Fine adjustment device for fixing probe card

Abstract

The invention relates to the technical field of probe cards, in particular to a probe card fixing fine adjustment device which comprises a workbench, a fine adjustment structure is arranged in an inner cavity of the workbench and comprises an electric telescopic rod fixedly connected with the center of the bottom of the inner cavity of the workbench, and the output end of the electric telescopic rod is fixedly connected with a transmission plate. The surface of the output end of the electric telescopic rod is slidably connected with a fixing plate, the two sides of the fixing plate are both fixedly connected with the workbench, the two sides of the fixing plate are both rotationally connected with two first inclined rods, and one side of each first inclined rod is rotationally connected with a second inclined rod. The device has the advantages of automatic fixation and multi-direction adjustment, the probe card can be automatically fixed through the arranged fixing structure, the probe card can be rapidly and accurately fixed to the testing equipment, manual operation is not needed, the process does not need to depend on a traditional screw locking mode, and the labor intensity of workers is reduced. Therefore, the defects possibly caused by manual operation or improper screw fastening are effectively avoided.

Description

Technical Field

[0001] The invention relates to the technical field of probe cards, in particular to a probe card fixing and fine-tuning device. Background Art

[0002] The probe card is mainly used to connect chip pins and standard instruments. It is the core part of wafer-level chip automatic testing. In semiconductor testing, the probe card can realize fast, accurate and reliable testing of semiconductor devices, helping to produce higher quality semiconductor products. At the same time, the probe card can also realize automated testing, thereby greatly improving test efficiency and accuracy.

[0003] During the processing and testing of the probe card, it is usually necessary to set up a fixed fine-tuning device to ensure that the probe card can be stably fixed on the processing equipment, while allowing slight adjustments to the position, angle or height of the probe card to meet the requirements of processing precision and test accuracy.

[0004] However, most of the existing probe card fixing and fine-tuning devices do not have the function of multi-directional adjustment. They can only achieve limited adjustment in one or two directions, and cannot freely move the probe card in three-dimensional space to achieve the best test position. When the adjustment cannot be made on the X-axis (horizontal direction), the probe card cannot be accurately aligned with the test point, resulting in deviation in the test results. Similarly, if the adjustment cannot be made on the Y-axis (another horizontal direction perpendicular to the X-axis), the alignment between the probe card and the test equipment will also be affected. The lack of adjustment on the Z-axis (vertical direction) leads to uneven contact pressure between the probe card and the chip surface, which in turn The accuracy and reliability of the test are affected, and the probe card is mostly fixed by locking screws to fix the probe card firmly on the base. Although the stability of the probe card is ensured to a certain extent, in the process of tightening the locking screws, if the force is improper or the screws and the screw holes are not tightly matched, the surface of the probe card or the base will be scratched or damaged. This damage not only affects the appearance of the probe card, but may also affect its test performance. In addition, the locking screws will be affected by factors such as oxidation, corrosion or wear during use, resulting in performance degradation or failure, which requires regular replacement of screws or maintenance, thereby increasing maintenance costs. Summary of the invention

[0005] The purpose of the present invention is to provide a probe card fixing and fine-tuning device, which has the advantages of automatic fixing and multi-directional adjustment, and solves the problems raised by the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a probe card fixing and fine-tuning device, comprising: a workbench, wherein the inner cavity of the workbench is provided with a fine-tuning structure.

[0007] Material toggling mechanism, its both sides respectively have the support of the support frame, and the support frame has the support of the upper and lower frames movable end contact, and the movable frame has the support frame of being directly movable. The top of the pulley is connected to the top of the horizontal moving block and is fixedly connected to a transmission gear plate, and the transmission gear plate is meshed with the transmission gear. The top of the transmission gear plate is fixedly connected to a longitudinal moving plate, and the bottom of the longitudinal moving plate is slidably connected to the horizontal moving block, and one side of the inner cavity of the longitudinal moving plate is fixedly connected to a motor three, and the output shaft of the motor three is fixedly connected to a driving gear, and the inner cavity of the longitudinal moving plate is rotatably connected to a driven gear, and the driving gear is meshed with the driven gear.

[0008] The top end of the driven gear penetrates to the top of the longitudinal moving plate and is fixedly connected to a probe card platform. Both sides of the probe card platform are provided with fixed structures, and a probe card is provided on the top of the probe card platform.

[0009] The fixed structure includes a box body fixedly connected to the probe card platform, a cylinder is fixedly connected to one side of the box body, an output end of the cylinder passes through the inner cavity of the box body and is fixedly connected to a movable plate, an inclined plate is fixedly connected to one side of the movable plate, a lifting rod is slidably connected to the surface of the inclined plate, the top end of the lifting rod passes through the top of the box body and is fixedly connected to a fixed block, and the fixed block is located at the top of the probe card.

[0010] Furthermore, as a preferred embodiment of the present invention, guide rods are fixedly connected to both sides of the bottom of the lifting plate, the bottom ends of the guide rods penetrate to the bottom of the transmission plate, and the surfaces of the transmission plate and the fixed plate are provided with sliding holes that are compatible with the guide rods.

[0011] Furthermore, as a preferred embodiment of the present invention, positioning blocks are fixedly connected to both sides of the threaded block, and positioning grooves adapted to the positioning blocks are provided on both sides of the inner cavity of the lifting plate.

[0012] Furthermore, as a preferred embodiment of the present invention, a connecting groove adapted to the lifting plate is provided at the bottom of the lateral moving block.

[0013] Furthermore, as a preferred embodiment of the present invention, both sides of the top of the lateral moving block are fixedly connected with transmission rods, both sides of the inner cavity of the longitudinal moving plate are slidably connected to the transmission rods, and both sides of the transmission tooth plate are slidably connected to the transmission rods.

[0014] Furthermore, as a preferred embodiment of the present invention, one side of the lifting rod is provided with an inclined groove matched with the inclined plate.

[0015] Furthermore, as a preferred embodiment of the present invention, a slider is fixedly connected to one side of the movable plate, and a slide groove matched with the slider is provided on one side of the inner cavity of the box body.

[0016] Furthermore, as a preferred embodiment of the present invention, a scale ring is fixedly connected to the top of the longitudinal movable plate, the card probe platform is located in the inner cavity of the scale ring, and the top of the scale ring is slidably connected to the box.

[0017] The working principle and use process of the present invention:

[0018] Step 1: After the user places the probe card on the top of the probe card platform, the cylinder is turned on. The output end of the cylinder pulls the movable plate to move to one side, and the movable plate drives the inclined plate to move to one side. The inclined plate uses its shape characteristics to drive the lifting rod to move downward. The lifting rod drives the fixed block to move downward until it contacts the probe card, and then the cylinder is closed, thereby completing the function of fixing the probe card to the probe card platform;

[0019] Step 2: When the user adjusts the height of the probe card as needed, the electric telescopic rod is turned on, and the output end of the electric telescopic rod pushes the transmission plate to move upward, and the transmission plate pulls the two inclined rods 2 on both sides to rotate at the same time, and the inclined rod 2 pulls the two inclined rods 1 and 2 to move relative to each other while rotating, and the lifting plate is driven to rise under the driving force of the inclined rods 1, 2 and 3, and the lifting plate drives the longitudinal moving plate to rise through the transverse moving block, and the longitudinal moving plate drives the probe card to rise through the probe card platform. When it is raised to a suitable position, the electric telescopic rod can be closed, thereby completing the purpose of adjusting the height of the probe card;

[0020] Step three: When the user needs to move the position of the probe card horizontally, the motor 1 is turned on, the output shaft of the motor 1 drives the threaded rod to rotate, the threaded rod drives the threaded block to move horizontally, the threaded block drives the horizontal moving block to move horizontally through the linkage plate, and the horizontal moving block drives the probe card platform to move horizontally through the longitudinal moving plate, thereby achieving the purpose of driving the probe card to move horizontally through the probe card platform;

[0021] Step 4: When the user needs to move the position of the probe card longitudinally and horizontally, the motor 2 is turned on, the output shaft of the motor 2 drives the pulley 1 to rotate, the pulley 1 drives the pulley 2 to rotate through the belt, the pulley 2 drives the transmission gear to rotate, and the transmission gear is meshed with the transmission tooth plate, and then the transmission gear drives the transmission tooth plate to move longitudinally and horizontally on the top of the transverse moving block, the transmission tooth plate drives the probe card platform to move longitudinally and horizontally through the longitudinal moving plate, and the probe card platform drives the probe card to move longitudinally and horizontally. When it moves to the appropriate position, the motor 2 can be turned off, thereby completing the purpose of longitudinally and horizontally moving the probe card;

[0022] Step five: When the user needs to rotate the probe card, turn on motor three, the output shaft of motor three drives the active gear to rotate, the active gear drives the driven gear to rotate, and the driven gear drives the probe card to rotate through the probe card platform. Since the box and the probe card platform are fixedly connected, the probe card platform can drive the fixed structure to rotate while rotating, ensuring that the fixed block fixes the probe card when the probe card platform drives the probe card to rotate.

[0023] Beneficial effects. The technical solution of the present application has the following technical effects: the present invention has the advantages of automatic fixation and multi-directional adjustment. Through the set fixing structure, the probe card can be automatically fixed, and the probe card can be quickly and accurately fixed on the test equipment without manual operation. This process does not need to rely on the traditional locking screw method, thereby effectively avoiding the disadvantages that may be caused by manual operation or improper screw tightening, such as the cumbersomeness of installation and disassembly, potential damage to the probe card or the base, limitation of adjustment accuracy and increase in maintenance costs, etc. Through the set fine-tuning structure, it can be flexibly and accurately adjusted in multiple directions such as X, Y, and Z axes to meet the requirements of the probe card position in different test scenarios, which not only improves the accuracy and reliability of the test, but also significantly enhances its adaptability and flexibility, and can easily cope with various complex and changeable test requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 It is a partial three-dimensional schematic diagram of the fine-tuning structure of the present invention;

[0027] Figure 3 It is a three-dimensional schematic diagram of the electric telescopic rod and the transmission plate of the present invention;

[0028] Figure 4 It is a partial cross-sectional stereoscopic schematic diagram of the fine-tuning structure of the present invention;

[0029] Figure 5 It is a schematic diagram of a partial cross section of the fine-tuning structure of the present invention when viewed from above;

[0030] Figure 6 It is a bottom-up stereoscopic schematic diagram of a local structure of the present invention;

[0031] Figure 7 It is a schematic diagram of a split three-dimensional view of the fixed structure of the present invention.

[0032] In the figure, the meanings of the reference numerals are as follows: 1, workbench; 2, fine-tuning structure; 21, electric telescopic rod; 22, transmission plate; 23, fixed plate; 24, inclined rod 1; 25, inclined rod 2; 26, inclined rod 3; 27, connecting plate; 28, lifting plate; 29, motor 1; 210, threaded rod; 211, threaded block; 212, linkage plate; 213, lateral moving block; 214, motor 2; 215, pulley 1; 216, pulley 2; 217, transmission gear; 21 8. Transmission gear plate; 219. Longitudinal moving plate; 220. Motor three; 221. Driving gear; 222. Driven gear; 223. Guide rod; 224. Positioning block; 225. Positioning groove; 226. Connecting groove; 227. Transmission rod; 3. Probe card platform; 4. Fixed structure; 41. Box; 42. Cylinder; 43. Movable plate; 44. Inclined plate; 45. Lifting rod; 46. Fixed block; 47. Inclined groove; 48. Slider; 49. Slide; 5. Probe card; 6. Scale ring. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. In order to better understand the technical content of the present invention, specific embodiments are cited and explained in conjunction with the drawings as follows. Various aspects of the present invention are described in this disclosure with reference to the drawings, in which many illustrative embodiments are shown. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0034] As attached Figure 1 To Attachment Figure 7 As shown: This embodiment provides a probe card fixing and fine-tuning device, comprising: a workbench 1, and an inner cavity of the workbench 1 is provided with a fine-tuning structure 2.

[0035] The fine-tuning structure 2 includes an electric telescopic rod 21 fixedly connected to the center of the inner cavity of the workbench 1. The output end of the electric telescopic rod 21 is fixedly connected to the transmission plate 22. The surface of the output end of the electric telescopic rod 21 is slidably connected to the fixing plate 23. Both sides of the fixing plate 23 are fixedly connected to the workbench 1. Both sides of the fixing plate 23 are rotatably connected to the two oblique rods 24. One side of the oblique rod 24 is rotatably connected to the oblique rod 25. The intersection of the two oblique rods 25 is rotatably connected to the transmission plate 22 through the rotation shaft. One end of the oblique rod 25 is rotatably connected to the oblique rod 3 26, and each two oblique rods 3 3 One side of 26 is rotatably connected to a connecting plate 27, the top of the two connecting plates 27 is fixedly connected to a lift plate 28, and one side of the inner cavity of the lift plate 28 is fixedly connected to a motor 29, the output shaft of the motor 29 is fixedly connected to a threaded rod 210, and one end of the threaded rod 210 is rotatably connected to a lift plate 28, the surface of the threaded rod 210 is threaded to a threaded block 211, and the top of the threaded block 211 is fixedly connected to a connecting plate 212, and the top of the connecting plate 212 penetrates to the top of the lift plate 28 and is fixedly connected to a horizontal moving block 213, and the bottom of the horizontal moving block 213 is opened. The connecting groove 226 is adapted to the lifting plate 28. The top of the lifting plate 28 is provided with a guide groove adapted to the connecting plate 212. The surface of the lateral moving block 213 is slidably connected to the lifting plate 28. One side of the inner cavity of the lateral moving block 213 is fixedly connected to the motor two 214. The output shaft of the motor two 214 is fixedly connected to the pulley one 215. The inner cavity of the lateral moving block 213 is rotatably connected to the pulley two 216. The pulley one 215 and the pulley two 216 are rotatably connected to the belt. The top end of the pulley two 216 penetrates to the top of the lateral moving block 213 and is fixedly connected to the The transmission gear 217 is slidably connected to the top of the lateral moving block 213 with a transmission tooth plate 218. The transmission tooth plate 218 is meshed with the transmission tooth plate 217. The top of the transmission tooth plate 218 is fixedly connected to the longitudinal moving plate 219. The bottom of the longitudinal moving plate 219 is slidly connected to the transverse moving block 213. One side of the inner cavity of the longitudinal moving plate 219 is fixedly connected to the motor three 220. The output shaft of the motor three 220 is fixedly connected to the driving gear 221. The inner cavity of the longitudinal moving plate 219 is rotatably connected to the driven gear 222. The driving gear 221 is meshed with the driven gear 222.

[0036] The top end of the driven gear 222 passes through the top of the longitudinal moving plate 219 and is fixedly connected to the card probe platform 3 . A fixing structure 4 is provided on both sides of the card probe platform 3 . A card probe 5 is provided on the top of the card probe platform 3 .

[0037] The fixed structure 4 includes a box body 41 fixedly connected to the probe card platform 3, a cylinder 42 is fixedly connected to one side of the box body 41, the output end of the cylinder 42 passes through the inner cavity of the box body 41 and is fixedly connected to a movable plate 43, a side of the movable plate 43 is fixedly connected to an inclined plate 44, a lifting rod 45 is slidably connected to the surface of the inclined plate 44, a side of the lifting rod 45 is provided with an inclined groove 47 adapted to the inclined plate 44, the top end of the lifting rod 45 passes through the top of the box body 41 and is fixedly connected to a fixed block 46, and the fixed block 46 is located at the top of the probe card 5.

[0038] Specifically, guide rods 223 are fixedly connected to both sides of the bottom of the lifting plate 28 , and the bottom ends of the guide rods 223 penetrate to the bottom of the transmission plate 22 . The surfaces of the transmission plate 22 and the fixed plate 23 are provided with sliding holes adapted to the guide rods 223 .

[0039] In this embodiment, the guide rod 223 is provided to guide the lifting plate 28, thereby ensuring the stability of the lifting plate 28 when it is lifted or lowered.

[0040] Specifically, positioning blocks 224 are fixedly connected to both sides of the threaded block 211 , and positioning grooves 225 matched with the positioning blocks 224 are formed on both sides of the inner cavity of the lifting plate 28 .

[0041] In this embodiment, the positioning block 224 and the positioning groove 225 are used in coordination to guide and limit the threaded block 211 , thereby ensuring the horizontal movement trajectory of the threaded block 211 .

[0042] Specifically, both sides of the top of the transverse moving block 213 are fixedly connected with a transmission rod 227 , both sides of the inner cavity of the longitudinal moving plate 219 are slidably connected to the transmission rod 227 , and both sides of the transmission tooth plate 218 are slidably connected to the transmission rod 227 .

[0043] In this embodiment, the transmission rod 227 is provided to transmit and guide the longitudinal moving plate 219 and the transmission gear 217, thereby ensuring the stability of the transmission gear plate 218 and the longitudinal moving plate 219 during longitudinal movement.

[0044] Specifically, a slider 48 is fixedly connected to one side of the movable plate 43 , and a slide groove 49 matched with the slider 48 is provided on one side of the inner cavity of the box body 41 .

[0045] In this embodiment, the slider 48 and the slide groove 49 are used in coordination to guide the movable plate 43 , thereby ensuring the stability of the movable plate 43 when moving.

[0046] Specifically, the top of the longitudinal moving plate 219 is fixedly connected with a scale ring 6 , the card probe platform 3 is located in the inner cavity of the scale ring 6 , and the top of the scale ring 6 is slidably connected to the box body 41 .

[0047] In this embodiment, the scale ring 6 is provided to determine the rotation scale of the card probe platform 3, which is convenient for the user to observe.

[0048] The working principle and use process of the present invention:

[0049] Step 1: After the user places the probe card 5 on the top of the probe card platform 3, the cylinder 42 is turned on. The output end of the cylinder 42 pulls the movable plate 43 to move to one side, and the movable plate 43 drives the inclined plate 44 to move to one side. The inclined plate 44 drives the lifting rod 45 to move downward by its shape characteristics. The lifting rod 45 drives the fixing block 46 to move downward until it contacts the probe card 5, and then the cylinder 42 is closed, thereby completing the function of fixing the probe card 5 to the probe card platform 3.

[0050] Step 2: When the user adjusts the height of the probe card 5 as needed, the electric telescopic rod 21 is turned on, and the output end of the electric telescopic rod 21 pushes the transmission plate 22 to move upward, and the transmission plate 22 pulls the two inclined rods 25 on both sides to rotate at the same time, and the inclined rod 25 pulls the two inclined rods 1 24 and the inclined rod 2 25 to move relative to each other while rotating, and the lifting plate 28 is driven to rise under the driving force of the inclined rods 1 24, 25 and 3 26, and the lifting plate 28 drives the longitudinal moving plate 219 to rise through the lateral moving block 213, and the longitudinal moving plate 219 drives the probe card 5 to rise through the probe card platform 3. When it is raised to a suitable position, the electric telescopic rod 21 can be closed, thereby completing the purpose of adjusting the height of the probe card 5;

[0051] Step three: When the user needs to move the position of the probe card 5 horizontally, the motor 29 is turned on, and the output shaft of the motor 29 drives the threaded rod 210 to rotate, and the threaded rod 210 drives the threaded block 211 to move horizontally, and the threaded block 211 drives the horizontal moving block 213 to move horizontally through the linkage plate 212, and the horizontal moving block 213 drives the probe card stage 3 to move horizontally through the longitudinal moving plate 219, thereby achieving the purpose of driving the probe card 5 to move horizontally through the probe card stage 3;

[0052] Step 4: When the user needs to move the position of the probe card 5 longitudinally and horizontally, the motor 214 is turned on, and the output shaft of the motor 214 drives the pulley 1 215 to rotate, and the pulley 1 215 drives the pulley 2 216 to rotate through the belt, and the pulley 216 drives the transmission gear 217 to rotate. Since the transmission gear 217 is meshed with the transmission gear plate 218, the transmission gear 217 drives the transmission gear plate 218 to move longitudinally and horizontally on the top of the transverse moving block 213, and the transmission gear plate 218 drives the probe card platform 3 to move longitudinally and horizontally through the longitudinal moving plate 219, and the probe card platform 3 drives the probe card 5 to move longitudinally and horizontally. When it moves to the appropriate position, the motor 214 can be turned off, thereby completing the purpose of moving the probe card 5 longitudinally and horizontally;

[0053] Step five: When the user needs to rotate the probe card 5, the motor three 220 is turned on, and the output shaft of the motor three 220 drives the driving gear 221 to rotate, and the driving gear 221 drives the driven gear 222 to rotate, and the driven gear 222 drives the probe card 5 to rotate through the probe card platform 3. Since the box body 41 and the probe card platform 3 are fixedly connected, the probe card platform 3 can drive the fixed structure 4 to rotate while rotating, ensuring that when the probe card platform 3 drives the probe card 5 to rotate, the fixed block 46 fixes the probe card 5.

[0054] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0055] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A probe card fixing and fine-tuning device, comprising: A workbench (1), characterized in that: the inner cavity of the workbench (1) is provided with a fine-tuning structure (2); The fine-tuning structure (2) comprises an electric telescopic rod (21) fixedly connected to the center of the bottom of the inner cavity of the workbench (1); the output end of the electric telescopic rod (21) is fixedly connected to a transmission plate (22); the surface of the output end of the electric telescopic rod (21) is slidably connected to a fixed plate (23); both sides of the fixed plate (23) are fixedly connected to the workbench (1); both sides of the fixed plate (23) are rotatably connected to two inclined rods (24); one side of the inclined rod (24) is rotatably connected to an inclined rod (25); the intersection of the two inclined rods (25) is rotatably connected to the transmission plate (22) via a rotating shaft; one end of the inclined rod (25) is rotatably connected to an inclined rod (3) (24); 6), one side of each of the two inclined rods (26) is rotatably connected to a connecting plate (27), the tops of the two connecting plates (27) are fixedly connected to a lifting plate (28), one side of the inner cavity of the lifting plate (28) is fixedly connected to a motor (29), the output shaft of the motor (29) is fixedly connected to a threaded rod (210), one end of the threaded rod (210) is rotatably connected to the lifting plate (28), the surface of the threaded rod (210) is threadedly connected to a threaded block (211), the top of the threaded block (211) is fixedly connected to a linkage plate (212), the top of the linkage plate (212) penetrates to the top of the lifting plate (28) and is fixedly connected to a lateral moving block (21 3), a guide groove matched with the linkage plate (212) is provided on the top of the lifting plate (28), the surface of the transverse moving block (213) is slidably connected to the lifting plate (28), a motor 2 (214) is fixedly connected to one side of the inner cavity of the transverse moving block (213), the output shaft of the motor 2 (214) is fixedly connected to a pulley 1 (215), the inner cavity of the transverse moving block (213) is rotatably connected to a pulley 2 (216), the pulley 1 (215) and the pulley 2 (216) are rotatably connected via a belt, the top end of the pulley 2 (216) penetrates to the top of the transverse moving block (213) and is fixedly connected to a transmission gear (217), the The top of the transverse moving block (213) is slidably connected to a transmission tooth plate (218), and the transmission tooth plate (218) is meshed with a transmission gear (217). The top of the transmission tooth plate (218) is fixedly connected to a longitudinal moving plate (219), and the bottom of the longitudinal moving plate (219) is slidably connected to the transverse moving block (213). One side of the inner cavity of the longitudinal moving plate (219) is fixedly connected to a motor three (220), and the output shaft of the motor three (220) is fixedly connected to a driving gear (221). The inner cavity of the longitudinal moving plate (219) is rotatably connected to a driven gear (222), and the driving gear (221) is meshed with the driven gear (222); The top end of the driven gear (222) penetrates through the top of the longitudinal moving plate (219) and is fixedly connected to a probe card platform (3), both sides of the probe card platform (3) are provided with fixed structures (4), and a probe card (5) is provided on the top of the probe card platform (3); The fixed structure (4) comprises a box (41) fixedly connected to the probe card platform (3); a cylinder (42) is fixedly connected to one side of the box (41); an output end of the cylinder (42) penetrates into the inner cavity of the box (41) and is fixedly connected to a movable plate (43); a slanted plate (44) is fixedly connected to one side of the movable plate (43); a lifting rod (45) is slidably connected to the surface of the slanted plate (44); a top end of the lifting rod (45) penetrates into the top of the box (41) and is fixedly connected to a fixed block (46); and the fixed block (46) is located at the top of the probe card (5).

2. A probe card fixing and fine-tuning device according to claim 1, characterized in that: Guide rods (223) are fixedly connected to both sides of the bottom of the lifting plate (28), the bottom ends of the guide rods (223) penetrate the bottom of the transmission plate (22), and the surfaces of the transmission plate (22) and the fixed plate (23) are provided with sliding holes that are compatible with the guide rods (223).

3. The probe card fixing and fine-tuning device according to claim 1, characterized in that: Positioning blocks (224) are fixedly connected to both sides of the threaded block (211), and positioning grooves (225) matching the positioning blocks (224) are provided on both sides of the inner cavity of the lifting plate (28).

4. The probe card fixing and fine-tuning device according to claim 1, characterized in that: The bottom of the transverse moving block (213) is provided with a connecting groove (226) adapted to the lifting plate (28).

5. The probe card fixing and fine-tuning device according to claim 1, characterized in that: Both sides of the top of the transverse moving block (213) are fixedly connected with a transmission rod (227), both sides of the inner cavity of the longitudinal moving plate (219) are slidably connected to the transmission rod (227), and both sides of the transmission tooth plate (218) are slidably connected to the transmission rod (227).

6. The probe card fixing and fine-tuning device according to claim 1, characterized in that: An inclined groove (47) adapted to the inclined plate (44) is provided on one side of the lifting rod (45).

7. The probe card fixing and fine-tuning device according to claim 1, characterized in that: A sliding block (48) is fixedly connected to one side of the movable plate (43), and a sliding groove (49) adapted to the sliding block (48) is provided on one side of the inner cavity of the box body (41).

8. The probe card fixing and fine-tuning device according to claim 1, characterized in that: The top of the longitudinal movable plate (219) is fixedly connected to a scale ring (6), the card probe platform (3) is located in the inner cavity of the scale ring (6), and the top of the scale ring (6) is slidably connected to the box (41).

9. The probe card fixing and fine-tuning device according to claim 1, characterized in that: The method comprises the following steps: Step 1: After the user places the probe card (5) on the top of the probe card platform (3), the cylinder (42) is turned on, and the output end of the cylinder (42) pulls the movable plate (43) to move to one side, and the movable plate (43) drives the inclined plate (44) to move to one side, and the inclined plate (44) drives the lifting rod (45) to move downward by using its shape characteristics, and the lifting rod (45) drives the fixed block (46) to move downward until it contacts the probe card (5), and then the cylinder (42) is closed, thereby completing the function of fixing the probe card (5) to the probe card platform (3); Step 2: When the user adjusts the height of the probe card (5) as required, the electric telescopic rod (21) is turned on, and the output end of the electric telescopic rod (21) pushes the transmission plate (22) to move upward, and the transmission plate (22) pulls the two inclined rods (25) on both sides to rotate simultaneously, and the inclined rods (25) pull the two inclined rods (24) and the inclined rods (25) to move relative to each other while rotating, and the lifting plate (28) is driven to rise under the driving force of the inclined rods (24), (25) and (26), and the lifting plate (28) drives the longitudinal moving plate (219) to rise through the transverse moving block (213), and the longitudinal moving plate (219) drives the probe card (5) to rise through the probe card platform (3), and when it rises to a suitable position, the electric telescopic rod (21) is closed, thereby completing the purpose of adjusting the height of the probe card (5); Step 3: When the user needs to move the position of the probe card (5) horizontally, the motor 1 (29) is turned on, and the output shaft of the motor 1 (29) drives the threaded rod (210) to rotate, and the threaded rod (210) drives the threaded block (211) to move horizontally, and the threaded block (211) drives the horizontal moving block (213) to move horizontally through the linkage plate (212), and the horizontal moving block (213) drives the probe card platform (3) to move horizontally through the longitudinal moving plate (219), thereby achieving the purpose of driving the probe card (5) to move horizontally through the probe card platform (3); Step 4: When the user needs to move the position of the probe card (5) longitudinally and horizontally, the motor 2 (214) is turned on, and the output shaft of the motor 2 (214) drives the pulley 1 (215) to rotate, and the pulley 1 (215) drives the pulley 2 (216) to rotate through the belt, and the pulley 2 (216) drives the transmission gear (217) to rotate. Since the transmission gear (217) is meshed with the transmission tooth plate (218), the transmission gear (217) drives the transmission tooth plate (218) to move longitudinally and horizontally on the top of the transverse moving block (213), and the transmission tooth plate (218) drives the probe card platform (3) to move longitudinally and horizontally through the longitudinal moving plate (219), and the probe card platform (3) drives the probe card (5) to move longitudinally and horizontally. When it moves to a suitable position, the motor 2 (214) can be turned off, thereby completing the purpose of moving the probe card (5) longitudinally and horizontally; Step 5: When the user needs to rotate the probe card (5), the motor 3 (220) is turned on, and the output shaft of the motor 3 (220) drives the driving gear (221) to rotate, and the driving gear (221) drives the driven gear (222) to rotate, and the driven gear (222) drives the probe card (5) to rotate through the probe card platform (3). Since the box (41) and the probe card platform (3) are fixedly connected, the probe card platform (3) can drive the fixed structure (4) to rotate while rotating, ensuring that the fixed block (46) fixes the probe card (5) when the probe card platform (3) drives the probe card (5) to rotate.

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