Illumination light splitting device

Abstract

The invention provides an illumination light splitting device, which belongs to the field of imaging and comprises a lamp chamber, a light source arranged in the lamp chamber and an ellipsoid reflector arranged on the bottom surface; the object plane of the relay lens group is arranged at the second focal plane of the ellipsoid reflector, the relay lens group is used for splitting light of the lamp chamber, the relay lens group comprises a convergence collimation unit, a light splitting element, a first light splitting unit and a second light splitting unit, the distance between the convergence collimation unit and the first light splitting unit is not smaller than the pupil plane diameter of the relay lens group, and the distance between the convergence collimation unit and the second light splitting unit is not smaller than the pupil plane diameter of the relay lens group. The converging and collimating unit is used for converging the light of the lamp chamber and collimating the light into parallel light; the light splitting element is arranged on the pupil plane of the relay lens group and divides the parallel light into a first light beam parallel to the parallel light and a second light beam perpendicular to the parallel light; the first light splitting unit processes the first light beam to form a first illumination surface; and the second light splitting unit processes the second light beam to form a second illumination surface. Through the processing scheme provided by the invention, different resolution imaging detection is realized, and different NA illumination is provided for different working conditions.

Description

Technical Field

[0001] The invention relates to the field of imaging, and in particular to an illumination spectroscopic device. Background Art

[0002] In imaging and detection equipment, the lighting system is often required to provide light source illumination. With the improvement of image quality requirements of imaging systems and the increase of detection capabilities of detection equipment, the requirements for lighting sources are also increasing. These requirements are mainly for illumination intensity, uniformity, and output NA.

[0003] In order to realize multi-light path illumination, it is often necessary to split the light source. The traditional splitting method is to cut and split the light source image point on the image plane, and use the light from different positions of the image plane for illumination. Commonly used solutions are fiber optic splitting and prism splitting. The sub-light sources after splitting are highly homogeneous, and only indifferent splitting of light energy can be realized, and differentiated splitting of light energy cannot be realized. Indifferent specifically means that the output NA of each sub-light source after splitting is the same, and the optical performance of the sub-light sources after splitting is basically the same, with no difference. Summary of the invention

[0004] Therefore, in order to overcome the above-mentioned shortcomings of the prior art, the present invention provides an illumination spectrometer that can realize different resolution imaging detection and provide different NA illumination for different working conditions.

[0005] In order to achieve the above-mentioned purpose, the present invention provides an illumination spectrometer, comprising: a lamp house, in which a light source is arranged, and the bottom surface is an ellipsoid reflector; a relay mirror group, whose object plane is arranged at the second focal plane of the ellipsoid reflector, and is used to split the light of the lamp house, the relay mirror group comprises a converging and collimating unit, a spectrometer element, a first spectrometer unit and a second spectrometer unit, the distance between the converging and collimating unit and the first spectrometer unit is not less than the pupil plane diameter of the relay mirror group, wherein the converging and collimating unit converges the light of the lamp house and collimates it into parallel light; the spectrometer element is arranged on the pupil plane of the relay mirror group, and divides the parallel light into a first light beam parallel to the parallel light and a second light beam perpendicular to the parallel light; the first spectrometer unit processes the first light beam to form a first illumination surface; the second spectrometer unit processes the second light beam to form a second illumination surface.

[0006] In one of the embodiments, the beam splitting element is a semi-transparent and semi-reflective mirror, and the short axis of the ellipsoidal reflector is not less than the pupil diameter of the relay lens assembly.

[0007] In one of the embodiments, the reflectivity of the semi-transparent and semi-reflective mirror ranges from 45% to 55%.

[0008] In one embodiment, the beam splitting element is a reflector, and the short axis of the ellipsoidal reflector is smaller than the pupil diameter of the relay mirror assembly.

[0009] In one of the embodiments, the short axis of the ellipsoid reflector is perpendicular to the optical axis of the parallel light, and the angle between the long axis of the ellipsoid reflector and the optical axis is 30° to 60°.

[0010] In one embodiment, the ratio of the major axis to the minor axis of the ellipsoidal reflector is in the range of 1.2 to 1.8:1.

[0011] In one of the embodiments, a coating area is provided on the reflector, and the coating area is in a square, circular, elliptical or polygonal shape.

[0012] In one embodiment, a plurality of coating regions are disposed on the reflector, and each coating region has a different transmittance and reflectance.

[0013] In one of the embodiments, the illumination spectrometer further includes a pupil phase modulator disposed between the lamp house and the relay mirror assembly.

[0014] In one of the embodiments, the pupil phase modulator is a dipole illumination pupil adjuster or a quadrupole illumination pupil adjuster.

[0015] Compared with the prior art, the advantages of the present invention are: by performing spectroscopy at the pupil plane of the relay mirror group, it is possible to achieve spectroscopy of light energy in multiple optical paths and different output angles, realize differentiated lighting schemes, and at the same time provide lighting quality for different lighting schemes to meet the increasing differentiated needs of ground lighting such as illumination, uniformity, and output NA. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 is a schematic structural diagram of an illumination spectrometer in an embodiment of the present invention;

[0018] Figure 2 is a schematic diagram of the ellipsoid where the lamp chamber is located in an embodiment of the present invention;

[0019] Figure 3 a and 3b are schematic diagrams of light splitting of two illumination surfaces of the illumination light splitting device in an embodiment of the present invention;

[0020] Figure 4is a schematic structural diagram of an illumination spectrometer in another embodiment of the present invention;

[0021] Figure 5 5a and 5b are schematic diagrams of light splitting of two illumination surfaces of an illumination light splitting device in another embodiment of the present invention;

[0022] Figure 6 is a schematic diagram of a light splitting device using a diode lighting pupil adjuster in another embodiment of the present invention;

[0023] Figure 7 It is a schematic diagram of the spectroscopic view of another embodiment of the present invention in which the illumination spectroscopic device adopts a quadrupole illumination pupil adjuster. DETAILED DESCRIPTION

[0024] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0025] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0026] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0027] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0028] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0029] like Figure 1 As shown, an embodiment of the present application provides an illumination spectrometer including a lamp house 10 and a relay lens assembly 20 .

[0030] The lamp chamber 10 has a light source 11 disposed therein and an ellipsoid reflector 12 at the bottom.

[0031] The light source 11, i.e., the light emitting point 11, can provide light energy of various wavelengths, including ultraviolet, infrared, and visible bands. In some embodiments, the light source 11 can select a monochromatic lamp or a mercury lamp light source. In one embodiment, the light source 11 can be arranged at the first focus of the ellipsoidal reflector, so that the ellipsoidal reflector 12 can collect the light energy of the light source 11 to a large extent.

[0032] The ellipsoid reflector 12 can collect the light energy of the light source 11 and form a convergent light spot at the second focus of the ellipsoid reflector, wherein the surface where the light spot is located is the lamp room focal plane LF.

[0033] The object plane of the relay lens group 20 is set at the second focal plane of the ellipsoidal reflector 12, which is used to split the light in the lamp room, realize the light energy splitting of multiple light paths and different emission angles, and realize differentiated lighting solutions. Figure 1 As shown, the relay lens assembly 20 includes a converging and collimating unit 21, a beam splitting element 22, a first beam splitting unit 23 and a second beam splitting unit 24. The distance between the converging and collimating unit 21 and the first beam splitting unit 23 is not less than the pupil diameter of the relay lens assembly.

[0034] The converging and collimating unit 21 converges the light from the lamp house and collimates it into parallel light. The converging and collimating unit 21 includes a converging lens 211 and a collimating lens 212. The exit surface of the collimating lens 212 forms parallel light that is approximately collimated light.

[0035] The beam splitter 22 is disposed on the pupil plane of the relay lens assembly, and splits the parallel light into a first beam parallel to the parallel light and a second beam perpendicular to the parallel light.

[0036] The first light splitting unit 23 processes the first light beam to form a first illumination surface. The first light splitting unit 23 includes a collimating lens 231 for collimating the first light beam and a lens 232 for forming a light field.

[0037] The second light splitting unit 24 processes the second light beam to form a second illumination surface. The second light splitting unit 24 includes a collimating lens 241 for collimating the second light beam and a lens 242 for forming a light field.

[0038] The above-mentioned device can realize the splitting of light energy in multiple light paths and different output angles by splitting light at the pupil plane of the relay mirror group, realize differentiated lighting schemes, and at the same time provide lighting quality for different lighting schemes to meet the increasing differentiated needs of ground lighting such as illumination, uniformity, and output NA.

[0039] like Figure 1 As shown, in one embodiment, the beam splitting element is a semi-transparent and semi-reflecting mirror, and the short axis of the ellipsoidal reflector is not less than the pupil diameter of the relay lens group. The pupil LP of the relay lens group is located between the collimating lens 212 of the converging collimating unit 21 and the collimating lens 231 of the first beam splitting unit 23, and the distance between the collimating lens 212 of the converging collimating unit 21 and the collimating lens 231 of the first beam splitting unit 23 is not less than the pupil diameter.

[0040] By performing light splitting on the relay pupil plane LP, illumination light paths with different illumination modes can be formed.

[0041] In the pupil plane LP of the present embodiment, a semi-transparent and semi-reflective mirror 22 is used. In one embodiment, the reflectivity of the semi-transparent and semi-reflective mirror ranges from 45% to 55% reflectivity. In one embodiment, the ratio of the major axis to the minor axis of the ellipsoidal reflector ranges from 1.2 to 1.8:1. By adjusting the values ​​of the transmittance and the reflectivity, the illumination fields of the first illumination surface and the second illumination surface can be adjusted.

[0042] like Figure 2 As shown, the ratio of the major axis a to the minor axis b of the ellipsoidal reflector can be a:b=1.41414:1, and the reflectivity of the reflector can be 50% transmission and 50% reflection. At the same time, the minor axis b of the ellipsoidal reflector is larger than the pupil diameter φ, the minor axis b of the ellipsoidal reflector is perpendicular to the optical axis of the convergence collimation unit 21, and the angle between the major axis a and the optical axis is 45°.

[0043] At this time Figure 3 As shown, two illumination fields with completely identical performance can be formed on the first illumination surface LI 1 and the second illumination surface LI 2, and the pupils are also completely identical. Both illumination surfaces can be used as reference light sources for measuring equipment, and the two illumination fields do not overlap in space, which is convenient for placing the illumination object. The present application performs light splitting on the pupil surface LP to avoid the space between the object surface and the image surface, which facilitates the subsequent light energy transmission.

[0044] like Figure 4 As shown, in one embodiment, the light splitting element 22' is a reflector, and the short axis of the ellipsoidal reflector is smaller than the pupil diameter of the relay mirror assembly. The ratio of the major axis a to the minor axis b of the ellipsoidal reflector can be a:b=1.41414:1, and the reflectivity of the ellipsoidal reflector is total reflection. The minor axis b of the ellipsoidal reflector is smaller than the pupil diameter φ, and the minor axis b of the ellipsoidal reflector is perpendicular to the optical axis formed by the converging collimating unit 21, and the angle between the major axis a and the optical axis is 45°.

[0045] At this time Figure 5 As shown, two illumination fields with different performances are formed on the first illumination surface LI 1' and the second illumination surface LI 2'. The first illumination surface LI 1' forms an annular illumination field, and the second illumination surface LI 2' forms a traditional illumination field. By adjusting the size of the short axis, not only different annular and traditional illumination fields can be formed, but also illumination fields with different resolutions can be formed. At the same time, the two illumination fields do not overlap in space, which is convenient for placing illumination objects.

[0046] In one embodiment, a coating area is provided on the reflector, and the coating area is in a square, circular, elliptical or polygonal shape.

[0047] In one embodiment, the reflector can be coated as needed, and the transmittance and reflectance of each coating area can be the same or different. By setting different coating transmittances, different transmission and reflection ratios can be formed, thereby forming a variety of lighting surfaces.

[0048] In one embodiment, the short axis of the ellipsoidal reflector is perpendicular to the optical axis of the parallel light, and the angle between the long axis of the ellipsoidal reflector and the optical axis is 30° to 60°.

[0049] In one embodiment, the illumination spectrometer further includes a pupil phase modulator disposed between the lamp house and the relay mirror assembly.

[0050] In one embodiment, the pupil phase modulator is a dipole illumination pupil adjuster or a quadrupole illumination pupil adjuster. By configuring different pupil modulators, for example, the pupil phase modulator is a dipole illumination pupil adjuster, the following can be formed: Figure 6 For example, the pupil phase modulator is a quadrupole illumination pupil modulator, which can form a light field such as Figure 7 Light field. Different lighting schemes can be operated independently, realizing independent and diversified lighting methods.

[0051] By configuring the reflectivity of different reflection positions of the pupil modulator, a variety of pupil illumination mode configurations can be achieved.

[0052] Embodiment 1

[0053] like Figure 1 As shown, the illumination spectrometer comprises a lamp house 10 and a relay lens assembly 20 .

[0054] The lamp chamber 10 has a light source 11 disposed therein and an ellipsoid reflector 12 at the bottom.

[0055] The light source 11, i.e., the light emitting point 11, can provide light energy of various wavelengths, including ultraviolet, infrared, and visible bands. Specifically, the light source 11 uses a mercury lamp light source, which has a characteristic of a narrow single-wavelength FWHM, and the single-wavelength FWHM is ≤10nm. In one embodiment, the light source 11 can be arranged at the first focus of the ellipsoidal reflector, so that the ellipsoidal reflector 12 can collect the light energy of the light source 11 to a large extent.

[0056] The ellipsoid reflector 12 can collect the light energy of the light source 11 and form a convergent light spot at the second focus of the ellipsoid reflector, wherein the surface where the light spot is located is the lamp room focal plane LF.

[0057] The relay lens assembly 20 comprises a converging and collimating unit 21, a beam splitting element 22, a first beam splitting unit 23 and a second beam splitting unit 24. The distance between the converging and collimating unit 21 and the first beam splitting unit 23 is not less than the pupil diameter of the relay lens assembly.

[0058] The converging and collimating unit 21 converges the light from the lamp house and collimates it into parallel light. The converging and collimating unit 21 includes a converging lens 211 and a collimating lens 212. The exit surface of the collimating lens 212 forms parallel light that is approximately collimated light.

[0059] The beam splitter 22 is arranged at the pupil plane of the relay lens group, and splits the parallel light into a first beam parallel to the parallel light and a second beam perpendicular to the parallel light. The beam splitter 22 is a semi-transparent and semi-reflective mirror, and the short axis of the ellipsoidal reflector is not less than the pupil plane diameter of the relay lens group. The pupil plane LP of the relay lens group is located between the collimating lens 212 of the converging collimating unit 21 and the collimating lens 231 of the first beam splitting unit 23, and the distance between the collimating lens 212 of the converging collimating unit 21 and the collimating lens 231 of the first beam splitting unit 23 is greater than the pupil plane diameter.

[0060] The first light splitting unit 23 processes the first light beam to form a first illumination surface. The first light splitting unit 23 includes a collimating lens 231 for collimating the first light beam and a lens 232 for forming a light field.

[0061] The second light splitting unit 24 processes the second light beam to form a second illumination surface. The second light splitting unit 24 includes a collimating lens 241 for collimating the second light beam and a lens 242 for forming a light field.

[0062] By performing light splitting on the relay pupil plane LP, illumination light paths with different illumination modes can be formed.

[0063] At this time, the ratio of the major axis a to the minor axis b of the ellipsoidal reflector can be a:b=1.41414:1, and the reflectivity of the reflector can be 50% transmission and 50% reflection. At the same time, the minor axis b of the ellipsoidal reflector is larger than the pupil diameter φ, the minor axis b of the ellipsoidal reflector is perpendicular to the optical axis of the convergence collimation unit 21, and the angle between the major axis a and the optical axis is 45°.

[0064] At this time Figure 3 As shown, two illumination fields with completely identical performance can be formed on the first illumination plane LI1 and the second illumination plane LI2, and the pupils are also completely identical. Both illumination planes can be used as reference light sources for measuring equipment, and the two illumination fields do not overlap in space, which is convenient for placing the illumination object. The present application performs light splitting on the pupil plane LP to avoid the space between the object plane and the image plane, which facilitates the subsequent light energy transmission.

[0065] Embodiment 2

[0066] like Figure 4 As shown, the beam splitting element 22 ′ in the relay mirror assembly in the illumination beam splitting device of the second embodiment is a reflector, the minor axis of the ellipsoidal reflector is smaller than the pupil diameter of the relay mirror assembly, and the rest of the configuration is consistent with that of the first embodiment.

[0067] The ratio of the major axis a to the minor axis b of the ellipsoidal reflector can be a:b=1.41414:1, and the reflectivity of the ellipsoidal reflector is total reflection. The minor axis b of the ellipsoidal reflector is smaller than the pupil diameter φ, the minor axis b of the ellipsoidal reflector is perpendicular to the optical axis formed by the converging collimating unit 21, and the angle between the major axis a and the optical axis is 45°.

[0068] At this time Figure 5 As shown, two illumination fields with different performances are formed on the first illumination surface LI 1' and the second illumination surface LI 2'. The first illumination surface LI 1' forms an annular illumination field, and the second illumination surface LI 2' forms a traditional illumination field. By adjusting the size of the short axis, not only different annular and traditional illumination fields can be formed, but also illumination fields with different resolutions can be formed. At the same time, the two illumination fields do not overlap in space, which is convenient for placing illumination objects.

[0069] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. An illumination spectrometer, characterized in that: include: A lamp room, wherein a light source is arranged inside and the bottom surface is an ellipsoid reflector; A relay mirror assembly, whose object plane is arranged at the second focal plane of the ellipsoid reflector, is used to split the light of the lamp house, the relay mirror assembly comprises a converging collimating unit, a beam splitting element, a first beam splitting unit and a second beam splitting unit, and the distance between the converging collimating unit and the first beam splitting unit is not less than the pupil diameter of the relay mirror assembly, Wherein, the converging and collimating unit converges the light from the lamp chamber and collimates it into parallel light; The beam splitter is arranged on the pupil plane of the relay lens assembly to split the parallel light into a first beam parallel to the parallel light and a second beam perpendicular to the parallel light; The first light splitting unit processes the first light beam to form a first illumination surface; The second light splitting unit processes the second light beam to form a second illumination surface.

2. The illumination spectrometer according to claim 1, characterized in that: The beam splitting element is a semi-transparent and semi-reflective mirror, and the short axis of the ellipsoidal reflector is not less than the pupil diameter of the relay mirror assembly.

3. The illumination spectrometer according to claim 2, characterized in that: The reflectivity of the semi-transparent and semi-reflective mirror ranges from 45% to 55%.

4. The illumination spectrometer according to claim 1, characterized in that: The beam splitting element is a reflector, and the short axis of the ellipsoidal reflector is smaller than the pupil diameter of the relay mirror assembly.

5. The illumination spectroscopic device according to claim 2 or 4, characterized in that: The short axis of the ellipsoid reflector is perpendicular to the optical axis of the parallel light, and the angle between the long axis of the ellipsoid reflector and the optical axis is 30° to 60°.

6. The illumination spectroscopic device according to any one of claims 1 to 5, characterized in that: The ratio of the major axis to the minor axis of the ellipsoidal reflector is in the range of 1.2 to 1.8:

1.

7. The illumination spectrometer according to claim 1, characterized in that: The reflector is provided with a coating area, and the coating area is in a square, circular, elliptical or polygonal shape.

8. The illumination spectrometer according to claim 1, wherein: The reflector is provided with a plurality of coating regions, and each coating region has different transmittance and reflectivity.

9. The illumination spectrometer according to claim 1, wherein: The illumination spectrometer further comprises a pupil phase modulator arranged between the lamp house and the relay mirror assembly.

10. The illumination spectrometer according to claim 9, characterized in that: The pupil phase modulator is a dipole illumination pupil adjuster or a quadrupole illumination pupil adjuster.

Images