Silicon carbide powder synthesis device and method

Abstract

The present invention provides a silicon carbide powder synthesis device and method, and relates to the field of silicon carbide synthesis technology. The silicon carbide powder synthesis device comprises a base, the upper surface of the base is fixedly connected to a cylindrical boss, a small cylinder is arranged on the upper surface of the cylindrical boss, the cylindrical surface of the small cylinder of the cylindrical boss is rotatably connected to a rotating disk, the upper surface of the rotating disk is arranged with a T-slot, the T-slot of the rotating disk is slidably connected to a sliding toothed rod, the upper surface of the sliding toothed rod is arranged with a toothed groove, the sliding toothed rod is fixedly connected to a placement component on one side away from the center of the rotating disk, a crucible component is arranged above the placement component, and the upper surface of the base is fixedly connected to a protective shell. The three crucible components are respectively located in a heating zone, a cooling zone, and a processing zone, so as to ensure that the equipment is always in a working state most of the time, and avoid the equipment being in an idle state due to the need to cool the crucible, thereby improving the production efficiency of the equipment.

Description

Technical Field

[0001] The invention relates to the technical field of silicon carbide synthesis, and in particular to a device and method for synthesizing silicon carbide powder. Background Art

[0002] As a typical representative of the third generation of semiconductor materials, silicon carbide has excellent properties such as high hardness, high thermal conductivity, low thermal expansion coefficient, large bandgap, high saturated electron drift velocity, strong critical breakdown field, high chemical stability, and strong radiation resistance. These excellent properties enable SiC semiconductor devices to work in extreme environments of high temperature, high pressure, and strong radiation, and have broad application prospects in the fields of power electronics and microwave communications.

[0003] When applying for the present invention, the applicant found through search that a Chinese patent disclosed a "continuous synthesis equipment and method for silicon carbide powder", and its application number is "202410252044.7". This patent mainly improves the synthesis efficiency of silicon carbide powder by arranging a feed transition bin, a reaction bin and a discharge transition bin in the reactor from top to bottom. However, the crucible is heated unevenly during the reaction process, which will cause incomplete reaction of some raw materials and waste of raw materials. Another patent "Silicon carbide powder synthesis crucible" has an application number of "202223001980.6". This patent sets a heat conduction component to make the heat distribution in the entire containing tank in the crucible more uniform, thereby promoting a more complete reaction. However, after it is prepared, it is necessary to wait for the temperature of the crucible to drop to a safe value before the next round of production can be carried out, which takes a long time and leads to low overall production efficiency of the equipment. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the present invention provides a silicon carbide powder synthesis device and method, which solves the problem of incomplete reaction of some raw materials and low production efficiency caused by uneven temperature in the crucible during the synthesis of silicon carbide powder.

[0006] (II) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a silicon carbide powder synthesis device comprises a base, the upper surface of the base is fixedly connected to a cylindrical boss, a small cylinder is arranged on the upper surface of the cylindrical boss, the cylindrical surface of the small cylinder of the cylindrical boss is rotatably connected to a rotating disk, the upper surface of the rotating disk is provided with a T-slot, the T-slot of the rotating disk is slidably connected to a sliding toothed groove rod, the upper surface of the sliding toothed groove rod is provided with tooth grooves, the sliding toothed groove rod is fixedly connected to a placement component on one side away from the center of the rotating disk, a crucible component is arranged above the placement component, the upper surface of the base is fixedly connected to a protective shell, the upper surface of the small cylinder of the cylindrical boss is fixedly connected to a rectangular fixed block, the A T-slot is provided on one side surface of the rectangular fixed block close to the protective shell, the T-slot of the rectangular fixed block is slidably connected to the second movable plate, the upper surface of the second movable plate is fixedly connected to the second servo motor, the output end of the second servo motor is fixedly connected to the second rotating shaft, the cylindrical surface of the second rotating shaft is fixedly connected to the second gear, and a through-hole is provided on one side surface of the protective shell close to the rotating disk, the inner upper surface of the protective shell is fixedly connected to the fourth electric push rod, the lower surface of the piston rod of the fourth electric push rod is fixedly connected to the third movable plate, the lower surface of the third movable plate is fixedly connected to the third servo motor, the output end of the third servo motor is fixedly connected to the rotating component, and a cooling component is provided on the upper surface of the base. The sliding toothed rod is provided to facilitate the movement of the placement assembly and the crucible assembly during their movement; the second servo motor and the second gear are provided to facilitate the movement of the sliding toothed rod; the fourth electric push rod is provided to facilitate the adjustment of the height of the third movable plate and its connected parts, thereby controlling the matching holes of the rotating assembly and the stirring shaft to match; the placement assembly is provided to facilitate the fixing of the crucible assembly; the crucible assembly is provided to facilitate the accommodation of silicon carbide raw materials and provide reaction space for them; the third servo motor is provided to facilitate the rotation of the rotating assembly, the stirring shaft and the stirring frame, thereby fully mixing the raw materials inside the crucible body and allowing the raw materials inside the crucible body to be heated evenly.

[0008] Preferably, the cylindrical surface of the rotating disk near the bottom is provided with tooth grooves, the upper surface of the base is fixedly connected to the support column, the upper surface of the support column is fixedly connected to the first servo motor, the output end of the first servo motor is fixedly connected to the first rotating shaft, the cylindrical surface of the first rotating shaft is fixedly connected to the first gear, and the first gear is meshed with the tooth grooves of the rotating disk. The first servo motor and the first gear are provided to facilitate the rotation of the rotating disk, thereby changing the position of the placement assembly and the crucible assembly.

[0009] Preferably, the crucible assembly includes a crucible body, a stirring shaft, a stirring frame and a crucible cover, a matching block is provided on the cylindrical surface of the crucible body near the bottom edge, a matching hole is provided on the side surface of the matching block of the crucible body, the stirring shaft is rotatably connected inside the crucible body, the stirring frame is fixedly connected to the cylindrical surface of the stirring shaft, the stirring frame contacts the cylindrical surface and lower surface inside the crucible body, the upper surface of the crucible body is provided with a groove, the crucible cover is placed on the upper surface of the crucible body, the lower surface of the crucible cover is provided with a protruding block that matches the groove on the upper surface of the crucible body, a vertical through hole is provided in the center of the crucible cover, the stirring shaft passes through the vertical through hole in the center of the crucible cover, the upper surface of the stirring shaft is provided with a matching hole, and the cylindrical surface of the matching hole of the stirring shaft is provided with a slot. The stirring frame is provided to facilitate the full stirring of the raw materials inside the crucible body, and the stirring shaft is provided to facilitate the rotation of the stirring frame, and can be quickly matched and separated with the rotating component.

[0010] Preferably, the placement assembly includes a placement block, a limit block, a sliding shaft, a first spring, a sliding plate, a first fixed shaft, a clamping block and a water outlet channel, the placement block is fixedly connected to the sliding toothed rod, a baffle frame is provided on the upper surface of the placement block, the limit block is fixedly connected to the upper surface of the placement block, a vertically through-going mating groove is provided on the upper surface of the limit block, a slide slot hole is provided on the side surface of the limit block, the mating block of the crucible body is mated in the mating groove of the limit block, the water outlet channel is provided on the side surface of the placement block, and the water outlet channel is communicated with the inside of the baffle frame on the upper surface of the placement block. The limit block is provided to facilitate the determination of the position of the crucible body on the placement block, and the water outlet channel is provided to allow the cooling water to flow into the baffle frame of the placement block after the cooling water cools the crucible body, and finally flows from the water outlet channel into the water storage frame below, thereby realizing cooling water circulation.

[0011] Preferably, the first fixed shaft is fixedly connected to the side surface of the limit block, the clamping block is rotatably connected to the cylindrical surface of the first fixed shaft, the sliding shaft is slidably connected to the slide slot hole of the limit block, the sliding shaft passes into the matching hole on the side surface of the matching block of the crucible body, the sliding plate is fixedly connected to the end face of the sliding shaft away from the limit block, the first spring is fixedly connected between the sliding plate and the limit block, and the first spring ring is on the cylindrical surface of the sliding shaft. The clamping block is provided to facilitate blocking between the sliding plate and the limit block so that the sliding shaft cannot return to the matching hole on the side surface of the matching block of the crucible body under the action of the first spring, the sliding shaft is provided to facilitate fixing the position of the crucible body, and the first spring is provided to facilitate pulling the sliding shaft into the matching hole on the side surface of the matching block of the crucible body.

[0012] Preferably, the cooling component includes a first electric push rod, a first movable plate, a water storage frame, a first support plate, a water pump, an output pipe, a sprinkler, a bracket, a fan and a cooling pipe, wherein the first electric push rod is fixedly connected to the upper surface of the base, the first movable plate is fixedly connected to the top of the piston rod of the first electric push rod, the first support plate is fixedly connected to the upper surface of the first movable plate, the water storage frame is fixedly connected to the upper surface of the first movable plate, the bracket is fixedly connected to the upper surface of the base, and the fan is fixedly connected to the upper surface of the bracket. The first electric push rod is provided to facilitate the adjustment of the height of the first movable plate and the components above it, the water storage frame is provided to facilitate the provision of water source to the water pump and the recovery of cleaning water flowing out of the water outlet channel, and the fan is provided to facilitate the blowing of air to the bending part of the cooling pipe, thereby improving the heat dissipation efficiency of the cooling pipe.

[0013] Preferably, the sprayer and the water pump are fixedly connected to the side surface of the first support plate, the output pipe is fixedly connected to the output end of the water pump, the other end of the output pipe is connected to the sprayer, the cooling pipe is fixedly connected to the input end of the water pump, the other end of the cooling pipe is connected to the inside of the water storage frame, and the middle part of the cooling pipe is a bent structure. The water pump and the sprayer are provided to facilitate spraying water on the outer surface of the crucible body, thereby quickly cooling it, and the cooling pipe is provided to facilitate increasing the time of heat exchange between the cooling water and the outside, thereby reducing the temperature of the cooling water flowing out of the sprayer.

[0014] Preferably, the rotating assembly includes a third rotating shaft, a second fixed shaft, a sliding sleeve, a card plate and a second spring, wherein the third rotating shaft is fixedly connected to the output end of the third servo motor, the second fixed shaft is fixedly connected to the cylindrical surface at the bottom of the third rotating shaft, the sliding sleeve is slidably connected to the cylindrical surface of the second fixed shaft, the second spring is fixedly connected between the third rotating shaft and the sliding sleeve, the second spring ring is on the cylindrical surface of the second fixed shaft, the card plate is fixedly connected to the end of the sliding sleeve away from the third rotating shaft, and the bottom of the card plate is an inclined surface. The card plate is provided to facilitate the fitting in the card slot at the top of the stirring shaft, so that the stirring shaft can be driven to rotate during the rotation of the third rotating shaft.

[0015] Preferably, a magnet block is provided on the inner side surface of the T-slot of the rotating disc near the center of the cylindrical boss, the upper surface of the rectangular fixed block is fixedly connected to the second support plate, the lower surface of the second support plate is fixedly connected to the second electric push rod, the bottom of the piston rod of the second electric push rod is fixedly connected to the upper surface of the second movable plate, the inner two side surfaces of the protective shell are fixedly connected to the third electric push rod, the piston rod of the third electric push rod is fixedly connected to the heating plate, and the heating plate is semicircular. The heating plate is provided to facilitate heating the crucible body, thereby providing reaction conditions for the raw materials inside the crucible body, and the magnet block is provided to facilitate adsorption of the sliding toothed slot rod so that its position does not slide during the rotation of the rotating disc.

[0016] The synthesis method of silicon carbide powder includes the following specific steps:

[0017] S1. In the processing area, carbon powder, silicon powder and a binder are mixed in a certain proportion and put into the crucible body, and then the crucible cover is covered, and the first servo motor drives the first gear to rotate, thereby driving the rotating disk to rotate, so that the crucible assembly moves to the preheating area, and the second electric push rod drives the second moving plate to move downward, thereby driving the second gear to move downward until the second gear is meshed with the tooth groove of the sliding tooth groove rod below;

[0018] S2. The second gear is driven to rotate by the second servo motor, and the sliding toothed rod is driven to move during the rotation of the second gear until the crucible assembly placed on the assembly is moved to the heating zone inside the protective housing;

[0019] S3. Push the heating plate until it contacts the outer cylindrical surface of the crucible body through the third electric push rod, then drive the third servo motor and the rotating assembly downward through the fourth electric push rod until the bottom of the rotating assembly is stuck in the matching hole at the top of the stirring shaft, then heat the crucible body through the heating plate, and at the same time drive the rotating assembly to rotate through the third servo motor, thereby driving the stirring shaft and the stirring frame to rotate, and stirring the raw materials inside the crucible body;

[0020] S4. After the reaction is completed, the heating plate is moved back to its original position by the third electric push rod, and then the third servo motor and the rotating assembly are driven upward by the fourth electric push rod, so that the rotating assembly is disengaged from the matching hole at the top of the stirring shaft, and then the second gear is driven by the second servo motor to rotate in the opposite direction, and the crucible assembly placed on the assembly is moved to the preheating zone;

[0021] S5. The second gear is moved upward by the second electric push rod, and then the first gear is driven to rotate by the first servo motor, thereby driving the rotating disk to rotate until the high-temperature crucible assembly moves to the cooling zone, and then the first movable plate and the upper component are moved upward by the first electric push rod, so that the sprayer is aligned with the cylindrical surface of the crucible body;

[0022] S6. The cooling water is pumped out from the water storage frame by a pump and sprayed out from the sprayer to cool the outer cylindrical surface of the crucible body. After the temperature drops to a safe range, the first electric push rod drives the first movable plate and the upper member to move down and return to the initial height;

[0023] S7. The first servo motor drives the first gear to rotate, thereby driving the rotating disk to rotate until the high-temperature crucible assembly moves to the processing area, and uses a dry cotton cloth to wipe off the residual moisture on the outside of the crucible assembly. Then, the crucible assembly is removed, and the crucible cover is opened to pour out the silicon carbide powder.

[0024] Working principle: the three crucible components are respectively in the state of heating zone, cooling zone and processing zone. The three crucible components are switched among these three states, so that the equipment is always in working state most of the time, reducing the idle rate of the equipment and improving the working efficiency of the equipment; the cooling component quickly cools down the crucible component after the reaction. The use of cooling tube and fan improves the cooling effect of the cooling component and reduces the time waiting for the crucible component to cool down. The bottom of the rotating component can be quickly matched in the matching hole at the top of the stirring shaft during the descent process. The rotating component is driven by the third servo motor to rotate, so that the bottom of the rotating component rotates in the matching hole at the top of the stirring shaft. When the card plate rotates to the position corresponding to the card slot in the matching hole at the top of the stirring shaft, the second spring will push the card plate into the card slot in the matching hole at the top of the stirring shaft. When the third rotating shaft of the rotating component rotates, it will drive the stirring shaft to rotate, thereby driving the stirring frame to rotate, stirring the raw materials in the crucible body, mixing the raw materials in the crucible body evenly, and heating the raw materials evenly, ensuring the quality of the generated silicon carbide powder.

[0025] (III) Beneficial effects

[0026] The present invention provides a silicon carbide powder synthesis device and method, which has the following beneficial effects:

[0027] 1. The three crucible components are respectively in the heating zone, cooling zone and processing zone, ensuring that the equipment is always in working state most of the time, avoiding the equipment being idle due to the need for crucible cooling, thereby improving the production efficiency of the equipment.

[0028] 2. The cooling component water-cools the crucible component after the reaction, thereby reducing the cooling time of the crucible component.

[0029] 3. By setting up the rotating component, it can quickly cooperate with the stirring shaft, so that the stirring shaft is driven to rotate under the drive of the third servo motor, and then the stirring frame is driven to rotate, so that the raw materials inside the crucible body are fully mixed and the raw materials inside the crucible body are evenly heated during the stirring process. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of the overall structure of the silicon carbide powder synthesis device proposed in the present invention;

[0031] Figure 2 This is a schematic diagram of the overall structure of the silicon carbide powder synthesis device proposed by the present invention from another perspective;

[0032] Figure 3 This is a schematic diagram of the structure of the crucible assembly, the cooling assembly and the placement assembly of the silicon carbide powder synthesis device proposed by the present invention;

[0033] Figure 4 This is a schematic diagram of the installation position structure of the cooling pipe of the silicon carbide powder synthesis device proposed by the present invention;

[0034] Figure 5 This is a schematic diagram of the internal structure of the protective shell of the silicon carbide powder synthesis device proposed in the present invention;

[0035] Figure 6 This is a schematic diagram of the structure of the rotating assembly of the silicon carbide powder synthesis device proposed by the present invention;

[0036] Figure 7 This is a schematic cross-sectional view of the structure of the rotating assembly and the stirring shaft of the silicon carbide powder synthesis device proposed by the present invention when they are matched;

[0037] Figure 8 It is a schematic cross-sectional structure diagram of the heating plate and the crucible assembly of the silicon carbide powder synthesis device proposed by the present invention when they are matched;

[0038] Fig. 9 This is a schematic diagram of the top structure of the stirring shaft of the silicon carbide powder synthesis device proposed by the present invention;

[0039] Fig.10 This is a schematic diagram of the structure of the crucible assembly and the placement assembly of the silicon carbide powder synthesis device proposed by the present invention;

[0040] Fig.11 This is a schematic cross-sectional view of the matching portion of the cylindrical boss and the rotating disc of the silicon carbide powder synthesis device proposed by the present invention;

[0041] Fig.12 It is a schematic diagram of the structure below the crucible cover of the crucible assembly of the silicon carbide powder synthesis device proposed in the present invention;

[0042] Fig.13 This is an enlarged view of the local structure at A of the silicon carbide powder synthesis device proposed by the present invention;

[0043] Fig.14This is an enlarged view of the local structure at location B of the silicon carbide powder synthesis device proposed in the present invention.

[0044] Among them, 1. base; 2. cylindrical boss; 3. support column; 4. first servo motor; 5. first rotating shaft; 6. first gear; 7. crucible assembly; 701. crucible body; 702. stirring shaft; 703. stirring frame; 704. crucible cover; 8. cooling assembly; 801. first electric push rod; 802. first moving plate; 803. water storage frame; 804. first support plate; 805. water pump; 806. output pipe; 807. sprinkler; 808. bracket; 809. fan; 810. cooling pipe; 9. placement assembly; 901. placement block; 902. limit block; 903. sliding shaft; 904. first spring; 905. sliding plate ;906, first fixed axis;907, clamping block;908, water outlet channel;10, rotating disc;11, protective shell;12, rectangular fixed block;13, second support plate;14, second electric push rod;15, second movable plate;16, second gear;17, second servo motor;18, second rotating axis;19, sliding toothed rod;20, third electric push rod;21, heating plate;22, fourth electric push rod;23, third movable plate;24, third servo motor;25, rotating assembly;2501, third rotating axis;2502, second fixed axis;2503, sliding sleeve;2504, clamping plate;2505, second spring;26, magnet block. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] like Figure 1-14As shown, an embodiment of the present invention provides a silicon carbide powder synthesis device, including a base 1, the upper surface of the base 1 is fixedly connected to a cylindrical boss 2, the upper surface of the cylindrical boss 2 is provided with a small cylinder, the cylindrical surface of the small cylinder of the cylindrical boss 2 is rotatably connected to a rotating disk 10, the upper surface of the rotating disk 10 is provided with a T-slot, the T-slot of the rotating disk 10 is slidably connected to a sliding toothed rod 19, the upper surface of the sliding toothed rod 19 is provided with a toothed groove, the side of the sliding toothed rod 19 away from the center of the rotating disk 10 is fixedly connected to a placement component 9, a crucible component 7 is provided above the placement component 9, the upper surface of the base 1 is fixedly connected to a protective shell 11, the upper surface of the small cylinder of the cylindrical boss 2 is fixedly connected to a rectangular fixed block 12, the side surface of the rectangular fixed block 12 close to the protective shell 11 is provided with a T-slot, the T-slot of the rectangular fixed block 12 is slidably connected to a second movable plate 15, the upper surface of the second movable plate 15 is fixedly connected to a second servo motor 17, the output end of the second servo motor 17 is fixedly connected to a second rotating shaft 18, and the second The cylindrical surface of the rotating shaft 18 is fixedly connected to the second gear 16, a through hole is provided on one side surface of the protective shell 11 close to the rotating disk 10, a fourth electric push rod 22 is fixedly connected to the upper surface of the inner part of the protective shell 11, a lower surface of the piston rod of the fourth electric push rod 22 is fixedly connected to the third movable plate 23, a lower surface of the third movable plate 23 is fixedly connected to the third servo motor 24, an output end of the third servo motor 24 is fixedly connected to the rotating component 25, a cooling component 8 is provided on the upper surface of the base 1, a magnet block 26 is provided on the inner side surface of the T-slot of the rotating disk 10 near the center of the cylindrical boss 2, an upper surface of the rectangular fixed block 12 is fixedly connected to the second support plate 13, a lower surface of the second support plate 13 is fixedly connected to the second electric push rod 14, a bottom of the piston rod of the second electric push rod 14 is fixedly connected to the upper surface of the second movable plate 15, both side surfaces of the inner part of the protective shell 11 are fixedly connected to the third electric push rod 20, a piston rod of the third electric push rod 20 is fixedly connected to the heating plate 21, and the heating plate 21 is semicircular. When the sliding toothed rod 19 is not moved into the protective shell 11, its side end face is in contact with the magnet block 26, and the contact surface between the sliding toothed rod 19 and the magnet block 26 is provided with iron sheet. The rotating disk 10 rotates 120 degrees each time, and the angle between the T-slots of the three rotating disks 10, the sliding toothed rod 19, the magnet block 26, the crucible assembly 7, and the placement assembly 9 is 120 degrees. The position where the crucible assembly 7 is rotated to be pushed into the protective shell 11 is called the preheating zone, the position where the crucible assembly 7 is pushed into the protective shell 11 is the heating zone, the position where the crucible assembly 7 is rotated to the cooling assembly 8 is the cooling zone, and the position of the crucible assembly 7 that is not in the cooling zone, heating zone or preheating zone is the processing zone.

[0047] The crucible assembly 7 includes a crucible body 701, a stirring shaft 702, a stirring frame 703 and a crucible cover 704. A matching block is provided on the cylindrical surface of the crucible body 701 near the bottom edge, and a matching hole is provided on the side surface of the matching block of the crucible body 701. The stirring shaft 702 is rotatably connected to the inside of the crucible body 701. The stirring frame 703 is fixedly connected to the cylindrical surface of the stirring shaft 702. The stirring frame 703 contacts the cylindrical surface and the lower surface of the inside of the crucible body 701. A groove is provided on the upper surface of the crucible body 701. The crucible cover 704 is placed on the crucible body 70 1, a protruding block matching with the groove on the upper surface of the crucible body 701 is arranged on the lower surface of the crucible cover 704, a vertical through hole is arranged at the center of the crucible cover 704, a stirring shaft 702 passes through the vertical through hole in the center of the crucible cover 704, a matching hole is arranged on the upper surface of the stirring shaft 702, a card groove is arranged on the cylindrical surface of the matching hole of the stirring shaft 702, and the stirring frame 703 contacts the cylindrical surface and the lower surface inside the crucible body 701, so that the raw materials at the cylindrical surface and the lower surface inside the crucible body 701 can also be stirred, avoiding the occurrence of a stirring dead angle.

[0048] The placement assembly 9 includes a placement block 901, a limit block 902, a sliding shaft 903, a first spring 904, a sliding plate 905, a first fixed shaft 906, a clamping block 907 and a water outlet channel 908. The placement block 901 is fixedly connected to the sliding toothed rod 19. A baffle is provided on the upper surface of the placement block 901. The limit block 902 is fixedly connected to the upper surface of the placement block 901. A vertically penetrating matching groove is provided on the upper surface of the limit block 902. A slide groove hole is provided on the side surface of the limit block 902. The matching block of the crucible body 701 is matched in the matching groove of the limit block 902. The water outlet channel 908 is provided on the side surface of the placement block 901. The water outlet channel 908 is communicated with the interior of the baffle frame on the upper surface of the placement block 901, the first fixed shaft 906 is fixedly connected to the side surface of the limit block 902, the clamping block 907 is rotatably connected to the cylindrical surface of the first fixed shaft 906, the sliding shaft 903 is slidably connected in the slide slot hole of the limit block 902, the sliding shaft 903 passes into the matching hole on the side surface of the matching block of the crucible body 701, the sliding plate 905 is fixedly connected to the end face of the sliding shaft 903 away from the limit block 902, the first spring 904 is fixedly connected between the sliding plate 905 and the limit block 902, and the first spring 904 is ringed on the cylindrical surface of the sliding shaft 903. When the sliding plate 905 is pulled to pull the sliding shaft 903 out of the matching hole on the side surface of the matching block of the crucible body 701, the crucible body 701 can be removed from the placement component 9. At this time, the longer end of the clamping block 907 is rotated between the sliding plate 905 and the limit block 902. At this time, the clamping block 907 is blocked between the sliding plate 905 and the limit block 902. The first spring 904 cannot drive the sliding shaft 903 to move by pulling the sliding plate 905, thereby failing to move the sliding shaft 903 to the matching hole on the side surface of the matching block of the crucible body 701.

[0049] The cooling assembly 8 includes a first electric push rod 801, a first movable plate 802, a water storage frame 803, a first support plate 804, a water pump 805, an output pipe 806, a sprinkler 807, a bracket 808, a fan 809 and a cooling pipe 810. The first electric push rod 801 is fixedly connected to the upper surface of the base 1, the first movable plate 802 is fixedly connected to the top of the piston rod of the first electric push rod 801, the first support plate 804 is fixedly connected to the upper surface of the first movable plate 802, and the water storage frame 803 is fixedly connected to the first movable plate 802. The upper surface of the plate 802, the bracket 808 is fixedly connected to the upper surface of the base 1, the fan 809 is fixedly connected to the upper surface of the bracket 808, the sprinkler 807 and the water pump 805 are fixedly connected to the side surface of the first support plate 804, the output pipe 806 is fixedly connected to the output end of the water pump 805, and the other end of the output pipe 806 is communicated with the sprinkler 807, the cooling pipe 810 is fixedly connected to the input end of the water pump 805, and the other end of the cooling pipe 810 is communicated with the inside of the water storage frame 803, and the middle part of the cooling pipe 810 is a bent structure. The air outlet of the fan 809 is aligned with the bend of the cooling tube 810 during cooling. The cooling tube 810 is made of a copper tube with strong thermal conductivity. When the cooling assembly 8 is in the lowest position, it will not hinder the rotation of the components on the rotating disk 10. During cooling, the water flow sprayed by the sprayer 807 is aligned with the cylindrical surface of the crucible body 701, and the cooling water flowing out of the water outlet channel 908 will fall into the water storage frame 803.

[0050] The rotating assembly 25 includes a third rotating shaft 2501, a second fixed shaft 2502, a sliding sleeve 2503, a clamping plate 2504 and a second spring 2505. The third rotating shaft 2501 is fixedly connected to the output end of the third servo motor 24, the second fixed shaft 2502 is fixedly connected to the cylindrical surface at the bottom of the third rotating shaft 2501, the sliding sleeve 2503 is slidably connected to the cylindrical surface of the second fixed shaft 2502, the second spring 2505 is fixedly connected between the third rotating shaft 2501 and the sliding sleeve 2503, the second spring 2505 is ringed on the cylindrical surface of the second fixed shaft 2502, the clamping plate 2504 is fixedly connected to one end of the sliding sleeve 2503 away from the third rotating shaft 2501, and the bottom of the clamping plate 2504 is an inclined surface. When the rotating assembly 25 descends, the component at the bottom of the rotating assembly 25 will extend into the matching hole at the top of the stirring shaft 702. During this process, the inclined surface at the bottom of the card plate 2504 will first extend into the matching hole at the top of the stirring shaft 702. When the inclined surface at the bottom of the card plate 2504 contacts the top edge of the matching hole at the top of the stirring shaft 702, the inclined surface at the bottom of the card plate 2504 is squeezed, which will drive the sliding sleeve 2503 to move in the direction of the third rotating shaft 2501. When the card plate 2504 is fully extended into the matching hole at the top of the stirring shaft 702, if the card plate 2504 is just stuck in the slot of the matching hole at the top of the stirring shaft 702, the third servo motor 24 drives the rotating assembly When the third servo motor 24 drives the rotating assembly 25 to rotate, the card plate 2504 will rotate in the matching hole at the top of the stirring shaft 702. When the card plate 2504 rotates to a position corresponding to the card slot of the matching hole at the top of the stirring shaft 702, the second spring 2505 will push the sliding sleeve 2503 to move, thereby driving the card plate 2504 to move, so that the card plate 2504 moves and is stuck in the card slot of the matching hole at the top of the stirring shaft 702. Subsequently, when the third servo motor 24 continues to drive the rotating assembly 25 to rotate, it will drive the stirring shaft 702 to rotate together.

[0051] A tooth groove is provided on the cylindrical surface near the bottom of the rotating disk 10, the upper surface of the base 1 is fixedly connected to the support column 3, the upper surface of the support column 3 is fixedly connected to the first servo motor 4, the output end of the first servo motor 4 is fixedly connected to the first rotating shaft 5, the cylindrical surface of the first rotating shaft 5 is fixedly connected to the first gear 6, and the first gear 6 is meshed with the tooth groove of the rotating disk 10.

[0052] The synthesis method of silicon carbide powder includes the following specific steps:

[0053] S1. In the processing area, carbon powder, silicon powder and binder are mixed in a certain proportion and put into the crucible body 701, and then the crucible cover 704 is covered, and the first servo motor 4 drives the first gear 6 to rotate, thereby driving the rotating disk 10 to rotate, so that the crucible assembly 7 moves to the preheating area, and the second electric push rod 14 drives the second moving plate 15 to move downward, thereby driving the second gear 16 to move downward until the second gear 16 is meshed with the tooth groove of the sliding tooth groove rod 19 below;

[0054] S2. The second gear 16 is driven to rotate by the second servo motor 17, and the sliding toothed rod 19 is driven to move during the rotation of the second gear 16 until the crucible assembly 7 on the placement assembly 9 is moved to the heating zone inside the protective housing 11;

[0055] S3. The heating plate 21 is pushed by the third electric push rod 20 until it contacts the outer cylindrical surface of the crucible body 701, and then the third servo motor 24 and the rotating assembly 25 are driven downward by the fourth electric push rod 22 until the bottom of the rotating assembly 25 is stuck in the matching hole at the top of the stirring shaft 702, and then the crucible body 701 is heated by the heating plate 21, and the rotating assembly 25 is driven to rotate by the third servo motor 24, thereby driving the stirring shaft 702 and the stirring frame 703 to rotate, and the raw materials inside the crucible body 701 are stirred;

[0056] S4. After the reaction is completed, the heating plate 21 is moved back to its original position by the third electric push rod 20, and then the third servo motor 24 and the rotating assembly 25 are driven upward by the fourth electric push rod 22, so that the rotating assembly 25 is disengaged from the matching hole at the top of the stirring shaft 702, and then the second gear 16 is driven by the second servo motor 17 to rotate in the opposite direction, and the crucible assembly 7 on the placement assembly 9 is moved to the preheating zone;

[0057] S5. The second gear 16 is moved upward by the second electric push rod 14, and then the first gear 6 is driven to rotate by the first servo motor 4, thereby driving the rotating disk 10 to rotate until the high-temperature crucible assembly 7 moves to the cooling zone, and then the first movable plate 802 and the upper component are driven upward by the first electric push rod 801, so that the sprayer 807 is aligned with the cylindrical surface of the crucible body 701;

[0058] S6. The cooling water is pumped out from the water storage frame 803 by the water pump 805 and sprayed out from the sprinkler 807 to cool the outer cylindrical surface of the crucible body 701. After the temperature drops to a safe range, the first movable plate 802 and the upper member are driven downward by the first electric push rod 801 and return to the initial height;

[0059] S7. The first servo motor 4 drives the first gear 6 to rotate, thereby driving the rotating disk 10 to rotate until the high-temperature crucible assembly 7 moves to the processing area, and uses a dry cotton cloth to wipe off the residual moisture on the outside of the crucible assembly 7. Then, the crucible assembly 7 is removed, and the crucible cover 704 is opened to pour out the silicon carbide powder.

[0060] After detecting that the temperature of the crucible assembly 7 drops to a safe value in the cooling zone, the spraying of cooling water on it can be stopped. When the other two crucible assemblies 7 are in a heated or cooled state, the silicon carbide powder in the crucible assembly 7 in the processing zone is poured out, and the raw materials of the silicon carbide powder to be produced in the next round need to be added thereto. The three crucible assemblies 7 are in different states and together form a cycle, thereby improving the production efficiency of the equipment.

[0061] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide powder synthesis device, comprising a base (1), characterized in that: The upper surface of the base (1) is fixedly connected to the cylindrical boss (2), the upper surface of the cylindrical boss (2) is provided with a small cylinder, the cylindrical surface of the small cylinder of the cylindrical boss (2) is rotatably connected to the rotating disk (10), the upper surface of the rotating disk (10) is provided with a T-slot, the T-slot of the rotating disk (10) is slidably connected to a sliding toothed groove rod (19), the upper surface of the sliding toothed groove rod (19) is provided with toothed grooves, the sliding toothed groove rod (19) is fixedly connected to a placement component (9) on a side away from the center of the rotating disk (10), a crucible component (7) is provided above the placement component (9), the upper surface of the base (1) is fixedly connected to a protective shell (11), the cylindrical boss (2) The upper surface of the small cylinder is fixedly connected to a rectangular fixed block (12); a T-shaped slot is provided on a side surface of the rectangular fixed block (12) close to the protective shell (11); the T-shaped slot of the rectangular fixed block (12) is slidably connected to a second movable plate (15); the upper surface of the second movable plate (15) is fixedly connected to a second servo motor (17); the output end of the second servo motor (17) is fixedly connected to a second rotating shaft (18); the cylindrical surface of the second rotating shaft (18) is fixedly connected to a second gear (16); a through opening is provided on a side surface of the protective shell (11) close to the rotating disk (10); a fourth electric push rod (22) is fixedly connected to the upper surface of the interior of the protective shell (11); The lower surface of the piston rod of the fourth electric push rod (22) is fixedly connected to the third moving plate (23), the lower surface of the third moving plate (23) is fixedly connected to the third servo motor (24), the output end of the third servo motor (24) is fixedly connected to the rotating component (25), the upper surface of the base (1) is provided with a cooling component (8), the cylindrical surface of the rotating disk (10) near the bottom is provided with a tooth groove, the upper surface of the base (1) is fixedly connected to the support column (3), the upper surface of the support column (3) is fixedly connected to the first servo motor (4), the output end of the first servo motor (4) is fixedly connected to the first rotating shaft (5), and the cylindrical surface of the first rotating shaft (5) is fixedly connected to the first gear (6) ), the first gear (6) and the tooth groove of the rotating disk (10) are meshed, a magnet block (26) is arranged on the inner side surface of the T-slot of the rotating disk (10) near the center of the cylindrical boss (2), the upper surface of the rectangular fixed block (12) is fixedly connected to the second support plate (13), the lower surface of the second support plate (13) is fixedly connected to the second electric push rod (14), the bottom of the piston rod of the second electric push rod (14) is fixedly connected to the upper surface of the second movable plate (15), the inner two side surfaces of the protective shell (11) are fixedly connected to the third electric push rod (20), the piston rod of the third electric push rod (20) is fixedly connected to the heating plate (21), and the heating plate (21) is semicircular.

2. The silicon carbide powder synthesis device according to claim 1, characterized in that: The crucible assembly (7) comprises a crucible body (701), a stirring shaft (702), a stirring frame (703) and a crucible cover (704); a matching block is provided on the cylindrical surface of the crucible body (701) near the bottom edge; a matching hole is provided on the side surface of the matching block of the crucible body (701); the stirring shaft (702) is rotatably connected to the inside of the crucible body (701); the stirring frame (703) is fixedly connected to the cylindrical surface of the stirring shaft (702); the cylindrical surface inside the stirring frame (703) and the crucible body (701); The crucible body (701) and the lower surface are in contact, the upper surface of the crucible body (701) is provided with a groove, the crucible cover (704) is placed on the upper surface of the crucible body (701), the lower surface of the crucible cover (704) is provided with a protruding block that cooperates with the groove on the upper surface of the crucible body (701), the center of the crucible cover (704) is provided with a vertical through circular hole, the stirring shaft (702) passes through the vertical through circular hole in the center of the crucible cover (704), the upper surface of the stirring shaft (702) is provided with a matching hole, and the cylindrical surface of the matching hole of the stirring shaft (702) is provided with a card groove.

3. The silicon carbide powder synthesis device according to claim 2, characterized in that: The placement assembly (9) comprises a placement block (901), a limit block (902), a sliding shaft (903), a first spring (904), a sliding plate (905), a first fixed shaft (906), a clamping block (907) and a water outlet channel (908); the placement block (901) is fixedly connected to the sliding toothed rod (19); a baffle frame is provided on the upper surface of the placement block (901); the limit block (902) is fixedly connected to the upper surface of the placement block (901); a vertically penetrating matching groove is provided on the upper surface of the limit block (902); a slide groove hole is provided on the side surface of the limit block (902); the matching block of the crucible body (701) is matched in the matching groove of the limit block (902); the water outlet channel (908) is provided on the side surface of the placement block (901); and the water outlet channel (908) is communicated with the inside of the baffle frame on the upper surface of the placement block (901).

4. The silicon carbide powder synthesis device according to claim 3, characterized in that: The first fixed shaft (906) is fixedly connected to the side surface of the limit block (902); the clamping block (907) is rotatably connected to the cylindrical surface of the first fixed shaft (906); the sliding shaft (903) is slidably connected to the slide groove hole of the limit block (902); the sliding shaft (903) passes through the matching hole on the side surface of the matching block of the crucible body (701); the sliding plate (905) is fixedly connected to the end surface of the sliding shaft (903) away from the limit block (902); the first spring (904) is fixedly connected between the sliding plate (905) and the limit block (902); and the first spring (904) is ringed on the cylindrical surface of the sliding shaft (903).

5. The silicon carbide powder synthesis device according to claim 4, characterized in that: The cooling component (8) comprises a first electric push rod (801), a first movable plate (802), a water storage frame (803), a first support plate (804), a water pump (805), an output pipe (806), a sprinkler (807), a bracket (808), a fan (809) and a cooling pipe (810), wherein the first electric push rod (801) is fixedly connected to the upper surface of the base (1), the first movable plate (802) is fixedly connected to the top of the piston rod of the first electric push rod (801), the first support plate (804) is fixedly connected to the upper surface of the first movable plate (802), the water storage frame (803) is fixedly connected to the upper surface of the first movable plate (802), the bracket (808) is fixedly connected to the upper surface of the base (1), and the fan (809) is fixedly connected to the upper surface of the bracket (808).

6. The silicon carbide powder synthesis device according to claim 5, characterized in that: The sprayer (807) and the water pump (805) are fixedly connected to the side surface of the first support plate (804); the output pipe (806) is fixedly connected to the output end of the water pump (805); the other end of the output pipe (806) is in communication with the sprayer (807); the cooling pipe (810) is fixedly connected to the input end of the water pump (805); the other end of the cooling pipe (810) is in communication with the inside of the water storage frame (803); and the middle portion of the cooling pipe (810) is a bent structure.

7. The silicon carbide powder synthesis device according to claim 6, characterized in that: The rotating assembly (25) comprises a third rotating shaft (2501), a second fixed shaft (2502), a sliding sleeve (2503), a clamping plate (2504) and a second spring (2505); the third rotating shaft (2501) is fixedly connected to the output end of the third servo motor (24); the second fixed shaft (2502) is fixedly connected to the cylindrical surface at the bottom of the third rotating shaft (2501); the sliding sleeve (2503) is slidably connected to the cylindrical surface of the second fixed shaft (2502); the second spring (2505) is fixedly connected between the third rotating shaft (2501) and the sliding sleeve (2503); the second spring (2505) is looped on the cylindrical surface of the second fixed shaft (2502); the clamping plate (2504) is fixedly connected to an end of the sliding sleeve (2503) away from the third rotating shaft (2501); and the bottom of the clamping plate (2504) is an inclined surface.

8. The synthesis method proposed by the silicon carbide powder synthesis device according to claim 7 is characterized in that: The specific usage steps are as follows: S1. In the processing area, carbon powder, silicon powder and a binder are mixed in a certain proportion and placed in a crucible body (701), and then the crucible cover (704) is covered, and the first servo motor (4) drives the first gear (6) to rotate, thereby driving the rotating disk (10) to rotate, so that the crucible assembly (7) moves to the preheating area, and the second electric push rod (14) drives the second moving plate (15) to move downward, thereby driving the second gear (16) to move downward until the second gear (16) and the tooth groove of the sliding tooth groove rod (19) below are meshed; S2. The second servo motor (17) drives the second gear (16) to rotate, and during the rotation of the second gear (16), the sliding toothed rod (19) is driven to move until the crucible assembly (7) on the placement assembly (9) is moved to the heating zone inside the protective housing (11); S3. The heating plate (21) is pushed by the third electric push rod (20) until it contacts the outer cylindrical surface of the crucible body (701), and then the third servo motor (24) and the rotating assembly (25) are driven by the fourth electric push rod (22) to move downward until the bottom of the rotating assembly (25) is stuck in the matching hole at the top of the stirring shaft (702), and then the crucible body (701) is heated by the heating plate (21), and at the same time, the rotating assembly (25) is driven by the third servo motor (24) to rotate, thereby driving the stirring shaft (702) and the stirring frame (703) to rotate, so as to stir the raw materials inside the crucible body (701); S4. After the reaction is completed, the heating plate (21) is moved back to its original position by the third electric push rod (20), and then the third servo motor (24) and the rotating assembly (25) are driven upward by the fourth electric push rod (22), so that the rotating assembly (25) is disengaged from the matching hole at the top of the stirring shaft (702), and then the second gear (16) is driven by the second servo motor (17) to rotate in the opposite direction, so that the crucible assembly (7) on the placement assembly (9) is moved to the preheating zone; S5. The second electric push rod (14) drives the second gear (16) to move upward, and then the first servo motor (4) drives the first gear (6) to rotate, thereby driving the rotating disk (10) to rotate until the high-temperature crucible assembly (7) moves to the cooling zone, and then the first electric push rod (801) drives the first movable plate (802) and the upper component to move upward, so that the sprayer (807) is aligned with the cylindrical surface of the crucible body (701); S6. The cooling water is pumped out from the water storage frame (803) by the water pump (805) and sprayed out from the sprayer (807) to cool the outer cylindrical surface of the crucible body (701). After the temperature is reduced to a safe range, the first movable plate (802) and the upper components are driven downward by the first electric push rod (801) and return to the initial height; S7. The first servo motor (4) drives the first gear (6) to rotate, thereby driving the rotating disk (10) to rotate until the high-temperature crucible assembly (7) moves to the processing area, and uses a dry cotton cloth to wipe off the residual moisture on the outside of the crucible assembly (7). Then, the crucible assembly (7) is removed, and the crucible cover (704) is opened to pour out the silicon carbide powder.

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