Device and method for detecting subsurface damage signal of fused quartz variable curvature component

Abstract

The invention discloses a fused quartz variable curvature component subsurface damage signal detection device and method. The device comprises a detection module, a computer control system and a mobile platform. According to the invention, the straight track is directly mounted on the fused quartz round bar processing machine tool, and the straight track is parallel to the axis of the fused quartz round bar, so that the distance between the polarizing beam splitter and the point to be detected is kept constant in the process that the mobile platform moves along the straight track, experimental errors caused by distance change are avoided, and the detection precision can be improved; and more accurate sub-surface damage signal detection parameters at different curvatures of the fused quartz variable-curvature component can be obtained. The diaphragm is used for adjusting the diameter of the detection light beam, so that the detection precision is improved; according to the polarization laser scattering principle, the in-situ detection of the subsurface damage of the fused quartz variable-curvature component can be realized only by detecting the light intensity of the S polarized light of which the polarization state is changed, the light path is simple, and the signal processing steps are few.

Description

Technical Field

[0001] The invention relates to the technical field of nondestructive testing, and in particular to a device and method for detecting subsurface damage signals of a fused quartz variable curvature component. Background Art

[0002] Due to the hard and brittle characteristics of fused quartz glass, subsurface damage will occur on the workpiece during the grinding and scratching process. Subsurface damage will affect the performance of fused quartz glass components. Conventional subsurface damage detection methods for fused quartz components are divided into destructive detection methods and partial nondestructive detection methods. Existing methods for detecting subsurface damage of fused quartz glass are often used to detect planar components of fused quartz. For variable curvature components of fused quartz, due to their application scenarios and structural characteristics, conventional destructive detection methods and partial nondestructive detection methods cannot be applied to the detection of subsurface damage. Therefore, there is an urgent need for an efficient method to detect subsurface damage of curved surface components of fused quartz.

[0003] Methods for detecting the subsurface damage layer of fused quartz material components are mainly divided into two categories: destructive testing and non-destructive testing. Commonly used destructive testing methods such as cross-section microscopy, angle polishing, focused ion beam observation, etc. are easy to operate and the detection principle is easy to understand, but they are destructive detection processes. Before observing the damage, additional damage will be introduced due to wire cutting, grinding, corrosion, etc., which will cause the subsurface damage crack to expand, resulting in a difference between the detected subsurface damage layer depth and the original damage depth, which will bring a large error to the detection result; For example, a subsurface damage detection method for small curved surface parts based on small spot magnetorheological polishing (application publication number: CN 1168105202 A) uses a destructive detection method, which is a destructive detection process and cannot realize the in-situ detection of rotating fused quartz variable curvature components. Destructive detection steps are cumbersome, the detection cycle is long, the detection accuracy is easily affected by the operator's operating experience, and it is easy to produce large experimental errors. Therefore, it is not suitable for subsurface damage detection of fused quartz variable curvature components.

[0004] Nondestructive testing refers to testing using physical reactions produced by light, electricity, sound, etc. without destroying the workpiece. It can test the component as a whole and has high detection efficiency. At present, the non-destructive testing methods used for sub-surface damage detection of materials include total internal reflection detection technology, optical coherence tomography technology, confocal fluorescence scanning microscopy technology, etc. Among them: the total internal reflection detection technology has low accuracy and is difficult to meet the requirements for detecting the microscopic size of sub-surface defects of fused quartz variable curvature components; the optical coherence tomography technology and confocal fluorescence scanning microscopy technology have slow detection speeds and are difficult to achieve large-area detection of sub-surface damage of fused quartz variable curvature components; for example, a device for efficiently detecting sub-surface damage in quartz glass processing (application publication number: CN 115356263A) proposes to use polarized laser scattering to detect sub-surface damage of quartz glass, but for variable curvature components made of fused quartz, after the polarized laser is incident on its surface, due to the curved surface structure of the component itself, the laser will be scattered in all directions on its curved surface, resulting in inaccurate light signals detected by the detector, thereby increasing the detection error and reducing the detection accuracy, so it is not suitable for detecting sub-surface damage of curved surface components made of fused quartz. Summary of the invention

[0005] In view of many problems existing in the prior art, the present invention aims to design a device and method for detecting subsurface damage signals of fused quartz variable curvature components, which can reduce detection errors and improve detection accuracy.

[0006] In order to achieve the above-mentioned object, the technical solution of the present invention is as follows: a detection device for subsurface damage signals of fused quartz variable curvature components, comprising a detection module, a computer control system, a mobile platform and a track;

[0007] The detection module includes a laser, a polarizer, an aperture, a polarization beam splitter, a Glan mirror, a photodetector and a detection bracket. The laser, the aperture, the polarizer and the polarization beam splitter are sequentially installed on the right side of the detection bracket from bottom to top and aligned in center, and fixed on the detection bracket through a card slot; the Glan mirror and the photodetector are sequentially installed on the left side of the polarization beam splitter from right to left and aligned in center, and fixed on the detection bracket through a card slot; the detection bracket is fixed on the mobile platform;

[0008] The track is fixed on the machine tool by bolts; the mobile platform is installed on the track and slidably connected to the track; the laser is used to provide a laser source;

[0009] The initial incident diameter of the detection beam is 1mm-1.5mm;

[0010] The diaphragm is placed above the laser and is used to adjust the diameter of the diaphragm hole and thus adjust the diameter of the detection beam. The adjustable diameter range of the diaphragm hole is 0.2mm-1mm.

[0011] The polarizer is placed above the aperture, converting the detection beam with reduced diameter into P-polarized light;

[0012] The polarization beam splitter is used to separate the partially polarized light and S-polarized light scattered from the surface of the fused silica rod or the fused silica member with variable curvature, and reflect the separated S-polarized light to the photodetector;

[0013] The Glan prism only passes S-polarized light;

[0014] The photodetector is used to detect the intensity of the S-polarized light whose polarization state has changed;

[0015] The computer control system is used to collect and analyze signals and control the mobile platform.

[0016] When used to detect a fused silica rod, the track is a straight track, and the central axis of the straight track is parallel to the central axis of the machine tool spindle; when used to detect a fused silica member with variable curvature, the track is a curved track, and the central curve of the curved track is parallel to the contour line of the fused silica member with variable curvature installed on the machine tool spindle.

[0017] Furthermore, the chuck of the machine tool holds a fused silica rod or a fused silica member with variable curvature.

[0018] Furthermore, there are several fused silica rods with curvature radii of R1, R2, R3, ···, Rn respectively, and R1 < R2 < R3 < ··· < Rn; R1 is less than the minimum curvature radius of the fused silica member with variable curvature, and Rn is greater than the maximum curvature radius of the fused silica member with variable curvature.

[0019] Furthermore, the computer control system includes a data acquisition card, a host computer, and a motion controller. The data acquisition card converts the electrical signal received by the photodetector into a digital signal and transmits the digital signal to the host computer; the host computer analyzes and processes the digital signal to obtain the damage signal distribution of the subsurface damage layer of the fused silica member with variable curvature; the motion controller receives the instruction from the host computer and controls the mobile platform to perform a fixed-distance linear motion on the straight track.

[0020] Furthermore, the centers of the laser, the aperture, the polarizer, and the polarization beam splitter are all on the same vertical line; the centers of the Glan prism and the photodetector are all on the same horizontal line.

[0021] Furthermore, the mobile platform includes a detection bracket and a track slide block, and the detection bracket is slidably connected to the track through the track slide block.

[0022] A method for detecting subsurface damage signals of a fused quartz variable curvature component is provided, which uses a detection device for detecting subsurface damage signals of a fused quartz variable curvature component to perform detection, and comprises the following steps:

[0023] A. Perform subsurface damage signal detection on the fused quartz rod, and obtain detection parameters at different curvatures based on the detection results:

[0024] A1, let i=1;

[0025] A2. Clamp the fused quartz round rod sample with a radius of Ri on the chuck of the machine tool and make a rotary motion driven by the machine tool spindle;

[0026] A3, start the laser;

[0027] A4. Adjust the detection beam diameter through the aperture;

[0028] A5. The detection beam, after the diameter is adjusted by the aperture, is incident on the surface of the fused quartz round rod sample through the polarizer and polarization beam splitter;

[0029] A6. The host computer issues instructions to the motion controller, and the motion controller controls the mobile platform to move along the straight track;

[0030] A7, the detection beam after the diameter is reduced is converted into partially polarized light and S-polarized light through the polarizer, polarization beam splitter and the sub-surface damage layer of the fused quartz round rod;

[0031] A8, the partially polarized light scattered to the polarization beam splitter and the S-polarized light are reflected into the Glan mirror;

[0032] A9, Glan mirror plays a filtering role, filtering out light except the S-polarized light containing the information of the sub-surface damage layer;

[0033] A10, the photodetector detects the intensity of the S-polarized light containing the subsurface damage layer information of the fused quartz rod at the detection frequency f;

[0034] A11. If i=n, ​​go to step A12; otherwise, let i=i+1, then go to step A2;

[0035] A12. Analyze and process the digital signals collected by the data acquisition card through the host computer;

[0036] A13. According to the detection result of the subsurface damage signal of the fused quartz round rod, determine the detection parameters at different curvatures when the detection module detects the fused quartz variable curvature component;

[0037] B. Detection of subsurface damage signals of fused quartz variable curvature components

[0038] B1. Remove the straight track and install the curved track;

[0039] B2. Detect the subsurface damage signal of the fused quartz variable curvature component according to steps A3-A10, and use the program to adjust the detection parameters at different curvatures when detecting the subsurface damage signal;

[0040] B3. The digital signals collected by the data acquisition card are analyzed and processed by the host computer, and the damage of the fused quartz variable curvature component is reconstructed through the built-in program.

[0041] Furthermore, the laser wavelength of the laser is 532nm, and the laser power is set to 100mW. 。

[0042] Compared with the existing detection methods, the main advantages of the present invention are as follows:

[0043] 1. The present invention directly installs a straight track on a fused quartz round rod processing machine. Since the straight track is parallel to the axis of the fused quartz round rod, the distance between the polarization beam splitter and the point to be detected remains constant during the movement of the mobile platform along the straight track, thereby avoiding experimental errors caused by distance changes, improving detection accuracy, and obtaining more accurate sub-surface damage signal detection parameters at different curvatures of fused quartz variable curvature components.

[0044] 2. The present invention uses an aperture to adjust the diameter of the detection beam. Since the fused quartz variable curvature component is a curved surface component, after the polarized laser is incident on its surface, the curved surface structure of the component itself will cause the laser to scatter in all directions on its curved surface, resulting in inaccurate light signals detected by the detector, thereby reducing the detection accuracy. Using an aperture to adjust the diameter of the detection beam can reduce the impact caused by this reason, thereby improving the detection accuracy;

[0045] 3. Based on the principle of polarized laser scattering, the present invention can realize in-situ detection of sub-surface damage of fused quartz variable curvature components by only detecting the intensity of S-polarized light whose polarization state has changed. The optical path is simple and the signal processing steps are few.

[0046] 4. The present invention integrates optical elements and can be directly applied to existing fused quartz variable curvature component processing machines. According to the polarized laser detection results of sub-surface damage of fused quartz round rods with different curvatures, the detection parameters for detecting different curvatures of fused quartz variable curvature components are adjusted by program, and the detection is carried out during the production and processing process to guide and optimize the processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 A flow chart showing the present invention.

[0048] Figure 2 It is a schematic structural diagram of the sub-surface damage detection device of the fused quartz variable curvature component of the present invention.

[0049] Figure 3 A schematic diagram showing the structure of a device for detecting sub-surface damage signals of fused quartz round rods with different curvatures according to the present invention.

[0050] Figure 4 A diagram showing the internal structure of the detection module of the present invention when detecting a fused quartz variable curvature component.

[0051] Figure 5 A diagram showing the internal structure of the detection module of the present invention when detecting a fused quartz round rod.

[0052] Figure 6 A schematic diagram showing the actual connection between the straight track and the detection module of the device for detecting subsurface damage signals of a fused quartz round rod with different curvatures in an example of the present invention.

[0053] Figure 7 yes Figure 6 Bottom view of .

[0054] Figure 8 A schematic diagram showing the actual connection between the curved track and the detection module of the device for detecting sub-surface damage signals of a fused quartz variable curvature component in an example of the present invention.

[0055] Fig. 9 yes Figure 8 Bottom view of .

[0056] Fig.10 : is the structural diagram of the mobile platform shown.

[0057] Fig.11 Schematic diagram of fused quartz round rods with different curvatures according to the present invention.

[0058] In the figure: 1. laser, 2. detection beam, 3. aperture, 4. polarizer, 5. polarization beam splitter, 6. fused quartz round rod, 7. Glan mirror, 8. photoelectric detector, 9. mobile platform, 10. straight track, 11. data acquisition card, 12. host computer, 13. motion controller, 14. detection bracket, 15. track slide, 16. chuck, 17. machine tool spindle, 18. detection module, 19. fused quartz variable curvature component, 20. curved track. DETAILED DESCRIPTION

[0059] The present invention is further described below in conjunction with the accompanying drawings.

[0060] like Figure 1-11 As shown, a detection device for sub-surface damage signals of fused quartz variable curvature components includes a detection module 18, a computer control system, a mobile platform 9 and a track;

[0061] The detection module 18 includes a laser 1, a polarizer 4, an aperture 3, a polarization beam splitter 5, a Glan mirror 7, a photodetector 8 and a detection bracket 14. The laser 1, the aperture 3, the polarizer 4 and the polarization beam splitter 5 are sequentially installed on the right side of the detection bracket 14 from bottom to top and aligned in center, and fixed on the detection bracket 14 through a card slot; the Glan mirror 7 and the photodetector 8 are sequentially installed on the left side of the polarization beam splitter 5 from right to left and aligned in center, and fixed on the detection bracket 14 through a card slot; the detection bracket 14 is fixed on the mobile platform 9;

[0062] The track is fixed on the machine tool by bolts; the mobile platform 9 is installed on the track and slidably connected to the track; the laser 1 is used to provide a laser source;

[0063] The initial incident diameter of the detection beam 2 is 1.0-1.5 mm;

[0064] The diaphragm 3 is placed above the laser 1 and is used to adjust the diameter of the diaphragm hole and thus adjust the diameter of the detection beam 2. The adjustment range of the diaphragm hole diameter is 0.2-1.0 mm.

[0065] The polarizer 4 is placed above the aperture 3 to convert the detection beam 2 with a reduced diameter into P polarized light;

[0066] The polarization beam splitter 5 is used to separate the partially polarized light and S-polarized light scattered by the surface of the fused quartz round rod 6 or the fused quartz variable curvature component 19, and reflect the separated S-polarized light to the photodetector 8;

[0067] The Glan mirror 7 passes only S-polarized light;

[0068] The photodetector 8 is used to detect the intensity of the S polarized light whose polarization state has changed;

[0069] The computer control system is used to collect and analyze signals and control the mobile platform 9.

[0070] When used to detect the fused quartz round rod 6, the track is a straight track 10, and the central axis of the straight track 10 is parallel to the central axis of the machine tool spindle 17; when used to detect the fused quartz variable curvature component 19, the track is a curved track 20, and the central curve of the curved track 20 is parallel to the contour line of the fused quartz variable curvature component 19 installed on the machine tool spindle 17.

[0071] Furthermore, the chuck 16 of the machine tool clamps the fused quartz round rod 6 or the fused quartz variable curvature component 19 .

[0072] Furthermore, there are n fused quartz round rods 6, and the curvature radii are R1, R2, R3, ..., Rn, and R1 <R2<R3 <···<Rn; R1 is less than the minimum radius of curvature of the fused silica variable curvature member 19, and Rn is greater than the maximum radius of curvature of the fused silica variable curvature member 19.

[0073] Further, the computer control system includes a data acquisition card 11, a host computer 12, and a motion controller 13. The data acquisition card 11 converts the electrical signal received by the photodetector 8 into a digital signal and transmits the digital signal to the host computer 12; the host computer 12 analyzes and processes the digital signal to obtain the damage signal distribution of the subsurface damage layer of the fused silica variable curvature member 19; the motion controller 13 receives the instruction from the host computer 12 and controls the moving platform 9 to perform a fixed-distance linear motion on the straight track 10.

[0074] Further, the centers of the laser 1, the aperture 3, the polarizer 4, and the polarization beam splitter 5 are all on the same vertical line; the centers of the Glan prism 7 and the photodetector 8 are all on the same horizontal line.

[0075] Further, the moving platform includes a detection bracket 14 and a track slide 15, and the detection bracket 14 is slidably connected to the track through the track slide 15.

[0076] A detection method for subsurface damage signals of a fused silica variable curvature member, which is detected by using a detection device for subsurface damage signals of a fused silica variable curvature member, includes the following steps:

[0077] A. Detect the subsurface damage signal of the fused silica round bar 6, and obtain the detection parameters at different curvatures according to the detection results:

[0078] A1. Let i = 1;

[0079] A2. Clamp the fused silica round bar 6 sample with a radius of Ri on the machine tool chuck 16 and make a rotary motion driven by the machine tool spindle 17;

[0080] A3. Start the laser 1;

[0081] A4. Adjust the diameter of the detection beam 2 through the aperture 3;

[0082] A5. The detection beam 2 after adjusting the diameter through the aperture 3 is incident on the surface of the fused silica round bar 6 sample through the polarizer 4 and the polarization beam splitter 5;

[0083] A6. Send an instruction to the motion controller 13 through the host computer 12, and the motion controller 13 controls the moving platform 9 to move along the straight track 10;

[0084] A7. The detection beam 2 after reducing the diameter becomes a partially polarized light and an S polarized light after passing through the polarizer 4, the polarization beam splitter 5, and the subsurface damage layer of the fused silica round bar 6;

[0085] A8, the partial polarized light scattered to the polarization beam splitter 5 and the S polarized light are reflected into the Glan mirror 7;

[0086] A9 and Glan mirror 7 play a filtering role, filtering out light except the S-polarized light containing the information of the sub-surface damage layer;

[0087] A10, the photodetector 8 detects the intensity of the S polarized light containing the subsurface damage layer information of the fused silica round rod 6 at the detection frequency f;

[0088] A11. If i=n, ​​go to step A12; otherwise, let i=i+1, then go to step A2;

[0089] A12, analyzing and processing the digital signal collected by the data acquisition card 11 through the host computer 12;

[0090] A13, according to the detection result of the sub-surface damage signal of the fused quartz round rod 6, determining the detection parameters at different curvatures when the detection module 18 detects the fused quartz variable curvature component 19;

[0091] C. Detection of subsurface damage signals of fused quartz variable curvature components 19

[0092] B1. Remove the straight track 10 and install the curved track 20;

[0093] B2. Detect the subsurface damage signal of the fused quartz variable curvature component 19 according to steps A3-A10, and use the program to adjust the detection parameters at different curvatures when detecting the subsurface damage signal;

[0094] B3. The host computer 12 analyzes and processes the digital signal collected by the data acquisition card 11, and reconstructs the damage of the fused quartz variable curvature component 19 through a built-in program.

[0095] Furthermore, the laser wavelength of the laser 1 is 532nm, and the laser power is set to 100mW. 。

[0096] The present invention is not limited to this embodiment, and any equivalent concepts or changes within the technical scope disclosed by the present invention are included in the protection scope of the present invention.

Claims

1. A detection device for subsurface damage signals of fused quartz variable curvature components, characterized in that: It comprises a detection module (18), a computer control system, a mobile platform (9) and a track; The detection module (18) comprises a laser (1), a polarizing plate (4), an aperture (3), a polarizing beam splitter (5), a Glan mirror (7), a photodetector (8) and a detection bracket (14); the laser (1), the aperture (3), the polarizing plate (4) and the polarizing beam splitter (5) are sequentially installed from bottom to top on the right side of the detection bracket (14) and aligned in center, and fixed to the detection bracket (14) via a slot; the Glan mirror (7) and the photodetector (8) are sequentially installed from right to left on the left side of the polarizing beam splitter (5) and aligned in center, and fixed to the detection bracket (14) via a slot; the detection bracket (14) is fixed to a mobile platform (9); The track is fixed on the machine tool by bolts; the mobile platform (9) is installed on the track and is slidably connected to the track; the laser (1) is used to provide a laser source; The initial incident diameter of the detection light beam (2) is 1.0-1.5 mm; The aperture (3) is placed above the laser (1) and is used to adjust the aperture diameter and thus adjust the diameter of the detection beam (2). The aperture diameter adjustment range is 0.2-1.0 mm. The polarizing plate (4) is placed above the aperture (3) to convert the detection light beam (2) with a reduced diameter into P polarized light; The polarization beam splitter (5) is used to separate the partially polarized light and S-polarized light scattered on the surface of the fused quartz round rod (6) or the fused quartz variable curvature component (19), and reflect the separated S-polarized light to the photodetector (8); The Glan mirror (7) only passes S-polarized light; The photodetector (8) is used to detect the intensity of S-polarized light whose polarization state has changed; The computer control system is used to collect and analyze signals and control the mobile platform (9); When used for detecting a fused quartz round rod (6), the track is a straight track (10), and the central axis of the straight track (10) is parallel to the central axis of a machine tool spindle (17); when used for detecting a fused quartz variable curvature component (19), the track is a curved track (20), and the central curve of the curved track (20) is parallel to the contour line of the fused quartz variable curvature component (19) installed on the machine tool spindle (17).

2. The device for detecting subsurface damage signals of fused quartz variable curvature components according to claim 1, characterized in that: A fused quartz round rod (6) or a fused quartz variable curvature component (19) is clamped on the chuck (16) of the machine tool.

3. The device for detecting subsurface damage signals of fused quartz variable curvature components according to claim 1, characterized in that: There are n fused silica round rods (6), with curvature radii of R1, R2, R3, ···, Rn respectively, and R1 < R2 < R3 < ··· < Rn; R1 is less than the minimum curvature radius of the fused silica variable curvature member (19), and Rn is greater than the maximum curvature radius of the fused silica variable curvature member (19).

4. The device for detecting subsurface damage signals of fused quartz variable curvature components according to claim 1, characterized in that: The computer control system comprises a data acquisition card (11), a host computer (12) and a motion controller (13); the data acquisition card (11) converts the electrical signal received by the photoelectric detector (8) into a digital signal and transmits the digital signal to the host computer (12); the host computer (12) analyzes and processes the digital signal to obtain the distribution of the damage signal of the subsurface damage layer of the fused quartz variable curvature component (19); and the motion controller (13) receives the instruction of the host computer (12) and controls the mobile platform (9) to perform a fixed distance linear motion on the straight track (10).

5. The device for detecting subsurface damage signals of fused quartz variable curvature components according to claim 1, characterized in that: The centers of the laser (1), the aperture (3), the polarizer (4), and the polarization beam splitter (5) are all located on the same vertical line; and the centers of the Glan mirror (7) and the photoelectric detector (8) are all located on the same horizontal line.

6. The device for detecting subsurface damage signals of fused quartz variable curvature components according to claim 1, characterized in that: The mobile platform comprises a detection bracket (14) and a track slide (15), and the detection bracket (14) is slidably connected to the track via the track slide (15).

7. A method for detecting subsurface damage signals of a fused quartz variable curvature component, using the detection device for detecting subsurface damage signals of a fused quartz variable curvature component according to any one of claims 1 to 6, characterized in that: The following steps are involved: A. Perform subsurface damage signal detection on the fused quartz round rod (6), and obtain detection parameters at different curvatures according to the detection results: A1, let i=1; A2. Clamp a fused quartz round rod (6) having a radius Ri on a machine tool chuck (16) and rotate it under the drive of the machine tool spindle (17); A3, start the laser (1); A4, adjusting the diameter of the detection beam (2) by means of the aperture (3); A5, the detection light beam (2) after the diameter is adjusted by the aperture (3) is incident on the surface of the fused quartz round rod (6) sample through the polarizing plate (4) and the polarizing beam splitter (5); A6. The host computer (12) issues instructions to the motion controller (13), and the motion controller (13) controls the mobile platform (9) to move along the straight track (10); A7, the detection light beam (2) with a reduced diameter is converted into partially polarized light and S-polarized light through the polarizer (4), the polarization beam splitter (5) and the sub-surface damage layer of the fused silica round rod (6); A8, the partially polarized light and the S-polarized light scattered to the polarization beam splitter (5) are reflected to the Glan mirror (7); A9, Glan mirror (7) plays a filtering role, filtering out light except the S-polarized light containing the sub-surface damage layer information; A10, a photodetector (8) detects the intensity of the S-polarized light containing the subsurface damage layer information of the fused silica round rod (6) at a detection frequency f; A11. If i=n, ​​go to step A12; otherwise, let i=i+1, then go to step A2; A12, analyzing and processing the digital signal collected by the data acquisition card (11) through the host computer (12); A13, according to the detection result of the subsurface damage signal of the fused quartz round rod (6), determining the detection parameters at different curvatures when the detection module (18) detects the fused quartz variable curvature component (19); B. Detection of subsurface damage signals of fused quartz variable curvature components (19) B1. Remove the straight track (10) and install the curved track (20); B2, detecting the subsurface damage signal of the fused quartz variable curvature component (19) according to steps A3-A10, and using a program to adjust the detection parameters at different curvatures when detecting the subsurface damage signal; B3. The digital signal collected by the data acquisition card (11) is analyzed and processed by the host computer (12), and the damage of the fused quartz variable curvature component (19) is reconstructed by a built-in program.

8. A method for detecting subsurface damage signals of fused quartz variable curvature components according to claim 7, characterized in that: The laser wavelength of the laser (1) is 532 nm, and the laser power is set to 100 mW. 。

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