Beam line mirror box and light transmission system

Abstract

The embodiment of the invention provides a light beam line mirror box and a light transmission system, and relates to the technical field of optics. The beam line mirror box comprises a base, a first posture adjusting mechanism, an optical element and a circulating cooling mechanism, the first posture adjusting mechanism comprises a fixed frame, a movable component, a first driving and supporting mechanism and a plurality of flexible hinges, the fixed frame is located on the base, the movable component is located in the fixed frame and connected with the fixed frame through the flexible hinges, and the first driving and supporting mechanism is located in the movable component; the first driving supporting mechanism is connected with the movable component; the optical element is connected to the movable component through the optical element supporting mechanism. The circulating cooling mechanism comprises a cooling block, a cooling block supporting mechanism and a circulating cooling pipeline, the cooling block is connected to the fixing frame through the cooling block supporting mechanism, and the cooling block is used for absorbing heat generated by the optical element. According to the embodiment of the invention, the flexible hinge is arranged in the vibration transmission path, the vibration transmission effect of the flexible hinge is relatively weak, the transmission of flow-induced vibration is weakened to a great extent, and the system stability is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of optical technology, and in particular to a beam line mirror box and a light transmission system. Background Art

[0002] The beamline mirror box is a key device in synchrotron radiation sources. It is used to carry and precisely adjust optical components, such as reflectors and focusing mirrors, to control the direction and intensity of the beam. These optical components need to withstand high heat loads in high-energy synchrotron radiation sources, so a circulating cooling mechanism is usually required to cool them down.

[0003] In order to ensure the coherent transmission of light beams, extremely high requirements are usually placed on the structural stability of optical components. However, the fluid in the circulating cooling mechanism in the beamline mirror box will produce flow-induced vibrations, which will have an adverse effect on the stability of the optical components. In particular, when the mirror structure needs to be adjusted in attitude according to physical design requirements, the cooling circulation pipeline also needs to cooperate with the movement. In conventional designs, the pipeline support structure is coupled with the mirror attitude adjustment mechanism, and the pipeline fluid vibration is transmitted to the mirror through the above mechanical coupling path, which will cause structural stability problems. If a decoupling design is considered, it is necessary to add a pipeline attitude synchronization adjustment mechanism, which is difficult in terms of space arrangement and structural design. How to reduce the structural vibration transmission efficiency to an acceptable range without increasing the complexity of the structure as much as possible is a technical problem that needs to be solved at present. Summary of the invention

[0004] The present application provides a beam line mirror box and a light transmission system, which are intended to reduce flow-induced vibrations transmitted to optical elements and ensure the structural stability of the optical elements.

[0005] In a first aspect, the present application provides a beam line mirror box, which includes a base, a first posture adjustment mechanism, an optical element and a circulating cooling mechanism, wherein the first posture adjustment mechanism includes a fixed frame, a movable component, a first drive support mechanism, an optical element support mechanism and a plurality of flexible hinges, the fixed frame is located on the base, the movable component is located in the fixed frame and is connected to the fixed frame through a plurality of flexible hinges, the first drive support mechanism is connected to the movable component; the optical element is connected to the movable component through the optical element support mechanism; the circulating cooling mechanism includes a cooling block, a cooling block support mechanism and a circulating cooling pipe, the cooling block is connected to the fixed frame through the cooling block support mechanism, a circulating medium is contained in the cooling block, the circulating cooling pipe is connected to the cooling block, the circulating cooling pipe is used to circulate the circulating medium to the cooling block, and the cooling block is used to absorb the heat generated by the optical element.

[0006] The beam line mirror box provided in the present application, the first posture adjustment mechanism for adjusting the posture of the optical element includes a fixed frame, a movable component, a first drive support mechanism and a plurality of flexible hinges, the fixed frame is located on the base, the movable component is located in the fixed frame and is connected to the fixed frame through a plurality of flexible hinges, the first drive support mechanism is connected to the movable component, the optical element is connected to the movable component through the optical element support mechanism, the movable component can be driven by the first drive support mechanism, the movable component rotates relative to the fixed frame under the elastic deformation of the flexible hinge, and then drives the optical element to adjust its posture. The circulating cooling mechanism includes a cooling block, a cooling block support mechanism and a circulating cooling pipeline, the cooling block is connected to the fixed frame through the cooling block support mechanism, there is a circulating medium in the cooling block, the circulating cooling pipeline is connected to the cooling block, the circulating cooling pipeline is used to circulate the circulating medium to the cooling block, the circulating circulating medium quickly absorbs the heat of the optical element, and keeps the optical element working in a stable temperature environment. The flow-induced vibration generated by the circulating cooling mechanism will be transmitted to the optical element through the first posture adjustment mechanism. In the embodiment of the present application, a flexible hinge structure is arranged in the vibration transmission path. The flexible hinge structure has a weak effect on vibration transmission, thereby greatly weakening the transmission of flow-induced vibration and improving system stability.

[0007] In a possible implementation, the beam line mirror box further includes a vacuum box, and the optical element is located in the vacuum box.

[0008] In a possible implementation, the beam line mirror box further includes a vacuum box support mechanism, the vacuum box is supported above the first posture adjustment mechanism by the vacuum box support mechanism, and the optical element and the circulating cooling mechanism are both located in the vacuum box.

[0009] In a possible embodiment, the bottom surface of the vacuum box has a first through hole opposite to the fixed frame and a second through hole opposite to the movable component, a first vacuum bellows is arranged between the first through hole and the fixed frame, a cooling block support mechanism is passed through the first vacuum bellows, a second vacuum bellows is arranged between the second through hole and the movable component, and an optical element support mechanism is passed through the second vacuum bellows.

[0010] In a possible implementation, a medium containing groove is provided on the top surface of the optical element, and liquid heat exchange medium is contained in the medium containing groove. The cooling block is partially located in the medium containing groove and immersed in the liquid heat exchange medium. The cooling block is indirectly in contact with the optical element through the liquid heat exchange medium.

[0011] In a possible implementation, the liquid heat exchange medium is an indium gallium liquid alloy.

[0012] In a possible implementation, the beam line mirror box further includes a second posture adjustment mechanism, the second posture adjustment mechanism is located on the base, and the fixing frame is connected to the second posture adjustment mechanism.

[0013] In a possible embodiment, the second posture adjustment mechanism includes a fixed frame support mechanism, which is connected to the fixed frame. The fixed frame support mechanism includes a support plane and a plurality of support columns located on the support plane. The support plane is connected to the second posture adjustment mechanism, and the plurality of support columns are respectively connected to the fixed frame, and a movable space for the movable component is formed between the plurality of support columns.

[0014] In a possible implementation, the flexible hinge is a flexible long rod-shaped structure, one end of the flexible hinge is connected to the fixed frame, and the other end of the flexible hinge is connected to the movable component.

[0015] The second aspect of the present application provides an optical transmission system, which includes a control device and a beam line mirror box as described in the first aspect above; the control device is used to control the first driving support mechanism in the beam line mirror box to drive the movable component to finely adjust the posture of the optical element through the movable component.

[0016] The optical transmission system provided in the second aspect includes the beam line mirror box provided in the first aspect, and therefore has the same technical effects as those of the beam line mirror box provided in the first aspect, which will not be described in detail herein.

[0017] It should be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of a beam line mirror box provided in one embodiment of the present application; Figure 2 A schematic diagram of a connection structure between a fixed frame and a movable component provided in one embodiment of the present application; Figure 3 A schematic diagram of the structure of a beam line mirror box provided in another embodiment of the present application; Figure 4 A schematic structural diagram of a beam line mirror box provided in yet another embodiment of the present application.

[0019] Reference numerals: 10-base, 20-first posture adjustment mechanism, 21-fixed frame, 22-movable component, 23-first drive support mechanism, 24-flexible hinge, 30-optical element, 40-circulating cooling mechanism, 41-cooling block, 42-cooling block support mechanism, 43-circulating cooling pipeline, 51-vacuum box, 52-vacuum box support mechanism, 61-first vacuum bellows, 62-second vacuum bellows, 80-second posture adjustment mechanism, 81-fixed frame support mechanism. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0021] It should be noted that, in the description of this application, unless otherwise clearly specified and limited, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance; unless otherwise specified or explained, the term "at least one" refers to one or more, and the term "multiple" refers to two or more; the terms "connected", "fixed", etc. should be understood in a broad sense, for example, "connected" can be a fixed connection, a detachable connection, an integral connection, or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0022] The beamline mirror box is a key device in synchrotron radiation sources. It is used to carry and precisely adjust optical components, such as reflectors and focusing mirrors, to control the direction and intensity of the beam. These optical components need to withstand high heat loads in high-energy synchrotron radiation sources, so a circulating cooling mechanism is usually required to cool the optical components. The circulating cooling mechanism can effectively remove the heat generated by the optical components and keep the components working within an ideal temperature range, thus avoiding optical distortion caused by excessive temperature and ensuring the accuracy and stability of the optical components, thereby ensuring the transmission efficiency of the synchrotron radiation beamline and the quality of optical experiments.

[0023] In order to ensure the coherent transmission of the light beam, there are extremely high requirements for the structural stability of the optical elements in the beamline mirror box. Specifically, the optical elements are required to have stability while ensuring extremely high static surface accuracy, especially the vibration root mean square (RMS) in the low frequency range (such as 1-100Hz) is required to be less than 100nm. However, the fluid in the circulating cooling mechanism in the beamline mirror box will produce flow-induced vibration, which will have an adverse effect on the stability of the optical elements. In order to reduce flow-induced vibration, in the prior art, when the mirror structure needs to be adjusted according to the physical design requirements, the cooling circulation pipeline also needs to cooperate with the movement. In the conventional design, the pipeline support structure is coupled with the mirror body posture adjustment mechanism, and the pipeline fluid vibration is transmitted to the mirror body through the above mechanical coupling path, which will bring structural stability problems. If the decoupling design is considered, it is necessary to add a pipeline posture synchronization adjustment mechanism, which is difficult in terms of space arrangement and structural design. How to reduce the structural vibration transmission efficiency to an acceptable range without increasing the structural complexity as much as possible is a technical problem that needs to be solved at present.

[0024] In view of this, the present application provides a beam line mirror box and a light transmission system, which are intended to reduce the flow-induced vibration transmitted to the optical elements and improve the stability of the system.

[0025] It should be noted that the beamline mirror box provided in the present application can be applied to an optical transmission system, which may also include a synchrotron radiation source, and the beamline mirror box is arranged outside the synchrotron radiation source, and the light emitted by the synchrotron radiation source is processed into a beam that meets the experimental requirements through the optical elements in the mirror box. Specifically, the light emitted by the synchrotron radiation source is called "white light", which includes a wide range of wavelengths from infrared to X-rays. According to the experimental requirements, these lights are processed by the optical elements of the beamline mirror box (including splitting, collimation, focusing and other steps) to form monochromatic light with specific spectral energy, photon flux, energy resolution, polarization characteristics and beam spot size and other parameters, and the monochromatic light is transmitted to the experimental product. The beamline mirror box provided in the present application has good temperature stability and vibration stability, which can ensure that the performance indicators of the beam line can meet the experimental requirements.

[0026] See also Figure 1 , is a schematic diagram of the structure of a beam line mirror box provided in one embodiment of the present application. Figure 1 As shown, the beam line mirror box includes a base 10, a first posture adjustment mechanism 20, an optical element 30 and a circulating cooling mechanism 40.

[0027] Among them, the first posture adjustment mechanism 20 includes a fixed frame 21, a movable component 22, a first driving support mechanism (shown in the figure), an optical element support mechanism 23 and a plurality of flexible hinges 24. The fixed frame 21 is located on the base 10, the movable component 22 is located in the fixed frame 21 and is connected to the fixed frame 21 through a plurality of flexible hinges 24, and the first driving support mechanism is connected to the movable component 22; the optical element 30 is connected to the movable component 22 through the optical element support mechanism 23.

[0028] In the embodiment of the present application, the first posture adjustment mechanism 20 is used to finely adjust the posture of the optical element 30. The movable component 22 in the first posture adjustment mechanism 20 is connected to the fixed frame 21 through a flexible hinge 24.

[0029] See also Figure 2 , is a schematic diagram of the connection structure of the fixed frame 21 and the movable member 22 provided in one embodiment of the present application. Figure 2As shown, in the embodiment of the present application, the movable component 22 is arranged in the hollow area of ​​the fixed frame 21, and a space for installing the flexible hinge 24 is reserved between the movable component 22 and the fixed frame 21. A plurality of flexible hinges 24 are arranged around the periphery of the movable component 22 to realize an elastic connection between the movable component 22 and the fixed frame 21. When the first driving support mechanism drives the movable component 22 to rotate, the fixed frame 21 remains stationary, and the movable component 22 rotates relative to the fixed frame 21 under the elastic support of the flexible hinges 24.

[0030] In some embodiments of the present application, the flexible hinge 24 is a flexible long rod-shaped structure, one end of the flexible hinge 24 is connected to the fixed frame 21 , and the other end of the flexible hinge 24 is connected to the movable component 22 .

[0031] The flexible hinge 24 uses the bending deformation of elastic materials to achieve force and motion transmission, and has high rigidity and resolution, so the small deformation of the flexible hinge 24 can be used to implement precise motion control. In specific implementation, the movable component 22 can be driven by the first driving support mechanism. The movable component 22 has high-precision displacement and angle adjustment capabilities under the elastic support of the flexible hinge 24, and can provide high-precision rotation and displacement for the optical element 30 under the drive of the first driving support mechanism, thereby implementing high-precision posture control on the optical element 30, improving the rotation resolution of the optical element 30, and ensuring the precise transmission and focusing of the light beam. In addition, under the elastic deformation of the flexible hinge 24, the return difference of motion transmission can also be reduced.

[0032] In an embodiment of the present application, the circulating cooling mechanism 40 includes a cooling block 41, a cooling block supporting mechanism 42 and a circulating cooling pipe 43. The cooling block 41 is connected to the fixed frame 21 through the cooling block supporting mechanism 42. There is a circulating medium in the cooling block 41. The circulating cooling pipe 43 is connected to the cooling block 41. The circulating cooling pipe 43 is used to circulate the circulating medium to the cooling block 41. The cooling block 41 is used to absorb the heat generated by the optical element 30.

[0033] In specific implementation, the cooling block 41 can be supported above the fixed frame 21 by the cooling block support mechanism 42 and close to the optical element 30 to absorb the heat generated during the working process of the optical element 30, so that the optical element 30 can work in a stable temperature environment, avoid thermal deformation of the mirror surface of the optical element 30, and ensure the working performance of the optical element 30.

[0034] It should be noted that there is a space between the cooling block 41 and the optical element 30, that is, the cooling block 41 does not directly contact the optical element 30. The purpose of this arrangement is, on the one hand, to leave a space for the translation and / or rotation of the optical element 30 during the posture adjustment process to prevent the optical element 30 from touching the circulating cooling mechanism 40 during the posture adjustment; on the other hand, to prevent the flow-induced vibration generated by the circulating cooling mechanism 40 from being transmitted to the optical element 30 through the cooling block 41, thereby affecting the structural stability of the optical element 30.

[0035] It should be noted that, since the cooling block 41 is connected to the fixed frame 21 through the cooling block support mechanism 42, when the circulating medium in the circulating cooling mechanism 40 flows, the flow-induced vibration generated will be transmitted along the path of the fixed frame 21-flexible hinge 24-movable component 22-optical element support mechanism 23-optical element 30. In the embodiment of the present application, a flexible hinge 24 structure is provided in the vibration transmission path, and the flexible hinge 24 structure has a weak effect on vibration transmission, thereby greatly weakening the transmission of flow-induced vibration and improving system stability.

[0036] Compared with the prior art, by adding a pipeline posture synchronization adjustment mechanism, when the optical element 30 is adjusted in posture, the cooling circulation pipeline also moves in coordination, thereby reducing the impact of flow-induced vibration on the optical element 30. In the embodiment of the present application, when the optical element 30 is adjusted in posture, the circulating cooling mechanism 40 as a whole remains relatively static, that is, the circulating cooling mechanism 40 does not need to cooperate with the movement of the optical element 30, and the flow-induced vibration generated by it can be absorbed and weakened by the flexible hinge 24.

[0037] In the embodiment of the present application, by providing a flexible hinge 24 in the first posture adjustment mechanism 20, on the one hand, high-precision posture adjustment of the optical element 30 can be achieved, and on the other hand, the influence of the flow-induced vibration of the circulating cooling mechanism 40 on the optical element 30 can be reduced, and the structure is simple and does not increase the structural complexity of the beam line mirror box.

[0038] In some embodiments of the present application, in order to improve the structural stability of the optical element 30, the base 10 in the beam line mirror box adopts a marble base. The marble base has the characteristics of a small thermal expansion coefficient and is not easy to produce thermal deformation. In addition, the micro cracks of the marble can absorb external forces to form a certain buffering effect, thereby reducing the transmission of vibration. Therefore, the use of a marble base 10 helps to improve the structural stability of the optical element 30.

[0039] In some embodiments of the present application, the beam line mirror box further includes a vacuum box 51, and the optical element 30 is located in the vacuum box 51, so that the optical element 30 works in a vacuum environment. In a vacuum environment, the beam line will not be affected by the scattering and absorption of gas molecules when propagating in the optical element 30, which helps to maintain the intensity and quality of the optical signal, improve the transmission efficiency and optical performance of the beam line, and the vacuum environment can reduce the optical loss in the optical element 30, improve the transmittance, and increase the sensitivity and transmission efficiency of the optical element 30.

[0040] As an optional embodiment, the vacuum box 51 is supported above the first posture adjustment mechanism 20 by a vacuum box support mechanism 52, and the optical element 30 and the circulating cooling mechanism 40 are both located in the vacuum box 51. Exemplarily, the vacuum box support mechanism 52 includes a plurality of support columns, and the vacuum box 51 is supported above the first posture adjustment mechanism 20 by the plurality of support columns, and is connected to the fixing frame 21 of the first posture adjustment mechanism 20, so that the optical element 30 and the circulating cooling mechanism 40 are both located in the vacuum box 51.

[0041] See also Figure 3 , is a schematic diagram of the structure of a beam line mirror box provided by another embodiment of the present application. Figure 3 As shown, the beamline mirror box includes a base 10, a first posture adjustment mechanism 20, an optical element 30, a circulating cooling mechanism 40, a vacuum box 51 and a vacuum box support mechanism 52. The vacuum box 51 is supported above the first posture adjustment mechanism 20 by the vacuum box support mechanism 52, and the optical element 30 and the circulating cooling mechanism 40 are both located in the vacuum box 51.

[0042] like Figure 3 As shown, the bottom surface of the vacuum box 51 has a first through hole opposite to the fixed frame 21 and a second through hole opposite to the movable member 22. A first vacuum bellows 61 is provided between the first through hole and the fixed frame 21. The cooling block support mechanism 42 is penetrated by the first vacuum bellows 61, that is, the bottom end of the cooling block support mechanism 42 is connected to the fixed frame 21. The cooling block support mechanism 42 passes through the first vacuum bellows 61 and is connected to the cooling block 41 located in the vacuum box 51. A second vacuum bellows 62 is provided between the second through hole and the movable member 22. An optical element support mechanism 23 is penetrated by the second vacuum bellows 62, that is, the bottom end of the optical element support mechanism 23 is connected to the movable member 22. The optical element support mechanism 23 passes through the second vacuum bellows 62 and is connected to the optical element 30 located in the vacuum box 51.

[0043] It should be noted that the interiors of the first vacuum bellows 61 and the second vacuum bellows 62 are both vacuum environments. The first vacuum bellows 61 and the second vacuum bellows 62 can not only ensure the vacuum degree of the working environment of the optical element 30, but also ensure the freedom of movement of the optical element support mechanism 23, thereby avoiding the movable component 22 from touching the vacuum box 51 when driving the optical element 30 to adjust its posture.

[0044] It should be noted that the cooling block support mechanism 42 in the first vacuum bellows 61 may include a plurality of support rods. The optical element support mechanism 23 in the second vacuum bellows 62 may also include a plurality of support rods.

[0045] It should be noted that both ends of the first vacuum bellows 61 and the second vacuum bellows 62 can be sealed by vacuum flanges.

[0046] It should be noted that the form of the vacuum box 51 provided in the present application is only schematic, and those skilled in the art can design the form of the vacuum box 51 according to actual needs. The embodiment of the present application does not impose too many restrictions on the specific form of the vacuum box 51. For example, in a specific implementation, the vacuum box support mechanism 52 can also be cancelled, and the vacuum box 51 is covered on the mounting surface of the beam line mirror box, and the base 10, the first posture adjustment mechanism 20, the optical element 30 and the circulating cooling mechanism 40 are all located in the vacuum box 51.

[0047] In some embodiments of the present application, a medium containing groove is provided on the top surface of the optical element 30, and a liquid heat exchange medium is contained in the medium containing groove. The cooling block 41 is partially located in the medium containing groove and immersed in the liquid heat exchange medium. The cooling block 41 is in indirect contact with the optical element 30 through the liquid heat exchange medium. The heat of the optical element 30 can be quickly transferred to the cooling block 41 through the liquid heat exchange medium, thereby improving the cooling efficiency of the optical element 30. At the same time, the liquid heat exchange medium can prevent the flow-induced vibration of the cooling block 41 from being transferred to the optical element 30.

[0048] The liquid heat exchange medium may be an indium gallium liquid alloy. The indium gallium alloy is liquid at room temperature and has good fluidity. At the same time, the indium gallium liquid alloy has a very high thermal conductivity, which helps to quickly conduct heat and improve thermal management efficiency.

[0049] In addition, the thermal conductivity of the InGaO liquid alloy increases with the increase of the mass fraction of In. Therefore, during specific implementation, those skilled in the art can set the mass fraction of In in the InGaO liquid alloy according to actual needs.

[0050] For example, the indium gallium liquid alloy may be a gallium indium tin alloy. Of course, those skilled in the art may also select other types of indium gallium liquid alloys according to actual needs, and the specific type of the indium gallium liquid alloy is not limited in the embodiment of the present application.

[0051] As an optional implementation, a cooling flow path is provided in the cooling block 41 , and the cooling flow path is filled with a circulating medium.

[0052] Exemplarily, the above-mentioned circulating medium may be water, or liquid ammonia, liquid carbon dioxide or other synthetic refrigerants may be used as the circulating medium.

[0053] Exemplarily, the cooling flow path may include a plurality of microchannels connected front to back, and micro-scale channels are used to enhance heat exchange.

[0054] Exemplarily, the cooling flow path includes a circulating medium inlet and a circulating medium outlet, the circulating medium inlet is connected to the circulating medium injection end of the circulating cooling pipe 43, the circulating medium outlet is connected to the circulating medium recovery end of the circulating cooling pipe 43, the middle section of the circulating cooling pipe 43 is connected to an external radiator, the high-temperature circulating medium flowing out of the cooling flow path enters the circulating cooling pipe 43 through the circulating medium recovery end, the circulating medium in the circulating cooling pipe 43 is cooled by the external radiator, and the cooled circulating medium is injected into the cooling flow path through the circulating medium injection end to realize circulating cooling of the circulating medium.

[0055] The external radiator may be an air-cooled radiator or a finned radiator, etc., and the specific type of the external radiator is not limited here.

[0056] Exemplarily, a protrusion is provided on the end face of the cooling block 41 opposite to the optical element 30, and the heat dissipation end of the optical element 30 is a groove structure, which serves as a medium accommodating groove. The medium accommodating groove is filled with a liquid heat exchange medium (such as indium gallium liquid alloy). The protrusion of the cooling block 41 is inserted into the medium accommodating groove and immersed in the liquid heat exchange medium. The protrusion is in indirect contact with the optical element 30 through the liquid heat exchange medium, and the liquid heat exchange medium is used to guide the heat of the optical element 30 to the cooling block 41 for heat exchange, while avoiding direct contact between the cooling block 41 and the optical element 30, thereby reducing the flow-induced vibration of the cooling block 41 from being transmitted to the optical element 30.

[0057] Exemplarily, the cooling block 41 may be made of a metal material with good heat dissipation performance, such as copper or aluminum.

[0058] It should be noted that there are two paths for vibration transmission between the optical element 30 and the circulating cooling mechanism 40. The first path is: cooling circulating medium-circulating cooling pipe 43-cooling block 41-liquid heat exchange medium-optical element 30. In this path, since the cooling block 41 is in indirect contact with the optical element 30 through the liquid heat exchange medium, the vibration transmission to the optical element 30 can be shielded. The second path is: cooling circulating medium-circulating cooling pipe 43-cooling block support mechanism 42-fixed frame 21-flexible hinge 24-movable component 22-optical element support mechanism 23-optical element 30. In this path, since there are multiple parts to cooperate, the path length is extended, the intensity of vibration transmission to the optical element 30 is reduced, and the hinge in the path is a flexible element, which can also effectively reduce the transmission of vibration.

[0059] In some embodiments of the present application, the beam line mirror box further includes a second posture adjustment mechanism 80, the second posture adjustment mechanism 80 is located on the base 10, and the fixed frame 21 is connected to the second posture adjustment mechanism 80. In the embodiment of the present application, the second posture adjustment mechanism 80 is used to roughly adjust the posture of the optical element 30, for example, to adjust the position and angle of the optical element 30 by a large amplitude.

[0060] See also Figure 4 , is a schematic diagram of the structure of a beam line mirror box provided by another embodiment of the present application. Figure 4 As shown, the beam line mirror box includes a base 10, a first posture adjustment mechanism 20, a second posture adjustment mechanism 80, an optical element 30, a circulating cooling mechanism 40, a vacuum box, and a vacuum box support mechanism 52. Among them, the second posture adjustment mechanism 80 is located on the base 10, and the fixing frame 21 of the first posture adjustment mechanism 20 is connected to the second posture adjustment mechanism 80.

[0061] It should be understood that in the embodiment of the present application, the first posture adjustment mechanism 20 is used as a fine adjustment mechanism for finely adjusting the position and / or angle of the optical element 30; and a second posture adjustment mechanism 80 is provided between the base 10 and the first posture adjustment mechanism 20 for fine adjustment, and the second posture adjustment mechanism 80 is used as a coarse adjustment mechanism for adjusting the position and / or angle of the optical element 30 by a large amplitude. The first posture adjustment mechanism 20 will move during the fine adjustment process, but its movement amplitude cannot be too large, otherwise it will cause the matching failure between the circulating cooling mechanism 40 and the optical element 30. Therefore, in this embodiment, the second posture adjustment mechanism 80 for coarse adjustment is provided between the base 10 and the first posture adjustment mechanism 20, and the circulating cooling mechanism 40 is also above the second posture adjustment mechanism 80, so that during the large-amplitude adjustment process of the optical element 30, the ring cooling mechanism 40 and the optical element 30 move synchronously to avoid the matching failure between the two.

[0062] In specific implementation, the posture (position and / or angle) of the optical element 30 can be roughly adjusted through the second posture adjustment mechanism 80. During the coarse adjustment process, the first posture adjustment mechanism 20 and the optical element 30 move together; after the coarse adjustment is completed, the second posture adjustment mechanism 80 remains static, and then the optical element 30 (position and / or angle) is finely adjusted through the first posture adjustment mechanism 20 to meet the experimental requirements.

[0063] Exemplarily, the second posture adjustment mechanism 80 can adopt a manual adjustment mechanism, such as a six-axis optical rotation adjustment platform, which can realize the functions of translation along three axes and rotation around three axes, that is, translation of the optical element 30 in the X, Y and Z directions, and rotation around the three coordinate axes in the Pitch, Yaw and Roll directions, for a total of 6 adjustment parameters. The second posture adjustment mechanism 80 can also adopt a semi-automatic adjustment mechanism or an automatic adjustment mechanism. The embodiment of the present application does not limit the specific type of the second posture adjustment mechanism 80.

[0064] In the embodiment of the present application, the first posture adjustment mechanism 20 can implement translation of the optical element 30 in the X, Y and Z directions, and rotation of the Pitch, Yaw and Roll directions around these three coordinate axes, with a total of 6 adjustment parameters fine-tuned. The first posture adjustment mechanism drives the movable component 22 through the first driving support mechanism. The movable component 22 has high-precision displacement and angle adjustment capabilities under the elastic support of the flexible hinge 24. Under the drive of the first driving support mechanism, the optical element 30 can be finely translated in the X, Y and Z directions, and finely rotated in the Pitch, Yaw and Roll directions around these three coordinate axes, thereby achieving high-precision displacement and angle control of the optical element 30.

[0065] like Figure 4 As shown, in some embodiments of the present application, the second posture adjustment mechanism 80 includes a fixed frame support mechanism 81, which is connected to the fixed frame 21. The fixed frame support mechanism 81 includes a support plane and a plurality of support columns located on the support plane. The support plane is connected to the second posture adjustment mechanism 80, and the plurality of support columns are respectively connected to the fixed frame 21. A movable space for the movable component 22 is formed between the plurality of support columns, and the movable space is used to provide space for the movement of the movable component 22 to prevent the movable component 22 from touching the fixed frame support mechanism 81 during movement.

[0066] It should be noted that in some embodiments of the present application, the fixed frame support mechanism 81 also has an adjustment function. For example, the fixed frame support mechanism 81 includes a support plane and a plurality of support columns located on the support plane. The support columns use height-adjustable screw rods. By adjusting the height of each screw rod, the posture of the optical element 30 can be finely adjusted.

[0067] A second aspect of the present application provides an optical transmission system, which includes a control device and a beam line mirror box as described in the first aspect above, wherein the control device is used to control a first driving support mechanism in the beam line mirror box to drive a movable component 22 to finely adjust the posture of the optical element 30 through the movable component 22.

[0068] In some embodiments of the present application, when the beam line mirror box includes a second posture adjustment mechanism 80, and the second posture adjustment mechanism 80 adopts a semi-automatic adjustment mechanism or an automatic adjustment mechanism, the control device is also used to control the second posture adjustment mechanism 80 to perform coarse posture adjustment on the optical element 30.

[0069] The optical transmission system provided in the second aspect includes the beam line mirror box provided in the first aspect, and therefore has the same technical effects as those of the beam line mirror box provided in the first aspect, which will not be described in detail herein.

[0070] The optical transmission system in the embodiment of the present application has the same implementation principle and technical effects as those in the aforementioned optical mirror box embodiment. For the sake of brief description, for matters not mentioned in the device embodiment, reference may be made to the corresponding contents in the aforementioned optical mirror box embodiment.

[0071] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0072] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0073] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0074] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0075] It should be noted that in the above embodiments, the description of each embodiment has its own emphasis, and for the parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0076] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that any technician familiar with this technical field can still modify the technical solutions recorded in the aforementioned embodiments within the technical scope disclosed in the present application, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be covered by the protection scope of the present application.

Claims

1. A beam line mirror box, characterized in that: include: Pedestal; Optical components; A first posture adjustment mechanism comprises a fixed frame, a movable member, a first driving support mechanism, an optical element support mechanism and a plurality of flexible hinges, wherein the fixed frame is located on the base, the movable member is located in the fixed frame and connected to the fixed frame through the plurality of flexible hinges, the first driving support mechanism is connected to the movable member, and the optical element is connected to the movable member through the optical element support mechanism; The circulating cooling mechanism comprises a cooling block, a cooling block supporting mechanism and a circulating cooling pipe, wherein the cooling block is connected to the fixed frame via the cooling block supporting mechanism, wherein a circulating medium is contained in the cooling block, wherein the circulating cooling pipe is connected to the cooling block, wherein the circulating cooling pipe is used for circulating the circulating medium to the cooling block, and the cooling block is used for absorbing the heat generated by the optical element.

2. The beam line mirror box according to claim 1, characterized in that: It also includes a vacuum box, in which the optical element is located.

3. The beam line mirror box according to claim 2, characterized in that: It also includes a vacuum box supporting mechanism, through which the vacuum box is supported above the first posture adjustment mechanism, and the optical element and the circulating cooling mechanism are both located in the vacuum box.

4. The beam line mirror box according to claim 3, characterized in that: The bottom surface of the vacuum box has a first through hole opposite to the fixed frame and a second through hole opposite to the movable component. A first vacuum bellows is arranged between the first through hole and the fixed frame, the cooling block support mechanism is passed through the first vacuum bellows, a second vacuum bellows is arranged between the second through hole and the movable component, and the optical element support mechanism is passed through the second vacuum bellows.

5. The beam line mirror box according to claim 1, characterized in that: The top surface of the optical element is provided with a medium containing groove, and the medium containing groove contains liquid heat exchange medium. The cooling block is partially located in the medium containing groove and immersed in the liquid heat exchange medium. The cooling block is indirectly in contact with the optical element through the liquid heat exchange medium.

6. The beam line mirror box according to claim 5, characterized in that: The liquid heat exchange medium is indium gallium liquid alloy.

7. The beam line mirror box according to claim 1, characterized in that: It also includes a second posture adjustment mechanism, which is located on the base and the fixing frame is connected to the second posture adjustment mechanism.

8. The beam line mirror box according to claim 7, characterized in that: The second posture adjustment mechanism includes a fixed frame support mechanism, which is connected to the fixed frame. The fixed frame support mechanism includes a support plane and a plurality of support columns located on the support plane. The plurality of support columns are respectively connected to the fixed frame, and a movable space for the movable component is formed between the plurality of support columns.

9. The beam line mirror box according to claim 1, characterized in that: The flexible hinge is a flexible long rod-shaped structure, one end of the flexible hinge is connected to the fixed frame, and the other end of the flexible hinge is connected to the movable component.

10. An optical transmission system, characterized in that: It comprises a control device and a beam line mirror box as described in any one of claims 1 to 9; the control device is used to control the first driving support mechanism in the beam line mirror box to drive the movable component, so as to finely adjust the posture of the optical element through the movable component.

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