Vacuum coating equipment and coating process

Abstract

The present invention discloses a vacuum coating device and a coating process, and specifically relates to the field of coating technology. The vacuum coating device includes a coating chamber, and a No. 1 closed door and a No. 2 closed door are respectively installed on both sides of the front end of the coating chamber through hinge rotation, and an escape zone is set in the No. 1 closed door and the No. 2 closed door. The present invention completes the active closure of the coating chamber through an isolation layer, avoids the occurrence of air breakage in the coating chamber, improves the coating efficiency, and reduces the contact with the external environment, reduces the probability of environmental dust, impurities or other pollutants affecting the appearance of the product, and at the same time, the vacuum mechanism can actively switch to the deposition area and the escape zone to complete the vacuum treatment of the two areas, and maintain the vacuum state in the deposition area and the escape zone, so that the isolation layer will not cause air breakage when carrying the two circulation mechanisms to rotate, and there is no need to repeatedly complete vacuum recovery for the entire coating chamber, thereby optimizing the coating steps and improving the yield rate.

Description

Technical Field

[0001] The present invention relates to the field of film coating technology, in particular to vacuum film coating equipment and a film coating process. Background Art

[0002] Vacuum coating is a technology that coats materials onto the surface of a substrate in a vacuum. Specifically, it requires placing the material to be coated (target material) and the substrate to be coated in a vacuum chamber at the same time. Then, by heating the target material or bombarding it with electrons, high-energy lasers, etc., the components on the surface of the target material are evaporated or sputtered out in the form of atomic groups or ions, and finally deposited on the surface of the substrate to form a thin film.

[0003] When performing vacuum coating, a special vacuum coating machine must be used. During operation, you need to first turn on the water pump, gas source and main power supply, and then follow certain steps to perform vacuuming, heating the target material, depositing thin films, etc.

[0004] A vacuum coating device disclosed in the patent with reference publication number CN114318296B, which places the product on a bracket, opens the side door structure, places the bracket on a rotating device, then closes the side door structure, turns on the vacuum pump, connects the positive and negative poles of the power supply to the positive and connecting electrical parts respectively, and uses a peristaltic pump to input the evaporation material into the evaporation boat. After the subsequent coating is completed, the side door is opened again to perform the subsequent coating operation.

[0005] At present, vacuum coating equipments all adopt the side-opening door design to complete the sealing work of the coating cavity. For example, the above-mentioned vacuum coating equipment also adopts the side-opening door to complete the sealing of the coating cavity to ensure the stable progress of the subsequent coating work. However, the current design of the side-opening door requires the opening and closing operations of the side-opening door to be completed in a single loading and unloading, which will cause the coating cavity to be broken. After the air is broken, it takes a long time to evacuate to the vacuum degree required by the process. This is a key point affecting efficiency in the field of vacuum coating technology. At the same time, the number of contacts between the coating cavity and the external environment increases, which increases the probability of dust, impurities or other pollutants in the external environment affecting the appearance of the product, which is very likely to affect the product appearance yield. Summary of the invention

[0006] The purpose of the present invention is to provide a vacuum coating device and a coating process to solve the above technical problems.

[0007] To solve the above technical problems, the present invention is implemented through the following technical solutions.

[0008] The present invention is a vacuum coating device, comprising a coating chamber, a No. 1 closed door and a No. 2 closed door are respectively rotatably installed on both sides of the front end of the coating chamber through hinges, and avoidance areas are arranged inside the No. 1 closed door and the No. 2 closed door, and also includes:

[0009] A central shaft is rotatably arranged in the coating chamber, and a rotating motor connected to the central shaft is arranged at the top of the coating chamber;

[0010] An isolation layer is arranged on the central axis and is in sealing and sliding contact with the inner wall of the coating chamber. The active isolation operation of the coating chamber is completed through the isolation layer, and a deposition area is formed between the isolation layer and the coating chamber.

[0011] Two circulation mechanisms are symmetrically arranged on both sides of the top of the isolation layer to support the coated products. Each circulation mechanism includes a semicircular frame, multiple connecting pieces and a synchronization component. Each connecting piece is provided with a locking unit for limiting. The synchronization component controls the multiple connecting pieces on the semicircular frame to complete the rotation coating control.

[0012] The control ring is concentrically arranged at the top of the coating chamber, and a half-ring magnet is arranged at the bottom of the control ring in the deposition area, and the switching control of multiple locking units on the two circulation mechanisms is completed by the half-ring magnet;

[0013] The vacuum mechanism is hidden at the bottom of the coating chamber. The vacuum mechanism completes the vacuum control of the deposition area and the avoidance area in a switching manner. The vacuum mechanism is divided into a vacuum unit, a conversion unit and a limiting unit.

[0014] Furthermore, each connecting member comprises:

[0015] The rotating shaft is rotatably mounted on the semicircular frame, and a synchronous wheel is fixedly sleeved on the outside of the rotating shaft;

[0016] The limiting wheel is rotatably arranged on the semicircular frame and located on one side of the synchronous wheel;

[0017] The hook can be detachably arranged at the bottom of the rotating shaft to complete the support of the coating rack.

[0018] Furthermore, each synchronization component includes:

[0019] A driving wheel is rotatably arranged on a semicircular frame, a driving motor is arranged on the semicircular frame through a bracket and is connected to the driving wheel by transmission, and a control wheel is rotatably arranged on the semicircular frame at one side of the driving wheel;

[0020] The synchronous belt and the transmission sleeve are arranged between the driving wheel and multiple synchronous wheels to complete the rotation control.

[0021] Further, each locking unit comprises:

[0022] The control area is opened on the hook, and a lifting platform is installed in the control area by sliding engagement. A pressing piece is detachably installed on one side of the lifting platform, and the closing and blocking of the open area of ​​the hook is completed by moving the pressing piece downward;

[0023] The control spring is arranged between the lifting platform and the bottom of the control area.

[0024] Furthermore, each locking unit further comprises:

[0025] A trigger rod is slidably passed through the rotating shaft and connected to the top of the lifting platform;

[0026] A permanent magnet is arranged on the top of the trigger rod, and the permanent magnet cooperates with the semi-ring magnet to complete the control.

[0027] Further, the vacuum unit comprises:

[0028] A reserved circular cavity is concentrically opened at the bottom of the coating cavity;

[0029] The annular cavity is arranged at the bottom of the reserved circular cavity, a distribution ring is rotatably sealed and installed at the top of the annular cavity, and a vacuum tube connected with the annular cavity is reserved in the deposition area;

[0030] The sealing disk and the rotary seal are arranged on the annular cavity, and the sealing disk is detachably fixedly connected with the bottom of the central shaft, and a limiting shaft is integrally arranged at the bottom of the sealing disk.

[0031] Furthermore, the vacuum unit also includes:

[0032] The intercommunication area is provided on the distribution ring through which an assembly seat is sealed;

[0033] A plurality of vacuum nozzles are evenly connected and arranged on the assembly seat to complete vacuum control.

[0034] Furthermore, the conversion unit comprises:

[0035] The hidden gear ring is sleeved on the outer wall of the distribution ring, and a transmission chamber is opened on one side of the bottom of the coating chamber;

[0036] The control motor is arranged in the transmission chamber through a bracket. A switching gear meshing with the hidden gear ring is installed at the output end of the control motor. The position control of the distribution ring is completed through the switching gear and the hidden gear ring.

[0037] Furthermore, the limiting unit includes:

[0038] A limiting gear ring, a fixed sleeve is arranged outside the limiting shaft;

[0039] The trigger arc block is detachably arranged on the inner wall of the distribution ring, and the trigger arc block is arranged on the distribution ring on a side close to the vacuum nozzle, and the trigger operation can be completed through the trajectory line formed by the side wall of the trigger arc block;

[0040] The guide seat is arranged on one side of the inner wall of the annular cavity, a sliding area is provided through the bottom of the guide seat, a slider is slidably engaged in the sliding area, and a return spring is provided between the slider and the sliding area;

[0041] The trigger arm is slidably inserted into the guide seat, one end of the trigger arm is fixedly connected to the slider, an arc-shaped toothed plate cooperating with the limiting gear ring is installed at the front end of the trigger arm, and a roller is arranged at the tail of the trigger arm. The triggering arc block contacts the roller to complete the triggering push of the arc-shaped toothed plate.

[0042] The present invention also provides a vacuum coating process, which specifically includes the following steps:

[0043] Step 1: First, select the corresponding coating material according to the coating requirements, and then wait for the subsequent coating processing;

[0044] Step 2: An isolation layer is provided in the coating chamber, and the isolation layer is controlled to rotate by a rotating motor. Since the isolation layer can actively seal the coating chamber, the coating chamber is prevented from being broken;

[0045] Step 3: The two circulation mechanisms are carried by the isolation layer to complete the flipping, and the two circulation mechanisms can be controlled to switch into the deposition area to complete the coating process, and the continuous and uninterrupted coating process can be completed;

[0046] Step 4: During the coating process, the process gas used for etching is selected according to the material of the etched coating layer, thereby completing the coating control of the product;

[0047] Step 5: By providing a vacuum mechanism, the vacuum mechanism can actively switch to the deposition area and the avoidance area, complete the vacuum treatment of the two areas, and maintain the vacuum state in the deposition area and the avoidance area.

[0048] Compared with the prior art, the present invention has the following beneficial effects:

[0049] 1. The present invention provides an isolation layer in the coating chamber, and the coating chamber can be actively sealed through the isolation layer, which is not disturbed by the opening and closing of the No. 1 closing door and the No. 2 closing door, thereby avoiding air breakage in the coating chamber and improving the coating efficiency. At the same time, it reduces the contact with the external environment, reduces the probability of environmental dust, impurities or other pollutants affecting the appearance of the product, and the circulation mechanism can carry the coated product to complete active flipping, thereby enhancing the coating effect. Since the isolation layer actively separates the deposition area from the avoidance area, the deposition area can maintain a vacuum state for a long time, thereby avoiding air breakage.

[0050] 2. The present invention is provided with a vacuum mechanism, which can actively switch to the deposition area and the avoidance area to complete the vacuum treatment of the two areas, maintain the vacuum state in the deposition area and the avoidance area, so that the isolation layer will not break the air when carrying the two circulation mechanisms to rotate, and can dynamically complete the vacuum state adjustment of the avoidance area, without repeatedly completing the vacuum recovery for the entire coating chamber, thereby optimizing the coating steps and improving the yield rate;

[0051] 3. Since the isolation layer of the present invention can carry two circulation mechanisms to complete the flipping, the two circulation mechanisms can be controlled to switch into the deposition area to complete the coating process. At the same time, the coated products are moved out of the deposition area. Subsequently, the No. 1 closed door and the No. 2 closed door are opened to take out the finished products and load and unload the materials, thereby completing continuous and uninterrupted coating processing and greatly improving the coating efficiency.

[0052] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 It is the overall front view of the present invention;

[0054] Figure 2 It is a schematic diagram of the distribution of the No. 1 closed door, the No. 2 closed door and the coating chamber of the present invention;

[0055] Figure 3 It is a schematic diagram of the closing of the second closing door and the coating chamber of the present invention;

[0056] Figure 4 It is a schematic diagram of the separation of the No. 1 closed door and the coating chamber of the present invention;

[0057] Figure 5 It is a schematic diagram of the coating chamber of the present invention;

[0058] Figure 6 It is a schematic diagram of installing the isolation layer of the present invention in the coating chamber;

[0059] Figure 7 It is a schematic diagram of installing the circulation mechanism of the present invention in the coating chamber;

[0060] Figure 8 It is a schematic diagram of installing the circulation mechanism of the present invention on the isolation layer;

[0061] Fig. 9 It is a schematic diagram of the circulation mechanism of the present invention;

[0062] Fig.10 It is a schematic diagram of the distribution of the control ring and the circulation mechanism of the present invention;

[0063] Fig.11 It is a schematic diagram of a connecting piece of the present invention;

[0064] Fig.12 It is a schematic diagram of installing the vacuum mechanism of the present invention in the coating chamber;

[0065] Fig.13 It is a schematic diagram of the vacuum mechanism of the present invention;

[0066] Fig.14 It is a schematic diagram of the distribution of the annular cavity and the distribution ring of the present invention;

[0067] Fig.15 It is a schematic diagram of installing the vacuum nozzle of the present invention on the distribution ring;

[0068] Fig.16 It is a schematic diagram of the distribution of the limiting gear ring and the arc-shaped gear plate of the present invention.

[0069] In the figure: 1, coating chamber; 2, No. 1 closing door; 3, No. 2 closing door; 4, avoidance area; 5, central axis; 6, rotating motor; 7, isolation layer; 8, deposition area; 9, semicircular frame; 10, control ring; 11, semicircular magnet; 12, rotating shaft; 13, synchronous wheel; 14, limiting wheel; 15, hook; 16, driving wheel; 17, driving motor; 18, control wheel; 19, synchronous belt; 20, control area; 21, lifting platform; 22, pressing piece; 23, control spring; 24, trigger rod; 25, permanent magnet; 26, reserved circular cavity; 27. Annular cavity; 28. Distribution ring; 29. ​​Vacuum tube; 30. Sealing disk; 31. Limiting shaft; 32. Intercommunication area; 33. Assembly seat; 34. Vacuum nozzle; 35. Hidden gear ring; 36. Transmission chamber; 37. Control motor; 38. Switching gear; 39. Limiting gear ring; 40. Trigger arc block; 41. Guide seat; 42. Sliding area; 43. Sliding block; 44. Reset spring; 45. Trigger arm; 46. Arc gear plate; 47. Rack No. 1; 48. Extension arm; 49. Conversion gear; 50. Rack No. 2; 51. Cleaning piece. DETAILED DESCRIPTION

[0070] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0071] In the description of the present invention, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inside", "all around" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0072] Embodiment 1: The present invention provides a technical solution: Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, a vacuum coating equipment comprises a coating chamber 1, which is specifically an evaporation deposition chamber, providing space for coating of products, a base for supporting is arranged at the bottom of the coating chamber 1, one side of the coating chamber 1 is open, and a No. 1 closed door 2 and a No. 2 closed door 3 are respectively installed on both sides of the front end of the coating chamber 1 through hinges, and an avoidance area 4 is arranged in the No. 1 closed door 2 and the No. 2 closed door 3, and the avoidance area 4 can actively avoid the rotation of the isolation layer 7 and the two circulation mechanisms. The design of the No. 1 closed door 2 and the No. 2 closed door 3 is adopted, which is conducive to the operator to freely choose according to the construction requirements, and at the same time, the No. 1 closed door 2 and the No. 2 closed door 3 can also be rotated. Any one of them is removed for coating processing, the No. 1 closed door 2 and the No. 2 closed door 3 are sealed and connected to the coating chamber 1 through a locking mechanism, and two slideways are respectively provided on the base, which are matched with the No. 1 closed door 2 and the No. 2 closed door 3, and the two slideways are provided with walking wheels connected with the No. 1 closed door 2 and the No. 2 closed door 3 to ensure the smooth opening and closing of the No. 1 closed door 2 and the No. 2 closed door 3. A vacuum unit is installed on one side of the base through a bracket, and the vacuum unit is connected with the coating chamber 1 to complete the vacuum operation. A control box is provided on one side of the vacuum unit, and an evaporation mechanism is provided in the coating chamber 1, and the evaporation material is sent into the coating chamber 1 through the evaporation mechanism, and it also includes:

[0073] The central shaft 5 is rotatably arranged in the coating chamber 1, and a rotating motor 6 is arranged on the top of the coating chamber 1 and is connected to the central shaft 5 by transmission. The rotating motor 6 has a self-locking function.

[0074] like Figure 5 and Figure 6 As shown, the isolation layer 7 is arranged on the central axis 5 and is in sealing and sliding contact with the inner wall of the coating cavity 1. The active isolation operation of the coating cavity 1 is completed by the isolation layer 7. A deposition area 8 is formed between the isolation layer 7 and the coating cavity 1. The isolation layer 7 is driven to rotate by the central axis 5. A sealing layer is arranged around the isolation layer 7 at the contact position with the coating cavity 1 to maintain the sliding seal between the isolation layer 7 and the coating cavity 1. The sealing layer is specifically made of one or more of a graphite material, a ceramic material and a rubber material. The isolation layer 7 is specifically made of a metal material to ensure stable supporting performance.

[0075] like Figure 7 and Figure 8 As shown, two circulation mechanisms are symmetrically arranged on both sides of the top of the isolation layer 7 for supporting the coated products. Each circulation mechanism includes a semicircular frame 9, a plurality of connecting pieces and a synchronization component. The semicircular frame 9 can be detachably installed on the side wall of the isolation layer 7. A plurality of connecting pieces are rotatably distributed on the semicircular frame 9. The synchronization component is arranged on the semicircular frame 9. A locking unit for limiting is arranged on each connecting piece. The rotation coating control is completed by controlling a plurality of connecting pieces on the semicircular frame 9 through the synchronization component.

[0076] The control ring 10 is concentrically arranged at the top of the coating chamber 1. A half-ring magnet 11 is arranged at the bottom of the control ring 10 in the deposition area 8. The half-ring magnet 11 is used to complete the switching control of multiple locking units on the two circulation mechanisms. A passing area that cooperates with the control ring 10 is arranged on the isolation layer 7 to avoid interference with the rotation of the isolation layer 7. A sealing structure is arranged between the control ring 10 and the isolation layer 7 to maintain a sealed state. The half-ring magnet 11 can be replaced by a half-ring electromagnet to provide a strong repulsive thrust, which is convenient for the staff to freely replace and use according to processing requirements;

[0077] The vacuum mechanism is hidden at the bottom of the coating chamber 1. The vacuum mechanism completes the vacuum control of the deposition area 8 and the avoidance area 4 in a switching manner. The vacuum mechanism is divided into a vacuum unit, a conversion unit and a limiting unit.

[0078] It is worth mentioning that when switching the coating: by providing an isolation layer 7, the isolation layer 7 can be controlled by the rotating motor 6 to complete the rotation in the coating chamber 1, and carry two circulation mechanisms to repeatedly enter the deposition area 8 to complete the continuous coating process, thereby improving the coating efficiency. The deposition area 8 can be isolated through the isolation layer 7 to avoid the problem of air breaking, so that one circulation mechanism is located in the deposition area 8 to provide coating processing, and the other circulation mechanism is moved out of the deposition area 8 to load and unload materials. In this way, the continuous and uninterrupted coating process can be completed, and the dilemma of repeated vacuum treatment of the deposition area 8 is avoided, the coating cycle is shortened, the coating steps are optimized, and the overall control is convenient.

[0079] Among them, electrical components such as the rotating motor 6, the driving motor 17, and the control motor 37 are all connected to switches through wires, and the switches are electrically connected to a controller. The specific structure of the controller is not limited. The rotating motor 6, the driving motor 17, and the control motor 37 are all provided with absolute encoders for accurately positioning the rotating motor 6, the driving motor 17, and the control motor 37.

[0080] Embodiment 2: Based on the circulation mechanism provided in Embodiment 1, this embodiment provides a further technical solution of the circulation mechanism.

[0081] like Fig. 9 , Fig.10 and Fig.11 As shown, each connector includes:

[0082] The rotating shaft 12 is rotatably mounted on the semicircular frame 9, and a synchronous wheel 13 is fixedly sleeved on the outside of the rotating shaft 12;

[0083] The limiting wheel 14 is rotatably arranged on the semicircular frame 9 and located on one side of the synchronous wheel 13;

[0084] The hook 15 is detachably disposed at the bottom of the rotating shaft 12 to support the coating rack;

[0085] Each synchronization component consists of:

[0086] A driving wheel 16 is rotatably arranged on the semicircular frame 9, a driving motor 17 is provided on the semicircular frame 9 through a bracket and is transmission-connected to the driving wheel 16, and a control wheel 18 is rotatably arranged on one side of the driving wheel 16 and located on the semicircular frame 9;

[0087] The synchronous belt 19, the transmission sleeve is arranged between the driving wheel 16 and the multiple synchronous wheels 13 to complete the rotation control, and the synchronous belt 19 is correspondingly limited between the multiple synchronous wheels 13 and the limit wheel 14. At the same time, the synchronous belt 19 is located between the driving wheel 16 and the control wheel 18, which can maintain the stability of the synchronous belt 19 and provide a stable driving force. The material and type of the synchronous belt 19 can be freely adjusted according to the actual use environment; at the same time, according to the load requirements of the coating product, the driving wheel 16 and the multiple synchronous wheels 13 can be replaced with sprockets, and the synchronous belt 19 can be replaced with chains, so as to meet the needs of different working environments;

[0088] In the embodiment of the present invention, each locking unit includes:

[0089] The control area 20 is provided on the hook 15. A lifting platform 21 is slidably mounted in the control area 20. A pressing member 22 is detachably mounted on one side of the lifting platform 21. The closing and blocking of the open area of ​​the hook 15 is completed by moving the pressing member 22 downward. The length and shape of the pressing member 22 can be freely adjusted according to the type of the coating rack, so as to ensure the safety and stability of the hook 15 and the coating rack during the coating process.

[0090] A control spring 23 is disposed between the lifting platform 21 and the bottom of the control area 20, and the control spring 23 pushes the pressing member 22 away from the hook 15 to reset;

[0091] Each locking unit also includes:

[0092] The trigger rod 24 slides through the rotating shaft 12 and is connected to the top of the lifting platform 21;

[0093] A permanent magnet 25 is disposed on the top of the trigger rod 24. The permanent magnet 25 cooperates with the semi-ring magnet 11 to complete the control. The permanent magnet 25 and the semi-ring magnet 11 can generate a repulsive force.

[0094] It is worth noting that when the coated product is controlled: by providing a circulation mechanism, the hooks 15 of multiple connecting parts can limit the coating rack to ensure the stable coating of the coated product, and then start the drive motor 17 to drive the drive wheel 16 to rotate. Since the synchronous belt 19 is connected to the drive wheel 16 and multiple synchronous wheels 13, the synchronous belt 19 can complete the synchronous rotation of multiple synchronous wheels 13, so that the coating racks on multiple hooks 15 can all complete the rotation, which is beneficial to ensure the uniformity of the coating, improve the yield rate, and facilitate the control of the staff. At the same time, locking units are provided on the multiple connecting parts, and the isolation layer 7 is switched to rotate. When the machine moves, the carrying circulation mechanism gradually enters the deposition area 8. Since a half-ring magnet 11 is provided on the control ring 10 at the top of the deposition area 8, the circulation mechanism entering the deposition area 8 is close to the half-ring magnet 11. Since the half-ring magnet 11 produces a repulsive force on the permanent magnet 25, the trigger rod 24 moves downward, pushing the lifting platform 21 and the clamping part 22 to move downward to close the hook 15 to avoid falling off. After the subsequent circulation mechanism moves out of the deposition area 8, it can be separated from the half-ring magnet 11 and reset, so that the circulation mechanism entering the deposition area 8 can complete the active locking action, thereby improving the safety of the coating and avoiding the problem of the coating rack falling off.

[0095] Embodiment 3: Based on the vacuum mechanism provided in Embodiment 1, this embodiment provides a further technical solution of the vacuum mechanism.

[0096] like Fig.12 , Fig.13 and Fig.14 As shown, the vacuum unit comprises:

[0097] The reserved circular cavity 26 is concentrically opened at the bottom of the coating cavity 1, and a reserved area cooperating with the reserved circular cavity 26 is provided on the No. 1 closing door 2 and the No. 2 closing door 3 to ensure smooth closing of the No. 1 closing door 2 and the No. 2 closing door 3;

[0098] The annular cavity 27 is arranged at the bottom of the reserved circular cavity 26. The top of the annular cavity 27 is open. A distribution ring 28 is installed on the top of the annular cavity 27 for rotation and sealing. The reserved circular cavity 26 is closed by the annular cavity 27, the distribution ring 28 and the blocking disk 30 to avoid leakage in the deposition area 8. A vacuum tube 29 connected to the annular cavity 27 is reserved in the deposition area 8. The vacuum tube 29 is connected to the vacuum unit through a pipeline.

[0099] The blocking disk 30 is rotatably sealed and arranged on the annular cavity 27, and the blocking disk 30 is detachably fixedly connected to the bottom of the central shaft 5, and a limiting shaft 31 is integrally arranged at the bottom of the blocking disk 30;

[0100] like Fig.15 As shown, the vacuum unit also includes:

[0101] The intercommunication area 32 is provided through the distribution ring 28, and an assembly seat 33 is provided in a sealed manner in the intercommunication area 32;

[0102] Multiple vacuum nozzles 34 are evenly connected and arranged on the assembly seat 33 to complete vacuum control. The multiple vacuum nozzles 34 are hidden in the intercommunication area 32 to avoid interference problems during switching and rotation. At the same time, the multiple vacuum nozzles 34 are intercommunication with the annular cavity 27;

[0103] It is worth noting that: when the deposition area 8 and the avoidance area 4 are vacuum controlled: by providing a vacuum mechanism, under normal conditions, the isolation layer 7 closes the deposition area 8, the vacuum unit is connected to the annular cavity 27 through a pipeline, and the deposition area 8 can be vacuum controlled through multiple vacuum nozzles 34. When it is necessary to load and unload the circulation mechanism, the conversion unit is started in advance, the control motor 37 is started, and the switching gear 38 is meshed with the hidden gear ring 35 to drive the distribution ring 28 to rotate, so that the vacuum nozzle 34 is transferred from the deposition area 8 to the avoidance area 4, and then the vacuum unit is controlled to complete the vacuum of the avoidance area 4. The vacuum treatment is carried out to make the vacuum state of the deposition area 8 consistent with that of the avoidance area 4, and then the isolation layer 7 is controlled to rotate to transfer the coated products to the avoidance area 4, so that the products waiting to be coated enter the deposition area 8. This design can always keep the deposition area 8 closed to avoid the problem of breaking the air, and then open the No. 1 closed door 2 and the No. 2 closed door 3 to load and unload the coated products, thereby ensuring that the vacuum state of the deposition area 8 is still maintained during loading, and then close the No. 1 closed door 2 to wait for the coating process. At the same time, when the vacuum nozzle 34 is transferred to the avoidance area 4, the linkage The trigger arc block 40 follows the movement, and the contact between the trigger arc block 40 and the roller completes the extrusion and pushing, so that the trigger arm 45 carries the arc tooth plate 46 to move and engage with the limiting gear ring 39, thereby completing the active locking of the limiting shaft 31, the central shaft 5 and the isolation layer 7, ensuring the stability of the isolation layer 7 during the vacuum treatment in the avoidance area 4, and avoiding fluctuation interference. The subsequent trigger arc block 40 follows the distribution ring 28 to reset, driving the arc tooth plate 46 to follow the reset and separate from the limiting gear ring 39 to complete the unlocking, which is beneficial to the subsequent rotation adjustment of the isolation layer 7. When the trigger arm 45 is reset, it drives the No. 1 rack 47 Following the movement, since the switching gear 38 is meshed with the No. 1 rack 47 and the No. 2 rack 50, after the switching gear 38 is switched, the No. 2 rack 50 and the cleaning member 51 thereon are pushed to move in the opposite direction, and the cleaning member 51 moves toward the limiting gear ring 39 and completes the contact. Through the contact between the cleaning member 51 and the limiting gear ring 39, during the subsequent rotation of the isolation layer 7, the cleaning member 51 contacts the limiting gear ring 39 to complete the cleaning, thereby ensuring the cleanliness. At the same time, when the isolation layer 7 needs to be controlled to rotate later, the vacuum nozzle 34 on the vacuum unit needs to be first controlled to reset to the deposition area 8, and then the flipping operation is performed;

[0104] In an embodiment of the present invention, the conversion unit includes:

[0105] A hidden gear ring 35 is sleeved on the outer wall of the distribution ring 28, and a transmission chamber 36 is opened on one side of the bottom of the coating chamber 1;

[0106] The control motor 37 is arranged in the transmission chamber 36 through a bracket. A switching gear 38 meshing with the hidden gear ring 35 is installed at the output end of the control motor 37. The position control of the distribution ring 28 is completed through the switching gear 38 and the hidden gear ring 35.

[0107] like Fig.16 As shown, in the embodiment of the present invention, the limiting unit includes:

[0108] The limiting gear ring 39 is fixedly sleeved outside the limiting shaft 31;

[0109] The trigger arc block 40 is detachably arranged on the inner wall of the distribution ring 28, and the trigger arc block 40 is arranged on the distribution ring 28 on the side close to the vacuum nozzle 34. The trigger arc block 40 is an arc-shaped structure as a whole, and the height of the trigger arc block 40 gradually increases from the starting position to the end position. The trigger operation can be completed through the trajectory line formed by the side wall of the trigger arc block 40;

[0110] The guide seat 41 is arranged on one side of the inner wall of the annular cavity 27, and the guide seat 41 is initially arranged symmetrically with the trigger arc block 40, a sliding area 42 is opened through the bottom of the guide seat 41, a slider 43 is slidably engaged in the sliding area 42, and a return spring 44 is arranged between the slider 43 and the sliding area 42;

[0111] The trigger arm 45 is slidably mounted on the guide seat 41. One end of the trigger arm 45 is fixedly connected to the slider 43. An arc tooth plate 46 cooperating with the limiting gear ring 39 is installed at the front end of the trigger arm 45. A roller is arranged at the rear end of the trigger arm 45. The triggering arc block 40 contacts the roller to complete the triggering and pushing of the arc tooth plate 46.

[0112] A first rack 47 is arranged on one side of the trigger arm 45, an extension arm 48 is installed on one side of the guide seat 41, and a conversion gear 49 is rotatably installed on the extension arm 48 through a bracket;

[0113] The second rack 50 is slidably arranged on the expansion arm 48, and the conversion gear 49 is respectively meshed with the first rack 47 and the second rack 50. A cleaning piece 51 is installed at the front end of the second rack 50. The cleaning piece 51 is made of materials such as a flexible brush and a flexible scraper. The cleaning piece 51 can be used to actively clean the limited gear ring 39. At the same time, the cleaning piece 51 can be made of a nozzle or other structure to clean the limited gear ring 39.

[0114] Embodiment 4: A vacuum coating process, the coating process specifically comprises the following steps:

[0115] Step 1: First, select the corresponding coating material according to the coating requirements, and then wait for the subsequent coating processing;

[0116] Step 2: An isolation layer 7 is provided in the coating chamber 1, and the isolation layer 7 is controlled to rotate by the rotating motor 6. Since the isolation layer 7 can actively seal the coating chamber 1, the coating chamber 1 is prevented from being broken;

[0117] Step 3, the two circulation mechanisms are carried by the isolation layer 7 to complete the flipping, and the two circulation mechanisms can be controlled to switch into the deposition area 8 to complete the coating process, and the continuous and uninterrupted coating process can be completed;

[0118] Step 4: During the coating process, the process gas used for etching is selected according to the material of the etched coating layer, thereby completing the coating control of the product;

[0119] Step 5: By providing a vacuum mechanism, the vacuum mechanism can actively switch to the deposition area 8 and the avoidance area 4 to complete the vacuum treatment of the two areas and maintain the vacuum state in the deposition area 8 and the avoidance area 4.

[0120] The present invention provides a vacuum coating device and a coating process, and the specific working principle is as follows: first, the coating product is correspondingly assembled on the two circulation mechanisms through the coating rack, and then the No. 1 closed door 2 and the No. 2 closed door 3 are closed to maintain the sealing state of the coating chamber 1. By arranging an isolation layer 7 in the coating chamber 1, the coating chamber 1 can be actively closed through the isolation layer 7, and is not disturbed by the opening and closing of the No. 1 closed door 2 and the No. 2 closed door 3, thereby avoiding the occurrence of air breaks in the coating chamber 1, improving the coating efficiency, and reducing the contact with the external environment at the same time, reducing the probability of environmental dust, impurities or other pollutants affecting the appearance of the product, and the circulation mechanism can carry the coating product to complete active flipping, thereby enhancing the coating effect. Since the isolation layer 7 actively separates the deposition area 8 from the avoidance area 4, the deposition area 8 can maintain the vacuum state for a long time. Empty state, to avoid breaking the air, since the isolation layer 7 can carry two circulation mechanisms to complete the flipping, the two circulation mechanisms can be controlled to switch into the deposition area 8 to complete the coating process, and the coated products are removed from the deposition area 8 at the same time, and the subsequent No. 1 closed door 2 and No. 2 closed door 3 can be opened to take out the finished products for loading and unloading, and continuous and uninterrupted coating processing can be completed, which greatly improves the coating efficiency. At the same time, a vacuum mechanism is provided, which can actively switch to the deposition area 8 and the avoidance area 4 to complete the vacuum treatment of the two areas and maintain the vacuum state in the deposition area 8 and the avoidance area 4, so that the isolation layer 7 carrying the two circulation mechanisms will not break the air when rotating, and at the same time can dynamically complete the vacuum state adjustment of the avoidance area 4, without repeatedly completing the vacuum recovery for the entire coating cavity 1, thereby optimizing the coating steps and improving the yield rate.

[0121] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0122] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A vacuum coating device, comprising a coating chamber, wherein a first closing door and a second closing door are rotatably mounted on both sides of the front end of the coating chamber through hinges, and an escape zone is arranged inside the first closing door and the second closing door, wherein: Also includes: A central shaft is rotatably arranged in the coating chamber, and a rotating motor connected to the central shaft is arranged at the top of the coating chamber; An isolation layer is arranged on the central axis and is in sealing and sliding contact with the inner wall of the coating chamber. The active isolation operation of the coating chamber is completed through the isolation layer, and a deposition area is formed between the isolation layer and the coating chamber. Two circulation mechanisms are symmetrically arranged on both sides of the top of the isolation layer to support the coated products. Each circulation mechanism includes a semicircular frame, multiple connecting pieces and a synchronization component. Each connecting piece is provided with a locking unit for limiting. The synchronization component controls the multiple connecting pieces on the semicircular frame to complete the rotation coating control. The control ring is concentrically arranged at the top of the coating chamber, and a half-ring magnet is arranged at the bottom of the control ring in the deposition area, and the switching control of multiple locking units on the two circulation mechanisms is completed by the half-ring magnet; The vacuum mechanism is hidden at the bottom of the coating chamber. The vacuum mechanism completes the vacuum control of the deposition area and the avoidance area in a switching manner. The vacuum mechanism is divided into a vacuum unit, a conversion unit and a limiting unit. The vacuum unit includes: A reserved circular cavity is concentrically opened at the bottom of the coating cavity; The annular cavity is arranged at the bottom of the reserved circular cavity, a distribution ring is rotatably sealed and installed at the top of the annular cavity, and a vacuum tube connected with the annular cavity is reserved in the deposition area; The plugging disk, the rotary seal is arranged on the annular cavity, and the plugging disk is detachably fixedly connected to the bottom of the central shaft, and a limiting shaft is integrally arranged at the bottom of the plugging disk; The vacuum unit also includes: The intercommunication area is provided through the distribution ring, and an assembly seat is sealed in the intercommunication area; Multiple vacuum nozzles are evenly connected and arranged on the assembly seat to complete vacuum control; The conversion unit includes: The hidden gear ring is sleeved on the outer wall of the distribution ring, and a transmission chamber is opened on one side of the bottom of the coating chamber; The control motor is arranged in the transmission chamber through a bracket, and a switching gear meshing with the hidden gear ring is installed at the output end of the control motor, and the position control of the distribution ring is completed through the switching gear and the hidden gear ring; The defined unit includes: A limiting gear ring, a fixed sleeve is arranged outside the limiting shaft; The trigger arc block is detachably arranged on the inner wall of the distribution ring, and the trigger operation can be completed through the trajectory line formed by the side wall of the trigger arc block; The guide seat is arranged on one side of the inner wall of the annular cavity, and a sliding area is provided through the bottom of the guide seat, and a slider is slidably engaged in the sliding area; The trigger arm is slidably mounted on the guide seat, one end of the trigger arm is fixedly connected to the slider, an arc-shaped toothed plate matched with the limiting toothed ring is installed at the front end of the trigger arm, and a roller is arranged at the rear end of the trigger arm, and the triggering arc-shaped block is contacted with the roller to complete the triggering and pushing of the arc-shaped toothed plate; A rack number one is arranged on one side of the trigger arm, an extension arm is installed on one side of the guide seat, and a conversion gear is rotatably installed on the extension arm through a bracket; The second rack is slidably arranged on the expansion arm, and the conversion gear is respectively meshed with the first rack and the second rack, and a cleaning piece is installed at the front end of the second rack; The distribution ring rotates to transfer the vacuum nozzle from the deposition area to the avoidance area, and then controls the vacuum unit to complete the vacuum treatment of the avoidance area, so that the vacuum states of the deposition area and the avoidance area remain consistent. When the vacuum nozzle is transferred to the avoidance area, the extrusion and push are completed by triggering the contact between the arc block and the roller, so that the trigger arm carries the arc tooth plate to move and engage with the limiting gear ring, thereby completing the active locking of the limiting axis, the center axis and the isolation layer, ensuring the stability of the isolation layer during the vacuum treatment in the avoidance area and avoiding fluctuation interference.

2. The vacuum coating device according to claim 1, characterized in that: Each connector includes: The rotating shaft is rotatably mounted on the semicircular frame, and a synchronous wheel is fixedly sleeved on the outside of the rotating shaft; The limiting wheel is rotatably arranged on the semicircular frame and located on one side of the synchronous wheel; The hook can be detachably arranged at the bottom of the rotating shaft to complete the support of the coating rack.

3. A vacuum coating device according to claim 2, characterized in that: Each synchronization component consists of: A driving wheel is rotatably arranged on a semicircular frame, a driving motor is arranged on the semicircular frame through a bracket and is connected to the driving wheel by transmission, and a control wheel is rotatably arranged on the semicircular frame at one side of the driving wheel; The synchronous belt and the transmission sleeve are arranged between the driving wheel and multiple synchronous wheels to complete the rotation control.

4. The vacuum coating device according to claim 3, characterized in that: Each locking unit includes: The control area is opened on the hook, and a lifting platform is installed in the control area by sliding engagement. A pressing piece is detachably installed on one side of the lifting platform, and the closing and blocking of the open area of ​​the hook is completed by moving the pressing piece downward; The control spring is arranged between the lifting platform and the bottom of the control area.

5. The vacuum coating device according to claim 4, characterized in that: Each locking unit also includes: A trigger rod is slidably passed through the rotating shaft and connected to the top of the lifting platform; A permanent magnet is arranged on the top of the trigger rod, and the permanent magnet cooperates with the semi-ring magnet to complete the control.

6. The vacuum coating equipment according to claim 5, characterized in that: The trigger arc block is arranged on the distribution ring at a side close to the vacuum nozzle, and a return spring is arranged between the slide block and the sliding area.

7. A vacuum coating process, using a vacuum coating device as claimed in any one of claims 1 to 6, characterized in that: The coating process specifically includes the following steps: Step 1: First, select the corresponding coating material according to the coating requirements, and then wait for the subsequent coating processing; Step 2: An isolation layer is provided in the coating chamber, and the isolation layer is controlled to rotate by a rotating motor. Since the isolation layer can actively seal the coating chamber, the coating chamber is prevented from being broken; Step 3: The two circulation mechanisms are carried by the isolation layer to complete the flipping, and the two circulation mechanisms can be controlled to switch into the deposition area to complete the coating process, and the continuous and uninterrupted coating process can be completed; Step 4: During the coating process, the process gas used for etching is selected according to the material of the etched coating layer, thereby completing the coating control of the product; Step 5: By providing a vacuum mechanism, the vacuum mechanism can actively switch to the deposition area and the avoidance area, complete the vacuum treatment of the two areas, and maintain the vacuum state in the deposition area and the avoidance area.

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