A temperature control structure and device

Abstract

The present invention discloses a temperature control structure and device, the temperature control structure includes a plurality of valve structures, the temperature control structure also includes a substrate, a substrate input pipeline, a temperature control input pipeline, a temperature control output pipeline and a substrate output pipeline; the substrate includes a plurality of valve holes opened on the substrate, the plurality of valve holes include a supply valve hole and a return valve hole, the bottom end surface of the supply valve hole is provided with a supply valve channel, the bottom end surface of the return valve hole is provided with a return valve channel, and the supply valve hole and the return valve hole are both sealed with corresponding valve structures, and the valve seats of the two valve structures are respectively arranged corresponding to the supply valve channel and the return valve channel; one end of the substrate input pipeline is connected to the supply valve channel; one end of the temperature control input pipeline is connected to the supply valve hole; one end of the temperature control output pipeline is connected to the return valve channel; one end of the substrate output pipeline is connected to the return valve hole. The present invention saves the use of connecting pipelines and seals, and also solves the problem of micro-leakage of temperature control medium.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor temperature control equipment, and in particular to a temperature control structure and device. Background Art

[0002] With the rapid development of semiconductor equipment and industry, the automation level of semiconductor equipment is getting higher and higher, especially the fluid control in semiconductor is particularly important. Existing semiconductor temperature control structures, such as ESC (electrostatic chuck) temperature control structures, are usually formed by multiple independently set valve bodies and related connecting pipes and seals. Multiple valve bodies are interconnected through connecting pipes, and seals are set at the connection to ensure sealing performance.

[0003] In the prior art, after multiple valve bodies are separately arranged, they need multiple connecting pipes and other connecting devices to communicate with each other, which has high requirements on the spatial layout of the valve bodies and connecting pipes, and requires the use of multiple sets of connecting pipes and corresponding seals to seal between the valve bodies and connecting pipes, which undoubtedly increases the number of various parts used. In addition, since the temperature control medium (such as fluorinated liquid) in the semiconductor field is usually volatile, the seals or connecting pipes will cause micro-leakage of the temperature control medium after long-term use. This will undoubtedly affect the clean production environment of the semiconductor equipment, and then affect the entire production process, causing serious economic losses.

[0004] Based on this, a new technical solution is needed. Summary of the invention

[0005] In view of this, an embodiment of the present invention provides a temperature control structure and device to at least solve the problem in the prior art that multiple valve bodies are separately provided, which increases components and easily causes micro-leakage of the temperature control medium.

[0006] The embodiment of the present invention provides the following technical solutions:

[0007] An embodiment of the present invention provides a temperature control structure, comprising a plurality of valve structures, wherein the temperature control structure further comprises a substrate, a substrate input pipeline, a temperature control input pipeline, a temperature control output pipeline and a substrate output pipeline;

[0008] The base body includes a plurality of valve holes opened on the base body, the plurality of valve holes include a supply valve hole and a return valve hole, the bottom end surface of the supply valve hole is provided with a supply valve channel, the bottom end surface of the return valve hole is provided with a return valve channel, wherein the supply valve hole and the return valve hole are both sealed with corresponding valve structures, and the valve seats of the two valve structures are respectively arranged corresponding to the supply valve channel and the return valve channel to control the opening and closing of the supply valve channel and the return valve channel;

[0009] One end of the substrate input pipeline is connected to the supply valve channel, and the other end is used to obtain the temperature control medium; one end of the temperature control input pipeline is connected to the supply valve hole, and the other end is connected to the temperature-controlled device; one end of the temperature control output pipeline is connected to the return valve channel, and the other end is connected to the temperature-controlled device; one end of the substrate output pipeline is connected to the return valve hole, and the other end is used to output the temperature control medium;

[0010] Among them, when the temperature of the equipment to be temperature controlled is controlled, the valve seats of the two valve structures stop blocking the supply valve channel and the return valve channel, so that the temperature control medium flows through the substrate input pipeline, the supply valve channel, the supply valve hole, the temperature control input pipeline, the equipment to be temperature controlled, the temperature control output pipeline, the return valve hole, the return valve channel and the substrate output pipeline in sequence.

[0011] Further, the plurality of valve holes further include a bypass valve hole, a first connecting channel and a second connecting channel;

[0012] A bypass valve channel is formed on the bottom end surface of the bypass valve hole, the valve structure is sealed on the bypass valve hole, a valve seat of the valve structure is arranged corresponding to the bypass valve channel, and the bypass valve channel is communicated with the supply valve channel through the first connecting channel, and the bypass valve hole is communicated with the return valve hole through the second connecting channel;

[0013] Among them, when the temperature control of the temperature-controlled equipment is stopped, the supply valve channel and the return valve channel are closed by the valve seats of the corresponding valve structures, and the bypass valve channel is opened by the valve seats of the corresponding valve structures, so that the temperature control medium flows through the substrate input pipeline, the first connecting channel, the bypass valve channel, the bypass valve hole, the second connecting channel and the substrate output pipeline in sequence.

[0014] Furthermore, the base body further comprises a plurality of connecting valve housings, which are integrally arranged with the base body and are located at the top end of the base body and are coaxially arranged corresponding to the plurality of valve holes;

[0015] Each of the valve structures comprises a valve cover, a valve core and a valve seat;

[0016] The valve cover sealing cover is arranged on the corresponding connecting valve housing, one end of the valve core passes through the valve cover and extends into the connecting valve housing and the corresponding valve hole, and the valve seat is arranged at the end of the valve core located in the valve hole.

[0017] Furthermore, each of the valve structures further comprises:

[0018] A bellows, the bellows is sleeved on the valve core, one end of the bellows seals between the valve core and the valve cover, and the other end of the bellows seals between the bellows and the valve core;

[0019] Wherein, when the valve core moves into the valve hole or out of the valve hole, the bellows can be compressed or extended under the action of the valve core.

[0020] Furthermore, the outer edge of the valve cover is covered on the top end of the corresponding connecting valve housing, and the outer edge of the valve cover and the top end of the connecting valve housing are sealed by a first sealing ring.

[0021] Furthermore, the valve seat and / or the first sealing ring are both made of PCTFE material.

[0022] Furthermore, an outer edge of the valve seat facing the bottom end surface of the valve hole is arranged to be an arc-shaped chamfer, so that a line seal is formed between the valve seat and the bottom end surface of the valve hole.

[0023] Furthermore, the valve seat and the bottom end surface of the valve hole are sealed by a second sealing ring.

[0024] Furthermore, the valve structure also includes a support frame and a valve cover nut;

[0025] The support frame includes a transverse portion and a longitudinal portion, wherein the transverse portion is pressed on the top end surface of the valve cover, and the longitudinal portion is located at the periphery of the valve core;

[0026] The valve cover nut is an annular structure, and its top end is sleeved on the transverse part, and the top end of the valve cover nut extends toward the center of the valve cover nut to form a pressure cover part that covers the transverse part, and the bottom end of the valve cover nut is connected to the corresponding outer peripheral thread of the connecting valve housing.

[0027] The present invention also provides a temperature control device, comprising:

[0028] A temperature control structure as described above;

[0029] A pneumatic actuator, wherein the telescopic shaft of the pneumatic actuator is connected to the valve core of the temperature control structure to drive the valve core to move.

[0030] Compared with the prior art, the at least one technical solution adopted in the embodiment of the present invention can achieve the following beneficial effects:

[0031] A temperature control structure of the present invention integrates multiple valve structures into the substrate by opening holes on the substrate to install valve structures, and allows the temperature control medium to flow in the valve holes or channels inside the substrate, so that the valve structure cooperates with the substrate to form a complete valve, and the valves are interconnected through the channels inside the substrate, which saves the use of connecting pipes and seals, reduces the problem of micro-leakage of the temperature control medium, and makes the temperature control structure more compact as a whole and more beautiful in appearance. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 A schematic diagram of the use of the temperature control structure of an embodiment of the present invention;

[0034] Figure 2 A side view of a substrate according to an embodiment of the present invention;

[0035] Figure 3 A top view and a side cross-sectional view of a substrate according to an embodiment of the present invention;

[0036] Figure 4 It is a cross-sectional schematic diagram of two different cross-sectional depths in a top view of a substrate according to an embodiment of the present invention;

[0037] Figure 5 is a cross-sectional view of a temperature control structure according to an embodiment of the present invention;

[0038] Figure 6 A piping diagram for use in combination with a temperature control device according to an embodiment of the present invention.

[0039] The accompanying drawings of the present invention are as follows:

[0040] 1. Temperature control structure; 10. Valve structure; 11. Valve seat; 12. Valve cover; 13. Valve core; 14. Bellows; 15. First sealing ring; 16. Arc chamfer; 17. Second sealing ring; 18. Support frame; 181. Transverse part; 182. Longitudinal part; 19. Valve cover nut; 20. Base; 21. Valve hole; 211. Supply valve hole; 212. Return valve hole; 213. Bypass valve hole; 22. Valve channel; 221. Supply valve channel; 222. Return valve channel; 223. Bypass valve channel; 23. First connecting channel; 24. Second connecting channel; 25. Connecting valve housing; 30. Base input pipeline; 40. Temperature control input pipeline; 50. Temperature control output pipeline; 60. Base output pipeline;

[0041] 2. Pneumatic actuator. DETAILED DESCRIPTION

[0042] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0043] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0044] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0045] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0046] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0047] Since the medium in the valve body has a certain volatility, there is a problem of micro-leakage of the medium after using PTFE filling seal or ordinary rubber sealing rod for sealing in the valve body, which cannot meet the micro-leakage requirements. Therefore, it is necessary to adjust the sealing form and sealing material of the valve body to avoid micro-leakage of the medium in the valve body.

[0048] Based on this, this specification embodiment proposes a processing solution: Figures 1 to 5 As shown, a temperature control structure 1 of the present invention is provided, by opening a valve hole 21 on a base body 20 to install a valve structure 10, and opening a supply valve channel 221 and a return valve channel 222 on the bottom end surfaces of the supply valve hole 211 and the return valve hole 212, and the valve seat 11 of the valve structure 10 is correspondingly arranged with the corresponding supply valve channel 221 or the return valve channel 222 to seal the supply valve channel 221 and the return valve channel 222, so that a plurality of valve structures 10 are integrated into the base body 20, and when the temperature control medium flows, the temperature control medium mainly flows through the valve hole 21 and the valve channel 22 in the base body 20, thereby solving the problem that a plurality of valve bodies need to be independently arranged and need to use a plurality of connecting pipes and seals, and due to the sealing and non-destructive functions of the base body 20 itself, under long-term use, leakage of the temperature control medium from the valve hole 21 and the valve channel 22 can also be avoided.

[0049] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0050] Example 1

[0051] like Figures 1 to 5 As shown, a temperature control structure 1 provided in an embodiment of the present invention is used to control the temperature of a device to be temperature controlled. For example, it is applied in the semiconductor field to control the low temperature of an electrostatic chuck.

[0052] Specifically, the temperature control structure 1 includes a plurality of valve structures 10, a substrate 20, a substrate input pipeline 30, a temperature control input pipeline 40, a temperature control output pipeline 50 and a substrate output pipeline 60. The substrate 20 includes a plurality of valve holes 21 opened on the substrate 20, and the plurality of valve holes 21 include a supply valve hole 211 and a return valve hole 212. The bottom end surface of the supply valve hole 211 is provided with a supply valve channel 221, and the bottom end surface of the return valve hole 212 is provided with a return valve channel 222. The supply valve hole 211 and the return valve hole 212 are both sealed with corresponding valve structures 10. The valve seats 11 of the two valve structures 10 are respectively arranged corresponding to the supply valve channel 221 and the return valve channel 222 to control the opening and closing of the supply valve channel 221 and the return valve channel 222; one end of the substrate input pipeline 30 is connected to the supply valve channel 221, and the other end is used to obtain the temperature control medium; the temperature control input pipeline 4 0 is connected to the supply valve hole 211, and the other end is connected to the temperature-controlled equipment; one end of the temperature control output pipeline 50 is connected to the reflux valve channel 222, and the other end is connected to the temperature-controlled equipment; one end of the substrate output pipeline 60 is connected to the reflux valve hole 212, and the other end is used to output the temperature control medium; wherein, when the temperature-controlled equipment is subjected to temperature control, the supply valve channel 221 and the reflux valve channel 222 are opened by the corresponding valve structure 10, so that the temperature control medium flows through the substrate input pipeline 30, the supply valve channel 221, the supply valve hole 211, the temperature control input pipeline 40, the temperature-controlled equipment, the temperature control output pipeline 50, the reflux valve channel 222, the reflux valve hole 212 and the substrate output pipeline 60 in sequence.

[0053] The base body 20 itself is a closed structure, and the shape of the base body 20 can be flexibly set according to the number of valve structures 10 .

[0054] For example, when there are two valve structures 10 , the base 20 is configured as a rectangular parallelepiped, and when there are three valve structures 10 , the base 20 is configured as a triangular prism.

[0055] The valve hole 21 is a slot for installing the valve structure 10. A valve structure 10 is installed on each valve hole 21, and the valve seat 11 of the valve structure 10 extends into the valve hole 21 to seal or open the valve channel 22 opened on the bottom end surface of the valve structure 10.

[0056] Specifically, the supply valve hole 211 is used to install the supply valve, and the return valve hole 212 is used to install the return valve.

[0057] Among them, after the base input pipeline 30 is connected to the supply valve channel 221, if the valve seat 11 in the supply valve hole 211 blocks the supply valve channel 221, the temperature control medium cannot enter the supply valve hole 211; after the temperature control output pipeline 50 is connected to the return valve channel 222, if the valve seat 11 in the return valve hole 212 blocks the return valve channel 222, the temperature control medium cannot enter the supply valve hole 211.

[0058] After the valve seat 11 in the supply valve hole 211 no longer blocks the supply valve channel 221 and the return valve channel 222 , the temperature control medium can control the temperature of the temperature-controlled device through the above-mentioned flow path, such as performing low-temperature control on the temperature-controlled device.

[0059] The present invention enables the temperature control medium to flow through the base input pipeline 30, the supply valve channel 221, the supply valve hole 211, the temperature control input pipeline 40, the device to be temperature controlled, the temperature control output pipeline 50, the return valve channel 222, the return valve hole 212 and the base output pipeline 60 in sequence, so as to achieve the temperature control of the device to be temperature controlled, thereby solving the problem in the prior art that multiple valve bodies are separately set, resulting in the need for more connecting pipelines, seals, etc.

[0060] Furthermore, the multiple valve holes 21 also include a bypass valve hole 213, a first connecting channel 23 and a second connecting channel 24; a valve structure 10 is sealed on the bypass valve hole 213, and a bypass valve channel 223 is opened on the bottom end surface of the bypass valve hole 213, and the bypass valve channel 223 is arranged corresponding to the valve seat 11 of the valve structure 10 on the bypass valve hole 213, and the bypass valve channel 223 is connected with the supply valve channel 221 through the first connecting channel 23, and the bypass valve hole 213 is connected with the return valve hole 212 through the second connecting channel 24; wherein, when the temperature control of the temperature-controlled equipment is stopped, the supply valve channel 221 and the return valve channel 222 are closed by the corresponding valve structure 10, and the bypass valve channel 223 is opened by the corresponding valve structure 10, so that the temperature control medium flows through the substrate input pipeline 30, the first connecting channel 23, the bypass valve channel 223, the bypass valve hole 213, the second connecting channel 24, and the substrate output pipeline 60 in sequence.

[0061] The valve structure 10 on the bypass valve hole 213 is used to control the opening and closing of the bypass valve channel 223 to control the flow direction of the temperature control medium.

[0062] The first connecting channel 23 and the second connecting channel 24 are channels directly opened on the base 20 and are used to guide the flow direction of the temperature control medium.

[0063] Specifically, when the supply valve channel 221 is closed by the corresponding valve seat 11 of the valve structure 10, the temperature control medium flows to the bypass valve channel 223 through the first connecting channel 23, and then enters the bypass valve hole 213 through the bypass valve channel 223. When the return valve channel 222 is closed, the temperature control medium can flow out of the base body 20 through the second connecting channel 24 and the base body output pipeline 60.

[0064] The portion of the bottom end surface of the valve hole 21 that contacts the valve seat 11 is circumferentially polished so that the bottom end surface of the valve hole 21 does not have radial radial textures to ensure the sealing between the valve seat 11 and the bottom end surface of the valve hole 21 .

[0065] In the present application, the bypass valve hole 213 and the valve structure 10 thereon are mainly used when the temperature control device is not being temperature controlled. When the temperature control of the temperature control device is stopped, the supply valve channel 221 and the return valve channel 222 are closed by the corresponding valve structure 10, so that the temperature control medium flows through the base input pipeline 30, the first connecting channel 23, the bypass valve channel 223, the bypass valve hole 213, the second connecting channel 24 and the base output pipeline 60 in sequence and flows out of the base 20.

[0066] The present application integrates the supply valve (the valve structure 10 in the supply valve hole 211), the return valve (the valve structure 10 in the return valve hole 212), and the supply valve (the valve structure 10 in the supply valve hole 211) into the multiple valve holes 21 on the base 20, and then arranges multiple valve channels 22 (such as the supply valve channel 221, the return valve channel 222, and the bypass valve channel 223) on the base 20, the first connecting channel 23 located at the lower side and connected to the supply valve channel 221 and the bypass valve channel 223 respectively, and the bypass valve channel 223 located at the upper side of the first connecting channel 23 and connected to the bypass valve hole 21 respectively. The second connecting channel 24 connected to the return valve hole 212 can make the supply valve, the return valve and the bypass valve communicate with each other, and can change the flow path of the temperature control medium in the base 20 by controlling the opening and closing of the corresponding valve channel 22, so as to achieve temperature control of the temperature-controlled device or stop temperature control of the temperature-controlled device, which solves the problem of using more connectors and seals due to the single-body setting of the existing valve structure 10, and because the temperature control medium mainly circulates in the internal channel of the base 20, there is no need to worry about micro-leakage of the temperature control medium from the channel, thereby improving the sealing ability of the temperature control structure 1.

[0067] Furthermore, if Figure 2 As shown, the base body 20 further includes a plurality of connecting valve housings 25 , which are integrally arranged with the base body 20 , are located at the top end of the base body 20 , and are coaxially arranged corresponding to the plurality of valve holes 21 .

[0068] The connecting valve housing 25 is used to install the valve structure 10 , and the interior of the connecting valve housing 25 forms an installation space for the valve structure 10 .

[0069] The connecting valve housing 25 is a cylindrical structure, and an outer circumference thereof may be provided with external threads for threaded connection with the valve structure 10 .

[0070] A connecting valve housing 25 is coaxially disposed on each valve hole 21 , and the connecting valve housing 25 is disposed around the valve hole 21 .

[0071] like Figure 5As shown, each valve structure 10 includes a valve cover 12, a valve core 13 and a valve seat 11; the valve cover 12 sealing cover is arranged on the corresponding connecting valve shell 25, one end of the valve core 13 passes through the valve cover 12 and extends into the connecting valve shell 25 and the corresponding valve hole 21, and the valve seat 11 is arranged at the end of the valve core 13 located in the valve hole 21.

[0072] The valve cover 12 is used to seal the opening connected to the valve housing 25 to prevent the temperature control medium in the valve hole 21 from volatilizing and leaking.

[0073] The other end of the valve core 13 is located outside the connecting valve housing 25 and is used to be connected to structures such as the pneumatic actuator 2 so as to move up and down in the connecting valve housing 25 and the valve hole 21 .

[0074] The valve seat 11 is used to control the opening and closing of the valve channel 22 (the supply valve channel 221 , the return valve channel 222 or the bypass valve channel 223 ) in the valve hole 21 .

[0075] Specifically, when the valve seat 11 moves to be squeezed against the bottom end surface of the valve hole 21, the valve seat 11 completely seals the valve channel 22 opened on the bottom end surface of the valve hole 21, so that the temperature control medium cannot enter the corresponding valve hole 21 from the valve channel 22; when the valve seat 11 moves to separate from the bottom end surface of the valve hole 21, the valve channel 22 is opened, so that the temperature control medium can enter the corresponding valve hole 21 from the valve channel 22.

[0076] The valve cover 12 , the valve core 13 , and the valve seat 11 cooperate with the valve housing 25 , the corresponding valve hole 21 , and the valve channel 22 to form a complete valve structure.

[0077] The connecting valve housing 25 of the present invention cooperates with the valve cover 12 to seal the temperature control medium in the valve hole 21 to prevent leakage. The valve seat 11 can control the opening and closing of the corresponding valve channel 22, thereby adjusting and changing the flow path of the temperature control medium to achieve temperature control or stop temperature control of the temperature-controlled equipment.

[0078] In some of the embodiments, each valve structure 10 also includes a bellows 14, which is sleeved on the valve core 13, one end of the bellows 14 seals between the valve core 13 and the valve cover 12, and the other end seals between the bellows 14 and the valve core 13; wherein, when the valve core 13 moves into or out of the valve hole 21, the bellows 14 can be compressed or extended under the action of the valve core 13.

[0079] The bellows 14 can be stretched to increase its length or compressed to reduce its length, and it can still remain closed during the stretching or compression process.

[0080] Specifically, after the bellows 14 is sleeved on the valve core 13, one end of the bellows 14 is sealed and fixedly connected to the valve cover 12, such as by gluing; the other end of the bellows 14 is sealed and fixedly connected to the valve seat 11, so that one end of the bellows 14 seals the gap between the valve core 13 and the valve cover 12, and the other end of the bellows 14 seals the gap between the bellows 14 and the valve core 13, thereby preventing the temperature control medium in the valve hole 21 from leaking during the movement of the valve core 13.

[0081] In some of the embodiments, one end of the bellows 14 is connected to the inner wall of the valve housing 25 to seal the gap between the valve cover 12 and the valve core 13 .

[0082] The present application uses the bellows 14 to seal the valve structure 10 , thereby isolating the temperature control medium to the outside of the gap between the valve core 13 and the valve cover 12 , thereby preventing the temperature control medium from leaking from between the valve core 13 and the valve cover 12 .

[0083] Furthermore, the outer edge cover of the valve cover 12 is arranged on the top end of the corresponding connecting valve shell 25, and the outer edge of the valve cover 12 and the top end of the connecting valve shell 25 are sealed by a first sealing ring 15, and the first sealing ring 15 is used to seal the outer edge of the valve cover 12 and the top end of the connecting valve shell 25 to avoid micro-leakage of the temperature control medium in the valve hole 21.

[0084] Specifically, the valve seat 11 and / or the first sealing ring 15 are both made of PCTFE material.

[0085] Among them, PCTFE material has excellent chemical stability and corrosion resistance and can be used under extreme conditions. Its molecular structure contains chlorine atoms, which makes PCTFE perform well in high temperature, high humidity and highly corrosive environments, especially its chemical stability at high temperature is better than PTFE. Therefore, the first sealing ring 15 and the valve seat 11 can still maintain complete functions after long-term use, thereby avoiding the problem of the first sealing ring 15 and the valve seat 11 having a reduced sealing performance after long-term use.

[0086] More specifically, the valve cover 12 includes an extension portion extending into the valve housing 25 and an outer edge located outside the extension portion; a through hole for the valve core 13 to enter and exit is opened on the extension portion, and the outer edge is mainly used to cover the top of the side wall of the valve housing 25.

[0087] The first sealing ring 15 can be disposed in an annular groove opened at the top end of the connecting valve housing 25 , and the height of the first sealing ring 15 is greater than the depth of the annular groove.

[0088] Furthermore, the outer edge of the valve seat 11 facing the bottom end surface of the valve hole 21 is set as an arc chamfer 16, so that a line seal is formed between the valve seat 11 and the bottom end surface of the valve hole 21 to increase the sealing strength between the valve seat 11 and the bottom end surface of the valve hole 21.

[0089] Specifically, when the valve seat 11 is made of PCTFE material, the valve seat 11 has a certain elasticity. Therefore, when the valve seat 11 is driven by the valve core 13 to squeeze the bottom end surface of the valve hole 21, since the outer edge of the valve seat 11 is an arc-shaped chamfer 16, the arc-shaped chamfer 16 part will be compressed downward and abut against the outer edge of the valve seat 11, thereby improving the sealing strength between the valve seat 11 and the bottom end surface of the valve hole 21.

[0090] Furthermore, the valve seat 11 and the bottom end surface of the valve hole 21 are sealed by a second sealing ring 17 .

[0091] The second sealing ring 17 is made of PCTFE material and is disposed in an annular groove provided on the valve seat 11 . The height of the second sealing ring 17 is greater than the depth of the annular groove.

[0092] Furthermore, the valve structure 10 also includes a support frame 18 and a valve cover nut 19; the support frame 18 includes a transverse portion 181 and a longitudinal portion 182, the transverse portion 181 is pressed on the top end surface of the valve cover 12, and the longitudinal portion 182 is located on the periphery of the valve core 13; the valve cover nut 19 is an annular structure, and its top end is sleeved on the transverse portion 181, and the top end of the valve cover nut 19 extends toward the center of the valve cover nut 19 to form a pressure cover portion of the pressure cover transverse portion 181, and the bottom end of the valve cover nut 19 is connected to the corresponding peripheral thread of the connecting valve housing 25.

[0093] Specifically, the longitudinal section of the side wall of the support frame 18 is formed into an L-shaped structure.

[0094] Among them, a supporting step is provided at the inner top end of the longitudinal part 182, and the supporting step is used to support the pneumatic actuator 2 to extend into the shell of the longitudinal part 182; a limiting step is provided at the inner middle part of the longitudinal part 182, and the limiting step is used to limit the maximum stroke of the telescopic shaft of the pneumatic actuator 2.

[0095] The side wall longitudinal section of the valve cover nut 19 is formed into a “┐”-shaped structure. The valve cover nut 19 is used to threadedly connect with the connecting valve housing 25 , and then press the valve cover 12 onto the top of the connecting valve housing 25 through the support frame 18 .

[0096] The working principle of the embodiment of the present invention is as follows:

[0097] When the temperature-controlled device is temperature-controlled, the valve seat 11 in the supply valve hole 211 and the valve seat 11 in the return valve hole 212 move upward to open the supply valve channel 221 and the return valve channel 222, and the valve seat 11 in the bypass valve is tightly closed to block the bypass valve channel 223;

[0098] The input end of the temperature-controlled device is connected to the temperature-controlled input pipe 40, and the output end of the temperature-controlled device is connected to the temperature-controlled output pipe 50, so that the temperature-controlled medium flows through the substrate input pipe 30, the first connecting channel 23, the bypass valve channel 223, the bypass valve hole 213, the second connecting channel 24 and the substrate output pipe 60 in sequence and flows out of the substrate 20.

[0099] When the temperature control of the temperature-controlled device is stopped, the valve seat 11 in the supply valve hole 211 and the valve seat 11 in the return valve hole 212 remain tightly closed to block the supply valve channel 221 and the return valve channel 222, and the valve seat 11 in the bypass valve is opened, so that the temperature control medium flows through the substrate input pipe 30, the first connecting channel 23, the bypass valve channel 223, the bypass valve hole 213, the second connecting channel 24 and the substrate output pipe 60 in sequence to flow out of the substrate 20, so that the temperature control medium flows out without passing through the temperature-controlled device.

[0100] The valve seat 11 of the present invention is made of PCTFE material, which can meet the requirements of sealing fluid at low temperature. The valve core 13 is sealed with a bellows 14, which not only ensures the reliability of the valve core 13 sealing, but also meets the ISO 15848 micro-leakage C-level sealing requirements. In addition, a double-arc sealing gasket is designed between the valve housing 25 and the valve cover 12, which is also made of PCTFE material to ensure low-temperature sealing performance.

[0101] The base 20 of the embodiment of the present invention has a reasonable layout, clear logic, and strong functional feasibility. The corresponding valve channel 22 can be opened by the valve seat 11 to realize the temperature control or stop the temperature control of the temperature control equipment. The bellows 14 is used for sealing in the valve structure 10, which not only ensures the reliability of the valve core 13 sealing, but also meets the ISO 15848 micro-leakage C-level sealing requirements. The annular surface where the bottom end face of the valve hole 21 contacts the valve seat 11 is circumferentially polished, and radial radial textures are not allowed to ensure good sealing.

[0102] The overall structure of the invention is short and compact, the installation is simple and convenient, the volume is small, the small space of the semiconductor equipment can be met, and the arrangement is convenient.

[0103] Example 2

[0104] like Figure 1 As shown, this embodiment provides a temperature control device, including a temperature control structure 1 and a pneumatic actuator 2 as described in Example 1; wherein the telescopic shaft of the pneumatic actuator 2 is connected to the valve core 13 of the temperature control structure 1 to drive the valve core 13 to move.

[0105] The pneumatic actuator 2 may be a cylinder.

[0106] Specifically, the pneumatic actuator 2 includes a shell having an outlet for the telescopic shaft to extend out of the shell. The outlet extends into the support frame 18 of the temperature control structure 1 and is supported by a support step. After the telescopic shaft is connected to the valve core 13, the maximum stroke is limited by a limit step.

[0107] The pneumatic actuator 2 further includes components such as a piston, a spring, an O-ring, and an air pipe joint, and its assembly method is the same as that of the existing pneumatic actuator 2, which will not be described in detail here.

[0108] Under normal circumstances, the spring of the pneumatic actuator 2 presses the piston, and the piston is transmitted to the valve seat 11 through the valve core 13, so that the valve seat 11 presses the bottom end surface of the valve hole 21 and ensures the sealing performance between the valve seat 11 and the bottom end surface of the valve hole 21.

[0109] The working principle of the pneumatic actuator 2 is as follows:

[0110] The gas enters the pneumatic actuator 2 from the pneumatic joint, pushes the piston, compresses the spring, drives the valve core 13 to move upward, the valve seat 11 is separated from the valve body, and the valve structure 10 is opened. When the gas is cut off, the piston moves downward under the action of the spring force, pushes the valve core 13 and the valve seat 11 downward, squeezes the valve body sealing surface, and the valve structure 10 is closed.

[0111] The temperature control device of the present invention can be used in combination to meet the needs of different temperature-controlled devices. Figures 5 and 6 As shown, when multiple temperature control devices are used in combination, the temperature control input pipes of the multiple temperature control devices can be connected to the input end of the temperature-controlled device (ESC) respectively, and the temperature control output pipes of the multiple temperature control devices can be connected to the output end of the temperature-controlled device (ESC) respectively.

[0112] The base 20 of the present invention is designed to be triangular and is provided with three groups of valve holes 21 for installing three valve structure 10 components and a pneumatic actuator 2. The three valve structures 10 with bellows 14 are combined into a whole through connecting parts. The structure is compact and the appearance is beautiful, which reduces the risk of leakage when the shell is designed as a separate monomer and saves a variety of connecting components.

[0113] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the product embodiment described later, since it corresponds to the method, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0114] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A temperature control structure, comprising a plurality of valve structures, characterized in that: The temperature control structure also includes a substrate, a substrate input pipeline, a temperature control input pipeline, a temperature control output pipeline and a substrate output pipeline; The base body includes a plurality of valve holes opened on the base body, the plurality of valve holes include a supply valve hole and a return valve hole, the bottom end surface of the supply valve hole is provided with a supply valve channel, the bottom end surface of the return valve hole is provided with a return valve channel, wherein the supply valve hole and the return valve hole are both sealed with corresponding valve structures, and the valve seats of the two valve structures are respectively arranged corresponding to the supply valve channel and the return valve channel to control the opening and closing of the supply valve channel and the return valve channel; One end of the substrate input pipeline is connected to the supply valve channel, and the other end is used to obtain the temperature control medium; one end of the temperature control input pipeline is connected to the supply valve hole, and the other end is connected to the device to be temperature controlled; one end of the temperature control output pipeline is connected to the return valve channel, and the other end is connected to the device to be temperature controlled; one end of the substrate output pipeline is connected to the return valve hole, and the other end is used to output the temperature control medium; Wherein, when the temperature of the device to be temperature-controlled is being controlled, the valve seats of the two valve structures stop blocking the supply valve channel and the return valve channel, so that the temperature control medium flows through the substrate input pipeline, the supply valve channel, the supply valve hole, the temperature control input pipeline, the device to be temperature-controlled, the temperature control output pipeline, the return valve hole, the return valve channel and the substrate output pipeline in sequence; The plurality of valve holes further include a bypass valve hole, a first connecting channel, and a second connecting channel; A bypass valve channel is provided at the bottom end surface of the bypass valve hole, the valve structure is sealed on the bypass valve hole, the valve seat of the valve structure is arranged corresponding to the bypass valve channel, and the bypass valve channel is connected with the supply valve channel through the first connecting channel, and the bypass valve hole is connected with the return valve hole through the second connecting channel.

2. The temperature control structure according to claim 1, characterized in that: When the temperature control of the temperature-controlled equipment is stopped, the supply valve channel and the return valve channel are closed by the valve seats of the corresponding valve structures, and the bypass valve channel is opened by the valve seats of the corresponding valve structures, so that the temperature control medium flows through the substrate input pipeline, the first connecting channel, the bypass valve channel, the bypass valve hole, the second connecting channel and the substrate output pipeline in sequence.

3. The temperature control structure according to claim 2, characterized in that: The base body further comprises a plurality of connecting valve housings, which are integrally arranged with the base body, are located at the top end of the base body, and are coaxially arranged corresponding to the plurality of valve holes; Each of the valve structures comprises a valve cover, a valve core and a valve seat; The valve cover sealing cover is arranged on the corresponding connecting valve housing, one end of the valve core passes through the valve cover and extends into the connecting valve housing and the corresponding valve hole, and the valve seat is arranged at the end of the valve core located in the valve hole.

4. The temperature control structure according to claim 3, characterized in that: Each of the valve structures further comprises: A bellows, the bellows is sleeved on the valve core, one end of the bellows seals between the valve core and the valve cover, and the other end of the bellows seals between the bellows and the valve core; Wherein, when the valve core moves into the valve hole or out of the valve hole, the bellows can be compressed or extended under the action of the valve core.

5. The temperature control structure according to claim 3, characterized in that: The outer edge of the valve cover is covered on the top end of the corresponding connecting valve housing, and the outer edge of the valve cover and the top end of the connecting valve housing are sealed by a first sealing ring.

6. The temperature control structure according to claim 5, characterized in that: The valve seat and / or the first sealing ring are both made of PCTFE material.

7. The temperature control structure according to any one of claims 3 to 6, characterized in that: The outer edge of the valve seat facing the bottom end surface of the valve hole is arranged as an arc chamfer, so that a line seal is formed between the valve seat and the bottom end surface of the valve hole.

8. The temperature control structure according to claim 7, characterized in that: The valve seat and the bottom end surface of the valve hole are sealed by a second sealing ring.

9. The temperature control structure according to claim 3, characterized in that: The valve structure also includes a support frame and a valve cover nut; The support frame includes a transverse portion and a longitudinal portion, wherein the transverse portion is pressed on the top end surface of the valve cover, and the longitudinal portion is located at the periphery of the valve core; The valve cover nut is an annular structure, and its top end is sleeved on the transverse part, and the top end of the valve cover nut extends toward the center of the valve cover nut to form a pressure cover part that covers the transverse part, and the bottom end of the valve cover nut is connected to the corresponding outer peripheral thread of the connecting valve housing.

10. A temperature control device, characterized in that: include: The temperature control structure according to any one of claims 1 to 9; A pneumatic actuator, wherein the telescopic shaft of the pneumatic actuator is connected to the valve core of the temperature control structure to drive the valve core to move.

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