Fine adjustment objective table

Abstract

The invention discloses a fine adjustment objective table which comprises a base, a height adjusting assembly and an objective seat, the height adjusting assembly comprises a mounting seat, a supporting piece, a flexible hinge, a jacking assembly and a driving assembly, the mounting seat comprises a fixed part and a movable part, the fixed part is fixed to the base, and the fixed part and the movable part are connected through the flexible hinge; the supporting piece is arranged at the top of the movable part, the jacking assembly is arranged on the fixed part and connected with the movable part, and the driving assembly is arranged on the fixed part and movably connected with the jacking assembly; according to the fine-tuning objective table provided by the invention, the adjustment of any position and posture of the top carrier plate within a stroke range under micron precision can be realized, and high-precision mechanism control can be achieved by using a conventional servo driving motor, so that the requirement of high-precision adjustment in the field of precision machinery can be met.

Description

Technical Field

[0001] The present application belongs to the field of precision positioning, and in particular, relates to a fine-tuning stage. Background Art

[0002] Fine-tuning stages are widely used in precision positioning, micro-manipulation, optical system alignment, laser processing, micro-nano manufacturing and other fields. This type of stage can achieve high-precision adjustment, and has strong stability, good repeatability, and convenient operation. Currently, threaded fine-tuning stages and piezoelectric ceramic driven stages are widely used. Among them, the threaded fine-tuning stage has a simple structure and low cost, and is only suitable for adjustments from a few millimeters to hundreds of millimeters, which cannot meet the needs of high-precision adjustment. The piezoelectric ceramic driven stage has high positioning accuracy, fast response speed, and a small working stroke, usually in the tens of microns, but it requires an expensive drive controller, which cannot meet the needs. Summary of the invention

[0003] The purpose of the present application is to provide a fine-tuning stage that can solve at least one of the above-mentioned problems.

[0004] The embodiment of the present application provides a fine-tuning stage, comprising a base, a height adjustment assembly and a stage; a mounting seat, comprising a fixed portion and a movable portion, wherein the fixed portion is fixed on the base, the movable portion is arranged above the fixed portion, and a gap is formed between the fixed portion and the movable portion;

[0005] A flexible hinge is provided at one side of the movable part, and the fixed part and the movable part are connected by the flexible hinge; a support member is provided at the top of the movable part; a lifting assembly is provided on the fixed part and connected to the movable part, and is used to lift the movable part; a driving assembly is provided on the fixed part and is movably connected to the lifting assembly, and is used to drive the lifting assembly to reciprocate; and a loading seat is provided on the supporting member.

[0006] Therefore, the present application has at least the following beneficial effects: the driving assembly drives the lifting assembly to lift, causing the flexible hinge on one side of the movable part to deform, thereby driving the support member to change in height, and then driving the object seat fixed on the top of the support member to move, thereby adjusting and controlling the load posture.

[0007] According to some embodiments of the present application, the lifting assembly includes a cam and a cam follower, the cam is connected to the fixed part, the driving assembly is transmission-connected to the cam, the cam follower is arranged at the upper end of the cam, and the lower end of the cam follower is in contact with the cam, the movable part is provided with a connecting shaft, and the cam follower is connected to the connecting shaft.

[0008] According to some embodiments of the present application, the driving assembly includes a driving motor, a driving wheel, a driven wheel, and a rotating shaft arranged on the driving wheel and the driven wheel, the driving wheel and the driven wheel are connected to the fixed part through the rotating shaft, the output shaft of the driving motor is connected to the driving wheel, the driving wheel is meshed with the driven wheel, the rotating shaft is arranged on the fixed part, and the driving motor is used to drive the driving wheel, which drives the driven wheel to rotate through the driving wheel, thereby transmitting and driving the cam to rotate.

[0009] According to one embodiment of the present application, a cavity is provided in the flexible hinge, a plurality of arc grooves are provided on the cavity, and the flexible hinge and the movable part are integrally formed.

[0010] According to some embodiments of the present application, the fine-tuning stage also includes a pre-tensioning assembly, which includes a bolt, a spring fixing block, a bolt fixing block and a pre-tensioning spring, wherein the bolt fixing block is fixedly connected to the fixed portion, the spring fixing block is fixedly connected to the movable portion, a connecting hole is provided on the spring fixing block, the bolt passes through the connecting hole and is connected to the bolt fixing block, and the pre-tensioning spring is arranged between the bolt fixing block and the nut of the bolt.

[0011] According to some embodiments of the present application, the fine-tuning stage further includes a limiting structure, wherein the limiting structure is disposed on the fixing portion, and the limiting structure is used to limit the rotation range of the cam.

[0012] According to some embodiments of the present application, the limiting structure includes a sensor and a movable part, the sensor is arranged on the outside of the fixed part, the fixed part is provided with a limiting groove, the limiting groove corresponds to the sensor, and the movable part passes through the limiting groove and is fixed to the cam.

[0013] According to some embodiments of the present application, the outer edge contour of the cam is in the shape of an Archimedean spiral.

[0014] According to some embodiments of the present application, there are three height adjustment components, and the three height adjustment components are distributed along the circumference of the base and arranged at intervals.

[0015] According to some embodiments of the present application, the support member is a flexible Hooke's joint.

[0016] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The overall structure diagram of the fine-tuning stage provided in the embodiment of the present application;

[0018] Figure 2 An overall structural diagram of the height adjustment assembly provided in an embodiment of the present application;

[0019] Figure 3 A side structural diagram of a height adjustment assembly provided in an embodiment of the present application;

[0020] Figure 4 A side CC sectional view of the height adjustment assembly provided in an embodiment of the present application;

[0021] Figure 5 An overall structural diagram of the mounting base provided in an embodiment of the present application;

[0022] Figure 6 A front cross-sectional view of a height adjustment assembly provided in an embodiment of the present application;

[0023] Figure 7 A structural diagram of a cam provided in an embodiment of the present application;

[0024] Figure 8 A schematic diagram of the structure of the flexible hinge provided in an embodiment of the present application when it is deformed. DETAILED DESCRIPTION

[0025] The following description provides specific application scenarios and requirements of this specification, with the purpose of enabling those skilled in the art to make and use the contents of this specification. Various local modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of this specification. Therefore, this specification is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0026] The terms used herein are only used for the purpose of describing specific example embodiments and are not restrictive. For example, unless the context clearly indicates otherwise, as used herein, the singular forms "one", "an" and "the" may also include plural forms. When used in this specification, the terms "include", "comprise" and / or "contain" mean the existence of the associated integers, steps, operations, elements and / or components, but do not exclude the existence of one or more other features, integers, steps, operations, elements, components and / or groups or other features, integers, steps, operations, elements, components and / or groups may be added in the system / method. The terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.

[0027] In view of the following description, these and other features of the present specification, as well as the operation and function of the related elements of the structure, and the economy of the combination and manufacture of the parts can be significantly improved. Reference is made to the accompanying drawings, all of which form a part of this specification. However, it should be clearly understood that the drawings are for illustration and description purposes only and are not intended to limit the scope of this specification. It should also be understood that the drawings are not drawn to scale.

[0028] The present application is described in detail below through specific embodiments.

[0029] Based on the above, see Figures 1 to 8 : The embodiment of the present application provides a fine-tuning stage, including The embodiment of the present application provides a fine-tuning stage, including a base 300, a height adjustment component 200 and a carrier 100;

[0030] The height adjustment assembly 200 includes a mounting base 210, a support member 240, a flexible hinge 230, a lifting assembly 260 and a driving assembly 220. The mounting base 210 includes a fixed portion 211 and a movable portion 212. The fixed portion 211 is fixed on the base 300, and the movable portion 212 is arranged above the fixed portion 211. A gap is formed between the fixed portion 211 and the movable portion 212. When the movable portion 212 moves, the size of the gap can change.

[0031] The support member 240 is disposed at the top of the movable portion 212. Optionally, the support member 240 is a flexible Hook hinge, so that it can be used for decoupling the top carrier 100. It should be noted that the flexible Hook hinge mechanism is not completely used in the present application. Figure 2 and Figure 4 As shown in the structure, there are many types of flexible Hooke's hinge structures. You can choose a suitable Hooke's hinge and its size parameters according to the actual situation of the mechanism. The Hooke's hinge used in this application mainly considers the factor of reducing the overall height of the mechanism, and a Hooke's hinge with a relatively compact structure is selected.

[0032] The flexible hinge 230 is disposed on one side of the movable portion 212, and the fixed portion 211 and the movable portion 212 are connected via the flexible hinge 230; Figure 8The setting of the flexible hinge 230 ensures that the movable part 212 can produce positive deformation, so that the movable part 212 can move relative to the fixed part 211, so as to achieve height adjustment. That is to say, the flexible hinge 230 can be elastically deformed in a small range driven by the jacking component 260, and can return to its original position after deformation, which improves the repeatability of the mechanism and ensures accuracy. Optionally, a cavity is provided in the flexible hinge 230, and a plurality of arc grooves are provided on the cavity. The flexible hinge 230 and the movable part 212 are integrally formed. It should be noted that the figure only lists the case where the flexible hinge has four arc grooves. The cavity of the flexible hinge 230 can also be provided with T-shaped, V-shaped, bent shapes or other thinner sizes.

[0033] The lifting assembly 260 is disposed on the fixed part 211 and connected to the movable part 212 for lifting the movable part; the driving assembly 220 is disposed on the fixed part 211 and movably connected to the lifting assembly 260 for driving the lifting assembly to reciprocate; the object carrier 100 is disposed on the support member 240.

[0034] In this way, the driving component 220 drives the lifting component 260 to lift, so that the flexible hinge 230 on the movable part 212 is deformed, thereby driving the support member 240 to change in height, and then driving the object carrier 100 fixed on the top of the support member 240 to move, thereby adjusting and controlling the loading posture of the object carrier 100.

[0035] In some embodiments, the lifting assembly 260 includes a cam 261 and a cam follower 262, the cam 261 is connected to the fixed part 211, the driving assembly 220 is in transmission connection with the cam 261, the cam follower 262 is arranged at the upper end of the cam 261, and the lower end of the cam follower 262 is in contact with the cam 261, and the movable part 212 is provided with a connecting shaft 214, and the cam follower 262 is connected to the connecting shaft 214. The rotation of the cam 261 will lift the upper cam follower 262, thereby lifting the position of the movable part 212 above the mounting seat 210. At the same time, by providing the cam 261 mechanism, a larger load bearing capacity can also be achieved, which makes up for the disadvantage of the poor load of the flexible hinge 230.

[0036] Optionally, when the cam 261 rotates, its outer edge profile curve 263 contacts the cam follower 262, thereby pushing the cam follower 262 to reciprocate along a predetermined trajectory. Figure 7The outer contour curve 263 of the cam 261 is designed as an Archimedean spiral. The Archimedean spiral is a curve whose radius increases uniformly with the change of angle, so that the height of the mechanism is linearly related to the change of the rotation angle of the cam 261, thereby achieving uniform speed or uniform adjustment of the mechanism, ensuring that the radius of the cam 261 can increase or decrease uniformly with the rotation angle during the rotation process, so that the mechanism adjustment is stable. Specifically, the contour of one side of the cam 261 is an Archimedean spiral, and the other side is a transition part with a constant radius, so that only half a circle of the cam is in an effective position during actual driving.

[0037] In some embodiments, the driving assembly 220 includes a driving motor 221, a driving wheel 223, a driven wheel 224, and a rotating shaft disposed on the driving wheel 223 and the driven wheel 224. The driving wheel 223 and the driven wheel 224 are connected to the fixing portion 211 through the rotating shaft. The output shaft of the driving motor 221 is connected to the driving wheel 223, the driving wheel 223 is meshed with the driven wheel 224, and the rotating shaft is disposed on the fixing portion 211. The driving motor 221 is used to drive the driving wheel 223, and the driving wheel 223 drives the driven wheel 224 to rotate, thereby transmitting and driving the cam 261 to rotate. The driving motor 221 can be a servo motor. By providing a servo motor, its forward or reverse rotation can respectively raise and lower the height adjustment module, thereby realizing automatic control and convenient operation.

[0038] Specifically, when the servo motor drives the shaft of the driving wheel 223 to rotate through the coupling 222, the rotation of the shaft of the driving wheel 223 drives the driving wheel 223 to rotate, and then drives the driven wheel 224 engaged therewith to rotate. The rotation of the driven wheel 224 drives the cam 261 to rotate through the shaft of the driven wheel 224. When the cam 261 rotates, the height of the upper cam follower 262 is changed through the change of the outer contour. The cam follower 262 drives the upper elastic deformation part to change in height through the connecting shaft 214 of the cam follower 262, and then drives the height of the flexible Hooke's hinge fixed on it to change. The height adjustment of the entire height adjustment assembly 200 is completed, so that the flexible Hooke's hinge drives the height of the upper carrier 100 to change.

[0039] Thus, by providing a gear mechanism consisting of a driving wheel 223 and a driven wheel 224, the gear transmission is used in conjunction with the cam 261 transmission to ensure the high precision and stability of the entire mechanism, and by providing the gear mechanism part, the adjustment resolution of the mechanism is improved. In addition, the lifting assembly 260 can also directly provide a lifting rod on the driven wheel 224, and the lifting rod is lifted as the driven wheel 224 rotates, so that the rotational motion is converted into a linear motion, thereby lifting the movable part 212.

[0040] In some embodiments, if the adjustment resolution of the mechanism is not considered, the gear mechanism may not be provided, for example, the driving assembly 220 includes a driving motor 221 and a reducer, the driving motor 221 is connected to the reducer, and the output shaft of the driving motor 221 is directly connected to the cam 261. In other words, the adjustment resolution of the mechanism can be improved by replacing the gear mechanism with a reducer with a suitable reduction ratio directly added to the motor, and the cam 261 is directly driven to rotate by the servo motor.

[0041] In some embodiments, the fine-tuning stage further includes a pre-tightening assembly 250, which includes a bolt 253, a spring fixing block 252, a bolt fixing block 251 and a pre-tightening spring (not shown in the figure), the bolt fixing block 251 is fixed to the fixing portion 211, the spring fixing block 252 is fixed to the movable portion 212, a connecting hole is provided on the spring fixing block 252, the bolt 253 passes through the connecting hole and is connected to the bolt fixing block 251, and the pre-tightening spring is provided between the bolt fixing block 251 and the nut of the bolt 253. Therefore, the initial pre-tightening force of the cam 261 and the cam follower 262 can be adjusted by adjusting the tightening depth of the pre-tightening bolt 253.

[0042] In some embodiments, the fine-tuning stage further includes a limiting structure, which is disposed on the fixed portion 211 and is used to limit the rotation range of the cam 261. Optionally, the limiting structure includes a sensor 271 and a movable member 272, wherein the sensor 271 is disposed outside the fixed portion 211, and a limiting groove 213 is disposed on the fixed portion 211, the limiting groove 213 corresponds to the sensor 271, and the movable member 272 passes through the limiting groove 213 and is fixed to the cam 261.

[0043] Specifically, in this application, a photoelectric sensor can be selected as the sensor 271, and the movable part 272 is a photoelectric sensor identification sheet metal fixed at the tail of the hexagonal stud. The end of the hexagonal stud away from the tail is passed through the limit groove 213 and fixed on the cam 261. The limit groove 213 is U-shaped, and two photoelectric sensors are installed on the side of the fixed part 211. When the cam 261 rotates, it drives the identification sheet metal to move along the limit groove 213. The photoelectric sensor limits the rotation range of the cam 261 by identifying the sheet metal. In other words, when the sheet metal moves to the photoelectric switch, the photoelectric switch recognizes the signal, which represents the limit position of the movement. In addition, a grating ruler or other sensor solutions can be used as a replacement, as long as the corresponding sensor is set at a position exceeding half an arc to ensure that the cam 261 is within the working range.

[0044] When the stage is in actual use, three height adjustment components 200 can be provided. The three height adjustment components 200 are circumferentially distributed along the base 300 at intervals. The height adjustment components 200 are fixedly connected to the base 300, and the tops are fixedly connected to the stage base 100 through flexible Hooke joints, so that the height adjustment components are integrally distributed in a "pin" shape on the base 300. The interval setting enables the angles between the centerlines of the three height adjustment components 200 to be distributed at a certain angle, for example, the angle is 120°. It can be obtained from the fact that three points determine a plane that the decoupling of the three height adjustment modules and the flexible hinge can adjust the attitude of the top carrier plate. Its attitude can be understood to include three degrees of freedom, that is, including Z-direction, X-direction, and Y-direction movements. Specifically, the Z-direction displacement is vertical lifting, the X-direction rotation is left-right swing, and the Y-direction rotation is front-back swing.

[0045] Therefore, by providing three height adjustment modules with the same structure and adjusting the heights of the three height adjustment modules respectively, the entire device can realize the movement adjustment of three degrees of freedom of the stage base in the Z-direction movement, X-direction rotation, and Y-direction rotation. Further, a suitable feedback device can be added. For example, a camera is provided on the stage base 100, and the camera is used to photograph the pose of the top carrier plate, and the height adjustment component 200 is feedback-adjusted through the pose, so as to further improve the overall accuracy of the mechanism by such a method.

[0046] In a specific embodiment, assuming that the cam rotates half a turn and the radius increases uniformly by 1 mm, then when the cam rotates 1° angle, the mechanism rises about 5.6 μm. Considering the transmission ratio of the gears in the drive component, such an adjustment accuracy can reach the micron level. Therefore, the fine-tuning stage provided in this specification can realize the adjustment of any pose of the top carrier plate within the stroke range with micron accuracy. The structure is simple, and a conventional servo drive motor can be used to achieve high-precision mechanism control without additionally setting an expensive drive controller, so as to meet the requirements of high-precision adjustment in the field of precision machinery.

[0047] The specific embodiments of this specification are described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in a different order than in the embodiments and still achieve the desired result. Additionally, the processes depicted in the figures do not necessarily require a specific order or a continuous order to achieve the desired result. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0048] In addition, certain terms in this specification have been used to describe embodiments of this specification. For example, "one embodiment", "an embodiment" and / or "some embodiments" mean that a particular feature, structure or characteristic described in conjunction with the embodiment may be included in at least one embodiment of this specification. Therefore, it can be emphasized and should be understood that two or more references to "an embodiment" or "one embodiment" or "an alternative embodiment" in various parts of this specification do not necessarily refer to the same embodiment. In addition, specific features, structures or characteristics may be appropriately combined in one or more embodiments of this specification.

[0049] Finally, it should be understood that the embodiments of the application disclosed herein are explanations of the principles of the embodiments of this specification. Other modified embodiments are also within the scope of this specification. Therefore, the embodiments disclosed in this specification are only used as examples and not as limitations. Those skilled in the art can adopt alternative configurations according to the embodiments in this specification to implement the application in this specification. The embodiments of this specification are not limited to the embodiments accurately described in the application.

Claims

1. A fine-tuning stage, characterized in that: include: Base; A height adjustment assembly comprising: The mounting seat comprises a fixed portion and a movable portion, wherein the fixed portion is fixed on the base, and the movable portion is arranged above the fixed portion, and a gap is formed between the fixed portion and the movable portion; A flexible hinge, which is arranged at one side of the movable part, and the fixed part and the movable part are connected by the flexible hinge; A support member, which is arranged on the top of the movable part; A lifting assembly, which is disposed on the fixed part and connected to the movable part, and is used to lift the movable part; A driving assembly, which is disposed on the fixing portion and is movably connected to the lifting assembly, and is used to drive the lifting assembly to reciprocate; The object carrier is arranged on the supporting member.

2. The fine adjustment stage according to claim 1, characterized in that: The lifting assembly includes a cam and a cam follower, the cam is connected to the fixed part, the driving assembly is transmission-connected to the cam, the cam follower is arranged at the upper end of the cam, and the lower end of the cam follower is in contact with the cam, the movable part is provided with a connecting shaft, and the cam follower is connected to the connecting shaft.

3. The fine adjustment stage according to claim 2, characterized in that: The driving assembly includes a driving motor, a driving wheel, a driven wheel and a rotating shaft arranged on the driving wheel and the driven wheel, the driving wheel and the driven wheel are connected to the fixed part through the rotating shaft, the output shaft of the driving motor is connected to the driving wheel, the driving wheel is meshed with the driven wheel, the rotating shaft is arranged on the fixed part, the driving motor is used to drive the driving wheel, and the driven wheel is driven to rotate through the driving wheel, thereby transmitting and driving the cam to rotate.

4. The fine-tuning stage according to claim 1, characterized in that: A cavity is provided in the flexible hinge, a plurality of arc grooves are provided on the cavity, and the flexible hinge and the movable part are integrally formed.

5. The fine adjustment stage according to claim 1, characterized in that: It also includes a pre-tightening component, which includes a bolt, a spring fixing block, a bolt fixing block and a pre-tightening spring. The bolt fixing block is fixedly connected to the fixing part, and the spring fixing block is fixedly connected to the movable part. A connecting hole is provided on the spring fixing block, and the bolt passes through the connecting hole to be connected to the bolt fixing block. The pre-tightening spring is arranged between the bolt fixing block and the nut of the bolt.

6. The fine adjustment stage according to claim 2, characterized in that: It also includes a limiting structure, which is arranged on the fixing portion and is used to limit the rotation range of the cam.

7. The fine adjustment stage according to claim 6, characterized in that: The limiting structure includes a sensor and a movable part. The sensor is arranged outside the fixed part. The fixed part is provided with a limiting groove, the limiting groove corresponds to the sensor, and the movable part passes through the limiting groove and is fixed to the cam.

8. The fine-tuning stage according to claim 2, characterized in that: The outer edge contour line of the cam is in the shape of an Archimedean spiral.

9. The fine adjustment stage according to claim 1, characterized in that: There are three height adjustment components, and the three height adjustment components are distributed along the circumference of the base and arranged at intervals.

10. The fine adjustment stage according to claim 1, characterized in that: The support member is a flexible Hooke's hinge.

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