A device and method for manufacturing a composite copper foil for a vacuum evaporation base film

Abstract

The present invention provides a device and method for manufacturing a composite copper foil for a vacuum evaporation base film, which are used to solve the problems in the prior art that during the manufacturing of the composite copper foil for the vacuum evaporation base film, the adhesion between the initial conductive layer and the base film is unstable, the uniformity of the electroplated composite copper layer is poor, and the thermal stability of the base film is poor. The present invention provides a device for manufacturing a composite copper foil for a vacuum evaporation base film, including: a hot pressing and shape correction section, an activation conductive layer section, two conductive sections, a copper tank section, and a curing composite layer section, which can correct the shape of the deformed base film in the vacuum evaporation, ensure the adhesion effect of the subsequent composite conductive layer and the film cloth, increase the bonding force between the initial conductive layer and the base film, ensure the performance of the subsequent processed or used electronic devices, and accurately control the processing precision of each process of the electroplated composite layer, ensure the copper layer thickness and uniformity of the electroplated composite layer, make the electrical performance of the finished composite copper foil stable, have good performance in high-frequency or high-current applications, and have high safety.

Description

Technical Field

[0001] The present invention relates to the technical field of manufacturing composite copper foils for vacuum evaporation base films, and particularly to an apparatus and method for manufacturing composite copper foils for vacuum evaporation base films. Background Art

[0002] As an important material for flexible circuit boards, composite copper foils can be widely used in circuit connections of products such as mobile phones, tablets, and intelligent devices. It consists of a base film, a conductive layer, and a composite layer. Since the base film itself is insulating, before manufacturing the composite layer, a conductive layer needs to be attached to the surface of the base film. Existing technologies mostly achieve this step through a vacuum evaporation base film process in which copper material is heated to a high temperature, evaporated, and then condensed on the base film to form an initial conductive metal thin film layer. Subsequently, through an electroplating process, the copper layer is combined with the initial conductive layer on the base film to manufacture the composite copper foil.

[0003] Although the manufacturing process of composite copper foils for vacuum evaporation base films has shown good performance in many applications, current technologies still have some drawbacks and challenges, mainly including the following points:

[0004] 1. Unstable adhesion

[0005] During the vacuum evaporation process, the adhesion between the initial conductive layer and the base film is affected by multiple factors, such as evaporation conditions (temperature, pressure, etc.), the cleanliness of the base film surface, and the treatment process. This unstable adhesion may cause the separation between the copper layer and the base film during subsequent processing or use, affecting the performance of electronic devices, especially under high-temperature or high-frequency working conditions.

[0006] 2. Poor uniformity of the copper layer

[0007] When electroplating the composite layer on a large-area conductive layer, the production scale is large, and the precision requirements for process control are high. The copper layer is prone to local over-thickness or under-thickness. The non-uniformity of the copper layer thickness will lead to unstable electrical properties, affecting the performance of the composite copper foil in high-frequency or high-current applications, and may even cause local overheating or a decline in electrical performance.

[0008] 3. Thermal stability problem of the base film

[0009] The base film materials of composite copper foils (such as polyimide films, polyester films, etc.) have poor stability at high temperatures, and will deform, shrink, or have a decline in performance during the high-temperature evaporation process, resulting in a decrease in the adhesion between the conductive layer and the composite layer and the base film. In severe cases, the copper layer may even separate from the base film, affecting the quality of the final composite copper foil. Summary of the Invention

[0010] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a device and method for manufacturing a composite copper foil for a vacuum evaporation base film, which is used to solve the problems of unstable adhesion between the initial conductive layer and the base film, poor uniformity of the electroplated composite copper layer, and poor thermal stability of the base film during the manufacturing of the composite copper foil for the vacuum evaporation base film in the prior art.

[0011] To achieve the above object and other related objects, the present invention provides a device for manufacturing a composite copper foil for a vacuum evaporation base film, including:

[0012] A frame, on the top of the frame, a conductive box assembly is installed. Below the conductive box assembly, an upper tank and a lower tank are provided, and both the upper tank and the lower tank are installed on the frame. The conductive box assembly is electrically connected to the upper tank. The upper tank and the lower tank are fixed, and a liquid flow circulation is carried out between the upper tank and the lower tank through a pipeline.

[0013] The upper tank is sequentially provided with a hot pressing and shape correcting section, an activating conductive layer section, two conductive sections, a copper tank section, and a curing composite layer section from left to right. The hot pressing and shape correcting section, the activating conductive layer section, the two conductive sections, the copper tank section, and the curing composite layer section are horizontally connected. Inside the front part of the upper tank, a driven transmission roller assembly is installed, and the driven transmission roller assembly provides power for the horizontal transmission of the film cloth in each processing section. Inside the upper tank, a segmented isolation assembly is provided, and the segmented isolation assembly is used to separate the processing sections into different processing spaces.

[0014] Among them, the hot pressing and shape correcting section is used to utilize the water vapor in the preprocessing section and adopt hot pressing to correct the curling and slight wrinkles generated by the temperature during the production of the composite copper foil during the horizontal movement of the composite copper foil.

[0015] Among them, the activating conductive layer section is used to activate the initial conductive layer oxidized due to contact with air during transmission to ensure the composite effect of the subsequent conductive layer.

[0016] Among them, the conductive section is used to apply a negative charge to the base film.

[0017] Among them, the copper tank section is used to electroplate a composite conductive copper layer on the base film by using the electrolysis principle.

[0018] Among them, the curing composite layer section is used to increase the connection tightness between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film.

[0019] Optionally, the driven transmission roller assembly includes a support, a main transmission shaft, a transmission roller group, and a water blocking roller group. A plurality of supports are fixed inside the front wall of the upper tank. Between the rear parts of the plurality of supports, the main transmission shaft is rotatably installed. On the main transmission shaft, the transmission roller group and the water blocking roller group are installed in a driving manner.

[0020] Optionally, the segmented isolation component includes a mounting frame, a vertical segmented partition board, a sliding bracket, a photoelectric sensor, a liquid level switch, and a horizontal current limiting plate. Mounting frames are fixed at both the front and rear of the upper tank. A vertical segmented partition board is fixed between the middle parts of the mounting frames in the hot pressing and shape correction section, between the left parts of the mounting frames in the activation conductive layer section, and between the right parts of the mounting frames in the copper tank section. Two vertical segmented partition boards are fixed between the mounting frames in the conductive section. A sliding bracket is fixed between the right parts of the mounting frames in the conductive section. A photoelectric sensor is slidably mounted on the sliding bracket. Horizontal current limiting plates are installed between the front parts and between the rear parts of the two groups of water retaining roller sets in the conductive section. Liquid level switches are fixed at the top of the rear horizontal current limiting plate in the conductive section and at the top of the conveying roller set at the right end of the copper tank section.

[0021] Optionally, the conductive cabinet component includes a rectifying cabinet, an exhaust duct, a cathode connecting copper bar, and an anode connecting copper bar. The rectifying cabinet and the exhaust duct are fixed at the top of the frame. The cathode connecting copper bar and the anode connecting copper bar are installed on the lower wall of the rectifying cabinet.

[0022] Optionally, the conductive section includes a cathode main copper bar, a rotating conductive silver ring, a connecting shaft, a conductive roller, a power shaft, a sprocket, a linkage gear set, a linkage helical gear set, and a conductive liquid spray pipe set. The cathode main copper bar is fixed at the upper part of the rear wall of the upper tank. The cathode main copper bar is fixed to the cathode connecting copper bar by screws. The cathode main copper bar is electrically connected to the rotating conductive silver ring through a connecting piece. Connecting shafts are rotatably arranged in the middle of the four rotating conductive silver rings. A conductive roller is fixedly sleeved on the outer wall of the middle part of the connecting shaft. A power shaft is rotatably installed between the two supports in the conductive section. A sprocket is fixedly sleeved on the outer wall of the middle part of the power shaft, and the sprocket is connected to the output end of the power motor through a chain drive mechanism. A linkage gear set is installed between the power shaft and the main transmission shaft in the conductive section. A linkage helical gear set is installed between the front outer walls of the lower two connecting shafts and the left outer wall of the power shaft, and two groups of linkage gear sets are drivingly connected to the rear outer walls of the four connecting shafts. A conductive liquid spray pipe set is installed in the rear wall of the upper tank in the conductive section. The conductive liquid spray pipe set includes an upper vertical single spray pipe and a lower inclined double spray pipe. The upper vertical single spray pipe is vertically arranged above the middle of the four conductive rollers. The lower inclined double spray pipe is arranged towards the upper parts of the two ends of the four conductive rollers.

[0023] Optionally, the copper tank section includes an anode copper bar mounting seat, an anode connecting plate, a rotating support seat, a jet pipe group, a liquid supply circulation pipe, an anode rod, an anode iridium plate, and a sunshade assembly. An anode copper bar mounting seat is fixed inside the rear wall of the upper tank. The upper and lower ends of the rear of the anode copper bar mounting seat are fixed to the anode connecting copper bar. The front end of the anode copper bar mounting seat is fixed with an anode connecting plate through a connecting member. The anode connecting plate includes an upper anode connecting plate and a lower anode connecting plate. A rotating support seat is installed inside the rear wall of the upper tank. Jet pipe groups are installed between the lower parts of the two rotating support seats and on the lower anode connecting plate. The jet pipe group includes two horizontally arranged jet main pipes and eight jet branch pipes vertically arranged between the two jet main pipes. The jet orifices of the jet branch pipes of the upper jet pipe group and the lower jet pipe group are arranged opposite to each other. Liquid supply circulation pipes are respectively fixedly connected to the upper jet pipe group and the lower jet pipe group. An anode rod is arranged outside the jet pipe group. The anode rod includes an upper anode rod and a lower anode rod. The upper anode rod is horizontally arranged at the front end of the upper anode connecting plate. The lower anode rod is horizontally arranged at the front end of the lower anode connecting plate. Four anode iridium plates are equidistantly fixed on the anode rod, and two square grooves are vertically formed in each anode iridium plate. The positions of the square grooves correspond to the jet orifices of the jet branch pipes. Four pairs of sunshade assemblies are equidistantly arranged between the jet main pipes of the upper jet pipe group and the lower jet pipe group. The sunshade assembly includes a first-stage positioning slide pin, a first-stage sliding positioning plate, a second-stage sliding support leg, and an anode sunshade plate. The first-stage positioning slide pin is fixed on the outer wall of the jet main pipe of the lower jet pipe group. The upper part of the first-stage positioning slide pin is slidably sleeved with the first-stage sliding positioning plate. The second-stage sliding support legs are slidably installed on the upper wall of the first-stage sliding positioning plate from left to right. The anode sunshade plate is fixedly sleeved on the two second-stage sliding support legs.

[0024] Optionally, the hot pressing and shape correction section includes a lower hot pressing plate for the whole film, an upper hot pressing plate for the whole film, a lower hot pressing plate for the film edge, an upper hot pressing plate for the film edge, an auxiliary film feeding roller, and a film middle conveying roller. The transmission structures of the auxiliary film feeding roller and the film middle conveying roller are the same as those of the water retaining roller group and the conveying roller group. The lower left part and the upper right part of the left three-roller conveying structure are respectively rotatably sleeved with the lower hot pressing plate for the whole film and the upper hot pressing plate for the whole film. The lower left part and the upper right ends of the right three-roller conveying structure are respectively rotatably sleeved with the lower hot pressing plate for the film edge and the upper hot pressing plate for the film edge. The lower hot pressing plate for the whole film and the upper hot pressing plate for the whole film are in rectangular surface contact with the lower hot pressing plate for the film edge and the upper hot pressing plate for the film edge. Auxiliary film feeding rollers are rotatably contacted between the upper wall of the left part of the lower hot pressing plate for the whole film, the lower wall of the right part of the upper hot pressing plate for the whole film, the upper walls of the left parts of the two lower hot pressing plates for the film edge, and the lower walls of the right parts of the two upper hot pressing plates for the film edge. The auxiliary film feeding rollers are fixedly sleeved with the conveying structure of the rollers. Two film middle conveying rollers are rotatably arranged between the two lower hot pressing plates for the film edge and between the two upper hot pressing plates for the film edge. The film middle conveying rollers are fixedly sleeved with the conveying structure of the rollers.

[0025] Optionally, the activated conductive layer section includes an activated treatment liquid spray pipe group. There are two activated treatment liquid spray pipe groups fixed between the inner side of the rear wall of the upper tank and the front mounting frame of the activated conductive layer section. The activated treatment liquid spray pipe group is divided into an upper activated spray pipe and a lower activated spray pipe, and the upper activated spray pipe and the lower activated spray pipe are respectively arranged at the upper and lower parts of the upper tank.

[0026] Optionally, the curing composite layer section includes limiting card rails, sliding card seats, air knives and air ducts. There are ten pairs of limiting card rails correspondingly arranged up and down on the inner sides of the front mounting frame and the rear mounting frame of the curing composite layer section. The sliding card seats are installed in the limiting card rails. Air knives are fixedly installed between the sliding card seats that are vertically corresponding in the front and rear. The air ducts are fixedly connected to the air knives.

[0027] The present invention also includes a method for manufacturing a composite copper foil by vacuum-evaporating a base film, specifically including the following steps:

[0028] Step 1: Before processing the composite conductive layer on the film cloth, first let the film cloth pass through the hot pressing and shaping section. The water-bearing film cloth after the previous cleaning treatment passes through between the lower hot pressing plate for the whole film and the upper hot pressing plate for the whole film. The auxiliary film feeding rollers on the upper wall of the left part of the lower hot pressing plate for the whole film and the auxiliary film feeding rollers on the upper wall of the right part of the upper hot pressing plate for the whole film apply frictional force to the film cloth to convey the film cloth. Then the film cloth passes through the contact surface between the lower hot pressing plate for the whole film and the upper hot pressing plate for the whole film and is hot pressed by the whole film. The base film is hot pressed and flattened. Finally, the film cloth passes through the lower hot pressing plate for the film edge and the upper hot pressing plate for the film edge, and the film edge is further flattened. The film middle conveying roller, the left upper auxiliary film feeding roller of the lower hot pressing plate for the film edge and the right lower auxiliary film feeding roller of the upper hot pressing plate for the film edge stably convey the film cloth during the hot pressing process.

[0029] Step 2: After the film cloth completes the hot pressing and shaping of the base film in the hot pressing and shaping section, it continues to move horizontally to the right and enters the activated conductive layer section. The upper activated spray pipe and the lower activated spray pipe of the activated conductive layer section spray liquid onto the upper and lower surfaces of the film cloth. The spraying time is 30 - 70 s. The space composed of the mounting frame, the vertical partition board and the tank body soaks the film cloth to remove the oxide layer and activate the initial conductive layer. The soaking temperature of the activated conductive layer section is 45 degrees Celsius.

[0030] Step 3: Then the film cloth enters the conductive section. The power device of the wire body supplies energy to the sprocket to drive the power shaft to rotate. Using the meshing transmission between the gears, the main transmission shaft is linked to drive the conveying roller group and the water blocking roller group to convey the film cloth from left to right. The film cloth passes through between two pairs of conductive rollers and becomes the cathode with a negative charge on the surface. The upper vertical single spray pipe and the lower inclined double spray pipe of the conductive liquid spray pipe group spray electroplating copper liquid onto the conductive rollers during this process. The four conductive rollers are in the shape of an inverted isosceles trapezoid to reduce the vertical height of the conductive rollers. The two groups of water blocking roller groups block water and accumulate liquid to increase the liquid level height of the electroplating copper liquid, so that the electroplating copper liquid completely soaks the two pairs of conductive rollers.

[0031] Step 4: The rear membrane enters the copper tank section. The upper and lower jet pipes are used for jet flow, and the vertical segmented partition plates are used for limiting and blocking the flow, ensuring the soaking height of the electroplated copper solution in the copper tank section. A heating device is supplemented to ensure that the treatment temperature in the copper tank section is maintained at 22-25 °C. The membrane passes through the sunshade assembly. During this process, the liquid supply circulation pipe transports the electroplated copper solution from the middle of the jet pipe group to both ends, so that the jet branch pipes pass through the anode iridium plate and evenly supply liquid to the upper and lower walls of the membrane. The anode iridium plate is an overall grid plate, and two rectangular hollow slots are opened at its lower part and are correspondingly inlaid with the jet ports of the jet branch pipes. The first-stage sliding positioning plate and the second-stage sliding support legs of the sunshade assembly can both slide back and forth to adjust the front and back positions of the anode sunshade plate, thereby adjusting the sunshade area;

[0032] Step 5: After passing through the composite conductive layer coating section where two conductive sections are arranged at intervals with the copper tank section, the membrane continues to move to the right and enters the curing composite layer section, passing through between the upper and lower air knives.

[0033] As described above, the composite copper foil manufacturing device for the vacuum evaporation base film of the present invention has at least the following beneficial effects:

[0034] 1. By setting a hot pressing and shaping section at the left end of the upper tank, on the one hand, the deformed base film in the vacuum evaporation is shaped to ensure the adhesion effect of the subsequent composite conductive layer and the membrane, and on the other hand, the bonding force between the initial conductive layer and the base film is increased, ensuring the performance of the subsequent processed or used electronic equipment;

[0035] 2. By setting an activation conductive layer section, the oxide layer is removed before plating the composite conductive layer, increasing the friction of the initial conductive layer;

[0036] 3. In the conductive section, four conductive rollers in the shape of inverted isosceles trapezoids are used to reduce the height of the conductive rollers. Through the linkage of the linkage gear group and the connecting shaft, the two relatively upper and lower conductive rollers rotate steadily towards each other, transporting the membrane from left to right. The combination of the liquid level control of the liquid level switch and the auxiliary water blocking and liquid accumulation functions of the two groups of water blocking roller groups can completely immerse the two pairs of conductive rollers in the electroplated copper solution, preventing the conductive rollers from being plated and scratching the membrane, resulting in a good surface charging effect of the membrane and a good copper plating effect;

[0037] 4. In the copper tank section, the jet pipe group is used to evenly jet the flow rate, the rotating support seat adjusts the jet angle, the anode iridium plate reduces the current density, enabling the anode current to be evenly output, improving the stability of the anode performance. The sunshade assembly flexibly adjusts the sunshade area to meet the sunshade requirements of different wide-width membrane cloths. The vertical segmented partition plates limit and block the flow, ensuring the soaking height of the electroplated copper solution in the copper tank section. A heating device is supplemented to accurately control the processing precision of each process of the electroplated composite layer, ensuring the copper layer thickness and uniformity of the electroplated composite layer, making the electrical performance of the finished composite copper foil stable, with good performance in high-frequency or high-current applications and high safety;

[0038] 5. By setting a curing composite layer section at the right end of the upper tank and utilizing the principle of first heating and then cooling, and thermal expansion and contraction, the adhesion between the conductive layer, the composite layer and the base film is improved, and the copper layer of the cured composite copper foil is ensured, guaranteeing the quality of the composite copper foil.

[0039] 6. The method for manufacturing a composite copper foil by vacuum evaporating the base film further refines the precision of production process control, has very practical and realistic significance for the improvement of the current composite copper foil manufacturing technology, and is convenient for the popularization of the composite copper foil processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It shows a three-dimensional schematic view of the overall structure of the present invention from the southwest perspective.

[0041] Figure 2 It shows a left view schematic diagram of the overall structure of the present invention.

[0042] Figure 3 It shows a sectional view schematic diagram of the upper tank of the present invention.

[0043] Figure 4 It shows a three-dimensional schematic view of the rear side structure of the upper tank of the present invention from the upward perspective.

[0044] Figure 5 It shows a three-dimensional schematic view of the upper tank structure of the present invention from the downward perspective.

[0045] Figure 6 It shows a three-dimensional schematic view of the conductive cabinet assembly structure of the present invention from the southwest perspective.

[0046] Figure 7 It shows a three-dimensional schematic view of the left side structure of the conductive cabinet assembly of the present invention from the upward perspective.

[0047] Figure 8 It shows a front view schematic diagram of the conductive cabinet assembly structure of the present invention.

[0048] Figure 9 It shows a three-dimensional schematic view of the arrangement mode of each treatment section in the upper tank of the present invention from the southwest perspective.

[0049] Figure 10 It shows a three-dimensional schematic view of the hot pressing and shape correction section structure of the present invention from the southwest perspective.

[0050] Figure 11 It shows a three-dimensional schematic view of the activated conductive layer section structure of the present invention from the southwest perspective.

[0051] Figure 12 It shows a three-dimensional schematic view of the matching structure between the conductive section and the copper tank section of the present invention from the southwest perspective.

[0052] Figure 13Shown is a perspective view from the southwest of the drive structure of the conductive section and the copper groove section of the present invention.

[0053] Figure 14 Shown is the present invention Figure 13 Enlarged view of the structure of area A therein.

[0054] Figure 15 Shown is a front view of the drive structure of the conductive section and the copper groove section of the present invention.

[0055] Figure 16 Shown is a left view of the drive structure of the conductive section and the copper groove section of the present invention.

[0056] Figure 17 Shown is a perspective view from the southwest of the structure of the upper anode jetting system of the present invention.

[0057] Figure 18 Shown is a perspective view from the bottom of the structure of the upper anode jetting system of the present invention.

[0058] Figure 19 Shown is a perspective view from the southwest of the cooperating structure of the lower anode jetting system and the sunshade assembly of the present invention.

[0059] Figure 20 Shown is a perspective view from the bottom of the cooperating structure of the lower anode jetting system and the sunshade assembly of the present invention.

[0060] Figure 21 Shown is a left view of the structure of the sunshade assembly of the present invention.

[0061] Figure 22 Shown is a perspective view from the southwest of the structure of the cured composite layer section of the present invention.

[0062] Element number description

[0063] 1. Frame;

[0064] 2. Upper tank;

[0065] 201. Hot pressing and straightening section; 2011. Lower hot pressing plate for film flattening; 2012. Upper hot pressing plate for film flattening; 2013. Auxiliary film feeding roller; 2014. Lower hot pressing plate for film edge; 2015. Upper hot pressing plate for film edge; 2016. Film middle conveying roller;

[0066] 202. Activated conductive layer section; 2021. Activating treatment liquid spray pipe group; 2021a. Upper activating spray pipe; 2021b. Lower activating spray pipe;

[0067] 203. Conductive section; 2031. Cathode main copper bar; 2032. Rotating conductive silver ring; 2033. Connecting shaft; 2034. Conductive roller; 2035. Power shaft; 2036. Sprocket; 2037. Linkage gear set; 2038. Linkage helical gear set; 2039. Conductive liquid spray pipe set; 2039a. Upper vertical single spray pipe; 2039b. Lower inclined double spray pipe;

[0068] 204. Copper trough section; 2041. Anode copper bar mounting seat; 2042. Anode connecting plate; 2042a. Upper anode connecting plate; 2042b. Lower anode connecting plate; 2043. Rotating support seat; 2044. Jet pipe set; 2045. Liquid supply circulation pipe; 2046. Anode rod; 2046a. Upper anode rod; 2046b. Lower anode rod; 2047. Anode iridium plate; 2048. Sunshade assembly; 2048a. First-level positioning sliding pin; 2048b. First-level sliding positioning plate; 2048c. Second-level sliding support leg; 2048d. Anode sunshade;

[0069] 205. Curing composite layer section; 2051. Limit card rail; 2052. Sliding card seat; 2053. Air knife; 2054. Air duct;

[0070] 206. Driven conveyor roller assembly; 2061. Support; 2062. Main conveyor shaft; 2063. Conveyor roller set; 2064. Water-blocking roller set;

[0071] 207. Sectional isolation assembly; 2071. Mounting frame; 2072. Vertical sectional partition; 2073. Sliding bracket; 2074. Photoelectric sensor; 2075. Liquid level switch; 2076. Horizontal current-limiting plate;

[0072] 3. Lower trough;

[0073] 4. Conductive cabinet assembly; 401. Rectifier cabinet; 402. Exhaust duct; 403. Cathode connecting copper bar; 404. Anode connecting copper bar. Detailed implementation manners

[0074] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and be able to implement it, but the exemplified embodiments shall not be construed as limiting the present invention.

[0075] As in the background art, during the vacuum evaporation process, the adhesion between the initial conductive layer and the base film is affected by multiple factors, such as evaporation conditions (temperature, pressure, etc.), the cleanliness of the base film surface, and the treatment process. This unstable adhesion will cause the separation between the copper layer and the base film during subsequent processing or use, affecting the performance of electronic devices.

[0076] Moreover, when electroplating a composite layer on a large-area conductive layer, with a large production scale and high precision requirements for process control, the copper layer is prone to local over-thickness or under-thickness. The non-uniformity of the copper layer thickness will lead to unstable electrical performance, affecting the performance of the composite copper foil in high-frequency or high-current applications, and may even cause local overheating or a decline in electrical performance.

[0077] Finally, the base film material of the composite copper foil has poor stability at high temperatures, and will deform, shrink or its performance will decline during the high-temperature evaporation process, resulting in a decrease in the adhesion between the conductive layer and the composite layer and the base film. In severe cases, the copper layer may even separate from the base film, affecting the quality of the final composite copper foil.

[0078] As Figure 1 and Figure 22 shown, to solve the above problems, the inventor sets a hot pressing and shaping section 201 in the pretreatment section of electroplating the composite conductive copper layer. By using water vapor and hot pressing, during the horizontal movement of the composite copper foil, the curling and slight wrinkles of the vacuum-evaporated base film caused by temperature during the production process can be corrected. By setting an activated conductive layer section 202, a conductive section 203 and a copper tank section 204, before electroplating the composite conductive layer, the initial conductive layer oxidized due to contact with air during transmission is activated, improving the electroplating copper quality of the subsequent conductive section 203 and copper tank section 204. By setting a curing composite layer section 205, the principle of thermal expansion and contraction can be used to increase the connection tightness between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film. Therefore, a device for manufacturing a composite copper foil with a vacuum-evaporated base film is invented, including:

[0079] A frame 1, on the top of the frame 1, a conductive box assembly 4 is installed. Below the conductive box assembly 4, an upper tank 2 and a lower tank 3 are provided, and both the upper tank 2 and the lower tank 3 are installed on the frame 1. The conductive box assembly 4 is electrically connected to the upper tank 2. The upper tank 2 and the lower tank 3 are fixed, and a liquid flow circulation is carried out between the upper tank 2 and the lower tank 3 through a pipeline.

[0080] The upper tank 2 is sequentially provided with a hot pressing and shaping section 201, an activated conductive layer section 202, two groups of conductive sections 203, a copper tank section 204, and a curing composite layer section 205 from left to right. The hot pressing and shaping section 201, the activated conductive layer section 202, the two groups of conductive sections 203, the copper tank section 204, and the curing composite layer section 205 are horizontally connected. Inside the front part of the upper tank 2, a driven transmission roller assembly 206 is installed, and the driven transmission roller assembly 206 provides power for the horizontal transmission of the film cloth in each processing section. Inside the upper tank 2, a segmented isolation assembly 207 is provided, and the segmented isolation assembly 207 is used to separate the processing sections into different processing spaces.

[0081] Among them, the hot pressing and shaping section 201 is used to utilize the water vapor in the pretreatment section and adopt hot pressing to correct the curling and slight wrinkles of the vacuum-evaporated base film caused by temperature during the horizontal movement of the composite copper foil.

[0082] Among them, the activated conductive layer section 202 is used to activate the initial conductive layer oxidized due to contact with air during transmission, ensuring the composite effect of the subsequent conductive layer;

[0083] Among them, the conductive section 203 is used to attach negative electricity to the base film;

[0084] Among them, the copper tank section 204 is used to electroplate a composite conductive copper layer on the base film using the electrolysis principle;

[0085] Among them, the curing composite layer section 205 is used to increase the connection tightness between the upper and lower composite conductive layers, the upper and lower initial conductive layers, and the base film.

[0086] Embodiment 1

[0087] Please refer to Figures 1 - 5 and Figures 9 - 10 , to achieve the above and other related purposes, the present invention provides a composite copper foil manufacturing device for vacuum evaporation coating on a base film, including: a driven conveyor roller assembly 206 and a hot pressing and shaping section 201. The driven conveyor roller assembly 206 includes a support 2061, a main conveyor shaft 2062, a conveyor roller group 2063, and a water retaining roller group 2064. A plurality of supports 2061 are fixed inside the front wall of the upper tank 2. A main conveyor shaft 2062 is rotatably installed between the rear parts of the plurality of supports 2061. A conveyor roller group 2063 and a water retaining roller group 2064 are drivingly installed on the main conveyor shaft 2062. The conveyor roller group 2063 is used to convey the film cloth from left to right. The water retaining roller group 2064 is used to increase the liquid level height of the treatment liquid between the two water retaining roller groups 2064 while conveying the film cloth, so that the film cloth can be soaked to ensure the coating processing effect;

[0088] Among them, as Figure 5 and Figure 9 shown, the segmented isolation component 207 includes a mounting frame 2071 and a vertical segmented partition 2072. Mounting frames 2071 are fixed in both the front and rear parts inside the upper tank 2. The conveyor roller group 2063 and the water retaining roller group 2064 are both installed between the front and rear mounting frames 2071. A vertical segmented partition 2072 is fixed between the middle parts of the mounting frames 2071 of the hot pressing and shaping section 201, which can isolate the left full film shaping section and the right film edge shaping section of the hot pressing and shaping section 201, preventing the mutual flow of water vapor and hot air;

[0089] Among them, as Figure 10As shown in the figure, the hot pressing and shape correcting section 201 includes a hot pressing plate 2011 under the whole film, a hot pressing plate 2012 above the whole film, a hot pressing plate 2014 under the film edge, a hot pressing plate 2015 above the film edge, an auxiliary film feeding roller 2013 and a film middle conveying roller 2016. The transmission structures of the auxiliary film feeding roller 2013 and the film middle conveying roller 2016 are the same as those of the water blocking roller group 2064 and the conveying roller group 2063. The lower left part and the upper right part of the left three-roller transmission structure are respectively rotatably sleeved with the hot pressing plate 2011 under the whole film and the hot pressing plate 2012 above the whole film. The lower left part and the upper right ends of the right three-roller transmission structure are respectively rotatably sleeved with the hot pressing plate 2014 under the film edge and the hot pressing plate 2015 above the film edge. The hot pressing plate 2011 under the whole film and the hot pressing plate 2012 above the whole film are in rectangular surface contact with the hot pressing plate 2014 under the film edge and the hot pressing plate 2015 above the film edge. The auxiliary film feeding roller 2013 is rotatably contacted between the upper wall of the left part of the hot pressing plate 2011 under the whole film, the lower wall of the right part of the hot pressing plate 2012 above the whole film, the upper walls of the left parts of the two hot pressing plates 2014 under the film edge and the lower walls of the right parts of the two hot pressing plates 2015 above the film edge. The auxiliary film feeding roller 2013 is fixedly sleeved with the transmission structure of the roller. Two film middle conveying rollers 2016 are rotatably arranged between the two hot pressing plates 2014 under the film edge and between the two hot pressing plates 2015 above the film edge. The film middle conveying roller 2016 is fixedly sleeved with the transmission structure of the roller. When the film cloth enters the hot pressing and shape correcting section 201, the water-bearing film cloth after pre-cleaning passes through between the hot pressing plate 2011 under the whole film and the hot pressing plate 2012 above the whole film. The auxiliary film feeding rollers 2013 on the upper wall of the left part of the hot pressing plate 2011 under the whole film and the auxiliary film feeding rollers 2013 on the upper wall of the right part of the hot pressing plate 2012 above the whole film can apply frictional force to the film cloth, convey the film cloth, and prevent the film cloth from being stuck and over-stretched after thermal deformation when passing through the contact surface between the hot pressing plate 2011 under the whole film and the hot pressing plate 2012 above the whole film, so that the whole film base film has the effect of being flattened by hot pressing. Then the film cloth passes through between the hot pressing plate 2014 under the film edge and the hot pressing plate 2015 above the film edge, and the film edge is further flattened. The film middle conveying roller 2016, the auxiliary film feeding roller 2013 on the upper left part of the hot pressing plate 2014 under the film edge and the auxiliary film feeding roller 2013 on the lower right part of the hot pressing plate 2015 above the film edge can ensure the stable conveyance of the film cloth during the hot pressing process. In this way, on the one hand, the deformed base film in vacuum evaporation is shaped to ensure the adhesion effect of the subsequent composite conductive layer and the film cloth. On the other hand, the bonding force between the initial conductive layer and the base film is increased, ensuring the performance of the subsequent processed or used electronic equipment.

[0090] Embodiment 2

[0091] Please refer to Figures 1 - 9 and Figures 11 - 21, the present invention provides a device for manufacturing a composite copper foil for a vacuum evaporation base film, further comprising: a conductive chassis assembly 4, an activation conductive layer section 202, a conductive section 203, and a copper tank section 204. The conductive chassis assembly 4 includes a rectifying chassis 401, an exhaust duct 402, a cathode connection copper bar 403, and an anode connection copper bar 404. The rectifying chassis 401 and the exhaust duct 402 are fixed to the top of the frame 1. The cathode connection copper bar 403 and the anode connection copper bar 404 are installed on the lower wall of the rectifying chassis 401, which can supply power to the conductive section 203 and the copper tank section 204. The exhaust duct 402 can discharge the waste gas generated during the electroplating process of the composite conductive layer in the conductive section 203 and the copper tank section 204.

[0092] Among them, as Figure 11 shown, the activation conductive layer section 202 includes an activation treatment liquid spray pipe group 2021. Two activation treatment liquid spray pipe groups 2021 are fixed between the inner side of the rear wall of the upper tank 2 and the front mounting frame 2071 of the activation conductive layer section 202. The activation treatment liquid spray pipe group 2021 is divided into an upper activation spray pipe 2021a and a lower activation spray pipe 2021b. The upper activation spray pipe 2021a and the lower activation spray pipe 2021b are respectively arranged at the upper and lower parts of the upper tank 2. The upper activation spray pipe 2021a and the lower activation spray pipe 2021b spray liquid onto the upper and lower surfaces of the membrane cloth. The space formed by the mounting frame 2071, the vertical partition board 2072, and the tank body can block liquid, accumulate liquid, and soak the membrane cloth. By combining the two methods of spraying and soaking, the activation treatment liquid can fully react with the oxide layer and the initial conductive layer on the surface of the membrane cloth, remove the oxide layer, and increase the friction force of the initial conductive layer, ensuring the bonding effect between the subsequent composite conductive layer and the initial conductive layer.

[0093] Among them, as Figure 5 and Figure 9As shown, the segmented isolation component 207 further includes a sliding bracket 2073, a photoelectric sensor 2074, a liquid level switch 2075, and a horizontal current limiting plate 2076. A vertical segmented partition 2072 is fixed between the left part of the mounting bracket 2071 of the activated conductive layer segment 202 and the right part of the mounting bracket 2071 of the copper tank segment 204, and two vertical segmented partitions 2072 are fixed between the mounting brackets 2071 of the conductive segment 203. A sliding bracket 2073 is fixed between the right parts of the mounting brackets 2071 of the conductive segment 203. A photoelectric sensor 2074 is slidably mounted on the sliding bracket 2073. Horizontal current limiting plates 2076 are mounted between the front parts and the rear parts of the two groups of water retaining roller sets 2064 of the conductive segment 203. Liquid level switches 2075 are fixed to the top of the rear horizontal current limiting plate 2076 of the conductive segment 203 and the top of the conveying roller set 2063 at the right end of the copper tank segment 204. The liquid level switch 2075 of the conductive segment 203 can monitor the liquid level height of the conductive segment 203 in real time and control the spraying flow rate of the conductive segment 203, so that the electroplating copper solution can always completely immerse the two pairs of conductive rollers 2034 and the membrane cloth, preventing the conductive rollers 2034 from being plated and ensuring the conductive coating effect of the conductive rollers 2034. The photoelectric sensor 2074 slides back and forth on the sliding bracket 2073, and can detect the coating thickness and uniformity of each part of the membrane cloth after passing through the conductive segment 203, so as to adjust the subsequent coating processing degree in time and ensure the coating processing quality.

[0094] Among them, as Figures 12 - 16As shown in the figure, the conductive section 203 includes a cathode main copper bar 2031, a rotating conductive silver ring 2032, a connecting shaft 2033, a conductive roller 2034, a power shaft 2035, a sprocket 2036, a linkage gear set 2037, a linkage helical gear set 2038, and a conductive liquid spray pipe set 2039. The upper part of the rear wall of the upper tank 2 is fixed with a cathode main copper bar 2031. The cathode main copper bar 2031 is fixed to the cathode connecting copper bar 403 by screws. The cathode main copper bar 2031 is electrically connected to the rotating conductive silver ring 2032 through a connector. A connecting shaft 2033 is rotatably arranged in the middle of each of the four rotating conductive silver rings 2032. A conductive roller 2034 is fixedly sleeved on the outer wall of the middle of the connecting shaft 2033. The rectifier cabinet 401 can supply power to the conductive roller 2034 through the cathode connecting copper bar 403, the cathode main copper bar 2031, and the rotating conductive silver ring 2032. When the membrane passes through the two pairs of conductive rollers 2034, it can become a cathode and carry a negative charge on its surface. A power shaft 2035 is rotatably installed between the two supports 2061 of the conductive section 203. A sprocket 2036 is fixedly sleeved on the outer wall of the middle of the power shaft 2035, and the sprocket 2036 is connected to the output end of the power motor through a chain drive mechanism. A linkage gear set 2037 is installed between the power shaft 2035 and the main transmission shaft 2062 of the conductive section 203. A linkage helical gear set 2038 is installed between the front outer walls of the lower two connecting shafts 2033 and the left outer wall of the power shaft 2035. The rear outer walls of the four connecting shafts 2033 are drivingly connected to two groups of linkage gear sets 2037. The power device of the wire body supplies energy to the sprocket 2036, which can drive the power shaft 2035 to rotate. By using the meshing transmission between gears, the main transmission shaft 2062 is linked to drive the conveyor roller set 2063 and the water retaining roller set 2064 to convey the membrane from left to right. The conductive liquid spray pipe set 2039 is installed in the rear wall of the upper tank 2 of the conductive section 203. The conductive liquid spray pipe set 2039 includes an upper vertical single spray pipe 2039a and a lower inclined double spray pipe 2039b. The upper vertical single spray pipe 2039a is vertically arranged above the middle of the four conductive rollers 2034, and the lower inclined double spray pipe 2039b is arranged above the two ends of the four conductive rollers 2034. When the membrane passes, the upper vertical single spray pipe 2039a and the lower inclined double spray pipe 2039b of the conductive liquid spray pipe set 2039 spray electroplating copper liquid onto the conductive rollers 2034. The four conductive rollers 2034 are in the shape of an inverted isosceles trapezoid, which reduces the height of the conductive rollers 2034. The upper vertical single spray pipe 2039a is arranged in the middle directly above the conductive rollers 2034, and the lower inclined double spray pipe 2039b is inclined and arranged on the left and right below the conductive rollers 2034. Under the liquid level control of the liquid level switch 2075 and the auxiliary water retaining and liquid accumulation functions of the two groups of water retaining roller sets 2064, the electroplating copper liquid can completely immerse the two pairs of conductive rollers 2034, so that the charging effect on the surface of the membrane is good.

[0095] Among them, as Figures 12 - 21As shown in the figure, the copper tank section 204 includes an anode copper bar mounting seat 2041, an anode connection plate 2042, a rotating support seat 2043, a jet pipe group 2044, a liquid supply circulation pipe 2045, an anode rod 2046, an anode iridium plate 2047, and a sunshade assembly 2048. The anode copper bar mounting seat 2041 is fixed inside the rear wall of the upper tank 2. The upper and lower ends of the rear end of the anode copper bar mounting seat 2041 are fixed to the anode connection copper bar 404. The front end of the anode copper bar mounting seat 2041 is fixed with an anode connection plate 2042 through a connecting piece. The rectifier cabinet 401 supplies power to the anode iridium plate 2047 through the anode connection copper bar 404, the anode copper bar mounting seat 2041, the anode connection plate 2042, and the anode rod 2046. The anode iridium plate 2047 is an overall grid plate, and two rectangular hollow slots are opened in its lower part corresponding to the jet ports of the jet branch pipes for inlaid setting, which can reduce the current density, make the anode current output evenly, and thus improve the stability of the anode performance. The anode connection plate 2042 includes an upper anode connection plate 2042a and a lower anode connection plate 2042b. The rotating support seat 2043 is installed inside the rear wall of the upper tank 2. The jet pipe group 2044 is installed between the lower parts of the two rotating support seats 2043 and on the lower anode connection plate 2042b. The rotating support seat 2043 can adjust the jet angle of the upper jet pipe group 2044 according to the coating thickness on the surface of the membrane cloth. The jet pipe group 2044 includes two horizontally arranged jet main pipes and eight jet branch pipes vertically arranged between the two jet main pipes. The jet ports of the jet branch pipes of the upper jet pipe group 2044 and the lower jet pipe group 2044 are arranged oppositely. The liquid supply circulation pipes 2045 are respectively fixedly connected to the upper jet pipe group 2044 and the lower jet pipe group 2044. The jet pipe group 2044 is provided with an anode rod 2046 on the outside. The anode rod 2046 includes an upper anode rod 2046a and a lower anode rod 2046b. The upper anode rod 2046a is horizontally arranged at the front end of the upper anode connection plate 2042a, and the lower anode rod 2046b is horizontally arranged at the front end of the lower anode connection plate 2042b. Four anode iridium plates 2047 are equidistantly fixed on the anode rod 2046, and two square slots are vertically opened on each anode iridium plate 2047, and the positions of the square slots correspond to the jet ports of the jet branch pipes. The liquid supply circulation pipe 2045 is arranged in the middle of the jet pipe group 2044, so that when the liquid supply circulation pipe 2045 supplies liquid to the jet branch pipes of the jet pipe group 2044, the liquid flow of the electroplating copper solution received by each jet branch pipe is uniform, and the jet branch pipes can pass through the anode iridium plate 2047 to supply liquid to the upper and lower walls of the membrane cloth evenly. Four pairs of sunshade assemblies 2048 are equidistantly arranged between the jet main pipes of the upper jet pipe group 2044 and the lower jet pipe group 2044. The sunshade assembly 2048 includes a first-stage positioning slide pin 2048a, a first-stage sliding positioning plate 2048b, a second-stage sliding support leg 2048c, and an anode sunshade plate 2048d. The first-stage positioning slide pin 2048a is fixed on the outer wall of the jet main pipe of the lower jet pipe group 2044, and the upper part of the first-stage positioning slide pin 2048a is slidably sleeved with the first-stage sliding positioning plate 2048b,On the upper wall of the first - stage sliding positioning plate 2048b, the second - stage sliding support legs 2048c are slidably installed left and right. An anodic sunshade plate 2048d is fixedly sleeved on the two second - stage sliding support legs 2048c. Both the first - stage sliding positioning plate 2048b and the second - stage sliding support legs 2048c of the sunshade assembly 2048 can slide back and forth to adjust the front - rear position of the anodic sunshade plate 2048d, thereby adjusting the sunshade area, meeting the sunshade requirements of different - width - sized film fabrics, and ensuring the copper - plating effect of the composite conductive layer of the film fabric.

[0096] Thus, before plating the composite conductive layer, the activation conductive layer segment 202 removes the oxide layer to increase the friction of the initial conductive layer. In the conductive segment 203, through four conductive rollers 2034 in the shape of inverted isosceles trapezoids, the height of the conductive rollers 2034 is reduced, and through the linkage of the linkage gear set 2037 and the connecting shaft 2033, the two relatively - upper - and - lower conductive rollers 2034 rotate steadily towards each other, conveying the film fabric from left to right. The combination of the liquid - level control of the liquid - level switch 2075 and the auxiliary water - retaining and liquid - accumulating functions of the two groups of water - retaining roller sets 2064 enables the electroplating copper solution to completely immerse the two pairs of conductive rollers 2034, preventing the conductive rollers 2034 from being plated and scratching the film fabric, resulting in a good surface - charging effect of the film fabric and a good copper - plating effect. In the copper - tank segment 204, the spray - flow tube group 2044 is used to evenly spray the flow rate, the rotating support base 2043 adjusts the spray - flow angle, and the anodic iridium plate 2047 reduces the current density to make the anodic current output evenly, improving the stability of the anodic performance. The sunshade assembly 2048 flexibly adjusts the sunshade area to meet the sunshade requirements of different - width - sized film fabrics. The vertical segmented partition 2072 limits the flow and ensures the liquid - accumulating immersion height of the electroplating copper solution in the copper - tank segment 204. With the assistance of a heating device, the processing precision of each process of the electroplated composite layer is accurately controlled, ensuring the copper - layer thickness and uniformity of the electroplated composite layer, making the finished composite copper foil have stable electrical properties, good performance in high - frequency or high - current applications, and high safety.

[0097] Example 3

[0098] Please refer to Figures 1 - 5 、 Figure 9 and Figure 22, the present invention provides a device for manufacturing a composite copper foil for vacuum evaporation coating on a base film, further comprising: a curing composite layer section 205, the curing composite layer section 205 includes a limit clamping rail 2051, a sliding clamping seat 2052, an air knife 2053 and an air delivery pipe 2054. On the inner sides of the front mounting frame 2071 and the rear mounting frame 2071 of the curing composite layer section 205, ten pairs of limit clamping rails 2051 are correspondingly arranged up and down. A sliding clamping seat 2052 is installed in the limit clamping rail 2051. An air knife 2053 is fixedly installed between the vertically corresponding sliding clamping seats 2052 at the front and the rear. The air knife 2053 is fixedly connected to the air delivery pipe 2054. After the film cloth enters the curing composite layer section 205, it passes through between the upper and lower air knives 2053. During this process, under the action of the hot air of the first five pairs of air knives 2053, the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film are heated and swollen, and then under the action of the cold air of the last five pairs of air knives 2053, the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film are cooled and tightened, so that the connection between the two conductive layers and the base film is tightened. The sliding clamping seat 2052 slides in the limit clamping rail 2051, which can control the distance between the air knife 2053 and the film cloth, thereby controlling the bonding effect between the copper layer and the base film. In this way, the adhesion of the conductive layer and the composite layer to the base film is improved, the copper layer of the cured composite copper foil is cured, and the quality of the composite copper foil is ensured.

[0099] Example 4

[0100] Please refer to Figures 1 - 22 , the present invention also includes a method for manufacturing a composite copper foil for vacuum evaporation coating on a base film, specifically the following steps:

[0101] Step 1: Before processing the composite conductive layer on the film cloth, vacuum evaporation coating is required to attach an initial conductive layer to the originally insulating base film. However, the temperature during the vacuum evaporation coating process will cause wrinkles, curling and deformation of the base film, affecting the bonding force between the subsequent composite conductive layer and the initial conductive layer. Therefore, before processing the composite conductive layer, first let the film cloth pass through the hot pressing and shaping section 201, so that the water-bearing film cloth after the previous cleaning treatment passes through between the whole film lower hot pressing plate 2011 and the whole film upper hot pressing plate 2012. The auxiliary film feeding rollers 2013 on the upper wall of the left part of the whole film lower hot pressing plate 2011 and the auxiliary film feeding rollers 2013 on the upper wall of the right part of the whole film upper hot pressing plate 2012 can apply frictional force to the film cloth to convey the film cloth, preventing the film cloth from being stuck and overly stretched after thermal deformation when passing through the contact surface of the whole film lower hot pressing plate 2011 and the whole film upper hot pressing plate 2012, so that the whole film base film has the effect of being flattened by hot pressing. Then the film cloth passes through between the film edge lower hot pressing plate 2014 and the film edge upper hot pressing plate 2015, and the film edge is further flattened. The film middle conveying roller 2016, the auxiliary film feeding rollers 2013 on the upper left part of the film edge lower hot pressing plate 2014 and the auxiliary film feeding rollers 2013 on the lower right part of the film edge upper hot pressing plate 2015 can ensure the stable conveyance of the film cloth during the hot pressing process;

[0102] Step 2: During the pretreatment of the initial conductive layer of the membrane cloth when it is being conveyed and compounded with the conductive layer, oxidation occurs on the side in contact with air. It is difficult to attach the compound conductive layer to the oxidation layer. Therefore, before processing the compound conductive layer, it is necessary to remove the oxidation layer and activate the initial conductive layer to ensure the bonding force between the subsequent initial conductive layer and the compound conductive layer. After the base film is hot-pressed and shaped in the hot-press shaping section 201 of the membrane cloth, it continues to move horizontally to the right and enters the activated conductive layer section 202. In the activated conductive layer section 202, the upper activation spray nozzle 2021a and the lower activation spray nozzle 2021b are used to spray a jet flow onto the upper and lower surfaces of the membrane cloth and immerse it in the space composed of the mounting frame 2071, the vertical segmented partition 2072, and the tank body to remove the oxidation layer and activate the initial conductive layer. The activation treatment liquid sprayed by the pair of activation treatment liquid spray pipe groups 2021 on the left is a mixed liquid of deionized water, hydrochloric acid solution, and palladium salt, and the activation treatment liquid sprayed by the pair of activation treatment liquid spray pipe groups 2021 on the right is a mixed liquid of deionized water, dilute hydrochloric acid, and palladium dichloride. The jet flow time is 30 - 70 s, and the immersion temperature in the activated conductive layer section 202 is 45 degrees Celsius;

[0103] Step 3: The rear membrane enters the conductive section 203. The power device of the wire body supplies energy to the sprocket 2036, driving the power shaft 2035 to rotate. Through the meshing transmission between gears, the main transmission shaft 2062 is linked, driving the conveyor roller group 2063 and the water-blocking roller group 2064 to convey the membrane from left to right, enabling the membrane to pass through the two pairs of conductive rollers 2034 and become the cathode, with a negative charge on its surface. The upper vertical single nozzle 2039a and the lower inclined double nozzle 2039b of the conductive liquid spray pipe group 2039 spray electroplating copper solution onto the conductive rollers 2034 during this process. The four conductive rollers 2034 are in the shape of an inverted isosceles trapezoid, reducing the height of the conductive rollers 2034. The upper vertical single nozzle 2039a is arranged in the middle directly above the conductive roller 2034, and the lower inclined double nozzle 2039b is inclined and arranged on the left and right below the conductive roller 2034. Under the water-blocking and liquid-accumulating effect of the two groups of water-blocking roller groups 2064, the electroplating copper solution can completely immerse the two pairs of conductive rollers 2034. The electroplating copper solution includes copper sulfate, sulfuric acid, chloride ions, inhibitor, carrier, brightener, and grain refiner. The inhibitor combines with chloride ions to form a complex with copper ions, increasing the overvoltage of copper ion reduction on the cathode surface and inhibiting the copper deposition rate. The carrier is a long-chain polymer of polyethers, such as polyethylene glycol, polypropylene glycol, polyethylene glycol-polypropylene glycol block copolymer, polytetrahydrofuran, or polyoxyethylene-polyoxypropylene copolymer. It forms a complex with copper ions and, under the action of an electric field, carriers copper ions to migrate to the cathode surface and adsorb on the high-potential area of the initial conductive layer surface of the membrane to form a resistance layer, improving the uniformity of the composite conductive layer on the membrane surface. Chloride and nickel salt are used as grain refiners, serving as the crystal seeds for copper ions to deposit on the cathode surface. While reducing the activation energy during copper ion reduction, it can increase the copper deposition rate. Quinoline, ethylenediamine, and boric acid are used as brighteners, which can assist in the formation of new crystal nuclei, making the grains of copper deposition fine and increasing the coating gloss of the composite conductive layer;

[0104] Step 4: The rear membrane enters the copper tank section 204, and the spray pipe group 2044 sprays fluid up and down. The vertical segmented partition plate 2072 limits and blocks the flow to ensure the immersion height of the electroplating copper solution in the copper tank section 204. With the assistance of a heating device, the processing temperature in the copper tank section 204 is maintained at 22 - 25 °C. The membrane passes through the sunshade assembly 2048. During this process, the liquid supply circulation pipe 2045 transports the electroplating copper solution from the middle of the spray pipe group 2044 to both ends, enabling the spray branch pipes to pass through the anode iridium plate 2047 and evenly supply the liquid to the upper and lower walls of the membrane. The anode iridium plate 2047 is an overall grid plate, and two rectangular hollow slots are opened at its lower part and are correspondingly inlaid with the spray ports of the spray branch pipes, which can reduce the current density, enable the uniform output of the anode current, and further improve the stability of the anode performance. The rotating support base 2043 can adjust the spray angle of the upper spray pipe group 2044. The first-stage sliding positioning plate 2048b and the second-stage sliding support leg 2048c of the sunshade assembly 2048 can both slide back and forth to adjust the front and back positions of the anode sunshade plate 2048d, thereby adjusting the sunshade area and ensuring the copper plating effect of the composite conductive layer of the membrane.

[0105] Step 5: After passing through the composite conductive layer film covering section where two conductive sections 203 and the copper tank section 204 are arranged at intervals, the membrane continues to move rightward and enters the curing composite layer section 205, passing through between the upper and lower air knives 2053. During this process, the membrane is first heated and expanded between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film under the action of the hot air of the first five pairs of air knives 2053, and then shrunk under the action of the cold air of the last five pairs of air knives 2053, so that the connection between the two conductive layers and the base film is tightened.

[0106] Although the present invention has been described in detail above with general descriptions and specific embodiments, based on the present invention, some modifications or improvements can be made, which are obvious to those skilled in the art. Therefore, these modifications or improvements made without departing from the spirit of the present invention all fall within the scope of protection required by the present invention.

Claims

1. A composite copper foil manufacturing device for vacuum evaporation base film, characterized in that: include: A frame (1), wherein a conductive chassis component (4) is installed on the top of the frame (1), an upper trough (2) and a lower trough (3) are arranged below the conductive chassis component (4), and the upper trough (2) and the lower trough (3) are both installed on the frame (1), the conductive chassis component (4) is electrically connected to the upper trough (2), the upper trough (2) and the lower trough (3) are fixed, and liquid circulation is carried out between the upper trough (2) and the lower trough (3) through a pipeline; The upper tank (2) is provided with a hot pressing shaping section (201), an activated conductive layer section (202), two groups of conductive sections (203) and a copper trough section (204), and a cured composite layer section (205) in sequence from left to right, and the hot pressing shaping section (201), the activated conductive layer section (202), the two groups of conductive sections (203) and the copper trough section (204), and the cured composite layer section (205) are horizontally connected, a driven transmission roller assembly (206) is installed in the front part of the upper tank (2), and the driven transmission roller assembly (206) provides power for the horizontal transmission of the membrane cloth in each processing section, and a segmented isolation assembly (207) is arranged in the upper tank (2), and the segmented isolation assembly (207) is used to separate the processing section into different processing spaces; The hot pressing shaping section (201) is used to utilize the water vapor in the pre-treatment section and adopt hot pressing to correct the curling and slight wrinkles of the vacuum-evaporated base film caused by the temperature during the manufacturing process during the horizontal movement of the composite copper foil; The activated conductive layer section (202) is used to activate the initial conductive layer oxidized by contact with air during transportation, so as to ensure the composite effect of the subsequent conductive layer; Wherein, the conductive segment (203) is used to attach negative charges to the base film; The copper tank section (204) is used to electroplate a composite conductive copper layer on the base film by utilizing the electrolysis principle; The solidified composite layer section (205) is used to increase the tightness of the connection between the upper and lower composite conductive layers, the upper and lower initial conductive layers and the base film; The conductive chassis assembly (4) comprises a rectifier chassis (401), an exhaust pipe (402), a cathode connection copper bar (403) and an anode connection copper bar (404); the rectifier chassis (401) and the exhaust pipe (402) are fixed on the top of the frame (1); and the cathode connection copper bar (403) and the anode connection copper bar (404) are installed on the lower wall of the rectifier chassis (401); The driven transmission roller assembly (206) comprises a support (2061), a main transmission shaft (2062), a transmission roller group (2063) and a water-blocking roller group (2064); a plurality of supports (2061) are fixed in the front wall of the upper groove (2); a main transmission shaft (2062) is rotatably mounted between the rear parts of the plurality of supports (2061); and a transmission roller group (2063) and a water-blocking roller group (2064) are transmission-mounted on the main transmission shaft (2062).

2. The composite copper foil manufacturing device of the vacuum evaporation base film according to claim 1 is characterized in that: The segmented isolation component (207) comprises a mounting frame (2071), the front and rear parts of the upper groove (2) are both fixed with mounting frames (2071), the solidified composite layer section (205) comprises a limit rail (2051), a sliding seat (2052), a wind knife (2053) and an air supply pipe (2054), ten pairs of limit rails (2051) are respectively arranged on the upper and lower inner sides of the front mounting frame (2071) and the rear mounting frame (2071) of the solidified composite layer section (205), a sliding seat (2052) is installed in the limit rail (2051), and wind knives (2053) are fixedly installed between the sliding seats (2052) corresponding to each other at the front and rear parts, and the wind knife (2053) is fixedly connected to the air supply pipe (2054).

3. The composite copper foil manufacturing device of the vacuum evaporation base film according to claim 2, characterized in that: The segmented isolation assembly (207) further comprises two vertical segmented partitions (2072), a sliding bracket (2073), a photoelectric sensor (2074), a liquid level switch (2075) and a horizontal current limiting plate (2076) distributed on the conductive segment (203); two vertical segmented partitions (2072) are fixed between the mounting brackets (2071) of the conductive segment (203); a sliding bracket (2073) is fixed between the right part of the mounting bracket (2071) of the conductive segment (203); a photoelectric sensor (2074) is slidably mounted on the sliding bracket (2073); and horizontal current limiting plates (2076) are installed between the front and rear parts of the two groups of water retaining roller groups (2064) of the conductive segment (203). 2076), a liquid level switch (2075) is fixed on the top of the rear horizontal current limiting plate (2076) of the conductive section (203), the conductive section (203) comprises a cathode main copper bar (2031), a rotating conductive silver ring (2032), a connecting shaft (2033), a conductive roller (2034), a power shaft (2035), a sprocket (2036), a linkage gear set (2037), a linkage helical gear set (2038) and a conductive liquid nozzle set (2039), a cathode main copper bar (2031) is fixed on the upper part of the rear wall of the upper tank (2), the cathode main copper bar (2031) is fixed to the cathode connecting copper bar (403) by screws, and the cathode main copper bar (2031) is connected by a connecting rod. The connecting piece is electrically connected to the rotating conductive silver ring (2032); the middle parts of the four rotating conductive silver rings (2032) are all rotatably provided with a connecting shaft (2033); the middle outer wall of the connecting shaft (2033) is fixedly sleeved with a conductive roller (2034); a power shaft (2035) is rotatably installed between the two supports (2061) of the conductive segment (203); the middle outer wall of the power shaft (2035) is fixedly sleeved with a sprocket (2036); and the sprocket (2036) is connected to the output end of the power motor through a chain transmission mechanism; a linkage gear set (2037) is installed between the power shaft (2035) and the main transmission shaft (2062) of the conductive segment (203); the lower two connecting sprockets (2061) are fixedly sleeved with a sprocket (2036); and the sprocket (2036) is connected to the output end of the power motor through a chain transmission mechanism. A linkage bevel gear set (2038) is installed between the front end outer wall of the shaft (2033) and the left outer wall of the power shaft (2035), and the rear end outer walls of the four connecting shafts (2033) are transmission-connected with two sets of linkage gear sets (2037). A conductive liquid nozzle set (2039) is installed in the rear wall of the upper groove (2) of the conductive section (203). The conductive liquid nozzle set (2039) includes an upper vertical single nozzle (2039a) and a lower inclined double nozzle (2039b). The upper vertical single nozzle (2039a) is vertically arranged above the middle of the four conductive rollers (2034), and the lower inclined double nozzle (2039b) is arranged above the two ends of the four conductive rollers (2034).

4. The composite copper foil manufacturing device of the vacuum evaporation base film according to claim 3 is characterized in that: The segmented isolation assembly (207) further comprises a vertical segmented partition (2072) and a liquid level switch (2075) distributed in the copper trough section (204); a vertical segmented partition (2072) is fixed to the right portion of the mounting frame (2071) of the copper trough section (204); a liquid level switch (2075) is fixed to the top of the conveying roller assembly (2063) at the right end of the copper trough section (204); the copper trough section (204) comprises an anode copper bar mounting seat (2041), an anode connecting plate (2042), a rotating support seat (2043), a jet pipe assembly (2044), a liquid supply circulation pipe (2045), an anode rod (2046), an anode iridium plate (2047) and a sunshade assembly (2048); the rear wall of the upper trough (2) An anode copper bar mounting seat (2041) is fixed inside, the rear end of the anode copper bar mounting seat (2041) is fixed to the anode connecting copper bar (404) up and down, the front end of the anode copper bar mounting seat (2041) is fixed with an anode connecting plate (2042) through a connecting piece, the anode connecting plate (2042) comprises an upper anode connecting plate (2042a) and a lower anode connecting plate (2042b), a rotating support seat (2043) is installed on the inner side of the rear wall of the upper tank (2), a jet pipe group (2044) is installed between the lower parts of the two rotating support seats (2043) and on the lower anode connecting plate (2042b), and the jet pipe group (2044) comprises two jet main pipes arranged horizontally, and a jet pipe group (2044) is arranged vertically between the two jet main pipes. The upper jet tube group (2044) and the lower jet tube group (2044) have eight jet branch pipes, the jet outlets of the jet branch pipes of the upper jet tube group (2044) and the lower jet tube group (2044) are arranged opposite to each other, the upper jet tube group (2044) and the lower jet tube group (2044) are respectively fixedly connected with a liquid supply circulation pipe (2045), an anode rod (2046) is arranged outside the jet tube group (2044), the anode rod (2046) comprises an upper anode rod (2046a) and a lower anode rod (2046b), the front end of the upper anode connecting plate (2042a) is transversely provided with an upper anode rod (2046a), the front end of the lower anode connecting plate (2042b) is transversely provided with a lower anode rod (2046b), and four anode rods (2046) are equidistantly fixed on the anode rod (2046). The anode iridium plate (2047) is provided with two square grooves vertically on the anode iridium plate (2047), and the square grooves are arranged corresponding to the positions of the jet outlets of the jet branch pipes. Four pairs of sunshade components (2048) are arranged equidistantly between the jet main pipes of the upper jet pipe group (2044) and the lower jet pipe group (2044). The sunshade components (2048) include a primary positioning pin (2048a), a primary sliding positioning plate (2048b), a secondary sliding support leg (2048c) and an anode sunshade plate (2048d). The primary positioning pin (2048a) is fixed to the outer wall of the jet main pipe of the lower jet pipe group (2044), and the upper part of the primary positioning pin (2048a) is slidably sleeved with the primary sliding positioning plate (2048b).The upper wall of the primary sliding positioning plate (2048b) is slidably mounted with a secondary sliding support leg (2048c) and the two secondary sliding support legs (2048c) are fixedly sleeved with an anode sunshade plate (2048d).

5. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 4, characterized in that: The segmented isolation assembly (207) further comprises a vertical segmented partition (2072) distributed in the hot pressing and shaping section (201); a vertical segmented partition (2072) is fixed in the middle of the mounting frame (2071) of the hot pressing and shaping section (201); the hot pressing and shaping section (201) comprises a whole film lower hot pressing plate (2011), a whole film upper hot pressing plate (2012), a film edge lower hot pressing plate (2014), a film edge upper hot pressing plate (2015), The auxiliary film feeding roller (2013) and the film conveying roller (2016) have the same transmission structure as the water retaining roller group (2064) and the conveying roller group (2063). The lower left and upper right parts of the three roller conveying structures on the left are respectively rotatably sleeved with the whole film lower hot pressing plate (2011) and the whole film upper hot pressing plate (2012). The lower left and upper right parts of the three roller conveying structures on the right are respectively rotatably sleeved with the whole film lower hot pressing plate (2011) and the whole film upper hot pressing plate (2012). The two ends of the upper part are respectively rotatably sleeved with a lower film edge hot pressing plate (2014) and an upper film edge hot pressing plate (2015), and the lower film edge hot pressing plate (2011) and the upper film edge hot pressing plate (2012) are in rectangular surface contact with the lower film edge hot pressing plate (2014) and the upper film edge hot pressing plate (2015), and the left upper wall of the lower film edge hot pressing plate (2011), the right lower wall of the upper film edge hot pressing plate (2012), and the lower film edge hot pressing plates (2014) are in rectangular surface contact with the lower film edge hot pressing plate (2014) and the upper film edge hot pressing plate (2015). An auxiliary film feeding roller (2013) is rotatably provided between the left upper wall and between the right lower walls of the two film edge hot pressing plates (2015), and the auxiliary film feeding roller (2013) is fixedly sleeved with the conveying structure of the roller. Two film conveying rollers (2016) are rotatably provided between the two film edge lower hot pressing plates (2014) and between the two film edge upper hot pressing plates (2015), and the film conveying rollers (2016) are fixedly sleeved with the conveying structure of the roller.

6. The composite copper foil manufacturing device of vacuum evaporation base film according to claim 5, characterized in that: The segmented isolation assembly (207) further comprises a vertical segmented partition (2072) distributed in the activated conductive layer segment (202), a vertical segmented partition (2072) being fixed to the left portion of the mounting frame (2071) of the activated conductive layer segment (202), the activated conductive layer segment (202) comprising an activation treatment liquid nozzle group (2021), two activation treatment liquid nozzle groups (2021) being fixed between the inner side of the rear wall of the upper tank (2) and the front mounting frame (2071) of the activated conductive layer segment (202), the activation treatment liquid nozzle group (2021) being divided into an upper activation nozzle (2021a) and a lower activation nozzle (2021b), the upper activation nozzle (2021a) and the lower activation nozzle (2021b) being respectively arranged at the upper portion and the lower portion of the upper tank (2).

7. A method for producing a composite copper foil of a vacuum-evaporated base film, using the composite copper foil production device of a vacuum-evaporated base film as described in claim 6, characterized in that: The following steps are involved: Step 1: Before the membrane cloth is processed with a composite conductive layer, the membrane cloth is first passed through a hot pressing and shaping section (201), so that the water-containing membrane cloth that has been pre-cleaned passes between the lower hot pressing plate (2011) for whole membrane and the upper hot pressing plate (2012) for whole membrane. The auxiliary film feeding roller (2013) on the upper left wall of the lower hot pressing plate (2011) for whole membrane and the auxiliary film feeding roller (2013) on the upper right wall of the upper hot pressing plate (2012) for whole membrane apply friction to the membrane cloth to convey the membrane cloth, and then the membrane cloth passes through the lower hot pressing plate (2011) for whole membrane. The contact surface between the pressing plate (2011) and the hot pressing plate (2012) on the whole film is hot pressed by the whole film, the base film is flattened by the hot pressing, and finally the film cloth passes through the hot pressing plate (2014) below the film edge and the hot pressing plate (2015) on the film edge, and the film edge is further flattened. The conveying roller (2016) in the film, the upper left auxiliary film conveying roller (2013) of the hot pressing plate (2014) below the film edge and the lower right auxiliary film conveying roller (2013) of the hot pressing plate (2015) on the film edge stably convey the film cloth during the hot pressing process; Step 2: After the hot pressing shaping of the base film is completed in the hot pressing shaping section (201), the membrane cloth continues to move horizontally to the right and enters the activated conductive layer section (202). The activated conductive layer section (202) uses an upper activation nozzle (2021a) and a lower activation nozzle (2021b) to spray to the upper and lower surfaces of the membrane cloth. The spraying time is 30-70s. The membrane cloth is immersed in the space composed of the mounting frame (2071), the vertical segmented partition (2072) and the trough body to remove the oxide layer and activate the initial conductive layer. The immersion temperature of the activated conductive layer section (202) is 45 degrees Celsius; Step 3: The rear membrane cloth enters the conductive section (203), and the power device of the line body supplies energy to the sprocket (2036), driving the power shaft (2035) to rotate. The meshing transmission between the gears is used to link the main transmission shaft (2062), driving the transmission roller group (2063) and the water retaining roller group (2064) to transmit the membrane cloth from left to right, so that the membrane cloth passes through the two pairs of conductive rollers (2034) and becomes the cathode, with a negatively charged surface. The conductive liquid nozzle group ( During this process, the upper vertical single nozzle (2039a) and the lower inclined double nozzles (2039b) of the conductive rollers (2039) spray the electroplating copper liquid toward the conductive rollers (2034). The four conductive rollers (2034) are in the shape of an inverted isosceles trapezoid, which reduces the vertical height of the conductive rollers (2034). The two groups of water-blocking roller groups (2064) block the accumulated water and increase the liquid level of the electroplating copper liquid, so that the electroplating copper liquid completely immerses the two pairs of conductive rollers (2034). Step 4: The rear membrane cloth enters the copper trough section (204), and the jet pipe group (2044) is used to spray up and down, and the vertical segmented partition (2072) is used to limit the flow to ensure the immersion height of the electroplated copper liquid in the copper trough section (204), and a heating device is used to ensure that the treatment temperature in the copper trough section (204) is 22-25 degrees Celsius. The membrane cloth passes through the sunshade component (2048). During this process, the liquid circulation pipe (2045) is connected from the middle of the jet pipe group (2044) to both ends. The electroplating copper liquid is transported so that the jet branch pipe passes through the anode iridium plate (2047) to uniformly transport the liquid to the upper wall and the lower wall of the membrane cloth. The anode iridium plate (2047) is a grid plate as a whole, and two rectangular hollow grooves are provided at the lower part thereof to be inlaid and arranged corresponding to the jet outlets of the jet branch pipe. The primary sliding positioning plate (2048b) and the secondary sliding support leg (2048c) of the sunshade component (2048) can slide forward and backward to adjust the front and rear position of the anode sunshade plate (2048d), thereby adjusting the sunshade area; Step 5: After passing through the composite conductive layer coating section spaced apart by two conductive sections (203) and the copper trough section (204), the membrane cloth continues to move to the right, enters the curing composite layer section (205), and passes between the upper and lower air knives (2053).

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