Variable orbiting molecule screen for increasing ultra-high vacuum space

Abstract

The application discloses a deformable track molecule screen for increasing the volume of ultrahigh vacuum space, which comprises a circular molecule screen base plate and flaps. The flaps are multiple, and the multiple flaps are located on one side of the circular molecule screen base plate. One end of the multiple flaps is clamped and fixed along the peripheral part of the circular molecule screen base plate. The multiple flaps are sequentially and closely surrounded to form a sheltering ring similar to a circular truncated cone. The contour of each flap is not greater than the contour of the circular molecule screen base plate. The application can increase the volume range of the ultrahigh vacuum space, and is convenient for processing and rocket transportation, and can be quickly assembled.

Description

Technical Field

[0001] The present invention relates to the field of space vacuum technology, and in particular to a deformable orbital molecular screen for increasing ultrahigh vacuum space. Background Art

[0002] like Figure 19 As shown in the figure, the orbital molecular screen is a stainless steel disk that flies at high speed in a low orbit (300km-500km). It is placed in front of the orbiter or experimental equipment in the flight direction. According to the principle of high-speed kinematics, an ultra-high vacuum zone (about 10 -13 Pa), providing an ultra-high vacuum zone for orbiters or experimental equipment. The United States launched a total of three space flight missions with the orbital molecular screen "Wake Shield Facility" between 1994 and 1996; Russia began to implement a similar orbital molecular screen space device "Screen-M" in 1996. However, the orbital molecular screen devices of the two are almost the same: a stainless steel flat disk with a diameter of about 3.7 meters and a thickness of 0.3 meters. Although this structural design can achieve ultra-high vacuum in its wake area on the predetermined orbit, it is far from the theoretical calculated value (about 10 -13 Pa), only reached 10 - 9 According to the analysis results, part of the reason is that high-speed hydrogen atoms enter the wake area, causing the pressure to rise, which in turn limits the volume of the ultra-high vacuum area.

[0003] The rapid advancement of space science and technology in recent years, particularly the emergence of commercial aerospace companies like SpaceX, has significantly reduced the cost of space travel, and this trend is expected to continue. This has led to a boom in space experiments and manufacturing. The Orbital Molecular Screen provides the necessary experimental and production environment for space experiments with molecular beam epitaxy (MBE) and the large-scale production of high-performance semiconductor materials in space. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a deformable orbital molecular screen that increases the volume of the ultra-high vacuum space, is easy to process and transport by rocket, and can be quickly assembled.

[0005] A deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention includes:

[0006] Circular molecular screen substrate;

[0007] The flaps are multiple, one end of the multiple flaps is clamped and fixed along the peripheral part of the circular molecular screen base plate, and the multiple flaps are sequentially and closely surrounded to form a sheltering ring similar to a circular truncated cone, and the profile of each flap is not greater than the profile of the circular molecular screen base plate.

[0008] According to the deformable orbit molecular screen for increasing ultra-high vacuum space, the circular molecular screen base plate and the flaps are independently manufactured, which is convenient for processing and assembling on the earth. Since the profile of each flap is not greater than the profile of the circular molecular screen base plate, the flaps and the circular molecular screen base plate can be stacked, the maximum vertical cross-sectional area is not changed compared with the conventional planar disc orbit molecular screen, and the transport requirement of the rocket is met, so that the rocket is conveniently transported. When the flaps and the circular molecular screen base plate reach the space, the flaps and the circular molecular screen base plate are quickly clamped and assembled by a mechanical arm to assemble the deformable orbit molecular screen for increasing ultra-high vacuum space. The epitaxial device is arranged in the sheltering ring and mounted on one side of the circular molecular screen base plate. Since the size of the circular molecular screen base plate is close to or consistent with the size of the conventional planar disc orbit molecular screen, the peripheral part of the circular molecular screen base plate is additionally provided with the sheltering ring similar to a circular truncated cone. Therefore, the size of the assembled deformable orbit molecular screen for increasing ultra-high vacuum space is much larger than that of the conventional planar disc orbit molecular screen. When the deformable orbit molecular screen for increasing ultra-high vacuum space flies on the predetermined orbit, the sheltering ring can effectively prevent the high-speed moving gas material from entering the wake region of the deformable orbit molecular screen for increasing ultra-high vacuum space, so as to expand the space volume range of the ultra-high vacuum region, and meet the space experiment or large-scale production and manufacturing requirements of the epitaxial device in the ultra-high vacuum environment.

[0009] In some embodiments, the joint surface between two adjacent flaps forms a bending surface in the thickness direction of the joint surface.

[0010] In some embodiments, the bending surface is a stepped surface.

[0011] In some embodiments, one end of the flap includes a first end surface, and the first end surface abuts against the peripheral surface of the circular molecular screen base plate.

[0012] In some embodiments, a second end surface is further included, the second end surface is connected to the first end surface, and the second end surface abuts against the edge of the side surface of the circular molecular screen base plate.

[0013] In some embodiments, the installation angle between each flap and the circular molecular screen base plate is the same, and the installation angle between the flap and the circular molecular screen base plate is 30-60 degrees.

[0014] In some embodiments, the mounting angle between the flap and the circular molecular screen substrate is 45 degrees.

[0015] In some embodiments, the plurality of flaps are identical, and the number of the flaps is no less than five.

[0016] In some embodiments, a plurality of first clamping assemblies are provided in the periphery of the circular molecular screen substrate, a second clamping assembly is provided at one end of each of the plurality of flaps, and the first clamping assemblies are clamped with the corresponding second clamping assemblies.

[0017] In some embodiments, a first mounting hole and a second mounting hole are formed on the circumferential surface of the circular molecular screen substrate, the axis of the first mounting hole intersects the axis of the second mounting hole, and the inner end of the first mounting hole is connected to the side of the second mounting hole; the first clamping assembly is installed in the first mounting hole, and the first clamping assembly is elastically retractable and can extend into the second mounting hole under its own elastic action;

[0018] A third mounting hole is provided on the first end face; the second clamping assembly is installed in the third mounting hole and extends out of the third mounting hole, and the extending portion of the second clamping assembly is used to be inserted into the second mounting hole to be clamped with the first clamping assembly.

[0019] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments with reference to the following drawings, in which:

[0021] Figure 1 A three-dimensional schematic diagram of a deformable orbital molecular screen for increasing ultra-high vacuum space according to the present invention;

[0022] Figure 2 A front view of a deformable orbital molecular screen for increasing ultra-high vacuum space according to the present invention;

[0023] Figure 3 for Figure 2 Schematic diagram of the cross section at AA;

[0024] Figure 4 This is a front schematic diagram of the circular molecular screen substrate of the present invention;

[0025] Figure 5 is a side view of the circular molecular screen substrate of the present invention;

[0026] Figure 6 for Figure 4 Cross-sectional view at BB;

[0027] Figure 7 A schematic diagram of a flap according to one direction of the present invention;

[0028] Figure 8 Another schematic diagram of the flap of the present invention;

[0029] Figure 9 for Figure 8 Cross-sectional view at CC;

[0030] Figure 10 is a schematic diagram of the bending surface of the flap of the present invention;

[0031] Figure 11 is a perspective view of the first clamping assembly of the present invention;

[0032] Figure 12 It is a front view of the first clamping assembly of the present invention;

[0033] Figure 13 is a perspective view of the second clamping assembly of the present invention;

[0034] Figure 14 It is a front view of the first clamping assembly of the present invention;

[0035] Figure 15 for Figure 3 The enlarged schematic diagram at point I in the middle;

[0036] Figure 16 for Figure 6 The enlarged schematic diagram of M in the middle;

[0037] Figure 17 for Figure 9 The enlarged schematic diagram of position N in the middle;

[0038] Figure 18 A schematic diagram of the deformable orbital molecular screen for increasing ultra-high vacuum space to generate an ultra-high vacuum region according to the present invention;

[0039] Figure 19 Schematic diagram of the generation of ultra-high vacuum region by a conventional planar disk orbital molecular screen.

[0040] Reference numerals:

[0041] Circular molecular screen substrate 10; first mounting hole 101; large hole 1011; small hole 1012; second mounting hole 102; first snap-fit ​​assembly 103; anti-slip plate 1031; slider stopper 1032; slider 1033; spring 1034; flap 20; bending surface 201; first end face 202; second end face 203; third mounting hole 204; second snap-fit ​​assembly 205; mounting seat 2051; insertion rod 2052; mounting angle α; epitaxial device 30. DETAILED DESCRIPTION

[0042] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0043] The following combination Figures 1 to 18 The deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention will be described.

[0044] like Figures 1 to 18 As shown, the deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention is improved based on a conventional planar disk orbital molecular screen, and includes a circular molecular screen substrate 10 and flaps 20 .

[0045] The dimensions of the circular molecular screen substrate 10 are similar to or identical to those of a conventional planar disc-shaped molecular screen. Multiple flaps 20 are provided, each in the shape of a circular arc sector. These flaps 20 are positioned on one side of the circular molecular screen substrate 10, with one end of each flap 20 secured along the perimeter of the circular molecular screen substrate 10. The flaps 20 are arranged adjacent to each other to form a truncated cone-shaped shielding ring. The outline of each flap 20 is no larger than that of the circular molecular screen substrate 10.

[0046] According to the deformable orbital molecular screen for increasing ultra-high vacuum space according to the embodiment of the present invention, the circular molecular screen substrate 10 and the flaps 20 are manufactured independently and are not assembled on Earth. Since the outline of each flap 20 is no larger than the outline of the circular molecular screen substrate 10, the flaps 20 and the circular molecular screen substrate 10 can be stacked. Compared with conventional planar disk orbital molecular screens, the maximum vertical cross-sectional area is not changed, which facilitates transportation by launch vehicle. After the flaps 20 and the circular molecular screen substrate 10 reach space, a robotic arm quickly snaps the flaps 20 and the circular molecular screen substrate 10 together to form the deformable orbital molecular screen for increasing ultra-high vacuum space according to the embodiment of the present invention; and the epitaxial device 30 is disposed within the shielding ring and mounted on a side surface of the circular molecular screen substrate 10. Since the size of the circular molecular screen substrate 10 is close to or consistent with that of the conventional planar disk orbital molecular screen, a truncated cone-shaped blocking ring is added to the peripheral portion of the circular molecular screen substrate 10. Therefore, the size of the assembled deformable orbital molecular screen for increasing ultra-high vacuum space is much larger than that of the conventional planar disk orbital molecular screen. When the deformable orbital molecular screen for increasing ultra-high vacuum space of an embodiment of the present invention flies on a predetermined orbit, the blocking ring can effectively prevent high-speed moving gas substances from entering the wake area of ​​the deformable orbital molecular screen for increasing ultra-high vacuum space of an embodiment of the present invention, thereby expanding the spatial volume range of the ultra-high vacuum area, which can meet the ultra-high vacuum environment required for space experiments or large-scale production and manufacturing of the epitaxial equipment 30.

[0047] Reference below Figure 18 and Figure 19 This proves that the ultra-high vacuum region volume range of the deformable orbital molecular screen for increasing the ultra-high vacuum space in the embodiment of the present invention is greatly increased compared with the conventional planar disk orbital molecular screen.

[0048] Figure 18 The ultra-high vacuum region generated by the deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention is shown. The diameter of the circular molecular screen substrate 10 is 3.7 m, the dimension from one end of the flap 20 to the other is 1.85 m, and the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 45 degrees. Theoretically verified, the shadow volume of the ultra-high vacuum region is 58.66 m 3 .

[0049] Figure 19 Schematic diagram of the ultra-high vacuum region generated by a conventional planar disk-orbital molecular screen. The diameter of the conventional planar disk-orbital molecular screen is 3.7 m. Theoretically verified, the shadow volume of the ultra-high vacuum region is 10.36 m. 3 .

[0050] In some embodiments, as Figures 1 to 2 、 Figures 7 to 10As shown, the joint surfaces between two adjacent flaps 20 form curved surfaces 201 in the thickness direction of each flap. Thus, when the deformable orbital molecular screen of this embodiment, which adds an ultra-high vacuum space, flies on a predetermined orbit, it can effectively block high-speed gaseous matter from entering the wake region through the connection between two adjacent flaps 20, thereby expanding the spatial volume of the ultra-high vacuum region and providing the ultra-high vacuum environment required for space experiments or large-scale production of epitaxial devices 30.

[0051] In some embodiments, the curved surface 201 is a stepped surface. This simplifies the connection between two adjacent flaps 20. Furthermore, when the deformable orbital molecular screen of this embodiment increases the ultra-high vacuum space, it can effectively block high-speed gaseous matter from entering the wake region through the connection between two adjacent flaps 20 when flying on a predetermined orbit. This helps expand the spatial volume of the ultra-high vacuum region and provides the ultra-high vacuum environment required for space experiments or large-scale production of epitaxial devices 30.

[0052] In some embodiments, as Figure 3 、 Figures 15 and 16 As shown, one end of the flap 20 includes a first end surface 202, which abuts against the circumferential surface of the circular molecular screen substrate 10. Thus, when the deformable orbital molecular screen with an increased ultra-high vacuum space of this embodiment flies on a predetermined orbit, it can effectively block high-speed gaseous matter from entering the wake region through the connection between the flap 20 and the circular molecular screen substrate 10, thereby facilitating the expansion of the spatial volume of the ultra-high vacuum region and providing the ultra-high vacuum environment required for space experiments or large-scale production of epitaxial devices 30.

[0053] In some embodiments, as Figure 3 、 Figures 15 to 17 As shown, the second end surface 203 is further included. The second end surface 203 is connected to the first end surface 202, for example, vertically connected, and abuts against the edge of one side of the circular molecular screen substrate 10. Thus, when the deformable orbital molecular screen with an increased ultra-high vacuum space of this embodiment flies on a predetermined orbit, it can further effectively block high-speed gaseous matter from entering the wake region through the connection between the flap 20 and the circular molecular screen substrate 10, thereby facilitating the expansion of the spatial volume of the ultra-high vacuum region and providing the ultra-high vacuum environment required for space experiments or large-scale production of the epitaxial device 30.

[0054] In some embodiments, as Figure 3 As shown, the installation angle α between each flap 20 and the circular molecular screen substrate 10 is the same, and the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 30 to 60 degrees, which can prevent gas substances from entering the epitaxial device 30 from the side, and generate vacuum as much as possible while preventing gas from entering from the side.

[0055] In some embodiments, the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 45 degrees, which can prevent gas substances from entering the epitaxial device 30 from the side, thereby maximizing the generation of vacuum and preventing gas from entering from the side.

[0056] In some embodiments, multiple flaps 20 are identical, enabling modular production of the flaps 20 and facilitating assembly with the circular molecular screen substrate 10. The number of flaps 20 is no less than five. When the number of flaps 20 is one to four, the maximum size of a single flap 20 is larger than the size of the circular molecular screen substrate 10, which violates the principle of easy portability in a rocket and makes it inconvenient to stack a single flap 20 on the circular molecular screen substrate 10.

[0057] In some embodiments, as Figures 1 to 17 As shown, a plurality of first snap-fit ​​components 103 are provided in the periphery of the circular molecular screen substrate 10, and a second snap-fit ​​component 205 is provided at one end of each of the plurality of flaps 20. The first snap-fit ​​components 103 snap-fit ​​with the corresponding second snap-fit ​​components 205. This facilitates the quick assembly of the flaps 20 and the circular molecular screen substrate 10, and the fixation is reliable. It should be noted that the number of the second snap-fit ​​components 205 on one end of each flap 20 can be reasonably determined according to actual requirements, for example, Figure 7 FIG. 2 shows that there are two second clamping components 205 on one end of a single flap 20 , which can achieve reliable fixation of the flap 20 and the circular molecular screen substrate 10 .

[0058] In some embodiments, a first mounting hole 101 and a second mounting hole 102 are opened on the circumferential surface of the circular molecular screen substrate 10, the axis of the first mounting hole 101 intersects with the axis of the second mounting hole 102, and the inner end of the first mounting hole 101 is connected to the side of the second mounting hole 102; the first snap-fit ​​component 103 is installed in the first mounting hole 101, and the first snap-fit ​​component 103 is elastically retractable and can extend into the second mounting hole 102 under its own elastic action; a third mounting hole 204 is provided on the first end face 202; the second snap-fit ​​component 205 is installed in the third mounting hole 204 and the second snap-fit ​​component 205 extends out of the third mounting hole 204, and the protruding part of the second snap-fit ​​component 205 is used to be inserted into the second mounting hole 102 to be snapped with the first snap-fit ​​component 103. Thus, one end of the flap 20 can abut against the circular molecular screen substrate 10 , and the first clamping component 103 and the second clamping component 205 can be clamped to each other, so that the flap 20 and the circular molecular screen substrate 10 can be quickly clamped and fixed.

[0059] Specifically, the first mounting hole 101 includes a large hole 1011 and a small hole 1012 that are axially connected. The large hole 1011 is located at the outer end of the small hole 1012 , and the inner end of the small hole 1012 is connected to the side of the second mounting hole 102 .

[0060] The first clamping assembly 103 includes an anti-slip plate 1031, a slider stopper 1032, a slider 1033 and a spring 1034. The anti-slip plate 1031 is fixed on the inner end wall of the large hole 1011. The slider stopper 1032 can slide through the anti-slip plate 1031 and the small hole 1012. One end of the slider stopper 1032 has a blocking portion, which is used to abut against the outer side surface of the anti-slip plate 1031 and is fixed to the slider 1033. The other end of the slider stopper 1032 is fixed to one end of the slider 1033. The spring 1034 is sleeved on the slider 1033, and both ends of the spring 1034 abut between the anti-slip plate 1031 and the slider 1033.

[0061] The second clamping assembly 205 includes a mounting seat 2051 and an insertion rod 2052. One end of the insertion rod 2052 is fixed in the third mounting hole through the mounting seat 2051, and the other end of the insertion rod 2052 is provided with a clamping head. When the other end of the insertion rod 2052 is inserted into the second mounting hole 102, the clamping head squeezes the slider 1033 when passing the other end of the slider 1033 until the clamping head completely passes the other end of the slider 1033. Driven by the spring 1034, the slider 1033 moves the slider stopper 1032 and the slider 1033 toward the insertion rod 2052 together, so that the other end of the slider 1033 is clamped with the clamping head. At this time, the limiting part abuts against the outer surface of the anti-slip plate 1031.

[0062] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A deformable orbital molecular screen for increasing ultra-high vacuum space, characterized in that: include: Circular molecular screen substrate; There are multiple flaps, and the multiple flaps are located on one side of the circular molecular screen substrate. One end of the multiple flaps is clamped and fixed along the peripheral portion of the circular molecular screen substrate, and the multiple flaps are adjacent to each other in sequence to form a truncated cone-shaped shielding ring, and the outline of each flap is no larger than the outline of the circular molecular screen substrate.

2. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 1, characterized in that: The joint surfaces between any two adjacent flaps form bending surfaces in the thickness direction of each flap.

3. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 2, characterized in that: The bending surface is a step surface.

4. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 1, characterized in that: One end of the flap includes a first end surface, and the first end surface abuts against the peripheral surface of the circular molecular screen substrate.

5. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 4, characterized in that: The device further comprises a second end face, wherein the second end face is connected to the first end face, and the second end face abuts against an edge of one side of the circular molecular screen substrate.

6. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 1, characterized in that: The installation angle between each flap and the circular molecular screen substrate is the same, and the installation angle between the flap and the circular molecular screen substrate is 30 to 60 degrees.

7. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 6, characterized in that: The installation angle between the flap and the circular molecular screen substrate is 45 degrees.

8. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 1, characterized in that: The plurality of flaps are identical, and the number of the flaps is not less than 5.

9. The deformable orbital molecular screen for increasing ultrahigh vacuum space according to claim 4, characterized in that: A plurality of first clamping assemblies are provided in the periphery of the circular molecular screen substrate, and a second clamping assembly is provided at one end of each of the plurality of flaps. The first clamping assemblies are clamped with the corresponding second clamping assemblies.

10. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 9, characterized in that: A first mounting hole and a second mounting hole are formed on the circumferential surface of the circular molecular screen substrate. The axis of the first mounting hole intersects the axis of the second mounting hole, and the inner end of the first mounting hole is connected to the side of the second mounting hole. The first clamping assembly is installed in the first mounting hole. The first clamping assembly is elastically retractable and can extend into the second mounting hole under its own elastic action. A third mounting hole is provided on the first end face; the second clamping assembly is installed in the third mounting hole and extends out of the third mounting hole, and the extending portion of the second clamping assembly is used to be inserted into the second mounting hole to be clamped with the first clamping assembly.

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