A blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment
The blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment solves the problem of increased far-field divergence angle of the light beam in traditional beam combining technology, achieves high-brightness and high-efficiency blue light laser output, and improves beam quality and system reliability.
Patent Information
- Application Number
- CN202411737085.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-09-05
- Estimated Expiration
- 2044-11-29
AI Technical Summary
In traditional dense spectral beam combining technology, external cavity reflectors cause adjacent light-emitting units to be injection-locked with each other, resulting in a sharp increase in the far-field divergence angle of the light beam and poor output beam quality.
The blue light semiconductor laser array dense spectral beam combining device adopts adaptive wavelength adjustment, including a first mirror group, a first transmission grating and a monitoring and adjustment system. Through the separate wavelength locking and spectral synthesis process, the beam quality is improved by using the resonant cavity design and cylindrical mirror group. The monitoring and adjustment system adjusts the angle of the adjustable plane mirror in real time to reflect the laser of the target wavelength.
The beam quality of blue laser has been significantly improved, the power and efficiency have been increased, the influence of dispersion devices on beam quality has been reduced, high-brightness output has been achieved, the device volume has been compressed, and system reliability has been improved.
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Figure CN119542922B_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of blue semiconductor lasers, and more specifically, relates to a blue semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment. Background Art
[0002] Blue semiconductor lasers are a new generation of visible light sources internationally, with significant application prospects. They are primarily used in laser processing (for example, copper and gold), laser pumping, underwater detection, and laser medical treatment. However, blue semiconductor lasers have low brightness and cannot meet the power and brightness requirements of semiconductor lasers in the materials processing field. Their poor beam quality also precludes their use in thick copper plate welding.
[0003] Kilowatt-class blue laser systems can be implemented using two technologies: high-power, low-brightness and high-power, high-brightness. High-power, low-brightness technology is relatively mature, has a low barrier to entry, and is easy to implement. However, its low power density prevents it from overcoming the limitations of copper plate welding. High-power, high-brightness blue lasers offer higher power density than high-power, low-brightness blue lasers, breaking through the limitations of thick copper plate welding. However, their optical design is complex and implementation is challenging.
[0004] Traditional spectral beam combining technology uses gratings / narrowband filters and external cavity mirrors. Through the dispersion effect of the gratings / narrowband filters, only beams that meet a specific incident angle-wavelength relationship are returned to the light-emitting unit. The output is then superimposed in the near-field and far-field, achieving wavelength locking and combined output. While traditional spectral beam combining technology has demonstrated significant advantages in improving the performance of high-power semiconductor lasers, it also comes with some significant drawbacks.
[0005] Traditional single-tube and bar-type spectral combining technologies fail to achieve high brightness and suffer from quality degradation. As the number of combining units increases, traditional single-tube spectral combining technology achieves high-brightness blue laser output, but the combined beam quality degrades significantly. Bar-type spectral combining technology, however, suffers from a smile effect, which degrades beam quality and impacts the combining effect. Furthermore, thermal crosstalk can be exacerbated by poor heat dissipation, further impacting spectral combining stability and output quality.
[0006] In summary, traditional dense spectral beam combining technology has problems such as poor spectral narrowing effect, severe deterioration of beam quality due to grating dispersion effect, and a sharp increase in the far-field divergence angle of the beam caused by mutual injection locking of adjacent light-emitting units due to external cavity reflectors, which leads to poor output beam quality. Summary of the Invention
[0007] In response to the defects of related technologies, the purpose of the present invention is to provide a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, which aims to solve the problem of traditional dense spectral beam combining technology that the external cavity reflector causes adjacent light-emitting units to inject lock with each other, resulting in a sharp increase in the far-field divergence angle of the light beam, thereby causing poor output beam quality.
[0008] To achieve the above objectives, the present invention provides a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, comprising a first mirror group, a first transmission grating and a monitoring and adjustment system; the first mirror group comprises: a first blue light array, a first beam splitter, a first polarizer, a first adjustable plane reflector, and a first plane reflector;
[0009] The first blue light array comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam;
[0010] The first beam splitter is used to split the collimated laser beam to obtain a main beam and a side beam;
[0011] The first polarizer is used to adjust the polarization state of the side beam to S polarization;
[0012] The first transmission grating is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector and propagates along the original optical path. After passing through the first beam splitter, the transmitted portion is reflected by the first plane reflector. When passing through the first beam splitter again, the transmitted portion enters the original optical path for re-modulation, and the reflected portion is spatially combined with the main beam to obtain a first combined beam as the target laser output;
[0013] The monitoring and adjustment system is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector accordingly to reflect the laser of the target wavelength.
[0014] Optionally, the device further comprises at least one second mirror group, a second transmission grating and a cylindrical mirror group; the second mirror group comprises: a second blue light array, a second beam splitter, a second polarizer, a second adjustable plane reflector, a second plane reflector, and a right-angle prism reflector;
[0015] The collimated laser beam emitted by the second blue light array is at a 90° angle to the collimated laser beam emitted by the first blue light array;
[0016] The collimated laser beam emitted by the second blue light array passes through the second beam splitter, the second polarizer, the first transmission grating, the second adjustable plane reflector, the second beam splitter, the second plane reflector and the second beam splitter in sequence. The reflected portion is spatially combined with the main beam emitted by the second blue light array to obtain a second combined beam; the transmitted portion enters the original optical path for re-modulation;
[0017] The second combined light beam is reflected by the right-angle prism reflector to generate a third combined light beam parallel to the first combined light beam;
[0018] The cylindrical lens group and the second transmission grating are used to combine the first combined light beam and the third combined light beam;
[0019] The monitoring and adjustment system is also used to adjust the angle of the second adjustable plane reflector.
[0020] Optionally, the device further comprises a spectroscope;
[0021] The spectroscope is used to split the target laser light, with one part of the light being output and the other part of the light entering the monitoring and adjustment system.
[0022] Optionally, the device further comprises a focusing lens;
[0023] The focusing mirror is used to converge part of the incident target laser light, increase its power and then output it.
[0024] Optionally, the mirror surfaces of the beam splitter, the first beam splitter and the second beam splitter are all covered with a multilayer film; the multilayer film is formed by alternatingly stacking a material with a first refractive index and a material with a second refractive index, wherein the first refractive index is higher than the second refractive index.
[0025] Optionally, the cylindrical mirror group includes a first cylindrical mirror, a second cylindrical mirror and a third cylindrical mirror arranged in sequence;
[0026] The first cylindrical mirror and the second cylindrical mirror form a Kepler telescope structure, which is used to compress the spacing of the first combined light beams, and the third cylindrical mirror is used to converge the compressed first combined light beams.
[0027] Optionally, the first blue light array and the second blue light array are both composed of a plurality of single blue light tubes.
[0028] Optionally, the number of the first blue light array and the number of the second blue light array are at least one;
[0029] When the number of the first blue light array exceeds one, the device further comprises a cylindrical lens group and a second transmission grating;
[0030] The cylindrical lens group and the second transmission grating are used to combine a plurality of parallel first combined light beams.
[0031] Compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:
[0032] 1. Embodiments of the present invention provide a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment. Through separate wavelength locking and spectral synthesis processes, the blue light array incorporates a built-in wavelength locking device that locks the wavelength of the emitted blue light. This separation of wavelength locking and spectral synthesis significantly reduces the impact of dispersive components on beam quality in traditional spectral synthesis. This fundamentally suppresses dispersion effects and eliminates mutual locking, resulting in improved output beam quality, reduced laser volume, and enhanced system reliability. The device also employs a resonant cavity design, consisting of an adjustable plane mirror, a transmission grating, a polarizer, and a plane mirror. Light emitted by the blue light array passes through a beam splitter, and the secondary beam is reflected by the polarizer, enters the transmission grating, and reaches the adjustable plane mirror. The secondary beam is then reflected by the adjustable plane mirror, passes through the transmission grating, polarizer, and beam splitter, and finally reflects again by the plane mirror before being combined with the primary beam. The target wavelength beam repeatedly oscillates within the resonant cavity, eliminating the problem of injection locking between adjacent light-emitting units caused by the external cavity mirror, which can lead to a sharp increase in the far-field divergence angle of the beam. This multiple oscillation of the beam within the resonant cavity significantly increases the power and efficiency of the blue laser. A monitoring and control system adjusts the angle of the adjustable plane mirror to select the target wavelength for reflection, achieving adaptive wavelength regulation.
[0033] 2. This embodiment of the present invention provides a dense spectral beam combining device for a blue semiconductor laser array with adaptive wavelength adjustment. A cylindrical mirror assembly and a second transmission grating perform spectral combining. The spacing of the beams emitted by the individual light-emitting elements is shortened by the first and second cylindrical mirrors in the cylindrical mirror assembly. The beams are then converged by a third cylindrical mirror onto the second transmission grating, achieving spectral combining. Furthermore, fiber optic output is used to enhance power density and brightness. BRIEF DESCRIPTION OF THE DRAWINGS
[0034] Figure 1 This is a schematic structural diagram of a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment provided by the present invention;
[0035] Figure 2 is a schematic diagram of the focusing system provided by the present invention;
[0036] Figure 3 is a schematic diagram of the resonant cavity provided by the present invention;
[0037] Figure 4 It is a schematic diagram of the output and monitoring and regulation system provided by the present invention;
[0038] Figure 5 This is a schematic diagram of the blue light array provided by the present invention.
[0039] In the above drawings, the reference numerals are the same, and the reference numerals are:
[0040] 1. First adjustable plane mirror, 2. First transmission grating, 3. First polarizer, 4. First blue light array, 5. First plane mirror, 6. First beam splitter, 7. Right-angle prism mirror, 8. First cylindrical mirror, 9. Second cylindrical mirror, 10. Third cylindrical mirror, 11. Second transmission grating, 12. Beam splitter, 13. Focusing mirror, 14. Optical fiber, 15. Monitoring and adjustment system, 16. Second plane mirror, 17. Second beam splitter, 18. Second blue light array, 19. Second polarizer, 20. Second adjustable plane mirror, 21. Blue light single tube, 22. Fourth cylindrical mirror, 23. Fifth cylindrical mirror, 24. Third plane mirror. DETAILED DESCRIPTION
[0041] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
[0042] The contents involved in the above embodiment are described below in conjunction with a preferred embodiment.
[0043] A blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment includes a first mirror group, a first transmission grating 2 and a monitoring and adjustment system 15; the first mirror group includes: a first blue light array 4, a first beam splitter 6, a first polarizer 3, a first adjustable plane mirror 1, and a first plane mirror 5;
[0044] The first blue light array 4 comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam;
[0045] The first beam splitter 6 is used to split the collimated laser beam to obtain a main beam and a side beam;
[0046] The first polarizer 3 is used to adjust the polarization state of the side beam to S polarization;
[0047] The first transmission grating 2 is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector 1 and propagates along the original optical path. After passing through the first beam splitter 6, the transmitted portion is reflected by the first plane reflector 5. When passing through the first beam splitter 6 again, the transmitted portion enters the original optical path for re-modulation, and the reflected portion is spatially combined with the main beam to obtain a first combined beam as the target laser output;
[0048] The monitoring and adjustment system 15 is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector 1 accordingly to reflect the laser light of the target wavelength.
[0049] like Figure 1 As shown, the adaptive wavelength-adjustable blue light semiconductor laser array dense spectral beam combining device provided in this embodiment is suitable for generating high-brightness blue light lasers. The blue light collimated laser beam generated by the first blue light array 4 is split by the first beam splitter 6 to obtain a main beam and a side beam. The reflectivity and transmittance of the first beam splitter 6 are 20:80, with 80% of the light directly transmitted as the main beam and 20% reflected as the side beam. The side beam enters the grating modulation system for precise adjustment. The first polarizer 3 filters out some of the interfering light emitted by the first blue light array 4 and adjusts the polarization state of the side beam to S polarization. The side beam enters the first transmission grating 2 and is incident on the first adjustable reflector 1 placed at a preset position under the action of diffraction. The angle of the first adjustable reflector 1 is perpendicular to the incident light beam. The light beam is totally reflected by the first adjustable reflector 1 and then propagates along the original optical path. The light beam is split again by the first beam splitter 6, and the resulting transmitted portion is incident on the first plane reflector 5, where it is vertically reflected back into the original optical path, greatly reducing energy loss and thus achieving efficient energy utilization; the reflected portion returns to the first blue light array 4 as loss; when the light beam reflected by the first plane reflector 5 passes through the first beam splitter 6 again, the generated transmitted portion enters the original optical path for re-modulation, and the reflected portion is spatially combined with the main beam to obtain the first combined beam as the target laser output. The angle of the first adjustable plane reflector 1 can be fine-tuned, and the monitoring and adjustment system 15 analyzes the wavelength and laser quality of the target laser in real time, and adjusts the angle of the first adjustable plane reflector 1 according to the target wavelength to control the phase change of the reflected light beam. Finally, the reflected light beam returns to the first beam splitter 6 to interfere with the main beam, generating the expected blue light of the corresponding frequency, thereby realizing the function of real-time adjustment of the target light beam.
[0050] Based on the above embodiment, the mirror group in the device may include multiple mirror groups. In a specific implementation, the device further includes at least one second mirror group, a second transmission grating 11 and a cylindrical mirror group; the second mirror group includes: a second blue light array 18, a second beam splitter 17, a second polarizer 19, a second adjustable plane mirror 20, a second plane mirror 16, and a right-angle prism mirror 7;
[0051] The collimated laser beam emitted by the second blue light array 18 is at a 90° angle to the collimated laser beam emitted by the first blue light array 4;
[0052] The collimated laser beam emitted by the second blue light array 18 passes through the second beam splitter 6, the second polarizer 3, the first transmission grating 2, the second adjustable plane reflector 20, the second beam splitter 17, the second plane reflector 16 and the second beam splitter 17 in sequence. The reflected portion is spatially combined with the main beam emitted by the second blue light array 18 to obtain a second combined beam; the transmitted portion enters the original optical path for re-modulation; the second combined beam is reflected by the right-angle prism reflector 7 to generate a third combined beam parallel to the first combined beam;
[0053] The cylindrical lens group and the second transmission grating 11 are used to combine the first combined light beam and the third combined light beam;
[0054] The monitoring and adjustment system 15 is further used to adjust the angle of the second adjustable plane reflector 20 .
[0055] refer to Figure 1 The second mirror group has basically the same function as the first mirror group. The second mirror group and the first mirror group share the first transmission grating 2, the second transmission grating 11, the cylindrical mirror group and the monitoring and adjustment system 15. The collimated light beam emitted by the first blue light array 4 in the first mirror group is horizontal. After precise adjustment by the modulation system composed of various optical components, the first combined light beam in the horizontal direction is obtained and output to the cylindrical mirror group.
[0056] In this example, if Figure 3 As shown, the collimated light beam emitted by the second blue light 18 in the second mirror group is vertical. After multiple reflections and transmissions, a second vertical combined light beam is obtained. This beam is then transmitted to the position of the right-angle prism reflector 7. After reflection by the right-angle prism reflector 7, a third horizontal combined light beam is generated. This beam is then incident on the cylindrical mirror group. The cylindrical mirror group and the second transmission grating densely combine the parallel first and third combined light beams to form a dense spectral combined beam, which outputs the target laser. The right-angle prism reflector 7, with its unique geometric structure, namely the specific angle formed between its internal interface and the incident light, ensures that total internal reflection occurs when the light beam strikes the surface. This mechanism not only cleverly changes the original direction of the light path, but also, through the specific optical design of the right-angle prism reflector 7, further encrypts the light, enhancing the concealment and security of the optical signal.
[0057] Two sets of mirrors are used. One is to increase the number of light-emitting units, thereby increasing the number of light beams participating in dense bundling and improving the blue light power; the other is to compress the volume of the system and realize the miniaturization of the blue light beam combining device.
[0058] Among them, the cylindrical mirror group includes a first cylindrical mirror 8, a second cylindrical mirror 9 and a third cylindrical mirror 10 arranged in sequence; the first cylindrical mirror 8 and the second cylindrical mirror 9 constitute a Kepler telescope structure, which is used to compress the distance between the first combined light and the third combined light, and the third cylindrical mirror 10 is used to converge the compressed first combined light and the third combined light.
[0059] like Figure 2 As shown, the cylindrical mirror assembly serves as a focusing system, leveraging the synergistic effect of the first and second cylindrical mirrors 8, 9 to achieve precise focusing and adjustment of light. These two cylindrical mirrors are positioned parallel to each other, with the right focal point of the first cylindrical mirror 8 precisely aligned with the left focal point of the second cylindrical mirror 9, forming a precise optical focal point. As light travels through this system, it first encounters the first cylindrical mirror 8, whose unique curved surface effectively converges the light and directs it toward the focal area of the second cylindrical mirror 9. Next, the light undergoes a more refined adjustment under the action of the second cylindrical mirror 9, further compressing it and transforming it into a thinner, highly parallel beam. This process significantly shortens the relative distance between the beams, improving their density and parallelism while also providing ideal conditions for subsequent tight convergence and beam focusing. The third cylindrical mirror 10 precisely converges the dense, parallel beams onto the same point on the grating. Through the diffraction effect of the transmission grating, all beams are emitted in the same direction, achieving beam combining of the dense, parallel beams. In particular, generating a target beam by superposition of light beams not only greatly reduces energy loss and improves energy utilization, but also reduces the burden on the heat dissipation system caused by heat generation due to energy loss.
[0060] During the adjustment process, the secondary beams are modulated by the first adjustable plane reflector 1 and the first polarizer 3. The modulated light is then re-reflected and effectively combined with the original transmitted light in space, significantly enhancing the intensity of the blue light. After passing through the first and second cylindrical mirrors 8 and 9, the beams converge into a narrower laser beam. These beams then pass through the third cylindrical mirror 10 and converge onto the second transmission grating 11. Further spectral synthesis is performed by the second transmission grating 11, resulting in dense spectral combining. This separates the wavelength locking and spectral combining processes, significantly reducing the impact of dispersion devices on beam quality and achieving a technological breakthrough in high-brightness output.
[0061] Furthermore, in another specific embodiment, the present invention can also include two second mirror groups; the two second mirror groups contain the same optical components; the second blue light arrays in the two second mirror groups are located on either side of the first blue light array, each emitting a vertically collimated light beam. Both second mirror groups are equipped with right-angle prism reflectors to reflect the light beams horizontally, and all horizontal light beams are simultaneously combined and focused on the cylindrical mirror group. This further increases the number of light-emitting units, the number of light beams participating in the dense beam combination, and the blue light power.
[0062] Optionally, the device further includes a spectroscope 12;
[0063] The spectroscope 12 is used to split the target laser light, with one part of the light being output and the other part of the light entering the monitoring and adjustment system 15 .
[0064] Optionally, the device further includes a focusing lens 13;
[0065] The focusing mirror 13 is used to focus a portion of the incident target laser light, increase its power and then output it.
[0066] like Figure 4 As shown, the output optical path of the blue light semiconductor laser array dense spectral beam combining device provided by this solution is composed of a spectrometer 12, a focusing mirror 13 and an optical fiber 14. When the light passes through the spectrometer 12, about 99.9% of the light will be transmitted through it, and after the focusing action of the focusing mirror 13, a blue light beam with higher brightness and greater energy density will be formed. This light beam is finally output through the optical fiber 14. At the same time, the remaining 0.1% of the light will enter the monitoring and adjustment system 15, which is responsible for monitoring the quality and wavelength of the target laser and feeding back the monitoring data to the computer for analysis. Based on the analysis results of the computer, the monitoring and adjustment system 15 adjusts the angle of the first adjustable plane reflector 1 or the second adjustable plane reflector 20 in real time to accurately control the wavelength of the blue light output by each light-emitting unit in the blue light array, ensuring that the quality of the output beam is maintained, thereby providing stable and high-quality blue light laser output.
[0067] Optionally, the mirror surfaces of the beam splitter 12, the first beam splitter 1 and the second beam splitter 20 are all covered with a multilayer film; the multilayer film is formed by alternatingly stacking materials with a first refractive index and materials with a second refractive index, wherein the first refractive index is higher than the second refractive index.
[0068] When light is incident vertically, the interference effect of the reflected light from the multilayer film will greatly increase the transmittance of the light after multiple reflections.
[0069] Optionally, the first blue light array 4 and the second blue light array 18 are both composed of a plurality of single blue light tubes.
[0070] like Figure 5 and Figure 1 As shown, the first blue light array 4 is composed of a plurality of blue light single tubes 21. These blue light single tubes form an array of blue light sources that is both efficient and stable. The array can emit multiple parallel laser beams, and the beams are evenly distributed. Figure 5As shown, the blue light array includes a collimator array, which consists of two parts: a fast-axis collimator array and a slow-axis collimator array. The former is composed of a fourth cylindrical mirror 22, and the latter is composed of a fifth cylindrical mirror 23. The laser beam is first preliminarily adjusted by the fast-axis collimator array, and then finely collimated by the slow-axis collimator array, thereby achieving spatial beam combining of the light beams. After this process, there will be a certain gap between the collimated light beams obtained, and the width of these gaps just matches the spot width after collimation of the blue light single tube 21. In addition, the device also includes a reflector array. This array consists of multiple plane reflectors 24. Each blue light single tube corresponds to a fourth cylindrical mirror 22, a fifth cylindrical mirror 23 and a plane reflector 24. This design not only improves the utilization rate of the light beam, but also makes the entire blue light array more flexible and efficient in application.
[0071] Furthermore, the number of the first blue light array 4 and the second blue light array 18 is at least one.
[0072] Furthermore, when the number of the first blue light arrays 4 exceeds one, the device further includes a cylindrical lens group and a second transmission grating 11; the cylindrical lens group and the second transmission grating 11 are used to combine a plurality of parallel first combined light beams.
[0073] When there are multiple first blue light arrays 4, multiple parallel first combined light beams will be generated in the horizontal direction. At this time, a cylindrical mirror group and a second transmission grating 11 need to be set. The first cylindrical mirror 8 and the second cylindrical mirror 9 compress the spacing between the multiple first combined light beams, and the third cylindrical mirror 10 accurately converges the dense parallel light beams to the same point on the grating. Through the diffraction effect of the transmission grating, all light beams are emitted in the same direction to achieve the function of combining the dense parallel light beams.
[0074] In a specific embodiment, if Figure 1 As shown, the first lens assembly includes four first blue light arrays 4, denoted by e, f, g, and h, respectively. The second lens assembly includes four second blue light arrays 18, denoted by a, b, c, and d, respectively. Different blue light arrays can output light beams of different wavelengths. When there are multiple blue light arrays, the lens assembly also includes multiple corresponding beam splitters, adjustable plane reflectors, and right-angle prism reflectors, forming an array with the same number of blue light arrays.
[0075] For example, Figure 1As shown, the four first beamsplitters in the first mirror group form a first beamsplitter array, and the four first adjustable plane mirrors form a first adjustable plane mirror group array. Furthermore, each first adjustable plane mirror group in the first adjustable plane mirror group array reflects a corresponding light beam output by a blue light array. Light beams of different wavelengths are combined and output by the adaptive wavelength-adjustable blue light semiconductor laser array dense spectral beam combining device provided by the present invention. Multiple blue light arrays can increase the number of light-emitting units, thereby increasing the power density of the final dense spectral beam within a certain range without significantly affecting the beam quality.
[0076] In this embodiment, through the separate wavelength locking and spectral synthesis processes during the adjustment process, the wavelength locking device built into the blue light array can lock the wavelength of the emitted blue light. The cylindrical mirror group and the second transmission grating perform spectral synthesis to achieve beam combining. The separation of the wavelength locking process and the spectral synthesis process significantly reduces the impact of the dispersion device on the beam quality, theoretically suppressing the dispersion effect and eliminating mutual locking. Furthermore, the resonant cavity design adopted in the device eliminates the problem of external cavity reflectors causing mutual injection locking between adjacent light-emitting units, resulting in a sharp increase in the far-field divergence angle of the beam, as well as the technical problem of poor output beam quality. This achieves the beneficial effects of improved output beam quality, reduced laser volume, and improved system reliability.
[0077] It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, characterized in that: It includes a first mirror group, a first transmission grating and a monitoring and adjustment system; the first mirror group includes: a first blue light array, a first beam splitter, a first polarizer, a first adjustable plane reflector, and a first plane reflector; The first blue light array comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam; The first beam splitter is used to split the collimated laser beam to obtain a main beam and a side beam; The first polarizer is used to adjust the polarization state of the side beam to S polarization; The first transmission grating is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector and propagates along the original optical path. After passing through the first beam splitter, the transmitted portion is reflected by the first plane reflector. When passing through the first beam splitter again, the transmitted portion enters the original optical path for re-modulation, and the reflected portion is spatially combined with the main beam to obtain a first combined beam as the target laser output; The monitoring and adjustment system is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector accordingly to reflect the laser of the target wavelength.
2. The device according to claim 1, wherein The device further comprises at least one second mirror group, a second transmission grating and a cylindrical mirror group; the second mirror group comprises: a second blue light array, a second beam splitter, a second polarizer, a second adjustable plane reflector, a second plane reflector, and a right-angle prism reflector; The collimated laser beam emitted by the second blue light array is at a 90° angle to the collimated laser beam emitted by the first blue light array; The collimated laser beam emitted by the second blue light array passes through the second beam splitter, the second polarizer, the first transmission grating, the second adjustable plane reflector, the second beam splitter, the second plane reflector and the second beam splitter in sequence. The reflected portion is spatially combined with the main beam emitted by the second blue light array to obtain a second combined beam; the transmitted portion enters the original optical path for re-modulation; The second combined light beam is reflected by the right-angle prism reflector to generate a third combined light beam parallel to the first combined light beam; The cylindrical lens group and the second transmission grating are used to combine the first combined light beam and the third combined light beam; The monitoring and adjustment system is also used to adjust the angle of the second adjustable plane reflector.
3. The device according to claim 2, wherein The device also includes a spectroscope; The spectroscope is used to split the target laser light, with one part of the light being output and the other part of the light entering the monitoring and adjustment system.
4. The device according to claim 3, wherein The device also includes a focusing lens; The focusing mirror is used to converge part of the incident target laser light, increase its power and then output it.
5. The device according to claim 3, wherein The mirror surfaces of the beam splitter, the first beam splitter and the second beam splitter are all covered with a multilayer film; the multilayer film is formed by alternately stacking a material with a first refractive index and a material with a second refractive index, wherein the first refractive index is higher than the second refractive index.
6. The device according to claim 2, wherein The cylindrical mirror group includes a first cylindrical mirror, a second cylindrical mirror and a third cylindrical mirror arranged in sequence; The first cylindrical mirror and the second cylindrical mirror form a Kepler telescope structure, which is used to compress the spacing of the first combined light beams, and the third cylindrical mirror is used to converge the compressed first combined light beams.
7. The device according to claim 1 or 2, characterized in that The first blue light array and the second blue light array are both composed of a plurality of blue light single tubes.
8. The device according to claim 1 or 2, characterized in that The number of the first blue light array and the second blue light array is at least one; When the number of the first blue light array exceeds one, the device further comprises a cylindrical lens group and a second transmission grating; The cylindrical lens group and the second transmission grating are used to combine a plurality of parallel first combined light beams.
Citation Information
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