Light source, photoelectric conversion module, laser radar and related equipment

Abstract

The embodiment of the invention discloses a light source, a photoelectric conversion module, a laser radar and related equipment, which can reduce the volume of the light source and improve the integration level of the light source under the condition that the transmission light path of an optical signal emitted by a laser is adjusted. The light source comprises a laser, a first super lens and a second super lens, and the first super lens is connected between the laser and the second super lens; the first super lens and the second super lens are sequentially located on a transmission optical path of an optical signal emitted from the laser; the first super lens and the second super lens respectively comprise a plurality of nano structures, the size of the nano structure included in the first super lens is different from the size of the nano structure included in the second super lens, and / or the arrangement form of the nano structure included in the first super lens is different from the arrangement form of the nano structure included in the second super lens, and / or the arrangement form of the nano structure included in the second super lens is different from the arrangement form of the nano structure included in the second super lens. And the first super lens and the second super lens are respectively used for adjusting a transmission optical path of an optical signal emitted by the laser.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of optical communication technology, and in particular to a light source, a photoelectric conversion module, a laser radar, and related equipment. Background Art

[0002] The laser light source can be used in laser radar (Lidar) or optical communication equipment. For example, the laser light source is used in Lidar. Figure 1 The following is a structural example diagram of an existing laser radar.

[0003] The existing laser radar includes a laser light source 101, a collimating lens 102, a microlens array homogenizer (MLAdiffuser) 103, and a rotating mirror 104. The detection light signal emitted by the laser radar is transmitted to the collimating lens 102, and the collimating lens 102 is used to collimate the detection light signal and transmit the collimated detection light signal to the microlens array homogenizer 103. The microlens array homogenizer 103 homogenizes the detection light signal and transmits the homogenized detection light signal to the rotating mirror 104. The rotating mirror 104 is used to adjust the direction of the detection light signal so that the detection light signal can be scanned according to a preset direction, and the detection of an object located at a specific direction is realized based on the detection light signal.

[0004] However, the distance between the collimating lens 102 and the light emitting surface of the laser light source 101 is far, generally more than 10 millimeters (mm), and the light field of the detection light signal emitted by the laser light source 101 is divergent. In order to ensure the successful collimation of the collimating lens 102, the collimating lens 102 needs to be larger. The microlens array homogenizer 103 is located behind the collimating lens 102, and the rotating mirror 104 is located behind the microlens array homogenizer 103. Then, the volume of the collimating lens 102, the volume of the microlens array homogenizer 103, and the volume of the rotating mirror 104 increase. It can be seen that the overall volume of the existing laser radar is large and the integration is low. Summary of the invention

[0005] The embodiments of the present application provide a light source, a photoelectric conversion module, a laser radar and related equipment, which can adjust the transmission optical path of the optical signal emitted by the laser and reduce the volume of the light source and improve the integration of the light source.

[0006] In the first aspect, the present application provides a light source, including a laser, a first superlens and a second superlens, wherein the first superlens is connected between the laser and the second superlens; the first superlens and the second superlens are sequentially located on the transmission optical path of the optical signal emitted from the laser; the first superlens and the second superlens respectively include a plurality of nanostructures, the structure of the first superlens is different from the structure of the second superlens, wherein the structure of the first superlens is different from the structure of the second superlens, meaning that the size of the nanostructure included in the first superlens is different from the size of the nanostructure included in the second superlens, and / or the arrangement form of the nanostructure included in the first superlens is different from the arrangement form of the nanostructure included in the second superlens, and the first superlens and the second superlens are respectively used to adjust the transmission optical path of the optical signal emitted by the laser. For example, the first superlens and the second superlens are respectively used to achieve any two goals of collimation, homogenization or adjustment of the transmission direction.

[0007] According to the present aspect, when the structure of the first superlens is different from that of the second superlens, the first superlens and the second superlens can adjust the transmission optical path of the optical signal emitted by the laser to achieve different goals. The first superlens and the second superlens have the characteristics of thin thickness and low weight. Then, while the first superlens and the second superlens achieve the adjustment of the transmission optical path of the optical signal, they effectively reduce the volume of the light source and improve the integration of the light source. Based on the adjustment of the transmission optical path of the optical signal emitted by the laser by the nanostructure included in the first superlens and the nanostructure included in the second superlens, refined control of the optical field of the optical signal emitted by the laser is achieved.

[0008] Based on the first aspect, in an optional implementation, the light source further includes a substrate, a surface of the substrate facing the laser includes the first superlens, and a surface of the substrate facing away from the laser includes the second superlens.

[0009] By adopting this implementation mode, the two surfaces of the substrate included in the light source are respectively used to set the first super lens and the second super lens, thereby improving the integration of the light source.

[0010] Based on the first aspect, in an optional implementation, the light source also includes a first substrate and a second substrate, the first substrate is connected between the laser and the second substrate, the surface of the first substrate includes the first superlens, and the surface of the second substrate includes the second superlens.

[0011] By adopting this implementation method, based on the adjustment of the first superlens and the second superlens, fine control of the optical signal light field emitted by the laser is achieved.

[0012] Based on the first aspect, in an optional implementation, the arrangement form of the nanostructures included in the first superlens refers to the density of the nanostructures included in the first superlens, and / or the distance between two adjacent nanostructures included in the first superlens; the arrangement form of the nanostructures included in the second superlens refers to the density of the nanostructures included in the second superlens, and / or the distance between two adjacent nanostructures included in the second superlens.

[0013] As shown in the present implementation, when the arrangement form of the nanostructures included in the first superlens is different from the arrangement form of the nanostructures included in the second superlens, the first superlens and the second superlens achieve adjustment of the transmission optical path of the optical signal emitted by the laser for different targets.

[0014] Based on the first aspect, in an optional implementation, the first superlens includes a first region and a second region, the first region includes a plurality of first nanostructures, the second region includes a plurality of second nanostructures, the second region surrounds the first region, the first superlens is used to collimate the light signal emitted by the laser to emit a collimated light signal, and the second superlens is used to adjust the transmission direction of the collimated light signal or to even the collimated light signal.

[0015] According to the implementation, the refractive index distribution of the first nanostructures and the second nanostructures included in the first superlens is equivalent to a refractive index that can collimate the optical signal emitted by the laser alone based on the equivalent refractive index principle. The first superlens can collimate the optical signal emitted by the laser while reducing the distortion of the optical signal and improving the integration of the light source.

[0016] Based on the first aspect, in an optional implementation, the first superlens includes a first region and a second region, the first region includes a plurality of first nanostructures, the second region includes a plurality of second nanostructures, the first region and the second region are located on both sides of the first superlens, the first superlens is used to adjust the transmission direction of the optical signal emitted by the laser to emit an adjusted optical signal, the adjusted optical signal is deflected in a direction close to the first region, and the second superlens is used to collimate the adjusted optical signal or to even the adjusted optical signal.

[0017] According to the implementation, the refractive index distribution of the first nanostructures and the second nanostructures included in the first superlens is equivalent to a refractive index that can adjust the transmission direction of the optical signal emitted by the laser independently based on the equivalent refractive index principle. The first superlens can adjust the transmission direction of the optical signal emitted by the laser while reducing the distortion of the optical signal and improving the integration of the light source.

[0018] Based on the first aspect, in an optional implementation, a size of each of the first nanostructures included in the first region is equal to a size of each of the second nanostructures included in the second region, and a density of the first nanostructures included in the first region is greater than a density of the second nanostructures included in the second region.

[0019] As shown in this implementation, based on the size and density of the first nanostructure and the second nanostructure, the first superlens adjusts the transmission optical path of the optical signal emitted by the laser.

[0020] Based on the first aspect, in an optional implementation, the density of the first nanostructures included in the first region is equal to the density of the second nanostructures included in the second region, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure.

[0021] As shown in this implementation, based on the size and density of the first nanostructure and the second nanostructure, the first superlens adjusts the transmission optical path of the optical signal emitted by the laser.

[0022] Based on the first aspect, in an optional implementation, the density of the first nanostructures included in the first region is greater than the density of the second nanostructures included in the second region, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure.

[0023] As shown in this implementation, based on the size and density of the first nanostructure and the second nanostructure, the first superlens adjusts the transmission optical path of the optical signal emitted by the laser.

[0024] Based on the first aspect, in an optional implementation, the first superlens includes a plurality of nanostructures, and the arrangement form of the plurality of nanostructures and / or the diameter of the cross-section of the nanostructure corresponds to the wavelength of the light signal emitted by the laser, so that the light signal emitted by the laser is diffracted by the nanostructure to emit a homogenized light signal.

[0025] According to the implementation, the refractive index distribution of the multiple nanostructures included in the first super lens is equivalent to a refractive index that can homogenize the light signal emitted by the laser alone based on the equivalent refractive index principle. The first super lens can homogenize the light signal emitted by the laser while reducing the distortion of the light signal and improving the integration of the light source.

[0026] Based on the first aspect, in an optional implementation, the laser light-emitting hole, the center of the first super lens, and the center of the second super lens are aligned in sequence.

[0027] By adopting the implementation method shown in this embodiment, it can be ensured that the first superlens and the second superlens are both located on the transmission optical path of the optical signal emitted by the laser, thereby ensuring that the first superlens and the second superlens successfully adjust the transmission optical path of the optical signal emitted by the laser.

[0028] Based on the first aspect, in an optional implementation, the light source also includes a third superlens, the second superlens is connected between the third superlens and the first superlens, and the first superlens, the second superlens and the third superlens are sequentially located on the transmission optical path of the optical signal emitted from the laser; the third superlens includes a plurality of nanostructures, and any two sizes of the nanostructures included in the first superlens, the nanostructures included in the second superlens, and the nanostructures included in the third superlens are not equal to each other, and / or any two arrangements of the nanostructures included in the first superlens, the nanostructures included in the second superlens, and the nanostructures included in the third superlens are different from each other.

[0029] As shown in this implementation, the first superlens, the second superlens, and the third superlens with different structures can adjust the transmission optical path of the optical signal emitted by the laser for different purposes, so as to achieve the light homogenization, collimation, or transmission direction adjustment of the optical signal. While achieving the adjustment of the optical signal transmission optical path, the volume of the light source is effectively reduced and the integration of the light source is improved.

[0030] Based on the first aspect, in an optional implementation, the light-emitting surface of the laser includes a bonding layer, the bonding layer is used to connect the light-emitting surface of the laser and the first superlens, and the position of the bonding layer and the position of the laser light-emitting hole are isolated from each other.

[0031] By adopting the implementation method shown in this embodiment, the distance between the laser and the first super lens can be reduced, thereby improving the integration of the light source.

[0032] Based on the first aspect, in an optional implementation, the first superlens is connected to the light-emitting surface of the laser by nanoimprinting, glass molding or photolithography.

[0033] By adopting the implementation method shown in this embodiment, the distance between the laser and the first super lens can be reduced, thereby improving the integration of the light source.

[0034] In the second aspect, the embodiment of the present application provides a photoelectric conversion module, including a detector, a receiving port, a transmitting port, and a light source as described in any one of claims 1 to 14, wherein the light source is connected to the transmitting port, and the detector is connected to the receiving port; the light source is used to send a first optical signal to the transmitting port, and the transmitting port is used to emit the first optical signal; the receiving port is used to receive a second optical signal, and the detector is used to perform photoelectric conversion on the second optical signal to obtain an electrical signal. For the description of the beneficial effects of this aspect, please refer to the first aspect, and no further description is given.

[0035] In the third aspect, an embodiment of the present application provides an optical communication device, comprising an outer shell, a processor and a photoelectric conversion module as described in claim 15, wherein the outer shell is used to fix the processor and the photoelectric conversion module, and the processor is connected to the photoelectric conversion module; the processor is used to send a service electrical signal to the photoelectric conversion module, and the light source is used to obtain the first optical signal based on the service electrical signal; and the detector is used to send the electrical signal to the processor.

[0036] In a fourth aspect, an embodiment of the present application provides a laser radar, comprising a detector array, a processor, and a light source as described in any one of the first aspects above, wherein the processor is connected to the detector array and the light source, respectively; the light source is used to emit a detection light signal; the detector array is used to receive an echo light signal and convert the echo light signal into a detection electrical signal, wherein the echo light signal is a light signal reflected by the detection object based on the detection light signal; and the processor is used to obtain relevant information of the detection object based on the detection electrical signal.

[0037] In a fifth aspect, an embodiment of the present application provides a projection system, comprising an image modulation module, a lens, and a light source as described in any one of the first aspects above; the image modulation module is used to receive a projection beam from the light source, and to modulate the projection beam to obtain a modulated beam, and to transmit the modulated beam to the lens; the lens is used to image the modulated beam.

[0038] In the sixth aspect, an embodiment of the present application provides a head-up display system, comprising a light deflection module and a projection system as described in any one of the fifth aspects above; the projection system is used to transmit the modulated light beam to the light deflection module; the light deflection module is used to transmit the amplified modulated light beam to the windshield, and the modulated light beam reflected by the windshield forms a virtual image.

[0039] In the seventh aspect, an embodiment of the present application provides a vehicle, comprising a vehicle body, a windshield, a processor and a head-up display system as described in any one of the above-mentioned sixth aspects; the vehicle body is used to fix the windshield, the processor and the head-up display system; the processor is used to transmit vehicle driving related information to the image modulation module; the image modulation module is used to modulate the vehicle driving related information on the projection light beam to obtain the modulated light beam.

[0040] In an eighth aspect, an embodiment of the present application provides an optical communication system, which includes multiple optical communication devices, among which two optical communication devices are connected via an optical cable. For the description of the optical communication devices, please refer to the third aspect above, and the details will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 This is a structural example diagram of an existing laser radar;

[0042] Figure 2 This is a side structural example diagram of the first embodiment of the light source provided in this application;

[0043] Figure 3a This is an example diagram of the top view structure of the laser array provided in this application;

[0044] Figure 3b for Figure 2 The specific structural example diagram of the light source shown;

[0045] Figure 4 This is an example diagram of a first bottom-view structure of the first metalens provided in the present application;

[0046] Figure 5 A first side view structure example diagram of the first laser, the first super lens and the second super lens provided in the present application;

[0047] Figure 6 This is an example diagram of a bottom-up structure of the second metalens provided in the present application;

[0048] Figure 7 A second side view structure example diagram of the first laser, the first superlens, and the second superlens provided in the present application;

[0049] Figure 8 This is a side structural example diagram of the second embodiment of the light source provided in this application;

[0050] Fig. 9 This is a side structural example diagram of a third embodiment of the light source provided in this application;

[0051] Fig.10An example diagram of the structure of an embodiment of the photoelectric conversion module provided in this application;

[0052] Fig.11 An example diagram of the structure of an embodiment of the optical communication system provided in the present application;

[0053] Fig.12 An example diagram of the structure of an embodiment of the laser radar provided in this application;

[0054] Fig.13 An example diagram of the structure of an embodiment of the projection system provided in this application;

[0055] Fig.14 An example diagram of the structure of an embodiment of the head-up display system provided in this application;

[0056] Fig.15 This is an example diagram of the structure of an embodiment of the vehicle provided in this application. DETAILED DESCRIPTION

[0057] The embodiment of the present application provides a light source, which can be applied to laser radar, optical communication equipment, car lights, projection equipment, head up display (HUD), augmented reality head up display system (AR-HUD), AR glasses, light-emitting diodes (LED), virtual reality (VR) glasses, hologram equipment or light field cameras and the like. The light source can adjust the transmission optical path of the emitted light signal to achieve the light uniforming effect, collimation effect or transmission direction adjustment effect of the light signal. While achieving the adjustment of the transmission optical path of the light signal, the volume of the light source is effectively reduced and the integration of the light source is improved.

[0058] Figure 2The first embodiment of the light source provided in the present application is a side structure example diagram. The light source shown in this embodiment includes a substrate 201, a laser array 202, a first super lens array 203 and a second super lens array 206. The laser array 202 shown in this embodiment includes a plurality of lasers, and this embodiment does not limit the arrangement of the plurality of lasers included in the laser array 202. This embodiment takes the example that the type of each laser included in the laser array 202 is a vertical cavity surface emitting laser (VCSEL). It should be clear that this embodiment does not limit the type of each laser. For example, in other examples, the type of the laser may also be an edge emitting laser, such as a distributed feedback laser (DFB). The substrate 201 may be a printed circuit board (PCB) or a switch substrate, etc. The substrate 201 is used to package the laser array 202. The substrate 201 includes one or more layers of plates, and each plate has a single-sided or double-sided layout of conductive traces. The present embodiment does not limit the type of plate. For example, the plate may be a paper-based, glass fiber cloth-based, composite-based, ceramic-based, metal core-based, etc. Based on the conductive traces of the substrate 201, the purpose of driving each laser to emit light is achieved. For example, the laser array 202 can be packaged on the substrate 201 by die bonding (Die Bond), and the laser array 202 and the traces of the substrate 201 are connected by wire bonding (Wire Bonding) using a metal wire 204 to achieve the substrate 201 to power the laser array 202. It should be clear that the present embodiment does not limit the way in which the traces of the laser array 202 and the substrate 201 are electrically connected. For example, the laser array 202 can be welded to the substrate 201 by solder balls, etc., to achieve electrical connection.

[0059] The laser array shown in this embodiment has a light emitting surface 211, and the optical signal emitted by the laser array 202 is emitted through the light emitting surface 211. It can be understood that in the case where each laser shown in this embodiment is a VCSEL, then the light emitting surface 211 of the laser array can be parallel to the surface of the substrate 201. It should be clear that this embodiment takes the light emitting surface 211 of the laser array being parallel to the surface of the substrate 201 as an example. In other examples, there may be a certain angle between the light emitting surface 211 of the laser array and the surface of the substrate 201, and this embodiment does not limit the size of the angle. Figure 3a This is a top view of the structure of the laser array provided in this application. The laser array 202 packaged on the surface of the substrate 201 includes a plurality of lasers. Figure 3aThe example of six lasers packaged on the surface of the substrate 201 is shown, but is not limited thereto. Taking the first laser 221 packaged on the surface of the substrate 201 as an example, the first laser 221 has a light-emitting hole 311, and the optical signal emitted by the first laser 221 is emitted from the light-emitting hole 311, and the optical signal emitted from the light-emitting hole 311 is transmitted in a direction perpendicular to the surface of the substrate 201. Similarly, the second laser 231 is packaged on the surface of the substrate 201, and the second laser 231 has a light-emitting hole 312, and the optical signal emitted by the second laser 231 is emitted from the light-emitting hole 312, and the optical signal emitted from the light-emitting hole 312 is transmitted in a direction perpendicular to the surface of the substrate 201. Figure 2 as well as Figure 3a As shown, the light emitting surface 211 of the laser array includes light emitting holes of each laser. This embodiment does not limit the shape of the cross section of the light emitting hole of each laser, for example, the cross section of the light emitting hole can be rectangular, circular or any other shape.

[0060] The light-emitting surface 211 of the laser array shown in this embodiment is connected to the substrate 220. For example, the light-emitting surface 211 of the laser array is glued to form an adhesive layer 205, and the adhesive layer 205 is used to connect the light-emitting surface 211 of the laser array 202 and the substrate 220. In order to prevent the adhesive layer 205 from blocking the light signals emitted by each laser, the position of the adhesive layer 205 and the position of the light-emitting holes of each laser are isolated from each other. For example, the adhesive layer 205 has an adhesive layer positive projection on the projection surface, and the light-emitting hole of each laser has a light-emitting hole positive projection on the projection surface. The positions of the adhesive layer positive projection and the light-emitting hole positive projection on the projection surface are separated from each other. Among them, the adhesive layer positive projection refers to the positive projection formed on the projection surface by irradiating the adhesive layer 205 with multiple mutually parallel projection lines. The adhesive layer 205 is parallel to the projection surface, and the multiple projection lines are perpendicular to the projection surface and the light-emitting holes of each laser. For the description of the positive projection of the light-emitting hole, please refer to the description of the adhesive layer positive projection, which will not be repeated in detail. The present embodiment does not limit the type of glue used to form the bonding layer 205, for example, UV glue or thermosetting glue. The coefficient of thermal expansion (CTE) of the bonding layer 205 shown in the present embodiment matches the laser array 202 and the substrate 220, respectively, to ensure that the laser array 202 and the substrate 220 connected by the bonding layer 205 can still maintain structural stability when the ambient temperature changes, thereby improving the stability of the light source structure. The surface of the substrate 220 facing the laser array includes a first super lens array 203, and the surface of the substrate 220 facing away from the laser array includes a second super lens array 206. It can be understood that the first super lens array 203 and the second super lens array 206 shown in the present embodiment are located on two surfaces of the substrate 220. Combined with Figure 2 as well as Figure 3bAs shown, Figure 3b for Figure 2 The specific structure example diagram of the light source shown. The first super lens array 203 includes a plurality of nanostructures, and the plurality of nanostructures included in the first super lens array 203 are located on the surface of the substrate 220 facing the laser array. The second super lens array 206 includes a plurality of nanostructures, and the plurality of nanostructures included in the second super lens array 206 are located on the surface of the substrate 220 away from the laser array. It should be clear that the first super lens array 203 shown in this embodiment can also be connected to the light-emitting surface of the laser array 202 by nanoimprinting, glass molding, or photolithography. For another example, the light-emitting surface of the laser array 202 is fixed with a mounting seat, and the mounting seat is used to fix the substrate 220. For the description of the second super lens array 203 shown in this embodiment connected to the first super lens array 203, please refer to the description of the first super lens array 203 connected to the substrate 220, and no further details will be given.

[0061] The first super lens array 202 and the second super lens array 203 shown in this embodiment are used together to adjust the transmission optical path of the optical signal emitted by the laser array 201, which is explained below in conjunction with specific application scenarios.

[0062] Application scenario 1. As shown in this application scenario, the first super lens array 202 is used to collimate the optical signal emitted by the laser array, and the second super lens array 206 is used to adjust the transmission direction of the optical signal emitted by the laser array.

[0063] First, the process of collimating the optical signals emitted by each laser by the first superlens array 203 is described:

[0064] Take the first laser 221 included in the laser array 202 and the first super lens 222 included in the first super lens array 203 as an example, wherein the laser array 202 includes multiple lasers, and the first laser 221 is one of the multiple lasers. The first super lens array 203 includes multiple super lenses, and the first super lens 222 is one of the multiple super lenses, and the first laser 221 and the first super lens 222 are opposite in the direction perpendicular to the light-emitting surface of the laser array 202. It can be understood that the first super lens 222 is located on the transmission optical path of the optical signal emitted from the light-emitting hole of the first laser 221. Among them, the first super lens 222 is to adjust the transmission optical path of the optical signal emitted from the light-emitting hole of the first laser 221, and the center of the first super lens 222 is aligned with the center of the light-emitting hole of the first laser 221 in the direction perpendicular to the light-emitting surface of the laser array 202. Moreover, the first super lens 222 has a first positive projection on the projection plane, and the light-emitting hole of the first laser 221 has a second positive projection on the projection plane. The second orthographic projection is located within the coverage of the first orthographic projection. Among them, the first orthographic projection refers to the orthographic projection formed on the projection plane by irradiating the first metalens 222 with multiple mutually parallel projection lines. The first metalens 222 is parallel to the projection plane, and the multiple projection lines are perpendicular to the projection plane and the first metalens 222. For the description of the second orthographic projection, please refer to the description of the first orthographic projection, and no further details are given. In the case where the second orthographic projection is located within the coverage of the first orthographic projection, it is effectively ensured that the first metalens 222 is located on the transmission optical path of the optical signal emitted from the light-emitting hole of the first laser 221. The shape of the first metalens shown in this embodiment may be the same as the shape of the light-emitting hole of the first laser. For example, the shape of the first metalens and the shape of the light-emitting hole of the first laser are both circular. For example, the shape of the first metalens and the shape of the light-emitting hole of the first laser are both rectangular. In this embodiment, the shape of the first metalens and the shape of the light-emitting hole of the first laser are both circular as an example. In this embodiment, the distance between the first superlens 222 and the first laser 221 ensures that the optical signal emitted by the first laser 221 only covers one superlens included in the first superlens array 203, that is, the optical signal emitted by the first laser 221 only covers the first superlens 222.

[0065] Figure 4 This is an example diagram of the first bottom-view structure of the first metalens provided in the present application. Figure 5The first side view structure example diagram of the first laser, the first superlens and the second superlens provided in the present application. The first superlens 222 shown in this embodiment includes a first area 401 and a second area 402. In order to achieve the collimation of the optical signal emitted by the first laser 221, the second area 402 shown in this embodiment surrounds the first area 401. The first area 401 includes a plurality of first nanostructures, and the second area 402 includes a plurality of second nanostructures. Specifically, the surface of the substrate 220 facing the light-emitting hole of the first laser 221 extends a plurality of first nanostructures and a plurality of second nanostructures. The position where the first superlens 222 extends the nanostructure also includes a covering layer 403, which includes a plurality of first nanostructures and a plurality of second nanostructures to ensure that the first superlens 222 is a planar lens structure as a whole to ensure the stability of the structure of the first superlens 222. The first super lens 222 is a man-made composite material with a nanostructure. The first super lens 222 can be made very thin. Compared with a conventional lens (such as a non-planar lens such as a concave lens and a convex lens), the weight and thickness of the first super lens 222 are greatly reduced, and the first super lens 222 adjusts the transmission optical path of the optical signal based on the included nanostructure. The height of the nanostructure is usually at a sub-wavelength level, so it is possible to collimate the optical signal while reducing the distortion of the optical signal. Taking the first nanostructure as an example, the first nanostructure can be a nanofin or a nanopillar. In this embodiment, the first nanostructure is a nanopillar as an example. The nanopillar can be an elliptical column, a triangular prism, a square column, etc., which is not specifically limited in this embodiment. For the description of the second nanostructure, please refer to the description of the first nanostructure, which will not be described in detail. The following describes an optional structural example of the first metalens for achieving collimation: In the following example, the diameter of the cross section of the light-emitting hole of the first laser 221 is between about 20 and 50 microns, and the diameter of the cross section of each nanostructure is between about tens and hundreds of nanometers. The refractive index distribution of the multiple first nanostructures and the second nanostructures included in the first metalens is equivalent to a refractive index that can collimate the light signal emitted by the first laser 221 based on the principle of equivalent refractive index. It can be understood that the first metalens can narrow the divergence angle of the light signal emitted by the first laser 221 based on the multiple first nanostructures and the second nanostructures.

[0066] Example 1, in this example, in order for the first superlens to collimate the optical signal from the first laser 221, the first superlens needs to meet two conditions. Condition 1, the size of each first nanostructure included in the first region 401 is equal to the size of each second nanostructure included in the second region 402. Specifically, the height of the first nanostructure is equal to the height of the second nanostructure, and the diameter of the cross section of each first nanostructure is equal to the diameter of the cross section of the second nanostructure. Among them, the height of the first nanostructure refers to the height of the first nanostructure along the direction perpendicular to the first superlens substrate. The cross section of the first nanostructure is perpendicular to the axial direction of the first nanostructure. For the description of the height and cross section of the second nanostructure, please refer to the description of the height and cross section of the first nanostructure, which will not be repeated in detail. Condition 2, the density of the first nanostructure included in the first region 401 is greater than the density of the second nanostructure included in the second region 402. It can be understood that the density of the nanostructures included in the first superlens gradually decreases in the direction away from the center point of the first superlens, starting from the center point of the first superlens. It can be understood that the equivalent refractive index of the first region 401 shown in this example is higher than the equivalent refractive index of the second region 402, and the first superlens 222 can collimate the optical signal to emit the collimated optical signal.

[0067] Example 2. In this example, in order for the first superlens to collimate the optical signal from the first laser 221, the first superlens needs to meet two conditions. Condition 1: The density of the first nanostructure included in the first region 401 is equal to the density of the second nanostructure included in the second region 402. Condition 2: The height of the first nanostructure is equal to the height of the second nanostructure, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure. For a description of the diameter, height, and density of the cross sections of the first nanostructure and the second nanostructure, please refer to Example 1, which will not be described in detail.

[0068] Example 3, in this example, in order for the first superlens to collimate the optical signal from the first laser 221, the first superlens needs to meet two conditions. Condition 1, the density of the first nanostructure included in the first region 401 is greater than the density of the second nanostructure included in the second region 402. Condition 2, the height of the first nanostructure is equal to the height of the second nanostructure, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure. For the description of the diameter, height and density of the cross section of the first nanostructure and the second nanostructure, please refer to Example 1, and no further description will be given.

[0069] When the first super lens array is used to collimate the optical signal from the laser array, the second super lens array can adjust the transmission direction of the optical signal from the first super lens array. Figure 2 , Figure 5 as well as Figure 6 As shown, Figure 6 This is an example diagram of a top-view structure of the second superlens provided in the present application. Taking the second superlens 223 included in the second superlens array 206 as an example, the second superlens 223 is one of the superlenses included in the second superlens array 206, and along the direction perpendicular to the light-emitting surface of the laser array 202, the first laser 221, the first superlens 222 and the second superlens 223 are relatively positioned. It can be understood that the first superlens 222 is located on the transmission optical path of the optical signal emitted from the light-emitting hole of the first laser 221. Based on the above examples 1 to 3, the first superlens 222 collimates the optical signal to obtain a collimated optical signal, and the second superlens 223 is located on the transmission optical path of the collimated optical signal emitted from the first superlens 222, and the second superlens 223 is used to adjust the transmission direction of the collimated optical signal to emit the adjusted optical signal. Among them, the second super lens 223 is to adjust the transmission direction of the collimated light signal emitted by the first super lens 222, so the center of the second super lens 223, the center of the first super lens 222 and the center of the light-emitting hole of the first laser 221 are aligned in a direction perpendicular to the light-emitting surface of the laser array 202. In addition, the second super lens 223 has a third orthographic projection, the first super lens 222 has a first orthographic projection, and the light-emitting hole of the first laser 221 has a second orthographic projection. For the description of the first orthographic projection and the second orthographic projection, please refer to the above, and no further details are given. The first orthographic projection and the second orthographic projection shown in this embodiment are both located within the coverage range of the third orthographic projection. When the first orthographic projection and the second orthographic projection are both located within the coverage range of the third orthographic projection, it is effectively ensured that the second super lens 223 is located on the transmission optical path of the collimated light signal emitted from the first super lens 222. The shape of the second super lens 223 shown in this embodiment can be the same as the shape of the first super lens, for example, the shape of the first super lens and the shape of the second super lens are both circular, which is not limited in this embodiment.

[0070] The second superlens 223 shown in this embodiment includes a third region 601 and a fourth region 602. In order to adjust the transmission direction of the collimated optical signal emitted by the first superlens 222, the third region 601 and the fourth region 602 are located on the surface of the substrate 220 away from the first laser 221. The third region 601 includes a plurality of third nanostructures, and the fourth region 602 includes a plurality of fourth nanostructures. For the description of the nanostructures included in the second superlens 223 shown in this embodiment, please refer to the description of the nanostructures included in the first superlens 222 shown above, and no further details are given. The second superlens 223 distributes the refractive index of the plurality of third nanostructures and the fourth nanostructure, based on the principle of equivalent refractive index, and is equivalent to a refractive index that can adjust the transmission direction of the collimated optical signal emitted by the first superlens 222 alone. It can be understood that the second superlens can adjust the transmission direction of the collimated optical signal emitted by the first superlens 222 alone based on the plurality of third nanostructures and the fourth nanostructure. The optional structure of the second superlens 223 for adjusting the transmission direction is described below:

[0071] Example 1, this example see Figure 5 as well as Figure 6 As shown, in order for the second superlens 223 to adjust the transmission direction of the collimated optical signal from the first superlens 222, the second superlens needs to meet two conditions. Condition 1, the size of each third nanostructure included in the third region 601 is equal to the size of each fourth nanostructure included in the fourth region 602. Specifically, the height of the third nanostructure is equal to the height of the fourth nanostructure, and the diameter of the cross section of each third nanostructure is equal to the diameter of the cross section of the fourth nanostructure. Among them, the height of the third nanostructure refers to the height of the third nanostructure along the direction perpendicular to the substrate of the second superlens 223. The cross section of the third nanostructure is perpendicular to the axial direction of the third nanostructure. For the description of the height and cross section of the fourth nanostructure, please refer to the description of the height and cross section of the third nanostructure, which will not be repeated in detail. Condition 2, the density of the third nanostructure included in the third region 601 is greater than the density of the fourth nanostructure included in the fourth region 602. It can be understood that the equivalent refractive index of the third region 601 shown in this example is higher than the equivalent refractive index of the fourth region 602, and the adjusted optical signal emitted from the second super lens 223 is deflected in a direction close to the third region 601. Specifically, when the third nanostructure and the fourth nanostructure have the same size and the density of the third nanostructure included in the third region 601 is greater than the density of the fourth nanostructure included in the fourth region 602, the adjusted optical signal emitted from the second super lens 223 is transmitted in a direction close to the third region 601. Figure 5As shown, if the third region 601 is located on the left side and the fourth region 602 is located on the right side in the second super lens 223, the adjusted optical signal 512 emitted from the second super lens 223 is deflected in the counterclockwise direction relative to the collimated optical signal 511 (i.e., the adjusted optical signal 512 emitted from the second super lens 223 is deflected in the direction close to the third region 601 with a higher refractive index). Figure 7 As shown, Figure 7 This is a second side view structural example diagram of the first laser, the first super lens, and the second super lens provided in the present application. If in the second super lens 223, the third region 702 is located on the right side and the fourth region 701 is located on the left side, then the adjusted optical signal 712 emitted by the second super lens 223 is deflected in the clockwise direction relative to the collimated optical signal 711 (i.e., the adjusted optical signal 712 emitted from the second super lens 223 is deflected in the direction close to the third region 702 with a higher refractive index).

[0072] Example 2. In this example, in order for the second superlens to adjust the transmission direction of the collimated optical signal from the first superlens, the first superlens needs to meet two conditions. Condition 1: The density of the third nanostructure included in the third region 601 is equal to the density of the fourth nanostructure included in the fourth region 602. Condition 2: The height of the third nanostructure is equal to the height of the fourth nanostructure, and the diameter of the cross section of the third nanostructure is greater than the diameter of the cross section of the fourth nanostructure. For an explanation of the second superlens adjusting the transmission direction of the collimated optical signal from the first superlens to emit the adjusted optical signal, please refer to Example 1, and no further details will be given.

[0073] Example 3. In this example, in order for the second superlens to adjust the transmission direction of the collimated optical signal from the first superlens, the second superlens needs to meet two conditions. Condition 1: The density of the third nanostructure included in the third region 601 is greater than the density of the fourth nanostructure included in the fourth region 602. Condition 2: The height of the third nanostructure is equal to the height of the fourth nanostructure, and the diameter of the cross section of the third nanostructure is greater than the diameter of the cross section of the fourth nanostructure. For an explanation of the second superlens adjusting the transmission direction of the collimated optical signal from the first superlens to emit the adjusted optical signal, please refer to Example 1, and no further details will be given.

[0074] Application scenario 2. As shown in this application scenario, the first superlens array is used to collimate the optical signal emitted by the laser array, and the second superlens array is used to homogenize the optical signal emitted by the first superlens array.

[0075] Continue to see Figure 2As shown, the first laser 221 is used to transmit an optical signal to the first superlens 222, and the first superlens 222 is used to collimate the optical signal to emit the collimated optical signal, and transmit the collimated optical signal to the second superlens 223 included in the second superlens array 206. For the description of the first superlens 222 shown in this application scenario being used to collimate the optical signal emitted by the first laser 221, please refer to the above-mentioned application scenario 1, and the specific details are not repeated here.

[0076] The second super lens 223 shown in this embodiment includes a plurality of nanostructures, and the arrangement form of the plurality of nanostructures and / or the diameter of the cross section of the nanostructures correspond to the wavelength of the light signal emitted by the first laser 221. In this embodiment, when the arrangement form of the nanostructures included in the second super lens 223 and / or the diameter of the cross section of the nanostructures correspond to the wavelength of the light signal emitted by the first laser 221, the light signal emitted by the first laser 221 will be diffracted by the nanostructures included in the second super lens 223 to perform homogenization, thereby causing the second super lens 223 to homogenize the light signal to emit a homogenized light signal. The arrangement form of the plurality of nanostructures corresponding to the wavelength of the light signal emitted by the first laser 221 may refer to that, among the plurality of nanostructures included in the second super lens 223, the distance between any two adjacent nanostructures is greater than 1 times the wavelength of the light signal emitted by the first laser 221. The diameter of the cross section of the nanostructure included in the second superlens 223 corresponds to the wavelength of the light signal emitted by the first laser 221, which can be referred to as the diameter of the cross section of the nanostructure, which is within the range of 0.5 times the wavelength to 1.5 times the wavelength of the light signal emitted by the first laser 221. It should be clear that the specific description of the arrangement of the plurality of nanostructures and / or the diameter of the cross section of the nanostructure corresponding to the wavelength of the light signal emitted by the first laser 221 in this embodiment is an optional example and is not limited thereto, as long as the light signal emitted by the first laser 221 can be diffracted by the second superlens to achieve uniform light.

[0077] Application scenario 3. As shown in this application scenario, the first superlens array is used to adjust the transmission direction of the optical signal emitted by the laser array, and the second superlens array is used to homogenize the optical signal emitted by the first superlens array.

[0078] Continue to see Figure 2As shown, the first laser 221 transmits an optical signal to the first super lens 222, and the first super lens 222 is used to adjust the transmission direction of the optical signal to emit the adjusted optical signal, and the second super lens 223 is used to homogenize the adjusted optical signal to emit the homogenized optical signal. The first super lens 222 includes a first region and a second region, and the first region and the second region are located on both sides of the substrate of the first super lens 222. The density of the multiple first nanostructures included in the first region is greater than the density of the multiple second nanostructures included in the second region, and / or the diameter of the cross section of the first nanostructure included in the first region is greater than the diameter of the cross section of the second nanostructure included in the second region, so that the adjusted optical signal emitted from the first super lens 222 is deflected in a direction close to the first region. For the description of the structure of the first super lens 222 for adjusting the transmission direction, please refer to the description of the second super lens structure for adjusting the transmission direction shown in the above application scenario 1, and no further details are given. For the description of the structure of the second super lens 223 for homogenizing, please refer to the description of the above application scenario 2, and no further details are given.

[0079] Application scenario 4. As shown in this application scenario, the first superlens array is used to adjust the transmission direction of the optical signal emitted by the laser array, and the second superlens array is used to collimate the optical signal emitted by the first superlens array.

[0080] The light source shown in this application scenario includes a substrate, a laser array, a first super lens array, and a second super lens array. For the description of the substrate, the laser array, and the first super lens array structure, please refer to the above application scenario 3, and no further details are given. For the description of the second super lens structure for achieving collimation, please refer to the description of the first super lens structure for achieving collimation shown in the above application scenario 1, and no further details are given.

[0081] Application scenario 5. As shown in this application scenario, the first superlens array is used to homogenize the optical signal emitted by the laser array, and the second superlens array is used to adjust the transmission direction of the optical signal emitted by the first superlens array.

[0082] The light source shown in this application scenario includes a substrate, a laser array, a first superlens array, and a second superlens array. For the description of the substrate, the laser array, and the first superlens array structure, please refer to the above-mentioned application scenario 1, and no further details are given. The first superlens array shown in this embodiment includes a first superlens, which includes a plurality of nanostructures, and the arrangement form of the plurality of nanostructures and / or the diameter of the cross-section of the nanostructure corresponds to the wavelength of the light signal emitted by the first laser included in the laser array. For specific descriptions, please refer to the description of the second superlens array structure for uniform light shown in application scenario 2, and no further details are given. For the description of the second superlens structure for realizing transmission direction adjustment, please refer to the description of the first superlens structure for realizing transmission direction adjustment shown in the above-mentioned application scenario 1, and no further details are given.

[0083] Application scenario 6. As shown in this application scenario, the first superlens array is used to homogenize the optical signal emitted by the laser array, and the second superlens array is used to collimate the transmission direction of the optical signal emitted by the first superlens array.

[0084] The light source shown in this application scenario includes a substrate, a laser array, a first super lens array, and a second super lens array. For the description of the substrate, the laser array, and the first super lens array structure, please refer to the above-mentioned application scenario 5, and no further details are given. For the description of the second super lens structure for achieving collimation, please refer to the description of the first super lens structure for achieving collimation shown in the above-mentioned application scenario 1, and no further details are given.

[0085] As shown in the above application scenarios 1 to 6, the structures of the first superlens and the second superlens for adjusting the transmission optical path of the optical signal emitted by the first laser are different. The difference between the first superlens and the second superlens is reflected in at least one of the following situations:

[0086] The size of the nanostructures included in the first superlens is different from the size of the nanostructures included in the second superlens, and / or the arrangement of the nanostructures included in the first superlens is different from the arrangement of the nanostructures included in the second superlens. The arrangement of the nanostructures included in the first superlens may refer to the density of the nanostructures included in the first superlens, and / or the distance between two adjacent nanostructures included in the first superlens. The arrangement of the nanostructures included in the second superlens may refer to the density of the nanostructures included in the second superlens, and / or the distance between two adjacent nanostructures included in the second superlens.

[0087] It can be seen that when the structure of the first superlens is different from that of the second superlens, the first superlens and the second superlens can adjust the optical path of the optical signal emitted by the first laser for different purposes. For details on how the first superlens and the second superlens adjust the optical path of the optical signal emitted by the first laser for different purposes, please refer to the above-mentioned application scenarios 1 to 6, which will not be described in detail.

[0088] Based on the above application scenarios 1 to 6, it can be seen that in the first superlens array, each different superlens can independently adjust the transmission optical path of the optical signals from different lasers, and different superlenses can control the light field of the optical signals from different lasers, thereby achieving refined control of the light field of each optical signal emitted by the laser array.

[0089] Based on the above application scenarios 1 to 6, different superlenses in the same superlens array can adjust the transmission optical path for different purposes. For example, in the first superlens array, a part of the superlenses is used for collimation, and another part of the superlenses is used for uniform light. The same superlens array is used to adjust the transmission direction of the optical signal, and different superlenses can deflect the transmission direction in different directions. For example, in the first superlens array, a part of the superlenses is used to deflect the transmission direction of the optical signal in a clockwise direction, and another part of the superlenses is used to deflect the transmission direction of the optical signal in a counterclockwise direction. It can be understood that in the superlens array shown in this embodiment, different superlenses can independently adjust the transmission optical path of the optical signal.

[0090] In the above application scenarios 1 to 6, the light source includes two super lens arrays, and the first super lens array and the second super lens array are located on two surfaces of the substrate. Figure 8 This is a side structural example diagram of the second embodiment of the light source provided in this application. The light source shown in this embodiment includes a substrate 801, a laser array 802, a first super lens array 803 and a second super lens array 806. For the description of the substrate 801 and the laser array 802 shown in this embodiment, please refer to the above Figure 2 The corresponding description is not repeated in detail. The light source shown in this embodiment includes a first substrate 811 and a second substrate 812. The first substrate 811 shown in this embodiment is connected between the laser array 802 and the second substrate 812, wherein the description of the first substrate 811 connecting the laser array 802 is shown in Figure 2 The corresponding description of the substrate-connected laser array is omitted here. Figure 8 In the example shown, the surface of the first substrate 811 facing the laser array 802 includes the first super lens array 803 . In other examples, the first super lens array 803 may also be located on the surface of the first substrate 811 facing away from the laser array 802 . Figure 8Taking the second substrate 812 including the second super lens array 806 on the surface facing the first substrate 811 as an example, in other examples, the second super lens array 806 may also be located on the surface of the second substrate 812 away from the first substrate 811. For the specific description of the first super lens array 803 and the second super lens array 806 to achieve optical path adjustment, please refer to any of the above embodiments, and no further details will be given.

[0091] In the above embodiment, the light source includes two super lens arrays as an example, without limitation. The light source shown in this embodiment may include any number of more than two super lens arrays, and the structures of different super lens arrays are different, so that different super lens arrays can adjust the optical path of the optical signal emitted by the laser for different purposes. Fig. 9 This is a side structural example diagram of the third embodiment of the light source provided in this application. The light source shown in this embodiment includes a substrate 901, a laser array 902, a first super lens array 903, a second super lens array 904, and a third super lens array 905. For a description of the structures of the substrate 901, the laser array 902, the first super lens array 903, and the second super lens array 904, please refer to Figure 2 The corresponding description is not repeated in detail. The light source includes a third substrate 911, and the surface of the third substrate 911 away from the second super lens array 904 includes a third super lens array 905. Optionally, in other examples, the third super lens array 905 can also be located on the surface of the third substrate 911 facing the second super lens array 904. For the positional relationship between the third super lens array 905 and the second super lens array 904, please refer to the description of the positional relationship between the first super lens array and the second super lens array shown in the above embodiment, and no further description is given. It can be understood that the first super lens array 903, the second super lens array 904, and the third super lens array 905 shown in this embodiment are respectively located on the transmission optical path of each optical signal emitted from the laser array 902. Specifically, the first super lens 922 included in the first super lens array 903, the second super lens 923 included in the second super lens array 904, and the third super lens 924 included in the third super lens array 905 are sequentially located on the transmission optical path of the optical signal emitted from the first laser 921 included in the laser array 902. Among the first super lens 922, the second super lens 923 and the third super lens 924, the structures of any two super lenses are different. Fig. 9The first super lens 922 shown is used to collimate the first optical signal emitted by the first laser 921. For specific descriptions, please refer to the first super lens shown in the above application scenario 1, and no further details are given. The second super lens 923 is used to adjust the transmission direction of the collimated optical signal from the first super lens 922. For specific descriptions, please refer to the second super lens shown in the above application scenario 1, and no further details are given. The third super lens 924 is used to homogenize the modulated optical signal from the second super lens 923 to emit the homogenized optical signal. For the description of the homogenization of the third super lens 924, please refer to the description of the homogenization of the second super lens shown in application scenario 2, and no further details are given. It should be clear that the description of the optical path adjustment of the first super lens 922, the second super lens 923, and the third super lens 924 in this embodiment is an optional example, and is not limited, as long as the first super lens 922, the second super lens 923, and the third super lens 924 achieve different goals of optical path adjustment for the optical signal emitted by the first laser 921.

[0092] Application scenario 7. As shown in this application scenario, the first superlens array is used to collimate and homogenize the optical signal emitted by the laser array, and the second superlens array is used to adjust the transmission direction of the optical signal emitted by the first superlens array.

[0093] The above-mentioned application scenarios 1 to 6 use the first super lens array to adjust the optical path of one target, while the first super lens array shown in this application scenario adjusts the optical paths of two targets. For the description of the light source structure shown in this application scenario, please refer to the description of application scenario 1, and no further details will be given. For the description of the first super lens array shown in this embodiment to achieve collimation, please refer to the description of application scenario 1, and no further details will be given. For the description of the first super lens array to achieve uniform light, please refer to the description of the second super lens array shown in application scenario 2 to achieve uniform light, and no further details will be given. It can be understood that the first super lens array shown in this embodiment has both collimation and uniform light functions through at least one of the nanostructure size or arrangement form of the first super lens array. For the description of the second super lens array adjusting the transmission direction of the optical signal emitted by the laser array, please refer to the description of the second super lens array in application scenario 1, and no further details will be given.

[0094] Application scenario 8. As shown in this application scenario, the first superlens array is used to adjust the transmission direction and homogenize the optical signal emitted by the laser array, and the second superlens array is used to collimate the optical signal emitted by the first superlens array.

[0095] The above-mentioned application scenarios 1 to 6 use the first super lens array to adjust the optical path of one target, while the first super lens array shown in this application scenario adjusts the optical paths of two targets. For the description of the light source structure shown in this application scenario, please refer to application scenario 1, and no further details will be given. For the description of the first super lens array shown in this embodiment to adjust the transmission direction of the optical signal, please refer to application scenario 3, and no further details will be given. For the description of the first super lens array to achieve uniform light, please refer to the description of the second super lens array shown in application scenario 2 to achieve uniform light, and no further details will be given. It can be understood that, as shown in this embodiment, the first super lens array has the functions of adjusting the transmission direction and uniform light at the same time through at least one of the nanostructure size or arrangement form of the first super lens array. For the description of the second super lens array collimating the optical signal emitted by the first super lens array, please refer to the description of the second super lens array shown in application scenario 4, and no further details will be given.

[0096] Application scenario 9. As shown in this application scenario, the first superlens array is used to adjust the transmission direction of the optical signal emitted by the laser array, and the second superlens array is used to collimate and homogenize the optical signal emitted by the first superlens array.

[0097] The above-mentioned application scenarios 1 to 6 use the second super lens array to adjust the optical path of one target, while the second super lens array shown in this application scenario adjusts the optical path of two targets. For the description of the light source structure shown in this application scenario, please refer to the description of application scenario 1, and no further details will be given. For the description of the first super lens array shown in this embodiment to adjust the transmission direction of the optical signal emitted by the laser array, please refer to the description of the first super lens shown in application scenario 3, and no further details will be given. For the description of the second super lens array to achieve collimation, please refer to the description of the second super lens shown in application scenario 4 to achieve collimation, and no further details will be given. For the description of the second super lens array to achieve uniform light, please refer to the description of the second super lens array to achieve uniform light shown in application scenario 2, and no further details will be given. It can be understood that the second super lens array shown in this embodiment has both collimation and uniform light functions through at least one of the nanostructure size or arrangement form of the second super lens array.

[0098] Application scenario 10. As shown in this application scenario, the first superlens array is used to collimate the optical signal emitted by the laser array, and the second superlens array is used to adjust the transmission direction and uniform light of the optical signal emitted by the first superlens array.

[0099] The above-mentioned application scenarios 1 to 6 use the second super lens array to adjust the optical path of one target, while the second super lens array shown in this application scenario adjusts the optical paths of two targets. For the description of the light source structure shown in this application scenario, please refer to application scenario 1, and no further details will be given. For the description of the collimation achieved by the first super lens array shown in this embodiment, please refer to application scenario 1, and no further details will be given. For the description of the second super lens array achieving the adjustment of the transmission direction of the optical signal emitted by the first super lens array, please refer to the description of the second super lens achieving the adjustment of the transmission direction shown in application scenario 1, and no further details will be given. For the description of the second super lens array achieving uniform light, please refer to the description of the second super lens array achieving uniform light shown in application scenario 2, and no further details will be given. It can be understood that, as shown in this embodiment, at least one of the nanostructure size or arrangement form of the second super lens array is used to achieve the second super lens array having both the transmission direction adjustment and uniform light functions.

[0100] In the above, the example of each super lens array adjusting the optical path of the optical signal emitted by the first laser to achieve uniform light, collimation and adjustment of the transmission direction is taken. The description of each super lens array adjusting the optical path target of the optical signal transmission in this embodiment is an optional example and is not limited. For example, any super lens array included in the light source can adjust the chromatic aberration of the optical signal based on size or arrangement, or split the optical signal based on the polarization state.

[0101] Continue to see Figure 2As shown, the laser array 202 also includes a second laser 231. In the laser array 201, the position of the first laser 221 is adjacent to the position of the second laser 231. The first super lens array 203 also includes a fourth super lens 232 adjacent to the position of the first super lens 222. It can be understood that the fourth super lens 232 shown in this embodiment is located on the transmission optical path of the optical signal emitted from the second laser 231. The fourth super lens 232 shown in this embodiment is used to adjust the transmission optical path of the optical signal emitted from the second laser 231. For example, the fourth super lens 232 is used to collimate, homogenize or adjust the transmission direction of the optical signal emitted from the second laser 231. For details, please refer to the above description of adjusting the transmission optical path of the optical signal emitted from the first laser by the first super lens 222, which will not be described in detail. The fourth super lens 232 shown in this embodiment includes a plurality of nanostructures, and the distance between the laser array 202 and the first super lens array 203 is positively correlated with the target number, the target number being the number of nanostructures included in the first super lens 222 covered by the light signal emitted from the first laser 221, or the target number being the number of nanostructures included in the fourth super lens 232 covered by the light signal emitted from the second laser 231. It can be understood that if the distance between the laser array 202 and the first super lens array 203 is larger, the number of nanostructures included in the first super lens 222 covered by the light signal emitted from the first laser 221 is larger, and similarly, if the distance between the laser array 202 and the first super lens array 203 is larger, the number of nanostructures included in the fourth super lens 232 covered by the light signal emitted from the second laser 231 is larger. The distance between the laser array 202 and the first super lens array 203 shown in this embodiment needs to ensure that the optical signal emitted from the first laser 221 does not cover the nanostructure included in the fourth super lens 232, and also needs to ensure that the optical signal emitted from the second laser 231 does not cover the nanostructure included in the first super lens 222. It can be understood that the intersection between the multiple nanostructures included in the first super lens 222 and the multiple nanostructures included in the fourth super lens 232 is empty, so that the optical signal emitted from the first laser 221 only covers the first super lens 222, and the optical signal emitted from the second laser 231 only covers the fourth super lens 232. For example, the distance between the first super lens array 203 and the laser array 202 shown in this embodiment is not greater than 100 microns (μm). The second super lens array shown in this embodiment also includes a fifth super lens 233, which is located on the transmission optical path of the optical signal emitted from the fourth super lens 232. The fifth super lens 233 shown in this embodiment is used to adjust the transmission optical path of the optical signal emitted from the fourth super lens 232 .For the description of the distance between the fifth super lens 233 and the fourth super lens 232 shown in this embodiment, please refer to the description of the distance between the fourth super lens 232 and the second laser 231, and the details are not repeated here.

[0102] Fig.10 An example diagram of the structure of an embodiment of the photoelectric conversion module provided in the present application. The photoelectric conversion module 1000 shown in this embodiment can be referred to as an optical module (optical transceiver). The photoelectric conversion module 1000 includes a light source 1001, a modulator 1002, a detector 1004, a transmission (transport, TX) port 1003, a receiving (receive, RX) port 1005 and a processor 1006. The processor 1006 is connected to the modulator 1002 and the detector 1004 respectively, the modulator 1002 is connected to the light source 1001 and the transmission port 1003 respectively, and the detector 1004 is connected to the receiving port 1005. The modulator 1002 shown in this embodiment is an optional structure. For example, if the modulation mode of the photoelectric conversion module 1000 is frequency modulation, phase modulation or amplitude modulation, the photoelectric conversion module 1000 includes a modulator 1002 for modulation. If the modulation mode of the photoelectric conversion module 1000 is on-off keying (OOK), the photoelectric conversion module 1000 may not include the modulator 1002. In this embodiment, the photoelectric conversion module 1000 includes the modulator 1002 as an example. The light source 1001 is used to send a first optical signal to the modulator 1002. For the description of the structure of the light source 1001 shown in this embodiment, please refer to any of the above embodiments, and the details are not repeated. The processor 1006 is used to send a first service electrical signal to the modulator 1002. The modulator 1002 is used to receive the first optical signal from the light source, and is used to modulate the first service electrical signal on the first optical signal to obtain a first service optical signal.

[0103] The receiving port 1005 is used to receive a second service optical signal, and the detector 1004 is used to receive the second service optical signal from the receiving port 1005. The detector 1004 is used to perform photoelectric conversion on the second service optical signal to obtain a second service electrical signal, and send the second service electrical signal to the processor 1006.

[0104] This embodiment does not limit the form of the processor 1006. For example, the processor 1006 may be one or more chips, or one or more integrated circuits. For example, the processor 1006 may be one or more optical digital signal processors (oDSP), field-programmable gate arrays (FPGA), application specific integrated circuits (ASIC), system on chip (SoC), central processor unit (CPU), network processor (NP), microcontroller unit (MCU), programmable logic device (PLD) or other integrated chips, or any combination of the above chips or processing modules, etc., which will not be described in detail. This embodiment takes the photoelectric conversion module including the processor 1006 as an example. In other examples, the processor 1006 may also be located on the device board where the photoelectric conversion module is inserted, which is not specifically limited.

[0105] The photoelectric conversion module shown in this embodiment includes a fiber optic connector, which includes a transmission port 1003 and a receiving port 1005. The transmission port 1003 is used to connect the first external optical cable and the first internal optical cable. The receiving port 1005 is used to connect the second external optical cable and the second internal optical cable. The first external optical cable and the second external optical cable are located outside the housing of the photoelectric conversion module 1000. The first internal optical cable and the second internal optical cable are located inside the housing of the photoelectric conversion module 1000. For example, the photoelectric conversion module 1000 is connected to an external device, then one end of the first external optical cable is connected to the transmission port 1003, and the other end is connected to the external device, so that the photoelectric conversion module 1000 sends the first service optical signal to the external device through the first external optical cable. For another example, one end of the second external optical cable is connected to the receiving port 1005, and the other end is connected to the external device, so that the photoelectric conversion module 1000 receives the second service optical signal from the external device through the second external optical cable. The transmission port 1003 is connected to the modulator 1002 through the first internal optical cable. The receiving port 1005 is connected to the detector 1004 via a second internal optical cable.

[0106] The specific type of the optical fiber connector shown in this embodiment can be any of the following. It should be noted that the description of the optical fiber connector type in this embodiment is an optional example and is not limited:

[0107] Multi fiber push on (MPO) type fiber optic connector, ferrule connector (FC) type fiber optic connector, square connector (SC) type fiber optic connector, lucent connector (LC) type fiber optic connector, straight tip (ST) type fiber optic connector or fiber distributed data interface (IFDD) type fiber optic connector.

[0108] Fig.11 This is an example diagram of the structure of an embodiment of the optical communication system provided in the present application. The optical communication system 1100 shown in this embodiment includes a core node (central point, CP) 1101 and multiple access nodes (access point, AP) 1102 connected to CP1101. CP1101 can be connected to multiple APs through one or more optical splitters. This embodiment does not limit the number of APs included in the optical communication system 1100. For example, the optical communication system 1100 includes three AP1102. CP1101 includes an outer shell, a frame, a CP-side device and a first optoelectronic conversion module. The CP-side device includes a processor. For a description of the processor type, please refer to Fig.10 The description of the corresponding processor is not repeated in detail. The processor is used to send a first service electrical signal to the first photoelectric conversion module and to receive a second service electrical signal from the first photoelectric conversion module. The plug-in frame of the CP side device is used to plug in one or more first photoelectric conversion modules. Optionally, the first photoelectric conversion module can also be integrated with the CP side device. For a description of the first photoelectric conversion module, please refer to Fig.10 The corresponding description is omitted here. CP1101 is connected to AP1102 via an external optical cable.

[0109] AP1102 includes an outer shell, a second photoelectric conversion module, and an AP side device. Exemplarily, the second photoelectric conversion module can be directly plugged into the AP side device, or can be integrated with the AP side device. This embodiment takes the example of AP1102 including a second photoelectric conversion module. In other examples, AP1102 may also include multiple second photoelectric conversion modules. For the description of the AP1102 structure in this embodiment, please refer to the description of the CP1101 structure, and no further details are given.

[0110] This embodiment does not limit the network to which the optical communication system 1100 is applied. For example, if the optical communication system 1100 shown in this embodiment is applied to PON, the AP may be an optical network unit (ONU) or an optical network terminal (ONT). The core node CP1101 may be an optical line terminal (OLT), a switch (e.g., a core layer switch, a layer 2 switch) or a router. If the optical communication system 1100 is applied to OTN, the CP and the AP may both be OTN devices. This embodiment does not limit the description of the types of CP1101 and AP1102. For example, the types of CP1101 and AP1102 may also be optical transmission equipment, optical access equipment, routers, switches, wireless base stations, wireless remote access equipment, wireless baseband signal processing equipment, etc., or may be computing servers (usually referred to as servers), high performance computers (HPCs), storage servers, or memory resource pools. This example does not limit the types of CP1101 and AP1102, as long as the CP1101 and AP1102 have an electro-optical conversion function and an optical interface that can be connected to an optical fiber.

[0111] The present application provides an optical communication device. The description of the optical communication device can be found in Fig.11 The corresponding description of CP1101 or AP1102 is not repeated here.

[0112] Fig.12 This is an example diagram of the structure of an embodiment of the laser radar provided in the present application. The laser radar 1200 shown in this embodiment includes a processor 1201, a light source 1202, and a detector array 1203. For the description of the structure of the light source 1202, please refer to any of the above embodiments, and the details are not repeated here. The light source 1202 and the detector array 1203 are respectively connected to the processor 1201. The connection relationship between the various components included in the laser radar can be an electrical connection or an optical fiber connection. The processor 1201 is used to control the light source 1202 and the detector array 1203 so that the light source 1202 and the detector array 1203 work normally. Exemplarily, the processor 1201 provides driving voltages to the light source 1202 and the detector array 1203 respectively, and the processor 1201 can also provide an emission control signal for the light source 1202. Among them, for the description of the structure of the light source 1202, please refer to the description of the above embodiments, and the details are not repeated here. For the description of the type of processor 1201, please refer to Fig.10 The corresponding processor types are described here without further elaboration.

[0113] The processor 1201 is used to send a control signal to the light source 1202, and the light source 1202 is used to transmit a detection light signal for realizing laser radar detection according to the control signal. The detection light signal propagates along the transmission direction. When the detection light signal encounters the object to be measured, it is reflected on the surface of the object to be measured, and the reflected echo light signal is received by the detector array 1203 of the laser radar 1200. In the embodiment of the present application, the light beam reflected by the detection light signal by the object to be measured is called the echo light signal. After receiving the echo light signal, the detector array 1203 performs photoelectric conversion on the echo light signal, that is, converts the echo light signal into an electrical signal (the electrical signal is referred to as the detection electrical signal below). The detector array 1203 sends the detection electrical signal to the processor 1201. The processor 1201 can obtain the position information of the object to be measured based on the detection electrical signal. Specifically, the processor 1201 can determine the position information of the object to be measured by calculating the time delay between the emission time point of the detection light signal and the return time point of the detection electrical signal. At the same time, the laser radar 1200 can also acquire the position information of each point on the surface of the object to be measured and generate a point cloud image of the object to be measured by emitting detection light signals with different spatial orientations to the object to be measured (for example, the adjustment of the light signal transmission direction by the super lens array shown in the above embodiment).

[0114] In this embodiment, the laser radar 1200 is used as a laser radar, which is a target detection technology. The laser radar emits a detection light signal, and the detection light signal is diffusely reflected after encountering the object to be measured. The distance, direction, height, speed, posture, shape and other characteristic quantities of the object to be measured are determined by the reflected echo light signal. Laser radar is applied to intelligent driving vehicles, intelligent driving aircraft, 3D printing, virtual reality (VR), augmented reality (AR), service robots and other fields. The intelligent driving in the embodiment of this application can be unmanned driving, automatic driving, or assisted driving.

[0115] Fig.13 This is an example diagram of the structure of an embodiment of the projection system provided in the present application. The projection system 1300 includes a light source 1301, an image modulation module 1302 and a lens 1303. For the description of the structure of the light source 1301 shown in this embodiment, please refer to the above embodiment, and the specific details are not repeated here. The light source 1301 in this embodiment outputs a projection beam (white light) to the image modulation module 1302. The image modulation module 1302 is used to receive a projection beam from the light source 1301, and to modulate the projection beam 1201 to obtain a modulated beam, and is also used to transmit the modulated beam to the lens 1303. The lens 1303 is used to project the modulated beam outward and to image the modulated beam. The lens 1303 can be a short-focus lens.

[0116] The image modulation module 1302 in this embodiment may be a liquid crystal on silicon (LCOS) display, an organic light-emitting diode (OLED) display, a liquid crystal display (LCD), a digital light processing (DLP) display or a micro-electro-mechanical systems (MEMS) display, etc. The light source 1301 in this embodiment may include a three-color light source (the laser array included in the light source specifically includes a laser for emitting blue light, a laser for emitting red light, and a laser for emitting green light). Optionally, the light source 1301 may include a spectrometer, which may be a wave plate or a semi-reflective and semi-transmissive wave plate, etc. The spectrometer is used to filter out the red light in the projection beam output by the light source and transmit it to the image modulation module 1302. The spectrometer is used to filter out the blue light in the projection beam output by the light source and transmit it to the image modulation module 1302. The beam splitter is used to filter out the green light in the projection light beam output by the light source and transmit the green light to the image modulation module 1302 .

[0117] The projection system shown in this embodiment can be applied to projection lamps. Specifically, the modulated light beam emitted by the lens 1303 displays a target light pattern on the road surface around the vehicle to form an image. The target light pattern formed by the modulated light beam can be a light blanket displayed on the road projection area. The light blanket prompts the driver with the vehicle's advanced driving assistance system (ADAS) information, the main data on the vehicle dashboard (fuel consumption, engine speed, temperature, etc.), vehicle speed information, steering wheel angle information or vehicle body posture data, etc. through the modulated image, color, light pattern, etc., which is not limited in this embodiment. The modulated light beam emitted by the projection lamp shown in this embodiment and displayed in the target light pattern can also be used to illuminate the road surface around the vehicle, etc., to improve driving safety or navigation efficiency. The projection lamp shown in this embodiment is used for vehicle lighting and image projection, and can be a low beam or an adaptive high beam to achieve vehicle-assisted automatic driving.

[0118] Fig.14 This is an example diagram of an embodiment of the head-up display system provided in this application. The head-up display (HUD) system shown in this embodiment includes a projection system 1401 and a light deflection module 1402. For a description of the projection system 1401, please refer to Fig.13The corresponding instructions are not detailed here. The HUD system projects vehicle-related information to the front of the driver's field of vision. Vehicle-related information can be instrument information (such as vehicle speed) or navigation information, etc. Then, the driver can see vehicle-related information in front of the field of vision without having to look down at the instrument panel or central control display under the steering wheel, thereby improving the braking reaction time in an emergency and improving driving safety.

[0119] The projection system 1401 shown in this embodiment transmits the modulated light beam 1411 to the light deflection module 1402. Specifically, Fig.13 As shown, the projection system 1401 includes a light source, an image modulation module and a lens. The light source transmits a projection beam to the image modulation module, and the image modulation module modulates the vehicle-related information on the projection beam to obtain a modulated beam 1411. The lens transmits the imaged modulated beam 1411 to the light deflection module 1402. The light deflection module 1402 forms an enlarged virtual image 1412 of the modulated beam in front of the vehicle. Among them, the light deflection module 1402 shown in this embodiment includes a curved mirror. The curved mirror enlarges the light spot of the modulated beam 1411 to transmit it to the windshield 1404 of the vehicle. The windshield 1404 reflects the modulated beam 1411 to the driver's binoculars for imaging. That is, the reverse extension line of the image formed in the driver's binoculars forms a virtual image 1412 in front of the vehicle. This embodiment takes the application of the HUD system to a vehicle as an example. In other examples, the HUD system can also be applied to driving tools such as ships, airplanes, and helicopters that require drivers to drive.

[0120] The HUD shown in this embodiment can also be a HUD with a three-dimensional (3D) display function. The HUD with a 3D display function modulates the vehicle driving related information on the projection beam emitted by the projection system, and displays the vehicle driving related information in the form of a virtual image in front of the vehicle. Moreover, the virtual image is superimposed on the road scene (such as roads, buildings, pedestrians, etc.) to achieve a 3D display effect.

[0121] This embodiment also provides a means of transportation. For a detailed description of the structure, see Fig.15 As shown, Fig.15This is an example diagram of the structure of an embodiment of a vehicle provided in this application. The vehicle shown in this example may be a car, a truck, a motorcycle, a bus, a lawn mower, an amusement vehicle, an amusement park vehicle, a tram, a golf cart, a train, a cart, or a drone. In this embodiment, the vehicle 1500 is configured to be in a fully or partially autonomous driving mode. The vehicle shown in this embodiment includes a vehicle body, which is used to fix a sensor system 1520, an advanced driving assistance system (ADAS) 1510, a peripheral device 1530, and a computer system 1540.

[0122] The sensing system 1520 includes one or more sensors for sensing environmental information about the surroundings of the vehicle 1500. For example, the sensing system 1520 may include a positioning system, wherein the positioning system is any positioning system such as a global positioning system (GPS) system or a Beidou system. The sensing system 1520 also includes an inertial measurement unit (IMU), a radar, and a camera. The sensing system 1520 may also include sensors for monitoring the internal systems of the vehicle 1500 (e.g., an in-vehicle air quality monitor, a fuel gauge, an oil temperature gauge, etc.). Sensor data from one or more of these sensors may be used to detect objects and their corresponding characteristics (position, shape, direction, speed, etc.). The positioning system may be used to estimate the geographic location of the vehicle 1500. The IMU is used to sense the position and orientation changes of the vehicle 1500 based on inertial acceleration. The IMU may be a combination of an accelerometer and a gyroscope. The laser radar may use radio signals to detect objects to be measured in the surroundings of the vehicle 1500, for example, the objects to be measured may be pedestrians, vehicles, or buildings, etc. Optionally, the laser radar can also be used to detect the speed and / or direction of the object to be detected. For a description of the laser radar, see Fig.12 The corresponding instructions are not elaborated in detail.

[0123] ADAS1510 senses the surrounding environment at any time during the driving process of the vehicle, collects data, identifies, detects and tracks static and dynamic objects, and combines navigation map data to perform systematic calculations and analysis, so as to make the driver aware of possible dangers in advance, effectively increasing the comfort and safety of driving the vehicle. For example, ADAS1510 can control the vehicle through the data obtained by the sensor system 120. For another example, ADAS1510 can control the vehicle through vehicle driving related information, where the vehicle driving related information can be the main data on the vehicle dashboard (fuel consumption, engine speed, temperature, etc.), vehicle speed information, steering wheel angle information, or body posture data, etc.

[0124] The vehicle 1500 interacts with external sensors, other vehicles, other computer systems, or users through the peripheral device 1530. The peripheral device 1530 may include a wireless communication system, an onboard computer, a microphone, and / or a speaker. For example, the onboard computer may provide information to the user of the vehicle 1500. The user interface may also operate the onboard computer to receive the user's input. The onboard computer may be operated through a touch screen. In other cases, the peripheral device 1530 may provide a means for the vehicle 1500 to communicate with other devices located in the vehicle. For example, the microphone may receive audio (e.g., voice commands or other audio input) from the user of the vehicle 1500. The speaker may output audio to the user of the vehicle 1500. The wireless communication system may communicate wirelessly with one or more devices directly or via a communication network.

[0125] Some or all functions of vehicle 1500 are controlled by computer system 1540. Computer system 1540 may control functions of vehicle 1500 based on input received from various systems (e.g., sensing system 120, ADAS 1510, peripherals 1530) and from a user interface. Computer system 1540 may include at least one processor that executes instructions stored in a memory.

[0126] The light source shown in the above embodiment is applied to the laser radar of a vehicle as an example. In other examples, the light source can also be applied to a fixed radar (for example, a radar fixed on a highway, a monitoring radar, a radar in an industrial scene, etc.). The light source can also be applied to the radar of an unmanned transport vehicle in a logistics warehouse or the radar of a smart home appliance in a smart home (for example, a smart home appliance is an automatic cleaning robot), etc., without specific limitation. It can be understood that the laser beam emitted by the light source in this embodiment can also be called an optical signal, a laser pulse, a laser, a projection beam, or an emission beam, etc., without limitation. In order to achieve the distinction, when the light source is applied to different scenes, the name of the light emitted by the light source is different. For example, if the light source is applied to a laser radar, the light emitted by the light source is called a detection light signal. For another example, if the light source is applied to an optical communication system, the light emitted by the light source is called an optical signal. For another example, if the light source is applied to a projection system, the light emitted by the light source is called a projection beam. Taking the light source provided in this embodiment as an example of being applied to a laser radar of a vehicle, the laser radar is used to detect the object to be measured around the vehicle. The detection light signal emitted by the light source has a high frequency and a short wavelength, so the height, distance and speed resolution of laser detection can be improved.

[0127] The present application also provides a lamp, which includes a driver, a light source and a lampshade, wherein the lampshade is used to cover the light source and the driver. For the description of the light source structure, please refer to any of the above embodiments, and the details are not repeated here. The driver is used to drive the light source to emit light, and the lampshade has a light-transmitting portion, and the light emitted by the light source can pass through the light-transmitting portion. This embodiment does not limit the scope of application of the lamp. For example, the lamp can be applied to the lighting field or the warning field.

[0128] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0129] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A light source, characterized in that: The invention comprises a laser, a first super lens and a second super lens, wherein the first super lens is connected between the laser and the second super lens; the first super lens and the second super lens are sequentially located on a transmission optical path of an optical signal emitted from the laser; The first superlens and the second superlens respectively include multiple nanostructures, the size of the nanostructures included in the first superlens is different from the size of the nanostructures included in the second superlens, and / or the arrangement form of the nanostructures included in the first superlens is different from the arrangement form of the nanostructures included in the second superlens, and the first superlens and the second superlens are respectively used to adjust the transmission optical path of the optical signal emitted by the laser.

2. The light source according to claim 1, characterized in that The light source further includes a substrate, a surface of the substrate facing the laser includes the first superlens, and a surface of the substrate facing away from the laser includes the second superlens.

3. The light source according to claim 1, characterized in that The light source further includes a first substrate and a second substrate, the first substrate is connected between the laser and the second substrate, a surface of the first substrate includes the first super lens, and a surface of the second substrate includes the second super lens.

4. The light source according to any one of claims 1 to 3, characterized in that: The arrangement form of the nanostructures included in the first superlens refers to the density of the nanostructures included in the first superlens and / or the distance between two adjacent nanostructures included in the first superlens; the arrangement form of the nanostructures included in the second superlens refers to the density of the nanostructures included in the second superlens and / or the distance between two adjacent nanostructures included in the second superlens.

5. The light source according to any one of claims 1 to 4, characterized in that: The first superlens includes a first region and a second region, the first region includes a plurality of first nanostructures, the second region includes a plurality of second nanostructures, the second region surrounds the first region, the first superlens is used to collimate the optical signal emitted by the laser to emit a collimated optical signal, and the second superlens is used to adjust the transmission direction of the collimated optical signal or to even the collimated optical signal.

6. The light source according to any one of claims 1 to 4, characterized in that: The first superlens includes a first region and a second region, the first region includes a plurality of first nanostructures, the second region includes a plurality of second nanostructures, the first region and the second region are located on both sides of the first superlens, the first superlens is used to adjust the transmission direction of the optical signal emitted by the laser to emit an adjusted optical signal, the adjusted optical signal is deflected in a direction close to the first region, and the second superlens is used to collimate the adjusted optical signal or to homogenize the adjusted optical signal.

7. The light source according to claim 5 or 6, characterized in that: A size of each of the first nanostructures included in the first region is equal to a size of each of the second nanostructures included in the second region, and a density of the first nanostructures included in the first region is greater than a density of the second nanostructures included in the second region.

8. The light source according to claim 5 or 6, characterized in that: The density of the first nanostructures included in the first region is equal to the density of the second nanostructures included in the second region, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure.

9. The light source according to claim 5 or 6, characterized in that: The density of the first nanostructures included in the first region is greater than the density of the second nanostructures included in the second region, and the diameter of the cross section of the first nanostructure is greater than the diameter of the cross section of the second nanostructure.

10. The light source according to any one of claims 1 to 9, characterized in that: The arrangement form of the multiple nanostructures included in the first superlens and / or the diameter of the cross-section of the nanostructure corresponds to the wavelength of the light signal emitted by the laser, so that the light signal emitted by the laser is diffracted by the multiple nanostructures to emit a homogenized light signal.

11. The light source according to any one of claims 1 to 10, characterized in that: The laser light-emitting hole, the center of the first super lens and the center of the second super lens are aligned in sequence.

12. The light source according to any one of claims 1 to 11, characterized in that: The light source also includes a third superlens, the second superlens is connected between the third superlens and the first superlens, and the first superlens, the second superlens and the third superlens are sequentially located on a transmission optical path of an optical signal emitted from the laser; the third superlens includes a plurality of nanostructures, any two sizes of the nanostructures included in the first superlens, the nanostructures included in the second superlens and the nanostructures included in the third superlens are not equal to each other, and / or any two arrangements of the nanostructures included in the first superlens, the nanostructures included in the second superlens and the nanostructures included in the third superlens are different from each other.

13. A photoelectric conversion module, characterized in that: It comprises a detector, a receiving port, a sending port and the light source according to any one of claims 1 to 12, wherein the light source is connected to the sending port, and the detector is connected to the receiving port; The light source is used to send a first optical signal to the sending port, and the sending port is used to emit the first optical signal; The receiving port is used to receive a second optical signal, and the detector is used to perform photoelectric conversion on the second optical signal to obtain an electrical signal.

14. An optical communication device, characterized in that: It comprises an outer shell, a processor and the photoelectric conversion module according to claim 13, wherein the outer shell is used to fix the processor and the photoelectric conversion module, and the processor is connected to the photoelectric conversion module; The processor is used to send a service electrical signal to the photoelectric conversion module, and the light source is used to obtain the first optical signal according to the service electrical signal; The detector is used to send the electrical signal to the processor.

15. A laser radar, characterized in that: comprising a detector array, a processor and a light source according to any one of claims 1 to 12, wherein the processor is connected to the detector array and the light source respectively; The light source is used to emit a detection light signal; The detector array is used to receive the echo light signal and convert the echo light signal into a detection electrical signal, wherein the echo light signal is a light signal reflected by the detection object according to the detection light signal; The processor is used for obtaining relevant information of the detection object according to the detection electrical signal.

16. A projection system, characterized in that: It comprises an image modulation module, a lens and a light source as claimed in any one of claims 1 to 12; The image modulation module is used to receive the projection light beam from the light source, and to modulate the projection light beam to obtain a modulated light beam, and is also used to transmit the modulated light beam to the lens; the lens is used to image the modulated light beam.

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