Photocuring device, control method thereof and semiconductor process equipment

Abstract

The invention discloses a photocuring device and a control method thereof, and semiconductor process equipment, the disclosed photocuring device comprises a driving mechanism (10), a light source device (20), a first sensing part (30) and a controller (40), the light source device (20) is connected with the driving mechanism (10), the controller (40) is connected with the driving mechanism (10), and the first sensing part (30) is connected with the driving mechanism (10). The controller (40) is used for controlling the driving mechanism (10) to drive the light source device (20) to rotate back and forth between a first position and a second position, the first sensing part (30) is used for generating a first signal when the light source device (20) rotates to a third position, and the third position is located between the first position and the second position; the controller (40) is connected with the first induction part (30), and in the process that the light source device (20) rotates between the first position and the second position in a reciprocating mode, the controller (40) controls the driving mechanism (10) to be closed under the condition that the controller (40) does not receive the first signal.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment, and specifically relates to a photocuring device and a control method thereof, and semiconductor process equipment. Background Art

[0002] The photocuring process is a common process in semiconductor processes. The photocuring process can improve the mechanical strength of the thin film deposited on the wafer. The photocuring process is usually completed by a photocuring device of semiconductor process equipment. Taking the photocuring device as an ultraviolet light curing device as an example, in the specific working process, the ultraviolet light curing device projects ultraviolet light onto the wafer, thereby heating the wafer through temperature compensation, thereby alleviating the temperature unevenness of the heating of the wafer carrier.

[0003] In order to ensure the consistency of the lighting process, the light source device in the light curing device involved in the related art rotates under the drive of the driving mechanism. However, the driving mechanism may drive the rotation of the light source device to cause transmission dislocation, so that when the driving mechanism operates according to the preset control rules, the light source device does not rotate, which leads to the inability to realize the light curing process. At this time, since the driving mechanism does not show any abnormality, it cannot be detected, which may easily cause the light curing process to fail to meet the requirements.

[0004] In addition, since the light source device needs to be connected to a cable, the cable will be twisted during the rotation of the light source device. If the cable is twisted too much, it will break, causing power supply problems. The light curing device involved in the related art has the problem that the cable is easily damaged, resulting in unstable power supply. Obviously, this will affect the production capacity of semiconductor process equipment performing light curing process. Summary of the invention

[0005] The present invention discloses a photocuring device and a control method thereof, and semiconductor process equipment, so as to solve the problem that the photocuring device involved in the related art has transmission dislocation, which causes the phenomenon that the driving mechanism operates normally but the light source device does not rotate and cannot be detected, resulting in the photocuring process failing to meet the requirements.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0007] In a first aspect, an embodiment of the present application discloses a light curing device for semiconductor process equipment, wherein the disclosed light curing device includes a driving mechanism, a light source device, a first sensing unit, and a controller, wherein:

[0008] The light source device is connected to the driving mechanism, the controller is connected to the driving mechanism, the controller is used to control the driving mechanism to drive the light source device to reciprocate between a first position and a second position, the first sensing part is used to generate a first signal when the light source device rotates to a third position, and the third position is located between the first position and the second position;

[0009] The controller is connected to the first sensing part. When the light source device reciprocates between the first position and the second position, the controller controls the driving mechanism to be turned off if the first signal is not received.

[0010] In a second aspect, an embodiment of the present application discloses a semiconductor process equipment, and the disclosed semiconductor process equipment includes the photocuring device described in the first aspect.

[0011] In a third aspect, an embodiment of the present application discloses a control method for a light-curing device, wherein the light-curing device is the light-curing device described in the first aspect, and the control method includes:

[0012] The controller controls the driving mechanism to drive the light source device to reciprocate between the first position and the second position;

[0013] When the controller does not receive the first signal, the driving mechanism is controlled to be turned off.

[0014] The technical solution adopted by the present invention can achieve the following technical effects:

[0015] The photocuring device of the semiconductor process equipment disclosed in the embodiment of the present application, by adding a first sensing part, and making the first sensing part generate a sensing signal when the light source device rotates to the third position, can enable the controller to determine whether the light source device passes through the third position during the switching between the first position and the second position by whether it can receive the first signal. If the controller does not receive the first signal, it means that the first sensing part does not sense and generate the first signal, which indirectly means that the light source device reciprocating between the first position and the second position does not actually pass through the third position, and thus it is known that there is a problem in the power transmission between the driving mechanism and the light source device, so as to control the driving mechanism to shut down. It can be seen that the photocuring device disclosed in the embodiment of the present application can solve the problem of the photocuring device involved in the related art, that the phenomenon that the driving mechanism operates normally but the light source device does not rotate due to transmission dislocation cannot be detected, and the photocuring process cannot meet the requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a photocuring device of a semiconductor process equipment disclosed in an embodiment of the present application;

[0017] Figure 2 It is a schematic structural diagram of another photocuring device of a semiconductor process equipment disclosed in an embodiment of the present application;

[0018] Figure 3 It is a flow chart of a control method of a light curing device disclosed in an embodiment of the present application;

[0019] Figure 4 is another schematic flow chart of the control method of the light curing device disclosed in the embodiment of the present application;

[0020] in, Figure 1 and Figure 2 The arc arrow in the figure represents the rotation direction of the light source device 20. Figure 1 and Figure 2 The two light source devices 20 shown in the figure can also rotate in the direction opposite to the arc arrow, which is not limited in the embodiment of the present application.

[0021] Description of reference numerals:

[0022] 10-driving mechanism, 11-driving motor, 12-driving wheel, 13-driven wheel, 14-idling wheel, 15-transmission belt,

[0023] 20- Light source device,

[0024] 30-first sensing part, 31-first sensor, 32-first triggering element,

[0025] 40-Controller,

[0026] 50-second sensing part, 51-second sensor, 52-second triggering element,

[0027] 60-third sensing part, 61-third sensor, 62-third triggering element,

[0028] 70- alarm,

[0029] 80-Torque detection device,

[0030] 90-base. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] The technical solutions disclosed in various embodiments of the present invention are described in detail below in conjunction with the accompanying drawings.

[0033] Please refer to Figure 1 and Figure 2 The embodiment of the present application discloses a light curing device of a semiconductor process equipment. The disclosed light curing device is a part of the semiconductor process equipment. The light curing device disclosed in the embodiment of the present application includes a driving mechanism 10, a light source device 20, a first sensing unit 30 and a controller 40.

[0034] The driving mechanism 10 is a power mechanism of the light curing device. The driving mechanism 10 is connected to the light source device 20, and the driving mechanism 10 is used to drive the light source device 20 to rotate. The controller 40 is at least connected to the driving mechanism 10, and the controller 40 is used to control the driving mechanism 10 to drive the light source device 20 to reciprocate between the first position and the second position, thereby realizing the rotation requirement of the light curing process.

[0035] In the embodiment of the present application, the first sensing portion 30 is used to sense the position of the light source device 20 and generate a first signal when the light source device 20 rotates to the third position. In the embodiment of the present application, the third position is located between the first position and the second position.

[0036] It should be noted that, in the embodiment of the present application, the position of the light source device 20 changes when it rotates under the drive of the driving mechanism 10. The light source device 20 reciprocates between the first position and the second position, which means that the light source device 20 rotates from the first position to the second position under the drive of the driving mechanism 10, and then rotates back from the second position to the first position, and repeats until the preset process time is met. The third position is located between the first position and the second position, which means that the light source device 20 passes through the third position when rotating from the first position to the second position or from the second position to the first position.

[0037] The controller 40 is also connected to the first sensing portion 30. When the light source device 20 rotates from the first position to the second position or from the second position to the first position, if the controller 40 receives the first signal, the driving mechanism 10 is controlled to remain in the on state, so that the light source device 20 continues to reciprocate between the first position and the second position until the preset process time is met.

[0038] In the process of the light source device 20 rotating from the first position to the second position or from the second position to the first position, the controller 40 controls the driving mechanism 10 to turn off when the first signal is not received. As described above, the third position is a position that the light source device 20 must pass through when rotating back and forth between the first position and the second position. In the process of the light source device 20 rotating from the first position to the second position or from the second position to the first position, under normal circumstances, the light source device 20 will pass through the third position so that the controller 40 can receive the first signal; under abnormal circumstances, the light source device 20 does not pass through the third position so that the controller 40 fails to receive the first signal.

[0039] In this article, when the controller 40 does not receive the first signal, it means that the first sensing part 30 does not sense that the light source device 20 passes through the third position. In fact, it can also be explained that during the driving process of the driving mechanism 10, the light source device 20 did not rotate from the first position to the second position or from the second position to the first position at least once under the drive of the driving mechanism 10. Obviously, this shows that there is an abnormality in the driving of the light source device 20 by the driving mechanism 10. At this time, the controller 40 controls the driving mechanism 10 to shut down to avoid continued invalid driving, and also allows the operator to perform corresponding maintenance operations.

[0040] The light-curing device of the semiconductor process equipment disclosed in the embodiment of the present application, by adding a first sensing part 30, and making the first sensing part 30 generate a sensing signal when the light source device 20 rotates to the third position, so that the controller 40 can determine whether the light source device 20 passes through the third position during the switching between the first position and the second position by whether it can receive the first signal. If the controller 40 does not receive the first signal, it means that the first sensing part 30 does not sense the first signal, which indirectly means that the light source device 20 reciprocating between the first position and the second position does not actually pass through the third position, and thus it is known that there is a problem in the power transmission between the driving mechanism 10 and the light source device 20, so as to control the driving mechanism 10 to shut down. It can be seen that the light-curing device disclosed in the embodiment of the present application can solve the problem of the light-curing device involved in the related art that the phenomenon that the driving mechanism operates normally but the light source device does not rotate due to transmission dislocation cannot be detected, resulting in the light-curing process failing to meet the requirements.

[0041] In an embodiment of the present application, the driving mechanism 10 can drive the light source device 20 to rotate back and forth between the first position and the second position through its own preset rotation program. For example, the preset rotation program of the driving mechanism 10 enables the driving mechanism 10 to drive the light source device 20 to rotate back and forth within a preset angle range, so that the angles of the two ends of the light source device 20 within the preset angle range stop and change the rotation direction. In an optional scheme, the driving mechanism 10 drives the light source device 20 to rotate back and forth between 0°-180°, then when the light source device 20 rotates to 0°, it can be considered to be in the first position, and when the light source device 20 rotates to 180°, it can be considered to be in the second position. It should be noted that when the light source device 20 is at 0°, it can be considered to be in the initial position. The initial position can be considered to be the position of the corresponding light source device 20 when the output torque of the driving mechanism 10 is 0. In the embodiment of the present application, the first position is not limited to the initial position, and may not be the initial position, and the embodiment of the present application is not limited.

[0042] In another embodiment, the driving mechanism 10 drives the light source device 20 to reciprocate between 90° and 270°. When the light source device 20 rotates to 90°, it is considered to be in the first position, and when it rotates to 270°, it is considered to be in the second position.

[0043] Of course, in other embodiments, the driving mechanism 10 can be started and stopped under the control of an additionally configured controller 40, and the controller 40 can decide to control the start and stop of the driving mechanism 10 according to the position detection device, so that the light source device 20 reciprocates between the first position and the second position. For example, the second sensing portion 50 described later can detect whether the light source device 20 is in the initial position. Of course, when the first position is the initial position, the second sensing portion 50 can also detect whether the light source device 20 is in the first position.

[0044] In a further technical solution, the light curing device disclosed in the embodiment of the present application may further include a second sensing portion 50. The second sensing portion 50 is used to generate a second signal when the light source device 20 rotates to the first position. The controller 40 may be connected to the second sensing portion 50. When the controller 40 receives the second signal, it indicates that the light source device 20 rotates back to the first position. The second sensing portion 50 can enable the light source device 20 to return to the first position, thereby starting to rotate from the first position. Optionally, when the first position is the initial position, the second sensing portion 50 can enable the light source device 20 to return to the initial position, thereby starting to rotate from the initial position.

[0045] The light curing device disclosed in the embodiment of the present application may include a cable. The cable is electrically connected to the light source device 20, so as to supply power to the light source device 20. The torque of the cable increases when the light source device 20 rotates in a direction away from the first position. Of course, in order to reduce the torque as much as possible, the first position is the initial position, and when the light source device 20 is in the initial position, the torque of the cable may be zero. In the process of the driving mechanism 10 driving the light source device 20 to rotate from the first position, the torque of the cable gradually increases. Of course, it needs to be emphasized again that the first position may be the initial position or may not be the initial position.

[0046] In order to avoid the problem of cable breaking due to excessive torque, the light curing device disclosed in the embodiment of the present application may also include a third sensing part 60. The third sensing part 60 is used to generate a third signal when the light source device 20 rotates to the fourth position. It should be noted that the second position is between the first position and the fourth position. When the light source device 20 rotates to the fourth position, the torque reaches the warning value. In the embodiment of the present application, the controller 40 can control the driving mechanism 10 to turn off when receiving the third signal. In the specific control process, when the controller 40 receives the third signal, it means that the light source device 20 rotates to the fourth position, and then it is known that the torque of the cable has reached the warning value at this time. At this time, it means that the light source device 20 has rotated to a more dangerous position, and the driving mechanism 10 of the light source device 20 is already in an abnormal state. At this time, the controller 40 controls the driving mechanism 10 to turn off, which can timely prevent the cable from being further twisted and generating a larger torque to break.

[0047] Please refer to Figure 2 , the light curing device disclosed in the embodiment of the present application may further include an alarm 70. The controller 40 is connected to the alarm 70, and the controller 40 is used to control the alarm 70 to alarm when the first signal is not received or the third signal is received, so as to promptly remind the maintenance personnel. In the embodiment of the present application, the alarm 70 may be a sound alarm, a light alarm, or both a sound alarm and a light alarm. The embodiment of the present application does not limit the specific type of the alarm 70.

[0048] As described above, the driving mechanism 10 drives the light source device 20 to rotate, so that the torque of the light source device 20 increases from the first position. The inventor of the present invention found that the output torque of the driving mechanism 10 also gradually increases during this process. In order to better prevent the cable from being subjected to excessive torque, please refer to Figure 2, the photocuring device disclosed in the embodiment of the present application may also include a torque detection device 80. The torque detection device 80 is used to detect the actual output torque of the driving mechanism 10. The controller 40 is connected to the torque detection device 80 and the driving mechanism 10, respectively. The controller 40 is used to control the driving mechanism 10 to shut down when the actual output torque is greater than the first torque threshold. It should be noted that the first torque threshold can be considered as the output torque corresponding to the torque output by the driving mechanism 10 when the torque applied to the cable reaches a warning value. In this case, when the torque reaches the warning value, the controller 40 can promptly control the driving mechanism 10 to shut down, thereby preventing the torque applied to the cable from further increasing and breaking.

[0049] In the process of the driving mechanism 10 driving the light source device 20 to rotate, the driving mechanism 10 may slip. For example, when the driving mechanism 10 includes a belt transmission mechanism, the conveyor belt of the belt transmission mechanism may slip. In this case, the driving mechanism 10 will drive the light source device 20 to rotate, but due to the existence of the slip phenomenon, the driving efficiency of the driving mechanism 10 on the light source device 20 is greatly reduced. Accordingly, how to detect the slip phenomenon in time and make targeted adjustments can be timely repaired. Based on this, the inventor found that when the driving mechanism 10 slips, the torque output by the driving mechanism 10 will decrease to a large extent. Based on this, in the light curing device disclosed in the embodiment of the present application, the controller 40 is used to control the driving mechanism 10 to shut down when the actual output torque is less than the second torque threshold. It should be noted that, in this article, the first torque threshold is greater than the second torque threshold. The embodiment of the present application does not limit the specific values ​​of the first torque threshold and the second torque threshold.

[0050] Optionally, the first torque threshold may be 50% of the output torque corresponding to the full load power of the driving mechanism 10 , and the second torque threshold may be 15% of the output torque corresponding to the full load power of the driving mechanism 10 .

[0051] In the light curing device disclosed in the embodiment of the present application, the structures of the first sensing part 30, the second sensing part 50 and the third sensing part 60 can be various. For example, the first sensing part 30, the second sensing part 50 and the third sensing part 60 can be image detection parts, and the image detection parts collect and process the image of the light source device 20 to determine the position to which the light source device 20 is rotated. Of course, the embodiment of the present application does not limit the specific structures of the first sensing part 30, the second sensing part 50 and the third sensing part 60.

[0052] Please refer again Figure 1 or Figure 2, an embodiment of the present application discloses a first sensing part 30 of a specific structure. The disclosed first sensing part 30 may include a first sensor 31 and a first trigger member 32. The first sensor 31 may be provided on the light source device 20, and may rotate with the light source device 20. The first trigger member 32 is fixedly arranged. In an optional scheme, the light-curing device may include a base 90, and the base 90 may be considered as a fixed seat of the light-curing device. The first trigger member 32 may be fixed on the base 90. The light source device 20 is rotatably provided on the base 90, so that the first sensor 31 can be driven to rotate relative to the base 90, and finally can rotate relative to the first trigger member 32.

[0053] When the light source device 20 rotates to the third position, the first sensor 31 rotates to a position opposite to the first trigger member 32, and the first trigger member 32 triggers the first sensor 31, so that the first sensor 31 generates a first signal, thereby realizing that the first sensing unit 30 generates a first signal. In the embodiment of the present application, the first sensor 31 may be a light signal sensor, and the first trigger member 32 may be a second baffle. When the second baffle is not opposite to the first sensor 31, the first light signal emitted by the first sensor 31 is not blocked; when the second baffle is opposite to the first sensor 31, the first light signal emitted by the first sensor 31 is blocked, so that the first sensor 31 receives the first light signal reflected back by the second baffle, thereby causing the first sensor 31 to generate a first signal.

[0054] Similarly, the second sensing portion 50 may include a second sensor 51 and a second trigger 52. The second trigger 52 is disposed on the light source device 20 and can rotate with the light source device 20. The first sensor 31 and the second trigger 52 are in the rotation direction of the light source device 20 (eg Figure 1 and Figure 2 The second sensor 51 is fixedly arranged, and optionally, the second sensor 51 can be fixed on the base 90. When the light source device 20 rotates to the initial position, the second trigger member 52 rotates to a position opposite to the second sensor 51, and triggers the second sensor 51 to generate a second signal. In the embodiment of the present application, the second sensor 51 can also be a light signal sensor, and the second trigger member 52 can be a first baffle. When the first baffle is not opposite to the second sensor 51, the second light signal emitted by the second sensor 51 is not blocked; when the first baffle is opposite to the second sensor 51, the second light signal emitted by the second sensor 51 is blocked, so that the second sensor 51 will receive the second light signal reflected back by the first baffle, so that the second sensor 51 generates a second signal.

[0055] Similarly, the third sensing portion 60 may include a third sensor 61 and a third trigger 62. The third sensor 61 is disposed on the light source device 20 and can rotate with the light source device 20. The third sensor 61, the first sensor 31 and the second trigger 52 are all disposed on the light source device 20 and are spaced apart in the rotation direction of the light source device 20. The third trigger 62 is fixedly disposed, and optionally, the third trigger 62 may be fixed on the base 90. When the light source device 20 rotates to the fourth position, the third sensor 61 rotates to a position opposite to the third trigger 62, and is triggered by the third trigger 62 to generate a third signal. In the embodiment of the present application, the third sensor 61 may be an optical signal sensor, and the third trigger 62 may be a third baffle. When the third baffle is not opposite to the third sensor 61, the third optical signal emitted by the third sensor 61 is not blocked; when the third baffle is opposite to the third sensor 61, the third optical signal emitted by the third sensor 61 is blocked, so that the third sensor 61 receives the third optical signal reflected back by the third baffle, so that the third sensor 61 generates a third signal.

[0056] In a further technical solution, the second sensor 51 can be reused with the first trigger member 32 and the third trigger member 62 respectively to serve as the second baffle and the third baffle that can cooperate with the first sensor 31 and the third sensor 61 respectively.

[0057] That is, when the first sensor 31 rotates to a position opposite to the second sensor 51, the second sensor 51 can replace the second baffle to block the first light signal emitted by the first sensor 31, so that the first sensor 31 receives the first light signal reflected back by the second sensor 51 and generates a first signal.

[0058] When the third sensor 61 rotates to a position opposite to the second sensor 51, the second sensor 51 can replace the third baffle to block the third light signal emitted by the third sensor 61, so that the third sensor 61 receives the third light signal reflected by the second sensor 51 and generates a third signal. In this case, there is no need to configure the first trigger member 32 and the third trigger member 62, and only the second sensor 51 is required, which can undoubtedly reduce the number of components and further help simplify the structure of the light curing device.

[0059] In the embodiment of the present application, the width of the second baffle can be equal to the product of the response time of the second sensor 51 and the linear speed of the light source device 20. It should be noted that in the embodiment of the present application, the width of the second baffle is the size of the second baffle in the rotation direction of the light source device 20, and the linear speed of the light source device 20 refers to the linear speed of the edge of the light source device 20. Of course, when the second sensor 51 is used as the second baffle or the third baffle, the width of the second sensor 51 can also be designed in the above manner. In the embodiment of the present application, the response time of the second sensor 51 can be a preset value, and the embodiment of the present application does not limit the specific value of the response time.

[0060] As described above, the controller 40 is used to control the driving mechanism 10 to drive the light source device 20 to reciprocate between the first position and the second position. In a further technical solution, the controller 40 disclosed in the embodiment of the present application is also used to control the driving mechanism 10 to drive the light source device 20 to reciprocate between the fifth position and the sixth position for a second preset time period after the light source device 20 reciprocates between the first position and the second position, wherein the first position is the initial position. It should be noted that the fifth position is between the third position and the first position, and the sixth position is between the fourth position and the second position. In the process of the light source device 20 reciprocating between the fifth position and the sixth position, the controller 40 controls the driving mechanism 10 to turn off when the first signal is not received. In this case, the first sensing part 30 can be used to detect whether the drive is normal, whether the light source device 20 is reciprocating between the first position and the second position, or reciprocating between the fifth position and the sixth position, so as to achieve the purpose of repeated use.

[0061] For example, the controller 40 controls the light source device 20 to reciprocate between 0°-180° for 30 minutes (the first preset time period is 30 minutes at this time), and then controls the driving mechanism 10 to drive the light source device to reciprocate between 90°-270° for 30 minutes (the second preset time period is 30 minutes at this time). When the light source device 20 rotates to 0°, the light source device 20 is in the first position, and the second sensor 51 is triggered by the second trigger member 52 to generate a second signal. When the light source device 20 rotates to 180°, the light source device 20 is in the second position. When the light source device rotates to 170°, the light source device 20 is in the third position, and the first sensor 31 is triggered by the first trigger member 32 to generate a first signal.

[0062] When the light source device 20 rotates to 90°, the light source device 20 is in the fifth position; when the light source device 20 rotates to 270°, the light source device 20 is in the sixth position; when the light source device 20 rotates to 275° or 280°, the light source device 20 is in the fourth position.

[0063] In the embodiment of the present application, the driving mechanism 10 may be of various types. For example, the driving mechanism 10 may include a driving motor 11, and the driving motor 11 may be directly connected to the light source device 20 to drive the light source device 20 to rotate. Of course, please refer to Figure 1 or Figure 2 The driving mechanism 10 may further include a driving motor 11 and a transmission mechanism. The driving motor 11 may be connected to the light source device 20 through the transmission mechanism, thereby driving the light source device 20 to rotate.

[0064] In order to improve productivity, the photocuring device disclosed in the embodiment of the present application may include at least two light source devices 20, and the driving mechanism 10 can simultaneously drive the at least two light source devices 20 to rotate, so that the at least two light source devices 20 respectively illuminate the corresponding wafers.

[0065] As described above, the driving motor 11 can be connected to the light source device 20 through a transmission mechanism. There are many types of transmission mechanisms. Please refer to Figure 1 In an optional embodiment, the transmission mechanism may include a driven wheel 13, the light source device 20 is disposed on the driven wheel 13 and is coaxially disposed with the driven wheel 13, and the driven wheel 13 can be rotatably disposed, for example, can be rotatably disposed on the base 90. In the case where the light curing device includes the first sensor 31, the second trigger member 52 and the third sensor 61 at the same time, the first sensor 31, the second trigger member 52 and the third sensor 61 are all disposed on the driven wheel 13, and the third sensor 61, the first sensor 31 and the second trigger member 52 can be distributed on the rim of the driven wheel 13 at intervals in the rotation direction of the light source device 20.

[0066] The transmission mechanism may be a belt transmission mechanism. Based on this, in a further optional solution, the transmission mechanism may also include a transmission belt 15, and there may be two driven wheels 13, both of which are in transmission cooperation with the transmission belt 15. The drive motor 11 is in transmission cooperation with the transmission belt 15, and the drive motor 11 drives the two driven wheels 13 to rotate synchronously through the transmission belt 15. Of course, there may be two light source devices 20, and they are arranged on the two driven wheels 13 in a one-to-one correspondence. Specifically, the power output shaft of the drive motor 11 is fixed with a driving wheel 12, and two idler wheels 14 are respectively arranged on both sides of the driving wheel 12, and the two idler wheels 14 and the driving wheel 12 are respectively located on opposite sides of the transmission belt 15. The operation of the drive motor 11 will drive the driving wheel 12 to rotate, and the rotation of the driving wheel 12 will drive the driven wheel 13 to rotate with the light source device 20 through the operation of the transmission belt 15. The two idler wheels 14 can play a tensioning role in improving the transmission stability.

[0067] Of course, in the embodiment of the present application, the transmission mechanism may also be a gear transmission mechanism, a chain transmission mechanism, etc. The embodiment of the present application does not limit the specific type of the transmission mechanism.

[0068] In the embodiment of the present application, there may be at least two light source devices 20, and the driving mechanism 10 may be connected to all the light source devices 20, thereby driving all the light source devices 20 to rotate in the same direction and synchronously. Based on this, the light curing device may be configured with the first sensing part 30, the second sensing part 50 and the third sensing part 60 for only one of the light source devices 20, thereby achieving the purpose of detecting the positions of all the light source devices 20, and this method has a great advantage of simple structure.

[0069] In order to improve the working stability of the light curing device, in an optional solution, the light curing device can be configured with a first sensing part 30, a second sensing part 50 and a third sensing part 60 for each light source device 20, such as Figure 1 or Figure 2 This redundant design enables that when a first sensing unit 30, a second sensing unit 50 or a third sensing unit 60 fails and cannot work, it can be replaced by another first sensing unit 30, a second sensing unit 50 or a third sensing unit 60.

[0070] Of course, when the first sensing part 30, the second sensing part 50 and the third sensing part 60 independently configured for each light source device 20 are all operating normally, this redundant design can also play a role of mutual verification, thereby improving the accuracy of position sensing detection.

[0071] In the embodiment of the present application, the light source device 20 may be an ultraviolet light source. In this case, the light curing device is an ultraviolet light curing device. Of course, the light source device 20 is not limited to an ultraviolet light source, and accordingly, the light curing device is not limited to an ultraviolet light curing device. The embodiment of the present application does not limit the specific types of the light source device 20 and the light curing device.

[0072] Based on the light curing device disclosed in the embodiment of the present application, the embodiment of the present application discloses a semiconductor process equipment. The disclosed semiconductor process equipment includes the light curing device described in the above embodiment.

[0073] Also based on the light curing device disclosed in the embodiment of the present application, please refer to Figure 3 The present application embodiment discloses a control method for a light-curing device. The light-curing device involved is the light-curing device described in any one of the above embodiments. The disclosed control method includes:

[0074] S101 , causing the controller 40 to control the driving mechanism 10 to drive the light source device 20 to reciprocate between a first position and a second position.

[0075] S102 : When the controller 40 does not receive the first signal, the driving mechanism 10 is controlled to be turned off.

[0076] The control method of the photocuring device disclosed in the embodiment of the present application corresponds to the photocuring device described in the above embodiment. Therefore, the technical effects brought about by the control method can refer to the technical effects written about the photocuring device above, and will not be repeated here.

[0077] In a further technical solution, as described above, the light curing device disclosed in the embodiment of the present application may further include a third sensing portion 60 and a cable electrically connected to the light source device 20; the torque of the cable increases when the light source device 20 rotates in a direction away from the first position; the third sensing portion 60 is used to generate a third signal when the light source device 20 rotates to a fourth position, the second position is between the first position and the fourth position, and when the light source device 20 rotates to the fourth position, the torque reaches a warning value, and the disclosed control method may further include: when the controller 40 receives the third signal, controlling the drive mechanism 10 to shut down.

[0078] In this solution, the controller 40 controls the driving mechanism 10 to shut down when receiving the third signal, so as to prevent the cable from being broken due to excessive torque.

[0079] As described above, the light curing device disclosed in the embodiment of the present application may further include a torque detection device 80, and the controller 40 may be connected to the torque detection device 80 and the driving mechanism 10 respectively. In further technical solutions, please refer to Figure 4 , the control method may further include:

[0080] S201 , controlling the torque detection device 80 to detect the actual output torque of the driving mechanism 10 .

[0081] S202: When the actual output torque is greater than the first torque threshold or less than the second torque threshold, the driving mechanism 10 is controlled to be turned off. It should be noted that the first torque threshold is greater than the second torque threshold.

[0082] The technical effects corresponding to the control method can be referred to the technical effects description of the corresponding parts of the light curing device described above, and will not be repeated here.

[0083] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different technical features of the various embodiments are not contradictory, they can be combined to form more specific embodiments. Considering the simplicity of the text, they will not be repeated here.

[0084] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation modes, which are merely illustrative rather than restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are within the protection of the present invention.

Claims

1. A light curing device for semiconductor process equipment, characterized in that: It comprises a driving mechanism (10), a light source device (20), a first sensing unit (30) and a controller (40), wherein: The light source device (20) is connected to the driving mechanism (10), the controller (40) is connected to the driving mechanism (10), the controller (40) is used to control the driving mechanism (10) to drive the light source device (20) to reciprocate between a first position and a second position, and the first sensing part (30) is used to generate a first signal when the light source device (20) rotates to a third position, and the third position is located between the first position and the second position; The controller (40) is connected to the first sensing portion (30), and when the light source device (20) reciprocates between the first position and the second position, the controller (40) controls the driving mechanism (10) to shut down if the first signal is not received.

2. The light curing device according to claim 1, characterized in that: The light curing device further comprises a third sensing portion (60) and a cable electrically connected to the light source device (20); The torque of the cable increases when the light source device (20) rotates in a direction away from the first position; The third sensing portion (60) is used to generate a third signal when the light source device (20) rotates to a fourth position, the second position is located between the first position and the fourth position, and when the light source device (20) rotates to the fourth position, the torque reaches a warning value, and the controller (40) controls the driving mechanism (10) to shut down when receiving the third signal.

3. The light curing device according to claim 2, characterized in that: The light curing device further comprises an alarm (70), the controller (40) is connected to the alarm (70), and the controller (40) is used to control the alarm (70) to sound an alarm when the first signal is not received or the third signal is received.

4. The light curing device according to claim 2, characterized in that: The light curing device further comprises a second sensing part (50), the second sensing part (50) being used for generating a second signal when the light source device (20) rotates to an initial position, the first sensing part (30) comprising a first sensor (31) and a first triggering member (32), the second sensing part (50) comprising a second sensor (51) and a second triggering member (52), the third sensing part (60) comprising a third sensor (61) and a third triggering member (62), the third sensor (61), the first sensor (31) and the second triggering member (52) being arranged on the light source device (20) and being spaced apart in the rotation direction of the light source device (20), and the third triggering member (62), the second sensor (51) and the first triggering member (32) being all fixedly arranged; When the light source device (20) rotates to the third position, the first sensor (31) rotates to a position opposite to the first trigger member (32), and is triggered by the first trigger member (32) to generate the first signal; When the light source device (20) rotates to the initial position, the second triggering member (52) rotates to a position opposite to the second sensor (52), and triggers the second sensor (51) to generate the second signal; When the light source device (20) rotates to the fourth position, the third sensor (61) rotates to a position opposite to the third triggering member (62), and is triggered by the third triggering member (62) to generate the third signal.

5. The light curing device according to claim 4, characterized in that: The second trigger member (52) is a first baffle, and the second sensor (51) is reused with the first trigger member (32) and the third trigger member (62) respectively, so as to serve as a second baffle and a third baffle that can cooperate with the first sensor (31) and the third sensor (61) respectively.

6. The light curing device according to claim 5, characterized in that: The width of the first baffle is equal to the product of the response time of the second sensor (51) and the linear speed of the light source device (20), wherein the width of the first baffle is the dimension of the first baffle in the rotation direction of the light source device (20).

7. The light curing device according to claim 2, characterized in that: The first position is an initial position, and the controller (40) is further used to control the driving mechanism (10) to drive the light source device (20) to reciprocate between the fifth position and the sixth position for a second preset time period after the light source device (20) reciprocates between the first position and the second position for a first preset time period; The fifth position is located between the third position and the first position, and the sixth position is located between the fourth position and the second position; when the light source device (20) reciprocates between the fifth position and the sixth position, the controller (40) controls the driving mechanism (10) to shut down if the first signal is not received.

8. The light curing device according to claim 1, characterized in that: The photocuring device further comprises a torque detection device (80), wherein the torque detection device (80) is used to detect an actual output torque of the driving mechanism (10), and the controller (40) is connected to the torque detection device (80) and the driving mechanism (10) respectively, and the controller (40) is used to control the driving mechanism (10) to be turned off when the actual output torque is greater than a first torque threshold or less than a second torque threshold, and the first torque threshold is greater than the second torque threshold.

9. A semiconductor process equipment, characterized in that: A light-curing device comprising the light-curing device according to any one of claims 1 to 8.

10. A method for controlling a light curing device, characterized in that: The light-curing device is the light-curing device according to claim 1, and the control method comprises: The controller (40) controls the driving mechanism (10) to drive the light source device (20) to reciprocate between the first position and the second position; When the controller (40) does not receive the first signal, the driving mechanism (10) is controlled to be closed.

11. The control method according to claim 10, characterized in that: The light curing device further comprises a third sensing part (60) and a cable electrically connected to the light source device (20); the cable increases torque when the light source device (20) rotates in a direction away from the first position; the third sensing part (60) is used to generate a third signal when the light source device (20) rotates to a fourth position, the second position is between the first position and the fourth position, and when the light source device (20) rotates to the fourth position, the torque reaches a warning value, and the control method further comprises: When the controller (40) receives the third signal, the driving mechanism (10) is controlled to be closed.

12. The control method according to claim 10, characterized in that: The light curing device further comprises a torque detection device (80), the controller (40) is connected to the torque detection device (80) and the driving mechanism (10) respectively, and the control method further comprises: controlling the torque detection device (80) to detect the actual output torque of the driving mechanism (10); When the actual output torque is greater than a first torque threshold or less than a second torque threshold, the driving mechanism (10) is controlled to be closed, and the first torque threshold is greater than the second torque threshold.

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