A device for producing electronic grade hydrofluoric acid purification

Abstract

The invention discloses a device for purifying electronic-grade hydrofluoric acid, and relates to the technical field of hydrofluoric acid production. The device comprises a distillation tower body, wherein tower plates are equidistantly and movably connected in the distillation tower body, and overflow weirs are fixedly connected on the tower plates. The device also comprises a rotation speed convenient control mechanism and a state monitoring feedback mechanism. The friction disc drives the friction wheel, so that the follower rod and the tower plates installed on the outer surface thereof can be driven to rotate synchronously inside the distillation tower body, thereby increasing the gas-liquid contact area and contact time, promoting the mass transfer process between the gas-liquid two phases, and in the distillation process, it can help to improve the separation efficiency and purity, so that impurities in the raw materials can be more easily removed, so as to obtain higher-quality electronic-grade hydrofluoric acid, and the rotation of the tower plates can also enhance the mixing of the liquid on the tower plates, so that the liquid is more evenly distributed on the tower plates, which helps to reduce the residence time and dead zone of the liquid on the tower plates, and further improves the separation efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of hydrofluoric acid production, and in particular to a device for purifying electronic-grade hydrofluoric acid. Background Art

[0002] In the prior art, electronic-grade hydrofluoric acid is an aqueous solution of hydrogen fluoride, which is colorless and transparent, with a density of 1.15 g / ml (50% HF) at 25°C. It is highly corrosive to metals, glass, concrete, etc. It is a common wet chemical in semiconductor wet electronic chemicals, with a purity of usually over 99.99%. It is a high-purity, low-metal ion hydrofluoric acid, and an important basic material in the electronics industry. In the process of purifying and producing electronic-grade hydrofluoric acid, related distillation tower equipment is usually used to purify the raw materials of electronic-grade hydrofluoric acid.

[0003] However, the plates installed inside the existing distillation towers are usually fixed structures. During the purification and production of electronic-grade hydrofluoric acid raw materials, they are usually in a stationary state, resulting in limited contact area between the gas-liquid phases and relatively short contact time, which directly affects the efficiency of the mass transfer process and limits the improvement of separation efficiency and product purity. Due to the low gas-liquid contact efficiency, impurities in the raw materials are difficult to be fully removed, resulting in the final product purity being difficult to meet high standards. This problem is particularly prominent in the production of high-quality chemicals such as electronic-grade hydrofluoric acid. At the same time, the plates are in a stationary state, and the liquid often has the problem of uneven mixing, and it is easy to form retention areas and dead zones on the plates, which not only reduces the separation efficiency, but also leads to uneven temperature distribution in the tower, affecting the stability and efficiency of the distillation process, limiting the heat transfer efficiency, and making it difficult to achieve effective heat exchange between liquid and gas, resulting in uneven temperature distribution in the tower, affecting the stability of the distillation process and product quality.

[0004] In view of this, the present invention proposes a device for producing electronic-grade hydrofluoric acid purification to make up for and improve the deficiencies of the prior art. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a device for producing electronic grade hydrofluoric acid purification to solve the corresponding technical problems raised in the above background technology.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is: a device for purifying electronic-grade hydrofluoric acid, comprising a distillation tower body, wherein the distillation tower body is equidistantly and movably connected with tower plates, and the tower plates are fixedly connected with overflow weirs, and further comprising: a speed convenient control mechanism and a state monitoring feedback mechanism, and the speed convenient control mechanism and the state monitoring feedback mechanism are both arranged on the distillation tower body;

[0007] The speed convenient control mechanism includes a follower rod, a friction wheel and a friction disc, wherein the follower rod is coaxially arranged with the tower plate, the friction wheel is arranged on the outer surface of the follower rod, and the friction disc is perpendicular to the friction wheel;

[0008] The state monitoring feedback mechanism includes a connector and a through rod, and the connector is arranged on the friction wheel, the through rod is symmetrically arranged with the connector as the center, and one end of the through rod away from the connector penetrates the distillation tower body and extends to the outside of the distillation tower body.

[0009] Preferably, the convenient speed control mechanism also includes a mounting frame fixedly connected to the outer surface of the distillation tower body, the lower end of the mounting frame is fixedly connected to the drive motor, and rotating shafts are equidistantly passed through the mounting frame for rotation, and transmission parts are connected between the rotating shafts, one end of the rotating shaft away from the drive motor is connected to the distillation tower body for rotation, and one of the rotating shafts is fixedly connected to the output end of the drive motor, and a friction disc is fixedly connected to the outer surface of one end of the rotating shaft located inside the distillation tower body.

[0010] Preferably, support plates are fixedly connected to the inner wall of the distillation tower body at equal intervals, the tower plates are fixedly connected to the outer surface of the follower rod, and the follower rod is rotatably connected between two adjacent support plates.

[0011] Preferably, a slide groove is provided on the outer surface of the follower rod, a slider is fixedly connected to the inner ring surface of the friction wheel, and the slider is slidably connected in the slide groove, the friction wheel is in contact with the friction disc, and the friction wheel and the friction disc are transmission connected.

[0012] Preferably, an elastic telescopic column is fixedly connected between the slider and the inner top wall of the slide groove, an electric push rod is fixedly connected between the slider and the inner bottom wall of the slide groove, and a sealing pleated plate is fixedly connected between the slider and the inner top wall and inner bottom wall of the slide groove, and the sealing pleated plate is used to seal the slide groove.

[0013] Preferably, the state monitoring feedback mechanism also includes an annular groove opened on the upper surface of the friction wheel, the connecting head is rotatably connected in the annular groove, a first T-shaped rod is symmetrically fixedly connected to the connecting head, an end of the first T-shaped rod away from the connecting head is rotatably connected to a connecting rod, and an end of the connecting rod away from the first T-shaped rod is rotatably connected to a second T-shaped rod.

[0014] Preferably, the penetration rods are equidistantly and symmetrically penetrate and slide on the distillation tower body, one end of the penetration rod located inside the distillation tower body is fixedly connected to a baffle, and the baffle is fixedly connected to the second T-shaped rod.

[0015] Preferably, first contacts are equidistantly arranged on the outer surface of one end of the through-rod away from the baffle, a U-shaped fixing frame is symmetrically fixedly connected to the outer surface of the distillation tower body, support blocks are equidistantly fixedly connected to the U-shaped fixing frame, and the upper surface of the support block is in contact with the outer surface of the through-rod.

[0016] Preferably, a second contact is disposed on the upper surface of the support block, and one of the first contact is in contact with the second contact.

[0017] Preferably, one end of the penetration rod located outside the distillation tower body is slidably connected to a U-shaped fixing frame, and indicator lights are also fixedly connected to the U-shaped fixing frame at equal intervals.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] (1) By setting up a convenient speed control mechanism and utilizing the transmission of the friction wheel by the friction disc, the follower rod and the tower plate installed on its outer surface can be driven to rotate synchronously inside the distillation tower body, thereby increasing the gas-liquid contact area and contact time, and promoting the mass transfer process between the gas-liquid two phases. In the distillation process, it can help to improve the separation efficiency and purity, making it easier to remove impurities in the raw materials, thereby obtaining higher quality electronic grade hydrofluoric acid. In addition, the rotation of the tower plate can also enhance the mixing of the liquid on the tower plate, making the liquid more evenly distributed on the tower plate, helping to reduce the residence time and dead zone of the liquid on the tower plate, and further improving the separation efficiency. At the same time, the rotating tower plate can also promote heat transfer, so that the liquid and gas on the tower plate can exchange heat more effectively, which helps to maintain the temperature balance in the tower and improve the stability and efficiency of the distillation process.

[0020] (2) By setting up a convenient speed control mechanism, the electric push rod can be used to change the position of the friction wheel on the outer surface of the follower rod, and the rotation speed of the tower plate inside the distillation tower body can be changed synchronously. Through the precise control of the electric push rod, the position of the friction wheel can be fine-tuned, and the rotation speed of the tower plate can be precisely controlled, which helps to optimize the distillation process, improve the separation efficiency and product quality, and make the entire distillation tower system more flexible. In the process of purifying and producing electronic-grade hydrofluoric acid, the distillation tower can adjust the rotation speed of the tower plate in time according to the temperature change, so that there is no need to carry out large-scale transformation or adjustment of the equipment, which helps to extend the service life of the equipment and reduce maintenance costs;

[0021] Among them, the sealing pleated plates arranged between the slider and the top wall and the bottom wall of the chute can seal the chute, effectively preventing raw materials or other impurities from entering the chute, avoiding interference and damage to the internal structure of the chute (such as the electric push rod and the elastic telescopic column) by these impurities, keeping the inside of the chute clean and dry, thereby maintaining its long-term stable operation, helping to extend the service life of the equipment and reduce maintenance costs;

[0022] Among them, by using the elastic telescopic column arranged between the slider and the top wall of the slide slot, when the electric push rod pushes the slider to move inside the slide slot, the setting of the elastic telescopic column allows the slider to maintain stable contact with the slide slot during the movement, and even when the electric push rod pushes the friction wheel to move, it can ensure that the vertical movement of the slider is smooth and vibration-free, thereby improving the stability of the friction wheel moving on the outer surface of the follower rod, thereby helping to accurately control the position of the friction wheel, and then accurately adjust the rotation speed of the tower plate, improve the control accuracy of the distillation process, and through the combined design of the elastic telescopic column and the sealing pleated plate, it can effectively help reduce the noise and vibration generated by the slider during the movement, thereby protecting the internal components of the distillation tower body from the influence of vibration;

[0023] (3) By setting up a status monitoring feedback mechanism, while the friction wheel is displaced, the connecting head can be synchronously driven to move vertically, so that under the driving action of the connecting rod, the through rod can be driven to slide through the distillation tower body, thereby changing the contact between the first contact and the second contact, so that the indicator light can switch the gear that is lit, thereby realizing real-time monitoring and feedback of the electric push rod pushing the friction wheel, which helps the operator to timely understand the working status inside the distillation tower body and ensure that the equipment operates under safe and stable conditions. By switching the gear of the indicator light, the operator can more intuitively understand the displacement of the friction wheel and the rotation speed of the tower plate, reducing the operator's direct intervention in the equipment and improving the convenience and safety of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of a preferred embodiment of the present invention;

[0025] Figure 2 It is a schematic diagram of the internal structure of the distillation tower body shown in the present invention;

[0026] Figure 3 The present invention shows Figure 2 The enlarged structural diagram at A in the middle;

[0027] Figure 4 It is a structural schematic diagram of the friction wheel connection shown in the present invention;

[0028] Figure 5This is a schematic diagram of the split structure of the connector and the friction wheel shown in the present invention;

[0029] Figure 6 It is a schematic diagram of the structure of the slider connection shown in the present invention;

[0030] Figure 7 It is a schematic diagram of the structure of the through-rod connection of the present invention;

[0031] Figure 8 It is a schematic diagram of the structure of the support block connection shown in the present invention.

[0032] The numbers in the figure are:

[0033] 1. Distillation tower body; 2. Tower plate; 3. Overflow weir;

[0034] 4. Speed ​​convenient control mechanism; 401. Mounting frame; 402. Driving motor; 403. Rotating shaft; 404. Transmission member; 405. Friction disc; 406. Support plate; 407. Follower rod; 408. Slide; 409. Electric push rod; 410. Elastic telescopic column; 411. Sealing pleated plate; 412. Friction wheel; 413. Sliding block;

[0035] 5. Status monitoring feedback mechanism; 501. annular groove; 502. connector; 503. first T-shaped rod; 504. connecting rod; 505. second T-shaped rod; 506. baffle; 507. through rod; 508. first contact; 509. U-shaped fixing frame; 510. support block; 511. second contact; 512. indicator light. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Embodiment 1 of the present invention:

[0038] Please refer to Figures 1 to 8 As shown, a device for producing electronic-grade hydrofluoric acid purification includes a distillation tower body 1, in which tower plates 2 are equidistantly and movably connected, and an overflow weir 3 is fixedly connected to the tower plates 2, and also includes: a speed convenient control mechanism 4 and a state monitoring feedback mechanism 5, and the speed convenient control mechanism 4 and the state monitoring feedback mechanism 5 are both arranged on the distillation tower body 1;

[0039] The speed convenient control mechanism 4 includes a follower rod 407, a friction wheel 412 and a friction disc 405, and the follower rod 407 is coaxially arranged with the tower plate 2, the friction wheel 412 is arranged on the outer surface of the follower rod 407, and the friction disc 405 is perpendicular to the friction wheel 412. The speed convenient control mechanism 4 is used to adjust the rotation speed of the tower plate 2;

[0040] The state monitoring feedback mechanism 5 includes a connector 502 and a through rod 507, and the connector 502 is arranged on the friction wheel 412, and the through rod 507 is symmetrically arranged with the connector 502 as the center, and one end of the through rod 507 away from the connector 502 penetrates the distillation tower body 1 and extends to the outside of the distillation tower body 1. The state monitoring feedback mechanism 5 is used to monitor the rotation state of the tower plate 2 in real time;

[0041] The speed convenient control mechanism 4 also includes a mounting frame 401 fixedly connected to the outer surface of the distillation tower body 1, a driving motor 402 is fixedly connected to the lower end of the mounting frame 401, and rotating shafts 403 are equidistantly penetrated and rotatably connected on the mounting frame 401, and a transmission member 404 is transmission-connected between the rotating shafts 403, and one end of the rotating shaft 403 away from the driving motor 402 is penetrated and rotatably connected to the distillation tower body 1, and one of the rotating shafts 403 is fixedly connected to the output end of the driving motor 402, and a friction disc 405 is fixedly connected to the outer surface of one end of the rotating shaft 403 located inside the distillation tower body 1;

[0042] The inner wall of the distillation tower body 1 is fixedly connected with support plates 406 at equal intervals, the tower plate 2 is fixedly connected to the outer surface of the follower rod 407, and the follower rod 407 is rotatably connected between two adjacent support plates 406;

[0043] A slide groove 408 is provided on the outer surface of the follower rod 407, a slider 413 is fixedly connected to the inner ring surface of the friction wheel 412, and the slider 413 is slidably connected in the slide groove 408, the friction wheel 412 is in contact with the friction disc 405, and the friction wheel 412 is transmission-connected to the friction disc 405;

[0044] An elastic telescopic column 410 is fixedly connected between the slider 413 and the inner top wall of the slide slot 408, an electric push rod 409 is fixedly connected between the slider 413 and the inner bottom wall of the slide slot 408, and a sealing pleated plate 411 is fixedly connected between the slider 413 and the inner top wall and the inner bottom wall of the slide slot 408, and the sealing pleated plate 411 is used to block the slide slot 408;

[0045] Please refer to Figure 1 , Figure 2 as well as Figure 3 , preferably: the transmission member 404 is composed of a plurality of transmission wheels and a transmission belt connected between the transmission wheels, and the number of the transmission wheels is consistent with the number of the rotating shaft 403, and the transmission wheels are fixedly arranged on the outer surface of the rotating shaft 403;

[0046] In addition, please refer to Figure 2 and Figure 6 A temperature sensor is provided on the inner wall of the distillation tower body 1 between two adjacent tower plates 2, and the temperature sensor and the electric push rod 409 are electrically connected to the external terminal. When the temperature sensor detects a temperature change, it can transmit a signal to the terminal and provide feedback. Then the terminal receives the signal and responds, controls the electric push rod 409 to start running and push the friction wheel 412. It should be noted that the distance pushed by the electric push rod 409 each time is equal.

[0047] The effects achieved by this embodiment are as follows: compared with the prior art, by setting the speed convenient control mechanism 4 and utilizing the transmission of the friction wheel 412 by the friction disc 405, the follower rod 407 and the tower plate 2 installed on its outer surface can be driven to rotate synchronously inside the distillation tower body 1, thereby increasing the gas-liquid contact area and contact time, promoting the mass transfer process between the gas-liquid two phases, and in the distillation process, it can help to improve the separation efficiency and purity, making it easier to remove impurities in the raw materials, thereby obtaining higher quality electronic grade hydrofluoric acid, and the rotation of the tower plate 2 can also enhance the mixing of the liquid on the tower plate 2, so that the liquid is more evenly distributed on the tower plate 2, which helps to reduce the residence time and dead zone of the liquid on the tower plate 2, and further improve the separation efficiency. At the same time, the rotating tower plate 2 can also promote heat transfer, so that the liquid and gas on the tower plate 2 can more effectively exchange heat, which helps to maintain the temperature balance in the tower and improve the stability and efficiency of the distillation process;

[0048] In addition, by setting up the convenient speed control mechanism 4 and utilizing the set electric push rod 409, the position of the friction wheel 412 on the outer surface of the follower rod 407 can be changed, and the rotation speed of the tower plate 2 inside the distillation tower body 1 can be changed synchronously. Through the precise control of the electric push rod 409, the position of the friction wheel 412 can be fine-tuned, thereby precisely controlling the rotation speed of the tower plate 2, which helps to optimize the distillation process, improve separation efficiency and product quality, and make the entire distillation tower system more flexible. During the process of purifying and producing electronic-grade hydrofluoric acid, the distillation tower can timely adjust the rotation speed of the tower plate 2 according to temperature changes, thereby eliminating the need for large-scale transformation or adjustment of the equipment, thereby helping to extend the service life of the equipment and reduce maintenance costs.

[0049] Embodiment 1 of the present invention:

[0050] Please refer to Figures 1 to 8As shown, the state monitoring feedback mechanism 5 also includes an annular groove 501 opened on the upper surface of the friction wheel 412, a connector 502 is rotatably connected in the annular groove 501, a first T-shaped rod 503 is symmetrically fixedly connected to the connector 502, an end of the first T-shaped rod 503 away from the connector 502 is rotatably connected to a connecting rod 504, and an end of the connecting rod 504 away from the first T-shaped rod 503 is rotatably connected to a second T-shaped rod 505;

[0051] The penetration rod 507 is equidistantly and symmetrically penetrates and slides on the distillation tower body 1, and one end of the penetration rod 507 located inside the distillation tower body 1 is fixedly connected to the baffle 506, and the baffle 506 is fixedly connected to the second T-shaped rod 505;

[0052] The outer surface of the end of the through rod 507 away from the baffle 506 is equidistantly provided with a first contact point 508, the outer surface of the distillation tower body 1 is symmetrically fixedly connected with a U-shaped fixing frame 509, and the U-shaped fixing frame 509 is equidistantly fixedly connected with a support block 510, and the upper surface of the support block 510 is in contact with the outer surface of the through rod 507;

[0053] A second contact 511 is disposed on the upper surface of the support block 510, and one of the first contacts 508 is in contact with the second contact 511;

[0054] One end of the penetration rod 507 located outside the distillation tower body 1 is penetrated and slidably connected with a U-shaped fixing frame 509, and an indicator light 512 is also fixedly connected to the U-shaped fixing frame 509 at an equal distance;

[0055] Please refer to Figure 7 and Figure 8 , better: initially, the first contact 508 and the second contact 511 contact each other and generate a signal source to send to the terminal, the terminal can know the pushing state of the electric push rod 409 in real time, and the first contact 508 and the second contact 511 contact each other synchronously trigger the indicator light 512 to light up;

[0056] It should be noted that the number of first contacts 508 set is consistent with the temperature change level, the number of times the electric push rod 409 can be pushed, and the lighting level of the indicator light 512, that is, every time the temperature changes by one level, the electric push rod 409 is pushed once, the position of the first contact 508 also changes synchronously, and the lighting level of the indicator light 512 changes synchronously.

[0057] The effects achieved by this embodiment are as follows: compared with the prior art, through the setting of the state monitoring feedback mechanism 5, while the friction wheel 412 is displaced, the connecting head 502 can be synchronously driven to move vertically, so that under the driving action of the connecting rod 504, the through rod 507 is driven to slide through the distillation tower body 1, thereby changing the contact between the first contact 508 and the second contact 511, so that the indicator light 512 can switch the lighted gear, thereby realizing real-time monitoring and feedback of the electric push rod 409 pushing the friction wheel 412, which helps the operator to timely understand the working status inside the distillation tower body 1 and ensure that the equipment operates under safe and stable conditions. Through the gear switching of the indicator light 512, the operator can more intuitively understand the displacement of the friction wheel 412 and the rotation speed of the tower plate 2, reducing the operator's direct intervention in the equipment and improving the convenience and safety of operation.

[0058] The complete usage steps and working principle of the above embodiment are as follows:

[0059] The following is the working process of the rotation speed convenient control mechanism 4 to adjust the rotation speed of the tower plate 2:

[0060] In the process of purifying the raw materials for producing electronic grade hydrofluoric acid in the distillation tower body 1, Figure 1 , Figure 2 as well as Figure 3 As shown, by setting the driving motor 402, the rotating shaft 403 connected to its output end can be driven to rotate synchronously between the mounting frame 401 and the distillation tower body 1. Since the rotating shaft 403 is equidistantly arranged to rotate between the distillation tower body 1 and the mounting frame 401, and the rotating shafts 403 are connected through the transmission member 404 (it should be noted that the transmission member 404 is composed of a plurality of transmission wheels and a transmission belt connected between the transmission wheels, and the number of the transmission wheels is consistent with the number of the rotating shafts 403, and the transmission wheels are fixedly arranged on the outer surface of the rotating shaft 403), when the driving motor 402 drives one of the rotating shafts 403 to rotate, the remaining rotating shafts 403 can be driven to rotate synchronously between the distillation tower body 1 and the mounting frame 401, as shown in FIG. Figure 3 As shown, because the outer surface of one end of the rotating shaft 403 away from the driving motor 402 (i.e., located inside the distillation tower body 1) is fixedly provided with a friction disk 405, when the rotating shaft 403 rotates, the friction disk 405 can be synchronously driven to rotate inside the distillation tower body 1, referring to Figure 4, support plates 406 are fixedly arranged at equal intervals on the inner ring wall of the distillation tower body 1, and a follower rod 407 is rotatably connected between two adjacent support plates 406, and the tower plate 2 is fixedly arranged on the outer surface of the upper end of the follower rod 407, so that the tower plate 2 can form an integral structure with the follower rod 407, and synchronously rotate between the two adjacent support plates 406, and a slide groove 408 is also opened on the outer surface of the follower rod 407, and a slider 413 is slidably arranged in the slide groove 408, and the slider 413 is fixedly arranged on the inner surface of the friction wheel 412, which can be referred to Figure 6 As shown, by setting the slider 413 and the slide groove 408, the friction wheel 412 can be vertically slidably set on the follower rod 407, and cooperate with Figure 3 As shown, since the friction wheel 412 and the friction disc 405 are in vertical contact and are connected by transmission, when the driving motor 402 drives the rotating shaft 403 to cooperate with the friction disc 405 to rotate inside the distillation tower body 1, the friction disc 405 drives the friction wheel 412 to drive the friction wheel 412 to rotate between two adjacent support plates 406 with the follower rod 407 as the axis. Since the friction wheel 412 and the follower rod 407 are vertically slidably connected by the slider 413 and the slide groove 408, during the rotation of the friction wheel 412, the follower rod 407 can be driven to rotate synchronously by the slider 413. At this time, the tower plate 2 arranged above the friction wheel 412 will also be driven by the follower rod 407 and rotate synchronously, thereby achieving The rotation drive of the tower plate 2 enables the multiple tower plates 2 to rotate inside the distillation tower body 1, and the rotation of the tower plate 2 can greatly increase the gas-liquid contact area and contact time, thereby promoting the mass transfer process between the gas-liquid two phases. In the distillation process, it can help to improve the separation efficiency and purity, making it easier to remove impurities in the raw materials, thereby obtaining higher quality electronic grade hydrofluoric acid, and the rotation of the tower plate 2 can also enhance the mixing of the liquid on the tower plate 2, so that the liquid is more evenly distributed on the tower plate 2, which helps to reduce the residence time and dead zone of the liquid on the tower plate 2, and further improve the separation efficiency. At the same time, the rotating tower plate 2 can also promote heat transfer, so that the liquid and gas on the tower plate 2 can exchange heat more effectively, which helps to maintain the temperature balance in the tower and improve the stability and efficiency of the distillation process;

[0061] In addition, the rotation of the tray 2 is achieved through mechanical drive, which can reduce the operational errors and failures caused by manual operation or traditional fixed trays 2. This automated and mechanized design effectively improves the reliability and stability of the equipment and reduces maintenance costs.

[0062] like Figure 2 and Figure 6As shown, a temperature sensor is provided on the inner wall of the distillation tower body 1 between two adjacent tower plates 2, and the temperature sensor and the electric push rod 409 are electrically connected to the external terminal. When the temperature sensor detects a temperature change, a signal can be transmitted to the terminal and feedback can be given. Then the terminal receives the signal and responds, controls the electric push rod 409 to start running and push the friction wheel 412. It should be noted that the distance pushed by the electric push rod 409 each time is equal. Therefore, when the electric push rod 409 is controlled to start, as shown in FIG. Figure 6 As shown, since the electric push rod 409 is fixedly arranged between the slider 413 and the inner bottom wall of the slide groove 408, as the electric push rod 409 runs, the slider 413 can slide upward or downward inside the slide groove 408, and synchronously drive the friction wheel 412 to move upward or downward. At this time, the friction wheel 412 will move away from or close to one end of the axial direction of the friction disc 405, thereby changing the transmission ratio between the friction wheel 412 and the friction disc 405, so that the rotation speed of the friction wheel 412 can be changed synchronously. Since the friction wheel 412 can drive the follower rod 407 and the upper tower plate 2 to rotate synchronously, when the rotation speed of the friction wheel 412 changes, the rotation speed of the tower plate 2 changes synchronously. In the above process, the electric push rod 409 is used to push and control the slider 413, which can be changed synchronously. The rotation speed of the tower plate 2 inside the distillation tower body 1 is adjusted to adapt to the temperature of the tower plate 2. In the above process, the electric push rod 409 is used to change the position of the friction wheel 412 on the outer surface of the follower rod 407, and the rotation speed of the tower plate 2 inside the distillation tower body 1 is changed synchronously. Through the precise control of the electric push rod 409, the position of the friction wheel 412 can be fine-tuned, and the rotation speed of the tower plate 2 can be precisely controlled, which helps to optimize the distillation process, improve the separation efficiency and product quality, and make the entire distillation tower system more flexible. In the process of purifying and producing electronic-grade hydrofluoric acid, the distillation tower can timely adjust the rotation speed of the tower plate 2 according to the temperature change, so that there is no need to carry out large-scale transformation or adjustment of the equipment, which helps to extend the service life of the equipment and reduce maintenance costs;

[0063] like Figure 6As shown, since an elastic telescopic column 410 is fixedly arranged between the slider 413 and the inner top wall of the slide groove 408, when the electric push rod 409 pushes the friction wheel 412 to move, the elastic telescopic column 410 is synchronously compressed or stretched, so as to cooperate with the vertical movement of the slider 413, so that the movement of the friction wheel 412 on the outer surface of the follower rod 407 can be more stable, and a sealing pleated plate 411 is fixedly arranged between the slider 413 and the inner top wall and the inner bottom wall of the slide groove 408. When the slider 413 slides, the sealing pleated plate 411 11 changes synchronously to realize the closure of the chute 408, thereby effectively preventing the raw materials from entering the chute 408 and interfering with the various structures inside the chute 408. In this process, the sealing pleated plate 411 is arranged between the slider 413 and the top wall and the bottom wall of the chute 408 to block the chute 408, effectively preventing the raw materials or other impurities from entering the chute 408 and preventing these impurities from interfering with the internal structures of the chute 408 (such as the electric push rod 409 and the elastic telescopic column 410). In addition, by using the elastic telescopic column 410 arranged between the slider 413 and the inner top wall of the slider 408, when the electric push rod 409 pushes the slider 413 to move inside the slider 408, the setting of the elastic telescopic column 410 allows the slider 413 to maintain stable contact with the slider 408 during the movement, and even when the electric push rod 409 pushes the friction wheel 412 to move, the vertical movement of the slider 413 can be ensured to be smooth and vibration-free, thereby improving the stability of the friction wheel 412 moving on the outer surface of the follower rod 407, thereby helping to accurately control the position of the friction wheel 412, and then accurately adjust the rotation speed of the tower plate 2, improve the control accuracy of the distillation process, and through the combined design of the elastic telescopic column 410 and the sealing pleated plate 411, it can effectively help reduce the noise and vibration generated by the slider 413 during the movement, thereby protecting the internal components of the distillation tower body 1 from the influence of vibration;

[0064] Please refer to the above working process Figures 1 to 8 .

[0065] The following is the working process of the state monitoring feedback mechanism 5 to monitor the rotation state of the tower plate 2 in real time:

[0066] In the process of friction disc 405 driving friction wheel 412 to rotate, Figure 5As shown, since an annular groove 501 is provided on the upper surface of the friction wheel 412, the connector 502 is slidably connected in the annular groove 501, and first T-shaped rods 503 are fixedly arranged on both sides of the connector 502, and penetrating rods 507 are symmetrically and equidistantly slidably arranged on the distillation tower body 1, and a baffle 506 is fixedly arranged on one end of the penetrating rod 507 located inside the distillation tower body 1, and a second T-shaped rod 505 is fixedly arranged on the end of the baffle 506 away from the penetrating rod 507, and the second T-shaped rod 505 and the first T-shaped rod 503 are rotatably connected through the connecting rod 504, so when the penetrating rod 507 and the distillation tower body 1 are slidably penetrated, Under the limiting effect of the dynamic setting, when the friction wheel 412 is driven to rotate, the connector 502 can rotate on the upper surface of the friction wheel 412 without being synchronously driven to rotate by the friction wheel 412, so that when the friction wheel 412 is subsequently pushed by the electric push rod 409, the connector 502 on it can be driven to move synchronously in the vertical direction. At this time, since the connector 502 is connected to the penetration rod 507 through the first T-shaped rod 503, the connecting rod 504 and the second T-shaped rod 505, the penetration rod 507 can be synchronously driven to slide through the distillation tower body 1 during the up and down movement of the connector 502;

[0067] according to Figure 7 and Figure 8 As shown, initially, the first contact 508 and the second contact 511 contact each other and generate a signal source to send to the terminal, and the terminal can know the pushing state of the electric push rod 409 in real time, and the first contact 508 and the second contact 511 contact each other to synchronously trigger the indicator light 512 to light up (it should be noted here that the number of first contacts 508 is consistent with the temperature change gear, the number of times the electric push rod 409 can be pushed, and the lighting gear of the indicator light 512, that is, every time the temperature changes by one gear, the electric push rod 409 is pushed once, the position of the first contact 508 is also changed synchronously, and the lighting gear of the indicator light 512 changes synchronously);

[0068] like Figure 7 and Figure 8As shown, since the outer surface of one end of the through rod 507 away from the second T-shaped rod 505 is equidistantly provided with first contacts 508, a U-shaped fixing frame 509 is symmetrically fixedly provided on the outer surface of the distillation tower body 1, and a support block 510 is equidistantly fixedly connected to the U-shaped fixing frame 509, and the support block 510 is arranged below the through rod 507 and fits with the outer surface of the through rod 507, and a second contact 511 is arranged on the upper surface of the support block 510, and an indicator light 512 is also equidistantly fixedly provided on the U-shaped fixing frame 509. Initially, the second contact 511 will contact one of the first contacts 508 and generate a signal to drive the indicator light 512 to light up. When the through rod 507 moves, the position of the first contact 508 will be changed, so that the other first contacts 508 will form a new contact with the second contact 511, so that the indicator light 512 can switch gears. In this process , through the setting of the state monitoring feedback mechanism 5, when the friction wheel 412 is displaced, the connector 502 can be synchronously driven to move vertically, so that under the driving action of the connecting rod 504, the penetration rod 507 can be driven to slide through the distillation tower body 1, thereby changing the contact between the first contact 508 and the second contact 511, so that the indicator light 512 can switch the lighted gear, thereby realizing real-time monitoring and feedback of the electric push rod 409 pushing the friction wheel 412, which helps the operator to timely understand the working status inside the distillation tower body 1 and ensure that the equipment operates under safe and stable conditions. Through the gear switching of the indicator light 512, the operator can more intuitively understand the displacement of the friction wheel 412 and the rotation speed of the tower plate 2, reducing the operator's direct intervention in the equipment and improving the convenience and safety of operation;

[0069] Please refer to the above working process Figures 1 to 8 .

[0070] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0071] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for producing electronic grade hydrofluoric acid purification, comprising a distillation tower body (1), wherein tower plates (2) are equidistantly and movably connected to the distillation tower body (1), and an overflow weir (3) is fixedly connected to the tower plates (2), characterized in that: It also includes: a speed convenient control mechanism (4) and a state monitoring feedback mechanism (5), and the speed convenient control mechanism (4) and the state monitoring feedback mechanism (5) are both arranged on the distillation tower body (1); The speed convenient control mechanism (4) comprises a follower rod (407), a friction wheel (412) and a friction disc (405), wherein the follower rod (407) is coaxially arranged with the tower plate (2), the friction wheel (412) is arranged on the outer surface of the follower rod (407), and the friction disc (405) is perpendicular to the friction wheel (412); The state monitoring feedback mechanism (5) comprises a connecting head (502) and a penetrating rod (507), wherein the connecting head (502) is arranged on the friction wheel (412), the penetrating rod (507) is symmetrically arranged with the connecting head (502) as the center, and one end of the penetrating rod (507) away from the connecting head (502) penetrates the distillation tower body (1) and extends to the outside of the distillation tower body (1); The inner wall of the distillation tower body (1) is fixedly connected with support plates (406) at equal intervals, the tower plate (2) is fixedly connected to the outer surface of a follower rod (407), and the follower rod (407) is rotatably connected between two adjacent support plates (406); The outer surface of the follower rod (407) is provided with a slide groove (408); the inner ring surface of the friction wheel (412) is fixedly connected with a slider (413), and the slider (413) is slidably connected in the slide groove (408); the friction wheel (412) is in contact with the friction disc (405), and the friction wheel (412) and the friction disc (405) are transmission-connected; An elastic telescopic column (410) is fixedly connected between the slider (413) and the inner top wall of the slide groove (408), an electric push rod (409) is fixedly connected between the slider (413) and the inner bottom wall of the slide groove (408), and a sealing pleated plate (411) is fixedly connected between the slider (413) and the inner top wall and inner bottom wall of the slide groove (408), and the sealing pleated plate (411) is used to seal the slide groove (408).

2. The device for purifying electronic-grade hydrofluoric acid according to claim 1, characterized in that: The speed convenient control mechanism (4) further comprises a mounting frame (401) fixedly connected to the outer surface of the distillation tower body (1), the lower end of the mounting frame (401) being fixedly connected to a driving motor (402), rotating shafts (403) being equidistantly passed through the mounting frame (401) and being rotatably connected, a transmission member (404) being transmission-connected between the rotating shafts (403), one end of the rotating shaft (403) away from the driving motor (402) being passed through and rotatably connected to the distillation tower body (1), and one of the rotating shafts (403) being fixedly connected to the output end of the driving motor (402), and a friction disc (405) being fixedly connected to the outer surface of one end of the rotating shaft (403) located inside the distillation tower body (1).

3. The device for purifying electronic-grade hydrofluoric acid according to claim 1, characterized in that: The state monitoring feedback mechanism (5) further comprises an annular groove (501) formed on the upper surface of the friction wheel (412); the connecting head (502) is rotatably connected to the annular groove (501); a first T-shaped rod (503) is symmetrically fixedly connected to the connecting head (502); an end of the first T-shaped rod (503) away from the connecting head (502) is rotatably connected to a connecting rod (504); and an end of the connecting rod (504) away from the first T-shaped rod (503) is rotatably connected to a second T-shaped rod (505).

4. The device for purifying electronic-grade hydrofluoric acid according to claim 3, characterized in that: The penetration rod (507) is equidistantly and symmetrically penetrated and slidably connected to the distillation tower body (1); one end of the penetration rod (507) located inside the distillation tower body (1) is fixedly connected to a baffle (506), and the baffle (506) is fixedly connected to the second T-shaped rod (505).

5. The device for purifying electronic-grade hydrofluoric acid according to claim 4, characterized in that: The outer surface of one end of the through-rod (507) away from the baffle (506) is provided with first contact points (508) at equal intervals, the outer surface of the distillation tower body (1) is symmetrically fixedly connected to a U-shaped fixing frame (509), and the U-shaped fixing frame (509) is fixedly connected to a supporting block (510) at equal intervals, and the upper surface of the supporting block (510) is in contact with the outer surface of the through-rod (507).

6. The device for purifying electronic-grade hydrofluoric acid according to claim 5, characterized in that: A second contact point (511) is provided on the upper surface of the support block (510), and one of the first contacts (508) is in contact with the second contact point (511).

7. The device for producing electronic grade hydrofluoric acid purification according to claim 6, characterized in that: One end of the penetration rod (507) located outside the distillation tower body (1) is slidably connected to a U-shaped fixing frame (509), and indicator lights (512) are also fixedly connected to the U-shaped fixing frame (509) at equal intervals.

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