A large-load piezoelectric tilt stage

Abstract

The present invention relates to the technical field of precision positioning stages, and discloses a large-load piezoelectric yaw stage, which includes a housing, an amplified piezoelectric actuator, and a moving carrier plate. The housing includes a hollow rectangular ring cavity in the shape of a double-square. The amplified piezoelectric actuator is arranged in the rectangular ring cavity. The amplified piezoelectric actuator includes two X-axis amplified piezoelectric actuators, two Y-axis amplified piezoelectric actuators, and four Z-axis amplified piezoelectric actuators. The moving carrier plate is arranged above the amplified piezoelectric actuator, and the moving carrier plate includes a rectangular-ring-shaped XY-axis moving carrier plate and a Z-axis moving carrier plate. The XY-axis moving carrier plate includes an X-axis moving carrier plate and a Y-axis moving carrier plate. The present invention realizes the deflection of the θX and θY axes and the linear motion of the Z axis by connecting the X-axis amplified piezoelectric actuator, the Y-axis amplified piezoelectric actuator, and the Z-axis amplified piezoelectric actuator in series in the X-axis and Y-axis planes and in the Y-axis direction. The present invention has the advantages of small coupling of the series structure, strong bearing capacity, high closed-loop repeat positioning accuracy, and strong adaptability.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning stages, and more specifically, relates to a large-load piezoelectric yaw stage. Background Art

[0002] With the continuous improvement of today's technological level and the in-depth research in fields such as ultra-precision machining and precision operation, there is an increasing need for further research on precision motion. In the field of micro-nano precision machining, piezoelectric ceramic actuators are increasingly used, and this device can be applied to high-performance nano-positioning systems in semiconductor probe stations and microscope systems, as well as nano-level positioning stages driven by piezoelectric ceramic motors. Piezoelectric positioning stages have been widely used in important fields such as micro-assembly, scanning probe microscopes, piezoelectric quick tool servo, and biological cell micro-operation due to their large output force, high resolution, and fast response speed. Existing piezoelectric positioning stages have problems such as small load capacity, low repeat positioning accuracy, large coupling, and poor adaptability.

[0003] Based on the above, the problem to be solved currently is: to provide a large-load piezoelectric yaw stage that can achieve deflection of two axes, θX and θY, and linear motion of the Z axis, with large load capacity, high repeat positioning accuracy, small coupling, and strong adaptability. Summary of the Invention

[0004] The purpose of the present invention is to provide a large-load piezoelectric yaw stage, aiming to solve the problems of small load capacity, low repeat positioning accuracy, large coupling, and poor adaptability in the existing positioning platform.

[0005] The present invention is implemented as follows. A large-load piezoelectric yaw stage includes:

[0006] A housing, which includes a bottom wall, an inner side wall, and an outer side wall. The bottom wall, the inner side wall, and the outer side wall enclose a hollow rectangular ring cavity in the shape of a double rectangle.

[0007] An amplified piezoelectric actuator, which is arranged in the rectangular ring cavity. The amplified piezoelectric actuator includes 2 X-axis amplified piezoelectric actuators and 2 Y-axis amplified piezoelectric actuators arranged close to the inner side wall, and 4 Z-axis amplified piezoelectric actuators arranged close to the outer side wall.

[0008] A moving carrier plate, which is arranged above the amplified piezoelectric actuator. The moving carrier plate sequentially includes a rectangular ring-shaped XY-axis moving carrier plate and a Z-axis moving carrier plate from the middle to the periphery. The XY-axis moving carrier plate includes two opposite X-axis moving carrier plates and two opposite Y-axis moving carrier plates.

[0009] One end of the Z-axis amplifying piezoelectric actuator is fixedly connected to the bottom wall of the housing, and the other end of the Z-axis amplifying piezoelectric actuator is connected to one side of the Z-axis moving carrier plate through a first flexible hinge. The four Z-axis amplifying piezoelectric actuators drive the four sides of the Z-axis moving carrier plate to achieve linear Z-axis movement. One end of the X-axis amplifying piezoelectric actuator is fixedly connected to one side of the Z-axis moving carrier plate, and the other end of the X-axis amplifying piezoelectric actuator is connected to one X-axis moving carrier plate through a second flexible hinge. The two X-axis amplifying piezoelectric actuators drive the two X-axis moving carrier plates to achieve X-axis deflection. One end of the Y-axis amplifying piezoelectric actuator is fixedly connected to one side of the Z-axis moving carrier plate, and the other end of the Y-axis amplifying piezoelectric actuator is connected to one Y-axis moving carrier plate through a second flexible hinge. The two Y-axis amplifying piezoelectric actuators drive the two Y-axis moving carrier plates to achieve Y-axis deflection.

[0010] Furthermore, guide hinges are provided between the X-axis amplifying piezoelectric actuator and the Z-axis amplifying piezoelectric actuator, and between the Y-axis amplifying piezoelectric actuator and the Z-axis amplifying piezoelectric actuator. The guide hinges are fixedly connected to the bottom wall of the housing and the Z-axis motion carrier plate, and are used to restrict the left and right movement of the X-axis amplifying piezoelectric actuator, the Y-axis amplifying piezoelectric actuator and the Z-axis amplifying piezoelectric actuator.

[0011] Furthermore, the guide hinge is a convex block, which includes a small rectangular block at the top and a large rectangular block at the bottom. The small rectangular block is provided with a threaded hole for connecting the Z-axis motion carrier plate with a screw. The upper part of the large rectangular block is provided with a through hole, and a left flexible arm and a right flexible arm are provided at the upper left and upper right of the through hole, respectively. The lower part of the large rectangular block is provided with a threaded hole for connecting the housing with a screw.

[0012] Furthermore, the four Z-axis amplifying piezoelectric actuators are arranged corresponding to the four sides of the Z-axis moving carrier plate; the movable ends of the two X-axis amplifying piezoelectric actuators are arranged corresponding to the two X-axis moving carrier plates, and the fixed ends of the X-axis amplifying piezoelectric actuators are arranged corresponding to the Z-axis moving carrier plate; the movable ends of the two Y-axis amplifying piezoelectric actuators are arranged corresponding to the two Y-axis moving carrier plates, and the fixed ends of the Y-axis amplifying piezoelectric actuators are arranged corresponding to the Z-axis moving carrier plate.

[0013] Furthermore, the second flexible hinge is connected to the middle of the X-axis motion carrier plate or the Y-axis motion carrier plate, respectively.

[0014] Furthermore, the X-axis amplifying piezoelectric actuator, the Y-axis amplifying piezoelectric actuator, and the Z-axis amplifying piezoelectric actuator each include: an amplifying piezoelectric actuator body, piezoelectric ceramic, and a strain sensor;

[0015] The amplifying piezoelectric actuator body includes a first ceramic fixed end, four third flexible hinges, a first arc-shaped boss, a second ceramic fixed end, and a second arc-shaped boss. The first ceramic fixed end, the first arc-shaped boss, the second ceramic fixed end, and the second arc-shaped boss are sequentially connected to form a closed-loop hollow cavity. The first ceramic fixed end and one end of the first arc-shaped boss, the other end of the first arc-shaped boss and the second ceramic fixed end, the second ceramic fixed end and one end of the second arc-shaped boss, and the other end of the second arc-shaped boss and the first ceramic fixed end are respectively connected by third flexible hinges. The first and second arc-shaped bosses are symmetrically arranged vertically, and the four third flexible hinges are symmetrically arranged on the left and right sides of the first and second arc-shaped bosses. The two ends of the piezoelectric ceramic are in contact with the first and second ceramic fixed ends, respectively, and the center line connecting the first and second ceramic fixed ends forms an angle α with the horizontal line. The outer surfaces of the four third flexible hinges and the two arc-shaped bosses are all flat. Several strain sensors are attached to the upper and lower surfaces of the amplifying piezoelectric actuator body, and the strain sensors are electrically connected to the control system.

[0016] Furthermore, each of the amplified piezoelectric actuators has four strain sensors on its upper and lower surfaces, which are arranged in pairs corresponding to the third flexible hinge. Furthermore, the piezoelectric ceramic is a low-pressure stacked co-fired piezoelectric ceramic.

[0017] Furthermore, the housing is provided with fixing holes around its perimeter for fixed connection with other mechanisms.

[0018] The large-load piezoelectric deflection stage of the present invention is connected in series in the X-axis, Y-axis and Z-axis planes and in the Y-axis direction by multiple X-axis amplified piezoelectric actuators, Y-axis amplified piezoelectric actuators: 1. It realizes the deflection of the θX and θY axes and the linear motion of the Z-axis, and achieves three-dimensional precision positioning; 2. The series structure has low coupling; 3. It greatly improves the load-bearing capacity, which can reach 5KG.

[0019] This invention features a high-load piezoelectric pendulum stage with a closed-loop repeatability of up to 0.006%FS, making it suitable for various high-precision applications. The stage has a hollow center, allowing light transmission and thus can also be used for prism positioning and beam deflection, demonstrating its strong functionality. The overall structure is reasonable, compact, and small in size, facilitating integration into other application systems.

[0020] This invention utilizes the inverse piezoelectric effect principle of piezoelectric technology, combined with the structural design of the amplified piezoelectric actuator body, to achieve high precision, small size, no coupling, and fast transmission speed. This invention employs a strain sensor for real-time position detection and feedback, which eliminates the hysteresis and creep characteristics of piezoelectric ceramics, achieving nanometer-level precision positioning control. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural schematic diagram of the large-load piezoelectric deflector provided by the present invention;

[0022] Figure 2 This is a top view of the large-load piezoelectric deflector provided by the present invention;

[0023] Figure 3 The present invention provides Figure 2 A schematic diagram of the cross-sectional structure along the AA direction;

[0024] Figure 4 The present invention provides Figure 2 A schematic diagram of the cross-sectional structure along the BB direction;

[0025] Figure 5 The present invention provides Figure 2 A schematic diagram of the cross-sectional structure along the CC direction;

[0026] Figure 6 This is a three-dimensional structural schematic diagram of the housing provided by the present invention;

[0027] Figure 7 This is a top view of the combination of the housing and the amplified piezoelectric actuator provided by the present invention;

[0028] Figure 8 This is a front view of the Z-axis amplified piezoelectric actuator provided by the present invention;

[0029] Figure 9 This is a front view of the guide hinge provided by the present invention;

[0030] In the diagram: 1-House; 11-Bottom wall; 12-Inner side wall; 13-Outer side wall; 14-Fixing hole; 2-Amplifying piezoelectric actuator; 21-X-axis amplifying piezoelectric actuator; 22-Y-axis amplifying piezoelectric actuator; 23-Z-axis amplifying piezoelectric actuator; 200-Amplifying piezoelectric actuator body; 201-First ceramic fixing end; 202-First arc boss; 203-Second ceramic fixing end; 204-Second arc boss; 205-Third flexible hinge; 210-Piezoelectric ceramic; 220-Strain sensor; 3-Moving carrier plate; 31-XY-axis moving carrier plate; 311-X-axis moving carrier plate; 312-Y-axis moving carrier plate; 32-Z-axis moving carrier plate; 4-First flexible hinge; 5-Second flexible hinge; 6-Guide hinge; 61-First through hole; 62-Left flexible arm; 63-Right flexible arm; 7-Screw. Detailed Implementation

[0031] In order to make the objectives, technical solutions, and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0032] The implementation of the present invention will be described in detail below with reference to specific embodiments.

[0033] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the accompanying drawings are only used for illustrative purposes and cannot be understood as a limitation of this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0034] Refer to Figure 1-9 As shown, it is a preferred embodiment provided by the present invention.

[0035] The large-load piezoelectric yaw stage includes: a housing 1, an amplified piezoelectric actuator 2, and a moving carrier plate 3. Refer to Figure 1-2 The housing 1 includes a bottom wall 11, an inner side wall 12, and an outer side wall 13. Refer to Figure 6 The hollow "hui"-shaped, upwardly open rectangular ring cavity formed by the bottom wall 11, the inner side wall 12, and the outer side wall 13, that is, a through hole for transmitting light is provided at the center of the housing 1, and the through hole is surrounded by the inner side wall 12. Fixing holes 14 are provided around the housing 1 for fixed connection with other mechanisms.

[0036] The amplified piezoelectric actuator 2 is disposed in the rectangular ring cavity. Refer to Figure 3 , 4 , 5, 7. The amplified piezoelectric actuator 2 includes two X-axis amplified piezoelectric actuators 21, two Y-axis amplified piezoelectric actuators 22, and four Z-axis amplified piezoelectric actuators 23. The two X-axis amplified piezoelectric actuators 21 and the two Y-axis amplified piezoelectric actuators 22 are arranged inside the rectangular ring cavity, close to the inner side wall 12. The four Z-axis amplified piezoelectric actuators 23 are disposed outside the X-axis amplified piezoelectric actuators 21 and the Y-axis amplified piezoelectric actuators 22, close to the outer side wall 13. The rectangular ring cavity is formed by connecting the ends of two groups of parallel strip-shaped grooves. The two X-axis amplified piezoelectric actuators 21 are respectively arranged in a group of mutually parallel strip-shaped grooves, and the two Y-axis amplified piezoelectric actuators 22 are respectively arranged in another group of mutually parallel strip-shaped grooves. The four Z-axis amplified piezoelectric actuators 23 are correspondingly arranged in the four strip-shaped grooves.

[0037] The motion carrier plate 3 is disposed on the amplified piezoelectric actuator 2 at the opening of the rectangular annular cavity. The motion carrier plate 3 comprises, from its center outwards, a rectangular annular XY-axis motion carrier plate 31 and a Z-axis motion carrier plate 32, with through holes in the center of both the XY-axis and Z-axis motion carrier plates 31. The size of the through hole in the XY-axis motion carrier plate 31 is approximately the same as the size of the through hole in the center of the housing 1. The size of the through hole in the Z-axis motion carrier plate 32 is slightly larger than the outer contour size of the XY-axis motion carrier plate 31.

[0038] The XY-axis motion carrier 31 includes two opposing X-axis motion carriers 311 and two opposing Y-axis motion carriers 312. Four Z-axis amplifying piezoelectric actuators 23 are arranged corresponding to the four sides of the Z-axis motion carrier 32. The movable ends of the two X-axis amplifying piezoelectric actuators 21 are respectively arranged corresponding to the two X-axis motion carriers 311, and the fixed ends of the X-axis amplifying piezoelectric actuators 21 are corresponding to the Z-axis motion carrier 32. The movable ends of the two Y-axis amplifying piezoelectric actuators 22 are respectively arranged corresponding to the two Y-axis motion carriers 312, and the fixed ends of the Y-axis amplifying piezoelectric actuators 22 are corresponding to the Z-axis motion carrier 32.

[0039] One end (fixed end) of the Z-axis amplifying piezoelectric actuator 23 is fixedly connected to the bottom wall 11 of the housing 1, and the other end (movable end) of the Z-axis amplifying piezoelectric actuator 23 is connected to the corresponding side of the Z-axis moving carrier plate 32 via a first flexible hinge 4. Controlling the four Z-axis amplifying piezoelectric actuators 23 causes the four sides of the Z-axis moving carrier plate 32 to move linearly in the Z-axis direction. One end (fixed end) of the X-axis amplifying piezoelectric actuator 21 is fixedly connected to one side of the Z-axis moving carrier plate 32, and the other end (movable end) of the X-axis amplifying piezoelectric actuator 21 is connected to an X-axis moving carrier plate 311 via a second flexible hinge 5. Controlling the two X-axis amplifying piezoelectric actuators 21 causes the two X-axis moving carrier plates 311 to deflect along the X-axis. One end (fixed end) of the Y-axis amplifying piezoelectric actuator 22 is fixedly connected to one side of the Z-axis moving carrier plate 32, and the other end of the Y-axis amplifying piezoelectric actuator 22 is connected to a Y-axis moving carrier plate 312 through a second flexible hinge 5, thereby controlling two Y-axis amplifying piezoelectric actuators 22 to achieve Y-axis deflection of the two Y-axis moving carrier plates 312. Preferably, the second flexible hinge 5 is connected to the middle of the X-axis moving carrier plate 311 or the Y-axis moving carrier plate 312 respectively.

[0040] The first flexible hinge 4 transmits the Z-axis motion between the Z-axis moving carrier 32 and the Z-axis amplifying piezoelectric actuator 23, eliminating the coupling effect between the Z-axis moving carrier 32 and the Z-axis amplifying piezoelectric actuator 23 in the X and Y axes. The second flexible hinge 5 converts the Z-axis displacement of the two X-axis amplifying piezoelectric actuators 21 into the rotation of the XY-axis moving carrier 31 around the X-axis, and converts the Z-axis displacement of the two Y-axis amplifying piezoelectric actuators 22 into the rotation of the XY-axis moving carrier 31 around the Y-axis. The rotation of the XY-axis moving carrier 31 does not affect the motion of the X-axis amplifying piezoelectric actuators 21 and the Y-axis amplifying piezoelectric actuators 22 themselves.

[0041] The Z-axis amplifying piezoelectric actuator 23 drives the Z-axis moving carrier plate 32 to move linearly along the Z-axis. Through a series mechanism, the Z-axis moving carrier plate 32 drives the X-axis amplifying piezoelectric actuator 21 and the Y-axis amplifying piezoelectric actuator 22, and indirectly drives the XY-axis moving carrier plate 31, causing the XY-axis moving carrier plate 31 to move linearly synchronously along the Z-axis. By controlling the actions of the two X-axis amplifying piezoelectric actuators 21 and the two Y-axis amplifying piezoelectric actuators 22, the XY-axis moving carrier plate 31 can be deflected along the X-axis and Y-axis, respectively. Simultaneously, the series structure of this invention has low coupling, significantly improving the load-bearing capacity, which can reach 5KG.

[0042] The Z-axis amplifying piezoelectric actuator 23 and the bottom wall 11 of the housing 1, the fixed end of the X-axis amplifying piezoelectric actuator 21 and the Z-axis moving carrier plate 32, and the fixed end of the Y-axis amplifying piezoelectric actuator 22 and the Z-axis moving carrier plate 32 can be fixedly connected by screws 7 and threads. Preferably, two screws are symmetrically arranged at each fixed end.

[0043] Guide hinges 6 are provided between the X-axis amplifying piezoelectric actuator 21 and the Z-axis amplifying piezoelectric actuator 23, and between the Y-axis amplifying piezoelectric actuator 22 and the Z-axis amplifying piezoelectric actuator 23. The guide hinges 6 are fixedly connected to the bottom wall 11 of the housing 1 and the Z-axis motion carrier plate 32. While the X-axis amplifying piezoelectric actuator 21, the Y-axis amplifying piezoelectric actuator 22, and the Z-axis amplifying piezoelectric actuator 23 move up and down along the Z-axis, they may also experience some left and right (lateral) movement. The guide hinges 6 guide the XY-axis motion carrier plate 31 and the Z-axis motion carrier plate 32, limiting their lateral movement and ensuring closed-loop linearity and high positioning accuracy.

[0044] The guide hinge 6 is preferably a convex block, as shown in the reference. Figure 9The convex block includes a small rectangular block at the top and a large rectangular block at the bottom. The small rectangular block has threaded holes for connecting the Z-axis motion carrier plate 32 with screws 7, preferably with two pairs of matching screws 7 and threaded holes symmetrically arranged. The upper part of the large rectangular block has a first through hole 61. A left flexible arm 62 and a right flexible arm 63 are respectively provided on the upper left and upper right of the first through hole 61. The lower part of the large rectangular block has threaded holes for connecting the housing 1 with screws 7, preferably with three pairs of matching screws 7 and threaded holes.

[0045] The X-axis amplifying piezoelectric actuator 21, Y-axis amplifying piezoelectric actuator 22, and Z-axis amplifying piezoelectric actuator 23 each include: an amplifying piezoelectric actuator body 200, a piezoelectric ceramic 210, and a strain sensor 220, respectively. (Refer to...) Figure 8 .

[0046] The amplifying piezoelectric actuator body 200 includes a first ceramic fixed end 201, four third flexible hinges 205, a first arc-shaped boss 202, a second ceramic fixed end 203, and a second arc-shaped boss 204. The first ceramic fixed end 201, the first arc-shaped boss 202, the second ceramic fixed end 203, and the second arc-shaped boss 204 are sequentially connected to form a closed-loop hollow cavity. The first ceramic fixed end 201 is connected to one end of the first arc-shaped boss 202, the other end of the first arc-shaped boss 202 is connected to the second ceramic fixed end 203, the second ceramic fixed end 203 is connected to one end of the second arc-shaped boss 204, and the other end of the second arc-shaped boss 204 is connected to the first ceramic fixed end 201, respectively, via the third flexible hinges 205. The first arc-shaped boss 202 and the second arc-shaped boss 204 are arranged symmetrically vertically. The four third flexible hinges 205 are arranged symmetrically on the left and right sides of the first arc-shaped boss 202 and the second arc-shaped boss 204. The two ends of the piezoelectric ceramic 210 are in contact with the first ceramic fixed end 201 and the second ceramic fixed end 203, respectively, and the center line connecting the first ceramic fixed end 201 and the second ceramic fixed end 203 is arranged at an angle α with the horizontal line. The outer surfaces of the four third flexible hinges 205 and the two arc-shaped bosses are all flat. Several strain sensors 220 are attached to the upper and lower surfaces of the amplified piezoelectric actuator body 200, and the strain sensors 220 are electrically connected to the control system. According to the inverse piezoelectric effect of ceramics: when a voltage is applied to the polarization direction of the piezoelectric ceramic 210, the piezoelectric ceramic 210 will deform and displace accordingly. The number of piezoelectric ceramic pieces 210 is set according to the required piezoelectric displacement. For example, the number of piezoelectric ceramic pieces 210 in the X-axis amplified piezoelectric actuator 21 and the Y-axis amplified piezoelectric actuator 22 can be set to be less than the number of piezoelectric ceramic pieces 210 in the Z-axis amplified piezoelectric actuator 23.

[0047] Preferably, each amplified piezoelectric actuator 2 has four strain sensors 220 on its upper and lower surfaces. The four strain sensors 220 on the upper and lower surfaces correspond to the third flexible hinge 205 and are arranged symmetrically in pairs. The piezoelectric ceramic 210 is preferably a low-pressure stacked co-fired piezoelectric ceramic. The low-pressure stacked co-fired piezoelectric ceramic exhibits excellent performance and an ultra-long service life, and the special insulating material ensures maximum dynamic performance output under harsh conditions.

[0048] This invention features a high-load piezoelectric deflector stage with a closed-loop repeatability of 0.006%FS, making it suitable for various high-precision applications. The overall structure of this invention is reasonable, compact, and small in size, allowing for easy integration into other application systems.

[0049] This invention is not intended to limit the scope of the invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the invention should be included within the scope of protection of the invention.

Claims

1. A high-load piezoelectric deflector stage, characterized in that, include: The shell (1) includes a bottom wall (11), an inner side wall (12) and an outer side wall (13), wherein the bottom wall (11), the inner side wall (12) and the outer side wall (13) form a hollow rectangular annular cavity in the shape of a square. Amplifying piezoelectric actuator (2) is disposed in the rectangular annular cavity; the amplifying piezoelectric actuator (2) includes two X-axis amplifying piezoelectric actuators (21) and two Y-axis amplifying piezoelectric actuators (22) disposed near the inner sidewall (12), and four Z-axis amplifying piezoelectric actuators (23) disposed near the outer sidewall (13). The motion carrier plate (3) is located above the amplified piezoelectric actuator (2). The motion carrier plate (3) includes a rectangular ring-shaped XY-axis motion carrier plate (31) and a Z-axis motion carrier plate (32) from the center outwards. The XY-axis motion carrier plate (31) includes two opposing X-axis motion carrier plates (311) and two opposing Y-axis motion carrier plates (312). One end of the Z-axis amplifying piezoelectric actuator (23) is fixedly connected to the bottom wall (11) of the housing (1), and the other end of the Z-axis amplifying piezoelectric actuator (23) is connected to one side of the Z-axis motion carrier plate (32) through a first flexible hinge (4). The four Z-axis amplifying piezoelectric actuators (23) drive the four sides of the Z-axis motion carrier plate (32) to achieve Z-axis linear motion. One end of the X-axis amplifying piezoelectric actuator (21) is fixedly connected to one side of the Z-axis motion carrier plate (32), and the other end of the X-axis amplifying piezoelectric actuator (21) is connected to one side of the Z-axis motion carrier plate (32) through a first flexible hinge (4). The second flexible hinge (5) is connected to an X-axis motion carrier plate (311), and the two X-axis amplifying piezoelectric actuators (21) drive the two X-axis motion carrier plates (311) to achieve X-axis deflection; one end of the Y-axis amplifying piezoelectric actuator (22) is fixedly connected to one side of the Z-axis motion carrier plate (32), and the other end of the Y-axis amplifying piezoelectric actuator (22) is connected to a Y-axis motion carrier plate (312) through the second flexible hinge (5), and the two Y-axis amplifying piezoelectric actuators (22) drive the two Y-axis motion carrier plates (312) to achieve Y-axis deflection.

2. The large-load piezoelectric deflector stage according to claim 1, characterized in that, Guide hinges (6) are provided between the X-axis amplifying piezoelectric actuator (21) and the Z-axis amplifying piezoelectric actuator (23), and between the Y-axis amplifying piezoelectric actuator (22) and the Z-axis amplifying piezoelectric actuator (23). The guide hinges (6) are fixedly connected to the bottom wall (11) of the housing (1) and the Z-axis motion carrier plate (32) to restrict the left and right movement of the X-axis amplifying piezoelectric actuator (21), the Y-axis amplifying piezoelectric actuator (22) and the Z-axis amplifying piezoelectric actuator (23).

3. The large-load piezoelectric deflector stage according to claim 2, characterized in that, The guide hinge (6) is a convex block, which includes a small rectangular block at the top and a large rectangular block at the bottom. The small rectangular block is provided with a threaded hole for cooperating with the screw (7) to connect the Z-axis motion carrier plate (32). The upper part of the large rectangular block is provided with a first through hole (61), and the upper left and upper right of the first through hole (61) are respectively provided with a left flexible arm (62) and a right flexible arm (63). The lower part of the large rectangular block is provided with a threaded hole for cooperating with the screw (7) to connect the housing (1).

4. The large-load piezoelectric deflector stage according to claim 1, characterized in that, Four Z-axis amplifying piezoelectric actuators (23) are arranged on the four sides of the Z-axis moving carrier plate (32); the movable ends of two X-axis amplifying piezoelectric actuators (21) are arranged on the two X-axis moving carrier plates (311), and the fixed ends of the X-axis amplifying piezoelectric actuators (21) are arranged on the Z-axis moving carrier plate (32); the movable ends of two Y-axis amplifying piezoelectric actuators (22) are arranged on the two Y-axis moving carrier plates (312), and the fixed ends of the Y-axis amplifying piezoelectric actuators (22) are arranged on the Z-axis moving carrier plate (32).

5. The large-load piezoelectric deflector stage according to claim 1, characterized in that, The second flexible hinge (5) is connected to the middle of the X-axis motion carrier plate (311) or the Y-axis motion carrier plate (312).

6. The large-load piezoelectric deflector stage according to claim 1, characterized in that, The X-axis amplifying piezoelectric actuator (21), the Y-axis amplifying piezoelectric actuator (22), and the Z-axis amplifying piezoelectric actuator (23) each include: an amplifying piezoelectric actuator body (200), a piezoelectric ceramic (210), and a strain sensor (220). The amplified piezoelectric actuator body (200) includes a first ceramic fixed end (201), four third flexible hinges (205), a first arc-shaped boss (202), a second ceramic fixed end (203), and a second arc-shaped boss (204). The first ceramic fixed end (201), the first arc-shaped boss (202), the second ceramic fixed end (203), and the second arc-shaped boss (204) are sequentially connected to form a closed-loop hollow cavity. The first ceramic fixed end (201) is connected to one end of the first arc-shaped boss (202), the other end of the first arc-shaped boss (202) is connected to the second ceramic fixed end (203), the second ceramic fixed end (203) is connected to one end of the second arc-shaped boss (204), and the other end of the second arc-shaped boss (204) is connected to the first ceramic fixed end (201). The first and second arc bosses (204) are symmetrically arranged vertically, and the four third flexible hinges (205) are symmetrically arranged on the left and right sides of the first and second arc bosses (202 and 204). The two ends of the piezoelectric ceramic (210) are in contact with the first ceramic fixed end (201) and the second ceramic fixed end (203) respectively, and the center line connecting the first ceramic fixed end (201) and the second ceramic fixed end (203) is arranged at an angle α with the horizontal line. The outer surfaces of the four third flexible hinges (205) and the two arc bosses are all flat. Several strain sensors (220) are attached to the upper and lower surfaces of the amplified piezoelectric actuator body (200). The strain sensors (220) are electrically connected to the control system.

7. The large-load piezoelectric deflector stage according to claim 6, characterized in that, Each of the amplified piezoelectric actuators (2) has four strain sensors (220) on its upper and lower surfaces. The four strain sensors (220) are arranged in pairs corresponding to the third flexible hinge (205) and are symmetrically distributed.

8. The large-load piezoelectric deflector stage according to claim 6, characterized in that, The piezoelectric ceramic (210) is a low-pressure stacked co-fired piezoelectric ceramic.

9. The large-load piezoelectric deflector stage according to claim 1, characterized in that, The housing (1) is provided with fixing holes (14) around its perimeter for fixed connection with other mechanisms.

Images