Two-stage air stripping device suitable for treating high-concentration ammonia-containing wastewater in semiconductor industry

Abstract

The invention relates to the technical field of wastewater treatment devices, and discloses a two-stage air stripping device suitable for high-concentration ammonia-containing wastewater treatment in the semiconductor industry. The air stripping mechanism is arranged on the ground and is used for carrying out air stripping treatment on the ammonia-nitrogen wastewater through a tower body in the air stripping mechanism; the filling mechanism is arranged on the tower body, and the filling mechanism is used for installing filler through a filling replacement hole and a fixing frame in the filling mechanism; according to the ammonia-nitrogen wastewater stripping tower, the stripping mechanism is arranged, wastewater is changed into tiny liquid beads through a spray head to be sprayed out to form a conical spray shape, the tiny liquid beads are sprayed to an internal filler plate and form water drops to flow to the tower bottom, and the treated wastewater flows out of a water outlet in the tower bottom and is pumped into a second tower body through a first ammonia-nitrogen wastewater stripping tower conveying pump to be circularly treated; through two-stage air stripping treatment, the device can adapt to higher ammonia-nitrogen inlet water concentration, and high-ammonia-nitrogen wastewater concentration in the semiconductor industry can be treated more efficiently.

Description

Technical Field

[0001] The invention relates to the technical field of wastewater treatment devices, and in particular to a two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry. Background Art

[0002] With the rapid development of the semiconductor industry, the concentration of ammonia nitrogen in wastewater generated during the production process is increasing, especially in some specific processes, the concentration of ammonia nitrogen wastewater often exceeds 1000mg / L. High-concentration ammonia nitrogen wastewater not only causes serious pollution to the environment, but also may have a significant impact on the aquatic ecosystem. Therefore, it is particularly important to develop efficient wastewater treatment technology, especially for the treatment of high-concentration ammonia nitrogen wastewater.

[0003] Traditional ammonia nitrogen wastewater treatment methods mainly include physical methods, chemical methods and biological methods. Among them, physical methods such as flotation and sedimentation, although simple to operate, have limited effect on the treatment of high-concentration ammonia nitrogen wastewater; chemical methods such as chlorination and ozone oxidation, although they can effectively remove ammonia nitrogen, are costly and have prominent secondary pollution problems; biological methods require a long reaction time and have high requirements for environmental conditions.

[0004] Nowadays, the stripping method is more used to treat large-flow, medium-to-high-concentration ammonia-nitrogen wastewater. At present, most semiconductor industries consider mixing the discharged high-ammonia-nitrogen wastewater with the remaining low-ammonia-nitrogen wastewater to reduce the ammonia-nitrogen concentration, and then use the stripping method for further treatment. However, for wastewater at a certain temperature, as the amount of wastewater increases, the stripping gas flow rate needs to be increased accordingly to reduce the solubility of the gas and maintain a certain treatment effect. At the same time, it will increase the energy consumption of fans, water pumps, etc. and increase operating costs. Summary of the invention

[0005] The object of the present invention is to provide a two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry, comprising a stripping mechanism; the stripping mechanism is arranged on the ground, and the stripping mechanism strips ammonia nitrogen wastewater through a tower body;

[0008] The blow-off mechanism comprises a first tower body, a second tower body, an air outlet, a plurality of air inlets, a water sprinkling port, a demister, a water spray connecting pipe, a plurality of spray nozzles and a packing plate;

[0009] The first tower body and the second tower body each include a filling cylinder, a window cylinder, a drainage cylinder and a demister cylinder, the window cylinder is fixedly mounted on the top of the filling cylinder, the drainage cylinder is fixedly mounted on the bottom of the filling cylinder, and the demister cylinder is fixedly mounted on the top of the window cylinder;

[0010] A filling mechanism, the filling mechanism is arranged on the tower body, and the filling mechanism installs the filler through the filling replacement hole and the fixing frame therein;

[0011] A visual mechanism, wherein the visual mechanism is arranged on the tower body and can inspect the liquid inside the tower body through a viewing window hole therein;

[0012] The air outlet is fixedly mounted on the top of the demister cylinder, a plurality of the air inlets are fixedly mounted on the outer wall of the drainage cylinder and are connected to the internal cavity, the water sprinkling port is fixedly mounted on the outer wall of the window cylinder, the water spray connecting pipe is fixedly mounted on the inner wall of the window cylinder, the water spray connecting pipe is connected to the water sprinkling port, a plurality of the nozzles are fixedly mounted on the outer wall of the water spray connecting pipe, the filling plate is mounted inside the filling cylinder, the demister is mounted inside the demister cylinder, and the air outlet on the second tower body is connected to one of the air inlets on the first tower body through a pipe;

[0013] An ammonia nitrogen wastewater absorption tower, an ammonium sulfate storage tank and an ammonium sulfate external load pump are arranged on one side of the tower body. The ammonia nitrogen wastewater absorption tower is connected to an absorption tower circulation pump through a pipeline. The absorption tower circulation pump is connected to the inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower through a pipeline, and another pipeline is extended from the outer wall of the pipeline between the absorption tower circulation pump and the inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower to be connected to the ammonium sulfate storage tank, and the ammonium sulfate storage tank is connected to the ammonium sulfate external load pump through a pipeline.

[0014] Optionally, a density meter is provided at the pipe between the absorption tower circulation pump and the top inlet of the outer wall of the ammonia nitrogen wastewater absorption tower.

[0015] Optionally, the top outlet of the ammonia nitrogen wastewater absorption tower is connected to a circulating fan through a pipeline, one end of the circulating fan outlet is connected to one of the air inlets on the second tower body through a pipeline, and the air outlet on the first tower body is connected to the inlet of the ammonia nitrogen wastewater absorption tower through a pipeline.

[0016] Optionally, a first liquid level gauge port, a water outlet, a sewage outlet, an overflow port and a second liquid level gauge port are fixedly installed on the outer wall of the drainage cylinder; the water outlet on the first tower body is connected to a first ammonia nitrogen wastewater stripping tower delivery pump through a pipeline; one end of the outlet of the first ammonia nitrogen wastewater stripping tower delivery pump is connected to a watering port on the second tower body through a pipeline; and the water outlet on the second tower body is connected to a second ammonia nitrogen wastewater stripping tower delivery pump through a pipeline.

[0017] Optionally, the watering port on the first tower body is connected to an electric heater via a pipeline, and one end of the inlet of the electric heater is connected to a pump body for inputting ammonia-containing wastewater via a pipeline.

[0018] Optionally, a demisting layer connection hole is fixedly installed on the outer wall of the demisting cylinder, and the position of the demisting layer connection hole corresponds to the demister inside the demisting cylinder, and a maintenance hole is fixedly installed on the bottom of the outer wall of the filling cylinder.

[0019] Optionally, the filling mechanism includes a fixed frame, a plurality of slide rails, a movable column, a movable plate, a mounting ring, a filter plate, a plurality of first fixing holes, a plurality of plug-in frames and a plurality of second fixing holes, the fixed frame is welded and fixed to the inner wall of the filling cylinder, a plurality of the slide rails are welded and fixed to the outer position between the upper and lower ends of the fixed frame, the movable column is fixedly installed at the central axis position between the upper and lower ends of the fixed frame, the outer wall of the movable plate is slidably installed on one side corresponding to the slide rail, the movable plate is slidably installed on the outer wall of the movable column through the hole in its center, the mounting ring is rotatably installed on the bottom end of the movable plate, the filter plate is fixedly installed on the top end of the mounting ring, a plurality of the plug-in frames are fixedly installed on the top of the filter plate, and are divided into a plurality of independent cavities by the plug-in frames distributed in an interlaced manner;

[0020] The filling plate is slidably installed in an independent cavity between two adjacent plug-in frames along the extension direction of the movable column, a number of the first fixing holes are opened on the end face of the mounting ring, a number of the second fixing holes are opened on the end face of the movable plate, the positions of the first fixing holes and the second fixing holes correspond to each other, the first fixing holes and the second fixing holes are internal threaded holes, and bolts are threadedly connected to the inner walls of the first fixing holes and the second fixing holes relative to each other.

[0021] Optionally, a filling replacement hole is fixedly installed on one side of the filling cylinder, a plurality of mounting frames are fixedly installed on the bottom end of the inner wall of the filling replacement hole, a driving motor is fixedly installed on one side of the mounting frame, a mounting shaft is fixedly installed on the output end of the driving motor, one end of the mounting shaft extends into the interior of the mounting frame, a roller is fixedly installed on the end of the mounting shaft extending into the interior of the mounting frame, a connecting rope is fixedly installed on the outer wall of the roller, one end of the connecting rope extends to the outer wall of the mounting frame, a plurality of second plug holes are opened on both sides of the mounting frame, a plurality of first plug holes are opened at both ends of the roller, fixing rods are installed on the inner walls of the first and second plug holes opposite to each other, external threads are opened on the outer walls of both ends of the fixing rod, and nuts are threadedly connected at both ends of the fixing rod;

[0022] A plurality of first pulleys are fixedly installed at the connection between the filling replacement hole and the inner side of the filling cylinder, a plurality of second pulleys are fixedly installed on the inner wall of the filling cylinder, and one end of the connecting rope extending to the outside of the installation frame passes through the corresponding first pulley and second pulley, and is fixedly installed on the corresponding top of the movable plate.

[0023] Optionally, a window hole is fixedly mounted on the outer wall of the window tube.

[0024] Optionally, the visual mechanism includes a mounting frame, a glass panel component, a motor component and a cleaning plate, the mounting frame is fixedly mounted on the inner wall of the window tube, and the position of the mounting frame corresponds to the window hole, a sealant is provided at the connection between the mounting frame and the inner wall of the window tube, the glass panel component is fixedly mounted on one side of the mounting frame, a sealant is provided at the connection between the glass panel component and the mounting frame, a mounting hole is opened on one side of the glass panel component, the motor component is glued and fixed to the inner wall of the mounting hole, the cleaning plate is fixedly mounted on the output end of the motor component, one side of the cleaning plate is in contact with the glass panel component, and a plurality of lead fixing seats are fixedly mounted on the outer walls of the first tower body and the second tower body.

[0025] The present invention has at least the following beneficial effects:

[0026] (1) This scheme sets up a stripping mechanism. The wastewater first enters the first tower body from the water sprinkling port at the top of the tower body. The wastewater is transformed into tiny liquid droplets through the nozzle and sprayed out to form a conical spray shape, which is sprayed onto the internal packing plate. The water mist eventually forms water droplets and flows to the bottom of the tower. The treated wastewater flows out from the water outlet at the bottom of the tower and is pumped into the second tower body through the first ammonia nitrogen wastewater stripping tower delivery pump. At the same time, the exhaust gas in the second tower body is transported to one of the air inlets of the first ammonia nitrogen stripping tower through a pipeline for circulation treatment. Through the two-stage stripping treatment, it can adapt to higher ammonia nitrogen influent concentrations and can more efficiently treat high ammonia nitrogen wastewater concentrations in the semiconductor industry.

[0027] (2) In this solution, the staff enters the filling and replacement hole, releases the fixing rod from fixing the roller inside the installation frame, starts the driving motor to drive the corresponding moving plate to rise, the roller reverses, the corresponding connecting rope expands, and the moving plate is lowered by its own gravity, and the height of the filling plate can be adjusted. The filling plate is installed in the corresponding plug-in frame through the insertion of each part, and the installation ring is set to be rotatable, which is convenient for the staff to replace the filling plate;

[0028] (3) This solution increases the height and plastic of the packing plate, so that the liquid holding capacity in the packing plate is kept at a low level, and the cross-sectional area of ​​the air flow channel in the packing plate is gradually increased, thereby enhancing the mass transfer effect and ammonia nitrogen removal rate;

[0029] (4) In this scheme, a viewing window is provided so that the staff can observe the liquid flow in the tower body through the viewing window. When the motor is started, the cleaning plate is driven to rotate, scraping away the liquid and water mist on the glass panel, making observation more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0031] Figure 1 It is a schematic diagram of the structure of the present invention;

[0032] Figure 2 This is the installation diagram of the demister of the present invention;

[0033] Figure 3 This is the installation diagram of the knot packing plate of the present invention;

[0034] Figure 4 It is the installation diagram of the viewing window of the present invention;

[0035] Figure 5 Figure 1 is a diagram of a fixing frame of the present invention;

[0036] Figure 6 This is a connection diagram of the first tower body and the second tower body of the present invention;

[0037] Figure 7 It is a cross-sectional view of the drainage tube of the present invention;

[0038] Figure 8 It is a cross-sectional view of the installation frame of the present invention;

[0039] Fig. 9 It is a front view and a side view of the tower body of the present invention;

[0040] Fig.10 This is the overall flow chart of wastewater treatment according to the present invention.

[0041] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0042] 1. Tower body; 101. First tower body; 1021. Second tower body; 102. Air outlet; 103. Air inlet; 104. Water sprinkling port; 105. Demisting layer connection hole; 106. Window hole; 107. Filling and replacement hole; 108. Maintenance hole; 109. First liquid level gauge port; 1010. Water outlet; 1011. Drain port; 1012. Overflow port; 1015. Lead fixing seat; 1016. Second liquid level gauge port; 201. Filling cylinder; 202. Window cylinder; 203. Drain cylinder; 204. Demisting cylinder; 3. Demister; 301. Water spray connecting pipe; 302. Sprinkler; 303. Mounting frame; 304. Glass panel parts; 305. Motor parts; 306. Cleaning plate; 4. Fixing frame; 401. Slide rail; 4 02. Moving column; 403. Mounting ring; 404. Filter plate; 405. First fixing hole; 406. Plug-in frame; 407. Filling plate; 408. Second fixing hole; 409. Moving plate; 5. Mounting frame; 501. Driving motor; 502. Mounting shaft; 503. Roller; 504. Connecting rope; 505. First plug hole; 506. Second plug hole; 507. Fixing rod; 508. First pulley; 509. Second pulley; 6. Ammonium sulfate external load pump; 601. Ammonium sulfate storage tank; 602. Densitometer; 603. Absorption tower circulation pump; 604. Ammonia nitrogen wastewater absorption tower; 605. Circulating fan; 606. First ammonia nitrogen wastewater stripping tower delivery pump; 607. Second ammonia nitrogen wastewater stripping tower delivery pump; 608. Electric heater. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] Example 1

[0045] See also Figure 1-Figure 10The present invention provides a two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry, comprising a stripping mechanism; the stripping mechanism is arranged on the ground, and the stripping mechanism performs stripping treatment on ammonia nitrogen wastewater through a tower body 1 therein; the stripping mechanism comprises a first tower body 101, a second tower body 1021, an air outlet 102, a plurality of air inlets 103, a water sprinkling port 104, a demister 3, a water spray connecting pipe 301, a plurality of nozzles 302 and a packing plate 407; the first tower body 101 and the second tower body 1021 both comprise a filling cylinder 201, a window cylinder 202, a drainage cylinder 203 and a demister cylinder 204, the window cylinder 202 is fixedly installed at the top of the filling cylinder 201, the drainage cylinder 203 is fixedly installed at the bottom of the filling cylinder 201, and the demister cylinder 204 is fixedly installed at the top of the window cylinder 202; a filling mechanism, the filling mechanism is arranged on the tower body 1, and the filling mechanism installs the filling material through a filling replacement hole 107 and a fixing frame 4 therein.

[0046] In some embodiments, see Figure 2 , Figure 4 A demisting layer connecting hole 105 is fixedly installed on the outer wall of the demisting cylinder 204, and the position of the demisting layer connecting hole 105 corresponds to the demisting device 3 inside the demisting cylinder 204. A maintenance hole 108 is fixedly installed on the bottom of the outer wall of the filling cylinder 201; by setting the maintenance hole 108, it is convenient for staff to enter the tower for daily maintenance and overhaul.

[0047] In this example, the demister 3 is located at the upper part of the tower body 1, below the air outlet 102. The tiny liquid droplets entrained in the gas phase will be adhered or adsorbed when passing through the demister 3. Through repeated adsorption of droplets, the extremely small droplets agglomerate and coalesce into large droplets, and under the action of gravity, return to the packing plate 407.

[0048] In this example, the defogger layer connection hole 105 is provided for replacing the defogger 3. When the gas containing mist flows through the defogger 3 at a certain speed, the mist collides with the corrugated plate due to the inertial impact of the gas and the gathered droplets are so large that the gravity generated by themselves exceeds the combined force of the rising force of the gas and the surface tension of the liquid. The droplets are then separated from the surface of the corrugated plate. The multi-fold structure of the corrugated plate of the defogger 3 increases the chance of the mist being captured. The mist that is not removed is captured at the next turn through the same action. This repeated action greatly improves the defogger efficiency.

[0049] In this example, the outer wall of the drainage cylinder 203 is fixedly installed with a first liquid level gauge port 109, a water outlet 1010, a sewage outlet 1011, an overflow port 1012 and a second liquid level gauge port 1016. The water outlet 1010 on the first tower body 101 is connected to the first ammonia nitrogen wastewater stripping tower delivery pump 606 through a pipeline. One end of the outlet of the first ammonia nitrogen wastewater stripping tower delivery pump 606 is connected to the sprinkler port 104 on the second tower body 1021 through a pipeline. The water outlet 1010 on the second tower body 1021 is connected to the second ammonia nitrogen wastewater stripping tower delivery pump 607 through a pipeline. The first tower body 101 The sprinkler port 104 is connected to the electric heater 608 through a pipeline, and one end of the inlet of the electric heater 608 is connected to a pump body for inputting ammonia-containing wastewater through a pipeline; a first liquid level gauge port 109 and a second liquid level gauge port 1016 are provided for double liquid level detection; a sewage outlet 1011 is provided for emptying the wastewater in the tower during maintenance and replacement; an overflow port 1012 is provided for automatically overflowing excess wastewater when the water level inside the stripping tower is too high; a lead fixing seat 1015 is provided for fixing the lead of the lightning rod.

[0050] A visual mechanism is arranged on the tower body 1, and the visual mechanism inspects the liquid inside the tower body 1 through the window hole 106 therein; the air outlet 102 is fixedly installed on the top of the demister cylinder 204, a plurality of air inlets 103 are fixedly installed on the outer wall of the drain cylinder 203 and are connected with the internal cavity, the water sprinkling port 104 is fixedly installed on the outer wall of the window cylinder 202, the water spray connecting pipe 301 is fixedly installed on the inner wall of the window cylinder 202, the water spray connecting pipe 301 is connected with the water sprinkling port 104, a plurality of nozzles 302 are fixedly installed on the outer wall of the water spray connecting pipe 301, the filling plate 407 is installed inside the filling cylinder 201, the demister 3 is installed inside the demister cylinder 204, and the air outlet 102 located on the second tower body 1021 is connected with one of the air inlets 103 on the first tower body 101 through a pipe.

[0051] An ammonia nitrogen wastewater absorption tower 604, an ammonium sulfate storage tank 601 and an ammonium sulfate external loading pump 6 are arranged on one side of the tower body 1. The ammonia nitrogen wastewater absorption tower 604 is connected to an absorption tower circulation pump 603 through a pipeline. The absorption tower circulation pump 603 is connected to the inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower 604 through a pipeline, and another pipeline is extended from the outer wall of the pipeline between the absorption tower circulation pump 603 and the inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower 604 to be connected to the ammonium sulfate storage tank 601, and the ammonium sulfate storage tank 601 is connected to the ammonium sulfate external loading pump 6 through a pipeline.

[0052] By setting up the stripping mechanism, the wastewater first enters the first tower body 101 from the water sprinkling port 104 at the upper part of the tower body, and the wastewater is transformed into tiny liquid droplets through the nozzle 302 to form a conical spray shape, which is sprayed onto the internal filler plate 407. The water mist eventually forms water droplets and flows to the bottom of the tower. The treated wastewater flows out from the water outlet 1010 at the bottom of the tower, and is pumped into the second tower body 1021 through the first ammonia nitrogen wastewater stripping tower delivery pump 606. At the same time, the exhaust gas in the second tower body 1021 is transported to one of the air inlets 103 of the first ammonia nitrogen stripping tower through a pipeline for circulation treatment. Through the two-stage stripping treatment, it can adapt to higher ammonia nitrogen influent concentrations, and can more efficiently treat ammonia nitrogen wastewater with a high ammonia nitrogen concentration greater than 1000 mg / L in the semiconductor industry.

[0053] In this example, the spray angles of the nozzle 302 can be divided into 60°, 90°, and 120° to reduce nozzle blockage.

[0054] In this example, the packing plate 407 may be a perforated plate corrugated packing plate that can provide sufficient mass transfer area to allow the gas and liquid phases to fully contact, so that free ammonia escapes from the wastewater and is taken away by the blown-in gas.

[0055] In some embodiments, see Figure 1 , Figure 6 , Fig. 9 , Fig.10 A density meter 602 is provided at the pipeline between the absorption tower circulation pump 603 and the top entrance of the outer wall of the ammonia nitrogen wastewater absorption tower 604. The top outlet of the ammonia nitrogen wastewater absorption tower 604 is connected to a circulation fan 605 through a pipeline. One end of the circulation fan 605 outlet is connected to one of the air inlets 103 on the second tower body 1021 through a pipeline. The air outlet 102 on the first tower body 101 is connected to the entrance of the ammonia nitrogen wastewater absorption tower 604 through a pipeline. After the primary treatment in the first tower body 101, the wastewater enters the second tower body 1021 for further treatment. The basic process of wastewater treatment is the same as the above-mentioned treatment process in the first tower body 101. The circulation fan 605 provides gas to first enter the air inlet 103 on the second tower body 1021. After gas-liquid mass transfer in the tower, the gas escapes into the first tower body 101 through the air outlet 102 on the second tower body 1021, and finally is discharged into the ammonia nitrogen wastewater absorption tower 604 through the first tower body 101.

[0056] In this example, the ammonia nitrogen discharged from the first tower body 101 is circulated through the ammonia nitrogen wastewater absorption tower 604 and then discharged into the ammonium sulfate storage tank 601 .

[0057] In some embodiments, see Figure 3 , Figure 5 , Figure 8The filling mechanism includes a fixed frame 4, a plurality of slide rails 401, a movable column 402, a movable plate 409, a mounting ring 403, a filter plate 404, a plurality of first fixing holes 405, a plurality of plug-in frames 406 and a plurality of second fixing holes 408. The fixed frame 4 is welded and fixed to the inner wall of the filling cylinder 201. The plurality of slide rails 401 are welded and fixed to the outer position between the upper and lower ends of the fixed frame 4. The movable column 402 is fixedly installed at the central axis position between the upper and lower ends of the fixed frame 4. The outer wall of the movable plate 409 is slidably installed on one side of the corresponding slide rail 401. The movable plate 409 is slidably installed on the outer wall of the movable column 402 through the hole in the center thereof. The mounting ring 403 is rotatably installed at the bottom end of the movable plate 409. The filter plate 404 is fixedly installed at the top end of the mounting ring 403.

[0058] A plurality of plug-in frames 406 are fixedly installed on the top of the filter plate 404, and are divided into a plurality of independent cavities by the plug-in frames 406 that are staggered with each other; a filling plate 407 is slidably installed in an independent cavity between two adjacent plug-in frames 406 along the extension direction of the movable column 402, a plurality of first fixing holes 405 are opened on the end face of the mounting ring 403, and a plurality of second fixing holes 408 are opened on the upper end face of the movable plate 409, the first fixing holes 405 and the second fixing holes 408 are located correspondingly, the first fixing holes 405 and the second fixing holes 408 are internal threaded holes, and the inner walls of the first fixing holes 405 and the second fixing holes 408 relative to each other are threadedly connected with bolts; a filling replacement hole 107 is fixedly installed on one side of the filling cylinder 201.

[0059] A plurality of mounting frames 5 are fixedly installed at the bottom of the inner wall of the filling and replacement hole 107, a driving motor 501 is fixedly installed on one side of the mounting frame 5, a mounting shaft 502 is fixedly installed on the output end of the driving motor 501, one end of the mounting shaft 502 extends into the interior of the mounting frame 5, a roller 503 is fixedly installed on the end of the mounting shaft 502 extending into the interior of the mounting frame 5, a connecting rope 504 is fixedly installed on the outer wall of the roller 503, one end of the connecting rope 504 extends to the outer wall of the mounting frame 5, a plurality of second plug holes 506 are opened on both sides of the mounting frame 5, and a plurality of first plug holes 506 are opened at both ends of the roller 503. The socket 505, the inner walls of the first socket 505 and the second socket 506 are relatively installed with fixing rods 507, the outer walls at both ends of the fixing rods 507 are provided with external threads, and nuts are threadedly connected at both ends of the fixing rods 507; a plurality of first pulleys 508 are fixedly installed at the connection between the filling replacement hole 107 and the inner side of the filling cylinder 201, and a plurality of second pulleys 509 are fixedly installed on the inner wall of the filling cylinder 201, and one end of the connecting rope 504 extends to the outside of the mounting frame 5 and passes through the corresponding first pulley 508 and the second pulley 509, and is fixedly installed on the top of the corresponding movable plate 409.

[0060] The staff enters the filling and replacement hole 107, releases the fixing rod 507 on the roller 503 inside the installation frame 5, and starts the driving motor 501 to drive the corresponding movable plate 409 to rise. The roller 503 reverses to expand the corresponding connecting rope 504, and the movable plate 409 descends by its own gravity. The height of the filling plate 407 can be adjusted. The filling plate 407 is installed in the corresponding plug-in frame 406 by inserting each part, and the mounting ring 403 is set to be rotatable, which is convenient for the staff to replace the filling plate 407.

[0061] In this example, a driving motor 501 is provided to drive the mounting shaft 502 and the roller 503 thereon to rotate, thereby controlling the retraction and extension of the connecting rope 504 , and the connecting rope 504 is limited by the corresponding first pulley 508 and second pulley 509 .

[0062] In this example, the mounting ring 403 is fixed by means of the first fixing hole 405 and the second fixing hole 408 and bolts.

[0063] In this example, the height and plastic of the packing plate 407 are increased so that the liquid holding capacity in the packing plate is kept at a low level, and the cross-sectional area of ​​the air flow channel in the packing plate is gradually increased, thereby enhancing the mass transfer effect and the ammonia nitrogen removal rate.

[0064] In some embodiments, see Figure 4 The outer wall of the window tube 202 is fixedly installed with a window hole 106. The visual mechanism includes a mounting frame 303, a glass panel member 304, a motor member 305 and a cleaning plate 306. The mounting frame 303 is fixedly installed on the inner wall of the window tube 202, and the position of the mounting frame 303 corresponds to the window hole 106. A sealant is provided at the connection between the mounting frame 303 and the inner wall of the window tube 202. The glass panel member 304 is fixedly installed on one side of the mounting frame 303. A sealant is provided at the connection between the glass panel member 304 and the mounting frame 303. One side of the glass panel member 304 is provided with a There is a mounting hole, the motor component 305 is glued and fixed to the inner wall of the mounting hole, the cleaning plate 306 is fixedly installed at the output end of the motor component 305, one side of the cleaning plate 306 is in contact with the glass panel component 304, and a plurality of lead fixing seats 1015 are fixedly installed on the outer walls of the first tower body 101 and the second tower body 1021; by setting the window hole 106, the staff can observe the liquid flow of the tower body through the window hole 106, and the motor component 305 is started to drive the cleaning plate 306 to rotate, scraping away the liquid and water mist on the glass panel component 304, making observation more convenient.

[0065] In this example, the reserved interfaces such as the air outlet 102, the air inlet 103 and the maintenance hole 108, the first liquid level gauge port 109, the second liquid level gauge port 1016 on the tower body 1 can adjust the position and angle according to the actual installation situation; the second tower body 1021 is placed in front of the first tower body 101 to facilitate the complete circulation of the gas circuit.

[0066] In this example, a densitometer 602 is provided to detect density and the density of the absorption liquid is regularly detected, thereby determining the concentration degree of ammonium sulfate and the frequency of discharge.

[0067] In this example, in the tower body 1, the gas-water ratio is controlled within the range of 1500 to 2500.

[0068] Example 2

[0069] In this example, a matching sulfuric acid port may be provided on the outer wall of the drainage tube 203 for sulfuric acid to enter the first tower body 101 and the second tower body 1021 .

[0070] In this example, a tap water inlet may be provided on the outer wall of the drainage cylinder 203 to replenish tap water and maintain the liquid level in the absorption tower.

[0071] The working process and principle of the present invention are as follows: the influent ammonia nitrogen concentration is 1200 mg / L, the influent volume is 5 m 3 / h. Maintain water flow of 5m 3 / h for plate heat exchange, the water temperature is raised to 50°C by the electric heater 608, and then enters the first tower body 101 and the second tower body 1021 in turn. The gas rising from the bottom of the tower is mass-exchanged with the high-concentration ammonia-containing wastewater entering from the top of the tower, and the ammonia nitrogen in the wastewater enters the gas phase. The gas passes through the second tower body 1021 and the first tower body 101 in turn, and then enters the ammonia nitrogen wastewater absorption tower 604, where the gas is absorbed by 30% sulfuric acid absorption liquid to meet the discharge requirements.

[0072] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry, characterized in that: include: Blow-off mechanism; The stripping mechanism is arranged on the ground, and the stripping mechanism performs stripping treatment on the ammonia nitrogen wastewater through the tower body (1) therein; The blow-off mechanism comprises a first tower body (101), a second tower body (1021), an air outlet (102), a plurality of air inlets (103), a water sprinkling port (104), a demister (3), a water spray connecting pipe (301), a plurality of spray heads (302) and a filler plate (407); The first tower body (101) and the second tower body (1021) both comprise a filling cylinder (201), a window cylinder (202), a drainage cylinder (203) and a demister cylinder (204); the window cylinder (202) is fixedly mounted on the top end of the filling cylinder (201); the drainage cylinder (203) is fixedly mounted on the bottom end of the filling cylinder (201); and the demister cylinder (204) is fixedly mounted on the top end of the window cylinder (202); A filling mechanism, the filling mechanism being arranged on the tower body (1), and the filling mechanism installing a filler through a filling replacement hole (107) and a fixing frame (4) therein; A visual mechanism, the visual mechanism being arranged on the tower body (1), and the visual mechanism inspecting the liquid inside the tower body (1) through a viewing window (106) therein; The air outlet (102) is fixedly mounted on the top of the demister cylinder (204); a plurality of the air inlets (103) are fixedly mounted on the outer wall of the drainage cylinder (203) and are connected to the internal cavity; the water sprinkling port (104) is fixedly mounted on the outer wall of the window cylinder (202); the water spray connecting pipe (301) is fixedly mounted on the inner wall of the window cylinder (202); the water spray connecting pipe (301) is connected to the water sprinkling port (104); a plurality of the nozzles (302) are fixedly mounted on the outer wall of the water spray connecting pipe (301); the filling plate (407) is mounted inside the filling cylinder (201); the demister (3) is mounted inside the demister cylinder (204); the air outlet (102) on the second tower body (1021) is connected to one of the air inlets (103) on the first tower body (101) through a pipe; An ammonia nitrogen wastewater absorption tower (604), an ammonium sulfate storage tank (601) and an ammonium sulfate external load pump (6) are arranged on one side of the tower body (1); the ammonia nitrogen wastewater absorption tower (604) is connected to an absorption tower circulation pump (603) via a pipeline; the absorption tower circulation pump (603) is connected to an inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower (604) via a pipeline; another pipeline is extended from the outer wall of the pipeline between the absorption tower circulation pump (603) and the inlet at the top of the outer wall of the ammonia nitrogen wastewater absorption tower (604) to be connected to the ammonium sulfate storage tank (601); and the ammonium sulfate storage tank (601) is connected to the ammonium sulfate external load pump (6) via a pipeline.

2. A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 1, characterized in that: A density meter (602) is provided at the pipe between the absorption tower circulation pump (603) and the top inlet of the outer wall of the ammonia nitrogen wastewater absorption tower (604).

3. A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 2, characterized in that: The top outlet of the ammonia nitrogen wastewater absorption tower (604) is connected to a circulation fan (605) via a pipeline, one end of the circulation fan (605) outlet is connected to one of the air inlets (103) on the second tower body (1021) via a pipeline, and the air outlet (102) on the first tower body (101) is connected to the inlet of the ammonia nitrogen wastewater absorption tower (604) via a pipeline.

4. A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 2, characterized in that: The outer wall of the drainage cylinder (203) is fixedly mounted with a first liquid level gauge port (109), a water outlet (1010), a sewage outlet (1011), an overflow port (1012) and a second liquid level gauge port (1016); the water outlet (1010) on the first tower body (101) is connected to a first ammonia nitrogen wastewater stripping tower delivery pump (606) via a pipeline; one end of the outlet of the first ammonia nitrogen wastewater stripping tower delivery pump (606) is connected to a watering port (104) on the second tower body (1021) via a pipeline; the water outlet (1010) on the second tower body (1021) is connected to a second ammonia nitrogen wastewater stripping tower delivery pump (607) via a pipeline.

5. The two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 1 is characterized in that: The watering port (104) on the first tower body (101) is connected to an electric heater (608) via a pipeline, and one inlet end of the electric heater (608) is connected to a pump body for inputting ammonia-containing wastewater via a pipeline.

6. The two-stage stripping device for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 1 is characterized in that: A demisting layer connection hole (105) is fixedly installed on the outer wall of the demisting cylinder (204), and the position of the demisting layer connection hole (105) corresponds to the demister (3) inside the demisting cylinder (204). A maintenance hole (108) is fixedly installed on the bottom of the outer wall of the filling cylinder (201).

7. The two-stage stripping device for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 1 is characterized in that: The filling mechanism comprises a fixed frame (4), a plurality of slide rails (401), a movable column (402), a movable plate (409), a mounting ring (403), a filter plate (404), a plurality of first fixing holes (405), a plurality of plug-in frames (406) and a plurality of second fixing holes (408); the fixed frame (4) is welded and fixed to the inner wall of the filling cylinder (201); the plurality of slide rails (401) are welded and fixed to the outer position between the upper and lower ends of the fixed frame (4); the movable column (402) is fixedly mounted on the upper and lower ends of the fixed frame (4). The outer wall of the movable plate (409) is slidably mounted on a side corresponding to the slide rail (401), the movable plate (409) is slidably mounted on the outer wall of the movable column (402) through the hole in its center, the mounting ring (403) is rotatably mounted on the bottom end of the movable plate (409), the filter plate (404) is fixedly mounted on the top end of the mounting ring (403), a plurality of the plug-in frames (406) are fixedly mounted on the top of the filter plate (404), and are divided into a plurality of independent cavities by the plug-in frames (406) that are staggered with each other; The filling plate (407) is slidably installed in an independent cavity between two adjacent plug-in frames (406) along the extension direction of the movable column (402); a plurality of the first fixing holes (405) are opened on the end face of the mounting ring (403); a plurality of the second fixing holes (408) are opened on the upper end face of the movable plate (409); the positions of the first fixing holes (405) and the second fixing holes (408) correspond to each other; the first fixing holes (405) and the second fixing holes (408) are internal threaded holes; and the inner walls of the first fixing holes (405) and the second fixing holes (408) are threadedly connected with bolts.

8. The two-stage stripping device for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 7 is characterized in that: A filling replacement hole (107) is fixedly mounted on one side of the filling cylinder (201); a plurality of mounting frames (5) are fixedly mounted on the bottom end of the inner wall of the filling replacement hole (107); a driving motor (501) is fixedly mounted on one side of the mounting frame (5); a mounting shaft (502) is fixedly mounted on the output end of the driving motor (501); one end of the mounting shaft (502) extends into the interior of the mounting frame (5); a roller (503) is fixedly mounted on the end of the mounting shaft (502) extending into the interior of the mounting frame (5); A connecting rope (504) is fixedly installed on the outer wall of the drum (503), one end of the connecting rope (504) extends to the outer wall of the installation frame (5), a plurality of second plug holes (506) are provided on both sides of the installation frame (5), a plurality of first plug holes (505) are provided at both ends of the drum (503), and fixing rods (507) are installed on the inner walls of the first plug holes (505) and the second plug holes (506) opposite to each other, and external threads are provided on the outer walls of both ends of the fixing rod (507), and nuts are threadedly connected to the two ends of the fixing rod (507); A plurality of first pulleys (508) are fixedly installed at the connection between the filling replacement hole (107) and the inner side of the filling cylinder (201), and a plurality of second pulleys (509) are fixedly installed on the inner wall of the filling cylinder (201). One end of the connecting rope (504) extends to the outside of the installation frame (5), passes through the corresponding first pulley (508) and the second pulley (509), and is fixedly installed at the top of the corresponding movable plate (409).

9. The two-stage stripping device for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 1, characterized in that: A window hole (106) is fixedly mounted on the outer wall of the window tube (202).

10. A two-stage stripping device suitable for treating high-concentration ammonia-containing wastewater in the semiconductor industry according to claim 9, characterized in that: The visual mechanism comprises a mounting frame (303), a glass panel component (304), a motor component (305) and a cleaning plate (306); the mounting frame (303) is fixedly mounted on the inner wall of the window tube (202), and the position of the mounting frame (303) corresponds to the window hole (106); a sealant is provided at the connection between the mounting frame (303) and the inner wall of the window tube (202); the glass panel component (304) is fixedly mounted on one side of the mounting frame (303); and the glass panel component A sealant is provided at the connection between the glass panel (304) and the mounting frame (303); a mounting hole is provided on one side of the glass panel (304); the motor component (305) is glued and fixed to the inner wall of the mounting hole; the cleaning plate (306) is fixedly installed at the output end of the motor component (305); one side of the cleaning plate (306) is in contact with the glass panel (304); and a plurality of lead fixing seats (1015) are fixedly installed on the outer walls of the first tower body (101) and the second tower body (1021).

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