Heating device, coating equipment and application method of coating equipment

Abstract

The invention relates to the technical field of semiconductor equipment, in particular to a heating device, coating equipment and a using method of the coating equipment. In the embodiment of the invention, the heating main body is divided into the middle area and the edge area, the middle area is divided into the multiple middle subareas, the middle subarea located in the center of the heating main body is set as the first middle subarea, and the middle subareas located on the two sides of the first middle subarea are set as the second middle subareas; the parts, located in the first middle subarea, the second middle subarea and the edge area, of the heating main body are configured to be independently controlled, so that the temperature of each part of the heating main body can be respectively controlled, the temperature of different areas can be regulated and controlled according to the coating condition, and the coating quality can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment technology, and in particular to a heating device, a coating device, and a method for using the coating device. Background Art

[0002] In the process of manufacturing semiconductor devices, deposition or coating processes can be completed on substrates by physical vapor deposition or chemical vapor deposition. For most coating equipment based on physical vapor deposition or chemical vapor deposition, a heating device is usually used to provide the required heat for the coating process. The heating uniformity of the substrate will affect the quality of the coating, especially the coating quality of large-size substrates is more difficult to control. Therefore, how to improve the coating quality is an urgent problem to be solved. Summary of the invention

[0003] Based on this, it is necessary to provide a heating device, a coating device and a method for using the coating device to improve the coating quality.

[0004] According to one aspect of the present application, an embodiment of the present application provides a heating device, including a heating body, wherein the heating body has a middle area and an edge area surrounding the middle area;

[0005] The middle area includes a plurality of middle partitions arranged in sequence along a first direction, the plurality of middle partitions including a first middle partition located at the center of the heating body, and a plurality of second middle partitions located at both sides of the first middle partition along the first direction; an area of ​​the first middle partition is smaller than an area of ​​the second middle partition;

[0006] The edge region has an inner contour arranged around the middle region, and an outer contour arranged around the inner contour; along the first direction and the second direction, there is a uniform spacing between the inner contour and the outer contour; the first direction and the second direction intersect each other;

[0007] The portion of the heating body located at the first middle partition, the portion of the heating body located at the second middle partition, and the portion of the heating body located at the edge area are configured to be independently controlled.

[0008] In one embodiment, the first intermediate zone includes a plurality of first sub-zones, and a plurality of portions of the heating body located in the plurality of first sub-zones are configured to be independently controlled; and / or

[0009] The at least one second intermediate zone includes a plurality of second sub-zones, and a plurality of portions of the heating body located in the plurality of second sub-zones are configured to be independently controlled.

[0010] In one embodiment, the edge region includes two first edge areas disposed opposite to each other along a first direction, and two second edge areas disposed opposite to each other along a second direction; each first edge area connects two second edge areas;

[0011] All first edge regions and all second edge regions are configured to be independently controlled.

[0012] In one embodiment, at least one second edge region includes a plurality of edge partitions arranged in sequence along the first direction, the sides of two edge partitions adjacent to each other along the first direction define a first boundary, and the sides of two middle partitions adjacent to each other along the first direction define a second boundary; among all the second boundaries and all the first boundaries corresponding to the same second edge region, two adjacent boundaries are spaced apart in the first direction; and / or

[0013] The first direction and the second direction are perpendicular to each other.

[0014] In one embodiment, the heating body includes a first heating assembly located in the first edge area, the first heating assembly includes at least one first heating element, the first heating element includes a plurality of first heating segments extending along the second direction; in the same first heating element, all the first heating segments are sequentially arranged along the first direction; and / or

[0015] The heating body includes a second heating assembly located in the second edge area, the second heating assembly includes at least one second heating element, and the second heating element includes a plurality of second heating segments extending along the first direction; in the same second heating element, all the second heating segments are arranged in sequence along the second direction.

[0016] In one embodiment, the heating device further comprises a uniform heat member, which is arranged on a heating side of the heating body; the heating side is a side of the heating body arranged along a third direction, and the first direction and the second direction are both perpendicular to the third direction;

[0017] A plurality of uniform heating parts are convexly arranged on one side of the uniform heating part away from the heating body; the plurality of uniform heating parts are arranged adjacent to each other in sequence, and a concave part is defined between two adjacent uniform heating parts;

[0018] The arrangement direction of multiple uniform heating parts, the longitudinal extension direction of the uniform heating parts and the third direction are perpendicular to each other, the longitudinal extension direction of the uniform heating parts and the longitudinal extension direction of the outlet of the coating source are parallel to each other, and the coating source is used to be arranged on the side of the uniform heating part away from the heating body.

[0019] In one of the embodiments, the heating device further includes a plurality of first detection members and a plurality of second detection members;

[0020] A plurality of first detection members are arranged in the middle area and the edge area to detect the temperature of the middle area and the temperature of the edge area;

[0021] A plurality of second detection members are matched with the heating side of the heating device and are used to detect the temperature of the heating side of the heating device.

[0022] According to another aspect of the present application, an embodiment of the present application provides a coating device, including the heating device in any of the above embodiments.

[0023] In one embodiment, the coating device further comprises a plurality of chambers arranged in sequence along the first direction, and a heating device is provided in the chamber;

[0024] A coating source is also provided in at least one chamber, and the chamber provided with the coating source is a first target chamber; in the first target chamber, the coating source is located on the heating side of the heating device and is spaced apart from the heating device;

[0025] Wherein, when the first target chamber is not the first chamber, there is a second target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber; or

[0026] In the case where the first target chamber is not the first chamber, there is a third target chamber in the chambers located upstream of the first target chamber in the first direction, and the heating temperature of the third target chamber is configured to be greater than the heating temperature of the first target chamber.

[0027] In one embodiment, when the first target chamber is not the first chamber, there are a plurality of second target chambers in the chambers located upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the plurality of second target chambers are configured to increase sequentially; or

[0028] When the first target chamber is not the first chamber, there are a plurality of third target chambers in the chambers located upstream of the first target chamber along the first direction; and along the first direction, the heating temperatures of the plurality of third target chambers are configured to decrease sequentially.

[0029] In one embodiment, the coating device further comprises a plurality of chambers arranged in sequence along the first direction, and a heating device is provided in the chamber;

[0030] Among the plurality of chambers, there is a chamber provided with two heating devices, and the heating sides of the two heating devices are arranged opposite to each other and spaced apart.

[0031] In one embodiment, the heating device further comprises a plurality of first detection members and a plurality of second detection members; the plurality of first detection members are arranged in cooperation with the middle area and the edge area to detect the temperature of the middle area and the temperature of the edge area; the plurality of second detection members are arranged in cooperation with the heating side of the heating device to detect the temperature of the heating side of the heating device;

[0032] The coating device also includes a prompting member and a controller;

[0033] The prompting member is electrically connected to the first detecting member and the controller respectively, and the prompting member is used to give a prompt when the temperature detected by the first detecting member exceeds a preset temperature;

[0034] The controller is electrically connected to the first detection member and the second detection member, respectively, and is used to adjust the heating power of the heating device according to the detection information of the first detection member and the second detection member, and is used to adjust the heating power of the heating device according to the prompt information of the prompt member; the controller is configured to independently control the heating temperatures of the first middle partition, the second middle partition and the edge area.

[0035] In one embodiment, the coating device is configured to perform a process on a substrate, the length of the substrate is greater than 800 mm, the width of the substrate is greater than 800 mm, and the thickness of the substrate is greater than 2 mm.

[0036] According to another aspect of the present application, an embodiment of the present application provides a method for using a coating device, where the coating device is the coating device in any of the above embodiments; the method for using includes:

[0037] Based on the temperature of the first middle zone, the temperature of the second middle zone, and the temperature of the edge zone of the heating body, the heating power of the first middle zone, the heating power of the second middle zone, and the heating power of the edge zone are controlled respectively.

[0038] In one embodiment, the coating device further comprises a plurality of chambers arranged in sequence along a first direction, a heating device is provided in the chamber, a coating source is further provided in at least one chamber, and the chamber provided with the coating source is a first target chamber; the use method further comprises:

[0039] Based on the order in which the first target chambers are located along the first direction, the heating powers of the heating devices in the plurality of chambers are controlled so that the heating temperatures of the plurality of chambers are configured in a preset manner.

[0040] In one embodiment, the preset method includes at least one of the following methods:

[0041] Method 1: when the first target chamber is not the first chamber, there is a second target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber;

[0042] Mode 2: when the first target chamber is not the first chamber, there is a third target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the third target chamber is configured to be greater than the heating temperature of the first target chamber;

[0043] Mode 3: when the first target chamber is not the first chamber, there are multiple second target chambers in the chambers located upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple second target chambers are configured to increase in sequence;

[0044] Mode 4: when the first target chamber is not the first chamber, there are multiple third target chambers in the chambers upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple third target chambers are configured to decrease in sequence.

[0045] In the above-mentioned heating device, coating equipment and method for using the coating equipment, the heating device at least includes a heating body, and the heating body is divided into a middle area and an edge area, and the middle area is divided into a plurality of middle partitions, and the middle partition located at the center of the heating body is set as the first middle partition, and the middle partitions located on both sides of the first middle partition are set as the second middle partition, so that the part of the heating body located in the first middle partition, the part located in the second middle partition and the part located in the edge area are configured to be independently controlled, so that the temperature of each part of the heating body can be controlled separately, and then the temperature of different areas can be adjusted according to the coating situation, which is conducive to improving the coating quality. Since the first middle partition is located in the center of the heating body, there is a situation where part of the heat is concentrated in the first middle partition. By setting the area of ​​the first middle partition to be smaller than the area of ​​the second middle partition, it is conducive to more precise control of the temperature of the first middle partition, which is also conducive to improving the coating quality. By setting the spacing between the inner contour and the outer contour of the edge area uniformly along the first direction and uniformly along the second direction, it is not only conducive to the edge area having a more uniform heat diffusion gradient, improving the temperature uniformity of the edge area, and further improving the coating quality, but also convenient for manufacturing the heating body. Therefore, the heating device provided in the embodiment of the present application is beneficial to improving the coating quality by performing zone temperature control on the heating body.

[0046] Additional aspects and advantages of the embodiments of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the embodiments below. The accompanying drawings are only for the purpose of illustrating the embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0048] Figure 1 A schematic diagram of the structure of a heating device provided in some embodiments of the present application at a viewing angle;

[0049] Figure 2 A schematic diagram of an edge region of a heating device provided in some embodiments of the present application;

[0050] Figure 3 for Figure 1 A schematic diagram of the zones of the heating device is shown;

[0051] Figure 4 A schematic diagram of the zones of the heating device provided in some other embodiments of the present application;

[0052] Figure 5 A schematic diagram of the structure of a heating device provided in some other embodiments of the present application at a viewing angle;

[0053] Figure 6 for Figure 5 A schematic diagram of the exploded structure of the heating device is shown;

[0054] Figure 7 A schematic diagram of a heating device provided in some embodiments of the present application in use;

[0055] Figure 8 A schematic cross-sectional view of a partial structure of a heat distribution element provided in some embodiments of the present application;

[0056] Fig. 9 A schematic cross-sectional view of a partial structure of a heat distribution member provided in some other embodiments of the present application;

[0057] Fig.10 A schematic cross-sectional view of a partial structure of a heat distribution element provided in some other embodiments of the present application;

[0058] Fig.11 A schematic diagram of a heat radiation area formed on a substrate by a heat distribution member provided in some embodiments of the present application;

[0059] Fig.12 A schematic diagram of the structure of the coating equipment provided in some embodiments of the present application.

[0060] Description of reference numerals:

[0061] Coating equipment 10, heating device 100, heating body 110, middle area m, first middle partition m1, first sub-partition m11, second middle partition m2, second sub-partition m21, edge area e, first edge area e1, second edge area e2, edge partition e21, inner contour w1, outer contour w2, first boundary L1, second boundary L2, first heating component 111, first heating element 111a, first heating section J1, second heating component 112, second heating element 112a, second heating section J2, third heating component 113, third heating element 113a, third heating section J3, mounting member 114, heating component J0, uniform heating member 120, uniform heating portion 121, first detection member 130, second detection member 140, coating source 200, chamber 300, substrate 20, heat radiation area R, width u, first direction F1, second direction F2, third direction F3. DETAILED DESCRIPTION

[0062] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0063] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0064] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0065] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0066] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0067] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0068] Figure 1 A schematic diagram of the structure of a heating device 100 provided in some embodiments of the present application at a viewing angle is shown; Figure 2 A schematic diagram of an edge region e in a heating device 100 provided in some embodiments of the present application is shown; Figure 3 Shows Figure 1 The illustrated schematic diagram is a partition diagram of the heating device 100; for ease of explanation, only the content related to the embodiment of the present application is shown.

[0069] Please refer to Figures 1 to 3 The embodiment of the present application provides a heating device 100, including a heating body 110, wherein the heating body 110 has a middle region m and an edge region e surrounding the middle region m. Specifically, the heating body 110 is a component constituting the body of the heating device 100. The middle region m and the edge region e constitute a heating region. The edge region e can be regarded as surrounding the outside of the middle region m and constituting a boundary portion of the entire heating region.

[0070] The middle area m includes a plurality of middle partitions arranged in sequence along the first direction F1. The plurality of middle partitions include a first middle partition m1 located at the center of the heating body 110, and a plurality of second middle partitions m2 located on both sides of the first middle partition m1 along the first direction F1. The area of ​​the first middle partition m1 is smaller than the area of ​​the second middle partition m2. Specifically, the number of second middle partitions m2 on both sides of the first middle partition m1 relatively arranged along the first direction F1 may be the same or different. The areas of all second middle partitions m2 may be equal or unequal. In the case where there are second middle partitions m2 with different areas, the area of ​​the first middle partition m1 is smaller than the minimum area of ​​the second middle partition m2. Exemplarily, in combination with reference Figure 1 , illustrating a situation where a second middle partition m2 is respectively provided on both sides of the first middle partition m1 along the first direction F1.

[0071] The edge region e has an inner contour w1 arranged around the middle region m, and an outer contour w2 arranged around the inner contour w1. Along the first direction F1 and the second direction F2, the inner contour w1 and the outer contour w2 have a uniform spacing respectively. The first direction F1 and the second direction F2 intersect each other. In the embodiment of the present application, the first direction F1 and the second direction F2 are perpendicular to each other. The spacing between the inner contour w1 and the outer contour w2 along the first direction F1 may be equal to or unequal to the spacing between the inner contour w1 and the outer contour w2 along the second direction F2. For example, in combination with reference Figure 2 , illustrating a situation where the spacing between the inner contour w1 and the outer contour w2 along the first direction F1 is equal to the spacing between the inner contour w1 and the outer contour w2 along the second direction F2.

[0072] The portion of the heating body 110 located in the first middle partition m1, the portion of the heating body 110 located in the second middle partition m2, and the portion of the heating body 110 located in the edge region e are configured to be independently controlled. That is, the heating temperatures of the portion of the heating body 110 located in the first middle partition m1, the portion of the heating body 110 located in the second middle partition m2, and the portion of the heating body 110 located in the edge region e can be controlled separately, and the heating temperatures of the three can be consistent or inconsistent.

[0073] By dividing the heating body 110 into a middle area m and an edge area e, dividing the middle area m into a plurality of middle partitions, and setting the middle partition located at the center of the heating body 110 as the first middle partition m1, and setting the middle partitions located on both sides of the first middle partition m1 as the second middle partition m2, the portion of the heating body 110 located in the first middle partition m1, the portion located in the second middle partition m2, and the portion located in the edge area e are configured to be independently controlled, so that the temperature of each part of the heating body 110 can be controlled separately, and then the temperature of different areas can be adjusted according to the coating conditions, which is beneficial to improving the coating quality. Since the first middle partition m1 is located at the center of the heating body 110, there is a situation where part of the heat is concentrated in the first middle partition m1. By setting the area of ​​the first middle partition m1 to be smaller than the area of ​​the second middle partition m2, it is beneficial to more finely control the temperature of the first middle partition m1, which is also beneficial to improving the coating quality. By evenly setting the distance between the inner contour w1 and the outer contour w2 of the edge area e along the first direction F1 and the second direction F2, it is not only beneficial for the edge area e to have a more uniform heat diffusion gradient, improving the temperature uniformity of the edge area e, and further improving the coating quality, but also facilitates the manufacture of the heating body 110.

[0074] For example, when the temperatures of the various regions need to be consistent, since the edge region e dissipates heat relatively quickly, a higher heating power is required at the edge region e to improve the temperature difference between the edge region e and the central region. Therefore, the heating power of the edge region e can be configured to be higher than the heating power of the central region. At the same time, since the first middle partition m1 is located at the center of the heating body 110, the heat that can be accumulated in the first middle partition m1 is higher than that in the second middle partition m2. Therefore, the heating power of the first middle partition m1 can be configured to be lower than the heating power of the second middle partition m2. It can be understood that when the temperature difference of each region needs to be within the target range, or the temperature difference of each region needs to be controlled according to different stages, since the portion of the heating body 110 located in the first middle partition m1, the portion located in the second middle partition m2, and the portion located in the edge region e are configured to be independently controlled, the temperature of each region can be regulated according to different situations, which will not be described in detail here.

[0075] Therefore, the heating device 100 provided in the embodiment of the present application makes the heating method more flexible by performing zone temperature control on the heating body 110, which is beneficial to improving the coating quality.

[0076] Figure 4 A schematic diagram of partitions of a heating device 100 provided in some other embodiments of the present application is shown; for ease of explanation, only the contents related to the embodiments of the present application are shown.

[0077] In some embodiments, please refer to Figure 4 , the first intermediate partition m1 includes multiple first sub-partitions m11, and multiple parts of the heating body 110 located in the multiple first sub-partitions m11 are configured to be independently controlled; and / or, at least one second intermediate partition m2 includes multiple second sub-partitions m21, and multiple parts of the heating body 110 located in the multiple second sub-partitions m21 are configured to be independently controlled.

[0078] The plurality of first sub-areas m11 may be arranged along the first direction F1, along the second direction F2, or along the first direction F1 and the second direction F2. The second sub-area m21 may be understood with reference to the first sub-area m11, and will not be described in detail herein. Figure 4 As an example, it illustrates a situation where all first sub-areas m11 are arranged along the second direction F2 and all second sub-areas m21 are arranged along the second direction F2.

[0079] In this way, by configuring the first middle partition m1 to include multiple first sub-partitions m11, and / or configuring the second middle partition m2 to include multiple second sub-partitions m21, the heating body 110 has more independently controllable parts. In this way, it is possible to achieve more refined and flexible regulation of the temperature of each area of ​​the heating body 110, which is beneficial to improving the required coating quality and meeting the coating requirements under different usage requirements.

[0080] In some embodiments, please refer to Figure 1 and Figure 3 The edge region e includes two first edge regions e1 disposed opposite to each other along a first direction F1, and two second edge regions e2 disposed opposite to each other along a second direction F2. Each first edge region e1 connects two second edge regions e2. All first edge regions e1 and all second edge regions e2 are configured to be independently controlled.

[0081] The positions of the various parts of the edge area e are different in the entire heating area, and they may face different heat dissipation conditions in different usage scenarios. For example, when the heating device 100 is arranged in a cavity extending along the first direction F1, and the cavity is provided with openings at both ends along the first direction F1, the heat dissipation speed of the parts of the edge area e close to the two ends of the cavity along the first direction F1 will be faster. In this way, by dividing the edge area into a first edge area e1 and a second edge area e2 that can be independently controlled, it is possible to set a suitable heating temperature and heating parameters for each area according to these different heat dissipation conditions, so as to achieve more refined local temperature regulation, so that each part of the edge area e can reach the required temperature. Furthermore, the heating energy required for each area can be determined according to factors such as the area and heat dissipation characteristics of each area of ​​the edge area e, and targeted optimization allocation can be performed, so that the energy utilization efficiency can be further improved while achieving flexible regulation and refined control.

[0082] In some embodiments, please refer to Figure 1 and Figure 3 At least one second edge region e2 includes a plurality of edge subregions e21 sequentially arranged along the first direction F1, and the sides of two adjacent edge subregions e21 facing each other along the first direction F1 define a first boundary L1, and the sides of two adjacent middle subregions facing each other along the first direction F1 define a second boundary L2. Among all first boundaries L1 and all second boundaries L2, there is a gap between two adjacent boundaries along the first direction F1.

[0083] The boundaries in “two adjacent boundaries” can be two first boundaries L1, two second boundaries L2, or the first boundary L1 and the second boundary L2, which can be determined according to specific partitioning conditions.

[0084] For example, for the second edge region e2 having the edge partition e21, the second boundaries L2 and the first boundaries L1 of the second edge region e2 can be substantially alternately arranged in sequence along the first direction F1, and adjacent first boundaries L1 and second boundaries L2 are spaced apart in the first direction F1. Figure 3 For example, two first boundaries L1 and two second boundaries L2 are illustrated, and for one of the second edge regions e2 having an edge partition e21, the second boundary L2, the first boundary L1, and the second boundary L2 are sequentially arranged along the first direction F1, and the other second edge region e2 having an edge partition e21 is also arranged in the same manner, which is not described in detail here. The first boundaries L1 corresponding to the two second edge regions e2 having edge partitions e21 can be aligned along the second direction F2, or can be non-aligned along the second direction F2, which is not specifically limited here.

[0085] In this way, on the one hand, in the process of heat transfer between zones, no straight conduction path will be formed. Heat needs to be transferred between different zones in a more circuitous and dispersed manner so that the heat can be diffused more evenly in the entire heating area, which helps to control the temperature of each zone and improve the situation where the temperature gradient difference is too large and difficult to control the temperature due to the concentration of the conduction path; on the other hand, since the first boundary L1 and the second boundary L2 are not aligned, heat can be exchanged in different directions. This multi-directional heat exchange can make the heat mix more fully between zones, further optimize the temperature distribution, and make the temperatures at different positions in the entire heating area closer, which is further beneficial to control the temperature of each zone and improve the temperature uniformity.

[0086] In some embodiments, please refer to Figure 1 , Figure 3 and Figure 4 , the first direction F1 and the second direction F2 are perpendicular to each other.

[0087] In this way, the various areas on the heating body 110 can be arranged with a certain regularity, which is conducive to dividing and setting the various areas of the heating body 110, which is not only conducive to space utilization, but also conducive to controlling the temperature of each area with the help of regular arrangement.

[0088] In some embodiments, please refer to Figure 1 and Figure 3 The heating body 110 includes a first heating component 111 located in the first edge area e1, the first heating component 111 includes at least one first heating element 111a, the first heating element 111a includes a plurality of first heating segments J1 extending along the second direction F2; in the same first heating element 111a, all the first heating segments J1 are sequentially arranged along the first direction F1; and / or, the heating body 110 includes a second heating component 112 located in the second edge area e2, the second heating component 112 includes at least one second heating element 112a, the second heating element 112a includes a plurality of second heating segments J2 extending along the first direction F1; in the same second heating element 112a, all the second heating segments J2 are sequentially arranged along the second direction F2.

[0089] Since the edge area e can be roughly regarded as being enclosed and formed along the first direction F1, along the second direction F2, along the first direction F1 and along the second direction F2 in sequence, the first edge area e1 can be regarded as being extended along the second direction F2, and the second edge area e2 can be regarded as being extended along the first direction F1. In the case where the first heating element 111a located in the first edge area e1 includes a plurality of first heating segments J1 extending along the second direction F2, a plurality of relatively continuous "heat barriers" can be formed in the edge area e. This heat barrier can slow down the speed of heat loss from the edge area e to the external environment to a certain extent. Similarly, the second heating segment J2 of the second heating element 112a can be considered with reference to the first heating segment J1, and will not be described in detail here. It can be understood that in the case where the first heating segment J1 and the second heating segment J2 are provided at the same time, the aforementioned heat barrier can be formed in the enclosure of the middle area m.

[0090] This not only helps to improve the utilization rate of heat, but also makes it easier to control the temperature of each area.

[0091] In some embodiments, please refer to Figure 1 and Figure 3 The heating body 110 includes a third heating assembly 113 located in the middle area m, the third heating assembly 113 includes at least one third heating element 113a, and the third heating element 113a includes a plurality of third heating segments J3 extending along the first direction F1. In the same third heating element 113a, all the third heating segments J3 are sequentially arranged along the second direction F2.

[0092] Of course, in some other embodiments, the third heating section J3 may also be extended along the second direction F2, and in the same third heating element 113a, all third heating sections J3 are sequentially arranged along the first direction F1. The arrangement may be made according to specific usage conditions, and no specific limitation is made here.

[0093] It can be understood that since the aforementioned heat barrier can be formed on the edge region e, no matter how the heating element on the middle region m is arranged, it is convenient to control the temperature of each region. In the two modes of "the third heating segment J3 is extended along the first direction F1, and all the third heating segments J3 in the same third heating element 113a are arranged in sequence along the second direction F2", and "the third heating segment J3 can also be extended along the second direction F2, and all the third heating segments J3 in the same third heating element 113a are arranged in sequence along the first direction F1", it is convenient to manufacture and arrange the third heating assembly 113.

[0094] It should be noted that the third heating segment J3 has a first end and a second end that are relatively arranged along the first direction F1. In the same third heating element 113a, the first ends of two third heating segments J3 adjacent to each other along the second direction F2 are connected in a first manner, and the second ends of two third heating ends adjacent to each other along the second direction F2 are connected in a second manner, and the first manner and the second manner are alternately arranged along the second direction F2. In this way, the third heating element 113a can roughly form a structure in which multiple S-shaped structures are continuous. One or more third heating elements 113a can be set in each zone in the middle area m, and no specific restrictions are made here. The structures of the first heating segment J1 and the second heating segment J2 can be understood with reference to the third heating segment J3, and no further details are given here. One or more heating elements can be set in each zone in the edge area e, and no specific restrictions are made here. In the embodiment of the present application, Figure 1 For example, it is shown that a first heating element 111a is provided on the first edge zone e1, a second heating element 112a is provided on the edge zone e21, and a third heating element 113a is provided on the first middle zone m1 and all the second middle zones m2.

[0095] Figure 5 A schematic diagram of the structure of a heating device 100 provided in some other embodiments of the present application at a viewing angle is shown; Figure 6 Shows Figure 5 A schematic diagram of the exploded structure of the heating device 100 is shown; Figure 7 Schematic diagram showing a heating device 100 provided in some embodiments of the present application in use; for ease of description, only the contents related to the embodiments of the present application are shown. Figure 6 In FIG. 1 , only the position of the heating component J0 is indicated.

[0096] In some embodiments, please refer to Figures 5 to 7 The heating device 100 also includes a uniform heating member 120, which is arranged on the heating side of the heating body 110. The heating side is a side of the heating body 110 arranged along the third direction F3, and the first direction F1 and the second direction F2 are both perpendicular to the third direction F3. A plurality of uniform heating portions 121 are convexly provided on the side of the uniform heating member 120 that is away from the heating body 110. The plurality of uniform heating portions 121 are arranged adjacent to each other in sequence, and a recess is defined between two adjacent uniform heating portions 121. The arrangement direction of the plurality of uniform heating portions 121, the longitudinal extension direction of the uniform heating portions 121, and the third direction F3 are perpendicular to each other, and the longitudinal extension direction of the uniform heating portion 121 and the longitudinal extension direction of the outlet of the coating source 200 are parallel to each other. The coating source 200 is used to be configured on the side of the uniform heating member 120 that is away from the heating body 110.

[0097] For example, Figure 7For example, the longitudinal extension direction of the uniform heating portion 121 and the longitudinal extension direction of the outlet of the coating source 200 can be parallel to the first direction F1, and the arrangement of the plurality of uniform heating portions 121 can be in the second direction F2. It can be set according to specific circumstances and is not specifically limited here. Figure 5 , Figure 7 and Figure 8 For example, the cross section of the uniform heating portion 121 along its longitudinal extension direction can be roughly triangular, the tips of the triangles are connected by arc transition sections, and two adjacent triangles are also connected by arc transition sections. Fig. 9 For example, the cross section of the uniform heating portion 121 along its longitudinal extension direction may be a triangle, and the triangle may be an isosceles triangle. It can be understood that Fig. 9 The situation shown is more Figure 8 In the case shown, Fig. 9 No arc transition section is set in Fig.10 For example, the cross section of the uniform heating portion 121 along its longitudinal extension direction can also be a semicircular shape, etc., which is not specifically limited here. Figure 7 For example, the uniform heating member 120 can be configured as a plate member arranged in a wavy shape. In this case, the shape of the uniform heating member 120 on the side facing the heating device 100 corresponds to the shape of the uniform heating member 120 on the side facing away from the heating device 100, that is, the concave portion of the uniform heating member 120 on the side facing the heating device 100 is convex on the side of the uniform heating member 120 facing away from the heating device 100, forming a uniform heating portion 121.

[0098] Combined with reference Figure 7 , the heat generated by the heating body 110 can be radiated to the substrate 20 through the uniform heating portion 121. Since all the uniform heating portions 121 generally form a wave-like structure, the heat can be conducted in multiple directions through the bends and undulations formed by the uniform heating portions 121, forming a complex and diverse heat conduction path. In this way, each uniform heating portion of the uniform heating element 120 can gather heat. Since the uniform heating portion 121 is relatively protruding, during the heat conduction process, heat is more easily gathered at the uniform heating portion 121, so the heat radiated from the uniform heating portion 121 to the substrate 20 is more uniform. Combined with reference Fig.11 , the "heat radiation area R" formed by each uniform heat portion 121 on the substrate 20 is substantially presented as a series of continuous "lines". In this way, the heat radiated to the substrate 20 by the uniform heat member 120 presents an effect similar to that of multiple "lines" arranged as a whole, so that the heat radiated in the longitudinal extension direction of the uniform heat portion 121 is substantially more uniform.

[0099] It should be noted that in Fig.11In the illustrated case, the aforementioned "continuous line" has a certain width along the second direction F2, and the heat radiation area R corresponds to the uniform heating portion 121 one by one, that is, the "continuous line" corresponds to the uniform heating portion 121 one by one. The width of the "continuous line" is the width u of the heat radiation area R (that is, the size of the heat radiation area R along the second direction F2), and the width u of the heat radiation area R can be adjusted according to the width of the corresponding uniform heating portion 121 (that is, the size of the uniform heating portion 121 along the second direction F2), and no specific limitation is made here.

[0100] Therefore, in the case where the heat radiation is more uniform along the longitudinal extension direction of the uniform heating portion 121 as mentioned above, since the longitudinal extension direction of the uniform heating portion 121 and the longitudinal extension direction of the outlet of the coating source 200 are parallel to each other, various parts of the substrate 20 can receive heat more evenly, providing a uniform thermal environment for the deposition of the coating material output by the coating source 200 on the surface of the substrate 20, thereby improving problems such as uneven coating thickness caused by local temperature differences.

[0101] In some embodiments, please refer to Figure 1 and Figure 6 The heating body 110 further includes a mounting member 114, which has an open mounting cavity, and the heating component J0 is accommodated in the mounting cavity. The number of mounting members 114 can be one or more. Exemplarily, the number of mounting members 114 can be set one by one according to the number of areas divided on the heating body 110.

[0102] The mounting member 114 can be flexibly arranged according to the use requirements to install the required heating component J0. When the mounting member 114 is arranged in a one-to-one correspondence with the area divided on the heating body 110, it is conducive to more flexible assembly of the heating component J0 and maintenance of the heating components J0 in different areas. It can be understood that when the heating component J0 is located in the first edge area e1, the heating component J0 is the first heating component 111 mentioned above. Similarly, the second heating component 112 and the third heating component 113 can also be understood with reference to this, and no further description is given here.

[0103] In some embodiments, please refer to Figure 1 The heating device 100 further includes a plurality of first detection members 130 and a plurality of second detection members 140. The plurality of first detection members 130 are arranged in cooperation with the middle region m and the edge region e to detect the temperature of the middle region m and the temperature of the edge region e. The plurality of second detection members 140 are arranged in cooperation with the heating side of the heating device 100 to detect the temperature of the heating side of the heating device 100.

[0104] Exemplarily, the first detection member 130 and the second detection member 140 may be components that can be used for temperature detection, such as thermocouples, thermistor sensors, infrared temperature sensors, etc. In the embodiment of the present application, the first detection member 130 and the second detection member 140 are both thermocouples.

[0105] It can be understood that, when the middle area m includes the first middle partition m1 and the second middle partition m2, and the edge area e includes the first edge area e1 and the second edge area e2, each area in the middle area m and each area in the edge area e can be respectively provided with a first detection member 130. In other words, the first detection member 130 can be provided correspondingly in combination with the partitioning conditions of each area, and the number of the first detection members 130 and the number of the partitions can be consistent or inconsistent, and no specific limitation is made here.

[0106] By providing the first detection member 130 and the second detection member 140 , the heating temperature of each part of the heating body 110 can be adjusted according to the detected temperature to meet different usage requirements and improve the coating quality.

[0107] Fig.12 A schematic structural diagram of a coating device 10 provided in some embodiments of the present application is shown; for ease of explanation, only contents related to the embodiments of the present application are shown.

[0108] Based on the same invention concept, please refer to Fig.12 , an embodiment of the present application provides a coating device 10, comprising a heating device 100 in any of the above embodiments.

[0109] The advantages of the above heating device 100 are also possessed by the coating equipment 10 , which will not be elaborated here.

[0110] In some embodiments, please refer to Figure 8 , and combined with reference Figure 7 , the coating device 10 further includes a plurality of chambers 300 sequentially arranged along the first direction F1, and a heating device 100 is arranged in each chamber 300. A coating source 200 is also arranged in at least one chamber 300, and the chamber 300 provided with the coating source 200 is a first target chamber. In the first target chamber, the coating source 200 is located on the heating side of the heating device 100 and is spaced apart from the heating device 100. Wherein, in the case where the first target chamber is not the first chamber 300, a second target chamber exists in the chamber 300 located upstream of the first target chamber along the first direction F1, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber; or, in the case where the first target chamber is not the first chamber 300, a third target chamber exists in the chamber 300 located upstream of the first target chamber along the first direction F1, and the heating temperature of the third target chamber is configured to be higher than the heating temperature of the first target chamber.

[0111] For example, Figure 8 For example, it is shown that there are three chambers 300, which are defined as the first chamber, the second chamber and the third chamber in sequence along the first direction F1. Taking the third chamber as the first target chamber as an example, at least one of the first chamber and the second chamber is the second target chamber or the third target chamber. In the case where the first chamber and the second chamber are both the second target chambers, the temperature of the first chamber and the temperature of the second chamber are both lower than the temperature of the third chamber. In the case where the first chamber and the second chamber are both the third target chambers, the temperature of the first chamber and the temperature of the second chamber are both higher than the temperature of the third chamber. It can be set according to the specific usage, and no specific limitation is made here.

[0112] In the case of the presence of the second target chamber, the substrate 20 can be pre-treated before the substrate 20 reaches the first target chamber, which can not only remove the water vapor on the substrate 20 and reduce the defects of the film layer formed by the subsequent coating, but also activate the surface of the substrate 20, which is helpful for the subsequent coating process to make the coating material better interact with the atoms or molecules on the surface of the substrate 20, thereby improving the coating quality. In the case of the presence of the third target chamber, the substrate 20 may have experienced different environments and treatment processes before reaching the first target chamber, so that the temperature of the substrate 20 before entering the first target chamber is relatively high. Through the cooling effect of the third target chamber, the temperature of the substrate 20 can be adjusted to a more appropriate level, providing a substrate 20 with a stable temperature for the subsequent coating process, and improving the situation where the temperature fluctuation of the substrate 20 affects the coating quality. At the same time, if the substrate 20 has been subjected to heating and other treatments before, thermal stress may be generated inside the substrate 20. When the substrate 20 enters the third target chamber, as the temperature gradually decreases, the thermal stress will be released, which can improve the deformation of the substrate 20 and cracking of the film layer caused by the presence of thermal stress in the subsequent coating process, and further improve the coating quality.

[0113] Therefore, the second target chamber and the third target chamber can be set accordingly according to the processing requirements of the first target chamber to achieve temperature control of the substrate 20 at different stages, thereby improving the coating quality and making the overall process more flexible and easy to control.

[0114] In some embodiments, when the first target chamber is not the first chamber 300, there are multiple second target chambers in the chamber 300 located upstream of the first target chamber along the first direction F1. The heating temperatures of the multiple second target chambers are configured to increase sequentially along the first direction F1.

[0115] In this way, not only can the impurities on the substrate 20 be removed and the substrate 20 be activated by gradually increasing the temperature, but it is also beneficial to improve the temperature uniformity of the substrate 20 when it is in the first target chamber. It can be understood that it is difficult to achieve a rapid transition from a lower temperature to a higher temperature directly in a chamber 300 and uniform heating is required. By setting a plurality of second target chambers with successively increasing heating temperatures, each second target chamber can adopt a relatively sophisticated heating method and temperature control means (such as reasonable arrangement of heating elements, setting of temperature sensors, etc.). In this way, when the substrate 20 passes through these second target chambers in sequence, a relatively uniform temperature increase can be gradually achieved, so that a relatively uniform temperature state can be achieved before entering the first target chamber, which is beneficial to control the heating device 100 in the first target chamber, and then to facilitate the deposition of subsequent film layers on the substrate 20 to be more uniform, thereby improving the coating quality.

[0116] In some embodiments, when the first target chamber is not the first chamber 300, there are a plurality of third target chambers in the chamber 300 located upstream of the first target chamber along the first direction F1. The heating temperatures of the plurality of third target chambers are configured to decrease in sequence along the first direction F1.

[0117] In this way, not only can the state of the substrate 20 be stabilized by gradually cooling down, but it is also beneficial to improve the temperature uniformity of the substrate 20 when it is in the first target chamber. It can be understood that it is difficult to achieve a rapid transition from a higher temperature to a lower temperature directly in a chamber 300 and uniform heating is required. By setting up multiple third target chambers with successively decreasing heating temperatures, each third target chamber can adopt a relatively sophisticated heating method and temperature control means (such as reasonable arrangement of heating elements, setting of temperature sensors, etc.). In this way, when the substrate 20 passes through these third target chambers in sequence, a relatively uniform temperature reduction can be gradually achieved, so that a relatively uniform temperature state can be achieved before entering the first target chamber, which is beneficial to control the heating device 100 in the first target chamber, and then to facilitate the deposition of subsequent film layers on the substrate 20 to be more uniform, thereby improving the coating quality.

[0118] Due to different coating processes or coating products, the temperature requirements for the pretreatment of the substrate 20 may be different. By setting a plurality of second target chambers with successively increasing heating temperatures or setting a plurality of third target chambers with successively decreasing heating temperatures, the temperature, time and other parameters of each second target chamber or third target chamber can be independently adjusted according to specific process requirements, thereby increasing the flexibility of the process and being able to better meet various coating requirements.

[0119] It should be noted that the first target chamber may be one or more. In the case where there are multiple first target chambers, the multiple first target chambers may be arranged adjacently or not adjacently; the coating equipment 10 may include multiple second target chambers and multiple third target chambers at the same time, or may only include multiple second target chambers, or may only include multiple third target chambers. It can be set according to the required coating process, and is not specifically limited here.

[0120] In some embodiments, please refer to Figure 8 The coating device 10 further includes a plurality of chambers 300 sequentially arranged along the first direction F1, and a heating device 100 is disposed in each chamber 300. Among the plurality of chambers 300, there is a chamber 300 with two heating devices 100, and the heating sides of the two heating devices 100 are disposed oppositely and spaced apart.

[0121] It can be understood that there can be one heating device 100 or other number of heating devices 100 in the multiple chambers 300, which can be configured according to specific usage and is not specifically limited herein.

[0122] When two heating devices 100 are provided in the chamber 300 and the heating sides of the two heating devices 100 are opposite and spaced apart, the substrate 20 is located between the two heating devices 100. The two heating devices 100 can heat the substrate 20 on both sides of the substrate 20, which is beneficial to improving the temperature uniformity of the substrate 20 and improving the heating efficiency.

[0123] It should be noted that Figure 8 For example, combined with reference Figure 1 The chamber 300 has a transmission inlet and a transmission outlet relatively arranged along the first direction F1, so that the heat at the first edge area e1 will be lost. Since there is a certain space in the chamber 300, the heat at the second edge area e2 is dissipated faster. The heating device 100 provided in the embodiment of the present application can independently control the heating power of the corresponding area, thereby achieving temperature regulation, which is conducive to achieving temperature uniformity in the chamber 300.

[0124] In some embodiments, please refer to Figure 1 and Figure 3, the heating device 100 further includes a plurality of first detection members 130 and a plurality of second detection members 140. The plurality of first detection members 130 are arranged in cooperation with the middle area m and the edge area e, and are used to detect the temperature of the middle area m and the temperature of the edge area e; the plurality of second detection members 140 are arranged in cooperation with the heating side of the heating device 100, and are used to detect the temperature of the heating side of the heating device 100. The coating device 10 further includes a prompting member (not shown in the figure) and a controller (not shown in the figure). The prompting member is electrically connected to the first detection member 130 and the controller, respectively, and the prompting member is used to prompt when the temperature detected by the first detection member 130 exceeds the preset temperature. The controller is electrically connected to the first detection member 130 and the second detection member 140, respectively, and the controller is used to adjust the heating power of the heating device 100 according to the detection information of the first detection member 130 and the second detection member 140, and is used to adjust the heating power of the heating device 100 according to the prompt information of the prompting member. The controller is configured to independently control the heating temperature of the first middle partition m1, the second middle partition m2 and the edge area e.

[0125] The implementation of the first detection element 130 and the second detection element 140 can refer to the contents illustrated in the above embodiments, which will not be described in detail here. The prompt element can be an alarm, a voice prompter and other components.

[0126] In this way, not only can the heating power of each area of ​​the heating device 100 be controlled by the first detection member 130 and the second detection member 140, but the heating device 100 can also be protected by the reminder member in the event of over-temperature.

[0127] In some embodiments, the coating device 10 is configured to perform a process on a substrate 20 , the length of the substrate 20 is greater than 800 mm, the width of the substrate 20 is greater than 800 mm, and the thickness of the substrate 20 is greater than 2 mm.

[0128] Exemplarily, the length of the substrate 20 can be 810mm, 900mm, 950mm, 1000mm, 1100mm, 1500mm, 2000mm, 2200mm, 2400mm, 2500mm, 2800mm, 3000mm, 3500mm or 4000mm, the width can be 810mm, 900mm, 950mm, 1000mm, 1100mm, 1200mm, 1500mm, 2000mm, 2200mm, 2400mm, 2500mm, 2800mm, 3000mm, 3500mm or 4000mm, and the thickness can be 2.1mm, 2.5mm, 2.8mm, 3mm, 3.2mm, 3.5mm, 3.8mm, 4mm, 4.2mm, 4.5mm, 5mm, 6mm, 8mm, 12mm or 20mm. Of course, the substrate 20 may also have other sizes and specifications, and the upper limits of the length, width and thickness of the substrate 20 are not specifically limited herein.

[0129] When the size of the substrate 20 is large, not only can the manufactured product be further cut to the required size, thereby increasing production capacity, but it is also conducive to the manufacture of larger products. However, it is difficult to control the temperature uniformity of the substrate 20. When the heating device 100 provided in the embodiment of the present application is used, the temperature uniformity of the substrate 20 can be improved in combination with the situations illustrated in some of the aforementioned embodiments. Of course, the heating device 100 provided in the embodiment of the present application is also applicable to small-sized substrates 20, and no specific limitation is made here.

[0130] Based on the same inventive concept, an embodiment of the present application provides a method for using a coating device, wherein the coating device is the coating device in any of the above embodiments; the method for using comprises the following steps:

[0131] Step SG, based on the temperature of the first middle zone, the temperature of the second middle zone and the temperature of the edge zone of the heating body, respectively control the heating power of the first middle zone, the heating power of the second middle zone and the heating power of the edge zone.

[0132] Specifically, with reference to Figure 1 , Figure 3 and Figure 8 The heating power of the first middle partition m1, the heating power of the second middle partition m2, and the heating power of the edge region e can be determined according to different heating stages and temperature changes, and no specific limitation is imposed on the use state of the heating device 100. For example, in one use state, the heating power of the first middle partition m1 is less than the heating power of the second middle partition m2, and the heating power of the second middle partition m2 is less than the heating power of the edge region e.

[0133] The advantages of the heating method of the heating device 100 are also possessed by the method of using the coating device 10, which will not be elaborated here.

[0134] In some embodiments, the coating device further comprises a plurality of chambers arranged in sequence along a first direction, a heating device is provided in the chamber, a coating source is further provided in at least one chamber, and the chamber provided with the coating source is a first target chamber; the method of use further comprises the following steps:

[0135] Step SH, based on the order of the first target chambers along the first direction, controlling the heating power of the heating devices in the plurality of chambers so that the heating temperatures of the plurality of chambers are configured in a preset manner.

[0136] Specifically, with reference to Figure 1 , Figure 3 , Figure 7 and Figure 8 By determining the order of the first target chambers along the first direction F1, the corresponding temperature control process can be determined according to the position of the first target chambers. For example, before the substrate 20 enters the first target chamber, the substrate 20 needs to be heated. For another example, before the substrate 20 enters the first target chamber, the substrate 20 needs to be cooled. For another example, before the substrate 20 enters the first target chamber, the substrate 20 needs to be heated and cooled. The temperature control process can be determined according to the requirements of different process, and is not specifically limited here.

[0137] This not only helps to improve the coating quality, but also makes the overall process more flexible and easier to control. For other advantages, please refer to the advantages of the embodiments related to the first target chamber illustrated in some of the above embodiments, which will not be described in detail here.

[0138] In some embodiments, the preset method includes at least one of the following methods: Method 1, when the first target chamber is not the first chamber, there is a second target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber; Method 2, when the first target chamber is not the first chamber, there is a third target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the third target chamber is configured to be higher than the heating temperature of the first target chamber; Method 3, when the first target chamber is not the first chamber, there are multiple second target chambers in the chamber located upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple second target chambers are configured to increase in sequence; Method 4, when the first target chamber is not the first chamber, there are multiple third target chambers in the chamber located upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple third target chambers are configured to decrease in sequence.

[0139] Exemplary, with reference to Figure 7 and Figure 8 , taking the coating equipment 10 including three chambers 300 as an example, the first two chambers 300 arranged along the first direction F1 can be second target chambers, the last chamber 300 can be the first target chamber, and the substrate 20 can be a glass substrate. When the substrate 20 is transported along the first direction F1, the substrate 20 passes through the first second target chamber, the last second target chamber and the first target chamber in sequence. The substrate 20 is heated to 80℃±15℃ in the first second target chamber, to 120℃±10℃ in the last second target chamber, and to 160℃±5℃ in the first target chamber. The first second target chamber can be regarded as a loading chamber, the last second target chamber can be regarded as a cache chamber, and the first target chamber is a process chamber.

[0140] Of course, at least one of the above four methods (method 1, method 2, method 3 and method 4) can be applied to the corresponding process, and no specific limitation is made here.

[0141] It should be noted that the heating temperatures of the multiple second target chambers may increase regularly or increase irregularly, and the heating temperatures of the multiple third target chambers may decrease regularly or decrease irregularly, and may be adjusted accordingly according to the required process and the corresponding heating process, and are not specifically limited here. In addition, the first direction F1 and the second direction F2 of the heating device 100 may both be horizontal directions, and the third direction F3 may be a vertical direction, and correspondingly, the thickness direction of the substrate 20 may be a vertical direction. Of course, the first direction F1 and the third direction F3 of the heating device 100 may both be horizontal directions, and the second direction F2 may be a vertical direction, and correspondingly, the thickness direction of the substrate 20 may be a horizontal direction. The arrangement of the heating device 100 and the placement of the substrate 20 may be set according to actual use requirements, and are not specifically limited here.

[0142] It should be understood that the execution of the above-illustrated steps SG and SH is not strictly limited in order, and the two can be executed simultaneously or at different times. Moreover, step SG and step SH can include multiple steps or multiple stages respectively, and these steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the steps or stages in other steps. It can be executed according to the specific required process, and no specific limitation is made here.

[0143] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0144] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A heating device, characterized in that: comprising a heating body having a middle region and an edge region surrounding the middle region; The middle area includes a plurality of middle partitions arranged in sequence along a first direction, the plurality of middle partitions include a first middle partition located at the center of the heating body, and a plurality of second middle partitions located at both sides of the first middle partition along the first direction; an area of ​​the first middle partition is smaller than an area of ​​the second middle partition; The edge region has an inner contour disposed around the middle region, and an outer contour disposed around the inner contour; Along the first direction and the second direction, there is a uniform spacing between the inner contour and the outer contour respectively; the first direction and the second direction intersect each other; A portion of the heating body located at the first middle partition, a portion of the heating body located at the second middle partition, and a portion of the heating body located at the edge region are configured to be independently controlled.

2. The heating device according to claim 1, characterized in that The first intermediate partition includes a plurality of first sub-partitions, and a plurality of portions of the heating body located in the plurality of first sub-partitions are configured to be independently controlled; and / or At least one of the second intermediate zones includes a plurality of second sub-zones, and a plurality of portions of the heating body located in the plurality of second sub-zones are configured to be independently controlled.

3. The heating device according to claim 1, characterized in that: The edge region includes two first edge areas arranged opposite to each other along the first direction, and two second edge areas arranged opposite to each other along the second direction; each of the first edge areas connects two of the second edge areas; All of the first edge regions and all of the second edge regions are configured to be independently controlled.

4. The heating device according to claim 3, characterized in that: At least one of the second edge regions comprises a plurality of edge partitions arranged in sequence along the first direction, wherein two edge partitions adjacent to each other along the first direction define a first boundary on their sides facing each other, and two intermediate partitions adjacent to each other along the first direction define a second boundary on their sides facing each other; among all the second boundaries and all the first boundaries corresponding to the same second edge region, there is a gap between two adjacent boundaries along the first direction; and / or The first direction and the second direction are perpendicular to each other.

5. The heating device according to claim 3, characterized in that: The heating body comprises a first heating assembly located in the first edge region, the first heating assembly comprises at least one first heating element, the first heating element comprises a plurality of first heating segments extending along the second direction; in the same first heating element, all the first heating segments are sequentially arranged along the first direction; and / or The heating body includes a second heating component located in the second edge area, the second heating component includes at least one second heating element, and the second heating element includes a plurality of second heating segments extending along the first direction; in the same second heating element, all the second heating segments are arranged in sequence along the second direction.

6. The heating device according to any one of claims 1 to 5, characterized in that: The heating device further comprises a uniform heat member, which is arranged on a heating side of the heating body; the heating side is a side of the heating body arranged along a third direction, and both the first direction and the second direction are perpendicular to the third direction; The heat-leveling member is provided with a plurality of heat-leveling portions on one side away from the heating body; the plurality of heat-leveling portions are arranged adjacent to each other in sequence, and a concave portion is defined between two adjacent heat-leveling portions; The arrangement direction of the multiple uniform heating parts, the longitudinal extension direction of the uniform heating parts and the third direction are perpendicular to each other, the longitudinal extension direction of the uniform heating parts and the longitudinal extension direction of the outlet of the coating source are parallel to each other, and the coating source is used to be configured on the side of the uniform heating part away from the heating body.

7. The heating device according to any one of claims 1 to 5, characterized in that: The heating device further comprises a plurality of first detection members and a plurality of second detection members; The plurality of first detection members are arranged in cooperation with the middle area and the edge area, and are used to detect the temperature of the middle area and the temperature of the edge area; The plurality of second detection members are matched with the heating side of the heating device and are used to detect the temperature of the heating side of the heating device.

8. A coating device, characterized in that: Comprising the heating device as described in any one of claims 1-7.

9. The coating device according to claim 8, characterized in that: The coating device further comprises a plurality of chambers arranged in sequence along a first direction, wherein the heating device is arranged in each chamber; A coating source is further provided in at least one of the chambers, and the chamber provided with the coating source is a first target chamber; in the first target chamber, the coating source is located on the heating side of the heating device and is spaced apart from the heating device; Wherein, when the first target chamber is not the first chamber, there is a second target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber; or In the case where the first target chamber is not the first chamber, there is a third target chamber in the chambers located upstream of the first target chamber in the first direction, and a heating temperature of the third target chamber is configured to be greater than a heating temperature of the first target chamber.

10. The coating device according to claim 9, characterized in that: In the case where the first target chamber is not the first chamber, there are a plurality of second target chambers in the chambers located upstream of the first target chamber along the first direction; and along the first direction, the heating temperatures of the plurality of second target chambers are configured to increase sequentially; or When the first target chamber is not the first chamber, there are a plurality of third target chambers in the chambers upstream of the first target chamber along the first direction; and along the first direction, the heating temperatures of the plurality of third target chambers are configured to decrease sequentially.

11. The coating device according to claim 8, characterized in that: The coating device further comprises a plurality of chambers arranged in sequence along a first direction, wherein the heating device is arranged in each chamber; Among the plurality of chambers, there is a chamber provided with two of the heating devices, and the heating sides of the two heating devices are arranged opposite to each other and spaced apart.

12. The coating device according to any one of claims 8 to 11, characterized in that: The heating device further comprises a plurality of first detection members and a plurality of second detection members; the plurality of first detection members are arranged in cooperation with the middle area and the edge area, and are used to detect the temperature of the middle area and the temperature of the edge area; the plurality of second detection members are arranged in cooperation with the heating side of the heating device, and are used to detect the temperature of the heating side of the heating device; The coating device also includes a prompting member and a controller; The prompting member is electrically connected to the first detecting member and the controller respectively, and the prompting member is used to give a prompt when the temperature detected by the first detecting member exceeds a preset temperature; The controller is electrically connected to the first detection member and the second detection member, respectively, and is used to adjust the heating power of the heating device according to the detection information of the first detection member and the second detection member, and is used to adjust the heating power of the heating device according to the prompt information of the prompt member; the controller is configured to independently control the heating temperatures of the first middle partition, the second middle partition and the edge area.

13. The coating device according to any one of claims 8 to 11, characterized in that: The coating equipment is configured to perform process treatment on a substrate, the length of the substrate is greater than 800 mm, the width of the substrate is greater than 800 mm, and the thickness of the substrate is greater than 2 mm.

14. A method for using a coating device, characterized in that: The coating device is the coating device according to any one of claims 8 to 13; the use method comprises: Based on the temperature of the first middle zone, the temperature of the second middle zone, and the temperature of the edge zone of the heating body, the heating power of the first middle zone, the heating power of the second middle zone, and the heating power of the edge zone are controlled respectively.

15. The method of use according to claim 14, characterized in that: The coating device further comprises a plurality of chambers arranged in sequence along a first direction, the chambers are provided with the heating device, at least one of the chambers is further provided with a coating source, and the chamber provided with the coating source is a first target chamber; the use method further comprises: Based on the order in which the first target chambers are located along the first direction, heating powers of the heating devices in the plurality of chambers are controlled so that heating temperatures of the plurality of chambers are configured in a preset manner.

16. The method of use according to claim 15, characterized in that: The preset method includes at least one of the following methods: Mode 1: when the first target chamber is not the first chamber, there is a second target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the second target chamber is configured to be lower than the heating temperature of the first target chamber; Mode 2: when the first target chamber is not the first chamber, there is a third target chamber in the chamber located upstream of the first target chamber along the first direction, and the heating temperature of the third target chamber is configured to be greater than the heating temperature of the first target chamber; Mode 3: when the first target chamber is not the first chamber, there are multiple second target chambers in the chambers located upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple second target chambers are configured to increase in sequence; Mode 4: when the first target chamber is not the first chamber, there are multiple third target chambers in the chambers upstream of the first target chamber along the first direction; along the first direction, the heating temperatures of the multiple third target chambers are configured to decrease in sequence.

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