Mask assembly, method of manufacturing mask assembly, and apparatus of manufacturing display apparatus

Abstract

The invention relates to a mask assembly, a method of manufacturing the mask assembly, and an apparatus for manufacturing a display apparatus. The mask assembly includes: a mask frame including a plurality of ribs including first ribs extending in a first direction, the plurality of ribs defining an opening region; and a mask sheet disposed on a first surface of the first rib and covering the opening region, in which the mask frame further includes a plurality of receiving portions disposed on a second surface of the first rib and spaced apart from each other in a longitudinal direction of the first rib, the second surface being opposite the first surface.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and all benefits derived from Korean Patent Application No. 10-2023-0110765, filed on August 23, 2023, the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] Embodiments relate to a mask assembly, a method of manufacturing the same, and an apparatus for manufacturing a display device, and more particularly, to a mask assembly having improved arrangement accuracy, a method of manufacturing the same, and an apparatus for manufacturing a display device. Background Art

[0004] Electronic devices are being widely used. Electronic devices are being used variously in mobile electronic devices and stationary electronic devices. Electronic devices include display devices that can provide visual information such as images or videos to users to support various functions.

[0005] A display device that visually displays data is formed by depositing various layers such as organic layers and metal layers. The deposition material can be deposited to form multiple layers of the display device. In other words, the deposition material can be ejected from a deposition source and deposited on a substrate through a mask assembly. In this case, the mask assembly includes a mask frame and a mask sheet, and can be manufactured while being placed on a mask stage. When the mask sheet is fixed to the mask frame, it is important to position the mask sheet on the mask frame as designed. For this reason, once the mask sheet is welded to the mask frame, gas can be ejected from the mask stage to lift the mask frame and reduce the friction between the mask stage and the mask frame. Summary of the invention

[0006] Embodiments include a mask assembly in which a mask sheet is precisely disposed in a mask frame, a method of manufacturing the mask assembly, and an apparatus for manufacturing a display device.

[0007] The embodiments set forth herein are illustrative, and the scope of the present disclosure is not limited thereby.

[0008] Additional features will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of embodiments presented herein.

[0009] In an embodiment of the present disclosure, a mask assembly includes a mask frame and a mask sheet, wherein the mask frame includes a plurality of ribs including a first rib extending in a first direction and a plurality of receiving portions arranged on a first surface of the first rib and spaced apart from each other in a longitudinal direction of the first rib, the plurality of ribs defining an opening area, the mask sheet being arranged on a second surface of the first rib of the mask frame and covering the opening area, the second surface being opposite to the first surface.

[0010] In an embodiment, the plurality of receiving parts may be provided in an odd number.

[0011] In an embodiment, each of the plurality of receiving portions may have a constant width in the longitudinal direction.

[0012] In an embodiment, the plurality of receiving portions may include: a first receiving portion, disposed at the center of the first rib; and a second receiving portion, disposed at at least one of the opposite ends of the first receiving portion in the longitudinal direction, and wherein a width of the first receiving portion may be greater than a width of the second receiving portion.

[0013] In an embodiment, the multiple receiving portions may include: a first receiving portion, arranged at the center of the first rib; and a second receiving portion, arranged at at least one of the opposite ends of the first receiving portion in the longitudinal direction, and wherein the depth of the first receiving portion may be greater than the depth of the second receiving portion.

[0014] In an embodiment, the plurality of ribs may include a second rib extending in a second direction intersecting the first direction and having a length shorter than that of the first rib, and wherein a depth of a receiving portion disposed on the second rib among the plurality of receiving portions may be greater than a depth of a receiving portion disposed on the first rib among the plurality of receiving portions.

[0015] In an embodiment, a width of the receiving portion provided on the second rib may be greater than a width of the receiving portion provided on the first rib.

[0016] In an embodiment, a ratio of a sum of lengths of the plurality of receiving portions to a length of the first rib may be about 0.8 to about 0.9.

[0017] In an embodiment, a bottom surface of each of the plurality of receiving portions may be concavely formed toward the second surface of the first rib on which the mask sheet is disposed.

[0018] In an embodiment, a depth of each of the plurality of receiving portions may correspond to about 3% to about 10% of a thickness of the mask frame.

[0019] In an embodiment of the present disclosure, a method for manufacturing a mask assembly includes: setting a mask frame including a first rib extending in a first direction on a mask stage; fixing a mask sheet on the mask frame; and injecting gas into a plurality of receiving portions, the plurality of receiving portions being arranged on a surface of the first rib facing the mask stage so as to be spaced apart from each other in a longitudinal direction of the first rib.

[0020] In an embodiment, the plurality of receiving portions may be provided in an odd number on the first rib.

[0021] In an embodiment, each of the plurality of receiving portions may have a constant width in the longitudinal direction.

[0022] In an embodiment, the plurality of receiving portions may include: a first receiving portion, disposed at the center of the first rib; and a second receiving portion, disposed at at least one of the opposite ends of the first receiving portion in the longitudinal direction, and wherein a width of the first receiving portion may be greater than a width of the second receiving portion.

[0023] In an embodiment, the multiple receiving portions may include: a first receiving portion, arranged at the center of the first rib; and a second receiving portion, arranged at at least one of the opposite ends of the first receiving portion in the longitudinal direction, and wherein the depth of the first receiving portion may be greater than the depth of the second receiving portion.

[0024] In an embodiment, the mask frame may further include a second rib extending in a second direction intersecting the first direction and having a length shorter than that of the first rib, and wherein a depth of a receiving portion among the plurality of receiving portions arranged on the second rib may be greater than a depth of a receiving portion among the plurality of receiving portions arranged on the first rib.

[0025] In an embodiment, a width of the receiving portion provided on the second rib may be greater than a width of the receiving portion provided on the first rib.

[0026] In an embodiment, a ratio of a sum of lengths of the plurality of receiving portions to a length of the first rib may be about 0.8 to about 0.9.

[0027] In an embodiment of the present disclosure, an apparatus for manufacturing a display device includes: a chamber; a deposition source accommodated in the chamber and facing a display substrate; and a mask assembly arranged between the display substrate and the deposition source, wherein the mask assembly includes a mask frame and a mask sheet, the mask frame includes a plurality of ribs including a first rib extending in a first direction and a plurality of receiving portions arranged on a first surface of the first rib and spaced apart from each other in a longitudinal direction of the first rib, the plurality of ribs defining an opening area, the mask sheet being arranged on a second surface of the first rib and covering the opening area, the second surface being opposite to the first surface.

[0028] In an embodiment, the plurality of receiving parts may be provided in an odd number.

[0029] Other features and advantages besides those described above will become apparent from the following drawings, claims, and detailed description to enable the following disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and other features and advantages of illustrative embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0031] Figure 1 is a schematic conceptual diagram illustrating an embodiment of an apparatus and method for manufacturing a mask assembly;

[0032] Figure 2 is a schematic perspective view showing an embodiment of a mask stage and a mask assembly;

[0033] Figure 3 is a bottom view showing an embodiment of a bottom surface of a mask frame;

[0034] Figure 4 is a graph showing flatness of a bottom surface of a mask frame according to the number of receiving parts;

[0035] Figure 5 is a graph showing flatness of a bottom surface of a mask frame according to a length ratio between a first rib and a receiving portion;

[0036] Figure 6 is a bottom view showing an embodiment of a bottom surface of a mask frame;

[0037] Figure 7 is a bottom view showing an embodiment of a bottom surface of a mask frame;

[0038] Figure 8 is a schematic cross-sectional view of an embodiment of an apparatus for manufacturing a display device including a mask frame;

[0039] Fig. 9is a schematic plan view of an embodiment of a display device manufactured by an apparatus for manufacturing a display device; and

[0040] Fig.10 is a schematic cross-sectional view of an embodiment of a display device manufactured by an apparatus for manufacturing a display device in an embodiment, which may correspond to Fig. 9 The display device is along Fig. 9 The cross section is taken along the line XX'. DETAILED DESCRIPTION

[0041] Now will refer to the embodiment shown in the accompanying drawings in detail, wherein the same reference numerals always indicate the same elements. In this regard, the embodiment shown can have different forms and should not be construed as being limited to the description set forth herein. Therefore, the following only describes the embodiment with reference to the accompanying drawings to explain the features described. As used in this article, the term "and / or" includes any combination and all combinations of one or more associated listed items. Throughout the disclosure, the statement "at least one of a, b and c" indicates only a, only b, only c, both a and b, both a and c, both b and c, all of a, b and c or their variants.

[0042] Various modifications may be applied to the illustrated embodiments, and specific embodiments will be shown in the drawings and described in the detailed description section. The effects and features of the illustrated embodiments and methods for implementing them will become more apparent with reference to the detailed description below in conjunction with the drawings. However, the illustrated embodiments may be implemented in various forms and are not limited to the embodiments presented below.

[0043] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings, and in the description with reference to the accompanying drawings, the same or corresponding components are denoted by the same reference numerals, and their repeated description is omitted.

[0044] In the following embodiments, it will be understood that although terms such as "first", "second", etc. may be used herein to describe various components, these components should not be limited by these terms. These terms are only used to distinguish one component from another component.

[0045] In the following embodiments, unless clearly stated otherwise in the context, a singular expression in the specification includes a plural expression.

[0046] In the following embodiments, it will also be understood that the terms "includes," "comprising," "having," and / or "containing" used herein indicate the presence of stated features or components, but do not preclude the presence or addition of one or more other features or components.

[0047] In the following embodiments, it will be understood that when a layer, region or component is also referred to as being "formed on" another layer, region or component, the layer, region or component may be directly or indirectly formed on the other layer, region or component. That is, for example, there may be intervening layers, regions or components.

[0048] For the convenience of explanation, the size of the components in the drawings may be exaggerated. In other words, since the size and thickness of the components in the drawings are arbitrarily shown for the convenience of explanation, the following disclosure is not limited thereto.

[0049] In the following embodiments, the x direction, y direction, and z direction are not limited to the three axes of the rectangular coordinate system and can be interpreted in a broader sense. For example, the x direction, y direction, and z direction can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0050] When the illustrative embodiments can be implemented differently, the predetermined process order can be performed differently from the described order. For example, two consecutively described processes can be performed substantially simultaneously or in the reverse order of the described order.

[0051] As used herein, "about" or "approximately" includes the stated value and means within an acceptable range of deviation for the particular value as determined by one of ordinary skill in the art, taking into account the measurement in question and the errors associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, a term such as "about" can mean within one or more standard deviations, or within ±30%, ±20%, ±10%, or ±5% of the stated value.

[0052] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present disclosure belongs. It will also be understood that, unless explicitly defined as such herein, terms (such as those defined in general dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant technical field and the context of the present disclosure, and should not be interpreted in an idealized or overly formalized sense.

[0053] Figure 1 is a schematic conceptual diagram illustrating an embodiment of an apparatus and method for manufacturing a mask assembly.

[0054] Reference Figure 1 The apparatus 3 for manufacturing a mask assembly may include a chamber 610, a mask stage 620, a fixture 630, a welding part 640, a visual part 650, a controller 660, and a gas injector 670 (refer to Figure 2 ).

[0055] The chamber 610 may define an inner space therein and may accommodate various components. The mask assembly 400 may be manufactured in the inner space of the chamber 610 .

[0056] The mask frame 410 is disposed on (eg, placed on) the mask stage 620. The mask stage 620 may form a closed loop to correspond to the shape of the mask frame 410. In an embodiment, the mask stage 620 may have a quadrilateral shape having an opening at the center thereof in a plan view.

[0057] The mask stage 620 may include a first direction (eg, Figure 1 The first side may include a pair of sides arranged to face each other and be parallel to each other, or may consist of a pair of sides arranged to face each other and be parallel to each other. In addition, the mask stage 620 may include a first side extending in the second direction (e.g., Figure 1 The first side and the second side may be a second side extending in the y direction (in the y direction). The second side may be composed of a pair of sides arranged to face each other and be parallel to each other. The first side and the second side may intersect each other (for example, at a right angle). In this case, the outline of the mask stage 620 formed by the first side and the second side may be a quadrilateral.

[0058] In an embodiment, the first side may be a side longer than the second side, and the second side may be a short side. However, the present disclosure is not limited thereto, and in another embodiment, the first side may be a short side, and the second side may be a long side. In an alternative embodiment, the length of the first side may be equal to the length of the second side. Hereinafter, the description will focus on the case where the first side is a long side and the second side is a short side.

[0059] The clamp 630 may clamp the mask sheet 420 placed on the mask frame 410. In an embodiment, the clamp 630 may clamp opposite ends of the mask sheet 420 to tighten the mask sheet 420 in a longitudinal direction of the mask sheet 420.

[0060] After tensioning as described above, the welding portion 640 may perform welding to couple the mask sheet 420 to the mask frame 410. The welding portion 640 may perform welding at opposite ends (e.g., opposite ends) of the mask sheet 420. In this case, in an embodiment, the welding portion 640 may fix the mask sheet 420 to the mask frame 410 by spot welding. Thereafter, the opposite ends of the mask sheet 420 clamped by the clamp 630 may be cut.

[0061] While the above operation is in progress, the vision part 650 can detect the positions of the mask sheet 420 and the mask frame 410 and align the position of at least one of the mask sheet 420 and the mask frame 410. In addition, the vision part 650 can check whether welding has been accurately performed by photographing the welding position, etc.

[0062] The controller 660 may control the operation of each component of the apparatus for manufacturing a mask assembly 3. In this case, the controller 660 may be individually provided for each component.

[0063] The gas injector 670 may be provided in the mask stage 620. In an embodiment, the gas injector 670 may be provided below the first side and the second side of the mask stage 620. In an alternative embodiment, the gas injector 670 may be integrated into the mask stage 620. After the mask sheet 420 is welded to the mask frame 410, the gas injector 670 may spray gas toward the mask frame 410 placed on the mask stage 620. In an embodiment, the gas injector 670 may include a gas supply unit and an injection hole. The gas supply unit may supply gas to be sprayed toward the mask frame 410. The injection hole may be defined to face the mask frame 410, and gas may be sprayed toward the mask frame 410. In an embodiment, the gas sprayed from the gas injector 670 may be air.

[0064] Therefore, the friction between the mask frame 410 and the mask stage 620 can be reduced. When the mask sheet 420 is welded to the mask frame 410, the mask frame 410 may be deformed due to the contraction of the stretched mask sheet 420. The amount of deformation of the mask frame 410 can be predicted in advance, and the mask sheet 420 can be set in consideration of the predicted amount of deformation. In this case, when the friction between the mask frame 410 and the mask stage 620 is too strong, the deformation of the mask frame 410 may be suppressed, and the mask frame 410 may not be deformed to the pre-predicted degree, which may affect the arrangement accuracy of the mask sheet 420. That is, the pattern holes 425 of the mask sheet 420 (refer to Figure 2 ) may not be initially defined in an expected position. The gas injector 670 may spray gas (eg, air) on the mask frame 410 to provide a lifting force (ie, buoyancy) and reduce friction between the mask frame 410 and the mask stage 620 .

[0065] Figure 2 is a schematic perspective view showing an embodiment of a mask stage and a mask assembly. Figure 3 is a bottom view illustrating an embodiment of a bottom surface of a mask frame. Figure 4 is a graph showing the flatness of the bottom surface of the mask frame according to the number of receiving parts. Figure 5 is a graph showing the flatness of the bottom surface of the mask frame according to a length ratio between the first rib and the receiving portion.

[0066] Reference Figure 2 and Figure 3 As described above, the mask assembly 400 (refer to Figure 1) may be manufactured while being placed on the mask stage 620. The mask assembly 400 may include a mask frame 410 and a mask sheet 420.

[0067] The mask frame 410 may be formed by connecting a plurality of ribs RB to each other, and may include an open area OA defined by the plurality of ribs RB. That is, the open area OA may be formed surrounded by the plurality of ribs RB and may be formed through the center of the mask frame 410.

[0068] In an embodiment, in a plan view, the mask frame 410 may be a quadrilateral frame. The shape of the mask frame 410 is not limited thereto, and the mask frame 410 may have various other polygonal shapes or circular shapes. Hereinafter, for ease of explanation, the description will focus on the case where the mask frame 410 is a quadrilateral frame.

[0069] When the mask frame 410 is a quadrilateral frame, a plurality of ribs RB may be included in a first direction (eg, Figure 2 The first rib RB1 extending in the x direction in the first direction and the second rib RB2 extending in the second direction intersecting the first direction (for example, Figure 2 In addition, a third rib RB3 arranged to face the first rib RB1 and a fourth rib RB4 arranged to face the second rib RB2 may be provided, and the first rib RB1 to the fourth rib RB4 may extend to each other. In an embodiment, the first rib RB1 may correspond to the long side, and the second rib RB2 may correspond to the short side. However, the present disclosure is not limited thereto, and the first rib RB1 may correspond to the short side, the second rib RB2 may correspond to the long side, or the length of the first rib RB1 may be equal to the length of the second rib RB2. In the following, for ease of explanation, the description will focus on the case where the first rib RB1 corresponds to the long side and the second rib RB2 corresponds to the short side.

[0070] The mask sheet 420 may be disposed on the first surface of the plurality of ribs RB. The mask sheet 420 may be mounted on the mask frame 410 in a tensioned state. The opening area OA at the center of the mask frame 410 may be covered by the mask sheet 420. In an embodiment, at least one mask sheet 420 may be provided, and when two or more mask sheets 420 are provided, the mask sheets 420 may be disposed side by side with each other on the mask frame 410. In an embodiment, for example, the mask sheet 420 may be arranged in a first direction (e.g., Figure 2 In this case, each of the plurality of mask sheets 420 may have a plurality of Figure 2 The mask sheet 420 has a shape extending in the y direction (in the y direction). The opposite ends of the mask sheet 420 can be fixed to the mask frame 410 by, for example, welding. Figure 2 In FIG. 4 , for the convenience of explanation, only one mask sheet 420 is shown.

[0071] The mask sheet 420 may define at least one pattern hole 425. The pattern hole 425 may be a through hole defined to allow a deposition material to pass through the mask sheet 420.

[0072] Second surfaces of the plurality of ribs RB facing the first surface may contact the mask stage 620. A plurality of receiving portions AR may be provided on the second surface of each of the plurality of ribs RB. Hereinafter, for convenience of explanation, the description will focus on the first rib RB1.

[0073] In the longitudinal direction of the first rib RB1 (eg, Figure 3 A plurality of receiving portions AR spaced apart from each other in the x direction (in the x direction) may be provided on the second surface of the first rib RB1. The receiving portions AR may be provided in the thickness direction (eg, Figure 3 In an embodiment, the receiving portion AR may have a depth corresponding to 10% or less (e.g., about 3% to about 10%) of the thickness of the first rib RB1. When the depth of the receiving portion AR is greater than 10% of the thickness of the first rib RB1, the strength or deformation of the first rib RB1 may be affected. In addition, in an embodiment, the receiving portion AR may have a quadrilateral shape (e.g., a rectangular shape) in a plan view. However, the present disclosure is not limited thereto, and the receiving portion AR may have various elongated shapes (such as a tapered quadrilateral shape). The receiving portion AR may accommodate the gas ejected from the gas injector 670 and thereby provide a lifting force to the rib RB.

[0074] In an embodiment, a plurality of receiving portions AR may be provided. In an embodiment, for example, two or more receiving portions AR may be provided. This may provide uniform (or consistent) flatness for the mask frame 410 compared to a case where a single receiving portion AR is formed along the first rib RB1. In the case where a single receiving portion AR is provided on a rib RB (particularly, the first rib RB1 corresponding to the long side), when gas is ejected from the gas injector 670, a portion of the first rib RB1 may be lifted along the longitudinal direction of the first rib RB1, and the load may be concentrated on another portion of the first rib RB1, and therefore, uniform flatness may not be easily produced. In an embodiment, as a plurality of receiving portions AR are spaced apart from each other in the longitudinal direction of the first rib RB1, each receiving portion AR may uniformly accommodate gas. Therefore, uniform flatness may be provided in the longitudinal direction of the first rib RB1.

[0075] Reference Figure 4 And combined with Figure 2 and Figure 3In an embodiment, an odd number of receiving parts AR may be provided. In an embodiment, the number of receiving parts AR may be three, but is not limited thereto, and the number of receiving parts AR may be, for example, five, seven, etc. Hereinafter, for ease of explanation, the description will focus on the case where the receiving parts AR include a first receiving part AR1, a second receiving part AR2, and a third receiving part AR3.

[0076] exist Figure 4 , the horizontal axis represents the number of receiving portions AR provided on the first rib RB1, and the vertical axis represents the flatness (in micrometers (μm)) of the bottom surface of the mask frame 410 in contact with the mask stage 620. In this way, when the receiving portions AR are provided in odd numbers rather than even numbers, the lifting force provided to the mask frame 410 can be more evenly distributed, thereby providing uniform flatness. In addition, because the friction force between the mask frame 410 and the mask stage 620 is uniform over the entire length of the first rib RB1, the mask sheet 420 can be aligned on the mask frame 410 completely as intended.

[0077] Reference Figure 5 And combined with Figure 2 and Figure 3 In the embodiment, the sum of the lengths of the plurality of receiving portions AR and the length Lr1 of the first rib RB1 (refer to Figure 6 ) may be about 0.8 to about 0.9. For example, in an embodiment, when three receiving portions AR are provided, the sum of the lengths of the plurality of receiving portions AR may represent the sum of the length La1 of the first receiving portion AR1, the length La2 of the second receiving portion AR2, and the length La3 of the third receiving portion AR3. In addition, the ratio of the sum of the lengths of the plurality of receiving portions AR to the length Lr1 of the first rib RB1 may be defined as (La1+La2+La3) / Lr1. When the ratio R is about 0.8 to about 0.9, the gas may be accommodated in most of the length of the first rib RB1, and sufficient lifting force may be provided. In addition, because there are a plurality of receiving portions AR, the lifting force provided to the first rib RB1 may be evenly distributed. Specifically, when the ratio R is 0.8 or less, the flatness of the mask frame 410 may be about 1 μm or more, that is, not flat enough. When the ratio R is 0.9 or more, the effect caused by providing a plurality of receiving portions AR may be reduced.

[0078] Return to reference Figure 3In an embodiment, each of the plurality of receiving portions AR may have a constant width in the longitudinal direction. For example, in an embodiment, the first receiving portion AR1 may have a predetermined width. In addition, each of the second receiving portion AR2 and the third receiving portion AR3 may also have a predetermined width. In this case, the width of the first receiving portion AR1, the width of the second receiving portion AR2, and the width of the third receiving portion AR3 may be equal to each other. Since the receiving portion AR is not formed as a single receiving portion AR, but is formed as a plurality of receiving portions AR, the lifting force may be uniformly distributed, and therefore, the width of the receiving portion AR may not change in the longitudinal direction.

[0079] Furthermore, in an embodiment, the depths of the plurality of receiving portions AR may be equal to each other. For example, in an embodiment, the depths of the first receiving portion AR1, the second receiving portion AR2, and the third receiving portion AR3 may be equal to each other.

[0080] However, in other embodiments, the depths of the plurality of receiving portions AR may be different from each other. For example, in an embodiment, the depth of the first receiving portion AR1 disposed at the center of the first rib RB1 may be greater than the depth of the second receiving portion AR2 and the depth of the third receiving portion AR2 disposed at the opposite ends of the first receiving portion AR1, respectively. In this case, the first receiving portion AR1 may contain more gas than the second receiving portion AR2 and the third receiving portion AR3, and the lifting force applied to the first receiving portion AR1 may be greater than the lifting force applied to the second receiving portion AR2 and the third receiving portion AR3. This may compensate for the phenomenon of further lifting occurring at the opposite ends of the first rib RB1. That is, the first receiving portion AR1 disposed in the center of the first rib RB1, which is relatively less lifted by gas injection, may contain a relatively large amount of gas and increase the lifting force. Therefore, uniform flatness may be provided throughout the entire length of the first rib RB1. In addition, the above description focuses on the case where there are three receiving portions AR, but even in the case where there are five, seven, etc. receiving portions AR, the depth of the receiving portion AR may be smaller as the receiving portion AR is disposed closer to one end of the first rib RB1 in the longitudinal direction than the central portion of the first rib RB1.

[0081] Furthermore, in an embodiment, the bottom surface of each receiving portion AR may be flat. In an alternative embodiment, the bottom surface of each receiving portion AR may be recessed, that is, recessed in the direction of the first surface of the first rib RB1. In other words, each receiving portion AR may be most recessed at the center of the receiving portion AR in the longitudinal direction. Therefore, similar to the above, uniform flatness may be provided within each receiving portion AR.

[0082] Although the above description focuses on the first rib RB1 , it should be understood that the second rib RB2 may also have the same configuration as the first rib RB1 described above.

[0083] Figure 6 is a bottom view of an embodiment showing a bottom surface of a mask frame. Because the mask frame in the illustrated embodiment is similar to the mask frame described above, the following description will focus on the differences.

[0084] Reference Figure 6 In an embodiment, the widths of the plurality of receiving portions AR disposed on the first rib RB1 may be different from each other. For example, in an embodiment, the width w1 of the first receiving portion AR1 disposed in the center of the first rib RB1 among the plurality of receiving portions AR may be greater than the width w2 of the second receiving portion AR2 and the width w3 of the third receiving portion AR3 disposed at the opposite ends of the first receiving portion AR1, respectively. In this case, the first receiving portion AR1 may accommodate more gas than the second receiving portion AR2 and the third receiving portion AR3, and the lifting force applied to the first receiving portion AR1 may be greater than the lifting force applied to the second receiving portion AR2 and the lifting force of the third receiving portion AR3. This may compensate for the phenomenon of further lifting occurring at the opposite ends of the first rib RB1. That is, the first receiving portion AR1 disposed in the center of the first rib RB1, which is relatively less lifted by gas injection, may accommodate a relatively large amount of gas and increase the lifting force. Therefore, uniform flatness may be provided throughout the entire length of the first rib RB1. In addition, the above description focuses on the case where there are three receiving portions AR. However, even in the case of five, seven, etc. receiving portions AR, the width of the receiving portion AR may be smaller as the receiving portion AR is provided closer to one end of the first rib RB1 in the longitudinal direction than to the center portion of the first rib RB1.

[0085] Furthermore, in an embodiment, the depths of the plurality of receiving portions AR may be equal to each other. For example, in an embodiment, the depth of the first receiving portion AR1, the depth of the second receiving portion AR2, and the depth of the third receiving portion AR3 may be equal to each other.

[0086] However, in other embodiments, the depths of the plurality of receiving portions AR may be different from each other. For example, in an embodiment, as described above, the depth of the first receiving portion AR1 disposed in the center of the first rib RB1 may be greater than the depth of the second receiving portion AR2 and the depth of the third receiving portion AR2 disposed at opposite ends of the first receiving portion AR1, respectively.

[0087] In addition, in this case, in the second rib RB2, as in the first rib RB1, the widths of the plurality of receiving portions AR may be different from each other. However, in another embodiment, since the second rib RB2 corresponds to the short side, the difference in the degree of floating in the longitudinal direction due to the gas injection may not be large, and therefore, the widths of the plurality of receiving portions AR may be equal to each other.

[0088] Figure 7 is a bottom view of an embodiment showing a bottom surface of a mask frame. Because the mask frame in the illustrated embodiment is similar to the mask frame described above, the following description will focus on the differences.

[0089] In an embodiment, the width of the plurality of receiving portions AR disposed on the first rib RB1 may be smaller than the width of the plurality of receiving portions AR disposed on the second rib RB2. Specifically, the receiving portion AR disposed on the first rib RB1 may be defined as a first receiving portion AR1, a second receiving portion AR2, and a third receiving portion AR3. The receiving portion AR disposed on the second rib RB2 may be defined as a fourth receiving portion AR4, a fifth receiving portion AR5, and a sixth receiving portion AR6. In this case, the width w1 of the first receiving portion AR1 may be smaller than the width w4 of the fourth receiving portion AR4. When the gas is ejected, the second rib RB2 corresponding to the short side may be lifted less than the first rib RB1 corresponding to the long side. Therefore, by forming the width w4 of the fourth receiving portion AR4 disposed on the second rib RB2 corresponding to the short side to be larger than the width w1 of the first receiving portion AR1 disposed on the first rib RB1 corresponding to the long side, the fourth receiving portion AR4 may accommodate more gas than the first receiving portion AR1, and the fourth receiving portion AR4 may provide a larger lifting force. This may reduce the difference in the degree of floating between the first rib RB1 and the second rib RB2. That is, uniform flatness may be provided throughout the mask frame 410 .

[0090] Although not shown in the drawings, in an embodiment, the depth of the plurality of receiving portions AR disposed on the first rib RB1 may be less than the depth of the plurality of receiving portions AR disposed on the second rib RB2. In this case, the depth of the first receiving portion AR1 may be less than the depth of the fourth receiving portion AR4. When the gas is ejected, the second rib RB2 corresponding to the short side may be lifted less than the first rib RB1 corresponding to the long side. Therefore, by forming the depth of the fourth receiving portion AR4 disposed on the second rib RB2 corresponding to the short side to be greater than the depth of the first receiving portion AR1 disposed on the first rib RB1 corresponding to the long side, the fourth receiving portion AR4 may accommodate more gas than the first receiving portion AR1, and a greater lifting force may be provided. This may reduce the difference in the degree of floating between the first rib RB1 and the second rib RB2. That is, uniform flatness may be provided throughout the mask frame 410.

[0091] In this case, if Figure 7 As shown in FIG. 1 , the widths of the plurality of receiving portions AR disposed on the first rib RB1 and the widths of the plurality of receiving portions AR disposed on the second rib RB2 may be different from each other. However, the present disclosure is not limited thereto, and as Figure 3 As shown in , the widths of the plurality of receiving portions AR disposed on the first rib RB1 and the widths of the plurality of receiving portions AR disposed on the second rib RB2 may be equal to each other.

[0092] Figure 8 is a schematic cross-sectional view of an embodiment of an apparatus for manufacturing a display device including a mask frame.

[0093] The apparatus 2 for manufacturing a display device may include a chamber 10 , a first supporting part 20 , a second supporting part 30 , a mask assembly 400 , a deposition source 50 , a magnetic part 60 , a visual part 70 , and a pressure controlling part 80 .

[0094] A space in which the display substrate DS and the mask assembly 400 may be accommodated may be defined in the chamber 10. In this case, a portion of the chamber 10 may be open, and a gate valve 11 may be provided in the open portion of the chamber 10. In this case, the open portion of the chamber 10 may be opened or closed depending on the operation of the gate valve 11.

[0095] In this case, the display substrate DS may refer to a display substrate DS in a process of manufacturing a display device, in which at least one of an organic layer, an inorganic layer, and a metal layer is deposited on a substrate 100 (refer to FIG. Fig.10 In an alternative embodiment, the display substrate DS may be the substrate 100 on which no organic layer, inorganic layer, and metal layer are deposited.

[0096] The first supporting portion 20 may support the display substrate DS. In this case, the first supporting portion 20 may have a plate shape fixed in the chamber 10. In another embodiment, the first supporting portion 20 is where the display substrate DS is placed, and may be provided in the form of a shuttle that can move linearly inside the chamber 10. In another embodiment, the first supporting portion 20 may include an electrostatic chuck or an adhesive chuck fixed to the chamber 10 or provided in the chamber 10 to be movable in the chamber 10.

[0097] The second supporting part 30 may support the mask assembly 400. In this case, the second supporting part 30 may be disposed in the chamber 10. The second supporting part 30 may be capable of finely adjusting the position of the mask member 400. In this case, the second supporting part 30 may include a separate driving part or an alignment unit, etc. to move the mask assembly 400 in different directions.

[0098] In another embodiment, the second support part 30 may be provided in the form of a shuttle. In this case, the second support part 30 is where the mask assembly 400 is placed, and the mask assembly 400 may be transferred. For example, in an embodiment, after the mask assembly 400 is placed on the second support part 30, the second support part 30 may be moved to the outside of the chamber 10, and the chamber 10 may be entered from the outside.

[0099] In the above case, the first support portion 20 and the second support portion 30 may be integrated. In this case, the first support portion 20 and the second support portion 30 may each include a movable shuttle. In this case, the first support portion 20 and the second support portion 30 may include a structure for fixing the mask assembly 400 and the display substrate DS, the display substrate DS is placed on the mask assembly 400, and the first support portion 20 and the second support portion 30 can make the display substrate DS and the mask assembly 400 move linearly at the same time.

[0100] However, in the following description, for convenience of explanation, a case in which the first support portion 20 and the second support portion 30 are respectively formed at different positions in the chamber 10 is mainly described in detail.

[0101] The deposition source 50 may be disposed to face the mask assembly 400. In this case, the deposition source 50 may include a deposition material, and by applying heat to the deposition material, the deposition material may evaporate or sublime. The deposition source 50 may be fixed in the chamber 10, or may be able to move linearly in one direction in the chamber 10.

[0102] The mask assembly 400 may be disposed in the chamber 10. In this case, the mask assembly 400 may include a mask frame 410 and a mask sheet 420. A deposition material may be deposited on the display substrate DS by passing through the mask assembly 400.

[0103] The magnetic part 60 may be disposed in the chamber 10 to face the display substrate DS and / or the mask assembly 400. In this case, the magnetic part 60 may apply a force toward the display substrate DS to the mask assembly 400 by applying a magnetic force to the mask assembly 400. In particular, the magnetic part 60 may not only prevent the sagging of the mask sheet 420, but also make the mask sheet 420 adjacent to the display substrate DS. In addition, the magnetic part 60 may maintain a uniform distance between the mask sheet 420 and the display substrate DS.

[0104] The vision part 70 is provided in the chamber 10, and may capture an image of the positions of the display substrate DS and the mask assembly 400. In this case, the vision part 70 may include a camera for capturing the image of the display substrate DS and the mask assembly 400. The positions of the display substrate DS and the mask assembly 400 may be identified based on the image captured by the vision part 70, and thus, the deformation of the mask assembly 400 may be checked. In addition, based on the image, the first support part 20 may finely adjust the position of the display substrate DS, or the second support part 30 may finely adjust the position of the mask assembly 400. However, in the following description, a case where the positions of the display substrate DS and the mask assembly 400 are aligned with each other by finely adjusting the position of the mask assembly 400 via the second support part 30 is mainly described in detail.

[0105] The pressure control part 80 is connected to the chamber 10 and can control the pressure in the chamber 10. For example, in an embodiment, the pressure control part 80 can control the pressure in the chamber 10 to be the same as or similar to the atmospheric pressure. In addition, the pressure control part 80 can control the pressure in the chamber 10 to be the same as or similar to a vacuum state.

[0106] The pressure control part 80 may include a connection pipe 81 extending to the chamber 10 and a pump 82 provided on the connection pipe 81. In this case, according to the operation of the pump 82, external air may be introduced into the chamber 10 via the connection pipe 81, or the gas inside the chamber 10 may be guided to the outside via the connection pipe 81.

[0107] In a method of manufacturing a display device (not shown) by the above-described apparatus 2 for manufacturing a display device, first, a display substrate DS may be prepared.

[0108] The pressure control portion 80 may maintain the inside of the chamber 10 to be the same as or similar to the atmospheric pressure, and when the gate valve 11 is operated, the open portion of the chamber 10 may be opened.

[0109] Then, the display substrate DS may be loaded from the outside of the chamber 10 into the inside of the chamber 10. In this case, the display substrate DS may be loaded into the chamber 10 by various methods. For example, in an embodiment, the display substrate DS may be loaded from the outside of the chamber 10 into the inside of the chamber 10 by a robot arm or the like disposed outside the chamber 10. In another embodiment, when the first supporting portion 20 is formed in the form of a shuttle, the first supporting portion 20 may be transported from the inside of the chamber 10 to the outside of the chamber 10, the display substrate DS is placed on the first supporting portion 20 by another robot arm or the like disposed outside the chamber 10, and the first supporting portion 20 is loaded into the chamber 10 from the outside of the chamber 10.

[0110] As described above, the mask assembly 400 may be disposed in the chamber 10. In another embodiment, the mask assembly 400 may be loaded into the chamber 10 from outside the chamber 10 in the same or similar manner as the display substrate DS.

[0111] When the display substrate DS is loaded into the chamber 10, the display substrate DS may be placed on the first supporting portion 20. In this case, the vision portion 70 may capture an image of the positions of the display substrate DS and the mask assembly 400. The position of the display substrate DS and the position of the mask assembly 400 may be recognized based on the image captured by the vision portion 70. In this case, the apparatus 2 for manufacturing a display device includes a separate controller (not shown) to recognize the position of the display substrate DS and the position of the mask assembly 400.

[0112] When the recognition of the positions of the display substrate DS and the mask assembly 400 is completed, the second supporting portion 30 may finely adjust the position of the mask assembly 400 .

[0113] Then, when the deposition source 50 is operated, the deposition material may be supplied toward the mask assembly 400 and has passed through the plurality of pattern holes 425 (see FIG. Figure 2 ) may be deposited on the display substrate DS. In this case, the deposition source 50 may move in parallel with the display substrate DS and the mask assembly 400, or the display substrate DS and the mask assembly 400 may move in parallel with the deposition source 50. In other words, the deposition source 50 may move relative to the display substrate DS and the mask assembly 400. In this case, the pump 82 inhales or sucks the gas in the chamber 10 and discharges the gas to the outside, so that the pressure in the chamber 10 may be maintained to be the same as or similar to a vacuum state.

[0114] As described above, the deposition material supplied from the deposition source 50 passes through the mask assembly 400 to be deposited on the display substrate DS, and thus, a display device 1 (see FIG. 1 ) to be described later may be formed. Fig. 9 ) on at least one of multiple layers (e.g., an organic layer, an inorganic layer, and a metal layer).

[0115] Fig. 9 is a schematic plan view of an embodiment of a display device manufactured by an apparatus for manufacturing a display device.

[0116] Reference Fig. 9 , the display device 1 manufactured in the embodiment may include a display area DA and a peripheral area PA disposed outside the display area DA. The display device 1 may provide an image via an array of a plurality of pixels PX two-dimensionally arranged in the display area DA.

[0117] The peripheral area PA is an area where no image is provided, and may surround the entire display area DA or a partial portion of the display area DA. A driver or the like for providing an electrical signal or power to a pixel circuit corresponding to each of the plurality of pixels PX may be located in the peripheral area PA. A pad as an area to which an electronic device or a printed circuit board or the like may be electrically connected may be provided in the peripheral area PA.

[0118] In the following description, although the display device 1 is described as including an organic light emitting diode OLED (refer to Fig.10 ) as a light-emitting element, but the present disclosure is not limited to this. In another embodiment, the display device 1 may include a light-emitting display including an inorganic light-emitting diode (i.e., an inorganic light-emitting display). The inorganic light-emitting diode may include a PN junction diode including a material based on an inorganic material semiconductor. When a voltage is supplied to the PN junction diode in the forward direction, holes and electrons are injected, and the energy generated by the recombination of holes and electrons is converted into light energy, so that light of a predetermined color can be emitted. The above-mentioned inorganic light-emitting diode may have a width of tens to hundreds of microns, and in some embodiments, the inorganic light-emitting diode may also be referred to as a micro light-emitting diode ("LED"). In another embodiment, the display device 1 may include a quantum dot light-emitting display.

[0119] The display device 1 can be used as a display screen for various products (for example, not only portable electronic devices such as mobile phones, smart phones, tablet personal computers ("PCs"), mobile communication terminals, electronic organizers, electronic books, portable multimedia players ("PMPs"), navigation devices, or ultra-mobile PCs ("UMPCs"), but also televisions, notebook computers, monitors, billboards, or Internet of Things ("IoT") devices, etc.). In addition, the display device 1 in the embodiment can be used in wearable devices such as smart watches, watch phones, glasses-type displays, or head-mounted displays ("HMDs"). In addition, the display device 1 in the embodiment can be used as a display for an instrument panel of a vehicle, a central information display ("CID") set on a central instrument panel or dashboard of a vehicle, an interior mirror display instead of a side mirror of a vehicle, or a display set at the rear side of a front seat as a rear seat entertainment display for a vehicle.

[0120] Fig.10 is a schematic cross-sectional view of a display device manufactured by an apparatus for manufacturing a display device in an embodiment, which may correspond to Fig. 9 The display device is along Fig. 9 The cross section is taken along the line XX'.

[0121] Reference Fig.10 The display device 1 may include a stacked structure of a substrate 100, a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300. The display substrate DS (refer to Figure 8 ) can be obtained by stacking at least one of the pixel circuit layer PCL, the display element layer DEL, and the encapsulation layer 300 on the substrate 100, for example, in the process of manufacturing the display device 1.

[0122] The substrate 100 may have a multilayer structure including a base layer including a polymer resin and an inorganic layer. For example, in an embodiment, the substrate 100 may include a base layer including a polymer resin and a barrier layer as an inorganic insulating layer. For example, in an embodiment, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104 stacked in sequence. The first base layer 101 and the second base layer 103 may include polyimide ("PI"), polyethersulfone ("PES"), polyarylate, polyetherimide ("PEI"), polyethylene naphthalate ("PEN"), polyethylene terephthalate ("PET"), polyphenylene sulfide ("PPS"), polycarbonate ("PC"), triacetyl cellulose ("TAC"), and / or cellulose acetate propionate ("CAP"), etc. The first barrier layer 102 and the second barrier layer 104 may each include an inorganic insulating material such as silicon oxide, silicon oxynitride, and / or silicon nitride. The substrate 100 may have flexibility.

[0123] The pixel circuit layer PCL is disposed on the substrate 100 . Fig.10 The pixel circuit layer PCL is shown to include a thin film transistor TFT and a buffer layer 111, a first gate insulating layer 112, a second gate insulating layer 113, an interlayer insulating layer 114, a first planarizing insulating layer 115 and a second planarizing insulating layer 116 disposed below and / or above constituent elements of the thin film transistor TFT.

[0124] The buffer layer 111 may reduce or block the penetration of moisture, external air, or foreign matter (such as dust, etc.) from under the substrate 100, and may provide a planarized surface on the substrate 100. The buffer layer 111 may include an inorganic insulating material such as silicon oxide, silicon oxynitride, and silicon nitride, and may have a single-layer or multi-layer structure including the above materials.

[0125] The thin film transistor TFT on the buffer layer 111 may include a semiconductor layer Act, and the semiconductor layer Act may include polycrystalline silicon. In an alternative embodiment, the semiconductor layer Act may include amorphous silicon, an oxide semiconductor, an organic semiconductor, etc. The semiconductor layer Act may include a channel region C and a drain region D and a source region S located at opposite sides of the channel region C. The gate electrode GE may overlap the channel region C.

[0126] The gate electrode GE may include a low resistance metal material, a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may have a multi-layer or single-layer structure including the above materials.

[0127] The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE may include silicon oxide (SiO 2 ), Silicon Nitride (SiN x ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ) or zinc oxide (ZnO x ) and other inorganic insulating materials. ZnO x It may include ZnO and / or ZnO 2 .

[0128] The second gate insulating layer 113 may cover the gate electrode GE. Similar to the first gate insulating layer 112, the second gate insulating layer 113 may include a silicon-based material such as SiO 2 、SiN x 、SiOx N y 、Al 2 O 3 、TiO 2 、 2 O 5 , HfO 2 or ZnO x Inorganic insulating materials. ZnO x It may include ZnO and / or ZnO 2 .

[0129] The upper electrode Cst2 of the storage capacitor Cst may be disposed on the second gate insulating layer 113. The upper electrode Cst2 may overlap the gate electrode GE thereunder. In this case, the gate electrode GE and the upper electrode Cst2 overlap each other and the second gate insulating layer 113 interposed therebetween may form the storage capacitor Cst. In other words, the gate electrode GE may serve as the lower electrode Cst1 of the storage capacitor Cst.

[0130] As such, the storage capacitor Cst and the thin film transistor TFT may overlap each other. In some embodiments, the storage capacitor Cst may not overlap the thin film transistor TFT.

[0131] The upper electrode Cst2 may include Al, platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), Mo, Ti, tungsten (W) and / or Cu, and may have a single-layer or multi-layer structure including the above materials.

[0132] The interlayer insulating layer 114 may cover the upper electrode Cst2. The interlayer insulating layer 114 may include SiO 2 、SiN x 、SiO x N y 、Al 2 O 3 、TiO 2 、 2 O 5 , HfO 2 and / or ZnO x Etc. ZnO x It may include ZnO and / or ZnO 2 The interlayer insulating layer 114 may have a single-layer or multi-layer structure including the above-mentioned inorganic insulating material.

[0133] The drain electrode DE and the source electrode SE may each be disposed on the interlayer insulating layer 114. The drain electrode DE and the source electrode SE may be connected to the drain region D and the source region S, respectively, through contact holes defined in the insulating layer thereunder. The drain electrode DE and the source electrode SE may include a material exhibiting excellent conductivity. The drain electrode DE and the source electrode SE may each include a conductive material including Mo, Al, Cu, or Ti, etc., and may each have a multilayer or single-layer structure including the above materials. In an embodiment, the drain electrode DE and the source electrode SE may each have a multilayer structure of Ti / Al / Ti.

[0134] The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may include an organic insulating material such as a general polymer such as polystyrene ("PS"), polymethyl methacrylate ("PMMA"), a polymer derivative having a phenol group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a p-xylene polymer, a vinyl alcohol polymer, or any combination thereof.

[0135] The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115. The second planarization insulating layer 116 may include the same material as that of the first planarization insulating layer 115, and may include an organic insulating material such as a general polymer such as PS, PMMA, a polymer derivative having a phenol group, an acrylic-based polymer, an imide-based polymer, an aryl ether-based polymer, an amide-based polymer, a fluorine-based polymer, a p-xylene-based polymer, a vinyl alcohol-based polymer, or any combination thereof.

[0136] The display element layer DEL may be disposed on the pixel circuit layer PCL having the above structure. The display element layer DEL may include an organic light emitting diode OLED as a display element (i.e., a light emitting element), and the organic light emitting diode OLED may include a stacked structure of a pixel electrode 210, an intermediate layer 220, and a common electrode 230. The organic light emitting diode OLED may emit, for example, red light, green light, or blue light, or red light, green light, blue light, or white light. The organic light emitting diode OLED may emit light via a light emitting region, and the light emitting region may be defined as a pixel PX.

[0137] The pixel electrode 210 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through a contact hole defined in the second planarization insulating layer 116 and the first planarization insulating layer 115 and a contact metal CM disposed on the first planarization insulating layer 115 .

[0138] The pixel electrode 210 may include, for example, indium tin oxide ("ITO"), indium zinc oxide ("IZO"), ZnO, indium oxide (In 2 O 3 ), indium gallium oxide ("IGO"), or aluminum zinc oxide ("AZO"). In another embodiment, the pixel electrode 210 may include a reflective film including Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, or any combination thereof. In another embodiment, the pixel electrode 210 may also include a conductive oxide including ITO, IZO, ZnO, or In above / below the above reflective film. 2 O 3 layer.

[0139] A pixel defining layer 117 defining an opening 117OP exposing a central portion of the pixel electrode 210 is disposed on the pixel electrode 210. The pixel defining layer 117 may include an organic insulating material and / or an inorganic insulating material. The opening 117OP may define a light emitting region where light is emitted from the organic light emitting diode OLED. For example, in an embodiment, the size / width of the opening 117OP may correspond to the size / width of the light emitting region. Therefore, the size and / or width of the pixel PX may depend on the size and / or width of the opening 117OP of the pixel defining layer 117 corresponding to the pixel PX.

[0140] The intermediate layer 220 may include an emission layer 222 formed to correspond to the pixel electrode 210. The emission layer 222 may include a high molecular weight organic material or a low molecular weight organic material that emits light of a predetermined color. In an alternative embodiment, the emission layer 222 may include an inorganic light emitting material or quantum dots.

[0141] In an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 disposed below and above the emission layer 222, respectively. The first functional layer 221 may include, for example, a hole transport layer ("HTL") or an HTL and a hole injection layer ("HIL"). The second functional layer 223 disposed above the emission layer 222 may include an electron transport layer ("ETL") and / or an electron injection layer ("EIL"). Like the common electrode 230 described below, the first functional layer 221 and / or the second functional layer 223 may be a common layer covering the entire substrate 100.

[0142] The common electrode 230 is disposed on the pixel electrode 210 and may overlap with the pixel electrode 210. The common electrode 230 may include a conductive material having a relatively low work function. For example, in an embodiment, the common electrode 230 may include a (semi) transparent layer including Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, lithium (Li), Ca, or any alloy thereof. In an alternative embodiment, the common electrode 230 may also include a (semi) transparent layer including ITO, IZO, ZnO, or In on the (semi) transparent layer including the above materials. 2 O 3 The common electrode 230 may be integrated to cover the entire substrate 100.

[0143] The encapsulation layer 300 may be disposed on the display element layer DEL and may cover the display element layer DEL. The encapsulation layer 300 includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and in an embodiment, Fig.10 It is shown that the encapsulation layer 300 includes a first inorganic encapsulation layer 310 , an organic encapsulation layer 320 , and a second inorganic encapsulation layer 330 which are sequentially stacked.

[0144] The first inorganic encapsulating layer 310 and the second inorganic encapsulating layer 330 may each include one or more inorganic materials selected from the group consisting of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. x ) may include ZnO and / or ZnO 2 The organic encapsulation layer 320 may include a polymer-based material. The polymer-based material may include an acrylic resin, an epoxy resin, a polyimide, or polyethylene, etc. In an embodiment, the organic encapsulation layer 320 may include acrylate. The organic encapsulation layer 320 may be formed by curing a monomer or applying a polymer. The organic encapsulation layer 320 may have transparency.

[0145] Although not shown, the touch sensor layer may be disposed on the encapsulation layer 300, and the optical functional layer may be disposed on the touch sensor layer. The touch sensor layer may obtain coordinate information based on an external input (e.g., a touch event). The optical functional layer may reduce the reflectivity of light (external light) incident on the display device from the outside, and / or may improve the color purity of light emitted from the display device. In an embodiment, the optical functional layer may include a retarder and / or a polarizer. The retarder may be a film type or a liquid crystal coating type, and may include a λ / 2 retarder and / or a λ / 4 retarder. The polarizer may also be a film type or a liquid crystal coating type. The film type may include a stretched synthetic resin film, and the liquid crystal coating type may include a liquid crystal arranged in a predetermined array. The retarder and the polarizer may also include a protective film.

[0146] The adhesive member may be disposed between the touch sensor layer and the optical function layer. The adhesive member may adopt any general member known in the art without limitation. The adhesive member may be a pressure sensitive adhesive ("PSA") member.

[0147] Through the embodiments, the flatness of the mask frame can be improved, and the mask sheet can be disposed at a precise position of the mask frame.

[0148] The effects of the present disclosure are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood from the description of the claims by those skilled in the art.

[0149] It should be understood that the embodiments described herein should be considered as illustrative only and not for limiting purposes. The description of the features or advantages in each embodiment should generally be considered as being applicable to other similar features or advantages in other embodiments. Although the embodiments have been described with reference to the accompanying drawings, it will be understood by those skilled in the art that various changes in form and detail may be made in the embodiments without departing from the spirit and scope defined in the appended claims.

Claims

1. A mask assembly, wherein: The mask assembly comprises: Mask frame, including: a plurality of ribs including a first rib extending in a first direction, the plurality of ribs defining an open area; and a plurality of receiving portions provided on the first surface of the first rib and spaced apart from each other in a longitudinal direction of the first rib; and The mask sheet is disposed on the second surface of the first rib of the mask frame and covers the opening area, wherein the second surface is opposite to the first surface.

2. The mask assembly according to claim 1, wherein: The plurality of receiving sections are provided in odd numbers.

3. The mask assembly according to claim 1, wherein: Each of the plurality of receiving portions has a constant width in the longitudinal direction.

4. The mask assembly according to claim 1, wherein: The plurality of receiving portions include: a first receiving portion provided at a center of the first rib; and a second receiving portion provided at at least one of opposite ends of the first receiving portion in the longitudinal direction, and Wherein, the width of the first receiving portion is greater than the width of the second receiving portion.

5. The mask assembly according to claim 1, wherein: The plurality of receiving portions include: a first receiving portion provided at a center of the first rib; and a second receiving portion provided at at least one of opposite ends of the first receiving portion in the longitudinal direction, and Wherein, the depth of the first receiving portion is greater than the depth of the second receiving portion.

6. The mask assembly according to claim 1, wherein: The plurality of ribs include a second rib extending in a second direction intersecting the first direction and having a length shorter than that of the first rib, and The depth of the receiving portion disposed on the second rib among the plurality of receiving portions is greater than the depth of the receiving portion disposed on the first rib among the plurality of receiving portions.

7. The mask assembly according to claim 6, wherein: The receiving portion provided on the second rib has a width greater than a width of the receiving portion provided on the first rib.

8. The mask assembly according to claim 1, wherein: A ratio of a sum of lengths of the plurality of receiving portions to a length of the first rib is 0.8 to 0.

9.

9. The mask assembly according to claim 1, wherein: A bottom surface of each of the plurality of receiving portions is concavely formed toward the second surface of the first rib on which the mask sheet is disposed.

10. The mask assembly according to claim 1, wherein: A depth of each of the plurality of receiving portions corresponds to 3% to 10% of a thickness of the mask frame.

11. A method of manufacturing a mask assembly, wherein: The method comprises: disposing a mask frame including a first rib extending in a first direction on the mask stage; fixing the mask sheet on the mask frame; and A gas is injected into a plurality of receiving portions which are provided on one surface of the first rib facing the mask stage and are spaced apart from each other in a longitudinal direction of the first rib.

12. The method according to claim 11, wherein: The plurality of receiving portions are provided in an odd number on the first rib.

13. The method according to claim 11, wherein: Each of the plurality of receiving portions has a constant width in the longitudinal direction.

14. The method according to claim 11, wherein: The plurality of receiving portions include: a first receiving portion provided at a center of the first rib; and a second receiving portion provided at at least one of opposite ends of the first receiving portion in the longitudinal direction, and Wherein, the width of the first receiving portion is greater than the width of the second receiving portion.

15. The method according to claim 11, wherein: The plurality of receiving portions include: a first receiving portion provided at a center of the first rib; and a second receiving portion provided at at least one of opposite ends of the first receiving portion in the longitudinal direction, and Wherein, the depth of the first receiving portion is greater than the depth of the second receiving portion.

16. The method according to claim 11, wherein: The mask frame further includes a second rib extending in a second direction intersecting the first direction and having a length shorter than that of the first rib, and The depth of the receiving portion disposed on the second rib among the plurality of receiving portions is greater than the depth of the receiving portion disposed on the first rib among the plurality of receiving portions.

17. The method according to claim 16, wherein: The receiving portion provided on the second rib has a width greater than a width of the receiving portion provided on the first rib.

18. The method according to claim 11, wherein: A ratio of a sum of lengths of the plurality of receiving portions to a length of the first rib is 0.8 to 0.

9.

19. An apparatus for manufacturing a display device, wherein: The device comprises: room; a deposition source accommodated in the chamber and facing the display substrate; and A mask assembly is disposed between the display substrate and the deposition source, and the mask assembly comprises: Mask frame, including: a plurality of ribs including a first rib extending in a first direction, the plurality of ribs defining an open area; and a plurality of receiving portions provided on the first surface of the first rib and spaced apart from each other in a longitudinal direction of the first rib; and The mask sheet is disposed on the second surface of the first rib of the mask frame and covers the opening area, wherein the second surface is opposite to the first surface.

20. The apparatus of claim 19, wherein: The plurality of receiving sections are provided in odd numbers.

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