy less space. Summary of the invention

[0010]

Technical issues

[0011] In order to solve the above-mentioned problems, the purpose of the present application is to provide a reliable and efficient transmission system for vacuum equipment, reduce maintenance costs, and improve the overall performance of the equipment.

[0012]

Technical solution

[0013] In order to achieve the above-mentioned purpose, the present application provides a magnetic coupling system for vacuum equipment, comprising:

[0014] The isolation sealing cover is cylindrical, one end of which is sealed and connected to the vacuum chamber, and the other end is fixedly connected to the drive shaft of the driving motor;

[0015] A drive unit magnet is arranged on the outside of the isolation sealing cover and is fixedly connected to the drive motor body;

[0016] The passive unit magnet is arranged on the inner side of the isolation sealing cover, and is used to move under the driving force of the magnetic field generated by the driving unit magnet when the driving unit magnet moves. The passive unit magnet penetrates from the isolation sealing cover into the vacuum chamber and is connected to the power input end of the load mechanism.

[0017] Optionally, the drive motor is a rotary motor.

[0018] Optionally, an outer support frame is arranged around the outer side of the isolation sealing cover, the drive unit magnet is fixedly connected to the outer support frame, and the outer support frame is fixedly connected to the drive motor body.

[0019] Optionally, an inner support frame is provided in the isolation sealing cover, the driven unit magnet is fixedly connected to the inner support frame, and the end of the inner support frame extends from one end of the isolation sealing cover that is sealed with the vacuum chamber into the vacuum chamber and is fixedly connected to the power input end of the load mechanism.

[0020] Optionally, the isolation sealing cover is fixedly connected to the drive motor transmission shaft via a coupling.

[0021] Optionally, the isolation sealing cover is made of non-magnetic material.

[0022] Optionally, it also includes a sensing unit, which includes a sensor and a sensing plate, the sensing plate is fixedly connected to the inner support frame, and the sensor is installed in an isolation sealing cover. When the sensor detects that the sensing plate reaches the process position of the load mechanism, it sends a stop command to the drive motor.

[0023] Optionally, the drive motor is a DC servo motor.

[0024] Optionally, the drive motor is a linear motor.

[0025]

Beneficial Effects

[0026] As described above, the present application provides a novel magnetic coupling system for vacuum equipment, which uses magnetic coupling of internal and external permanent magnets to achieve transmission, solves the problems of wear and electromagnetic interference in the existing transmission system, and improves the stability and efficiency of the transmission, which has the following beneficial effects:

[0027] (1) Since the rotation of the drive motor body directly drives the outer support frame and the drive unit magnet to rotate, the power transmission path is relatively more direct, compared with the structure in which the drive shaft rotates and then drives the drive unit magnet through a belt, efficient power transmission is achieved.

[0028] (2) Since the rotation of the drive motor body directly drives the outer support frame and the drive unit magnet to rotate, the power transmission path is relatively more direct. Compared with the structure in which the transmission shaft rotates and then drives the drive unit magnet through a belt, the transmission error in the intermediate links is reduced and the transmission accuracy is high.

[0029] (3) Since there is no need to reserve additional space for the rotation of the transmission shaft, for example, there is no need to consider the swing space and safety distance when the transmission shaft rotates, the space can be used more effectively in equipment design. The locking structure of the transmission shaft can make the entire transmission structure more compact in spatial layout.

[0030] (4) The driving unit magnet and the passive unit magnet are separated by an isolation sealing cover, providing a reliable bearing structure for connecting the driving unit magnet with the driving motor body and the passive unit magnet with the load mechanism, thereby ensuring that the load mechanism can achieve smooth transmission.

[0031] (5) Since the transmission error in the intermediate links is reduced, the force on the connecting components is more reasonable, making the connecting components less likely to fail and reducing equipment downtime.

[0032] (6) The power is transmitted by magnetic coupling, which is not affected by environmental factors such as temperature and humidity. It can work normally in various harsh environments, improve the stability of the equipment, and ensure the reliability of power transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a schematic diagram of a magnetic coupling system for vacuum equipment according to an embodiment of the present application.

[0034] Figure 2 It is a schematic diagram of an inner support frame according to an embodiment of the present application.

[0035] Figure 3 is a schematic diagram of a sensing unit according to an embodiment of the present application.

[0036] [Brief Description of Reference Numerals]

[0037] 100: drive unit magnet 110: outer support frame

[0038] 200: driven unit magnet 210: inner support frame

[0039] 300: Isolation seal cover 400: Drive motor transmission shaft

[0040] 410: driving motor body 500: connecting member

[0041] 510: first connection part 520: second connection part

[0042] 600: Sensing unit 610: Sensor

[0043] 620: Induction board DETAILED DESCRIPTION

[0044] Hereinafter, the wafer preheating device for a wafer alignment chamber according to an embodiment of the present application will be described in detail with reference to the accompanying drawings. However, in the process of describing the present application, in order to make the subject of the present application clear, the specific description of the well-known functions or structures will be omitted.

[0045] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. Among them, "fixed connection" means that the two are connected to each other and the relative position relationship after the connection remains unchanged. "Rotational connection" means that the two are connected to each other and can rotate relative to each other after the connection. The directional terms mentioned in the embodiments of the present application, such as "upper", "lower", "inner", "outer", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present application, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0046] The magnetic coupling system for vacuum equipment of this embodiment utilizes the magnetic field generated by the external permanent magnet to drive the movement of the internal permanent magnet through the magnetic coupling principle, and can convert the magnetic field energy into mechanical energy, thereby realizing contactless power transmission from outside the vacuum chamber to inside the vacuum chamber.

[0047] Please refer to Figure 1 The magnetic coupling system for vacuum equipment of this embodiment includes a driving unit magnet 100, which is arranged outside the vacuum chamber and fixedly connected to the driving motor body, and is used to drive the passive unit magnet 200 to move; the passive unit magnet 200 is arranged in an isolation sealing cover 300, and is used to move under the driving force of the magnetic field generated by the driving unit magnet 100 when the driving unit magnet 100 moves; the isolation sealing cover 300 is fixedly connected to the vacuum chamber at one end, and fixedly connected to the driving motor transmission shaft 400 at the other end.

[0048] The isolation sealing cover 300 is a cylindrical shell, and the interior of the isolation sealing cover 300 is used to place the passive unit magnet 200. The upper and lower ends of the isolation sealing cover 300 have connection structures, one end is fixedly connected to the outer wall of the vacuum chamber, and forms a reliable sealing structure with the vacuum chamber to prevent gas leakage in the vacuum chamber and maintain the sealing state of the vacuum chamber. The other end is fixedly connected to the drive motor transmission shaft. Since one end of the isolation sealing cover 300 is fixedly connected to the vacuum chamber, the drive motor transmission shaft 400 cannot rotate.

[0049] The installation position of the isolation sealing cover 300 is related to the position of the power input end of the load mechanism in the vacuum chamber, so the installation position of the isolation sealing cover can be set according to the position of the power input end of the load mechanism in the vacuum chamber.

[0050] For example, if the power input end of the load mechanism is at the bottom of the vacuum chamber, the isolation sealing cover 300 can be installed below the outer side of the vacuum chamber, and the upper end of the isolation sealing cover 300 is fixedly connected to the lower end of the vacuum chamber to form a reliable sealing structure with the vacuum chamber. The lower end of the isolation sealing cover 300 is fixedly connected to the drive shaft of the drive motor.

[0051] For example, the power input end of the load mechanism is at the upper part of the vacuum chamber. Then the isolation sealing cover 300 can be installed above the outer side of the vacuum chamber, and the lower end of the isolation sealing cover 300 is fixedly connected to the upper end of the vacuum chamber to form a reliable sealing structure with the vacuum chamber. The upper end of the isolation sealing cover 300 is fixedly connected to the drive shaft of the driving motor, for example, it can be connected by various fasteners.

[0052] For example, if the power input end of the load mechanism is on the left side inside the vacuum chamber, the isolation sealing cover 300 can be installed on the left side outside the vacuum chamber, and the right end of the isolation sealing cover is fixedly connected to the left side outside the vacuum chamber to form a reliable sealing structure with the vacuum chamber. The left end of the isolation sealing cover 300 is fixedly connected to the drive shaft of the drive motor, for example, by various fasteners.

[0053] The end of the isolation sealing cover 300 connected to the outer side of the vacuum chamber can be connected through a flange, which can be fixedly connected to the end of the isolation sealing cover by welding or the like, or can be integrally formed with the isolation sealing cover. Bolts are passed through the flange to fix the isolation sealing cover to the outer wall of the vacuum chamber.

[0054] The load mechanism can be designed into various forms according to specific application scenarios, such as a rotating shaft, a linear actuator, etc. The drive motor can be a rotating motor, and the drive motor transmission shaft outputs rotational power. When the end of the isolation sealing cover 300 is fixedly connected to the drive motor transmission shaft 400, the transmission shaft is in a locked state. Conventionally, the motor body, which is fixed in a fixed position such as a foundation or a mounting seat, is in a relaxed state, that is, no fixing measures are taken for the drive motor body. In this case, when a driving voltage is input to the rotating motor, the drive motor transmission shaft cannot rotate, but the rotating motor body will rotate.

[0055] The drive unit magnet 100 can be a permanent magnet, and this embodiment does not exclude that it can be an electromagnet, which surrounds the outer side of the isolation seal cover, and one end of it is fixedly connected to the drive motor body. Specifically, an outer support frame 110 can be provided around the outer side of the isolation seal cover, and the drive unit magnet 100 can be fixedly connected to the outer support frame, and the outer support frame 110 is fixedly connected to the drive motor body 410. The function of the outer support frame structure is to fix the drive unit magnet 100 to ensure that the drive unit magnet 100 can rotate stably. When the drive motor is started, since the transmission shaft is in a locked state, this forces the drive motor body to generate rotational power. The rotation of the drive motor body 410 will drive the outer support frame 110 to rotate, thereby driving the drive unit magnet 100 to rotate, and the generated magnetic field drives the passive unit magnet 200 to follow the rotation, thereby driving the load mechanism in the vacuum chamber to move and realize power transmission.

[0056] The driving unit magnet 100 may be cylindrical, or may be a plurality of magnets installed on the outer support frame at intervals along the circumferential direction around the isolation sealing cover.

[0057] The passive unit magnet 200 may be a permanent magnet, and this embodiment does not exclude that it may be an electromagnet, which is placed in the isolation sealing cover 300. Specifically, an inner support frame 210 may be provided inside the isolation sealing cover 300, and the passive unit magnet 200 is fixedly mounted on the inner support frame 210. The end of the inner support frame 210 extends from the end of the isolation sealing cover 300 that is fixedly connected to the vacuum chamber into the vacuum chamber, and the end of the inner support frame 210 that extends into the vacuum chamber is fixedly connected to the power input end of the load mechanism, for example, it may be connected by various fasteners. The inner support frame 210 can ensure that the passive unit magnet 200 is correctly aligned with the driving unit magnet 100.

[0058] Since the inner support frame 210 is fixedly connected to the passive unit magnet 200, the passive unit magnet 200 follows the operation under the drive of the magnetic field of the driving unit magnet, thereby making the inner support frame fixedly connected thereto follow the operation, thereby inputting power to the power input end of the load mechanism.

[0059] In some embodiments, the passive unit magnet 200 and the driving unit magnet 100 are arranged radially, that is, the passive unit magnet 200 is disposed inside the isolation sealing cover and radially inside the driving unit magnet 100. The magnetization direction of the passive unit magnet 200 is consistent with that of the driving unit magnet 100 to ensure maximum coupling efficiency.

[0060] In some embodiments, the isolation sealing cover is designed to be a non-magnetic material, allowing the magnetic field to penetrate to achieve magnetic coupling and avoiding interference with the uniform distribution of the magnetic field.

[0061] In some embodiments, a connecting member 500 can be used to connect the drive motor transmission shaft 400 with the isolation sealing cover 300, and the drive motor body 410 can be fixedly connected with the outer support frame 110, so that the motor transmission shaft is in a locked state, and the drive motor body rotates. Specifically, the connecting member may include a first connecting portion 510 and a second connecting portion 520, one end of the first connecting portion 510 is fixedly connected to the end of the isolation sealing cover 300, and the other end is fixedly connected to the drive motor transmission shaft 400, so that the drive motor transmission shaft 400 is fixedly connected to the isolation sealing cover 300. The first connecting portion 510 can be a coupling. One end of the second connecting portion 520 is fixedly connected to the outer support frame 110, that is, fixedly connected to the drive unit magnet 100, and the other end of the second connecting portion is fixedly connected to the drive motor body 410. Thereby, the movement of the drive motor body can be transmitted to the drive unit magnet 100. The second connecting portion 520 can be one or more connecting rods, or a connecting cylinder surrounding the outer periphery of the coupling.

[0062] The first connection part and the second connection part can be split, that is, there is no connection relationship between the first connection part 510 and the second connection part 520. The first connection part 510 can use a coupling to fix the drive motor transmission shaft 400 and the isolation sealing cover 300, and the second connection part 520 is used to fix the drive motor body 410 and the drive unit magnet 100.

[0063] The present application also does not exclude that the first connection part 510 and the second connection part 520 may form a set through a connection relationship. For example, the second connection part is cylindrical and is sleeved on the outer periphery of the first connection part. A bearing is installed between the first connection part 510 and the second connection part 520, and the inner ring of the bearing is fixedly connected to the first connection part, and the outer ring of the bearing is fixedly connected to the second connection part. The first connection part 510 and the second connection part 520 are connected as a set through the bearing. When the drive motor body and the drive unit magnet 100 are running, the drive motor drive shaft and the first connection part and the isolation sealing cover are all fixed.

[0064] In some embodiments, a sensing unit 600 is also included, and the sensing unit 600 includes a high-precision sensor 610 and a sensing plate 620 matched therewith, and the sensing plate 620 can be fixedly connected to the passive unit magnet 200, or fixedly connected to the inner support frame. When the passive unit magnet 200 rotates, the sensing plate 620 follows the rotation. The sensor 610 is installed at a certain position on the circumference inside the isolation sealing cover 300, and the position corresponds to the process position of the load mechanism. When the sensor detects the sensing plate, it means that the load mechanism has rotated to the process position. The sensor 610 sends a signal to the drive motor, and the drive motor stops running immediately. At this time, the position of the load mechanism is the process position, which ensures the precise positioning of the process operation.

[0065] The drive motor adopts an advanced DC servo motor with high controllability and precision. It can be set in situ to meet the precise initial position requirements under different process requirements, providing a strong guarantee for the stable operation and efficient process operation of the magnetic coupling system.

[0066] In addition, the present application does not exclude that the drive motor may also be a linear motor. For example, when the end of the isolation sealing cover is fixedly connected to the linear motor drive shaft, the drive shaft is in a locked state. The motor body is in a relaxed state, that is, the drive motor body does not take any fixing measures. In this case, when a driving voltage is input to the linear motor, the linear motor drive shaft cannot move in a straight line. The linear motor body, on the other hand, will move in a straight line. As a result, the drive unit magnet 100 makes a linear motion, thereby driving the passive unit magnet to also make a linear motion with the load mechanism.

[0067] As described above, although the preferred embodiments of the present application have been described with reference to, a person skilled in the art should understand that various modifications and variations may be made to the combination of components according to the embodiments of the present application without departing from the technical concept and scope of the present application as described in the claims.

Claims

1. A magnetic coupling system for vacuum equipment, characterized in that: include: The isolation sealing cover is cylindrical, one end of which is sealed and connected to the vacuum chamber, and the other end is fixedly connected to the drive shaft of the driving motor; A drive unit magnet is arranged on the outside of the isolation sealing cover and is fixedly connected to the drive motor body; The passive unit magnet is arranged on the inner side of the isolation sealing cover, and is used to move under the driving force of the magnetic field generated by the driving unit magnet when the driving unit magnet moves. The passive unit magnet penetrates from the isolation sealing cover into the vacuum chamber and is connected to the power input end of the load mechanism.

2. The magnetic coupling system for vacuum equipment according to claim 1, characterized in that: The drive motor is a rotary motor.

3. The magnetic coupling system for vacuum equipment according to claim 2, characterized in that: An outer supporting frame is arranged around the outer side of the isolation sealing cover, the driving unit magnet is fixedly connected to the outer supporting frame, and the outer supporting frame is fixedly connected to the driving motor body.

4. The magnetic coupling system for vacuum equipment according to claim 3, characterized in that: An inner support frame is arranged in the isolation sealing cover, the driven unit magnet is fixedly connected to the inner support frame, and the end of the inner support frame extends from one end of the isolation sealing cover sealed with the vacuum chamber into the vacuum chamber and is fixedly connected to the power input end of the load mechanism.

5. The magnetic coupling system for vacuum equipment according to claim 1, characterized in that: The isolation sealing cover is fixedly connected to the driving motor transmission shaft through a coupling.

6. The magnetic coupling system for vacuum equipment according to claim 1, characterized in that: The isolation sealing cover is made of non-magnetic material.

7. The magnetic coupling system for vacuum equipment according to claim 4, characterized in that: It also includes a sensing unit, which includes a sensor and a sensing plate. The sensing plate is fixedly connected to the inner support frame, and the sensor is installed in an isolation sealing cover. When the sensor detects that the sensing plate reaches the process position of the load mechanism, it sends a shutdown command to the drive motor.

8. The magnetic coupling system for vacuum equipment according to claim 1, characterized in that: The driving motor is a DC servo motor.

9. The magnetic coupling system for vacuum equipment according to claim 1, characterized in that: The drive motor is a linear motor.

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