Measuring system, processing system, measuring method, and processing method

Abstract

A measurement system includes: a first measurement device capable of irradiating measurement light to a measurement member attached to a movable portion of a processing device capable of processing an object to be processed, the first measurement device being capable of measuring a position of the measurement member; and a measurement control device capable of controlling the first measurement device. The measurement control device includes: a calculation unit that calculates position conversion information on the basis of first position information and second position information indicating a predetermined position, the first position information indicates the position of the measurement member measured by the first measurement device based on the measurement light irradiated to the measurement member in a first state in which the tool center point of the processing device is located at a predetermined position; and a transmission unit that transmits the calculated position conversion information to a machining control device capable of controlling the movement of the movable portion of the machining device. The transmission unit transmits, to the machining control device, third position information indicating the position of the measurement member measured by the first measurement device on the basis of the measurement light irradiated to the measurement member in a second state in which the tool center point is located at a position different from the predetermined position.

Description

Technical Field

[0001] The present invention relates to the technical field of a measuring system, a processing system, a measuring method and a processing method. Background Art

[0002] As a method used in such a system, a correction method of associating positions in two separate systems with each other has been proposed (see Patent Document 1).

[0003] [Prior art literature]

[0004] [Patent Document]

[0005] Patent Document 1: U.S. Patent No. 5,007,006 Summary of the invention

[0006] According to a first aspect, a measuring system is provided, comprising: a first measuring device capable of irradiating measuring light to a measuring member installed on a movable part of a processing device capable of processing a processing object, and capable of measuring the position of the measuring member; and a measuring control device capable of controlling the first measuring device, wherein in the measuring system, the measuring control device comprises: a calculation unit for calculating position conversion information based on first position information and second position information indicating a specified position, the first position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated to the measuring member in a state in which a tool center point of the processing device is located at the specified position, i.e., in a first state; and a sending unit for sending the calculated position conversion information to a processing control device capable of controlling the movement of the movable part of the processing device, the sending unit sending third position information to the processing control device, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated to the measuring member in a state in which the tool center point is located at a position different from the specified position, i.e., in a second state.

[0007] According to a second form, a measuring system is provided, comprising: a first measuring device capable of irradiating measuring light to a measuring member installed on a movable part of a processing device capable of processing a processing object, and capable of measuring the position of the measuring member; and a measuring control device capable of controlling the first measuring device, in the measuring system, the measuring control device comprising: a calculation unit, based on position conversion information, converting the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member into the position of a tool center point of the processing device; and a sending unit, sending sixth position information representing the position of the tool center point to the processing control device capable of controlling the movement of the movable part, the calculation unit calculating the position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the tool center point is at a specified position, i.e., in a first state.

[0008] According to a third aspect, a measuring system is provided, comprising: a first measuring device, which, in a processing device capable of processing a processing object, can irradiate measuring light to a measuring member installed at a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device, and can measure the position of the measuring member; a measuring control device, which can control the first measuring device; and a third measuring device, which can measure the position of the tool center point, in which the measuring system comprises: a calculation unit, which calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device; and a sending unit, which sends the position conversion information and third position information to a processing control device capable of controlling the movement of the movable part, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has not measured the position of the tool center point.

[0009] According to a fourth aspect, a measuring system is provided, comprising: a first measuring device, in a processing device capable of processing a processing object, capable of irradiating measuring light to a measuring member installed at a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measuring control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, wherein the measuring system comprises: a computing unit, based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, converting the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has not measured the position of the tool center point, into the position of the tool center point; and a transmitting unit, transmitting sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable part.

[0010] According to a fifth aspect, a measuring system is provided, comprising: a first measuring device capable of irradiating a measuring light onto a second reference member that moves according to the position of a movable part of a processing device that can process a processing object to measure the position of a tool center point of the processing device that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part different from a position corresponding to the tool center point to measure the position of the measuring member; and a measuring control device capable of controlling the first measuring device, wherein the measuring control device comprises: a computing unit that calculates a value based on the position of the measuring member relative to the second reference member; The invention relates to a processing control device according to the present invention, wherein the first measuring device calculates position conversion information based on the position of the tool center point measured by the measuring light irradiated on the second reference member and the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member when the positional relationship of the positions of the parts is a prescribed relationship; and a sending unit sends the position conversion information and third position information to a processing control device capable of controlling the movement of the movable part, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member when the positional relationship is a relationship different from the prescribed relationship.

[0011] According to a sixth aspect, a measuring system is provided, comprising: a first measuring device capable of irradiating a second reference member that moves according to the position of a movable part of a processing device that can process a processing object to measure the position of a tool center point that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part different from a position corresponding to the tool center point to measure the position of the measuring member; and a measuring control device capable of controlling the first measuring device, wherein the measuring control device comprises: a computing unit that calculates a position of the measuring member based on the position of the measuring member and the position of the second reference member. The first measuring device measures the position of the measuring member based on the measuring light irradiating the measuring member when the position relationship is different from the prescribed position, and converts the position of the tool center point by the first measuring device based on the measuring light irradiating the measuring member when the position relationship is different from the prescribed position into the position of the tool center point; and a sending unit sends sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable part.

[0012] According to the seventh form, a processing system is provided, comprising: the measuring system provided by the first form; the processing device, capable of processing the processing object; and the processing control device, capable of controlling the movement of the movable part of the processing device, the processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0013] According to an eighth form, a processing system is provided, comprising: a measuring system provided by the second form; the processing device capable of processing the processing object; and the processing control device capable of controlling the movement of the movable part of the processing device, the processing control device controlling the movement of the movable part based on the position of the tool center point represented by the sixth position information sent by the sending unit to move the position of the tool center point.

[0014] According to a ninth form, a processing system is provided, comprising: a measuring system provided by the third form; the processing device capable of processing the processing object; and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0015] According to the tenth form, a processing system is provided, comprising: the measuring system provided by the fourth form; the processing device capable of processing the processing object; and the processing control device capable of controlling the movement of the movable part of the processing device, the processing control device controls the movement of the movable part based on the sixth position information to move the position of the tool center point.

[0016] According to the eleventh form, a processing system is provided, comprising: the measuring system provided by the fifth form; the processing device capable of processing the processing object; and the processing control device capable of controlling the movement of the movable part of the processing device, the processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and moves the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0017] According to the twelfth form, a processing system is provided, comprising: the measuring system provided by the sixth form; the processing device capable of processing the processing object; and the processing control device capable of controlling the movement of the movable part of the processing device, the processing control device controls the movement of the movable part based on the position of the tool center point represented by the sixth position information to move the position of the tool center point.

[0018] According to a thirteenth aspect, a measuring method is provided, which is a measuring method in a measuring system, the measuring system comprising: a first measuring device capable of irradiating measuring light to a measuring member installed on a movable part of a processing device capable of processing a processing object, and capable of measuring the position of the measuring member; and a measuring control device capable of controlling the first measuring device, the measuring method comprising: the measuring control device calculating position conversion information based on first position information and second position information representing a specified position, the first position information representing the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state in which a tool center point of the processing device is located at the specified position, i.e., in a first state; the measuring control device sending the calculated position conversion information to a processing control device capable of controlling the movement of the movable part of the processing device; and the measuring control device sending third position information to the processing control device, the third position information representing the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state in which the tool center point is located at a position different from the specified position, i.e., in a second state.

[0019] According to a fourteenth aspect, a measuring method is provided, which is a measuring method in a measuring system, the measuring system comprising: a first measuring device capable of irradiating measuring light to a measuring member installed on a movable part of a processing device capable of processing a processing object, and capable of measuring the position of the measuring member; and a measuring control device capable of controlling the first measuring device, the measuring method comprising: the measuring control device converting, based on position conversion information, the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member into the position of a tool center point of the processing device; the measuring control device sending sixth position information representing the position of the tool center point to a processing control device capable of controlling the movement of the movable part; and the measuring control device calculating the position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state in which the tool center point is at a specified position, i.e., in a first state.

[0020] According to a fifteenth aspect, a measuring method is provided, which is a measuring method in a measuring system, the measuring system comprising: a first measuring device, which, in a processing device capable of processing a processing object, can irradiate measuring light to a measuring member installed at a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device, and can measure the position of the measuring member; a measuring control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, the measuring method comprising: the measuring control device calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device; and the measuring control device sends the position conversion information and the third position information to a processing control device capable of controlling the movement of the movable part, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has not measured the position of the tool center point.

[0021] According to a sixteenth aspect, a measuring method is provided, which is a measuring method in a measuring system, the measuring system comprising: a first measuring device, in a processing device capable of processing a processing object, capable of irradiating measuring light to a measuring member installed at a movable part of the processing device that is different from a position corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measuring control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, the measuring method comprising: the measuring control device converts the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has not measured the position of the tool center point, based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, into the position of the tool center point; and the measuring control device sends sixth position information representing the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable part.

[0022] According to a seventeenth aspect, a measuring method is provided, which is a measuring method in a measuring system, the measuring system comprising: a first measuring device capable of irradiating measuring light to a second reference member that moves according to the position of a movable part of a processing device that can process a processing object to determine the position of a tool center point of the processing device that moves with the movement of the movable part, and capable of irradiating measuring light to a measuring member installed at a movable part different from a position corresponding to the tool center point to measure the position of the measuring member; and a measuring control device capable of controlling the first measuring device, the measuring method comprising: the measuring control device controlling the measuring member based on the position of the measuring member and the second reference member moving according to the position of the movable part. When the positional relationship between the positions of two reference members is a prescribed relationship, the first measuring device calculates position conversion information based on the position of the tool center point measured by the measuring light irradiated on the second reference member and the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member; and the measurement control device sends the position conversion information and third position information to a processing control device capable of controlling the movement of the movable part, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member when the positional relationship is a relationship different from the prescribed relationship.

[0023] According to an eighteenth aspect, a measurement method is provided, which is a measurement method in a measurement system, the measurement system comprising: a first measuring device capable of irradiating measurement light to a second reference member that moves according to the position of a movable part of a processing device that can process a processing object to measure the position of a tool center point that moves along with the movement of the movable part, and capable of irradiating measurement light to a measuring member installed at a movable part different from a position corresponding to the tool center point to measure the position of the measuring member; and a measurement control device capable of controlling the first measuring device, the measurement method comprising: the measurement control device controls the position of the measuring member based on the position of the measuring member and the second reference member. The first measuring device measures the position of the measuring member based on the measuring light irradiating the measuring member when the positional relationship is a prescribed relationship, and measures the position of the tool center point based on the measuring light irradiating the second reference member when the positional relationship is a relationship different from the prescribed position, by converting the position of the measuring member measured by the first measuring device based on the measuring light irradiating the measuring member into the position of the tool center point; and the measurement control device sends sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable part.

[0024] According to a nineteenth aspect, there is provided a processing system, comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating measuring light to a measuring component installed on the processing device and capable of measuring the position of the measuring component; a measuring control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, in which the processing control device comprises a sending unit, which sends first starting position information to the measurement control device, the first starting position information indicating a position at which the first measuring device should start measuring the measuring component, i.e., a first measurement starting position, and the measurement control device changes the emission direction of the measuring light to irradiate the measuring light toward the first measurement starting position indicated by the first starting position information.

[0025] According to a twentieth aspect, there is provided a processing system, comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring component installed on the processing device with a measuring light and capable of measuring the position of the measuring component; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, wherein in the processing system, the processing control device comprises a sending unit, which sends a measurement start signal to the measurement control device, wherein the measurement start signal is used to enable the first measuring device to start measuring the position of the measuring component, and the measurement control device controls the first measuring device to start emitting the measuring light based on the measurement start signal.

[0026] According to a twenty-first aspect, there is provided a processing system, comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating measuring light to a measuring component installed on the processing device and capable of measuring the position of the measuring component; a measuring control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, wherein in the processing system, the processing control device comprises a sending unit, which sends timing information to the measurement control device, the timing information indicating the timing at which the first measuring device starts measuring the position of the measuring component, and the measurement control device controls the emission timing of the measuring light emitted from the first measuring device based on the timing information.

[0027] According to a twenty-second aspect, there is provided a measuring system, comprising: a first measuring device capable of measuring the position of a measuring component installed on a processing device capable of processing the processing object; and a measuring control device capable of controlling the first measuring device, wherein in the measuring system, the measuring control device comprises: a computing unit for computing position conversion information for converting the position of the measuring component into the position of a tool center point of the processing device based on the position of the measuring component measured by the first measuring device; and a sending unit for sending the position conversion information to the processing control device that controls the processing device.

[0028] According to a twenty-third form, a measuring system is provided, comprising: a first measuring device capable of measuring the position of a measuring component installed on a processing device capable of processing the processing object; and a measuring control device capable of controlling the first measuring device, wherein in the measuring system, the measuring control device comprises: a calculation unit for converting the position of the measuring component into the position of a tool center point of the processing device based on the position of the measuring component measured by the first measuring device; and a sending unit for sending sixth position information representing the position of the tool center point obtained by the conversion to a processing control device that controls the processing device.

[0029] According to the twenty-fourth aspect, there is provided a measuring system, comprising: a first measuring device capable of irradiating measuring light to a measuring component installed on a processing device capable of processing a processing object; and a measuring control device capable of controlling the first measuring device, wherein the measuring control device controls the first measuring device based on information related to measurement using the first measuring device sent from a processing control device capable of controlling the processing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a three-dimensional diagram showing an overview of the system.

[0031] Figure 2 It is a block diagram showing the structure of the system.

[0032] Figure 3 It is a block diagram showing the structure of the measurement control device.

[0033] Figure 4 It is a block diagram showing the structure of a processing control device.

[0034] Figure 5 It is a diagram showing the front end portion of the robot arm.

[0035] Figure 6 This is a flowchart showing an example of the operation of the calculation device of the measurement control device.

[0036] Figure 7 This is a diagram showing an example of the positional relationship between the measuring device and the stereo camera.

[0037] Figure 8 It is a diagram showing a first modified example of the reflector module attached to the robot arm.

[0038] Fig. 9 This is a diagram showing an example of the arrangement of multiple antennas.

[0039] Fig.10 It is a diagram showing a second modified example of the reflector module attached to the robot arm.

[0040] Fig.11 This is a diagram showing an example of a reflector mounted on a robot arm.

[0041] Fig.12 This is a diagram showing another example of a reflector mounted on a robot arm.

[0042] Fig.13 This is a diagram showing an example of a method for measuring the position of a tool center point.

[0043] Fig.14 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0044] Fig.15 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0045] Fig.16 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0046] Fig.17 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0047] Fig.18 This is a diagram showing an example of the positional relationship between a reflector attached to a robot arm and a tool center point.

[0048] Fig.19 This is a flowchart showing another example of the operation of the calculation device of the measurement control device.

[0049] Fig. 20 It is a perspective view schematically showing a modified example of the system.

[0050] Fig.21 It is a block diagram showing the structure of a modified example of the system.

[0051] Fig. 22 This is a flowchart showing another example of the operation of the calculation device of the measurement control device.

[0052] Fig.23 This is a diagram for explaining the concept of integration threshold processing.

[0053] Fig.24 It is a diagram for explaining the measurement procedure of the reflector.

[0054] Fig.25 It is a diagram for explaining the irradiation timing of the measurement light.

[0055] Fig.26 This is a diagram showing an example of a method of irradiating measurement light.

[0056] Fig. 27 This is a diagram for explaining the concept of stationary determination.

[0057] Fig.28 This is a diagram showing another example of the method of irradiating the measuring light. DETAILED DESCRIPTION

[0058] Embodiments of the measuring system, the processing system, the measuring method, and the processing method will be described. In the embodiments shown below, examples in which the measuring system, the processing system, the measuring method, and the processing method are applied to the system 1 will be described.

[0059] Reference Figures 1 to 28 The system 1 of the embodiment will be described. The system 1 may also be referred to as a processing system.

[0060] (1) Overview of System 1

[0061] Reference Figure 1 and Figure 2 The outline of system 1 will be described. Figure 1 and Figure 2 In the embodiment, the system 1 includes a measurement control device 10, a measurement device 21, a processing control device 30, and a robot 41. The robot 41 may also be referred to as a processing device. The measurement control device 10 controls the measurement device 21. The processing control device 30 controls the robot 41. The processing control device 30 may be able to control the movement of the robot 41 (for example, the movement of the robot arm 410). The measurement control device 10 and the processing control device 30 may communicate with each other. In addition, the measurement control device 10 and the measurement device 21 may constitute a measurement system 2.

[0062] like Figure 3 As shown, the measurement control device 10 includes a computing device 11, a storage device 12, a communication device 13, an input device 14, and an output device 15. The computing device 11, the storage device 12, the communication device 13, the input device 14, and the output device 15 may also be connected via a data bus 16.

[0063] like Figure 4As shown, the process control device 30 includes a computing device 31, a storage device 32, a communication device 33, an input device 34, and an output device 35. The computing device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may also be connected via a data bus 36.

[0064] The computing device 11 and the computing device 31 may include, for example, at least one of a central processing unit (CPU), a graphic processing unit (GPU), and a field programmable gate array (FPGA).

[0065] The storage device 12 and the storage device 32 may include, for example, at least one of a random access memory (RAM), a read only memory (ROM), a hard disk device, a magneto-optical device, a solid state drive (SSD), and a hard disk array. That is, the storage device 12 and the storage device 32 may also include a non-temporary storage medium.

[0066] The communication device 13 can communicate with the measuring device 21 and the processing control device 30 respectively. The communication device 13 can also communicate with other devices different from the measuring device 21 and the processing control device 30 via a network not shown in the figure. The communication device 33 can communicate with the robot 41 and the measurement control device 10 respectively. The communication device 33 can also communicate with other devices different from the robot 41 and the measurement control device 10 via a network not shown in the figure. In addition, the network can be wired or wireless.

[0067] The input device 14 and the input device 34 may include, for example, at least one of a keyboard, a mouse, and a touch screen. The input device 14 and the input device 34 may also include, for example, a recording medium reading device that can read information recorded in a removable recording medium such as a Universal Serial Bus (USB) memory.

[0068] Furthermore, when information is input to the measurement control device 10 via the communication device 13 (in other words, when the measurement control device 10 acquires information via the communication device 13), the communication device 13 can function as an input device. When information is input to the processing control device 30 via the communication device 33 (in other words, when the processing control device 30 acquires information via the communication device 33), the communication device 33 can function as an input device.

[0069] The output device 15 and the output device 35 may also include, for example, at least one of a display, a speaker, and a printer. The output device 15 and the output device 35 may also input information into a removable storage medium such as a USB memory, for example. In addition, when information is output from the measurement control device 10 via the communication device 13, the communication device 13 may function as an output device. When information is output from the processing control device 30 via the communication device 33, the communication device 33 may function as an output device.

[0070] In the system 1, the robot 41 holds the workpiece W (see Figure 1 ) is set as a processing object. The processing control device 30 controls the robot 41 based on the measurement result obtained by the measuring device 21 from the measuring control device 10. The processing control device 30 controls the robot 41, for example, so that the end effector at the front end of the mechanical arm 410 installed on the robot 41 moves to the target position. The robot 41 is controlled by the processing control device 30, so that the workpiece W is processed by the robot 41. In addition, the control of the robot 41 can also be the control of the movement form of the robot 41 (the movement form of the movable part of the robot 41). In addition, the jig 90 can also be called a retaining member, a mounting member, a fixing member or a clamp.

[0071] (2) Coordinate system conversion

[0072] The measuring system 2 including the measuring device 21 and the processing control device 30 controlling the robot 41 use their own coordinate systems. Specifically, the measuring system 2 uses the first measuring coordinate system which is the coordinate system related to the measuring device 21, while the processing control device 30 uses the robot coordinate system which is the coordinate system related to the robot 41. That is, the measuring control device 10 controls the measuring device 21 in the first measuring coordinate system. The processing control device 30 controls the movement of the robot 41 in the robot coordinate system.

[0073] In addition, the processing control device 30 can also control the movement of the robot 41 in the measurement coordinate system. Fig. 20 and Fig.21 ), the robot coordinate system may be a common coordinate system for multiple robots, or a robot coordinate system may be set for each robot (in this case, one robot coordinate system may be set for one robot, and another robot coordinate system may be set for another robot).

[0074] Therefore, for example, in order to make the measurement result obtained by the measuring device 21 shared by the measuring system 2 and the processing control device 30 (in other words, in order to make the measuring system 2 and the processing control device 30 work in conjunction), it is necessary to convert the first measurement coordinate system into the robot coordinate system. In addition, the robot coordinate system may be, for example, an orthogonal coordinate system including an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The first measurement coordinate system may be, for example, an orthogonal coordinate system including an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The robot coordinate system may also be referred to as a processing coordinate system.

[0075] (2-1) Measuring device 21

[0076] The measuring device 21 measures the position of the workpiece W or the robot 41, for example. Here, the workpiece W may be, for example, a relatively large structure such as the main body of an airplane. The measuring device 21 that uses the workpiece W, which is a relatively large structure, as a measurement object may also be, for example, a three-dimensional measuring machine that can measure a relatively large space. As an example of such a measuring device 21, a laser tracker may be cited. A laser tracker is an optical measuring machine as described below, that is, a reflector (also called a probe) that contacts the measurement object is irradiated with laser light, and the laser light reflected from the reflector returns to the light source, thereby determining the three-dimensional position of the measurement object. In addition, laser light may also be referred to as measurement light.

[0077] In order to enable the measuring device 21 to measure the position, for example, a reflector r11 is installed on the jig 90, and reflectors r12 and r13 are installed on the workpiece W (see Figure 1 ). The reflectors r11, r12, and r13 may also be referred to as first reference members. That is, the first reference member may include the reflectors r11, r12, and r13 capable of reflecting the measurement light. In addition, the reflectors may not be installed on the workpiece W, but at least three reflectors may be installed on the jig 90.

[0078] A reflector module r2 (see FIG. 1 ) including reflectors r21, r22, and r23 is installed on the robot arm 410 of the robot 41. Figure 5 ). The reflectors r21, r22, and r23 may also be referred to as measuring members. That is, the measuring member may include the reflectors r21, r22, and r23 capable of reflecting the measuring light. The robot arm 410 may also be referred to as a movable part.

[0079] The measuring device 21 can irradiate the reflectors r11, r12, and r13 with a measuring light, such as a laser light. The measuring device 21 can measure the positions of the reflectors r11, r12, and r13 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r11, r12, and r13. Similarly, the measuring device 21 can irradiate the reflectors r21, r22, and r23 with a measuring light. The measuring device 21 can measure the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23. That is, measuring the position of the workpiece W is not limited to directly measuring the position of a specific portion on the workpiece W, but can also include indirect position measurement such as measuring the position of a reflector mounted on the workpiece W or measuring the position of a reflector mounted on the jig 90 that holds the workpiece W. Likewise, measuring the position of the robot 41 is not limited to directly measuring the position of a specific portion of the robot 41 , and may include indirect position measurement such as measuring the position of a reflector attached to the robot 41 .

[0080] Furthermore, “based on the measurement light irradiated to each of reflectors r11, r12, and r13” can also be replaced by “measurement device 21 receives the measurement light generated from each of reflectors r11, r12, and r13 by irradiating each of reflectors r11, r12, and r13 with the measurement light”. Similarly, “based on the measurement light irradiated to each of reflectors r21, r22, and r23” can also be replaced by “measurement device 21 receives the measurement light generated from each of reflectors r21, r22, and r23 by irradiating each of reflectors r21, r22, and r23 with the measurement light”.

[0081] Furthermore, if reflectors r11, r12, and r13 are replaced by the first reference member, it can be said that the measuring device 21, which can be referred to as the first measuring device, can irradiate the measuring light to the first reference member installed in at least one of the workpiece W, which can be referred to as the processing object, and the jig 90 that holds the workpiece W. It can be said that the measuring device 21 can measure the position of the first reference member in the first measurement coordinate system. If reflectors r21, r22, and r23 are replaced by the measuring member, the measuring device 21 can irradiate the measuring light to the measuring member installed in the robot arm 410 of the robot 41 that can process the workpiece W. It can be said that the measuring device 21 can measure the position of the measuring device.

[0082] The positions of the reflector r11 attached to the jig 90 and the reflectors r12 and r13 attached to the workpiece W are often managed by the user of the system 1. Therefore, the positions of the reflectors r11, r12, and r13 are often known in the robot coordinate system.

[0083] In addition, the positions of reflectors r11, r12, and r13 may not be known. In this case, for example, reflectors may be used to define features such as surfaces, lines, and points, and the defined features may be used to construct a coordinate system. Specifically, three reflectors may be arranged on the first surface, three reflectors may be arranged on the second surface intersecting the first surface, and three reflectors may be arranged on the third surface intersecting the first surface and the second surface, and the three reflectors arranged on each surface may be used to define each surface, thereby constructing a coordinate system. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a line defined by two reflectors different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a point defined by a reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a point defined by a reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors, a line defined by two reflectors, and a point defined by one reflector.

[0084] In the present embodiment, the position of each of the reflectors r11, r12, and r13 in the robot coordinate system is assumed to be known for explanation. In the present embodiment, the reflectors r11, r12, and r13 function as components for defining a reference position. Therefore, the reflectors r11, r12, and r13 may also be referred to as reference reflectors. The reflector r11 may be installed at a position representing a reference of the jig 90. In addition, the position of the reflector r11 may also be set as a position representing a reference of the jig 90. The reflectors r12 and r13 may be installed at a position (e.g., a master hole) representing a position reference of a workpiece W that may be referred to as a processing object. In addition, the position at which the reflectors r12 and r13 are installed may also be set as a position reference of the workpiece W.

[0085] (2-2) Coordinate conversion

[0086] As described above, the measuring device 21 can irradiate the reflector r11, the reflector r12, and the reflector r13 with the measuring light. The measuring device 21 measures the position of the reflector r11 in the first measurement coordinate system based on the measuring light irradiated on the reflector r11. The measuring device 21 measures the position of the reflector r12 in the first measurement coordinate system based on the measuring light irradiated on the reflector r12. The measuring device 21 measures the position of the reflector r13 in the first measurement coordinate system based on the measuring light irradiated on the reflector r13.

[0087] The computing device 11 of the measurement control device 10 obtains the first reference position information indicating the positions of the reflectors r11, r12 and r13 in the first measurement coordinate system from the measurement device 21. The computing device 11 obtains, for example, the second reference position information indicating the positions of the reflectors r11, r12 and r13 in the robot coordinate system, which is input via the input device 14. In addition, the first reference position information may also be referred to as the fourth position information. The second reference position information may also be referred to as the fifth position information. In addition, the positions of the reflectors r11, r12 and r13 in the robot coordinate system may also be automatically input to the measurement control device 10 (that is, they may not be input via the input device 14). The computing device 11 may also obtain the second reference position information by, for example, selecting the positions of the reflectors r11, r12 and r13 in the robot coordinate system input to the processing control device 30.

[0088] The operation device 11 can obtain a coordinate conversion matrix for converting the position in the first measurement coordinate system and the position in the robot coordinate system based on the first reference position information and the second reference position information. The coordinate conversion matrix can also be referred to as coordinate conversion information. The coordinate conversion matrix can, for example, include a rotation matrix for performing rotation conversion of the position and a translation matrix for parallel movement of the position. In addition, the method for obtaining the coordinate conversion matrix can be applied to various existing forms, so the detailed description thereof is omitted. In addition, obtaining the coordinate conversion matrix can also be referred to as calculating the coordinate conversion matrix. The operation device 11 can also obtain a first coordinate conversion matrix and a second coordinate conversion matrix as coordinate conversion matrices, wherein the first coordinate conversion matrix is ​​used to convert the position in the robot coordinate system to the position in the first measurement coordinate system, and the second coordinate conversion matrix is ​​used to convert the position in the first measurement coordinate system to the position in the robot coordinate system. The first coordinate conversion matrix and the second coordinate conversion matrix can also be referred to as the first coordinate conversion information and the second coordinate conversion information, respectively.

[0089] For example, the position of the reflector r11 represented by the first reference position information in the first measurement coordinate system is set to (x r11M ,y r11M , z r11M), the position of the reflector r11 represented by the second reference position information in the robot coordinate system is set to (x r11R ,y r11R , z r11R ). Similarly, the position of the reflector r12 in the first measurement coordinate system is set to (x r12M ,y r12M , z r12M ), set the position of reflector r12 in the robot coordinate system to (x r12R ,y r12R , z r12R ). Set the position of the reflector r13 in the first measurement coordinate system to (x r13M ,y r13M , z r13M ), set the position of reflector r13 in the robot coordinate system to (x r13R ,y r13R , z r13R ). The computing device 11 can, for example, obtain the value that satisfies “(x r11M ,y r11M , z r11M )=R1(x r11R ,y r11R , z r11R )+t1","(x r12M ,y r12M , z r12M )=R1(x r12R ,y r12R , z r12R )+t1” and “(x r13M ,y r13M , z r13M )=R1(x r13R ,y r13R , z r13R )+t1” to obtain the first coordinate transformation matrix. In addition, the operation device 11 can obtain the coordinate transformation matrix that satisfies “(x r11R ,y r11R , z r11R )=R2(x r11M ,y r11M , z r11M )+t2","(x r12R ,y r12R , z r12R )=R2(x r12M ,y r12M , z r12M )+t2” and “(x r13R ,y r13R , z r13R )=R2(x r13M ,y r13M , zr13M )+t2” to obtain the second coordinate transformation matrix. Here, “R1” and “R2” are rotation matrices, and “t1” and “t2” are translation matrices. That is, the computing device 11 can obtain the first coordinate transformation matrix and the second coordinate transformation matrix based on the first reference position information and the second reference position information.

[0090] In addition, the computing device 11 may not obtain the coordinate conversion matrix. In this case, for example, the coordinate conversion matrix may be obtained by a device different from the measurement control device 10, such as the processing control device 30. For example, the communication device 13 of the measurement control device 10 may also send the first reference position information and the second reference position information to the processing control device 30. The computing device 31 of the processing control device 30 may also obtain the coordinate conversion matrix based on the first position reference information and the second reference position information. The communication device 33 of the processing control device 30 may also send the coordinate conversion matrix to the measurement control device 10. That is, the measurement control device 10 may also obtain the coordinate conversion matrix. In addition, as the coordinate conversion matrix, the measurement control device 10 may obtain the first coordinate conversion matrix, may obtain the second coordinate conversion matrix, or may obtain the first coordinate conversion matrix and the second coordinate conversion matrix.

[0091] In addition, the operation device 11 may also obtain only one of the first coordinate conversion matrix and the second coordinate conversion matrix as the coordinate conversion matrix. For example, in the case where the operation device 11 only obtains the first coordinate conversion matrix, the operation device 11 may also use the first coordinate conversion matrix to convert the position in the robot coordinate system into the position in the first measurement coordinate system. In this case, the operation device 11 may also use the first coordinate conversion matrix to reversely convert the position in the first measurement coordinate system into the position in the robot coordinate system. For example, in the case where the operation device 11 only obtains the second coordinate conversion matrix, the operation device 11 may also use the second coordinate conversion matrix to convert the position in the first measurement coordinate system into the position in the robot coordinate system. In this case, the operation device 11 may also use the second coordinate conversion matrix to reversely convert the position in the robot coordinate system into the position in the first measurement coordinate system.

[0092] As described above, the measuring device 21 can irradiate the reflector R21, the reflector R22, and the reflector R23 with the measuring light. The measuring device 21 measures the position of the reflector R21 in the first measurement coordinate system based on the measuring light irradiated on the reflector R21. The measuring device 21 measures the position of the reflector R22 in the first measurement coordinate system based on the measuring light irradiated on the reflector R22. The measuring device 21 measures the position of the reflector R23 in the first measurement coordinate system based on the measuring light irradiated on the reflector R23.

[0093] The operation device 11 can, for example, use the second coordinate conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. In addition, if the reflectors r21, r22, and r23 are replaced by measuring components, it can be said that the operation device 11, which can be called the operation unit, can convert the position of the measuring component in the first measurement coordinate system measured by the measuring device 21 based on the measuring light irradiated on the measuring component into the position of the measuring component in the robot coordinate system based on the second conversion matrix. At this time, the communication device 13, which can be called the sending unit, can send the position information indicating the position of the measuring component in the robot coordinate system to the processing control device 30.

[0094] In addition, as described above, the coordinate conversion matrix (e.g., the first coordinate conversion matrix) is obtained based on the first reference position information and the second reference position information. If the reflectors r21, r22, and r23 are replaced by measuring components, it can be said that the computing device 11, which can be called a computing unit, can convert the position of the measuring component in the first measurement coordinate system measured by the measuring device 21 based on the measurement light irradiated on the measuring component into the position of the measuring component in the robot coordinate system based on the first reference position information and the second reference position information. At this time, the communication device 13, which can be called a sending unit, can send the position information indicating the position of the measuring component in the robot coordinate system to the processing control device 30.

[0095] In addition, the processing control device 30 can control the robot 41 in the robot coordinate system based on the position information indicating the position of the measuring member in the robot coordinate system. In addition, the computing device 11 can also compute the second coordinate conversion matrix based on the first reference position information and the second reference position information, and the second coordinate conversion matrix is ​​used to convert the position of the measuring member in the first measurement coordinate system measured by the measuring device 21 based on the measurement light irradiated on the measuring member into the position of the measuring member in the robot coordinate system. In addition, the position information indicating the position of the measuring member in the robot coordinate system can also be called third position information.

[0096] Here, refer to Figure 6 The operation of the measurement system 2 is described again with reference to the flowchart of FIG. Figure 6In the process of step S101, the operation device 11 obtains the second reference position information indicating the positions of the reflectors r11, r12 and r13 in the robot coordinate system, which is input via the input device 14 (step S101). In parallel with the process of step S101, the measuring device 21 measures the positions of the reflectors r11, r12 and r13 in the first measurement coordinate system based on the measurement light irradiated to the reflectors r11, r12 and r13 (step S102). At this time, the operation device 11 of the measurement control device 10 obtains the first reference position information indicating the positions of the reflectors r11, r12 and r13 in the first measurement coordinate system.

[0097] The computing device 11 obtains a coordinate conversion matrix for converting the position in the first measurement coordinate system and the position in the robot coordinate system based on the first reference position information and the second reference position information (step S103). In addition, when a separate robot coordinate system is defined for each robot, the separate robot coordinate system can be realized by, for example, changing the posture of the robot 41 and measuring the positions of the reflectors r21, r22, and r23 installed on the robot 41. That is, the separate robot coordinate system can be realized by changing the posture of the robot and performing, for example, three-point measurement of the positions of the reflectors r21, r22, and r23.

[0098] (3) Design of reflector measurement

[0099] The size of the reflector such as the reflector r11 is, for example, about several centimeters. That is, the size of the reflector is significantly smaller than the size of the workpiece W. Therefore, for example, if the measuring device 21 measures the position of the reflector while scanning the space to be measured with the measuring light, the time required for measuring the position of the reflector may become relatively long. Therefore, at least one of the following methods (3-1) and (3-2) can be used to shorten the time required for measuring the position of the reflector.

[0100] (3-1) Method of using a stereo camera

[0101] The measuring system 2 may also include, in addition to the measuring device 21, a stereo camera 22. The stereo camera 22 may be, for example, Figure 7As shown, the measuring device 21 is arranged near the measuring device 21. For example, the measuring device 21 and the stereo camera 22 may be included in the same frame. Here, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is known. In addition, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is constant. In addition, the positional relationship between the measuring device 21 and the stereo camera 22 may not be known. In addition, the positional relationship between the measuring device 21 and the stereo camera 22 may not be constant.

[0102] Light emitting diodes (LEDs) and other light emitting bodies (not shown) may be disposed near the reflectors r11, r12, and r13. Figure 5 ) and installed with Figure 8 The reflector module r2a shown in the figure includes reflectors r21, r22, and r23 and a light emitting body 81 such as an LED.

[0103] In the image captured by the stereo camera 21, the brightness value of the pixel corresponding to the light source is higher than the brightness value of other pixels. Therefore, as long as the light source is arranged near the reflector in this way, the position of the light source can be relatively easily determined from the image captured by the stereo camera 21. In addition, an example of a method for determining the position of the light source will be described later (refer to "(7) Method for determining the position of the light source from the image").

[0104] Here, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is known and unchanged. Therefore, the measurement control device 10 can convert the position of the light source determined from the image taken by the stereo camera 22 (that is, the position in the coordinate system related to the stereo camera 22) into a position in the first measurement coordinate system related to the measuring device 21 (in other words, the coordinate systems can be integrated). In the conversion, similar to the conversion of the position in the first measurement coordinate system and the position in the robot coordinate system (refer to "(2-2) Coordinate Conversion"), for example, a rotation matrix and a translation matrix can be used. The measurement control device 10 can infer the position of the reflector, which is the measurement object of the measuring device 21, in the first measurement coordinate system based on the position of the light source in the first measurement coordinate system.

[0105] In addition, the position accuracy of the light source determined from the image captured by the stereo camera 22 varies depending on the pixel size of the stereo camera 22 and the distance between the stereo camera 22 and the light source. That is, the position accuracy of the light source varies depending on the pixel size of the imaging element of the stereo camera 22 and the size of the image of the light source on the imaging element of the stereo camera 22. In the space to be measured by the measuring device 21, the position accuracy of the light source determined from the image captured by the stereo camera 22 is coarser than the accuracy associated with the measuring device 21. That is, the determination of the position of the light source from the image captured by the stereo camera 22, if its accuracy is taken into account, is synonymous with the determination of the position of the reflector near the light source. In addition, when the positional relationship between the reflector r11, the reflector r12, and the reflector r13 and the light source is known, the position of each of the reflectors r11, r12, and r13 can also be determined by taking into account the positional relationship.

[0106] The measurement control device 10 can determine the position of a light source, for example, disposed near the reflector r11, from the image captured by the stereo camera 22. The measurement control device 10 can estimate the position of the reflector r11 based on the determined position of the light source. Moreover, the measurement control device 10 can control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the position of the reflector r11, for example, can be reduced. Therefore, the time required for the measurement device 21 to measure the position of the reflector r11 can be shortened. The same is true for the reflectors r12 and r13.

[0107] The measurement control device 10 can determine the position of the light emitting body 81 included in the reflector module R2a, for example, from the image captured by the stereo camera 22. The measurement control device 10 can estimate the positions of the reflectors R21, R22, and R23 included in the reflector module R2a based on the determined position of the light emitting body 81. Moreover, the measurement control device 10 can control the measurement device 21 based on the estimated positions of the reflectors R21, R22, and R23 to measure the reflectors R21, R22, and R23, respectively. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the positions of the reflectors R21, R22, and R23, for example, can be reduced. Therefore, the time required for the measurement device 21 to measure the positions of the reflectors R21, R22, and R23 can be shortened.

[0108] In addition, the light emitter may be arranged only near the reflector r11, the reflector r12, and the reflector r13. In this case, the measurement control device 10 may determine the position of the light emitter from the image captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0109] Alternatively, the light emitter may be disposed only on the robot 410. In this case, the measurement control device 10 may determine the position of the light emitter 81 from the image captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r21, r22, and r23 included in the reflector module r2a.

[0110] In addition, if the reflectors r21, r22, and r23 are replaced by measuring members, it can be said that the measuring system 2 may include a stereo camera 22 that can be called a photographing device and can photograph the measuring members. Alternatively, it can be said that the measuring system 2 may include a stereo camera 22 that can be called a second measuring device, and the stereo camera 22 can measure the measuring member with a coarser accuracy than the measuring device 21 that can be called the first measuring device. The measurement control device 10 can control the measuring device 21 to measure the measuring member based on the measurement result obtained by the stereo camera 22.

[0111] (3-2) Method using wireless communication

[0112] The measuring system 2 may include, in addition to the measuring device 21, antennas ANT1, ANT2, and ANT3 capable of wireless communication. The antennas ANT1, ANT2, and ANT3 may be, for example, Fig. 9 They are respectively arranged around the workpiece W as shown.

[0113] Here, it is assumed that the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 is known. In addition, it is assumed that the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 is constant. That is, as in the case of using the stereo camera, the measuring device 21 can convert the position in the coordinate system related to the antenna ANT1, the antenna ANT2, and the antenna ANT3 into the position in the first measurement coordinate system related to the measuring device 21 (in other words, the coordinate system can be integrated). In addition, the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 may not be known. In addition, the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 may not be constant.

[0114] A distance measuring antenna (not shown) capable of wireless communication may be arranged near each of the reflectors r11, r12, and r13. Figure 5 ) and install Fig.10 The reflector module r2b shown in the figure includes reflectors r21, r22, and r23 and a ranging antenna 82 capable of wireless communication.

[0115] Antenna ANT1, antenna ANT2, and antenna ANT3 transmit radio waves. The following describes a case where the position of, for example, the ranging antenna 82 is determined by antenna ANT1, antenna ANT2, and antenna ANT3. Antenna ANT1 can transmit two or more radio waves with different frequencies. The ranging antenna 82 can receive two or more radio waves transmitted from antenna ANT1. The distance between antenna ANT1 and the ranging antenna 82 is estimated based on the difference in phases of the two or more radio waves received by the ranging antenna 82. The reason is that since the two or more radio waves transmitted from antenna ANT1 have different frequencies, the phase difference of the two or more radio waves will change depending on the distance between antenna ANT1 and the ranging antenna 82. Similarly, the distance from antenna ANT2 to the ranging antenna 82 and the distance from antenna ANT3 to the ranging antenna 82 are estimated.

[0116] For example, the position of the ranging antenna 82 can be determined by finding the intersection of a sphere with the antenna ANT1 as the center and the distance from the antenna ANT1 to the ranging antenna 82 as the radius, a sphere with the antenna ANT2 as the center and the distance from the antenna ANT2 to the ranging antenna 82 as the radius, and a sphere with the antenna ANT3 as the center and the distance from the antenna ANT3 to the ranging antenna 82 as the radius. In addition, the error of the distance measured using wireless communication (in other words, measured based on the phase difference of the radio wave) is, for example, about 10 centimeters. The accuracy of the position of the ranging antenna 82, for example, determined using wireless communication is coarser than the accuracy associated with the measuring device 21. That is, if the accuracy of determining the position of the ranging antenna (for example, the ranging antenna 82) using wireless communication is taken into account, it is synonymous with determining the position of the reflector near the ranging antenna.

[0117] The measurement control device 10 can, for example, convert the position of the ranging antenna 82 measured using wireless communication into the position of the ranging antenna 82 in the first measurement coordinate system. The measurement control device 10 can infer the positions of the reflectors R21, R22, and R23 contained in the reflector module R2b, for example, based on the position of the ranging antenna 82 in the first measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors R21, R22, and R23, respectively, based on the inferred positions of the reflectors R21, R22, and R23. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the positions of the reflectors R21, R22, and R23 (i.e., the scanning range of the measurement light used to find the reflector) can be reduced. Therefore, the time required for the measurement device 21 to measure the positions of the reflectors R21, R22, and R23 can be shortened.

[0118] The measurement control device 10 can estimate the position of the reflector r11 based on the position of the ranging antenna, for example, arranged near the reflector r11, which is determined by the same method. The measurement control device 10 can control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. As a result, the range of the measurement light that the measurement device 21 should irradiate in order to measure the position of the reflector r11 (that is, the scanning range of the measurement light for finding the reflector) can be reduced. Therefore, the time required for the measurement device 21 to measure the position of the reflector r11 can be shortened. The same is true for the reflectors r12 and r13.

[0119] In addition, the ranging antenna may be arranged only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may determine the position of the ranging antenna based on the distance to the ranging antenna determined by the antenna ANT1, the antenna ANT2, and the antenna ANT3 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0120] Alternatively, the ranging antenna may be disposed only on the robot arm 410. In this case, the measurement control device 10 may determine the position of the ranging antenna 82 based on the distances to the ranging antenna 82 determined by the antenna ANT1, the antenna ANT2, and the antenna ANT3, only when the measurement device 21 measures the positions of the reflectors r21, r22, and r23 included in the reflector module r2b.

[0121] Furthermore, if the reflectors r21, r22, and r23 are replaced by measuring members, it can be said that the measuring system 2 may include antennas ANT1, ANT2, and ANT3, which may be referred to as second measuring devices, and the antennas ANT1, ANT2, and ANT3 may measure the measuring members with a higher accuracy than the measuring device 21, which may be referred to as the first measuring device. The measurement control device 10 may control the measuring device 21 to measure the measuring members based on the measurement results obtained by the antennas ANT1, ANT2, and ANT3.

[0122] (4) Tool center point

[0123] When the processing control device 30 controls the robot 41, the processing control device 30 sets the path along which a point on the robot arm 410 of the robot 41 moves. The point on the robot arm 410 is called the so-called "Tool Center Point" (hereinafter, appropriately expressed as "TCP"). The TCP roughly determines the position of the part of the end effector (in other words, the tool) installed at the front end of the robot arm 410 that acts on the processing object. The TCP is a part that serves as a reference when the processing control device 30 controls the robot 41. Therefore, the tool center point can also be called a reference part.

[0124] The TCP varies depending on the purpose of the end effector, etc. That is, if the end effector is changed, the TCP associated with the robot arm 410 will also change. Figure 5 In the case of a rod-shaped end effector EE1 as shown in the figure, the TCP may be located at the front end of the end effector EE1. In the case of an end effector such as a suction hand having a plurality of suction pads, the TCP may be located at one of the plurality of suction pads or may be located in the middle of the plurality of suction pads (for example, see Fig.12 ). In the case where the end effector is, for example, a gripper having a plurality of fingers or claws, the TCP may be located at one of the plurality of fingers or claws, or may be located in the middle of the plurality of fingers or claws. In the case where the robot arm 410 is equipped with, for example, a suction hand or a gripper, the robot 41 may also be referred to as a picking device. In addition, the end effector mounted on the robot arm 410 is not limited to these components.

[0125] For example Figure 5 As shown in FIG. 1 , the position of the reflector module r2 mounted on the robot arm 410 is different from the position of the TCP. That is, the positions where the reflectors r21, r22, and r23, which can be called measuring components, are mounted are different from the position of the TCP. As described above, the TCP is equivalent to the part that acts on the processing object, so it is difficult to mount a measuring component such as a reflector on the TCP.

[0126] On the other hand, the reflector module r2 is mounted at a predetermined position on the robot 410 where the positional relationship between the reflector module r2 and the TCP does not change. That is, the positions of the reflectors r21, r22, and r23 included in the reflector module r2 are respectively at predetermined positions relative to the TCP, which can be called a reference portion, in the robot 410. In other words, the reflector module r2 including at least three reflectors (for example, the reflector r21, the reflector r22, and the reflector r23) is arranged at a predetermined position relative to the TCP of the robot 41. That is, the reflectors r21, r22, and r23 capable of reflecting the measurement light are arranged at a predetermined position relative to the TCP of the robot 41. Therefore, by using the positional relationship between the reflectors r21, r22, and r23 and the TCP, the position of the TCP can be determined by measuring the positions of the reflectors r21, r22, and r23 using the measuring device 21.

[0127] In addition, the configuration of the reflectors r21, r22, and r23 mounted on the robot 410 can be changed according to the shape of the end effector mounted on the front end of the robot 410. In the case where the end effector is a rod-shaped end effector extending in the longitudinal direction of the robot 410, the reflectors r21, r22, and r23 can be, for example, Fig.11 . That is, the interval s11 between the reflector r21 and the reflector r23 on the robot 410 (i.e., the interval in the longitudinal direction of the robot 410 which can be referred to as the first direction) can be longer than the interval s12 between the reflector r22 and the reflector r23 (i.e., the interval in the second direction intersecting the first direction). In other words, the interval s11 in the first direction of the multiple reflectors on the robot 410 equipped with the multiple reflectors can be longer than the interval s12 in the second direction intersecting the first direction. If so, when the position and posture of the TCP are calculated based on the respective positions of the reflectors r21, r22, and r23 (refer to "(5) Calculation of the position of the TCP"), the inclination in the longitudinal direction of the robot 410 (in other words, the axis of the rod-shaped end effector) can be determined with relatively high accuracy.

[0128] In the case where the end effector is a suction hand having a branched shape at its front end, the reflectors r21, r22 and r23 can be, for example, Fig.12. That is, the distance s21 between the reflector r21 and the reflector r23 on the robot 410 (i.e., the interval in the longitudinal direction of the robot 410 which can be referred to as the first direction) can be shorter than the interval s22 between the reflector r22 and the reflector r23 (i.e., the interval in the second direction intersecting the first direction). In other words, the interval s21 in the first direction of the multiple reflectors on the robot 410 equipped with multiple reflectors can be shorter than the interval s22 in the second direction intersecting the first direction. If so, when the position and posture of the TCP are calculated based on the respective positions of the reflectors r21, r22, and r23, the degree of rotation (e.g., the rotation angle) of the robot 410 around the longitudinal direction (in other words, the axis of the rod-shaped end effector) can be obtained with relatively high accuracy. In addition, the first direction can also be referred to as the direction along the rotation axis of the end effector of the robot 410 which can be referred to as the processing tool. When the end effector is, for example, a laser processing head capable of laser processing a processing object, the first direction may be alternatively referred to as a direction along the optical axis of the laser light (ie, processing light) emitted from the laser processing head.

[0129] (4-1) TCP Measurement

[0130] Reference Figures 13 to 17 The specific measurement method of TCP is described below. In addition, the measurement method of TCP is not limited to the method described below, and various existing forms can be applied.

[0131] (4-1-1) Method of using contact sensor

[0132] Fig.13 In the jig 91, a hole H is formed for inserting a rod-shaped end effector EE1. A sensor 23 for measuring the end effector EE1 is arranged on the bottom surface of the hole H. The jig 91 is fixed so that its position does not change. It is assumed that the position of the sensor 23, in other words, the position of the bottom surface of the hole H of the jig 91 is known. The position of the sensor 23 can be expressed as a position in the robot coordinate system. In this case, when the front end of the end effector EE1 contacts the sensor 23 (in other words, when the sensor 23 measures the front end of the end effector EE1), the position of the TCP of the end effector EE1 is determined as the position of the sensor 23. The position of the TCP of the end effector EE1 determined in this way can be input to the measurement control device 10 via the input device 14. At this time, the position of the TCP can be the position of the TCP in the robot coordinate system. In addition, the sensor 23 can also be arranged on the side of the hole H, for example, and is not limited to the bottom surface of the hole H. The sensor 23 can be called a third measuring device.

[0133] Fig.14In the jig 91a, a hole H is formed for inserting a rod-shaped end effector EE1. A sensor 23 for measuring the end effector EE1 is arranged on the bottom surface of the hole H. A reflector module r3 including reflectors r31, r32 and r33 is installed on the jig 91a. The jig 91a can be moved to insert the end effector EE1 into the hole H (that is, the position of the jig 91a can be changed). It is assumed that the positional relationship between the sensor 23 and the reflectors r31, r32 and r33 is known. For example, it is assumed that the conversion matrix for converting the positions of the reflectors r31, r32 and r33 into the position of the sensor 23 is known. In addition, the reflector module r3 or the reflectors r31, r32 and r33 can be referred to as a second reference member.

[0134] In this case, in a state where the front end of the end effector EE1 contacts the sensor 23 (i.e., in a state where the end effector EE1 is inserted into the hole H of the jig 91a), the measuring device 21 irradiates the reflectors r31, r32, and r33 with measuring light. The measuring device 21 measures the positions of the reflectors r31, r32, and r33 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r31, r32, and r33. The measurement control device 10 determines the position of the TCP of the end effector EE1 based on the positions of the reflectors r31, r32, and r33 in the first measurement coordinate system and the positional relationship between the sensor 23 and the reflectors r31, r32, and r33. Since the positional relationship between the sensor 23 and the reflectors r31, r32, and r33 is known, the computing device 11 of the measurement control device 10 can convert the positions of the reflectors r31, r32, and r33 in the first measurement coordinate system measured by the measuring device 21 into the positions of the sensor 23 in the first measurement coordinate system, based on the conversion matrix for converting the positions of the reflectors r31, r32, and r33 in the first measurement coordinate system into the positions of the sensor 23. Here, the position of the sensor 23 is equivalent to the position of the TCP of the end effector EE1, so the computing device 11 converts the positions of the reflectors r31, r32, and r33 in the first measurement coordinate system into the positions of the sensor 23 in the first measurement coordinate system to determine the position of the TCP (for example, the position of the TCP in the first measurement coordinate system).

[0135] (4-1-2) Method using non-contact sensor

[0136] Fig.15In the jig 92, a sensor 24 for measuring the object to be measured by the light section method is installed. Here, the sensor 24 is configured to emit light L1. The jig 92 is fixed so that its position does not change. For example, the position in the robot coordinate system corresponding to the reference point associated with the sensor 24 is set to be known. In this case, the position of the TCP of the end effector EE1 measured by the sensor 24 can be converted to a position in the robot coordinate system based on the relationship between the reference point associated with the sensor 24 and the position of the robot coordinate system corresponding to the reference point. For example, the coordinate system of the sensor 24 is set to the second measurement coordinate system. Since the reference point associated with the sensor 24 (that is, the reference point in the second measurement coordinate system) and the position in the robot coordinate system corresponding to the reference point are known, for example, the computing device 11 of the measurement control device 10 can calculate a conversion matrix for converting the position in the second measurement coordinate system into the position in the robot coordinate system. The computing device 11 can convert the position of the TCP measured by the sensor 24 (i.e., the position in the second measurement coordinate system) into the position of the TCP in the robot coordinate system based on the conversion matrix. The position of the TCP of the end effector EE1 measured in this way can be input to the measurement control device 10 via the input device 14. In addition, the sensor 24 can be called a third measurement device.

[0137] Fig.16 In the embodiment, the sensor 24 is installed on the jig 92a. The reflector module r4 including the reflector r41, the reflector r42 and the reflector r43 is installed on the jig 24a. The jig 92a can be moved to bring the sensor 24 close to the end effector EE1. It is assumed that the positional relationship between the reference point related to the sensor 24 and the reflector r41, the reflector r42 and the reflector r43 is known. For example, it is assumed that the conversion matrix for converting the respective positions of the reflector r41, the reflector r42 and the reflector r43 into the reference point related to the sensor 24 is known. In addition, the reflector module r4 or the reflector r41, the reflector r42 and the reflector r43 can be referred to as a second reference member.

[0138] In this case, in a state where the TCP of the end effector EE1 is measured by the sensor 24, the measuring device 21 irradiates the reflectors r41, r42, and r43 with measuring light. The measuring device 21 measures the positions of the reflectors r41, r42, and r43 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r41, r42, and r43. The measurement control device 10 determines the position of the TCP of the end effector EE1 based on the positional relationship between the reference point associated with the sensor 24 and the reflectors r41, r42, and r43, the position of the TCP of the end effector EE1 measured by the sensor 24, and the positions of the reflectors r41, r42, and r43 in the first measurement coordinate system. Since the positional relationship between the reference point associated with the sensor 24 and the reflectors r41, r42, and r43 is known, the computing device 11 of the measurement control device 10 can, for example, convert the positions of the reflectors r41, r42, and r43 in the first measurement coordinate system measured by the measurement device 21 into reference points in the first measurement coordinate system based on a conversion matrix for converting the positions of the reflectors r41, r42, and r43 in the first measurement coordinate system into reference points in the first measurement coordinate system. The computing device 11 can calculate a conversion matrix for converting the positions in the second measurement coordinate system into the positions in the first measurement coordinate system based on the reference points in the first measurement coordinate system and the reference points in the second measurement coordinate system (i.e., the reference points associated with the sensor 24 in the coordinate system associated with the sensor 24). The computing device 11 can convert the position of the TCP measured by the sensor 24 (i.e., the position in the second measurement coordinate system) into the position of the TCP in the first measurement coordinate system based on the conversion matrix.

[0139] In addition, the computing device 11 may not obtain the "conversion matrix for converting the position in the second measurement coordinate system into the position in the first measurement coordinate system". In this case, the conversion matrix may be input by, for example, the administrator of the system 1 or the like via the input device 14 of the measurement control device 10. That is, the measurement control device 10 may also obtain the conversion matrix. The "conversion matrix for converting the position in the second measurement coordinate system into the position in the first measurement coordinate system" may also be referred to as the third coordinate conversion information. In addition, a non-contact sensor such as a stereo camera or a laser scanner may be used for the measurement of TCP instead of the sensor 24.

[0140] (4-1-3) Others

[0141] Fig.17In the figure, at the front end of the robot arm 410, for example, an end effector EE2 as an optical sensor is installed. A tool ball TB is installed on the jig 93. A reflector module r5 including reflectors r51, r52 and r53 is installed on the jig 93. The position of the jig 93 (in other words, the position of the tool ball TB) can be changed. It is assumed that the positional relationship between the center of the tool ball TB and the reflectors r51, r52 and r53 is known. In addition, the positional relationship between the center of the tool ball TB and the reflectors r51, r52 and r53 may not be known. In addition, the reflector module r5 or the reflectors r51, r52 and r53 may be referred to as a second reference member.

[0142] In this case, the measuring device 21 irradiates the reflectors r51, r52, and r53 with measuring light in a state where the sensor of the end effector EE2 has measured the center of the tool ball TB. The measuring device 21 measures the positions of the reflectors r51, r52, and r53 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r51, r52, and r53. The measurement control device 10 compares the positions of the reflectors r51, r52, and r53 in the first measurement coordinate system with the center of the tool ball TB measured by the sensor of the end effector EE2. This operation is performed multiple times (for example, three times or more) while changing the relative positional relationship between the end effector EE2 and the jig 93 (i.e., the tool ball TB). As a result, the position of the TCP of the end effector EE2 is determined. At this time, the position of the TCP may be the position of the TCP in the first measurement coordinate system. In addition, a corner cube may be used instead of the tool ball TB.

[0143] (4-2) Measurement of reflector module r2

[0144] For example, Fig.13 In the state where the TCP of the end effector EE1 is measured, in other words, where the position of the TCP of the end effector EE1 is determined, the measuring device 21 irradiates the measuring light to each of the reflectors r21, r22, and r23 included in the reflector module r2 mounted on the robot arm 410. The measuring device 21 measures the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to each of the reflectors r21, r22, and r23.

[0145] As a result, the positions of the reflectors r21, r22, and r23 and the position of the TCP are determined (measured) while the position and posture of the robot 410 remain unchanged. Hereinafter, the position and posture of the robot 410 at this time are appropriately referred to as "reference position and reference posture". The positions of the reflectors r21, r22, and r23 and the position of the TCP when the robot 410 is in the reference position and reference posture can be expressed as positions in the first measurement coordinate system or as positions in the robot coordinate system.

[0146] The positions of the reflectors r21, r22, and r23 in the first measurement coordinate system and the position of the TCP when the robot arm 410 is in the reference position and reference posture are respectively represented by (x r21M ,y r21M , z r21M )、(x r22M ,y r22M , z r22M ) and (x r23M ,y r23M , z r23M ), and (x tM ,y tM , z tM ). The computing device 11 may, for example, convert the position of the TCP in the robot coordinate system into the position of the TCP in the first measurement coordinate system based on the first coordinate conversion matrix.

[0147] The computing device 11 can compute the posture corresponding to the reference posture of the robot 410 based on the positions of the reflectors r21, r22, and r23 on the first measurement coordinate system. The computed posture can be represented, for example, as (W M , P M , R M ). Here, “W M " can be the angle of the first measurement coordinate system around the x-axis, "P M " can be the angle of the first measurement coordinate system around the y-axis, "R M " can be the angle of the first measurement coordinate system around the z-axis. In other words, "W M " is the rotation amount of the robot arm 410 around the x-axis of the first measurement coordinate system, "P M " is the rotation amount of the robot arm 410 around the y-axis in the first measurement coordinate system, "R M ” is the rotation amount of the robot arm 410 around the z-axis in the first measurement coordinate system.

[0148] The posture of the vector (so-called tool axis vector) extending in the direction in which the end effector EE1 extends is regarded as the posture of the TCP. Here, the posture of the vector is regarded as the same as the posture of the robot 410. Therefore, the computing device 11 sets the position and posture of the TCP when the position and posture of the robot 410 are the reference position and the reference posture as (x tM ,y tM , z tM , W M , P M , R M The computing device 11 may store the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and the reference posture in the storage device 12 in association with the positions of the reflectors r21, r22, and r23.

[0149] The positions of the reflectors r21, r22, and r23 in the robot coordinate system and the position of the TCP when the robot arm 410 is in the reference position and reference posture are respectively represented by (x r21R ,y r21R , z r21R )、(x r22R ,y r22R , z r22R ) and (x r23R ,y r23R , z r23R ), and (x tR ,y tR , z tR ). In addition, the computing device 11 can, for example, based on the second coordinate conversion matrix, convert the positions of the reflectors r21, r22, and r23 measured by the measuring device 21 in the first measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. In addition, the computing device 11 can, for example, based on the second coordinate conversion matrix, convert the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system.

[0150] The computing device 11 can compute the posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computed posture can be represented, for example, as (W R , P R , R R ). Here, “W R " can be the angle of the robot coordinate system around the x-axis, "P R " can be the angle of the robot coordinate system around the y-axis, "R R" can be the angle of the robot coordinate system around the z-axis. In other words, "W R " is the rotation amount of the robot arm 410 around the x-axis in the robot coordinate system, "P R " is the rotation amount of the robot arm 410 around the y-axis in the robot coordinate system, "R R ” is the rotation amount of the robot arm 410 around the z-axis in the robot coordinate system.

[0151] The calculation device 11 sets the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and the reference posture as (x tR ,y tR , z tR , W R , P R , R R The computing device 11 may store the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and the reference posture in the storage device 12 in association with the positions of the reflectors r21, r22, and r23.

[0152] (4-3) Position conversion

[0153] The computing device 11 can obtain a position conversion matrix for converting the positions of the reflectors r21, r22, and r23 into the position and posture of the TCP based on the positions of the reflectors r21, r22, and r23 stored in the storage device 12 in association with each other. The position conversion matrix may include, for example: a matrix for obtaining the position of the TCP based on the positions of the reflectors r21, r22, and r23; and a matrix for obtaining the posture of the TCP based on the positions of the reflectors r21, r22, and r23. The position conversion matrix may also be referred to as position conversion information.

[0154] The computing device 11 can obtain a position conversion matrix based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system and the position of the TCP when the robot 410 is in the reference position and reference posture (i.e., related to each other). The position conversion matrix in the first measurement coordinate system can also be called the first position conversion information.

[0155] The computing device 11 can obtain the position conversion matrix based on the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the position of the TCP when the robot arm 410 is in the reference position and reference posture (i.e., they are associated with each other). The position conversion matrix in the robot coordinate system can also be called the second position conversion information.

[0156] Here, regardless of whether the positions of the reflectors r21, r22, and r23 and the position of the TCP when the robot arm 410 is in the reference position and the reference posture are expressed as positions in the robot coordinate system or as positions in the first measurement coordinate system, the physical positional relationship between the reflectors r21, r22, and r23 and the TCP remains unchanged (for example, refer to Fig.18 ). Therefore, the first position conversion matrix and the second position conversion matrix are substantially the same. Therefore, in the following description, the "first position conversion matrix" and the "second position conversion matrix" are appropriately expressed as the "position conversion matrix". That is, the "position conversion matrix" is a concept that includes the "first position conversion matrix" and the "second position conversion matrix".

[0157] Here, refer to Fig.19 The operation of the measurement system 2 is described again with reference to the flowchart of FIG. Fig.19 In the step S201, the computing device 11 obtains the position of the TCP of the robot 41 when the robot arm 410 is in the reference position and reference posture. At this time, the computing device 11 calculates the posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23. The computing device 11 sets the calculated posture as the posture of the TCP, thereby obtaining the position and posture of the TCP (step S201).

[0158] In parallel with the processing of step S201, the measuring device 21 measures the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated to the reflectors r21, r22, and r23 when the robot arm 410 of the robot 41 is at the reference position and reference posture (step S202). At this time, the computing device 11 of the measurement control device 10 obtains position information indicating the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0159] The computing device 11 obtains a position conversion matrix for converting the positions of the reflectors r21, r22, and r23 and the positions and postures of the TCPs based on the positions and postures of the TCPs obtained in step S201 and the position information obtained in step S202 (step S203).

[0160] In addition, the position conversion matrix can also be obtained, for example, as follows. First, when the position and posture of the robot 410 are the reference position and reference posture, the positions of the reflectors r21, r22 and r23 are measured, and the posture of the surface specified by the reflectors r21, r22 and r23 is obtained based on the measured positions. Next, the processing control device 30 controls the robot 41 so that the position and posture of the TCP become the specified position and posture. As a result, the position and posture of the robot 410 change. Subsequently, the positions of the reflectors r21, r22 and r23 are measured, and the posture of the surface specified by the reflectors r21, r22 and r23 is obtained based on the measured positions. At this time, the specified position and posture of the TCP are determined by the processing control device 30 (that is, they are known). The position conversion matrix can also be statistically obtained based on the results of repeating the above actions for many times.

[0161] For example, Fig.13 In the measurement of the position of the TCP of the end effector EE1, since the position and posture of the robot arm 410 are the reference position and reference posture, it can be said that the TCP is located at a predetermined position. The positions of the reflectors r21, r22, and r23 used to obtain the position conversion matrix are measured after the TCP of the end effector EE1 has been measured.

[0162] In addition, "the state in which the robot arm 410 is in the reference position and reference posture" can be replaced by "the state in which the TCP of the robot 41, which can be called a processing device, is located at a specified position". Here, "the state in which the TCP of the robot 41, which can be called a processing device, is located at a specified position" can also be referred to as the first state. If the reflectors r21, r22, and r23 are replaced by measuring components, "the respective positions of the reflectors r21, r22, and r23 in the state in which the robot arm 410 is in the reference position and reference posture" can be replaced by "the position of the measuring component measured by the measuring device 21, which can be called the first measuring device, based on the measuring light irradiated on the measuring component in the first state". For example, if the sensors 23 and 24 are replaced by the third measuring device, "the state in which the robot arm 410 is in the reference position and reference posture" can be replaced by "the state in which the third measuring device has measured the position of the TCP".

[0163] For example, Fig.14 and Fig.16As shown, when the jig (for example, refer to jig 91a and jig 92a) for measuring the position of the TCP of the end effector EE1 is movable and a reflector is mounted on the jig, the position of the reflector mounted on the jig may move according to the position of the end effector EE1 (that is, the position of the robot 410). In addition, it can be said that when the position of the TCP is measured, the positional relationship between the reflector mounted on the jig and the reflectors r21, r22, and r23 (in other words, the measuring member) mounted on the robot 410 is a predetermined relationship. In this case, the measuring device 21 can determine the position of the TCP by measuring the position of the reflector mounted on the jig (refer to the above "(4-1) Measurement of TCP").

[0164] If the reflector installed on the jig is replaced with a second reference member, it can be said that the measuring device 21, which can be called a first measuring device, is capable of irradiating measurement light onto the second reference member that moves according to the position of the robot arm 410 to measure the position of the second reference member, and measure the position of the TCP of the robot 41 that moves along with the movement of the robot arm 410.

[0165] Through the matters described so far, the measurement system 2 including the measurement control device 10 and the measurement device 21 can be linked with the process control device 30. That is, the measurement result obtained by the measurement device 21 can be used for the process control device 30 to control the robot 41.

[0166] For example, when the position and posture of the robot arm 410 are different from the reference position and the reference posture, the coordinate conversion matrix and the position conversion matrix can be used to convert the positions of the reflectors r21, r22 and r23 in the measurement coordinate system measured by the measuring device 21 into the positions of the TCP in the robot coordinate system. The position of the TCP in the robot coordinate system is used when the processing control device 30 controls the robot 41.

[0167] In addition, the communication device 13 of the measurement control device 10 can send the position and posture of, for example, TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the processing control device 30 in association with each other. The processing control device 30 can save the position and posture of, for example, TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system in association with each other in the storage device 32.

[0168] For example, when measuring the TCP of the end effector EE1, the processing control device 30 controls the robot 41 so that the position and posture of the robot arm 410 become the reference position and reference posture. At this time, the position set as the target position by the processing control device 30 (that is, the position of the TCP when measuring the TCP) and the actual position of the TCP may be different. Therefore, the processing control device 30 may also correct the origin of the robot coordinate system based on the position and posture of, for example, the TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, so that, for example, the position set as the target position is consistent with the actual position of the TCP. Specifically, at least one of a rotational transformation and a parallel movement of the origin of the robot coordinate system may be performed.

[0169] As described above, the posture of the TCP when the posture of the robot arm 410 is the reference posture can be calculated based on the positions of the reflectors r21, r22, and r23. Therefore, the processing control device 30 corrects the origin of the robot coordinate system based on the position and posture of the TCP in the robot coordinate system. It can be said that the processing control device 30 corrects the origin of the robot coordinate system based on the positions of the reflectors r21, r22, and r23.

[0170] (5) Calculation of TCP position

[0171] By using the coordinate conversion matrix (i.e., conversion information for converting the position in the measurement coordinate system and the position in the robot coordinate system) and the coordinate conversion matrix (i.e., conversion information for converting the respective positions of reflectors r21, r22 and r23 into the position of TCP), the respective positions of reflectors r21, r22 and r23 measured by the measuring device 21 when the position and posture of the robot arm 410 are different from the reference position and reference posture can be converted into the position and posture of TCP.

[0172] As described in “(4-3) Position Conversion”, the position conversion matrix is ​​based on the position and orientation of the TCP, that is, for example, (x tR ,y tR , z tR , W R , P R , R R ) and the positions of the reflectors r21, r22 and r23, for example (x r21R ,y r21R , z r21R )、(x r22R ,y r22R , z r22R ) and (x r23R ,y r23R , zr23R ) is used for calculation. Therefore, as long as the position conversion matrix is ​​used, the position and posture of TCP can be calculated according to the positions of reflectors r21, r22 and r23. Here, in order to avoid cumbersomeness, the position and posture of TCP are appropriately referred to as "the position of TCP".

[0173] In addition, the rotation amount W of the robot coordinate system around the x-axis R It can be expressed as the position of the robot coordinate system in the direction of rotation around the x-axis. The rotation amount P of the robot coordinate system around the y-axis R It can be expressed as the position of the robot coordinate system in the direction of rotation around the y-axis. The rotation amount R of the robot coordinate system around the z-axis R It can be said that the position and posture of the TCP are represented by the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, the position in the z-axis direction of the robot coordinate system, the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, and the position in the z-axis direction of the robot coordinate system. That is, the TCP can move along the x-axis direction, the y-axis direction, and the z-axis direction in the three-dimensional space, and can rotate around the x-axis, the y-axis, and the z-axis. That is, it can be said that the TCP has six degrees of freedom of movement (the so-called six degrees of freedom (6DoF)).

[0174] Here, the calculation of the position of the TCP may be performed in the calculation device 11 of the measurement control device 10, or in the calculation device 31 of the processing control device 30. In addition, the calculation of the position of the TCP may be shared by the calculation device 11 and the calculation device 31. Furthermore, if the conversion between the position in the measurement coordinate system and the position in the robot coordinate system is also considered, the following four methods can be listed.

[0175] (i) When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0176] The computing device 11 of the measurement control device 10 can use the coordinate conversion matrix to convert the positions of the reflectors r21, r22, and r23 measured by the measuring device 21 in the first measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 11 can further use the position conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0177] Alternatively, the computing device 11 may use the position conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system into the position and posture of the TCP in the first measurement coordinate system. The computing device 11 may further use the coordinate conversion matrix to convert the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system. The communication device 13 of the measurement control device 0 may send the position information indicating the position of the TCP in the robot coordinate system to the processing control device 30.

[0178] (ii) When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0179] The computing device 11 of the measurement control device 10 can use the coordinate conversion matrix to convert the positions of the reflectors r21, r22 and r23 measured by the measurement device 21 in the first measurement coordinate system into the positions of the reflectors r21, r22 and r23 in the robot coordinate system. The communication device 13 of the measurement control device 10 can send the position information representing the positions of the reflectors r21, r22 and r23 in the robot coordinate system and the position conversion matrix to the processing control device 30. The computing device 31 of the processing control device 30 can use the position conversion matrix to convert the positions of the reflectors r21, r22 and r23 in the robot coordinate system into the positions of the TCP in the robot coordinate system.

[0180] (iii) When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0181] The computing device 11 of the measurement control device 10 can use the position conversion matrix to convert the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 in the first measurement coordinate system into the position of the TCP in the first measurement coordinate system. The communication device 13 of the measurement control device 10 can send the position information indicating the position of the TCP in the first measurement coordinate system and the coordinate conversion matrix to the processing control device 30. The computing device 31 of the processing control device 30 can use the coordinate conversion matrix to convert the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system.

[0182] (iv) When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0183] The communication device 13 of the measurement control device 10 can send the position information, coordinate conversion information, and position conversion information indicating the positions of the reflectors r21, r22, and r23 respectively measured by the measurement device 21 in the first measurement coordinate system to the processing control device 30. The computing device 31 of the processing control device 30 can use the coordinate conversion matrix to convert the positions of the reflectors r21, r22, and r23 respectively in the first measurement coordinate system to the positions of the reflectors r21, r22, and r23 respectively in the robot coordinate system. The computing device 31 can further use the position conversion matrix to convert the positions of the reflectors r21, r22, and r23 respectively in the robot coordinate system to the positions of the TCP in the robot coordinate system.

[0184] Alternatively, the computing device 31 may use a position conversion matrix to convert the positions of the reflectors r21, r22, and r23 represented by the position information in the first measurement coordinate system into the position and posture of the TCP in the first measurement coordinate system. The computing device 31 may further use a coordinate conversion matrix to convert the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system.

[0185] Here, focusing on the operation of the measurement control device 10 , (i) to (iv) are divided into a case where the measurement control device 10 sends position conversion information to the process control device 30 and a case where the measurement control device 10 sends position information indicating the position of the TCP to the process control device 30 .

[0186] (5-1) When the measurement control device 10 sends position conversion information to the processing control device 30

[0187] In this case, in addition to the position conversion information, the communication device 13 of the measurement control device 10 will also send position information indicating the positions of reflectors r21, r22 and r23 in the robot coordinate system (refer to (ii)), or position information indicating the positions of reflectors r21, r22 and r23 in the first measurement coordinate system (refer to (iv)) to the processing control device 30.

[0188] Furthermore, if reflectors R21, R22, and R23 are replaced by measuring members, the position information indicating the positions of reflectors R21, R22, and R23 in the robot coordinate system, and the position information indicating the positions of reflectors R21, R22, and R23 in the first measuring coordinate system can be replaced by "position information indicating the position of the measuring member". That is, "position information indicating the position of the measuring member" is a concept that includes position information indicating the position of the measuring member in the robot coordinate system, and position information indicating the position of the measuring member in the first measuring coordinate system. In addition, "a state in which the robot arm 410 is different from the reference position and reference posture" can be replaced by "a state in which the TCP of the robot 41, which can be called a processing device, is located at a position different from the specified position".

[0189] Based on these contents, the following forms are derived for (ii) and (iv). The communication device 13, which can be referred to as a transmitting unit, can transmit the position conversion matrix to the processing control device 30, and the communication device 13 can further transmit the position information indicating the position of the measuring member measured by the measuring device 21, which can be referred to as a first measuring device, based on the measuring light irradiated on the measuring member when the TCP is located at a position different from the prescribed position, i.e., in the second state, to the processing control device 30.

[0190] In addition, for example, if the sensors 23 and 24 are replaced by the third measuring device, the "state in which the robot arm 410 is different from the reference position and the reference posture" can be replaced by "the state in which the third measuring device does not measure the position of the TCP". Based on these contents, the following forms are derived for (ii) and (iv). The communication device 13, which can be called a transmitting unit, can transmit the position conversion matrix and the position information indicating the position of the measuring member measured by the measuring device 21, which can be called the first measuring device, based on the measuring light irradiated on the measuring member when the third measuring device does not measure the position of the TCP to the processing control device 30.

[0191] For example, Fig.14 and Fig.16 As shown, when the jig (for example, reference jig 91a, jig 92a) used to measure the position of the TCP of the end effector EE1 is movable and a reflector is installed on the jig, it can be said that the positional relationship between the reflector installed on the jig and the reflectors r21, r22 and r23 (in other words, measuring components) installed on the robot arm 410 when the position of the TCP has been measured is a prescribed relationship.

[0192] Here, "the robot arm 410 is different from the reference position and reference posture" can be replaced by "the position of the TCP is not measured by the jig (for example, by the sensor 23 or the sensor 24)". Therefore, when the position of the TCP is not measured, it can be said that the positional relationship between the reflector mounted on the jig and the reflectors r21, r22, and r23 mounted on the robot arm 410 is different from the prescribed relationship.

[0193] Based on these contents, the following forms are derived for (ii) and (iv). The communication device 13, which can be referred to as a transmitting unit, can transmit the position conversion matrix and the position information indicating the position of the measuring member measured by the measuring device 21, which can be referred to as a first measuring device, based on the measuring light irradiated on the measuring member when the positional relationship between the measuring member and the second reference member is different from the prescribed positional relationship to the processing control device 30. In addition, the reflector mounted on the jig is referred to as the second reference member.

[0194] (5-2) When the measurement control device 10 transmits the position information indicating the position of the TCP to the process control device 30

[0195] In this case, the computing device 11 of the measurement control device 10 can convert the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 into the positions of the TCP based on the position conversion matrix. In addition, the converted position of the TCP can be the position of the TCP in the robot coordinate system (see (i) above) or the position of the TCP in the first measurement coordinate system (see (iii) above).

[0196] In addition, if reflectors r21, r22, and r23 are replaced with measuring components, it can be said that the computing device 11, which can be called a computing unit, can convert the position of the measuring component measured by the measuring device 21, which can be called a first measuring device, based on the measuring light irradiated on the measuring component into the position of the TCP of the robot 41 based on the position conversion matrix.

[0197] Alternatively, considering that the position conversion matrix is ​​calculated based on the position of the measuring component measured by the measuring device 21 (refer to "(4-3) Position conversion"), it can be said that the computing device 11, which can be called a computing unit, can convert the position of the measuring component into the position of the TCP of the robot 41 based on the position of the measuring component measured by the measuring device 21, which can be called a first measuring device.

[0198] In addition, for example, if the sensors 23 and 24 are replaced by the third measuring device, the "state in which the robot arm 410 is different from the reference position and the reference posture" can be replaced by "the state in which the third measuring device does not measure the position of the TCP". Based on these contents, the following forms are derived for (i) and (iii). The computing device 11, which can be called a computing unit, can convert the position of the measuring member measured by the measuring device 21, which can be called the first measuring device, based on the measurement light irradiated on the measuring member when the third measuring device does not measure the position of the TCP, into the position of the TCP based on the position conversion matrix.

[0199] In addition, the "position conversion matrix" can be calculated based on the position of the measuring member measured by the measuring device 21 based on the measuring light irradiated on the measuring member in the state where the third measuring device has measured the position of the TCP, and the position of the TCP measured by the third measuring device (refer to "(4-3) Position conversion"). Based on these contents, the following form is derived. The calculation device 11, which can be called a calculation unit, can convert the position of the measuring member measured by the measuring device 21 based on the measuring light irradiated on the measuring member in the state where the third measuring device has not measured the position of the TCP into the position of the TCP based on the position of the measuring member measured by the measuring device 21, which can be called the first measuring device, based on the measuring light irradiated on the measuring member in the state where the third measuring device has measured the position of the TCP, and the position of the TCP measured by the third measuring device.

[0200] For example, Fig.14 and Fig.16 As shown, when the jig (for example, reference jig 91a, jig 92a) for measuring the position of the TCP of the end effector EE1 is movable and the jig is equipped with a reflector, it can be said that the positional relationship between the reflector mounted on the jig and the reflectors r21, r22, and r23 (in other words, the measuring member) mounted on the robot 410 when the position of the TCP is measured is a prescribed relationship. Therefore, when the position of the TCP is not measured, that is, when the robot 410 is different from the reference position and the reference posture, it can be said that the positional relationship is a relationship different from the prescribed relationship.

[0201] Based on these contents, the following forms are derived for (i) and (iii). The operation device 11, which can be called the operation unit, can convert the position of the measuring member measured by the measuring device 21, which can be called the first measuring device, based on the measurement light irradiated on the measuring member when the positional relationship between the measuring member and the second reference member is different from the prescribed positional relationship into the position of the TCP based on the position conversion matrix. In addition, the reflector installed on the jig is replaced by the second reference member.

[0202] In addition, the "position conversion matrix" can be calculated based on the position of the TCP measured by the measuring device 21 based on the measurement light irradiated to the second reference member when the positional relationship between the position of the measuring member and the position of the second reference member is a prescribed relationship, and the position of the measuring member measured by the measuring device 21 based on the measurement light irradiated to the measuring member (refer to "(4-3) Position conversion"). Based on these contents, the following form is derived. The calculation device 11, which can be called a calculation unit, can convert the position of the measuring member measured by the measuring device 21 based on the measurement light irradiated to the measuring member when the positional relationship between the measuring member and the second reference member is a relationship different from the prescribed positional relationship based on the position of the measuring member measured by the measuring device 21 based on the measurement light irradiated to the measuring member when the positional relationship between the measuring member and the second reference member is a prescribed relationship, and the position of the TCP measured by the measuring device 21 based on the measurement light irradiated to the second reference member.

[0203] (6) When there are multiple robots that can process the workpiece W

[0204] A workpiece W, which can be referred to as a processing object, can also be processed by a plurality of robots. Fig. 20 and Fig.21The system 1a shown includes a measurement control device 10, a measurement device 21, a process control device 30, and robots 41, 42, and 43. In the system 1a, the process control device 30 controls the robots 41, 42, and 43.

[0205] The robot arm 410 of the robot 41 is provided with Figure 5 The reflector module r2 shown includes reflectors r21, r22 and r23. Fig. 20 The illustration of the reflector module r2 is omitted in FIG. Similarly, a reflector module including three reflectors is installed on the robot arm 420 of the robot 42. A reflector module including three reflectors is installed on the robot arm 430 of the robot 43.

[0206] The measuring device 21 can irradiate the measuring light to each of the reflectors R21, R22 and R23 included in the reflector module R2 installed on the robot arm 410. The measuring device 21 measures the positions of each of the reflectors R21, R22 and R23 in the first measurement coordinate system based on the measuring light irradiated to each of the reflectors R21, R22 and R23. The computing device 11 of the measurement control device 10 uses the coordinate conversion matrix to convert the positions of each of the reflectors R21, R22 and R23 in the first measurement coordinate system into the positions of each of the reflectors R21, R22 and R23 in the robot coordinate system.

[0207] The measuring device 21 can irradiate the measuring light to each of the three reflectors included in the reflector module installed on the robot 420. The measuring device 21 measures the position of each of the three reflectors in the first measurement coordinate system based on the measuring light irradiated to each of the three reflectors. The computing device 11 uses the coordinate conversion matrix to convert the position of each of the three reflectors installed on the robot 420 in the first measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0208] The measuring device 21 can irradiate the measuring light to each of the three reflectors included in the reflector module installed on the robot 430. The measuring device 21 measures the position of each of the three reflectors in the first measurement coordinate system based on the measuring light irradiated to each of the three reflectors. The computing device 11 uses the coordinate conversion matrix to convert the position of each of the three reflectors installed on the robot 430 in the first measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0209] If the reflectors respectively mounted on the robot arms 410, 420 and 430 are replaced with measuring members, the computing device 11, which can be referred to as a computing unit, can compute the positions of the plurality of measuring members respectively mounted on the robots 41, 42 and 43 capable of processing the workpiece W in the robot coordinate system. In addition, the computing device 11 can compute the positions of the TCPs of the robots 41, 42 and 43, for example, based on the position conversion matrix. In addition, the computing device 11 can compute the second coordinate conversion matrix as the coordinate conversion matrix based on the first reference position information and the second reference position information (refer to "(2-2) Coordinate conversion"), and the second coordinate conversion matrix is ​​used to convert the positions of the measuring members in the first measurement coordinate system measured by the measuring device 21 based on the measurement light irradiated on the measuring members into the positions of the measuring members in the robot coordinate system. The second coordinate conversion matrix can be shared in order to compute the positions of the plurality of measuring members respectively mounted on the robots 41, 42 and 43 in the robot coordinate system.

[0210] (7) Method for determining the position of a light source from an image

[0211] For a specific example of a method for determining the position of a light source such as light source 81 using a stereo camera 22 as described in "(3-1) Method using a stereo camera", refer to Fig. 22 and Fig.23 to explain.

[0212] The image captured by the stereo camera 22 often contains noise. If the image contains noise, the position of the light source may be misidentified due to the noise. Fig. 22 The processing shown in the flowchart of can remove noise, thereby suppressing erroneous recognition. In addition, the processing described below is an example and is not limited to this.

[0213] Fig. 22 In the process of the measurement control device 10, the computing device 11 acquires the image captured by the stereo camera 22 (that is, the image captured by each of the two cameras included in the stereo camera 22) (step S301). The computing device 11 generates a parallax image based on the image acquired in the process of step S301 (step S302). In addition, various existing forms can be applied to the method of generating the parallax image, so the detailed description thereof is omitted.

[0214] The computing device 11 performs a median filter process on the parallax image generated in the process of step S302 (step S303 ). The computing device 11 further performs an integration threshold (IT) process on the image subjected to the median filter process (step S304 ).

[0215] The integral threshold processing is a process of accumulating or averaging the values ​​of each pixel in the parallax image (e.g., brightness value) along the time direction and removing the values ​​of pixels below a specified value (e.g., setting them to 0). The so-called "accumulating or averaging the values ​​of each pixel along the time direction" means accumulating or averaging the values ​​of each pixel across multiple parallax images that are continuous in time. In addition, the specified value can also be called a threshold.

[0216] The pixels whose values ​​become relatively large due to noise are random (i.e., different for each image). If the values ​​of each pixel are accumulated or averaged along the time direction, the values ​​of the pixels corresponding to the noise will become relatively small. Therefore, by removing the values ​​of pixels below the specified value, the noise can be removed.

[0217] For integration thresholding, refer to Fig.23 Here, a frame image of 5 pixels×5 pixels is used for explanation. For example, a numerical value such as “0” or “255” represents the brightness value of a pixel.

[0218] In the integration threshold processing, the brightness value of each pixel constituting the nth image, i.e., the (n)th frame, is added (cumulatively) to the brightness value of each pixel constituting the (n+1)th image following the (n)th frame, i.e., the (n+1)th frame, thereby generating a new image (see Fig.23 (b)) In the case of addition averaging, the addition average of the brightness value of each pixel constituting the (n) frame and the brightness value of each pixel constituting the (n+1) frame is calculated.

[0219] Next, the maximum brightness value (here, "499") in the generated new image is multiplied by a predetermined ratio (e.g., 50%) to obtain a threshold value. In addition, in the generated new image, the brightness value of pixels with brightness values ​​below the threshold value is set to "0" (see Fig.23 (c)).

[0220] Will constitute Fig.23 The brightness value of each pixel of the image (c) is added (cumulatively) to the brightness value of each pixel constituting the n+2th image following the (n+1) frame, i.e., the (n+2)th frame, thereby generating a new image. In other words, the integral threshold processing can be performed using multiple images that are continuous in time.

[0221] return Fig. 22The computing device 11 detects the position of the light source from the parallax image to which the integration threshold processing has been applied in the process of step S304 (step S305).

[0222] In addition, instead of performing noise removal-related processing such as median filter processing or integral threshold processing on the disparity image, the computing device 11 may perform noise removal-related processing on the image acquired in the process of step S301 (i.e., the image captured by the stereo camera 22).

[0223] Alternatively or in addition to the above method, the following method may be used. Here, a bandpass filter may be provided in one of the two cameras included in the stereo camera 22. The bandpass filter may be configured, for example, to be a light source 81 such as an LED (see Figure 8 ) has a relatively high transmittance in the wavelength band of light emitted by the stereo camera 22, while the transmittance in the other wavelength bands is relatively low. In the image captured by one of the two cameras included in the stereo camera 22, the brightness value of the portion in which the light source 81 is reflected is relatively high, while the brightness value of the other portions is relatively low. Therefore, by referring to the image captured by the one of the cameras, the position of the light source 81 can be estimated relatively easily. Subsequently, based on the position of the light source 81 estimated from the image captured by the one of the cameras, the approximate position of the light source 81 in the image captured by the other of the two cameras included in the stereo camera 22 can be determined. Moreover, the position of the light source 81 can be determined by searching for the characteristic portion of the light source 81 from, for example, the image captured by the other camera based on the determined approximate position. According to the method, for example, the time required for searching for the characteristic portion of the light source 81 can be shortened, and misrecognition can be suppressed.

[0224] (8) Measurement of robot 41 during operation

[0225] From the perspective of improving the processing accuracy of the robot 41 on the workpiece W, it is ideal that when the robot 41 is operating, the measuring device 21 is used to measure the respective positions of the reflectors r21, r22 and r23 contained in the reflector module r2 installed on the robot arm 410.

[0226] On the other hand, when the robot 410 is moving, for example, the first time point at which the position of the reflector r21 is measured is different from the second time point at which the position of the reflector r22 is measured. As a result, the position and posture of the robot 410 at the first time point may be different from the position and posture of the robot 410 at the second time point.

[0227] Therefore, the movement of the robot arm 410 may be temporarily stopped in order to measure the positions of the reflectors R21, R22, and R23. However, from the perspective of the operating efficiency of the robot 41, it is ideal to stop the movement of the robot arm 410 as short as possible in order to measure the positions of the reflectors R21, R22, and R23. In addition, if the scanning speed of the measuring light is sufficiently large compared to the moving speed of the robot arm 410, the measurement error can be ignored. In this case, in order to measure the positions of the reflectors R21, R22, and R23, the movement of the robot arm 410 may not be temporarily stopped. In addition, the moving speed of the robot arm 410 may be reduced when measuring the positions of the reflectors R21, R22, and R23.

[0228] The robot 41 is controlled by the process control device 30. Therefore, when the robot 41 is operating, the measurement control device 10 controls the measurement device 21 to measure the reflectors r21, r22, and r23 according to the signal output from the process control device 30.

[0229] The computing device 31 of the processing control device 30 can determine, for example, the position and posture of the TCP when measuring the reflectors r21, r22, and r23 included in the reflector module r2 installed on the robot arm 410. Then, the computing device 31 generates a measurement start signal for starting the measurement of the measuring device 21. The communication device 33 can send the measurement start signal to the measurement control device 10. Here, the measurement start signal can include information for the measurement control device 10 to control the measuring device 21.

[0230] (i) For example, the measurement start signal may include position information indicating the position and posture of the TCP when measuring the reflectors r21, r22, and r23 (hereinafter, appropriately referred to as "the position of the TCP during measurement"). Specifically, the position information may include the position information indicating the position of the TCP in the robot coordinate system during measurement determined by the computing device 31 of the processing control device 30.

[0231] In this case, for example, the computing device 11 of the measurement control device 10 can use the coordinate conversion matrix to convert the position of the TCP in the robot coordinate system during measurement, which is represented by the position information included in the measurement start signal, into the position of the TCP in the first measurement coordinate system during measurement. The computing device 11 can further use the position conversion matrix to convert the position of the TCP in the first measurement coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0232] Alternatively, the computing device 11 may use the position conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 11 may further use the coordinate conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0233] The measurement control device 10 may control the measurement device 21 to measure the reflectors r21 , r22 , and r23 based on the respective positions of the reflectors r21 , r22 , and r23 in the first measurement coordinate system.

[0234] (ii) For example, the measurement start signal may include position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system. In this case, the computing device 31 of the processing control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The computing device 31 may use a position conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 33 may send a measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

[0235] The computing device 11 of the measurement control device 10 can use the coordinate conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system, which are represented by the position information contained in the measurement start signal, into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0236] (iii) For example, the measurement start signal may include a position signal indicating the position of the TCP in the first measurement coordinate system during measurement. In this case, the operation device 31 of the process control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The operation device 31 may use a coordinate conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the position of the TCP in the first measurement coordinate system during measurement. The communication device 33 may send the measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the position of the TCP in the first measurement coordinate system during measurement.

[0237] The computing device 11 of the measurement control device 10 can use the position conversion matrix to convert the position of the TCP in the first measurement coordinate system during measurement, which is represented by the position information contained in the measurement start signal, into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0238] (iv) For example, the measurement start signal may include position information indicating the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. In this case, the operation device 31 of the process control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The operation device 31 may use a coordinate conversion matrix to convert the position of the TCP in the robot coordinate system during measurement to the position of the TCP in the first measurement coordinate system during measurement. The operation device 31 may further use a position conversion matrix to convert the position of the TCP in the first measurement coordinate system during measurement to the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0239] Alternatively, the computing device 31 may use the position conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 31 may further use the coordinate conversion information to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0240] The communication device 33 may send a measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the positions of the reflectors R21, R22, and R23 in the first measurement coordinate system. The measurement control device 10 may control the measurement device 21 to measure the reflectors R21, R22, and R23 based on the positions of the reflectors R21, R22, and R23 in the first measurement coordinate system indicated by the position information included in the measurement start signal.

[0241] In addition, the measurement start signal may include: a first measurement start signal including position information, and a second measurement start signal for instructing the measurement control device 10 to perform measurement. In this case, the communication device 33 of the processing control device 30 may first send the first measurement start signal to the measurement control device 10. At this time, the processing control device 30 may control the robot 41 so that the robot arm 410 moves to a specified position indicated by the position information included in the first measurement start signal. The communication device 33 of the processing control device 30, which receives a signal from the robot 41 indicating that the movement of the robot arm 410 to the specified position has been completed, may send a second measurement start signal to the measurement control device 10. As a result, the position measurement of each of the reflector R21, the reflector R22, and the reflector R23 may be started.

[0242] In this case, the measurement control device 10 can estimate the positions of the reflectors R21, R22, and R23 during measurement based on the position information contained in the first measurement start signal. Moreover, the measurement control device 10 can change the emission direction of the measurement light of the measurement device 21 in advance to irradiate the measurement light to the estimated position. Alternatively, the measurement control device 10 can change the emission direction of the measurement light of the measurement device 21 in advance to irradiate the measurement light to the position represented by the position information contained in the first measurement start signal. Subsequently, the measurement control device 10 can be in a standby state until the second measurement start signal is received. At this time, the measurement device 21 is on standby in a state where the positions of the reflectors R21, R22, and R23 can be measured. When the measurement control device 10 receives the second measurement start signal, the measurement control device 10 can start the position measurement of the reflectors R21, R22, and R23.

[0243] As described above, the communication device 33 of the process control device 30 may send a measurement start signal to the measurement control device 10. In other words, the communication device 13 of the measurement control device 10 may receive a measurement start signal from the process control device 30. That is, the process control device 30 may include a communication device 33, which may be referred to as a transmitting unit, which sends a measurement start signal for causing the measurement device 21, which may be referred to as a first measurement device, to start measurement to the measurement control device 10. The measurement control device 10 may include a communication device 13, which may be referred to as a receiving unit, which receives a measurement start signal for causing the measurement device 21, which may be referred to as a first measurement device, to start measurement from the process control device 30.

[0244] In the cases (i) to (iii), the operation of the operation device 11 of the measurement control device 10 converting the position indicated by the position information included in the measurement start signal into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system can also be referred to as estimating the positions of the reflectors r21, r22, and r23. Therefore, the operation device 11 can also be referred to as an estimating unit.

[0245] As described above, the measurement control device 10 can control the measurement of the reflectors R21, R22, and R23 by the measurement device 21 based on the positions of the reflectors R21, R22, and R23 in the first measurement coordinate system, which are represented by the position information contained in the measurement start signal. Here, "controlling the measurement of the reflectors R21, R22, and R23 by the measurement device 21" can include: changing the direction (i.e., the emission direction) of the measurement light. The measurement control device 10 can change the direction of the measurement light so that the measurement light emitted from the measurement device 21 is irradiated to the positions of the reflectors R21, R22, and R23 estimated by the computing device 11, which can be called the estimation unit. Here, the measurement device 21 can also include a tracking device (not shown), which can track the positions of the reflectors R21, R22, and R23 that move with the movement of the robot 41. In this case, the measurement control device 10 may also change the direction of the measurement light by sending a signal indicating the position of each of the reflectors r21, r22, and r23 in the first measurement coordinate system to the tracking device.

[0246] The computing device 31 of the processing control device 30 can determine the timing when the measuring device 21 starts measuring each of the reflectors r21, r22, and r23. The computing device 31 can generate timing information (in other words, a timing signal) indicating the timing of the determination. The communication device 33 of the processing control device 30 can send the timing information to the measurement control device 10 on the basis of or instead of the measurement start signal. In other words, the communication device 13 of the measurement control device 10 can receive the timing information. That is, the processing control device 30 may include a communication device 33, which can be referred to as a sending unit, and the communication device 33 sends the timing information indicating the timing when the measuring device 21, which can be referred to as a first measuring device, starts measuring the position of the component to the measurement control device 10. The communication device 13, which can be referred to as a receiving unit, can receive the timing information indicating the timing of starting the measurement. In addition, the timing signal can be equivalent to the "second measurement start signal".

[0247] In addition, the position information may not be included in the measurement start signal. In this case, the communication device 33 of the processing control device 30 may send the position information to the measurement control device 30 in addition to the measurement start signal. As described above, the position information may represent (i) the position of the TCP in the robot coordinate system during measurement, (ii) the position of each of the reflectors r21, r22, and r23 in the robot coordinate system, (iii) the position of the TCP in the first measurement coordinate system during measurement, or (iv) the position of the reflectors r21, r22, and r23 in the first measurement coordinate system. It can be said that the position represented by the position information is the position where the measuring device 21 should start the measurement of the reflectors r21, r22, and r23. If reflectors r21, r22, and r23 are replaced by measuring components, it can be said that the processing control device 30 may include a communication device 33, which may be referred to as a transmitting unit, and the communication device 33 transmits first starting position information indicating the position where the measuring device 21, which may be referred to as a first measuring device, should start measuring the component, i.e., the first measurement starting position, to the measurement control device 10. The processing control device 30 may transmit the first starting position information and the measurement start signal to the measurement control device 10. The processing control device 30 may transmit the first starting position information and the timing information to the measurement control device 10. Alternatively, the processing control device 30 may transmit the first starting position information, the measurement start signal, and the timing information to the measurement control device 10.

[0248] When the measurement control device 10 receives the first start position information, the measurement control device 10 may change the emission direction of the measurement light so as to irradiate the measurement light toward the first measurement start position indicated by the first start position information. When the measurement control device 10 receives a measurement start signal in addition to the first start position information, the measurement control device 10 may change the emission direction of the measurement light so as to irradiate the measurement light toward the first measurement start position after receiving the measurement start signal and before the position of the measurement member that moves with the movement of the robot 41 is located at the first measurement start position indicated by the first start position information. Alternatively, when the measurement control device 10 receives timing information in addition to the first start position information, the measurement control device 10 may change the emission direction of the measurement light so as to irradiate the measurement light toward the first measurement start position after receiving the timing information and before the position of the measurement member that moves with the movement of the robot 41 is located at the first measurement start position indicated by the first start position information.

[0249] (8-1) Example of Changing the Emission Direction of Measurement Light

[0250] Reference Fig.24 For example, when the emission direction of the measurement light is changed by changing the angle of the mirror that reflects the measurement light in the measurement device 21, the measurement control device 10 controls the motor that changes the angle of the mirror included in the measurement device 21 to change the emission direction.

[0251] In this case, for example, due to a mechanical response delay of the motor, a certain amount of time is required from the time when the measurement control device 30 starts controlling the motor until the emission direction of the measurement light becomes a desired emission direction.

[0252] Fig.24 , the dotted circles represent the positions of the reflectors R21, R22, and R23 (i.e., the positions at which the reflectors R21, R22, and R23 are measured). "P21" represents the position of the reflector R21, "P22" represents the position of the reflector R22, and "P23" represents the position of the reflector R23. In addition, the positions P21, P22, and P23 may correspond to the positions of the reflectors R21, R22, and R23 in the first measurement coordinate system, respectively, as represented by the position information contained in the measurement start signal.

[0253] The solid arrow extending from the measuring device 21 indicates the current emission direction d0 of the measuring light. Fig.24In the case of the reflector r21 shown, the difference α between the current emission direction d0 of the measurement light and the target emission direction d1 is relatively large. In this case, the time required from when the measurement control device 10 starts controlling the measurement device 21 until the actual start of measurement of the reflector r21 is relatively long.

[0254] On the other hand, when the measuring device 21 first measures Fig.24 In the case of the reflector r22 shown, the difference β between the current emission direction d0 of the measurement light and the target emission direction d2 is relatively small. In this case, the time required from when the measurement control device 30 starts controlling the measurement device 21 until the measurement of the reflector r22 actually starts is relatively short.

[0255] The measurement control device 10 can determine the measurement order of the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system, for example, based on the position information contained in the measurement start signal, and the current emission direction d0 of the measurement light of the measurement device 21, so as to suppress the amount of change in the emission direction of the measurement light. In this way, the time required for the measurement device 21 to measure the reflectors r21, r22, and r23 can be shortened. In addition, in Fig.24 In the illustrated case, the measurement control device 10 may determine the measurement order to first measure the reflector r22, then measure the reflector r23, and finally measure the reflector r21.

[0256] In addition, "the positions of reflectors R21, R22 and R23 in the first measurement coordinate system based on the position information contained in the measurement start signal" is not limited to "the positions of reflectors R21, R22 and R23 in the first measurement coordinate system represented by the position information", but includes the concept of "the positions of reflectors R21, R22 and R23 in the first measurement coordinate system converted by the computing device 11 of the measurement control device 10 using at least one of a coordinate transformation matrix and a position transformation matrix from the positions represented by the position information".

[0257] (8-2) Reflector measurement method

[0258] (8-2-1) Measurement timing

[0259] From the viewpoint of shortening the time required for measuring the reflectors r21, r22, and r23, it is desirable to change the emission direction in advance so that the emission direction of the measurement light L2 of the measuring device 21 becomes the direction of the position of the reflector r21, r22, or r23. For example, the measurement control device 10 may change the emission direction in advance so that the emission direction of the measurement light L2 of the measuring device 21 becomes the direction of the position of the reflector r21, r22, or r23 after receiving the measurement start signal and the reflectors r21, r22, and r23 are located at the positions where the reflectors r21, r22, and r23 are measured by the measuring device 21 (for example, refer to Fig.24 The measurement control device 10 may change the emission direction of the measurement light L2 to irradiate the measurement light L2 toward the position where the reflectors r21, r22, and r23 are measured by the measurement device 21 before the reflectors r21, r22, and r23 are located. In addition, after receiving the timing information and before the reflectors r21, r22, and r23 are located at the position where the reflectors r21, r22, and r23 are measured by the measurement device 21, the measurement control device 10 may change the emission direction of the measurement light L2 to irradiate the measurement light L2 from the measurement device 21 toward the position where the reflectors r21, r22, and r23 are measured by the measurement device 21. In addition, the position where the reflectors r21, r22, and r23 are measured by the measurement device 21 may also be referred to as the target position.

[0260] On the other hand, if the measurement light L2 is emitted toward the position where the reflector r21, the reflector r22 or the reflector r23 is measured by the measuring device 21 before the reflector r21, the reflector r22 and the reflector r23 are located at the position where the reflector r21, the reflector r22 and the reflector r23 are measured by the measuring device 21, the measurement light L2 may be irradiated to a reflector different from the reflector to be measured.

[0261] For example, it is assumed that the reflector module r2 installed on the robot arm 410 is along Fig.25 . It is assumed that the emission direction of the measurement light L2 of the measurement device 21 is the direction of the position P22 of the measurement reflector r22. In this case, before the reflector r22 is located at the position P22, the reflector r23 passes near the position P22. If the measurement light L2 is emitted from the measurement device 21 before the reflector r22 is located at the position P22, the measurement light L2 may be irradiated to the reflector r23. Therefore, the measurement result based on the measurement light L2 irradiated to the reflector r23 may be output from the measurement device 21 as the measurement result related to the reflector r22. That is, the reflector may be misidentified.

[0262] In order to suppress the occurrence of such misidentification, information indicating, for example, a standby time may be included in the measurement start signal. The standby time may be, for example, the time from when the measurement control device 10 receives the measurement start signal until the measurement device 21 starts to emit the measurement light L2. In order to realize the position and posture of the TCP when measuring the reflectors r21, r22, and r23, for example, as determined by the calculation device 31 of the acceleration control device 30, the standby time may be set based on the time required for controlling the robot 410.

[0263] In the case where the processing control device 30 sends timing information to the measurement control device 10 in addition to the measurement start signal, the measurement start signal may not include information indicating the standby time, for example. In this case, the timing information may indicate the time when the measurement device 21 should start measuring. The time indicated by the timing information may be set based on the time when the position and posture of the TCP determined by the computing device 31 (i.e., the position and posture of the TCP when measuring the reflectors r21, r22, and r23) are achieved by controlling the robot arm 410. Alternatively, the timing information may indicate the standby time as the time when the measurement device 21 starts measuring.

[0264] In this way, it is possible to suppress the emission of the measurement light L2 from the measurement device 21 before the reflector to be measured by the measurement device 21 is located at the position for measuring the reflector. As a result, it is possible to suppress the occurrence of erroneous recognition of the reflector. In addition, the measurement light L2 may be emitted from the measurement device 21, and on the other hand, the light receiving sensor of the measurement device 21 may be turned off, or the measurement value may not be calculated based on the output from the light receiving sensor until the timing when the measurement device 21 should start measurement is reached. In this case, it is also possible to suppress the occurrence of erroneous recognition of the reflector.

[0265] (8-2-2) Measurement light irradiation method

[0266] When the reflectors r21, r22, and r23 are measured by the measuring device 21, the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system (for example, referring to the TCP position and posture when the reflectors r21, r22, and r23 are measured) determined by the computing device 31 of the process control device 30 (i.e., the TCP position when measuring) are calculated (estimated). Fig.24 Hereinafter, the “positions of reflectors r21, r22 and r23 in the first measurement coordinate system” will be referred to as “the inferred measurement positions of reflectors r21, r22 and r23”.

[0267] In addition, the estimated measurement positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 during measurement. In this case, even if the measurement device 21 emits the measurement light L2 toward the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23, the measurement light L2 will not be irradiated to the reflector to be measured. In other words, the position of the reflector to be measured cannot be measured.

[0268] Therefore, the measuring device 21 may emit the measuring light L2 in such a manner that the trajectory of the measuring light L2 becomes, for example, a spiral trajectory centered on the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23. For example, when the reflector r22 is the reflector to be measured, Fig.26 As shown, the measuring device 21 may emit the measuring light L2 in a spiral orbit centered on the estimated measuring position P22 of the reflector r22. The orbit of the measuring light L2 is not limited to a spiral orbit, and may be a raster scan orbit, for example.

[0269] In this way, even if the estimated measurement positions of the reflectors r21, r22, and r23 are different from the actual positions of the reflectors r21, r22, and r23 during measurement, the measuring device 21 can irradiate the measuring light L2 to the reflectors to be measured. That is, the measuring device 21 can measure the positions of the reflectors to be measured.

[0270] (8-2-3) Correction of estimated position

[0271] As described above, the estimated measurement positions of the reflectors r21 , r22 , and r23 may differ from the actual positions of the reflectors r21 , r22 , and r23 during measurement.

[0272] It is assumed that the measuring device 21 first measures the position of the reflector r22, then measures the position of the reflector r23, and finally measures the position of the reflector r21. In this case, the computing device 11 of the measurement control device 10 can compare the estimated measurement position of the reflector r22 with the actual position of the reflector r22 measured by the measuring device 21 after the measuring device 21 measures the position of the reflector r22 and before the measuring device 21 measures the position of the reflector r23. The computing device 11 can correct the estimated measurement positions of the reflectors r23 and r21 based on the comparison result. That is, the computing device 11, which can be called an estimation unit, can also correct the positions of other reflectors as the measurement object based on the estimated position of one reflector as the measurement object and the position of one reflector as the measurement object measured by the measuring device 21 based on the measurement light L2 irradiated to the one reflector as the measurement object.

[0273] When measuring the respective positions of reflectors r23 and r21, the time required for measuring the respective positions of reflectors r23 and r21 can be shortened as long as the measurement control device 10 controls the emission direction of the measurement light L2 of the measuring device 21 based on the respective corrected measurement positions of reflectors r23 and r21.

[0274] (8-2-4)Standstillness determination

[0275] Even when the processing control device 30 completes the control of the robot 41 so that the position and posture of the TCP become the position and posture when measuring the reflectors r21, r22 and r23, for example, the robot arm 410 may sometimes vibrate due to the reaction when the mechanism constituting the robot 41 stops.

[0276] The measuring device 21 can measure the position of one of the reflectors r21, r22 and r23 as the measurement object multiple times. If the deviations of the multiple positions respectively represented by the multiple measurement results for the one reflector as the measurement object are within a specified range (for example, hundreds of milliseconds to several seconds) within a specified period (for example, hundreds of milliseconds to several seconds), the position of the reflector r21, r22 and r23 is within a specified range (for example, hundreds of milliseconds to several seconds). Fig. 27 If the range is within the range of the dotted circle shown in FIG. 1 ), the computing device 11 of the measurement control device 10 can determine that the robot arm 410 is stationary. In this case, the accuracy of the position measured by the measuring device 21 due to the vibration of the robot arm 410 can be suppressed. In addition, the prescribed range can be set based on, for example, the allowable error of the position measurement performed by the measuring device 21, in other words, based on the measurement accuracy required for the position measurement performed by the measuring device 21.

[0277] (8-2-5) Other methods of irradiating measurement light

[0278] The measurement control device 10 may also control the measurement device 21 based on the estimated measurement positions of the reflectors r21, r22, and r23, so that, for example, Fig.28 As shown, the trajectory of the measurement light L2 of the measurement device 21 becomes a spiral trajectory in a range including the reflector r21, the reflector r22, and the reflector r23.

[0279] (8-2-6) Measurement results

[0280] When the robot 41 is operating, the positions of the reflectors r21, r22 and r23 measured by the measuring device 21 in the first measurement coordinate system can be converted by the computing device 11 of the measurement control device 10 into the positions of the reflectors r21, r22 and r23 in the robot coordinate system, or can be converted by the computing device 11 of the processing control device 30 into the positions of the reflectors r21, r22 and r23 in the robot coordinate system.

[0281] (9) Others

[0282] (9-1) The end effector mounted on the robot 41 may be an end effector for purposes other than processing. Examples of end effectors for purposes other than processing include a pick-up robot (specifically, an adsorption robot, a gripping robot, etc.) or a three-dimensional measuring machine (Coordinate Measuring Machine, CMM). The CMM may be a scanning laser probe type or an optical type that performs non-contact measurement. For example, the CMM is mounted on the robot 41 as an end effector, and the workpiece W is measured by the CMM (see Figure 1 ), the robot 41 may also be referred to as a processing device, and the workpiece W may also be referred to as a processing object.

[0283] (9-2) The storage device 12 of the measurement control device 10 may store one or more programs for realizing the functions of the measurement control device 10. The computing device 11 executes at least one of the one or more programs stored in the storage device 12, thereby realizing the functions of the computing device 11.

[0284] The storage device 32 of the process control device 30 may store one or more programs for realizing the functions of the process control device 30. The computing device 31 executes at least one of the one or more programs stored in the storage device 32, thereby realizing the functions of the computing device 31.

[0285] (9-3) When the measuring device 21 measures, for example, the reflector r11 mounted on the jig 90, the measuring device 21 outputs the measurement result to the measurement control device 10. Similarly, when the measuring device 21 measures the reflectors r21, r22, and r23 mounted on the robot arm 410 of the robot 41, the measuring device 21 outputs the measurement result to the measurement control device 10.

[0286] The following form is derived from these contents. The measurement method related to the measurement system 2 may include: the measurement device 21 receives the measurement light generated from the first reference member by irradiating the measurement light to the first reference member installed on the jig 90 holding the processing object, and outputs the first member position information indicating the position of the first reference member; and the measurement device 21 receives the measurement light generated from the measurement member by irradiating the measurement light to the measurement member installed on the robot arm 410 of the robot 41 that can process the processing object, and outputs the second member position information indicating the position of the measurement member. In addition, the reflector r11 is replaced by the first reference member, and the reflectors r21, r22 and r23 are replaced by the measurement members. As described above, the first member position information (i.e., the position of the reflector r11) and the second member position information (i.e., the respective positions of the reflectors r21, r22 and r23) can be used to control the movement of the robot arm 410 of the robot 41.

[0287] In addition, as described in "(3-1) Method using a stereo camera", the measurement of the measuring device 21 can be controlled based on the measurement results obtained by the stereo camera 22. Here, the measurement control of the measuring device 21 may include controlling the direction of the measuring light (for example, the irradiation direction). The following form is derived based on these contents. A measurement method related to a measuring system 2 including a measuring device 21 and a stereo camera 22 may include: the stereo camera 22, which can be called a shooting device, shoots a first reference member and a measuring member; based on the output from the stereo camera 22, the irradiation direction of the measuring light irradiated from the measuring device 21 to the first reference member is controlled; and based on the output from the stereo camera 22, the irradiation direction of the measuring light irradiated from the measuring device 21 to the measuring member is controlled.

[0288] (9-4) The positional relationship between the TCP and the reflectors such as the reflector r21, the reflector r22, and the reflector r23 may not be obtained by calculation. In this case, the positional relationship between the TCP and the reflectors may be input by, for example, the user of the system 1. That is, the measurement system 2 and / or the system 1, which may also be called a processing system, may grasp the positional relationship between the TCP and the reflectors.

[0289] <Notes>

[0290] The following supplementary notes are further disclosed with respect to the above-described embodiment.

[0291] (Note 1)

[0292] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring member installed at a movable part of the processing device with a measuring light and capable of measuring the position of the measuring member; a measuring control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the movable part, the processing method comprising:

[0293] The measurement control device calculates position conversion information based on first position information and second position information indicating a predetermined position, wherein the first position information indicates the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a first state in which a tool center point of the machining device is located at the predetermined position;

[0294] The measurement control device sends the calculated position conversion information to the processing control device;

[0295] the measurement control device sending third position information to the processing control device, the third position information indicating the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a second state in which the tool center point is located at a position different from the prescribed position; and

[0296] The processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0297] (Note 2)

[0298] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring member installed at a movable part of the processing device with a measuring light and capable of measuring the position of the measuring member; a measuring control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the movable part, the processing method comprising:

[0299] The measurement control device converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated on the measurement member into the position of the tool center point of the processing device based on the position conversion information;

[0300] The measurement control device sends sixth position information indicating the position of the tool center point to the processing control device;

[0301] the measurement control device calculates the position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a first state in which the tool center point is located at a predetermined position; and

[0302] The processing control device controls the movement of the movable portion based on the position of the tool center point indicated by the sixth position information transmitted by the transmitting unit to move the position of the tool center point.

[0303] (Note 3)

[0304] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed at a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; a processing control device capable of controlling the movement of the movable part; and a third measuring device capable of measuring the position of the tool center point, the processing method comprising:

[0305] The measurement control device calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device;

[0306] the measurement control device sending the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated on the measurement member when the third measurement device does not measure the position of the tool center point to a processing control device capable of controlling the movement of the movable portion; and

[0307] The processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0308] (Note 4)

[0309] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed at a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; a processing control device capable of controlling the movement of the movable part; and a third measuring device capable of measuring the position of the tool center point, the processing method comprising:

[0310] the measurement control device converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has not measured the position of the tool center point, into the position of the tool center point, based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device;

[0311] The measurement control device sends sixth position information indicating the position of the tool center point obtained by the conversion to the processing control device; and

[0312] The processing control device controls the movement of the movable portion based on the sixth position information to move the position of the tool center point.

[0313] (Note 5)

[0314] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a second reference member that moves according to the position of a movable part of the processing device with measuring light to measure the position of a tool center point of the processing device that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part different from a position corresponding to the tool center point with measuring light to measure the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the movable part, the processing method comprising:

[0315] The measurement control device calculates position conversion information based on the position of the tool center point measured by the first measuring device based on the measurement light irradiated to the second reference member when the positional relationship between the position of the measuring member and the position of the second reference member is a predetermined relationship, and the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member;

[0316] the measurement control device sending the position conversion information and third position information to the process control device, the third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated on the measurement member when the positional relationship is different from the prescribed relationship; and

[0317] The processing control device converts the position of the measuring member represented by the third position information into the position of the tool center point based on the position conversion information, and moves the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

[0318] (Note 6)

[0319] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a second reference member that moves according to the position of a movable part of the processing device with measuring light to measure the position of a tool center point that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part that is different from a position corresponding to the tool center point with measuring light to measure the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the movable part, the processing method comprising:

[0320] The measurement control device converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member when the positional relationship between the position of the measuring member and the position of the second reference member is a prescribed relationship, and the position of the tool center point measured by the first measuring device based on the measurement light irradiated to the measuring member when the positional relationship is different from the prescribed position, into the position of the tool center point;

[0321] The measurement control device sends sixth position information indicating the position of the tool center point obtained by the conversion to the processing control device; and

[0322] The processing control device controls the movement of the movable portion based on the position of the tool center point indicated by the sixth position information to move the position of the tool center point.

[0323] (Note 7)

[0324] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, the processing method comprising:

[0325] The process control device sends first start position information to the measurement control device, the first start position information indicating a position at which the first measurement device should start measuring the measurement member, that is, a first measurement start position; and

[0326] The measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position indicated by the first start position information.

[0327] (Note 8)

[0328] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, the processing method comprising:

[0329] the process control device sending a measurement start signal to the measurement control device, the measurement start signal being used to cause the first measurement device to start measuring the position of the measurement member; and

[0330] The measurement control device controls the first measurement device to start emitting the measurement light based on the measurement start signal.

[0331] (Note 9)

[0332] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a processing control device capable of controlling the movement of the processing device, the processing method comprising:

[0333] the process control device transmitting timing information to the measurement control device, the timing information indicating a timing at which the first measurement device starts measuring the position of the measurement member; and

[0334] The measurement control device controls emission timing of the measurement light emitted from the first measurement device based on the timing information.

[0335] (Note 10)

[0336] A measuring method is a measuring method of a measuring system, the measuring system comprising: a first measuring device capable of measuring the position of a measuring member installed in a processing device capable of processing the processing object; and a measuring control device capable of controlling the first measuring device, the measuring method comprising:

[0337] The measurement control device calculates position conversion information for converting the position of the measurement member into the position of the tool center point of the machining device based on the position of the measurement member measured by the first measurement device; and

[0338] The measurement control device sends the position conversion information to the processing control device that controls the processing device.

[0339] (Note 11)

[0340] A measuring method is a measuring method of a measuring system, the measuring system comprising: a first measuring device capable of measuring the position of a measuring member installed in a processing device capable of processing the processing object; and a measuring control device capable of controlling the first measuring device, the measuring method comprising:

[0341] the measurement control device converts the position of the measurement member into the position of the tool center point of the machining device based on the position of the measurement member measured by the first measurement device; and

[0342] The measurement control device transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device that controls the processing device.

[0343] (Note 12)

[0344] A processing system, comprising:

[0345] A processing device capable of processing a processing object; and

[0346] A processing control device is capable of controlling the processing device, in which the processing system

[0347] The processing control device includes a transmitting unit that transmits information related to measurement using the first measuring device to a measurement control device, and the measurement control device is capable of controlling a first measuring device capable of measuring the processing device.

[0348] (Note 13)

[0349] A processing method is a processing method in a processing system, wherein the processing system comprises: a processing device capable of processing a processing object; and a processing control device capable of controlling the processing device, wherein the processing method comprises:

[0350] The process control device transmits information related to measurement using the first measuring device to a measurement control device, and the measurement control device is capable of controlling the first measuring device capable of measuring the process device.

[0351] (Note 14)

[0352] A measuring method is a measuring method in a measuring system, the measuring system comprising: a first measuring device capable of irradiating a measuring light to a measuring member installed in a processing device capable of processing a processing object; and a measuring control device capable of controlling the first measuring device, the measuring method comprising:

[0353] The measurement control device controls the first measurement device based on information related to measurement by the first measurement device transmitted from a process control device capable of controlling the process device.

[0354] (Note 15)

[0355] A measurement method comprising:

[0356] a first measuring device receives measurement light generated from a first reference member attached to a jig holding a processing object by irradiating the first reference member with the measurement light, and outputs reference member position information indicating a position of the first reference member; and

[0357] The first measuring device receives measuring light generated from a measuring member installed in a movable portion of a processing device capable of processing the processing object by irradiating the measuring light to the measuring member, and outputs measuring member position information indicating the position of the measuring member.

[0358] The reference member position information and the measurement member position information output from the first measurement device are used to control the movement of the movable portion of the processing device.

[0359] (Note 16)

[0360] The measurement method as described in Note 15, wherein:

[0361] The measuring method comprises:

[0362] A photographing device photographs the first reference component and the measuring component;

[0363] controlling, based on an output from the imaging device, an irradiation direction of measurement light irradiated from the first measuring device to the first reference member; and

[0364] The irradiation direction of the measurement light irradiated from the first measurement device to the measurement member is controlled based on the output from the imaging device.

[0365] The present invention is not limited to the described embodiments, and may be appropriately modified without violating the claims and the gist or idea of ​​the invention as read from the entire specification. The measuring system, processing system, measuring method and processing method accompanying such modifications are also included in the technical scope of the present invention.

[0366] [Explanation of Symbols]

[0367] 1.1a: System

[0368] 2. Measurement system

[0369] 10: Measurement control device

[0370] 21: Measuring device

[0371] 22: Stereo Camera

[0372] 23, 24: Sensor

[0373] 30: Processing control device

[0374] 41, 42, 43: Robots

[0375] 90: Jig

[0376] W: Workpiece

[0377] R11, R12, R13, R21, R22, R23: reflectors

Claims

1. A measurement system comprising: a first measuring device capable of irradiating a measuring member installed in a movable portion of a processing device capable of processing a processing object with a measuring light, and capable of measuring a position of the measuring member; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: a calculation unit that calculates position conversion information based on first position information and second position information indicating a predetermined position, wherein the first position information indicates a position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a first state in which a tool center point of the machining device is located at the predetermined position; and a transmitting unit that transmits the calculated position conversion information to a processing control device that can control the movement of the movable part of the processing device, The sending unit sends third position information to the processing control device, wherein the third position information indicates the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a second state in which the tool center point is located at a position different from the specified position.

2. The measurement system according to claim 1, wherein: The measurement control device acquires the third position information after acquiring the first position information.

3. The measuring system according to claim 1 or 2, wherein: The position conversion information is information for converting the position of the measuring member indicated by the third position information into the position of the tool center point.

4. The measuring system according to any one of claims 1 to 3, wherein: The computing unit acquires coordinate conversion information, and the coordinate conversion information is used to convert a coordinate system related to the processing device, namely a processing coordinate system, and a coordinate system related to the first measuring device, namely a first measuring coordinate system. The second position information represents the specified position in the processing coordinate system, The calculation unit converts the predetermined position in the processing coordinate system represented by the second position information into the predetermined position in the first measurement coordinate system based on the coordinate conversion information. The first position information indicates that the measuring member in the first state is in the first measuring position. The position in the coordinate system of the measurement, The calculation unit calculates first position conversion information, which is position conversion information in the first measurement coordinate system, as the position conversion information based on the specified position in the first measurement coordinate system and the position of the measurement member in the first measurement coordinate system indicated by the first position information.

5. The measuring system according to any one of claims 1 to 3, wherein: The computing unit acquires first coordinate conversion information and second coordinate conversion information, wherein the first coordinate conversion information is used to convert a coordinate system related to the processing device, namely a processing coordinate system, into a coordinate system related to the first measuring device, namely a first measuring coordinate system, and the second coordinate conversion information is used to convert the first measuring coordinate system into the processing coordinate system. The second position information represents the specified position in the processing coordinate system, The calculation unit converts the predetermined position in the processing coordinate system represented by the second position information into a predetermined position in the first measurement coordinate system based on the first coordinate conversion information. The first position information indicates the position of the measuring member in the first measurement coordinate system in the first state. The calculation unit calculates the position conversion information in the processing coordinate system, i.e., the second position conversion information, based on the specified position in the first measurement coordinate system, the position of the measurement component in the first measurement coordinate system represented by the first position information, and the second coordinate conversion information as the position conversion information. The transmitting unit transmits the second conversion information as the position conversion information to the process control device.

6. The measuring system according to claims 1 to 5, wherein: The measuring member comprises a plurality of reflectors, The intervals between the plurality of reflectors in the movable portion where the plurality of reflectors are arranged in a first direction are longer than the intervals in a second direction intersecting the first direction.

7. The measuring system according to claims 1 to 5, wherein: The measuring member comprises a plurality of reflectors, The intervals between the plurality of reflectors in the movable portion where the plurality of reflectors are arranged in a first direction are shorter than the intervals between the plurality of reflectors in a second direction intersecting the first direction.

8. The measuring system according to claim 6 or 7, wherein: The movable part is a mechanical arm, The first direction is the length direction of the robot arm.

9. The measuring system according to claim 6 or 7, wherein: The movable part is a mechanical arm, 135219-CN-1543-PCT; 24C932 1PWCN The first direction is a direction along the rotation axis of the processing tool of the robot arm or the optical axis of the processing light.

10. A measurement system comprising: a first measuring device capable of irradiating a measuring member installed in a movable portion of a processing device capable of processing a processing object with a measuring light, and capable of measuring a position of the measuring member; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: A calculation unit converts the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member into the position of the tool center point of the processing device based on the position conversion information; as well as a transmitting unit that transmits sixth position information indicating the position of the tool center point to a processing control device capable of controlling the movement of the movable portion, The calculation unit calculates the position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member in a first state in which the tool center point is located at a predetermined position.

11. The measurement system according to claim 10, wherein: The measurement control device obtains the position of the measuring component measured by the first measuring device based on the measurement light irradiated on the measuring component in the first state, and then obtains the position of the measuring component measured by the first measuring device based on the measurement light irradiated on the measuring component in the second state where the tool center point is located at a position different from the specified position.

12. The measuring system according to claim 10 or 11, wherein: The position conversion information is information for converting the position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member in the second state where the tool center point is located at a position different from the predetermined position, into the position of the tool center point.

13. The measuring system according to any one of claims 10 to 12, wherein: The computing unit acquires coordinate conversion information, and the coordinate conversion information is used to convert a coordinate system related to the processing device, namely a processing coordinate system, and a coordinate system related to the first measuring device, namely a first measuring coordinate system. The calculation unit converts the predetermined position in the processing coordinate system into the predetermined position in the first measurement coordinate system based on the coordinate conversion information. The calculation unit is based on the specified position in the first measurement coordinate system and the 135219-CN-1543-PCT; 24C932 1PWCN In one state, the first measuring device calculates first position conversion information, which is position conversion information in the first measurement coordinate system, based on the position of the measurement member in the first measurement coordinate system measured by the measurement light irradiated on the measurement member, as the position conversion information.

14. The measuring system according to any one of claims 10 to 12, wherein: The computing unit acquires first coordinate conversion information and second coordinate conversion information, wherein the first coordinate conversion information is used to convert a coordinate system related to the processing device, namely a processing coordinate system, into a coordinate system related to the first measuring device, namely a first measuring coordinate system, and the second coordinate conversion information is used to convert the first measuring coordinate system into the processing coordinate system. The calculation unit converts the predetermined position in the processing coordinate system into the predetermined position in the first measurement coordinate system based on the first coordinate conversion information. The calculation unit calculates position conversion information in the processing coordinate system, i.e., second position conversion information, as the position conversion information based on the specified position in the first measurement coordinate system, the position of the measurement member in the first measurement coordinate system measured by the first measuring device based on the measurement light irradiated on the measurement member in the first state, and the second coordinate conversion information. The transmitting unit transmits the second position conversion information to the process control device.

15. The measurement system according to claim 14, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the processing coordinate system based on the second coordinate conversion information. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device.

16. A measurement system comprising: A first measuring device, in a processing device capable of processing a processing object, capable of irradiating a measuring member installed at a movable portion of the processing device at a position different from a position corresponding to a tool center point of the processing device with measuring light, and capable of measuring a position of the measuring member; a measurement control device capable of controlling the first measurement device; as well as A third measuring device is capable of measuring the position of the tool center point, In the measurement system, The measurement control device comprises: a calculation unit that calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device; and The sending unit sends the position conversion information and the third position information to the movable 135219-CN-1543-PCT; 24C932 1PWCN The third position information indicates the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member when the third measuring device has not measured the position of the tool center point.

17. The measurement system according to claim 16, wherein: The measurement control device obtains the position of the measuring component measured by the first measuring device based on the measuring light irradiated to the measuring component in a state where the third measuring device has measured the position of the tool center point, and then obtains the position of the measuring component measured by the first measuring device based on the measuring light irradiated to the measuring component in a state where the third measuring device has not measured the position of the tool center point.

18. The measurement system according to claim 16 or 17, wherein: The position conversion information is information for converting the position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member when the third measuring device has not measured the position of the tool center point, into the position of the tool center point.

19. The measuring system according to any one of claims 16 to 18, wherein: The computing unit acquires third coordinate conversion information, wherein the third coordinate conversion information is used to convert a coordinate system associated with the third measuring device, namely a second measuring coordinate system, into a coordinate system associated with the first measuring device, namely a first measuring coordinate system. The computing unit converts the position of the tool center point in the second measurement coordinate system measured by the third measuring device when the third measuring device has measured the position of the tool center point into the position of the tool center point in the first measurement coordinate system based on the third coordinate conversion information, The calculation unit calculates the position conversion information in the first measurement coordinate system, i.e., the first position conversion information, based on the position of the measuring component in the first measurement coordinate system measured by the first measurement device when the third measurement device has measured the position of the tool center point, and the position of the tool center point in the first measurement coordinate system, as the position conversion information.

20. The measurement system according to any one of claims 16 to 18, wherein: The computing unit acquires second coordinate conversion information and third coordinate conversion information, wherein the second coordinate conversion information is used to convert a coordinate system related to the first measuring device, namely a first measuring coordinate system, into a coordinate system related to the processing device, namely a processing coordinate system, and the third coordinate conversion information is used to convert a coordinate system related to the third measuring device, namely a second measuring coordinate system, into the first measuring coordinate system. The computing unit converts the tool center point measured by the third measuring device into the tool center point based on the third coordinate conversion information. The position of the tool center point in the second measurement coordinate system is converted into the position of the tool center point in the first measurement coordinate system, The calculation unit calculates the position conversion information in the machining coordinate system, i.e., the second position conversion information, based on the position of the measuring member in the first measurement coordinate system measured by the first measurement device when the third measurement device has measured the position of the tool center point, the position of the tool center point in the first measurement coordinate system, and the second coordinate conversion information, as the position conversion information. The transmitting unit transmits the second position conversion information to the process control device.

21. A measurement system comprising: A first measuring device, in a processing device capable of processing a processing object, capable of irradiating a measuring member installed at a movable portion of the processing device at a position different from a position corresponding to a tool center point of the processing device with measuring light, and capable of measuring a position of the measuring member; a measurement control device capable of controlling the first measurement device; as well as A third measuring device is capable of measuring the position of the tool center point, In the measurement system, The measurement control device comprises: a calculation unit for converting the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has not measured the position of the tool center point into the position of the tool center point, based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has measured the position of the tool center point and the position of the tool center point measured by the third measuring device; as well as The transmitting unit transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable portion.

22. The measurement system according to claim 21, wherein: The measurement control device obtains the position of the measuring component measured by the first measuring device based on the measuring light irradiated to the measuring component in a state where the third measuring device has measured the position of the tool center point, and then obtains the position of the measuring component measured by the first measuring device based on the measuring light irradiated to the measuring component in a state where the third measuring device has not measured the position of the tool center point.

23. A measurement system according to claim 21 or 22, wherein: The computing unit acquires coordinate conversion information, and the coordinate conversion information is used to convert a coordinate system related to the first measuring device, namely a first measuring coordinate system, and a coordinate system related to the processing device, namely a processing coordinate system. The computing unit converts the coordinate conversion information into the coordinate conversion information based on the coordinate conversion information of the first measuring device. converting the position of the measuring member in the first measurement coordinate system measured by the measurement light irradiated by the measuring member into the position of the measuring member in the machining coordinate system, The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device.

24. A measurement system comprising: a first measuring device capable of irradiating a measuring light onto a second reference member that moves according to the position of a movable portion of a processing device that can process a processing object, thereby measuring the position of a tool center point of the processing device that moves with the movement of the movable portion, and capable of irradiating a measuring member installed at the movable portion at a position different from that corresponding to the tool center point, thereby measuring the position of the measuring member; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: a calculation unit that calculates position conversion information based on the position of the tool center point measured by the first measuring device based on the measurement light irradiated to the second reference member and the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member when the positional relationship between the position of the measuring member and the position of the second reference member is a predetermined relationship; and A sending unit sends the position conversion information and third position information to a processing control device capable of controlling the movement of the movable part, wherein the third position information indicates the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member when the position relationship is different from the prescribed relationship.

25. The measurement system of claim 24, wherein: The measurement control device obtains the position of the measuring component measured by the first measuring device based on the measurement light irradiating the measuring component when the positional relationship is the specified relationship, and then obtains the position of the measuring component measured by the first measuring device based on the measurement light irradiating the measuring component when the positional relationship is a relationship different from the specified relationship.

26. A measurement system according to claim 24 or 25, wherein: The position conversion information is information for converting the position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member when the positional relationship is different from the predetermined relationship, into the position of the tool center point.

27. A measurement system according to any one of claims 24 to 26, wherein: The calculation unit is based on the coordinate system of the measuring member in the first measuring device when the positional relationship is the specified relationship, that is, the first 135219-CN-1543-PCT; 24C9321PWCN The position conversion information in the first measurement coordinate system, i.e., the first position conversion information, is calculated based on the position in the measurement coordinate system and the position of the tool center point in the first measurement coordinate system as the position conversion information.

28. A measurement system according to any one of claims 24 to 26, wherein: The computing unit acquires coordinate conversion information, and the coordinate conversion information is used to convert a coordinate system related to the first measuring device, namely a first measuring coordinate system, and a coordinate system related to the processing device, namely a processing coordinate system. The calculation unit calculates position conversion information in the machining coordinate system, i.e., second position conversion information, as the position conversion information based on the position of the measuring member in the first measurement coordinate system measured by the first measurement device when the positional relationship is the specified relationship, the position of the tool center point in the first measurement coordinate system measured by the first measurement device, and the coordinate conversion information. The transmitting unit transmits the second position conversion information to the process control device.

29. A measurement system comprising: a first measuring device capable of irradiating a measuring light onto a second reference member that moves according to the position of a movable part of a processing device that can process a processing object, thereby measuring the position of a tool center point that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part that is different from a position corresponding to the tool center point, thereby measuring the position of the measuring member; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: a calculation unit for converting the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member when the positional relationship between the position of the measuring member and the position of the second reference member is a prescribed relationship and the position of the tool center point measured by the first measuring device based on the measurement light irradiated onto the measuring member when the positional relationship is different from the prescribed position into the position of the tool center point; as well as The transmitting unit transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable portion.

30. The measurement system of claim 29, wherein: The measurement control device obtains the position of the measurement member measured by the first measurement device based on the measurement light irradiated to the measurement member when the positional relationship is the prescribed relationship, and then obtains the 135219-CN-1543-PCT; 24C932 1PWCN when the positional relationship is a relationship different from the prescribed relationship. The first measuring device measures the position of the measuring member based on the measuring light irradiated to the measuring member.

31. A measurement system according to claim 29 or 30, wherein: The first measuring device can irradiate the measuring light onto a first reference member mounted on at least one of the processing object and a jig holding the processing object, and can measure the position of the first reference member in a first measurement coordinate system that is a coordinate system associated with the first measuring device.

32. The measurement system of claim 31, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device.

33. A measurement system according to any one of claims 1 to 9, wherein: The measurement control device acquires the second position information.

34. The measurement system of claim 4, 13, 19 or 27, wherein: The transmitting unit transmits the first position conversion information to the process control device.

35. The measurement system of any one of claims 1 to 9, 16 to 20, and 24 to 28, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the processing coordinate system based on the second coordinate conversion information. The transmitting unit transmits the third position information indicating the position of the measuring member in the processing coordinate system to the processing control device.

36. A measurement system according to any one of claims 1 to 35, wherein: The first measuring device can irradiate the measuring light onto a first reference member mounted on at least one of the processing object and a jig holding the processing object, and can measure the position of the first reference member in a first measurement coordinate system that is a coordinate system associated with the first measuring device.

37. The measurement system of claim 36, wherein: The computing unit converts the first measuring device 135219-CN-1543-PCT; 24C932 1PWCN based on the fourth position information and the fifth position information. The position of the measuring member in the first measurement coordinate system measured by the measuring light irradiating the measuring member is converted into the position of the measuring member in the processing coordinate system, the fourth position information represents the position of the first reference member in the first measurement coordinate system measured by the first measuring device based on the measuring light irradiating the first reference member, and the fifth position information represents the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device, The transmitting unit transmits the third position information indicating the position of the measuring member in the processing coordinate system to the processing control device.

38. The measurement system of claim 37, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

39. A measurement system according to claim 37 or 38, wherein: The calculation unit calculates second coordinate conversion information based on the fourth position information and the fifth position information, and the second coordinate conversion information is used to convert the position of the measuring component in the first measurement coordinate system measured by the first measuring device based on the irradiation light irradiating the measuring component into the position of the measuring component in the processing coordinate system.

40. The measurement system of claim 38, wherein: The computing unit computes second coordinate conversion information based on the fourth position information and the fifth position information, the second coordinate conversion information being used to convert the position of the measuring member in the first measurement coordinate system measured by the first measuring device based on the measurement light irradiated on the measuring member into the position of the measuring member in the processing coordinate system, The second coordinate conversion information is commonly used for calculating the positions of the plurality of measuring members.

41. The measurement system of claim 36, wherein: The plurality of measuring members are respectively mounted on a plurality of processing devices capable of processing the processing object. The calculation unit calculates the second coordinate conversion information based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system measured by the first measuring device based on the measurement light irradiated on the first reference member, the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device, and the second coordinate conversion information is used to convert the position of the measurement member in the first measurement coordinate system measured by the first measuring device based on the irradiation light irradiated on the measurement member to the measurement member 135219-CN-1543-PCT; 24C932 1PWCN The position in the processing coordinate system, The second coordinate conversion information is commonly used for calculating the positions of the plurality of measuring members.

42. A measurement system according to any one of claims 1 to 41, wherein: The measurement control device includes a receiving unit that receives a measurement start signal for causing the first measurement device to start measurement from the process control device.

43. The measurement system of claim 42, wherein: After receiving the measurement start signal and before the position of the measurement member mounted on the processing device is located at a target position, the measurement control device changes the emission direction of the measurement light in the first measurement device so as to irradiate the measurement light toward the target position.

44. A measurement system according to claim 42 or 43, wherein: The receiving unit further receives timing information indicating a timing to start measurement from the process control device.

45. The measurement system of claim 44, wherein: After receiving the timing information and before the position of the measuring member mounted on the processing device is located at a target position, the measurement control device changes the emission direction of the measurement light in the first measurement device so as to irradiate the measurement light toward the target position.

46. ​​A measurement system according to any one of claims 1 to 45, wherein: The processing device is provided with a reflector capable of reflecting the measurement light as the measurement member.

47. A measurement system according to any one of claims 1 to 46, wherein: The measurement control device includes an estimation unit capable of estimating a position of the measurement member that moves along with the movement of the movable portion when the processing device is operated. The measurement control device changes the emission direction of the measurement light from the first measurement device so that the measurement light is irradiated onto the position estimated by the estimation unit.

48. A measurement system according to any one of claims 1 to 47, wherein: The first measuring device includes a tracking device capable of tracking the measuring member that moves along with the movement of the movable portion when the processing device operates.

49. The measurement system of claim 48, wherein: The measurement control device includes an estimation unit capable of estimating a position of the measurement member that moves along with the movement of the movable portion when the processing device is operated. The estimating unit corrects the estimated position based on the estimated position and the position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member.

50. A measurement system according to any one of claims 36 to 41, wherein: The first reference member includes at least three reflectors respectively capable of reflecting the measuring light.

51. A measurement system according to any one of claims 1 to 50, wherein: The measuring member includes at least three reflectors respectively capable of reflecting the measuring light.

52. A measurement system according to any one of claims 1 to 51, wherein: The measuring system includes a photographing device capable of photographing the measuring member. The measurement control device controls the measurement of the measurement member by the first measurement device based on the imaging result obtained by the imaging device.

53. A measurement system according to any one of claims 1 to 52, wherein: The measuring system includes a second measuring device capable of measuring the measuring member with a coarser accuracy than the first measuring device, The measurement control device controls the measurement of the measurement member by the first measurement device based on the measurement result of the measurement member obtained by the second measurement device.

54. A measurement system according to any one of claims 1 to 53, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

55. A processing system comprising: The measuring system according to any one of claims 1 to 9 and 33 to 54; The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

56. The processing system of claim 55, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the processing coordinate system based on the second coordinate conversion information. The transmitting unit transmits the third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device calculates the position of the tool center point in the processing coordinate system based on the position of the measuring member in the processing coordinate system represented by the third position information and the second position conversion information.

57. The processing system of claim 55, wherein: The processing control device calculates the position of the tool center point in a processing coordinate system which is a coordinate system related to the processing device, based on the position of the measuring member indicated by the third position information and the position conversion information.

58. The processing system of claim 57, wherein: The process control device corrects the process device based on the third position information.

59. A processing system according to any one of claims 55 to 59, wherein: The processing control device controls processing by the processing device based on the position of the tool center point calculated based on the position conversion information and the third position information.

60. A processing system according to any one of claims 55 to 59, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

61. A processing system comprising: A measuring system according to any one of claims 10 to 15, 34, and 36 to 54; The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device controls the movement of the movable portion based on the position of the tool center point indicated by the sixth position information transmitted by the transmitting unit to move the position of the tool center point.

62. The processing system of claim 61, wherein: The sending unit sends the first position conversion information to the processing control device, The processing control device converts the first position conversion information into position conversion information in the processing coordinate system, namely, second position conversion information.

63. The processing system of claim 61, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the processing coordinate system based on the second coordinate conversion information. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device calculates the position of the tool center point in the processing coordinate system based on the position of the measuring member in the processing coordinate system represented by the third position information and the conversion information in the processing coordinate system.

64. The processing system of claim 61, wherein: The processing control device calculates the position of the tool center point in a coordinate system related to the processing device, i.e., the processing coordinate system, based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component in the second state where the tool center point is located at a position different from the specified position and the position conversion information.

65. The processing system of claim 61, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device controls the processing device in the processing coordinate system based on the third position information.

66. The processing system of claim 65, wherein: The process control device calibrates the process device based on third position information indicating the position of the measuring member in the process coordinate system.

67. A processing system according to claim 65 or 66, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

68. A processing system according to any one of claims 61 to 67, wherein: The processing control device controls the processing using the processing device based on the position conversion information and the position of the tool center point, and the position of the tool center point is calculated based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component in a second state where the tool center point is located at a position different from the specified position.

69. A processing system according to any one of claims 61 to 68, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

70. A processing system comprising: A measuring system according to any one of claims 16 to 20 and 34 to 54; 135219-CN-1543-PCT; 24C932 1PWCN The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device converts the position of the measuring component represented by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

71. The processing system of claim 70, wherein: The sending unit sends the first position conversion information to the processing control device, The process control device converts the first position conversion information into conversion information in the process coordinate system.

72. The processing system of claim 70, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the processing coordinate system based on the second coordinate conversion information. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device calculates the position of the tool center point in the processing coordinate system based on the third position information and the second position conversion information.

73. The processing system of claim 70, wherein: The processing control device calculates the position of the tool center point in a coordinate system related to the processing device, i.e., a processing coordinate system, based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component when the third measuring device has not measured the position of the tool center point, and the position conversion information.

74. The processing system of claim 70, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device controls the processing device in the processing coordinate system based on the third position information.

75. The processing system of claim 74, wherein: The process control device calibrates the process device based on information indicating the position of the measuring member in the process coordinate system.

76. A measurement system according to claim 74 or 75, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

77. A processing system according to any one of claims 70 to 76, wherein: The processing control device controls the processing using the processing device based on the position conversion information and the position of the tool center point, and the position of the tool center point is calculated based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component when the third measuring device has not measured the position of the tool center point.

78. A processing system according to any one of claims 70 to 77, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

79. A processing system comprising: A measuring system according to any one of claims 21 to 23, and 36 to 54; The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device controls the movement of the movable portion based on the sixth position information to move the position of the tool center point.

80. The processing system of claim 79, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device controls the processing device in the processing coordinate system based on the third position information.

81. The processing system of claim 80, wherein: The process control device corrects the process device based on the third position information.

82. A measurement system according to claim 80 or 81, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

83. A processing system according to any one of claims 79 to 82, wherein: The processing control device controls processing by the processing device based on the position of the tool center point indicated by the sixth position information.

84. A processing system according to any one of claims 79 to 83, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

85. A processing system comprising: A measuring system according to any one of claims 24 to 28 and 34 to 54; The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device converts the position of the measuring member represented by the third position information into the position of the tool center point based on the position conversion information, and moves the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

86. The processing system of claim 85, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the measuring member, into the position of the measuring member in the machining coordinate system based on the coordinate conversion information. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device calculates the position of the tool center point in the processing coordinate system based on the third position information and the second position conversion information.

87. The processing system of claim 85, wherein: The processing control device calculates the position of the tool center point in a coordinate system related to the processing device, i.e., a processing coordinate system, based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component when the positional relationship is different from the prescribed relationship, and the position conversion information.

88. The processing system of claim 85, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device controls the processing device in the processing coordinate system based on the third position information.

89. The processing system of claim 88, wherein: The process control device corrects the process device based on the third position information.

90. The processing system of claim 88 or 89, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

91. A processing system according to any one of claims 85 to 90, wherein: The processing control device controls the processing using the processing device based on the position conversion information and the position of the tool center point, and the position of the tool center point is calculated based on the position of the measuring component measured by the first measuring device based on the measuring light irradiated on the measuring component when the positional relationship is different from the prescribed relationship.

92. A processing system according to any one of claims 85 to 91, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

93. A processing system comprising: A measurement system according to any one of claims 29 to 32, and 36 to 54; 135219-CN-1543-PCT; 24C932 1PWCN The processing device is capable of processing the processing object; and The processing control device is capable of controlling the movement of the movable part of the processing device. The processing control device controls the movement of the movable portion based on the position of the tool center point indicated by the sixth position information to move the position of the tool center point.

94. The processing system of claim 93, wherein: The computing unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the measuring member, into the position of the measuring member in the processing coordinate system based on the fourth position information and the fifth position information, the fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiating the first reference member, and the fifth position information indicating the position of the first reference member in the processing coordinate system input via the input unit of the measurement control device. The transmitting unit transmits third position information indicating the position of the measuring member in the processing coordinate system to the processing control device, The processing control device controls the processing device in the processing coordinate system based on the third position information.

95. The processing system of claim 94, wherein: The process control device corrects the process device based on the third position information.

96. A measurement system according to claim 94 or 95, wherein: The processing control device controls the plurality of processing devices that can process the processing object respectively. The calculation unit can calculate the position of each of the plurality of measuring members respectively installed in the plurality of processing devices in the processing coordinate system.

97. A processing system according to any one of claims 93 to 96, wherein: The processing control device controls processing by the processing device based on the position of the tool center point indicated by the sixth position information.

98. A processing system according to any one of claims 93 to 97, wherein: The processing control device controls the processing of the processing object by the plurality of processing devices. The calculation unit may calculate the position of the tool center point of each of the plurality of machining devices.

99. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device capable of irradiating measuring light to a measuring member installed on a movable part of a processing device capable of processing a processing object, and capable of measuring the position of the measuring member; and a measuring control device capable of controlling the first measuring device, wherein the measuring method comprises: 135219-CN-1543-PCT; 24C932 1PWCN The measurement control device calculates position conversion information based on first position information and second position information indicating a predetermined position, wherein the first position information indicates the position of the measuring member measured by the first measuring device based on the measuring light irradiated on the measuring member in a first state in which a tool center point of the machining device is located at the predetermined position; The measurement control device sends the calculated position conversion information to a processing control device capable of controlling the movement of the movable part of the processing device; as well as The measurement control device sends third position information to the processing control device, wherein the third position information indicates the position of the measuring component measured by the first measuring device based on the measurement light irradiated on the measuring component in a second state in which the tool center point is located at a position different from the specified position.

100. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device capable of irradiating a measuring light to a measuring member installed in a movable part of a processing device capable of processing a processing object and capable of measuring a position of the measuring member; and a measurement control device capable of controlling the first measuring device, wherein the measuring method comprises: The measurement control device converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated on the measurement member into the position of the tool center point of the processing device based on the position conversion information; The measurement control device sends sixth position information indicating the position of the tool center point to a processing control device capable of controlling the movement of the movable portion; as well as The measurement control device calculates the position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member in a first state in which the tool center point is located at a predetermined position.

101. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device, in a processing device capable of processing a processing object, capable of irradiating a measuring light to a measuring member installed at a movable portion of the processing device at a position different from a position corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, wherein the measuring method comprises: the measurement control device calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated on the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device; and The measuring control device sends the position conversion information and the third position information to a processing control device capable of controlling the movement of the movable part, wherein the third position information indicates that the first measuring device is in a state where the third measuring device does not measure the position of the tool center point. The position of the measuring member measured based on the measuring light irradiated to the measuring member is set.

102. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device, in a processing device capable of processing a processing object, capable of irradiating a measuring light to a measuring member installed at a movable portion of the processing device at a position different from a position corresponding to a tool center point of the processing device, and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, wherein the measuring method comprises: the measurement control device converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has not measured the position of the tool center point, into the position of the tool center point, based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device; as well as The measurement control device transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable portion.

103. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device capable of irradiating a measuring light onto a second reference member that moves according to the position of a movable part of a processing device that can process a processing object to measure the position of a tool center point of the processing device that moves with the movement of the movable part, and capable of irradiating a measuring member installed at a movable part different from a position corresponding to the tool center point with a measuring light to measure the position of the measuring member; and a measurement control device capable of controlling the first measuring device, wherein the measuring method comprises: the measurement control device calculating position conversion information based on the position of the tool center point measured by the first measuring device based on the measurement light irradiated to the second reference member when the positional relationship between the position of the measuring member and the position of the second reference member is a predetermined relationship, and the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member; and The measurement control device sends the position conversion information and third position information to a processing control device capable of controlling the movement of the movable part, wherein the third position information indicates the position of the measuring component measured by the first measuring device based on the measurement light irradiated on the measuring component when the position relationship is different from the prescribed relationship.

104. A measurement method is a measurement method in a measurement system, the measurement system comprising: A first measuring device capable of irradiating a second reference member that moves according to a position of a movable portion of a processing device capable of processing a processing object to measure the movement of the movable portion 135219-CN-1543-PCT; 24C932 1PWCN The position of the moving tool center point is measured, and the position of the measuring member can be measured by irradiating a measuring light to the measuring member installed at the movable part different from the position corresponding to the tool center point; and a measurement control device capable of controlling the first measuring device, the measuring method comprising: The measurement control device converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated to the measuring member when the positional relationship between the position of the measuring member and the position of the second reference member is a prescribed relationship, and the position of the tool center point measured by the first measuring device based on the measurement light irradiated to the measuring member when the positional relationship is different from the prescribed position, into the position of the tool center point; as well as The measurement control device transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device capable of controlling the movement of the movable portion.

105. A processing system comprising: A processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring a position of the measuring member; a measurement control device capable of controlling the first measurement device; and a processing control device capable of controlling the movement of the processing device, In the processing system, The processing control device includes a transmitting unit, which transmits first starting position information to the measurement control device, wherein the first starting position information indicates a position at which the first measuring device should start measuring the measuring member, that is, a first measurement starting position. The measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position indicated by the first start position information.

106. A processing system comprising: A processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring a position of the measuring member; a measurement control device capable of controlling the first measurement device; and a processing control device capable of controlling the movement of the processing device, In the processing system, The processing control device includes a transmitting unit, the transmitting unit transmitting a measurement start signal to the measurement control device, the measurement start signal being used to cause the first measurement device to start measuring the position of the measurement member, 135219-CN-1543-PCT; 24C932 1PWCN The measurement control device controls the first measurement device to start emitting the measurement light based on the measurement start signal.

107. A processing system comprising: A processing device capable of processing a processing object; a first measuring device capable of irradiating a measuring light to a measuring member installed in the processing device and capable of measuring a position of the measuring member; a measurement control device capable of controlling the first measurement device; and a processing control device capable of controlling the movement of the processing device, In the processing system, The processing control device includes a transmitting unit configured to transmit timing information to the measurement control device, the timing information indicating a timing at which the first measurement device starts measuring the position of the measurement member. The measurement control device controls emission timing of the measurement light emitted from the first measurement device based on the timing information.

108. The processing system of claim 106 or 107, wherein: The transmitting unit further transmits first start position information to the measurement control device, wherein the first start position information indicates a first measurement start position at which the first measurement device should start measuring the measurement component of the processing device. The measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward a first measurement start position indicated by the first start position information.

109. The processing system of claim 105, wherein: The transmitting unit further transmits a measurement start signal to the measurement control device, the measurement start signal being used to cause the first measurement device to start measuring the position of the measurement member.

110. The processing system of claim 109, wherein: After receiving the measurement start signal and before the position of the measuring member that moves along with the movement of the processing device is located at the first measurement start position represented by the first start position information, the measurement control device changes the emission direction of the measurement light so as to irradiate the measurement light toward the first measurement start position.

111. The processing system of claim 105, wherein: The transmitting unit further transmits timing information indicating a timing at which the first measuring device starts measuring the position of the measuring member to the measurement control device.

112. The processing system of claim 111, wherein: After receiving the timing information and before the position of the measuring member that moves along with the movement of the processing device is located at the first measurement start position indicated by the first start position information, the measurement control device changes the emission direction of the measuring light to face the 135219-CN-1543-PCT; 24C932 1PWCN The first measurement start position is irradiated with the measurement light.

113. A processing system according to any one of claims 105 to 112, wherein: A reflector capable of reflecting the measurement light is arranged at a predetermined position relative to a reference portion of the processing device.

114. The processing system of claim 113, wherein: The reference position is the tool center point of the processing device.

115. A processing system according to any one of claims 105 to 114, wherein: A reflector module including at least three reflectors is arranged at a predetermined position relative to a reference position of the processing device.

116. A processing system according to any one of claims 105 to 115, wherein: The measurement control device includes an estimation unit capable of estimating a position of the measurement member that moves along with the movement of the processing device when the processing device is in operation. The measurement control device changes the direction of the measurement light so that the measurement light is irradiated onto the position of the measurement member estimated by the estimation unit.

117. A processing system according to any one of claims 105 to 115, wherein: The first measuring device includes a tracking device capable of tracking the position of the measuring member that moves along with the movement of the processing device when the processing device is in operation.

118. The processing system of claim 116, wherein: The first measuring device includes a tracking device capable of tracking the position of the measuring member that moves along with the movement of the processing device when the processing device is in operation.

119. The processing system of claim 118, wherein: The estimating unit corrects the position of the measuring member based on the estimated position of the measuring member and the position of the measuring member measured by the first measuring device.

120. A processing system according to any one of claims 105 to 119, wherein: The measuring member includes at least three reflectors capable of reflecting the measuring light.

121. A measurement system comprising: a first measuring device capable of measuring a position of a measuring member installed in a processing device capable of processing the processing object; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: a calculation unit that calculates position conversion information for converting the position of the measuring member into the position of a tool center point of the machining device based on the position of the measuring member measured by the first measuring device; and A sending unit sends the position conversion information to the 135219-CN-1543-PCT; 24C932 1PWCN that controls the processing device Process control device.

122. A measurement system comprising: a first measuring device capable of measuring a position of a measuring member installed in a processing device capable of processing the processing object; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device comprises: a calculation unit that converts the position of the measuring member into the position of a tool center point of the machining device based on the position of the measuring member measured by the first measuring device; as well as The transmitting unit transmits sixth position information indicating the position of the tool center point obtained by the conversion to a processing control device that controls the processing device.

123. A measurement system comprising: A first measuring device capable of irradiating a measuring light to a measuring member installed in a processing device capable of processing a processing object; as well as a measurement control device capable of controlling the first measurement device, In the measurement system, The measurement control device controls the first measurement device based on information related to measurement by the first measurement device transmitted from a process control device capable of controlling the process device.

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