A method and system for adjusting radio frequency voltage symmetry

By working together with the drive module and the temperature control module, the core temperature is adjusted to achieve the symmetry of the radio frequency voltage, which solves the problem of complexity and low precision in the existing technology and achieves high-precision adjustment of the symmetry of the radio frequency voltage amplitude.

CN119512301BActive Publication Date: 2026-04-28HANGZHOU PUYU TECH DEV CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HANGZHOU PUYU TECH DEV CO LTD
Filing Date
2024-11-20
Publication Date
2026-04-28

AI Technical Summary

Technical Problem

In the existing technology, the process of adjusting the amplitude symmetry of the radio frequency voltage is complex and not very accurate. It is difficult to ensure the symmetry of the radio frequency voltage by manually adjusting the number of coil turns, and external measurement affects the resonance.

Method used

The drive module generates an RF drive signal, the feedback module detects positive and negative RF voltages, the temperature control module adjusts the core temperature to control the resonant module to generate symmetrical positive and negative RF voltages, and a preset control algorithm is used to calculate the heating output power until the preset voltage symmetry condition is met.

Benefits of technology

It achieves high-precision symmetrical adjustment of RF voltage amplitude, simplifies the adjustment process, improves adjustment accuracy, and avoids the influence of external measurements on resonance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides a radio frequency voltage symmetry adjustment method and system, and relates to the technical field of radio frequency. The method comprises the following steps: a driving module generates and outputs a radio frequency driving signal to a power module at a current time, so that the power module provides a resonance energy signal for a resonance module; under the action of the resonance energy signal, the resonance module generates a positive radio frequency voltage and a negative radio frequency voltage; a feedback module detects the positive radio frequency voltage and the negative radio frequency voltage respectively, obtains and feeds back a positive feedback voltage and a negative feedback voltage at the current time to the driving module; if the positive feedback voltage and the negative feedback voltage do not satisfy a preset voltage symmetry condition, the driving module controls a temperature control module to heat a magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current time, so that the resonance module generates an adjusted positive radio frequency voltage and an adjusted negative radio frequency voltage; and the adjusted positive radio frequency voltage and the adjusted negative radio frequency voltage satisfy the preset voltage symmetry condition, and the positive radio frequency voltage and the negative radio frequency voltage with the same amplitude are obtained.
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Description

Technical Field

[0001] This invention relates to the field of radio frequency technology, and more specifically, to a method and system for adjusting radio frequency voltage symmetry. Background Technology

[0002] Currently, there are two methods for generating radio frequency (RF) voltage in quadrupole circuits: parallel resonance and series resonance. Series resonance is more complex for the circuit system, requiring two identical drive circuits to generate RF voltages with the same amplitude but a 180° phase difference. Parallel resonance, on the other hand, can adjust the coupling method between the primary and secondary coils to generate RF voltages with the same amplitude but a 180° phase difference. However, it is difficult to guarantee the symmetry of the RF voltage amplitude.

[0003] Existing technology alters the symmetry of the RF voltage by changing the number of coil turns. This process primarily relies on manual adjustment, requiring simultaneous measurement. Furthermore, external measurements can affect the coil's resonance, making the adjustment process cumbersome and inaccurate. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of the prior art by providing a method and system for adjusting the symmetry of radio frequency voltage, so as to enable the resonant module to generate positive and negative radio frequency voltages with symmetrical amplitudes by changing the temperature of the magnetic core.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0006] In a first aspect, embodiments of this application provide a method for adjusting the symmetry of radio frequency (RF) voltage, applied to an RF voltage symmetry adjustment system. The RF voltage symmetry adjustment system includes: a driving module, a power module, a resonant module, a feedback module, and a temperature control module. The method includes:

[0007] The driving module generates and outputs a radio frequency driving signal to the power module at the current moment, so that the power module provides a resonant energy signal to the resonant module;

[0008] The resonant module generates positive and negative radio frequency voltages under the action of the resonant energy signal;

[0009] The feedback module detects the positive radio frequency voltage and the negative radio frequency voltage respectively, and obtains and feeds back the positive feedback voltage and negative feedback voltage at the current moment to the driving module;

[0010] If the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates an adjusted positive radio frequency voltage and a negative radio frequency voltage until the adjusted positive radio frequency voltage and the negative radio frequency voltage meet the preset voltage symmetry condition.

[0011] In an optional implementation, the driving module controls the temperature control module to heat the magnetic core of the power module based on the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates adjusted positive and negative radio frequency voltages, including:

[0012] The drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm;

[0013] The drive module determines the heating output power of the temperature control module based on the current control quantity;

[0014] The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages.

[0015] In an optional implementation, the drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm, including:

[0016] The drive module calculates the current voltage error based on the positive feedback voltage and the negative feedback voltage, and calculates the current control increment based on the current voltage error and the historical voltage error using the preset control algorithm.

[0017] The drive module calculates the current control quantity based on the current control increment and the control quantity corresponding to the historical voltage error.

[0018] In an optional implementation, the step of calculating the current control increment based on the current voltage error and the historical voltage error using the preset control algorithm includes:

[0019] Based on the current voltage error and the historical voltage error, the first contribution, the second contribution, and the third contribution are calculated using the preset control algorithm.

[0020] The first contribution, the second contribution, and the third contribution are summed to obtain the current control increment.

[0021] In an optional implementation, the historical voltage error includes: the voltage error at a first moment and the voltage error at a second moment, wherein the first moment is the moment before the current moment, and the second moment is the moment before the first moment; the step of calculating the first contribution, the second contribution, and the third contribution using the preset control algorithm based on the current voltage error and the historical voltage error includes:

[0022] The first contribution amount is determined based on the current voltage error, the voltage error at the first moment, and the preset proportional control parameters;

[0023] The second contribution amount is determined based on the current voltage error and the preset integral control parameters;

[0024] The third contribution is determined based on the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and the preset differential control parameters.

[0025] In an optional implementation, the driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages, including:

[0026] The driving module calculates the heating drive duty cycle based on the heating output power, and generates a heating drive signal based on the heating drive duty cycle.

[0027] The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonant module generates adjusted positive and negative radio frequency voltages.

[0028] Secondly, embodiments of this application provide a radio frequency voltage symmetry adjustment system, the radio frequency voltage symmetry adjustment system comprising: a driving module, a power module, a resonant module, a feedback module, and a temperature control module, wherein a first output terminal of the driving module is connected to the input terminal of the power module, and the output terminal of the power module is connected to the input terminal of the resonant module; the output terminal of the resonant module is connected to the input terminal of the feedback module, and the output terminal of the feedback module is connected to the input terminal of the driving module; a second output terminal of the driving module is connected to the input terminal of the temperature control module, and the output terminal of the temperature control module is connected to the magnetic core of the power module;

[0029] The driving module is used to generate and output an RF driving signal to the power module; the power module is used to provide a resonant energy signal to the resonant module; the resonant module is used to generate a positive RF voltage and a negative RF voltage under the action of the resonant energy signal; the feedback module is used to detect the positive RF voltage and the negative RF voltage respectively, obtain and feed back a positive feedback voltage and a negative feedback voltage to the driving module.

[0030] The driving module is further configured to, when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, control the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage, so that the resonant module generates adjusted positive and negative radio frequency voltages until the adjusted positive and negative radio frequency voltages meet the preset voltage symmetry condition.

[0031] In an optional implementation, the drive module includes: a control unit, a digital-to-analog converter, a differential-to-integral circuit, a mixer, and a direct data generator. The first output terminal of the control unit is connected to the input terminal of the digital-to-analog converter, the output terminal of the digital-to-analog converter is connected to the input terminal of the differential-to-integral circuit, the output terminal of the differential-to-integral circuit is connected to the input terminal of the mixer, the output terminal of the mixer is the first output terminal of the drive module, and the output terminal of the mixer is connected to the input terminal of the power module.

[0032] The second output terminal of the control unit is the second output terminal of the drive module. The second output terminal of the control unit is connected to the input terminal of the temperature control module. The second output terminal of the control unit is also connected to the input terminal of the direct data generator. The output terminal of the direct data generator is connected to the input terminal of the mixer.

[0033] In an optional implementation, the power module includes a power amplifier and a transformer, wherein the input terminal of the power amplifier is the input terminal of the power module, the output terminal of the power amplifier is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input terminal of the resonant module.

[0034] In an optional embodiment, the temperature control module includes: a switching unit, a heating element, and a temperature measuring element. The input terminal of the switching unit is the input terminal of the temperature control module, and the output terminal of the switching unit is connected to the heating element. The heating element and the temperature measuring element enclose the magnetic core of the transformer in the power module, and the temperature measuring element is also connected to the control unit in the drive module.

[0035] The beneficial effects of this application are:

[0036] This application provides a method and system for adjusting radio frequency (RF) voltage symmetry. The method includes: a driving module generating and outputting an RF driving signal to a power module at the current moment, causing the power module to provide a resonant energy signal to a resonant module; the resonant module generating a positive RF voltage and a negative RF voltage under the action of the resonant energy signal; a feedback module detecting the positive and negative RF voltages respectively, obtaining and feeding back the positive and negative feedback voltages at the current moment to the driving module; if the positive and negative feedback voltages do not meet a preset voltage symmetry condition, the driving module controlling a temperature control module to heat the magnetic core of the power module according to the positive and negative feedback voltages at the current moment, causing the resonant module to generate adjusted positive and negative RF voltages, until the adjusted positive and negative RF voltages meet the preset voltage symmetry condition, thereby changing the temperature of the magnetic core to make the resonant module generate positive and negative RF voltages with symmetrical RF voltage amplitudes. Attached Figure Description

[0037] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the structure of a radio frequency voltage symmetry adjustment system provided in an embodiment of this application;

[0039] Figure 2 One of the flowcharts for a radio frequency voltage symmetry adjustment method provided in this application embodiment;

[0040] Figure 3 A second schematic flowchart illustrating a radio frequency voltage symmetry adjustment method provided in this application embodiment;

[0041] Figure 4 A third schematic flowchart illustrating a radio frequency voltage symmetry adjustment method provided in this application embodiment;

[0042] Figure 5 A fourth schematic flowchart illustrating a radio frequency voltage symmetry adjustment method provided in this application embodiment;

[0043] Figure 6 This is the fifth flowchart illustrating a radio frequency voltage symmetry adjustment method provided in this application embodiment.

[0044] Explanation of key component symbols: 110 - Drive module; 120 - Power module; 130 - Resonant module; 140 - Feedback module; 150 - Temperature control module; C1 - First capacitor; C2 - Second capacitor; C3 - Third capacitor; C4 - Fourth capacitor; C5 - Fifth capacitor. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0046] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0047] In the description of this application, it should be noted that if the terms "upper", "lower", etc. appear to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the product of this application is usually placed in, it is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0048] Furthermore, the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Additionally, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0049] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0050] Figure 1 This is a schematic diagram of a radio frequency voltage symmetry adjustment system provided in an embodiment of this application. Figure 1As shown, the RF voltage symmetry adjustment system includes: a drive module 110, a power module 120, a resonant module 130, a feedback module 140, and a temperature control module 150. The first output terminal of the drive module 110 is connected to the input terminal of the power module 120, and the output terminal of the power module 120 is connected to the input terminal of the resonant module 130. The output terminal of the resonant module 130 is connected to the input terminal of the feedback module 140, and the output terminal of the feedback module 140 is connected to the input terminal of the drive module 110. The second output terminal of the drive module 110 is connected to the input terminal of the temperature control module 150, and the output terminal of the temperature control module 150 is connected to the magnetic core of the power module 120.

[0051] The driving module 110 is used to generate and output an RF driving signal to the power module 120; the power module 120 is used to provide a resonant energy signal to the resonant module 130; the resonant module 130 is used to generate a positive RF voltage and a negative RF voltage under the action of the resonant energy signal; the feedback module 140 is used to detect the positive RF voltage and the negative RF voltage respectively, obtain and feed back a positive feedback voltage and a negative feedback voltage to the driving module 110.

[0052] The drive module 110 is also used to control the temperature control module 150 to heat the magnetic core of the power module 120 according to the positive feedback voltage and negative feedback voltage when the positive feedback voltage and negative feedback voltage do not meet the preset voltage symmetry condition, so that the resonant module 130 generates the adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0053] In this embodiment, the input terminal of the driving module 110 is also connected to an interactive device. After the interactive device sends a command to generate an RF voltage, the driving module 110 generates and outputs an RF driving signal to the power module 120 according to the received command.

[0054] Optionally, the drive module 110 includes: a control unit, a digital-to-analog converter (DAC), a differential-integral circuit (PID circuit), a mixer, and a direct data generator (DDS). The first output terminal of the control unit is connected to the input terminal of the DAC, the output terminal of the DAC is connected to the input terminal of the differential-integral circuit (PID circuit), the output terminal of the differential-integral circuit (PID circuit) is connected to the input terminal of the mixer, the output terminal of the mixer is the first output terminal of the drive module 110, and the output terminal of the mixer is connected to the input terminal of the power module 120.

[0055] Specifically, the second output terminal of the control unit is the second output terminal of the drive module 110. The second output terminal of the control unit is connected to the input terminal of the temperature control module 150. The second output terminal of the control unit is also connected to the input terminal of the direct data generator (DDS). The output terminal of the direct data generator (DDS) is connected to the input terminal of the mixer.

[0056] After receiving the command from the interactive device, the control unit sends the radio frequency voltage corresponding to 500 mass numbers, and then generates the radio frequency drive signal through the digital-to-analog converter, differential-integral circuit, mixer and direct data generator in the drive module 110.

[0057] Optionally, the power module 120 includes a power amplifier D1 and a transformer. The input terminal of the power amplifier D1 is the input terminal of the power module 120, the output terminal of the power amplifier D1 is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input terminal of the resonant module 130.

[0058] Specifically, after receiving the radio frequency drive signal sent by the drive module 110, the power module 120 amplifies the radio frequency drive signal through the power amplifier D1 to provide a resonant energy signal for the resonant module 130. The power amplifier D1 can be a metal-oxide-semiconductor field-effect transistor (MOSFET). The gate of the transistor is connected to the output terminal of the drive module 110, the drain of the transistor is connected to the primary side of the transformer, and the source of the transistor is grounded.

[0059] The resonant module 130 includes a quadrupole, which consists of four parallel cylindrical or hyperboloidal cylindrical electrodes spaced equally along the central axis, forming two sets of positive and negative electrodes. These electrodes are applied to two sets of DC voltages and radio frequency voltages to form a dynamic electric field. One set of positive electrodes includes a first positive electrode and a second positive electrode. One end of the first positive electrode is connected to the first coil of the secondary side of the transformer, and the other end of the first positive electrode is connected to the second positive electrode. The first and second positive electrodes generate a positive radio frequency voltage. The connection point of the first and second positive electrodes is connected to the feedback module 140, which can detect the positive radio frequency voltage.

[0060] A set of negative electrodes includes a first negative electrode and a second negative electrode. One end of the first negative electrode is connected to the second coil of the secondary side of the transformer, and the other end of the first negative electrode is connected to the second negative electrode. The first negative electrode and the second negative electrode generate a negative radio frequency voltage. The connection point of the first negative electrode and the second negative electrode is connected to the feedback module 140, which can detect the negative radio frequency voltage.

[0061] One end of the first coil on the secondary side of the transformer is connected to one end of the second coil through the first capacitor C1, the other end of the first coil is grounded through the second capacitor C2, and the other end of the second coil is grounded through the third capacitor C3.

[0062] The feedback module 140 consists of two identical feedback circuits. Each feedback circuit includes a voltage divider circuit, a full-wave rectifier circuit, and a filter circuit. The input terminal of the first feedback circuit is connected to the connection point of the first and second positive electrodes through the fourth capacitor C4, and is used to detect the positive radio frequency voltage. The input terminal of the second feedback circuit is connected to the connection point of the first and second negative electrodes through the fifth capacitor C5, and is used to detect the negative radio frequency voltage. The detected positive and negative radio frequency voltages are reduced to obtain the positive feedback voltage and the negative feedback voltage. The control module in the drive module 110 can acquire the positive feedback voltage and the negative feedback voltage through a high-precision AD sampling chip.

[0063] After the drive module 110 obtains the positive feedback voltage and the negative feedback voltage, it determines whether the positive feedback voltage and the negative feedback voltage meet the preset voltage symmetry condition. If they do not meet the condition, it controls the temperature control module 150 to heat the magnetic core of the power module 120 according to the positive feedback voltage and the negative feedback voltage, thereby changing the temperature of the magnetic core and causing the resonant module 130 to generate the adjusted positive radio frequency voltage and the negative radio frequency voltage until the adjusted positive radio frequency voltage and the negative radio frequency voltage meet the preset voltage symmetry condition.

[0064] Optionally, the temperature control module 150 includes a switching unit, a heating element, and a temperature measuring element. The input terminal of the switching unit is the input terminal of the temperature control module 150, and the output terminal of the switching unit is connected to the heating element. The heating element and the temperature measuring element enclose the magnetic core of the transformer in the power module 120, and the temperature measuring element is also connected to the control unit in the drive module 110.

[0065] Specifically, a first magnetic core and a second magnetic core exist between the primary and secondary sides of the transformer. The first magnetic core is located between the primary side and the first coil, and the second magnetic core is located between the primary side and the second coil. Heating elements and temperature sensing elements can wrap around either magnetic core of the transformer. If the heating elements and temperature sensing elements wrap around the first magnetic core, the control unit controls the temperature control module 150 to heat the first magnetic core wrapped by the heating elements, thereby changing the temperature of the first magnetic core. If the heating elements and temperature sensing elements wrap around the second magnetic core, the control unit controls the temperature control module 150 to heat the second magnetic core wrapped by the heating elements, thereby changing the temperature of the second magnetic core. The temperature sensing elements are used to measure the temperature of the magnetic core and provide real-time feedback of the core temperature to the control unit. Figure 1 The example provided shows that a heating element and a temperature measuring element wrap around a first magnetic core for heating the first magnetic core. There are no restrictions on the type of magnetic core that the heating element and temperature measuring element wrap around.

[0066] In summary, this application provides an RF voltage symmetry adjustment system, which includes a drive module, a power module, a resonant module, a feedback module, and a temperature control module. The first output terminal of the drive module is connected to the input terminal of the power module, and the output terminal of the power module is connected to the input terminal of the resonant module. The output terminal of the resonant module is connected to the input terminal of the feedback module, and the output terminal of the feedback module is connected to the input terminal of the drive module. The second output terminal of the drive module is connected to the input terminal of the temperature control module, and the output terminal of the temperature control module is connected to the magnetic core of the power module. The drive module generates and outputs an RF drive signal to the power module. The power module provides resonance for the resonant module. The energy signal; the resonant module is used to generate positive and negative radio frequency voltages under the action of the resonant energy signal; the feedback module is used to detect the positive and negative radio frequency voltages respectively, obtain and feed back positive and negative feedback voltages to the drive module; the drive module is also used to control the temperature control module to heat the magnetic core of the power module according to the positive and negative feedback voltages when the positive and negative feedback voltages do not meet the preset voltage symmetry condition, so that the resonant module generates adjusted positive and negative radio frequency voltages until the adjusted positive and negative radio frequency voltages meet the preset voltage symmetry condition, that is, the resonant module generates positive and negative radio frequency voltages with symmetrical radio frequency voltage amplitudes.

[0067] This application also provides a method for adjusting the symmetry of radio frequency (RF) voltage, which is applied to an RF voltage symmetry adjustment system. The RF voltage symmetry adjustment system includes a driving module, a power module, a resonant module, a feedback module, and a temperature control module. The RF voltage symmetry adjustment system has been described in the above embodiments. The following, with reference to the accompanying drawings, will provide a detailed explanation of the RF voltage symmetry adjustment method provided in this application through specific examples. Figure 2 This is one of the flowcharts illustrating a radio frequency voltage symmetry adjustment method provided in an embodiment of this application, as shown below. Figure 2 As shown, the method includes:

[0068] S101, The drive module generates and outputs an RF drive signal to the power module at the current moment, so that the power module provides a resonant energy signal to the resonant module.

[0069] S102, the resonant module generates positive and negative radio frequency voltages under the action of the resonant energy signal.

[0070] S103 and the feedback module detect the positive and negative radio frequency voltages respectively, and obtain and feed back the positive and negative feedback voltages at the current moment to the drive module.

[0071] S104. If the positive feedback voltage and negative feedback voltage do not meet the preset voltage symmetry condition, the drive module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and negative feedback voltage at the current moment, so that the resonant module generates the adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0072] In this embodiment, the input terminal of the driving module is also connected to an interactive device. After the interactive device sends a command to generate radio frequency voltage, the control unit in the driving module sends a radio frequency voltage corresponding to 500 mass numbers according to the received command. Then, through the digital-to-analog converter, differential-integral circuit, mixer and direct data generator in the driving module, the radio frequency driving signal at the current moment is generated.

[0073] After receiving the current RF drive signal from the drive module, the power module amplifies the RF drive signal through the power amplifier in the power module to provide the resonant energy signal for the resonant module.

[0074] Under the influence of the resonant energy signal, the quadrupole in the resonant module generates a positive radio frequency voltage from a set of positive electrodes and a negative radio frequency voltage from a set of negative electrodes. The two feedback circuits of the feedback module detect the positive and negative radio frequency voltages in real time, reduce the detected positive and negative radio frequency voltages to obtain the positive and negative feedback voltages, and feed back the positive and negative feedback voltages at the current moment to the drive module.

[0075] After the drive module acquires the positive feedback voltage and negative feedback voltage at the current moment, it determines whether the positive feedback voltage and negative feedback voltage at the current moment meet the preset voltage symmetry condition. The preset voltage symmetry condition is whether the amplitudes of the positive feedback voltage and negative feedback voltage are equal, or whether the amplitude error of the positive feedback voltage and negative feedback voltage is within the preset error range.

[0076] If the current feedback voltage and negative feedback voltage do not meet the preset voltage symmetry condition, the temperature control module is controlled to heat the magnetic core of the power module according to the positive feedback voltage and negative feedback voltage, thereby changing the temperature of the magnetic core and causing the resonant module to generate adjusted positive and negative radio frequency voltages until the adjusted positive and negative radio frequency voltages meet the preset voltage symmetry condition.

[0077] In summary, this application provides a method for adjusting the symmetry of radio frequency (RF) voltage, applied to an RF voltage symmetry adjustment system. The method includes: a driving module generating and outputting an RF driving signal to a power module at the current moment, causing the power module to provide a resonant energy signal to a resonant module; the resonant module generating a positive RF voltage and a negative RF voltage under the influence of the resonant energy signal; a feedback module detecting the positive and negative RF voltages respectively, obtaining and feeding back the positive and negative feedback voltages at the current moment to the driving module; if the positive and negative feedback voltages do not meet a preset voltage symmetry condition, the driving module controlling a temperature control module to heat the magnetic core of the power module based on the current positive and negative feedback voltages, causing the resonant module to generate adjusted positive and negative RF voltages until the adjusted positive and negative RF voltages meet the preset voltage symmetry condition, thereby changing the temperature of the magnetic core to enable the resonant module to generate positive and negative RF voltages with symmetrical amplitudes.

[0078] This application also provides another possible implementation of the radio frequency voltage symmetry adjustment method. Figure 3 This is a second schematic flowchart illustrating a radio frequency voltage symmetry adjustment method provided in an embodiment of this application. Figure 3 As shown, the drive module controls the temperature control module to heat the magnetic core of the power module based on the current positive and negative feedback voltages, so that the resonant module generates adjusted positive and negative RF voltages, including:

[0079] S201. The drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm.

[0080] S202. The drive module determines the heating output power of the temperature control module based on the current control quantity.

[0081] S203. The drive module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates the adjusted positive and negative radio frequency voltages.

[0082] In this embodiment, the driving module determines that the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition. If the heating element and the temperature measuring element in the temperature control module are wrapped on the first magnetic core of the transformer, and the first magnetic core is located between the primary side and the first coil, the temperature of the first magnetic core will affect the inductance generated by the first coil. Since the first coil is connected to the first positive electrode of a set of positive electrodes, the temperature of the first magnetic core will affect the positive radio frequency voltage generated by the set of positive electrodes.

[0083] The positive feedback voltage is taken as the target value and the negative feedback voltage is taken as the actual value. A preset control algorithm is used to calculate the current control quantity and determine the heating output power of the temperature control module. The temperature control module is then controlled to heat the first magnetic core, changing the temperature of the first magnetic core and thus changing the positive radio frequency voltage generated by a set of positive electrodes, so that the resonant module generates the adjusted positive and negative radio frequency voltages.

[0084] Similarly, if the heating element and temperature measuring element in the temperature control module are wrapped around the second magnetic core of the transformer, and the second magnetic core is located between the primary side and the second coil, then the temperature of the second magnetic core will affect the inductance generated by the second coil. Since the second coil is connected to the first negative electrode of a set of positive electrodes, the temperature of the second magnetic core will affect the positive radio frequency voltage generated by the set of negative electrodes.

[0085] The negative feedback voltage is used as the target value and the positive feedback voltage is used as the actual value. A preset control algorithm is used to calculate the current control quantity and determine the heating output power of the temperature control module. The temperature control module is then used to heat the second magnetic core, changing the temperature of the second magnetic core. This changes the negative radio frequency voltage generated by a set of negative electrodes, causing the resonant module to generate the adjusted positive and negative radio frequency voltages.

[0086] It should be noted that the formula for calculating the inductance of a coil is as follows:

[0087] L=(kμ0μ s N 2 *S) / I

[0088] Where μ0 is the free permeability μ0 = 4π * 10 -7 μ s μ is the relative permeability of the magnetic core inside the coil; for an air-core coil... s =1, N 2 S is the square of the number of turns in the coil; S is the cross-sectional area of ​​the coil in square meters; I is the length of the coil in meters; k is a coefficient that depends on the ratio of the coil's radius (R) to its length (I).

[0089] The relationship between temperature and relative permeability, taking manganese-zinc ferrite as an example, generally shows that the permeability of manganese-zinc ferrite decreases with increasing temperature. This is because rising temperature increases the thermal vibration between magnetic particles, making them less responsive to saturation magnetization, thus reducing permeability. However, the change in permeability with temperature is generally more complex and can be expressed by the following expression:

[0090] μ0=f(T)

[0091] The formula for calculating the inductance of a coil is then adjusted as follows:

[0092] L=(kf(T)μ s N 2*S) / I

[0093] The inductance changes with temperature, which in turn causes a change in the actual RF voltage. Since temperature can change the actual RF voltage, the temperature control module heats the magnetic core of the power module, causing the resonant module to generate positive and negative RF voltages with symmetrical amplitudes.

[0094] The drive module calculates the current control quantity as a value based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm. Then, it converts the current control quantity into heating output power. For example, if the current control quantity is 5, the heating output power is 50%. Based on the heating output power, the temperature control module is controlled to heat the magnetic core of the power module.

[0095] In the method provided in this application embodiment, the driving module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm. Based on the current control quantity, the driving module determines the heating output power of the temperature control module. Based on the heating output power, the driving module controls the temperature control module to heat the magnetic core of the power module, so that the resonant module generates adjusted positive and negative radio frequency voltages, thereby changing the temperature of the magnetic core and obtaining positive and negative radio frequency voltages with symmetrical amplitudes.

[0096] This application also provides another possible implementation of the radio frequency voltage symmetry adjustment method. Figure 4 This is the third flowchart illustrating a method for adjusting radio frequency voltage symmetry provided in an embodiment of this application. Figure 4 As shown, the drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm, including:

[0097] S301 The drive module calculates the current voltage error based on the positive feedback voltage and the negative feedback voltage, and calculates the current control increment based on the current voltage error and the historical voltage error using a preset control algorithm.

[0098] In this embodiment, the preset control algorithm is a proportional-integral-derivative (PID) control algorithm. First, the current voltage error f_err is calculated based on the positive feedback voltage and the negative feedback voltage. Then, the PID algorithm is used to process the current voltage error f_err and the historical voltage error to obtain the current control increment f_deltaU.

[0099] S302, The drive module calculates the current control quantity based on the current control increment and the control quantity corresponding to the historical voltage error.

[0100] The current control quantity f_kU is obtained by summing the control quantities corresponding to the current control increment and the historical voltage error.

[0101] In the method provided in this application embodiment, the driving module calculates the current voltage error based on the positive feedback voltage and the negative feedback voltage, and calculates the current control increment based on the current voltage error and the historical voltage error using a preset control algorithm; the driving module calculates the current control quantity based on the control quantity corresponding to the current control increment and the historical voltage error, which is used to determine the heating control quantity at the current moment.

[0102] This application also provides another possible implementation of the radio frequency voltage symmetry adjustment method. Figure 5 This is the fourth flowchart illustrating a method for adjusting the symmetry of radio frequency voltage provided in this application. Figure 5 As shown, based on the current voltage error and historical voltage error, a preset control algorithm is used to calculate the current control increment, including:

[0103] S401. Based on the current voltage error and historical voltage error, a preset control algorithm is used to calculate the first contribution, the second contribution, and the third contribution.

[0104] S402. The first contribution, the second contribution, and the third contribution are summed to obtain the current control increment.

[0105] In this embodiment, the first contribution, the second contribution, and the third contribution are obtained by using a PID algorithm to calculate the current voltage error and the historical voltage error.

[0106] Optionally, the historical voltage error includes: the voltage error at the first moment and the voltage error at the second moment, wherein the first moment is the moment before the current moment and the second moment is the moment before the first moment.

[0107] The first contribution is determined based on the current voltage error, the voltage error at the first moment, and the preset proportional control parameters.

[0108] The second contribution is determined based on the current voltage error and the preset integral control parameters.

[0109] The third contribution is determined based on the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and the preset differential control parameters.

[0110] Specifically, the formula for calculating the first contribution is as follows:

[0111] f_kpU=f_kp*(f_err-f_errLast)

[0112] Where f_kpU represents the first contribution, f_kp represents the preset proportional control parameter, f_err represents the current voltage error, and f_errLast represents the voltage error at the first moment.

[0113] The formula for calculating the second contribution is as follows:

[0114] f_kiU=f_ki*f_err

[0115] Where f_kiU represents the second contribution, f_ki represents the preset integral control parameter, and f_err represents the current voltage error.

[0116] The formula for calculating the third contribution is as follows:

[0117] f_kdU=f_kd*(f_err-2*f_errLast+f_errPrev)

[0118] Where f_kdU represents the third contribution, f_kd represents the preset differential control parameter, f_err represents the current voltage error, f_errLast represents the voltage error at the first moment, and f_errPrev represents the voltage error at the second moment.

[0119] Based on the calculation expressions for the first contribution, the second contribution, and the third contribution, the first contribution, the second contribution, and the third contribution are calculated respectively.

[0120] Then, the first contribution, the second contribution, and the third contribution are summed to obtain the current control increment f_deltaU.

[0121] In the method provided in this application embodiment, based on the current voltage error and the historical voltage error, a preset control algorithm is used to calculate the first contribution, the second contribution, and the third contribution. The first contribution, the second contribution, and the third contribution are accumulated to obtain the current control increment, which is used to obtain the current control quantity.

[0122] This application also provides another possible implementation of the radio frequency voltage symmetry adjustment method. Figure 6 This is the fifth flowchart illustrating a method for adjusting radio frequency voltage symmetry provided in this application. Figure 6 As shown, the drive module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages, including:

[0123] S501 The drive module calculates the heating drive duty cycle based on the heating output power, and generates a heating drive signal based on the heating drive duty cycle.

[0124] S502, the drive module controls the temperature control module to heat the magnetic core of the power module according to the heating drive signal, so that the resonant module generates the adjusted positive and negative radio frequency voltages.

[0125] In this embodiment, the heating drive duty cycle D is calculated based on the heating output power f_kU and the preset heating value Full. The heating drive duty cycle D is expressed as: D = f_kU / Full. The heating drive duty cycle D is also the duty cycle of the PWM wave output by the drive module. Here, the heating output power f_kU can be considered as the heating time, and the preset heating value Full can be 10 or 100, representing the upper limit of the heating output power f_kU. The maximum value of the heating output power f_kU is the preset heating value, at which point the heating is at full power. If the heating output power f_kU is 10 and the preset heating value Full is 100, then the heating drive duty cycle D is 1%.

[0126] The drive module controls the temperature control module to heat the magnetic core of the power module according to the heating drive signal, so that the resonant module generates the adjusted positive and negative radio frequency voltages.

[0127] Specifically, the temperature control module drives the switching unit to control the heating element to heat the magnetic core according to the heating drive signal, thereby changing the temperature of the magnetic core and causing the resonant module to generate adjusted positive and negative radio frequency voltages.

[0128] For example, if the resistance of the heating element is R and the external power supply voltage is V, then the output power is expressed as: P = U 2 / R; The relationship between the actual heating voltage U and the power supply voltage is: U=V*D.

[0129] The output power of the heating element is: P = V 2 *(f_kU / Full) 2 / R.

[0130] It is evident that changes in the heating output power f_kU will cause changes in the heating power of the heating element, thereby altering the core temperature.

[0131] In the method provided in this application embodiment, the driving module calculates the heating driving duty cycle based on the heating output power, and generates a heating driving signal based on the heating driving duty cycle. The driving module controls the temperature control module to heat the magnetic core of the power module based on the heating driving signal, so that the resonant module generates adjusted positive and negative radio frequency voltages, thereby achieving the adjustment of the symmetry of the positive and negative radio frequency voltages.

[0132] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for adjusting the symmetry of radio frequency voltage, characterized in that, An application is made in a radio frequency (RF) voltage symmetry adjustment system, the RF voltage symmetry adjustment system comprising: a drive module, a power module, a resonant module, a feedback module, and a temperature control module; the method comprises: The driving module generates and outputs a radio frequency driving signal to the power module at the current moment, so that the power module provides a resonant energy signal to the resonant module; The resonant module generates positive and negative radio frequency voltages under the action of the resonant energy signal; The feedback module detects the positive radio frequency voltage and the negative radio frequency voltage respectively, and obtains and feeds back the positive feedback voltage and negative feedback voltage at the current moment to the driving module; If the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates an adjusted positive radio frequency voltage and a negative radio frequency voltage until the adjusted positive radio frequency voltage and the negative radio frequency voltage meet the preset voltage symmetry condition. The driving module controls the temperature control module to heat the magnetic core of the power module based on the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates adjusted positive and negative radio frequency voltages, including: The drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm; The drive module determines the heating output power of the temperature control module based on the current control quantity; The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages.

2. The method as described in claim 1, characterized in that, The drive module calculates the current control quantity based on the positive feedback voltage and the negative feedback voltage using a preset control algorithm, including: The drive module calculates the current voltage error based on the positive feedback voltage and the negative feedback voltage, and calculates the current control increment based on the current voltage error and the historical voltage error using the preset control algorithm. The drive module calculates the current control quantity based on the current control increment and the control quantity corresponding to the historical voltage error.

3. The method as described in claim 2, characterized in that, The step of calculating the current control increment based on the current voltage error and the historical voltage error using the preset control algorithm includes: Based on the current voltage error and the historical voltage error, the first contribution, the second contribution, and the third contribution are calculated using the preset control algorithm. The first contribution, the second contribution, and the third contribution are summed to obtain the current control increment.

4. The method as described in claim 3, characterized in that, The historical voltage error includes: the voltage error at a first moment and the voltage error at a second moment, wherein the first moment is the moment before the current moment, and the second moment is the moment before the first moment; the step of calculating the first contribution, the second contribution, and the third contribution based on the current voltage error and the historical voltage error using the preset control algorithm includes: The first contribution amount is determined based on the current voltage error, the voltage error at the first moment, and the preset proportional control parameters; The second contribution amount is determined based on the current voltage error and the preset integral control parameters; The third contribution is determined based on the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and the preset differential control parameters.

5. The method as described in claim 1, characterized in that, The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages, including: The driving module calculates the heating drive duty cycle based on the heating output power, and generates a heating drive signal based on the heating drive duty cycle. The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonant module generates adjusted positive and negative radio frequency voltages.

6. A radio frequency voltage symmetry adjustment system, characterized in that, The radio frequency voltage symmetry adjustment system includes: a drive module, a power module, a resonant module, a feedback module, and a temperature control module. The first output terminal of the drive module is connected to the input terminal of the power module, and the output terminal of the power module is connected to the input terminal of the resonant module. The output terminal of the resonant module is connected to the input terminal of the feedback module, and the output terminal of the feedback module is connected to the input terminal of the drive module. The second output terminal of the drive module is connected to the input terminal of the temperature control module, and the output terminal of the temperature control module is connected to the magnetic core of the power module. The driving module is used to generate and output an RF driving signal to the power module; the power module is used to provide a resonant energy signal to the resonant module; the resonant module is used to generate a positive RF voltage and a negative RF voltage under the action of the resonant energy signal; the feedback module is used to detect the positive RF voltage and the negative RF voltage respectively, obtain and feed back a positive feedback voltage and a negative feedback voltage to the driving module. The driving module is further configured to, when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, calculate the current control quantity according to the positive feedback voltage and the negative feedback voltage using a preset control algorithm; determine the heating output power of the temperature control module according to the current control quantity; and control the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonant module generates adjusted positive and negative radio frequency voltages until the adjusted positive and negative radio frequency voltages meet the preset voltage symmetry condition.

7. The system as described in claim 6, characterized in that, The drive module includes: a control unit, a digital-to-analog converter, a differential-integral circuit, a mixer, and a direct data generator. The first output terminal of the control unit is connected to the input terminal of the digital-to-analog converter, the output terminal of the digital-to-analog converter is connected to the input terminal of the differential-integral circuit, the output terminal of the differential-integral circuit is connected to the input terminal of the mixer, the output terminal of the mixer is the first output terminal of the drive module, and the output terminal of the mixer is connected to the input terminal of the power module. The second output terminal of the control unit is the second output terminal of the drive module. The second output terminal of the control unit is connected to the input terminal of the temperature control module. The second output terminal of the control unit is also connected to the input terminal of the direct data generator. The output terminal of the direct data generator is connected to the input terminal of the mixer.

8. The system as described in claim 6, characterized in that, The power module includes a power amplifier and a transformer. The input terminal of the power amplifier is the input terminal of the power module. The output terminal of the power amplifier is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input terminal of the resonant module.

9. The system as described in claim 6, characterized in that, The temperature control module includes a switching unit, a heating element, and a temperature measuring element. The input terminal of the switching unit is the input terminal of the temperature control module, and the output terminal of the switching unit is connected to the heating element. The heating element and the temperature measuring element enclose the magnetic core of the transformer in the power module, and the temperature measuring element is also connected to the control unit in the drive module.

Citation Information

Patent Citations

  • Radio frequency high-voltage output amplitude automatic control system and method

    CN108415497A

  • Circuit structure for realizing positive and negative voltage balance of linear power supply

    CN216117846U