Measuring system, processing system, measuring method, and processing method

Abstract

A measurement system includes: a measurement device capable of irradiating measurement light to a first member attached to a processing object and / or a jig holding the processing object, and a second member attached to a movable portion of a processing device, the measuring device can measure the positions of the first component and the second component in the measuring coordinate system respectively; and a measurement control device for controlling the measurement device. The measurement control device includes: a calculation unit that converts the position of the second member in the measurement coordinate system measured by the measurement device to the position of the second member in the machining coordinate system based on the first position information and the second position information; the first position information represents the position, measured by the measuring device, of the first component in the measuring coordinate system, and the second position information represents the position, measured by the measuring device, of the first component in the machining coordinate system; and a transmission unit capable of transmitting, to a machining control device for controlling the machining device, third position information indicating the position of the converted second member in the machining coordinate system.

Description

Technical Field

[0001] The present invention relates to the technical field of a measuring system, a processing system, a measuring method and a processing method. Background Art

[0002] As a method used in such a system, a correction method of associating positions in two separate systems with each other has been proposed (see Patent Document 1).

[0003] [Prior art literature]

[0004] [Patent Document]

[0005] Patent Document 1: U.S. Patent No. 5,007,006 Summary of the invention

[0006] According to a first aspect, a measuring system is provided, comprising: a measuring device capable of irradiating a first member and a second member with measuring light, wherein the first member is mounted on at least one of a processing object and a fixture for holding the processing object, and the second member is mounted on a movable part of a processing device capable of processing the processing object, and the measuring device is capable of measuring the positions of the first member and the second member in a coordinate system related to the measuring device, i.e., a measuring coordinate system; and a measuring control device for controlling the measuring device. In the measuring system, the measuring control device comprises: a computing unit for controlling the measuring device based on the first position information and the second position information The position of the second member in the measurement coordinate system measured by the measurement light irradiated by the second member is converted into the position of the second member in the processing coordinate system, the first position information represents the position of the first member in the measurement coordinate system measured by the measuring device based on the measurement light irradiated on the first member, the second position information represents the position of the first member in the coordinate system related to the processing device, namely, the processing coordinate system; and a sending unit capable of sending third position information to a processing control device that controls the processing device, the third position information representing the position of the second member in the processing coordinate system obtained by the conversion.

[0007] According to a second aspect, a measuring system is provided, comprising: a measuring device capable of irradiating a first member and a second member with measuring light, wherein the first member is mounted on at least one of a processing object and a jig for holding the processing object, and the second member is mounted on a movable portion of a processing device capable of processing the processing object, and the measuring device is capable of measuring the positions of the first member and the second member in a coordinate system associated with the measuring device, i.e., a measuring coordinate system; and a measuring control device for controlling the measuring device, wherein the measuring control device comprises: an input device; a first computing unit for calculating the position of the first member in the measuring coordinate system, based on the position of the first member in the measuring coordinate system measured by the measuring device based on the measuring light irradiated on the first member, and a second computing unit for calculating the position of the first member in the measuring coordinate system, based on ... and the position of the first component in the coordinate system related to the processing device, namely the processing coordinate system, inputted via the input device, to calculate the first conversion information, the first conversion information is used to convert the position in the measurement coordinate system and the position in the processing coordinate system; and a first sending unit, which can send the first conversion information to the processing control device, the processing control device controls the movement of the processing device in the coordinate system related to the processing device, namely the processing coordinate system, the measurement control device controls the measurement of the second component by the measuring device based on the seventh position information, the seventh position information represents the measurement position in the measurement coordinate system for measuring the second component obtained by conversion based on the first conversion information in the processing control device.

[0008] According to the third form, a processing system is provided, comprising: a measuring system provided by the first form; the processing device capable of processing the processing object; and the processing control device for controlling the movement of the processing device in the processing coordinate system, wherein the processing control device controls the processing device in the processing coordinate system based on the position of the second component in the processing coordinate system represented by the third position information.

[0009] According to a fourth form, a processing system is provided, comprising: a measuring system provided by the second form; the processing device, capable of processing the processing object; and a processing control device, controlling the movement of the processing device in the processing coordinate system, the processing control device comprising: a second computing unit, converting the measurement position in the processing coordinate system used to measure the second component into the measurement position in the measurement coordinate system based on the first conversion information; and a second sending unit, sending seventh position information to the measurement control device, the seventh position information representing the measurement position in the measurement coordinate system obtained by the conversion.

[0010] According to a fifth form, a measuring system is provided, comprising: a measuring device capable of measuring a first measuring component and a second measuring component installed on a processing device; and a measuring control device for controlling the measuring device. In the measuring system, the measuring control device comprises: a calculation unit for converting the position of the second measuring component measured by the measuring device based on the position of the first measuring component measured by the measuring device; and a sending unit capable of sending position information indicating the position of the second measuring component obtained by the conversion to a processing control device for controlling the processing device.

[0011] According to a sixth form, a measuring system is provided, comprising: a measuring device capable of measuring a first measuring component and a second measuring component installed on a processing device; and a measuring control device for controlling the measuring device, wherein in the measuring system, the measuring control device comprises: a computing unit for computing conversion information based on the position of the first measuring component measured by the measuring device, the conversion information being used to convert the position of the second measuring component measured by the measuring device; and a sending unit capable of sending the conversion information to a processing control device for controlling the processing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a perspective view showing an overview of the system.

[0013] Figure 2 It is a block diagram showing the structure of the system.

[0014] Figure 3 It is a block diagram showing the structure of the measurement control device.

[0015] Figure 4 It is a block diagram showing the structure of a processing control device.

[0016] Figure 5 It is a diagram showing the front end portion of the robot arm.

[0017] Figure 6 This is a flowchart showing an example of the operation of the calculation device of the measurement control device.

[0018] Figure 7 This is a diagram showing an example of the positional relationship between the measuring device and the stereo camera.

[0019] Figure 8 It is a diagram showing a first modified example of the reflector module attached to the robot arm.

[0020] Fig. 9 This is a diagram showing an example of the arrangement of multiple antennas.

[0021] Fig.10 It is a diagram showing a second modified example of the reflector module attached to the robot arm.

[0022] Fig.11 This is a diagram showing an example of a method for measuring the position of a tool center point.

[0023] Fig.12 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0024] Fig.13 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0025] Fig.14 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0026] Fig.15 This is a diagram showing another example of a method for measuring the position of a tool center point.

[0027] Fig.16 This is a flowchart showing another example of the operation of the calculation device of the measurement control device.

[0028] Fig.17 It is a perspective view schematically showing a modified example of the system.

[0029] Fig.18 It is a block diagram showing the structure of a modified example of the system.

[0030] Fig.19 This is a flowchart showing another example of the operation of the calculation device of the measurement control device.

[0031] Fig. 20 This is a diagram for explaining the concept of integration threshold processing.

[0032] Fig.21 It is a diagram for explaining the measurement procedure of the reflector.

[0033] Fig. 22 It is a diagram for explaining the irradiation timing of the measurement light.

[0034] Fig.23 This is a diagram showing an example of a method of irradiating measurement light.

[0035] Fig.24 This is a diagram for explaining the concept of stationary determination.

[0036] Fig.25 This is a diagram showing another example of the method of irradiating the measuring light. DETAILED DESCRIPTION

[0037] Embodiments of the measuring system, the processing system, the measuring method, and the processing method will be described. In the embodiments shown below, examples in which the measuring system, the processing system, the measuring method, and the processing method are applied to the system 1 will be described.

[0038] Reference Figures 1 to 25 The system 1 of the embodiment will be described. The system 1 may also be referred to as a processing system.

[0039] (1) Overview of System 1

[0040] Reference Figure 1 and Figure 2 The outline of system 1 will be described. Figure 1 and Figure 2 In the embodiment, the system 1 includes a measurement control device 10, a measurement device 21, a processing control device 30, and a robot 41. The robot 41 may also be referred to as a processing device. The measurement control device 10 controls the measurement device 21. The processing control device 30 controls the robot 41. The measurement control device 10 and the processing control device 30 may communicate with each other. In addition, the measurement control device 10 and the measurement device 21 may constitute a measurement system 2.

[0041] like Figure 3 As shown, the measurement control device 10 includes a computing device 11, a storage device 12, a communication device 13, an input device 14, and an output device 15. The computing device 11, the storage device 12, the communication device 13, the input device 14, and the output device 15 may also be connected via a data bus 16.

[0042] like Figure 4 As shown, the process control device 30 includes a computing device 31, a storage device 32, a communication device 33, an input device 34, and an output device 35. The computing device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may also be connected via a data bus 36.

[0043] The computing device 11 and the computing device 31 may include, for example, at least one of a central processing unit (CPU), a graphic processing unit (GPU), and a field programmable gate array (FPGA).

[0044] The storage device 12 and the storage device 32 may include, for example, at least one of a random access memory (RAM), a read only memory (ROM), a hard disk device, a magneto-optical device, a solid state drive (SSD), and a hard disk array. That is, the storage device 12 and the storage device 32 may also include a non-temporary storage medium.

[0045] The communication device 13 can communicate with the measuring device 21 and the processing control device 30 respectively. The communication device 13 can also communicate with other devices different from the measuring device 21 and the processing control device 30 via a network not shown in the figure. The communication device 33 can communicate with the robot 41 and the measurement control device 10 respectively. The communication device 33 can also communicate with other devices different from the robot 41 and the measurement control device 10 via a network not shown in the figure. In addition, the network can be wired or wireless.

[0046] The input device 14 and the input device 34 may include, for example, at least one of a keyboard, a mouse, and a touch screen. The input device 14 and the input device 34 may also include, for example, a recording medium reading device that can read information recorded in a removable recording medium such as a Universal Serial Bus (USB) memory.

[0047] Furthermore, when information is input to the measurement control device 10 via the communication device 13 (in other words, when the measurement control device 10 acquires information via the communication device 13), the communication device 13 can function as an input device. When information is input to the processing control device 30 via the communication device 33 (in other words, when the processing control device 30 acquires information via the communication device 33), the communication device 33 can function as an input device.

[0048] The output device 15 and the output device 35 may also include, for example, at least one of a display, a speaker, and a printer. The output device 15 and the output device 35 may also input information into a removable storage medium such as a USB memory, for example. In addition, when information is output from the measurement control device 10 via the communication device 13, the communication device 13 may function as an output device. When information is output from the processing control device 30 via the communication device 33, the communication device 33 may function as an output device.

[0049] In the system 1, the robot 41 holds the workpiece W (see Figure 1) is set as a processing object. The processing control device 30 controls the robot 41 based on the measurement result obtained by the measuring device 21 from the measuring control device 10. The processing control device 30 controls the robot 41, for example, so that the end effector at the front end of the mechanical arm 410 installed on the robot 41 moves to the target position. The robot 41 is controlled by the processing control device 30, so that the workpiece W is processed by the robot 41. In addition, the control of the robot 41 can also be the control of the movement form of the robot 41 (the movement form of the movable part of the robot 41). In addition, the jig 90 can also be called a retaining member, a mounting member, a fixing member or a clamp.

[0050] (2) Coordinate system conversion

[0051] The measuring system 2 including the measuring device 21 and the processing control device 30 controlling the robot 41 use their own coordinate systems. Specifically, the measuring system 2 uses the measuring coordinate system related to the measuring device 21, i.e., the measuring coordinate system, while the processing control device 30 uses the robot coordinate system, i.e., the robot coordinate system, which is a coordinate system related to the robot 41. That is, the measuring control device 10 controls the measuring device 21 in the measuring coordinate system. The processing control device 30 controls the movement of the robot 41 in the robot coordinate system.

[0052] In addition, the processing control device 30 can also control the movement of the robot 41 in the measurement coordinate system. Fig.17 and Fig.18 ), the robot coordinate system may be a common coordinate system for multiple robots, or a robot coordinate system may be set for each robot (in this case, one robot coordinate system may be set for one robot, and another robot coordinate system may be set for another robot).

[0053] Therefore, for example, in order to make the measurement result obtained by the measuring device 21 shared by the measuring system 2 and the processing control device 30 (in other words, in order to make the measuring system 2 and the processing control device 30 work in conjunction), it is necessary to convert the measurement coordinate system and the robot coordinate system. In addition, the robot coordinate system can be, for example, an orthogonal coordinate system including an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The measurement coordinate system can be, for example, an orthogonal coordinate system including an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The robot coordinate system can also be called a processing coordinate system.

[0054] (2-1) Measuring device 21

[0055] The measuring device 21 measures the position of the workpiece W or the robot 41, for example. Here, the workpiece W may be, for example, a relatively large structure such as the main body of an airplane. The measuring device 21 that uses the workpiece W, which is a relatively large structure, as a measurement object may also be, for example, a three-dimensional measuring machine that can measure a relatively large space. As an example of such a measuring device 21, a laser tracker may be cited. A laser tracker is an optical measuring machine as described below, that is, a reflector (also called a probe) that contacts the measurement object is irradiated with laser light, and the laser light reflected from the reflector returns to the light source, thereby determining the three-dimensional position of the measurement object. In addition, laser light may also be referred to as measurement light.

[0056] In order to enable the measuring device 21 to measure the position, for example, a reflector r11 is installed on the jig 90, and reflectors r12 and r13 are installed on the workpiece W (see Figure 1 ). The reflectors r11, r12, and r13 may also be referred to as first components. That is, the first component may include the reflectors r11, r12, and r13 capable of reflecting the measuring light. In addition, the reflector may not be installed on the workpiece W, but at least three reflectors may be installed on the jig 90.

[0057] A reflector module r2 (see FIG. 1 ) including reflectors r21, r22, and r23 is installed on the robot arm 410 of the robot 41. Figure 5 ). Reflector r21, reflector r22 and reflector r23 may also be referred to as a second member. Robot arm 410 may also be referred to as a movable part.

[0058] The measuring device 21 can irradiate the reflectors r11, r12, and r13 with measuring light, which can be, for example, laser light. The measuring device 21 can measure the positions of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measuring light irradiated to the reflectors r11, r12, and r13. Similarly, the measuring device 21 can irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 can measure the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23. That is, measuring the position of the workpiece W is not limited to directly measuring the position of a specific part on the workpiece W, but can also include indirect position measurement such as measuring the position of a reflector mounted on the workpiece W or measuring the position of a reflector mounted on the jig 90 that holds the workpiece W. Likewise, measuring the position of the robot 41 is not limited to directly measuring the position of a specific portion of the robot 41 , and may include indirect position measurement such as measuring the position of a reflector attached to the robot 41 .

[0059] Furthermore, “based on the measurement light irradiated to each of reflectors r11, r12, and r13” can also be replaced by “measurement device 21 receives the measurement light generated from each of reflectors r11, r12, and r13 by irradiating each of reflectors r11, r12, and r13 with the measurement light”. Similarly, “based on the measurement light irradiated to each of reflectors r21, r22, and r23” can also be replaced by “measurement device 21 receives the measurement light generated from each of reflectors r21, r22, and r23 by irradiating each of reflectors r21, r22, and r23 with the measurement light”.

[0060] In addition, if reflectors r11, r12 and r13 are replaced by the first component, and reflectors r21, r22 and r23 are replaced by the second component, it can be said that the measuring device 21 is capable of irradiating measurement light on the first component installed on at least one of the workpiece W which can be called the processing object and the jig 90 holding the workpiece W, and the second component installed on the robot arm 410 of the robot 41 that can process the workpiece W, and is capable of determining the positions of the first component and the second component respectively in the measurement coordinate system.

[0061] The positions of the reflector r11 attached to the jig 90 and the reflectors r12 and r13 attached to the workpiece W are often managed by the user of the system 1. Therefore, the positions of the reflectors r11, r12, and r13 are often known in the robot coordinate system.

[0062] In addition, the positions of reflectors r11, r12, and r13 may not be known. In this case, for example, reflectors may be used to define features such as surfaces, lines, and points, and the defined features may be used to construct a coordinate system. Specifically, three reflectors may be arranged on the first surface, three reflectors may be arranged on the second surface intersecting the first surface, and three reflectors may be arranged on the third surface intersecting the first surface and the second surface, and the three reflectors arranged on each surface may be used to define each surface, thereby constructing a coordinate system. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a line defined by two reflectors different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a point defined by a reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors and a point defined by a reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined by three reflectors, a line defined by two reflectors, and a point defined by one reflector.

[0063] In the present embodiment, the position of each of the reflectors r11, r12, and r13 in the robot coordinate system is assumed to be known for explanation. In the present embodiment, the reflectors r11, r12, and r13 function as components for defining a reference position. Therefore, the reflectors r11, r12, and r13 may also be referred to as reference reflectors. The reflector r11 may be installed at a position representing a reference of the jig 90. In addition, the position of the reflector r11 may also be set as a position representing a reference of the jig 90. The reflectors r12 and r13 may be installed at a position (e.g., a master hole) representing a position reference of a workpiece W that may be referred to as a processing object. In addition, the position at which the reflectors r12 and r13 are installed may also be set as a position reference of the workpiece W.

[0064] (2-2) Coordinate conversion

[0065] As described above, the measuring device 21 can irradiate the reflector r11, the reflector r12, and the reflector r13 with the measuring light. The measuring device 21 measures the position of the reflector r11 in the measuring coordinate system based on the measuring light irradiated on the reflector r11. The measuring device 21 measures the position of the reflector r12 in the measuring coordinate system based on the measuring light irradiated on the reflector r12. The measuring device 21 measures the position of the reflector r13 in the measuring coordinate system based on the measuring light irradiated on the reflector r13.

[0066] The computing device 11 of the measurement control device 10 acquires first position information indicating the positions of the reflectors r11, r12, and r13 in the measurement coordinate system from the measurement device 21. The computing device 11 acquires, for example, second position information indicating the positions of the reflectors r11, r12, and r13 in the robot coordinate system, which is input via the input device 14. In addition, the positions of the reflectors r11, r12, and r13 in the robot coordinate system may also be automatically input to the measurement control device 10 (that is, they may not be input via the input device 14). The computing device 11 may also acquire the second information by, for example, selecting the positions of the reflectors r11, r12, and r13 in the robot coordinate system input to the processing control device 30.

[0067] The computing device 11 obtains a first conversion matrix for converting the position in the measurement coordinate system and the position in the robot coordinate system based on the first position information and the second position information. The first conversion matrix may include, for example, a rotation matrix for performing rotation conversion of the position and a translation matrix for parallel movement of the position. The first conversion matrix may be sent to the processing control device 30 via the communication device 13. That is, the communication device 13, which may be referred to as a first sending unit, may send the first conversion matrix to the processing control device. In addition, the method for obtaining the first conversion matrix may be applicable to various existing forms, so its detailed description is omitted. In addition, obtaining the first conversion matrix may also be referred to as calculating the first conversion matrix. The first conversion matrix may also be referred to as first conversion information.

[0068] As described above, the measuring device 21 can irradiate the reflector R21, the reflector R22, and the reflector R23 with the measuring light. The measuring device 21 measures the position of the reflector R21 in the measuring coordinate system based on the measuring light irradiated on the reflector R21. The measuring device 21 measures the position of the reflector R22 in the measuring coordinate system based on the measuring light irradiated on the reflector R22. The measuring device 21 measures the position of the reflector R23 in the measuring coordinate system based on the measuring light irradiated on the reflector R23.

[0069] The computing device 11 uses the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. For example, the first transformation matrix includes a rotation matrix R and a translation matrix t. The position of the reflector r21 in the measurement coordinate system is set to (x r21 ,y r21 , z r21 In this case, the computing device 11 can calculate the value of “R(x r21 ,y r21 , z r21 )+t” to calculate the position of reflector r21 in the robot coordinate system.

[0070] Here, refer to Figure 6 The operation of the measurement system 2 is described again with reference to the flowchart of FIG. Figure 6In the process of the robot coordinate system, the operation device 11 obtains the second position information indicating the position of each of the reflectors r11, r12 and r13 in the robot coordinate system inputted via the input device 14 (step S101). In parallel with the process of step S101, the measuring device 21 measures the position of each of the reflectors r11, r12 and r13 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r11, r12 and r13 (step S102). At this time, the operation device 11 of the measurement control device 10 obtains the first position information indicating the position of each of the reflectors r11, r12 and r13 in the measurement coordinate system.

[0071] The computing device 11 obtains a first conversion matrix for converting the position in the measurement coordinate system and the position in the robot coordinate system based on the first position information and the second position information (step S103). In addition, when a separate robot coordinate system is defined for each robot, the separate robot coordinate system can be realized by, for example, changing the posture of the robot 41 and measuring the positions of the reflectors r21, r22, and r23 installed on the robot 41. That is, the separate robot coordinate system can be realized by changing the posture of the robot and performing, for example, three-point measurement of the positions of the reflectors r21, r22, and r23.

[0072] (3) Design of reflector measurement

[0073] The size of the reflector such as the reflector r11 is, for example, about several centimeters. That is, the size of the reflector is significantly smaller than the size of the workpiece W. Therefore, for example, if the measuring device 21 measures the position of the reflector while scanning the space to be measured with the measuring light, the time required for measuring the position of the reflector may become relatively long. Therefore, at least one of the following methods (3-1) and (3-2) can be used to shorten the time required for measuring the position of the reflector.

[0074] (3-1) Method of using a stereo camera

[0075] The measuring system 2 may also include, in addition to the measuring device 21, a stereo camera 22. The stereo camera 22 may be, for example, Figure 7 As shown, the measuring device 21 is arranged near the measuring device 21. For example, the measuring device 21 and the stereo camera 22 may be included in the same frame. Here, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is known. In addition, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is constant. In addition, the positional relationship between the measuring device 21 and the stereo camera 22 may not be known. In addition, the positional relationship between the measuring device 21 and the stereo camera 22 may not be constant.

[0076] Light emitting diodes (LEDs) and other light emitting bodies (not shown) may be disposed near the reflectors r11, r12, and r13. Figure 5 ) and installed with Figure 8 The reflector module r2a shown in the figure includes reflectors r21, r22, and r23 and a light emitting body 81 such as an LED.

[0077] In the image captured by the stereo camera 21, the brightness value of the pixel corresponding to the light source is higher than the brightness value of other pixels. Therefore, as long as the light source is arranged near the reflector in this way, the position of the light source can be relatively easily determined from the image captured by the stereo camera 21. In addition, an example of a method for determining the position of the light source will be described later (refer to "(7) Method for determining the position of the light source from the image").

[0078] Here, it is assumed that the positional relationship between the measuring device 21 and the stereo camera 22 is known and unchanged. Therefore, the measurement control device 10 can convert the position of the light source determined from the image taken by the stereo camera 22 (that is, the position in the coordinate system related to the stereo camera 22) into the position in the measurement coordinate system related to the measuring device 21 (in other words, the coordinate systems can be integrated). In the conversion, similar to the conversion of the position in the measurement coordinate system and the position in the robot coordinate system (refer to "(2-2) Coordinate Conversion"), for example, a rotation matrix and a translation matrix can be used. The measurement control device 10 can infer the position of the reflector, which is the measurement object of the measuring device 21, in the measurement coordinate system based on the position of the light source in the measurement coordinate system.

[0079] In addition, the position accuracy of the light source determined from the image captured by the stereo camera 22 varies depending on the pixel size of the stereo camera 22 and the distance between the stereo camera 22 and the light source. That is, the position accuracy of the light source varies depending on the pixel size of the imaging element of the stereo camera 22 and the size of the image of the light source on the imaging element of the stereo camera 22. In the space to be measured by the measuring device 21, the position accuracy of the light source determined from the image captured by the stereo camera 22 is coarser than the accuracy associated with the measuring device 21. That is, the determination of the position of the light source from the image captured by the stereo camera 22, if its accuracy is taken into account, is synonymous with the determination of the position of the reflector near the light source. In addition, when the positional relationship between the reflector r11, the reflector r12, and the reflector r13 and the light source is known, the position of each of the reflectors r11, r12, and r13 can also be determined by taking into account the positional relationship.

[0080] The measurement control device 10 can determine the position of a light source, for example, disposed near the reflector r11, from the image captured by the stereo camera 22. The measurement control device 10 can estimate the position of the reflector r11 based on the determined position of the light source. Moreover, the measurement control device 10 can control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the position of the reflector r11, for example, can be reduced. Therefore, the time required for the measurement device 21 to measure the position of the reflector r11 can be shortened. The same is true for the reflectors r12 and r13.

[0081] The measurement control device 10 can determine the position of the light emitting body 81 included in the reflector module R2a, for example, from the image captured by the stereo camera 22. The measurement control device 10 can estimate the positions of the reflectors R21, R22, and R23 included in the reflector module R2a based on the determined position of the light emitting body 81. Moreover, the measurement control device 10 can control the measurement device 21 based on the estimated positions of the reflectors R21, R22, and R23 to measure the reflectors R21, R22, and R23, respectively. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the positions of the reflectors R21, R22, and R23, for example, can be reduced. Therefore, the time required for the measurement device 21 to measure the positions of the reflectors R21, R22, and R23 can be shortened.

[0082] In addition, the light emitter may be arranged only near the reflector r11, the reflector r12, and the reflector r13. In this case, the measurement control device 10 may determine the position of the light emitter from the image captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0083] Alternatively, the light emitter may be disposed only on the robot 410. In this case, the measurement control device 10 may determine the position of the light emitter 81 from the image captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r21, r22, and r23 included in the reflector module r2a.

[0084] Furthermore, if reflectors r11, r12, and r13 are replaced by the first member, and reflectors r21, r22, and r23 are replaced by the second member, it can be said that the measurement system 2 may include a stereo camera 22 that can be called a photographing device and can photograph at least one of the first member and the second member. Alternatively, it can be said that the measurement system 2 may include: a measurement device 21 that can be called a first measurement device; and a stereo camera 22 that can measure at least one of the first member and the second member with a coarser accuracy than the measurement device 21 and can be called a second measurement device. The measurement control device 10 can control the measurement of the measurement device 21 related to at least one of the first member and the second member based on the measurement result obtained by the stereo camera 22.

[0085] (3-2) Method using wireless communication

[0086] The measuring system 2 may include, in addition to the measuring device 21, antennas ANT1, ANT2, and ANT3 capable of wireless communication. The antennas ANT1, ANT2, and ANT3 may be, for example, Fig. 9 They are respectively arranged around the workpiece W as shown.

[0087] Here, it is assumed that the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 is known. In addition, it is assumed that the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 is constant. That is, as in the case of using the stereo camera, the measuring device 21 can convert the position in the coordinate system related to the antenna ANT1, the antenna ANT2, and the antenna ANT3 into the position in the measurement coordinate system related to the measuring device 21 (in other words, the coordinate system can be integrated). In addition, the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 may not be known. In addition, the positional relationship between the measuring device 21 and the antenna ANT1, the antenna ANT2, and the antenna ANT3 may not be constant.

[0088] A distance measuring antenna (not shown) capable of wireless communication may be arranged near each of the reflectors r11, r12, and r13. Figure 5 ) and install Fig.10 The reflector module r2b shown in the figure includes reflectors r21, r22, and r23 and a ranging antenna 82 capable of wireless communication.

[0089] Antenna ANT1, antenna ANT2, and antenna ANT3 transmit radio waves. The following describes a case where the position of, for example, the ranging antenna 82 is determined by antenna ANT1, antenna ANT2, and antenna ANT3. Antenna ANT1 can transmit two or more radio waves with different frequencies. The ranging antenna 82 can receive two or more radio waves transmitted from antenna ANT1. The distance between antenna ANT1 and the ranging antenna 82 is estimated based on the difference in phases of the two or more radio waves received by the ranging antenna 82. The reason is that since the two or more radio waves transmitted from antenna ANT1 have different frequencies, the phase difference of the two or more radio waves will change depending on the distance between antenna ANT1 and the ranging antenna 82. Similarly, the distance from antenna ANT2 to the ranging antenna 82 and the distance from antenna ANT3 to the ranging antenna 82 are estimated.

[0090] For example, the position of the ranging antenna 82 can be determined by finding the intersection of a sphere with the antenna ANT1 as the center and the distance from the antenna ANT1 to the ranging antenna 82 as the radius, a sphere with the antenna ANT2 as the center and the distance from the antenna ANT2 to the ranging antenna 82 as the radius, and a sphere with the antenna ANT3 as the center and the distance from the antenna ANT3 to the ranging antenna 82 as the radius. In addition, the error of the distance measured using wireless communication (in other words, measured based on the phase difference of the radio wave) is, for example, about 10 centimeters. The accuracy of the position of the ranging antenna 82, for example, determined using wireless communication is coarser than the accuracy associated with the measuring device 21. That is, if the accuracy of determining the position of the ranging antenna (for example, the ranging antenna 82) using wireless communication is taken into account, it is synonymous with determining the position of the reflector near the ranging antenna.

[0091] The measurement control device 10 can, for example, convert the position of the ranging antenna 82 measured using wireless communication into the position of the ranging antenna 82 in the measurement coordinate system. The measurement control device 10 can infer the positions of the reflectors R21, R22, and R23 contained in the reflector module R2b, for example, based on the position of the ranging antenna 82 in the measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors R21, R22, and R23, respectively, based on the inferred positions of the reflectors R21, R22, and R23. Thus, the range of the measurement light that the measurement device 21 should irradiate in order to measure the positions of the reflectors R21, R22, and R23 (i.e., the scanning range of the measurement light used to find the reflector) can be reduced. Therefore, the time required for the measurement device 21 to measure the positions of the reflectors R21, R22, and R23 can be shortened.

[0092] The measurement control device 10 can estimate the position of the reflector r11 based on the position of the ranging antenna, for example, arranged near the reflector r11, which is determined by the same method. The measurement control device 10 can control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. As a result, the range of the measurement light that the measurement device 21 should irradiate in order to measure the position of the reflector r11 (that is, the scanning range of the measurement light used to find the reflector r11) can be reduced. Therefore, the time required for the measurement device 21 to measure the position of the reflector r11 can be shortened. The same is true for the reflectors r12 and r13.

[0093] In addition, the ranging antenna may be arranged only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may determine the position of the ranging antenna based on the distance to the ranging antenna determined by the antenna ANT1, the antenna ANT2, and the antenna ANT3 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0094] Alternatively, the ranging antenna may be disposed only on the robot arm 410. In this case, the measurement control device 10 may determine the position of the ranging antenna 82 based on the distances to the ranging antenna 82 determined by the antenna ANT1, the antenna ANT2, and the antenna ANT3, only when the measurement device 21 measures the positions of the reflectors r21, r22, and r23 included in the reflector module r2b.

[0095] Furthermore, if reflectors r11, r12, and r13 are replaced by the first member, and reflectors r21, r22, and r23 are replaced by the second member, it can be said that the measurement system 2 may include: a measurement device 21 which may be referred to as a first measurement device; and antennas ANT1, ANT2, and ANT3 which may be referred to as second measurement devices and which are capable of measuring at least one of the first member and the second member with a coarser accuracy than the measurement device 21. The measurement control device 10 may control the measurement of the measurement device 21 related to at least one of the first member and the second member based on the measurement results obtained by the antennas ANT1, ANT2, and ANT3.

[0096] (4) Tool center point

[0097] When the processing control device 30 controls the robot 41, the processing control device 30 sets the path along which a point on the robot arm 410 of the robot 41 moves. The point on the robot arm 410 is called the so-called "Tool Center Point" (hereinafter, appropriately expressed as "TCP"). The TCP roughly determines the position of the part of the end effector (in other words, the tool) installed at the front end of the robot arm 410 that acts on the processing object. The TCP is a part that serves as a reference when the processing control device 30 controls the robot 41. Therefore, the tool center point can also be called a reference part.

[0098] The TCP varies depending on the purpose of the end effector, etc. That is, if the end effector is changed, the TCP associated with the robot arm 410 will also change. Figure 5In the case of a rod-shaped end effector EE1 as shown, TCP can be located at the front end of the end effector EE1. In the case where the end effector is, for example, a suction hand having multiple suction pads, TCP can be located at one of the multiple suction pads, or can be located in the middle of the multiple suction pads. In the case where the end effector is, for example, a gripping hand having multiple fingers or claws, TCP can be located at one of the multiple fingers or claws, or can be located in the middle of the multiple fingers or claws. In the case where the robot arm 410 is equipped with, for example, a suction hand or a gripping hand, the robot 41 can also be referred to as a picking device. In addition, the end effector mounted on the robot arm 410 is not limited to these components.

[0099] For example Figure 5 As shown, the position of the reflector module r2 mounted on the robot arm 410 is different from the position of the TCP. As described above, the TCP corresponds to a portion that acts on the object to be processed, and therefore, it is difficult to mount a measuring member such as a reflector on the TCP.

[0100] On the other hand, the reflector module r2 is mounted at a predetermined position on the robot 410 where the positional relationship between the reflector module r2 and the TCP does not change. That is, the positions of the reflectors r21, r22, and r23 included in the reflector module r2 are respectively located at predetermined positions relative to the TCP, which can be referred to as a reference position, in the robot 410. Therefore, by using the positional relationship between the reflectors r21, r22, and r23 and the TCP, the position of the TCP can be determined by measuring the positions of the reflectors r21, r22, and r23 using the measuring device 21.

[0101] (4-1) TCP Measurement

[0102] Reference Figures 11 to 15 The specific measurement method of TCP is described below. In addition, the measurement method of TCP is not limited to the method described below, and various existing forms can be applied.

[0103] (4-1-1) Method of using contact sensor

[0104] Fig.11In the jig 91, a hole H is formed for inserting a rod-shaped end effector EE1. A sensor 23 for measuring the end effector EE1 is arranged on the bottom surface of the hole H. The jig 91 is fixed so that its position does not change. It is assumed that the position of the sensor 23, in other words, the position of the bottom surface of the hole H of the jig 91 is known. In this case, when the front end of the end effector EE1 contacts the sensor 23 (in other words, when the sensor 23 measures the front end of the end effector EE1), the position of the TCP of the end effector EE1 is determined as the position of the sensor 23. The position of the TCP of the end effector EE1 determined in this way can be input to the measurement control device 10 via the input device 14. At this time, the position of the TCP can be the position of the TCP in the robot coordinate system. In addition, the sensor 23 can also be arranged on the side of the hole H, for example, and is not limited to the bottom surface of the hole H. The sensor 23 can be called a third measuring device.

[0105] Fig.12 In the jig 91a, a hole H is formed for inserting a rod-shaped end effector EE1. A sensor 23 for measuring the end effector EE1 is arranged on the bottom surface of the hole H. A reflector module r3 including a reflector r31, a reflector r32, and a reflector r33 is installed on the jig 91a. The jig 91a can be moved to insert the end effector EE1 into the hole H (that is, the position of the jig 91a can be changed). It is assumed that the positional relationship between the sensor 23 and the reflectors r31, r32, and r33 is known. In addition, the reflector module r3 or the reflectors r31, r32, and r33 can be referred to as a reference member.

[0106] In this case, in a state where the front end of the end effector EE1 contacts the sensor 23 (i.e., in a state where the end effector EE1 is inserted into the hole H of the jig 91a), the measuring device 21 irradiates the reflectors r31, r32, and r33 with measuring light. The measuring device 21 measures the positions of the reflectors r31, r32, and r33 in the measurement coordinate system based on the measuring light irradiated to the reflectors r31, r32, and r33. The measurement control device 10 determines the position of the TCP of the end effector EE1 based on the positions of the reflectors r31, r32, and r33 in the measurement coordinate system and the positional relationship between the sensor 23 and the reflectors r31, r32, and r33. At this time, the position of the TCP may be the position of the TCP in the measurement coordinate system.

[0107] (4-1-2) Method using non-contact sensor

[0108] Fig.13In the figure, a sensor 24 for measuring the object to be measured by the light section method is installed on the jig 92. Here, the sensor 24 is configured to emit light L1. The jig 92 is fixed so that its position does not change. For example, the position in the robot coordinate system corresponding to the reference point associated with the sensor 24 is assumed to be known. In this case, the position of the TCP of the end effector EE1 measured by the sensor 24 can be converted into a position in the robot coordinate system based on the relationship between the reference point associated with the sensor 24 and the position of the robot coordinate system corresponding to the reference point. The position of the TCP of the end effector EE1 measured in this way can be input to the measurement control device 10 via the input device 14. At this time, the position of the TCP can be the position of the TCP in the robot coordinate system. In addition, the sensor 24 can be referred to as a third measuring device.

[0109] Fig.14 In the embodiment, the sensor 24 is installed on the jig 92a. The reflector module r4 including the reflector r41, the reflector r42 and the reflector r43 is installed on the jig 92a. The jig 92a can be moved so that the sensor 24 is close to the end effector EE1. The positional relationship between the reference point related to the sensor 24 and the reflector r41, the reflector r42 and the reflector r43 is assumed to be known. In addition, the reflector module r4 or the reflector r41, the reflector r42 and the reflector r43 can be referred to as a reference member.

[0110] In this case, in a state where the TCP of the end effector EE1 is measured by the sensor 24, the measuring device 21 irradiates the reflector r41, the reflector r42, and the reflector r43 with measuring light. The measuring device 21 measures the positions of the reflectors r41, r42, and r43 in the measurement coordinate system based on the measuring light irradiated to the reflectors r41, r42, and r43. The measurement control device 10 determines the position of the TCP of the end effector EE1 based on the positional relationship between the reference point related to the sensor 24 and the reflectors r41, r42, and r43, the position of the TCP of the end effector EE1 measured by the sensor 24, and the positions of the reflectors r41, r42, and r43 in the measurement coordinate system. At this time, the position of the TCP may be the position of the TCP in the measurement coordinate system.

[0111] In addition, instead of the sensor 24, a non-contact sensor such as a stereo camera or a laser scanner may be used for measuring TCP.

[0112] (4-1-3) Others

[0113] Fig.15In the figure, at the front end of the robot arm 410, for example, an end effector EE2 as an optical sensor is installed. A tool ball TB is installed on the jig 93. A reflector module r5 including a reflector r51, a reflector r52, and a reflector r53 is installed on the jig 93. The position of the jig 93 (in other words, the position of the tool ball TB) can be changed. It is assumed that the positional relationship between the center of the tool ball TB and the reflectors r51, r52, and r53 is known. In addition, the positional relationship between the center of the tool ball TB and the reflectors r51, r52, and r53 may not be known.

[0114] In this case, the measuring device 21 irradiates the reflectors r51, r52, and r53 with measuring light in a state where the sensor as the end effector EE2 has measured the center of the tool ball TB. The measuring device 21 measures the positions of the reflectors r51, r52, and r53 in the measurement coordinate system based on the measuring light irradiated to the reflectors r51, r52, and r53. The measurement control device 10 compares the positions of the reflectors r51, r52, and r53 in the measurement coordinate system with the center of the tool ball TB measured by the sensor as the end effector EE2. This operation is performed multiple times (for example, three times or more) while changing the relative positional relationship between the end effector EE2 and the jig 93 (that is, the tool ball TB). As a result, the position of the TCP of the end effector EE2 is determined. At this time, the position of the TCP may be the position of the TCP in the measurement coordinate system. In addition, a corner cube may be used instead of the tool ball TB.

[0115] (4-2) Measurement of reflector module r2

[0116] For example, Fig.11 In the state where the TCP of the end effector EE1 is measured, in other words, where the position of the TCP of the end effector EE1 is determined, the measuring device 21 irradiates the measuring light to each of the reflectors r21, r22, and r23 included in the reflector module r2 mounted on the robot arm 410. The measuring device 21 measures the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to each of the reflectors r21, r22, and r23.

[0117] As a result, the positions of the reflectors r21, r22, and r23 and the position of the TCP are determined (measured) without changing the position and posture of the robot 410. Hereinafter, the position and posture of the robot 410 at this time are appropriately referred to as "reference position and reference posture".

[0118] (4-3) Transformation Matrix

[0119] The positions of the reflectors r21, r22, and r23 when the robot arm 410 is in the reference position and the reference posture are respectively (x rb1 ,y rb1 , z rb1 )、(x rb2 ,y rb2 , z rb2 ) and (x rb3 ,y rb3 , z rb3 ). The position of the TCP when the robot arm 410 is in the reference position and reference posture is set to (x t ,y t , z t ).

[0120] Here, let (x rb1 ,y rb1 , z rb1 )、(x rb2 ,y rb2 , z rb2 )、(x rb3 ,y rb3 , z rb3 ) and (x t ,y t , z t ) is the position in the robot coordinate system. In addition, in order to convert the positions of reflectors r21, r22 and r23 measured by the measuring device 21 in the measurement coordinate system into the positions of reflectors r21, r22 and r23 in the robot coordinate system, a first transformation matrix (see "(2) Transformation of coordinate system") can be used.

[0121] The computing device 11 of the measurement control device 10 computes a posture corresponding to the reference posture of the robot arm 410 based on the respective positions of the reflectors r21, r22, and r23. The computed posture can be represented, for example, as (W, P, R). Here, "W" may be the angle around the x-axis of the robot coordinate system, "P" may be the angle around the y-axis of the robot coordinate system, and "R" may be the angle around the z-axis of the robot coordinate system. In other words, "W" is the rotation amount of the robot arm 410 around the x-axis of the robot coordinate system, "P" is the rotation amount of the robot arm 410 around the y-axis of the robot coordinate system, and "R" is the rotation amount of the robot arm 410 around the z-axis in the robot coordinate system. That is, in this embodiment, the rotation amounts around the x-axis, y-axis, and z-axis are referred to as "postures".

[0122] The posture of the vector (so-called tool axis vector) extending in the direction in which the end effector EE1 extends is regarded as the posture of the TCP. Here, the posture of the vector is regarded as the same as the posture of the robot arm 410. Therefore, the computing device 11 sets the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and reference posture as (x t ,y t , z t , W, P, R). The computing device 11 stores the TCP position and posture when the robot arm 410 is at the reference position and posture in the storage device 12 in association with the positions of the reflectors r21, r22, and r23. As a result, for example, (x t ,y t , z t , W, P, R) and (x rb1 ,y rb1 , z rb1 )、(x rb2 ,y rb2 , z rb2 ) and (x rb3 ,y rb3 , z rb3 ) are stored in the storage device 12 in association with each other.

[0123] The computing device 11 obtains a second conversion matrix for converting the positions of the reflectors r21, r22, and r23 and the positions and postures of the TCPs, based on the positions and postures of the TCPs associated with each other and the positions of the reflectors r21, r22, and r23. The second conversion matrix may include, for example: a matrix for obtaining the position of the TCP based on the positions of the reflectors r21, r22, and r23; and a matrix for obtaining the posture of the TCP based on the positions of the reflectors r21, r22, and r23. The second conversion matrix may be sent to the processing control device 30 via the communication device 13. In addition, various existing forms may be applied to the method for obtaining the second conversion matrix, so its detailed description is omitted. In addition, obtaining the second conversion matrix may also be referred to as calculating the second conversion matrix. The second conversion matrix may also be referred to as second conversion information.

[0124] In addition, the second conversion matrix can be obtained based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system and the position of the TCP in the measurement coordinate system. At this time, for example, when the position of the TCP inputted via the input device 14 is the position of the TCP in the robot coordinate system, the computing device 11 can use the first conversion matrix to convert the position of the TCP in the robot coordinate system into the position of the TCP in the measurement coordinate system.

[0125] In addition, the second transformation matrix can also be obtained, for example, as follows. First, when the position and posture of the robot 410 are the reference position and reference posture, the positions of the reflectors r21, r22 and r23 are measured, and the posture of the surface specified by the reflectors r21, r22 and r23 is obtained based on the measured positions. Next, the processing control device 30 controls the robot 41 so that the position and posture of the TCP become the specified position and posture. As a result, the position and posture of the robot 410 change. Subsequently, the positions of the reflectors r21, r22 and r23 are measured, and the posture of the surface specified by the reflectors r21, r22 and r23 is obtained based on the measured positions. At this time, the specified position and posture of the TCP are determined by the processing control device 30 (that is, they are known). The second transformation matrix can also be statistically obtained based on the results of repeating the above actions for many times.

[0126] For example, Fig.11 In the measurement of the position of the TCP of the end effector EE1, since the position and posture of the robot arm 410 are the reference position and reference posture, it can be said that the TCP is located at the predetermined position. The positions of the reflectors r21, r22, and r23 used to obtain the second transformation matrix are measured after the TCP of the end effector EE1 has been measured.

[0127] If reflectors r21, r22 and r23 are replaced by the second component, it can be said that the computing device 11, which can be called a computing unit, obtains the second transformation matrix for converting the position of the second component and the position of the TCP based on the fourth position information. The fourth position information represents the position of the second component measured by the measuring device 21 based on the measuring light irradiated on the second component when the TCP of the robot 41 is located at a specified position.

[0128] In addition, the specified position can be said to be the position of the TCP. Therefore, it can be said that the computing device 11, which can be called a computing unit, obtains a second transformation matrix for converting the position of the second component and the position of the TCP based on the fourth position information and the fifth position information. The fourth position information represents the position of the second component measured by the measuring device 21 based on the measuring light irradiated on the second component when the TCP of the robot 41 is located at the specified position, and the fifth position information represents the position of the TCP corresponding to the specified position.

[0129] For example, Fig.11 and Fig.13As shown, the measuring system 2 may include: a measuring device 21 which may be referred to as a first measuring device; and a sensor 23 or a sensor 24 which may be referred to as a third measuring device and which is capable of measuring the position of the TCP of the robot 41. In this case, the computing device 11 which may be referred to as a computing unit may obtain a second conversion matrix for converting the position of the second member and the position of the TCP based on the position of the second member measured by the measuring device 21 based on the measurement light irradiated on the second member in a state where the sensor 23 or the sensor 24 has measured the position of the TCP, and the position of the TCP measured by the sensor 23 or the sensor 24.

[0130] For example, Fig.12 and Fig.14 As shown, when the jig for measuring the position of the TCP of the end effector EE1 is movable and the jig is equipped with a reflector (for example, referring to Fig.12 The fixture 91a, Fig.14 The position of the reflector mounted on the jig may move depending on the position of the end effector EE1 (i.e., the position of the robot 410). In addition, it can be said that the positional relationship between the reflector mounted on the jig and the reflectors r21, r22, and r23 (in other words, the second member) mounted on the robot 410 when the position of the TCP is measured is a predetermined relationship.

[0131] If the reflector attached to the jig is referred to as a reference member, it can be said that the measuring device 21 can measure the position of the reference member by irradiating the measurement light to the reference member that moves according to the position of the robot arm 410, thereby measuring the position of the TCP of the robot 41 that moves together with the robot arm 410. In this case, the calculation device 11, which can be referred to as a calculation unit, can obtain a second conversion matrix for converting the position of the second member and the position of the TCP based on the position of the TCP measured by the measuring device 21 based on the measurement light irradiated to each of the reference member and the second member in a state where the positional relationship between the reference member and the second member is a predetermined relationship, and the position of the second member.

[0132] Here, refer to Fig.16 The operation of the measurement system 2 is described again with reference to the flowchart of FIG. Fig.16 In the step S201, the computing device 11 obtains the position of the TCP of the robot 41 when the robot arm 410 is in the reference position and reference posture. At this time, the computing device 11 calculates the posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23. The computing device 11 sets the calculated posture as the posture of the TCP, thereby obtaining the position and posture of the TCP (step S201).

[0133] In parallel with the processing of step S201, the measuring device 21 measures the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to the reflectors r21, r22, and r23 when the robot arm 410 of the robot 41 is at the reference position and reference posture (step S202). At this time, the computing device 11 of the measurement control device 10 obtains fourth position information indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0134] The computing device 11 obtains a second transformation matrix for transforming the positions of the reflectors r21, r22, and r23 and the position and posture of the TCP based on the fourth position information and the position and posture of the TCP acquired in the process of step S201 (step S203).

[0135] Through the matters described so far, the measurement system 2 including the measurement control device 10 and the measurement device 21 can be linked with the process control device 30. That is, the measurement result obtained by the measurement device 21 can be used for the process control device 30 to control the robot 41.

[0136] For example, when the position and posture of the robot arm 410 are different from the reference position and the reference posture, the first conversion matrix and the second conversion matrix can be used to convert the positions of the reflectors r21, r22 and r23 in the measurement coordinate system measured by the measuring device 21 into the position of the TCP in the robot coordinate system. The position of the TCP in the robot coordinate system is used when the processing control device 30 controls the robot 41.

[0137] In addition, the communication device 13 of the measurement control device 10 can send the position and posture of, for example, TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the processing control device 30 in association with each other. The processing control device 30 can save the position and posture of, for example, TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system in association with each other in the storage device 32.

[0138] For example, when measuring the TCP of the end effector EE1, the processing control device 30 controls the robot 41 so that the position and posture of the robot arm 410 become the reference position and reference posture. At this time, the position set as the target position by the processing control device 30 (that is, the position of the TCP when measuring the TCP) and the actual position of the TCP may be different. Therefore, the processing control device 30 may also correct the origin of the robot coordinate system based on the position and posture of, for example, the TCP in the robot coordinate system when the robot arm 410 is at the reference position and reference posture, so that, for example, the position set as the target position is consistent with the actual position of the TCP. Specifically, at least one of a rotational transformation and a parallel movement of the origin of the robot coordinate system may be performed.

[0139] As described above, the posture of the TCP when the posture of the robot arm 410 is the reference posture can be calculated based on the positions of the reflectors r21, r22, and r23. Therefore, the processing control device 30 corrects the origin of the robot coordinate system based on the position and posture of the TCP in the robot coordinate system. It can be said that the processing control device 30 corrects the origin of the robot coordinate system based on the positions of the reflectors r21, r22, and r23.

[0140] (5) Calculation of TCP position

[0141] By using the first transformation matrix (i.e., transformation information for converting the position in the measurement coordinate system and the position in the robot coordinate system) and the second transformation matrix (i.e., transformation information for converting the respective positions of reflectors r21, r22 and r23 and the position of TCP), the respective positions of reflectors r21, r22 and r23 measured by the measuring device 21 when the position and posture of the robot arm 410 are different from the reference position and reference posture can be converted into the position and posture of TCP.

[0142] As described in “(4-3) Conversion Matrix”, the second conversion matrix is ​​based on the position and orientation of the TCP, for example (x t ,y t , z t , W, P, R) and the positions of the reflectors r21, r22 and r23, for example (x rb1 ,y rb1 , z rb1 )、(x rb2 ,y rb2 , z rb2 ) and (x rb3 ,y rb3 , z rb3) is used for calculation. Therefore, as long as the second transformation matrix is ​​used, the position and posture of TCP can be calculated according to the positions of reflectors r21, r22 and r23. Here, in order to avoid cumbersomeness, the position and posture of TCP are appropriately referred to as "the position of TCP".

[0143] In addition, the rotation amount W of the robot coordinate system around the x-axis can be converted into the position of the robot coordinate system in the rotation direction around the x-axis. The rotation amount P of the robot coordinate system around the y-axis can be converted into the position of the robot coordinate system in the rotation direction around the y-axis. The rotation amount R of the robot coordinate system around the z-axis can be converted into the position of the robot coordinate system in the rotation direction around the z-axis. Therefore, it can be said that the position and posture of the TCP are represented by the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, the position in the z-axis direction of the robot coordinate system, the position in the rotation direction around the x-axis of the robot coordinate system, the position in the rotation direction around the y-axis of the robot coordinate system, and the position in the rotation direction around the z-axis of the robot coordinate system. That is, the TCP can move along the x-axis direction, the y-axis direction, and the z-axis direction in the three-dimensional space, and can rotate around the x-axis, the y-axis, and the z-axis, respectively. That is, it can be said that the TCP has six degrees of freedom of movement (the so-called six degrees of freedom (6DoF)).

[0144] Here, the calculation of the position of the TCP may be performed in the calculation device 11 of the measurement control device 10, or in the calculation device 31 of the processing control device 30. In addition, the calculation of the position of the TCP may be shared by the calculation device 11 and the calculation device 31. Furthermore, if the conversion between the position in the measurement coordinate system and the position in the robot coordinate system is also considered, the following four methods can be listed.

[0145] (i) The computing device 11 of the measurement control device 10 may use the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 11 may further use the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0146] (ii) The computing device 11 of the measurement control device 10 may use the first conversion matrix to convert the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 13 of the measurement control device 10 may send the position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the second conversion matrix to the processing control device 30. The computing device 31 of the processing control device 30 may use the second conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the TCP in the robot coordinate system.

[0147] (iii) The computing device 11 of the measurement control device 10 may use the second conversion matrix to convert the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 in the measurement coordinate system into the position of the TCP in the measurement coordinate system. The communication device 13 of the measurement control device 10 may send the position information indicating the position of the TCP in the measurement coordinate system and the first conversion matrix to the processing control device 30. The computing device 31 of the processing control device 30 may use the first conversion matrix to convert the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0148] (iv) The communication device 13 of the measurement control device 10 may send the position information indicating the positions of the reflectors r21, r22 and r23 respectively in the measurement coordinate system measured by the measurement device 21, the first conversion information and the second conversion information to the processing control device 30. The computing device 31 of the processing control device 30 uses the first conversion matrix to convert the positions of the reflectors r21, r22 and r23 respectively in the measurement coordinate system into the positions of the reflectors r21, r22 and r23 respectively in the robot coordinate system. The computing device 31 may further use the second conversion matrix to convert the positions of the reflectors r21, r22 and r23 respectively in the robot coordinate system into the positions of the TCP in the robot coordinate system.

[0149] (5-1) When the measurement control device 10 performs conversion to the robot coordinate system and conversion to the TCP position

[0150] The measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light when the position and posture of the robot arm 410 are different from the reference position and the reference posture. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0151] The computing device 11 of the measurement control device 10 can use the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 11 can further use the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0152] Alternatively, the computing device 11 may use the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the position and posture of the TCP in the measurement coordinate system. The computing device 11 may further use the first transformation matrix to convert the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0153] In this case, the communication device 13, which may be referred to as a transmission unit, may transmit position information indicating the position of the TCP in the robot coordinate system to the process control device 30. The process control device 30 may control the movement of the robot arm 410 of the robot 41 based on the position of the TCP in the robot coordinate system indicated by the position information to move the TCP.

[0154] In addition, as described in "(2-2) Coordinate conversion", the first conversion matrix is ​​obtained based on the first position information indicating the positions of the reflectors r11, r12, and r13 in the measurement coordinate system and the second position information indicating the positions of the reflectors r11, r12, and r13 in the robot coordinate system. Therefore, "using the first conversion matrix" can be replaced by "based on the first position information and the second position information". "The state in which the position and posture of the robot arm 410 are different from the reference position and the reference posture" can be replaced by "the state in which the TCP is located at a position different from the specified position".

[0155] In addition, “a state in which the position and posture of the robot arm 410 are different from the reference position and the reference posture” is equivalent to, for example, Fig.11 and Fig.13Here, if sensor 23 or sensor 24 is replaced by a third measuring device, "a state in which the position and posture of robot arm 410 are different from the reference position and reference posture" can also be replaced by "a state in which the third measuring device has not yet measured the position of TCP".

[0156] In addition, as described in "(4-3) Conversion Matrix", the second conversion matrix can be, for example, Fig.11 and Fig.13 In the state where the sensor 23 or the sensor 24 has measured the position of the TCP, the measuring device 21 obtains the position of the TCP based on the respective positions of the reflectors r21, r22, and r23 measured by the measuring light irradiated to the reflectors r21, r22, and r23, and the position of the TCP measured by the sensor 23 or the sensor 24. Here, if the sensor 23 or the sensor 24 is replaced by the third measuring device, "using the second conversion information" can be replaced by "based on the position of the second member measured by the measuring device 21 based on the measuring light irradiated to the second member in the state where the position of the TCP has been measured by the third measuring device, and the position of the TCP measured by the third measuring device".

[0157] “A state where the position and posture of the robot arm 410 are different from the reference position and the reference posture” corresponds to, for example, the following state: Fig.12 The positional relationship between the reflectors R31, R32, and R33 mounted on the jig 91a shown in the figure and the reflectors R21, R22, and R23 is different from the prescribed relationship. Here, if the reflectors R31, R32, and R33 are replaced by the reference member, and the reflectors R21, R22, and R23 are replaced by the second member, then "the state in which the position and posture of the robot 410 are different from the reference position and reference posture" can be replaced by "the state in which the positional relationship between the reference member and the second member is different from the prescribed relationship".

[0158] In addition, as described in "(4-3) Conversion Matrix", the second conversion matrix can be based on Fig.12In the state where the positional relationship between the reflectors r31, r32 and r33 mounted on the jig 91a shown in the figure and the reflectors r21, r22 and r23 is a predetermined relationship, the position of the TCP measured by the measuring device 21 based on the measuring light irradiated to the reflectors r31, r32 and r33, and the position of each of the reflectors r21, r22 and r23 measured by the measuring device 21 based on the measuring light irradiated to the reflectors r21, r22 and r23 are obtained. Here, if the reflectors r31, r32 and r33 are replaced by the reference member and the reflectors r21, r22 and r23 are replaced by the second member, then "using the second conversion matrix" can be replaced by "based on the position of the TCP measured by the measuring device 21 based on the measuring light irradiated to each of the reference member and the second member, and the position of the second member".

[0159] (5-2) When the measurement control device 10 performs conversion to the robot coordinate system and the processing control device 30 performs conversion to the TCP position

[0160] When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0161] The computing device 11 of the measurement control device 10 can use the first conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 13, which can be called a transmitting unit, can transmit the second conversion matrix and the third position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the processing control device 30.

[0162] The computing device 31 of the processing control device 30 can use the second conversion matrix to convert the positions of the reflectors r21, r22, and r23 represented by the third position information in the robot coordinate system into the positions of the TCP in the robot coordinate system. The processing control device 30 can control the movement of the robot arm 410 of the robot 41 based on the converted position of the TCP to move the position of the TCP.

[0163] (5-3) When the measurement control device 10 performs conversion to the TCP position and the processing control device 30 performs conversion to the robot coordinate system

[0164] When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0165] The computing device 11 of the measurement control device 10 can use the second conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the position of the TCP in the measurement coordinate system. The communication device 13, which can be called a first sending unit, can send the first conversion matrix and the ninth position information indicating the position of the TCP in the measurement coordinate system to the process control device 30.

[0166] The operation device 31 of the processing control device 30 can use the first conversion matrix to convert the position of the TCP in the measurement coordinate system represented by the ninth position information into the position of the TCP in the robot coordinate system. The processing control device 30 can control the movement of the robot arm 410 of the robot 41 based on the converted position of the TCP in the robot coordinate system to move the position of the TCP. That is, the processing control device 30 can control the movement of the robot arm 410 based on the ninth position information to move the position of the TCP.

[0167] (5-4) When the process control device 30 performs conversion to the robot coordinate system and conversion to the TCP position

[0168] When the position and posture of the robot 410 are different from the reference position and the reference posture, the measuring device 21 may irradiate the reflectors r21, r22, and r23 with measuring light. The measuring device 21 may measure the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measuring light irradiated to the reflectors r21, r22, and r23.

[0169] The communication device 13 , which may be referred to as a first sending unit, may send the first conversion matrix, the second conversion matrix, and the eighth position information representing the positions of the reflectors r21 , r22 , and r23 in the measurement coordinate system to the process control device 30 .

[0170] The computing device 31 of the process control device 30 may use the first conversion matrix to convert the positions of the reflectors r21, r22, and r23 represented by the eighth position information in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 31 may further use the second conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0171] Alternatively, the computing device 31 may use the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 represented by the eighth position information in the measurement coordinate system into the position and posture of the TCP in the measurement coordinate system. The computing device 31 may further use the first transformation matrix to convert the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0172] The processing control device 30 can control the movement of the robot arm 410 of the robot 41 based on the converted position of the TCP in the robot coordinate system to move the position of the TCP. Here, if the reflectors r21, r22, and r23 are replaced by the second member, it can be said that the processing control device 30 can convert the position of the second member represented by the eighth position information into the position of the TCP based on the second conversion matrix, and control the movement of the robot arm 410 based on the converted position of the TCP to move the position of the TCP (or the robot 41 can be controlled to move the position of the TCP).

[0173] (6) When there are multiple robots that can process the workpiece W

[0174] A workpiece W, which can be referred to as a processing object, can also be processed by a plurality of robots. Fig.17 and Fig.18 The system 1a shown includes a measurement control device 10, a measurement device 21, a process control device 30, and robots 41, 42, and 43. In the system 1a, the process control device 30 controls the robots 41, 42, and 43.

[0175] The robot arm 410 of the robot 41 is provided with Figure 5 The reflector module r2 shown includes reflectors r21, r22 and r23. Fig.17 The illustration of the reflector module r2 is omitted in FIG. Similarly, a reflector module including three reflectors is installed on the robot arm 420 of the robot 42. A reflector module including three reflectors is installed on the robot arm 430 of the robot 43.

[0176] The measuring device 21 can irradiate the measuring light to each of the reflectors R21, R22 and R23 included in the reflector module R2 installed on the robot 410. The measuring device 21 measures the positions of each of the reflectors R21, R22 and R23 in the measuring coordinate system based on the measuring light irradiated to each of the reflectors R21, R22 and R23. The computing device 11 of the measurement control device 10 uses the first conversion matrix to convert the positions of each of the reflectors R21, R22 and R23 in the measuring coordinate system into the positions of each of the reflectors R21, R22 and R23 in the robot coordinate system.

[0177] The measuring device 21 can irradiate the measuring light to each of the three reflectors included in the reflector module installed on the robot 420. The measuring device 21 measures the position of each of the three reflectors in the measuring coordinate system based on the measuring light irradiated to each of the three reflectors. The computing device 11 uses the first conversion matrix to convert the position of each of the three reflectors installed on the robot 420 in the measuring coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0178] The measuring device 21 can irradiate the measuring light to each of the three reflectors included in the reflector module installed on the robot 430. The measuring device 21 measures the position of each of the three reflectors in the measurement coordinate system based on the measuring light irradiated to each of the three reflectors. The computing device 11 uses the first conversion matrix to convert the position of each of the three reflectors installed on the robot 430 in the measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0179] The reflectors r21, r22, and r23 included in the reflector module r2 installed in the robot 410, the three reflectors included in the reflector module installed in the robot 420, and the three reflectors included in the reflector module installed in the robot 430 can also be referred to as second components. It can be said that the computing device 11, which can be referred to as a computing unit, can compute the positions of each of the plurality of second components respectively installed in the robot 41, the robot 42, and the robot 43 that can process the workpiece W in the robot coordinate system. At this time, the first conversion matrix can be shared in order to compute the positions of each of the plurality of second components respectively installed in the robot 41, the robot 42, and the robot 43 in the robot coordinate system.

[0180] (7) Method for determining the position of a light source from an image

[0181] For a specific example of a method for determining the position of a light source such as light source 81 using a stereo camera 22 as described in "(3-1) Method using a stereo camera", refer to Fig.19 as well as Fig. 20 to explain.

[0182] The image captured by the stereo camera 22 often contains noise. If the image contains noise, the position of the light source may be misidentified due to the noise. Fig.19 The processing shown in the flowchart of can remove noise, thereby suppressing erroneous recognition. In addition, the processing described below is an example and is not limited to this.

[0183] Fig.19 In the process of the measurement control device 10, the computing device 11 acquires the image captured by the stereo camera 22 (that is, the image captured by each of the two cameras included in the stereo camera 22) (step S301). The computing device 11 generates a parallax image based on the image acquired in the process of step S301 (step S302). In addition, various existing forms can be applied to the method of generating the parallax image, so the detailed description thereof is omitted.

[0184] The computing device 11 performs a median filter process on the parallax image generated in the process of step S302 (step S303 ). The computing device 11 further performs an integration threshold (IT) process on the image subjected to the median filter process (step S304 ).

[0185] The integral threshold processing is a process of accumulating or averaging the values ​​of each pixel in the parallax image (e.g., brightness value) along the time direction and removing the values ​​of pixels below a specified value (e.g., setting them to 0). The so-called "accumulating or averaging the values ​​of each pixel along the time direction" means accumulating or averaging the values ​​of each pixel across multiple parallax images that are continuous in time. In addition, the specified value can also be called a threshold.

[0186] The pixels whose values ​​become relatively large due to noise are random (i.e., different for each image). If the values ​​of each pixel are accumulated or averaged along the time direction, the values ​​of the pixels corresponding to the noise will become relatively small. Therefore, by removing the values ​​of pixels below the specified value, the noise can be removed.

[0187] For integration thresholding, refer to Fig. 20 Here, a frame image of 5 pixels×5 pixels is used for explanation. For example, a numerical value such as “0” or “255” represents the brightness value of a pixel.

[0188] In the integration threshold processing, for example, the brightness value of each pixel constituting the nth image, i.e., the (n)th frame, is added (cumulatively) to the brightness value of each pixel constituting the (n+1)th image following the (n)th frame, i.e., the (n+1)th frame, thereby generating a new image (see Fig. 20 (b)) In the case of addition averaging, the addition average of the brightness value of each pixel constituting the (n) frame and the brightness value of each pixel constituting the (n+1) frame is calculated.

[0189] Next, the maximum brightness value (here, "499") in the generated new image is multiplied by a predetermined ratio (e.g., 50%) to obtain a threshold value. In addition, in the generated new image, the brightness value of pixels with brightness values ​​below the threshold value is set to "0" (see Fig. 20 (c)).

[0190] Will constitute Fig. 20 The brightness value of each pixel of the image (c) is added (cumulatively) to the brightness value of each pixel constituting the n+2th image following the (n+1) frame, i.e., the (n+2)th frame, thereby generating a new image. In other words, the integral threshold processing can be performed using multiple images that are continuous in time.

[0191] return Fig.19 The computing device 11 detects the position of the light source from the parallax image to which the integration threshold processing has been applied in the process of step S304 (step S305).

[0192] In addition, instead of performing noise removal-related processing such as median filter processing or integral threshold processing on the disparity image, the computing device 11 may perform noise removal-related processing on the image acquired in the process of step S301 (i.e., the image captured by the stereo camera 22).

[0193] Alternatively or in addition to the above method, the following method may be used. Here, a bandpass filter may be provided in one of the two cameras included in the stereo camera 22. The bandpass filter may be configured, for example, to be a light source 81 such as an LED (see Figure 8) has a relatively high transmittance in the wavelength band of light emitted by the stereo camera 22, while the transmittance in the other wavelength bands is relatively low. In the image captured by one of the two cameras included in the stereo camera 22, the brightness value of the portion in which the light source 81 is reflected is relatively high, while the brightness value of the other portions is relatively low. Therefore, by referring to the image captured by the one of the cameras, the position of the light source 81 can be estimated relatively easily. Subsequently, based on the position of the light source 81 estimated from the image captured by the one of the cameras, the approximate position of the light source 81 in the image captured by the other of the two cameras included in the stereo camera 22 can be determined. Moreover, the position of the light source 81 can be determined by searching for the characteristic portion of the light source 81 from, for example, the image captured by the other camera based on the determined approximate position. According to the method, for example, the time required for searching for the characteristic portion of the light source 81 can be shortened, and misidentification can be suppressed.

[0194] (8) Measurement of robot 41 during operation

[0195] From the perspective of improving the processing accuracy of the robot 41 on the workpiece W, it is ideal that when the robot 41 is operating, the measuring device 21 is used to measure the respective positions of the reflectors r21, r22 and r23 contained in the reflector module r2 installed on the robot arm 410.

[0196] On the other hand, when the robot 410 is moving, for example, the first time point at which the position of the reflector r21 is measured is different from the second time point at which the position of the reflector r22 is measured. As a result, the position and posture of the robot 410 at the first time point may be different from the position and posture of the robot 410 at the second time point.

[0197] Therefore, the movement of the robot arm 410 may be temporarily stopped in order to measure the positions of the reflectors R21, R22, and R23. However, from the perspective of the operating efficiency of the robot 41, it is ideal to stop the movement of the robot arm 410 as short as possible in order to measure the positions of the reflectors R21, R22, and R23. In addition, if the scanning speed of the measuring light is sufficiently large compared to the moving speed of the robot arm 410, the measurement error can be ignored. In this case, the movement of the robot arm 410 may not be temporarily stopped in order to measure the positions of the reflectors R21, R22, and R23. In addition, the moving speed of the robot arm 410 may be reduced when measuring the positions of the reflectors R21, R22, and R23.

[0198] The robot 41 is controlled by the process control device 30. Therefore, when the robot 41 is operating, the measurement control device 10 controls the measurement device 21 to measure the reflectors r21, r22, and r23 according to the signal output from the process control device 30.

[0199] The computing device 31 of the processing control device 30 can determine, for example, the position and posture of the TCP when measuring the reflectors r21, r22, and r23 included in the reflector module r2 installed on the robot arm 410. Then, the computing device 31 generates a measurement start signal for starting the measurement of the measuring device 21. The communication device 33 can send the measurement start signal to the measurement control device 10. Here, the measurement start signal can include information for the measurement control device 10 to control the measuring device 21.

[0200] (i) For example, the measurement start signal may include position information indicating the position and posture of the TCP when measuring the reflectors r21, r22, and r23 (hereinafter, appropriately referred to as "the position of the TCP during measurement"). Specifically, the position information may include the position information indicating the position of the TCP in the robot coordinate system during measurement determined by the computing device 31 of the processing control device 30.

[0201] In this case, for example, the computing device 11 of the measurement control device 10 may use the first conversion matrix to convert the position of the TCP in the robot coordinate system during measurement, which is represented by the position information included in the measurement start signal, into the position of the TCP in the measurement coordinate system during measurement. The computing device 11 may further use the second conversion matrix to convert the position of the TCP in the measurement coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0202] Alternatively, the computing device 11 may use the second transformation matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 11 may further use the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0203] The measurement control device 10 may control the measurement device 21 to measure the reflectors r21 , r22 , and r23 based on the respective positions of the reflectors r21 , r22 , and r23 in the measurement coordinate system.

[0204] (ii) For example, the measurement start signal may include position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system. In this case, the operation device 31 of the process control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The operation device 31 may use the second transformation matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 33 may send a measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

[0205] The computing device 11 of the measurement control device 10 can use the first conversion matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system, which are represented by the position information contained in the measurement start signal, into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0206] (iii) For example, the measurement start signal may include a position signal indicating the position of the TCP in the measurement coordinate system during measurement. In this case, the operation device 31 of the process control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The operation device 31 may use a first conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the position of the TCP in the measurement coordinate system during measurement. The communication device 33 may send the measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the position of the TCP in the measurement coordinate system during measurement.

[0207] The computing device 11 of the measurement control device 10 can use the second conversion matrix to convert the position of the TCP in the measurement coordinate system during measurement, which is represented by the position information contained in the measurement start signal, into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system. The measurement control device 10 can control the measurement device 21 to measure the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0208] (iv) For example, the measurement start signal may include position information indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system. In this case, the operation device 31 of the process control device 30 may determine the position of the TCP in the robot coordinate system during measurement. The operation device 31 may use a first conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the position of the TCP in the measurement coordinate system during measurement. The operation device 31 may further use a second conversion matrix to convert the position of the TCP in the measurement coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0209] Alternatively, the computing device 31 may use the second conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The computing device 31 may further use the first conversion information to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0210] The communication device 33 may send a measurement start signal to the measurement control device 10, wherein the measurement start signal includes position information indicating the positions of the reflectors R21, R22, and R23 in the measurement coordinate system. The measurement control device 10 may control the measurement device 21 to measure the reflectors R21, R22, and R23 based on the positions of the reflectors R21, R22, and R23 in the measurement coordinate system indicated by the position information included in the measurement start signal.

[0211] In addition, the measurement start signal may include: a first measurement start signal including position information, and a second measurement start signal for instructing the measurement control device 10 to perform measurement. In this case, the communication device 33 of the processing control device 30 may first send the first measurement start signal to the measurement control device 10. At this time, the processing control device 30 may control the robot 41 so that the robot arm 410 moves to the specified position indicated by the position information included in the first measurement start signal. The communication device 33 of the processing control device 30, which receives a signal from the robot 41 indicating that the movement of the robot arm 410 to the specified position has been completed, may send the second measurement start signal to the measurement control device 10. As a result, the position measurement of each of the reflector R21, the reflector R22, and the reflector R23 may be started.

[0212] In this case, the measurement control device 10 can estimate the positions of the reflectors R21, R22, and R23 during measurement based on the position information contained in the first measurement start signal. Moreover, the measurement control device 10 can change the emission direction of the measurement light of the measurement device 21 in advance to irradiate the measurement light to the estimated position. Alternatively, the measurement control device 10 can change the emission direction of the measurement light of the measurement device 21 in advance to irradiate the measurement light to the position represented by the position information contained in the first measurement start signal. Subsequently, the measurement control device 10 can be in a standby state until the second measurement start signal is received. At this time, the measurement device 21 is on standby in a state where the positions of the reflectors R21, R22, and R23 can be measured. When the measurement control device 10 receives the second measurement start signal, the measurement control device 10 can start the position measurement of the reflectors R21, R22, and R23.

[0213] In addition, if reflectors R21, R22, and R23 are replaced by the second component, then in the case (iii), "the position of the TCP in the measurement coordinate system during measurement represented by the position information contained in the measurement start signal" can be replaced by "the measurement position in the measurement coordinate system for measuring the second component obtained by conversion based on the first conversion matrix in the process control device". Similarly, in the case (iv), "the position of each of reflectors R21, R22, and R23 in the measurement coordinate system represented by the position information contained in the measurement start signal" can be replaced by "the measurement position in the measurement coordinate system for measuring the second component obtained by conversion based on the first conversion matrix in the process control device".

[0214] In addition, in the case of (iii), "the operation device 31 uses the first conversion matrix to convert the position of the TCP in the robot coordinate system during measurement into the position of the TCP in the measurement coordinate system during measurement" can be replaced by "in order to measure the reflectors r21, r22 and r23, the operation device 31 converts the measurement position in the robot coordinate system into the measurement position in the measurement coordinate system based on the first conversion matrix". Similarly, in the case of (iv), "the operation device 31 uses the first conversion information to convert the positions of the reflectors r21, r22 and r23 in the robot coordinate system into the positions of the reflectors r21, r22 and r23 in the measurement coordinate system" can be replaced by "in order to measure the reflectors r21, r22 and r23, the operation device 31 converts the measurement position in the robot coordinate system into the measurement position in the measurement coordinate system based on the first conversion matrix".

[0215] As described above, the communication device 33 of the process control device 30 may send a measurement start signal to the measurement control device 10. In other words, the communication device 13 of the measurement control device 10 may receive a measurement start signal from the process control device 30. That is, the measurement control device 10 may include a communication device 13, which may be referred to as a receiving unit, which receives a measurement start signal from the process control device 30 for causing the measurement device 21 to start measurement.

[0216] In the cases (i) to (iii), the operation of the operation device 11 of the measurement control device 10 converting the position indicated by the position information included in the measurement start signal into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system can also be referred to as estimating the positions of the reflectors r21, r22, and r23. Therefore, the operation device 11 can also be referred to as an estimating unit.

[0217] As described above, the measurement control device 10 can control the measurement of the reflectors R21, R22, and R23 by the measurement device 21 based on the positions of the reflectors R21, R22, and R23 in the measurement coordinate system, which are represented by the position information contained in the measurement start signal. Here, "controlling the measurement of the reflectors R21, R22, and R23 by the measurement device 21" can include: changing the direction (i.e., the emission direction) of the measurement light. The measurement control device 10 can change the direction of the measurement light so that the measurement light emitted from the measurement device 21 is irradiated to the positions of the reflectors R21, R22, and R23 estimated by the computing device 11, which can be called the estimation unit. Here, the measurement device 21 can also include a tracking device (not shown) that can track the positions of the reflectors R21, R22, and R23 that move with the movement of the robot 41. In this case, the measurement control device 10 may change the direction of the measurement light by sending a signal indicating the position of each of the reflectors r21 , r22 , and r23 in the measurement coordinate system to the tracking device.

[0218] The computing device 31 of the processing control device 30 can determine the timing when the measuring device 21 starts measuring each of the reflectors r21, r22, and r23. The computing device 31 can generate timing information (in other words, a timing signal) indicating the timing of the determination. In addition to the measurement start signal, the communication device 33 of the processing control device 30 can also send the timing information to the measurement control device 10. In other words, the communication device 13 of the measurement control device 10 can receive the timing information. That is, the communication device 13, which can be referred to as a receiving unit, can receive the timing information indicating the timing of starting the measurement. In addition, the timing signal can be equivalent to the "second measurement start signal".

[0219] (8-1) Example of Changing the Emission Direction of Measurement Light

[0220] Reference Fig.21 For example, when the emission direction of the measurement light is changed by changing the angle of the mirror that reflects the measurement light in the measurement device 21, the measurement control device 10 controls the motor that changes the angle of the mirror included in the measurement device 21 to change the emission direction.

[0221] In this case, for example, due to a mechanical response delay of the motor, a certain amount of time is required from the time when the measurement control device 30 starts controlling the motor until the emission direction of the measurement light becomes a desired emission direction.

[0222] Fig.21 In FIG. 1 , the dotted circles represent the positions of the reflectors R21, R22, and R23 (i.e., the positions at which the reflectors R21, R22, and R23 are measured). “P21” represents the position of the reflector R21, “P22” represents the position of the reflector R22, and “P23” represents the position of the reflector R23. In addition, the positions P21, P22, and P23 may correspond to the positions of the reflectors R21, R22, and R23 in the measurement coordinate system, respectively, as represented by the position information contained in the measurement start signal.

[0223] The solid arrow extending from the measuring device 21 indicates the current emission direction d0 of the measuring light. Fig.21 In the case of the reflector r21 shown, the difference α between the current emission direction d0 of the measurement light and the target emission direction d1 is relatively large. In this case, the time required from when the measurement control device 10 starts controlling the measurement device 21 until the actual start of measurement of the reflector r21 is relatively long.

[0224] On the other hand, when the measuring device 21 first measures Fig.21 In the case of the reflector r22 shown, the difference β between the current emission direction d0 of the measurement light and the target emission direction d2 is relatively small. In this case, the time required from when the measurement control device 30 starts controlling the measurement device 21 until the measurement of the reflector r22 actually starts is relatively short.

[0225] The measurement control device 10 can determine the measurement order of the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system, for example, based on the position information contained in the measurement start signal, and the current emission direction d0 of the measurement light of the measurement device 21, so as to suppress the amount of change in the emission direction of the measurement light. In this way, the time required for the measurement device 21 to measure the reflectors r21, r22, and r23 can be shortened. In addition, in Fig.21 In the illustrated case, the measurement control device 10 may determine the measurement order to first measure the reflector r22, then measure the reflector r23, and finally measure the reflector r21.

[0226] In addition, "the positions of reflectors R21, R22 and R23 in the measurement coordinate system based on the position information contained in the measurement start signal" is not limited to "the positions of reflectors R21, R22 and R23 in the measurement coordinate system represented by the position information", but includes the concept of "the positions of reflectors R21, R22 and R23 in the measurement coordinate system converted by the computing device 11 of the measurement control device 10 using at least one of the first transformation matrix and the second transformation matrix to obtain the positions represented by the position information".

[0227] (8-2) Reflector measurement method

[0228] (8-2-1) Measurement timing

[0229] From the viewpoint of shortening the time required for measuring the reflectors r21, r22, and r23, it is desirable to change the emission direction in advance so that the emission direction of the measurement light L2 of the measuring device 21 becomes the direction of the position of the reflector r21, r22, or r23. For example, the measurement control device 10 may change the emission direction in advance so that the emission direction of the measurement light L2 of the measuring device 21 becomes the direction of the position of the reflector r21, r22, or r23 after receiving the measurement start signal and the reflectors r21, r22, and r23 are located at the positions where the reflectors r21, r22, and r23 are measured by the measuring device 21 (for example, refer to Fig.21In the embodiment of the present invention, the measurement control device 10 may change the emission direction of the measurement light L2 so as to irradiate the measurement light L2 toward the position where the reflectors r21, r22, and r23 are measured by the measurement device 21 before the reflectors r21, r22, and r23 are located. In addition, the measurement control device 10 may change the emission direction of the measurement light L2 so as to irradiate the measurement light L2 from the measurement device 21 toward the position where the reflectors r21, r22, and r23 are measured by the measurement device 21 after receiving the timing information and before the reflectors r21, r22, and r23 are located at the position where the reflectors r21, r22, and r23 are measured by the measurement device 21.

[0230] On the other hand, if the measurement light L2 is emitted toward the position where the reflector r21, the reflector r22 or the reflector r23 is measured by the measuring device 21 before the reflector r21, the reflector r22 and the reflector r23 are located at the position where the reflector r21, the reflector r22 and the reflector r23 are measured by the measuring device 21, the measurement light L2 may be irradiated to a reflector different from the reflector to be measured.

[0231] For example, it is assumed that the reflector module r2 installed on the robot arm 410 is along Fig. 22 . It is assumed that the emission direction of the measurement light L2 of the measurement device 21 is the direction of the position P22 of the measurement reflector r22. In this case, before the reflector r22 is located at the position P22, the reflector r23 passes near the position P22. If the measurement light L2 is emitted from the measurement device 21 before the reflector r22 is located at the position P22, the measurement light L2 may be irradiated to the reflector r23. Therefore, the measurement result based on the measurement light L2 irradiated to the reflector r23 may be output from the measurement device 21 as the measurement result related to the reflector r22. That is, the reflector may be misidentified.

[0232] In order to suppress the occurrence of such misidentification, information indicating, for example, a standby time may be included in the measurement start signal. The standby time may be, for example, the time from when the measurement control device 10 receives the measurement start signal until the measurement device 21 starts to emit the measurement light L2. In order to realize the position and posture of the TCP when measuring the reflectors r21, r22, and r23, for example, as determined by the calculation device 31 of the acceleration control device 30, the standby time may be set based on the time required for controlling the robot 410.

[0233] In the case where the processing control device 30 sends timing information to the measurement control device 10 in addition to the measurement start signal, the measurement start signal may not include information indicating the standby time, for example. In this case, the timing information may indicate the time when the measurement device 21 should start measuring. The time indicated by the timing information may be set based on the time when the position and posture of the TCP determined by the computing device 31 (i.e., the position and posture of the TCP when measuring the reflectors r21, r22, and r23) are achieved by controlling the robot arm 410. Alternatively, the timing information may indicate the standby time as the time when the measurement device 21 starts measuring.

[0234] In this way, it is possible to suppress the emission of the measurement light L2 from the measurement device 21 before the reflector to be measured by the measurement device 21 is located at the position for measuring the reflector. As a result, it is possible to suppress the occurrence of erroneous recognition of the reflector. Alternatively, the measurement light L2 may be emitted from the measurement device 21, and on the other hand, the light receiving sensor of the measurement device 21 may be turned off, or the measurement value may not be calculated based on the output from the light receiving sensor until the timing when the measurement device 21 should start measurement is reached. In this case, it is also possible to suppress the occurrence of erroneous recognition of the reflector.

[0235] (8-2-2) Measurement light irradiation method

[0236] When the reflectors r21, r22, and r23 are measured by the measuring device 21, the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (for example, referring to the TCP position and posture when the reflectors r21, r22, and r23 are measured) determined by the computing device 31 of the process control device 30 (i.e., the TCP position when measuring) are calculated (estimated). Fig.21 Hereinafter, the “positions of the reflectors r21, r22 and r23 in the measurement coordinate system” will be referred to as “the estimated measurement positions of the reflectors r21, r22 and r23”.

[0237] In addition, the estimated measurement positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 during measurement. In this case, even if the measurement device 21 emits the measurement light L2 toward the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23, the measurement light L2 will not be irradiated to the reflector to be measured. In other words, the position of the reflector to be measured cannot be measured.

[0238] Therefore, the measuring device 21 may emit the measuring light L2 in such a manner that the trajectory of the measuring light L2 becomes, for example, a spiral trajectory centered on the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23. For example, when the reflector r22 is the reflector to be measured, Fig.23 As shown, the measuring device 21 may emit the measuring light L2 in a spiral orbit centered on the estimated measuring position P22 of the reflector r22. The orbit of the measuring light L2 is not limited to a spiral orbit, and may be a raster scan orbit, for example.

[0239] In this way, even if the estimated measurement positions of the reflectors r21, r22, and r23 are different from the actual positions of the reflectors r21, r22, and r23 during measurement, the measuring device 21 can irradiate the measuring light L2 to the reflectors to be measured. That is, the measuring device 21 can measure the positions of the reflectors to be measured.

[0240] (8-2-3) Correction of estimated position

[0241] As described above, the estimated measurement positions of the reflectors r21 , r22 , and r23 may differ from the actual positions of the reflectors r21 , r22 , and r23 during measurement.

[0242] It is assumed that the measuring device 21 first measures the position of the reflector r22, then measures the position of the reflector r23, and finally measures the position of the reflector r21. In this case, the computing device 11 of the measurement control device 10 can compare the estimated measurement position of the reflector r22 with the actual position of the reflector r22 measured by the measuring device 21 after the measuring device 21 measures the position of the reflector r22 and before the measuring device 21 measures the position of the reflector r23. The computing device 11 can correct the estimated measurement positions of the reflectors r23 and r21 based on the comparison result. That is, the computing device 11, which can be called an estimation unit, can also correct the positions of other reflectors as the measurement object based on the estimated position of one reflector as the measurement object and the position of one reflector as the measurement object measured by the measuring device 21 based on the measurement light L2 irradiated to the one reflector as the measurement object.

[0243] When measuring the positions of reflectors R23 and R21, the time required for measuring the positions of reflectors R23 and R21 can be shortened as long as the measurement control device 10 controls the emission direction of the measurement light of the measurement device 21 based on the corrected measurement positions of reflectors R23 and R21.

[0244] (8-2-4)Standstillness determination

[0245] Even when the processing control device 30 completes the control of the robot 41 so that the position and posture of the TCP become the position and posture when measuring the reflectors r21, r22 and r23, for example, the robot arm 410 may sometimes vibrate due to the reaction when the mechanism constituting the robot 41 stops.

[0246] The measuring device 21 can measure the position of one of the reflectors r21, r22 and r23 as the measurement object multiple times. If the deviations of the multiple positions respectively represented by the multiple measurement results for the one reflector as the measurement object are within a specified range (for example, hundreds of milliseconds to several seconds) within a specified period (for example, hundreds of milliseconds to several seconds), the position of the reflector r21, r22 and r23 is within a specified range (for example, hundreds of milliseconds to several seconds). Fig.24 If the range is within the range of the dotted circle shown in FIG. 1 ), the computing device 11 of the measurement control device 10 can determine that the robot arm 410 is stationary. In this case, the accuracy of the position measured by the measuring device 21 due to the vibration of the robot arm 410 can be suppressed. In addition, the prescribed range can be set based on, for example, the allowable error of the position measurement performed by the measuring device 21, in other words, based on the measurement accuracy required for the position measurement performed by the measuring device 21.

[0247] (8-2-5) Other methods of irradiating measurement light

[0248] The measurement control device 10 may also control the measurement device 21 based on the estimated measurement positions of the reflectors r21, r22, and r23, so that, for example, Fig.25 As shown, the trajectory of the measurement light L2 of the measurement device 21 becomes a spiral trajectory in a range including the reflector r21, the reflector r22, and the reflector r23.

[0249] (8-2-6) Measurement results

[0250] When the robot 41 is operating, the positions of the reflectors R21, R22 and R23 in the measurement coordinate system measured by the measuring device 21 can be converted by the computing device 11 of the measurement control device 10 into the positions of the reflectors R21, R22 and R23 in the robot coordinate system, or can be converted by the computing device 11 of the processing control device 30 into the positions of the reflectors R21, R22 and R23 in the robot coordinate system.

[0251] (9) Others

[0252] (9-1) The end effector mounted on the robot 41 may be an end effector for purposes other than processing. Examples of end effectors for purposes other than processing include a pick-up robot (specifically, an adsorption robot, a gripping robot, etc.) or a three-dimensional measuring machine (Coordinate Measuring Machine, CMM). The CMM may be a scanning laser probe type or an optical type that performs non-contact measurement. For example, the CMM is mounted on the robot 41 as an end effector, and the workpiece W is measured by the CMM (see Figure 1 ), the robot 41 may also be referred to as a processing device, and the workpiece W may also be referred to as a processing object.

[0253] (9-2) The storage device 12 of the measurement control device 10 may store one or more programs for realizing the functions of the measurement control device 10. The computing device 11 executes at least one of the one or more programs stored in the storage device 12, thereby realizing the functions of the computing device 11.

[0254] The storage device 32 of the process control device 30 may store one or more programs for realizing the functions of the process control device 30. The computing device 31 executes at least one of the one or more programs stored in the storage device 32, thereby realizing the functions of the computing device 31.

[0255] (9-3) Reflectors r11, r12, and r13 and, for example, reflectors r31, r32, and r33 may be referred to as “first measuring members”, and reflectors r21, r22, and r23 may be referred to as “second measuring members”.

[0256] As described in "(2-2) Coordinate Conversion", the first conversion matrix for converting the position in the measurement coordinate system to the position in the robot coordinate system can be obtained based on the positions of the reflectors r11, r12, and r13 in the measurement coordinate system (i.e., the positions of the first measuring member) measured by the measuring device 21. In addition, as described in "(4) Tool Center Point", the second conversion matrix for converting the positions of the reflectors r21, r22, and r23 to the position of the TCP can be obtained based on Fig.12 The first transformation matrix and the second transformation matrix are obtained based on the positions of the reflectors r31, r32, and r33 attached to the jig 91a shown in FIG.

[0257] As described in "(5) Calculation of the position of the TCP", the calculation device 11 of the measurement control device 10 can use a first conversion matrix based on the position of the first measuring member to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (i.e., the position of the second measuring member) into the positions of the reflectors r21, r22, and r23 in the robot coordinate system (i.e., the position of the second measuring member). In addition, the calculation device 11 can use a second conversion matrix based on the position of the first measuring member to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (i.e., the position of the second measuring member) into the position of the TCP in the measurement coordinate system.

[0258] The following forms are derived from these contents. The computing device 11, which can be referred to as a computing unit, can convert the position of the second measuring member measured by the measuring device 21 based on the position of the first measuring member measured by the measuring device 21. In this case, the communication device 13, which can be referred to as a transmitting unit, can transmit position information indicating the position of the second measuring member obtained by the conversion to the processing control device 30.

[0259] In addition, the computing device 11, which may be referred to as a computing unit, may compute conversion information for converting the position of the second measuring member measured by the measuring device 21, based on the position of the first measuring member measured by the measuring device 21. In this case, the communication device 13, which may be referred to as a transmitting unit, may transmit the computed conversion information to the process control device 30.

[0260] (9-4) When the measuring device 21 measures, for example, the reflector r11 mounted on the jig 90, the measuring device 21 outputs the measurement result to the measurement control device 10. Similarly, when the measuring device 21 measures the reflectors r21, r22, and r23 mounted on the robot arm 410 of the robot 41, the measuring device 21 outputs the measurement result to the measurement control device 10.

[0261] The following forms are derived from these contents. The measurement method related to the measurement system 2 may include: the measurement device 21 receives the measurement light generated from the first member by irradiating the measurement light to the first member installed on the jig 90 holding the processing object, and outputs the first member position information indicating the position of the first member; and the measurement device 21 receives the measurement light generated from the second member by irradiating the measurement light to the second member installed on the robot arm 410 of the robot 41 that can process the processing object, and outputs the second member position information indicating the position of the second member. In addition, the reflector r11 is replaced by the first member, and the reflectors r21, r22 and r23 are replaced by the second member. As described above, the first member position information (i.e., the position of the reflector r11) and the second member position information (i.e., the respective positions of the reflectors r21, r22 and r23) can be used to control the movement of the robot arm 410 of the robot 41.

[0262] In addition, as described in "(3-1) Method using a stereo camera", the measurement of the measuring device 21 can be controlled based on the measurement results obtained by the stereo camera 22. Here, the measurement control of the measuring device 21 may include controlling the direction of the measuring light (for example, the irradiation direction). The following form is derived from these contents. A measurement method related to a measuring system 2 including a measuring device 21 and a stereo camera 22 may include: the stereo camera 22, which can be called a shooting device, shoots a first component and a second component; based on the output from the stereo camera 22, the irradiation direction of the measuring light irradiated from the measuring device 21 to the first component is controlled; and based on the output from the stereo camera 22, the irradiation direction of the measuring light irradiated from the measuring device 21 to the second component is controlled.

[0263] (9-5) The positional relationship between the TCP and the reflectors such as the reflector r21, the reflector r22, and the reflector r23 may not be obtained by calculation. In this case, the positional relationship between the TCP and the reflectors may be input by, for example, the user of the system 1. That is, the measurement system 2 and / or the system 1, which may also be called a processing system, may grasp the positional relationship between the TCP and the reflectors.

[0264] <Notes>

[0265] The following supplementary notes are further disclosed with respect to the above-described embodiment.

[0266] (Note 1)

[0267] A measuring method is a measuring method in a measuring system, the measuring system comprising: a measuring device capable of irradiating a first member and a second member with a measuring light, the first member being mounted on at least one of a processing object and a jig holding the processing object, the second member being mounted on a movable part of a processing device capable of processing the processing object, and the measuring device capable of measuring the positions of the first member and the second member in a coordinate system related to the measuring device, i.e., a measuring coordinate system; and a measuring control device for controlling the measuring device.

[0268] The measuring method comprises:

[0269] The measurement control device converts the position of the second member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the second member into the position of the second member in the processing coordinate system based on first position information and second position information, wherein the first position information indicates the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the first member, and the second position information indicates the position of the first member in a coordinate system related to the processing device, namely, the processing coordinate system; and

[0270] The measurement control device transmits third position information indicating the converted position of the second member in the processing coordinate system to a processing control device that controls the processing device.

[0271] (Note 2)

[0272] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a measuring device capable of irradiating a first member and a second member with a measuring light, the first member being mounted on at least one of the processing object and a fixture holding the processing object, the second member being mounted on a movable part of the processing device, and the measuring device capable of measuring the positions of the first member and the second member in a coordinate system related to the measuring device, i.e., a measuring coordinate system; a measuring control device for controlling the measuring device; and a processing control device for controlling the movement of the processing device in the processing coordinate system.

[0273] The processing method comprises:

[0274] The measurement control device converts the position of the second member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the second member into the position of the second member in the processing coordinate system based on the first position information and the second position information, wherein the first position information indicates the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the first member, and the second position information indicates the position of the first member in a coordinate system related to the processing device, i.e., the processing coordinate system;

[0275] The measurement control device sends third position information indicating the converted position of the second component in the processing coordinate system to the processing control device; and

[0276] The processing control device controls the processing device in the processing coordinate system based on the position of the second member in the processing coordinate system represented by the third position information.

[0277] (Note 3)

[0278] A measuring method is a measuring method in a measuring system, the measuring system comprising: a measuring device capable of irradiating a first member and a second member with a measuring light, the first member being mounted on at least one of a processing object and a jig holding the processing object, the second member being mounted on a movable part of a processing device capable of processing the processing object, and the measuring device capable of measuring the positions of the first member and the second member in a coordinate system related to the measuring device, i.e., a measuring coordinate system; and a measuring control device for controlling the measuring device.

[0279] The measuring method comprises:

[0280] The measurement control device calculates first conversion information based on the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the first member and the position of the first member in the coordinate system related to the processing device, i.e., the processing coordinate system, inputted via the input device of the measurement control device, and the first conversion information is used to convert the position in the measurement coordinate system and the position in the processing coordinate system;

[0281] The measurement control device sends the first conversion information to the processing control device, and the processing control device controls the movement of the processing device in a coordinate system related to the processing device, namely, the processing coordinate system; and

[0282] The measurement control device controls the measurement of the second component by the measuring device based on seventh position information, and the seventh position information represents the measurement position in the measurement coordinate system used to measure the second component, which is converted in the process control device based on the first conversion information.

[0283] (Note 4)

[0284] A processing method is a processing method in a processing system, the processing system comprising: a processing device capable of processing a processing object; a measuring device capable of irradiating a first member and a second member with a measuring light, the first member being mounted on at least one of the processing object and a fixture holding the processing object, the second member being mounted on a movable part of the processing device, and the measuring device capable of measuring the positions of the first member and the second member in a coordinate system related to the measuring device, i.e., a measuring coordinate system; a measuring control device for controlling the measuring device; and a processing control device for controlling the movement of the processing device in a coordinate system related to the processing device, i.e., a processing coordinate system.

[0285] The processing method comprises:

[0286] The measurement control device calculates first conversion information based on the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated on the first member and the position of the first member in the processing coordinate system input via the input device of the measurement control device, and the first conversion information is used to convert the position in the measurement coordinate system and the position in the processing coordinate system;

[0287] The measurement control device sends the first conversion information to the processing control device;

[0288] The processing control device converts the measurement position in the processing coordinate system used for measuring the second member into the measurement position in the measurement coordinate system based on the first conversion information;

[0289] The process control device sends seventh position information indicating the measurement position in the measurement coordinate system obtained by the conversion to the measurement control device; and

[0290] The measurement control device controls the measurement of the second member by the measurement device based on the measurement position in the measurement coordinate system represented by the seventh position information.

[0291] (Note 5)

[0292] A measuring method is a measuring method in a measuring system, wherein the measuring system comprises: a measuring device capable of measuring a first measuring member and a second measuring member installed on a processing device; and a measuring control device for controlling the measuring device.

[0293] The measuring method comprises:

[0294] the measurement control device converts the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device; and

[0295] The measurement control device transmits position information indicating the position of the second measuring member obtained by the conversion to a processing control device that controls the processing device.

[0296] (Note 6)

[0297] A measuring method is a measuring method in a measuring system, wherein the measuring system comprises: a measuring device capable of measuring a first measuring member and a second measuring member installed on a processing device; and a measuring control device for controlling the measuring device.

[0298] The measuring method comprises:

[0299] the measurement control device calculates conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device; and

[0300] The measurement control device sends the conversion information to a processing control device that controls the processing device.

[0301] (Note 7)

[0302] A measurement method comprising:

[0303] a measuring device receiving measurement light generated from a first member attached to a jig holding a processing object by irradiating the first member with the measurement light, and outputting first member position information indicating a position of the first member; and

[0304] The measuring device receives the measuring light generated from the second member by irradiating the measuring light to the second member installed in the movable part of the processing device capable of processing the processing object, and outputs the second member position information indicating the position of the second member.

[0305] The first member position information and the second member position information output from the measuring device are used to control movement of the movable portion of the processing device.

[0306] (Note 8)

[0307] The measurement method as described in Note 7, wherein:

[0308] The measuring method comprises:

[0309] A photographing device photographs the first component and the second component;

[0310] controlling the irradiation direction of the measurement light irradiated from the measurement device to the first member based on the output from the imaging device; and

[0311] The irradiation direction of the measurement light irradiated from the measurement device to the second member is controlled based on the output from the imaging device.

[0312] The present invention is not limited to the described embodiments, and may be appropriately modified without violating the claims and the gist or idea of ​​the invention as read from the entire specification. The measuring system, processing system, measuring method and processing method accompanying such modifications are also included in the technical scope of the present invention.

[0313] [Explanation of Symbols]

[0314] 1.1a: System

[0315] 2: Measurement system

[0316] 10: Measurement control device

[0317] 21: Measuring device

[0318] 22: Stereo Camera

[0319] 23, 24: Sensor

[0320] 30: Processing control device

[0321] 41, 42, 43: Robots

[0322] 90: Jig

[0323] W: Workpiece

[0324] R11, R12, R13, R21, R22, R23: reflectors

Claims

1. A measurement system comprising: a measuring device capable of irradiating a measuring light onto a first member and a second member, wherein the first member is mounted on at least one of a processing object and a jig holding the processing object, and the second member is mounted on a movable portion of a processing device capable of processing the processing object, and the measuring device is capable of measuring the position of each of the first member and the second member in a coordinate system related to the measuring device, i.e., a measurement coordinate system; as well as A measurement control device controls the measurement device, in which the measurement system The measurement control device comprises: a calculation unit that converts the position of the second member in the measurement coordinate system measured by the measuring device based on the measurement light irradiated on the second member into the position of the second member in the processing coordinate system based on first position information and second position information, wherein the first position information indicates the position of the first member in the measurement coordinate system measured by the measuring device based on the measurement light irradiated on the first member, and the second position information indicates the position of the first member in the processing coordinate system which is a coordinate system related to the processing device; and The transmitting unit can transmit third position information to a processing control device that controls the processing device, wherein the third position information indicates the position of the second member obtained by the conversion in the processing coordinate system.

2. The measurement system according to claim 1, wherein: The measuring system includes a photographing device capable of photographing at least one of the first component and the second component. The measurement control device controls measurement of the measurement device with respect to at least one of the first component and the second component based on the imaging result obtained by the imaging device.

3. The measuring system according to claim 1 or 2, wherein: The measuring system includes a first measuring device and a second measuring device as the measuring device, wherein the second measuring device can measure at least one of the first member and the second member with a coarser accuracy than the first measuring device. The measurement control device controls measurement of the first measurement device with respect to at least one of the first component and the second component based on a measurement result obtained by the second measurement device.

4. The measuring system according to any one of claims 1 to 3, wherein: The calculation unit can calculate the position of each of the plurality of second members respectively mounted on the plurality of processing devices capable of processing the processing object in the processing coordinate system.

5. The measuring system according to any one of claims 1 to 4, wherein: The measurement control device comprises an input device, The calculation unit calculates first conversion information based on the first position information and the second position information input via the input device, wherein the first conversion information is used to convert a position in the measurement coordinate system and a position in the processing coordinate system.

6. The measurement system according to claim 4, wherein: The measurement control device comprises an input device, The computing unit computes first conversion information based on the first position information and the second position information inputted via the input device, wherein the first conversion information is used to convert the position in the measurement coordinate system and the position in the processing coordinate system. The first conversion information is commonly used to calculate the positions of each of the plurality of second members in the machining coordinate system.

7. The measuring system according to any one of claims 1 to 6, wherein: The measurement control device includes a receiving unit that receives a measurement start signal for causing the measurement device to start measurement from the process control device.

8. The measurement system according to claim 7, wherein: After receiving the measurement start signal and before the second member is located at a position where the second member is measured by the measuring device, the measurement control device changes the emission direction of the measurement light so as to irradiate the measurement light toward the position where the second member is measured by the measuring device.

9. The measuring system according to claim 7 or 8, wherein: The receiving unit receives timing information indicating a timing to start measurement from the process control device.

10. The measurement system according to claim 9, wherein: After receiving the timing information and before the second member is located at a position where the second member is measured by the measuring device, the measurement control device changes the emission direction of the measurement light so as to irradiate the measurement light toward the position where the second member is measured by the measuring device.

11. The measuring system according to any one of claims 1 to 10, wherein: The position of the second member is a predetermined position of the movable portion relative to the reference portion of the processing device. The second member is a reflector capable of reflecting the measuring light.

12. The measurement system according to claim 11, wherein: The reference position is the tool center point.

13. The measuring system according to any one of claims 1 to 12, wherein: The measurement control device includes an estimation unit capable of estimating a position of the second member that moves along with the operation of the processing device when the processing device is in operation. The measurement control device changes the direction of the measurement light so that the measurement light is irradiated onto the position of the second member estimated by the estimation unit.

14. The measuring system according to any one of claims 1 to 13, wherein: The measuring device includes a tracking device capable of tracking the position of the second member that moves along with the operation of the processing device.

15. The measurement system according to claim 14, wherein: The measurement control device includes an estimation unit capable of estimating a position of the second member that moves along with the operation of the processing device when the processing device is in operation. The estimation unit corrects the position of the second member based on the estimated position of the second member and the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member.

16. The measuring system according to any one of claims 1 to 15, wherein: The first member includes at least three reflectors capable of reflecting the measuring light.

17. The measuring system according to any one of claims 1 to 16, wherein: The first member is attached to at least one of a position indicating a position reference of the processing object and a position indicating a position reference of the jig.

18. The measuring system according to any one of claims 1 to 17, wherein: The calculation unit calculates second conversion information based on fourth position information and fifth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the processing device is located at a predetermined position, the fifth position information indicating the position of the tool center point corresponding to the predetermined position, and the second conversion information being used to convert the position of the second member and the position of the tool center point. The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the tool center point is located at a position different from the predetermined position, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The transmitting unit transmits the second conversion information and the third position information indicating the position of the second member obtained by the conversion in the processing coordinate system to the processing control device.

19. The measuring system according to any one of claims 1 to 17, wherein: the computing unit computing second conversion information based on fourth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the machining device is located at a predetermined position, the second conversion information being used to convert the position of the second member and the position of the tool center point, The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the tool center point is located at a position different from the predetermined position, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The computing unit converts the position of the second member obtained by the conversion in the machining coordinate system into the position of the tool center point based on the second conversion information, The transmitting unit transmits sixth position information to the processing control device instead of transmitting the third position information to the processing control device, the sixth position information indicating the position of the tool center point obtained by the conversion.

20. The measuring system according to any one of claims 1 to 17, wherein: The measuring system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the processing device. The calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device. The computing unit converts the position of the second member in the measurement coordinate system, which is measured by the first measuring device based on the measurement light irradiated on the second member when the third measuring device has not yet measured the position of the tool center point, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The transmitting unit transmits the second conversion information and the third position information indicating the position of the second member obtained by the conversion in the processing coordinate system to the processing control device.

21. The measuring system according to any one of claims 1 to 17, wherein: The measuring system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the processing device. The computing unit calculates, based on the first position information and the second position information, a position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has not yet measured the position of the tool center point. The position of the second component in the machining coordinate system is converted into the position of the second component in the machining coordinate system. The calculation unit converts the converted position of the second member in the machining coordinate system into the position of the tool center point based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, The transmitting unit transmits sixth position information to the processing control device instead of transmitting the third position information to the processing control device, the sixth position information indicating the position of the tool center point obtained by the conversion.

22. The measuring system according to any one of claims 1 to 17, wherein: The measuring device further irradiates the measuring light to a reference member that moves according to the position of the movable part to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. The calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated on the reference member and the second member respectively in a state where the positional relationship between the reference member and the second member is a predetermined relationship, and the position of the second member. The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the positional relationship is different from the prescribed relationship, into the position of the second member in the processing coordinate system based on the first position information and the second position information, The transmitting unit transmits the second conversion information and the third position information indicating the position of the second member obtained by the conversion in the processing coordinate system to the processing control device.

23. The measurement system according to any one of claims 1 to 17, wherein: The measuring device further irradiates the measuring light to a reference member that moves according to the position of the movable part to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. The computing unit converts the position of the second member in the measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the second member in a state where the position relationship between the reference member and the second member is different from a predetermined relationship, into the position of the second member in the processing coordinate system based on the first position information and the second position information, The calculation unit converts the converted position of the second member in the machining coordinate system into the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated on the reference member and the second member respectively when the positional relationship is the predetermined relationship, and the position of the second member, The transmitting unit transmits sixth position information to the processing control device instead of transmitting the third position information to the processing control device, the sixth position information indicating the position of the tool center point obtained by the conversion.

24. A measurement system comprising: a measuring device capable of irradiating a measuring light onto a first member and a second member, wherein the first member is mounted on at least one of a processing object and a jig holding the processing object, and the second member is mounted on a movable portion of a processing device capable of processing the processing object, and the measuring device is capable of measuring the position of each of the first member and the second member in a coordinate system related to the measuring device, i.e., a measurement coordinate system; as well as A measurement control device controls the measurement device, in which the measurement system The measurement control device comprises: Input device; a first computing unit that computes first conversion information for converting the position in the measurement coordinate system and the position in the processing coordinate system based on the position of the first member in the measurement coordinate system measured by the measuring device based on the measurement light irradiated on the first member and the position of the first member in the processing coordinate system, which is a coordinate system related to the processing device and input via the input device; and a first sending unit capable of sending the first conversion information to a processing control device, wherein the processing control device controls the movement of the processing device in a coordinate system related to the processing device, namely, a processing coordinate system; The measurement control device controls the measurement of the second component by the measuring device based on seventh position information, and the seventh position information represents the measurement position in the measurement coordinate system used to measure the second component, which is converted in the process control device based on the first conversion information.

25. The measurement system of claim 24, wherein: The seventh position information indicates the position in the measurement coordinate system at which the measuring device starts measuring the second member, as the measurement position in the measurement coordinate system.

26. A measurement system according to claim 24 or 25, wherein: The measurement control device receives a measurement start signal for causing the measurement device to start measurement from the process control device.

27. The measurement system of claim 26, wherein: After receiving the measurement start signal, the measurement control device When the component is located before the measurement position in the measurement coordinate system indicated by the seventh position information, the emission direction of the measurement light is changed so that the measurement light is irradiated toward the measurement position in the measurement coordinate system.

28. A measurement system according to any one of claims 24 to 27, wherein: The measurement control device receives timing information from the process control device, wherein the timing information indicates a timing for causing the measurement device to start measurement.

29. The measurement system of claim 28, wherein: After receiving the timing information and before the second member is located at the measurement position in the measurement coordinate system indicated by the seventh position information, the measurement control device changes the emission direction of the measurement light so as to irradiate the measurement light toward the measurement position in the measurement coordinate system.

30. A measurement system according to any one of claims 24 to 29, wherein: The position of the second member is a predetermined position of the movable portion relative to the reference portion of the processing device. The second member is a reflector capable of reflecting the measuring light.

31. The measurement system of claim 30, wherein: The reference position is the tool center point.

32. A measurement system according to any one of claims 24 to 31, wherein: A reflector module including at least three reflectors is arranged at a predetermined position relative to a reference position of the processing device.

33. A measurement system according to any one of claims 24 to 32, wherein: The measurement control device includes an estimation unit capable of estimating a position of the second member that moves along with the operation of the processing device when the processing device is in operation. The measurement control device changes the direction of the measurement light so that the estimated position of the second member is irradiated with the measurement light.

34. A measurement system according to any one of claims 24 to 32, wherein: The measuring device includes a tracking device capable of tracking the position of the second member that moves along with the operation of the processing device.

35. The measurement system of claim 33, wherein: The measuring device includes a tracking device capable of tracking the position of the second member that moves along with the operation of the processing device.

36. The measurement system of claim 35, wherein: The estimating unit corrects the position of the second member based on the estimated position of the second member and the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member.

37. A measurement system according to any one of claims 24 to 36, wherein: The first member includes at least three reflectors capable of reflecting the measuring light.

38. A measurement system according to any one of claims 24 to 37, wherein: The measuring system includes a photographing device capable of photographing at least one of the first component and the second component. The measurement control device controls measurement of the measurement device with respect to at least one of the first component and the second component based on the imaging result obtained by the imaging device.

39. A measurement system according to any one of claims 24 to 38, wherein: The measuring system includes a first measuring device and a second measuring device as the measuring device, wherein the second measuring device can measure at least one of the first member and the second member with a coarser accuracy than the first measuring device. The measurement control device controls measurement of the first measurement device with respect to at least one of the first component and the second component based on a measurement result obtained by the second measurement device.

40. A measurement system according to any one of claims 24 to 39, wherein: The plurality of second members are respectively mounted on a plurality of processing devices capable of processing the processing object. The first conversion information is commonly used to calculate the positions of each of the plurality of second members in the machining coordinate system.

41. A measurement system according to any one of claims 24 to 40, wherein: The first member is attached to at least one of a position indicating a position reference of the processing object and a position indicating a position reference of the jig.

42. A measurement system according to any one of claims 24 to 41, wherein: The first computing unit computes second conversion information based on fourth position information and fifth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the machining device is located at a predetermined position, the fifth position information indicating the position of the tool center point corresponding to the predetermined position, and the second conversion information being used to convert the position of the second member and the position of the tool center point. In addition to the first conversion information, the first sending unit also sends the second conversion information and eighth position information to the processing control device, and the eighth position information indicates the position of the second component measured by the measuring device based on the measuring light irradiated on the second component when the tool center point is located at a position different from the specified position.

43. A measurement system according to any one of claims 24 to 41, wherein: The first computing unit computes second conversion information based on fourth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated to the second member when the tool center point of the machining device is located at a predetermined position, the second conversion information being used to convert the position of the second member and the position of the tool center point, and based on the second conversion information, converting the position of the second member measured by the measuring device based on the measuring light irradiated to the second member when the tool center point is located at a position different from the predetermined position into the position of the tool center point. The first transmitting unit transmits ninth position information to the processing control device in addition to the first conversion information, wherein the ninth position information indicates a position of the tool center point obtained by the conversion.

44. A measurement system according to any one of claims 24 to 41, wherein: The measuring system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the processing device. The first calculation unit calculates second conversion information based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, the second conversion information being used to convert the position of the second member and the position of the tool center point. In addition to the first conversion information, the first sending unit also sends the second conversion information and eighth position information to the processing control device, wherein the eighth position information indicates the position of the second component measured by the first measuring device based on the measuring light irradiated on the second component when the third measuring device has not yet measured the tool center point.

45. A measurement system according to any one of claims 24 to 41, wherein: The measuring system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the processing device. The first computing unit converts the position of the second member measured by the first measuring device based on the measurement light irradiated onto the second member when the third measuring device has not yet measured the tool center point into the position of the tool center point, based on the position of the second member measured by the first measuring device based on the measurement light irradiated onto the second member when the third measuring device has already measured the tool center point and the position of the tool center point measured by the third measuring device, The first transmitting unit transmits ninth position information to the processing control device in addition to the first conversion information, wherein the ninth position information indicates the position of the tool center point obtained by the conversion.

46. ​​A measurement system according to any one of claims 24 to 41, wherein: The measuring device further irradiates the measuring light to a reference member that moves according to the position of the movable part to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. The first computing unit computes second conversion information for converting the position of the second member with respect to the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated on the reference member and the second member respectively in a state where the positional relationship between the reference member and the second member is a predetermined relationship, and the position of the second member. In addition to the first conversion information, the first sending unit also sends the third conversion information and eighth position information to the processing control device, and the eighth position information indicates the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the position relationship is different from the prescribed relationship.

47. A measurement system according to any one of claims 24 to 41, wherein: The measuring device further irradiates the measuring light to a reference member that moves according to the position of the movable part to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. the first computing unit converts the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when the positional relationship is different from the prescribed relationship into the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated onto each of the reference member and the second member when the positional relationship between the reference member and the second member is a prescribed relationship and the position of the second member, The first transmitting unit transmits ninth position information to the processing control device in addition to the first conversion information, wherein the ninth position information indicates the position of the tool center point obtained by the conversion.

48. A processing system comprising: The measuring system according to any one of claims 1 to 23; The processing device is capable of processing the processing object; and The processing control device controls the movement of the processing device in the processing coordinate system. The processing control device controls the processing device in the processing coordinate system based on the position of the second member in the processing coordinate system represented by the third position information.

49. The processing system of claim 48, wherein: The processing control device controls a processing position of the processing device based on the third position information.

50. The processing system according to claim 48 or 49, wherein: The process control device corrects the origin position of the process device based on the third position information.

51. A processing system according to any one of claims 48 to 50, wherein: The calculation unit calculates second conversion information based on fourth position information and fifth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the processing device is located at a predetermined position, the fifth position information indicating the position of the tool center point corresponding to the predetermined position, and the second conversion information being used to convert the position of the second member and the position of the tool center point. The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the tool center point is located at a position different from the predetermined position, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The transmitting unit transmits the second conversion information and the third position information indicating the position of the second member obtained by the conversion in the processing coordinate system to the processing device control device. Based on the second conversion information, the processing control device converts the position of the second component in the processing coordinate system obtained by the conversion represented by the third position information into the position of the tool center point, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

52. A processing system according to any one of claims 48 to 50, wherein: the computing unit computing second conversion information based on fourth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the machining device is located at a predetermined position, the second conversion information being used to convert the position of the second member and the position of the tool center point, The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the tool center point is located at a position different from the predetermined position, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The computing unit converts the position of the second member obtained by the conversion in the machining coordinate system into the position of the tool center point based on the second conversion information, The transmitting unit transmits sixth position information to the processing control device instead of the third position information, wherein the sixth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on the sixth position information to move the tool center point.

53. A processing system according to any one of claims 48 to 50, wherein: The machining system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the machining device. The calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device. The computing unit converts the position of the second member in the measurement coordinate system, which is measured by the first measuring device based on the measurement light irradiated on the second member when the third measuring device has not yet measured the position of the tool center point, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The sending unit sends the second conversion information and third position information to the processing control device, wherein the third position information indicates the position of the second component obtained by the conversion in the processing coordinate system. Based on the second conversion information, the processing control device converts the position of the second component in the processing coordinate system obtained by the conversion represented by the third position information into the position of the tool center point, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

54. A processing system according to any one of claims 48 to 50, wherein: The machining system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the machining device. The computing unit converts the position of the second member in the measurement coordinate system, which is measured by the first measuring device based on the measurement light irradiated on the second member when the third measuring device has not yet measured the position of the tool center point, into the position of the second member in the machining coordinate system based on the first position information and the second position information, The calculation unit converts the converted position of the second member in the machining coordinate system into the position of the tool center point based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, The transmitting unit transmits sixth position information to the processing control device instead of the third position information, wherein the sixth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on the sixth position information to move the tool center point.

55. A processing system according to any one of claims 48 to 50, wherein: The measuring device further irradiates the measuring light to a reference member that moves together with the movable part to measure the position of the reference part, thereby being able to measure the position of a tool center point of the processing device that moves together with the movable part. The calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated on the reference member and the second member respectively in a state where the positional relationship between the reference member and the second member is a predetermined relationship, and the position of the second member. The computing unit converts the position of the second member in the measurement coordinate system, measured by the measuring device based on the measurement light irradiated on the second member when the positional relationship is different from the prescribed relationship, into the position of the second member in the processing coordinate system based on the first position information and the second position information, The transmitting unit transmits the second conversion information and the third position information indicating the position of the second member obtained by the conversion in the processing coordinate system to the processing control device. Based on the second conversion information, the processing control device converts the position of the second component in the processing coordinate system obtained by the conversion represented by the third position information into the position of the tool center point, and controls the processing device based on the position of the tool center point obtained by the conversion to control the movement of the movable part to move the position of the tool center point.

56. A processing system according to any one of claims 48 to 50, wherein: The measuring device further irradiates the reference member that moves together with the movable part with the measuring light to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. The computing unit converts the position of the second member in the measurement coordinate system, measured by the first measuring device based on the measurement light irradiated on the second member in a state where the position relationship between the reference member and the second member is different from a predetermined relationship, into the position of the second member in the processing coordinate system based on the first position information and the second position information, The calculation unit converts the position of the second member in the machining control system into the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measuring device based on the measurement light irradiated on each of the reference member and the second member in a state where the positional relationship is a predetermined positional relationship, The transmitting unit transmits sixth position information to the processing control device instead of the third position information, wherein the sixth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on sixth position information to move the position of the tool center point.

57. A processing system comprising: A measuring system according to any one of claims 24 to 47; The processing device is capable of processing the processing object; as well as a processing control device for controlling the movement of the processing device in the processing coordinate system, The processing control device comprises: a second computing unit, which converts a measurement position in the machining coordinate system used for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information; as well as The second sending unit sends seventh position information to the measurement control device, wherein the seventh information indicates the measurement position in the measurement coordinate system obtained by the conversion.

58. The processing system of claim 57, wherein: The first computing unit computes second conversion information based on fourth position information and fifth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point of the machining device is located at a predetermined position, the fifth position information indicating the position of the tool center point corresponding to the predetermined position, and the second conversion information being used to convert the position of the second member and the position of the tool center point. The first transmitting unit transmits, in addition to the first conversion information, the second conversion information and eighth position information to the processing control device, the eighth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the tool center point is located at a position different from the predetermined position, Based on the second conversion information, the processing control device converts the position of the second component represented by the eighth position information into the position of the tool center point, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

59. The processing system of claim 57, wherein: The first computing unit computes second conversion information based on fourth position information, the fourth position information indicating the position of the second member measured by the measuring device based on the measuring light irradiated to the second member when the tool center point of the machining device is located at a predetermined position, the second conversion information being used to convert the position of the second member and the position of the tool center point, and based on the second conversion information, converting the position of the second member measured by the measuring device based on the measuring light irradiated to the second member when the tool center point is located at a position different from the predetermined position into the position of the tool center point. In addition to the first conversion information, the first sending unit also sends ninth position information to the processing control device, wherein the ninth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on the position of the tool center point indicated by the ninth position information to move the tool center point.

60. The processing system of claim 57, wherein: The machining system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the machining device. The first calculation unit calculates second conversion information based on the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member in a state where the third measuring device has measured the position of the tool center point, and the position of the tool center point measured by the third measuring device, the second conversion information being used to convert the position of the second member and the position of the tool center point. The first transmitting unit transmits, in addition to the first conversion information, the second conversion information and eighth position information to the processing control device, the eighth position information indicating the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member when the third measuring device has not yet measured the position of the tool center point. Based on the second conversion information, the processing control device converts the position of the second component represented by the eighth position information into the position of the tool center point, and controls the movement of the movable part based on the position of the tool center point obtained by the conversion to move the position of the tool center point.

61. The processing system of claim 57, wherein: The machining system includes a first measuring device and a third measuring device as the measuring device, wherein the third measuring device is capable of measuring the position of the tool center point of the machining device. The first computing unit calculates the position of the second member based on the measurement light irradiated on the second member by the first measuring device in a state where the tool center point has been measured by the third measuring device, and the tool center point measured by the third measuring device. converting the position of the second member measured by the first measuring device based on the measurement light irradiated on the second member when the third measuring device has not yet measured the tool center point into the position of the tool center point, In addition to the first conversion information, the first sending unit also sends ninth position information to the processing control device, wherein the ninth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on the ninth position information to move the tool center point.

62. The processing system of claim 57, wherein: The measuring device further irradiates the measuring light to a reference member that moves together with the movable part to measure the position of the reference member, thereby being able to measure the position of a tool center point of the processing device that moves together with the movable part. The first computing unit computes second conversion information for converting the position of the second member with respect to the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated on the reference member and the second member respectively in a state where the positional relationship between the reference member and the second member is a predetermined relationship, and the position of the second member. The first sending unit sends, in addition to the first conversion information, the second conversion information and eighth position information to the processing control device, wherein the eighth position information indicates the position of the second member measured by the measuring device based on the measuring light irradiated on the second member when the positional relationship is different from the prescribed relationship. Based on the second conversion information, the processing control device converts the position of the second component represented by the eighth position information into the position of the tool center point, and controls the processing device based on the position of the tool center point obtained by the conversion to control the movement of the movable part to move the position of the tool center point.

63. The processing system of claim 57, wherein: The measuring device further irradiates the measuring light to a reference member that moves together with the movable part to measure the position of the reference member, thereby being able to measure the position of the tool center point of the processing device that moves together with the movable part. the first computing unit converts the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when the positional relationship is different from the prescribed relationship into the position of the tool center point based on the position of the tool center point measured by the measuring device based on the measurement light irradiated onto each of the reference member and the second member when the positional relationship between the reference member and the second member is a prescribed relationship and the position of the second member, In addition to the first conversion information, the first sending unit also sends ninth position information to the processing control device, wherein the ninth position information indicates the position of the tool center point obtained by the conversion. The processing control device controls the movement of the movable portion based on the ninth position information to move the position of the tool center point.

64. A measurement system comprising: a measuring device capable of measuring the first measuring member and the second measuring member mounted on the processing device; as well as A measurement control device controls the measurement device, in which the measurement system The measurement control device comprises: a calculation unit that converts the position of the second measuring member measured by the measuring device based on the position of the first measuring member measured by the measuring device; as well as The transmitting unit can transmit the position information indicating the position of the second measuring member obtained by the conversion to a processing control device that controls the processing device.

65. A measurement system comprising: a measuring device capable of measuring the first measuring member and the second measuring member mounted on the processing device; as well as A measurement control device controls the measurement device, in which the measurement system The measurement control device comprises: a calculation unit that calculates conversion information based on the position of the first measuring member measured by the measuring device, the conversion information being used to convert the position of the second measuring member measured by the measuring device; as well as The sending unit can send the conversion information to a processing control device that controls the processing device.

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