Rotor device with improved cover capable of balancing weight
By designing a rotor device with an improved cover with counterweight balance, the problems of dust accumulation and center of gravity deviation during high-speed operation are solved, and the stability and balance during high-speed operation are achieved, which extends the equipment Service life.
Patent Information
- Application Number
- CN202411905030.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-02-14
AI Technical Summary
During semiconductor manufacturing, turbomolecular vacuum pumps are prone to dust accumulation when operating at high speed, resulting in reduced vacuum efficiency and rotor balance imbalance, and may even lead to failure. Although existing methods to prevent dust accumulation can alleviate the problem, dust accumulation will still occur when it is not cleaned or operated for a long time, and there are already covers that may cause vibration or center of gravity to shift at high speed.
A rotor device with an improved cover that can be counterweighted balanced is designed, the device including a rotating shaft, a rotor body, a cover, a linking unit, a reinforcement unit and a counterweight unit. The counterweight unit is arranged on the linking unit, located between the reinforcement unit and the rotating shaft. The counterweight unit contains a plurality of counterweight grooves, and weights can be placed to adjust the balance to ensure stability during high-speed operation.
Through this device, dust accumulation problems in the turbomolecular vacuum pump during high-speed operation can be effectively avoided, and the rotor balance can be maintained, the center of gravity shift and wear can be prevented, and the service life of the equipment can be extended.
Smart Images
Figure CN119435426A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a rotor device with an improved cover capable of counterweight balancing, in particular to a rotor device with an improved cover capable of counterweight balancing arranged on a turbomolecular vacuum pump. Background Art
[0002] In semiconductor manufacturing, turbomolecular vacuum pumps play a very important role and are mainly used in various processes that require high vacuum, because the semiconductor manufacturing process needs to be carried out in a highly controlled environment to ensure the stability and accuracy of the process. Turbomolecular vacuum pumps are commonly used in semiconductor manufacturing in scenarios such as chemical vapor deposition, physical vapor deposition, photolithography and etching. Turbomolecular vacuum pumps can not only ensure the stability and accuracy of the process in the above scenarios, but also because of their high pumping speed and high vacuum, they can effectively control the concentration of trace gases in the process to achieve higher production quality and yield. However, because of its use in the above-mentioned environments, the pump runs at an extremely high speed and has a tight structure, and there is a risk of dust accumulation. If dust-containing gases are inhaled, fine particles may be deposited on the internal structure. Excessive dust accumulation may affect the vacuum efficiency and rotor balance of the pump, and even cause failures.
[0003] Currently, most of the known prevention of dust accumulation is to avoid dust accumulation through regular maintenance or keeping the environment clean as much as possible. Some operators will even pre-treat the gas, using a fore pump or filter to filter the gas before it enters the molecular pump to reduce the entry of particulate matter. Although the above methods can slow down the rate of dust accumulation, dust accumulation will occur if cleaning is not performed for a long time or the vacuum pump is operated for a long time. In response to this situation, some manufacturers have designed a cover that can cover the rotor opening. Although the cover is effective in preventing dust accumulation, most of its locking methods will still cause vibration or center of gravity deviation when the rotor rotates at high speed. If this situation is not discovered in time, it is likely to cause wear and tear between the cover and the rotor, or even loosening, causing failure or damage.
[0004] Therefore, how to design a device that can prevent dust from accumulating at the rotor opening of a turbomolecular vacuum pump while maintaining its center of gravity without deviation and sufficient stability is an issue that the industry is eager to solve. Summary of the invention
[0005] The object of the present invention is to overcome the above-mentioned disadvantages and to provide a rotor device with an improved cover capable of counterweight balancing, comprising:
[0006] A rotating shaft, one end of which is arranged on a turbomolecular vacuum pump; a rotor body, which is connected to the other end of the rotating shaft and has a locking space relative to one end of the rotating shaft; a cover, which includes a link unit, one end of which is arranged on one end of the rotating shaft; a reinforcement unit, which is connected to the other end of the link unit relative to the rotating shaft; and a counterweight unit, which is arranged on the link unit and located between the reinforcement unit and the rotating shaft. The rotor device with the improved cover capable of counterweight balance is used to avoid dust accumulation and center of gravity deviation that may be generated when the turbomolecular vacuum pump is running at high speed.
[0007] The rotor device with the improved cover capable of counterweight balancing is characterized in that the counterweight unit is provided with a plurality of counterweight slots.
[0008] The rotor device with the improved cover capable of counterweight balancing is characterized in that the plurality of counterweight grooves can be filled with weights and can be adjusted according to the rotor balance to achieve high-speed and stable operation.
[0009] The rotor device with the improved cover capable of counterweight balancing is characterized in that the counterweight unit is further provided with a screw-on assembly, and the screw-on assembly is arranged on the bottom side of the counterweight unit.
[0010] The rotor device with the improved cover capable of counterweight balancing is characterized in that the cover is further provided with a reinforcing unit, which is located at the bottom of the cover and is linked to the linking unit.
[0011] The rotor device with the improved cover capable of counterweight balancing, wherein the link unit has at least one fixing groove.
[0012] The rotor device with the improved cover capable of counterweight balancing has a locking space at one end of the rotor body relative to the rotating shaft.
[0013] The rotor device with the improved cover capable of counterweight balancing is characterized in that the counterweight unit is an aluminum alloy counterweight unit.
[0014] The rotor device with the improved cover capable of counterweight balancing is characterized in that a plurality of fixing components are arranged at the bottom of the locking space.
[0015] The rotor device with the improved cover capable of counterweight balancing is characterized in that the sizes and spacings of the plurality of counterweight grooves are equal. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 The figure is a side cross-sectional view of a rotor device with an improved cover capable of being weighted and balanced according to the present invention.
[0017] Figure 2 The present invention is a three-dimensional diagram of a rotor device with an improved cover capable of counterweight balancing.
[0018] Figure 3 The figure is a side view of a rotor device with an improved cover capable of counterweight balancing according to the present invention.
[0019] In the figure, 1. a rotor device of an improved cover capable of counterweight balancing; 10. a turbomolecular vacuum pump; 20. a rotating shaft; 30. a rotor body; 40. a locking space; 50. a cover; 60. a link unit; 601. a fixing groove; 70. a counterweight unit; 701. a counterweight groove; 702. a screw-on assembly; 80. a reinforcement unit; 90. a fixing assembly. DETAILED DESCRIPTION
[0020] The present invention is further described below with reference to the accompanying drawings and embodiments.
[0021] Since the basic principles of the structure or other accommodation methods used in the rotor device with a counterweighted and balanced improved cover of the present invention are already known to those with ordinary knowledge in the relevant technical field, a complete description will not be given in the following description. At the same time, the accompanying drawings in the following text are schematic diagrams of structures related to the features of the present invention, and are not and do not need to be fully drawn according to actual sizes, so this is hereby explained.
[0022] like Figure 1 FIG. 1 is a schematic diagram of a rotor device 1 of an improved cover capable of counterweight balancing according to the present invention. Figure 2 This is a three-dimensional diagram of the cover 50 proposed by the present invention. Figure 3 It is a schematic diagram of the combination of the cover 50 and the counterweight unit 70 provided by the present invention.
[0023] The rotor device 1 of the improved cover with counterweight balance includes a rotating shaft 20, one end of which is arranged on the turbomolecular vacuum pump 10; and a rotor body 30, which is connected to the other end of the rotating shaft 20, and the rotor body 30 has a locking space 40 at one end relative to the rotating shaft 20; and a cover 50, which includes one end of a link unit 60 arranged at one end of the rotating shaft 20; and a reinforcement unit 80, which is connected to the other end of the link unit 60 relative to the rotating shaft 20; and a counterweight unit 70, which is arranged on the link unit 60 and is located between the reinforcement unit 80 and the rotating shaft 20.
[0024] For example, after the rotor device 1 with the improved counterweight-balanced cover is installed, the turbomolecular vacuum pump 10 is started when processing is to be carried out, and the turbomolecular vacuum pump 10 can drive the rotating shaft 20 to rotate, and the rotating shaft 20 will drive the rotor body 30 to operate, and the above content can achieve the function of vacuum extraction; and the link unit 60 is connected to the rotating shaft 20, and then the counterweight unit 70 is placed in the locking space 40, and finally the reinforcement unit 80 at the bottom of the cover 50 is connected to the link unit 60, so that the cover 50 can be supported on the top of the rotor body 30, and the opening of the locking space 40 can be completely covered, thereby preventing the particle dust generated during processing from being deposited in the locking space 40; the above is only an example and is not limited to this.
[0025] Preferably, the counterweight unit 70 is further provided with a plurality of counterweight slots 701. For example, when the turbomolecular vacuum pump is in operation, the rotor device thereof operates at high speed. If the dust cover attached is not completely fixed or the weight distribution is unbalanced, it may cause the related mechanism parts to wear or loosen, thus causing damage to the equipment. Therefore, before operation, the user may place the weights in the counterweight slots 701 according to different scenarios and the angles of the equipment connection. According to the formula of the moment of inertia I=∑mr 2 When weights are added to the periphery of the rotating shaft, the mass distribution can be made farther away from the center of rotation. The larger the mass is, the farther it is from the center, the greater the moment of inertia, which can increase the stability of the angular momentum and make the center of rotation less likely to shift due to small interferences, thereby achieving the effect of maintaining its center of gravity.
[0026] Preferably, the counterweight unit 70 is further provided with a screw-on assembly 702, which is arranged on the bottom side of the counterweight unit 70. When installing, the screw-on assembly 702 will first be fixed at a specific height of the link unit 60. The actual situation may vary depending on the height adjustment of the usage scenario. The counterweight unit 70 is then placed in connection with the link unit 60. The top of the screw-on assembly 702 has an internal thread in the opposite direction to that of the rotor device when it is in operation. The internal thread can be combined with the external thread at the bottom of the counterweight unit 70. Accordingly, when the rotor device is running, the counterweight unit 70 and the screw-on assembly 702 have the opposite thread direction to that during operation, thereby achieving the function of strengthening fixation and providing stability.
[0027] Preferably, the cover 50 is further provided with a reinforcement unit 80, which is located at the bottom of the cover 50 and connected to the other end of the link unit 60 relative to the rotating shaft 20. When the link unit 60 and the counterweight unit 70 are installed in the locking space 40, the cover 50 will be screwed tightly to cover the locking space 40. The link unit 60 and the reinforcement unit 80 also have internal and external threads in the opposite direction to the direction when the rotor device is operating. When the cover 50 is screwed to the tightest, the reinforcement unit 80 will be engaged with the corresponding snap-in structure in the locking space 40, thereby achieving the effect of reinforcing and stabilizing the cover.
[0028] Preferably, the link unit 60 has at least one fixing groove 601; when installing the rotor device 1 of the improved counterweight-balanced cover, since one end of the link unit 60 needs to be set on the rotating shaft 20 relative to the turbomolecular vacuum pump 10, and the link unit 60 is a cylinder, in order to ensure that the link unit 60 is fixed tightly enough, the fixing groove 601 allows the installer to clamp the part through a tool to ensure that the surface has a sufficiently stable friction force before tightening the link unit 60 to the rotating shaft 20, thereby achieving the function of tight locking.
[0029] Preferably, the rotor body 30 has a locking space 40 at one end relative to the rotating shaft 20; when the turbomolecular vacuum pump 10 is in operation, fine dust or particles may still be generated due to different environments and gases used. If the dust or particles fall into the locking space 40, the cover 50 is tightly attached to the top side of the locking space 40, which can effectively intercept the fallen dust or particles from floating out of the locking space 40 again due to airflow disturbance during operation, thereby reducing the pollution or damage to the processed products.
[0030] Preferably, the counterweight unit 70 is an aluminum alloy counterweight unit; due to the light weight and high strength of aluminum alloy, the counterweight unit 70 can withstand the torque generated by high-speed operation, and its corrosion resistance can also avoid the influence of pH differences caused by gases generated by different processed products.
[0031] Preferably, the bottom of the locking space 40 is provided with a plurality of fixing components 90, and the plurality of fixing components 90 are used to fix the rotating shaft 20 and the rotor body 30. One end of the plurality of fixing components 90 is the bottom side of the locking space 40, and the other end is connected to the rotating shaft 20, thereby fixing the rotor body 30 on the rotating shaft 20.
[0032] Preferably, the size and spacing of the plurality of counterweight grooves 701 are equal. In the semiconductor industry, in order to achieve a specific vacuum degree during operation of the turbomolecular vacuum pump 10, its rotation speed is mostly between about 24,000 and 36,000 RPM. In order to maintain the stability of the mechanical components under this high-speed operation, specific weights can be placed in the plurality of counterweight grooves 701. Due to the fixed spacing design, the user can adjust the number of weights or the spacing of the weights according to the environment and the processed products. The stability of the angular momentum during operation can be adjusted accordingly to achieve the effect of avoiding the center of gravity shift during high-speed operation.
[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the patent application rights of the present invention. At the same time, the above description should be understandable and implementable for professionals familiar with the technical field. Therefore, other equivalent changes or modifications that do not deviate from the spirit disclosed by the present invention should be included in the scope of the patent application.
Claims
1. A rotor device (1) having an improved cover capable of counterweight balancing, for being arranged in a turbomolecular vacuum pump (10), characterized in that: include: a rotating shaft (20), one end of which is disposed on the turbomolecular vacuum pump (10); and A rotor body (30) connected to the other end of the rotating shaft (20) and having a locking space (40) at one end of the rotor body (30) relative to the rotating shaft; and A cover (50), comprising; a link unit (60), one end of which is disposed at one end of the rotating shaft (20); and a reinforcing unit (80), one end of which is linked to the other end of the linking unit (60); and A counterweight unit (70) is disposed on the link unit (60) and is located between the reinforcement unit (80) and the rotating shaft (20).
2. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 1, characterized in that: The counterweight unit (70) is provided with a plurality of counterweight slots (701).
3. A rotor device with a counterweight-balanced improved cover as claimed in claim 2, characterized in that: The plurality of weight slots (701) can be loaded with weights and can be adjusted according to the rotor balance to achieve high-speed stable operation.
4. A rotor device with a counterweight-balanced improved cover as claimed in claim 2, characterized in that: The counterweight unit (70) is further provided with a screw-on assembly (702), and the screw-on assembly (702) is arranged on the bottom side of the counterweight unit.
5. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 1, characterized in that: The cover (50) is further provided with a reinforcement unit (80), which is located at the bottom of the cover (50) and is linked to the link unit (60).
6. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 1, characterized in that: The link unit (60) has at least one fixing groove (601).
7. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 1, characterized in that: The rotor body (30) has a locking space (40) at one end thereof opposite to the rotating shaft (20).
8. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 2, characterized in that: The counterweight unit (70) is made of aluminum alloy material.
9. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 1, characterized in that: A plurality of fixing components (90) are provided at the bottom of the locking space (40).
10. A rotor device with an improved cover capable of counterweight balancing as claimed in claim 2, characterized in that: The sizes and spacings of the plurality of counterweight grooves (701) are equal.