Adjusting structure applied to top shower of HDP

Abstract

The application provides an adjusting structure applied to a top shower of an HDP, and belongs to the technical field of semiconductor equipment. The adjusting structure comprises a machine table, a plurality of side nozzles, a top shower and a shower lifting device. A circular hole is formed in the surface of the machine table. The lower surface of the machine table is fixedly connected with a connector. The inner wall of the connector is fixedly communicated with the plurality of side nozzles. The top shower is located in the interior of the machine table. The shower lifting device is located on the machine table. The shower lifting device comprises a connecting cavity. The height of the top shower can be adjusted. The top shower can move up and down to change the distribution of reaction gas for different processes. When different gas flow processes are used, the position of the top shower can be adjusted to find the most suitable matching position with the side nozzles, so that the gas reaction on the wafer surface is more uniform, the uniformity of the wafer thickness is optimized, and the problem that the uniformity of the large-flow gas process cannot meet the requirements of customers is solved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and specifically relates to an adjustment structure for an HDP top shower head. Background Technology

[0002] As chip device dimensions decrease, PECVD no longer provides good step coverage when depositing trenches smaller than 0.8µm (8000Å), often resulting in pinch-offs and voids. This is mainly due to the difference in deposition rate at the trench opening and the trench bottom.

[0003] To address the issue of voids in PECVD deposition, HDP was developed. It involves etching immediately after the initial deposition is completed and before the voids are broken, to reopen the gap entrance. Then, deposition is performed again to complete the filling of the entire gap.

[0004] However, HDP (High-Density Polymer) equipment differs significantly from traditional CVD equipment in its structure. One key difference is that the reactant gases are not uniformly sprayed downwards from the spray plate, but rather through side nozzles and a top showerhead. Because the total amount of reactant gases varies considerably across different processes, and the nozzles and showerheads are fixed, this structure presents a problem: the thickness in the area between the wafer's center and edge regions is difficult to adjust by adjusting the gas flow rate. This area is where the air jets from the side nozzles and top showerhead converge, leading to insufficient film thickness uniformity for some high-flow-rate processes, failing to meet customer requirements. Summary of the Invention

[0005] Based on the technical problems existing in the prior art, this invention proposes an adjustment structure for use with HDP top shower heads.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an adjustment structure for an HDP top shower, comprising a machine base, several side nozzles, a top shower head, and a shower head lifting device. The surface of the machine base has a circular hole, and a connector is fixedly connected to the lower surface of the machine base. The inner wall of the connector is fixedly connected to several side nozzles. The top shower head is located inside the machine base, and the shower head lifting device is located on the machine base. The shower head lifting device includes a connecting cavity.

[0007] Furthermore, an installation tube is fixedly connected to the lower surface of the connecting cavity, the lower end of the installation tube is in contact with the upper surface of the machine tool, two air inlets are fixedly connected to the upper surface of the connecting cavity, an air inlet pipe is fixedly connected to the inner wall of the connecting cavity, the inner wall of the air inlet pipe is connected to the air inlet, and an air inlet hole is opened on the lower surface of the air inlet pipe.

[0008] Furthermore, the inner wall of the air inlet is provided with a connecting hole, and the inner wall of the air inlet is provided with three limiting grooves, which are connected to the connecting hole. The outer wall of the air inlet pipe is provided with three limiting holes, which are connected to the limiting grooves.

[0009] Preferably, a rod is slidably inserted into the inner wall of the limiting hole, and an adjusting column is slidably inserted into the inner wall of the air inlet. The adjusting column is composed of a cylinder and a frustum, and its lower end is connected to the top shower head. Three positioning pins are fixedly connected to the outer wall of the adjusting column. The positioning pins are slidably connected to the inner wall of the limiting groove. An insertion hole is opened at the end of the positioning pin away from the adjusting column, and the insertion hole is adapted to the size of the rod.

[0010] Preferably, a guide block is fixedly connected to one end of the insertion rod near the insertion hole, and the guide block has a conical structure.

[0011] Preferably, one end of each of the three insert rods is fixedly connected to a connecting plate, one side of the connecting plate is fixedly connected to a partition plate, a lead screw is threaded through the surface of the partition plate, and one end of the lead screw is rotatably connected to the outer wall of the air intake pipe.

[0012] Preferably, a guide rod is slidably inserted through the surface of the partition, and one end of the guide rod is fixedly connected to the outer wall of the air intake pipe.

[0013] Preferably, the arc surface of the adjusting column is provided with an annular hole, the inner wall of the annular hole is fitted with a sealing ring, and the outer wall of the sealing ring is in contact with the inner wall of the air inlet.

[0014] Preferably, the upper surface of the machine base is provided with a shower head rotating device, which includes a welding plate. The lower surface of the welding plate is fixedly connected to the upper surface of the machine base. A servo motor is fixedly connected to one side of the welding plate. A drive gear is fixedly connected to the output end of the servo motor. A driven gear ring is rotatably connected to the upper surface of the machine base. The driven gear ring meshes with the drive gear. Two positioning holes are opened on the upper surface of the driven gear ring. Two positioning plates are attached to the inner wall of the positioning holes. The side of the two positioning plates that are close to each other is fixedly connected to the outer wall of the mounting pipe.

[0015] Compared with the prior art, the advantages and positive effects of the adjustment structure of the present invention applied to the HDP overhead shower are as follows:

[0016] 1. This invention, by setting a shower head lifting device, allows for adjustment of the height of the top shower head. This enables the top shower head to move up and down to change the distribution of reacting gases for different processes. When dealing with processes with different gas flow rates, the position of the top shower head can be adjusted to find the most suitable matching position with the side nozzles, thereby achieving a more uniform gas reaction on the wafer surface and ultimately optimizing the uniformity of wafer thickness. This solves the problem that the uniformity of high-flow-rate gas processes cannot meet customer requirements.

[0017] 2. By setting a shower head rotation device, the top shower head can rotate automatically while being raised and lowered, thereby further changing the position of the shower head and thus changing the gas distribution, and further improving the applicability of the device.

[0018] 3. By setting up an air intake sealing device, when the device is not in use and the external pipe is separated from the air intake component, personnel can easily adjust the baffle to seal the air intake port of the air intake component, thereby preventing dust from entering the air intake component through the air intake port. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of an adjustment structure applied to an HDP top shower according to the present invention;

[0020] Figure 2 A bottom view schematic diagram of an adjustment structure applied to an HDP top shower according to the present invention;

[0021] Figure 3 This is a schematic diagram of a shower head lifting device according to the present invention, which is applied to the adjustment structure of an HDP top shower head;

[0022] Figure 4 This is a partial structural diagram of a shower head lifting device according to the present invention, which is applied to the adjustment structure of an HDP top shower head;

[0023] Figure 5 This is a schematic diagram of the internal structure of the air intake pipe of an adjustment structure applied to an HDP top shower head according to the present invention;

[0024] Figure 6 This is a partial structural disassembly diagram of a shower head lifting device according to the present invention, which is applied to the adjustment structure of an HDP top shower head.

[0025] Figure 7 A schematic diagram of the insert rod of an adjustment structure applied to an HDP top shower according to the present invention;

[0026] Figure 8 This is a schematic diagram of the adjustment column of an adjustment structure applied to an HDP top shower according to the present invention;

[0027] Figure 9 This is a schematic diagram of a shower head rotation device according to the present invention, which is applied to an adjustment structure of an HDP top shower head.

[0028] Figure 10 This is a partial structural disassembly diagram of a shower head rotation device according to the present invention, which is applied to the adjustment structure of an HDP top shower head.

[0029] Figure 11 This is a schematic diagram of the air intake sealing device for an adjustment structure applied to an HDP top shower head according to the present invention;

[0030] Figure 12 This is a partial structural diagram of an air intake sealing device for an adjustment structure applied to an HDP top shower head according to the present invention.

[0031] Explanation of reference numerals in the attached drawings: 1. Machine base; 2. Connector; 3. Shower head lifting device; 301. Connecting cavity; 302. Air inlet component; 303. Air inlet pipe; 304. Mounting pipe; 305. Air inlet hole; 306. Adjusting column; 307. Positioning pin; 308. Connecting hole; 309. Limiting groove; 310. Limiting hole; 311. Insert rod; 312. Guide block; 313. Connecting plate; 314. Partition plate; 315. Lead screw; 316. Guide rod; 317. Annular hole; 318. Sealing ring; 319. Insertion hole; 4. Shower head rotating device; 401. Welding 402. Servo motor; 403. Drive gear; 404. Driven gear ring; 405. Positioning hole; 406. Slide rod; 407. Adjusting ring; 408. Rubber pad; 409. Positioning plate; 410. Slide hole; 411. Scale; 412. Pointer; 5. Intake sealing device; 501. Fixed base; 502. Rotating shaft; 503. Connecting plate; 504. Baffle; 505. Handle; 506. Coil spring; 507. Connecting hole; 508. Connecting rod; 509. Threaded ring; 510. Limiting rod; 6. Round hole; 7. Top shower head; 8. Side nozzle. Detailed Implementation

[0032] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0033] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways than those described herein, and therefore the invention is not limited to the specific embodiments disclosed in the following specification.

[0034] This invention provides an adjustment structure for an HDP overhead shower, comprising a base, several side nozzles, an overhead shower head, and a shower head lifting device. The base has a circular hole on its surface, and a connector is fixedly connected to its lower surface. The inner wall of the connector is fixedly connected to the several side nozzles. The overhead shower head is located inside the base, and the shower head lifting device is located on the base. The shower head lifting device includes a connecting cavity, and an installation pipe is fixedly connected to the lower surface of the connecting cavity. The lower end of the installation pipe is abutted against the upper surface of the base. Two air inlets are fixedly connected to the upper surface of the connecting cavity, and an air inlet pipe is fixedly connected to the inner wall of the connecting cavity. The inner wall of the air inlet pipe is connected to the air inlet... The components are connected. The lower surface of the air intake pipe has an air intake hole. The inner wall of the air intake hole has a connecting hole. The inner wall of the air intake hole has three limiting grooves, which are connected to the connecting hole. The outer wall of the air intake pipe has three limiting holes, which are connected to the limiting grooves. A rod is slidably inserted into the inner wall of the limiting hole. An adjusting column is slidably inserted into the inner wall of the air intake hole. The adjusting column is composed of a cylinder and a frustum. The lower end of the adjusting column is connected to the top shower head. Three positioning pins are fixedly connected to the outer wall of the adjusting column. The positioning pins are slidably connected to the inner wall of the limiting groove. The end of the positioning pin away from the adjusting column has an insertion hole, which is adapted to the size of the rod.

[0035] The effect achieved by the above technical solution is as follows: by setting up a shower head lifting device, the height of the top shower head can be adjusted, so that the top shower head can be moved up and down to change the distribution of reaction gas for different processes. When different gas flow processes are used, the position of the top shower head can be adjusted to find the most suitable matching position with the side nozzles, so as to achieve a more uniform gas reaction on the wafer surface and ultimately optimize the uniformity of wafer thickness, thereby solving the problem that the uniformity of high flow gas processes cannot meet customer requirements.

[0036] In one embodiment, a guide block is fixedly connected to one end of the insertion rod near the insertion hole, and the guide block has a conical structure. The effect achieved by the above technical solution is that, because the guide block fixed to one end of the insertion rod is small in size, the insertion rod can be easily inserted into the insertion hole.

[0037] In one embodiment, a connecting plate is fixedly connected to one end of each of the three insert rods, and a partition plate is fixedly connected to one side of the connecting plate. A lead screw is threaded through the surface of the partition plate, and one end of the lead screw is rotatably connected to the outer wall of the air intake pipe. The effect achieved by the above technical solution is that rotating the lead screw can drive the partition plate to move, the partition plate can drive the connecting plate, and the connecting plate can simultaneously drive the three insert rods to move.

[0038] In one embodiment, a guide rod is slidably threaded through the surface of the partition, and one end of the guide rod is fixedly connected to the outer wall of the air intake pipe. The effect achieved by the above technical solution is that, during the process of rotating the lead screw to move the partition, connecting plate, and insert rod, the guide rod can guide and position the partition, thus preventing rotational deviation of the insert rod during its movement.

[0039] In one embodiment, the arc surface of the adjusting column has an annular hole, and a sealing ring is fitted onto the inner wall of the annular hole. The outer wall of the sealing ring is in contact with the inner wall of the air inlet. The effect achieved by the above technical solution is that the sealing ring mainly functions to prevent gas leakage between the air inlet and the adjusting column.

[0040] In one embodiment, the upper surface of the machine base is provided with a shower head rotating device. The shower head rotating device includes a welding plate, the lower surface of which is fixedly connected to the upper surface of the machine base. A servo motor is fixedly connected to one side of the welding plate, and a drive gear is fixedly connected to the output end of the servo motor. A driven gear ring is rotatably connected to the upper surface of the machine base, and the driven gear ring meshes with the drive gear. Two positioning holes are formed on the upper surface of the driven gear ring, and two positioning plates are attached to the inner walls of the positioning holes. The sides of the two positioning plates closest to each other are fixedly connected to the outer wall of the mounting pipe. The effect achieved by the above technical solution is that by setting a shower head rotating device, the top shower head can automatically rotate while being raised and lowered, thereby further adjusting the shower head position and changing the gas distribution, thus further improving the applicability of the device.

[0041] In one embodiment, the surface of the positioning plate is provided with a sliding hole, and a sliding rod is slidably inserted into the inner wall of the sliding hole. The lower end of the sliding rod is fixedly connected to the inner wall of the positioning hole. An adjusting ring is threadedly connected to the arc surface of the sliding rod, and a rubber pad is fixedly connected to the side of the adjusting ring near the positioning plate. The above technical solution achieves the following effect: When personnel need to disassemble the shower head lifting device, first rotate the adjusting ring to separate the rubber pad from the slide rod, then move the installation tube to move the positioning plate to separate the positioning plate from the positioning hole. Continue moving the positioning plate to separate it from the slide rod to complete the disassembly of the shower head lifting device. When the shower head lifting device needs to be installed, first move the connecting cavity to move the installation tube, which in turn moves the positioning plate. Insert the slide rod into the sliding hole on the positioning plate. After the positioning plate is in contact with the inner wall of the positioning hole, place the adjusting ring on the arc surface of the slide rod. Then rotate the adjusting ring to make the rubber pad abut against the positioning plate to complete the installation limit of the shower head lifting device. The rubber pad can increase the friction of the adjusting ring near the positioning plate, achieving the effect of making the adjusting ring abut against the positioning plate with the help of the rubber pad.

[0042] In one embodiment, a scale is provided on the upper surface of the driven gear ring, and a pointer is fixedly connected to the upper surface of the machine base. The effect achieved by the above technical solution is that personnel can use the scale and pointer to precisely adjust the rotation angle of the top shower head.

[0043] In one embodiment, the outer wall of the air intake component is provided with an air intake sealing device. The air intake sealing device includes a fixed base, the lower surface of which is fixedly connected to the outer wall of the air intake component. A rotating shaft is rotatably inserted through the inner wall of the fixed base. A connecting plate is fixedly connected to the arc surface of the rotating shaft. A baffle is fixedly connected to one side of the connecting plate. A handle with a U-shaped cross-section is fixedly connected to the arc surface of the baffle. A connecting hole is opened on one side of the fixed base. A connecting rod is slidably connected to the inner wall of the connecting hole. One end of the connecting rod is fixedly connected to one side of the connecting plate. A threaded ring is threadedly connected to the arc surface of the connecting rod. A limiting rod is slidably inserted through the arc surface of the connecting rod. The limiting rod is fixedly connected to the inner wall of the connecting hole. The effect achieved by the above technical solution is that, by setting up an air intake sealing device, when the device is not in use and the external pipe is separated from the air intake component, personnel can easily adjust the baffle to seal the air intake port of the air intake component, thereby preventing dust from entering the air intake component through the air intake port.

[0044] In one embodiment, a coil spring is fitted onto the arcuate surface of the rotating shaft, and both ends of the coil spring are fixedly connected to the fixed base and the connecting plate, respectively. The effect achieved by the above technical solution is that after the rotating threaded ring separates from the fixed base, the coil spring can drive the baffle to open quickly.

[0045] The following description, in conjunction with the accompanying drawings, further illustrates an adjustment structure of the present invention applied to an HDP overhead showerhead. For example... Figures 1-2 As shown, the present invention provides an adjustment structure for an HDP top shower, including a base 1, several side nozzles 8, a top shower 7, and a shower lifting device 3. The surface of the base 1 is provided with a circular hole 6, and a connector 2 is fixedly connected to the lower surface of the base 1. The inner wall of the connector 2 is fixedly connected to several side nozzles 8. The top shower 7 is located inside the base 1. The upper surface of the base 1 is provided with a shower rotating device 4, and the outer wall of the air intake 302 is provided with an air intake sealing device 5.

[0046] The following is a detailed explanation of the specific setup and function of the shower head lifting device 3, the shower head rotating device 4, and the air intake sealing device 5.

[0047] like Figures 3-8As shown, the shower head lifting device 3 includes a connecting cavity 301. An installation pipe 304 is fixedly connected to the lower surface of the connecting cavity 301. The lower end of the installation pipe 304 is attached to the upper surface of the machine base 1. Two air inlets 302 are fixedly connected to the upper surface of the connecting cavity 301. An air inlet pipe 303 is fixedly connected to the inner wall of the connecting cavity 301. The inner wall of the air inlet pipe 303 communicates with the air inlets 302. An air inlet hole 305 is opened on the lower surface of the air inlet pipe 303. A connecting hole 308 is opened on the inner wall of the air inlet hole 305. Three limiting grooves 309 are opened on the inner wall of the air inlet hole 305, and the limiting grooves 309 communicate with the connecting holes 308. Three limiting holes 310 are opened on the outer wall of the air inlet pipe 303, and the limiting holes 310 communicate with the limiting grooves 309. A rod 311 is slidably inserted into the inner wall of the inlet hole 310, and an adjusting column 306 is slidably inserted into the inner wall of the air inlet hole 305. The adjusting column 306 is composed of a cylinder and a frustum. The lower end of the adjusting column 306 is connected to the top shower head 7. Three positioning pins 307 are fixedly connected to the outer wall of the adjusting column 306. The positioning pins 307 are slidably connected to the inner wall of the limiting groove 309. The end of the positioning pin 307 away from the adjusting column 306 has an insertion hole 319. The insertion hole 319 is adapted to the size of the rod 311. By setting the shower head lifting device 3, the height of the top shower head 7 can be adjusted, so that the top shower head 7 can move up and down to change the distribution of reactive gases for different processes. When different gas flow processes are used, the position of the top shower head 7 can be adjusted to adjust the flow rate. Finding the most suitable matching position with the side nozzle 8 achieves a more uniform gas reaction on the wafer surface, ultimately optimizing wafer thickness uniformity and solving the problem of high-flow gas process uniformity failing to meet customer requirements. A guide block 312 is fixedly connected to one end of the insertion rod 311 near the insertion hole 319. The guide block 312 has a conical structure. Due to the small size of the guide block 312 fixed to one end of the insertion rod 311, it allows for easy insertion of the insertion rod 311 into the insertion hole 319. One end of each of the three insertion rods 311 is fixedly connected to a connecting plate 313. A partition plate 314 is fixedly connected to one side of the connecting plate 313. A lead screw 315 is threaded through the surface of the partition plate 314. One end of the lead screw 315 rotates with the outer wall of the air inlet pipe 303. The rotating screw 315 drives the partition 314 to move, which in turn drives the connecting plate 313. The connecting plate 313 can simultaneously drive the three insert rods 311 to move. A guide rod 316 slides through the surface of the partition 314. One end of the guide rod 316 is fixedly connected to the outer wall of the air intake pipe 303. During the movement of the partition 314, connecting plate 313, and insert rods 311 by rotating the screw 315, the guide rod 316 can guide and position the partition 314, thus preventing the insert rods 311 from rotating or shifting during movement. The arc surface of the adjusting column 306 has an annular hole 317. A sealing ring 318 is fitted inside the annular hole 317, and the outer wall of the sealing ring 318 fits against the inner wall of the air intake hole 305.The sealing ring 318 primarily functions to prevent gas leakage between the air inlet 305 and the adjusting column 306.

[0048] The overall effect of the shower head lifting device 3 is that, by setting the shower head lifting device 3, the height of the top shower head 7 can be adjusted, allowing the top shower head 7 to move up and down to change the distribution of reacting gases for different processes. When for processes with different gas flow rates, the position of the top shower head 7 can be adjusted to find the most suitable matching position with the side nozzles 8, thereby achieving a more uniform gas reaction on the wafer surface and ultimately optimizing the uniformity of wafer thickness. This solves the problem that the uniformity of high-flow-rate gas processes cannot meet customer requirements.

[0049] like Figures 9-10As shown, the shower head rotating device 4 includes a welding plate 401. The lower surface of the welding plate 401 is fixedly connected to the upper surface of the machine base 1. A servo motor 402 is fixedly connected to one side of the welding plate 401. A drive gear 403 is fixedly connected to the output end of the servo motor 402. A driven gear ring 404 is rotatably connected to the upper surface of the machine base 1. The driven gear ring 404 meshes with the drive gear 403. Two positioning holes 405 are opened on the upper surface of the driven gear ring 404. Two positioning plates 409 are attached to the inner wall of the positioning holes 405. The side of the two positioning plates 409 that are close to each other is fixed to the outer wall of the mounting tube 304. The shower head 7 is automatically rotated while being raised and lowered by a rotating shower head device 4, which can further adjust the shower head position and thus change the gas distribution, thereby improving the applicability of the device. A sliding hole 410 is provided on the surface of the positioning plate 409, and a sliding rod 406 is slidably inserted into the inner wall of the sliding hole 410. The lower end of the sliding rod 406 is fixedly connected to the inner wall of the positioning hole 405. An adjusting ring 407 is threadedly connected to the arc surface of the sliding rod 406. A rubber pad 408 is fixedly connected to the side of the adjusting ring 407 near the positioning plate 409. When personnel need to disassemble the shower head lifting device 3, first... Rotating the adjusting ring 407 causes the rubber pad 408 to separate from the slide rod 406. Then, moving the installation tube 304 causes the positioning plate 409 to separate from the positioning hole 405. Continuing to move the positioning plate 409 until it separates from the slide rod 406 completes the disassembly of the shower head lifting device 3. When it is necessary to install the shower head lifting device 3, first move the connecting cavity 301 to drive the installation tube 304. The installation tube 304 drives the positioning plate 409. Insert the slide rod 406 into the sliding hole 410 on the positioning plate 409. After the positioning plate 409 is in contact with the inner wall of the positioning hole 405, then put the adjusting ring 407 on top. On the arc surface of the slide bar 406, the adjusting ring 407 is then rotated to drive the rubber pad 408 to abut against the positioning plate 409, thus completing the installation limit of the shower head lifting device 3. The rubber pad 408 can increase the friction of the adjusting ring 407 near the positioning plate 409, achieving the effect of making the adjusting ring 407 abut against the positioning plate 409 with the help of the rubber pad 408. The upper surface of the driven gear ring 404 is provided with a scale 411, and the upper surface of the machine base 1 is fixedly connected with a pointer 412. Personnel can use the scale 411 and the pointer 412 to accurately adjust the rotation angle of the top shower head 7.

[0050] The effect achieved by the entire shower head rotation device 4 is that, by setting the shower head rotation device 4, the top shower head 7 can be raised and lowered while rotating automatically, thereby further changing the position of the shower head and thus changing the gas distribution, further improving the applicability of the device.

[0051] like Figures 11-12As shown, the intake sealing device 5 includes a fixed base 501. The lower surface of the fixed base 501 is fixedly connected to the outer wall of the intake component 302. A rotating shaft 502 is rotatably inserted through the inner wall of the fixed base 501. A connecting plate 503 is fixedly connected to the arc surface of the rotating shaft 502. A baffle 504 is fixedly connected to one side of the connecting plate 503. A handle 505 is fixedly connected to the arc surface of the baffle 504. The handle 505 has a U-shaped cross-section. A connecting hole 507 is opened on one side of the fixed base 501. A connecting rod 508 is slidably connected to the inner wall of the connecting hole 507. One end of the connecting rod 508 is fixedly connected to one side of the connecting plate 503. A threaded ring is threadedly connected to the arc surface of the connecting rod 508. 509, the arc surface of the connecting rod 508 is slidably provided with a limiting rod 510, the limiting rod 510 is fixedly connected to the inner wall of the connecting hole 507. By setting an air intake sealing device 5, when the device is not in use and the external pipe is separated from the air intake component 302, the personnel can easily adjust the baffle 504 to seal the air intake port of the air intake component 302, thereby preventing dust from entering the air intake component 302 along the air intake port. The arc surface of the rotating shaft 502 is fitted with a coil spring 506, the two ends of the coil spring 506 are fixedly connected to the fixed seat 501 and the connecting plate 503 respectively. After the rotating threaded ring 509 is separated from the fixed seat 501, the coil spring 506 can drive the baffle 504 to open quickly.

[0052] The overall effect of the air intake sealing device 5 is that, by setting up the air intake sealing device 5, when the device is not in use and the external pipe is separated from the air intake component 302, personnel can easily adjust the baffle 504 to seal the air intake port of the air intake component 302, thereby preventing dust from entering the air intake component 302 through the air intake port.

[0053] The overall working principle is as follows: 1. In this invention, when the height of the top shower head 7 needs to be adjusted, first rotate the screw 315 to move the partition plate 314. The partition plate 314 moves the connecting plate 313, which can simultaneously move the three insert rods 311. After the insert rods 311 separate from the insertion holes 319 on the positioning pins 307, rotate the adjusting column 306 to move the three positioning pins 307, so that the positioning pins 307 enter the connecting holes 308. Then pull the adjusting column to move the positioning pins 307, so that the positioning pins 307 move downward and correspond one by one with the limiting grooves 309. When the positioning pins 307 correspond with the limiting grooves 309, rotate the adjusting column 306 in the opposite direction to move the positioning pins 307 into the limiting grooves 309. When the positioning pins 307 enter the limiting grooves 309 and the insertion holes 319 on the positioning pins 307 are aligned with the insert rods 311, rotate the screw 315 in the opposite direction. 5. The partition 314 is moved, the partition 314 moves the connecting plate 313, and the connecting plate 313 moves the insert rod 311 into the socket 319, thus completing the adjustment of the height of the top shower head 7. There are three limiting grooves 309 for different heights. The height of the top shower head 7 is adjusted by rotating the positioning pin 307 into different limiting grooves 309. The guide block 312 fixed at one end of the insert rod 311 is small in size, which makes it easy to insert the insert rod 311 into the socket 319. In addition, when the screw 315 moves the partition 314, the connecting plate 313 and the insert rod 311, the guide rod 316 can guide and position the partition 314 to avoid rotational deviation of the insert rod 311 during the movement. Finally, the sealing ring 318 mainly prevents gas leakage between the air inlet 305 and the adjusting column 306.

[0054] 2. In this invention, when it is necessary to drive the top shower head 7 to rotate, the servo motor 402 is first started to drive the drive gear 403 to rotate. The drive gear 403 drives the driven gear ring 404 to rotate. The driven gear ring 404 drives the positioning plate 409. The positioning plate 409 drives the mounting tube 304 to rotate. The mounting tube 304 drives the air inlet pipe 303 and the top shower head 7 to rotate. When the top shower head 7 rotates to a suitable angle, the operation of the servo motor 402 can be stopped. The operator can use the scale 411 and pointer 412 to precisely adjust the rotation angle of the top shower head 7.

[0055] 3. In this invention, when it is necessary to seal the air inlet of the air inlet 302, first pull the handle 505 to drive the baffle 504. The baffle 504 drives the connecting plate 503. The connecting plate 503 drives the rotating shaft 502 to rotate along the inner wall of the fixed seat 501. At the same time, the connecting plate 503 will drive the connecting rod 508 to rotate along the inner wall of the connecting hole 507. After the baffle 504 blocks the air inlet, rotate the threaded ring 509 to abut against the fixed seat 501, thereby limiting the position of the baffle 504. When it is necessary to open the baffle 504, first rotate the threaded ring 509 to separate it from the fixed seat 501. After the threaded ring 509 separates from the fixed seat 501, the coil spring 506 can drive the baffle 504 to open quickly.

[0056] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. An adjustment structure for an HDP overhead shower, comprising a base (1), several side nozzles (8), an overhead shower (7), and a shower lifting device (3), characterized in that: The surface of the machine base (1) is provided with a circular hole (6), and a connector (2) is fixedly connected to the lower surface of the machine base (1). The inner wall of the connector (2) is fixedly connected to several side nozzles (8). The top shower head (7) is located inside the machine base (1). The shower head lifting device (3) is located on the machine base (1). The shower head lifting device (3) includes a connecting cavity (301). The lower surface of the connecting cavity (301) is fixedly connected to the mounting tube (304); the upper surface of the machine base (1) is provided with a shower head rotating device (4), the shower head rotating device (4) includes a welding plate (401), the lower surface of the welding plate (401) is fixedly connected to the upper surface of the machine base (1), a servo motor (402) is fixedly connected to one side of the welding plate (401), a drive gear (403) is fixedly connected to the output end of the servo motor (402), a driven gear ring (404) is rotatably connected to the upper surface of the machine base (1), the driven gear ring (404) meshes with the drive gear (403), two positioning holes (405) are opened on the upper surface of the driven gear ring (404), two positioning plates (409) are attached to the inner wall of the positioning holes (405), and the side of the two positioning plates (409) that are close to each other is fixedly connected to the outer wall of the mounting tube (304).

2. The adjustment structure applied to an HDP overhead shower according to claim 1, characterized in that: The lower end of the mounting tube (304) is attached to the upper surface of the machine base (1). The upper surface of the connecting cavity (301) is fixedly connected to two air inlets (302). The inner wall of the connecting cavity (301) is fixedly connected to an air inlet pipe (303). The inner wall of the air inlet pipe (303) is connected to the air inlet (302). An air inlet hole (305) is opened on the lower surface of the air inlet pipe (303).

3. The adjustment structure applied to an HDP overhead shower according to claim 2, characterized in that: The inner wall of the air inlet (305) is provided with a connecting hole (308), and the inner wall of the air inlet (305) is provided with three limiting grooves (309), which are connected to the connecting hole (308). The outer wall of the air inlet pipe (303) is provided with three limiting holes (310), which are connected to the limiting grooves (309).

4. The adjustment structure for an HDP overhead shower according to claim 3, characterized in that: A rod (311) is slidably inserted into the inner wall of the limiting hole (310), and an adjusting column (306) is slidably inserted into the inner wall of the air inlet (305). The adjusting column (306) is composed of a cylinder and a frustum, and the lower end of the adjusting column (306) is connected to the top shower head (7).

5. The adjustment structure for an HDP overhead shower according to claim 4, characterized in that: The outer wall of the adjusting column (306) is fixedly connected with three positioning pins (307). The positioning pins (307) are slidably connected to the inner wall of the limiting groove (309). The end of the positioning pin (307) away from the adjusting column (306) is provided with a socket (319). The socket (319) is adapted to the size of the plug rod (311).

6. The adjustment structure applied to an HDP overhead shower according to claim 5, characterized in that: The insertion rod (311) is fixedly connected to a guide block (312) at one end near the insertion hole (319), and the guide block (312) has a conical structure.

7. The adjustment structure for an HDP overhead shower according to claim 5, characterized in that: One end of the three insert rods (311) is fixedly connected to a connecting plate (313), and a partition plate (314) is fixedly connected to one side of the connecting plate (313). A lead screw (315) is threaded through the surface of the partition plate (314), and one end of the lead screw (315) is rotatably connected to the outer wall of the air intake pipe (303).

8. The adjustment structure for an HDP overhead shower according to claim 7, characterized in that: A guide rod (316) is slidably inserted through the surface of the partition (314), and one end of the guide rod (316) is fixedly connected to the outer wall of the air intake pipe (303).

9. The adjustment structure applied to an HDP overhead shower according to claim 5, characterized in that: The adjusting column (306) has an annular hole (317) on its arc surface. A sealing ring (318) is fitted on the inner wall of the annular hole (317). The outer wall of the sealing ring (318) is in contact with the inner wall of the air inlet (305).

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