CMP pad dresser with flattening tip Small ingot automatic precision drilling equipment

Abstract

The invention discloses an automatic precision drilling device for small ingots of a CMP polishing pad dresser with a flattened tip, comprising a frame, a drilling mechanism, a material moving mechanism and a tray; a tray positioning platform for placing the tray is provided on the table top of the frame; the drilling mechanism and the material moving mechanism are arranged on the table top; the tray is provided with accommodating grooves for placing the small ingots in an array form; when in use, the tray loaded with pre-treated small ingots is placed on the tray positioning platform, and the drilling mechanism performs automatic drilling operation on the small ingots, which greatly improves the drilling efficiency and provides favorable conditions for the commercialization of CMP polishing pad dresser products; and the drilling mechanism adopts a specific structure, after the drilling is completed, the diamond particles on the surface of the small ingot are evenly arranged in a single layer, and the tip height of the diamond particles has the advantage of good consistency, so that the CMP polishing pad dresser has a strong dressing ability and is not easy to cause damage to the CMP polishing pad.

Description

Technical Field

[0001] The invention relates to a production technology of a grinding pad dresser for wafer chemical mechanical polishing, and in particular to a small ingot automatic precision drilling device of a CMP grinding pad dresser with a flattened tip. Background Art

[0002] Chemical mechanical polishing (CMP) is a key process for obtaining a globally flat surface on the wafer during chip manufacturing. In order to meet the needs of wafer processing mass production and maintain quality stability, a dresser is needed to dress the grinding pad during chemical mechanical polishing. The CMP grinding pad dresser is obtained by drilling on a flat disc. If the height difference of the diamond particle tips on the dresser is too large, the number of diamonds that can effectively penetrate the CMP grinding pad will be too small, affecting the dressing effect. In addition, due to the large pressure of individual diamond particles on the CMP grinding pad, it is easy to damage the CMP grinding pad and affect its service life. In order to make the height of the diamond particle tips on the CMP grinding pad dresser have good consistency, the diamonds need to be screened and then arranged on the disc surface in a single layer. However, since the traditional CMP grinding pad dresser is drilled on the entire dresser disc surface, even if the diamonds are fixed on the dresser disc surface in a single layer, due to the different sizes of diamonds, the protruding height on the disc surface is random, and the height of the diamond particle tips always has the problem of unsatisfactory consistency. In response to this problem, Chinese patent document CN 116494130 A discloses a diamond dresser, which includes a large plate and small ingots arranged in groups on the large plate, and diamond particles are arranged on the small ingots. During manufacturing, after the small ingots are drilled, the large plate is placed on a reference plane, and then the small ingots are placed into the corresponding through holes on the large plate with the diamonds facing downward, and the large plate is lifted and raised. After epoxy resin is injected into the through holes and cured, a diamond dresser with a flattened tip is formed. This diamond dresser has the advantage of good consistency in the height of the diamond tip. However, due to the lack of dedicated automatic precision drilling equipment, drilling on small ingots can only be done manually at present: first, use tape to fix the pre-treated small ingot (the pre-treatment process is: set a brazing sheet on the surface of the small ingot, pre-sinter it, and cover the drilling surface with a layer of adhesive) on the drilling mold, sprinkle diamond particles on the drilling mold, and the diamonds will fall from the mesh of the drilling mold to the drilling surface of the small ingot; then, remove the excess diamond particles on the drilling mold, and then remove the small ingot to complete the drilling. This drilling method has low production efficiency and poor quality controllability, making it difficult to commercialize. Therefore, it is necessary to develop automated equipment that can perform precision drilling on small ingots. Summary of the invention

[0003] The present invention provides a CMP polishing pad dresser small ingot automatic precision drilling device with a flattened tip, which is used for automatic precision drilling of the dresser small ingot. The CMP polishing pad dresser small ingot automatic precision drilling device with a flattened tip of the present application realizes automatic drilling of the dresser small ingot by setting a specific drilling mechanism and a material transfer mechanism, greatly improves the drilling efficiency, and provides favorable conditions for the commercialization of CMP polishing pad dresser products; and the drilling mechanism adopts a specific structure, so that after the drilling is completed, the diamond particles on the surface of the small ingot are evenly arranged in a single layer, and the tip height of the diamond particles has the advantage of good consistency, so that the CMP polishing pad dresser has a strong dressing ability and is not easy to cause damage to the CMP polishing pad.

[0004] The technical solution of this application is:

[0005] The invention discloses a small ingot automatic precision drilling device for a CMP polishing pad dresser with a flattened tip, comprising a frame, a drilling mechanism, a material transfer mechanism and a tray; the drilling mechanism and the material transfer mechanism are arranged on the table of the frame; the tray is provided with accommodating grooves for placing small ingots in an array form, and the table of the frame is provided with a tray positioning table for placing the tray; the drilling mechanism comprises a small ingot placing platform, a diamond box, a small ingot turning device and a diamond box inverting device; the small ingot placing platform is provided with a positioning groove for placing the small ingot, the top of the diamond box is provided with a drilling opening, a mesh plate is provided at the drilling opening, a mesh array is provided on the mesh plate, and the size of the mesh is suitable for the size of the diamond particles. The small ingot flipping device is arranged between the small ingot placement platform and the diamond box, and can grab the small ingot from the positioning groove of the small ingot placement platform, turn it over and put it into the drilling opening of the diamond box for drilling, and can grab the small ingot from the drilling opening of the diamond box after the drilling is completed, turn it over and put it back into the positioning groove of the small ingot placement platform; the diamond box is arranged on the diamond box inverting device, and the diamond box inverting device can drive the diamond box to rotate to an inverted state, so that the diamond particles in the diamond box fall from the mesh holes of the mesh plate into the drilling surface of the small ingot; the material moving mechanism can transport the small ingot between the tray on the tray positioning table and the small ingot placement platform of the drilling mechanism.

[0006] Compared with the prior art, the CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip of the present application includes a material moving mechanism and a drilling mechanism; when in use, a small ingot with a special adhesive coated on the surface is placed on a tray, and the tray is placed on a tray positioning table, and then the small ingot on the tray is automatically drilled by the drilling mechanism, which greatly improves the drilling efficiency and provides favorable conditions for the commercialization of CMP polishing pad dresser products; when drilling, the small ingot in the tray is first clamped onto the small ingot placement platform by the small ingot turning device, and then turned over and placed In the drilling opening of the diamond box, the small ingot is cleverly adhered to the mesh plate through the adhesive pre-coated on its surface; then, the diamond box is rotated to an inverted state through the diamond box inversion device, so that the diamond particles in the diamond box fall from the mesh holes on the mesh plate onto the surface of the small ingot, and only one diamond particle can fall into each mesh hole. At this time, the diamond particles on the surface of the small ingot will be evenly arranged in a single layer, so that after the drilling is completed, the tip height of the diamond particles has the advantage of good consistency, so that the CMP polishing pad dresser has a strong dressing ability and is not easy to cause damage to the CMP polishing pad.

[0007] As an optimization, in the aforementioned CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip, the small ingot flipping device includes an A pneumatic clamp and an A flip cylinder; the A pneumatic clamp is used to grab the small ingot from the positioning groove of the small ingot placement platform before drilling, and flip it 180 degrees under the drive of the A flip cylinder to place the small ingot in the drilling opening of the diamond box, and after the drilling is completed, grab the small ingot from the drilling opening of the diamond box, and flip it 180 degrees under the drive of the A flip cylinder to place the small ingot in the positioning groove of the small ingot placement platform; the diamond box inversion device includes a B flip cylinder, the diamond box is fixedly connected to the turntable of the B flip cylinder, and the B flip cylinder can flip the diamond box 180 degrees to make it inverted. At this time, the structure is simple, easy to assemble, and occupies little space.

[0008] As an optimization, in the aforementioned CMP polishing pad dresser with flattened tip small ingot automatic precision drilling equipment, the material moving mechanism includes a three-axis slide and a B pneumatic clamp; the three-axis slide includes an X-axis screw slide arranged on the frame, a Y-axis screw slide slidably connected to the X-axis screw slide, and a Z-axis screw slide slidably connected to the Y-axis screw slide; the B pneumatic clamp is arranged on the Z-axis screw slide, for clamping the small ingot in the tray to the small ingot placement platform before drilling, and clamping the small ingot on the small ingot placement platform back to the tray after drilling is completed.

[0009] As an optimization, in the aforementioned CMP polishing pad dresser with flattened tip small ingot automatic precision drilling equipment, the table top of the frame is provided with a loading port and a unloading port on both sides of the tray positioning table, and correspondingly, the Z-axis screw slide is provided with a tray clamping device for transporting the tray located at the loading port to the tray positioning table, and transporting the tray on the tray positioning table to the unloading port; a loading mechanism is provided below the loading port, and an unloading mechanism is provided below the unloading port; the loading mechanism can lift the tray to the upper side of the table top; the unloading mechanism can lower the tray to the set position. In this way, the prepared tray can be placed on the loading mechanism in advance for standby use, and after all the small ingots on a tray are drilled, the tray can be placed on the unloading mechanism and wait for the worker to take it away, so that there is no need to stop the machine during the loading and unloading process, which further improves the degree of automation.

[0010] As an optimization, in the aforementioned CMP polishing pad dresser small ingot automatic precision drilling equipment with flattened tip, the pallet clamping device includes a B mounting frame and a lifting cylinder; clamping plates are provided on both sides of the B mounting frame; the clamping plates are connected to the piston rod of the driving cylinder and are used to clamp the pallet; the driving cylinder is fixed on the B mounting frame; the lifting cylinder is fixed on the Z-axis screw slide and is used to drive the B mounting frame to move up and down. The pallet clamping device adopts the above structure, which is easy to install, has low implementation difficulty, and has high reliability.

[0011] As an optimization, in the aforementioned CMP polishing pad dresser small ingot automatic precision drilling equipment with flattened tip, the feeding mechanism includes an A mounting frame, a screw rod and a material table arranged on the A mounting frame; the screw rod is connected to the driving motor in a transmission manner; the material table is connected to the screw rod slider on the screw rod, so that it can move up and down under the drive of the screw rod; the material table is used to place the tray; the structure of the unloading mechanism is the same as that of the feeding mechanism. The above structure has the advantages of easy implementation and high reliability.

[0012] Furthermore, a slide plate fixedly connected to the screw slider is provided on the side of the material platform; the slide plate is slidably connected to the A mounting frame; a limit block is provided on the slide plate, and correspondingly, a position sensor is provided on the A mounting frame; during the lifting process of the material platform, when the position sensor detects that the limit block has reached the set position, the drive motor stops running. In this way, it can be prevented that the material platform moves too far or not in place, affecting the subsequent pallet clamping operation of the pallet. Furthermore, on the A mounting frame, an auxiliary rod is respectively provided on both sides of the screw rod; the slide plate is slidably connected to the auxiliary rod. At this time, the stability of the material platform during movement can be improved.

[0013] Furthermore, the screw rod is connected to the drive motor via a belt transmission structure, which has low manufacturing and installation precision requirements, is easy to maintain in the later stage, is conducive to cost control, and can also ensure smooth transmission between the drive motor and the screw rod with low noise.

[0014] As an optimization, the aforementioned CMP polishing pad dresser with flattened tip small ingot automatic precision drilling equipment also includes a detection mechanism for detecting whether there is a problem of missing diamonds in the small ingot after drilling; the detection mechanism includes a C mounting frame fixed on the Z-axis screw slide, and a visual camera and aperture arranged on the C mounting frame. After the drilling is completed, the surface of the small ingot after drilling is photographed by a visual camera and sent to the control system to detect whether there is a problem of missing diamonds on the surface of the small ingot (dropping after drilling or no diamond particles passing through individual meshes may cause missing diamonds on the surface of the small ingot) to ensure product quality.

[0015] Furthermore, the tray has a number next to the receiving slot. When it is detected that the surface of the small ingot is missing a drill, the control system outputs the number of the receiving slot where the small ingot is located on the control screen. Therefore, after unloading, it is convenient for the staff to take out the unqualified small ingot according to the number to avoid it flowing into the subsequent trimmer assembly link.

[0016] As an optimization, in the aforementioned CMP polishing pad dresser small ingot automatic precision drilling device with flattened tip, positioning posts are respectively provided at the four corners of the tray, and correspondingly, positioning holes A for the positioning posts to be inserted are provided at the four corners of the tray positioning platform. Thus, during the drilling process, the tray can be stabilized on the tray positioning platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a small ingot automatic precision drilling device of a CMP polishing pad dresser with a flattened tip in an embodiment of the present application;

[0018] Figure 2 is a structural schematic diagram of a drilling arrangement mechanism in an embodiment of the present application;

[0019] Figure 3 It is a structural schematic diagram of the drilling mechanism after the pneumatic clamp A in the embodiment of the present application is turned 180 degrees;

[0020] Figure 4 is a schematic diagram of the structure of a tray in an embodiment of the present application;

[0021] Figure 5 It is a structural schematic diagram of a feeding mechanism in an embodiment of the present application;

[0022] Figure 6 It is a structural schematic diagram of a three-axis slide in an embodiment of the present application;

[0023] Figure 7 It is a schematic diagram of the assembly of the pallet clamping device, the detection mechanism and the Z-axis screw slide in the embodiment of the present application;

[0024] Figure 8 is a schematic diagram of the structure of a rack in an embodiment of the present application;

[0025] Fig. 9 yes Figure 7 Schematic diagram of the back structure of the assembly in .

[0026] The markings in the attached drawings are: 1-frame, 101-loading port, 102-unloading port, 11-tray positioning table; 2-loading mechanism, 21-A mounting frame, 211-position sensor, 22-screw, 221-screw slider, 23-material table, 231-slide plate, 232-limiting block, 24-driving motor, 25-auxiliary rod, 26-belt transmission structure, 27-support rod; 3-drilling mechanism, 31-small ingot placement platform, 32-A pneumatic clamp, 33-A flip cylinder, 34-B flip cylinder, 35-diamond box , 351-screen plate; 4-material moving mechanism, 41-three-axis slide, 411-X-axis screw slide, 412-Y-axis screw slide, 413-Z-axis screw slide, 414-drag chain, 415-cable buckle, 42-pallet clamping device, 421-B mounting frame, 422-clamping plate, 423-driving cylinder, 424-lifting cylinder, 43-B pneumatic clamp; 5-pallet, 501-receiving groove, 51-positioning column; 6-detection mechanism, 61-C mounting frame, 62-visual camera, 63-aperture; 7-unloading mechanism. DETAILED DESCRIPTION

[0027] The present application is further described below in conjunction with the accompanying drawings and embodiments, but they are not intended to limit the present application.

[0028] See also Figure 1 and Figure 4 In the present application, a CMP polishing pad dresser with a flattened tip and an automatic precision drilling device for small ingots comprises a frame 1, a drilling mechanism 3, a material transfer mechanism 4 and a tray 5; the drilling mechanism 3 and the material transfer mechanism 4 are arranged on the table of the frame 1; the tray 5 is provided with accommodating grooves 501 for placing small ingots in an array form, and a tray positioning table 11 for placing the tray 5 is provided on the table of the frame 1.

[0029] In the present application, the drilling mechanism 3 includes a small ingot placement platform 31, a diamond box 35, a small ingot flipping device and a diamond box inverting device; the small ingot placement platform 31 has a positioning groove for placing small ingots, the top of the diamond box 35 has a drilling opening, and a mesh plate 351 is provided at the drilling opening. The mesh plate 351 is provided with a mesh array, and the size of the mesh is adapted to the size of the diamond particles, and only one diamond particle can be allowed to pass through; the small ingot flipping device is arranged between the small ingot placement platform 31 and the diamond box 35, and can grasp the small ingot from the positioning groove of the small ingot placement platform 31. Take a small ingot, turn it over and put it into the drilling opening of the diamond box 35 for drilling, and after the drilling is completed, grab the small ingot from the drilling opening of the diamond box 35, turn it over and put it back into the positioning groove of the small ingot placement platform 31; the diamond box 35 is arranged on a diamond box inversion device, and the diamond box inversion device can drive the diamond box 35 to rotate to an inverted state, so that the diamond particles in the diamond box 35 fall from the mesh holes of the mesh plate 351 onto the drilling surface of the small ingot; the material transfer mechanism 4 can transport the small ingot between the tray 5 on the tray positioning platform 11 and the small ingot placement platform 31 of the drilling mechanism 3.

[0030] Example:

[0031] See also Figure 2 In the embodiment, the small ingot flipping device includes an A pneumatic clamp 32 and an A flip cylinder 33; the A pneumatic clamp 32 is used to grab the small ingot from the positioning groove of the small ingot placement platform 31 before drilling, and flip 180 degrees under the drive of the A flip cylinder 33 to place the small ingot in the drilling opening of the diamond box 35, and after the drilling is completed, grab the small ingot from the drilling opening of the diamond box 35, and flip 180 degrees under the drive of the A flip cylinder 33 to place the small ingot in the positioning groove of the small ingot placement platform 31; the diamond box inversion device includes a B flip cylinder 34, the diamond box 35 is fixedly connected to the turntable of the B flip cylinder 34, and the B flip cylinder 34 can flip the diamond box 35 180 degrees to make it inverted. At this time, the structure is simple, the assembly is convenient, and the space occupied is small.

[0032] See also Figure 6 and Figure 7 In the embodiment, the material moving mechanism 4 includes a three-axis slide 41 and a B pneumatic clamp 43; the three-axis slide 41 includes an X-axis screw slide 411 arranged on the frame 1, a Y-axis screw slide 412 slidably connected to the X-axis screw slide 411, and a Z-axis screw slide 413 slidably connected to the Y-axis screw slide 412; the B pneumatic clamp 43 is arranged on the Z-axis screw slide 413, and is used to clamp the small ingots in the tray 5 to the small ingot placement platform 31 before drilling, and to clamp the small ingots on the small ingot placement platform 31 back to the tray 5 after drilling is completed.

[0033] See also Figures 5 to 8In the embodiment, on the table of the frame 1, on both sides of the tray positioning platform 11, there are respectively provided a loading port 101 and a unloading port 102. Correspondingly, the Z-axis screw slide 413 is provided with a tray clamping device 42, which is used to transport the tray 5 located at the loading port 101 to the tray positioning platform 11, and to transport the tray 5 on the tray positioning platform 11 to the unloading port 102; a loading mechanism 2 is provided below the loading port 101, and an unloading mechanism 7 is provided below the unloading port 102; the loading mechanism 2 can lift the tray 5 to the upper side of the table; the unloading mechanism 7 can lower the tray 5 to the set position. In this way, the prepared tray 5 can be placed on the loading mechanism 2 in advance for standby use, and after all the small ingots on a tray 5 are drilled, the tray 5 can be placed on the unloading mechanism 7 to wait for the worker to take it away, so that there is no need to stop the machine during the loading and unloading process, which further improves the degree of automation.

[0034] See also Figure 5 In the embodiment, the feeding mechanism 2 includes an A mounting frame 21, a screw rod 22 and a material platform 23 arranged on the A mounting frame 21; the screw rod 22 is drivingly connected to a driving motor 24; the material platform 23 is connected to a screw rod slider 221 on the screw rod 22, so that it can move up and down under the drive of the screw rod 22; the material platform 23 is used to place a tray 5; the structure of the unloading mechanism 7 is the same as that of the feeding mechanism 2. The above structure has the advantages of easy implementation and high reliability.

[0035] In the embodiment, a slide plate 231 fixedly connected to the screw slider 221 is provided on the side of the material platform 23; the slide plate 231 is slidably connected to the A mounting frame 21; a limit block 232 is provided on the slide plate 231, and correspondingly, a position sensor 211 is provided on the A mounting frame 21; during the lifting process of the material platform 23, when the position sensor 211 detects that the limit block 232 reaches the set position, the driving motor 24 stops running. In this way, it can be prevented that the material platform 23 moves too far or not enough, which affects the subsequent clamping operation of the pallet 5 by the pallet clamping device 42.

[0036] In the embodiment, an auxiliary rod 25 is provided on each side of the screw rod 22 on the A mounting frame 21; the slide plate 231 is slidably connected to the auxiliary rod 25. In this case, the stability of the material table 23 during movement can be improved. A support rod 27 parallel to the screw rod 22 is also provided on the A mounting frame 21, which can be used to improve the strength of the A mounting frame 21.

[0037] In the embodiment, the screw rod 22 is connected to the drive motor 24 via a belt transmission structure 26. The belt transmission structure has low manufacturing and installation precision requirements, is easy to maintain in the later stage, is conducive to cost control, and can also ensure smooth transmission between the drive motor 24 and the screw rod 22 with low noise. Specifically, the belt transmission structure 26 includes a driving wheel fixed on the output shaft of the drive motor 24, a driven wheel fixed to the bottom end of the screw rod 22, and a belt tensioned outside the driving wheel and the driven wheel.

[0038] See also Figure 7 In the embodiment, the pallet clamping device 42 includes a B mounting frame 421 and a lifting cylinder 424; a clamping plate 422 is provided on both sides of the B mounting frame 421; the clamping plate 422 is connected to the piston rod of the driving cylinder 423, and is used to clamp the pallet 5; the driving cylinder 423 is fixed on the B mounting frame 421; the lifting cylinder 424 is fixed on the Z-axis screw slide 413, and is used to drive the B mounting frame 421 to move up and down. The pallet clamping device 42 adopts the above structure, which is easy to install, has low implementation difficulty, and has high reliability. When in use, the pallet clamping device 42 is driven by the material moving mechanism 4 to move to the vicinity of the pallet 5, the lifting cylinder 424 is started, the B mounting frame 421 is driven to move downward, so that the clamping plate 422 is located on both sides of the pallet 5, and then the driving cylinder 423 is started to allow the clamping plate 422 to clamp the pallet 5; then, the material moving mechanism 4 drives the pallet clamping device 42 to move to the specified position, and then the clamping plate 422 is released.

[0039] In the embodiment, an I-shaped connecting block is fixed on the piston rod, and an I-shaped groove is correspondingly provided on the B mounting frame 421, and the I-shaped connecting block is inserted into the I-shaped groove.

[0040] See also Figure 6 In the embodiment, the X-axis, Y-axis, and Z-axis lead screw sliders all include a base, a lead screw disposed in the base, and a motor connected to the lead screw; a slider is mounted on the lead screw; the slider is sleeved on the top plate of the base and slidably connected to the top plate. The B pneumatic clamp 43 is fixed on the slider of the Z-axis lead screw slide 413; the lifting cylinder 424 in the pallet clamping device 42 is fixed on the base of the Z-axis lead screw slide 413; the X-axis lead screw slide 411 is fixed on the table of the frame 1.

[0041] In the embodiment, a drag chain 414 is provided on the side of the X-axis screw slide 411; one end of the drag chain 414 is fixedly connected to the Y-axis screw slide 412. The setting of the drag chain 414 is conducive to improving the stability of the screw slide; and the drag chain 414 can also be used to arrange various pipelines in an orderly manner, reducing the space occupied by the pipelines, making the wiring of the entire device more reasonable. A drag chain can also be provided on the Y-axis screw slide 412, and the end of the drag chain is fixedly connected to the Z-axis screw slide 413.

[0042] In an embodiment, wire clamping buckles 415 are provided on the sides of the X-axis lead screw slide 411, Y-axis lead screw slide 412, and Z-axis lead screw slide 413. The wire clamping buckles 415 can be used to organize and fix messy pipelines, reduce space occupation, prevent interference between pipelines, and ensure the use safety of the equipment.

[0043] In an embodiment, positioning posts 51 are respectively provided at the four corners of the tray 5. Correspondingly, positioning holes for inserting the positioning posts 51 are respectively provided at the four corners of the tray positioning table 11. Thus, during the drilling process, the tray 5 can be stably placed on the tray positioning table 11. Positioning holes for inserting the positioning posts 51 are also respectively provided at the four corners of the loading platforms of the loading mechanism 2 and the unloading mechanism 7.

[0044] See Fig. 9 In an embodiment, a detection mechanism 6 is further provided on the tabletop of the frame 1 for detecting whether there is a problem of missing drills in the small ingots after drilling; the detection mechanism 6 includes a C mounting bracket 61 fixed on the Z-axis lead screw slide 413, and a vision camera 62 and an aperture 63 provided on the C mounting bracket 61. After drilling is completed, the surface of the small ingot after drilling is photographed by the vision camera 62 and sent to the control system to detect whether there is a problem of missing drills on the surface of the small ingot, so as to ensure product quality.

[0045] In an embodiment, there is a number beside the accommodation groove 501 of the tray 5. When it is detected that there are missing drills on the surface of the small ingot, the control system outputs the number of the accommodation groove 501 where the small ingot is located on the control screen; after all the small ingots in the tray 5 are detected and unloaded, when the staff takes away the tray 5, they can take out the unqualified small ingots according to the number to prevent them from flowing into the subsequent trimmer assembly link.

[0046] The process of drilling on the surface of the small ingot using the automatic precision drilling equipment for CMP polishing pad trimmers with flattened tips of the present application is as follows:

[0047] S1, Place the tray 5 loaded with pre-treated small ingots (the pre-treatment process of the small ingots is: set brazing solder pads on the surface of the small ingots, and after pre-sintering, apply glue on the surface) on the loading platform 23 of the loading mechanism 2; start the loading mechanism 2 to lift the tray 5 above the tabletop;

[0048] S2, Transport the tray 5 to the tray positioning table 11 through the material transfer mechanism 4;

[0049] S3, The B pneumatic gripper 43 clamps the small ingots in the tray 5 onto the small ingot placement platform 31 of the drilling mechanism 3;

[0050] S4, Start the A pneumatic gripper 32 to clamp the small ingots on the small ingot placement platform 31 (see Figure 2); then start the A flip cylinder 33, flip the A pneumatic clamp 32 180 degrees, and drive the small ingot to flip to the drilling opening position of the diamond box 35 (see Figure 3 ), the A pneumatic clamp 32 is released, and the small ingot falls onto the mesh plate 351 of the drilling opening, and adheres to the mesh plate 351 through the adhesive pre-coated on its surface; then, the B flip cylinder 34 is started to drive the diamond box 35 to flip 180 degrees, so that the drilling opening of the diamond box 35 faces downward, and the diamond particles in the diamond box 35 fall out of the mesh holes on the mesh plate 351 under the action of gravity and fall onto the surface of the small ingot, and adhere to the surface of the small ingot under the action of the adhesive, and the drilling is completed; then, the B flip cylinder 34 drives the diamond box 35 to flip 180 degrees again, so that the drilling opening of the diamond box 35 faces upward, and the A pneumatic clamp 32 clamps the small ingot that has been drilled, flips 180 degrees under the drive of the A flip cylinder 33, and then places the small ingot in the positioning groove of the small ingot placement platform 31;

[0051] S5, the pneumatic clamp 43 of B clamps the small ingot that has been drilled on the small ingot placement platform 31 back to the tray 5; the detection mechanism 6 detects whether the small ingot that has been drilled is qualified. At the same time, the pneumatic clamp 43 of B clamps another small ingot that has not been drilled in the tray 5 to the small ingot placement platform 31 of the drilling mechanism 3, and repeats the operation of step S4;

[0052] S6, when all the small ingots in the tray 5 are evenly drilled and inspected, the tray 5 is moved to the material table of the unloading mechanism 7 by the material moving mechanism 4, and the unloading mechanism 7 is started to drive the tray 5 down to the set position; then the staff takes away the tray 5 to carry out subsequent sintering operations.

[0053] The above general description of the invention involved in this application and the description of its specific implementation methods should not be understood as limiting the technical solutions of the invention. Based on the disclosure of this application, those skilled in the art can, without violating the constituent elements of the invention involved, add, reduce or combine the disclosed technical features in the above general description or / and specific implementation methods (including examples) to form other technical solutions within the scope of protection of this application.

Claims

1. CMP polishing pad dresser small ingot automatic precision drilling equipment with flattening tip, characterized by: The machine comprises a frame (1), a drilling arrangement mechanism (3), a material transfer mechanism (4) and a tray (5); the drilling arrangement mechanism (3) and the material transfer mechanism (4) are arranged on a table top of the frame (1); the tray (5) is provided with accommodating grooves (501) for placing small ingots in an array form, and a tray positioning table (11) for placing the tray (5) is provided on the table top of the frame (1); The drilling mechanism (3) comprises a small ingot placement platform (31), a diamond box (35), a small ingot flipping device and a diamond box inverting device; the small ingot placement platform (31) is provided with a positioning groove for placing the small ingot; the top of the diamond box (35) is provided with a drilling opening; a mesh plate (351) is provided at the drilling opening; the mesh plate (351) is provided with a mesh array, and the size of the mesh is adapted to the size of the diamond particles so as to allow only one diamond particle to pass through; the small ingot flipping device is provided between the small ingot placement platform (31) and the diamond box (35) and is capable of grabbing the small ingot from the positioning groove of the small ingot placement platform (31). Ingots are turned over and placed into the drilling opening of the diamond box (35), so that the small ingots are adhered to the mesh plate (351) through the adhesive pre-coated on the surface thereof, and after the drilling is completed, the small ingots can be grabbed from the drilling opening of the diamond box (35), turned over and placed back into the positioning groove of the small ingot placement platform (31); the diamond box (35) is arranged on a diamond box inversion device, and the diamond box inversion device can drive the diamond box (35) to rotate to an inverted state, so that the diamond particles in the diamond box (35) fall from the mesh holes of the mesh plate (351) under the action of gravity onto the drilling surface of the small ingot, and adhere to the surface of the small ingot under the action of the adhesive; The material transfer mechanism (4) is capable of transporting small ingots between the tray (5) on the tray positioning platform (11) and the small ingot placement platform (31) of the drilling mechanism (3).

2. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 1, characterized in that: The small ingot flipping device comprises an A pneumatic clamp (32) and an A flip cylinder (33); the A pneumatic clamp (32) is used to grab the small ingot from the positioning groove of the small ingot placement platform (31) before drilling, and flip the small ingot 180 degrees under the drive of the A flip cylinder (33) to place the small ingot in the drilling opening of the diamond box (35); and after drilling is completed, grab the small ingot from the drilling opening of the diamond box (35), and flip the small ingot 180 degrees under the drive of the A flip cylinder (33) to place the small ingot in the positioning groove of the small ingot placement platform (31); the diamond box inverting device comprises a B flip cylinder (34); the diamond box (35) is fixedly connected to the turntable of the B flip cylinder (34), and the B flip cylinder (34) can flip the diamond box (35) 180 degrees to make it inverted.

3. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 2, characterized in that: The material transfer mechanism (4) comprises a three-axis slide (41) and a B pneumatic clamp (43); the three-axis slide (41) comprises an X-axis screw slide (411) arranged on the frame (1), a Y-axis screw slide (412) slidably connected to the X-axis screw slide (411), and a Z-axis screw slide (413) slidably connected to the Y-axis screw slide (412); the B pneumatic clamp (43) is arranged on the Z-axis screw slide (413) and is used to clamp the small ingot in the tray (5) to the small ingot placement platform (31) before drilling, and to clamp the small ingot on the small ingot placement platform (31) back to the tray (5) after drilling is completed.

4. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 3, characterized in that: On the table top of the frame (1), on both sides of the pallet positioning table (11), there are respectively provided a loading port (101) and a unloading port (102); correspondingly, the Z-axis screw slide (413) is provided with a pallet clamping device (42) for transporting a pallet (5) located at the loading port (101) to the pallet positioning table (11), and transporting a pallet (5) on the pallet positioning table (11) to the unloading port (102); a loading mechanism (2) is provided below the loading port (101), and a unloading mechanism (7) is provided below the unloading port (102); the loading mechanism (2) is capable of lifting the pallet (5) to the upper side of the table top; and the unloading mechanism (7) is capable of lowering the pallet (5) to a set position.

5. The CMP polishing pad dresser small ingot automatic precision drilling device with a flattened tip according to claim 4, characterized in that: The pallet clamping device (42) comprises a B mounting frame (421) and a lifting cylinder (424); clamping plates (422) are provided on both sides of the B mounting frame (421); the clamping plates (422) are connected to the piston rod of the driving cylinder (423) and are used to clamp the pallet (5); the driving cylinder (423) is fixed on the B mounting frame (421); the lifting cylinder (424) is fixed on the Z-axis screw slide (413) and is used to drive the B mounting frame (421) to move up and down.

6. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 4, characterized in that: The loading mechanism (2) comprises a mounting frame A (21), and a screw rod (22) and a material platform (23) arranged on the mounting frame A (21); the screw rod (22) is drivingly connected to a driving motor (24); the material platform (23) is connected to a screw rod slider (221) on the screw rod (22), so that it can move up and down under the drive of the screw rod (22); the material platform (23) is used to place a tray (5); the structure of the unloading mechanism (7) is the same as that of the loading mechanism (2).

7. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 6, characterized in that: A slide plate (231) fixedly connected to the screw slider (221) is provided on the side of the material platform (23); the slide plate (231) is slidably connected to the A mounting frame (21); a limit block (232) is provided on the slide plate (231), and correspondingly, a position sensor (211) is provided on the A mounting frame (21); during the lifting process of the material platform (23), when the position sensor (211) detects that the limit block (232) has reached a set position, the drive motor (24) stops running.

8. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 1, characterized in that: It also includes a detection mechanism (6) for detecting whether the small ingot after drilling has a problem of lacking drills; the detection mechanism (6) includes a C mounting frame (61) fixed on the Z-axis screw slide (413), and a visual camera (62) and an aperture (63) arranged on the C mounting frame (61).

9. The CMP polishing pad dresser small ingot automatic precision drilling device with a flattened tip according to claim 8, characterized in that: The receiving slot (501) of the tray (5) has a number next to it, and when it is detected that the surface of the small ingot is missing a drill, the control system outputs the number of the receiving slot (501) where the small ingot is located on the control screen.

10. The CMP polishing pad dresser small ingot automatic precision drilling equipment with a flattened tip according to claim 1, characterized in that: Positioning columns (51) are respectively provided at the four corners of the tray (5), and correspondingly, positioning holes for inserting the positioning columns (51) are respectively provided at the four corners of the tray positioning platform (11).

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