A crystal ingot storage and carrier replacement device

Abstract

The present invention relates to the field of semiconductor storage, and discloses a crystal ingot storage and carrier replacement device, comprising a whole machine frame module, a manipulator handling module, a crystal ingot flipping module, and a lifting module; the manipulator handling module of the present invention realizes the interaction between the crystal ingot and different carriers in the loading, temporary storage, lifting, and unloading modules in a translational manner, which can avoid the safety risks caused by the weight of the crystal ingot itself to the greatest extent; in addition, a multi-side positioning and locking mechanism is adopted to realize the precise positioning of the crystal ingot and its carrier, and the crystal ingot flipping module can achieve a 180° flipping effect by clamping the crystal ingot and its carrier under the action of a flipping drive.

Description

Technical Field

[0001] The invention relates to the field of semiconductor storage and discloses a crystal ingot storage and carrier replacement device. Background Art

[0002] The existing ingot storage and carrier replacement equipment fixes the ingot on the corresponding carrier, and the robot arm lifts the ingot through the gripper to transfer, package and temporarily store it to complete the operation. Since this packaging method is relatively direct and the design concept is relatively simple, the risk of the robot arm extracting heavy workpieces is relatively high.

[0003] For heavy objects such as crystal ingots, the whole process is clamped by the robot arm gripper. There are two risks to consider: 1. The crystal ingot is lifted and clamped by the robot arm gripper, which leads to very high load requirements for the robot during transportation and operation, and the risk of robot operation accidents is high. 2. Considering the weight of the crystal ingot itself, the robot arm gripper needs to transport a large weight, which makes the design of the robot arm gripper more difficult. Summary of the invention

[0004] The object of the present invention is to provide a crystal ingot storage and carrier replacement equipment, which can realize the interaction between the crystal ingot and different carriers in different modules of loading, temporary storage, lifting and unloading by means of translation, and can avoid the safety risks caused by the weight of the crystal ingot itself to the greatest extent; in addition, a multi-side positioning and locking mechanism is adopted to realize the precise positioning of the crystal ingot and its carrier, and the crystal ingot flipping module can realize the effect of 180° flipping of the crystal ingot and its carrier by clamping and flipping drive.

[0005] In order to achieve the above technical effects, the technical solution adopted by the present invention is:

[0006] A crystal ingot storage and carrier replacement device, comprising:

[0007] The whole machine frame module includes a ground rail and a storage rack, the storage rack is used to store ingots and carriers of ingots, and the carrier is used to carry the corresponding ingots; the storage rack is provided with a carrier positioning module, and the carrier positioning module includes a positioning component and a locking mechanism; the positioning component is used to limit the position of the carrier on the storage position, and the locking mechanism is used to lock the position of the carrier after the carrier enters the corresponding storage position on the storage rack and contacts the positioning component;

[0008] A manipulator handling module, which is movably mounted on the ground rail and is used to transfer the ingots and carriers on the storage rack between different workstations; the manipulator handling module includes an unlocking roller that cooperates with the locking mechanism, and the unlocking roller is used to trigger the unlocking roller to drive the locking mechanism to complete the limited locking of the ingots and the carriers on the storage position when the ingots and the carriers are positioned to the positioning assembly;

[0009] An ingot flipping module, which is used to receive the ingot and the carrier transmitted by the lifting module, and to clamp the corresponding ingot and flip it at a preset angle;

[0010] The lifting module is used to receive the crystal ingot and its carrier from the robot handling module, and to transport the crystal ingot and the carrier to the crystal ingot flipping module by translation and lifting.

[0011] Furthermore, it also includes a loading and unloading mechanism for conveying the crystal ingot and the carrier to the loading station of the whole machine frame module, and unloading the crystal ingot and the carrier conveyed to the unloading station by the robot handling module.

[0012] Furthermore, the carrier positioning module also includes a first roller assembly, and the first roller assembly (402) is used to undertake the handover function of the crystal ingot and the carrier between the carrier positioning module and the robot handling module.

[0013] Furthermore, the robot handling module includes a walking frame, a Z-axis dual-drive lifting mechanism, an Rz axis, a telescopic Y axis, a second roller assembly and a clamping mechanism, which are used to clamp the ingot and the carrier, and transport the clamped ingot and the carrier by translation and lifting; wherein the Z-axis dual-drive lifting mechanism is used to drive the robot handling module to move up and down, the Rz axis is installed on the Z-axis dual-drive lifting mechanism, the telescopic Y axis is placed on the Rz axis, and the clamping mechanism is fixed on the telescopic Y axis; the Rz axis is used to drive the clamping mechanism to rotate, and the clamping mechanism is used to clamp the corresponding ingot and carrier when the robot handling module moves.

[0014] Furthermore, the storage racks are arranged on both sides of the ground rails for storing different types of ingots and carriers; the whole machine frame module also includes an electrical control box for providing electrical control of the whole machine frame module, the robot handling module, the ingot flipping module and the loading and unloading mechanism.

[0015] Furthermore, the ingot flipping module includes a flipping base, a flipping drive mechanism and a flipping gripper; the flipping base is arranged in the whole machine frame module, the flipping drive mechanism is fixed on the flipping base, and the flipping drive mechanism is used to drive the flipping gripper to clamp the ingot and rotate it at a preset angle to realize flipping of the ingot.

[0016] Furthermore, the lifting module includes a lifting mechanism walking shaft, a lifting platform and a third roller assembly. The lifting mechanism walking shaft is used to drive the lifting platform to move. The third roller assembly is installed on the lifting platform and is used to undertake the handover function of the crystal ingot and the carrier between the lifting platform and the robot handling module.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: the robot handling module of the present invention realizes the interaction between the ingot and different carriers in the loading, temporary storage, lifting and unloading modules by means of translation, which can avoid the safety risks caused by the weight of the ingot itself to the greatest extent; in addition, a multi-side positioning and locking mechanism is used to achieve precise positioning of the ingot and its carrier, and the ingot flipping module can achieve a 180° flipping effect by clamping the ingot and its carrier under the action of a flipping drive. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the ingot storage and carrier replacement equipment in the embodiment;

[0019] Figure 2 This is a schematic diagram of the structure of the whole machine frame module in the embodiment;

[0020] Figure 3 This is a schematic diagram of the structure of the manipulator handling module in the embodiment;

[0021] Figure 4 This is a schematic diagram of the structure of the vehicle positioning module in the embodiment;

[0022] Figure 5 This is a schematic diagram of the lifting module structure in the embodiment;

[0023] Figure 6 This is a schematic diagram of the flip module structure in the embodiment;

[0024] Figure 7 Schematic diagram of the structures of two different carriers in the embodiment;

[0025] Figure 8 It is a structural schematic diagram of the locking mechanism in the embodiment when it is locked;

[0026] Fig. 9 This is a schematic diagram of the structure when the locking mechanism in the embodiment is opened;

[0027] Fig.10 This is a schematic diagram for analyzing the working principle of the locking mechanism in the embodiment;

[0028] Among them, 100, whole machine frame module; 101, storage rack; 102, ground rail; 103, electric control box; 200, loading and unloading mechanism; 300, manipulator handling module; 301, walking frame; 302, Z-axis dual-drive lifting mechanism; 303, Rz axis; 304, telescopic Y axis; 305, clamping mechanism; 306, second roller assembly; 307, unlocking roller; 400, carrier positioning module; 401, positioning assembly; 402, first roller assembly; 403, locking mechanism; 4031 , limiting roller assembly; 4032, roller bracket; 4033, adjusting slot; 4034, rotating bracket; 4035, first locking base; 4036, cam assembly; 4037, second locking base; 500, lifting module; 501, lifting mechanism walking axis; 502, lifting platform; 503, third roller assembly; 600, ingot flipping module; 601, flipping base; 602, flipping drive mechanism; 603, flipping gripper; 701, initial carrier; 702, another carrier. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below in conjunction with the embodiments and drawings. However, it should not be understood that the scope of the above subject matter of the present invention is limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention.

[0030] Example

[0031] See also Figures 1 to 10 , an ingot storage and carrier replacement device, comprising:

[0032] The whole machine frame module 100 includes a ground rail 102 and a storage rack 101. The storage rack 101 is used to store ingots and carriers of ingots, and the carriers are used to carry corresponding ingots. The storage rack 101 is provided with a carrier positioning module 400, and the carrier positioning module 400 includes a positioning component 401 and a locking mechanism 403. The positioning component 401 is used to limit the position of the carrier on the storage position, and the locking mechanism 403 is used to lock the position of the carrier after the carrier enters the corresponding storage position on the storage rack 101 and contacts the positioning component 401.

[0033] A manipulator handling module 300, which is movably mounted on the ground rail 102 and is used to transfer the ingot and the carrier on the storage rack 101 between different workstations; the manipulator handling module 300 includes an unlocking roller 307 that cooperates with the locking mechanism 403, and the unlocking roller 307 is used to trigger the unlocking roller 307 to drive the locking mechanism 403 to complete the limit locking of the ingot and the carrier on the storage position when the ingot and the carrier are positioned to the positioning assembly 401;

[0034] The ingot flipping module 600 is used to receive the ingot and the carrier transmitted by the lifting module 500, and to clamp the corresponding ingot and flip it at a preset angle;

[0035] The lifting module 500 is used to receive the crystal ingot and its carrier from the robot handling module 300, and transport the crystal ingot and the carrier to the crystal ingot flipping module 600 by translation and lifting.

[0036] like Figure 1 As shown, the ingot storage and carrier replacement device in this embodiment includes a whole machine frame module 100, a robot handling module 300, an ingot flipping module 600, a lifting module 500 and a loading and unloading mechanism 200. Figure 2 As shown, the whole machine frame module 100 is composed of a frame, a ground rail 102, and an electric control box 103, wherein the ground rail 102 is a translation track for the lateral movement of the manipulator handling module 300. The electric control box 103 provides electrical drive for the whole machine frame module 100, the manipulator handling module 300, the ingot flipping module 600, and the loading and unloading mechanism 200 and other functional modules of the whole machine. The factory service end can transport the ingot to the loading end of the loading and unloading mechanism 200 through the AGV transport cart, confirm the incoming materials of the ingot and its carrier through the sensor, and transfer the ingot and its carrier through the second roller assembly 306. The loading and unloading mechanism 200 is used to transport the ingot and the carrier to the loading station of the whole machine frame module 100, and to unload the ingot and the carrier transported to the unloading station by the manipulator handling module 300.

[0037] The robot handling module 300 is fixed on the whole machine frame module 100, and the robot handling module 300 is located between the loading and unloading mechanism 200, the carrier positioning module 400, the lifting module 500, and the ingot turning module 600. Figure 3As shown, the robot handling module 300 includes a walking frame 301, a Z-axis dual-drive lifting mechanism 302, an Rz axis 303, a telescopic Y axis 304, a second roller assembly 306 and a clamping mechanism 305, which are used to clamp the ingot and the carrier, and transport the clamped ingot and the carrier by translation and lifting; wherein the Z-axis dual-drive lifting mechanism 302 is used to drive the robot handling module 300 to move up and down, the Rz axis 303 is installed on the Z-axis dual-drive lifting mechanism 302, the telescopic Y axis 304 is placed on the Rz axis 303, and the clamping mechanism 305 is fixed on the telescopic Y axis 304; the Rz axis 303 is used to drive the clamping mechanism 305 to rotate, and the clamping mechanism 305 is used to clamp the corresponding ingot and the carrier when the robot handling module 300 moves. The robot handling module 300 is used to receive feedback signals and move to the corresponding loading station through the ground rail 102. Through the adjustment and alignment of the Z-axis dual-drive lifting mechanism 302 and the Rz axis 303, the telescopic Y-axis 304 in the robot handling module 300 is extended. When triggered by the sensor to reach the working position, the clamping mechanism 305 shrinks and clamps the crystal ingot. After the shrinkage is completed, the telescopic Y-axis 304 retracts, and the crystal ingot and its carrier are then transported into the robot handling module 300 through the second roller assembly 306.

[0038] In this embodiment, the storage rack 101 is provided with a carrier positioning module 400. Figure 4 As shown, the carrier positioning module 400 includes a first roller assembly 402, a positioning assembly 401 and a locking mechanism 403; the first roller assembly 402 is used to undertake the handover function of the ingot and the carrier between the carrier positioning module 400 and the robot handling module 300, the positioning assembly 401 is used to limit the position of the carrier on the storage position, and the locking mechanism 403 is used to lock the position of the carrier after the carrier enters the corresponding storage position on the storage rack 101 and contacts the positioning assembly 401, and the locking mechanism includes a limiting roller assembly 4031, a roller bracket 4032, an adjusting slot 4033, a rotating bracket 4034 and a first locking base 4035, a cam assembly 4036, and a second locking base 4037, and the limiting roller assembly 4031 is installed on the roller bracket. The robot handling module 300 includes an unlocking roller 307 that cooperates with the locking mechanism 403. The unlocking roller 307 is used to trigger the unlocking roller 307 to drive the locking mechanism 403 to complete the limited locking of the ingot and its carrier on the storage position when the ingot and the carrier are positioned to the positioning assembly 401. Figure 4As shown, when the robot handling module 300 moves the crystal ingot and its carrier to the handover position of the carrier positioning module 400, the unlocking roller 307 in the robot handling module 300 rises, and the locking mechanism 403. Due to the rise of the unlocking roller 307, the limiting roller assembly 4031 in the locking mechanism 403 drops to be flush with the first roller assembly 402, and the telescopic Y-axis 304 in the robot handling module 300 extends out and enters the carrier positioning module 400. When the crystal ingot and its carrier are positioned against the positioning assembly 401, the clamping mechanism 305 opens, and the telescopic Y-axis 304 returns to its original position. The unlocking roller 307 drops, and the limiting roller assembly 4031 in the locking mechanism 403 rises, completing the precise positioning of the crystal ingot and its carrier on the ingot positioning module 400. At this time, the crystal ingot and its carrier are temporarily stored. The locking mechanism 403 is designed to be self-locking in structure. In the absence of the unlocking roller 307, the locking mechanism 403 is in a self-locking state. As shown Figure 8 The figure shows a specific configuration of a locking mechanism 403 in this embodiment. Assuming that the ingot and its carrier exert force on the limiting roller assembly 4031, under the action of the adjustment slot 4033 on the roller bracket 4032, it is only subjected to an upward force. However, since the adjustment slot 4033 is designed to be horizontal, it can cleverly limit the only upward force of the cam assembly 4036 to achieve a self-locking effect. When the unlocking roller 307 rises and drives the roller bracket 4032, the design of the adjustment slot 4033 can simply lower the limiting roller assembly 4031, and the final effect is as follows. Fig. 9 As shown, the force analysis of the locking mechanism 403 during the self-locking process is as follows: Fig.10 shown.

[0039] When the carrier of the ingot needs to be changed, such as Figure 4 As shown, the robot handling module 300 is controlled to move the crystal ingot and its initial carrier 701 to the handover position of the positioning module, the unlocking roller 307 in the robot handling module 300 rises, and the limiting roller assembly 4031. Due to the rise of the unlocking roller 307, the limiting roller assembly 4031 in the locking mechanism 403 drops to be flush with the roller assembly, the telescopic Y-axis 304 in the robot handling module 300 extends, and the clamping jaw mechanism 305 enters the positioning module, and the clamping jaw mechanism 305 contracts to clamp the crystal ingot and the carrier, and the contracted Y-axis is retracted into the robot handling module 300. At this time, the unlocking roller 307 drops, and the limiting roller assembly 4031 in the locking mechanism 403 rises, completing the transfer of the crystal ingot and its carrier at the temporary storage station. Then the robot handling module 300 is controlled to extend the telescopic Y-axis 304 to send the clamped crystal ingot and the initial carrier 701 into the positioning module. Figure 5The lifting module 500 (in this embodiment, the lifting module 500 includes a lifting mechanism travel shaft 501, a lifting platform 502 and a third roller assembly 503, the lifting mechanism travel shaft 501 is used to drive the lifting platform 502 to move, and the third roller assembly 503 is installed on the lifting platform 502, and is used to undertake the handover function of the crystal ingot and the carrier between the lifting platform 502 and the manipulator handling module 300) shown, the clamp mechanism 305 is opened, and the telescopic Y axis 304 returns to the original position. The lifting mechanism travel shaft 501 moves to the crystal ingot flipping module 600.

[0040] In this embodiment, the ingot flip module 600 includes a flip base 601, a flip drive mechanism 602 and a flip gripper 603; the flip base 601 is arranged in the whole machine frame module 100, the flip drive mechanism 602 is fixed on the flip base 601, and the flip drive mechanism 602 is used to drive the flip gripper 603 to clamp the ingot and rotate it at a preset angle to realize flipping the ingot. Figure 6 As shown, in this embodiment, after the lifting component in the lifting module 500 is lifted to the ingot flipping module 600, the flipping gripper 603 contracts to clamp the ingot and the initial carrier 701. At this time, the lifting component drives the initial carrier 701 to descend to the initial position of the lifting module 500, and flips the ingot 180 degrees through the action of the flipping drive mechanism 602.

[0041] like Figure 7 Schematic diagram of different types of carriers. When the robot handling module 300 is aligned to the handover position of the positioning module corresponding to another carrier 702, the unlocking roller 307 in the robot handling module 300 rises, the limiting roller assembly 4031 in the locking mechanism 403 drops to be flush with the roller assembly, and the telescopic axis Y axis in the robot handling module 300 extends and enters the ingot carrier positioning module 400 with another carrier 702, the clamping mechanism 305 contracts, and the telescopic Y axis 304 is retracted into the robot handling module 300. At this time, the unlocking roller 307 drops, and the limiting roller assembly 4031 in the locking mechanism 403 rises, completing the transfer of the ingot to another carrier 702.

[0042] When the robot transport module 300 transports another carrier 702 to the ingot and carrier lifting module 500 for alignment, the telescopic Y-axis 304 extends, the clamping mechanism 305 opens, and the telescopic Y-axis 304 returns to its original position, completing another transfer between the robot transport module 300 and the ingot and carrier lifting module 500.

[0043] Another carrier 702 enters the ingot flipping module 600 through the lifting mechanism travel shaft 501. When the lifting assembly is lifted to the position where the ingot and its base clamps have flipped 180 degrees, the flip gripper 603 is released, and the ingot and its base enter another carrier 702, and then return to the position of the robot handling module 300 through the lifting assembly and the lifting mechanism travel shaft 501. The telescopic axis Y axis extends out, the clamping mechanism 305 contracts, and the telescopic Y axis 304 is retracted into the robot handling module 300. At the same time, it rotates 180 degrees and returns to its original position under the action of the flipping drive mechanism 602. When the robot handling module 300 is aligned to the unloading assembly, the telescopic Y axis 304 extends out, the clamping mechanism 305 opens, and the telescopic Y axis 304 returns to its original position. After the unloading action is completed and the factory AGV handling cart is waiting, the overall process is completed.

[0044] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A crystal ingot storage and carrier replacement device, characterized in that: include: A whole machine frame module (100), the whole machine frame module (100) comprising a ground rail (102) and a storage rack (101), the storage rack (101) being used to store crystal ingots and a carrier for the crystal ingots, the carrier being used to carry the corresponding crystal ingots; a carrier positioning module (400) being arranged on the storage rack (101), the carrier positioning module (400) comprising a positioning component (401) and a locking mechanism (403); the positioning component (401) being used to limit the position of the carrier on the storage position, the locking mechanism (403) being used to lock the position of the carrier after the carrier enters the corresponding storage position on the storage rack (101) and contacts the positioning component (401); A robot handling module (300) is movably mounted on the ground rail (102) and is used to transfer the ingot and the carrier on the storage rack (101) between different workstations; the robot handling module (300) includes an unlocking roller (307) that cooperates with the locking mechanism (403); the unlocking roller (307) is used to trigger the unlocking roller (307) to drive the locking mechanism (403) to complete the limiting locking of the ingot and the carrier on the storage position when the ingot and the carrier are positioned to the positioning assembly (401); the locking mechanism (403) includes a limiting roller assembly (4031), a roller bracket (4032), an adjustment slot (4033), and a rotating bracket. (4034), a first locking base (4035), a cam assembly (4036) and a second locking base (4037); the roller bracket (4032) is installed at the corresponding storage inlet position on the storage rack (101) through the first locking base (4035), the roller bracket (4032) is provided with an L-shaped adjustment groove (4033), and the limiting roller assembly (4031) is installed on the roller bracket (4032); one end of the rotating bracket (4034) is hinged on the second locking base (4037); one end of the cam assembly (4036) is fixed on the rotating bracket (4034), and the other end extends into the adjustment groove (4033) of the roller bracket (4032); A crystal ingot flipping module (600), the crystal ingot flipping module (600) is used to receive the crystal ingot and the carrier transmitted by the lifting module (500), and to clamp the corresponding crystal ingot and flip it at a preset angle; The lifting module (500) is used to receive the crystal ingot and its carrier from the robot handling module (300), and to transport the crystal ingot and the carrier to the crystal ingot flipping module (600) by translation and lifting.

2. The ingot storage and carrier replacement device according to claim 1, characterized in that: It also includes a loading and unloading mechanism (200) for conveying the crystal ingot and the carrier to the loading station of the whole machine frame module (100), and for unloading the crystal ingot and the carrier conveyed to the unloading station by the robot handling module (300).

3. The ingot storage and carrier replacement device according to claim 1, characterized in that: The carrier positioning module (400) further comprises a first roller assembly (402), wherein the first roller assembly (402) is used to undertake the handover function of the crystal ingot and the carrier between the carrier positioning module (400) and the robot handling module (300).

4. The ingot storage and carrier replacement device according to claim 1, characterized in that: The robot handling module (300) comprises a walking frame (301), a Z-axis dual-drive lifting mechanism (302), an Rz axis (303), a telescopic Y axis (304), a second roller assembly (306) and a clamping mechanism (305), which are used to clamp a crystal ingot and a carrier, and transport the clamped crystal ingot and the carrier by translation and lifting; wherein the Z-axis dual-drive lifting mechanism (302) is used to drive the robot handling module (300) to move up and down, the Rz axis (303) is installed on the Z-axis dual-drive lifting mechanism (302), the telescopic Y axis (304) is placed on the Rz axis (303), and the clamping mechanism (305) is fixed on the telescopic Y axis (304); the Rz axis (303) is used to drive the clamping mechanism (305) to rotate, and the clamping mechanism (305) is used to clamp the corresponding crystal ingot and the carrier when the robot handling module (300) moves.

5. The ingot storage and carrier replacement device according to claim 1, characterized in that: The storage rack (101) is arranged on both sides of the ground rail (102) and is used to store different types of ingots and carriers; the whole machine frame module (100) also includes an electric control box (103) for providing electrical control for the whole machine frame module (100), the robot handling module (300), the ingot turning module (600) and the loading and unloading mechanism (200).

6. The ingot storage and carrier replacement device according to claim 1, characterized in that: The ingot flipping module (600) comprises a flipping base (601), a flipping drive mechanism (602) and a flipping gripper (603); the flipping base (601) is arranged in the whole machine frame module (100), the flipping drive mechanism (602) is fixed on the flipping base (601), and the flipping drive mechanism (602) is used to drive the flipping gripper (603) to clamp the ingot and rotate it at a preset angle, so as to flip the ingot.

7. The ingot storage and carrier replacement device according to claim 1, characterized in that: The lifting module (500) comprises a lifting mechanism travel shaft (501), a lifting platform (502) and a third roller assembly (503); the lifting mechanism travel shaft (501) is used to drive the lifting platform (502) to move; the third roller assembly (503) is installed on the lifting platform (502) and is used to undertake the handover function of the crystal ingot and the carrier between the lifting platform (502) and the robot handling module (300).

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