Measuring head

Abstract

The embodiment of the invention provides a measuring head, which comprises a main body, the main body comprises at least one spring parallelogram assembly formed by a plurality of main components, a leaf spring used for enabling the spring parallelogram assembly to elastically move along a limited direction is arranged between the adjacent main components, and the leaf spring is arranged between the adjacent main components. A connecting piece which is arranged in the limiting direction and connects the adjacent main components is further arranged between the adjacent main components, through the arrangement, the displacement sensor and the actuating device can respond faster, meanwhile, the springback effect of the leaf spring in the shape recovery process can be restrained, and the stability of the leaf spring is improved. Particularly, the springback effect in the rapid movement process can be restrained, the shape of the leaf spring can be recovered more rapidly, the spring parallelogram assembly has better stress conditions, and the movement stability is improved.

Description

Technical Field

[0001] The invention relates to a probe, in particular to a probe applied to a three-coordinate measuring machine. Background Art

[0002] The three-dimensional coordinate measuring machine is an instrument that can measure geometric shapes, lengths, and circular divisions within the space of a hexahedron. Its measurement functions include dimensional accuracy, positioning accuracy, geometric accuracy, and contour accuracy. It is widely used in molds, aviation, automobiles, electronics and other industries.

[0003] Usually, a three-dimensional coordinate measuring machine needs to be equipped with a probe so that a trigger signal can be accurately given through the probe. In order to achieve higher precision, such as 1 micron or higher precision measurement, the current probe usually adopts a component called a spring parallelogram structure as shown in documents such as US3869799A and JP3857334B2. These spring parallelogram structures include a pair of relatively arranged structural plates, a connecting plate arranged between the pair of structural plates, and a leaf spring arranged between adjacent structural plates and the connecting plate. Through this structure, the pair of structural plates are limited to elastic movement only in a single direction. At the same time, a position detection element and an actuating unit are arranged between the spring parallelogram structures to realize position detection and zero return in a single direction. High-precision detection is achieved through the above structure.

[0004] However, in further research, it was found that the existing spring parallelogram structure cannot meet the requirements for high-speed detection processes with higher precision requirements, such as high-speed contour scanning or high-speed multi-point detection at a detection accuracy of 0.7μm or higher. At the same time, the structural layout of the existing probe requires a larger space, especially with a relatively long length, which makes the inertia during the measurement movement larger, and the structure needs to be further optimized. Therefore, a new technical solution is needed to solve the above technical problems. Summary of the invention

[0005] To this end, the present invention provides a probe to solve the above technical problems.

[0006] A probe comprises a main body, wherein the main body comprises at least one spring parallelogram assembly formed by a plurality of main components, wherein adjacent main components comprise leaf springs for enabling the spring parallelogram assembly to elastically move along a defined direction, and adjacent main components comprise connecting sheets arranged along the defined direction and connecting the adjacent main components.

[0007] Wherein, the connecting piece is the same as the leaf spring.

[0008] Wherein, the leaf spring includes a first base surface, the connecting plate includes a second base surface, the leaf spring includes a first connecting area located between two adjacent main components, the connecting plate includes a second connecting area located between two adjacent main components, the lengths of the first connecting area and the second connecting area are equal, and the projections of the first connecting area and the second connecting area on the plane perpendicular to the first base surface and the second base surface are in a crossed state.

[0009] Among them, the main body includes an X-axis spring parallelogram assembly, and the X-axis spring parallelogram assembly includes a lower structural plate, an X-axis left plate, a middle structural plate and an X-axis right plate. The lower structural plate includes a first end face, and the X-axis left plate includes a second end face. A first pad is also arranged on the outer side of the first end face, and the leaf spring is clamped by the first pad and the first end face, and a second pad is arranged on the outer side of the second end face, and the connecting plate is clamped by the second pad and the second end face.

[0010] Among them, a third pad is also included between the X-axis left plate and the leaf spring, and a fourth pad is also included between the lower structure plate and the connecting plate. The first pad, the second pad, the third pad and the fourth pad are the same.

[0011] Among them, the X-axis spring parallelogram component is limited to elastic movement along the X-axis direction, the main body also includes a Y-axis spring parallelogram component and a Z-axis spring parallelogram component, the Y-axis spring parallelogram component is limited to elastic movement along the Y-axis direction, the Z-axis spring parallelogram component is limited to elastic movement along the Z-axis direction, and the Z-axis spring parallelogram component includes a accommodating space, and the X-axis spring parallelogram component and the Y-axis spring parallelogram component are accommodated in the accommodating space.

[0012] Among them, the Y-axis spring parallelogram assembly includes a middle structural plate, a Y-axis left plate, an upper structural plate and a Y-axis right plate, and the main components of the Z-axis spring parallelogram assembly include a left structural plate, a Z-axis upper plate, a right structural plate and a Z-axis lower plate. The Z-axis upper plate is located on the upper side of the upper structural plate, the left structural plate is located on the left side of the X-axis left plate, the right structural plate is located on the right side of the X-axis right plate, and the Z-axis lower plate is located on the lower side of the lower structural plate. At the same time, the upper structural plate and the right structural plate are integrally formed.

[0013] Among them, an upper connecting plate perpendicular to the left structural plate is also arranged on the upper side of the left structural plate, and a Z-axis return to zero component is arranged between the upper connecting plate and the lower structural plate.

[0014] Wherein, the leaf springs and connecting sheets arranged on adjacent main components are arranged in pairs.

[0015] Wherein, the main body also includes a probe assembly, and the probe assembly is connected to the lower structure plate.

[0016] Beneficial effects: An embodiment of the present invention provides a probe, including a main body, wherein the main body includes at least one spring parallelogram assembly formed by a plurality of main components, and leaf springs for enabling the spring parallelogram assembly to elastically move along a limited direction are included between adjacent main components, and connecting pieces arranged along a limited direction and connecting the adjacent main components are included between adjacent main components. Through the above arrangement, the displacement sensor and the actuator device can respond faster, and at the same time, the rebound effect of the leaf spring in the process of restoring its shape can be suppressed, especially the rebound effect in the process of rapid movement can be suppressed, and the leaf spring can restore its shape faster and the spring parallelogram assembly has better force conditions, thereby improving movement stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A three-dimensional schematic diagram of a probe according to an embodiment of the present invention; Figure 2 for Figure 1 A simplified structural diagram of Figure 3 for Figure 2 Simplified schematic diagram of the parallelogram assembly of the X-axis spring; Figure 4 for Figure 1 Schematic diagram of the X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly; Figure 5 for Figure 4 The main view when the upper and middle structural plates are not displayed; Figure 6 for Figure 4 Left view when the upper middle structural plate is not displayed; Figure 7 for Figure 1 Schematic diagram of the Z-axis spring parallelogram assembly.

[0018] Component Description: Main body 100; X-axis spring parallelogram assembly 110; lower structural plate 111; lower support plate 1111; first end surface 1112; first cushion block 1113; third cushion block 1114; middle structural plate 112; middle support plate 1121; X-axis left plate 113; second end surface 1130; second cushion block 1131; fourth cushion block 1132; X-axis right plate 114; actuator 115; leaf spring 116; first connection area 1 160; connecting piece 117; second connecting area 1170; Y-axis spring parallelogram assembly 120; upper structural plate 122; Y-axis left plate 123; Y-axis right plate 124; Z-axis spring parallelogram assembly 130; accommodating space 1300; left structural plate 131; upper connecting plate 1311; right structural plate 132; Z-axis upper plate 133; Z-axis lower plate 134; Z-axis return to zero assembly 135; probe assembly 200. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and effect of the present application clearer and more specific, the following will describe the embodiments of the technical solution of the present application in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0020] Please refer to the attached Figure 1-7 An embodiment of the present invention provides a probe, the probe comprising a main body 100, the main body 100 comprising at least one spring parallelogram assembly formed by a plurality of main components.

[0021] The spring parallelogram assembly is configured to be elastically movable along a limited direction. The elastic activity refers to the activity that a part of the spring parallelogram assembly can be restored to its original state under the elastic action after the external force acts. In this embodiment, the main body 100 includes three spring parallelogram assemblies, and the three spring parallelogram assemblies are configured to be elastically movable along the mutually perpendicular X-axis, Y-axis and Z-axis directions. At the same time, the limited directions refer to the X-axis direction, the Y-axis direction and the Z-axis direction, respectively, wherein the X-axis direction is more specifically Figure 2 The left and right directions, the Y axis direction is Figure 2 The direction perpendicular to the paper surface, the Z axis direction is Figure 2 The up and down directions in .

[0022] For easier understanding, please refer to Figure 3 , the X-axis spring parallelogram assembly 110 configured to elastically move along the X-axis direction will be described first.

[0023] In this embodiment, the X-axis spring parallelogram assembly 110 includes four main components, and a leaf spring 116 is included between adjacent main components to enable the X-axis spring parallelogram assembly 110 to elastically move along the X-axis direction. Specifically, the four main components are a lower structure plate 111 and a middle structure plate 112 arranged at intervals in the vertical direction, and an X-axis left plate 113 and an X-axis right plate 114 located on the left and right sides of the lower structure plate 111 and the middle structure plate 112. The lower structure plate 111, the X-axis left plate 113, the middle structure plate 112, and the X-axis right plate 114 are surrounded to form a first space, and a displacement sensor and an actuating device are arranged in the first space. The arrangement 115 is configured such that the lower structure plate 111 and the X-axis left plate 113, the X-axis left plate 113 and the middle structure plate 112, the middle structure plate 112 and the X-axis right plate 114, and the X-axis right plate 114 and the lower structure plate 111 are arranged adjacent to each other, and a leaf spring 116 is arranged between the adjacent lower structure plate 111 and the X-axis left plate 113, the X-axis left plate 113 and the middle structure plate 112, the middle structure plate 112 and the X-axis right plate 114, and the X-axis right plate 114 and the lower structure plate 111. It can be understood that the leaf spring 116 is arranged vertically so that the X-axis spring parallelogram assembly 110 is limited to elastically move along the X-axis direction.

[0024] It can be understood that the probe also includes a probe assembly 200, and the probe assembly 200 includes at least one probe, which is used to touch the surface to be measured through the probe and cause the probe to be displaced so that the control system of the probe sends a signal. In this embodiment, the probe assembly 200 is connected to the lower structure plate 111, and when the probe touches the surface to be measured, the lower structure plate 111 produces a corresponding displacement.

[0025] It can be understood that in the present embodiment, the leaf spring 116 is in the shape of a thin sheet and includes a first base surface. The leaf spring 116 is configured to be elastically deformed in a direction perpendicular to the first base surface. The leaf spring 116 is vertically arranged, which means that the first base surface of the leaf spring 116 is in a vertical direction, so that the leaf spring 116 can be elastically deformed in the X-axis direction perpendicular to the first base surface, and by connecting the leaf springs 116 of the main components, the X-axis spring parallelogram assembly 110 is limited to elastic movement along the X-axis direction.

[0026] Meanwhile, it can be seen that the X-axis spring parallelogram assembly 110 is limited to elastic movement along the X-axis direction, which can be further clarified as elastic movement of the lower structure plate 111 relative to the middle structure plate 112 along the X-axis direction.

[0027] At the same time, a connecting piece 117 is also included between adjacent main components and is arranged along a limited direction and connects the adjacent main components. In the present embodiment, the connecting piece 117 is also in the shape of a thin sheet and includes connecting ends respectively connected to two adjacent main components. The connecting piece 117 includes a length direction along the two connecting ends. The arrangement along the limited direction refers to the length direction along the limited direction. Specifically, in the X-axis spring parallelogram assembly 110, the connecting piece 117 connecting the lower structure plate 111 and the X-axis left plate 113, the X-axis left plate 113 and the middle structure plate 112, the middle structure plate 112 and the X-axis right plate 114, and the X-axis right plate 114 and the lower structure plate 111 are all arranged along the X-axis direction.

[0028] Through the above arrangement, it can be seen that the following effects are formed in the X-axis spring parallelogram assembly 110 by the connecting piece 117: 1. When the lower structure plate 111 receives a force in the X-axis direction, the connecting piece 117 can apply a force in the X-axis direction to the X-axis left plate 113 and the X-axis right plate 114, so that the X-axis left plate 113 and the X-axis right plate 114 can move faster in the X-axis direction, and the X-axis left plate 113 and the X-axis right plate 114 maintain synchronization during the movement, so that the displacement sensor and the actuator 115 can respond faster.

[0029] Second, since the connecting piece 117 is actually arranged perpendicular to the leaf spring 116, during the parallel movement of the lower structural plate 111, since the X-axis left plate 113 and the X-axis right plate 114 are both rigid plates, when the leaf spring 116 is bent and elastically deformed, the connecting piece 117 also undergoes a slight elastic deformation in the direction perpendicular to the X-axis, that is, in this structure, there is an elastic force in the X-axis direction and in the direction perpendicular to the X-axis. During the deformation recovery process, the elastic force of the connecting piece 117 is perpendicular to the elastic force of the leaf spring 116, thereby suppressing the rebound effect of the leaf spring 116 during the shape recovery process, especially being able to suppress the rebound effect during rapid movement and enable the leaf spring 116 to recover its shape faster. In further research, the scanning speed is increased by 12% by arranging the connecting piece 117. In addition, at a detection accuracy of 0.7μm, the scanning speed of the arc contour is increased by 8.5%.

[0030] Third, the cross-shaped structure formed by the leaf spring 116 and the connecting piece 117 provides better stress-bearing conditions, thereby improving the stability of the movement of the lower structural plate 111 along the Y-axis or Z-axis direction by the probe.

[0031] Furthermore, the connecting piece 117 is the same as the leaf spring 116 , and the same refers to that the connecting piece 117 and the leaf spring 116 are of the same material, shape, and size.

[0032] Furthermore, the leaf spring 116 includes a first connection area 1160 located between two adjacent main components, and the connecting piece 117 includes a second connection area 1170 located between two adjacent main components. The lengths of the first connection area 1160 and the second connection area 1170 are equal.

[0033] Furthermore, the projections of the first connection area 1160 and the second connection area 1170 on a vertical plane perpendicular to the first base surface and the second base surface are in a crossed state.

[0034] Furthermore, the lower structural plate 111 includes a first end face 1112, and the leaf spring 116 is connected to the lower structural plate 111 in the form of a first base surface attached to the first end face 1112. In addition, the X-axis left plate 113 includes a second end face 1130, and the connecting plate 117 is connected to the X-axis left plate 113 in the form of a second base surface attached to the second end face 1130.

[0035] Furthermore, a first cushion block 1113 is provided on the outer side of the first end face 1112, and the leaf spring 116 is clamped between the first cushion block 1113 and the first end face 1112; a second cushion block 1131 is provided on the outer side of the second end face 1130, and the connecting piece 117 is clamped between the second cushion block 1131 and the second end face 1130.

[0036] Furthermore, a third pad 1114 is included between the X-axis left plate 113 and the leaf spring 116 , and a fourth pad 1132 is included between the lower structure plate 111 and the connecting plate 117 . The first pad 1113 , the second pad 1131 , the third pad 1114 and the fourth pad 1132 are the same.

[0037] That is, in the above setting, pads are respectively provided at both ends of the leaf spring 116, and the pads at both ends of the leaf spring 116 are respectively provided on one side of the first base surface and on the side opposite to the base surface, that is, its two ends are respectively in the form of being pressed by the pads and pressing the pads. At the same time, the connecting piece 117 also adopts the same setting form. Through the above setting form, the entire X-axis spring parallelogram assembly 110 remains stable during the deformation of the leaf spring 116 and the connecting piece 117, and the vibration effect can be reduced.

[0038] Furthermore, the leaf springs 116 and connecting pieces 117 provided on adjacent main components are provided in pairs. Figure 2There is a pair of leaf springs 116 connecting the lower structure plate 111 and the X-axis left plate 113 as shown in the figure. At the same time, there is also a pair of connecting plates 117 connecting the lower structure plate 111 and the X-axis left plate 113. The pair of leaf springs 116 and the pair of connecting plates 117 are arranged correspondingly. At the same time, the leaf springs 116 are located on the outside and the connecting plates 117 are located on the inside. The outside is a position away from the middle of the first space, and the inside is a position adjacent to the middle of the first space.

[0039] Furthermore, the lower structure plate 111 also includes a lower support plate 1111 extending from the lower structure plate 111 to the middle of the first space, and the middle structure plate 112 includes a middle support plate 1121 extending to the middle of the first space. The displacement sensor and the actuator 115 are arranged between the lower support plate 1111 and the middle support plate 1121. It can be understood that the displacement sensor can be a magnetic sensor, and the actuator 115 can be a voice coil motor.

[0040] The Y-axis spring parallelogram assembly 1120 is arranged on the upper side of the X-axis parallelogram assembly and is limited to elastic movement along the Y-axis direction. In this embodiment, the main components of the Y-axis spring parallelogram assembly 1120 include the middle structure plate 112, the Y-axis left plate 123, the upper structure plate 122 and the Y-axis right plate 124. Similarly, the middle structure plate 112 and the Y-axis left plate 123, the Y-axis left plate 123 and the upper structure plate 122, the upper structure plate 122 and the Y-axis Leaf springs 116 are arranged between the right plate 124 and the Y-axis right plate 124 and the middle structural plate 112. These leaf springs 116 are configured to be able to undergo elastic deformation along the Y-axis direction. At the same time, connecting pieces 117 are arranged between the middle structural plate 112 and the Y-axis left plate 123, the Y-axis left plate 123 and the upper structural plate 122, the upper structural plate 122 and the Y-axis right plate 124, and the Y-axis right plate 124 and the middle structural plate 112. The length direction of these connecting pieces 117 is along the Y-axis direction.

[0041] It can be seen that the middle structural plate 112, which is part of the Y-axis spring parallelogram assembly 1120, is also part of the X-axis spring parallelogram.

[0042] It can be understood that the Y-axis spring parallelogram assembly 1120 includes a second space, in which a displacement sensor and an actuator 115 for detecting displacement in the Y-axis direction are arranged. The displacement sensor and the actuator 115 are the same as the displacement sensor and the actuator 115 in the X-axis spring parallelogram assembly 110.

[0043] The main body 100 further includes a Z-axis spring parallelogram assembly 130, which is limited to elastically move along the Z-axis direction. In this embodiment, the main components of the Z-axis spring parallelogram assembly 130 include a left structural plate 131, a Z-axis upper plate 133, a right structural plate 132 and a Z-axis lower plate 134. Similarly, the left structural plate 131 and the Z-axis upper plate 133, the Z-axis upper plate 133 and the right structural plate 132, and the right structural plate 134 are connected. Leaf springs 116 are arranged between the left structural plate 131 and the Z-axis lower plate 134 and between the Z-axis lower plate 134 and the left structural plate 131. The leaf springs 116 are configured to be elastically deformed along the Z-axis direction. Meanwhile, connecting pieces 117 are arranged between the left structural plate 131 and the Z-axis upper plate 133, between the Z-axis upper plate 133 and the right structural plate 132, between the right structural plate 132 and the Z-axis lower plate 134, and between the Z-axis lower plate 134 and the left structural plate 131. The length directions of the connecting pieces 117 are along the Z-axis direction.

[0044] Furthermore, the Z-axis spring parallelogram assembly 130 includes a accommodating space 1300, and the X-axis spring parallelogram assembly 110 and the Y-axis spring parallelogram assembly 1120 are accommodated in the accommodating space 1300, thereby making the structure of the entire probe more compact. More specifically, the Z-axis upper plate 133 is located on the upper side of the upper structural plate 122, the left structural plate 131 is located on the left side of the X-axis left plate 113, the right structural plate 132 is located on the right side of the X-axis right plate 114, and the Z-axis lower plate 134 is located on the lower side of the lower structural plate 111, so that the accommodating space 1300 formed by the left structural plate 131, the Z-axis upper plate 133, the right structural plate 132 and the Z-axis lower plate 134 can accommodate the X-axis spring parallelogram assembly 110 and the Y-axis spring parallelogram assembly 1120.

[0045] Furthermore, the right structural plate 132 and the upper structural plate 122 are integrally formed.

[0046] Furthermore, an upper connecting plate 1311 perpendicular to the left structural plate 131 is provided on the upper side of the left structural plate 131, and a displacement sensor and an actuator 115 are provided between the upper connecting plate 1311 and the upper structural plate 122 to monitor the displacement in the Z-axis direction.

[0047] At the same time, a Z-axis return-to-zero assembly 135 is provided between the upper connecting plate 1311 and the lower structural plate 111 , and is used to keep the Z-axis at the zero position when different probe assemblies 200 are used.

[0048] The above description is only an implementation mode of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A probe, comprising a main body, characterized in that: The main body includes at least one spring parallelogram assembly formed by multiple main components, and between adjacent main components there are leaf springs for allowing the spring parallelogram assembly to elastically move along a limited direction, and between adjacent main components there are also connecting plates arranged along the limited direction and connecting the adjacent main components.

2. The probe according to claim 1, characterized in that The connecting piece is the same as the leaf spring.

3. The probe according to claim 1, characterized in that The leaf spring includes a first base surface, the connecting plate includes a second base surface, the leaf spring includes a first connecting area located between two adjacent main components, the connecting plate includes a second connecting area located between two adjacent main components, the lengths of the first connecting area and the second connecting area are equal, and the projections of the first connecting area and the second connecting area on a plane perpendicular to the first base surface and the second base surface are in a crossed state.

4. The probe according to claim 3, characterized in that The main body includes an X-axis spring parallelogram assembly, and the X-axis spring parallelogram assembly includes a lower structural plate, an X-axis left plate, a middle structural plate and an X-axis right plate. The lower structural plate includes a first end face, and the X-axis left plate includes a second end face. A first pad is also arranged on the outer side of the first end face, and the leaf spring is clamped by the first pad and the first end face, and a second pad is arranged on the outer side of the second end face, and the connecting piece is clamped by the second pad and the second end face.

5. The probe according to claim 4, characterized in that The third pad is also included between the X-axis left plate and the leaf spring, and the fourth pad is also included between the lower structure plate and the connecting plate. The first pad, the second pad, the third pad and the fourth pad are the same.

6. The probe according to claim 3, characterized in that: The X-axis spring parallelogram component is limited to elastic movement along the X-axis direction, and the main body also includes a Y-axis spring parallelogram component and a Z-axis spring parallelogram component. The Y-axis spring parallelogram component is limited to elastic movement along the Y-axis direction, and the Z-axis spring parallelogram component is limited to elastic movement along the Z-axis direction. The Z-axis spring parallelogram component includes a accommodating space, and the X-axis spring parallelogram component and the Y-axis spring parallelogram component are accommodated in the accommodating space.

7. The probe according to claim 6, characterized in that The Y-axis spring parallelogram assembly includes a middle structural plate, a Y-axis left plate, an upper structural plate and a Y-axis right plate. The main components of the Z-axis spring parallelogram assembly include a left structural plate, a Z-axis upper plate, a right structural plate and a Z-axis lower plate. The Z-axis upper plate is located on the upper side of the upper structural plate, the left structural plate is located on the left side of the X-axis left plate, the right structural plate is located on the right side of the X-axis right plate, and the Z-axis lower plate is located on the lower side of the lower structural plate. At the same time, the upper structural plate and the right structural plate are integrally formed.

8. The probe according to claim 7, characterized in that An upper connecting plate perpendicular to the left structural plate is also arranged on the upper side of the left structural plate, and a Z-axis zero return component is arranged between the upper connecting plate and the lower structural plate.

9. The probe according to claim 3, characterized in that: The leaf springs and connecting pieces arranged on adjacent main components are arranged in pairs.

10. The probe according to claim 4, characterized in that The main body also includes a probe assembly, and the probe assembly is connected to the lower structure plate.

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