Piezoceramic-based on-line monitorable adjustment mirror bender system

Abstract

The application provides a piezoelectric ceramic-based on-line monitoring adjusting mirror press bending system, which comprises a mirror supporting mechanism, a piezoelectric ceramic fixed support and adjusting mechanism and a laser interferometer supporting and moving mechanism, the mirror supporting mechanism comprises a constraint assembly for constraining the mirror, the piezoelectric ceramic fixed support and adjusting mechanism comprises a first fixing part, a second fixing part and a piezoelectric ceramic adjusting assembly, the first fixing part and the second fixing part are arranged above and below the mirror respectively, a plurality of piezoelectric ceramic adjusting assemblies are arranged on the first fixing part and / or the second fixing part for press bending the mirror, the laser interferometer supporting and moving mechanism is used for obtaining a real-time press bending radius of the mirror, and the plurality of piezoelectric ceramic adjusting assemblies on-line adjust the real-time press bending radius of the mirror until the real-time press bending radius reaches a target press bending radius. The application reduces the difficulty of on-line installation and adjustment of the piezoelectric mirror and can realize accurate press bending of the mirror.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of synchrotron beamline engineering, in particular to a piezoelectric ceramic-based on-line monitoring and adjusting mirror press-bending system. BACKGROUND

[0002] Mirrors are commonly used optical elements in synchrotron radiation for beamline focusing, collimation, deflection and high-order harmonic suppression. Surface accuracy is an important factor affecting the optical performance of mirrors. Excluding the effects of mirror surface roughness and surface error, the main reasons for poor surface accuracy are mechanical errors during mirror press-bending, mirror gravity and thermal load of X-rays during use. Compared with traditional mechanical press-bending, piezoelectric ceramic press-bending mirrors have the advantages of simple mechanical structure and dynamically adaptive surface accuracy. Therefore, in recent years, piezoelectric ceramic press-bending mirrors have been applied in synchrotron beamlines, such as ID-13 line station of ESRF, B16 line station of Diamond and BL29-XUL line station of Spring-8. In the past, mirrors were generally analyzed for surface accuracy using long-path profilometers (LTP) or nanometer topography measuring instruments (NOM) in the laboratory before being installed in the beamline. However, the detection environment in the optical laboratory and the environment in the beamline are not completely the same, so some X-ray wavefront detection techniques are currently used to test the actual characteristics of the press-bending mirror installed in the beamline, such as the fine beam method, the phase iterative recovery method, the ray tracing method, and the Hartmann detection method. These methods have the problems of difficulty in accurately distinguishing the mirror surface shape due to the increase in the number of piezoelectric sheets, huge calculation load and slow response speed, and even the need for manual adjustment by the experimenter, which brings great difficulties to the on-line adjustment of the press-bending mirror. On the other hand, the development of synchrotron experimental stations requires multiple stations in one line and adjustable spot sizes in the same experimental station, and real-time adjustment of the curvature radius with high precision is an important requirement for mirrors in synchrotron beamlines. Therefore, it is a problem that engineers need to solve to ensure press-bending accuracy, gravity and thermal deformation compensation while achieving large-scale press-bending of mirrors in the design of the mirror press-bending system. SUMMARY

[0003] To solve the problems of large-scale press-bending of press-bending mirrors and real-time monitoring of accurate press-bending, the present application aims to provide a piezoelectric ceramic-based on-line monitoring and adjusting mirror press-bending system, which reduces the difficulty of on-line adjustment of piezoelectric mirrors and enables accurate press-bending of mirrors.

[0004] To solve the above technical problems, the technical scheme adopted by the present application is as follows:

[0005] The piezoelectric ceramic-based on-line monitoring and adjusting mirror press-bending system comprises:

[0006] a reflector support mechanism including a restraining assembly for restraining the reflector;

[0007] A piezoelectric ceramic fixing and adjustment mechanism includes a first fixing portion, a second fixing portion, and a piezoelectric ceramic adjustment assembly. The first fixing portion is disposed above the reflector, and the second fixing portion is disposed below the reflector. The first fixing portion and / or the second fixing portion are both provided with a plurality of piezoelectric ceramic adjustment assemblies arranged side by side. The piezoelectric ceramic adjustment assemblies include piezoelectric ceramics for bending the reflector. The first fixing portion is provided with a through slot.

[0008] The laser interferometer support and motion mechanism includes a plurality of laser interferometers arranged side by side above the first fixing portion, wherein the laser interferometers emit laser light through the through slot and into the reflector;

[0009] Among them, a target bending radius of the reflector is set, several of the laser interferometers emit lasers to fit the real-time bending radius of the reflector, and several of the piezoelectric ceramic adjustment components adjust the real-time bending radius of the reflector online until the real-time bending radius reaches the target bending radius.

[0010] Furthermore, the reflector support mechanism further comprises a reflector support, and the constraint assembly comprises an X-direction constraint assembly, a Y-direction constraint assembly and a follower constraint assembly;

[0011] The X-direction constraint assembly is arranged on the reflector support for clamping the reflector in the X direction, the Y-direction constraint assembly is arranged on the reflector support for clamping the reflector in the Y direction, and the follower constraint assembly is arranged on the reflector support for supporting the reflector in the Z direction. The X direction is the width direction of the reflector, the Y direction is the length direction of the reflector, and the Z direction is the height direction of the reflector.

[0012] Furthermore, the reflector support includes two supports, one of which corresponds to the X-ray incident end of the reflector, and the other corresponds to the X-ray emitting end of the reflector. The support is provided with a accommodating cavity, and the two ends of the reflector are respectively accommodated in the two accommodating cavities. Both supports are provided with X-direction constraint components to clamp both ends of the reflector in the X direction, the Y-direction constraint component includes a first Y-direction constraint component and a second Y-direction constraint component, and the two supports are respectively provided with a first Y-direction constraint component and a second Y-direction constraint component to clamp the two ends of the reflector in the Y direction, the follow-up constraint component includes a first follow-up constraint component and a second follow-up constraint component, the first follow-up constraint component is arranged on one of the supports to rotatably support the bottom of the reflector, and the second follow-up constraint component is arranged on the other support to movably support the bottom of the reflector.

[0013] Further, the X direction constraint assembly comprises a mirror locking nut, a mirror ball head adjusting screw rod, and a first half ball head screw, the first half ball head screw comprises a first half ball head and a first rod, the first rod is fixed to the support, the first half ball head abuts against the mirror, the mirror ball head adjusting screw rod comprises a second half ball head and a second rod, the second half ball head abuts against the mirror, and the second rod is threadedly connected to the support.

[0014] Further, the first Y direction constraint assembly comprises a fixed end baffle and a second half ball head screw, the fixed end baffle is fixed to one of the supports, the second half ball head screw comprises a third half ball head and a third rod, the third rod is fixed to the fixed end baffle, and the third half ball head abuts against one end of the mirror.

[0015] The second Y direction constraint assembly comprises a free end baffle, a spring, and a mushroom ball head, the free end baffle is fixed to the other support, one end of the spring is fixed to the free end baffle, the other end of the spring is fixed to the mushroom ball head, the spring extends along the Y direction, the spring provides an elastic force in the Y direction to the other end of the mirror, and the mushroom ball head abuts against the mirror.

[0016] Further, the first follow-up constraint assembly comprises a first roller and a first roller shaft, the first roller shaft is arranged in the Z direction and fixed to one of the supports, two abutting portions are arranged on the first roller shaft and protrude from the first roller shaft, and the first roller is rotatably sleeved on the first roller shaft and the two ends of the first roller respectively and correspondingly abut against the two abutting portions.

[0017] Further, the second follow-up constraint assembly comprises a second roller and a second roller shaft, the second roller shaft is arranged in the Z direction and fixed to the other support, a first smooth surface is arranged on the outer side of the second roller shaft, a convex ring protruding from the first smooth surface is arranged on the middle part of the outer side of the second roller shaft, a second smooth surface is arranged on the inner side of the second roller, the first smooth surface and the second smooth surface are in clearance fit, and the convex ring and the second smooth surface are in interference fit.

[0018] Further, the piezoelectric ceramic adjusting assembly further comprises two groups of piezoelectric ceramic sleeve assemblies, the two groups of piezoelectric ceramic sleeve assemblies are symmetrically arranged along the X direction, each piezoelectric ceramic sleeve assembly comprises an adjusting piece and an adjusting rod, the adjusting piece is fixed to the first fixed part or the second fixed part, the adjusting piece is internally provided with a containing cavity, the containing cavity contains the piezoelectric ceramic, the adjusting rod extends in the Z direction, and the adjusting rod is used to drive the piezoelectric ceramic to move in the Z direction to adjust the position of the piezoelectric ceramic.

[0019] Further, a pressure sensor is arranged in the accommodating cavity, the piezoelectric ceramic has a ball head, the piezoelectric ceramic is accommodated in the accommodating cavity and fixed to the pressure sensor, the ball head abuts against the reflecting mirror, and one end of the adjusting rod is abutted against the pressure sensor to adjust the position of the piezoelectric ceramic.

[0020] Further, the through slot penetrates in the Z direction and extends in the Y direction, the laser interferometer supporting and moving mechanism comprises a linear motion slide, a laser head mounting plate and laser interferometers, the linear motion slide extends in the X direction, the laser head mounting plate is slidably connected to the linear motion slide, the laser head mounting plate extends in the Y direction, and a plurality of laser interferometers arranged in the Y direction are arranged on the laser head mounting plate, and each laser interferometer emits laser light in the Z direction.

[0021] Compared with the prior art, the present application has the following advantages and beneficial effects:

[0022] The piezoelectric ceramic-based on-line monitoring and adjusting reflecting mirror press bending system provided by the present application realizes accurate press bending and real-time monitoring and adjusting of the reflecting mirror in an on-line state, solves the problem that the reflecting mirror press bending and detection are independent, realizes self-adaptive press bending of a large range of radius of curvature by using the upper and lower arranged multiple groups of piezoelectric ceramics, has a certain improvement effect on the deformation caused by the gravity and thermal load of the reflecting mirror itself, and solves the problem of long-term instability of the piezoelectric ceramic after press bending to a certain extent by adjusting the input voltage of the piezoelectric ceramic in real time, and has the advantages of on-line, real-time monitoring, real-time adjusting and accurate press bending. BRIEF DESCRIPTION OF DRAWINGS

[0023] The accompanying drawings, which are included to provide a further understanding of the present application and constitute a part of this application, illustrate certain illustrative embodiments of the present application and are used to explain the present application. The present application is not limited by the illustrative embodiments and their description. In the drawings:

[0024] Figure 1 It is a schematic diagram of the overall structure of the reflecting mirror press bending system of the present application;

[0025] Figure 2 It is a schematic diagram of the structure of the reflecting mirror supporting mechanism supporting the reflecting mirror of the present application;

[0026] Figure 3 It is a schematic diagram of the structure of the reflecting mirror supporting mechanism of the present application;

[0027] Figure 4 It is a schematic diagram of the structure of the second half ball head screw of the present application;

[0028] Figure 5 It is a schematic diagram of the structure of the spring and mushroom ball head of the present application;

[0029] Figure 6 The exploded view of the first follow-up constraint assembly of the present application;

[0030] Figure 7 The exploded view of the second follow-up constraint assembly of the present application;

[0031] Figure 8 The schematic diagram of the piezoelectric ceramic fixed support and the adjusting mechanism adjusting the mirror of the present application;

[0032] Figure 9 The structural schematic diagram of the piezoelectric ceramic adjusting assembly of the present application;

[0033] Figure 10 The structural schematic diagram of the laser interferometer support and movement mechanism of the present application;

[0034] Figure 11 The structural schematic diagram of the mirror of the present application;

[0035] Figure 12(a) is a comparison diagram of the post-buckling profile and the target buckling curve of the buckling ellipsoidal surface type with the target buckling radius of 1900m containing the mirror self-weight of the specific embodiment of the present application;

[0036] Figure 12(b) is a comparison diagram of the actual slope and the target slope of the buckling ellipsoidal surface type with the target buckling radius of 1900m containing the mirror self-weight of the specific embodiment of the present application;

[0037] Figure 12(c) is a comparison diagram of the post-buckling profile and the target curve of the buckling ellipsoidal surface type with the target buckling radius of 1900m considering the mirror self-weight and thermal deformation of the specific embodiment of the present application;

[0038] Figure 12(d) is a comparison diagram of the actual slope and the target slope of the buckling ellipsoidal surface type with the target buckling radius of 1900m considering the mirror self-weight and thermal deformation of the specific embodiment of the present application;

[0039] Figure 13(a) is a comparison diagram of the post-buckling profile and the target buckling curve of the buckling ellipsoidal surface type with the target buckling radius of 2857m containing the mirror self-weight of the specific embodiment of the present application;

[0040] Figure 13(b) is a comparison diagram of the actual slope and the target slope of the buckling ellipsoidal surface type with the target buckling radius of 2857m containing the mirror self-weight of the specific embodiment of the present application;

[0041] Figure 13(c) is a comparison diagram of the post-buckling profile and the target curve of the buckling ellipsoidal surface type with the target buckling radius of 2857m considering the mirror self-weight and thermal deformation of the specific embodiment of the present application;

[0042] Figure 13(d) is a comparison diagram of the actual slope and the target slope of the compression bending ellipsoidal surface type with a target compression bending radius of 2857m considering the mirror self-weight and thermal deformation according to the embodiment of the present application;

[0043] Figure 14(a) is a comparison diagram of the actual back surface type curve and the target compression bending curve of the compression bending ellipsoidal surface type with a target compression bending radius of 7400m containing the mirror self-weight according to the embodiment of the present application;

[0044] Figure 14(b) is a comparison diagram of the actual slope and the target slope of the compression bending ellipsoidal surface type with a target compression bending radius of 7400m containing the mirror self-weight according to the embodiment of the present application;

[0045] Figure 14(c) is a comparison diagram of the actual back surface type curve and the target curve of the compression bending ellipsoidal surface type with a target compression bending radius of 7400m considering the mirror self-weight and thermal deformation according to the embodiment of the present application;

[0046] Figure 14(d) is a comparison diagram of the actual slope and the target slope of the compression bending ellipsoidal surface type with a target compression bending radius of 7400m considering the mirror self-weight and thermal deformation according to the embodiment of the present application.

[0047] Wherein, 100, a mirror support mechanism; 110, a mirror support; 111, a support; 1111, a containing cavity; 120, an X-direction constraint assembly; 121, a mirror locking nut; 122, a mirror ball head adjusting screw; 123, a first half ball head screw; 130, a Y-direction constraint assembly; 131, a first Y-direction constraint assembly; 1311, a fixed end baffle; 1312, a second half ball head screw; 132, a second Y-direction constraint assembly; 1321, a free end baffle; 1322, a spring; 1323, a mushroom ball head; 140, a follow-up constraint assembly; 141, a first follow-up constraint assembly; 1411, a first roller; 1412, a first roller shaft; 14121, a first roller shaft body; 14122, a roller end cover; 14123, an abutment portion; 142, a second follow-up constraint assembly; 1421, a second roller; 14211, a second smooth surface; 1422, a second roller shaft; 14221, a first smooth surface; 14222, a convex ring; 150, a metal lug;

[0048] 200, a piezoelectric ceramic fixed support and adjusting mechanism; 210, a first fixed part; 211, a through slot; 220, a second fixed part; 221, a bottom plate; 222, a support block; 230, a piezoelectric ceramic adjusting assembly; 231, a piezoelectric ceramic set; 2311, an adjusting piece; 23111, a first connecting plate; 23112, a second connecting plate; 23113, a third connecting plate; 2312, an adjusting rod; 232, a piezoelectric ceramic; 233, a pressure sensor;

[0049] 300, laser interferometer support and movement mechanism; 310, linear motion slide; 311, linear guide rail; 312, movement slide; 313, guide rail clamp; 314, guide rail clamp connecting plate; 315, limit nut; 320, laser head mounting plate; 330, laser interferometer; 340, support frame; 341, slide fixed leg; 342, slide mounting pipe;

[0050] 400, mirror; 401, first side; 402, second side; 403, third side; 404, fourth side; 405, fifth side; 406, sixth side. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.

[0052] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "several" is two or more.

[0053] As Figure 1 shown, the piezoelectric ceramic-based on-line monitoring and adjusting mirror bending system provided by the embodiments of the present application mainly includes three components, namely, a mirror support mechanism 100, a piezoelectric ceramic fixed support and adjusting mechanism 200, and a laser interferometer support and movement mechanism 300. For the convenience of description, it is specified that the width direction of the mirror 400 is the X direction, the length direction of the mirror 400 is the Y direction, i.e. the extension direction of the mirror 400 is the Y direction, and the height direction of the mirror 400 is the Z direction. The mirror support mechanism 100 is used to constrain the mirror 400 in the X direction, constrain the mirror 400 in the Y direction, and support the mirror 400 in the Z direction. The piezoelectric ceramic fixed support and adjusting mechanism 200 is used to adjust the mirror 400 according to the bending target. The laser interferometer support and movement mechanism 300 is used to obtain the bending radius of the mirror 400. In the following description, the coordinate system direction follows this rule. In addition, the meridional direction and the sagittal direction of the mirror 400 mentioned in the description represent the X direction and the Y direction, respectively.

[0054] As shown in Figure 1 and Figure 2 , the mirror support mechanism 100 includes a constraint assembly for constraining the mirror, and the mirror 400 is provided with a simply supported beam constraint and good support stiffness by the mirror support mechanism 100.

[0055] As shown in Figure 1 and Figure 8 , the piezoelectric ceramic fixed support and adjustment mechanism 200 includes a first fixed part 210, a second fixed part 220, and a piezoelectric ceramic adjustment assembly 230, the first fixed part 210 is arranged above the mirror 400, the second fixed part 220 is arranged below the mirror 400, and the first fixed part 210 and the second fixed part 220 are both provided with a plurality of piezoelectric ceramic adjustment assemblies 230, the piezoelectric ceramic adjustment assembly 230 has a piezoelectric ceramic 232 for pressing and bending the mirror 400, and the first fixed part 210 is provided with a through slot 211.

[0056] As shown in Figure 1 and Figure 10 , the laser interferometer support and movement mechanism 300 includes a plurality of laser interferometers 330 arranged side by side above the first fixed part 210, and the laser interferometer 300 emits laser light through the through slot 211 into the mirror 400.

[0057] The target bending radius of the mirror 400 is set, the plurality of laser interferometers 330 emit laser light to fit the real-time bending radius of the mirror 400, and the plurality of piezoelectric ceramic adjustment assemblies 230 adjust the real-time bending radius of the mirror in real time until the real-time bending radius reaches the target bending radius.

[0058] The piezoelectric ceramic-based on-line monitoring and adjustment mirror bending system provided by the application realizes accurate bending and real-time monitoring and adjustment of the mirror 400 in an on-line state, solves the problem of independent bending and detection of the mirror 400 in the past, and realizes adaptive bending of a large range of curvature radius by using the upper and lower arrangement of the plurality of piezoelectric ceramic adjustment assemblies 230, which has a certain improvement effect on the deformation caused by the gravity and thermal load of the mirror 400 itself, and solves the problem of long-term instability of the piezoelectric ceramic bending to a certain extent by real-time adjustment of the input voltage, and has the advantages of on-line, real-time monitoring, real-time adjustment, and accurate bending.

[0059] In this embodiment, as shown in Figure 11 , the mirror 400 is a cuboid structure, including a first side 401, a second side 402, a third side 403, a fourth side 404, a fifth side 405, and a sixth side 406, the first side 401 and the second side 402 are arranged opposite to each other, the third side 403 and the fourth side 404 are arranged opposite to each other, and the fifth side 405 and the sixth side 406 are arranged opposite to each other.

[0060] In the embodiment, the mirror 400 is a single-side polished silicon crystal mirror with a size of 410*50*50mm*mm, and the bending targets are elliptic curves with equivalent radii of 7400m, 2857m and 1900m, respectively.

[0061] The mirror support mechanism 100 will be described in detail below.

[0062] In the bending process, the mirror 400 is supported as a simply supported beam, and the mirror support mechanism 100 includes mirror supports 110 providing structural support stiffness and various structures providing simply supported beam constraints for the mirror 400. The mirror support mechanism 100 also includes the mirror supports 110, and the constraint assembly includes an X-direction constraint assembly 120, a Y-direction constraint assembly 130 and a follow-up constraint assembly 140. The X-direction constraint assembly 120 is arranged on the mirror supports 110 to constrain the mirror 400 in the X direction, the Y-direction constraint assembly 130 is arranged on the mirror supports 110 to constrain the mirror 400 in the Y direction, and the follow-up constraint assembly 140 is arranged on the mirror supports 110 to support the mirror 400 in the Z direction.

[0063] In the embodiment, as shown in Figures 1-3 The mirror supports 110 include two supports 111, one of which corresponds to the X-ray incident end of the mirror 400, and the other of which corresponds to the X-ray emission end of the mirror 400. The supports 111 are provided with accommodating cavities 1111, and the two ends of the mirror 400 are accommodated in the two accommodating cavities 1111, respectively.

[0064] As shown in Figures 1-2 The X-direction constraint assemblies 120 are arranged on the two supports 111 to clamp the two ends of the mirror 400 in the X direction to avoid movement of the mirror 400 in the X direction.

[0065] As shown in Figures 1-5As shown, the Y-direction constraint assembly 130 includes a first Y-direction constraint assembly 131 and a second Y-direction constraint assembly 132, and the first Y-direction constraint assembly 131 and the second Y-direction constraint assembly 132 are respectively arranged on the two supports 111 to clamp the two ends of the mirror 400 in the Y direction. Specifically, in the embodiment, the first Y-direction constraint assembly 131 is arranged on one of the supports 111 to fixedly support the third side surface 403 of the mirror 400 in the Y direction, and the second Y-direction constraint assembly 132 is arranged on the other support 111 to elastically support the fourth side surface 404 of the mirror 400 in the Y direction, so that the mirror 400 can be ensured to be slightly movable in the Y direction, and the third side surface 403 and the fourth side surface 404 of the mirror 400 can be supported to prevent the mirror 400 from being overturned or twisted when the mirror 400 is bent.

[0066] As shown in Figures 1-3 , Figure 6 and Figure 7 , the follow-up constraint assembly 140 includes a first follow-up constraint assembly 141 and a second follow-up constraint assembly 142, the first follow-up constraint assembly 141 is arranged on one of the supports 111 to rotatably support the mirror 400, and the second follow-up constraint assembly 142 is arranged on the other support 111 to movably support the mirror 400, so as to eliminate the torsion effect of the mirror 400 in the bending process and avoid over-determination.

[0067] In the embodiment, as shown in Figure 2 and Figure 3As shown, the X-direction constraint assembly 120 includes a mirror locking nut 121, a mirror ball head adjusting screw 122, and a first half ball head screw 123. The mirror ball head adjusting screw 122 and the first half ball head screw 123 are oppositely arranged. The first half ball head screw 123 includes a first half ball head and a first rod. The first rod is fixed to the support 111, and the first half ball head abuts one of the first side face 401 and the second side face 402 of the mirror 400. The mirror ball head adjusting screw 122 includes a second half ball head and a second rod. The second half ball head abuts the other of the first side face 401 and the second side face 402 of the mirror 400, and the second rod is threadedly connected to the support 111. The mirror ball head adjusting screw 122 extends in the X direction. The mirror locking nut 121 is used to lock the mirror ball head adjusting screw 122. The two ends of the mirror 400 are respectively constrained in the X direction by the two X-direction constraint assemblies 120, so that the mirror 400 is clamped by point contact to avoid movement of the mirror 400 in the X direction. The two ends of the mirror 400 are respectively located at the middle positions of the two supports 111 by adjusting the position of the mirror ball head adjusting screw 122, so that the mirror 400 is not tilted or twisted when being pressed and bent, and the simply supported beam constrained mirror 400 is not allowed to translate or rotate in the X direction.

[0068] In this embodiment, as shown in Figures 2-5 The Y-direction constraint assembly 130 includes a first Y-direction constraint assembly 131 and a second Y-direction constraint assembly 132.

[0069] The first Y-direction constraint assembly 131 is arranged at the X-ray incident end, and the second Y-direction constraint assembly 132 is arranged at the X-ray emission end. The first Y-direction constraint assembly 131 includes a fixed end baffle 1311 and a second half ball head screw 1312. The fixed end baffle 1311 is fixed to one of the supports 111. The second half ball head screw 1312 includes a third half ball head and a third rod. The third rod is fixed to the fixed end baffle 1311, and the third half ball head abuts one of the third side face 403 and the fourth side face 404 of the mirror 400.

[0070] The second Y-direction constraint assembly 132 includes a free end baffle 1321, a spring 1322, and a mushroom ball head 1323. The mushroom ball head 1323 and the second half ball head screw 1312 are oppositely arranged. The free end baffle 1321 is fixed to the other support 111. One end of the spring 1322 is fixed to the free end baffle 1321, and the other end is fixed to the mushroom ball head 1323. The spring 1322 extends in the Y direction to provide an elastic force in the Y direction to the other end of the mirror 400. The mushroom ball head 1323 abuts the other of the third side face 403 and the fourth side face 404 of the mirror 400. The second Y-direction constraint assembly 132 is arranged to allow the mirror 400 to freely extend on one side in the Y direction.

[0071] Specifically, the diameter of the mirror ball head adjusting screw 122 and the first half ball head screw 123 is 10 mm, and the diameter of the second half ball head screw 1312 is 5 mm. The center of the free end baffle 1321 is provided with a circular hole with a depth of 4 mm and a diameter of 4 mm, the inner hole diameter of the spring 1322 is 4 mm, the length of the spring 1322 is 5 mm, one end of the spring 1322 is fixed in the circular hole, the other end of the spring 1322 is suspended, the extension direction of the spring 1322 is the Y direction, the mushroom ball head 1323 has a cylindrical end and a half ball head end, which looks like a mushroom, the cylindrical end is pressed in the other end of the spring 1322, and the half ball head end abuts against the mirror 400. To ensure the initial contact of the spring 1322, the spring 1322 is compressed by 1 mm to provide a pre-tightening force, the second half ball head screw 1312 and the mushroom ball head 1323 abut against the center of the third side surface 403 of the mirror 400 and the center of the fourth side surface 404 of the mirror 400 respectively, and the fixed end baffle 1311 and the free end baffle 1321 of the two end surfaces of the mirror 400 are respectively fixed with the two supports 111 by four M3 inner hexagonal cylindrical head screws.

[0072] In this embodiment, as shown in Figure 2 , Figure 3 , Figure 6 and Figure 7 , the follow-up constraint assembly 140 includes a first follow-up constraint assembly 141 and a second follow-up constraint assembly 142, the first follow-up constraint assembly 141 is arranged on one of the supports 111 to form a rotating roller structure, and the second follow-up constraint assembly 142 is arranged on the other support 111 to form a dragging roller structure, the rotating roller structure and the dragging roller structure further support the mirror 400 to eliminate the torsion effect of the mirror 400 in the press bending process.

[0073] In this embodiment, as shown in Figure 2 , Figure 3 , Figure 6 and Figure 7As shown, the first follow-up constraint assembly 141 comprises a first roller 1411 and a first roller shaft 1412, the first roller shaft 1412 is arranged along the X direction and fixed to one of the supports 111, and two abutting portions 14123 are arranged on the first roller shaft 1412 and protrude from the first roller shaft 1412, and the first roller 1411 is rotatably sleeved on the first roller shaft 1412, and the two ends of the first roller 1411 are respectively and correspondingly abutted on the two abutting portions 14123. In addition, the first roller shaft 1412 comprises a first roller shaft body 14121 and a roller end cover 14122, the first roller shaft body 14121 is a columnar structure, and the roller end cover 14122 is fixed to the two ends of the first roller shaft body 14121, and the inner side of the roller end cover 14122 is provided with the abutting portion 14123, which is an abutting surface, and the two ends of the first roller 1411 are respectively and correspondingly abutted on the two abutting surfaces. During use, since the first roller 1411 is rotatably sleeved on the first roller shaft 1412 and the two ends of the first roller 1411 are respectively and correspondingly abutted on the two abutting portions 14123, the first roller 1411 cannot move along the X direction, but can only rotate with the axis of the first roller shaft 1412 as the center axis, so as to ensure that the first roller 1411 continuously linearly contacts the bottom of the mirror 400.

[0074] In the specific implementation of the embodiment, the first roller 1411 continuously linearly contacts the intersection line of the third side surface 403 and the sixth side surface 406 of the mirror 400.

[0075] As shown in Figure 2 , Figure 3 , Figure 6 and Figure 7 , the second follow-up constraint assembly 142 comprises a second roller 1421 and a second roller shaft 1422, the second roller shaft 1422 is arranged along the X direction and fixed to the other support 111, the outer side of the second roller shaft 1422 is provided with a first smooth surface 14221, and the outer middle part of the second roller shaft 1422 is provided with a convex ring 14222 protruding from the first smooth surface 14221, and the inner side of the second roller 1421 is provided with a second smooth surface 14211, the first smooth surface 14221 and the second smooth surface 14211 are clearance fit, and the convex ring 14222 and the second smooth surface 14211 are interference fit. During the bending process of the mirror 400, the mirror 400 will move slightly, and through the clearance fit between the first smooth surface 14221 and the second smooth surface 14211 and the interference fit between the convex ring 14222 and the second smooth surface 14211, the second roller 1421 can swing relative to the second roller shaft 1422 with the convex ring 14222 as the fulcrum.

[0076] The combination of the rotation roller and the drag roller formed by the first follow-up constraint assembly 141 and the second follow-up constraint assembly 142 can realize follow-up, which can provide Z-direction support constraint for the mirror 400 and avoid deflection of the mirror 400 along the sagittal direction, so as to eliminate the torsional influence on the mirror 400 in the press bending process, and the structure designed in this way can avoid hyperstaticity.

[0077] In the embodiment, the arrangement positions of the plurality of piezoelectric ceramic adjusting assemblies 230 are determined according to the press bending target by using a particle swarm algorithm.

[0078] The piezoelectric ceramic fixed support and adjusting mechanism 200 is described in detail below.

[0079] As shown in Figure 8 and Figure 9 , the piezoelectric ceramic fixed support and adjusting mechanism 200 provides fixed support for the piezoelectric ceramic 232 and fine adjusts the initial contact state of the piezoelectric ceramic 232 and the mirror 400. In order to realize multi-point accurate press bending of the mirror 400, the piezoelectric ceramic 232 adopts a stacked ball head piezoelectric ceramic with a model of Chip Ming PSt150 / 5*5 / 27L, an actual size of 6*6*27mm^3, a square height of 27mm, a ball head radius of 2.5mm, and the piezoelectric ceramic 232 acting symmetrically at a distance of 2.5mm from the edge line of the mirror 400. The stacked ball head piezoelectric ceramic can accurately control the press bending displacement by adjusting the input voltage, and can ensure that the ball head and the contact surface are always approximately point contact, so that the force action point can be consistent with the theoretical calculation position as much as possible.

[0080] As shown in Figure 8 and Figure 9 , the two ends of the first fixed part 210 are fixed to the two supports 111 respectively, and the two ends of the second fixed part 220 are fixed to the two supports 111 respectively.

[0081] As shown in Figure 8 and Figure 9 , the piezoelectric ceramic fixed support and adjusting mechanism 200 further includes a piezoelectric ceramic adjusting assembly 230, and the plurality of piezoelectric ceramic adjusting assemblies 230 are arranged along the Y direction at the first fixed part 210 and the second fixed part 220 respectively, and the piezoelectric ceramic adjusting assembly 230 is provided to provide guiding installation for the piezoelectric ceramic 232.

[0082] As shown in Figure 8 and Figure 9As shown, the first fixing portion 210 is a plate-like structure, and a plurality of piezoelectric ceramic adjustment components 230 are arranged on the first fixing portion 210 along the Y direction. The second fixing portion 220 includes a base plate 221 and support blocks 222. The ends of the base plate 221 are respectively fixed to two supports 111. The plurality of support blocks 222 are arranged at the bottom along the Y direction and fixed to the base plate 221. The plurality of piezoelectric ceramic adjustment components 230 are fixed to the plurality of support blocks 222 in a one-to-one correspondence along the Y direction.

[0083] In this embodiment, Figure 8 and Figure 9 As shown, the piezoelectric ceramic adjustment assembly 230 includes two groups of piezoelectric ceramic kits 231, which are symmetrically arranged along the X direction. The piezoelectric ceramic kits 231 include an adjusting member 2311 and an adjusting rod 2312. The adjusting member 2311 is fixed to the first fixing part 210 or the second fixing part 220. A receiving cavity is provided in the adjusting member 2311, and the piezoelectric ceramic 232 is received in the receiving cavity. The adjusting rod 2312 extends along the Z direction. The adjusting rod 2312 is used to drive the piezoelectric ceramic 232 to move along the Z direction to adjust the position of the piezoelectric ceramic 232. The adjusting rod 2312 can be locked by an adjusting rod locking nut.

[0084] Specifically, the two groups of piezoelectric ceramic assemblies 231 are symmetrically distributed along the meridian axis of the reflector 400, and the symmetrical bending can improve the accuracy of the bending radius.

[0085] In this embodiment, Figure 8 and Figure 9 As shown, the adjusting member 2311 includes a first connecting plate 23111, a second connecting plate 23112 and a third connecting plate 23113, the first connecting plate 23111 is fixed to the first fixing portion 210 or the second fixing portion 220, the first connecting plate 23111, the second connecting plate 23112 and the third connecting plate 23113 enclose a receiving cavity, the piezoelectric ceramic 232 has a ball head, the piezoelectric ceramic 232 is received in the receiving cavity, the ball head abuts against the reflector 400, and the adjusting rod 2312 is set On the third connecting plate 23113, the adjusting rod 2312 is threadedly connected to the third connecting plate 23113. The adjusting rod 2312 is passed through the third connecting plate 23113 and one end extends from the other side of the third connecting plate 23113 to adjust the position of the piezoelectric ceramic 232. The other end extends from one side of the third connecting plate 23113 for easy holding. By rotating the adjusting rod 2312, the distance that the adjusting rod 2312 rises or falls along the Z direction can be adjusted, thereby adjusting the position of the piezoelectric ceramic 232.

[0086] In the specific implementation of this embodiment, Figure 8 and Figure 9As shown, in order to ensure that the piezoelectric ceramic 232 is pressed and bent, the first fixing part 210 is selected as a stainless steel block, both ends of which are fixed on the two supports 111 through two M5 hexagonal cylindrical countersunk head screws, and the first fixing part 210 is used to fix the piezoelectric ceramic adjusting assembly 230 above the mirror 400. The second fixing part 220 is provided with a plurality of supporting blocks 222, and the piezoelectric ceramic adjusting assembly 230 below the mirror 400 is fixed on the supporting blocks 222, which are fixed on the second fixing part 220 through 6 M3 countersunk cylindrical head screws. In order to ensure that the piezoelectric ceramic 232 is symmetrically pressed and bent, the bottom surface of the first fixing part 210 should be parallel to the fifth side surface 405 of the mirror 400, and the top surface of the supporting block 222 should be parallel to the sixth side surface 406 of the mirror 400.

[0087] In the specific implementation of the embodiment, as shown in Figure 8 and Figure 9 The piezoelectric ceramic assembly 231 is the main structure for piezoelectric fixing and fine adjustment. The first connecting plate 23111 is fixed on both sides of the supporting block 222 as a back plate through four M4 screws, and has a 3mm deep groove, which is combined with the 3mm groove of the second connecting plate 23112 to form a vertical guide for the piezoelectric ceramic 232. The second connecting plate 23112 is connected with the first connecting plate 23111 through four M3 screws, and the two are connected through the third connecting plate 23113 with four M4 screws. The third connecting plate 23113 is provided with a threaded hole with a diameter of 5mm for installing the adjusting rod 2312, and the adjusting rod 2312 is locked through an adjusting nut.

[0088] As shown in Figure 8 and Figure 9 In order to obtain the pressure of the piezoelectric ceramic 232, monitor whether the initial state of the piezoelectric ceramic 232 is in contact with the fifth side surface 405 or the sixth side surface 406 of the mirror 400, and the output force of the piezoelectric ceramic 232 actually acting on the fifth side surface 405 or the sixth side surface 406 of the mirror 400, a pressure sensor 233 is further included. The pressure sensor 233 is arranged in the accommodating cavity, and the piezoelectric ceramic 232 is glued on the pressure sensor 233 using epoxy resin. The probe is in contact with the fifth side surface 405 or the sixth side surface 406 of the mirror 400, the adjusting rod 2312 is threadedly connected to the adjusting piece 2311, and one end of the adjusting rod 2312 is abutted on the pressure sensor 233 to adjust the position of the piezoelectric ceramic 232. During use, the adjusting rod 2312 is adjusted, the pressure sensor 233 is observed, the piezoelectric ceramic 232 is adjusted, and the piezoelectric ceramic 232 is just in contact with the mirror 400. At this time, the reading of the pressure sensor 233 is close to 0, and when the readings of all pressure sensors 233 are close to 0, the initial state of the mirror 400 is adjusted.

[0089] Specifically, the piezoelectric ceramic 232 is fixed by epoxy adhesive at the center of one end of the pressure sensor to avoid the pressure sensor from being subjected to a force bias.

[0090] By setting the piezoelectric ceramic kit 232, the piezoelectric ceramic can be guided and installed, and the initial state of the piezoelectric ceramic 232 being in contact with the fifth side surface 405 or the sixth side surface 406 of the mirror 400 is realized by adjusting the rod 2312 and monitoring the pressure sensor 233.

[0091] The laser interferometer support and movement mechanism 300 will be described in detail below.

[0092] In this embodiment, as shown in Figure 10 , the laser interferometer support and movement mechanism 300 includes a plurality of laser interferometers 330, and a plurality of point positions of the mirror 400 are obtained through the plurality of laser interferometers 330. The equivalent radius of the mirror 400 is obtained by fitting a plurality of point positions, and the equivalent radius is taken as the real-time bending radius of the mirror 400.

[0093] In this embodiment, as shown in Figure 1 , Figure 2 and Figure 10 , the laser interferometer support and movement mechanism 300 is independent of the mirror support mechanism 100 and is located above the mirror 400.

[0094] Specifically, the laser interferometer support and movement mechanism 300 is arranged above the first fixed part 210, and the laser interferometer support and movement mechanism 300 includes a linear motion slide 310, a laser head mounting plate 320, and a laser interferometer 330. The linear motion slide 310 extends along the X direction, the laser head mounting plate 320 is slidably connected to the linear motion slide 310, the laser head mounting plate 320 extends along the Y direction, a plurality of laser interferometers 330 are arranged on the laser head mounting plate 320 and emit laser light along the Z direction, and the laser interferometer 330 is fixedly installed on the laser head mounting plate 320 by screw connection. The position is distributed within the effective length of the fifth side surface 405 of the entire mirror 400, and the actual bending displacement of the mirror 400 can be monitored and fed back in real time to assist the piezoelectric ceramic 232 to bend to the ideal radius accurately. By arranging the linear motion slide 310 and the laser head mounting plate 320, good structural rigidity is provided for the installation of the laser interferometer 330.

[0095] In this embodiment, as shown in Figure 10 , in order not to block the measurement of the laser interferometer 330 and the LTP, a through slot 221 extending along the Z direction and along the Y direction is formed on the first fixed part 210 to ensure that the plurality of laser interferometers 330 extend along the Z direction and each laser interferometer 330 emits laser light in the Z direction. The laser passes through the through slot 221 and is emitted to the mirror 400.

[0096] In the embodiment, the laser interferometer 330 is an attocube laser interferometer, two symmetrical through-slots 221 are formed on the first fixed part 210, the two through-slots 221 extend along the Y direction with a length of 310 mm and a width of 2 mm, and do not interfere with the measurement of the laser probe of the laser interferometer 330 and the long-range surface profiler. In order to monitor whether the mirror 400 is twisted during the process of being pressed and bent.

[0097] The laser interferometer support and movement mechanism 300 further comprises a support frame 340, the support frame 340 is in a door type structure, two support frames 340 are arranged at a distance, and the two support frames 340 are arranged outside the two supports 111. The support frame 340 is used for supporting the linear motion slide 310, two linear motion slides 310 are respectively fixed on the two support frames 340, and the two ends of the laser head mounting plate 320 are respectively connected to the two linear motion slides 310 through sliding.

[0098] Specifically, the support frame 340 comprises a slide fixed leg 341 and a slide mounting pipe 342, both of which are rectangular square tubes with an outer contour of 12 mm and a thickness of 4 mm. The slide fixed leg 341 is fixed on the bottom plate 221 by four M3 screws, and the slide mounting pipe 342 is connected with the slide fixed leg 341 by welding. In order to facilitate the positioning and installation of the linear motion slide 310, in addition to the positioning holes of the linear motion slide 310 itself, a step with a height of 1 mm is formed on the slide mounting pipe 342 for linear positioning. The linear motion slide 310 is fixed on the slide mounting pipe 342.

[0099] The linear motion slide 310 comprises a linear guide rail 311, a motion slide 312, a guide rail clamp 313, a guide rail clamp connecting plate 314, and a limiting nut 315. For standard devices, the company's finished products can be selected. In this embodiment, the linear guide rail 311 adopts a silver MGN9C1R130Z1PM, the guide rail clamp 313 is of a model HK0900M-NBK, the guide rail clamp connecting plate 314 is connected with the motion slide 312 and the guide rail clamp 313 through four M3 screws, the linear guide rail 311 is fixed on the slide mounting pipe 342 through the limiting nut 315 at both ends, the motion slide 312 is connected to the linear guide rail 311 through sliding, the motion slide 312 is locked in position through the guide rail clamp 313, and the laser head mounting plate 320 is fixed on the two motion slides 312 at both ends. The laser head mounting plate 320 and the several laser interferometers 330 can be moved in the width direction of the mirror 400 and locked through the guide rail clamp 313.

[0100] The laser head mounting plate 320 and several laser interferometers 330 are located at the top of the bending system, and are used to measure the bending displacement of each point on the reflector 400. The bending radius of the reflector 400 can be roughly calculated. The laser head mounting plate 320 is fixed to the connecting plate 32 by 4 M3 screws. The laser interferometer 330 includes a laser probe. There are 5 stepped holes with diameters of 23mm and 16mm on the laser head mounting plate 320 to place the laser probe of the laser interferometer 330. In this embodiment, the model of the laser interferometer 330 is attocube IDS3010, and the model of the laser probe is M15.5 / F40 / Flex. The laser probe of the laser interferometer 330 is connected to the laser head mounting plate 320 through its own threaded connection. The laser head mounting plate 320 provides sufficient rigidity for the measurement of the laser probe to ensure the stability and reliability of the measurement results. For the reflector bending measurement, the specific movement position of the laser interferometer 330 is as follows: Figure 8 As shown, during normal operation, the moving slide 312 is located at the center line of the width direction of the reflector 400, and the laser interferometer 330 located above it measures the actual displacement change of the reflector 400 when it is bent through the through slot 211 on the first fixing part 210. The root mean square value of the radius of the reflector 400 can be roughly fitted by 5 groups of bending displacements; when it is necessary to monitor whether the reflector 400 is twisted during the bending process, the moving slide 312 drives the laser head mounting plate 320 to move to a position 7 mm on both sides of the meridian axis of the reflector 400. At this time, the laser interferometer 330 measures the bending displacement at the symmetrical position of the meridian axis of the reflector 400 through the through slot 211 on the first fixing part 210; when it is necessary to use other radius testing methods such as the long-range profilometer LTP, the moving slide 312 moves to one end limit during the test.

[0101] In this embodiment, the entire reflector bending system is supported by a base plate 221 with a size of 520*150*15mm. Two sets of M8 metal lifting ears 150 are installed at both ends of the base plate 221 to facilitate the movement and lifting of the entire bending structure. The above-mentioned support 111 and support frame 340 are both fixed on the base plate 221.

[0102] In use, the embodiment can first determine the installation position of the piezoelectric ceramic 232 and the force size of the corresponding position under the target bending radius precision through the particle swarm algorithm, determine the required voltage value through the force size according to the characteristics of the piezoelectric ceramic 232, then scan the initial radius and the target bending radius of the mirror 400 in the optical laboratory using the long-range surface profiler LTP, record the reading values of each laser interferometer 330 when the mirror obtains the target bending radius, accordingly, when the mirror bending system is on-line debugged, the voltage values of each corresponding piezoelectric ceramic 232 can be adjusted through the reading of the laser interferometer 330 respectively, so that the value of the laser interferometer 330 is consistent with the reading of the laser interferometer 330 when the mirror obtains the target bending radius in the laboratory, at this time, the mirror on-line debugged reaches the required target bending radius.

[0103] The particle swarm algorithm is used to optimize calculation of 5 groups of elliptical radii of the piezoelectric ceramic 232 with different bending radii, to determine the ideal solution set of the bending radius under various conditions including gravity and thermal deformation, and finally to determine the position of the piezoelectric ceramic 232 and the output force of the piezoelectric ceramic at each position. In the specific embodiment of the present application, the bending radius is in the range of 7400m-1900m, and the comparative result graphs of FIGS. 12-14 are obtained. FIG. 12(a) is a comparative graph of the rear surface curve after bending and the target bending curve of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 1900m in the specific embodiment of the present application, FIG. 12(b) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 1900m in the specific embodiment of the present application, FIG. 12(c) is a comparative graph of the rear surface curve after bending and the target curve of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 1900m in the specific embodiment of the present application, and FIG. 12(d) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 1900m in the specific embodiment of the present application. FIG. 13(a) is a comparative graph of the rear surface curve after bending and the target bending curve of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 2857m in the specific embodiment of the present application, FIG. 13(b) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 2857m in the specific embodiment of the present application, FIG. 13(c) is a comparative graph of the rear surface curve after bending and the target curve of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 2857m in the specific embodiment of the present application, and FIG. 13(d) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 2857m in the specific embodiment of the present application. FIG. 14(a) is a comparative graph of the rear surface curve after bending and the target bending curve of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 7400m in the specific embodiment of the present application, FIG. 14(b) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type with the mirror self-weight and a target bending radius of 7400m in the specific embodiment of the present application, FIG. 14(c) is a comparative graph of the rear surface curve after bending and the target curve of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 7400m in the specific embodiment of the present application, and FIG. 14(d) is a comparative graph of the actual slope and the target slope of the bending ellipsoidal surface type considering the mirror self-weight and thermal deformation and a target bending radius of 7400m in the specific embodiment of the present application.

[0104] Considering the self-weight bending of the mirror 400, the positions of the piezoelectric ceramics 232 and the force at each position, and the bending radius result, when the bending equivalent radius range is 7400m-1900m, as shown in Figures 12(b), 13(b), and 14(b), the slope root mean square error is below 0.1 urad; under the action of 20W uniform heat load, considering the self-weight and thermal deformation of the mirror 400, the positions of the piezoelectric ceramics 232 and the force at each position, as shown in Figures 12(d), 13(d), and 14(d), the slope error after thermal compensation is below 0.13 urad.

[0105] In summary, the present application first adopts the first servo constraint assembly 141 and the second servo constraint assembly 142 to form the servo structure of the rotating roller and the dragging roller, which can avoid the torsion of the mirror 400 while realizing the support of the mirror 400, and can guarantee the actual bending to be consistent with the theoretical calculation through the point contact bending of the stacked spherical piezoelectric ceramics, and can realize the precise bending by controlling the voltage value of the piezoelectric ceramic 232, and the mechanical structure is simple, the precision is high, and the bending mode is easy to control. The present application supports the mirror 400 and the attocube laser interferometer by two independent mirror supports 110, which avoids the mutual interference of the mirror 400 and the laser interferometer 330. The piezoelectric ceramic fixed support and the adjusting mechanism 200 designed in the present application can realize the vertical action of the piezoelectric ceramic 232 on the mirror surface, and guarantee the initial contact state of the piezoelectric ceramic 232 and the mirror surface. The present application can realize the online monitoring and debugging of the bending mirror 400 by the cooperation of the piezoelectric ceramic 232 and the laser interferometer 330, and the method is simple and intuitive, which reduces the difficulty of the online installation and adjustment of the piezoelectric mirror, and provides a new solution for reducing the online installation and adjustment of the piezoelectric mirror.

[0106] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application belong to the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. A mirror bending system based on piezoelectric ceramics with online monitoring and adjustment, characterized in that: include: a reflector support mechanism including a restraining assembly for restraining the reflector; A piezoelectric ceramic fixing and adjustment mechanism includes a first fixing portion, a second fixing portion, and a piezoelectric ceramic adjustment assembly. The first fixing portion is disposed above the reflector, and the second fixing portion is disposed below the reflector. The first fixing portion and / or the second fixing portion are both provided with a plurality of piezoelectric ceramic adjustment assemblies arranged side by side. The piezoelectric ceramic adjustment assemblies include piezoelectric ceramics for bending the reflector. The first fixing portion is provided with a through slot. The laser interferometer support and motion mechanism includes a plurality of laser interferometers arranged side by side above the first fixing portion, wherein the laser interferometers emit laser light through the through slot and into the reflector; wherein a target bending radius of the reflector is set, the plurality of laser interferometers emit lasers to fit the real-time bending radius of the reflector, and the plurality of piezoelectric ceramic adjustment assemblies adjust the real-time bending radius of the reflector online until the real-time bending radius reaches the target bending radius; The constraint component includes an X-direction constraint component, a Y-direction constraint component and a follower constraint component; the Y-direction constraint component includes a first Y-direction constraint component and a second Y-direction constraint component, and the follower constraint component includes a first follower constraint component and a second follower constraint component; The first Y-direction constraint assembly includes a fixed end stop plate and a second hemispherical head screw, the fixed end stop plate is fixed to one of the supports, the second hemispherical head screw includes a third hemispherical head and a third rod, the third rod is fixed to the fixed end stop plate, and the third hemispherical head abuts against one end of the reflector; The second Y-direction constraint assembly includes a free end baffle, a spring, and a mushroom ball head. The free end baffle is fixed to another support. One end of the spring is fixed to the free end baffle, and the other end is fixed to the mushroom ball head. The spring extends along the Y direction and provides an elastic force in the Y direction to the other end of the reflector through the spring. The mushroom ball head abuts against the reflector. The first follower constraint assembly includes a first roller and a first roller shaft, the first roller shaft is arranged in the Z direction and fixed to one of the supports, the first roller shaft is provided with two abutment portions, the abutment portions protruding from the first roller shaft, the first roller is rotatably sleeved on the first roller shaft, and the two ends of the first roller respectively abut against the two abutment portions in a one-to-one correspondence; The second follower constraint assembly includes a second roller and a second roller shaft. The second roller shaft is arranged in the Z direction and fixed to another support. A first smooth surface is arranged on the outside of the second roller shaft and a convex ring protruding from the first smooth surface is arranged in the middle of the outside of the second roller shaft. A second smooth surface is arranged on the inside of the second roller. The first smooth surface and the second smooth surface are clearance-fitted, and the convex ring and the second smooth surface are interference-fitted.

2. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 1, characterized in that: The reflector support mechanism further includes a reflector support; The X-direction constraint assembly is arranged on the reflector support for clamping the reflector in the X direction, the Y-direction constraint assembly is arranged on the reflector support for clamping the reflector in the Y direction, and the follower constraint assembly is arranged on the reflector support for supporting the reflector in the Z direction. The X direction is the width direction of the reflector, the Y direction is the length direction of the reflector, and the Z direction is the height direction of the reflector.

3. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The reflector support includes two supports, one of which corresponds to the X-ray incident end of the reflector, and the other corresponds to the X-ray emitting end of the reflector. The support is provided with a accommodating cavity, and the two ends of the reflector are respectively accommodated in the two accommodating cavities. Both supports are provided with X-direction constraint components to clamp both ends of the reflector in the X direction. The two supports are respectively provided with a first Y-direction constraint component and a second Y-direction constraint component to clamp the two ends of the reflector in the Y direction. The first follow-up constraint component is provided on one of the supports to rotatably support the bottom of the reflector, and the second follow-up constraint component is provided on the other support to movably support the bottom of the reflector.

4. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 3, characterized in that: The X-direction constraint assembly includes a reflector locking nut, a reflector ball head adjustment screw, and a first hemispherical head screw. The first hemispherical head screw includes a first hemispherical head and a first rod. The first rod is fixed to the support. The first hemispherical head abuts against the reflector. The reflector ball head adjustment screw includes a second hemispherical head and a second rod. The second hemispherical head abuts against the reflector. The second rod is threadedly connected to the support.

5. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The piezoelectric ceramic adjustment assembly also includes two groups of piezoelectric ceramic kits, which are symmetrically arranged along the X direction. The piezoelectric ceramic kits include an adjustment member and an adjustment rod. The adjustment member is fixed to the first fixed part or the second fixed part. The adjustment member is provided with a accommodating cavity, and the piezoelectric ceramic is accommodated in the accommodating cavity. The adjustment rod extends along the Z direction and is used to drive the piezoelectric ceramic to move along the Z direction to adjust the position of the piezoelectric ceramic.

6. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 5, characterized in that: It also includes a pressure sensor, which is arranged in the accommodating cavity. The piezoelectric ceramic has a ball head, which is accommodated in the accommodating cavity and fixed to the pressure sensor. The ball head abuts against the reflector. The adjusting rod is threadedly connected to the adjusting member and one end of the adjusting rod abuts against the pressure sensor to adjust the position of the piezoelectric ceramic.

7. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The through slot is through in the Z direction and extends in the Y direction. The laser interferometer support and motion mechanism includes a linear motion slide, a laser head mounting plate and a laser interferometer. The linear motion slide extends in the X direction. The laser head mounting plate is slidably connected to the linear motion slide. The laser head mounting plate extends in the Y direction. Several laser interferometers arranged in the Y direction are provided on the laser head mounting plate. Each laser interferometer emits a laser in the Z direction.

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