Precursor container

Abstract

The invention provides a precursor container which comprises a body, a cover body and at least one tray, the tray is arranged in the body, and an air inlet and an air outlet are distributed in the two ends of the tray; a second containing cavity is formed in the tray, at least one first partition plate is arranged in the second containing cavity, the first partition plate divides the second containing cavity into a plurality of channels, and the two ends of each channel are communicated with the air inlet and the air outlet respectively; the cover body is buckled on the body, an air inlet hole and an air outlet hole are formed in the cover body, the air inlet hole is communicated with the air inlet, and the air outlet hole is communicated with the air outlet; at least one second partition plate perpendicular to the first partition plate is arranged on the face, facing the body, of the cover body. At least one of the first partition plate and the second partition plate is provided with a gap, the first partition plate and the second partition plate are connected in an inserted mode through the gap, and a first gap is formed between the bottom face of the channel and the second partition plate. According to the invention, a uniform and stable turbulent flow field can be formed in the tray, and the mass transfer driving force of the precursor is increased, so that a relatively high precursor carrying-out amount is obtained.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a precursor container. Background Art

[0002] Traditional solid-state precursor containers adopt a serpentine flow channel structure, which is in the shape of a pipe. However, this pipe-like structure occupies a large space for loading precursor materials, resulting in low space utilization of precursor materials. In addition, this pipe-like structure has a high mass transfer rate in the early stage of mass transfer, but the mass transfer driving force is weakened in the second half of the flow channel, which will lead to uneven consumption of precursor materials in the front and back sections of the flow channel, and low mass transfer efficiency. Summary of the invention

[0003] The purpose of this application is to provide a precursor container to enhance the driving force of mass transfer and improve the mass transfer efficiency.

[0004] The present application provides a precursor container, which includes a body, a cover and at least one tray, wherein a first cavity is arranged in the body; the tray is arranged in the first cavity, and an air inlet is arranged at one end of the tray along a first direction, and an air outlet is arranged at the other end of the tray; a second cavity is arranged in the tray, and at least one first partition is arranged in the second cavity, the first partition extends along the first direction, and the first partition divides the second cavity into a plurality of channels, the air inlet is communicated with one end of the plurality of channels, and the air outlet is communicated with the other end of the plurality of channels; the cover is buckled The main body is provided with an air inlet and an air outlet on the cover body, the air inlet is communicated with the air inlet, and the air outlet is communicated with the air outlet; at least one second partition is provided on the side of the cover body facing the main body, the second partition extends along a second direction, and the second direction is perpendicular to the first direction; at least one of the first partition and the second partition is provided with a gap, the first partition and the second partition are plugged through the gap, and there is a first gap between the bottom surface of the channel and the second partition in a third direction, and the third direction is perpendicular to the first direction and the second direction.

[0005] The precursor container provided by the present application can form a uniform and stable turbulent flow field in the tray, increase the mass transfer driving force of the precursor, so as to obtain a higher amount of precursor taken out, and is applicable to a variety of precursor materials. Optionally, the precursor can be a Newtonian liquid precursor, a non-Newtonian liquid precursor or an extremely low vapor pressure solid precursor. At the same time, the carrier gas can flow simultaneously in a plurality of channels formed in the tray, and can be mixed with the precursors in each channel at the same time and taken out of the container, so as to improve the efficiency and stability of the steam taken out. In addition, the first partition plate and the second partition plate are both plate-like structures with a small thickness, which can reduce the occupation of the carrier gas flow space, and while ensuring the effect of the carrier gas and the precursor mixing, it is conducive to realizing the miniaturization design of the container.

[0006] In one possible design, a plurality of the trays are provided, and the plurality of the trays are stacked in the third direction; the second partition is provided on a side of at least some of the trays facing away from the second cavity, and the second partition of the tray located on the upper layer is plugged into the first partition of the tray located on the adjacent layer below through the gap.

[0007] Therefore, by stacking multiple layers of trays, the number of channels can be expanded, thereby increasing the amount of precursor carried out by the carrier gas and improving the mass transfer efficiency.

[0008] In one possible design, along the first direction, there is a second gap between the end of the tray where the air inlet is provided and the main body, there is a third gap between the end of the tray where the air outlet is provided and the main body, the air inlet is connected to the second gap, and the air outlet is connected to the third gap.

[0009] Among them, when the carrier gas is introduced into the container, the carrier gas can enter the second gap through the air inlet hole. Since the space formed by the main body and each tray at the second gap is narrow, when a large amount of carrier gas flows in, the carrier gas can quickly fill the second gap and generate a relatively high pressure, so that the carrier gas can evenly enter the air inlet of each layer of tray and generate a larger mass transfer driving force and mass transfer speed, thereby improving the mass transfer efficiency.

[0010] In a possible design, at least two limit blocks are arranged in the first cavity, and at least two limit blocks are respectively arranged at the two ends of the first cavity in the first direction, one end of the tray in the first direction is in contact with at least one of the limit blocks for limit, and the other end of the tray in the first direction is in contact with at least another limit block for limit; wherein, there is a gap between at least one of the limit blocks and a side wall of the main body in the first direction, and there is a gap between at least another of the limit blocks and the other side wall of the main body in the first direction.

[0011] Among them, the tray can be limited in the first direction by at least two of the above-mentioned limit blocks distributed at both ends of the body, and because the two ends of the tray in the second direction are respectively in contact with the side walls of the body, the tray can be limited in the second direction, thereby ensuring the stability of the tray in the first cavity and preventing shaking. In addition, a gap is provided between the limit block and the adjacent side wall on the body, so that after the tray is installed, the two ends of the tray in the first direction can form the above-mentioned second gap and third gap with the body respectively, which is convenient for the input and output of the carrier gas.

[0012] In one possible design, the two side walls of the tray in the second direction are respectively fitted with the inner walls of the main body, thereby preventing a gap from being generated between the main body and each tray in the second direction, so that the carrier gas can only enter each channel through the air inlet on the tray and bring the precursor out of the tray through the air outlet, thereby improving the utilization rate of the carrier gas and the mass transfer efficiency.

[0013] In a possible design, the tray includes a first side wall, a second side wall, a third side wall, a fourth side wall and a bottom plate, the first side wall and the second side wall are connected to the two ends of the bottom plate in the first direction, the third side wall and the fourth side wall are connected to the two ends of the bottom plate in the second direction, and the first side wall, the second side wall, the third side wall, the fourth side wall and the bottom plate form a second cavity; along the third direction, the height of the first side wall is less than the height of the third side wall and the fourth side wall, and the air inlet is formed between one end of the first side wall away from the bottom plate and the third side wall and the fourth side wall; along the third direction, the height of the second side wall is less than the height of the third side wall and the fourth side wall, and the air outlet is formed between one end of the second side wall away from the bottom plate and the third side wall and the fourth side wall.

[0014] Among them, when multiple trays are stacked and arranged in the main body, the bottom plate of the upper tray can be pressed on the third side wall and the fourth side wall of the lower tray, so that the bottom plate of the upper tray does not contact the first side wall and the fourth side wall of the lower layer. That is to say, an air inlet and an air outlet are formed between the bottom plate of the upper tray and the first side wall and the second side wall of the lower tray. The carrier gas can only enter the channel through the air inlet and bring the precursor out from the air outlet. Therefore, the air inlet and the air outlet formed by the cooperation of two adjacent layers of trays can constrain the flow path of the carrier gas, while reducing the space occupied and preventing the carrier gas from flowing to positions other than the air inlet and the air outlet, thereby improving the utilization rate of the carrier gas and improving the mass transfer efficiency.

[0015] In a possible design, along the third direction, the bottom of the first partition is connected to the bottom plate, and the top of the first partition protrudes from the first side wall and the second side wall.

[0016] When the carrier gas enters the gas inlet, the carrier gas can be guided by each first partition plate to enter the channel between any two adjacent first partition plates, and can be evenly distributed in each channel, thereby ensuring the uniformity of mass transfer in each channel.

[0017] In a possible design, the top of the first partition is flush with the top of the third side wall and the top of the fourth side wall, and is used to contact the bottom of the cover body, or the bottom of the tray of the adjacent upper layer.

[0018] Exemplarily, for two adjacent layers of trays, the bottom of the tray on the upper layer can be pressed against the top of the first partition, the third side wall and the fourth side wall on the tray on the adjacent lower layer, so that the top of the channel in the tray on the adjacent lower layer can be closed, so that the carrier gas can only flow through the channel, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel, thereby improving the mass transfer efficiency.

[0019] Exemplarily, for the top-most tray, the cover body can be pressed against the top of the first partition, the third side wall and the fourth side wall on the top-most tray, thereby closing the top of the channel of the top-most tray, and ensuring that the carrier gas at the top-most tray can only flow through the channel, thereby ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel, thereby improving the mass transfer efficiency.

[0020] In a possible design, the first partition is a continuous long plate-like structure, and the second partition is provided with the gap.

[0021] In a possible design, the second partition is a continuous long plate-like structure, and the first partition is provided with the gap.

[0022] In a possible design, a plurality of the first partitions and a plurality of the second partitions are provided, and the plurality of the first partitions are evenly spaced and distributed in the second direction, and the plurality of the second partitions are evenly spaced and distributed in the first direction.

[0023] Among them, multiple first partitions are distributed in parallel and evenly, so as to form multiple identical channels. The air inlet and the air outlet have a certain length in the second direction and can be connected with each channel. Therefore, on the one hand, the carrier gas can flow in multiple channels at the same time to improve the mass transfer efficiency, and at the same time it can ensure that the carrier gas flow is evenly and consistently distributed among the channels.

[0024] In one possible design, along the third direction, the bottom of the tray at the bottom layer is fitted with the main body, so that the bottom of the tray at the bottom layer can be fitted with the bottom of the first cavity, which can eliminate the gap between the bottom of the tray at the bottom layer and the main body, and prevent the carrier gas from passing between the bottom of the tray at the bottom layer and the main body and not participating in the mass transfer process of mixing with the precursor, resulting in carrier gas waste and reduced mass transfer efficiency.

[0025] In a possible design, the width of the air inlet and the air outlet in the third direction is between 0.5 mm and 2 mm, thereby ensuring uniform distribution of the carrier gas in each layer of the tray and improving mass transfer efficiency.

[0026] In a possible design, the width of the first gap is between 3 mm and 6 mm, thereby ensuring sufficient mixing of the carrier gas and the precursor, and obtaining a higher mass transfer rate and mass transfer driving force, thereby improving the mass transfer efficiency.

[0027] It should be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the structure of a precursor container provided in an embodiment of the present application;

[0029] Figure 2 A schematic diagram of the structure of a precursor container provided in one embodiment of the present application (with the cover hidden);

[0030] Figure 3 A schematic diagram of the structure of the main body provided in the embodiment of the present application;

[0031] Figure 4 A schematic diagram of the structure of a tray provided in one embodiment of the present application;

[0032] Figure 5 A schematic diagram of the structure of a cover body provided in one embodiment of the present application;

[0033] Figure 6 The precursor container provided in the embodiment of the present application is Figure 1 Sectional view at AA in the middle;

[0034] Figure 7 A schematic structural diagram of a precursor container provided in another embodiment of the present application (with the cover hidden);

[0035] Figure 8 A schematic structural diagram of a cover body provided in another embodiment of the present application;

[0036] Fig. 9 The precursor container provided in the embodiment of the present application is Figure 1 Sectional view at the middle BB;

[0037] Fig.10 An exploded view of a precursor container provided in an embodiment of the present application;

[0038] Fig.11 A schematic diagram of a structure in which a limited position block is provided in a body provided in an embodiment of the present application;

[0039] Fig.12 for Fig.11 A top view of

[0040] Fig.13 A schematic diagram of a structure in which a limit block is provided in a body provided in another embodiment of the present application;

[0041] Fig.14 for Fig.13 A top view of

[0042] Fig.15 A schematic diagram of the structure of a tray provided in another embodiment of the present application;

[0043] Fig.16 A side view of a tray provided in accordance with an embodiment of the present application.

[0044] Reference numerals:

[0045] 1-Ontology;

[0046] 11- first cavity;

[0047] 12-Open end;

[0048] 13- Second gap;

[0049] 14- Third gap;

[0050] 2-cover;

[0051] 21-air inlet;

[0052] 22- vent hole;

[0053] 3-Pallet;

[0054] 31-air inlet;

[0055] 32-air outlet;

[0056] 33- second chamber;

[0057] 34-channel;

[0058] 35- a first side wall;

[0059] 36- second side wall;

[0060] 37- third side wall;

[0061] 38- fourth side wall;

[0062] 39- bottom plate;

[0063] 4- first baffle;

[0064] 5- second partition;

[0065] 6- Gap;

[0066] 7- First gap;

[0067] 8-limiting block;

[0068] 81-gap;

[0069] H1-width;

[0070] H2-width;

[0071] X-first direction;

[0072] Y-second direction;

[0073] Z - third direction.

[0074] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application. DETAILED DESCRIPTION

[0075] In order to better understand the technical solution of the present application, the embodiments of the present application are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present application and are not used to limit the present application.

[0076] In the description of this application, unless otherwise clearly specified and limited, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance; unless otherwise specified or explained, the term "plurality" refers to two or more; the terms "connected" and "fixed" should be understood in a broad sense, for example, "connected" can be a fixed connection, a detachable connection, an integral connection, or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0077] In the semiconductor manufacturing process, chemical vapor deposition (CVD) and atomic layer deposition (ALD) require the introduction of a precursor gas source at a certain temperature and pressure into the reaction chamber, where a chemical reaction occurs on the wafer substrate to form a thin film. The precursor is a chemical substance that can participate in a chemical reaction, and the reaction results in the generation of another chemical substance.

[0078] Precursors are usually contained in solid source containers, and solid precursor vapor is delivered by sublimation. Specifically, the gas-solid mass transfer rate can be increased by introducing a high-flow carrier gas into the solid source container to obtain a higher amount of precursor carried out. Therefore, the dynamic mass transfer process of the precursor in the container determines the amount of precursor carried out of the container. However, in some key processes, a large number of precursor materials with low vapor pressure and solid / viscous liquid at room temperature are selected. Commonly used containers cannot output stable and high-throughput precursors, making it difficult to meet process requirements.

[0079] In addition, for solid source containers that adopt a serpentine flow channel structure, the serpentine flow channel structure will occupy the space in the container originally used to load the precursor material, resulting in a low space utilization rate of the precursor material, and the mass transfer driving force of this serpentine flow channel structure is significantly weakened in the rear section, which will lead to the problem of uneven consumption of precursor materials in the front and rear sections of the flow channel, and low mass transfer efficiency.

[0080] The present application embodiment provides a precursor container (hereinafter referred to as container), Figure 1 A schematic diagram of the structure of a precursor container provided in an embodiment of the present application, Figure 2 A schematic diagram of the structure of a precursor container (hidden cover) provided in an embodiment of the present application, referring to Figure 1 and Figure 2 The container comprises a main body 1 , a cover 2 and at least one tray 3 . Figure 3 The structural diagram of the main body 1 provided in the embodiment of the present application is shown in FIG. Figure 3 The main body 1 is provided with a first cavity 11, which can accommodate one or more trays 3. The top of the first cavity 11 is an open end 12, which is in an open state so as to facilitate placing the tray 3 in the first cavity 11. The cover 2 can be buckled on the top of the main body 1 to close the first cavity 11.

[0081] Reference Figure 2 , the tray 3 is arranged in the first cavity 11 . Figure 4 This is a schematic diagram of the structure of a tray 3 provided in an embodiment of the present application, referring to Figure 4, along the first direction X, an air inlet 31 is provided at one end of the tray 3, and an air outlet 32 ​​is provided at the other end of the tray 3. A second cavity 33 is provided in the tray 3, and the second cavity 33 can be used to contain the precursor. At least one first partition 4 is provided in the second cavity 33, and the first partition 4 extends along the first direction X. The first partition 4 divides the second cavity 33 into a plurality of channels 34, and each channel 34 can be provided with a precursor. The air inlet 31 is connected to one end of the plurality of channels 34, and the air outlet 32 ​​is connected to the other end of the plurality of channels 34.

[0082] Figure 5 This is a schematic diagram of the structure of the cover body 2 provided in one embodiment of the present application, referring to Figure 5 The cover 2 is provided with an air inlet 21 and an air outlet 22, the air inlet 21 is connected to the air inlet 31, and the air outlet 22 is connected to the air outlet 32, wherein the air inlet 21 can be used to input carrier gas into the body 1, and the carrier gas can enter each channel 34 through the air inlet 31, and can contact with the precursor in each channel 34, so that the precursor can be taken out of the tray 3 from the air outlet 32, and further output to the outside of the container from the air outlet 22. At least one second partition 5 is provided on the side of the cover 2 facing the body 1, and the second partition 5 extends along the second direction Y, and the second direction Y is perpendicular to the first direction X.

[0083] At least one of the first partition plate 4 and the second partition plate 5 is provided with a slit 6, and the first partition plate 4 and the second partition plate 5 are plugged through the slit 6, so that at least a portion of the second partition plate 5 can extend into each channel 34. For example, referring to Figure 4 , each first partition plate 4 is provided with a plurality of slits 6, referring to Figure 5 The second partition plate 5 of the cover body 2 is not provided with a gap 6, and the second partition plate 5 may be a continuous long strip structure. Figure 6 The precursor container provided in the embodiment of the present application is Figure 1 The cross-sectional view at AA in the middle, refer to Figure 6 , the second partition 5 can be inserted into the corresponding gap 6 on the first partition 4. Exemplarily, Figure 7 A schematic diagram of the structure of a precursor container (hidden cover 2) provided in another embodiment of the present application, referring to Figure 7 The first partition plate 4 on the tray 3 is not provided with a gap 6, and the first partition plate 4 may be a long strip-shaped structure. Figure 8 This is a schematic diagram of the structure of the cover body 2 provided in another embodiment of the present application, referring to Figure 8 Each second partition plate 5 on the cover body 2 may be provided with a plurality of slits 6 , so that the first partition plate 4 and the second partition plate 5 can be plugged in.

[0084] Fig. 9 The precursor container provided in the embodiment of the present application is Figure 1 Cross-sectional view at BB, refer to Fig. 9 , there is a first gap 7 between the bottom surface of the channel 34 and the second partition 5 in the third direction Z, and the third direction Z is perpendicular to the first direction X and the second direction Y. That is to say, the portion of the second partition 5 extending into the channel 34 does not contact the bottom surface of the channel 34, but there is a first gap 7, a part of the first gap 7 can be used to place the precursor, and can also be used to pass the carrier gas, that is, the bottom of the channel 34 can be used to place the precursor, and the thickness of the precursor in the third direction Z is less than the width of the first gap 7, so that the portion of the first gap 7 between the precursor and the second partition 5 can be used for the circulation of the carrier gas. The carrier gas can be an inert gas, such as nitrogen.

[0085] During use, an external device for providing carrier gas can be connected to the air inlet 21 on the cover body 2, and the carrier gas can enter the precursor container through the air inlet 21, and the carrier gas can further enter the various channels 34 in the tray 3 through the air inlet 31 on the tray 3. Since the precursor is arranged at the bottom of the channel 34, when the carrier gas passes through, the carrier gas can contact and mix with the precursor, and the precursor can be output from the air outlet 32 ​​of the tray 3 along with the carrier gas, and further output to the outside through the air outlet 22 on the cover body 2.

[0086] Among them, at least part of the second partition 5 can extend into the channel 34, so that the channel 34 can be divided into a plurality of small spaces in the first direction X. The carrier gas can enter each small space through the first gap 7, and can form a vortex after touching the side wall of the small space, thereby increasing the mixing of the precursor in the gas phase, thereby increasing the mass transfer driving force and accelerating the mass transfer rate. In addition, since the width of the first gap 7 is small, when the carrier gas passes through the first gap 7, the flow rate of the carrier gas will increase, thereby reducing the thickness of the mass transfer boundary layer.

[0087] Thus, the precursor container provided in the embodiment of the present application can form a uniform and stable turbulent flow field in the tray 3, increase the mass transfer driving force of the precursor, thereby obtaining a higher amount of precursor taken out, and is applicable to a variety of precursor materials. Optionally, the precursor can be a Newtonian liquid precursor, a non-Newtonian liquid precursor, or an extremely low vapor pressure solid precursor. At the same time, the carrier gas can flow simultaneously in the multiple channels 34 formed in the tray 3, and can be mixed with the precursors in each channel 34 at the same time and taken out of the container, thereby improving the efficiency and stability of the steam taken out. In addition, the first partition plate 4 and the second partition plate 5 are both plate-like structures with a small thickness, which can reduce the occupation of the carrier gas flow space, while ensuring the effect of mixing the carrier gas and the precursor, it is conducive to realizing the miniaturization design of the container.

[0088] As a specific implementation method, refer to Fig. 9, the width H2 of the first gap 7 needs to be within an appropriate width range to ensure efficient mass transfer. If the width H2 of the first gap 7 is too large, for example, greater than 6mm, it will cause the flow rate of the carrier gas in the channel 34 to be too large, and part of the carrier gas cannot be fully mixed with the precursor and flows out from the gas outlet 32, resulting in the carrier gas not being fully utilized, reducing the mass transfer efficiency; if the width H2 of the first gap 7 is too small, for example, less than 3mm, the resistance to the flow of the carrier gas is large, which is not conducive to improving the mass transfer rate of the carrier gas and reducing the mass transfer efficiency. For this reason, in this embodiment, the width H2 of the first gap 7 can be between 3mm and 6mm, so as to ensure sufficient mixing of the carrier gas and the precursor, and also obtain a higher mass transfer rate and mass transfer driving force, thereby improving the mass transfer efficiency. Specifically, the width H2 of the first gap 7 can be 3mm, 4mm, 5mm or 6mm.

[0089] As a specific implementation method, refer to Figure 4 and Figure 5 , multiple first baffles 4 and multiple second baffles 5 can be provided, multiple first baffles 4 are evenly spaced in the second direction Y, and multiple second baffles 5 are evenly spaced in the first direction X. Among them, multiple first baffles 4 are evenly distributed in parallel, so as to form multiple identical channels 34, and the air inlet 31 and the air outlet 32 ​​have a certain length in the second direction Y, and can be connected with each channel 34, thereby, on the one hand, the carrier gas can flow in multiple channels 34 at the same time, improving the mass transfer efficiency, and at the same time, it can also ensure that the carrier gas flow rate is evenly and consistently distributed among each channel 34.

[0090] As a specific implementation method, Fig.10 The exploded view of the precursor container provided in the embodiment of the present application is shown in FIG. Fig.10 There may be multiple trays 3, and the multiple trays 3 are stacked in the third direction Z. A second partition 5 is provided on a side of at least some of the trays 3 that is away from the second cavity 33. The second partition 5 on the tray 3 on the upper layer is plugged into the first partition 4 on the tray 3 on the adjacent layer below through a gap 6.

[0091] Among them, the plug-in form of the first partition 4 and the second partition 5 between the two adjacent layers of trays 3 can be the same as the plug-in form of the first partition 4 and the second partition 5 between the tray 3 and the cover body 2. For example, the second partition 5 located in the upper tray 3 can be provided with a gap 6, so that the first partition 4 located in the lower layer can be plugged into the gap 6; for example, the first partition 4 located in the lower tray 3 can be provided with a gap 6, so that the second partition 5 located in the upper layer can be plugged into the gap 6. The carrier gas can enter each channel 34 through the air inlet 31 on each tray 3, and can be mixed with the precursor in the channel 34, and then can be output to the outside through the air outlet 32 ​​on the tray 3 and the air outlet 22 on the cover body 2 in sequence. Therefore, by stacking multiple layers of trays 3, the number of channels 34 can be expanded, thereby increasing the amount of precursor carried out by the carrier gas and improving the mass transfer efficiency.

[0092] Among them, the tray 3 located on the top layer can be plugged into the first partition 4 and the second partition 5 on the cover 2. The flow mode of the carrier between the top layer tray 3 and the cover 2 is the same as the flow mode between the two adjacent layers of trays 3, which will not be repeated here.

[0093] As a specific implementation method, refer to Figure 2 The two side walls of the tray 3 in the second direction Y are respectively in contact with the inner wall of the body 1 .

[0094] Among them, each tray 3 can be arranged in the first cavity 11 of the main body 1, and the outer wall of each tray 3 in the second direction Y can be fitted with the inner wall of the main body 1, so that no gap is generated between the main body 1 and each tray 3 in the second direction Y, so that the carrier gas can only enter into each channel 34 through the air inlet 31 on the tray 3, and the precursor can be taken out of the tray 3 through the air outlet 32, thereby improving the utilization rate of the carrier gas and improving the mass transfer efficiency.

[0095] As a specific implementation method, refer to Figure 6 Along the first direction X, there is a second gap 13 between the end of the tray 3 where the air inlet 31 is provided and the main body 1, and there is a third gap 14 between the end of the tray 3 where the air outlet 32 ​​is provided and the main body 1, the air inlet 21 is connected to the second gap 13, and the air outlet 22 is connected to the third gap 14.

[0096] When the carrier gas is introduced into the container, the carrier gas can enter the second gap 13 through the air inlet 21. Since the space formed by the body 1 and each tray 3 at the second gap 13 is narrow, when a large amount of carrier gas flows in, the carrier gas can quickly fill the second gap 13 and generate a relatively high pressure, so that the carrier gas can evenly enter the air inlet 31 of each layer of tray 3 and generate a large mass transfer driving force and mass transfer speed, thereby improving the mass transfer efficiency. In addition, the carrier gas mixed with the precursor can be quickly output from the air outlet 32 ​​of each layer of tray 3 to the second gap 13, and can be further transported to the outside through the air outlet 22 on the cover 2.

[0097] As a specific implementation method, Fig.11 This is a schematic diagram of a structure in which a limiting block 8 is provided in a main body 1 according to an embodiment of the present application. Fig.12 for Fig.11 Top view of Fig.11 and Fig.12 At least two limit blocks 8 are arranged in the first cavity 11, and at least two limit blocks 8 are arranged at two ends of the first cavity 11 in the first direction X, one end of the tray 3 in the first direction X contacts with at least one limit block 8 for limit, and the other end of the tray 3 in the first direction X contacts with at least another limit block 8 for limit; wherein, there is a gap 81 between at least one limit block 8 and one side wall of the body 1 in the first direction X, and there is a gap 81 between at least another limit block 8 and another side wall of the body 1 in the first direction X. Exemplarily, referring to Fig.12 , the limit block 8 can be set at a symmetrical center of the body 1. For example, Fig.13 This is a schematic diagram of a structure in which a limiting block 8 is provided in a main body 1 according to another embodiment of the present application. Fig.14 for Fig.13 Top view of Fig.13 and Fig.14 , the limit blocks 8 can also be arranged at two corners of the diagonal line of the body 1. In some other embodiments, the limit blocks 8 can also be arranged at all four corners, or the limit blocks 8 are arranged at other positions where the tray 3 can be clamped and fixed.

[0098] Among them, the at least two limit blocks 8 distributed at both ends of the body 1 can limit the position of the tray 3 in the first direction X, and because the two ends of the tray 3 in the second direction Y are respectively in contact with the side walls of the body 1, the tray 3 can be limited in the second direction Y, thereby ensuring the stability of the tray 3 in the first cavity 11 and preventing shaking. In addition, a gap 81 is provided between the limit block 8 and the adjacent side wall of the body 1, so that after the tray 3 is installed, the two ends of the tray 3 in the first direction X can form the above-mentioned second gap 13 and third gap 14 with the body 1, respectively, to facilitate the input and output of the carrier gas.

[0099] As a specific implementation method, Fig.15 A schematic diagram of the structure of a tray 3 provided in another embodiment of the present application, referring to Figure 4 and Fig.15 The tray 3 includes a first side wall 35, a second side wall 36, a third side wall 37, a fourth side wall 38 and a bottom plate 39. The first side wall 35 and the second side wall 36 are connected to two ends of the bottom plate 39 in the first direction X, the third side wall 37 and the fourth side wall 38 are connected to two ends of the bottom plate 39 in the second direction Y, and the first side wall 35, the second side wall 36, the third side wall 37, the fourth side wall 38 and the bottom plate 39 enclose a second cavity 33. In this embodiment, the tray 3 is formed into a rectangular parallelepiped structure by four side walls and a bottom plate 39, so that a second cavity 33 is formed between the four side walls and a bottom plate 39 to accommodate the precursor.

[0100] Fig.16 A side view of the tray 3 provided in the embodiment of the present application, referring to Fig.16 Along the third direction Z, the height of the second side wall 36 is less than the height of the third side wall 37 and the fourth side wall 38, and an air outlet 32 ​​is formed between an end of the second side wall 36 away from the bottom plate 39 and the third side wall 37 and the fourth side wall 38; correspondingly, along the third direction Z, the height of the first side wall 35 is less than the height of the third side wall 37 and the fourth side wall 38, and an air inlet 31 is formed between an end of the first side wall 35 away from the bottom plate 39 and the third side wall 37 and the fourth side wall 38.

[0101] Among them, when multiple trays 3 are stacked and arranged in the main body 1, the bottom plate 39 of the upper tray 3 can be pressed on the third side wall 37 and the fourth side wall 38 of the lower tray 3, so that the bottom plate 39 of the upper tray 3 does not contact the first side wall 35 and the second side wall of the lower layer. That is to say, an air inlet 31 and an air outlet 32 ​​are formed between the bottom plate 39 of the upper tray 3 and the first side wall 35 and the second side wall 36 of the lower tray 3. The carrier gas can only enter the channel 34 through the air inlet 31 and bring the precursor out from the air outlet 32. Therefore, the air inlet 31 and the air outlet 32 ​​formed by the cooperation of two adjacent layers of trays 3 can constrain the flow path of the carrier gas, while reducing the space occupied and preventing the carrier gas from flowing to positions other than the air inlet 31 and the air outlet 32, thereby improving the utilization rate of the carrier gas and improving the mass transfer efficiency.

[0102] In order to improve the structural reliability of the tray 3, the tray 3 can be an integrally formed structure, that is, during the processing and manufacturing of the tray 3, the above-mentioned side walls and the bottom plate 39 can be integrally formed, and of course, the first partitions 4 can also be integrally formed.

[0103] As a specific implementation method, refer to Fig.16, along the third direction Z, the bottom of the first baffle 4 is connected to the bottom plate 39, and the top of the first baffle 4 protrudes from the first side wall 35 and the second side wall 36. When the carrier gas enters the gas inlet 31, the carrier gas can be guided by each first baffle 4 to enter the channel 34 between any two adjacent first baffles 4, and can be evenly distributed in each channel 34, so as to ensure the uniformity of mass transfer in each channel 34.

[0104] As a specific implementation method, refer to Fig.16 The top of the first partition plate 4 is flush with the top of the third side wall 37 and the top of the fourth side wall 38, and is used to contact the bottom of the cover body 2, or the bottom of the tray 3 on the adjacent upper layer.

[0105] Exemplarily, for two adjacent layers of trays 3, the bottom of the tray 3 on the upper layer can be pressed against the top of the first partition 4, the third side wall 37 and the fourth side wall 38 on the tray 3 on the adjacent lower layer, so that the top of the channel 34 in the tray 3 on the adjacent lower layer can be closed, so that the carrier gas can only flow through the channel 34, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel 34, thereby improving the mass transfer efficiency.

[0106] Exemplarily, for the top-layer tray 3, the cover 2 can be pressed against the top of the first partition 4, the third side wall 37 and the fourth side wall 38 on the top-layer tray 3, so that the top of the channel 34 of the top-layer tray 3 can be closed, and it can also ensure that the carrier gas located at the top-layer tray 3 can only flow from the channel 34, thereby ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel 34, thereby improving the mass transfer efficiency.

[0107] As a specific implementation method, refer to Figure 6 , along the third direction Z, the bottom of the tray 3 at the bottom layer is in contact with the body 1. In this embodiment, the bottom of the tray 3 at the bottom layer can be a plane, and the bottom of the first cavity 11 can also be a plane, so that the bottom of the tray 3 at the bottom layer can be in contact with the bottom of the first cavity 11, and the gap between the bottom of the tray 3 at the bottom layer and the body 1 can be eliminated, so that the carrier gas can be prevented from passing between the bottom of the tray 3 at the bottom layer and the body 1, and cannot participate in the mass transfer process of mixing with the precursor, resulting in carrier gas waste and reduced mass transfer efficiency.

[0108] As a specific implementation method, refer to Fig.16, the width H1 of the air inlet 31 and the air outlet 32 ​​in the third direction Z needs to be within an appropriate width range to ensure that the carrier gas is evenly distributed in each channel 34 and can ensure sufficient mixing with the precursor to ensure mass transfer efficiency. If the width H1 of the air inlet 31 and the air outlet 32 ​​is too large, for example, greater than 2 mm, the carrier gas is more inclined to flow from the air inlet 31 close to the air inlet hole 21. For example, the carrier gas input from the air inlet 21 on the cover body 2 will pass more from the air inlet 31 on the top tray 3, while the flow rate of the carrier gas passing through the trays 3 on the lower layers is less, which leads to uneven distribution of the carrier gas in each layer of the tray 3 and reduces the mass transfer efficiency. If the width H1 of the air inlet 31 and the air outlet 32 ​​is too small, for example, less than 0.5 mm, the resistance of the carrier gas at each air inlet 31 will be too large, which is not conducive to the flow of the carrier gas. To this end, in this embodiment, the width H1 of the air inlet 31 and the air outlet 32 ​​in the third direction Z may be between 0.5 mm and 2 mm, so as to ensure uniform distribution of the carrier gas in each layer of the tray 3 and improve the mass transfer efficiency. Specifically, the width H1 of the air inlet 31 and the air outlet 32 ​​in the third direction Z may be 0.5 mm, 0.8 mm, 1.1 mm, 1.4 mm, 1.7 mm or 2 mm.

[0109] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A precursor container, characterized in that: include: A main body, wherein a first cavity is disposed in the main body; at least one tray, the tray is arranged in the first cavity, an air inlet is arranged at one end of the tray along the first direction, and an air outlet is arranged at the other end of the tray; a second cavity is arranged in the tray, at least one first partition is arranged in the second cavity, the first partition extends along the first direction, the first partition divides the second cavity into a plurality of channels, the air inlet is communicated with one end of the plurality of channels, and the air outlet is communicated with the other end of the plurality of channels; A cover body, the cover body is buckled with the body, an air inlet and an air outlet are provided on the cover body, the air inlet is communicated with the air inlet, and the air outlet is communicated with the air outlet; at least one second partition is provided on a side of the cover body facing the body, the second partition extends along a second direction, and the second direction is perpendicular to the first direction; At least one of the first partition plate and the second partition plate is provided with a gap, the first partition plate and the second partition plate are plugged into each other through the gap, and there is a first gap between the bottom surface of the channel and the second partition plate in a third direction, and the third direction is perpendicular to the first direction and the second direction.

2. The precursor container according to claim 1, characterized in that: The trays are provided in plurality, and the plurality of trays are stacked in the third direction; The second partition is provided on a side of at least part of the tray facing away from the second cavity, and the second partition of the tray located at the upper layer is plugged into the first partition of the tray located at an adjacent layer below through the gap.

3. The precursor container according to claim 1 or 2, characterized in that: Along the first direction, there is a second gap between the end of the tray where the air inlet is provided and the body, there is a third gap between the end of the tray where the air outlet is provided and the body, the air inlet is connected to the second gap, and the air outlet is connected to the third gap.

4. The precursor container according to claim 3, characterized in that: At least two limit blocks are arranged in the first cavity, and the at least two limit blocks are respectively arranged at two ends of the first cavity in the first direction, one end of the tray in the first direction contacts with at least one limit block for limit, and the other end of the tray in the first direction contacts with at least another limit block for limit; There is a gap between at least one of the limit blocks and one side wall of the body in the first direction, and there is a gap between at least another of the limit blocks and another side wall of the body in the first direction.

5. The precursor container according to claim 3, characterized in that: The two side walls of the tray in the second direction are respectively in contact with the inner wall of the body.

6. The precursor container according to any one of claims 1 to 5, characterized in that: The tray comprises a first side wall, a second side wall, a third side wall, a fourth side wall and a bottom plate, wherein the first side wall and the second side wall are connected to two ends of the bottom plate in the first direction, the third side wall and the fourth side wall are connected to two ends of the bottom plate in the second direction, and the first side wall, the second side wall, the third side wall, the fourth side wall and the bottom plate enclose the second cavity; Along the third direction, the height of the first side wall is smaller than the heights of the third side wall and the fourth side wall, and the air inlet is formed between an end of the first side wall away from the bottom plate and the third side wall and the fourth side wall; Along the third direction, the height of the second side wall is smaller than that of the third side wall and the fourth side wall, and the air outlet is formed between an end of the second side wall away from the bottom plate and the third side wall and the fourth side wall.

7. The precursor container according to claim 6, characterized in that: Along the third direction, the bottom of the first partition is connected to the bottom plate, and the top of the first partition protrudes from the first side wall and the second side wall.

8. The precursor container according to claim 7, characterized in that: The top of the first partition is flush with the top of the third side wall and the top of the fourth side wall, and is used to contact the bottom of the cover body, or the bottom of the tray of the adjacent upper layer.

9. The precursor container according to any one of claims 1 to 8, characterized in that: The first partition is a continuous long plate-shaped structure, and the second partition is provided with the gap.

10. The precursor container according to any one of claims 1 to 8, characterized in that: The second partition is a continuous long plate-shaped structure, and the first partition is provided with the gap.

11. The precursor container according to any one of claims 1 to 10, characterized in that: A plurality of the first partitions and a plurality of the second partitions are provided, and the plurality of the first partitions are evenly spaced and distributed in the second direction, and the plurality of the second partitions are evenly spaced and distributed in the first direction.

12. The precursor container according to any one of claims 1 to 11, characterized in that: Along the third direction, the bottom of the tray located at the bottom layer is in contact with the body.

13. The precursor container according to any one of claims 1 to 12, characterized in that: The width of the air inlet and the air outlet in the third direction is between 0.5 mm and 2 mm.

14. The precursor container according to any one of claims 1 to 13, characterized in that: The width of the first gap is between 3 mm and 6 mm.

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