Two-fluid cleaning device

Abstract

The invention relates to the technical field of two-fluid cleaning, in particular to a two-fluid cleaning device which comprises a rack, a two-fluid cleaning mechanism and a brush cleaning mechanism, the rack is provided with a cleaning space, the cleaning space is provided with a movable material platform, and the material platform is used for placing a product to be cleaned; the two-fluid cleaning mechanism is arranged in the cleaning space, the two-fluid cleaning mechanism is provided with a first swinging part capable of swinging, the first swinging part is provided with a first fluid nozzle and a second fluid nozzle, and the first fluid nozzle and the second fluid nozzle are arranged towards the bearing surface of the material platform; the brush cleaning mechanism is arranged in the cleaning space and provided with a second swinging piece capable of swinging, and a flexible brush body is arranged on the side, facing the bearing face of the material platform, of the second swinging piece. According to the technical scheme, the two-fluid cleaning device aims at improving the surface cleaning quality of the to-be-treated product.

Description

Technical Field

[0001] The invention relates to the technical field of two-fluid cleaning, and in particular to a two-fluid cleaning device. Background Art

[0002] With the increasing sophistication of 3C products such as smartphones and computers, the advancement of electronic components and the development of semiconductor technology have put more and higher demands on semiconductor manufacturing. Cutting and cleaning are important processes in semiconductor manufacturing. The quality of cleaning greatly affects the quality of subsequent processes such as AOI (Automated Optical Inspection) and die bonding.

[0003] Among them, for products with smooth surfaces to be processed, such as UV films and light bulbs, there is a problem that stubborn dust cannot be removed. Summary of the invention

[0004] The main purpose of the present invention is to provide a two-fluid cleaning device, aiming to improve the surface cleaning quality of the product to be processed.

[0005] To achieve the above purpose, the two-fluid cleaning device comprises:

[0006] A frame, wherein the frame has a cleaning space, wherein the cleaning space is provided with a movable material platform, and the material platform is used to place the product to be cleaned;

[0007] A two-fluid cleaning mechanism, the two-fluid cleaning mechanism is arranged in the cleaning space, the two-fluid cleaning mechanism has a swingable first swinging member, the first swinging member is provided with a first fluid nozzle and a second fluid nozzle, the first fluid nozzle and the second fluid nozzle are arranged toward the bearing surface of the material platform; and

[0008] A brush cleaning mechanism is arranged in the cleaning space, and the brush cleaning mechanism has a swingable second swinging member, and the second swinging member has a flexible brush body on one side facing the bearing surface of the material platform.

[0009] In one embodiment of the present invention, the two-fluid cleaning mechanism is disposed at a first corner of the material platform, and the brush cleaning mechanism is disposed at a second corner of the material platform, and the first corner and the second corner are diagonally distributed on the material platform.

[0010] In one embodiment of the present invention, the brush cleaning mechanism includes a second rotating motor, a second rotating rod and the second swinging member, the second rotating motor is fixedly arranged in the cleaning space, the second rotating rod is fixedly connected to the output shaft of the second rotating motor, and the first swinging member is connected to the second rotating rod.

[0011] In one embodiment of the present invention, the second swinging member is provided with a plurality of third fluid nozzles, and each of the third fluid nozzles is provided on a side of the second swinging member facing the flexible brush body.

[0012] In one embodiment of the present invention, a plurality of the third fluid nozzles are arranged at intervals along the length direction of the second swinging member.

[0013] In one embodiment of the present invention, the second swinging member includes a movable portion and a connecting portion, the connecting portion is fixedly connected to the second rotating rod, the movable portion is movably inserted in the connecting portion and can be close to the material platform in the longitudinal direction, and the flexible brush body and the third fluid nozzle are arranged on a side of the movable portion facing the material platform;

[0014] The movable part is provided with a distance sensor, and there is a sensing distance between the sensing end of the distance sensor facing the material platform and the side of the movable part facing away from the material platform.

[0015] In one embodiment of the present invention, the two-fluid cleaning mechanism includes a first rotating motor, a first rotating rod and the first swinging member, the first rotating motor is fixedly arranged on the material platform, the first rotating rod is fixedly connected to the output shaft of the first rotating motor, and the first swinging member is connected to the first rotating rod.

[0016] In one embodiment of the present invention, the frame is fixedly provided with a third rotary motor in the cleaning space, the third rotary motor is arranged on a side of the material platform facing away from the bearing surface, and the output shaft of the third rotary motor is connected to the material platform.

[0017] In one embodiment of the present invention, the frame is fixedly provided with a lifting cylinder in the cleaning space, the lifting cylinder is arranged on the side of the material platform facing away from the bearing surface and away from the third rotating motor, and the output shaft of the lifting cylinder is connected to the material platform.

[0018] In one embodiment of the present invention, the two-fluid cleaning device further comprises a filter screen, which is fixedly disposed in the cleaning space and located on a side of the material platform facing away from the carrying surface.

[0019] In the technical solution of the present invention, the two-fluid cleaning device can be used to clean UV films, LED lamp beads and other structures. The product to be cleaned is placed on the material platform, and the material platform can be rotated and lifted to approach the two-fluid cleaning mechanism or abut the brush cleaning mechanism. Specifically, during the cleaning process, the two-fluid cleaning mechanism performs preliminary surface cleaning treatment through the gas and liquid sprayed by the first fluid nozzle and the second fluid nozzle. Then the brush cleaning mechanism is operated, the second swinging member swings, and the flexible brush body can act on the product to be cleaned. The force of the flexible brush body on the product to be cleaned is greater than the tension of the fluid on the product to be cleaned, thereby removing stubborn dust and other stains attached to the product to be cleaned, and then the two-fluid cleaning mechanism works again to completely remove the dust on the product to be cleaned by the fluid, thereby improving the surface cleaning quality of the product to be treated. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the three-dimensional structure of an embodiment of a two-fluid cleaning device provided by the present invention;

[0022] Figure 2 This is a schematic diagram of the internal structure of the two-fluid cleaning device provided by the present invention;

[0023] Figure 3 A schematic diagram of the three-dimensional structure of an embodiment of the two-fluid cleaning mechanism provided by the present invention;

[0024] Figure 4 The figure is a three-dimensional structural diagram of an embodiment of the brush cleaning mechanism provided by the present invention.

[0025] Description of Figure Numbers:

[0026] 10. Frame; 10a. Cleaning space; 11. Material platform; 12. Third rotating motor; 13. Lifting cylinder; 14. Filter; 15. Guide structure; 16. Lifting door; 20. Two-fluid cleaning mechanism; 21. First rotating motor; 22. First rotating rod; 23. First swinging member; 231. First fluid nozzle; 232. Second fluid nozzle; 30. Brush cleaning mechanism; 31. Second rotating motor; 32. Second rotating rod; 33. Second swinging member; 331. Movable part; 332. Connecting part; 333. Distance sensor.

[0027] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0030] In addition, the descriptions of "first", "second", etc. in the present invention are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0031] See also Figure 1 and Figure 2 , the two-fluid cleaning device comprises:

[0032] The frame 10 has a cleaning space 10a, and the cleaning space 10a is provided with a movable material platform 11, and the material platform 11 is used to place the product to be cleaned;

[0033] A two-fluid cleaning mechanism 20, which is disposed in the cleaning space 10a, and has a swingable first swing member 23, wherein the first swing member 23 is provided with a first fluid nozzle 231 and a second fluid nozzle 232, and the first fluid nozzle 231 and the second fluid nozzle 232 are disposed toward the bearing surface of the material platform 11; and

[0034] The brush cleaning mechanism 30 is disposed in the cleaning space 10 a and has a swingable second swinging member 33 . The second swinging member 33 has a flexible brush body on one side of the bearing surface facing the material platform 11 .

[0035] In the technical solution of the present invention, the two-fluid cleaning device can be used to clean UV films, LED lamp beads and other structures. The product to be cleaned is placed on the material platform 11, and the material platform 11 can rotate and move up and down to approach the two-fluid cleaning mechanism 20 or abut the brush cleaning mechanism 30. Specifically, during the cleaning process, the two-fluid cleaning mechanism 20 performs preliminary surface cleaning treatment through the gas and liquid sprayed by the first fluid nozzle 231 and the second fluid nozzle 232. Then the brush cleaning mechanism 30 is operated, and the second swinging member 33 swings. The flexible brush body can act on the product to be cleaned. The force of the flexible brush body on the product to be cleaned is greater than the tension of the fluid on the product to be cleaned, thereby removing stubborn dust and other stains attached to the product to be cleaned. Then the two-fluid cleaning mechanism 20 works again to completely remove the dust on the product to be cleaned by the fluid, thereby improving the surface cleaning quality of the product to be treated.

[0036] The frame 10 is composed of multiple metal plates to form a cubic structure. The multiple metal plates are enclosed to form a cleaning space 10a extending in the longitudinal direction. In the cleaning space 10a, a material platform 11 is placed. The material platform 11 is fixed in the cleaning space 10a by structures such as a fixing plate and a limiting lever. It should be understood that the fixation of the material platform 11 refers to maintaining a constant height relative to the bottom of the frame 10 and not causing looseness such as left and right shaking. The material platform 11 itself includes a rotatable structure; specifically, a magnetic structure is provided on the outer edge of the material platform 11, and the UV film that has been cut in a single-piece form is fixed on a limiting material frame that can be adsorbed by the magnetic structure. The limiting material frame can be placed on the material platform 11 by manual loading or automatic loading. In this way, the limiting material frame can be quickly fixed by magnetic suction to avoid the limiting material frame, which is not limited here.

[0037] The two-fluid cleaning mechanism 20 specifically includes a first swinging member 23 that can swing. The first swinging member 23 can sweep in and out of the surface of the product to be cleaned in the circumferential direction, thereby achieving a flushing effect. Specifically, a first fluid nozzle 231 and a second fluid nozzle 232 are provided on the first swinging member 23. The first fluid nozzle 231 is connected to an external air pump assembly through an air pipe to generate an air flow, and the second fluid nozzle 232 is connected to an external water pump assembly through a water pipe to generate a water flow. Through the action of the air flow and the water flow, the dust on the surface of the product to be cleaned can be preliminarily removed.

[0038] The brush cleaning mechanism 30 has a swingable second swing member 33, and the second swing member 33 has a flexible brush body on one side of the bearing surface facing the material platform 11. The second swing member 33 can sweep in and out of the surface of the product to be cleaned in the circumferential direction, wherein the flexible brush body can abut against the surface of the product to be cleaned, thereby achieving a wiping effect. In this way, the stubborn dust on the product to be cleaned can be loosened from the product to be cleaned, and then the two-fluid cleaning mechanism 20 is operated again to wash away the stubborn dust; it can be understood that the flexible brush body can be a biological bristle brush, or a nylon brush wire, etc., which is not limited here.

[0039] It can be understood that the two-fluid cleaning device also includes structures such as a control panel and an electronic control system. The control panel is provided with a plurality of control buttons to achieve the purpose of human-machine interaction between the operator and the two-fluid cleaning device, thereby realizing automated cleaning actions; a lifting door 16 is provided on one side of the frame 10, and the lifting door 16 is clamped in the guide groove of the guide structure. The lifting door 16 is connected to the cylinder to realize directional movement, so as to facilitate the placement of the product to be cleaned and the removal of the cleaned product. Through the automated opening and closing actions, the convenience and safety of operation are improved. Furthermore, a feeding mechanism is provided on the outside of the frame, and the feeding mechanism is provided with a driving member and a mobile mechanical arm driven by the driving member. Under the drive of the driving member, the mobile mechanical arm can move toward or away from the material platform 11, and a gripping structure is provided on the side of the mobile mechanical arm facing the material platform 11. The gripping structure is used to clamp the limit material frame. In this way, the mobile mechanical arm can clamp the limit material The frame enters or exits from the material opening formed by the lowering of the lifting door 16, thereby realizing automatic loading and unloading. In one embodiment, the grasping structure is a clamping claw form that is controlled by a motor to open and close. Specifically, the grasping structure includes a first clamping claw and a second clamping claw that are rotatably connected. The end of the first clamping claw and the end of the second clamping claw can approach each other to form a clamping space or move away from each other to form a loosening space under the control of the motor, thereby clamping the limited material frame into the cleaning space and placing it on the material platform. In another embodiment, the grasping structure is a press table structure controlled by a motor. Specifically, the press table structure includes a first press table and a second press table arranged up and down. The first press table and the second press table can move synchronously to approach each other or move away from each other, or one of the first press table and the second press table can move toward the other press table, thereby realizing a clamping space or a loosening space; at the same time, a safety grating is also provided on the frame 10 to improve safety.

[0040] For further information, see Figure 2The two-fluid cleaning mechanism 20 is arranged at the first corner of the material platform 11, and the brush cleaning mechanism 30 is arranged at the second corner of the material platform 11. The first corner and the second corner are diagonally distributed on the material platform 11. In this way, the cleaning space 10a can be maximized, while ensuring that both cleaning mechanisms can cover the products to be cleaned on the material platform 11 and avoid position interference. In actual use of the two-fluid cleaning device, the airflow and water flow sprayed by the two-fluid cleaning mechanism 20 will not directly affect the flexible brush body of the brush cleaning mechanism 30, thereby ensuring the cleaning effect.

[0041] In one embodiment of the present invention, see Figure 4 The brush cleaning mechanism 30 includes a second rotating motor 31, a second rotating rod 32 and a second swinging member 33. The second rotating motor 31 is fixedly arranged on the material platform 11. The second rotating rod 32 is fixedly connected to the output shaft of the second rotating motor 31. The first swinging member 23 is connected to the second rotating rod 32. Specifically, the second rotating motor 31 is electrically connected to the electronic control system of the two-fluid cleaning device. The second rotating motor 31 is arranged in the cleaning space 10a and is located below the material platform 11. The output shaft of the second rotating motor 31 faces the material platform 11. One end of the second rotating rod 32 is connected to the output shaft of the second rotating motor 31, and the other end is higher than the bearing surface of the material platform 11. The second swinging member 33 is fixedly connected to the end of the second rotating rod 32 away from the second rotating motor 31. The extension direction of the second swinging member 33 and the extension direction of the second rotating rod 32 form a right angle or are equivalent to a right angle. In this way, when the second rotating motor 31 rotates, the second swinging member 33 can sweep in and out of the surface of the product to be cleaned in the circumferential direction.

[0042] Furthermore, the second swinging member 33 is provided with a plurality of third fluid nozzles, each of which is arranged on a side of the second swinging member 33 facing the flexible brush body, and the third fluid nozzles are connected to a device capable of injecting detergent through a water pipe, so that the detergent can flow to the flexible brush body through the third fluid nozzles, thereby preventing dust from being adsorbed onto the flexible brush body.

[0043] In one embodiment of the present invention, a plurality of third fluid nozzles are spaced apart along the length direction of the second swinging member 33, so that the entire length of the flexible brush body can be evenly covered by the detergent, thereby improving the cleaning uniformity and efficiency.

[0044] For further information, see Figure 4 The second swinging member 33 includes a movable portion 331 and a connecting portion 332, the connecting portion 332 is fixedly connected to the second rotating rod 32, the movable portion 331 is movably inserted in the connecting portion 332, and can be close to the material platform 11 in the longitudinal direction, and the flexible brush body and the third fluid nozzle are arranged on a side of the movable portion 331 facing the material platform 11;

[0045] The movable part 331 is provided with a distance sensor 333. There is a sensing distance between the sensing end of the distance sensor 333 facing the material platform 11 and the side of the movable part 331 facing away from the material platform 11. During this process, since the flexible brush body is damaged, it is necessary to replace the flexible brush body in time to ensure the wiping effect. In order to achieve this goal, a plurality of springs are provided in the movable part 331. Each spring is connected to the connecting part 332. The mass of the flexible brush body changes due to wear, resulting in an adaptive change in the deformation of the spring. Each time the product to be cleaned is wiped, the product to be cleaned is subjected to different elastic force changes, resulting in a continuous change in the sensing distance between the sensing end of the distance sensor 333 and the side of the movable part 331 facing away from the material platform 11. The degree of damage to the flexible brush body is determined by the continuously changing sensing distance.

[0046] In one embodiment of the present invention, see Figure 3 The two-fluid cleaning mechanism 20 includes a first rotating motor 21, a first rotating rod 22 and a first swinging member 23. The first rotating motor 21 is fixedly arranged on the material platform 11. The first rotating rod 22 is fixedly connected to the output shaft of the first rotating motor 21. The first swinging member 23 is connected to the first rotating rod 22. Specifically, the first rotating motor 21 is electrically connected to the electronic control system of the two-fluid cleaning device. The first rotating motor 21 is arranged in the cleaning space 10a and is located below the material platform 11. The output shaft of the first rotating motor 21 faces the material platform 11. One end of the first rotating rod 22 is connected to the output shaft of the first rotating motor 21, and the other end is higher than the bearing surface of the material platform 11. The first swinging member 23 is fixedly connected to the end of the first rotating rod 22 away from the first rotating motor 21. The extension direction of the first swinging member 23 and the extension direction of the first rotating rod 22 form a right angle or are equivalent to a right angle. In this way, when the first rotating motor 21 rotates, the first swinging member 23 can sweep in and out of the surface of the product to be cleaned in the circumferential direction.

[0047] In one embodiment of the present invention, see Figure 2 A third rotating motor 12 is fixedly installed in the cleaning space 10a of the frame 10. The third rotating motor 12 is arranged on the side of the material platform 11 facing away from the bearing surface. The output shaft of the third rotating motor 12 is connected to the material platform 11. The third rotating motor 12 is electrically connected to the electronic control system of the two-fluid cleaning device. In this way, the movement of the third rotating motor 12 can drive the material platform 11 to rotate.

[0048] In one embodiment of the present invention, see Figure 2A lifting cylinder 13 is fixedly provided on the frame 10 in the cleaning space 10a. The lifting cylinder 13 is arranged on the side of the material platform 11 facing away from the bearing surface and avoids the third rotating motor 12. The output shaft of the lifting cylinder 13 is connected to the material platform 11. The lifting cylinder 13 is electrically connected to the electronic control system of the two-fluid cleaning device. In this way, the movement of the third rotating motor 12 can drive the material platform 11 to rise and fall.

[0049] For further information, see Figure 2 The two-fluid cleaning device also includes a filter screen 14, which is fixedly arranged in the cleaning space 10a and is located on the side of the material platform 11 facing away from the bearing surface. In this way, the filter screen 14 can intercept larger stains on the product to be cleaned, thereby preventing the stains from being adsorbed on the surfaces of other parts in the cleaning space 10a; further, two rotating shaft holes are provided on the filter screen 14, and the two rotating shaft holes are respectively located at two opposite corners of the filter screen 14, one rotating shaft hole is close to the two-fluid cleaning mechanism 20, and the other rotating shaft hole is close to the brush cleaning mechanism 30. The first rotating rod 22 in the two-fluid cleaning mechanism 20 and the second rotating rod 32 in the brush cleaning mechanism 30 both pass through the corresponding rotating shaft holes. In this way, the space below the material platform 11 can be fully utilized, and the filter screen 14 is arranged here without causing position interference with the two-fluid cleaning mechanism 20 and the brush cleaning mechanism 30, thereby avoiding interference with the circumferential rotation of the first swinging member 23 and the second swinging member 33 in the lateral direction.

[0050] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention's specification and drawings, or directly / indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. A two-fluid cleaning device, characterized in that: The two-fluid cleaning device comprises: A frame (10), the frame (10) having a cleaning space (10a), the cleaning space (10a) being provided with a movable material platform (11), the material platform (11) being used to place products to be cleaned; a two-fluid cleaning mechanism (20), the two-fluid cleaning mechanism (20) being arranged in the cleaning space (10a), the two-fluid cleaning mechanism (20) having a swingable first swinging member (23), the first swinging member (23) being provided with a first fluid nozzle (231) and a second fluid nozzle (232), the first fluid nozzle (231) and the second fluid nozzle (232) being arranged toward the bearing surface of the material platform (11); and A brush cleaning mechanism (30) is provided in the cleaning space (10a), the brush cleaning mechanism (30) has a swingable second swinging member (33), and the second swinging member (33) has a flexible brush body on one side of the bearing surface facing the material platform (11).

2. The two-fluid cleaning device according to claim 1, characterized in that: The two-fluid cleaning mechanism (20) is arranged at a first corner of the material platform (11), and the brush cleaning mechanism (30) is arranged at a second corner of the material platform (11), and the first corner and the second corner are diagonally distributed on the material platform (11).

3. The two-fluid cleaning device according to claim 1, characterized in that: The brush cleaning mechanism (30) comprises a second rotating motor (31), a second rotating rod (32) and a second swinging member (33); the second rotating motor (31) is fixedly arranged in the cleaning space (10a); the second rotating rod (32) is fixedly connected to the output shaft of the second rotating motor (31); and the first swinging member (23) is connected to the second rotating rod (32).

4. The two-fluid cleaning device according to claim 3, characterized in that: The second swinging member (33) is provided with a plurality of third fluid nozzles, and each of the third fluid nozzles is arranged on a side of the second swinging member (33) facing the flexible brush body.

5. The two-fluid cleaning device according to claim 4, characterized in that: The plurality of third fluid nozzles are arranged at intervals along the length direction of the second swinging member (33).

6. The two-fluid cleaning device according to claim 3, characterized in that: The second swinging member (33) comprises a movable portion (331) and a connecting portion (332), wherein the connecting portion (332) is fixedly connected to the second rotating rod (32), the movable portion (331) is movably inserted into the connecting portion (332) and can be close to the material platform (11) in the longitudinal direction, and the flexible brush body and the third fluid nozzle are arranged on a side of the movable portion (331) facing the material platform (11); The movable part (331) is provided with a distance sensor (333), and there is a sensing distance between the sensing end of the distance sensor (333) facing the material platform (11) and the side of the movable part (331) facing away from the material platform (11).

7. The two-fluid cleaning device according to any one of claims 1 to 6, characterized in that: The two-fluid cleaning mechanism (20) comprises a first rotating motor (21), a first rotating rod (22) and the first swinging member (23), wherein the first rotating motor (21) is fixedly arranged on the material platform (11), the first rotating rod (22) is fixedly connected to the output shaft of the first rotating motor (21), and the first swinging member (23) is connected to the first rotating rod (22).

8. The two-fluid cleaning device according to claim 7, characterized in that: The frame (10) is fixedly provided with a third rotating motor (12) in the cleaning space (10a); the third rotating motor (12) is arranged on a side of the material platform (11) facing away from the bearing surface; and an output shaft of the third rotating motor (12) is connected to the material platform (11).

9. The two-fluid cleaning device according to claim 8, characterized in that: The frame (10) is fixedly provided with a lifting cylinder (13) in the cleaning space (10a); the lifting cylinder (13) is arranged on a side of the material platform (11) facing away from the bearing surface and away from the third rotating motor (12); the output shaft of the lifting cylinder (13) is connected to the material platform (11).

10. The two-fluid cleaning device according to claim 1, characterized in that: The two-fluid cleaning device further comprises a filter screen (14), wherein the filter screen (14) is fixedly arranged in the cleaning space (10a) and is located on a side of the material platform (11) facing away from the bearing surface.

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