A semiconductor liquid supply device for real-time pH detection

Abstract

A semiconductor liquid supply device for real-time pH detection includes a housing, a cartridge, a pump, a liquid supply detection device, and a signal processing device. The cartridge is located within the housing and is fed with liquid medicine. The pump is disposed within the housing and connected to the liquid supply detection device to extract the liquid medicine through the liquid supply detection device. When the pump is operating, the liquid medicine inside the cartridge is extracted through the liquid supply detection device and a three-way connector and transported to the semiconductor device for subsequent processing. The liquid supply detection device is provided with a sensor, the probe of which is immersed in the liquid medicine in the cartridge. While the liquid medicine is being extracted through the main body, the pH value of the liquid medicine can be detected in real time. The sensor transmits the collected pH value information to the signal processing device, which receives and analyzes the pH value information. When the pH value information changes and the change value exceeds a preset range, it indicates that the liquid medicine inside the cartridge has expired. The alarm device on the signal processing device sounds an alarm, thereby reminding the operator to replace the expired liquid medicine.

Description

Technical Field

[0001] The present invention relates to the field of liquid supply equipment, in particular to a semiconductor liquid supply equipment for real-time pH detection. Background Art

[0002] Semiconductor processing requires the use of numerous acidic or alkaline chemicals, typically pumped from barrels to semiconductor equipment. Over time, the chemical solution in the barrel comes into contact with air, causing significant fluctuations in its pH. When the pH fluctuation exceeds the permitted range, the solution becomes ineffective and unusable. Operators have no way of knowing whether the pH value has changed. If the chemical solution in the barrel has already expired, the pump will continue to deliver the ineffective solution to the semiconductor equipment, impacting processing quality. Summary of the Invention

[0003] The purpose of the present invention is to provide a semiconductor liquid supply device for real-time pH detection, which can detect the pH of the liquid in real time while extracting the liquid, so as to know the pH value change of the liquid in real time and replace the expired liquid in time.

[0004] The embodiment of the present invention is achieved as follows:

[0005] The semiconductor liquid supply device for real-time pH detection according to an embodiment of the present application comprises: a housing, a cartridge, a pump, a liquid supply detection device, and a signal processing device. The cartridge is located in the housing and has liquid medicine input therein; the pump is disposed in the housing and connected to the liquid supply detection device to extract the liquid medicine through the liquid supply detection device; the liquid supply detection device comprises: a first tube assembly, a second tube assembly, a three-way joint, a sensor, and a cable; the first tube assembly is connected to the second tube assembly, the bottom end of the first tube assembly extends into the cartridge, and the second tube assembly is connected to the pump assembly via the three-way joint;

[0006] The first tube assembly includes: an inner tube and an outer tube, the inner tube is located inside the outer tube, the bottoms of the inner tube and the outer tube are both located inside the cartridge, and a first set gap is defined between the outer circumferential side of the inner tube and the inner circumferential side of the outer tube, the sensor is disposed inside the inner tube, the bottom of the sensor extends into the liquid medicine in the cartridge for detecting the pH value of the liquid medicine, and the top of the sensor is electrically connected to the signal processing device via the cable;

[0007] The second tube body assembly includes: a first connecting tube, a first connecting joint, and a second connecting joint; the first connecting tube and the outer tube are arranged in the upper and lower directions respectively, and the bottom end of the first connecting tube is connected to the top end of the outer tube through the first connecting joint; the cable is also located inside the first connecting tube, and a second set gap is defined between the cable and the inner side wall of the first connecting tube; a first connecting hole is provided on the side wall of the first connecting joint to connect the first set gap and the second set gap; the second connecting joint is connected to the side wall of the top of the first connecting tube, and the second connecting joint is connected to the three-way joint;

[0008] After the pump body is started, the medicine liquid inside the cartridge flows toward the pump body along the first set gap, the second set gap and the three-way joint in sequence; when the signal processing device receives and processes the pH value information and controls its alarm device to alarm when the pH value of the medicine liquid changes beyond a preset value.

[0009] In a possible embodiment, the first tube body assembly further includes a first fixed plug, a first sealing ring and a second sealing ring; the first fixed plug is arranged at the bottom end of the inner cylinder, and the sensor is located inside the first fixed plug; the first sealing ring is sleeved on the first fixed plug to be sealed and connected to the inner circumferential side of the inner cylinder through the second sealing ring; the second sealing ring is sleeved on the sensor body of the sensor to be sealed and connected to the inner circumferential side of the first fixed plug through the second sealing ring; the probe of the sensor is located below the second sealing ring for contacting the medicine inside the cartridge.

[0010] In a possible embodiment, the outer cylinder includes a first cylinder body and a second cylinder body, and the first cylinder body and the second cylinder body are respectively arranged opposite to each other and connected in the up and down directions; the first fixed plug includes a first plug body and a first convex ring portion, and the first convex ring portion is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion and the inner circumferential side surface of the first cylinder body; the top end of the second cylinder body also extends into the interior of the first cylinder body and abuts against the bottom of the first convex ring portion, and there is a gap between the outer circumferential side surface of the top end of the second cylinder body and the inner circumferential side surface of the first cylinder body.

[0011] In a possible embodiment, the second cylinder is provided with upper and lower openings, the probe extends into the interior of the second cylinder, the second cylinder is immersed in the liquid medicine, and a second connecting hole is provided on the side wall of the top end of the second cylinder.

[0012] In a possible embodiment, a first step is provided at the bottom of the first cylinder, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder and the top of the second cylinder are connected and cooperated with each other through the first step and the second step respectively; an abutment is also provided at the top of the second step of the second cylinder, and the abutment extends into the interior of the first cylinder and abuts with the bottom of the first convex ring portion; a second connecting hole is provided on the side wall of the abutment, and a gap is left between the outer circumferential side surface of the abutment and the inner circumferential side surface of the first cylinder.

[0013] In a possible implementation manner, the first tube assembly further includes a protective cover, which is connected to the bottom of the second cylinder to seal and protect the probe located inside the second cylinder.

[0014] In a possible embodiment, the outer circumferential side surface of the top end of the protective cover is provided with a first threaded portion, and the inner circumferential side surface of the second cylinder is provided with a second threaded portion, the top end of the protective cover extends into the interior of the second cylinder and the two are threadedly connected; the outer circumferential side surface of the middle part of the protective cover is provided with a second shoulder portion, the second shoulder portion is arranged opposite to the bottom of the second cylinder, and the bottom of the second cylinder abuts against the second shoulder portion.

[0015] In a possible embodiment, the first tube body assembly further includes a third sealing ring, which is sleeved on the outer circumferential side surface of the bottom of the first plug body, the bottom of the first plug body and the probe extend into the protective cover, and the outer circumferential side surface of the bottom of the first plug body is sealedly connected to the inner circumferential side surface of the top end of the protective cover through the third sealing ring.

[0016] In a possible embodiment, the second tube body assembly further includes a cable protective sleeve, which is sleeved on the outside of the cable, and the bottom of the cable protective sleeve abuts against the top of the sensor body; the first connecting joint is threadedly connected to the top of the second cylinder; the outer circumferential side surface of the top of the inner cylinder is provided with a first shoulder portion, and the bottom of the first connecting joint is arranged opposite to the first shoulder portion up and down, and when the first connecting joint and the second cylinder are tightened downward, the bottom of the first connecting joint is pressed against the top of the first shoulder portion and a downward pre-tightening force is applied to the inner cylinder through the first shoulder portion, so that the bottom of the inner cylinder is pressed against the top of the first convex ring portion; the outer diameter of the top of the inner cylinder increases from top to bottom, and the bottom of the cable protective sleeve is sleeved on the top of the inner cylinder, and when the first connecting joint and the second cylinder are tightened downward, the inner circumferential side surface of the first connecting joint presses the cable protective sleeve against the top of the inner cylinder in the direction toward the cable.

[0017] In a possible embodiment, the multiple device connections of the semiconductor liquid supply device have a sealed fixed structure; the multiple device connections include at least the connection between the outer cylinder and the first connecting pipe, the connection between the three-way joint and the first connecting pipe, the connection between the three-way joint and the pump body, and the connection between the inner cylinder and the cable protective sleeve;

[0018] Each set of connections is provided with a first fixed connection joint and a first connection nut; the first connection nut is sleeved on the first fixed connection joint or respectively sleeved on the outer circumferential side surfaces of the first fixed connection joint and the cable protective sleeve, and the first fixed connection joint is threadedly connected to the first connection nut; the outer diameter of the top end of the first fixed connection joint gradually decreases from bottom to top, and the cable protective sleeve is sleeved on the top end of the first fixed connection joint; when the first connection nut and the first fixed connection joint are tightened downward, the cable protective sleeve is pressed against the top end of the first fixed connection joint.

[0019] In a possible embodiment, the first fixed connection joint includes a first fixed connection joint body and a second convex ring portion; the second convex ring portion is arranged on the outer circumferential side of the first fixed connection joint body, the bottom end of the first fixed connection joint extends into the top end of the first connection joint, and the bottom of the second convex ring portion is fixedly connected to the top end of the first connection joint; when the first connecting nut and the first fixed connection joint are tightened downward, the first connection joint and the second cylinder are tightened downward synchronously.

[0020] In a possible embodiment, the method for determining the first set gap is as follows: determining the head of the pump body according to the power and efficiency of the pump body, the flow rate and density of the medicinal liquid, and the acceleration of gravity; selecting the flow rate of the medicinal liquid according to the head of the pump body, and determining a first influence relationship between the flow rate of the medicinal liquid and the cross-sectional area of ​​the pipe composed of the inner cylinder and the outer cylinder; determining the outer diameter of the inner cylinder according to the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipe and the outer diameter of the inner cylinder and the inner diameter of the outer cylinder respectively, and the preset inner diameter of the outer cylinder, and determining the first set gap according to the outer diameter of the inner cylinder.

[0021] In a possible embodiment, the first connecting pipe is connected to the first connector of the three-way connector, the cable extends through the second connector of the three-way connector to be electrically connected to the signal processing device, and the pump body is connected to the third connector of the three-way connector through the second connecting pipe.

[0022] The beneficial effects of the embodiment of the present invention are as follows: external liquid medicine is injected into the medicine cartridge through the pipeline to replenish the liquid medicine inside the medicine cartridge. After the pump body works, the liquid medicine inside the medicine cartridge is extracted in turn through the liquid supply detection device and the three-way joint, and transported to the semiconductor equipment for subsequent process processing. At the same time, a sensor is provided on the liquid supply detection device, and the probe of the sensor is immersed in the liquid medicine in the medicine cartridge. While the liquid medicine is extracted through the body, the pH value of the liquid medicine can be detected in real time. The sensor transmits the collected pH value information to the signal processing device, and the signal processing device receives and analyzes the pH value information. When the pH value information changes and the change value exceeds the preset range, it indicates that the liquid medicine inside the medicine cartridge has failed. The alarm device on the signal processing device sounds an alarm, thereby reminding the operator to replace the failed liquid medicine, thereby avoiding the failed liquid medicine from being transported to the semiconductor equipment, and improving the quality of the subsequent processing process.

[0023] Furthermore, the pump head is determined by the pump power and efficiency, the density of the liquid medicine, and the acceleration of gravity. The liquid medicine flow rate can be selected based on the pump head. The liquid flow rate can further determine the cross-sectional area of ​​the first set gap. The cross-sectional area of ​​the first set gap can determine the outer diameter of the inner cylinder. Since the inner diameter of the outer cylinder can be selected as needed, the size of the first set gap can also be determined. In other words, the liquid medicine flow rate selected based on the pump head of different types of pumps is compatible, and the liquid medicine flow rate is also compatible with the first set gap. The liquid medicine flow rate has a good influence on the respective pump parameters (pump power and head) and the first set gap, ensuring that the selected liquid medicine flow rate is not too slow, resulting in low extraction efficiency, and also ensuring that the selected liquid medicine flow rate is not too fast, causing a significant impact on the internal structure of the liquid supply detection device.

[0024] The entire structure of the liquid supply detection device is factory-assembled. Subsequent installation into the housing requires only inserting the bottom end of the device into the cartridge and connecting the top end to the T-connector, making installation quick and easy. Furthermore, the liquid supply detection device prevents outside air from coming into contact with the sensor probe before use. A protective cap on the bottom reduces contact between the probe and air, thereby extending its lifespan. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 This is an overall structural diagram of a semiconductor liquid supply device for real-time pH detection according to an embodiment of the present invention;

[0027] Figure 2 This is a diagram showing the connection relationship between a liquid supply detection device and a pump body of a semiconductor liquid supply device for real-time pH detection according to an embodiment of the present invention;

[0028] Figure 3 For the embodiment of the present invention Figure 2 The main view;

[0029] Figure 4 For the embodiment of the present invention Figure 2 Side view of;

[0030] Figure 5 For the embodiment of the present invention Figure 4 Cross-section of the middle AA;

[0031] Figure 6 For the embodiment of the present invention Figure 5 Enlarged view of point A in the middle;

[0032] Figure 7 For the embodiment of the present invention Figure 5 Enlarged view of point B in the middle.

[0033] Reference numerals: 1, box body; 2, pump body; 3, liquid supply detection device;

[0034] 31. First tube assembly; 311. Inner tube; 312. Outer tube; 3121. First tube; 3122. Second tube; 313. First set gap; 314. First fixed plug; 3141. First raised ring; 3151. First sealing ring; 3152. Second sealing ring; 3153. Third sealing ring; 316. Abutment; 317. Second connecting hole; 318. Protective cover.

[0035] 32. Second tube assembly; 321. First connecting tube; 322. First connecting joint; 3221. First connecting hole; 323. Second connecting joint; 324. Second set gap; 325. Cable protective cover;

[0036] 33. Three-way connector; 331. First connector; 332. Second connector; 333. Third connector; 34. Sensor; 341. Probe; 35. Cable; 4. Signal processing device; 5. Sealing and fixing structure; 51. First fixed connection connector; 511. Second convex ring portion; 52. First connecting nut; 6. Second connecting pipe. DETAILED DESCRIPTION

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0040] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like indicate positions or locations based on the positions shown in the accompanying drawings, or the positions or locations in which the inventive product is typically placed when in use. These terms are intended solely to facilitate the description of the present invention and to simplify the description, and are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0041] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0042] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0043] The semiconductor industry requires very small amounts of solution, with flow rates almost always measured in SCCM (milliliters per minute), but the quality requirements for the solutions are extremely high. The stability of the pH value of acids and bases is related to ambient temperature, humidity, and air contact time. Acid and base solutions are typically supplied directly by the supplier in plastic barrels, which lack pH detection devices. Furthermore, in actual use, it is impossible to use up all the solution in the barrel at once. As time passes, the pH value changes. Failure to promptly detect whether the pH change exceeds the specified range could result in losses for the entire process line. Therefore, a liquid supply device has been designed that can monitor the pH changes of the stock solution in real time, even when the stock solution bottle lacks a pH detection device (which is almost never the case). This allows for the detection of pH changes over time.

[0044] like Figures 1 to 7As shown, a semiconductor liquid supply device for real-time pH detection in an embodiment of the present application includes: a housing 1, a cartridge, a pump body 2, a liquid supply detection device 3 and a signal processing device 4. The cartridge is located in the housing 1 and has liquid medicine input therein; the pump body 2 is disposed in the housing 1 and connected to the liquid supply detection device 3 to extract liquid medicine through the liquid supply detection device 3; the liquid supply detection device 3 includes: a first tube assembly 31, a second tube assembly 32, a three-way connector 33, a sensor 34 and a cable 35. The first tube assembly 31 is connected to the second tube assembly 32, the bottom end of the first tube assembly 31 extends into the cartridge, and the second tube assembly 32 is connected to the pump body 2 via the three-way connector 33.

[0045] The first tube assembly 31 includes: an inner tube 311 and an outer tube 312, the inner tube 311 is located inside the outer tube 312, the bottoms of the inner tube 311 and the outer tube 312 are both located inside the cartridge, and a first set gap 313 is formed between the outer circumferential side of the inner tube 311 and the inner circumferential side of the outer tube 312, the sensor 34 is arranged inside the inner tube 311, the bottom of the sensor 34 extends into the liquid medicine in the cartridge to detect the pH value of the liquid medicine, and the top of the sensor 34 is electrically connected to the signal processing device 4 via the cable 35; wherein, the first set gap 313 is indeed The determination method is as follows: the lift of the pump body 2 is determined based on the power and efficiency of the pump body 2, the flow rate and density of the liquid medicine, and the acceleration of gravity; the flow rate of the liquid medicine is selected based on the lift of the pump body 2, and a first influence relationship between the flow rate of the liquid medicine and the cross-sectional area of ​​the pipe formed by the inner cylinder 311 and the outer cylinder 312 is determined; based on the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipe and the outer diameter of the inner cylinder 311 and the inner diameter of the outer cylinder 312, and the preset inner diameter of the outer cylinder 312, the outer diameter of the inner cylinder 311 is determined, and the first set gap 313 is determined based on the outer diameter of the inner cylinder 311;

[0046] The first set gap 313 is determined as follows: the lift of the pump body 2 is determined by the power, flow rate, efficiency of the pump body 2 and the density of the liquid medicine; the cross-sectional area of ​​the liquid medicine passing through the first set gap 313 is determined based on the lift and flow rate of the pump body 2; the inner diameter of the inner cylinder 311 is determined based on the cross-sectional area and the inner diameter of the outer cylinder 312; and the first set gap 313 is determined based on the inner diameter of the outer cylinder 312 and the outer diameter of the inner cylinder 311.

[0047] The second tube assembly 32 includes: a first connecting tube 321, a first connecting joint 322, and a second connecting joint 323. The first connecting tube 321 and the outer tube 312 are arranged in the upper and lower directions, and the bottom end of the first connecting tube 321 is connected to the top end of the outer tube 312 through the first connecting joint 322. The cable 35 is also located inside the first connecting tube 321, and a second set gap 324 is defined between the cable 35 and the inner side wall of the first connecting tube 321. A first connecting hole 3221 is provided on the side wall of the first connecting joint 322 to connect the first set gap 313 and the second set gap 324. The second connecting joint 323 is connected to the side wall of the top of the first connecting tube 321, and the second connecting joint 323 is connected to the three-way joint 33.

[0048] After the pump body 2 is started, the medicine liquid inside the cartridge flows to the pump body 2 along the first set gap 313, the second set gap 324 and the three-way joint 33 in sequence; the signal processing device 4 receives and processes the pH value information, and controls its alarm device to alarm when the pH value of the medicine liquid changes beyond the preset value.

[0049] In the above embodiment, the first set gap 313 is formed by the gap between the inner tube 311 and the outer tube 312, and its cross-section is generally annular. The second set gap 324 is formed by the gap between the first connecting tube 321 and the cable protection sleeve 325 (the cable 35 is covered with the cable protection sleeve 325 to prevent the medical solution from contacting the cable 35 and the sensor body). Its cross-section is generally annular. A first fixed connection joint 51 is provided at the top of the inner tube 311 and the outer tube 312. The first fixed connection joint 51 connects the inner tube 311, the outer tube 312, and the first connecting tube 321. The bottom of the second set gap 324 and the top of the first set gap 313 are located on the inner and outer sides of the first fixed connection joint 51, respectively. A plurality of first connection holes 3221 are provided on the outer circumference of the first fixed connection joint 51, thereby connecting the first set gap 313 and the second set gap 324.

[0050] The external liquid medicine is injected into the medicine cartridge through the pipeline to replenish the liquid medicine inside the medicine cartridge. After the pump body 2 is working, the liquid medicine inside the medicine cartridge is extracted in turn through the liquid supply detection device 3 and the three-way connector 33, and transported to the semiconductor equipment for subsequent process processing. At the same time, a sensor 34 is provided on the liquid supply detection device 3. The probe 341 of the sensor 34 is immersed in the liquid medicine in the medicine cartridge. While the liquid medicine is extracted through the pump body 2, the pH value of the liquid medicine can be detected in real time. The sensor 34 transmits the collected pH value information to the signal processing device 4. The signal processing device 4 receives and analyzes the pH value information. When the pH value information changes and the change value exceeds the preset range, it indicates that the liquid medicine inside the medicine cartridge has failed. The alarm device on the signal processing device 4 sounds an alarm, thereby reminding the operator to replace the failed liquid medicine.

[0051] Furthermore, the size of the first set gap 313 and the flow rate of the liquid determine the speed of liquid delivery of the liquid supply detection device 3, affecting the cross-sectional area of ​​the pipe formed by the inner tube 311 and the outer tube 312, and the flow rate (Q) = flow rate (v). The flow rate (v) in the embodiment of the present application is pre-selected, specifically selected based on the head of the pump body 2. After the flow rate is selected, the outer diameter of the inner tube 311 can be calculated based on the relationship between the flow rate (Q) and the flow rate (v) and the pre-set inner diameter of the outer tube 312 (that is, the inner diameter of the outer tube 312 is a fixed value), and then the first set gap 313 can be calculated. The above-mentioned head can also be obtained by calculation. The specific calculation is as follows:

[0052] First, determine the lift of the pump body 2. The lift of the pump body 2 can be determined by the following formula: Pump power (P) = flow rate (Q) × lift (H) × density (the density of the liquid medicine can be the density of water) × gravitational acceleration (g) ÷ efficiency (pump loss, pipeline loss η).

[0053] Take the pump body 2 power P = 20 watts, flow rate Q = 1 liter / minute = 1 / 60 cubic meter / second, density ρ = 1000 kg / cubic meter, gravitational acceleration g = 9.8 m / square second, and efficiency η = 75% = 0.75 as an example.

[0054] 20=(1 / 60)×H×1000×9.8÷0.75, the solution is H≈9.18mm.

[0055] Then, the outer diameter of the inner cylinder 311 is determined: the outer diameter of the inner cylinder 311 can be determined by the flow rate of the pump body 2 .

[0056] Flow rate (Q) = flow velocity (v) × pipe cross-sectional area (A), A = π × (d / 2)^2 (d is the pipe diameter).

[0057] The flow rate is 0.5m / s, 1 / 60000=0.5×A.

[0058] Solving the equation, we can get A≈0.000333m^2=333mm^2.

[0059] The inner diameter of the outer cylinder 312 is set to 50 mm according to the size requirement, so A=(D / 2)^2-(d / 2)^2;

[0060] 333=(50 / 2)^2-(d / 2)^2, r≈45. Taking pressure loss into consideration, the outer diameter of the inner cylinder 311 is 40 mm.

[0061] The second set gap 324 is formed by the gap between the first connecting tube 321 and the cable protective cover 325. The outer diameters of the cable 35 and the cable protective cover 325 are basically determined. The second set gap 324 is mainly determined by the inner diameter of the first connecting tube 321. Therefore, you only need to select the inner diameter of the first connecting tube 321 according to your needs.

[0062] In the semiconductor liquid supply device for real-time pH detection according to the embodiment of the present application, the first tube body assembly 31 also includes a first fixed plug 314, a first sealing ring 3151 and a second sealing ring 3152; the first fixed plug 314 is arranged at the bottom end of the inner cylinder 311, and the sensor 34 is located inside the first fixed plug 314; the first fixed plug 314 is sleeved with a first sealing ring 3151, so as to be sealed and connected to the inner circumferential side of the inner cylinder 311 through the first sealing ring 3151; the sensor body of the sensor 34 is sleeved with a second sealing ring 3152, so as to be sealed and connected to the inner circumferential side of the first fixed plug 314 through the second sealing ring 3152; the probe 341 of the sensor 34 is located below the second sealing ring 3152 for contacting with the liquid medicine inside the medicine cartridge.

[0063] In conjunction with the above embodiment, the first fixed plug 314 is disposed at the bottom of the inner cylinder 311 to achieve fixed installation of the sensor 34. For example, an internal threaded portion is disposed at the top of the first fixed plug 314, and an external threaded portion is disposed at the corresponding position of the sensor 34, thereby achieving a threaded connection between the two, thereby achieving the installation and fixation of the sensor 34. The first sealing ring 3151 is provided to effectively seal the gap between the inner cylinder 311 and the first fixed plug 314, preventing the medical solution from passing through the gap to contact the upper portion of the sensor and thereby corroding the sensor. Similarly, the second sealing ring 3152 is provided to effectively seal the gap between the sensor 34 and the first fixed plug 314, preventing the medical solution from passing through the gap to contact the upper portion of the sensor 34 and thereby corroding the sensor 34.

[0064] In the semiconductor liquid supply device for real-time pH detection according to the embodiment of the present application, the outer cylinder 312 includes a first cylinder 3121 and a second cylinder 3122, and the first cylinder 3121 and the second cylinder 3122 are respectively arranged opposite to each other and connected in the up and down directions; the first fixed plug 314 includes a first plug body and a first convex ring portion 3141, and the first convex ring portion 3141 is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion 3141 and the inner circumferential side surface of the first cylinder 3121; the top end of the second cylinder 3122 also extends into the interior of the first cylinder 3121, and abuts against the bottom of the first convex ring portion 3141, and there is a gap between the outer circumferential side surface of the top end of the second cylinder 3122 and the inner circumferential side surface of the first cylinder 3121.

[0065] In conjunction with the above embodiment, the first barrel 3121 and the second barrel 3122 are coaxially arranged and have the same outer diameter. The length of the second barrel 3122 is much smaller than that of the first barrel 3121. The second barrel 3122 and the first barrel 3121 are fixedly connected together, such as by bonding or welding. Considering that all components of the liquid supply detection device 3 are made of corrosion-resistant PVC material, bonding is preferably used to connect the second barrel 3122 and the first barrel 3121. The second barrel 3122 is in surface contact with the first convex ring portion 3141 of the first fixed plug 314, providing a mounting position for the first fixed plug 314. The gap between the outer circumferential side of the first convex ring portion 3141 and the inner circumferential side of the first cylinder 3121, the gap between the outer circumferential side of the top end of the second cylinder 3122 and the inner circumferential side of the first cylinder 3121, and the gap between the second cylinder 3122 and the inner cylinder 311 together constitute a first set gap 313, through which the medicine liquid flows from bottom to top.

[0066] In the semiconductor liquid supply device for real-time pH detection in the embodiment of the present application, the second cylinder 3122 is provided with upper and lower openings, the probe 341 extends into the interior of the second cylinder 3122, the second cylinder 3122 is immersed in the liquid medicine, and a second connecting hole 317 is provided on the side wall of the top end of the second cylinder 3122, through which the liquid medicine flows into the first set gap 313.

[0067] In the semiconductor liquid supply device for real-time pH detection in the embodiment of the present application, a first step is provided at the bottom of the first cylinder 3121, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder 3122, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder 3121 and the top of the second cylinder 3122 are connected and cooperated with each other through the first step and the second step respectively; the top of the second step of the second cylinder 3122 is also provided with an abutment portion 316, which extends into the interior of the first cylinder 3121 and abuts against the bottom of the first convex ring portion 3141; the side wall of the abutment portion 316 is provided with a second connecting hole 317, and there is a gap between the outer circumferential side surface of the abutment portion 316 and the inner circumferential side surface of the first cylinder 3121.

[0068] In the semiconductor liquid supply device for real-time pH detection according to an embodiment of the present application, the first tube assembly 31 further includes a protective cover 318 , which is docked with the bottom of the second cylinder 3122 to seal and protect the probe 341 located inside the second cylinder 3122 .

[0069] In conjunction with the above embodiment, when the entire liquid supply device is not in use, the protective cover 318 is installed on the second barrel 3122 to isolate the probe 341 from the external environment, preventing the probe 341 from becoming ineffective due to prolonged contact with air, thereby extending the service life of the probe 341. When the entire liquid supply device is in use, the protective cover 318 can be removed from the second barrel 3122.

[0070] In the semiconductor liquid supply device for real-time pH detection in an embodiment of the present application, a first threaded portion is provided on the outer circumferential side surface of the top of the protective cover 318, and a second threaded portion is provided on the inner circumferential side surface of the second cylinder 3122. The top of the protective cover 318 extends into the interior of the second cylinder 3122 and the two are threadedly connected; a second shoulder portion is provided on the outer circumferential side surface of the middle part of the protective cover 318, and the second shoulder portion is arranged opposite to the bottom of the second cylinder 3122, and the bottom of the second cylinder 3122 abuts against the second shoulder portion.

[0071] In the semiconductor liquid supply device for real-time pH detection according to an embodiment of the present application, the first tube body assembly 31 also includes a third sealing ring 3153, which is sleeved on the outer circumferential side of the bottom of the first plug body. The bottom of the first plug body and the probe 341 extend into the protective cover 318, and the outer circumferential side of the bottom of the first plug body is sealed with the inner circumferential side of the top of the protective cover 318 through the third sealing ring 3153.

[0072] The semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the second tube body assembly 32 also includes a cable protection sleeve 325, the cable protection sleeve 325 is sleeved on the outside of the cable 35, and the bottom of the cable protection sleeve 325 is in contact with the top of the sensor body; the first connecting joint 322 is threadedly connected to the top of the second cylinder 3122; the outer circumferential side surface of the top of the inner cylinder 311 is provided with a first shoulder portion, the bottom of the first connecting joint 322 is arranged opposite to the first shoulder portion, and when the first connecting joint 322 and the second cylinder 3122 are tightened downward, the first connecting joint 322 is screwed into the second cylinder 3122. The bottom of a connecting joint 322 is pressed against the top of the first shoulder portion and a downward pre-tightening force is applied to the inner cylinder 311 through the first shoulder portion, so that the bottom of the inner cylinder 311 is pressed against the top of the first convex ring portion 3141; the outer diameter of the top of the inner cylinder 311 increases from top to bottom, and the bottom of the cable protective sleeve 325 is sleeved on the top of the inner cylinder 311. When the first connecting joint 322 and the second cylinder 3122 are tightened downward, the inner circumferential side surface of the first connecting joint 322 presses the cable protective sleeve 325 against the top of the inner cylinder 311 in the direction toward the cable 35.

[0073] The semiconductor liquid supply device for real-time pH detection according to the embodiment of the present application has multiple device connection points with a sealing fixing structure 5; the multiple device connection points include at least the connection point between the outer cylinder 312 and the first connecting tube 321, the connection point between the three-way joint 33 and the first connecting tube 321, the connection point between the three-way joint 33 and the pump body 2, and the connection point between the inner cylinder 311 and the cable protective cover 325;

[0074] Each set of connections is provided with a first fixed connection joint 51 and a first connection nut 52; the first connection nut 52 is sleeved on the first fixed connection joint 51 or respectively sleeved on the outer circumferential side of the first fixed connection joint 51 and the cable protective cover 325, and the first fixed connection joint 51 is threadedly connected to the first connection nut 52; the outer diameter of the top end of the first fixed connection joint 51 gradually decreases from bottom to top, and the cable protective cover 325 is sleeved on the top end of the first fixed connection joint 51; when the first connection nut 52 and the first fixed connection joint 51 are tightened downward, the cable protective cover 325 is pressed against the top end of the first fixed connection joint 51.

[0075] In the semiconductor liquid supply equipment for real-time pH detection in the embodiment of the present application, the first fixed connection joint 51 includes a first fixed connection joint body and a second convex ring portion 511; the second convex ring portion 511 is arranged on the outer circumferential side of the first fixed connection joint body, and the bottom end of the first fixed connection joint 51 extends into the top end of the first connection joint 322, and the bottom of the second convex ring portion 511 is fixedly connected to the top end of the first connection joint 322; when the first connecting nut 52 and the first fixed connection joint 51 are tightened downward, the first connection joint 322 and the second cylinder 3122 are tightened downward synchronously.

[0076] In the semiconductor liquid supply device for real-time pH detection in an embodiment of the present application, the first connecting tube 321 is connected to the first connector 331 of the three-way connector 33, the cable 35 extends out of the second connector 332 of the three-way connector 33 to be electrically connected to the signal processing device 4, and the pump body 2 is connected to the third connector 333 of the three-way connector 33 through the second connecting tube 6.

[0077] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A semiconductor liquid supply device for real-time pH detection, characterized in that: include: A box body, a medicine cartridge, a pump body, a liquid supply detection device and a signal processing device, wherein the medicine cartridge is located in the box body and has liquid medicine input therein; The pump body is disposed in the box body and connected to the liquid supply detection device to extract the liquid medicine through the liquid supply detection device; The liquid supply detection device includes: a first tube assembly, a second tube assembly, a three-way joint, a sensor and a cable, the first tube assembly is connected to the second tube assembly, the bottom end of the first tube assembly extends into the cartridge, and the second tube assembly is connected to the pump body through the three-way joint; The first tube assembly includes: an inner tube and an outer tube, the inner tube is located inside the outer tube, the bottoms of the inner tube and the outer tube are both located inside the cartridge, and a first set gap is defined between the outer circumferential side of the inner tube and the inner circumferential side of the outer tube, the sensor is disposed inside the inner tube, the bottom of the sensor extends into the liquid medicine in the cartridge for detecting the pH value of the liquid medicine, and the top of the sensor is electrically connected to the signal processing device via the cable; The second tube body assembly includes: a first connecting tube, a first connecting joint, and a second connecting joint; the first connecting tube and the outer tube are arranged in the upper and lower directions respectively, and the bottom end of the first connecting tube is connected to the top end of the outer tube through the first connecting joint; the cable is also located inside the first connecting tube, and a second set gap is defined between the cable and the inner side wall of the first connecting tube; a first connecting hole is provided on the side wall of the first connecting joint to connect the first set gap and the second set gap; the second connecting joint is connected to the side wall of the top of the first connecting tube, and the second connecting joint is connected to the three-way joint; After the pump body is started, the medicine liquid inside the cartridge flows toward the pump body along the first set gap, the second set gap and the three-way joint in sequence; when the signal processing device receives and processes the pH value information and controls its alarm device to alarm when the pH value of the medicine liquid changes beyond a preset value.

2. The semiconductor liquid supply device for real-time pH detection according to claim 1, characterized in that: The first tube body assembly also includes a first fixed plug, a first sealing ring and a second sealing ring; the first fixed plug is arranged at the bottom end of the inner cylinder, and the sensor is located inside the first fixed plug; the first sealing ring is sleeved on the first fixed plug to be sealed and connected to the inner circumferential side of the inner cylinder through the second sealing ring; the second sealing ring is sleeved on the sensor body of the sensor to be sealed and connected to the inner circumferential side of the first fixed plug through the second sealing ring; the probe of the sensor is located below the second sealing ring for contacting the medicine inside the cartridge.

3. The semiconductor liquid supply device for real-time pH detection according to claim 2, characterized in that: The outer cylinder includes a first cylinder body and a second cylinder body, and the first cylinder body and the second cylinder body are respectively arranged opposite to each other and connected in the up and down directions; the first fixed plug includes a first plug body and a first convex ring portion, and the first convex ring portion is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion and the inner circumferential side surface of the first cylinder body; the top end of the second cylinder body also extends into the interior of the first cylinder body and abuts against the bottom of the first convex ring portion, and there is a gap between the outer circumferential side surface of the top end of the second cylinder body and the inner circumferential side surface of the first cylinder body.

4. The semiconductor liquid supply device for real-time pH detection according to claim 3, characterized in that: The second cylinder is provided with upper and lower openings, the probe extends into the interior of the second cylinder, the second cylinder is immersed in the liquid medicine, and a second connecting hole is provided on the side wall of the top end of the second cylinder.

5. The semiconductor liquid supply device for real-time pH detection according to claim 3, characterized in that: A first step is provided at the bottom of the first cylinder, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder and the top of the second cylinder are connected and cooperated with each other through the first step and the second step respectively; an abutment is also provided at the top of the second step of the second cylinder, and the abutment extends into the interior of the first cylinder and abuts with the bottom of the first convex ring portion; a second connecting hole is provided on the side wall of the abutment, and a gap is left between the outer circumferential side surface of the abutment and the inner circumferential side surface of the first cylinder.

6. The semiconductor liquid supply device for real-time pH detection according to claim 3, characterized in that: The first tube assembly further includes a protective cover, which is connected to the bottom of the second cylinder to seal and protect the probe located inside the second cylinder.

7. The semiconductor liquid supply device for real-time pH detection according to claim 6, characterized in that: The outer circumferential side surface of the top end of the protective cover is provided with a first threaded portion, and the inner circumferential side surface of the second cylinder is provided with a second threaded portion, the top end of the protective cover extends into the interior of the second cylinder and the two are threadedly connected; the outer circumferential side surface of the middle part of the protective cover is provided with a second shoulder portion, the second shoulder portion is arranged opposite to the bottom of the second cylinder, and the bottom of the second cylinder abuts against the second shoulder portion.

8. The semiconductor liquid supply device for real-time pH detection according to claim 7, characterized in that: The first tube body assembly also includes a third sealing ring, which is sleeved on the outer circumferential side of the bottom of the first plug body. The bottom of the first plug body and the probe extend into the protective cover, and the outer circumferential side of the bottom of the first plug body is sealed with the inner circumferential side of the top of the protective cover through the third sealing ring.

9. The semiconductor liquid supply device for real-time pH detection according to claim 3, characterized in that: The second tube body assembly also includes a cable protective sleeve, which is sleeved on the outside of the cable, and the bottom of the cable protective sleeve abuts the top of the sensor body; the first connecting joint is threadedly connected to the top of the second cylinder; the outer circumferential side surface of the top of the inner cylinder is provided with a first shoulder portion, and the bottom of the first connecting joint is arranged opposite to the first shoulder portion up and down, and when the first connecting joint and the second cylinder are tightened downward, the bottom of the first connecting joint is pressed against the top of the first shoulder portion and the inner cylinder applies a downward pre-tightening force through the first shoulder portion, so that the bottom of the inner cylinder is pressed against the top of the first convex ring portion; the outer diameter of the top of the inner cylinder increases from top to bottom, and the bottom of the cable protective sleeve is sleeved on the top of the inner cylinder, and when the first connecting joint and the second cylinder are tightened downward, the inner circumferential side surface of the first connecting joint presses the cable protective sleeve against the top of the inner cylinder in the direction toward the cable.

10. The semiconductor liquid supply device for real-time pH detection according to claim 9, characterized in that: The multiple device connections of the semiconductor liquid supply equipment have a sealed fixed structure; the multiple device connections at least include the connection between the outer cylinder and the first connecting pipe, the connection between the three-way joint and the first connecting pipe, the connection between the three-way joint and the pump body, and the connection between the inner cylinder and the cable protective sleeve; Each set of connections is provided with a first fixed connection joint and a first connection nut; the first connection nut is sleeved on the first fixed connection joint or respectively sleeved on the outer circumferential side surfaces of the first fixed connection joint and the cable protective sleeve, and the first fixed connection joint is threadedly connected to the first connection nut; the outer diameter of the top end of the first fixed connection joint gradually decreases from bottom to top, and the cable protective sleeve is sleeved on the top end of the first fixed connection joint; when the first connection nut and the first fixed connection joint are tightened downward, the cable protective sleeve is pressed against the top end of the first fixed connection joint.

11. The semiconductor liquid supply device for real-time pH detection according to claim 10, characterized in that: The first fixed connection joint includes a first fixed connection joint body and a second convex ring portion; the second convex ring portion is arranged on the outer circumferential side of the first fixed connection joint body, the bottom end of the first fixed connection joint extends into the top end of the first connection joint, and the bottom of the second convex ring portion is fixedly connected to the top end of the first connection joint; when the first connecting nut and the first fixed connection joint are tightened downward, the first connection joint and the second cylinder are tightened downward synchronously.

12. The semiconductor liquid supply device for real-time pH detection according to any one of claims 1 to 11, characterized in that: The method for determining the first set gap is as follows: determine the head of the pump body according to the power and efficiency of the pump body, the flow rate and density of the medicinal liquid, and the acceleration of gravity; select the flow rate of the medicinal liquid according to the head of the pump body, and determine a first influence relationship between the flow rate of the medicinal liquid and the cross-sectional area of ​​the pipe composed of the inner tube and the outer tube; determine the outer diameter of the inner tube according to the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipe and the outer diameter of the inner tube and the inner diameter of the outer tube respectively, and the preset inner diameter of the outer tube, and determine the first set gap according to the outer diameter of the inner tube.

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