Decoupling type XYZ three-axis motion platform structure

Abstract

A decoupling type XYZ three-axis motion platform structure comprises an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism, a decoupling mechanism and a hedging damping mechanism. The X-axis mechanism comprises an X-axis base, an X-axis main sliding rail, an X-axis main sliding seat, an X-axis auxiliary sliding rail and an X-axis auxiliary sliding seat; the Y-axis mechanism comprises a Y-axis base, a Y-axis main sliding rail, a Y-axis main sliding seat, a Y-axis auxiliary sliding rail and a Y-axis auxiliary sliding seat; the Z-axis mechanism comprises a Z-axis base, a Z-axis main sliding rail and a Z-axis main sliding seat. A Y-axis base is hung on the X-axis main sliding seat, and a mounting bonding head is mounted on the Y-axis auxiliary sliding seat; and the Z-axis base is fixedly connected with an X-axis auxiliary sliding seat. The decoupling mechanism comprises a decoupling sliding rail and a decoupling bearing seat which are in sliding fit; the decoupling sliding rail is fixedly arranged on the Z-axis main sliding seat; a pair of bearings is arranged on the decoupling bearing seat and makes contact with the upper surface and the lower surface of the decoupling sliding rail correspondingly. And the decoupling bearing seat is connected with the mounting bonding head through a connecting rod. According to the platform mechanism, the operation stability of the platform is guaranteed through the decoupling mechanism and the hedging damping mechanism.

Description

Technical Field

[0001] The present invention relates to the field of die bonding and chip placement equipment, and in particular to a decoupled XYZ three-axis motion platform structure. Background Art

[0002] In the chip bonding industry, an XYZ three-axis motion platform is required to drive the placement head to move so that the chip adsorbed on the placement head nozzle can be placed on the substrate. For the traditional XYZ three-axis motion platform, when the Z-axis base and the Y-axis base move at a low frequency along the X-axis direction, the stability of the platform is not greatly affected due to the low frequency of reciprocating motion; however, the Z-axis mechanism of the traditional XYZ three-axis motion platform is fixed as a whole on the Y-axis main slide in the Y-axis mechanism. When the Z-axis mechanism follows the Y-axis main slide to make high-frequency reciprocating motion in the Y-axis direction, due to the large overall weight of the Z-axis mechanism, the high-frequency reciprocating motion will cause the instability of the three-axis motion platform, which will cause inaccurate positioning of the placement head and seriously reduce the chip placement accuracy. Summary of the invention

[0003] In view of the deficiencies in the prior art, the present invention provides a decoupled XYZ three-axis motion platform structure to overcome the deficiencies in the prior art.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0005] A decoupled XYZ three-axis motion platform structure comprises an X-axis mechanism, a Y-axis mechanism and a Z-axis mechanism, wherein the X-axis mechanism, the Y-axis mechanism and the Z-axis mechanism are combined into a three-axis motion platform which reciprocates along the X-axis, the Y-axis and the Z-axis, and a mounting header is butted on the decoupling mechanism and the Y-axis mechanism.

[0006] The X-axis mechanism comprises an X-axis base fixedly arranged on the frame; the bottom of the X-axis base is provided with a slidingly matched X-axis main slide rail and an X-axis main slide seat in the left and right directions, the X-axis main slide rail is fixed on the X-axis base, and the Y-axis mechanism is hoisted on the X-axis main slide seat;

[0007] The Y-axis mechanism comprises a Y-axis base hoisted on the X-axis main slide; a Y-axis main slide rail and a Y-axis main slide seat are provided on the Y-axis base in the front-back direction; the Y-axis main slide rail is fixed on the Y-axis base, a Y-axis auxiliary slide rail and a Y-axis auxiliary slide seat are vertically provided on the Y-axis main slide seat, the Y-axis auxiliary slide rail is fixed on the Y-axis main slide seat, and a mounting head is installed on the Y-axis auxiliary slide seat;

[0008] The Z-axis mechanism comprises a Z-axis base; a Z-axis main slide rail and a Z-axis main slide seat are vertically arranged on the Z-axis base, the Z-axis main slide rail is fixed on the Z-axis base, and the Z-axis main slide seat is connected to the decoupling mechanism.

[0009] Furthermore, the decoupling mechanism includes a decoupling slide rail and a decoupling bearing seat that are slidably matched; the decoupling slide rail is fixedly arranged on the Z-axis main slide in the front and rear directions; a pair of bearings are arranged on the decoupling bearing seat at intervals up and down, and the pair of bearings are respectively in contact with the upper and lower surfaces of the decoupling slide rail; the decoupling bearing seat is connected to the mounting head through a vertically arranged connecting rod.

[0010] Furthermore, an X-axis auxiliary slide rail and an X-axis auxiliary slide seat that are slidably matched are arranged on the top surface of the X-axis base in the left and right directions. The X-axis auxiliary slide rail is fixed on the X-axis base, and the X-axis auxiliary slide seat is connected to the Z-axis base.

[0011] Furthermore, a decoupled XYZ three-axis motion platform structure in the present case also includes a counter-shock absorption mechanism; the counter-shock absorption mechanism includes a shock absorbing base, and the shock absorbing base is provided with a slidably matched shock absorbing slide rail and a shock absorbing slide seat.

[0012] Furthermore, a balancing block is arranged on the shock-absorbing sliding seat.

[0013] Preferably, the shock-absorbing slide is driven by a shock-absorbing drive motor, and the shock-absorbing drive motor drives the shock-absorbing slide to perform an impact movement in the opposite direction to the Y-axis auxiliary slide.

[0014] Preferably, the impact damping mechanism and the three-axis motion platform are installed side by side on the rack ceiling.

[0015] Preferably, an X-axis driving motor is provided at the outer end of the X-axis base.

[0016] Preferably, the Y-axis main slide is driven by a Y-axis drive motor.

[0017] Preferably, a Z-axis driving motor is provided on the Z-axis base.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1) In this case, a decoupled XYZ three-axis motion platform structure is used. The decoupling mechanism is used as an intermediate docking component to dock the Z-axis mechanism and the Y-axis mechanism respectively through the decoupling mechanism, so that the heavy weight components in the Z-axis mechanism (such as the Z-axis base, the Z-axis drive motor, the Z-axis main slide and the Z-axis main slide) are installed on the Y-axis base and the X-axis auxiliary slide respectively, so as to avoid the heavy weight components in the Z-axis mechanism following the Y-axis main slide to make high-frequency reciprocating motion and cause the instability of the three-axis motion platform, thereby ensuring the accuracy of the placement of the bonding head and effectively enhancing the product processing accuracy.

[0020] 2) A decoupled XYZ three-axis motion platform structure is provided in this case, wherein the X-axis mechanism is connected to the Y-axis mechanism and the Z-axis mechanism respectively through a double-track method. Specifically, the X-axis main slide is connected to the Y-axis base, and the X-axis auxiliary slide is connected to the Z-axis base. The double-track method shares the weight of the Y-axis mechanism and the Z-axis mechanism, further enhancing the stability of the three-axis motion platform during reciprocating motion.

[0021] 3) In this case, a decoupled XYZ three-axis motion platform structure is provided. By setting a balancing block in the hedging and shock-absorbing mechanism, the shock-absorbing drive motor drives the balancing block on the shock-absorbing slide to perform a hedging motion in the opposite direction of the Y-axis auxiliary slide, thereby damping the vibration of the three-axis motion platform and further ensuring the stability of the high-frequency reciprocating operation of the three-axis motion platform when processing products.

[0022] In order to more clearly understand the present invention, preferred embodiments of the present invention will be described below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 It is a schematic diagram of the installation position of the decoupling mechanism of the present invention.

[0025] Figure ID:

[0026] 11-X-axis base, 13-X-axis main slide, 15-X-axis auxiliary slide, 16-X-axis drive motor; 21-Y-axis base, 22-Y-axis main slide, 23-Y-axis main slide, 25-Y-axis auxiliary slide; 31-Z-axis base, 33-Z-axis main slide, 34-Z-axis drive motor; 41-decoupling slide, 42-decoupling bearing seat, 421-bearing, 43-connecting rod; 51-shock-absorbing base, 52-shock-absorbing slide, 53-balance block; 9-mounting header. DETAILED DESCRIPTION

[0027] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0028] In addition, if there are terms such as "first" and "second", they are only used for descriptive purposes, mainly to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components, and cannot be understood as indicating or implying relative importance.

[0029] In addition, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installed", "provided with", "mounted / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements; for ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] See also Figure 1-2 The present invention provides a decoupled XYZ three-axis motion platform structure, comprising an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism, a decoupling mechanism, and a counter-shock absorbing mechanism; the X-axis mechanism, the Y-axis mechanism, and the Z-axis mechanism are combined into a three-axis motion platform that reciprocates along the X-axis, the Y-axis, and the Z-axis, the three-axis motion platform and the counter-shock absorbing mechanism are installed side by side on the frame ceiling, the counter-shock absorbing mechanism performs shock absorption on the three-axis motion platform through the counter-shock motion, thereby ensuring the stability of the operation of the three-axis motion platform when processing products, thereby also ensuring the accuracy of the processed products; the decoupling mechanism is connected to the Y-axis mechanism and the Z-axis mechanism; the decoupling mechanism and the Y-axis mechanism are connected to a mounting head (9), and the three-axis motion platform drives the mounting head (9) to reciprocate along the X-axis, the Y-axis, and the Z-axis to process the products.

[0031] The X-axis mechanism comprises an X-axis base (11) fixedly arranged on a frame; a slidingly matched X-axis main slide rail and an X-axis main slide seat (13) are arranged on the bottom of the X-axis base (11) along the left-right direction, the X-axis main slide rail is fixed on the X-axis base (11), and a Y-axis mechanism is suspended on the X-axis main slide seat (13); a slidingly matched X-axis auxiliary slide rail and an X-axis auxiliary slide seat (15) are arranged on the top surface of the X-axis base (11) along the left-right direction, the X-axis auxiliary slide rail is fixed on the X-axis base (11), and the X-axis auxiliary slide seat (15) is connected to the Z-axis mechanism; an X-axis driving motor (16) is arranged at the outer end of the X-axis base (11), and the output shaft of the X-axis driving motor (16) is connected to the Y-axis mechanism and drives the Y-axis mechanism to reciprocate along the X-axis direction.

[0032] The Y-axis mechanism comprises a Y-axis base (21) suspended on an X-axis main slide (13), the Y-axis base (21) follows the X-axis main slide (13) to make reciprocating motion in the X-axis direction; a Y-axis main slide rail (22) and a Y-axis main slide (23) are provided on the Y-axis base (21) in a front-to-back direction, the Y-axis main slide rail (22) is fixed on the Y-axis base (21), and the Y-axis main slide (23) is driven by a Y-axis driving motor (not shown); a Y-axis auxiliary slide rail and a Y-axis auxiliary slide (25) are provided on the Y-axis main slide (23) in a vertical direction, the Y-axis auxiliary slide rail is fixed on the Y-axis main slide (23), and a mounting head (9) is installed on the Y-axis auxiliary slide (25), so that the mounting head (9) can follow the Y-axis main slide (23) and the Y-axis auxiliary slide (25) to make reciprocating motion in the Y-axis direction or the Z-axis direction.

[0033] The Z-axis mechanism comprises a Z-axis base (31), the Z-axis base (31) is fixedly connected to an X-axis auxiliary slide (15), so that the Z-axis base (31) follows the X-axis auxiliary slide (15) to perform reciprocating motion in the X-axis direction; a Z-axis main slide rail and a Z-axis main slide (33) are vertically arranged on the Z-axis base (31), the Z-axis main slide rail is fixed on the Z-axis base (31), and the Z-axis main slide (33) is connected to a decoupling mechanism; a Z-axis drive motor (34) is arranged on the Z-axis base (31), the output end of the Z-axis drive motor (34) is connected to the Z-axis main slide (33), and the Z-axis drive motor (34) drives the Z-axis main slide (33) to perform reciprocating motion in the Z-axis direction.

[0034] The decoupling mechanism comprises a decoupling slide rail (41) and a decoupling bearing seat (42) that are slidably matched; the decoupling slide rail (41) is fixedly arranged on the Z-axis main slide seat (33) in the front-to-back direction, and follows the Z-axis main slide seat (33) to make reciprocating motion in the Z-axis direction; a pair of bearings (421) are arranged on the decoupling bearing seat (42) at intervals from top to bottom, and the pair of bearings (421) are respectively in contact with the upper and lower surfaces of the decoupling slide rail (41), so that the decoupling bearing seat (42) can slide forward and backward on the decoupling slide rail (41); the decoupling bearing seat (42) is connected to the mounting head (9) through a vertically arranged connecting rod (43), so that the decoupling bearing seat (42) follows the mounting head (9) to make synchronous reciprocating motion.

[0035] The impact damping mechanism comprises a shock absorbing base (51), on which a slidably matched shock absorbing slide rail and a shock absorbing slide seat (52) are arranged, and on which a balancing block (53) is arranged. The shock absorbing slide seat (52) is driven by a shock absorbing driving motor (not shown), and the shock absorbing driving motor drives the shock absorbing slide seat (52) to perform an impact motion in the opposite direction to the Y-axis auxiliary slide seat (25), thereby damping the vibration of the three-axis motion platform, and further ensuring the stability of the high-frequency reciprocating operation of the three-axis motion platform when processing products.

[0036] This case is a decoupled XYZ three-axis motion platform structure, its working principle or operation process is as follows:

[0037] 1. The decoupling mechanism is used as an intermediate docking component, and the Z-axis mechanism and the Y-axis mechanism are docked respectively through the decoupling mechanism, so that the heavy weight components in the Z-axis mechanism [such as the Z-axis base (31), the Z-axis drive motor (34), the Z-axis main slide rail and the Z-axis main slide (33)] are respectively installed on the Y-axis base (21) and the X-axis auxiliary slide (15), thereby preventing the heavy weight components in the Z-axis mechanism from following the Y-axis main slide (23) to make high-frequency reciprocating motion and causing instability of the three-axis motion platform.

[0038] 2. The movement process of the three-axis motion platform and the decoupling mechanism is:

[0039] Y-axis direction: the Y-axis driving motor drives the mounting head (9) on the Y-axis main slide (23) to make high-frequency reciprocating motion in the Y-axis direction, and at the same time, the mounting head (9) makes synchronous high-frequency reciprocating motion on the decoupling slide rail (41) through the decoupling bearing seat (42); during this process, the heavy weight components in the Z-axis mechanism remain stationary when the mounting head (9) reciprocates in the Y-axis direction;

[0040] Z-axis direction: the Z-axis driving motor (34) drives the decoupling slide rail (41) on the Z-axis main slide (33) to make reciprocating motion in the Z-axis direction, and the decoupling slide rail (41) drives the decoupling bearing seat (42) to reciprocate synchronously, thereby driving the mounting head (9) to reciprocate on the Y-axis auxiliary slide (25); during this process, when the mounting head (9) reciprocates in the Z-axis direction, other heavy weight components in the Z-axis mechanism except the Z-axis main slide (33) remain stationary;

[0041] X-axis direction: The X-axis drive motor (16) drives the Y-axis mechanism and the Z-axis mechanism to perform low-frequency reciprocating motion in the X-axis direction. Since it is a relatively low-frequency motion, it has almost no effect on the overall stability of the processing platform. In addition, the X-axis mechanism is also connected to the Y-axis mechanism and the Z-axis mechanism respectively through a double-track method, specifically, the X-axis main slide (13) is connected to the Y-axis base (21), and the X-axis auxiliary slide (15) is connected to the Z-axis base (31). The double-track method shares the weight of the Y-axis mechanism and the Z-axis mechanism, further ensuring the stability of the three-axis motion platform.

[0042] Compared with the prior art, a decoupled XYZ three-axis motion platform structure in this case ensures the stability of the platform operation through a decoupling mechanism and an impact shock-absorbing mechanism, and the X-axis mechanism is respectively connected to the Y-axis mechanism and the Z-axis mechanism through a double-track method. The double-track method shares the weight of the Y-axis mechanism and the Z-axis mechanism, further enhancing the stability of the three-axis motion platform during reciprocating motion.

[0043] The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A decoupled XYZ three-axis motion platform structure, comprising an X-axis mechanism, a Y-axis mechanism, and a Z-axis mechanism, wherein the X-axis mechanism, the Y-axis mechanism, and the Z-axis mechanism are combined into a three-axis motion platform that reciprocates along the X-axis, the Y-axis, and the Z-axis, and the decoupling mechanism and the Y-axis mechanism are butted against a mounting head (9), characterized in that: The X-axis mechanism comprises an X-axis base (11) fixedly arranged on a frame; a slidingly matched X-axis main slide rail and an X-axis main slide seat (13) are arranged at the bottom of the X-axis base (11) in the left and right directions; the X-axis main slide rail is fixed on the X-axis base (11); and the Y-axis mechanism is hoisted on the X-axis main slide seat (13); The Y-axis mechanism comprises a Y-axis base (21) suspended on an X-axis main slide (13); a Y-axis main slide rail (22) and a Y-axis main slide (23) are provided on the Y-axis base (21) in a front-to-back direction; the Y-axis main slide rail (22) is fixed on the Y-axis base (21); a Y-axis auxiliary slide rail and a Y-axis auxiliary slide (25) are provided on the Y-axis main slide (23) in a vertical direction; the Y-axis auxiliary slide rail is fixed on the Y-axis main slide (23); and a mounting header (9) is installed on the Y-axis auxiliary slide (25); The Z-axis mechanism comprises a Z-axis base (31); A Z-axis main slide rail and a Z-axis main slide seat (33) are vertically arranged on the Z-axis base (31); the Z-axis main slide rail is fixed on the Z-axis base (31); and the Z-axis main slide seat (33) is connected to the decoupling mechanism.

2. A decoupled XYZ three-axis motion platform structure according to claim 1, characterized in that: The decoupling mechanism comprises a decoupling slide rail (41) and a decoupling bearing seat (42) that are slidably matched; the decoupling slide rail (41) is fixedly arranged on the Z-axis main slide seat (33) in the front-back direction; a pair of bearings (421) are arranged on the decoupling bearing seat (42) at intervals in the upper and lower directions, and the pair of bearings (421) are respectively in contact with the upper and lower surfaces of the decoupling slide rail (41); the decoupling bearing seat (42) is connected to the mounting header (9) through a vertically arranged connecting rod (43).

3. The decoupled XYZ three-axis motion platform structure according to claim 2, characterized in that: An X-axis auxiliary slide rail and an X-axis auxiliary slide seat (15) that are slidably matched are arranged on the top surface of the X-axis base (11) in the left and right directions. The X-axis auxiliary slide rail is fixed on the X-axis base (11), and the X-axis auxiliary slide seat (15) is connected to the Z-axis base (31).

4. The decoupled XYZ three-axis motion platform structure according to claim 3, characterized in that: It also includes a counter-shock damping mechanism; the counter-shock damping mechanism includes a damping base (51), and the damping base (51) is provided with a damping slide rail and a damping slide seat (52) that are slidably matched.

5. The decoupled XYZ three-axis motion platform structure according to claim 4, characterized in that: A balancing block (53) is arranged on the shock-absorbing sliding seat (52).

6. The decoupled XYZ three-axis motion platform structure according to claim 5, characterized in that: The damping slide (52) is driven by a damping drive motor, and the damping drive motor drives the damping slide (52) to perform an impact movement in the opposite direction to the Y-axis auxiliary slide (25).

7. The decoupled XYZ three-axis motion platform structure according to claim 5, characterized in that: The impact damping mechanism and the three-axis motion platform are installed side by side on the frame ceiling.

8. The decoupled XYZ three-axis motion platform structure according to claim 5, characterized in that: An X-axis driving motor (16) is arranged at the outer end of the X-axis base (11).

9. The decoupled XYZ three-axis motion platform structure according to claim 5, characterized in that: The Y-axis main slide (23) is driven by a Y-axis driving motor.

10. The decoupled XYZ three-axis motion platform structure according to claim 5, characterized in that: A Z-axis driving motor (34) is arranged on the Z-axis base (31).

Images