Post-texturing back contact battery coating furnace tube and air inlet pipeline
By setting three independent air intake pipes and air intake holes in the furnace tube of the solar cell, air flow hedging and mixing is achieved, the problem of high refractive index of the furnace port in the prior art is solved, and the uniformity of the film layer is improved.
Patent Information
- Application Number
- CN202411525162.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-29
- Publication Date
- 2025-02-07
AI Technical Summary
The intake pipeline design of existing solar cells leads to a large flow deposition at the furnace port position, resulting in a higher refractive index than the furnace port, resulting in a difference in the mouth and tail of the entire tube, affecting the uniformity of the film layer.
Three independent intake pipes are adopted, fixed in the furnace pipe through fixed hook points, and air intake holes are set at intervals on the intake pipes to achieve hedging and mixing of air flow and improve the uniformity of gas distribution.
Through the improved air intake pipeline design, the gas mixing is more uniform and the film formation is more uniform, solving the problem of high refractive index on the furnace port.
Smart Images
Figure CN119392212A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of solar cells, and in particular relates to a post-texture-made back-contact cell coating furnace tube and an air intake pipeline. Background Art
[0002] BC cell refers to the back contact cell, an advanced design cell used to improve the efficiency of solar cells. However, due to the basic structural framework of the technical route of the cell, the absence of grid lines on the front makes its light absorption area larger, the light conversion is better, and the requirements for the uniformity of the front film layer are more stringent. The conventional furnace mouth air intake and Y-shaped air intake pipeline method, because its air intake method is from the furnace mouth to the furnace tail, the flow deposition at the furnace mouth position is large, resulting in a higher refractive index at the furnace mouth than at the furnace tail, and there is a difference between the mouth and the tail of the whole tube. Summary of the invention
[0003] In order to solve the above problems, the present invention adopts the following technical solutions:
[0004] A post-textured back contact battery coating furnace tube and an air intake pipeline, comprising:
[0005] A furnace tube, wherein a plurality of groups of fixed hook points are arranged at intervals along the circumferential direction inside the furnace tube, and a plurality of fixed hook points in each group of the fixed hook points are arranged at intervals along the length direction of the furnace tube;
[0006] A plurality of air inlet pipes are provided, and the plurality of air inlet pipes are arranged in one-to-one correspondence with the plurality of groups of fixed hook points. The air inlet pipes have the same extension direction as the furnace tube, and are respectively fixed inside the furnace tube through the corresponding fixed hook points. A plurality of air inlet holes are arranged at intervals along the length direction of the air inlet pipe, and the air flow path directions of the plurality of air inlet holes located at the same cross section all converge at one place to achieve flow offset.
[0007] Furthermore, there are three air inlet pipes, namely a first air inlet pipe, a second air inlet pipe and a third air inlet pipe. The first air inlet pipe is located at the top of the furnace tube, and the second air inlet pipe and the third air inlet pipe are arranged on both sides of the first air inlet pipe opposite to each other.
[0008] Furthermore, one end of the air intake pipe is connected to the peripheral air intake pipeline, and the other end is a blocking structure.
[0009] Furthermore, the air inlet hole on the first air inlet pipe is the first air inlet hole, the air inlet hole on the second air inlet pipe is the second air inlet hole, and the air inlet hole on the third air inlet pipe is the third air inlet hole, and the angle formed by the air flow path direction of the second air inlet hole and the air flow path direction of the third air inlet hole is 45°-75°.
[0010] Furthermore, a quartz ring is provided on the fixed hook point.
[0011] Beneficial effects:
[0012] The present invention changes the air intake pipeline from a Y-shaped air intake pipeline to a three-pipe separate air intake pipeline. The three-pipe air intake pipeline is a gas counter-pressure mode, which can make the gas mixing more uniform and the film forming more uniform.
[0013] The present invention allows air to be taken in through the reserved air inlet holes in the air path, so that the gas in the pipe can be more evenly distributed, and the air intake mode from the mouth to the tail of the Y-shaped air inlet is improved, so that the problem of high refractive index at the furnace mouth can be solved. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a structural schematic diagram of the rear-textured back-contact battery coating furnace tube and the air intake pipeline of the present invention;
[0015] Figure 2 It is a schematic side view of the rear-textured back-contact battery coating furnace tube and the air intake pipeline of the present invention;
[0016] Figure 3 It is a schematic diagram of the pipeline of the present invention;
[0017] Figure 4 A schematic diagram of the gas outlet angle of the pipeline hole of the conventional furnace tube and the air inlet pipeline of the present invention;
[0018] Figure 5 This is a schematic diagram of the structure of a conventional furnace tube and an air intake pipeline of the present invention;
[0019] Figure 6 It is a schematic diagram of the conventional Y-type pipeline structure of the present invention.
[0020] Among them, 1. furnace pipe; 2. first air inlet pipe; 3. second air inlet pipe; 4. third air inlet pipe; 5. fixed hook point; 6. Y-type pipeline. DETAILED DESCRIPTION
[0021] Example 1
[0022] refer to Figure 1-Figure 6 , a post-textured back contact battery coating furnace tube and air intake pipeline, comprising:
[0023] A furnace tube 1, wherein a plurality of fixed hook point groups are arranged at intervals along the circumferential direction inside the furnace tube 1, and a plurality of fixed hook points 5 in each fixed hook point group are arranged at intervals along the length direction of the furnace tube;
[0024] Multiple air inlet pipes are arranged in one-to-one correspondence with multiple groups of fixed hook points. The extension direction of the air inlet pipe is consistent with that of the furnace tube 1, and they are fixed inside the furnace tube 1 through corresponding fixed hook points 5. Multiple air inlet holes are arranged at intervals along the length direction of the air inlet pipe, and the air flow path directions of the multiple air inlet holes located at the same cross-section are all converged at one place to achieve flow offset.
[0025] In this embodiment, a split gas circuit is adopted, and a separate gas circuit layout is made for the gas used, and the furnace tube has a fixed structure for fixing the air inlet pipe, so that the air inlet pipe is fixed in the furnace tube. This design of the pipeline through-mouth tail reserves a corresponding number of air outlet holes in the gas circuit; the distribution pipeline adopts a special gas convection mixing method to make the gas mixing more complete.
[0026] In this embodiment, one end of the air intake pipe is connected to the peripheral air intake pipeline, and the other end is a blocking structure.
[0027] In this embodiment, there are three air inlet pipes, namely a first air inlet pipe 2, a second air inlet pipe 3 and a third air inlet pipe 4. The first air inlet pipe 2 is located at the top of the furnace tube 1, and the second air inlet pipe 3 and the third air inlet pipe 4 are arranged on both sides of the first air inlet pipe 2 opposite to each other.
[0028] In this embodiment, the air inlet hole on the first air inlet pipe 2 is the first air inlet hole, the air inlet hole on the second air inlet pipe 3 is the second air inlet hole, and the air inlet hole on the third air inlet pipe 4 is the third air inlet hole. The angle formed by the air flow path direction of the second air inlet hole and the air flow path direction of the third air inlet hole is 45°-75°.
[0029] In this embodiment, a quartz ring is provided on the fixed hook point 5 .
[0030] The present invention arranges the gas pipelines used for deposition separately by splitting the gas pipelines, designs the furnace tube as an integrated unit with a fixed gas pipeline, and reserves a corresponding number of vents in the pipeline, so that the tail of the air inlet is more uniform, reducing the difference in the tail caused by the original conventional Y-type pipeline 6.
[0031] During the specific implementation, first customize the pipeline according to the length of the furnace tube, and then install the pipeline. Install one pipeline directly above the top of the furnace tube (for passing silane, ammonia, nitrous oxide, or any other gas), and then install one pipeline equidistantly on both sides of the pipeline (for passing silane, ammonia, nitrous oxide, or any other gas). The angles on the left and right sides are 45°-70° to ensure that different gases are introduced at the same time during the process to offset the flow.
[0032] Load the process paddle into the tooling, heat the furnace tube to the set temperature of 450-530℃, maintain a constant temperature of 450-530℃ for 300-800s, evacuate to check for leaks, the leakage rate is required to be 0-35mtoor, start passing deposition gases such as silane, ammonia, and nitrous oxide (or silane, ammonia or silane nitrous oxide), start the RF power supply to deposit silicon nitride / silicon oxide / silicon oxynitride, end the vacuuming, let nitrogen enter the three pipelines for cleaning, evacuate again, flush with nitrogen 10000-50000sccm to return to the atmospheric pressure of 1001pa, and the process paddle is taken out of the tooling fixture, and the robot transfers the boat to automatically unload the film.
[0033] The above description is only a preferred embodiment of the present invention and does not limit the technical scope of the present invention. Therefore, any slight modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.
Claims
1. A post-textured back contact battery coating furnace tube and air intake pipeline, characterized in that: include: A furnace tube, wherein a plurality of groups of fixed hook points are arranged at intervals along the circumferential direction inside the furnace tube, and a plurality of fixed hook points in each group of the fixed hook points are arranged at intervals along the length direction of the furnace tube; A plurality of air inlet pipes are provided, and the plurality of air inlet pipes are arranged in one-to-one correspondence with the plurality of groups of fixed hook points. The air inlet pipes have the same extension direction as the furnace tube, and are respectively fixed inside the furnace tube through the corresponding fixed hook points. A plurality of air inlet holes are arranged at intervals along the length direction of the air inlet pipe, and the air flow path directions of the plurality of air inlet holes located at the same cross section all converge at one place to achieve flow offset.
2. The rear-textured back-contact battery coating furnace tube and air intake pipeline according to claim 1, characterized in that: One end of the air intake pipe is connected to the peripheral air intake pipeline, and the other end is in a blocking structure.
3. The rear-textured back-contact battery coating furnace tube and air intake pipeline according to claim 1, characterized in that: There are three air inlet pipes, namely a first air inlet pipe, a second air inlet pipe and a third air inlet pipe. The first air inlet pipe is located at the top of the furnace tube, and the second air inlet pipe and the third air inlet pipe are arranged on both sides of the first air inlet pipe opposite to each other.
4. The rear-textured back-contact battery coating furnace tube and air intake pipeline according to claim 3 is characterized in that: The air inlet hole on the first air inlet pipe is the first air inlet hole, the air inlet hole on the second air inlet pipe is the second air inlet hole, and the air inlet hole on the third air inlet pipe is the third air inlet hole. The angle formed by the air flow path direction of the second air inlet hole and the air flow path direction of the third air inlet hole is 45°-75°.
5. The rear-textured back-contact battery coating furnace tube and air intake pipeline according to claim 3, characterized in that: A quartz ring is arranged on the fixed hook point.