Methods and systems for calibrating the dimensions of printed graphics, photomasks, equipment and storage media

Abstract

A method and system for calibrating the size of a graphic layout, a mask, an apparatus, and a storage medium are disclosed. The method includes: acquiring a layout layer, the layout layer including a first graphic extending along a first direction and multiple second graphics spanning the first graphic; dividing the layout layer into multiple graphic density regions according to graphic density; acquiring a processing unit composed of the multiple second graphics and the first graphic spanning the second graphics, the processing unit completely covering the first and second graphics, and the boundary of the combined graphic formed by the first and second graphics coinciding with the boundary of the processing unit; acquiring the processing unit with the boundary of the graphic density region as a calibration unit; redefining the graphic density region of the calibration unit according to the division of the calibration unit based on the boundary of the graphic density region; and performing size compensation processing on the graphic corresponding to each graphic density region according to the processing result after the graphic density region redefinition processing. This invention is beneficial for improving the efficiency of graphic density region redefinition processing.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a layout pattern size calibration method and system, a mask, an apparatus, and a storage medium. Background Technology

[0002] With the dramatic advancements in semiconductor chip manufacturing technology over the past few years, semiconductor chip foundries must handle more complex situations, most of which are entirely new to their knowledge and experience. Controlling variations in critical dimensions (CD) requires extremely high precision to ensure proper equipment operation, especially at the front end of layers (FEOL).

[0003] Current methods for OPC (Optical Proximity Correction) CD compensation mainly focus on two parameters: OPC model error and etch bias loading. Recently, a new relationship between CD and local density has been discovered in FEOL layers. However, this also presents new challenges. Summary of the Invention

[0004] The problem solved by the embodiments of the present invention is to provide a method and system for calibrating the size of a layout graphic, a mask, an equipment and a storage medium, which improves the optical proximity correction effect while saving process costs.

[0005] To address the aforementioned problems, this invention provides a method for calibrating the size of a graphic layout, comprising: acquiring a layout layer, the layout layer including a first graphic extending along a first direction and multiple second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; dividing the layout layer into multiple graphic density zones according to graphic density; acquiring a processing unit composed of the multiple second graphics and the first graphic spanning the second graphics, the processing unit being rectangular or a combination of multiple rectangles, the processing unit completely covering the first and second graphics, and the boundary of the combined graphic formed by the first and second graphics coinciding with the boundary of the processing unit; acquiring the processing unit with the boundary of the graphic density zone as a calibration unit; redefining the graphic density zone of the calibration unit according to the division of the calibration unit by the boundary of the graphic density zone; and after redefining the graphic density zone, performing size compensation processing on the graphics corresponding to each graphic density zone according to the processing result.

[0006] Accordingly, this invention also provides a layout graphic size calibration system, comprising: a layout layer acquisition module for acquiring a layout layer, the layout layer including a first graphic extending along a first direction and multiple second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; a graphic density area acquisition module for dividing the layout layer into multiple graphic density areas according to graphic density; a processing unit acquisition module for acquiring multiple second graphics and a processing unit composed of the first graphic spanning the second graphics, the processing unit being rectangular or a combination of multiple rectangles, the processing unit completely covering the first graphic and the second graphic, and the boundary of the combined graphic formed by the first graphic and the second graphic coinciding with the boundary of the processing unit; a calibration unit acquisition module for acquiring processing units with boundaries of graphic density areas as calibration units; a redefinition processing module for redefining the graphic density areas of the calibration units according to the division of the calibration units by the boundaries of the graphic density areas; and a size compensation module for performing size compensation processing on the graphics corresponding to each graphic density area after the graphic density area redefinition processing, based on the processing result.

[0007] Accordingly, embodiments of the present invention also provide a mask, including a pattern obtained using the pattern size calibration method provided in embodiments of the present invention.

[0008] Accordingly, embodiments of the present invention also provide an apparatus, including at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the layout graphic size calibration method provided in embodiments of the present invention.

[0009] Accordingly, embodiments of the present invention also provide a storage medium storing one or more computer instructions, which are used to implement the layout graphic size calibration method provided in embodiments of the present invention.

[0010] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0011] In the layout graphic size calibration method provided in this embodiment of the invention, a processing unit with the boundary of the graphic density region is obtained as a calibration unit. According to the division of the calibration unit by the boundary of the graphic density region, the graphic density region redefinition processing is performed on the calibration unit. After the graphic density region redefinition processing, the size compensation processing is performed on the graphic corresponding to each graphic density region according to the processing result. The first graphic and the second graphic are combined into a processing unit, and the processing unit with the boundary of the graphic density region is selected as the calibration unit. By redefining the graphic density region based on the calibration unit, it is beneficial to make the result of redefining the graphic density region of the layout layer smoother, and reduce the probability of excessive jumps in the size compensation of the first graphic and the second graphic based on the graphic density region redefinition result, improve the balance of the graphic after the graphic size compensation processing, and also improve the efficiency of the graphic density region redefinition processing. Attached Figure Description

[0012] Figure 1 This is a flowchart of an embodiment of the layout graphic size calibration method of the present invention;

[0013] Figures 2 to 25 This is a schematic diagram of each step in one embodiment of the layout graphic size calibration method of the present invention;

[0014] Figure 26 This is a functional block diagram of an embodiment of the layout graphic size calibration system of the present invention;

[0015] Figure 27 This is a hardware structure diagram of an embodiment of the device provided by the present invention. Detailed Implementation

[0016] As can be seen from the background technology, the size compensation of graphics in the plate layer in the existing technology is too abrupt, making it difficult to achieve good balance of graphics in the plate layer after the graphic size compensation processing.

[0017] To address the aforementioned technical problem, embodiments of the present invention provide a method for calibrating the dimensions of a layout graphic. (Reference) Figure 1 The flowchart illustrates an embodiment of the layout graphic size calibration method of the present invention.

[0018] In this embodiment, the layout graphic size calibration method includes the following basic steps:

[0019] Step S1: Obtain the plate layer, which includes a first graphic extending along a first direction and multiple second graphics spanning the first graphic. The second graphics extend along a second direction and are arranged parallel to the first direction, with the second direction perpendicular to the first direction.

[0020] Step S2: Divide the plate layer into multiple graphic density zones according to graphic density;

[0021] Step S3: Obtain a processing unit consisting of multiple second graphics and a first graphic that the second graphics span. The shape of the processing unit is a rectangle or a combination of multiple rectangles. The processing unit completely covers the first graphics and the second graphics, and the boundary of the combined graphic formed by the first graphics and the second graphics coincides with the boundary of the processing unit.

[0022] Step S4: Obtain the processing unit with the boundary of the graphic density region as the calibration unit;

[0023] Step S5: Redefine the pattern density region of the calibration unit according to the division of the calibration unit based on the boundary of the pattern density region;

[0024] Step S6: After redefining the graphic density region, perform size compensation processing on the graphics corresponding to each graphic density region based on the processing results.

[0025] To make the above-mentioned objects, features and advantages of the embodiments of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0026] Figures 2 to 25 This is a schematic diagram of each step in one embodiment of the layout graphic size calibration method of the present invention.

[0027] refer to Figure 2 Step S1: Obtain plate layer 100, plate layer 100 includes the following along the first direction (e.g., Figure 2 A first graphic 110 extending in the X direction, and a plurality of second graphics 120 spanning the first graphic 110, the second graphics 120 being along a second direction (as shown in the X direction). Figure 1 (As shown in the Y direction) Extends and is arranged parallel to the first direction, and the second direction is perpendicular to the first direction.

[0028] The pattern in layer 100 is the target pattern to be transferred onto the wafer. After optical proximity correction is performed on the pattern in layer 100, the obtained pattern is used to create a photomask, which is then used for photolithography to form the corresponding photomask pattern on the wafer.

[0029] In this embodiment, the first pattern 110 is an active region pattern, and the second pattern 120 is a gate structure pattern.

[0030] Reference Figure 3 and Figure 4 Step S2: Divide the printed layer 100 into multiple graphic density areas according to the graphic density.

[0031] The pattern layer 100 is the current pattern layer, and its pattern density is the same as that of the previous pattern layer. Based on the pattern density of the previous pattern layer, compensation is made for the formation of the current pattern. Specifically, the second pattern 120 corresponds to the formation of the gate structure (GT, gate) on the wafer. The pattern density refers to the pattern density of the gate core layer (GM, gate mandrel) of the previous pattern layer. The gate core layer is formed using SADP process in the previous pattern layer. Based on the pattern density of the gate core layer, pattern compensation is performed on the current pattern layer in the gate structure.

[0032] It should be noted that the method for dividing the graphic density area is usually as follows: take a certain point as the center point to divide the measurement area, obtain the graphic density area of ​​the previous layer corresponding to the second graphic 120 in the measurement area, and obtain the graphic density area division of the entire layer 100 accordingly.

[0033] Execution step S3: Obtain a processing unit 100a consisting of multiple second graphics 120 and a first graphics 110 spanned by the second graphics 120. The processing unit 100a is rectangular or a combination of multiple rectangles. The processing unit 100a completely covers the first graphics 110 and the second graphics 120, and the boundary of the combined graphic formed by the first graphics 110 and the second graphics 120 coincides with the boundary of the processing unit 100a.

[0034] Processing unit 100a serves as the base area for selecting calibration units. Processing unit 100a completely covers the first graphic 110 and the second graphic 120, and the boundary of the combined graphic formed by the first graphic 110 and the second graphic 120 coincides with the boundary of processing unit 100a. This makes processing unit 100a a rectangle or a combination of multiple rectangles that exactly contains the first graphic 110 and the second graphic 120. This is beneficial for making full use of the area of ​​processing unit 100a, minimizing the area of ​​processing unit 100a, and reducing subsequent computing power.

[0035] Figure 2 The processing unit 100a is indicated by a diagonal line filling the area. For clarity, the other figures do not fill the processing unit 100a and instead indicate it with a dashed box.

[0036] In this embodiment, in the processing unit 100a that acquires multiple second graphics 120 and the first graphics 110 that the second graphics 120 span, the processing unit 100a in the page layer 100 can be a rectangle or a combination of multiple rectangles (e.g., Figure 4 (As shown).

[0037] Step S4: Obtain the processing unit 100a with the boundary of the graphic density region as the calibration unit 100c.

[0038] The calibration unit 100c has a boundary of the pattern density region, which is used as the area for pattern density region redefinition processing.

[0039] In this embodiment, when the processing unit 100a is a combination of multiple rectangles, the processing unit 100a with the boundary of the graphic density region is used as the calibration unit 100c. Using the straight line perpendicular to the boundary of the processing unit 100a of the graphic density region, the processing unit 100a is divided into multiple rectangular units along the extension direction of the boundary of the graphic density region. Each rectangular unit serves as the calibration unit 100c (e.g., ...). Figure 4 (As shown).

[0040] The processing unit 100a is divided into multiple calibration units 100c along the extension direction of the boundary of the pattern density region, so that the subsequent processing of the calibration unit 100c is more uniform.

[0041] Reference Figures 5 to 18 Step S5: Based on the division of the calibration unit 100c according to the boundary of the pattern density area, redefine the pattern density area of ​​the calibration unit 100c.

[0042] For clarity, the two pattern density regions in calibration unit 100c are indicated by D1 and D2 in the attached diagram.

[0043] The pattern of a calibration unit 100c corresponds to an active region and a gate structure spanning the same active region on the wafer. Therefore, a calibration unit 100c is usually a unified device region. When there is a boundary of the pattern density region in the calibration unit 100c, redefining the pattern density region of the calibration unit 100c is beneficial to make the pattern compensation in a unified device region more uniform.

[0044] In this embodiment, the graphic density area redefinition process refers to redefining and dividing the graphic density area in the calibration unit 100c. Accordingly, subsequent graphic compensation is based on the redefined graphic density area.

[0045] In this embodiment, the first graphic 110 and the second graphic 120 are combined to form a processing unit 100a, and the processing unit 100a with the boundary of the graphic density area is selected as the calibration unit 100c. By performing graphic density area redefinition processing based on the calibration unit 100c, it is beneficial to make the result of redefining the graphic density area of ​​the plate layer 100 smoother, and reduce the probability of excessive jump in size compensation of the first graphic 110 and the second graphic 120 based on the graphic density area redefinition result, thereby improving the balance of the graphic after graphic size compensation processing. Moreover, it is also beneficial to improve the efficiency of graphic density area redefinition processing.

[0046] In this embodiment, the calibration unit 100c is redefined based on the division of the calibration unit 100c by the boundary of the graphic density region. This includes: obtaining the boundary of the graphic density region located in the calibration unit 100c as the target boundary 100b; obtaining the calibration unit 100c covered by the target boundary 100b translated along its vertical direction as the target calibration unit; and redefining the graphic density region of the target calibration unit according to the division of the target calibration unit by the target boundary 100b.

[0047] Specifically, such as Figure 9 As shown, when the target boundary 100b extends only in one direction, the calibration unit 100c covered by the translation of the target boundary 100b along its perpendicular direction is taken as the target calibration unit, i.e., calibration unit 100c. Figure 6 As shown, when the target boundary 100b extends along two perpendicular directions, the calibration unit 100c covered by the target boundary 100b translated along its perpendicular direction is obtained as the target calibration unit, which is the part of the calibration unit 100c covered by the sparse point filling layer and the dense point filling layer in the figure.

[0048] In this embodiment, the processing unit 100a that acquires the boundary of the graphic density region is used as the calibration unit 100c. The boundary of the graphic density region includes a first boundary extending along a first direction or a second boundary extending along a second direction.

[0049] Accordingly, in this embodiment, the boundary of the pattern density region located in the calibration unit 100c is obtained as the target boundary 100b, and the first boundary or the second boundary located in the calibration unit 100c is obtained as the target boundary 100b. That is, when the boundary of the pattern density region includes a first boundary extending along a first direction or a second boundary extending along a second direction, the target boundary 100b extends along the first direction or the second direction.

[0050] In this embodiment, as Figure 5 As shown, in the calibration unit 100c, the processing unit 100a that acquires the boundary of the pattern density region includes a first boundary extending along a first direction and a second boundary extending along a second direction.

[0051] Accordingly, in this embodiment, the redefinition of the pattern density region of the calibration unit 100c is performed twice during the pattern density region redefinition process based on the division of the pattern density region. Since the boundary of the pattern density region includes a first boundary extending along a first direction and a second boundary extending along a second direction, it is necessary to redefine the pattern density region based on both the first and second boundaries. Therefore, in this embodiment, two redefinition processes are performed.

[0052] Specifically, in this embodiment, as Figure 6 As shown, in the first redefinition process, the boundary of the graphic density region located in the calibration unit 100c is obtained as the target boundary 100b, and either the first boundary or the second boundary located in the calibration unit 100c is taken as the target boundary 100b.

[0053] In this embodiment, the second boundary extending along the second direction is first used as the target boundary 100b.

[0054] In this embodiment, during the second redefinition process, the boundary of the graphic density region located in the calibration unit 100c is obtained as the target boundary 100b, and the target boundary 100b is updated based on the result of the first redefinition process. Updating the target boundary 100b based on the result of the first redefinition process allows for real-time adjustments to the second redefinition process based on the specific processing conditions of the graphic density region redefinition process, thus making the result of the second redefinition process more accurate.

[0055] Specifically, in this embodiment, updating the target boundary based on the result of the first redefinition process includes: when the result of the first graphic density region redefinition process is that the original graphic density region of the target calibration unit remains unchanged, obtaining the other of the first and second boundaries located in the calibration unit 100c as the target boundary 100b. For example... Figure 8 As shown, when the result of the first pattern density region redefinition process is that the original pattern density region of the target calibration unit remains unchanged, the second boundary extending along the second direction is used as the target boundary 100b for the second redefinition process.

[0056] In this embodiment, when the result of the first graphic density region redefinition process is the merging of graphic density regions of the target calibration unit, the boundary between the merged graphic density region and the remaining graphic density regions in the calibration unit 100c is obtained as the target boundary 100b. For example... Figure 7 As shown, when the result of the first pattern density region redefinition process is the merging of the pattern density regions of the target calibration unit, the portion of the straight line containing the second boundary extending along the second direction in the calibration unit 100c is taken as the target boundary 100b.

[0057] Reference Figures 9 to 18 Based on the division of the target calibration unit according to the target boundary 100b, the target calibration unit is redefined according to the corresponding graphic density region, including: obtaining the size of the target calibration unit along the first direction as the first size L1 and the size along the second direction as the second size L2.

[0058] Specifically, in conjunction with reference Figure 9 and Figure 10When both the first size L1 and the second size L2 are less than or equal to the size threshold, the area of ​​the two pattern density regions divided by the target boundary 100b of the target calibration unit is obtained, the pattern density region with the larger area is the first pattern density region, and the pattern density region with the smaller area is the second pattern density region; the first pattern density region and the second pattern density region are merged into the first pattern density region.

[0059] Redefining the smaller second pattern density region as the larger first pattern density region helps to reduce the area of ​​modification to the pattern density region in the target calibration unit, and helps to reduce the density region difference between the target calibration unit and the original calibration unit 100c after the redefinition process, thereby improving the uniformity of the pattern after pattern size compensation.

[0060] Reference Figures 11 to 14 ,as well as Figure 17 and Figure 18 When the first size L1 or the second size L2 is greater than the size threshold and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit, or when both the first size L1 and the second size L2 are greater than the size threshold, the distances d1 and d2 between the two boundaries extending in the same direction as the target boundary 100b and the target calibration unit are obtained; a pattern density area with a distance less than n times the size threshold is selected as the second pattern density area, and another pattern density area is selected as the first pattern density area; the first pattern density area and the second pattern density area are merged into the first pattern density area; when both distances are greater than or equal to n times the size threshold, no processing is performed on the target calibration unit, where n equals 0.5.

[0061] Specifically, Figure 11 and Figure 12 This illustrates the case where the first size L1 is greater than a size threshold, and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit. Figure 13 and Figure 14 This illustrates the case where the second dimension L2 is greater than the dimension threshold, and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit. Figure 17 and Figure 18 This illustrates the case where either the first dimension L1 or the second dimension L2 is greater than the dimension threshold.

[0062] Redefining the narrower second pattern density region as the wider first pattern density region helps to reduce the area of ​​modification to the pattern density region in the target calibration unit, and helps to reduce the density region difference between the target calibration unit and the original calibration unit 100c after the redefinition process, thereby improving the uniformity of the pattern after pattern size compensation.

[0063] Reference Figure 15 and Figure 16When either the first size L1 or the second size L2 is greater than a size threshold, the other is less than or equal to a size threshold, and the extension direction of the target boundary 100b is parallel to the long side of the target calibration unit, the areas of the two pattern density regions divided by the target boundary 100b of the target calibration unit are obtained, and the distance between the two boundaries extending in the same direction as the target boundary 100b and the target calibration unit is obtained; a pattern density region with a distance less than n times the size threshold and an area less than n times the area of ​​the target calibration unit is selected as the second pattern density region, and the other pattern density region is selected as the first pattern density region; the first pattern density region and the second pattern density region are merged into the first pattern density region, where n equals 0.5.

[0064] Redefining the second pattern density region, which has a smaller area and a narrower width, as the first pattern density region, which has a larger area and a wider width, and taking both area and width into account, helps to reduce the area of ​​modification to the pattern density region in the target calibration unit. This also helps to reduce the density region difference between the target calibration unit and the original calibration unit 100c after the redefinition process, and improves the uniformity of the pattern after pattern size compensation.

[0065] Reference Figures 19 to 23 Based on the division of the calibration unit according to the boundary of the pattern density region, after redefining the pattern density region of the calibration unit, the method further includes: when the calibration unit 100c still has the boundary of the pattern density region, determining whether the boundary of the pattern density region divides the first pattern 110 or the second pattern 120.

[0066] Based on the judgment result of whether the boundary of the graphic density region divides the first graphic 110 or the second graphic 120, we can determine whether to perform subsequent graphic re-division processing.

[0067] Specifically, in this embodiment, if so, the first graphic 110 or the second graphic 120 is re-divided; otherwise, the graphic density area of ​​the calibration unit 100c is left unprocessed.

[0068] If so, the boundary of the graphic density region still affects the formation of the current layer graphic that is compensated based on the first graphic 110 or the second graphic 120. Therefore, performing graphic re-division processing on the first graphic 110 or the second graphic 120 is beneficial to reduce the uniformity of the formation of the current layer graphic that is compensated based on the same first graphic 110 or the second graphic 120, and improve the balance of the graphic after graphic size compensation processing.

[0069] Reference Figure 19 and Figure 20In the calibration unit 100c, there is also a boundary of a pattern density region. When the boundary of the pattern density region extends along the first direction, it is determined whether the boundary of the pattern density region divides the first pattern 110 or the second pattern 120. This includes: determining whether the boundary of the pattern density region divides the first pattern 110; if so, the pattern re-division process includes: obtaining the area of ​​the two regions of the first pattern 110 divided by the boundary of the pattern density region; and translating the boundary of the pattern density region along its vertical direction to coincide with the boundary of the first pattern of the smaller area.

[0070] Shifting the boundary of the graphic density region along its vertical direction to coincide with the boundary of the first graphic region with a smaller area helps to reduce the area of ​​modification to the density region of the first graphic 110, and helps to reduce the graphic re-division process and improve the balance of the graphic after graphic size compensation processing.

[0071] Reference Figures 21 to 23 In the calibration unit 100c, there is also a boundary of the pattern density area. When the boundary of the pattern density area extends along the first direction, it is determined whether the boundary of the pattern density area divides the first pattern 110 or the second pattern 120. This includes: determining whether the boundary of the pattern density area divides the second pattern 120; if so, the pattern re-division process includes: unifying the pattern density area of ​​the second pattern 120 into the same pattern density area according to the division of the second pattern 120 by the boundary of the pattern density area.

[0072] Based on the division of the second graphic 120 according to the boundary of the graphic density area, the graphic density areas of the second graphic 120 are unified into the same graphic density area. This helps to reduce the graphic re-division process and improve the balance of the graphic after graphic size compensation processing.

[0073] Specifically, in this embodiment, the second graphic 120 is divided into the same graphic density region according to the boundary of the graphic density region. This includes: obtaining the size of the second graphic 120 along the first direction as the third size d0.

[0074] In this embodiment, when the third dimension d0 is less than the dimension threshold, or when the boundary of the graphic density region extends only along the second direction, the graphic density region of the second graphic 120 is unified into the same graphic density region based on the area of ​​the region divided by the boundary of the graphic density region.

[0075] In this embodiment, when the third size d0 is greater than or equal to the size threshold, and the boundary of the graphic density region includes the first graphic boundary along the first direction and the second graphic boundary extending along the second direction, the graphic density region of the second graphic is unified into the same graphic density region according to the division area of ​​the second graphic by the first graphic boundary and the second graphic boundary, respectively.

[0076] Specifically, refer to Figure 22 Based on the area of ​​the regions divided by the boundaries of the graphic density regions, the graphic density regions of the second graphic 120 are unified into a single graphic density region. This includes: obtaining the areas of the two regions of the second graphic 120 divided by the boundaries of the graphic density regions (e.g., ...). Figure 22 (Sparse and dense fill points); unify the graphic density area of ​​the second graphic 120 to the same graphic density area as the larger area in the two regions.

[0077] Unifying the graphic density area of ​​the second graphic 120 to the same graphic density area as the larger area in the two regions helps to reduce the area of ​​modification of the graphic density area in the second graphic 120, helps to reduce the density area difference in the second graphic 120 after re-division processing, and improves the balance of the graphic after graphic size compensation processing.

[0078] In this embodiment, the graphic density areas of the second graphic 120 are unified into the same graphic density area based on the segmented areas of the first graphic boundary and the second graphic boundary, respectively. This includes: using either the first graphic boundary or the second graphic boundary as the first target graphic boundary, and using the second graphic 120 covered by the first target graphic boundary translated along its vertical direction as the first target graphic; obtaining the areas of the two regions of the first target graphic segmented by the first target graphic boundary (e.g., ...). Figure 22 (As shown); unify the graphic density region of the first target graphic to the same graphic density region as the region with the larger area in the two regions; use the boundary between the first target graphic and the remaining second graphics as the boundary of the second target graphic; obtain the area of ​​the two regions of the second graphic divided by the boundary of the second target graphic (e.g., Figure 23 (as shown); unify the graphic density area of ​​the second graphic to the same graphic density area as the larger area of ​​the two regions.

[0079] Using area as the metric for re-division helps to reduce the area of ​​change in the density region of the second graphic 120, and helps to reduce the density region difference in the second graphic 120 after re-division, thereby improving the balance of the graphic after the size compensation process.

[0080] In this embodiment, before redefining the graphic density region of the calibration unit 100c according to the division of the graphic density region, the method further includes: obtaining the width of the smallest graphic density region in the plate layer 100 as a size threshold.

[0081] Using the width of the smallest graphic density area in plate layer 100 as a size threshold helps reduce the jumpiness of graphic density areas and improve the smoothness of graphic density in the entire plate layer 100.

[0082] Reference Figure 24 and Figure 26 After redefining the graphic density regions, before performing size compensation processing on the graphics corresponding to each graphic density region based on the processing results, the process also includes: selecting the graphic density region surrounded by adjacent graphic density regions as the corrected graphic density region; obtaining the width dimension d3 of the corrected graphic density region (e.g., ...). Figure 24 (as shown); when the width dimension d3 is less than the size threshold, the corrected graphic density region is merged into its adjacent graphic density region (as shown). Figure 25 (As shown); when the width dimension d3 is greater than or equal to the dimension threshold, no processing is performed on the correction graphic density area.

[0083] When the width dimension d3 is less than the size threshold, the graphic density area is too small, which can easily cause jumps in the graphic density area. Merging the corrected graphic density area into its adjacent graphic density area is beneficial to improving the smoothness of the graphic density of the entire layer 100.

[0084] It should be noted that after the graphic density region is redefined using the processing unit 100a as a unit, the graphic density region located outside the processing unit 100a and connected to the processing unit 100a is not redefined. Therefore, it is easy to leave a density region with a width dimension d3 smaller than the size threshold.

[0085] Step S6: After redefining the graphic density area, perform size compensation processing on the graphics corresponding to each graphic density area based on the processing results.

[0086] Specifically, the pattern layer 100 is the previous pattern layer. Based on the pattern density area of ​​the previous pattern layer, compensation is made for the formation of the pattern in the current layer. Specifically, the pattern density refers to the pattern density of the second pattern 120. The second pattern 120 corresponds to the formation of the gate structure on the wafer. The gate structure is formed using SADP process. The second pattern 120 is the core layer in SADP process. Based on the pattern density of the core layer, sidewall layers located on both sides of the core layer are formed in the current layer for pattern compensation.

[0087] Accordingly, the present invention also provides an optical proximity correction system. Figure 26 This is a functional block diagram of an embodiment of the optical proximity correction system of the present invention.

[0088] In this embodiment, the optical proximity correction system 50 includes: a plate layer acquisition module 501, used to acquire a plate layer, the plate layer including a first graphic extending along a first direction and multiple second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; a graphic density area acquisition module 502, used to divide the plate layer into multiple graphic density areas according to the graphic density; a processing unit acquisition module 503, used to acquire multiple second graphics and a processing unit composed of the first graphic spanning the second graphics, the processing unit being rectangular or a combination of multiple rectangles, the processing unit completely covering the first graphic and the second graphic, and the boundary of the combined graphic formed by the first graphic and the second graphic coinciding with the boundary of the processing unit; a calibration unit acquisition module 504, used to acquire the processing unit with the boundary of the graphic density area as a calibration unit; a redefinition processing module 505, used to redefine the graphic density area of ​​the calibration unit according to the division of the calibration unit by the boundary of the graphic density area; and a size compensation module 506, used to perform size compensation processing on the graphic corresponding to each graphic density area according to the processing result after the graphic density area redefinition processing.

[0089] The pattern on the lithography layer is the target pattern to be transferred onto the wafer. After optical proximity correction is performed on the pattern on the lithography layer, the resulting pattern is used to create a photomask, which is then used for photolithography to form the corresponding mask pattern on the wafer.

[0090] In this embodiment, the first pattern is an active region pattern, and the second pattern is a gate structure pattern.

[0091] The graphic density area acquisition module 502 is used to divide the printed layer into multiple graphic density areas according to the graphic density.

[0092] The pattern layer is the current pattern layer, and the pattern density is the pattern density of the previous pattern layer. Based on the pattern density of the previous pattern layer, compensation is made for the formation of the current pattern. Specifically, the second pattern corresponds to the formation of the gate structure (GT, gate) on the wafer. The pattern density refers to the pattern density of the gate core layer (GM, gate mandrel) of the previous pattern layer. The previous pattern layer uses SADP process to form the gate core layer. Based on the pattern density of the gate core layer, pattern compensation is performed on the current pattern layer in the gate structure.

[0093] It should be noted that the method for dividing the graphic density area is usually as follows: take a certain point as the center point to divide the measurement area, obtain the graphic density area of ​​the previous layer corresponding to the second graphic in the measurement area, and thus obtain the graphic density area division of the entire layer.

[0094] The processing unit acquisition module 503 is used to acquire multiple second graphics and a processing unit consisting of a first graphic that the second graphics cross. The processing unit is rectangular or a combination of multiple rectangles. The processing unit completely covers the first graphic and the second graphic, and the boundary of the combined graphic formed by the first graphic and the second graphic coincides with the boundary of the processing unit.

[0095] The processing unit serves as the base area for selecting calibration units. The processing unit completely covers the first and second graphics, and the boundary of the combined graphic formed by the first and second graphics coincides with the boundary of the processing unit. This makes the processing unit a rectangle or a combination of rectangles that exactly contains the first and second graphics. This is beneficial for making full use of the area of ​​the processing unit, minimizing the area of ​​the processing unit, and reducing subsequent computing power.

[0096] In this embodiment, in the processing unit that acquires multiple second graphics and the first graphics that the second graphics span, the processing unit in the plate layer can be a rectangle or a combination of multiple rectangles.

[0097] The calibration unit acquisition module 504 is used to acquire the processing unit with the boundary of the graphic density region as the calibration unit.

[0098] The calibration unit has the boundary of the pattern density region, which is used as the area for pattern density region redefinition processing.

[0099] In this embodiment, when the processing unit is a combination of multiple rectangles, the processing unit with the boundary of the graphic density area is used as the calibration unit. The processing unit is divided into multiple rectangular units along the extension direction of the boundary of the graphic density area by the straight line of the boundary of the processing unit perpendicular to the boundary of the graphic density area, and each rectangular unit serves as a calibration unit.

[0100] The processing unit is divided into multiple calibration units along the extension direction of the boundary of the pattern density region, so that the subsequent processing of the calibration units is more uniform.

[0101] The redefinition processing module 505 is used to redefine the graphic density region of the calibration unit according to the division of the calibration unit by the boundary of the graphic density region.

[0102] The pattern of a calibration cell corresponds to an active region and a gate structure spanning the same active region on the wafer. Therefore, a calibration cell is usually a unified device region. When there is a boundary of pattern density region in the calibration cell, redefining the pattern density region of the calibration cell helps to make the pattern compensation in a unified device region more uniform.

[0103] In this embodiment, the graphic density region redefinition process refers to redefining and dividing the graphic density region in the calibration unit. Accordingly, subsequent graphic compensation is based on the redefined graphic density region.

[0104] In this embodiment, the first graphic and the second graphic are combined into a processing unit, and the processing unit with the boundary of the graphic density area is selected as the calibration unit. By performing graphic density area redefinition processing based on the calibration unit, it is beneficial to make the result of redefining the graphic density area of ​​the plate layer smoother, and reduce the probability of excessive jumps in size compensation of the first graphic and the second graphic based on the graphic density area redefinition result, thereby improving the balance of the graphic after graphic size compensation processing. Moreover, it is also beneficial to improve the efficiency of graphic density area redefinition processing.

[0105] In this embodiment, the calibration unit is redefined based on the boundary of the graphic density region. This includes: obtaining the boundary of the graphic density region in the calibration unit as the target boundary; obtaining the calibration unit covered by the target boundary translated along its vertical direction as the target calibration unit; and redefining the graphic density region of the target calibration unit according to the boundary of the target calibration unit.

[0106] Specifically, when the target boundary extends in only one direction, the calibration unit covered by the target boundary translated along its perpendicular direction is taken as the target calibration unit. When the target boundary extends in two perpendicular directions, the calibration unit covered by the target boundary translated along its perpendicular direction is taken as the target calibration unit. This is the partial calibration unit covered by the sparse point filling layer and the dense point filling layer in the figure.

[0107] In this embodiment, the processing unit that acquires the boundary of the graphic density region is used as a calibration unit. The boundary of the graphic density region includes a first boundary extending along a first direction or a second boundary extending along a second direction.

[0108] Accordingly, in this embodiment, the boundary of the pattern density region located in the calibration unit is obtained as the target boundary, and the first boundary or the second boundary located in the calibration unit is obtained as the target boundary. That is, when the boundary of the pattern density region includes a first boundary extending along a first direction or a second boundary extending along a second direction, the target boundary extends along the first direction or the second direction.

[0109] In this embodiment, the processing unit that acquires the boundary of the graphic density region is used as the calibration unit. The boundary of the graphic density region includes a first boundary extending along a first direction and a second boundary extending along a second direction.

[0110] Accordingly, in this case, in this embodiment, the calibration unit is divided according to the boundary of the graphic density region, and two redefinition processes are performed during the graphic density region redefinition process of the calibration unit.

[0111] Since the boundary of the graphic density region includes a first boundary extending along a first direction and a second boundary extending along a second direction, the graphic density region needs to be redefined based on the first boundary and the second boundary respectively. Therefore, in this embodiment, two redefinition processes are performed.

[0112] Specifically, in this embodiment, during the first redefinition process, the boundary of the graphic density region located in the calibrated unit is obtained as the target boundary, and either the first boundary or the second boundary located in the calibration unit is used as the target boundary.

[0113] In this embodiment, the second boundary extending along the second direction is first used as the target boundary.

[0114] In this embodiment, during the second redefinition process, the boundary of the graphic density region located in the calibration unit is obtained as the target boundary, and the target boundary is updated according to the result of the first redefinition process.

[0115] Updating the target boundary based on the result of the first redefinition process allows for real-time adjustments to the second redefinition process based on the specific processing of the graphic density region redefinition process, thus making the result of the second redefinition process more accurate.

[0116] Specifically, in this embodiment, updating the target boundary based on the result of the first redefinition process includes: when the result of the first graphic density region redefinition process is that the original graphic density region of the target calibration unit remains unchanged, obtaining the other of the first boundary and the second boundary located in the calibration unit as the target boundary.

[0117] When the result of the first pattern density region redefinition process is that the original pattern density region of the target calibration unit remains unchanged, the second boundary extending along the second direction is used as the target boundary for the second redefinition process.

[0118] In this embodiment, when the result of the first graphic density region redefinition process is the merging of the graphic density regions of the target calibration unit, the boundary between the merged graphic density region and the remaining graphic density regions in the calibration unit is obtained as the target boundary.

[0119] When the result of the first pattern density region redefinition process is the merging of the pattern density regions of the target calibration unit, the portion of the straight line containing the second boundary extending along the second direction within the calibration unit is taken as the target boundary.

[0120] Based on the division of the target calibration unit according to the target boundary, the target calibration unit is redefined according to the corresponding graphic density region, including: obtaining the size of the target calibration unit along the first direction as the first size L1 and the size along the second direction as the second size L2.

[0121] Specifically, when both the first size L1 and the second size L2 are less than or equal to the size threshold, the areas of the two pattern density regions divided by the target boundary of the target calibration unit are obtained, the pattern density region with the larger area is designated as the first pattern density region, and the pattern density region with the smaller area is designated as the second pattern density region; the first pattern density region and the second pattern density region are merged into the first pattern density region.

[0122] Redefining the smaller second pattern density region as the larger first pattern density region helps to reduce the area of ​​modification to the pattern density region in the target calibration unit, and helps to reduce the density region difference between the target calibration unit and the original calibration unit after redefinition, thereby improving the uniformity of the pattern after pattern size compensation.

[0123] When the first size L1 or the second size L2 is greater than the size threshold and the extension direction of the target boundary is parallel to the short side of the target calibration unit, or when both the first size L1 and the second size L2 are greater than the size threshold, the distances d1 and d2 between the two boundaries extending in the same direction as the target boundary and the target calibration unit are obtained; a pattern density region with a distance less than n times the size threshold is selected as the second pattern density region, and another pattern density region is selected as the first pattern density region; the first pattern density region and the second pattern density region are merged into the first pattern density region; when both distances are greater than or equal to n times the size threshold, no processing is performed on the target calibration unit, where n equals 0.5.

[0124] Redefining the narrower second pattern density region as the wider first pattern density region helps to reduce the area of ​​modification to the pattern density region in the target calibration unit, and helps to reduce the density region difference between the target calibration unit and the original calibration unit after redefinition, thereby improving the uniformity of the pattern after pattern size compensation.

[0125] Specifically, in order to make the redefinition process more accurate and improve the balance of the processed graphics, in this embodiment, n = 0.5.

[0126] When either the first size L1 or the second size L2 is greater than a size threshold, the other is less than or equal to a size threshold, and the extension direction of the target boundary is parallel to the long side of the target calibration unit, the areas of the two pattern density regions divided by the target boundary of the target calibration unit are obtained, and the distance between the two boundaries extending in the same direction as the target boundary and the target calibration unit is obtained; a pattern density region with a distance less than n times the size threshold and an area less than n times the area of ​​the target calibration unit is selected as the second pattern density region, and the other pattern density region is selected as the first pattern density region; the first pattern density region and the second pattern density region are merged into the first pattern density region, where n equals 0.5.

[0127] Redefining the second pattern density region, which has a smaller area and a narrower width, as the first pattern density region, which has a larger area and a wider width, and taking both area and width into account, helps to reduce the area of ​​modification to the pattern density region in the target calibration unit. This also helps to reduce the density region difference between the target calibration unit and the original calibration unit after the redefinition process, and improves the uniformity of the pattern after pattern size compensation.

[0128] Based on the division of the calibration unit according to the boundary of the pattern density region, after redefining the pattern density region of the calibration unit, the process also includes: when the calibration unit still has the boundary of the pattern density region, determining whether the boundary of the pattern density region divides the first pattern or the second pattern.

[0129] Based on the judgment result of whether the boundary of the graphic density region divides the first or second graphic, we can determine whether to perform subsequent graphic re-division processing.

[0130] Specifically, in this embodiment, if so, the first or second graphic is re-divided; otherwise, the graphic density area of ​​the calibration unit is left unprocessed.

[0131] If so, the boundary of the graphic density region still affects the formation of the current layer graphic that is compensated based on the first or second graphic that has been divided. Therefore, graphic re-division processing of the first or second graphic is beneficial to reduce the uniformity of the formation of the current layer graphic that is compensated based on the same first or second graphic, and improve the balance of the graphic after graphic size compensation processing.

[0132] In the calibration unit, there is also a boundary of a pattern density region. When the boundary of the pattern density region extends along a first direction, it is determined whether the boundary of the pattern density region divides the first pattern or the second pattern. This includes: determining whether the boundary of the pattern density region divides the first pattern; if so, the pattern re-division process includes: obtaining the area of ​​the two regions of the first pattern divided by the boundary of the pattern density region; and translating the boundary of the pattern density region along its vertical direction to coincide with the boundary of the first pattern of the region with a smaller area.

[0133] Shifting the boundary of the graphic density region along its vertical direction to coincide with the boundary of the first graphic region, which has a smaller area, helps to reduce the area of ​​modification to the first graphic density region and improves the balance of the graphic after graphic size compensation processing.

[0134] In the calibration unit, there is also a boundary of the pattern density area. When the boundary of the pattern density area extends along the first direction, it is determined whether the boundary of the pattern density area divides the first pattern or the second pattern. This includes: determining whether the boundary of the pattern density area divides the second pattern; if so, the pattern re-division process includes: unifying the pattern density area of ​​the second pattern into the same pattern density area according to the division of the second pattern by the boundary of the pattern density area.

[0135] Based on the division of the second graphic according to the boundary of the graphic density region, the graphic density region of the second graphic is unified into the same graphic density region. This is beneficial for reducing the graphic re-division process and improving the balance of the graphic after graphic size compensation processing.

[0136] Specifically, in this embodiment, the second graphic is divided into the same graphic density region based on the boundary of the graphic density region. This includes obtaining the size of the second graphic along the first direction as the third size d0.

[0137] In this embodiment, when the third dimension d0 is less than the dimension threshold, or when the boundary of the graphic density region extends only along the second direction, the graphic density region of the second graphic is unified into the same graphic density region based on the area of ​​the region divided by the boundary of the graphic density region.

[0138] In this embodiment, when the third size d0 is greater than or equal to the size threshold, and the boundary of the graphic density region includes the first graphic boundary along the first direction and the second graphic boundary extending along the second direction, the graphic density region of the second graphic is unified into the same graphic density region according to the division area of ​​the second graphic by the first graphic boundary and the second graphic boundary, respectively.

[0139] Specifically, based on the area of ​​the region divided by the boundary of the graphic density region, the graphic density region of the second graphic is unified into the same graphic density region, including: obtaining the area of ​​the two regions divided by the boundary of the graphic density region of the second graphic; and unifying the graphic density region of the second graphic into a graphic density region with the same graphic density as the region with the larger area among the two regions.

[0140] Unifying the density region of the second graphic to the same density region as the larger region in the two regions helps to reduce the area of ​​modification of the density region in the second graphic, reduces the density region difference in the second graphic after re-division, and improves the balance of the graphic after size compensation.

[0141] In this embodiment, the graphic density region of the second graphic is unified into a single graphic density region based on the area of ​​the division of the second graphic by the first graphic boundary and the second graphic boundary, respectively. This includes: using either the first graphic boundary or the second graphic boundary as the first target graphic boundary, and using the second graphic covered by the first target graphic boundary translated along its vertical direction as the first target graphic; obtaining the area of ​​the two regions of the first target graphic divided by the first target graphic boundary; unifying the graphic density region of the first target graphic into a graphic density region with the same graphic density as the region with the larger area among the two regions; using the boundary between the first target graphic and the remaining second graphics as the second target graphic boundary; obtaining the area of ​​the two regions of the second graphic divided by the second target graphic boundary; and unifying the graphic density region of the second graphic into a graphic density region with the same graphic density as the region with the larger area among the two regions.

[0142] Using area as the metric for re-division helps to reduce the area of ​​change in the density region of the second graphic, reduces the density region difference in the second graphic after re-division, and improves the balance of the graphic after size compensation.

[0143] In this embodiment, before redefining the graphic density area of ​​the calibration unit according to the division of the graphic density area, the method further includes: obtaining the width of the smallest graphic density area in the plate layer as a size threshold.

[0144] Using the width of the smallest graphic density area in the plate layer as a size threshold helps reduce the jumpiness of graphic density areas and improve the smoothness of graphic density of the entire plate layer.

[0145] After redefining the graphic density region, before performing size compensation processing on the graphics corresponding to each graphic density region based on the processing results, the process includes: selecting a graphic density region surrounded by adjacent graphic density regions as the corrected graphic density region; obtaining the width dimension d3 of the corrected graphic density region; merging the corrected graphic density region into its adjacent graphic density region when the width dimension d3 is less than the size threshold; and not processing the corrected graphic density region when the width dimension d3 is greater than or equal to the size threshold.

[0146] When the width dimension d3 is less than the size threshold, the graphic density area is too small, which can easily cause jumps in the graphic density area. Merging the corrected graphic density area into its adjacent graphic density area is beneficial to improving the smoothness of the graphic density of the entire plate layer.

[0147] It should be noted that after redefining the graphic density region by processing unit, the graphic density region located outside the processing unit and connected to the processing unit is not redefined. Therefore, it is easy to leave a density region with a width dimension d3 smaller than the size threshold.

[0148] The size compensation module 506 is used to perform size compensation processing on the graphics corresponding to each graphics density area after redefining the graphics density area.

[0149] Specifically, the pattern layer is the previous pattern layer. Based on the pattern density area of ​​the previous pattern layer, compensation is made for the formation of the pattern in the current layer. Specifically, the pattern density refers to the pattern density of the second pattern. The second pattern corresponds to the formation of the gate structure on the wafer. The gate structure is formed using SADP process. The second pattern is the core layer in SADP process. Based on the pattern density of the core layer, sidewall layers located on both sides of the core layer are formed in the current layer for pattern compensation.

[0150] Accordingly, the present invention also provides a photomask, comprising: a pattern obtained using the pattern size calibration method provided in the embodiments of the present invention.

[0151] As can be seen from the foregoing embodiments, by forming a processing unit with the first graphic and the second graphic, and selecting the processing unit with the boundary of the graphic density area as the calibration unit, the graphic density area redefinition processing is performed based on the calibration unit. This makes the result of redefining the graphic density area of ​​the plate layer smoother, reduces the probability of excessive jumps in the size compensation of the first and second graphic based on the graphic density area redefinition result, improves the balance of the graphic after the graphic size compensation processing, and also helps to improve the efficiency of graphic density area redefinition processing.

[0152] This invention also provides a device that can implement the layout graphic size calibration method provided in this invention by loading a program, as described above. An optional hardware structure of the terminal device provided in this invention can be as follows: Figure 27 As shown, it includes: at least one processor 01, at least one communication interface 02, at least one memory 03, and at least one communication bus 04.

[0153] In this embodiment, the number of processor 01, communication interface 02, memory 03, and communication bus 04 is at least one, and the processor 01, communication interface 02, and memory 03 communicate with each other through communication bus 04. Communication interface 02 can be an interface of a communication module for network communication, such as the interface of a GSM module. Processor 01 may be a central processing unit (CPU), an application-specific integrated circuit (ASIC), or one or more integrated circuits configured to implement embodiments of the present invention. Memory 03 may include high-speed RAM and may also include non-volatile memory (NVM), such as at least one disk storage device. Memory 03 stores one or more computer instructions, which are executed by processor 01 to implement the layout pattern size calibration method provided in this embodiment of the present invention.

[0154] It should be noted that the aforementioned terminal device may also include other devices (not shown) that may not be essential to understanding the content disclosed in the embodiments of the present invention; given that these other devices may not be essential for understanding the content disclosed in the embodiments of the present invention, the embodiments of the present invention will not describe them one by one.

[0155] This invention also provides a storage medium storing one or more computer instructions for implementing the layout graphic size calibration method provided in this invention.

[0156] In the layout graphic size calibration method provided in this embodiment of the invention, a first graphic and a second graphic are combined into a processing unit, and a processing unit with the boundary of the graphic density region is selected as a calibration unit. By redefining the graphic density region based on the calibration unit, the result of redefining the graphic density region of the layout layer is smoother, and the probability of excessive jumps in size compensation of the first graphic and the second graphic based on the graphic density region redefinition result is reduced. This improves the balance of the graphic after graphic size compensation processing and also improves the efficiency of graphic density region redefinition processing.

[0157] The embodiments of the present invention described above are combinations of elements and features of the present invention. Unless otherwise stated, the elements or features described are optional. Individual elements or features may be practiced without combination with other elements or features. Furthermore, embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some constructions of any embodiment may be included in another embodiment and may be replaced by corresponding constructions of another embodiment. It will be apparent to those skilled in the art that claims in the appended claims that are not expressly referenced to each other may be combined to form embodiments of the present invention, or may be included as new claims in amendments made after the filing of this application.

[0158] Embodiments of the present invention can be implemented by various means, such as hardware, firmware, software, or combinations thereof. In a hardware configuration, the method according to an exemplary embodiment of the present invention can be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc. In a firmware or software configuration, embodiments of the present invention can be implemented in the form of modules, processes, functions, etc. Software code can be stored in memory units and executed by a processor. The memory units are located inside or outside the processor and can send data to and receive data from the processor via various known means.

[0159] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

[0160] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A method for calibrating the size of a graphic layout, characterized in that, include: Obtain a plate layer, the plate layer including a first graphic extending along a first direction and a plurality of second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; The plate layer is divided into multiple graphic density zones according to the graphic density; A processing unit is formed by acquiring multiple second graphics and the first graphics that the second graphics span. The shape of the processing unit is a rectangle or a combination of multiple rectangles. The processing unit completely covers the first graphics and the second graphics, and the boundary of the combined graphic formed by the first graphics and the second graphics coincides with the boundary of the processing unit. The processing unit that acquires the boundary of the graphic density region is used as the calibration unit; Based on the division of the calibration unit according to the boundary of the graphic density region, the graphic density region of the calibration unit is redefined. After redefining the graphic density region, size compensation is performed on the graphics corresponding to each graphic density region based on the processing results.

2. The layout graphic size calibration method as described in claim 1, characterized in that, In a processing unit that acquires multiple second graphics and the first graphics that the second graphics span, the shape of the processing unit is a combination of multiple rectangles. In the calibration unit, the processing unit with the boundary of the graphic density region is obtained. The processing unit is divided into multiple rectangular units along the extension direction of the boundary of the graphic density region by a straight line perpendicular to the boundary of the graphic density region. Each rectangular unit serves as the calibration unit.

3. The layout graphic size calibration method as described in claim 1, characterized in that, Based on the division of the calibration unit according to the boundary of the graphic density region, the graphic density region redefinition process is performed on the calibration unit, including: obtaining the boundary of the graphic density region located in the calibration unit as the target boundary; The calibration unit covered by the target boundary translated along its vertical direction is obtained as the target calibration unit; Based on the division of the target calibration unit according to the target boundary, the target calibration unit is redefined according to the corresponding graphic density region.

4. The layout graphic size calibration method as described in claim 3, characterized in that, In the calibration unit, the processing unit that acquires the boundary of the graphic density region includes a first boundary extending along the first direction or a second boundary extending along the second direction. Within the calibration unit, the boundary of the graphic density region is obtained as the target boundary, and either the first boundary or the second boundary is obtained as the target boundary.

5. The layout graphic size calibration method as described in claim 3, characterized in that, In the calibration unit, the processing unit that acquires the boundary of the graphic density region includes a first boundary extending along the first direction and a second boundary extending along the second direction. Based on the division of the calibration unit according to the boundary of the graphic density region, the redefinition process of the graphic density region of the calibration unit is performed twice. In the first redefinition process, the boundary of the graphic density region located in the calibration unit is obtained as the target boundary, and either the first boundary or the second boundary located in the calibration unit is taken as the target boundary. In the second redefinition process, the boundary of the graphic density region located in the calibration unit is obtained as the target boundary, and the target boundary is updated according to the result of the first redefinition process.

6. The layout graphic size calibration method as described in claim 5, characterized in that, Update the target boundary based on the result of the first redefinition process, including: when the result of the first redefinition process of the graphic density region is that the original graphic density region of the target calibration unit remains unchanged, obtain the other of the first boundary and the second boundary located in the calibration unit as the target boundary; When the result of the first graphic density region redefinition process is that the graphic density regions of the target calibration unit are merged, the boundary of the merged graphic density region and the remaining graphic density regions in the calibration unit is obtained as the target boundary.

7. The layout graphic size calibration method as described in claim 6, characterized in that, Based on the division of the target calibration unit according to the target boundary, the target calibration unit is redefined according to the corresponding graphic density region, including: obtaining the size of the target calibration unit along the first direction as the first size and the size along the second direction as the second size; When both the first size and the second size are less than or equal to the size threshold, the areas of the two graphic density regions divided by the target boundary of the target calibration unit are obtained, the graphic density region with the larger area is designated as the first graphic density region, and the graphic density region with the smaller area is designated as the second graphic density region; the first graphic density region and the second graphic density region are merged into the first graphic density region. When the first size or the second size is greater than a size threshold and the extension direction of the target boundary is parallel to the short side of the target calibration unit, or when both the first size and the second size are greater than the size threshold, the distance between the two boundaries extending in the same direction as the target boundary and the target calibration unit is obtained; a pattern density area with a distance less than n times the size threshold is selected as the second pattern density area, and another pattern density area is selected as the first pattern density area; the first pattern density area and the second pattern density area are merged into the first pattern density area; when both of the distances are greater than or equal to n times the size threshold, no processing is performed on the target calibration unit, where n equals 0.5; When either the first size or the second size is greater than a size threshold, the other is less than or equal to a size threshold, and the extension direction of the target boundary is parallel to the long side of the target calibration unit, the areas of the two graphic density regions divided by the target boundary of the target calibration unit are obtained, and the distance between the target boundary and the two boundaries extending in the same direction as the target calibration unit is obtained; a graphic density region with a distance less than n times the size threshold and an area less than n times the area of ​​the target calibration unit is selected as the second graphic density region, and the other graphic density region is selected as the first graphic density region; the first graphic density region and the second graphic density region are merged into the first graphic density region, where n equals 0.

5.

8. The layout graphic size calibration method as described in claim 1, characterized in that, After redefining the calibration unit based on the boundary of the graphic density region, the process further includes: when the calibration unit still has the boundary of the graphic density region, determining whether the boundary of the graphic density region divides the first graphic or the second graphic. If so, perform graphic re-division processing on the first or second graphic; Otherwise, the graphic density area of ​​the calibration unit remains unprocessed.

9. The layout graphic size calibration method as described in claim 8, characterized in that, In the calibration unit, there is also a boundary of a pattern density region. When the boundary of the pattern density region extends along the first direction, determining whether the boundary of the pattern density region divides the first pattern or the second pattern includes: Determine whether the boundary of the graphic density region divides the first graphic; If so, the graphic re-division process includes: obtaining the areas of the two regions of the first graphic divided by the boundary of the graphic density region; and translating the boundary of the graphic density region along its vertical direction to coincide with the boundary of the first graphic region with a smaller area.

10. The layout graphic size calibration method as described in claim 8, characterized in that, In the calibration unit, there is also a boundary of a pattern density region. When the boundary of the pattern density region extends along the second direction, or when the boundary of the pattern density region includes line segments extending along the first direction and the second direction, determining whether the boundary of the pattern density region divides the first pattern or the second pattern includes: determining whether the boundary of the pattern density region divides the second pattern. If so, the graphic re-division process includes: unifying the graphic density regions of the second graphic into the same graphic density region based on the division of the second graphic according to the boundaries of the graphic density regions.

11. The layout graphic size calibration method as described in claim 10, characterized in that, Based on the segmentation of the second graphic according to the boundary of the graphic density region, the graphic density region of the second graphic is unified into the same graphic density region, including: obtaining the size of the second graphic along the first direction as the third size; When the third size is less than the size threshold, or when the boundary of the graphic density region extends only along the second direction, the graphic density region of the second graphic is unified into the same graphic density region based on the area of ​​the region divided by the boundary of the graphic density region. When the third size is greater than or equal to the size threshold, and the boundary of the graphic density region includes a first graphic boundary along the first direction and a second graphic boundary extending along the second direction, the graphic density region of the second graphic is unified into the same graphic density region based on the area of ​​the division of the second graphic by the first graphic boundary and the second graphic boundary, respectively.

12. The layout graphic size calibration method as described in claim 11, characterized in that, The method of unifying the graphic density regions of the second graphic into a single graphic density region based on the area of ​​the region divided by the boundary of the graphic density region includes: obtaining the area of ​​the two regions of the second graphic divided by the boundary of the graphic density region; The graphic density region of the second graphic is unified to the same graphic density region as the region with the larger area in the two regions.

13. The layout graphic size calibration method as described in claim 11, characterized in that, The graphic density areas of the second graphic are unified into the same graphic density area based on the division area of ​​the first graphic boundary and the second graphic boundary, respectively. This includes: taking either the first graphic boundary or the second graphic boundary as the first target graphic boundary, and taking the second graphic covered by the translation of the first target graphic boundary along its vertical direction as the first target graphic. Obtain the areas of the two regions of the first target graphic segmented by the boundary of the first target graphic; The graphic density region of the first target graphic is unified to the same graphic density region as the region with the larger area in the two regions; The boundary between the first target graphic and the remaining second graphics is used as the boundary of the second target graphic; Obtain the areas of the two regions of the second target graphic segmented by the boundary of the second target graphic; The graphic density region of the second graphic is unified to the same graphic density region as the region with the larger area in the two regions.

14. The layout graphic size calibration method as described in claim 1, characterized in that, After redefining the graphic density region, before performing size compensation processing on the graphic corresponding to each graphic density region based on the processing result, the method further includes: selecting the graphic density region surrounded by adjacent graphic density regions as the corrected graphic density region. Obtain the width dimension of the modified graphic density region; When the width dimension is less than the size threshold, the corrected graphic density region is merged into its adjacent graphic density region; When the width dimension is greater than or equal to the size threshold, the modified graphic density region is not processed.

15. The layout graphic size calibration method as described in any one of claims 7, 11, or 14, characterized in that, Before redefining the graphic density region of the calibration unit based on the division of the graphic density region, the method further includes: obtaining the width of the smallest graphic density region in the plate layer as the size threshold.

16. The layout graphic size calibration method as described in claim 1, characterized in that, The first pattern is an active region pattern, and the second pattern is a gate structure pattern.

17. A layout graphic size calibration system, characterized in that, include: A plate layer acquisition module is used to acquire a plate layer, the plate layer including a first graphic extending along a first direction and a plurality of second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; The graphic density area acquisition module is used to divide the plate layer into multiple graphic density areas according to the graphic density; The processing unit acquisition module is used to acquire multiple second graphics and a processing unit composed of the first graphics spanned by the second graphics. The shape of the processing unit is a rectangle or a combination of multiple rectangles. The processing unit completely covers the first graphics and the second graphics, and the boundary of the combined graphic composed of the first graphics and the second graphics coincides with the boundary of the processing unit. The calibration unit acquisition module is used to acquire the processing unit having the boundary of the graphic density region as the calibration unit; The redefinition processing module is used to redefine the graphic density region of the calibration unit according to the division of the calibration unit by the boundary of the graphic density region. The size compensation module is used to perform size compensation processing on the graphics corresponding to each graphics density region after redefining the graphics density region.

18. A photomask, characterized in that, include: The graphic obtained using the layout graphic size calibration method as described in any one of claims 1-16.

19. A device, characterized in that, It includes at least one memory and at least one processor, the memory storing one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the layout graphic size calibration method as described in any one of claims 1-16.

20. A storage medium, characterized in that, The storage medium stores one or more computer instructions, which are used to implement the layout graphic size calibration method as described in any one of claims 1-16.

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