Manipulator for automatically replacing sample in ultrahigh vacuum environment

Abstract

The invention provides a manipulator for automatically replacing samples in an ultrahigh vacuum environment. The manipulator comprises a movable platform, a movable platform adapter plate, a first rotating joint, a first connecting plate, a second rotating joint, a second connecting plate, a third rotating joint, a tail end connecting plate and a tail end actuator which are connected in sequence, the connecting plates are respectively connected with output shafts of the corresponding rotary joints through bearing assemblies, fixed circular gratings are arranged on the connecting plates, and encoder reading heads are arranged at the fixed ends of the corresponding rotary joints; the end effector comprises a three-dimensional force sensor connected with the end connecting plate and a gripper connected with the three-dimensional force sensor. According to the automatic sample replacing manipulator, through the integrated structural design of the joints, the connecting plate, the bearing, the circular grating and the end effector, manual operation is replaced, precise actions such as detection, grabbing, installation and replacement of a sample target are executed, and the automatic sample replacing manipulator is suitable for narrow working space limitation and complex obstacle environments.

Description

Technical Field

[0001] The invention belongs to the field of vacuum equipment, and in particular relates to a manipulator for automatically replacing samples. Background Art

[0002] With the rapid development of scientific research experimental platforms and large scientific facilities, the large-scale demand for intelligent experimental operations has made collaborative robots not only play an important role in industrial production applications, but also have urgent needs in scientific equipment applications. Therefore, it is very important and necessary to develop automated detection or operation robots for specific scientific experimental environments. Humans have the characteristics of high dexterity, strong adaptability, and outstanding adaptability to problems, while traditional robots have the characteristics of long-lasting endurance, precise operation, and adaptability to a variety of extreme conditions. Combining the capabilities of humans and traditional robots, the dexterous super-redundant articulated robots developed and produced have been widely used in industrial assembly, medical fields, and even service industries. In response to the special environmental requirements in scientific experimental operations, such as ultra-high vacuum, low temperature, and workspace restriction environments, collaborative robots with modular joint design have gradually been used because of their good force control and ability to cross complex obstacle environments.

[0003] At present, no serial manipulator suitable for use in ultra-high vacuum environments has been found. Specifically, compared with normal conditions (normal temperature and pressure), when working in an ultra-high vacuum environment, the manipulator has difficulties in lubrication, heat dissipation, and volatilization, and needs to achieve precise control in a small and complex environment. Therefore, it is imperative to realize an automatic sample replacement manipulator to solve extreme application environments and complex environment applications. Summary of the invention

[0004] The purpose of the present invention is to provide a robot for automatically replacing samples in an ultra-high vacuum environment, so as to automatically replace samples in an ultra-high vacuum environment, replace manual operations, and perform precision actions such as detection, grasping, installation, and replacement of sample targets. At the same time, it can also be applicable to narrow working space restrictions and complex obstacle environments.

[0005] In order to achieve the above-mentioned objectives, the present invention provides a manipulator for automatically changing samples in an ultra-high vacuum environment, which includes a movable platform, a mobile platform adapter plate, a first rotary joint, a first connecting plate, a second rotary joint, a second connecting plate, a third rotary joint, an end connecting plate and an end actuator connected in sequence; the displacement direction of the movable platform and the rotation axes of the first rotary joint, the second rotary joint and the third rotary joint are all vertical; the first connecting plate, the second connecting plate and the end connecting plate are respectively connected to the output shafts of the corresponding first rotary joint, the second rotary joint and the third rotary joint through bearing assemblies, and the first connecting plate, the second connecting plate and the end connecting plate are all provided with fixed circular gratings, and encoder reading heads are provided on the fixed ends of the corresponding first rotary joint, the second rotary joint and the third rotary joint; the end actuator includes a three-dimensional force sensor connected to the end connecting plate and a gripper connected to the three-dimensional force sensor.

[0006] The output shafts of the first rotary joint, the second rotary joint and the third rotary joint are all plated with molybdenum disulfide, and the bearings of the bearing assembly are ceramic balls.

[0007] The shaft ends of the first connecting plate, the second connecting plate and the terminal connecting plate are respectively fixedly connected to the output shafts of the corresponding first rotating joint, the second rotating joint and the third rotating joint through the expansion sleeve and the expansion sleeve mounting hole.

[0008] A vernier stopper is installed inside the movable platform and travel switches are installed at both ends, and one of the two travel switches is a zero position travel switch.

[0009] The robot arm for automatically changing samples in an ultra-high vacuum environment also includes cables, which include motor cables of a mobile platform adapter plate, a first rotary joint, a second rotary joint, and a third rotary joint, and a cable of a zero-position travel switch. The cables are uniformly configured with polyimide and wire materials and are fixed with wire clips and clamps.

[0010] The movable platform includes a movable part and a fixed part fixed relative to the manipulator base. The movable part moves in an up-and-down direction relative to the fixed part. The interface is used to fix the manipulator base to the through-bin flange end of the vacuum chamber and serves as an interface for outward heat conduction.

[0011] The distance between the first rotary joint and the manipulator base is 90 mm, the distance between the second rotary joint and the first rotary joint is 80 mm, the distance between the third rotary joint and the second rotary joint is 100 mm, the distance between the three-dimensional force sensor and the third rotary joint is 30 mm, and the distance between the gripper and the three-dimensional force sensor is 30 mm.

[0012] The three-dimensional force sensor is fixedly connected to the third rotation joint through a terminal connecting plate, and the gripper is connected to the three-dimensional force sensor through bolts.

[0013] A first expansion sleeve mounting hole, a first mechanical limit pin, a first mechanical limit groove, a first joint positioning boss and a first mounting threaded hole are provided between the first connecting plate and the bearing assembly of the first rotating joint; a second expansion sleeve mounting hole, a second mechanical limit pin, a second mechanical limit groove, a second joint positioning boss and a second mounting threaded hole are provided between the second connecting plate and the bearing assembly of the second rotating joint.

[0014] The robot for automatically changing samples in an ultra-high vacuum environment also includes a control system, which includes a main control computer, which is communicatively connected to an embedded controller, and the embedded controller is communicatively connected to the three-dimensional force sensor of the robot and the motor of the rotating joint.

[0015] The automatic sample replacement manipulator of the present invention can realize automatic sample replacement in an ultra-high vacuum environment through the integrated structural design of joints, connecting plates, bearings, circular gratings and end effectors, replacing manual operations to perform precision actions such as detection, grasping, installation and replacement of sample targets; in addition, the rotating joints and the mobile platform constitute the motion mechanism of the automatic sample replacement manipulator, and a four-degree-of-freedom manipulator design is adopted to consider the working space requirements of the manipulator, improve the positioning accuracy of the manipulator, and reduce the complexity of the manipulator as much as possible. After reasonable path planning, three rotations and one vertical direction can be moved with high positioning accuracy; the modular design of the articulated manipulator is adopted, which has a compact structure, small size and light weight. At the same time, the configuration design adopts a multi-degree-of-freedom design, and the control system adopts force and position hybrid control to achieve safe operation in complex environments. Therefore, it is suitable for narrow working space restrictions and complex obstacle environments.

[0016] Specifically, the present invention adopts an integrated structural design of joints, connecting plates, bearings, circular gratings and end effectors, wherein the connecting plates and the output shafts of the joints are connected through bearings, the encoder reading head is fixed to the fixed end of the joint, and the circular gratings are fixed to the arm, thereby realizing closed-loop control of the joints. In addition, in order to solve the vacuum lubrication problem, the output shaft of the rotary joint is treated with molybdenum disulfide coating, and the bearings are ceramic balls; in addition, an interface is provided on the manipulator base, which is used to realize the fixation of the manipulator base and the through-bin flange end of the vacuum chamber, thereby exporting heat through thermal control design and implementation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of a manipulator for automatically replacing samples in an ultra-high vacuum environment according to an embodiment of the present invention.

[0018] Figure 2It is a simplified diagram of the structural components of a manipulator for automatically replacing samples in an ultra-high vacuum environment according to an embodiment of the present invention.

[0019] Figure 3 It is a schematic structural diagram of three rotating joints of a manipulator for automatically replacing samples in an ultra-high vacuum environment according to an embodiment of the present invention.

[0020] Figure 4A-4C It is a structural schematic diagram of a first connecting plate between a first rotary joint and a second rotary joint.

[0021] Figure 5A-5C It is a structural schematic diagram of the second connecting plate between the second rotation joint and the third rotation joint.

[0022] Figure 6 is a schematic diagram of the structure of the end effector, which shows the three-dimensional force sensor and the gripper.

[0023] Figure 7 It is a schematic diagram of the installation position of the end effector.

[0024] Figure 8 It is a structural block diagram of a control system of a manipulator for automatically replacing samples in an ultra-high vacuum environment of the present invention.

[0025] Fig. 9 It is a data flow diagram of a control system of a manipulator for automatically replacing samples in an ultra-high vacuum environment of the present invention. DETAILED DESCRIPTION

[0026] The embodiments of the present invention are given below and described in detail.

[0027] like Figure 1 and Figure 2 The figure shows a manipulator for automatically changing samples in an ultra-high vacuum environment according to an embodiment of the present invention. Figure 1 As shown, the robot for automatically changing samples in an ultra-high vacuum environment is used inside an ultra-high vacuum chamber, and includes a movable platform 10, a mobile platform adapter plate 20, a first rotating joint 30, a first connecting plate 40, a second rotating joint 50, a second connecting plate 60, a third rotating joint 70, an end connecting plate 80 and an end actuator 90 connected in sequence.

[0028] In this embodiment, the mobile platform adapter plate 20 is an L-shaped adapter plate.

[0029] The movable platform 10 includes a movable part 11 and a fixed part 13 fixed relative to the manipulator base 12. The movable part 11 moves in an up-down direction relative to the fixed part 13. The movable platform 10 is fixedly installed to a fixed position in the vacuum environment through the manipulator base 12. Specifically, the manipulator base 12 is provided with an interface (not shown), which is used to realize the fixation of the manipulator base 12 and the through-bin flange end of the vacuum chamber and serves as an interface for heat conduction to the outside.

[0030] The movable platform 10 is internally installed with a vernier stopper (not shown) and travel switches 14 are installed at both ends. The function of the travel switch 14 is to play the role of electrical limit protection. The vernier stopper is a hard limiter, which protects the motor from stopping the movement without damage when it moves to this position, further ensuring the safety of the equipment. One of the two travel switches 14 is a zero-position travel switch, which is mainly used as a motion zeroing function. Therefore, when the movable platform 10 moves to the travel limit corresponding to the vernier stopper and the movable platform 10 moves to the travel limit corresponding to the travel switch, it can be guaranteed to stop the movement without damage, so as to ensure the control accuracy and safety of the movement of the mobile platform. In this embodiment, the movable platform 10 adopts a vacuum electric translation stage with a model of LTXH25-LS. In this embodiment, the travel switch 14 is installed on the manipulator base 12 of the movable platform 10.

[0031] The end effector 90 is used to achieve precise operations of grabbing and placing samples. Figure 1 , Figure 6 and Figure 7 As shown, in this embodiment, the end effector 90 includes a three-dimensional force sensor 91 connected to the end connecting plate 80 and a gripper 92 connected to the three-dimensional force sensor 91; the three-dimensional force sensor 91 can sense the force received by the gripper 92 at the end, and the gripper 92 can be used to grasp the sample, and the two together realize the grasping of the sample and the force feedback control during the process.

[0032] The three-dimensional force sensor 91 is fixedly connected to the third rotary joint 70 through the terminal connecting plate 80, the gripper 92 is connected to the three-dimensional force sensor 91 through bolts, and the three-dimensional force sensor 91 is installed on the terminal connecting plate 80 through four bolt holes. In this embodiment, the terminal connecting plate 80 is preferably an L-shaped adapter plate.

[0033] The output shaft of the third rotary joint 70 (i.e., the output shaft of the reducer) and the terminal connecting plate 80 are connected to each other by tightening the expansion sleeve, so that the terminal connecting plate 80 rotates together with the output shaft of the third rotary joint 70. Specifically, by tightening the locking bolt, the inner sleeve and the outer sleeve of the expansion sleeve are crimped, so that the inner sleeve of the expansion sleeve and the output shaft of the third rotary joint 70 (i.e., the output shaft of the reducer) are tightly pressed, and the outer sleeve of the expansion sleeve and the hole on the terminal connecting plate 80 are tightly pressed, which plays the role of connecting the output shaft of the third rotary joint 70 and the terminal connecting plate 80. When tightening the locking bolt, the terminal connecting plate 80 will not produce axial movement with the third rotary joint 70, and there is no backlash, which is convenient for installation and disassembly, and has high reliability.

[0034] like Figure 2 As shown, the distance between the first rotary joint 30 and the manipulator base 12 is 90 mm, the distance between the second rotary joint 50 and the first rotary joint 30 is 80 mm, the distance between the third rotary joint 70 and the second rotary joint 50 is 100 mm, the distance between the three-dimensional force sensor 91 and the third rotary joint 70 is 30 mm, and the distance between the gripper 92 and the three-dimensional force sensor 91 is 30 mm.

[0035] The displacement direction of the movable platform and the rotation axes of the first rotary joint, the second rotary joint and the third rotary joint are all vertical. Therefore, the three rotary joints and the mobile platform constitute the motion mechanism of the automatic sample replacement manipulator. A four-degree-of-freedom manipulator design is adopted to consider the working space requirements of the manipulator, improve the positioning accuracy of the manipulator, and reduce the complexity of the manipulator as much as possible. After reasonable path planning, high positioning accuracy movement in three rotational directions and one vertical direction can be achieved. Therefore, it is suitable for narrow working space restrictions and complex obstacle environments; the end mechanical gripper and the three-dimensional force measurement sensor constitute the end actuator to realize the grasping of the sample and force feedback control during the process.

[0036] like Figure 3 As shown, the main structures of the three rotary joints are all directly connected to the motor and the reducer. The output shafts of the first rotary joint 30, the second rotary joint 50 and the third rotary joint 70 are all connected to the stepper motor through the reducer, and these output shafts are respectively connected to the corresponding first connecting plate 40, the second connecting plate 60 and the end connecting plate 80; therefore, the stepper motor is used as power input, and the torque is amplified through the reducer, and finally the power output of the rotary joint output shaft is realized; the first rotary joint 30, the second rotary joint 50 and the third rotary joint 70 are fixed ends of the rotary joint except that the rotary joint output shaft can rotate.

[0037] The first connecting plate 40 and the second connecting plate 60 are used to realize the connection of each joint, and the length of each arm is designed according to the accessibility of the manipulator operation to meet the kinematic requirements of the manipulator. The first connecting plate 40, the second connecting plate 60, and the end connecting plate 80 are connected to the output shafts of the corresponding first rotating joint 30, the second rotating joint 50, and the third rotating joint 70 through the bearing assembly. Specifically, the connection plate and the output shaft of the corresponding rotating joint are supported and the power is transmitted through the bearing assembly, wherein the bearing seat of the bearing assembly is fixedly connected to the joint housing, and the bearing inner ring of the bearing assembly is fixed to the shaft end of the connecting plate. The shaft ends of the first connecting plate 40, the second connecting plate 60, and the end connecting plate 80 are fixedly connected to the output shafts of the corresponding first rotating joint 30, the second rotating joint 50, and the third rotating joint 70 through the expansion sleeve and the expansion sleeve mounting hole, so that the connection plate is driven to rotate by the rotation of the output shaft of the rotating joint. In order to solve the vacuum lubrication problem, the output shafts of the first rotating joint 30, the second rotating joint 50, and the third rotating joint 70 are all treated with molybdenum disulfide plating, and the bearings of the bearing assembly are ceramic balls.

[0038] In addition, the first connecting plate 40 and the second connecting plate 60 are both provided with fixed circular gratings, and the corresponding fixed ends of the rotating joints are provided with encoder reading heads. The rotating joints can output absolute position feedback through the circular gratings and the reading heads, thereby realizing closed-loop control of the joints.

[0039] like Figure 4A-4C As shown, the first rotary joint 30 and the second rotary joint 50 are interconnected through the first connecting plate 40, and a first expansion sleeve mounting hole 41, a first mechanical stop pin (not shown), a first mechanical stop groove 43, a first joint positioning boss 44 and a first mounting threaded hole 45 are provided between the first connecting plate 40 and the bearing assembly of the first rotary joint 30, wherein the first expansion sleeve mounting hole 41, the first mechanical stop groove 43, the first joint positioning boss 44 and the first mounting threaded hole 45 are provided on the first connecting plate 40, and the first mechanical stop pin is installed on the bearing seat of the bearing assembly of the first rotary joint 30. The function of the first mechanical stop groove 43 is that it can be used in combination with the first mechanical stop pin to play a protective role of mechanical stop within the effective range of motion; the function of the first joint positioning boss 44 is to play a role in accurately positioning and fixing the second rotary joint 50.

[0040] like Figure 5A-5CAs shown, the second rotary joint 50 and the third rotary joint 70 are interconnected through the second connecting plate 60, and a second expansion sleeve mounting hole 61, a second mechanical stop pin 62, a second mechanical stop groove 63, a second joint positioning boss 64, and a second mounting threaded hole 65 are provided between the second connecting plate 60 and the bearing assembly of the second rotary joint 50, wherein the second expansion sleeve mounting hole 61, the second mechanical stop groove 63, the second joint positioning boss 64, and the second mounting threaded hole 65 are provided on the second connecting plate 60, and the second mechanical stop pin 62 is installed on the bearing seat of the bearing assembly of the second rotary joint 50. The function of the second mechanical stop groove 63 is to be used in combination with the second mechanical stop pin 62, and can play a protective role of mechanical stop within the effective range of motion; the function of the second joint positioning boss 64 is to play a role in accurately positioning and fixing the second rotary joint 50.

[0041] In order to prevent the robot from having control failure, resulting in excessive movement and collision with vacuum internal components, causing damage, a safety protection device is designed for the robot, using the mechanical limit structure (including mechanical limit pins and mechanical limit grooves) with high reliability as described above.

[0042] The automatic sample replacement manipulator of the present invention also includes cables, which include motor cables of the mobile platform adapter plate 20, the first rotary joint 30, the second rotary joint 50, the third rotary joint 70, and the cable of the zero-position travel switch. The zero-position travel switch is one of the two travel limit switches 14 mentioned above, and is mainly used as a motion zeroing function. The cables are uniformly configured with polyimide and wire materials and are fixed with wire clips and clamps. Both the wire clips and the clamps have a certain elastic range, which can ensure the stability of cable fixation and can be applied to ultra-high vacuum and high temperature environments.

[0043] The automatic sample replacement manipulator of the present invention can complete the grabbing, moving and installation of samples in an ultra-high vacuum environment through the control of a human-machine interactive control system. The control system can complete the conversion of various working modes, plan the end motion trajectory and set the parameters of each joint, monitor the operating position of each joint of the manipulator and the end stress state in real time, and also has a complete fault alarm function and emergency stop, reset and other functions.

[0044] There are three main working modes of the control system: 1) Continuous operation mode: the automatic sample replacement manipulator of the present invention continuously moves the sample from the sample delivery rod to the transfer table according to the preset trajectory and operation command set, and then moves the sample from the transfer table to the nano mobile table, waits for the nano mobile table to complete the test action, and then moves the sample from the nano mobile table to the transfer table, and finally moves the sample from the transfer table to the sample delivery rod; 2) Segmented operation mode: the automatic sample replacement manipulator of the present invention divides the entire test process into several stages, including a) moving the sample from the sample delivery rod to the transfer table; b) moving the sample from the transfer table to the nano mobile table; c) moving the sample from the nano mobile table to the transfer table; d) moving the sample from the transfer table to the sample delivery rod. 3) One-key return to zero mode: No matter which stage of the test process the automatic sample replacement manipulator of the present invention is in, the manipulator can be stopped urgently and then returned to the preset zero position.

[0045] In addition, the configurable joint parameters include: joint movement speed, joint thermal protection threshold, etc.

[0001] like Figure 8 and Fig. 9 As shown, the control system includes a console 101, wherein the console 101 includes an electrical unit 1011 and a main control computer 1012, and the main control computer 1012 is communicatively connected to an embedded controller 102. The embedded controller 102 is communicatively connected to a three-dimensional force sensor of the manipulator and a motor of a rotary joint.

[0046] Among them, the main control computer 1012 (ie, the host computer system installed thereon) and the embedded controller 102 (ie, the software thereon) are the core parts of the human-computer interaction.

[0047] The main control computer 1012 has the functions of parameter input and device parameter status display, user interface control parameters and command transmission, data acquisition, etc., so as to facilitate operator operation by providing a good human-computer interaction interface and rich interfaces, and display the manipulator information in real time, so as to facilitate real-time monitoring of the manipulator status. Specifically, the main control computer 1012 sends target motion related data and system commands to the controller, such as target position and posture, setting motion speed and acceleration, etc., as well as commands such as enable, run, register read and write, joint angle acquisition switch, etc.; it uses CSS software to design the control interface to realize the control of the embedded controller 102, and then realizes the control of the three-dimensional force sensor 91, the kinematic control of each rotating joint, and the dynamic control through the embedded controller 102. The control interface designed by CSS software can control the multi-dimensional motion of the manipulator, set the various motion parameters of the manipulator, and other functions required for the experiment.

[0048] The embedded controller 102 (covering the three-dimensional force sensor 91 and each rotating joint) is configured to receive and process control instructions from the main control computer 1012, sensor data from the three-dimensional force sensor, and the actual joint angle current register value from the joint motor driver, and send the current state of the joint angle to the main control computer 1012, send the target joint angle to-be-written register value to the joint motor driver, and forward control instructions to the sensor. The embedded controller 102 can provide a variety of working modes to achieve precise and flexible control of the manipulator, so that it has the ability to complete complex tasks such as obstacle avoidance and assembly. The instructions of the embedded controller 102 can be called by the main control computer 1012 and provide technical support.

[0049] like Fig. 9 As shown, the embedded controller 102 includes four modules: 1) Data communication module: used for communication between the embedded controller and the joint controller, between the embedded controller and the main control computer, and between the embedded controller and the force sensor; 2) Path planning module: According to the given speed, acceleration and jerk values, the T-type velocity array of the manipulator from the starting position to the middle position is planned. The trajectory planning includes acceleration and deceleration processes. After reaching the maximum speed, it travels at a constant speed at the maximum speed. Finally, the velocity array is interpolated into a position array to control the movement of the manipulator; 3) Manipulator kinematics forward and inverse solution module: including algorithm implementations such as manipulator kinematics forward solution and manipulator kinematics inverse solution; 4) Manipulator motion control module: receives control instructions from the main control computer, and controls the movement of each joint of the manipulator according to the instructions. Finally, the manipulator realizes the automatic grasping, moving and installing sample functions in an ultra-high vacuum environment through the combination of software and hardware design.

[0050] See also Figure 8 The electrical unit 1011 includes a power supply and distribution physical button interface, an emergency stop and reset button interface, a power management system and a status light control module. The power supply and distribution physical button interface is responsible for the power on and off functions of the manipulator, the emergency stop and reset button interface is responsible for the emergency braking of the manipulator in an emergency situation and the reset function after troubleshooting, and the control of the status light includes three states: idle, working and fault.

[0051] In summary, the automatic sample replacement manipulator of the present invention can realize automatic sample replacement in an ultra-high vacuum environment through the integrated structural design of joints, connecting plates, bearings, circular gratings and end effectors, replacing manual operations to perform precision actions such as detection, grasping, installation, and replacement of sample targets; in addition, the rotating joints and the mobile platform constitute the motion mechanism of the automatic sample replacement manipulator, and a four-degree-of-freedom manipulator design is adopted to take into account the working space requirements of the manipulator, improve the positioning accuracy of the manipulator, and reduce the complexity of the manipulator as much as possible. After reasonable path planning, three rotations and one vertical direction can be moved with high positioning accuracy, so it is suitable for narrow working space restrictions and complex obstacle environments.

[0052] Specifically, the present invention adopts an integrated structural design of joints, connecting plates, bearings, circular gratings and end effectors, wherein the connecting plates and the output shafts of the joints are connected through bearings, the encoder reading head is fixed to the fixed end of the joint, and the circular gratings are fixed to the arm, thereby realizing closed-loop control of the joints. In addition, in order to solve the vacuum lubrication problem, the output shaft of the rotary joint is treated with molybdenum disulfide coating, and the bearings are ceramic balls; in addition, an interface is provided on the manipulator base, which is used to realize the fixation of the manipulator base and the through-bin flange end of the vacuum chamber, thereby exporting heat through thermal control design and implementation.

[0053] The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The above embodiments of the present invention can also be modified in various ways. All simple, equivalent changes and modifications made according to the claims and the description of the present invention fall within the scope of protection of the claims of the present invention. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. A manipulator for automatically changing samples in an ultra-high vacuum environment, characterized in that: It includes a movable platform, a mobile platform adapter plate, a first rotary joint, a first connecting plate, a second rotary joint, a second connecting plate, a third rotary joint, an end connecting plate and an end effector which are connected in sequence; The displacement direction of the movable platform and the rotation axes of the first rotary joint, the second rotary joint and the third rotary joint are all vertical; the first connecting plate, the second connecting plate and the end connecting plate are respectively connected to the output shafts of the first rotary joint, the second rotary joint and the third rotary joint corresponding thereto through bearing assemblies, the first connecting plate, the second connecting plate and the end connecting plate are all provided with fixed circular gratings, and the corresponding fixed ends of the first rotary joint, the second rotary joint and the third rotary joint are provided with encoder reading heads; the end actuator includes a three-dimensional force sensor connected to the end connecting plate and a gripper connected to the three-dimensional force sensor.

2. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: The output shafts of the first rotary joint, the second rotary joint and the third rotary joint are all plated with molybdenum disulfide, and the bearings of the bearing assembly are ceramic balls.

3. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: The shaft ends of the first connecting plate, the second connecting plate and the terminal connecting plate are respectively fixedly connected to the output shafts of the corresponding first rotating joint, the second rotating joint and the third rotating joint through the expansion sleeve and the expansion sleeve mounting hole.

4. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: A vernier stopper is installed inside the movable platform and travel switches are installed at both ends, and one of the two travel switches is a zero position travel switch.

5. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 4, characterized in that: It also includes cables, which include motor cables of the mobile platform adapter plate, the first rotary joint, the second rotary joint, the third rotary joint, and the cable of the zero-position travel switch. The cables are uniformly configured with polyimide and wire materials and are fixed with wire clips and clamps.

6. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: The movable platform includes a movable part and a fixed part fixed relative to the manipulator base. The movable part moves in an up and down direction relative to the fixed part. The manipulator base is provided with an interface, which is used to fix the manipulator base to the through-bin flange end of the vacuum chamber and serve as an interface for outward heat conduction.

7. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 6, characterized in that: The distance between the first rotary joint and the manipulator base is 90 mm, the distance between the second rotary joint and the first rotary joint is 80 mm, the distance between the third rotary joint and the second rotary joint is 100 mm, the distance between the three-dimensional force sensor and the third rotary joint is 30 mm, and the distance between the gripper and the three-dimensional force sensor is 30 mm.

8. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: The three-dimensional force sensor is fixedly connected to the third rotation joint through a terminal connecting plate, and the gripper is connected to the three-dimensional force sensor through bolts.

9. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: A first expansion sleeve mounting hole, a first mechanical limit pin, a first mechanical limit groove, a first joint positioning boss and a first mounting threaded hole are provided between the first connecting plate and the bearing assembly of the first rotating joint; A second expansion sleeve mounting hole, a second mechanical limiting pin, a second mechanical limiting groove, a second joint positioning boss and a second mounting threaded hole are provided between the second connecting plate and the bearing assembly of the second rotating joint.

10. The robot for automatically changing samples in an ultra-high vacuum environment according to claim 1, characterized in that: It also includes a control system, which includes a main control computer, which is communicatively connected to an embedded controller, and the embedded controller is communicatively connected to a three-dimensional force sensor of the manipulator and a motor of a rotary joint.

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