Fuzzy rule updating method, monitoring system, device, equipment and medium

Abstract

The invention relates to the technical field of radio frequency, in particular to a fuzzy rule updating method, a monitoring system, a device, equipment and a medium. According to the method, the electrical characteristic parameters of the plasma are collected, the reference state corresponding to the parameters is determined, a fuzzy rule is preset, a fuzzy controller classifies the electrical characteristic parameters through the preset fuzzy rule to obtain a classification label, and then the fuzzy controller outputs the fuzzy state of the plasma according to the classification label. And if the fuzzy state is not the same as or matched with the reference state, the predicted fuzzy rule is adjusted and updated until the state which is the same as or matched with the reference state is output, and the fuzzy rule at the moment is a target fuzzy rule. The fuzzy rule is not fixed, but is properly adjusted according to the electrical characteristic parameters, so that the fuzzy rule is matched with the electrical characteristic parameters, and finally, the state of the plasma can be accurately judged through the fuzzy rule.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular to a fuzzy rule updating method, monitoring system, device, equipment and medium. Background Art

[0002] The electrical characteristic parameters of the plasma are compared with a set fixed threshold value to classify the electrical characteristic parameters (the classification result is used to characterize whether the electrical characteristic parameters are greater than the threshold value or less than the threshold value), and then the state of the plasma is determined according to the classification result (the state includes the discharge state and the ignition state, etc.). The threshold value of the above-mentioned prior art is fixed, and different electrical characteristic parameters are applicable to different threshold values, which results in a low accuracy of the plasma state determined by the prior art.

[0003] In summary, the accuracy of the plasma state determined by the prior art is relatively low.

[0004] Therefore, the prior art still needs to be improved and enhanced. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a fuzzy rule updating method, monitoring system, device, equipment and medium, which solves the problem of low accuracy of plasma state determination in the prior art.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a fuzzy rule updating method, which comprises:

[0008] Acquiring electrical characteristic parameters of plasma, and determining a reference state of the plasma corresponding to the electrical characteristic parameters;

[0009] Applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller to obtain classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification labels;

[0010] According to the reference state and the fuzzy state, the preset fuzzy rule is updated to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, and the target fuzzy rule is used to determine the real-time state of the plasma.

[0011] In one implementation, obtaining electrical characteristic parameters of the plasma includes:

[0012] Adjusting the matching state of the radio frequency matcher to a target matching state, wherein the target matching state is used to enable the radio frequency matcher to transmit the output signal power of the radio frequency source to the plasma to the maximum extent;

[0013] The radio frequency matcher is controlled to transmit the signal of the radio frequency source to the plasma in the target matching state, and the electrical characteristic parameters generated by the plasma under the action of the signal are collected.

[0014] In one implementation, the electrical characteristic parameters are classified by using preset fuzzy rules of the fuzzy controller to obtain classification labels of the electrical characteristic parameters, including:

[0015] Determining a preset threshold in the preset fuzzy rule;

[0016] The electrical characteristic parameter is classified into two categories by using the preset threshold of the fuzzy controller to obtain a two-category label of the electrical characteristic parameter, and the two-category label is used as the classification label.

[0017] In one implementation, obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification label includes:

[0018] The fuzzy state of the plasma output by the fuzzy controller through the classification label and the lookup table is obtained, and the lookup table is used to record the corresponding relationship between the classification label and the state of the plasma.

[0019] In one implementation, the preset fuzzy rule is updated according to the reference state and the fuzzy state to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, including:

[0020] The preset threshold of the fuzzy controller is updated until the fuzzy state output by the fuzzy controller is a reference state, a target threshold is obtained, and the target threshold is used as a target fuzzy rule.

[0021] In a second aspect, an embodiment of the present invention further provides a radio frequency plasma state monitoring system, comprising:

[0022] A sensor, used to sense real-time electrical characteristic parameters of plasma;

[0023] A fuzzy controller is used to output the real-time state of the plasma corresponding to the real-time electrical characteristic parameter based on a target fuzzy rule; wherein the target fuzzy rule is generated based on the fuzzy rule updating method described above.

[0024] In one implementation, the method further includes:

[0025] The memory is used to store the target fuzzy rule and transmit the target fuzzy rule to the fuzzy controller.

[0026] In a third aspect, an embodiment of the present invention further provides a fuzzy rule updating device, wherein the device comprises the following components:

[0027] A reference state determination module, used for acquiring electrical characteristic parameters of plasma and determining a reference state of the plasma corresponding to the electrical characteristic parameters;

[0028] A fuzzy state acquisition module, used for applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller, and obtaining classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification label;

[0029] An updating module is used to update the preset fuzzy rules according to the reference state and the fuzzy state to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, wherein the target fuzzy rule is used to determine the real-time state of the plasma.

[0030] In a fourth aspect, an embodiment of the present invention further provides a terminal device, wherein the terminal device includes a memory, a processor, and a fuzzy rule updating program stored in the memory and executable on the processor, and when the processor executes the fuzzy rule updating program, the steps of the fuzzy rule updating method described above are implemented.

[0031] In a fifth aspect, an embodiment of the present invention further provides a computer-readable storage medium, on which a fuzzy rule updating program is stored. When the fuzzy rule updating program is executed by a processor, the steps of the fuzzy rule updating method described above are implemented.

[0032] Beneficial effect: The present invention first collects the electrical characteristic parameters of the plasma and determines the reference state corresponding to the parameters, and presets the fuzzy rules of the fuzzy controller. The fuzzy controller classifies the electrical characteristic parameters through the preset fuzzy rules to obtain classification labels, and then the fuzzy controller outputs the fuzzy state of the plasma according to the classification labels. If the fuzzy state is not the same as or matches the reference state, then the predicted fuzzy rules are adjusted and updated until the fuzzy controller outputs the same as or matches the reference state according to the electrical characteristic parameters. The fuzzy rules at this time are the target fuzzy rules. From the above analysis, it can be seen that the fuzzy rules of the present invention are not fixed, but are appropriately adjusted according to the electrical characteristic parameters, so that the fuzzy rules are adapted to the electrical characteristic parameters, and finally the fuzzy rules of the present invention can accurately determine the state of the plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is the overall flow chart of the present invention;

[0034] Figure 2 is a structural diagram of a radio frequency matching device in an embodiment of the present invention;

[0035] Figure 3 is a structural diagram of a fuzzy controller in an embodiment of the present invention;

[0036] Figure 4 is a fuzzy control flow chart in an embodiment of the present invention;

[0037] Figure 5 A structural diagram of the fuzzy rule updating device provided by the present invention;

[0038] Figure 6 This is a block diagram of the internal structure principle of the terminal device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0039] The following is a clear and complete description of the technical solution of the present invention in combination with the embodiments and the accompanying drawings. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] According to research, the electrical characteristic parameters of plasma are compared with a set fixed threshold value to classify the electrical characteristic parameters (the classification result is used to characterize whether the electrical characteristic parameters are greater than or less than the threshold value), and then the state of plasma (including discharge state and ignition state, etc.) is determined based on the classification result. The threshold of the above-mentioned prior art is fixed, and different electrical characteristic parameters are applicable to different threshold values, which results in low accuracy of the plasma state determined by the prior art.

[0041] In order to solve the above technical problems, the present invention provides a fuzzy rule updating method, monitoring system, device, equipment and medium, which solves the problem of low accuracy of plasma state determined by the prior art. In specific implementation, the electrical characteristic parameters of the plasma are first obtained, and the reference state of the plasma corresponding to the electrical characteristic parameters is determined; then a fuzzy controller is applied to the electrical characteristic parameters, and the electrical characteristic parameters are classified by the preset fuzzy rules of the fuzzy controller to obtain the classification labels of the electrical characteristic parameters; and the fuzzy state of the plasma output by the fuzzy controller through the classification labels is obtained; finally, according to the reference state and the fuzzy state, the preset fuzzy rules are updated to obtain the target fuzzy rules corresponding to the electrical characteristic parameters.

[0042] For example, Figure 2As shown, the RF Generator (radio frequency source) emits a certain frequency to the plasma ( Figure 2 The Plasma Load in the figure is the load plasma) transmits a signal, and the plasma will generate corresponding electrical characteristic parameters A, B, and C. From the existing historical data, we can know that when the electrical characteristic parameters of the plasma are A, B, and C, the corresponding plasma state is State A (State A is also the reference state).

[0043] The electrical characteristic parameters A, B, and C are input into the fuzzy controller, and the fuzzy controller classifies the electrical characteristic parameters A, B, and C according to the fuzzy rules preset inside. The classification result can be whether A is high level, whether B is high level, and whether C is high level. Then the fuzzy controller outputs the state of the plasma (the state is a fuzzy state) according to the classification results for A, B, and C. If the state is not the reference state A, it means that the fuzzy controller cannot output the true state of the plasma according to the preset fuzzy rules. Therefore, it is necessary to adjust and update the preset fuzzy rules until the fuzzy controller outputs the reference state A, and the fuzzy rules at this time are used as the target fuzzy rules. Subsequently, the real-time electrical characteristic parameters of the plasma are monitored, and the real-time electrical characteristic parameters are input into the fuzzy controller. The fuzzy controller can output the state of the plasma corresponding to the real-time electrical characteristic parameters according to the target fuzzy rules stored inside.

[0044] Embodiment 1: This embodiment provides a radio frequency matching device, such as Figure 2 As shown, the RF matching device includes a sensor Sensor, a first variable capacitor C1, a second variable capacitor C2, and a controller Controller, and the controller Controller includes a fuzzy controller Fuzzy Controller and a memory Memory, as shown in FIG. Figure 3 As shown, the fuzzy controller internally stores a Look-Up Table, Fuzzy Rules and Database. The output end of the RF Generator is respectively connected to one end of the first variable capacitor C1 and one end of the second variable capacitor C2, the other end of the first variable capacitor C1 is grounded, the other end of the second variable capacitor C2 is connected to the input end of the sensor, and the output end of the sensor is connected to the plasma load.

[0045] The RF source transmits a signal with a certain power to the plasma, and the sensor senses the electrical characteristic parameters generated by the plasma under the action of the signal. The electrical characteristic parameters are then transmitted to the fuzzy controller FuzzyController, which performs fuzzy classification processing on the electrical characteristic parameters according to its internal fuzzy rules, such as obtaining a binary classification result. The fuzzy controller then determines the state of the plasma corresponding to the classification result according to its internal lookup table, that is, the fuzzy controller outputs the state of the plasma (the state can be Figure 2 Ignited or Are in the image), and transmits this state to the RF source, which controls its output according to this state, and the output of the RF source is used to make the plasma connected to it continue to maintain this state.

[0046] Embodiment 2, based on embodiment 1, provides a radio frequency plasma state monitoring system, including a sensor Sensor, a fuzzy controller Fuzzy Controller and a memory Memory. Among them, the sensor Sensor is used to sense the real-time electrical characteristic parameters of the plasma, and transmit the real-time electrical characteristic parameters to the fuzzy controller Fuzzy Controller, the fuzzy controller Fuzzy Controller outputs the real-time state of the plasma, and saves the real-time state in the memory, that is, the state of the plasma can be monitored in real time through the fuzzy controller Fuzzy Controller and the sensor Sensor.

[0047] Embodiment 3, based on embodiment 1 or embodiment 2, this embodiment provides a fuzzy rule updating method, such as Figure 1 As shown in , the specific steps include:

[0048] S100, acquiring electrical characteristic parameters of plasma, and determining a reference state of the plasma corresponding to the electrical characteristic parameters.

[0049] S200, applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller to obtain classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification label.

[0050] S300, updating the preset fuzzy rule according to the reference state and the fuzzy state to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, wherein the target fuzzy rule is used to determine the real-time state of the plasma.

[0051] In this embodiment, step S100 is performed by Figure 2The sensor in the sensor collects the electrical characteristic parameters of the plasma, which include the voltage of the plasma, the current of the plasma, the real part of the impedance of the plasma, and the imaginary part of the impedance of the plasma. The reference state corresponding to these electrical characteristic parameters can be known based on the historical data of the plasma (the reference state is the real state of the plasma corresponding to these electrical characteristic parameters).

[0052] This embodiment adjusts the RF matcher to a target matching state by adjusting the first variable capacitor C1, the second variable capacitor C2 and the frequency of the RF source. When the RF matcher is in the target matching state, the RF matcher can transmit the power of the RF source to the plasma to the maximum extent. After the RF matcher is in the target matching state, the signal of the RF source is continuously transmitted to the plasma, and the electrical characteristic parameters generated by the plasma under the action of the signal are collected through the sensor.

[0053] In this embodiment, step S200 classifies the electrical characteristic parameters through the following steps: determining a preset threshold in the preset fuzzy rule; classifying the electrical characteristic parameters into two categories according to the preset threshold of the fuzzy controller to obtain a two-category label for the electrical characteristic parameters, and using the two-category label as the classification label.

[0054] That is, when the electrical characteristic parameter is greater than the preset threshold, the electrical characteristic parameter is converted to a fixed value; when the electrical characteristic parameter is less than or equal to the preset threshold, the electrical characteristic parameter is converted to another fixed value. The above method realizes the binary classification of the electrical characteristic parameter.

[0055] This embodiment constructs the preset threshold value V in the following manner i :

[0056]

[0057] Where A and B are constants related to the plasma gas type. When the plasma gas is air, A is equal to 88.33 V·Pa·m -1 ·sr -1 , b is equal to 0.3333, l is the electrode distance, p is the pressure, and φ is a constant related to the cathode material.

[0058] In this embodiment, in step S200, the fuzzy controller outputs the fuzzy state in the following manner:

[0059] The fuzzy state of the plasma output by the fuzzy controller through the classification label and the lookup table is obtained, and the lookup table is used to record the corresponding relationship between the classification label and the state of the plasma.

[0060] That is, the lookup table records the correspondence between the classification labels of the electrical characteristic parameters of the plasma and the state of the plasma. The state of the plasma can be determined based on the lookup table and the classification labels of the electrical characteristic parameters.

[0061] In this embodiment, since the preset threshold is not necessarily a threshold that can accurately classify the electrical characteristic parameters, it is necessary to update and adjust the preset threshold so that the final updated threshold can accurately classify the electrical characteristic parameters, and then the fuzzy controller can accurately determine the state of the plasma according to the classification result. In this embodiment, the preset threshold is updated through step S300, including the following specific steps: updating the preset threshold of the fuzzy controller until the fuzzy state output by the fuzzy controller is a reference state, obtaining a target threshold, and using the target threshold as a target fuzzy rule.

[0062] As shown in Table 1, the fuzzy controller fuzzifies the input electrical characteristic parameters, and the obtained PS, O, and NS (low, medium, and high states, respectively) are shown in Table 1. The fuzzy rules are shown in Table 2. The output of the element with the maximum membership is defuzzified to determine the output R (membership calculation result) and u (output calculation result).

[0063] R=(PSi×PSu)∩(Oi×Ou)v(NSi×NSu)

[0064] u=i·R

[0065] If the calculation result is: in, The membership calculation value representing state -1 is 0.5, The membership calculation value representing state 0 is 1.0, The membership value of state 1 is 0, so the output state is judged to be 0. At the same time, the best state can be compared.

[0066] Table 1

[0067]

[0068] Table 2

[0069] IF Psi Oi NSi THEN PSu Ou NSu

[0070] In Table 2, Ps is the PS state when the input value is fuzzy and the fuzzy set is in the fuzzy set; Oi is the O state when the input value is fuzzy and the fuzzy set is in the fuzzy set; NSi is the NS state when the input value is fuzzy and the fuzzy set is in the fuzzy set; Psu is the PS state when the output value is fuzzy and the fuzzy set is in the fuzzy set; Ou is the O state when the output value is fuzzy and the fuzzy set is in the fuzzy set; NSu is the NS state when the output value is fuzzy and the fuzzy set is in the fuzzy set.

[0071] Table 3

[0072]

[0073] The threshold is mainly used in the process of input fuzzification, as shown in Table 3. For example, when the input is lower than the threshold 1, it is in the NS state, and the membership degree of -1 is 1.0. When the input is higher than the threshold 4, it is in the PS state, and the membership degree of 1 is 1.0. When the input is higher than the threshold 1 and lower than the threshold 2 (the adjustable default value is the threshold 1), the membership degree of -1 is 0.5, the membership degree of 1 is 0, and the membership degree of 0 is 1.0. When the input is higher than the threshold 2 and lower than the threshold 3 (the adjustable default value is the threshold 4), the membership degree of -1 is 0.5, the membership degree of 0 is 1.0, and the membership degree of 1 is 0.5. When the input is higher than the threshold 3 and lower than the threshold 4, the membership degree of -1 is 0, the membership degree of 0 is 1.0, and the membership degree of 1 is 0.5.

[0074] This embodiment can also be used as Figure 4 The method shown in the figure updates the threshold value: collects multiple electrical parameters of the plasma, calculates the threshold value corresponding to each electrical parameter for determining the plasma state based on historical experience, and then calculates the membership value corresponding to each electrical parameter based on the threshold value, and selects the largest membership value from multiple membership values ​​as the output of the fuzzy controller.

[0075] If the current threshold (the threshold of the current state is the input value of the current state + tolerance) is equal to the preset threshold, the fuzzy controller directly outputs the plasma state; if the current threshold and the preset threshold are not equal, the threshold inside the fuzzy controller is updated, that is, the preset threshold is updated with the current threshold.

[0076] After obtaining the target threshold value, this embodiment saves the target threshold value in a memory. When the state of the plasma needs to be monitored subsequently, the electrical characteristic parameters of the plasma are collected in real time and the real-time electrical characteristic parameters are input into the fuzzy controller. The fuzzy controller calls the target threshold value in the memory to determine the real-time state of the plasma.

[0077] In summary, the present invention first collects the electrical characteristic parameters of the plasma and determines the reference state corresponding to the parameters, and presets the fuzzy rules of the fuzzy controller. The fuzzy controller classifies the electrical characteristic parameters through the preset fuzzy rules to obtain the classification labels, and then the fuzzy controller outputs the fuzzy state of the plasma according to the classification labels. If the fuzzy state is not the same as or matches the reference state, then the predicted fuzzy rules are adjusted and updated until the fuzzy controller outputs the same as or matches the reference state according to the electrical characteristic parameters. The fuzzy rules at this time are the target fuzzy rules. From the above analysis, it can be seen that the fuzzy rules of the present invention are not fixed, but are appropriately adjusted according to the electrical characteristic parameters, so that the fuzzy rules are adapted to the electrical characteristic parameters, and finally the fuzzy rules of the present invention can accurately determine the state of the plasma.

[0078] This embodiment also provides a fuzzy rule updating device, such as Figure 5 As shown, the device comprises the following components:

[0079] A reference state determination module 01 is used to obtain electrical characteristic parameters of plasma and determine a reference state of the plasma corresponding to the electrical characteristic parameters;

[0080] A fuzzy state acquisition module 02 is used to apply a fuzzy controller to the electrical characteristic parameters, classify the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller, and obtain classification labels of the electrical characteristic parameters; and obtain the fuzzy state of the plasma output by the fuzzy controller through the classification label;

[0081] The updating module 03 is used to update the preset fuzzy rules according to the reference state and the fuzzy state to obtain the target fuzzy rules corresponding to the electrical characteristic parameters, and the target fuzzy rules are used to determine the real-time state of the plasma.

[0082] Based on the above embodiments, the present invention further provides a terminal device, whose principle block diagram can be shown as follows: Figure 6 As shown. The terminal device includes a processor, a memory, a network interface, and a display screen connected through a system bus. Among them, the processor of the terminal device is used to provide computing and control capabilities. The memory of the terminal device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the terminal device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a fuzzy rule updating method is implemented. The display screen of the terminal device can be a liquid crystal display screen or an electronic ink display screen.

[0083] Those skilled in the art will understand that Figure 6 The principle block diagram shown in the figure is only a block diagram of a partial structure related to the scheme of the present invention, and does not constitute a limitation on the terminal device to which the scheme of the present invention is applied. The specific terminal device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0084] In one embodiment, a terminal device is provided. The terminal device includes a memory, a processor, and a fuzzy rule updating method program stored in the memory and executable on the processor. When the processor executes the fuzzy rule updating method program, the following operation instructions are implemented:

[0085] Acquiring electrical characteristic parameters of plasma, and determining a reference state of the plasma corresponding to the electrical characteristic parameters;

[0086] Applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller to obtain classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification labels;

[0087] According to the reference state and the fuzzy state, the preset fuzzy rule is updated to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, and the target fuzzy rule is used to determine the real-time state of the plasma.

[0088] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided by the present invention can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A fuzzy rule updating method, characterized in that: include: Acquiring electrical characteristic parameters of the plasma, and determining a reference state of the plasma corresponding to the electrical characteristic parameters; Applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller, and obtaining classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification label; According to the reference state and the fuzzy state, the preset fuzzy rule is updated to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, and the target fuzzy rule is used to determine the real-time state of the plasma.

2. The fuzzy rule updating method according to claim 1, characterized in that: The step of obtaining the electrical characteristic parameters of the plasma comprises: Adjusting the matching state of the radio frequency matcher to a target matching state, wherein the target matching state is used to enable the radio frequency matcher to transmit the output signal power of the radio frequency source to the plasma to the maximum extent; The radio frequency matcher is controlled to transmit the signal of the radio frequency source to the plasma in the target matching state, and the electrical characteristic parameters generated by the plasma under the action of the signal are collected.

3. The fuzzy rule updating method according to claim 1, characterized in that: The electrical characteristic parameters are classified by using preset fuzzy rules of the fuzzy controller to obtain classification labels of the electrical characteristic parameters, including: Determining a preset threshold in the preset fuzzy rule; The electrical characteristic parameter is classified into two categories by using the preset threshold of the fuzzy controller to obtain a two-category label of the electrical characteristic parameter, and the two-category label is used as the classification label.

4. The fuzzy rule updating method according to claim 1, characterized in that: Acquiring the fuzzy state of the plasma output by the fuzzy controller through the classification label comprises: The fuzzy state of the plasma output by the fuzzy controller through the classification label and the lookup table is obtained, and the lookup table is used to record the corresponding relationship between the classification label and the state of the plasma.

5. The fuzzy rule updating method according to claim 3, characterized in that: According to the reference state and the fuzzy state, the preset fuzzy rule is updated to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, including: The preset threshold of the fuzzy controller is updated until the fuzzy state output by the fuzzy controller is a reference state, a target threshold is obtained, and the target threshold is used as a target fuzzy rule.

6. A radio frequency plasma state monitoring system, characterized in that: include: A sensor, used to sense real-time electrical characteristic parameters of plasma; A fuzzy controller is used to output the real-time state of the plasma corresponding to the real-time electrical characteristic parameter based on a target fuzzy rule; wherein the target fuzzy rule is generated based on the fuzzy rule updating method according to claim 1.

7. The radio frequency plasma state monitoring system according to claim 6, characterized in that: Also includes: The memory is used to store the target fuzzy rule and transmit the target fuzzy rule to the fuzzy controller.

8. A fuzzy rule updating device, characterized in that: The device comprises the following components: A reference state determination module, used for acquiring electrical characteristic parameters of plasma and determining a reference state of the plasma corresponding to the electrical characteristic parameters; A fuzzy state acquisition module, used for applying a fuzzy controller to the electrical characteristic parameters, classifying the electrical characteristic parameters according to preset fuzzy rules of the fuzzy controller, and obtaining classification labels of the electrical characteristic parameters; and obtaining the fuzzy state of the plasma output by the fuzzy controller through the classification label; An updating module is used to update the preset fuzzy rules according to the reference state and the fuzzy state to obtain a target fuzzy rule corresponding to the electrical characteristic parameter, wherein the target fuzzy rule is used to determine the real-time state of the plasma.

9. A terminal device, characterized in that: The terminal device includes a memory, a processor, and a fuzzy rule updating program stored in the memory and executable on the processor. When the processor executes the fuzzy rule updating program, the steps of the fuzzy rule updating method according to any one of claims 1 to 5 are implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a fuzzy rule updating program, and when the fuzzy rule updating program is executed by the processor, the steps of the fuzzy rule updating method according to any one of claims 1 to 5 are implemented.

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