Fluid control valve, fluid control device, and method for manufacturing orifice plate

Abstract

The present invention provides a fluid control valve, a fluid control device, and a method for manufacturing an orifice plate, which can increase the flow rate of the fluid control valve without increasing the size of the orifice plate or an actuator, the fluid control valve comprising: an orifice plate (31) having a valve seat surface (31s); and a valve body (32) having a seating surface (32s) seated on the valve seat surface (31s), the orifice plate (31) having, in the valve seat surface (31s), a plurality of inflow ports (31i) and a plurality of outflow ports (31o) that open in a first direction, the plurality of inflow ports (31i) and the plurality of outflow ports (31o) being arranged side by side in a second direction that intersects the first direction.

Description

Technical Field

[0001] The present invention relates to a fluid control valve, a fluid control device using the fluid control valve, and a method for manufacturing an orifice plate used in the fluid control valve. Background Art

[0002] Conventionally, it has been desired to increase the flow rate of a fluid control valve, and, as shown in Patent Document 1, for example, efforts have been made to improve the structure of a valve seat member (orifice plate) having a valve seat surface.

[0003] Specifically, on the valve seat surface of the valve seat member, annular grooves forming a plurality of inlets and annular grooves forming a plurality of outlets are alternately formed in a concentric circle shape. In the fluid control valve, a plurality of inlets and a plurality of outlets are formed on the valve seat member, and the grooves forming the inlets and the grooves forming the outlets are alternately formed, so that the pressure loss from the plurality of inlets to the plurality of outlets can be reduced and a large flow of fluid can flow.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2010-230159

[0005] However, there is a limit to further increasing the flow rate by forming multiple annular grooves on a valve seat surface of limited size and forming multiple inlets and outlets in these grooves. Therefore, in order to achieve a large flow rate using a conventional orifice plate, it is necessary to enlarge the orifice plate itself or to enlarge the actuator in order to increase the stroke of the valve core. Summary of the invention

[0006] Therefore, the present invention has been made in view of the above-mentioned problems, and a main object of the present invention is to increase the flow rate of a fluid control valve without increasing the size of an orifice plate or an actuator.

[0007] That is, the fluid control valve of the present invention includes: an orifice plate having a valve seat surface; and a valve core having a seating surface seated on the valve seat surface, the orifice plate having a plurality of inlets and a plurality of outlets opening along a first direction on the valve seat surface, the plurality of inlets and the plurality of outlets being arranged in a second direction intersecting the first direction.

[0008] In such a fluid control valve, since a plurality of inlets and outlets opening along a first direction are arranged in a second direction intersecting the first direction, the boundary surface between the inlet and outlet can be extended compared to a conventional orifice plate having concentric grooves, and a large flow rate of fluid can be allowed to flow, thereby reducing pressure loss. As a result, the fluid control valve can be made larger in flow rate without increasing the size of the orifice plate or the actuator.

[0009] In order to further extend the boundary surface between the inlet and the outlet, it is desirable that the plurality of inlets and the plurality of outlets are arranged alternately in the second direction.

[0010] Furthermore, in order to further extend the boundary surface between the inlet and the outlet, it is desirable that the plurality of inlet and outlet are formed from one end to the other end of the outer peripheral portion of the valve seat surface along the first direction.

[0011] As a specific embodiment of the orifice plate, it is ideal that the orifice plate has: a first internal flow path, which opens on the valve seat surface and an opposing surface opposite to the valve seat surface; and a second internal flow path, which opens on the outer peripheral surface between the valve seat surface and the opposing surface and the valve seat surface, the first internal flow path is connected to one of the inlet and the outlet, and the second internal flow path is connected to the other of the inlet and the outlet.

[0012] Ideally, the second internal flow path is formed in plurality corresponding to each of the other of the plurality of inlets and the plurality of outlets. With the structure, the second internal flow path can be set to a shape along the first direction, that is, a shape extending along a single axis. For example, when the second internal flow path is set as a flow path on the outflow side (downstream side), the outflow direction of the fluid can be determined and the pressure loss can be reduced.

[0013] As a specific embodiment of the second internal flow path, it is desirable that the second internal flow path is formed to penetrate the orifice plate along the first direction.

[0014] As a specific embodiment of the first internal flow path, it is ideal that the first internal flow path has: a converging flow path, which opens at the opposing surface; and a plurality of branch flow paths, which branch from the converging flow path and open at the valve seat surface, each of the plurality of branch flow paths being connected to each of the plurality of inlets and one of the plurality of outlets. According to the above structure, since the first internal flow path has the converging flow path, it is possible to reduce the pressure loss when a large flow rate flows.

[0015] Preferably, the second internal flow path is formed in side walls that respectively form the plurality of branch flow paths. According to the above structure, since the merging flow path of the first internal flow path is not restricted by the second internal flow path, the flow path volume of the merging flow path can be increased, and the pressure loss when a large flow rate flows can be reduced.

[0016] In a structure in which the valve core moves relative to the valve seat surface of the orifice plate, a dead space is sometimes formed around the valve seat surface. In order to allow the fluid flowing into the dead space to flow out without stagnation, the orifice plate is preferably provided with one or more outer internal flow paths, one end of which opens around the valve seat surface and the other end opens on the outer peripheral surface or the opposing surface.

[0017] Furthermore, a fluid control device of the present invention includes: the above-mentioned fluid control valve; a flow sensor for measuring a flow rate in the flow path; and a control unit for controlling the fluid control valve based on a measurement value of the flow sensor.

[0018] Furthermore, the manufacturing method of the orifice plate of the present invention is a manufacturing method of an orifice plate having a valve seat surface on which a valve core of a fluid control valve is seated, wherein a plurality of inlets and a plurality of outlets opening along a first direction are formed on the valve seat surface of the orifice plate, and the plurality of inlets and the plurality of outlets are alternately arranged in a second direction intersecting the first direction.

[0019] According to the present invention as described above, the flow rate of the fluid control valve can be increased without increasing the size of the orifice plate or the actuator. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a diagram schematically showing the structure of a fluid control device according to an embodiment of the present invention. Figure 2 It is a partially enlarged cross-sectional view showing an orifice plate and a valve element of the fluid control valve according to the embodiment. Figure 3 is a perspective view of the orifice plate of this embodiment. Figure 4 is a plan view of the orifice plate of this embodiment. Figure 5 It is a cross-sectional view of the orifice plate taken along line AA of this embodiment. Figure 6 (a) is a schematic diagram showing the valve seat surface of the orifice plate of this embodiment, Figure 6 (b) is a schematic diagram showing the inlet of the orifice plate of this embodiment, Figure 6 (c) is a schematic diagram showing the outflow port of the orifice plate of this embodiment. Figure 7 The figure shows the simulation results of the boundary surface length-flow rate of the orifice plate of this embodiment (this example) and the conventional orifice plate (conventional example). Figure 8 (a) is a diagram showing the configuration angle of the orifice plate of this embodiment, Figure 8 (b) is a simulation result showing the flow rate based on the configuration angle. Fig. 9 is a perspective view of an orifice plate of a modified embodiment. Fig.10 is a plan view of an orifice plate of a modified embodiment. Fig.11 It is a BB line cross-sectional view of the orifice plate of the modified embodiment. Fig.12 The figures are simulation results showing the opening degree-flow rate characteristics of the orifice plate of the modified embodiment (this embodiment) and the conventional orifice plate (conventional example). Fig.13 It is a diagram schematically showing the structure of a fluid control device according to a modified embodiment. DETAILED DESCRIPTION

[0021] Hereinafter, a fluid control device according to an embodiment of the present invention will be described with reference to the accompanying drawings. In any of the following drawings, schematic illustrations are appropriately omitted or exaggerated for ease of understanding. The same components are denoted by the same reference numerals and descriptions thereof are appropriately omitted.

[0022] <Device Structure> The fluid control device 100 of this embodiment is a so-called mass flow controller, and is used, for example, to control the flow rate of a gas supplied to a chamber for performing a semiconductor manufacturing process. In addition, the fluid control device 100 can control not only gas but also liquid.

[0023] Specifically, if Figure 1 As shown, the fluid control device 100 includes: a flow path block 2, in which a flow path R is formed; a fluid control valve 3, which is used to control the gas in the flow path R; a flow sensor 4, which measures the flow rate of the flow path R; and a control unit 5, which controls the fluid control valve 3 based on the measurement value measured by the flow sensor 4.

[0024] The flow path block 2 is formed with a receiving recess 21 for mounting the fluid control valve 3. The receiving recess 21 is formed on one side of the flow path block 2 ( Figure 1 In addition, the upstream flow path R1 is connected to the bottom surface of the receiving recess 21, and the downstream flow path R2 is connected to the inner peripheral surface of the receiving recess 21. That is, the flow path R formed in the flow path block 2 is divided into the upstream flow path R1 and the downstream flow path R2 by the receiving recess 21.

[0025] Furthermore, a gas introduction port (not shown) is provided at the upstream end of the upstream flow path R1 , and a gas outlet port (not shown) is provided at the downstream end of the downstream flow path R2 .

[0026] The fluid control valve 3 is a so-called normally open valve, and its opening degree is controlled by an applied voltage. Alternatively, the fluid control valve 3 may be a so-called normally closed valve.

[0027] Specifically, if Figure 1 and Figure 2 As shown, the fluid control valve 3 includes: an orifice plate (valve seat member) 31 having a valve seat surface 31 s; a valve element 32 having a seat surface 32 s seated on the valve seat surface 31 s; and a drive unit 33 for driving the valve element 32 .

[0028] The orifice plate 31 is accommodated in the accommodation recess 21 . Here, the orifice plate 31 has a valve seat surface 31 s formed on the upper surface, and the orifice plate 31 is accommodated in the accommodation recess 21 such that the valve seat surface 31 s faces the upper opening side of the accommodation recess 21 .

[0029] like Figure 2 As shown, in the orifice plate 31, an inlet 31i and an outlet 31o are formed on the valve seat surface 31s, and a first internal flow path 311 and a second internal flow path 312 communicating with the inlet 31i and the outlet 31o are formed.

[0030] Furthermore, when the orifice plate 31 is received in the receiving recess 21, the first internal flow path 311 is provided to surround the bottom opening of the receiving recess 21, and the lower surface of the orifice plate 31 is provided to be liquid-tightly disposed on the bottom surface of the receiving recess 21 by means of a sealing member such as a metal O-ring (see Figure 1 ). That is, all the fluid flowing in the upstream flow path R1 flows into the first internal flow path 311 of the orifice plate 31. Other details of the orifice plate 31 will be described later.

[0031] The valve core 32 is integrally formed with a diaphragm member 34 provided to close the opening of the receiving recess 21 of the flow path block 2. The side periphery of the diaphragm member 34 is liquid-tightly fixed to the periphery of the upper opening of the receiving recess 21 by a sealing member such as a metal O-ring.

[0032] In addition, if Figure 2 As shown, the central portion of the diaphragm member 34 (i.e., the lower surface of the valve core 32) has a seating surface 32s, which is moved forward and backward relative to the orifice plate 31 by the driving portion 33, and is seated on or away from the valve seat surface 31s of the orifice plate 31.

[0033] The driving unit 33 includes, for example, a piezoelectric actuator 331 formed by stacking a plurality of piezoelectric elements that expand and deform when a voltage is applied. The piezoelectric actuator 331 is accommodated in a casing 332, and an intermediate member 333 such as a sphere is provided at its top end, and the intermediate member 333 presses the upper surface of the valve core 32.

[0034] When a predetermined voltage is applied to the piezoelectric actuator 331, the piezoelectric actuator 331 is extended, and a force is applied to the valve core 32 in the valve closing direction, and the seat surface 32s approaches the valve seat surface 31s by a distance corresponding to the applied voltage to achieve a predetermined opening, and when the seat surface 32s contacts the valve seat surface 31s, a fully closed state is achieved. On the other hand, in a normal state where no voltage is applied to the piezoelectric actuator 331, the valve core 32 is in a fully open state due to the elastic restoring force of the diaphragm member 34.

[0035] The flow sensor 4 is, for example, a thermal flow sensor, and includes: a flow divider element (flow resistor) 41 disposed in the flow path R; a thin tube 42 branching from the upstream side of the flow divider element 41 and converging at the downstream side of the flow divider element 41; two electric heating coils 43 wound around the thin tube 42 and applied with voltages to maintain them at fixed temperatures; and a flow calculation unit 44 that detects the voltage difference applied to each electric heating coil 43 and calculates the flow rate of the gas flowing in the flow path R. The flow sensor 4 is disposed in the flow path R on the upstream side or downstream side of the fluid control valve 3.

[0036] The control unit 5 controls the fluid control valve 3 based on the measured value (measured flow rate) measured by the flow sensor 4. The control unit 5 is a computer including a central processing unit (CPU), a memory, an analog / digital converter (A / D converter), a digital / analog converter (D / A converter), and various input and output components, and executes a fluid control program stored in the memory to control the fluid control valve 3 through the cooperation of the CPU and peripheral devices.

[0037] The control unit 5 controls the opening of the fluid control valve 3 based on the command flow rate input from the outside and the measured flow rate measured by the flow sensor 4. Specifically, the control unit 5 controls the opening of the fluid control valve 3 in such a way that the deviation between the command flow rate and the measured flow rate becomes smaller. The control unit 5 of this embodiment performs a proportional integral differential (PID) operation on the deviation between the command flow rate and the measured flow rate, and outputs a command voltage corresponding to the result to the drive circuit of the drive unit 33. The drive circuit applies a voltage corresponding to the input command voltage to the piezoelectric actuator 331.

[0038] <Specific structure of the orifice plate 31> Moreover, if Figure 3 to Figure 6 As shown, the orifice plate 31 of this embodiment is substantially disc-shaped, and has a plurality of inlets 31i and a plurality of outlets 31o opened in the first direction on a valve seat surface 31s formed on the upper surface of the orifice plate 31 and having a circular outer contour. Figure 3 to Figure 6 In the diagram, the first direction is the X direction, the second direction intersecting the first direction (here, orthogonal, but may be other than orthogonal) is the Y direction, and the direction orthogonal to the X direction and the Y direction is the Z direction.

[0039] The plurality of inlets 31i and the plurality of outlets 31o have a linear elongated opening shape extending along the first direction (X direction). Here, the plurality of inlets 31i and the plurality of outlets 31o are formed along the first direction from one end of the outer peripheral portion of the valve seat surface 31s to the other end. In the present embodiment, the opening width (the dimension of the second direction (Y direction)) of each inlet 31i in the second direction (Y direction) is fixed in the entire first direction (X direction). In addition, the opening widths of the plurality of inlets 31i are the same as each other. Similarly, the opening width of each outlet 31o in the second direction (Y direction) is fixed in the entire first direction (X direction). In addition, the opening widths of the plurality of outlets 31o are the same as each other.

[0040] The plurality of inlets 31i and the plurality of outlets 31o are arranged alternately in a second direction (Y direction) intersecting the first direction (X direction). In addition, the plurality of inlets 31i and the plurality of outlets 31o are arranged at equal intervals in the second direction (Y direction). In this way, the plurality of inlets 31i and the plurality of outlets 31o are formed in a stripe shape on the valve seat surface 31s of the orifice plate 31. In addition, a linear valve seat surface 31s extending along the first direction is formed between the inlets 31i and the outlets 31o adjacent to each other in the second direction (Y direction).

[0041] Specifically, the orifice plate 31 has a first internal flow path 311 opening at the valve seat surface 31s and an opposing surface 31t opposing the valve seat surface 31s, and a second internal flow path 312 opening at the outer peripheral surface 31u between the valve seat surface 31s and the opposing surface 31t and the valve seat surface 31s.

[0042] The first internal flow path 311 is formed to extend in the Z direction and communicate with a plurality of inlet ports 31i, and includes a confluent flow path 311a that opens at the facing surface 31t, and a plurality of branch flow paths 311b that branch from the confluent flow path 311a and open at the valve seat surface 31s. Figure 5 As shown, the longitudinal cross-sectional shape of the first internal flow path 311 along the YZ plane is comb-shaped.

[0043] The merging flow path 311a is a flow path through which the fluid flows from the upstream flow path R1 opened at the bottom surface of the housing recess 21. The merging flow path 311a is, for example, a flow path having a circular cross section.

[0044] In addition, each of the plurality of branch flow paths 311b is connected to each of the plurality of inlets 31i, so that the fluid from the confluent flow path 311a is branched and guided to each inlet 31i. The plurality of branch flow paths 311b are formed at equal intervals in the second direction, and the cross-sectional shape (cross-sectional shape along the XY plane) of each branch flow path 311b is substantially the same as the opening shape of the inlet 31i connected thereto.

[0045] The second internal flow path 312 is connected to the plurality of flow outlets 31o, and is formed in plurality with each of the plurality of flow outlets 31o. Specifically, the second internal flow path 312 is formed to penetrate the orifice plate 31 along the long side direction of the flow outlet 31o, i.e., the first direction (X direction). That is, the second internal flow path 312 is connected to the flow outlet 31o, and is opened at the outer peripheral surface 31u of the orifice plate 31 on both sides of the long side direction of the flow outlet 31o, and in the present embodiment, is opened at two locations at the outer peripheral surface 31u of the orifice plate 31. In addition, the opening shape of the second internal flow path 312 on the outer peripheral surface 31u is rectangular, but may also be other shapes.

[0046] In addition, the second internal flow path 312 is formed along the first direction (X direction) in the side wall portion 313 of the orifice plate 31 in the second direction (Y direction) where a plurality of branch flow paths 311b are formed (see Figure 5). That is, the plurality of second internal flow paths 312 and the plurality of branch flow paths 311b are alternately arranged in the second direction (Y direction) similarly to the plurality of inlets 31i and the plurality of outlets 31o. Here, as for the structure of the side wall portion 313, a groove 313m opening on the valve seat surface 31s is formed on the side wall portion 313, and the upper opening of the groove 313m becomes the outlet 31o, and the upper surface of the side wall portion 313 becomes a part of the valve seat surface 31s.

[0047] By means of the above-mentioned orifice plate structure, the straight elongated inlet 31i (see Figure 6 (b)) and the straight elongated outlet 31o (refer to Figure 6 (c)) are adjacent to each other, and the boundary surface between the inlet 31i and the outlet 31o (a part of the valve seat surface 31s) is a surface extending in a straight line (see Figure 6 (a)) can lengthen the boundary surface per unit area of ​​the valve seat surface 31s. Here, by increasing the number of inlets 31i and outlets 31o and reducing the pitch (width) of the inlets 31i and outlets 31o, the number of boundary surfaces can be increased, and the width of the boundary surfaces can be reduced. Thus, the pressure loss in the orifice plate 31 can be reduced and a large flow of fluid can flow.

[0048] Here, Figure 7 The simulation results of the boundary surface length-flow rate of the orifice plates 31 with different boundary surface lengths (the present embodiment (1) to the present embodiment (5)) and the orifice plates with the conventional structure (the conventional example) are shown. Here, the distance (opening) between the valve seat surface 31s and the seating surface 32s is set to 30 μm. In addition, the "stripe type" in the figure represents the present embodiment, and the "existing" represents the conventional example. The boundary surface lengths of the present embodiment (2) to the present embodiment (4) are between the boundary surface length of the present embodiment (1) and the boundary surface length of the present embodiment (5), and gradually increase in the order of the present embodiment (2), the present embodiment (3), and the present embodiment (4). According to Figure 7 It can be seen that in this embodiment, as the opening widths of the plurality of inlets 31i and the plurality of outlets 31o are reduced, the number of the inlets 31i and the outlets 31o is increased, and the length of the boundary surface is extended, a larger flow rate of fluid can flow.

[0049] In addition, a recessed portion 31N is formed on the outer peripheral surface 31u of the orifice plate 31 over the entire circumference (see Figure 3 , Figure 5 ). The concave portion 31N enlarges the flow path between the concave portion 31N and the receiving concave portion 21, thereby reducing pressure loss and achieving a larger flow rate.

[0050] The orifice plate 31 may be formed by subjecting a base material to machining such as cutting, or by dividing the base material into a plurality of parts, processing the parts into a predetermined shape by etching, etc., and then joining the parts after the processing.

[0051] Next, the flow of the fluid in the open state of the fluid control valve 3 will be briefly described. In the state where the seat surface 32s has left the valve seat surface 31s (valve open state), the fluid flows from the upstream side flow path R1 of the flow path block 2 to the confluent flow path 311a of the orifice plate 31, and flows from the plurality of branch flow paths 311b through the plurality of inlet ports 31i into between the valve seat surface 31s and the seat surface 32s. Then, the fluid flows into the plurality of outlet ports 31o, and flows into between the outer peripheral surface 31u of the orifice plate 31 and the inner peripheral surface of the receiving recess 21 through the second internal flow path 312. Thereafter, the fluid flows out from the downstream side flow path R2 of the flow path block 2.

[0052] The orifice plate 31 having the above-described structure allows a large amount of fluid to flow. However, the orifice plate 31 can be arranged at an angle in the housing recess 21 to allow a larger amount of fluid to flow.

[0053] Therefore, the configuration angle of the orifice plate 31 in the receiving recess 21 is described. Figure 8 As shown in (a), the state in which the outflow direction of the downstream side flow path R2 opening on the inner peripheral surface of the containing recess 21 is consistent with the long side direction of the outflow port 31o of the orifice plate 31 (the long side direction of the second internal flow path 312) is set to 0 degrees, and the angle formed by the outflow direction and the long side direction of the outflow port 31o is set to the configuration angle θ.

[0054] Figure 8 (b) shows the flow rate change caused by the arrangement angle θ of the orifice plate 31. Here, the flow rate change is shown when the distance (opening) between the valve seat surface 31s and the seat surface 32s is set to 20 μm and the outer diameter (Φ) of the valve seat surface 31s is set to 9.9 mm and 15 mm.

[0055] Based on these results, it is known that the flow rate can be increased by setting the arrangement angle θ of the orifice plate 31 to 15 degrees or more and 75 degrees or less. Furthermore, it is known that the flow rate can be further increased by setting the arrangement angle θ of the orifice plate 31 to 30 degrees or more and 60 degrees or less.

[0056] <Effects of the present embodiment> In the fluid control device 100 of the present embodiment thus constructed, since the plurality of inlets 31i opened in the first direction and the plurality of outlets 31o are alternately arranged in the second direction intersecting the first direction, the boundary surface between the inlets 31i and the outlets 31o can be extended compared to the conventional orifice plate having concentric grooves, and the pressure loss can be reduced to allow a large flow of fluid to flow. As a result, the flow rate of the fluid control valve 3 can be increased without increasing the size of the orifice plate 31 or the piezoelectric actuator 331.

[0057] Furthermore, since a plurality of second internal flow paths 312 are formed corresponding to each of the plurality of outflow ports 31o and are shaped along the first direction, that is, uniaxially extending, the outflow direction of the fluid can be determined and pressure loss can be reduced.

[0058] Furthermore, since the first internal flow path 311 has the merging flow path 311 a , it is possible to reduce pressure loss when a large flow rate flows.

[0059] Moreover, since the second internal flow path 312 is formed in the side wall portion 313 where multiple branch flow paths 311b are formed respectively, the confluent flow path 311a of the first internal flow path 311 is not restricted by the second internal flow path 312, the flow path volume of the confluent flow path 311a can be increased, and the pressure loss when a large flow rate flows can be reduced.

[0060] <Other embodiments> For example, Figures 9 to 11 As shown, the orifice plate 31 may also be configured to have one or more outer internal flow paths 314, one end of which opens around the valve seat surface 31s and the other end opens at the outer peripheral surface 31u or the opposing surface 31t.

[0061] Specifically, the orifice plate 31 has a valve seat surface 31s having a circular shape in a plan view, and an annular groove 31M is formed around the valve seat surface 31s on the upper surface formed with the valve seat surface 31s. One end of the outer internal flow path 314 opens at the bottom surface of the groove 31M.

[0062] The other end of the outer internal flow path 314 opens at the outer peripheral surface 31u of the orifice plate 31, and opens at the recess 31N formed at the outer peripheral surface 31u. With this structure, the fluid flowing into the dead space formed around the valve seat surface 31s can flow out.

[0063] Here, Fig.12 Shown in Figures 9 to 11The simulation results of the opening-flow characteristics of the orifice plate 31 (this embodiment) and the orifice plate of the conventional structure (conventional example) are shown in FIG. In addition, the "striped type" in the figure represents the present embodiment, and the "conventional" represents the conventional example. Fig.12 It can be seen that in this embodiment, the boundary surface between the inlet and the outlet is longer. Moreover, in this embodiment, the opening required for flow control of 60L / min can be reduced by about 30% compared with the previous example. Therefore, it is not necessary to enlarge the piezoelectric actuator 331 or the orifice plate 31 in order to increase the opening.

[0064] In addition, the opening widths (dimensions in the second direction) of the multiple inlets 31i of the embodiment are the same as each other, but these opening widths may be different from each other. In addition, the opening widths of the multiple outlets 31o may be different from each other. Furthermore, the opening widths of the inlet 31i and the outlet 31o may be the same as each other, or may be different from each other. In addition, the opening width of the inlet 31i or the outlet 31o may also vary in the first direction. In addition, the multiple inlets 31i or the multiple outlets 31o may not be parallel to each other, and the inlet 31i and the outlet 31o may not be parallel to each other.

[0065] Furthermore, the inlet 31i and the outlet 31o of the above-described embodiment are formed in a straight line shape extending in the first direction, but may be formed in a curved shape or a wave shape extending in the first direction.

[0066] In addition, in the above-described embodiment, the plurality of inlets 31i and the plurality of outlets 31o are alternately arranged, but they may not be alternately arranged. For example, various arrangements may be made such as a structure in which two inlets 31i and two outlets 31o are alternately arranged, a structure in which two outlets 31o are arranged on both sides of two inlets 31i, etc.

[0067] Moreover, in the embodiment, the inlet 31i is connected to the first internal flow path 311, and the outlet 31o is connected to the second internal flow path 312, but it can also be set to the opposite structure, that is, the inlet 31i is connected to the second internal flow path 312, and the outlet 31o is connected to the first internal flow path 311.

[0068] In addition, the opening parts of the first internal flow path 311 and the second internal flow path 312 of the embodiment are not limited to the embodiment. The first internal flow path 311 can also open on the outer peripheral surface 31u of the orifice plate 31, and the second internal flow path 312 can also open on the opposite surface 31t of the orifice plate 31.

[0069] Furthermore, the flow sensor 4 in the above-described embodiment is a thermal flow sensor, but may be a pressure flow sensor.

[0070] Specifically, if Fig.13 As shown, the pressure flow sensor 4 includes: a laminar flow element 45, which is arranged in the flow path R; a first pressure sensor 46, which measures the pressure on the upstream side of the laminar flow element 45; a second pressure sensor 47, which measures the pressure on the downstream side of the laminar flow element 45; and a flow calculation unit 48, which calculates the flow rate of the fluid flowing in the flow path R based on the first pressure measured by the first pressure sensor 46 and the second pressure measured by the second pressure sensor 47. The flow sensor 4 is arranged on the upstream side or downstream side of the fluid control valve 3 in the flow path R. In addition, other flow resistances such as sonic nozzles can be used instead of the laminar flow element 45.

[0071] In addition, various modifications or combinations of the embodiments may be made within the scope not departing from the spirit of the present invention. Industrial Applicability

[0072] According to the present invention, it is possible to increase the flow rate of the fluid control valve without increasing the size of the orifice plate or the actuator. Description of Reference Numerals

[0073] 100 Fluid Control Devices 3 Fluid control valve 4 Flow sensor 5. Control Unit 31 Orifice plate 31s Seat surface 31t Opposing surface 31u outer peripheral surface 31i Inlet 31o Outlet 311 First internal flow path 311a Combined flow path 311b Branch Flow 312 Second internal flow path 314 External internal flow path 32 Valve core 32s seating surface.

Claims

1. A fluid control valve, characterized in that: include: an orifice plate having a valve seating surface; and The valve core has a seating surface seated on the valve seat surface, The orifice plate has a plurality of inlets and a plurality of outlets opened in a first direction on the valve seat surface. The plurality of inlets and the plurality of outlets are arranged side by side in a second direction intersecting the first direction.

2. The fluid control valve according to claim 1, characterized in that: The plurality of inlets and the plurality of outlets are arranged alternately in the second direction.

3. The fluid control valve according to claim 1 or 2, characterized in that: The plurality of inlet ports and the plurality of outlet ports are formed along the first direction from one end portion to the other end portion of the outer peripheral portion of the valve seat surface.

4. The fluid control valve according to any one of claims 1 to 3, characterized in that: The orifice plate has: a first internal flow path opening at the valve seat surface and an opposing surface facing the valve seat surface; and The second internal flow path opens at the outer peripheral surface between the valve seat surface and the opposing surface and at the valve seat surface. The first internal flow path is connected to one of the plurality of inlets and the plurality of outlets. The second internal flow path communicates with the other of the plurality of inlets and the plurality of outlets.

5. The fluid control valve according to claim 4, characterized in that: The second internal flow path is formed in plurality corresponding to each of the other of the plurality of inlets and the plurality of outlets.

6. The fluid control valve according to any one of claims 3 to 5, characterized in that: The second internal flow path is formed to penetrate the orifice plate along the first direction.

7. The fluid control valve according to any one of claims 3 to 6, characterized in that: The first internal flow path has: a confluent flow path opening on the opposing surfaces; as well as A plurality of branch flow paths branch off from the confluent flow path and open on the valve seat surface, Each of the plurality of branch flow paths communicates with each of one of the plurality of inlets and the plurality of outlets.

8. The fluid control valve according to claim 7, characterized in that: The second internal flow path is formed in the side walls that respectively form the plurality of branch flow paths.

9. The fluid control valve according to any one of claims 1 to 8, characterized in that: The orifice plate has one or more outer internal flow paths, one end of the outer internal flow path opens around the valve seat surface, and the other end opens on the outer peripheral surface or the opposing surface.

10. A fluid control device, characterized in that: include: The fluid control valve according to any one of claims 1 to 9; A flow sensor for measuring the flow rate of the flow path; as well as The control unit controls the fluid control valve based on the measurement value of the flow sensor.

11. A method for manufacturing an orifice plate having a valve seat surface for seating a valve core of a fluid control valve, characterized in that: A plurality of inlets and a plurality of outlets are formed on the valve seat surface of the orifice plate and open in a first direction, and the plurality of inlets and the plurality of outlets are arranged in a second direction intersecting the first direction.

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