Ultrasonic assisted leaching device and method based on production-type metal organic source chemical vapor deposition equipment

Abstract

The present invention relates to the field of ultrasonic leaching technology, specifically, to an ultrasonic assisted leaching device and method based on a production-type metal organic source chemical vapor deposition device, comprising a plurality of substrates of chemical vapor deposition equipment, a leaching barrel for placing the substrates, and an ultrasonic generator for emitting ultrasonic waves, wherein a fixing component for fixing the substrates is provided in the leaching barrel, a driving component for controlling the movement of the fixing component is provided outside the leaching barrel, and an air intake component is provided on the left side of the leaching barrel near the top. The device can simultaneously perform leaching and cleaning on multiple substrates at one time by setting a fixing component, and reciprocate under the action of the driving component to ensure that both the upper and lower surfaces of the substrates can be cleaned, thereby improving the cleaning effect; in addition, by setting an air intake component, air can be introduced during leaching to generate bubbles, and the bubbles can be broken and impacted by ultrasonic waves to accelerate the leaching of residues, and the substrate can be automatically ejected after the leaching and cleaning is completed, so as to facilitate removal.

Description

Technical Field

[0001] The invention belongs to the technical field of ultrasonic leaching, and in particular relates to an ultrasonic assisted leaching device and a method thereof based on production-type metal organic source chemical vapor deposition equipment. Background Art

[0002] Production-based metal organic chemical vapor deposition equipment (MOCVD) is an important semiconductor material production equipment. It uses gaseous metal organic compounds as source materials to carry out chemical reactions in the gas phase to deposit the required thin film materials on the substrate.

[0003] For example, the invention patent with publication number CN117845186A in the field of coating preparation technology discloses a chemical vapor deposition method for preparing a silicon carbide composite coating on single crystal silicon or polycrystalline silicon, wherein the chemical vapor deposition method for preparing a silicon carbide composite coating on single crystal silicon or polycrystalline silicon is implemented by a silicon substrate ultrasonic cleaning device, wherein the silicon substrate ultrasonic cleaning device comprises a shell, a first driving mechanism is arranged at the bottom inner side of the shell, a placing and lifting mechanism is arranged at the top of the first driving mechanism, a cleaning centrifugal mechanism is arranged at the top inner side of the shell, a trigger-type drainage mechanism is arranged on the left side of the cleaning centrifugal mechanism, and a second driving mechanism is arranged at the top of the shell and the top inner side of the shell.

[0004] Combining the above cases and actual situations, we found the following problems: After the MOCVD equipment is used many times, the substrate needs to be thoroughly cleaned to ensure production quality. In order to ensure the cleaning effect and avoid substrate damage, ultrasonic cleaning is usually used. However, in order to avoid collision between substrates, usually only one can be cleaned at a time, which is inefficient. In addition, when cleaning, the bottom surface is placed directly because it is difficult to directly contact the leaching solution, which can easily affect the cleaning effect. Summary of the invention

[0005] The object of the present invention is to provide an ultrasonic assisted leaching device and method based on a production-type metal organic source chemical vapor deposition device to solve the above-mentioned problems in the prior art.

[0006] To achieve the above-mentioned purpose, the present invention provides an ultrasonic assisted leaching device based on a production-type metal organic source chemical vapor deposition device, comprising a plurality of substrates of chemical vapor deposition devices, a leaching barrel for placing the substrates, and an ultrasonic generator for emitting ultrasonic waves, wherein the leaching barrel comprises a barrel body and symmetrically provided with extensions on the left and right sides of the barrel body, a fixing assembly for fixing the substrate is provided inside the leaching barrel, a driving assembly for controlling the movement of the fixing assembly is provided outside the leaching barrel, and an air intake assembly for assisting leaching is provided on the left side of the leaching barrel near the top;

[0007] The fixing assembly comprises an upper fixing structure, a lower fixing structure and a plurality of baffle structures, the upper fixing structure comprises an upper fixing plate and a plurality of upper placement holes regularly arranged on the upper fixing plate, the lower fixing structure comprises a lower fixing plate and a plurality of lower placement holes corresponding to the plurality of upper placement holes one by one, two sliding cavities are symmetrically arranged in the hole walls of the upper placement holes, the baffle structure is arranged in the corresponding sliding cavity, the baffle structure comprises a baffle and a limit plate fixed to the outer side of the corresponding baffle, a sliding rod is fixed to the middle part of the outer side wall of the sliding cavity, a first spring is sleeved on the part of the outer wall of the sliding rod located between the limit plate and the outer side wall of the corresponding sliding cavity, the upper fixing plate and the lower fixing plate are connected by setting a plurality of regularly distributed rebound structures, and the left and right sides of the upper fixing plate are fixedly connected with a transmission structure by setting a fixing rod;

[0008] The driving assembly includes a rotating structure that drives the fixed assembly to rotate and a vertical motion structure that drives the fixed assembly to move up and down. The rotating structure includes a first motor and an electromagnet fixed to the output shaft of the first motor. The vertical motion structure includes a second motor and a lifting mechanism symmetrically arranged on the left and right sides.

[0009] In the technical solution of the present invention, the inner end of the sliding rod passes through the corresponding limiting plate and extends into the corresponding baffle, the corresponding baffle is slidably connected to the corresponding sliding rod, the baffle extends out of the corresponding sliding cavity, and the upper surface of the baffle is in a concave arc shape.

[0010] In the technical solution of the present invention, push rods are symmetrically fixed at the front and rear ends of the left side wall of the limiting plate, an air cavity is provided in the upper fixed plate at a position corresponding to the position of the push rod, the left end of the push rod passes through the left side wall of the sliding cavity and extends into the corresponding air cavity, the push rod is adapted to the size of the corresponding air cavity and the two are slidably connected, and a connecting pipe is provided at the left end of the air cavity.

[0011] In the technical solution of the present invention, the rebound structure includes a tube sleeve whose top end is fixed to the bottom surface of the upper fixed plate and a pressure rod whose bottom end is fixed to the top surface of the lower fixed plate. The top end of the pressure rod extends into the corresponding tube sleeve and the two are slidably connected. The top end of the pressure rod is fixedly connected to the top plate, and a second spring is provided on the outer wall of the pressure rod located between the bottom surface of the tube sleeve and the bottom surface of the top plate.

[0012] In the technical solution of the present invention, the fixed rod passes through the corresponding side of the extension part and the corresponding transmission structure, the upper half of the extension part is provided with an active cavity for the transmission structure to move up and down, and a bracket for supporting the corresponding fixed rod is fixed in the middle of the inner side of the extension part. The transmission structure includes a transmission seat fixed to the corresponding fixed rod on the inner side and a magnet arranged in the transmission seat, a cavity is provided in the middle of the transmission seat, the magnet is arranged in the cavity, a limit rod is fixed in the middle of the inner wall of the cavity, the limit rod passes through the magnet and the two are slidably connected, the arc-shaped side wall of the magnet is provided with an outer protrusion embedded in the cavity, and the bracket and the electromagnet are located at the same height.

[0013] In the technical solution of the present invention, a mounting frame is provided on the front side of the extending part, and the lifting mechanism is arranged in the mounting frame. The lifting mechanism includes a first transmission rod horizontally arranged left and right, a second transmission rod horizontally arranged front and back, and a vertically placed threaded rod arranged at the rear end of the second transmission rod. Transmission is performed by setting a gear set between the second motor output shaft and the first transmission rod, between the first transmission rod and the corresponding second transmission rod, and between the second transmission rod and the corresponding threaded rod. A lifting rod is provided above the threaded rod, the top end of the threaded rod extends into the lifting rod and the two are threadedly connected, a support plate for supporting the transmission seat is fixed to the top of the lifting rod, and the side walls of the lifting rod are symmetrically provided with protruding flanges, and the upper half of the lifting rod extends into the active cavity.

[0014] In the technical solution of the present invention, the air intake assembly includes an air pump, a main pipeline connected to the air pump, and a second air intake structure and a first air intake structure located on the front and rear sides of the main pipeline. The second air intake structure includes a second air intake pipe connected to the main pipeline at the rear end, a vertical pipe connected to the second air intake pipe at the top end, and an air outlet. The air outlet is arranged in the middle of the top surface of the leaching barrel.

[0015] In the technical solution of the present invention, the first air intake structure includes a first air intake pipe whose front end is connected to the main pipeline, a hose whose top end is connected to the first air intake pipe, and an outer ring pipe and an inner ring pipe arranged between the upper fixed plate and the lower fixed plate. The outer ring pipe and the inner ring pipe are concentrically arranged and are both fixed to the bottom surface of the upper fixed plate. The outer ring pipe and the inner ring pipe are connected through an intermediate pipe, the outermost connecting pipe is connected to the outer ring pipe, and the remaining connecting pipes are connected to the inner ring pipe.

[0016] In the technical solution of the present invention, a linkage structure for controlling airflow is provided below the main pipeline, the linkage structure includes a worm, a driven tooth coaxially fixed to the left end of the worm, and an opening and closing mechanism symmetrically arranged on the front and rear sides of the worm, the opening and closing mechanism includes a worm wheel meshing with the worm, a shaft rod coaxially fixed to the top surface of the worm wheel, and a valve plate fixed to the shaft rod, the front valve plate is arranged in the second air intake pipe, the rear valve plate is arranged in the first air intake pipe, and the front and rear valve plates are arranged perpendicular to each other, a counterweight block is provided on the top cavity wall of the active cavity, the counterweight block is I-shaped, the middle part of the counterweight block passes through the top cavity wall of the active cavity and the counterweight block is slidably connected to the top cavity wall of the active cavity, the middle part of the counterweight block is square, a linkage part is fixed to the top surface of the counterweight block, and a tooth part meshing with the driven tooth is provided on the inner side of the front half of the linkage part

[0017] On the other hand, the present invention also provides an ultrasonic assisted leaching method based on a production-type metal organic source chemical vapor deposition device, based on the above-mentioned ultrasonic assisted leaching device based on the production-type metal organic source chemical vapor deposition device, comprising the following steps:

[0018] S1. After scraping off the reaction products deposited and grown on the substrate, align the substrate with the upper placement hole and press down so that the baffle is pressed into the slide cavity until the substrate is pressed under the baffle and the baffle pops up again, thereby fixing the substrate;

[0019] S2, after fixing, start the second motor to drive the threaded rod to rotate through the first transmission rod, the second transmission rod and the gear set, so as to move the lifting rod downward. Under the action of gravity, the fixing assembly moves downward together with the lifting rod until the bracket contacts the fixing rod. At this time, turn off the second motor, add a proper amount of leachate into the leaching barrel, and start the ultrasonic generator;

[0020] S3. When the fixed assembly moves downward, the counterweight drives the linkage part downward under the action of gravity, and drives the worm to rotate through the transmission of the tooth part and the driven tooth, and then drives the front and rear valve plates to rotate through the worm wheel and the shaft rod, so that the front valve plate is opened and the rear valve plate is closed, and then the air pump is started, and the air is discharged from the air outlet to cooperate with the ultrasonic generator to accelerate the leaching;

[0021] S4, during leaching, the electromagnet is turned on, and under the action of magnetic force, the electromagnet and the magnet attract each other and fix, and then the first motor is started to drive the entire fixed assembly to slowly reciprocate 180° through the transmission seat;

[0022] S5. After the leaching is completed, the fixed component is adjusted to a horizontal state with the top surface facing upward, the first motor and the electromagnet are turned off, and the second motor is restarted to drive the fixed component to move upward. When the top of the transmission seat contacts the bottom surface of the counterweight block, the counterweight block will be pushed up, and then the worm will be driven to rotate in the opposite direction through the teeth and the driven teeth, so that the front valve plate is closed and the rear valve plate is opened. At this time, the air enters the outer ring tube and the inner ring tube through the first air inlet pipe and the hose, and finally enters the air cavity, thereby pushing the push rod and driving the baffle to retreat into the sliding cavity. After all the baffles are retreated, the substrate will be automatically pushed out of the upper placement hole under the elastic force of the second spring, and the substrate can be taken out to complete the leaching and cleaning.

[0023] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0024] 1. In the present invention, during leaching, the substrate is aligned with the upper placement hole and pressed downward so that the baffle is pressed into the sliding cavity and the first spring is compressed until the substrate is pressed under the baffle. The baffle pops out again under the action of the first spring. At the same time, the second spring can give an upward elastic force to the lower fixing plate, so that the lower fixing plate and the baffle on the upper fixing plate can fix the substrate together to avoid mutual collision during cleaning and deformation of the substrate. By setting a fixing component, multiple substrates in the same group can be fixed at one time, thereby improving the leaching efficiency.

[0025] 2. In the present invention, when in use, the second motor is started to drive the threaded rod to rotate through the first transmission rod, the second transmission rod and the gear set, thereby causing the lifting rod to move downward. Under the action of gravity, the fixed component moves downward together with the lifting rod until the bracket contacts the fixed rod, and then the electromagnet is turned on. Under the action of magnetic force, the electromagnet and the magnet attract each other and fix. Then, the first motor is started to drive the entire fixed component to slowly reciprocate 180° through the transmission seat, so that the substrate can rotate 180°, avoiding the difficulty of ultrasonic waves to be transmitted to the top of the fixed component due to the obstruction of the fixed component during the leaching process. By setting a driving component, the substrate can be driven to rotate, thereby reducing the leaching dead angle and improving the leaching efficiency.

[0026] 3. In the present invention, during leaching, in the process of the fixed component moving downward, the counterweight block drives the linkage part to move downward under the action of gravity, and drives the worm to rotate through the transmission of the tooth part and the driven tooth, and then drives the front and rear valve plates to rotate through the worm wheel and the shaft rod, so that the front valve plate is opened and the rear valve plate is closed, and then the air pump is started. At this time, air is discharged from the air outlet to cooperate with the ultrasonic generator to accelerate the leaching. By setting a second air intake structure, the leaching of the residue can be accelerated and the leaching efficiency can be improved.

[0027] 4. In the present invention, after leaching is completed, the second motor drives the fixed component to move upward, and when the top of the transmission seat contacts the bottom surface of the counterweight block, it will push up the counterweight block, and then drive the worm to rotate in the opposite direction through the teeth and the driven teeth, so that the front valve plate is closed and the rear valve plate is opened. At this time, air enters the outer ring tube and the inner ring tube through the first air inlet pipe and the hose, and finally enters the air cavity, thereby pushing the push rod and driving the baffle plate to retreat into the sliding cavity. After all the baffle plates are retreated, the substrate will be automatically pushed out of the upper placement hole under the elastic force of the second spring. By setting the first air inlet structure, the substrate can be automatically popped out after leaching is completed, which is convenient for use. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0029] Figure 2 It is a schematic diagram of the internal structure of the overall structure of the present invention;

[0030] Figure 3 It is an exploded view of the fixing assembly in the present invention;

[0031] Figure 4 It is a cross-sectional view of the upper fixing plate in the present invention;

[0032] Figure 5 For the present invention Figure 4 Enlarged view of point A in the middle;

[0033] Figure 6 It is a cross-sectional view of the rebound structure in the present invention;

[0034] Figure 7 It is a schematic diagram of the driving component in the present invention;

[0035] Figure 8 For the present invention Figure 7 Enlarged view of point B in the middle;

[0036] Fig. 9 It is a cross-sectional view of the transmission structure in the present invention;

[0037] Fig.10 It is a schematic diagram of the air intake assembly in the present invention;

[0038] Fig.11 For the present invention Fig.10 Enlarged view of point C in the middle;

[0039] Description of reference numerals:

[0040] 1. Leaching barrel; 11. Barrel body; 12. Extension part; 13. Mounting frame; 14. Bracket;

[0041] 2. Fixing assembly; 21. Upper fixing structure; 211. Upper fixing plate; 212. Upper placement hole; 213. Fixing rod; 214. Sliding cavity; 215. Air cavity; 216. Sliding rod; 217. First spring; 22. Lower fixing structure; 221. Lower fixing plate; 222. Lower placement hole; 223. Support rod; 23. Transmission structure; 231. Transmission seat; 232. Limiting rod; 233. Magnet; 24. Rebound structure; 241. Cylinder sleeve; 242. Press rod; 243. Second spring; 244. Top plate; 25. Baffle structure; 251. Baffle; 252. Limiting plate; 253. Connecting pipe; 254. Push rod;

[0042] 3. Intake assembly; 31. Air pump; 32. First intake structure; 321. First intake pipe; 322. Hose; 323. Outer ring pipe; 324. Inner ring pipe; 325. Intermediate pipe; 33. Second intake structure; 331. Second intake pipe; 332. Vertical pipe; 333. Air outlet; 34. Linkage structure; 341. Worm; 342. Driven gear; 343. Opening and closing mechanism; 3431. Worm wheel; 3432. Shaft; 3433. Valve plate; 35. Main pipeline; 36. Counterweight; 37. Linkage part; 371. Gear part;

[0043] 4. Driving assembly; 41. Rotating structure; 411. First motor; 412. Electromagnet; 42. Vertical motion structure; 421. Second motor; 422. Lifting mechanism; 4221. First transmission rod; 4222. Second transmission rod; 4223. Threaded rod; 4224. Lifting rod; 4225. Support plate; 4226. Gear set;

[0044] 5. Ultrasonic generator;

[0045] 6. Substrate. DETAILED DESCRIPTION

[0046] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0047] Unless explicitly stated otherwise, throughout the specification, the term “comprise” or variations thereof such as “include” or “comprising” will be understood as including the stated elements or components but not excluding other elements or components.

[0048] Reference Figure 1-Figure 11 As shown, this embodiment provides a technical solution:

[0049] An ultrasonic assisted leaching device based on a production-type metal organic source chemical vapor deposition device comprises a plurality of substrates 6 of the chemical vapor deposition device, a leaching barrel 1 for placing the substrates 6, and an ultrasonic generator 5 for emitting ultrasonic waves. In the chemical vapor deposition device, the metal organic compound reacts with the gas phase in the deposition device, and the reaction product is deposited and grown on the substrate 6. Then, the thin film product on the substrate 6 is peeled off by chemical etching or mechanical peeling. After multiple uses, the substrate 6 needs to be thoroughly cleaned;

[0050] The leaching barrel 1 includes a barrel body 11 and an extension portion 12 symmetrically arranged on the left and right sides of the barrel body 11. A fixing component 2 for fixing a substrate 6 is arranged inside the leaching barrel 1. A driving component 4 for controlling the movement of the fixing component 2 is arranged outside the leaching barrel 1. An air intake component 3 is arranged on the left side of the leaching barrel 1 near the top. Air is introduced into the air intake component 3 during leaching to form bubbles in the leaching liquid. During ultrasonic leaching, the broken bubbles can impact and disperse the residues to accelerate leaching.

[0051] The fixing assembly 2 includes an upper fixing structure 21, a lower fixing structure 22 and a plurality of baffle structures 25. The upper fixing structure 21 includes an upper fixing plate 211 and a plurality of upper placement holes 212 regularly arranged on the upper fixing plate 211. The lower fixing structure 22 includes a lower fixing plate 221 and a plurality of lower placement holes 222 corresponding to the plurality of upper placement holes 212. A plurality of support rods 223 are arranged in the lower placement holes 222. When in use, the substrate 6 is pressed against the upper placement holes 212 one by one. Two sliding cavities 214 are symmetrically arranged in the hole wall of the upper placement hole 212. The baffle structure 25 is arranged in the corresponding sliding cavity 214. The baffle structure 25 includes a baffle 251 and a limiter fixed on the outer side of the corresponding baffle 251. The stop plate 252 and the middle of the outer wall of the sliding cavity 214 are fixed with a sliding rod 216. The outer wall of the sliding rod 216 is located between the stop plate 252 and the outer wall of the corresponding sliding cavity 214. The first spring 217 is sleeved on the part. When pressed, the baffle 251 is pressed into the sliding cavity 214 until the substrate 6 is pressed under the baffle 251. The baffle 251 pops up again to fix the substrate 6. The upper fixed plate 211 and the lower fixed plate 221 are connected by setting a number of regularly distributed rebound structures 24. By setting the rebound structure 24, the substrate 6 can be automatically popped out after the leaching and cleaning is completed, which is convenient for use. The left and right sides of the upper fixed plate 211 are fixedly connected with the transmission structure 23 by setting the fixing rod 213;

[0052] The driving component 4 includes a rotating structure 41 for driving the fixed component 2 to rotate and a vertical motion structure 42 for driving the fixed component 2 to move up and down. The rotating structure 41 includes a first motor 411 and an electromagnet 412 fixed to the output shaft of the first motor 411. The rotating structure 41 drives the entire fixed component 2 to rotate 180° back and forth to avoid the difficulty of ultrasonic waves being transmitted to the top of the substrate 6 due to the existence of the upper fixed plate 211 and the lower fixed plate 221, resulting in the inability to completely leach and clean the substrate 6. The vertical motion structure 42 includes a second motor 421 and a lifting mechanism 422 symmetrically arranged on the left and right sides. The lifting mechanism 422 is set to drive the fixed component 2 to move up and down.

[0053] The first motor 411 is fixed on the left side of the leaching barrel 1 near the middle, the second motor 421 is fixed on the front side of the leaching barrel 1 near the top, and the ultrasonic generator 5 is fixed on the front side of the leaching barrel 1 near the middle.

[0054] In addition, if Figure 1-Figure 5 As shown, the inner end of the slide rod 216 passes through the corresponding limit plate 252 and extends into the corresponding baffle 251. The corresponding baffle 251 is slidably connected to the corresponding slide rod 216. The baffle 251 extends out of the corresponding slide cavity 214. The baffle 251 can slide along the slide rod 216. The upper surface of the baffle 251 is an inwardly concave arc. The arc-shaped upper surface can facilitate the baffle 251 to be squeezed back into the slide cavity 214 when the substrate 6 is pressed downward.

[0055] In addition, if Figure 5 As shown, push rods 254 are symmetrically fixed at the front and rear ends of the left side wall of the limiting plate 252, and an air cavity 215 is provided in the upper fixed plate 211 at a position corresponding to the position of the push rod 254. The left end of the push rod 254 passes through the left side wall of the sliding cavity 214 and extends into the corresponding air cavity 215. The push rod 254 and the corresponding air cavity 215 are adapted in size and the two are slidably connected. A connecting pipe 253 is provided at the left end of the air cavity 215. When the leaching is completed, air will enter the air cavity 215 from the connecting pipe 253 and push the push rod 254, thereby pushing the baffle 251 back into the sliding cavity 214 to avoid affecting the automatic ejection of the substrate 6.

[0056] Furthermore, if Figure 6As shown, the rebound structure 24 includes a sleeve 241 whose top end is fixed to the bottom surface of the upper fixed plate 211 and a pressure rod 242 whose bottom end is fixed to the top surface of the lower fixed plate 221. The top end of the pressure rod 242 extends into the corresponding sleeve 241 and the two are slidably connected. The top end of the pressure rod 242 is fixedly connected to a top plate 244. The outer wall of the pressure rod 242 is located between the bottom surface of the sleeve 241 and the bottom surface of the top plate 244. The outer sleeve of the part is provided with a second spring 243. When fixed, the second spring 243 can give the lower fixed plate 221 an upward elastic force, so that the lower fixed plate 221 and the baffle 251 on the upper fixed plate 211 can fix the substrate 6 together. After the leaching and cleaning is completed, the second spring 243 can also pop the substrate 6 upward for easy removal.

[0057] In addition, if Figure 7 and Fig. 9 As shown, the fixing rod 213 passes through the corresponding side extension part 12 and the corresponding transmission structure 23, the upper half of the extension part 12 is provided with an activity cavity for the transmission structure 23 to move up and down, the inner side of the activity cavity is provided with a vertical opening for the fixing rod 213 to slide up and down, and the middle part of the inner side of the extension part 12 is fixed with a bracket 14 for supporting the corresponding fixing rod 213, so as to support the fixing assembly 2 after the fixing assembly 2 is separated from the lifting mechanism 422;

[0058] The transmission structure 23 includes a transmission seat 231 fixed to the corresponding fixed rod 213 on the inner side and a magnet 233 arranged in the transmission seat 231. A cavity is provided in the middle part of the transmission seat 231, and the magnet 233 is arranged in the cavity. A limit rod 232 is fixed in the middle part of the inner wall of the cavity. The limit rod 232 passes through the magnet 233 and the two are slidably connected. The arc-shaped side wall of the magnet 233 is provided with an outer protrusion embedded in the cavity. The bracket 14 and the electromagnet 412 are located at the same height. It should be noted that the electromagnet 412 is coated with a corrosion-resistant ceramic layer that does not affect magnetic conduction. When the fixed component 2 moves down together with the lifting rod 4224 until the bracket 14 contacts the fixed rod 213, the two are fixed by the magnetic force of the electromagnet 412 and the magnet 233, and then the entire fixed component 2 can be driven by the first motor 411 to slowly reciprocate 180°. The reciprocating rotation can not only clean the substrate 6 in all directions, but also avoid the elongation and damage of the air intake component 3 during the rotation process.

[0059] In addition, if Figure 7As shown, a mounting frame 13 is provided at the front side of the extension portion 12, and a lifting mechanism 422 is arranged in the mounting frame 13. The lifting mechanism 422 includes a first transmission rod 4221 arranged horizontally left and right, a second transmission rod 4222 arranged horizontally front and back, and a vertically placed threaded rod 4223 arranged at the rear end of the second transmission rod 4222. A gear set 4226 is arranged between the output shaft of the second motor 421 and the first transmission rod 4221, between the first transmission rod 4221 and the corresponding second transmission rod 4222, and between the second transmission rod 4222 and the corresponding threaded rod 4223. A lifting rod 4224 is provided above the threaded rod 4223, and the top end of the threaded rod 4223 extends into the lifting rod 4 224 and the two are threadedly connected, a support plate 4225 for supporting the transmission seat 231 is fixed on the top of the lifting rod 4224, and the second motor 421 drives the threaded rod 4223 to rotate through the first transmission rod 4221, the second transmission rod 4222 and the gear set 4226, so that the lifting rod 4224 moves downward, and under the action of gravity, the fixing component 2 moves downward together with the lifting rod 4224 until the bracket 14 contacts with the fixing rod 213, and the side wall of the lifting rod 4224 is symmetrically provided with an outwardly extending flange, and the flange is provided to prevent the lifting rod 4224 from rotating together with the threaded rod 4223 and causing the lifting effect to fail, and the upper half of the lifting rod 4224 extends into the movable cavity.

[0060] Specifically, Fig.10 As shown, the air intake assembly 3 includes an air pump 31, a main pipeline 35 connected to the air pump 31, and a second air intake structure 33 and a first air intake structure 32 located on the front and rear sides of the main pipeline 35. The second air intake structure 33 includes a second air intake pipe 331 connected to the main pipeline 35 at the rear end, a vertical pipe 332 connected to the second air intake pipe 331 at the top, and an air outlet 333. The air outlet 333 is arranged in the middle of the top surface of the leaching barrel 1. During leaching, air is discharged from the air outlet 333 to cooperate with the ultrasonic generator 5 to accelerate the leaching.

[0061] Furthermore, if Fig.11 and Figure 3As shown, the first air intake structure 32 includes a first air intake pipe 321 whose front end is connected to the main pipeline 35, a hose 322 whose top end is connected to the first air intake pipe 321, and an outer ring pipe 323 and an inner ring pipe 324 arranged between the upper fixing plate 211 and the lower fixing plate 221. The outer ring pipe 323 and the inner ring pipe 324 are concentrically arranged and are both fixed to the bottom surface of the upper fixing plate 211. The outer ring pipe 323 and the inner ring pipe 324 are connected through an intermediate pipe 325. The outermost connecting pipe 253 is connected to the outer ring pipe 323, and the remaining connecting pipes 253 are connected to the lower fixing plate 211. The inner ring tube 324 is connected. When the leaching and cleaning is completed, the air enters the outer ring tube 323 and the inner ring tube 324 from the first air inlet pipe 321 along the hose 322, and finally enters the air cavity 215, thereby pushing the push rod 254 and driving the baffle 251 to retreat into the sliding cavity 214. After all the baffles 251 are retreated, the substrate 6 will be automatically pushed out of the upper placement hole 212 under the elastic force of the second spring 243. It should be noted that the length of the hose 322 should be redundant when designed to avoid the hose 322 being pulled during rotation.

[0062] In addition, if Figure 8 and Fig.11 As shown, a linkage structure 34 for controlling airflow is provided below the main pipeline 35, and the linkage structure 34 includes a worm 341, a driven tooth 342 coaxially fixed to the left end of the worm 341, and an opening and closing mechanism 343 symmetrically arranged on the front and rear sides of the worm 341, and the opening and closing mechanism 343 includes a worm wheel 3431 meshing with the worm 341, a shaft 3432 coaxially fixed to the top surface of the worm wheel 3431, and a valve plate 3433 fixed to the shaft 3432, the front valve plate 3433 is arranged in the second intake pipe 331, and the rear valve plate 3433 is arranged in the first Inside the intake pipe 321, the front and rear valve plates 3433 are arranged perpendicular to each other, and a counterweight block 36 is provided on the top cavity wall of the movable cavity. The counterweight block 36 is in an I-shape, and the middle part of the counterweight block 36 passes through the top cavity wall of the movable cavity and the counterweight block 36 is slidably connected to the top cavity wall of the movable cavity. The middle part of the counterweight block 36 is square to prevent the counterweight block 36 from rotating during the up and down movement, resulting in the inability of the tooth portion 371 and the driven tooth 342 to engage. A linkage portion 37 is fixed on the top surface of the counterweight block 36, and a tooth portion 371 engaging with the driven tooth 342 is provided on the inner side of the front half of the linkage portion 37.

[0063] The present invention also provides an ultrasonic assisted leaching method based on a production-type metal organic source chemical vapor deposition device, based on the above-mentioned ultrasonic assisted leaching device based on the production-type metal organic source chemical vapor deposition device, comprising the following steps:

[0064] S1. After scraping off the reaction products deposited and grown on the substrate 6, align the substrate 6 with the upper placement hole 212 and press downward so that the baffle 251 is pressed into the slide cavity 214. After the substrate 6 is pressed under the baffle 251, the baffle 251 pops up again, and the substrate 6 is fixed.

[0065] S2. After fixing, start the second motor 421 to drive the threaded rod 4223 to rotate through the first transmission rod 4221, the second transmission rod 4222 and the gear set 4226, so as to move the lifting rod 4224 downward. Under the action of gravity, the fixing assembly 2 moves downward together with the lifting rod 4224 until the bracket 14 contacts the fixing rod 213. At this time, turn off the second motor 421, add a proper amount of leachate into the leaching barrel 1, and start the ultrasonic generator 5.

[0066] S3. When the fixed component 2 moves downward, the counterweight 36 drives the linkage part 37 to move downward under the action of gravity, and drives the worm 341 to rotate through the transmission of the tooth part 371 and the driven tooth 342, and then drives the front and rear valve plates 3433 to rotate through the worm wheel 3431 and the shaft 3432, so that the front valve plate 3433 is opened and the rear valve plate 3433 is closed, and then the air pump 31 is started, and the air is discharged from the air outlet 333 to cooperate with the ultrasonic generator 5 to accelerate the leaching;

[0067] S4, during leaching, the electromagnet 412 is turned on, and under the action of magnetic force, the electromagnet 412 and the magnet 233 are attracted and fixed to each other, and then the first motor 411 is started to drive the entire fixing assembly 2 to slowly reciprocate 180° through the transmission seat 231;

[0068] S5. After the leaching is completed, the fixed component 2 is adjusted to a horizontal state with the top surface facing upward, the first motor 411 and the electromagnet 412 are turned off, and the second motor 421 is restarted to drive the fixed component 2 to move upward. When the top of the transmission seat 231 contacts the bottom surface of the counterweight block 36, the counterweight block 36 will be pushed up, and then the worm 341 will be driven to rotate in the opposite direction through the tooth portion 371 and the driven tooth 342, so that the front valve plate 3433 is closed and the rear valve plate 3433 is opened. At this time, the air enters the outer ring tube 323 and the inner ring tube 324 through the first air inlet pipe 321 and the hose 322, and finally enters the air cavity 215, thereby pushing the push rod 254 and driving the baffle 251 to retreat into the sliding cavity 214. After all the baffles 251 are retreated, the substrate 6 will be automatically pushed out of the upper placement hole 212 under the elastic force of the second spring 243, and the substrate 6 can be taken out to complete the leaching and cleaning.

[0069] The foregoing description of specific exemplary embodiments of the present invention is for the purpose of illustration and demonstration. These descriptions are not intended to limit the present invention to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing exemplary embodiments is to explain the specific principles of the present invention and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the present invention and various different selections and changes. The scope of the present invention is intended to be limited by the specification and its equivalents.

Claims

1. An ultrasonic assisted leaching device based on a production-type metal organic source chemical vapor deposition device, comprising a plurality of substrates (6) of the chemical vapor deposition device, a leaching bucket (1) for placing the substrates (6) and an ultrasonic generator (5) for emitting ultrasonic waves, characterized in that: The leaching barrel (1) comprises a barrel body (11) and an extension portion (12) symmetrically arranged on the left and right sides of the barrel body (11); a fixing component (2) for fixing the substrate (6) is arranged inside the leaching barrel (1); a driving component (4) for controlling the movement of the fixing component (2) is arranged outside the leaching barrel (1); and an air intake component (3) for assisting leaching is arranged on the left side of the leaching barrel (1) near the top; The fixing assembly (2) comprises an upper fixing structure (21), a lower fixing structure (22) and a plurality of baffle structures (25); the upper fixing structure (21) comprises an upper fixing plate (211) and a plurality of upper placement holes (212) regularly arranged on the upper fixing plate (211); the lower fixing structure (22) comprises a lower fixing plate (221) and a plurality of lower placement holes (222) corresponding to the plurality of upper placement holes (212) in a one-to-one manner; two sliding cavities (214) are symmetrically arranged in the hole wall of the upper placement hole (212); the baffle structure (25) is arranged in the corresponding sliding cavity (214); The structure (25) comprises a baffle (251) and a limit plate (252) fixed on the outer side of the corresponding baffle (251); a slide rod (216) is fixed in the middle of the outer side wall of the slide cavity (214); a first spring (217) is sleeved on the outer wall of the slide rod (216) located between the limit plate (252) and the outer side wall of the corresponding slide cavity (214); the upper fixed plate (211) and the lower fixed plate (221) are connected by arranging a plurality of regularly distributed rebound structures (24); and the left and right sides of the upper fixed plate (211) are fixedly connected to the transmission structure (23) by arranging fixed rods (213); The driving assembly (4) comprises a rotating structure (41) for driving the fixed assembly (2) to rotate and a vertical motion structure (42) for driving the fixed assembly (2) to move up and down, the rotating structure (41) comprising a first motor (411) and an electromagnet (412) fixed to an output shaft of the first motor (411), and the vertical motion structure (42) comprising a second motor (421) and a lifting mechanism (422) symmetrically arranged on left and right sides.

2. The ultrasonic assisted leaching device based on the production type metal organic source chemical vapor deposition equipment according to claim 1, characterized in that: A plurality of support rods (223) are arranged in the lower placement hole (222); the inner end of the sliding rod (216) passes through the corresponding limiting plate (252) and extends into the corresponding baffle plate (251); the corresponding baffle plate (251) is slidably connected to the corresponding sliding rod (216); the baffle plate (251) extends out of the corresponding sliding cavity (214); and the upper surface of the baffle plate (251) is in a concave arc shape.

3. The ultrasonic assisted leaching device based on the production type metal organic source chemical vapor deposition equipment according to claim 2, characterized in that: Push rods (254) are symmetrically fixed at the front and rear ends of the left side wall of the limiting plate (252), and an air cavity (215) is provided in the upper fixed plate (211) at a position corresponding to the position of the push rod (254). The left end of the push rod (254) passes through the left side wall of the sliding cavity (214) and extends into the corresponding air cavity (215). The push rod (254) and the corresponding air cavity (215) are matched in size and the two are slidably connected. A connecting pipe (253) is provided at the left end of the air cavity (215).

4. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 3, characterized in that: The rebound structure (24) comprises a sleeve (241) whose top end is fixed to the bottom surface of the upper fixed plate (211) and a pressure rod (242) whose bottom end is fixed to the top surface of the lower fixed plate (221); the top end of the pressure rod (242) extends into the corresponding sleeve (241) and the two are slidably connected; the top end of the pressure rod (242) is fixedly connected to a top plate (244); and a second spring (243) is provided on a portion of the outer wall of the pressure rod (242) located between the bottom surface of the sleeve (241) and the bottom surface of the top plate (244).

5. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 4, characterized in that: The fixed rod (213) passes through the corresponding side extension part (12) and the corresponding transmission structure (23); the upper half of the extension part (12) is provided with a movable cavity for the transmission structure (23) to move up and down; a bracket (14) for supporting the corresponding fixed rod (213) is fixed to the middle part of the inner side of the extension part (12); the transmission structure (23) comprises a transmission seat (231) fixed to the corresponding fixed rod (213) on the inner side and a magnet (233) arranged in the transmission seat (231); a cavity is provided in the middle part of the transmission seat (231); the magnet (233) is arranged in the cavity; a limiting rod (232) is fixed in the middle part of the inner side wall of the cavity; the limiting rod (232) passes through the magnet (233) and the two are slidably connected; the arc-shaped side wall of the magnet (233) is provided with an outer protrusion embedded in the cavity; the bracket (14) and the electromagnet (412) are located at the same height.

6. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 5, characterized in that: A mounting frame (13) is provided at the front side of the extension portion (12), and the lifting mechanism (422) is arranged in the mounting frame (13). The lifting mechanism (422) comprises a first transmission rod (4221) arranged horizontally left and right, a second transmission rod (4222) arranged horizontally front and back, and a vertically placed threaded rod (4223) arranged at the rear end of the second transmission rod (4222), between the output shaft of the second motor (421) and the first transmission rod (4221), between the first transmission rod (4221) and the corresponding second transmission rod (4222), and between the second transmission rod (4223). The second transmission rod (4222) and the corresponding threaded rod (4223) are both transmitted by setting a gear set (4226); a lifting rod (4224) is provided above the threaded rod (4223); the top end of the threaded rod (4223) extends into the lifting rod (4224) and the two are threadedly connected; a support plate (4225) for supporting the transmission seat (231) is fixed to the top end of the lifting rod (4224); the side wall of the lifting rod (4224) is symmetrically provided with outwardly extending flanges; the upper half of the lifting rod (4224) extends into the movable cavity.

7. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 6, characterized in that: The air intake assembly (3) comprises an air pump (31), a main pipeline (35) connected to the air pump (31), and a second air intake structure (33) and a first air intake structure (32) located at the front and rear sides of the main pipeline (35); the second air intake structure (33) comprises a second air intake pipe (331) connected to the main pipeline (35) at the rear end, a vertical pipe (332) connected to the second air intake pipe (331) at the top end, and an air outlet (333); the air outlet (333) is arranged in the middle of the top surface of the leaching barrel (1).

8. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 7, characterized in that: The first air intake structure (32) comprises a first air intake pipe (321) whose front end is connected to the main pipe (35), a hose (322) whose top end is connected to the first air intake pipe (321), and an outer ring pipe (323) and an inner ring pipe (324) arranged between the upper fixing plate (211) and the lower fixing plate (221); the outer ring pipe (323) and the inner ring pipe (324) are arranged concentrically and are both fixed to the bottom surface of the upper fixing plate (211); the outer ring pipe (323) and the inner ring pipe (324) are connected via an intermediate pipe (325); the outermost connecting pipe (253) is connected to the outer ring pipe (323), and the remaining connecting pipes (253) are connected to the inner ring pipe (324).

9. The ultrasonic assisted leaching device based on production-type metal organic source chemical vapor deposition equipment according to claim 8, characterized in that: A linkage structure (34) for controlling airflow is provided below the main pipe (35), the linkage structure (34) comprising a worm (341), a driven tooth (342) coaxially fixed to the left end of the worm (341), and an opening and closing mechanism (343) symmetrically arranged on the front and rear sides of the worm (341), the opening and closing mechanism (343) comprising a worm wheel (3431) meshing with the worm (341), a shaft (3432) coaxially fixed to the top surface of the worm wheel (3431), and a valve plate (3433) fixed to the shaft (3432), the valve plate (3433) being arranged in the second air intake pipe (331) at the front side. The valve plate (3433) at the rear side is arranged in the first air intake pipe (321), and the valve plates (3433) at the front and rear sides are arranged perpendicular to each other. A counterweight block (36) is provided on the top cavity wall of the active cavity. The counterweight block (36) is in an I-shape. The middle part of the counterweight block (36) passes through the top cavity wall of the active cavity and the counterweight block (36) is slidably connected to the top cavity wall of the active cavity. The middle part of the counterweight block (36) is square. A linkage part (37) is fixed on the top surface of the counterweight block (36). A tooth part (371) meshing with the driven tooth (342) is provided on the inner side of the front half of the linkage part (37).

10. An ultrasonic assisted leaching method based on a production-type metal organic source chemical vapor deposition device, based on the ultrasonic assisted leaching device based on a production-type metal organic source chemical vapor deposition device according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, after scraping off the reaction products deposited and grown on the substrate (6), align the substrate (6) with the upper placement hole (212) and press downward so that the baffle (251) is pressed into the slide cavity (214), until the substrate (6) is pressed under the baffle (251), and the baffle (251) pops out again, so that the substrate (6) can be fixed; S2, after fixing, start the second motor (421) to drive the threaded rod (4223) to rotate through the first transmission rod (4221), the second transmission rod (4222) and the gear set (4226), thereby causing the lifting rod (4224) to move downward. Under the action of gravity, the fixing component (2) moves downward together with the lifting rod (4224) until the bracket (14) contacts the fixing rod (213). At this time, the second motor (421) is turned off, and a proper amount of leaching liquid is added to the leaching barrel (1), and the ultrasonic generator (5) is started; S3, while the fixed component (2) moves downward, the counterweight (36) drives the linkage part (37) to move downward under the action of gravity, and drives the worm (341) to rotate through the transmission of the tooth part (371) and the driven tooth (342), and then drives the front and rear valve plates (3433) to rotate through the worm wheel (3431) and the shaft (3432), so that the front valve plate (3433) is opened and the rear valve plate (3433) is closed, and then the air pump (31) is started, and at this time, air is discharged from the air outlet (333) to cooperate with the ultrasonic generator (5) to accelerate leaching; S4, during leaching, the electromagnet (412) is turned on, and under the action of magnetic force, the electromagnet (412) and the magnet (233) are attracted and fixed to each other, and then the first motor (411) is started to drive the entire fixing assembly (2) to slowly reciprocate 180° through the transmission seat (231); S5. After the leaching is completed, the fixed component (2) is adjusted to a horizontal state with the top surface facing upward, the first motor (411) and the electromagnet (412) are turned off, and the second motor (421) is restarted to drive the fixed component (2) to move upward. When the top of the transmission seat (231) contacts the bottom surface of the counterweight block (36), the counterweight block (36) is pushed up, and then the worm (341) is driven to rotate in the opposite direction through the tooth portion (371) and the driven tooth (342), so that the front valve plate (3433) is closed and the rear valve plate (3433) is closed. (3433) is opened, and at this time, air enters the outer ring tube (323) and the inner ring tube (324) through the first air inlet pipe (321) and the hose (322), and finally enters the air cavity (215), thereby pushing the push rod (254) and driving the baffle (251) to retreat into the sliding cavity (214). After all the baffles (251) are retreated, the elastic force of the second spring (243) will automatically push the substrate (6) out of the upper placement hole (212), and the substrate (6) can be taken out to complete the leaching cleaning.

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