High-resolution spectrometer

Abstract

The invention discloses a high-resolution spectrometer which comprises a comb filter, a band-pass filter, a detector and data analysis equipment which are connected in sequence, adjusting the transmission peak position of the comb filter and the center frequency of the band-pass filter, performing combined filtering on the incident light through the comb filter and the band-pass filter, measuring the incident light subjected to combined filtering through the detector, generating an analysis signal, and analyzing the analysis signal through the data analysis equipment to obtain a spectrum analysis result; the ultra-narrow bandwidth of the comb-shaped adjustable filter is cascaded with the common adjustable band-pass filter to serve as a scanning engine of the scanning type spectrograph, so that the ultra-high resolution spectrograph is formed.

Description

Technical Field

[0001] The present invention belongs to the field of spectrum analysis technology, and in particular relates to a novel high-wavelength resolution spectrometer, which utilizes a conventional tunable filter in series with a high-resolution comb tunable filter to achieve a high-resolution spectrometer. Background Art

[0002] Existing optical spectrum analyzers (OSA) usually use a diffraction grating. Under this structure, it is further divided into a detector array type or a single detector. In the detector array type, the diffraction grating disperses light of different wavelengths in different directions, and then uses the detector array to measure the power of each different wavelength to obtain information about the spectrum to be measured. A single detector is a scanning type, it has only one detector at a fixed position in space, and only a small part of the wavelength of light can enter the detector at a time. By rotating the grating, or changing the angle of the incident light entering the grating, the wavelength of the light entering the detector is changed. The resolution of the spectrum depends on the resolution of the grating. A high-resolution spectrometer must use a large spot to achieve high resolution. In addition to the large size, the manufacturing cost also increases. Summary of the invention

[0003] In order to solve the above technical problems, the present invention proposes a high-resolution spectrometer, providing an ultra-high resolution spectral analysis instrument, which has low manufacturing cost and small size, and can achieve high spectral resolution that is difficult to achieve with general spectrometers, so as to solve the problems existing in the above-mentioned prior art.

[0004] To achieve the above object, the present invention provides a high-resolution spectrometer, comprising:

[0005] A comb filter, a bandpass filter, a detector and a data analysis device connected in sequence; wherein the order of the comb filter and the bandpass filter can be reversed;

[0006] Adjust the transmission peak position of the comb filter and the center frequency of the bandpass filter, jointly filter the incident light through the comb filter and the bandpass filter, measure the incident light after the joint filtering through a detector, generate an analysis signal, analyze the analysis signal through a data analysis device, and obtain a spectral analysis result, wherein the transmission peak position is the light frequency corresponding to the transmission peak.

[0007] Optionally, the detector is a photodetector, and the photodetector is used to measure the light intensity of each frequency point of the incident light after joint filtering to generate light intensity information, that is, an analytical signal.

[0008] Optionally, the incident light is jointly filtered by a first adjustment method:

[0009] The first adjustment method includes: adjusting the 0th transmission peak position of the comb filter and the center frequency of the bandpass filter in sequence according to the frequency point of the spectrum of the incident light, and performing a frequency point-by-frequency spectrum scan on the incident light through the comb filter and the bandpass filter. During the scanning process, the center frequency of the bandpass filter and the 0th transmission peak position of the comb filter always coincide with each other to form a narrowband filter to perform joint filtering on the incident light, thereby obtaining the incident light after joint filtering.

[0010] Optionally, the incident light is jointly filtered by a second adjustment method:

[0011] The second adjustment method includes: dividing the spectrum of the incident light into frequency zones according to the transmission peak position of the comb filter, wherein the comb filter includes m transmission peaks, the initial index of the transmission peak is 0, and the spectrum of the incident light includes m-1 frequency zones after being divided, the starting frequency of the kth frequency zone is the k-1th transmission peak position, the end frequency is the kth transmission peak position, and the starting position of the 0th transmission peak is the starting frequency point of the spectrum of the incident light;

[0012] Starting from the first frequency zone, according to the frequency points of the first frequency zone, the center frequency of the band-pass filter is adjusted in sequence, the position of the 0th transmission peak is made to coincide with the center frequency of the band-pass filter, the first frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the band-pass filter, and after scanning, the position of the 0th transmission peak is adjusted back to the starting position;

[0013] By analogy, according to the frequency points of the current frequency zone, the center frequency of the bandpass filter is adjusted in sequence, the k-1th transmission peak position is coincident with the center frequency of the bandpass filter, the kth frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the bandpass filter, and after the scanning, the 0th transmission peak position is adjusted back to the starting position until all frequency zones are traversed to obtain the incident light after joint filtering, thereby completing the spectrum scanning of the incident light, i.e., the joint filtering of the incident light.

[0014] Optionally, the incident light is jointly filtered by a third adjustment method:

[0015] The transmission peak position of the comb filter is set, wherein the transmission peak position of the comb filter is overlapped with the iteration frequency in sequence, wherein the iteration frequency is the frequency point of the starting frequency point of the spectrum of the incident light increased by N*fixed interval frequency, wherein N=0, 1, 2, ..., (m-1), wherein m represents the total number of iteration frequencies, which is also the number of transmission peaks of the comb filter within the wavelength measurement range;

[0016] According to the position of the 0th transmission peak coinciding with each iterative frequency, the incident light is filtered in turn through the comb filter to obtain a comb light source. According to the frequency point of the spectrum of the incident light, the center frequency of the bandpass filter is adjusted in turn. The comb light source in each iterative process is filtered through the bandpass filter to obtain the incident light after joint filtering.

[0017] Optionally, the comb filter uses a Fabry-Perot etalon.

[0018] Optionally, the transmission peak position of the comb filter is adjusted by means of thermal deformation of the transparent material or mechanical braking.

[0019] Compared with the prior art, the present invention has the following advantages and technical effects:

[0020] The method adopted by the present invention is to use the ultra-narrow bandwidth of the comb-shaped tunable filter and cascade ordinary tunable bandpass filters as the scanning engine of the scanning spectrometer, thereby forming an ultra-high resolution spectrometer.

[0021] The present invention has the following advantages:

[0022] 1) Comb tunable filters and bandpass filters are low cost and can achieve ultra-high resolution spectral resolution at low cost through cascading.

[0023] 2) The size of the comb tunable filter and the bandpass filter are both small, so the instrument that can be made is small in size. In addition to being a general-purpose spectrometer, it is also suitable as a handheld miniaturized spectrometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0025] Figure 1 Schematic diagram of the transmission spectrum of a 100 GHz etalon when R=90% according to an embodiment of the present invention;

[0026] Figure 2 Schematic diagram of the penetration spectrum of the BPF TF with FWHM=40 GHz according to an embodiment of the present invention;

[0027] Figure 3 It is a schematic diagram of the transmission spectrum of an equivalent filter in which a BPF and a 100GFP-cavity are connected in series according to an embodiment of the present invention;

[0028] Figure 4 Schematic diagram of the structure of a high-resolution spectrometer according to an embodiment of the present invention;

[0029] Figure 5is a timing diagram of the P0 peak of the comb filter and the center frequency of the bandpass filter in the tuning method 2 of the embodiment of the present invention;

[0030] Figure 6 Schematic diagram of the P0 peak of the comb filter and the center frequency of the bandpass filter according to tuning method 3 of an embodiment of the present invention. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] It should be noted that the steps shown in the flowcharts of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and that, although a logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0033] In order to solve the above technical problems, the present invention proposes a high-resolution spectrometer, providing an ultra-high resolution spectral analysis instrument, which has low manufacturing cost and small size, and can achieve high spectral resolution that is difficult to achieve with general spectrometers, so as to solve the problems existing in the above-mentioned prior art.

[0034] To achieve the above purpose, Figure 4 As shown, the present invention provides a high-resolution spectrometer, comprising:

[0035] Comb filter, bandpass filter, detector and data analysis equipment connected in sequence;

[0036] Adjust the transmission peak position of the comb filter and the center frequency of the bandpass filter, jointly filter the incident light through the comb filter and the bandpass filter, measure the incident light after the joint filtering through a detector, generate an analysis signal, analyze the analysis signal through a data analysis device, and obtain a spectral analysis result, wherein the transmission peak position is the light frequency corresponding to the transmission peak.

[0037] As some embodiments, the detector is a photodetector, and the photodetector is used to measure the light intensity of each frequency point of the incident light after joint filtering to generate light intensity information, that is, an analytical signal.

[0038] As some embodiments, the incident light is jointly filtered by a first adjustment method:

[0039] The first adjustment method includes: adjusting the 0th transmission peak position of the comb filter and the center frequency of the bandpass filter in sequence according to the frequency point of the spectrum of the incident light, and performing a frequency point-by-frequency spectrum scan on the incident light through the comb filter and the bandpass filter. During the scanning process, the center frequency of the bandpass filter and the 0th transmission peak position of the comb filter always coincide with each other to form a narrowband filter to perform joint filtering on the incident light, thereby obtaining the incident light after joint filtering.

[0040] As some embodiments, the incident light is jointly filtered by a second adjustment method:

[0041] The second adjustment method includes: dividing the spectrum of the incident light into frequency zones according to the transmission peak position of the comb filter, wherein the comb filter includes m transmission peaks, the initial index of the transmission peak is 0, and the spectrum of the incident light includes m-1 frequency zones after being divided, the starting frequency of the kth frequency zone is the k-1th transmission peak position, the end frequency is the kth transmission peak position, and the starting position of the 0th transmission peak is the starting frequency point of the spectrum of the incident light;

[0042] Starting from the first frequency zone, according to the frequency points of the first frequency zone, the center frequency of the band-pass filter is adjusted in sequence, the position of the 0th transmission peak is made to coincide with the center frequency of the band-pass filter, the first frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the band-pass filter, and after scanning, the position of the 0th transmission peak is adjusted back to the starting position;

[0043] By analogy, according to the frequency points of the current frequency zone, the center frequency of the bandpass filter is adjusted in sequence, the k-1th transmission peak position is coincident with the center frequency of the bandpass filter, the kth frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the bandpass filter, and after the scanning, the 0th transmission peak position is adjusted back to the starting position until all frequency zones are traversed to obtain the incident light after joint filtering, thereby completing the spectrum scanning of the incident light, i.e., the joint filtering of the incident light.

[0044] As some embodiments, the incident light is jointly filtered by a third adjustment method:

[0045] The transmission peak position of the comb filter is set, wherein the 0th transmission peak position of the comb filter is sequentially overlapped with the iteration frequency, wherein the iteration frequency is the frequency point of the starting frequency point of the spectrum of the incident light increased by N*fixed interval frequencies, wherein N=0, 1, 2, ..., (m-1), wherein m represents the total number of iteration frequencies, which is also the number of transmission peaks of the comb filter within the wavelength measurement range.

[0046] According to the position of the 0th transmission peak coinciding with each iterative frequency, the incident light is filtered in turn through the comb filter to obtain a comb light source. According to the frequency point of the spectrum of the incident light, the center frequency of the bandpass filter is adjusted in turn. The comb light source in each iterative process is filtered through the bandpass filter to obtain the incident light after joint filtering.

[0047] As some embodiments, the comb filter uses a Fabry-Perot etalon.

[0048] As some embodiments, the transmission peak position of the comb filter is adjusted by means of thermal deformation of the transparent material or mechanical braking.

[0049] The above technical solution of the present invention is described in detail with reference to the relevant drawings and data:

[0050] like Figure 3 As shown, this embodiment provides a high-resolution spectrometer, which is a spectrometer manufactured by combining a traditional tunable filter with a tunable comb filter.

[0051] The spectrometer includes a comb filter, a bandpass filter, a detector and a data analysis device connected in sequence; the transmission peak position of the comb filter and the center frequency of the bandpass filter are adjusted, the incident light is jointly filtered by the comb filter and the bandpass filter, the incident light after the joint filtering is measured by the detector, an analysis signal is generated, and the analysis signal is analyzed by the data analysis device to obtain a spectral analysis result, wherein the transmission peak position is the light frequency corresponding to the transmission peak.

[0052] The comb filter uses a Fabry-Perot etalon. The Fabry-Perot etalon (FP) consists of two parallel reflecting surfaces, the spacing between the reflecting surfaces is L, and the free spectral range (FSR) of the etalon is defined as:

[0053]

[0054] Among them, FSR FP represents the free spectral range of the Fabry-Perot etalon, C represents the speed of light, n represents the refractive index of the medium between the two reflecting surfaces, L represents the spacing between the two reflecting surfaces, and Round-trip optical path represents the round-trip optical path length.

[0055] Figure 1 The transmission spectrum of the FP etalon with a reflective film of R = 90% on each reflective surface is shown. The transmission curve is a periodic function with a period of 100 GHz, which is equal to the FSR. The full width at half maximum (FWHM) of each transmission peak is about 3.3 GHz. According to formula (1), the optical path length nL between the two reflective surfaces is about 1500 um. Figure 1The mth peak in has an optical frequency v m .

[0056] v m = m·FSR FP (2)

[0057] Where m is an integer called the modulus.

[0058] Based on equations (1) and (2), in order to tune the P0 peak position of the comb filter, the round-trip optical path length of the etalon must be changed. Tunability can be achieved through thermal or mechanical actuators.

[0059] Since the transfer function is periodic, the transmission peak will fill the entire frequency space as long as there is a FSR tuning range. To be able to move one FSR, the round-trip optical path length of the etalon must change by one wavelength.

[0060] The relevant contents of the high-resolution optical spectrum analyzer (OSA) provided by the present invention are as follows:

[0061] Existing wavelength scanning high-resolution optical spectrum analyzers consist of 3 parts. 1) A tunable bandpass filter (BPF) for scanning wavelength; 2) A high dynamic range optical detection module; and 3) Data acquisition and data processing. The resolution of an OSA is determined by the filter bandwidth. To improve the resolution of an OSA, technology advances are being made to reduce the filter bandwidth. Traditionally, a large beam spot combined with a high-resolution grating is commonly used. Despite this, it is still difficult to achieve a resolution of 1 GH.

[0062] For a comb filter with FSR 100GHz, if the coating has 97% reflectivity, the FWHM of the comb peak is less than 1GHz. This comb filter is easy to manufacture. However, since the comb filter has multiple transmission peaks, it is not suitable for OSA applications.

[0063] In view of the problems existing in the above-mentioned prior art, the present invention provides a high-resolution spectrometer, i.e., a high-resolution spectrum analyzer:

[0064] In the present invention, it is proposed to connect an adjustable comb filter in series with an adjustable bandpass filter (BPF). Under such a scheme, as long as the bandwidth of the BPF is slightly smaller than the period of the comb filter, it can be used to select one of the peaks of the comb filter. The result of the combination of the two filters is a narrowband filter with only a single peak, and its equivalent bandwidth is slightly smaller than the bandwidth of the comb filter. People can imagine this process as using the BPF to screen a peak on the comb filter. This selected peak is synchronously tuned with the BPF to form a high-resolution spectrum analyzer.

[0065] Figure 2 is the transmission spectrum of the BPF with a bandwidth of about 40 GHz. Figure 3 The transmission spectrum is Figure 1 and Figure 2 The result of two filters connected in series. Figure 3 The filtering results shown are provided by a unimodal filter, ie a narrowband filter.

[0066] In the following example, the present invention uses a comb filter and a BPF with FSR=100GHz to scan a spectrum in the 5Thz range. It should be noted that this embodiment provides only an exemplary solution. In specific use, the comb filter and the bandpass filter can be adjusted according to actual conditions without limitation.

[0067] If the frequency range of the incident light spectrum to be scanned is from f0 to f0+5THz. The first step is to set the comb filter so that one of its peaks and the starting point of the frequency range of the incident light are located at the frequency f0, and at the same time adjust the BPF so that its center frequency, i.e., the operating frequency, is located at f0. The combined optical device is a single-peak filter with a bandwidth slightly narrower than the comb filter. If only the comb filter is considered, there are 51 peaks in the 5THz frequency range. The present invention labels these peaks as P0, P1, ... P k …P 50 , the peak spacing is FSR = 100GHz, and their frequencies fall on f o ,f1,f2....f k ...f 50 These 51 frequency grids divide the frequency space into 50 regions, called z1, z2....z k ...z 50

[0068] z1=[f0,f1]

[0069] z2=[f1,f2] . .

[0072] z k =[f k-1 ,f k ]

[0073] z 50 =[f 49 ,f 50 ]

[0074] Once these two filters are overlapped, there are three ways to scan the 5MHz spectrum:

[0075] Method 1: Synchronously move the comb filter P0 peak and the operating frequency of the bandpass filter BPF, both of which are swept at 5 THz.

[0076] The frequency of the P0 peak of the comb filter is scanned from f0 to f0+5THz, and the 5THz spectrum scan is completed synchronously with the BPF. It should be noted that each of the 50 frequency zones is scanned through the P0 peak. During the scanning process, the frequency of the Po peak always coincides with the BPF, which is equivalent to the comb filter using the P0 peak to overlap the operating frequency of the bandpass filter BPF. According to the frequency point of the incident light, the operating frequency of the BPF is adjusted, and the incident light at each frequency point is extracted for subsequent detectors and analysis equipment to perform light intensity analysis of the frequency point of a single incident light, forming a narrowband filter to scan the entire spectrum. It should be noted that the sampling interval frequency during the spectrum scanning process is calculated based on the number of sampling points (frequency points). For the above 5THz, if the number of sampling points is 5000, the sampling interval frequency is 1GHz.

[0077] Method 2: Compared to method 1, which uses the P0 peak to scan the entire 5-THz spectral range, method 2 uses different peaks to scan different regions. The first frequency region is scanned by P0; the second frequency region is scanned by P1. And so on, the kth frequency region is scanned by P(k-1). Table 1 and Figure 5 shows how this approach works.

[0078] Table 1

[0079]

[0080] Based on Table 1, from time 0 to 0.5t o , the frequency of the P0 peak of the comb filter coincides with that of the BPF,

[0081] The combined effect is a single-peak filter whose frequency is scanned from f0 to f0+FSR. This completes the scan of the first frequency zone.

[0082] Time from 0.5t o to o , the Po peak moves back from the frequency of f0+FSR to f0 while the peak frequency of BPF remains at f0+FSR. With this operation, at time t0, the peak of BPF and P1 of the comb filter are aligned.

[0083] From o Up to 1.5t o , the P1 peak and the BPF are tuned together again. It is equivalent to a single peak narrowband filter whose frequency is swept from f0+FSR to f0+2FSR. This completes the sweep of the second frequency region.

[0084] From 1.5t o To 2t o, the P0 peak is adjusted back to the position of f0, and the peak value of BPF is maintained at f0+2FSR. With this operation, at time 2t0, the peak of BPF and P2 of the comb filter are aligned.

[0085] By repeating this process 50 times, 50 frequency zones can be scanned, covering a frequency range of 5 THz.

[0086] In the above content, in xt o to xt o +0.5t o When the Px-1 peak coincides with the center frequency of BPF, the xth frequency zone is scanned. o +0.5t o to (x+1)t o When , the P0 peak is adjusted back to the position of f0, x is an integer. In this content, the transmission peak of the comb filter is overlapped with the center frequency of the bandpass filter in turn to scan the corresponding frequency area. By adjusting the optical frequency corresponding to the different transmission peaks of the comb filter and the center frequency of the bandpass filter, each frequency point of the incident light is scanned.

[0087] Using the existing mechanical brake MEMS technology, a scan takes about 10ms; the entire scan can be completed in about 0.5 seconds.

[0088] Method 3: In the first two methods, the BPF and comb filter must be tuned highly synchronously. In method 3, we propose a method to tune the BPF and comb filter asynchronously. If the sampling resolution is 1 GHz, the comb filter is only tuned by 1 GHz during the 5 THz tuning of the BPF. In order to obtain the entire spectrum, the BPF must be scanned 100 times, with 50 data points taken each time, whose frequency corresponds to the comb peak of that scan, that is:

[0089] Each time the BPF bandpass filter scans the sampling frequency point:

[0090] 1-th scan:f0,f0+100,f0+200,....f0+4900

[0091] 2-nd scan:f0+1,f0+101,f0+201,....f0+4901 . .

[0094] k-th scan:f0+(k-1),f0+(k-1)+100,.f0+(k-1))+4900;

[0095] 100-th scan:f0+99,f0+199,…f0+4999

[0096] Before doing the analysis, ignore the existence of BPF and consider an incident light of a continuous spectrum entering a comb filter. At this time, the comb peak is located at f0+q·FSR, q=0 to 49. After the incident light passes through the comb filter, only the light with the frequency corresponding to these 50 peaks can pass through the comb filter. This is equivalent to the comb filter collecting 50 points of the incoming light, and the frequency interval between points is 100GHz. From the perspective of light, this is a comb light source with 50 frequencies.

[0097] Figure 6 The tuning frequency of the BPF and comb filter is shown over time. In this specific case, for 100 sweeps, it would take about 1 second if a MEMS based tunable filter was used.

[0098] The light intensity at a certain frequency is proportional to the light intensity of the incident light at the corresponding frequency. If the light of these 50 frequencies is sent to the detector, the detector will obtain the sum of the light powers corresponding to the frequencies of the incident light at these 50 points, rather than the incident light intensity of a certain frequency. Now, we use BPF to scan the above comb light source with 50 frequencies and 100GHz intervals. Because the bandwidth of BPF is only 40GHz, during the process of BPF scanning 5THz, no more than one peak of the comb light source will pass through BPF and reach the detector at any time. Therefore, this process can accurately measure the power of each peak of the comb light source. One scan of BPF can obtain the optical power values ​​at 50 frequencies of the incident light.

[0099] The specific operations of method 3 are as follows:

[0100] The comb filter is adjusted to the frequency corresponding to the Po peak as f0, and then the BPF is scanned from fo to fo+5THz. This is the first scan, and the frequency points obtained are 50 frequency grid points with a starting point of f0 and an interval of 100GHz.

[0101] The next step is to adjust the comb filter to the Po peak corresponding to the frequency fo+1GHz, and then scan the BPF from fo to fo+5THz. This is the second scan, and the frequency points obtained are 50 frequency grid points with an interval of 100GHz starting from f0+1. Repeat the above operation 100 times, and the spectrum of the entire 5THz frequency range is scanned.

[0102] Figure 6 The tuning frequency of the BPF and comb filter is shown as a function of time. In this specific case, for 100 sweeps, it would take about 1 second if a MEMS based tunable filter was used.

[0103] The advantage of method 3 is that the BPF and comb filtering are tuned independently. In each BPF sweep, the comb moves a fraction of one FSR. In the previous example, the 1 GHz frequency shift is the sampling resolution, and the optical resolution is determined by the bandwidth of the comb.

[0104] Among them, the content pointed out in method 3 is that in one iteration, the position of the transmission peak of the comb filter is first fixed. After filtering, only the light with the same frequency as these peaks can pass through the incident light. These lights that have passed through the comb filter are then scanned by the bandpass filter, passing one peak at a time. They enter the subsequent photodetectors in sequence, and the position of the transmission peak of the comb filter is fixed through iterative adjustment to scan the full spectrum.

[0105] The instrument is small in size and can be used as a general-purpose spectrometer as well as a handheld miniaturized spectrometer.

[0106] It should be noted that by connecting the tunable BPF in series with the tunable comb filter, the incident light can reach the detector only when its frequency can pass through both the BPF and the comb filter. In this design, the FWHM of the BPF must be smaller than the FSR of the comb. The medium of the tunable etalon can be thermally tuned or using a mechanical actuator.

[0107] The above are only preferred specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A high-resolution spectrometer, characterized in that: include: Comb filter, bandpass filter, detector and data analysis equipment connected in sequence; Adjust the transmission peak position of the comb filter and the center frequency of the bandpass filter, jointly filter the incident light through the comb filter and the bandpass filter, measure the incident light after the joint filtering through a detector, generate an analysis signal, analyze the analysis signal through a data analysis device, and obtain a spectral analysis result, wherein the transmission peak position is the light frequency corresponding to the transmission peak.

2. The high-resolution spectrometer according to claim 1, characterized in that: The detector is a photoelectric detector, which is used to measure the light intensity of each frequency point of the incident light after joint filtering to generate light intensity information, namely, an analytical signal.

3. The high-resolution spectrometer according to claim 1, characterized in that: The incident light is jointly filtered by the first adjustment method: The first adjustment method includes: adjusting the 0th transmission peak position of the comb filter and the center frequency of the bandpass filter in sequence according to the frequency point of the spectrum of the incident light, and performing a frequency point-by-frequency spectrum scan on the incident light through the comb filter and the bandpass filter. During the scanning process, the center frequency of the bandpass filter and the 0th transmission peak position of the comb filter always coincide with each other to form a narrowband filter to perform joint filtering on the incident light, thereby obtaining the incident light after joint filtering.

4. The high-resolution spectrometer according to claim 1, characterized in that: The incident light is jointly filtered by the second adjustment method: The second adjustment method includes: dividing the spectrum of the incident light into frequency zones according to the transmission peak position of the comb filter, wherein the comb filter includes m transmission peaks, the initial index of the transmission peak is 0, and the spectrum of the incident light includes m-1 frequency zones after being divided, the starting frequency of the kth frequency zone is the k-1th transmission peak position, the end frequency is the kth transmission peak position, and the starting position of the 0th transmission peak is the starting frequency point of the spectrum of the incident light; Starting from the first frequency zone, according to the frequency points of the first frequency zone, the center frequency of the band-pass filter is adjusted in sequence, the position of the 0th transmission peak is made to coincide with the center frequency of the band-pass filter, the first frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the band-pass filter, and after scanning, the position of the 0th transmission peak is adjusted back to the starting position; By analogy, according to the frequency points of the current frequency zone, the center frequency of the bandpass filter is adjusted in sequence, the k-1th transmission peak position is coincident with the center frequency of the bandpass filter, the kth frequency zone of the incident light is scanned frequency point by frequency point through the comb filter and the bandpass filter, and after the scanning, the 0th transmission peak position is adjusted back to the starting position until all frequency zones are traversed to obtain the incident light after joint filtering, thereby completing the spectrum scanning of the incident light, i.e., the joint filtering of the incident light.

5. The high-resolution spectrometer according to claim 1, characterized in that: The incident light is jointly filtered by the third adjustment method: The transmission peak position of the comb filter is set, wherein the transmission peak position of the comb filter is sequentially overlapped with the iteration frequency, wherein the iteration frequency is the frequency point of the starting frequency point of the spectrum of the incident light increased by N*fixed interval frequency, wherein N=0, 1, 2, ..., (m-1), wherein m represents the total number of iteration frequencies, which is also the number of transmission peaks of the comb filter within the wavelength measurement range; According to the position of the 0th transmission peak coinciding with each iterative frequency, the incident light is filtered in turn through the comb filter to obtain a comb light source. According to the frequency point of the spectrum of the incident light, the center frequency of the bandpass filter is adjusted in turn. The comb light source in each iterative process is filtered through the bandpass filter to obtain the incident light after joint filtering.

6. The high-resolution spectrometer according to claim 1, characterized in that: The comb filter adopts a Fabry-Perot etalon.

7. The high-resolution spectrometer according to claim 1, characterized in that: The transmission peak position of the comb filter is adjusted by means of thermal deformation of the transparent material or mechanical braking.

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